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CN109571159B - A kind of free abrasive micro ultrasonic processing device and feed adjustment method - Google Patents

A kind of free abrasive micro ultrasonic processing device and feed adjustment method Download PDF

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Publication number
CN109571159B
CN109571159B CN201910000470.0A CN201910000470A CN109571159B CN 109571159 B CN109571159 B CN 109571159B CN 201910000470 A CN201910000470 A CN 201910000470A CN 109571159 B CN109571159 B CN 109571159B
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ultrasonic
micro
vibration system
electrical impedance
equivalent electrical
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CN109571159A (en
Inventor
汪炜
缪兴华
耿其东
丁瑞翔
刘斌
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Nanjing University Of Aeronautics And Astronautics Wuxi Research Institute
Nanjing University of Aeronautics and Astronautics
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Nanjing University Of Aeronautics And Astronautics Wuxi Research Institute
Nanjing University of Aeronautics and Astronautics
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

本发明公开了一种游离磨料微细超声加工装置，包括：XY轴进给装置、底座、主轴立柱、Z轴伺服进给装置、工作槽、微细超声振动系统、待加工工件、超声波发生器和冷却循环系统，工作槽设置于XY轴进给装置上，工作槽内放置待加工工件且其内盛有工作液，微细超声振动系统包括超声换能器、超声变幅杆及微细超声加工工具，微细超声加工工具连接于超声变幅杆的底部，Z轴伺服进给装置设于主轴立柱上，超声换能器设于Z轴伺服进给装置上且与超声变幅杆连接，超声波发生器与超声换能器电连接；所述游离磨料微细超声加工装置还包括用于保持微细超声加工工具温度稳定的冷却系统。本发明具有结构简单、响应速度快、加工稳定性高和加工精度高的特点。

Figure 201910000470

The invention discloses a free abrasive micro ultrasonic processing device, comprising: an XY axis feeding device, a base, a main shaft column, a Z axis servo feeding device, a working groove, a micro ultrasonic vibration system, a workpiece to be processed, an ultrasonic generator and a cooling Circulation system, the working tank is set on the XY axis feeding device, the workpiece to be processed is placed in the working tank and the working fluid is filled in it. The micro ultrasonic vibration system includes ultrasonic transducer, ultrasonic horn and micro ultrasonic machining tools. The ultrasonic machining tool is connected to the bottom of the ultrasonic horn, the Z-axis servo feeding device is installed on the main shaft column, the ultrasonic transducer is installed on the Z-axis servo feeding device and connected to the ultrasonic horn, and the ultrasonic generator is connected to the ultrasonic horn. The transducer is electrically connected; the free abrasive micro ultrasonic machining device further includes a cooling system for keeping the temperature of the micro ultrasonic machining tool stable. The invention has the characteristics of simple structure, fast response speed, high processing stability and high processing precision.

Figure 201910000470

Description

Free abrasive material micro-ultrasonic machining device and feed adjusting method
Technical Field
The invention relates to a free abrasive material micro-ultrasonic machining device and a feed adjusting method, and belongs to the technical field of ultrasound.
Background
Hard and brittle materials such as optical glass, ceramics, silicon carbide and the like have excellent physical, chemical and mechanical properties and are more and more widely applied to the industrial fields of aviation, electronics, automobiles, metallurgy, bioengineering, national defense and the like. Electrochemical machining and electric spark machining are difficult to machine non-conductive materials, laser machining can cause cracks in high-temperature-resistant hard and brittle materials, and ultrasonic machining has proven to be an effective method for forming and machining hard and brittle materials. Ultrasonic machining is a machining method for removing materials by using ultrasonic vibration of a tool, impact, polishing and hydraulic impact of abrasives in a liquid medium with abrasives or dry abrasives and cavitation generated by the impact, polishing and hydraulic impact, or applying ultrasonic frequency vibration to the tool or a workpiece along a certain direction for machining or combining the workpieces by using the ultrasonic vibration. The ultrasonic micromachining technology is an important direction for the development of high precision and miniaturization, and is increasingly widely applied to the field of precision microfabrication.
Constant speed feeding and constant force feeding are two feeding modes commonly used for micro-ultrasonic machining, wherein the former mode is used for machining at a constant feeding speed, and the latter mode is used for machining at a constant machining force. The constant force control feeding system can reduce the fluctuation range of the processing force to a certain extent, improve the processing efficiency and improve the surface performance of a processed workpiece by measuring and comparing the average processing force and assisting various algorithms, but for micro-ultrasonic processing, the processing force is very small in the processing process, the sensitivity requirement of a processing force detection device is very high, the resolution ratio is often required to reach several millinewtons, otherwise, the measurement precision is difficult to guarantee, and the cost is very high. Constant feed is limited by the difference between the feed rate and the material removal rate, making it difficult to ensure process stability. For this reason, a corresponding technical solution needs to be designed for solution.
Disclosure of Invention
The invention provides a free abrasive material micro-ultrasonic machining device and a feed adjusting method, the adjusting method can realize automatic feed control of micro-ultrasonic machining, has the characteristics of simple structure, high response speed, high machining stability and high machining precision, and meets the actual use requirement.
In order to solve the problems, the technical scheme adopted by the invention is as follows:
a free abrasive micro-ultrasonic machining apparatus comprising: the ultrasonic machining device comprises an XY-axis feeding device, a base, a main shaft upright post, a Z-axis servo feeding device, a working groove, a micro ultrasonic vibration system, a workpiece to be machined, an ultrasonic generator and a cooling circulation system, wherein the working groove is formed in the XY-axis feeding device, the workpiece to be machined is placed in the working groove, working liquid is contained in the working groove, the micro ultrasonic vibration system comprises an ultrasonic transducer, an ultrasonic amplitude transformer and a micro ultrasonic machining tool, the micro ultrasonic machining tool is connected to the bottom of the ultrasonic amplitude transformer, the Z-axis servo feeding device is arranged on the main shaft upright post, the ultrasonic transducer is arranged on the Z-axis servo feeding device and connected with the ultrasonic amplitude transformer, and the ultrasonic generator is electrically connected with the ultrasonic transducer;
the free abrasive micro-ultrasonic machining apparatus further includes a cooling system for maintaining the temperature of the micro-ultrasonic machining tool stable.
As an improvement of the technical scheme, the ultrasonic generator is a programmable constant-current ultrasonic power supply which comprises a sampling unit, a processing unit and an execution unit.
As an improvement of the above technical solution, the sampling unit is used for sampling the amplitude and phase of the current and voltage of the micro-ultrasonic vibration system in real time, the processing unit adjusts the current and voltage to be in phase by a frequency tracking algorithm, and then estimates the no-load equivalent electrical impedance and the load equivalent electrical impedance of the micro-ultrasonic vibration system; the no-load equivalent electrical impedance of the micro-ultrasonic vibration system refers to the system equivalent electrical impedance of the micro-ultrasonic vibration system when the workpiece to be processed is not processed, and the method comprises the following steps: the series resonance impedance of the ultrasonic transducer, the equivalent impedance of the ultrasonic amplitude transformer, the equivalent impedance of the micro-ultrasonic processing tool and the like; the load equivalent electrical impedance of the micro-ultrasonic vibration system refers to the system equivalent electrical impedance of the micro-ultrasonic vibration system when a workpiece to be processed is processed, and comprises the no-load equivalent electrical impedance of the micro-ultrasonic vibration system, the equivalent impedance of the workpiece to be processed and working liquid and the like; the execution unit is used for executing a control algorithm.
As an improvement of the above technical solution, the cooling system includes: circulating water cooling and air cooling; the circulating water cooling comprises: the circulating water tank is communicated with the working tank through the circulating pipeline, the circulating pump is connected with the cooling spray head through the circulating pipeline, the cooling spray head is arranged on one side of the micro-ultrasonic machining tool, and the circulating pump sends working liquid in the working tank into the cooling spray head to cool the micro-ultrasonic machining tool; the air cooling comprises the following steps: the ultrasonic transducer comprises an internal air cooling device and an external air cooling device, wherein the internal air cooling device is internally provided in the ultrasonic transducer; the external air cooling includes: the air cooling sprayer is arranged on one side of the micro-ultrasonic machining tool, and the compressed air device provides a high-pressure air cooling air source for the air cooling sprayer to carry out air cooling on the micro-ultrasonic machining tool.
As an improvement of the technical scheme, the ultrasonic transducer is connected with the ultrasonic amplitude transformer through a bolt; the ultrasonic amplitude transformer and the micro-ultrasonic processing tool are connected through a bolt, and in order to ensure the effectiveness and high efficiency of sound wave transmission during connection, a sealing material needs to be coated on the outer side of the bolt.
As an improvement of the above technical solution, the frequency of the excitation signal provided by the ultrasonic generator is the series resonance frequency of the micro-ultrasonic vibration system, the adjustable range of the peak-to-peak value of the working current is 200mA to 1200mA, the maximum effective output power is 100W, and the typical working frequency: 20 kHz-40 kHz.
As an improvement of the technical scheme, the series resonance frequency of the micro-ultrasonic vibration system is 35.43kHz, the no-load equivalent electrical impedance is 65 omega, and the adjustable range of the end face amplitude of the micro-ultrasonic machining tool is 2-15 mu m.
Specifically, the free abrasive material micro-ultrasonic machining feed adjusting method comprises the following steps: before a workpiece to be processed is processed, an ultrasonic generator sampling unit acquires the amplitude and the phase of current and voltage of a micro ultrasonic vibration system according to sampling frequency, an ultrasonic generator processing unit adjusts the current and the voltage to be in the same phase by a frequency tracking algorithm, and then the no-load equivalent electrical impedance value of the micro ultrasonic vibration system is estimated; further, determining a load equivalent electrical impedance initial threshold value required by the micro-ultrasonic vibration system in an initial processing state according to the no-load equivalent electrical impedance value; in the processing process, the processing unit firstly carries out frequency tracking according to data acquired by the sampling unit, then calculates a load equivalent electrical impedance value, the execution unit carries out algorithm comparison on the value and a set equivalent electrical impedance initial threshold value, and adjusts the feeding direction and speed of the micro-ultrasonic processing tool or the output current of the ultrasonic generator according to a comparison result; furthermore, the setting of the equivalent electrical impedance initial threshold value can be adjusted in real time according to the processing requirements in the processing process. The feeding direction and speed of the micro-ultrasonic machining tool are controlled to control the ultrasonic machining gap, and the amplitude of the end face of the tool is controlled by controlling the output current of the ultrasonic generator, so that the purpose of stable machining is achieved.
More specifically, the feeding state of the Z-axis servo feeding device is controlled by a programmable constant-current ultrasonic power supply.
Compared with the prior art, the invention has the following implementation effects: the free abrasive material micro-ultrasonic machining feed adjusting method is suitable for carrying out special-shaped hole machining, forming machining, plane grinding machining, surface modification and the like on a hard and brittle workpiece, and has the following advantages in specific application:
(1) the method has the advantages that the sampling object is an electric signal of a micro ultrasonic vibration system, and compared with the current common sampling modes such as force signal acquisition of a constant force control system, speed signal acquisition of a constant speed control system and the like, the response speed is greatly improved.
(2) The sampling of the electric signals is realized by the programmable constant-current ultrasonic power supply, an additional hardware platform is not required to be constructed, and the machine tool cost and the machine tool complexity are reduced.
(3) The programmable constant-current ultrasonic power supply provides a control signal for the automatic feeding state of the Z axis of the machine tool, so that the full-automatic closed-loop control of the Z axis feeding of the machine tool is realized, and the stability of the machining process is improved.
Drawings
Fig. 1 is a schematic structural view of a free abrasive micro-ultrasonic machining apparatus according to embodiment 1 of the present invention;
fig. 2 is a schematic diagram of a free abrasive material micro-ultrasonic machining apparatus according to embodiment 1 of the present invention for machining a special-shaped hole;
fig. 3 is a schematic view of a machining principle of a free abrasive micro-ultrasonic machining apparatus according to embodiment 1 of the present invention for performing a surface grinding process.
Fig. 4 is a logic timing diagram of a feeding state control of the programmable constant-current ultrasonic power supply control Z-axis automatic feeding device according to embodiment 1 of the present invention.
Detailed Description
The present invention will be described with reference to specific examples.
Please refer to fig. 1: in the embodiment, the free abrasive material micro-ultrasonic machining device comprises an XY-axis feeding device 1, a working groove 2, a main shaft upright post 3, a Z-axis servo feeding device 5, a base 6, a micro-ultrasonic vibration system, a workpiece 7 to be machined, an ultrasonic generator 10 and a cooling circulation system, wherein the working groove 2 is arranged on the XY-axis feeding device 1 through the base 6, the workpiece 7 to be machined is placed in the working groove 2, and a working liquid is contained in the working groove 2, and the micro-ultrasonic vibration system comprises an ultrasonic transducer 9, an ultrasonic amplitude transformer 8 and a micro-ultrasonic machining tool 4; the micro-ultrasonic processing tool 4 is connected to the bottom of the ultrasonic amplitude transformer 8 through a bolt, the Z-axis servo feeding device 5 is arranged on the main shaft upright post 3, the ultrasonic transducer 9 is arranged on the Z-axis servo feeding device 5 and connected with the ultrasonic amplitude transformer 8, the ultrasonic generator 10 is electrically connected with the ultrasonic transducer 9, the ultrasonic generator 10 converts commercial power into a high-frequency alternating current signal matched with the ultrasonic transducer 9 to excite the micro ultrasonic vibration system to work, the ultrasonic transducer 9, the ultrasonic amplitude transformer 8 and the micro-ultrasonic processing tool 4 form a micro-ultrasonic vibration system, the ultrasonic transducer 9 converts electric energy into mechanical energy, the amplitude is amplified and the energy is gathered by the ultrasonic horn 8, and the abrasive grains and the working fluid are made to impact the workpiece with a certain energy by the vibration of the end face of the micro-ultrasonic machining tool 4.
The ultrasonic generator 10 adopts a programmable constant-current ultrasonic power supply, the output frequency of the provided excitation signal is the series resonance frequency of the micro ultrasonic vibration system, the adjustable range of the peak value of the working current is 200 mA-1200 mA, the error is within 2%, the maximum effective output power is 100W, and the typical working frequency is as follows: 20 kHz-40 kHz; a micro ultrasonic vibration system consisting of an ultrasonic transducer 9, an ultrasonic amplitude transformer 8 and a micro ultrasonic processing tool 4 is arranged on a Z-axis servo feeding device 5, the series resonance frequency of the micro ultrasonic vibration system is 35.43kHz, the no-load equivalent electrical impedance is 65 omega, and the amplitude adjustable range of the end face of the tool is 2-15 mu m; the base material of the processing section of the micro-ultrasonic processing tool 4 is 45 steel, the diameter is 15mm, the tail end of the processing section is provided with an array boss, and the diameter is 0.5-1 mm.
The Z-axis servo feeding device 5 comprises a motor driver, a stepping motor, a screw rod and a workbench, the minimum resolution is 1 mu m, and a DSP module provides a pulse signal of the motor driver.
The superfine ultrasonic machining device of free abrasive still includes the cooling system who is used for keeping superfine ultrasonic machining instrument temperature stable, cooling system adopts the circulating water cooling mode, and it includes circulating water tank 11, circulating pump 12, circulation pipeline 13 and cooling shower nozzle, circulating water tank 11 pass through circulation pipeline 13 with communicate in the working groove 2, circulating pump 12 pass through circulation pipeline 13 with cooling shower nozzle is connected, cooling shower nozzle set up in one side of superfine ultrasonic machining instrument 4, circulating pump 12 carries out the water-cooling to superfine ultrasonic machining instrument 4 in sending into cooling shower nozzle with the working solution in the working groove 2, and the cavitation of water can also accelerate getting rid of material simultaneously, in time with the processing product discharge machining region.
The ultrasonic generator 10 is a programmable constant current ultrasonic power supply and comprises a sampling unit, a processing unit and an execution unit. Specifically, before a workpiece 7 to be processed is processed, a sampling unit of an ultrasonic generator 10 acquires the amplitude and the phase of current and voltage of a micro-ultrasonic vibration system according to sampling frequency, a processing unit of the ultrasonic generator 10 adjusts the current and the voltage to be in the same phase according to a frequency tracking algorithm, then estimates the no-load equivalent electrical impedance value of the micro-ultrasonic vibration system, and further determines the load equivalent electrical impedance initial threshold value required by the micro-ultrasonic vibration system in an initial processing state according to the no-load equivalent electrical impedance value; in the processing process, the processing unit firstly carries out frequency tracking according to data acquired by the sampling unit, then calculates a load equivalent electrical impedance value, the execution unit carries out algorithm comparison on the value and a set equivalent electrical impedance initial threshold value, and adjusts the feeding direction and speed of the micro-ultrasonic processing tool 4 or the output current of the ultrasonic generator 10 according to the comparison result. The feeding direction and speed of the micro-ultrasonic machining tool 4 are controlled to control the ultrasonic machining gap, and the output current of the ultrasonic generator 10 is controlled to control the amplitude of the end face of the tool, so that the purpose of stable machining is achieved.
Please refer to fig. 2: when a workpiece 7 to be processed is subjected to special-shaped hole processing, firstly, the output current of an ultrasonic generator 10 is set, in the hole processing process, the ultrasonic generator 10 collects the current and voltage amplitude and phase of a micro-ultrasonic vibration system according to a set sampling frequency, a processing unit of the ultrasonic generator adjusts the current and voltage to be in phase according to a frequency tracking algorithm, then, the no-load equivalent electrical impedance value of the micro-ultrasonic vibration system is estimated, and a load equivalent electrical impedance initial threshold required in the micro-ultrasonic processing is set according to the no-load equivalent electrical impedance value; during processing, the processing unit firstly carries out frequency tracking according to data acquired by the sampling unit, then calculates a load equivalent electrical impedance value, and the execution unit carries out algorithm comparison on the value and a set equivalent electrical impedance initial threshold value and then sends a pulse signal to the motor driver, so that the feeding direction and speed of the micro-ultrasonic processing tool 4 are controlled, and stable processing is ensured. Furthermore, in the processing process, the setting of the equivalent electrical impedance initial threshold value can be adjusted in real time according to the processing requirement; the adjustment object during the special-shaped hole machining is a machining gap between the balance position of the end face of the tool and the machined surface of the workpiece, and the machining gap is controlled to be smaller than the no-load amplitude of the end face of the tool; in the processing process, the temperature is increased due to the energy accumulation of the tool, the no-load equivalent electrical impedance of the micro-ultrasonic vibration system is also increased rapidly, the influence of the tool temperature on the equivalent electrical impedance of the micro-ultrasonic vibration system can be eliminated by continuously flushing the tool with water as cooling liquid, meanwhile, the material can be removed by the cavitation of the water, and the smooth processing can be ensured by timely flushing away the processed product with the cooling liquid.
Please refer to fig. 3: when the workpiece 7 to be processed is subjected to plane grinding, the workpiece needs to move in the direction of X, Y; the adjustment object is the amplitude of the tool end face, and the amplitude of the tool end face can be changed by adjusting the output current of the ultrasonic generator 10. Before plane grinding, the ultrasonic generator 10 collects the current and voltage amplitude and phase of the micro-ultrasonic vibration system according to the set sampling frequency, the processing unit firstly adjusts the current and voltage in phase according to the frequency tracking algorithm, then estimates the no-load equivalent impedance value of the micro-ultrasonic vibration system, and sets the load equivalent impedance initial threshold value required by the ultrasonic plane grinding according to the no-load equivalent impedance value; during processing, the processing unit firstly carries out frequency tracking according to data acquired by the sampling unit, then calculates a load equivalent impedance value, and the execution unit carries out algorithm comparison on the value and a set equivalent impedance initial threshold value and then adjusts output current so that the load equivalent impedance of the micro-ultrasonic vibration system is stable, and large-plane ultrasonic grinding processing can be carried out through X, Y-direction movement of a workpiece.
The foregoing is a detailed description of the invention with reference to specific embodiments, and the practice of the invention is not to be construed as limited thereto. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.

Claims (5)

1.一种游离磨料微细超声加工装置，其特征在于：包括：XY轴进给装置（1）、底座（6）、主轴立柱（3）、Z轴伺服进给装置（5）、工作槽（2）、微细超声振动系统、待加工工件（7）、超声波发生器（10）和冷却循环系统，所述工作槽（2）设置于所述XY轴进给装置（1）上，所述工作槽（2）内放置待加工工件（7）且其内盛有工作液，所述微细超声振动系统包括超声换能器（9）、超声变幅杆（8）及微细超声加工工具（4），所述微细超声加工工具（4）连接于所述超声变幅杆（8）的底部，所述Z轴伺服进给装置（5）设置于主轴立柱（3）上，所述超声换能器（9）设置于所述Z轴伺服进给装置（5）上且与所述超声变幅杆（8）连接，所述超声波发生器（10）与所述超声换能器（9）电连接；1. A free abrasive micro-ultrasonic machining device, characterized in that it comprises: an XY axis feeding device (1), a base (6), a spindle column (3), a Z axis servo feeding device (5), a working groove ( 2), a fine ultrasonic vibration system, a workpiece to be processed (7), an ultrasonic generator (10) and a cooling circulation system, the working groove (2) is arranged on the XY axis feeding device (1), the working groove (2) is The workpiece (7) to be processed is placed in the groove (2) and the working fluid is contained therein. The micro ultrasonic vibration system includes an ultrasonic transducer (9), an ultrasonic horn (8) and a micro ultrasonic machining tool (4) , the micro ultrasonic machining tool (4) is connected to the bottom of the ultrasonic horn (8), the Z-axis servo feeding device (5) is arranged on the spindle column (3), the ultrasonic transducer (9) is arranged on the Z-axis servo feeding device (5) and connected to the ultrasonic horn (8), and the ultrasonic generator (10) is electrically connected to the ultrasonic transducer (9) ; 所述游离磨料微细超声加工装置还包括用于保持微细超声加工工具（4）温度稳定的冷却系统；The free abrasive micro-ultrasonic machining device further comprises a cooling system for keeping the temperature of the micro-ultrasonic machining tool (4) stable; 所述超声波发生器（10）为可编程恒流超声电源，所述可编程恒流超声电源包括了采样单元、处理单元及执行单元；The ultrasonic generator (10) is a programmable constant current ultrasonic power supply, and the programmable constant current ultrasonic power supply includes a sampling unit, a processing unit and an execution unit; 所述采样单元用于实时采样微细超声振动系统的电流和电压幅值和相位，所述处理单元先由频率跟踪算法调节电流与电压同相，然后估算出微细超声振动系统的空载等效电阻抗及负载等效电阻抗；所述微细超声振动系统的空载等效电阻抗是指微细超声振动系统未对待加工工件（7）加工时的系统等效电阻抗，包括：超声波发生器（10）的串联谐振阻抗、超声变幅杆（8）的等效阻抗以及微细超声加工工具（4）的等效阻抗；微细超声振动系统的负载等效电阻抗是指微细超声振动系统对待加工工件（7）加工时的系统等效电阻抗，包括微细超声振动系统的空载等效电阻抗、待加工工件（7）与工作液等效阻抗；所述执行单元用于执行控制算法；The sampling unit is used to sample the amplitude and phase of the current and voltage of the micro ultrasonic vibration system in real time. The processing unit first adjusts the current and voltage in phase with the frequency tracking algorithm, and then estimates the no-load equivalent electrical impedance of the micro ultrasonic vibration system. and the load equivalent electrical impedance; the no-load equivalent electrical impedance of the micro ultrasonic vibration system refers to the system equivalent electrical impedance of the micro ultrasonic vibration system when the workpiece to be processed (7) is not processed, including: the ultrasonic generator (10) The series resonance impedance of , the equivalent impedance of the ultrasonic horn (8), and the equivalent impedance of the micro ultrasonic machining tool (4); the load equivalent electrical impedance of the micro ultrasonic vibration system refers to the workpiece (7) to be processed by the micro ultrasonic vibration system. ) the equivalent electrical impedance of the system during processing, including the no-load equivalent electrical impedance of the micro ultrasonic vibration system, the equivalent impedance of the workpiece to be processed (7) and the working fluid; the execution unit is used to execute the control algorithm; 所述冷却系统包括：循环水冷和风冷；所述循环水冷包括：循环水槽（11）、循环泵（12）、循环管路（13）和冷却喷头，所述循环水槽（11）通过循环管路（13）与所述工作槽（2）相连通，所述循环泵（12）通过循环管路（13）与所述冷却喷头相连接，所述冷却喷头设置于所述微细超声加工工具（4）的一侧，所述循环泵（12）将工作槽（2）中的工作液送入冷却喷头中对微细超声加工工具（4）进行冷却；所述风冷包括：内部风冷和外部风冷，所述内部风冷是指在超声换能器（9）内部内置风冷装置；所述外部风冷包括：风冷喷头和压缩空气装置，所述风冷喷头设置于所述微细超声加工工具（4）的一侧，所述压缩空气装置给风冷喷头提供高压风冷气源对微细超声加工工具（4）进行风冷；The cooling system includes: circulating water cooling and air cooling; the circulating water cooling includes: a circulating water tank (11), a circulating pump (12), a circulating pipeline (13) and a cooling nozzle, the circulating water tank (11) passing through the circulating pipe The road (13) is communicated with the working tank (2), the circulating pump (12) is connected with the cooling nozzle through the circulating pipeline (13), and the cooling nozzle is arranged on the micro ultrasonic machining tool ( 4) on one side, the circulating pump (12) sends the working fluid in the working tank (2) into the cooling nozzle to cool the micro-ultrasonic machining tool (4); the air cooling includes: internal air cooling and external air cooling Air cooling, the internal air cooling refers to a built-in air cooling device inside the ultrasonic transducer (9); the external air cooling includes: an air cooling nozzle and a compressed air device, and the air cooling nozzle is arranged on the micro ultrasonic On one side of the machining tool (4), the compressed air device provides a high-pressure air-cooled air source for the air-cooled nozzle to air-cool the micro ultrasonic machining tool (4); 所述超声换能器（9）和所述超声变幅杆（8）之间通过螺栓连接；所述超声变幅杆（8）和微细超声加工工具（4）之间通过螺栓连接，且在连接时为确保声波传递的有效性和高效率、需在螺栓外侧加涂密封材料。The ultrasonic transducer (9) and the ultrasonic horn (8) are connected by bolts; the ultrasonic horn (8) and the micro ultrasonic machining tool (4) are connected by bolts, and are connected by bolts. In order to ensure the effectiveness and high efficiency of sound wave transmission during connection, it is necessary to coat the outer side of the bolt with sealing material. 2.根据权利要求1所述游离磨料微细超声加工装置，其特征在于：所述超声波发生器（10）提供的激励信号的频率为微细超声振动系统的串联谐振频率，工作电流峰峰值的可调节范围为200mA～1200mA，最大有效输出功率为100W，典型工作频率：20kHz～40kHz。2. The free abrasive micro ultrasonic processing device according to claim 1, wherein the frequency of the excitation signal provided by the ultrasonic generator (10) is the series resonance frequency of the micro ultrasonic vibration system, and the peak-to-peak value of the working current can be adjusted. The range is 200mA～1200mA, the maximum effective output power is 100W, and the typical operating frequency is 20kHz～40kHz. 3.根据权利要求2所述游离磨料微细超声加工装置，其特征在于：所述微细超声振动系统的串联谐振频率为35.43kHz，空载等效电阻抗为65Ω，所述微细超声加工工具（4）端面振幅可调节范围为2μm~15μm。3. The free abrasive micro ultrasonic machining device according to claim 2, wherein the series resonance frequency of the micro ultrasonic vibration system is 35.43kHz, the no-load equivalent electrical impedance is 65Ω, and the micro ultrasonic machining tool (4 ) The adjustable range of the end face amplitude is 2μm~15μm. 4.根据权利要求3所述游离磨料微细超声加工装置的进给调节方法，其特征在于：在待加工工件（7）加工前，超声波发生器（10）采样单元按采样频率采集微细超声振动系统的电流和电压幅值与相位，超声波发生器（10）处理单元先由频率跟踪算法调节电流与电压同相，然后估算出微细超声振动系统的空载等效电阻抗值；进一步地，由空载等效电阻抗值确定初始加工状态下微细超声振动系统所需的负载等效电阻抗初始阈值；加工过程中，处理单元根据采样单元采集的数据先进行频率跟踪，再计算出负载等效电阻抗值，执行单元对负载等效电阻抗值与设定的等效电阻抗初始阈值进行算法比较，根据比较结果调节微细超声加工工具（4）的进给方向与速度或超声波发生器（10）的输出电流；进一步地，在加工过程中可以根据加工需要，实时调整等效电阻抗初始阈值的设定，通过控制微细超声加工工具（4）的进给方向与速度来控制超声加工的间隙，通过控制超声波发生器（10）的输出电流来控制工具端面振幅，达到稳定加工的目的。4. The feed adjustment method of the free abrasive micro ultrasonic processing device according to claim 3, characterized in that: before the workpiece (7) to be processed is processed, the sampling unit of the ultrasonic generator (10) collects the micro ultrasonic vibration system according to the sampling frequency The amplitude and phase of the current and voltage of the ultrasonic generator (10) are first adjusted by the frequency tracking algorithm to be in phase with the current and voltage, and then the no-load equivalent electrical impedance value of the micro ultrasonic vibration system is estimated; The equivalent electrical impedance value determines the initial threshold value of the load equivalent electrical impedance required by the micro ultrasonic vibration system in the initial processing state; during the processing, the processing unit first performs frequency tracking according to the data collected by the sampling unit, and then calculates the load equivalent electrical impedance value, the execution unit compares the load equivalent electrical impedance value with the set initial threshold of equivalent electrical impedance, and adjusts the feeding direction and speed of the micro ultrasonic machining tool (4) or the speed of the ultrasonic generator (10) according to the comparison result. output current; further, in the process of processing, the setting of the initial threshold value of equivalent electrical impedance can be adjusted in real time according to the processing needs, and the gap of ultrasonic processing can be controlled by controlling the feeding direction and speed of the micro ultrasonic processing tool (4). The output current of the ultrasonic generator (10) is controlled to control the amplitude of the end face of the tool, so as to achieve the purpose of stable processing. 5.根据权利要求4所述游离磨料微细超声加工装置的进给调节方法，其特征在于：由可编程恒流超声电源控制Z轴伺服进给装置（5）的进给状态。5 . The feed adjustment method of the free abrasive micro ultrasonic machining device according to claim 4 , wherein the feeding state of the Z-axis servo feeding device ( 5 ) is controlled by a programmable constant current ultrasonic power supply. 6 .
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