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JPH01169759A - 情報記録担体 - Google Patents

情報記録担体

Info

Publication number
JPH01169759A
JPH01169759A JP62328517A JP32851787A JPH01169759A JP H01169759 A JPH01169759 A JP H01169759A JP 62328517 A JP62328517 A JP 62328517A JP 32851787 A JP32851787 A JP 32851787A JP H01169759 A JPH01169759 A JP H01169759A
Authority
JP
Japan
Prior art keywords
film
oxygen
information recording
protective film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62328517A
Other languages
English (en)
Inventor
Kiyoshi Tanii
清 谷井
Toshiaki Kashihara
樫原　俊昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62328517A priority Critical patent/JPH01169759A/ja
Priority to PCT/JP1988/001312 priority patent/WO1989006037A1/ja
Priority to DE3887882T priority patent/DE3887882T2/de
Priority to EP19890900895 priority patent/EP0352333B1/en
Publication of JPH01169759A publication Critical patent/JPH01169759A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B7/2578—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
    • G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24306—Metals or metalloids transition metal elements of groups 3-10
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25708—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 13 elements (B, Al, Ga)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25713—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing nitrogen
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25715—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing oxygen
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2533—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
    • G11B7/2534—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins polycarbonates [PC]
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/254—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of protective topcoat layers
    • G11B7/2542—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of protective topcoat layers consisting essentially of organic resins
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/256—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers improving adhesion between layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、光学的に情報の記録再生が可能な情報記録担
体に関するものである。
従来の技術 金属材料からなる記録膜を有する光ディスクでは、記録
膜の酸化劣化を防ぐために、記録膜を耐湿性保護膜で保
護する等の手段が用いられている。特に希土類とＦｅ、
Ｃｏ等のアモルファス合金からなる光磁気記録膜は、酸
化しやすい材料のため、保護膜の役割は非常に大きい。
従来、光磁気記録膜を有する光ディスクの保護膜材料と
して、ＡｅＮ、Ｓ　１３Ｎ４等の窒化物やＳ　ｉ　Ｏ、
Ｔ　ａ　２０５等の酸化物が検討されてきた。
以下、第３図を参照しながら、従来の光ディスクの構成
の一例を説明する。
基板７及び基板１２はポリカーボネイトからなる成形基
板である。この基板７の上には保護膜８゜光磁気記録膜
９、及び保護膜１０が順に積層され、その後、接着層１
１によって、基板と接着される。ここで、保護膜８及び
保護膜１０はＡｅＮであり、ＧｄＴｂＦｅＣｏからなる
記録膜９を両側から保護している。
発明が解決しようとする問題点 しかしながら、従来の保護膜では、まだ記録膜の酸化防
止に対し問題点がある。
窒化物からなる保護膜の場合は、保護膜中に応力が残留
するために、膜にクラックを生じ易く、このクラックか
ら水分や酸素が侵入して、記録膜を酸化させていた。ま
た、酸化物からなる保護膜の場合は、耐湿性能が完全で
はなく、記録膜の酸化が進行するという問題があった。
問題点を解決するための手段 本発明は、上記問題点を解決するため、アルミニウム、
窒素及び酸素を主成分とし、酸素の含有量が原子数比で
３％〜２５％の範囲である誘導体を、光ディスクの保護
膜とする特徴とするものである。
作　　　用 このように窒化アルミニウムに酸素を添加すると、作成
した保護膜中の残留応力が低下するために、窒化アルミ
ニウムのみからなる保護膜と比較して耐クラツク性が増
す。
そこで、耐湿性能を損なわない程度の酸素を窒化アルミ
ニウムに含有させた材料からなる保護膜を用いれば、耐
湿性と耐クラツク性の双方を両立できる。
実施例 以下、本発明の実施例について、第１図を参照しながら
説明する。
基板１は、ポリカーボネイトからなる成形基板で、この
片面に、保護膜２．記録膜３．保護膜４が順に積層され
、その後、紫外線硬化樹脂からなる接着層５により、ポ
リカーボネイト製の基板６が接着されている。ここで記
録膜３は ＧｄＴｂＦｅＣｏ光磁気記録媒体であり、保護膜２及び
保護膜４は、アルミニウム、窒素、酸素で構成される誘
導体膜である。これら３層の膜はいずれもマグネトロン
スパッタリングを用いて成膜した。特に、保護膜２及び
保護膜４は、窒化アルミニウムをスパッタリングターゲ
ットに用い、アルゴンと酸素の混合ガスを放電ガスとし
て成膜した。ここで、ガス中の酸素分圧を制御すること
で、膜中の酸素含有量を調節した。
以上のように構成された光ディスクにおいて、保護膜中
の酸素含有量を変え、それぞれについて高温高湿環境放
置試験を行なった。環境条件は、温度ｓｏ℃、湿度８０
％ＲＨとした。試験による記録膜（ＧｄＴｂＦｅＣｏ光
磁気記録媒体）の保磁力変化の結果を図に示す。
この結果から明らかなように、酸素含有量が２５ａｔ％
以下であれば、１０００時間の試験後も保磁力変化がな
いことが明らかになった。
また、酸素を含まない窒化アルミニウム保護膜でも、保
磁力の低下は認められなかったが、本試験で２００時間
経過後に、記録膜に酸化による孔食が発生した。こ□れ
は、保護膜中の残留応力のために、外部環境の変化で微
小クラックを生じ、そこから、水分が侵入して孔食を生
ぜしめたものと考えられる。保護膜中に酸素を含有させ
たものでは、いずれも孔食は発生しなかった。
これらの結果により、アルミニウムと窒素からなる保護
膜に、原子数比で３％から２５％までの酸素を含有させ
ると、優れた保護効果を示すことが明らかになった。
なお、本実施例では、記録膜３の両側に、本発明による
保護膜を形成していたが、基板１．基板６あるいは、接
着層５十分な耐湿性があれば、本発明による保護膜の使
用は片側だけでも構わない。つまり、水分や酸素の侵入
が懸念される側のみ形成されれば十分な効果が期待でき
る。
また、記録膜３は、実施例にあるＧｄＴｂＦｅＣｏ以外
の一般的な希土類−遷移金属のアモルファス合金膜でも
よく、また、ＴｅやＳｅ等を含む相変化型記録膜であっ
ても保護膜の耐湿特性が変わることはない。
また、記録膜の保護効果は、本発明の保護膜によって十
分満足されているので、基板１．基板６の選択にも自由
度が広がり、透湿性の高いエポキシ樹脂やＰＭＭＡ等が
使用でき、更には、基板６や接着層５がなく代わりにオ
ーバーコート層が施しであるだけの単板構造ディスクへ
の応用ももちろん可能となる。
発明の効果 以上のように、本発明によれば、記録膜の酸化劣化がな
い、高信頼性の光ディスクを得ることができる。
【図面の簡単な説明】
第１図は本発明の実施例による情報記録担体の断面図、
第２図は保護膜の耐湿性能を示す特性図、第３図は従来
例による情報記録担体の断面図である。 １・・・・・・基板、２・・・・・・保護膜、３・・・
・・・記録膜、４・・・・・・保護膜、５・・・・・・
接着層、６・・・・・・基板。 代理人の氏名　弁理士　中尾敏男　ほか１名１、Ｃ−基
板 第　３　図

Claims (4)

    【特許請求の範囲】
  1. （１）平板状基板の片側に、金属を主成分とする情報記
    録膜及び、誘導体膜を含む複数の膜を有し、前記誘導体
    膜は、アルミニウム、窒素及び酸素が主成分であり、か
    つ酸素の含有量が原子数化で３％〜２５％までにあるこ
    とを特徴とする情報記録担体。
  2. （２）金属を主成分とする情報記録膜が、希土類及び遷
    移金属を含む磁気光学記録材料からなることを特徴とす
    る特許請求の範囲第１項記載の情報記録担体。
  3. （３）誘導体膜が、平板状基板と情報記録膜の間にある
    ことを特徴とする特許請求の範囲第１項記載の情報記録
    担体。
  4. （４）情報記録膜が、平板状基板と誘導体膜の間にある
    ことを特徴とする特許請求の範囲第１項記載の情報記録
    担体。
JP62328517A 1987-12-24 1987-12-24 情報記録担体 Pending JPH01169759A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62328517A JPH01169759A (ja) 1987-12-24 1987-12-24 情報記録担体
PCT/JP1988/001312 WO1989006037A1 (en) 1987-12-24 1988-12-23 Data recording medium
DE3887882T DE3887882T2 (de) 1987-12-24 1988-12-23 Datenspeicherungsmedium.
EP19890900895 EP0352333B1 (en) 1987-12-24 1989-07-05 Data recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62328517A JPH01169759A (ja) 1987-12-24 1987-12-24 情報記録担体

Publications (1)

Publication Number Publication Date
JPH01169759A true JPH01169759A (ja) 1989-07-05

Family

ID=18211161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62328517A Pending JPH01169759A (ja) 1987-12-24 1987-12-24 情報記録担体

Country Status (4)

Country Link
EP (1) EP0352333B1 (ja)
JP (1) JPH01169759A (ja)
DE (1) DE3887882T2 (ja)
WO (1) WO1989006037A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6107688A (en) * 1997-07-15 2000-08-22 Micron Technology, Inc. Aluminum-containing films derived from using hydrogen and oxygen gas in sputter deposition
US6414825B1 (en) * 1998-10-06 2002-07-02 Tdk Corporation Thin film device, thin film magnetic head and magnetoresistive element
US7161211B2 (en) 1997-07-15 2007-01-09 Micron Technology, Inc. Aluminum-containing film derived from using hydrogen and oxygen gas in sputter deposition

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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US6455939B1 (en) 1997-07-15 2002-09-24 Micron Technology, Inc. Substantially hillock-free aluminum-containing components
US6893905B2 (en) 1997-07-15 2005-05-17 Micron Technology, Inc. Method of forming substantially hillock-free aluminum-containing components
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WO1989006037A1 (en) 1989-06-29
DE3887882T2 (de) 1994-06-01
DE3887882D1 (de) 1994-03-24
EP0352333A4 (en) 1991-01-16
EP0352333A1 (en) 1990-01-31
EP0352333B1 (en) 1994-02-16

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