JPH01158489A - Electric characteristics testing method by prober - Google Patents

Abstract

PURPOSE: To prevent the disorder of the environmental temperature in an inspection part of an inspected body without arranging a light source in the inspection part by arranging the light projection end of a light supply part opposite the inspection part of an inspected body, making the light from a light source outside the inspection part incident on a light incidence end, and performing inspection while supplying the light from the light projection end. CONSTITUTION: The light emitted by the light source part 4 is made incident on the incidence end of a light supply means 30, transmitted along a light supply means 20, and projected from the projection end 10b arranged in the inspection part 2 to irradiate a liquid crystal display device on a mount base. Therefore, the same bad environment with a case of the irradiation of the liquid crystal device with external light can be created by using the light from the light supply means 20 and 30, so that a test of characteristics can be conducted in the presence of the external light by viewing an image with the eyes. Thus, the light is guided from the light source part 4 outside the inspection part 2 by the light supply means 30 and 20 so as to irradiate the liquid crystal display device with the light. Consequently, a space for arranging the light source part 4 is not necessary in the inspection part and electric characteristics of the inspected body can easily be inspected without disordering the temperature environment in the inspection part.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an electrical property testing method using a probe device.

(Prior art) In recent years, large liquid crystal panels (hereinafter referred to as L
CD (Liquid Charged Device
) manufacturing technology is being perfected. Furthermore, this LC
Development of mass production technology for D is progressing at a rapid pace. However, for testing characteristics, there is a need to develop a probe device that is compatible with mass production.

Inspection of the electrical characteristics of an LCD is normally performed using a probe card or a tester. In addition, the electrical characteristics inspection of LCD is
There is a demand for irradiating an LCD with external light so that it can be used in an adverse environment caused by light.

In other words, in an LCD, the visibility of the image displayed on the screen changes significantly depending on the state of the light that is irradiated (a problem that the invention aims to solve). There was no method for testing electrical characteristics using a probe device that had the ability to do so. Therefore, in order to test the electrical characteristics of an LCD in an adverse environment due to light, the LCD must first be installed in a jig and energized, and then the LCD must be inspected from the outside.
irradiate light on.

Then, the quality of the LCD is determined by visual inspection.

This was the only way.

In other words, if a light source is placed in the inspection section of the probe device, it becomes possible to inspect the electrical characteristics of the LCD in an adverse light environment. However, in this case, the light source section generates heat and disturbs the temperature environment inside the inspection section.

Furthermore, a space corresponding to the space for installing the light source is required within the inspection section. Furthermore, there are problems that bring about various adverse effects when put into practical use.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to be able to inspect an object to be inspected in a bad environment due to external light, without requiring a space for installing a light source in the inspection section, and without disturbing the temperature environment inside the inspection section. An object of the present invention is to provide a method for testing electrical characteristics using a probe device that does not require a probe device.

[Structure of the invention]

(Means for Solving the II Problem) The present invention includes a step of placing an object to be inspected on a mounting table of a probe device.

a step of causing a light output end of the light supply means to face the inspection section of the object to be inspected; a step of introducing light from a light source section outside the inspection section to the light input end of the light supply means; While supplying light to the inspection department.

A method for testing electrical properties using a probe device, comprising: a step of testing electrical properties;

(Function) According to the present invention, the light emitted from the light source section enters the light supply means from the incident end and is transmitted along the light supply means.

Then, the light is emitted from the output end side disposed within the inspection section and illuminates the liquid crystal display device on the mounting table.

Therefore, by using the light from the light supply means, it is possible to create a bad environment similar to that in the case where the liquid crystal display device is irradiated with external light. At this time, the characteristics of the liquid crystal display device can be tested under external light by visually observing the image or the like.

Particularly, in the present invention, in order to irradiate the liquid crystal display device with light, light is guided into the inspection section from a light source section outside the inspection section by the light supply means. Therefore, it is possible to easily test the electrical characteristics of the object to be inspected without requiring a space for arranging the light source within the inspection section and without disturbing the temperature environment within the inspection section.

(Example) Hereinafter, the method of the present invention will be applied to an LCD (
An embodiment applied to a characteristic test of a liquid charged device will be described with reference to the drawings.

FIG. 1(A) is a plan view of a probe device used to carry out the method of the present invention, and FIG. 1(B) is a side view of the same probe device.

This probe device is composed of a loader section ω, an inspection section 2, a fiber storage box 2, and a light source section.

The loader section (■) takes out the LCD from the cassette.

Then, after pre-aligning the LCD, it is delivered to the inspection department (■). Next, the LCD after inspection is returned to the cassette. A large number of LCDs having an outer diameter of, for example, 5 inches are stacked and housed in the cassette at predetermined intervals. A keyboard 0 is arranged on the upper surface of the loader section (2). Keyboard (2) is used to input predetermined information in order to operate this probe device.

In the inspection department ■, the LC transported from the loader section (G)
D is placed and fixed on the chuck. Next, the chuck is driven and controlled in the X, Y, and θ directions to align the LCD.Next, the electrical characteristics of the LCD are inspected using a probe card and a sensor. A scope (2) is placed above the inspection section (2). The scope 0 is for visually observing the positioning state of the LCD and the like.

The inspection section (2) will be further explained with reference to FIGS. 2(A) and (B).

In the figure, (10) is a chuck that is an example of a mounting table on which the LCD is mounted and fixed. The chuck (10) has a fiber attachment hole (10a) bored from its side toward the center. At the center of the chuck (10), there is a light exit hole (1
0b) is provided. The light exit hole (10b) and the fiber attachment hole (10a) are in communication.

In addition, the inspection section ■ has an output fiber probe (20).
is provided. One end of the output fiber probe (20) faces the light output hole (iob) through the fiber attachment hole (10a). The other end of the output fiber probe (20) is fixed to the fiber attachment plate (12).

As shown in FIG. 3, the output fiber probe (20) is housed in a tube (21) with a plurality of fibers tied together. A radiation fitting (22) is attached to one end of the tube (21). Output fitting (22)
A hole (22a) is bored therein. Hole (22a)
The drilling position of the fiber is located in the light exit hole (10a) when the fiber probe (20) is inserted into the hole (10a).
10b). A reinforcing tube (23) is provided at a portion corresponding to the exit of the hole (LOA) for attaching the fiber to the tube (21).

A plug (25) is provided at the other end of the tube (21) via a joint connector (24).

A hole (25b) is bored in the disk portion (25a) of the plug (25). The output fiber probe (20) is
The fiber attachment is screwed to the plate (12) through the hole (25b). A bolt portion (25c) is formed on the outer peripheral surface of the cylindrical portion of the plug (25).

The plug (25) has an input fiber probe (30)
are now connected. The input fiber probe (30) and the output fiber probe (20) constitute an optical fiber cable.

The input fiber probe (30) has the structure shown in FIG. That is, a plurality of fibers are tied together and a flexible tube (31) is wrapped around them. The flexible tube (31) is covered with, for example, a polyethylene tube (32).

The length of the input fiber probe (30) is set to the length from the fiber attachment plate (12) to the light source section. At the connecting end of the input fiber probe (30) and the output fiber probe (20).

A joint connector (33) is provided. Cap nut (34) with a nut (34a) formed on the inner cylindrical part
is attached to the joint connector (33). The nut (34a) is attached to the bolt part (2) of the plug (25).
5c). The input fiber probe (30) and the output fiber probe (20) are threaded together. Further, a light source side metal fitting (35) is provided on the light source side of the input fiber probe (30).

Next, the fiber storage box (2) will be explained with reference to FIG.

The fiber storage box (■) stores the input fiber probe (30) bent in a U-shape, and further guides it to the light source (A).The input fiber probe (30) is inserted through the opening (■). The probe is guided outside the main body of the probe device. The opening (2) is formed, for example, on the back surface of the probe device main body.

The input fiber probe (30) is housed in the housing (41) in a bent state'. The housing (41) has an opening ■
A first notch (42) is provided at a position facing the. Via the first cutout (42), the input fiber probe (30) is guided into the housing (41). The input fiber probe (30) is guided into the light source section via the second cutout (43). The second notch (43) is formed on the corner side of the same surface as the surface on which the first notch (42) is formed.

A fixing block (44) is provided inside the second notch (43).
), (45) are fixed. The input fiber probe (30) is attached to a fixed block (44)
.

It is supported by being sandwiched between (45). The input fiber probe (30) is supported by attaching the part to which the shield sponge (36) is attached to the fixing block (44) with screws (46).
) (45).

The housing (41) is screwed and fixed to the back side of the probe device main body via a reinforcing plate (47).

The upper surface of the casing (41) is hermetically sealed by a cover (48).

Next, the light source section will be explained. The internal structure of the light source (in the light source section) is omitted from illustration. The light source side metal fitting (3) of the input fiber probe (30) can be jointed. A light source is provided opposite the input fiber probe (30). The light source is composed of, for example, a halogen lamp with a dichroic mirror.

The dimming of this halogen lamp can be varied from 0 to 100% using a PWM method, for example. The halogen lamp is turned on and off by, for example, opening and closing a mechanical shutter.6 For example, by attaching two sets of filters to the light source, adjustment can be made in up to 25 steps. In this case, one set of filters is composed of five types of filter points. Further, in order to suppress heat generation of the halogen lamp, forced air cooling can be performed using, for example, a fan.

The light source section) may be driven either automatically or manually. In the case of automatic drive, the shutter is opened and closed and the filter is switched based on data sent from the probe device main body.

In the case of manual operation, the shutter is opened and closed and the filter is switched by operating the panel switch of the light source controller in the light source section (a).

Next, a method for inspecting characteristics of an LCD according to the present invention using the probe device configured as described above will be described.

First, the process flow of the method of the present invention will be explained with reference to FIG.

First, take out the LCD from the cassette (Figure 6A) 0 Next, center the LCD (pre-alignment) (Figure 6B) 6 Next, remove the centered LCD
The receiver then passes the information to the inspection department (Figure 6C). Next, the inspection department, namely,
The LCD is aligned on the test stage (Fig. 6D). In this alignment, first, the parallel, perpendicular, and directional alignment of the LCD to be measured is performed using a hide sensor, an X-Y table, and a zero rotation mechanism. conduct.

Next, the probe needle is aligned with the reference chip using the joystick, and the teaching operation of the test procedure is executed.

Next, blobbing of the LCD is started (FIG. 6E).

That is, the probe needle array is brought into contact with a large number of electrode leads of the LCD (FIG. 6F).

In the contact process, a large number of probe needles arranged on the probe card are brought into contact with the electrodes of the LCD.

In this state, a preprogrammed measurement signal is switched and applied to perform illumination by the optical fiber, and the next measurement step is then carried out (FIG. 6G).

Check the presence or absence of blobbing (Fig. 6H), and
To finish the measurement (Fig. 6 I), return the LCD to the cassette (Fig. 6 J).

Next, the flow of the method of the present invention using the above-mentioned apparatus will be specifically explained.

At the loader section ■, take out one LCD from the cassette,
After being transported and pre-aligned, the receiver is delivered to the inspection department ■.In the inspection department ■, this LCD is chucked (10).
The LCD is placed and fixed by vacuum suction, for example, and the LCD is aligned using the X-Y table mechanism and rotation mechanism, and the probe needles arrayed and fixed on the probe card are brought into contact with the electrodes of the LCD.
The electrical characteristics of D will be tested.

Next, the halogen lamp in the light source section 4 is turned on, and the mechanical shutter is opened. The light emitted from this halogen lamp enters from one end of the input fiber probe (30).

The input fiber probe (30) is introduced into the main body of the apparatus via the fiber storage box (2).

The input fiber probe (30) is attached to the chuck (10)
The fiber fitting fixed to the plate (12) is connected to the plug (25) of the output fiber probe (20) at the position of the plate (12). Light is transmitted from the input fiber probe (30) to the output fiber probe (20).

Moreover, the output end side of the output fiber probe (20) has a hole (10a) for attaching the fiber of the chuck (10).
It is supported by insertion. This fiber probe (20
) is the light emitting part of the chuck (lO).
The light exit hole (10b) is located at the center of the light exit hole (10b). The light emitted from a halogen lamp.

The back surface of the LCD is irradiated through the light exit hole (10b). The illuminance of the light emitted in this way is 50
000 LX can be secured, and higher illuminance is possible by changing the configuration of the light source section or the fiber bundle diameter.

Here, the LCD usually has transparency. Therefore, the light irradiated from the back surface can create a bad environment similar to when external light enters directly from the LCD surface. Therefore, it is possible to see, for example, how a predetermined pattern displayed on the LCD screen can be visually observed in a state where light is irradiated from the back surface of the LCD in this manner. As a result, a characteristic test under external light irradiation can be easily performed.

By the way, LCD inspection may be performed by changing the contact position of the probe needle by moving the chuck (10). In this case, it becomes necessary to move the optical fiber fixed to the chuck (10) to follow this movement.

The movement of the chuck (10) on the two-dimensional plane is set, for example, at each position shown by the solid line and chain line in the figure, with the chuck center position a in FIG. 7 as the center.

Therefore, in the probe device of this embodiment, a fiber storage box (2) is provided. Inside this fiber storage box (2), an input fiber probe (30) is arranged in a U-shaped bent state.

Then, as shown in illustration A of FIG.
If the moves farthest, the fiber storage box ■
The deflection of the fiber probe (30) within the fiber probe (30) is minimized.

In addition, as shown in illustrations B and C of FIG. 7, a chuck (10
) moves to the nearest location.

The deflection inside the fiber storage box ■ is set to maximize the deflection.

Here, the optical fiber itself has a predetermined rigidity. Therefore, as the chuck (10) moves, the fibers slide inside the fiber storage box (2). Then, the amount of deflection is changed, for example, the minimum bending radius is 40 to 50IIn and the maximum bending radius is 120 to 140+m+. Thereby, the optical fiber can be moved to follow any movement position of the chuck (10).

In addition, in order to ensure that the optical fiber slides inside the fiber storage box (■) mentioned above, the housing (41)
It is also possible to attach a sheet (for example, the product name: SONITACK) to reduce frictional resistance on the internal bottom surface of the holder.

In the above embodiment, as means for supporting the optical fiber cable in the inspection part (1), the optical fiber cable is fixed to the chuck (10) and light is irradiated from the back surface of the object to be inspected, but the structure is not limited to this. .

The above embodiment is superior in that by supporting the optical fiber cable on the chuck (10), the object to be inspected can always be irradiated no matter where the chuck (10) is set. However, for example, even if the light emitting end of the optical fiber is fixed above the object to be inspected, an environment similar to irradiation with external light can be created.

Furthermore, the present invention is not limited to the arrangement in which only one optical fiber cable is disposed within the inspection section (2), but a plurality of optical fiber cables may be disposed below or above the object to be inspected.

FIGS. 8(A) and 8(B) show an embodiment in which a plurality of optical fibers, for example, five optical fibers, are attached to the chuck (10).

In this case, the configuration is such that light can be emitted not only from the center of the chuck (10) but also from its periphery.

In addition, the shape of the optical fiber, the fiber storage box■
The internal structure and the like are merely examples, and may be replaced with various other shapes and structures.

Furthermore, as shown in FIG. 9, an xY slide mechanism may be installed inside the fiber storage box so that the XY stage and the fiber storage box are interlocked. In this case, the xY slide mechanism is used as the driving means.

The XY slide mechanism may be moved freely by being pulled by the movement of the xY stage (inspection section), or
The XY slide mechanism may be driven by a motor to follow the movement of the xY stage (inspection section).

According to the present invention, it is possible to prevent the environmental temperature within the inspection section from being disturbed without disposing a light source inside the inspection section, and to inspect the electrical characteristics of the object to be inspected under a bad environment such as when irradiated with external light. can be executed.

[Brief explanation of the drawing]

FIG. 1(A) is a plan view of a probe device used to explain one embodiment of the method of the present invention, and FIG.
FIG. 3 is a side view of the probe device shown in FIG. FIG. 2(A) is a plan view of the chuck equipped with the optical fiber cable of the probe device shown in FIG. 1, and FIG. 2(B) is
FIG. 2(A) is a side view of the chuck of FIG. 2(A); 3 is a schematic explanatory diagram of the output fiber probe of the probe device of FIG. 1, and FIG. 4 is a schematic explanatory diagram of the input fiber probe of the probe device of FIG. 1. 5 is a perspective view showing the assembled state of the fiber storage box of the probe device in FIG. 1; FIG. 6 is an explanatory diagram showing the process flow of the inspection method using the probe device in FIG. 1; Figure 1 is a plan view showing the chuck movement of the probe device and the routing state of the optical fiber, Figure 8 (A)
is a plan view of a chuck equipped with a plurality of optical fiber cables for explaining another embodiment of the probe device shown in FIG. 1; FIG. 8(B) is a side view of the chuck of FIG. 8(A); FIG. 9 is an explanatory diagram showing an XY slide mechanism attached to the fiber storage box of the probe device shown in FIG. 1. 2...Inspection section 3...Fiber storage box

Claims (1)

[Claims] 1. A step of placing an object to be inspected on a mounting table of a probe device; a step of making a light emitting end of a light supply means face an inspection section of the object to be inspected; and the light supply means. A step of introducing light from a light source section outside the inspection section into a light input end of the probe device, and a step of inspecting electrical characteristics while supplying light from the light output end to the inspection section. Inspection method. 2. The electrical property testing method using a probe device according to claim 1, wherein the light supply means is an optical fiber cable. 3. The electrical property testing method using a probe device according to claim 1, wherein the light emitting end of the light supply means is supported inside the mounting table so as to face the mounting surface of the mounting table. 4. The light supply means is housed between the inspection section and the light source section with the incident end side bent, and the light supply means follows the movement of the mounting table by the deflection of the light supply means. An electrical property testing method using a probe device according to claim 1, wherein the probe device is movable. 5. The electrical property testing method using the probe device according to claim 1, wherein the object to be tested is a liquid crystal display device.