JPH01154629U - - Google Patents
Info
- Publication number
- JPH01154629U JPH01154629U JP5163088U JP5163088U JPH01154629U JP H01154629 U JPH01154629 U JP H01154629U JP 5163088 U JP5163088 U JP 5163088U JP 5163088 U JP5163088 U JP 5163088U JP H01154629 U JPH01154629 U JP H01154629U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- insulating film
- gate electrode
- source
- interlayer insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図および第２図は本考案における第１の実
施例を説明するためのそれぞれ断面図および平面
図、第３図は本考案における第２の実施例を説明
するための断面図である。
２０……ゲート電極、２２……ソースドレイン
領域、２４……層間絶縁膜、２６……フオトレジ
スト、２８……フオトマスク、３０……接続窓。
1 and 2 are a sectional view and a plan view, respectively, for explaining a first embodiment of the present invention, and FIG. 3 is a sectional view for explaining a second embodiment of the present invention. 20... Gate electrode, 22... Source/drain region, 24... Interlayer insulating film, 26... Photoresist, 28... Photomask, 30... Connection window.
Claims (1)
域を形成後、層間絶縁膜を全面に形成して、フオ
トマスクを用いて前記層間絶縁膜に接続窓を形成
するフオトマスクにおいて、前記フオトマスクパ
ターンの大きさは前記ゲート電極上と前記ソース
ドレイン領域とにおいて異なるように構成するこ
とを特徴とする半導体集積回路におけるフオトマ
スク。 In a photomask in which a source/drain region is formed in a region aligned with a gate electrode, an interlayer insulating film is formed over the entire surface, and a connection window is formed in the interlayer insulating film using a photomask, the size of the photomask pattern is as described above. 1. A photomask for a semiconductor integrated circuit, characterized in that a photomask is configured differently on a gate electrode and on the source/drain region.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5163088U JPH01154629U (en) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5163088U JPH01154629U (en) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01154629U true JPH01154629U (en) | 1989-10-24 |
Family
ID=31277649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5163088U Pending JPH01154629U (en) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01154629U (en) |
-
1988
- 1988-04-19 JP JP5163088U patent/JPH01154629U/ja active Pending