JPH01136346A - Wafer transfer cart - Google Patents

Abstract

PURPOSE:To monitor the number of dust particles in a clean room by utilizing a wafer transfer cart system by loading an instrument for measuring dust particles in air and a dust measuring-instrument controller controlling the measuring instrument by the position of travelling onto the wafer cart. CONSTITUTION:A dust measuring-point air suction pipe 14 is connected to a dust measuring instrument 13, and air on a wafer transfer cart 11 is sucked and measured. Wafers 12 are placed onto the wafer cart 11 and the cart 11 travels, and a dust measuring-instrument controller 15 starts the measurement of the dust measuring instrument 13 through a dust measuring-instrument control cable 16 when the cart reaches to a previously set position. When the measurement of dust is completed, a dust measured value is stored in a storage device for the dust measuring instrument 13. Or the measured value is output to an output device 17 by an output cable 18. The output device 17 prints the measured value to printing paper by a printer, or a communication output, etc., to a host computer are conducted by a communication device, thus outputting the measured value.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a wafer transport vehicle, and more particularly to a wafer transport vehicle capable of measuring the number of dust in a clean room.

[Prior Art] Conventionally, this type of wafer transport vehicle has not been equipped with a dust measuring function, and the dust measuring device has been set at a fixed position separately from the wafer transport vehicle.

[Problems to be Solved by the Invention] The conventional wafer transport vehicle described above has only the function of transporting wafers. In addition, the dust measuring device that measures the amount of dust to control the operation of the wafer transport vehicle is a fixed or semi-fixed type, so if it is fixed at a -degree measurement point, dust can only be measured at that measurement point. Moreover, in order to measure at a large number of measurement points, there is a drawback that it requires the installation of a large number of dust measuring instruments or the labor of moving the measuring instruments and measuring at each measuring point.

SUMMARY OF THE INVENTION An object of the present invention is to provide a wafer transport vehicle that eliminates the above-mentioned problems.

[Differences between the invention and the prior art] In contrast to the conventional wafer transport vehicle described above, the present invention mounts a dust measuring device on the wafer transport vehicle and automatically measures the number of dust at any point on the trajectory of the wafer transport vehicle. The difference is that it can measure

[Means for Solving the Problems] The present invention provides a transport vehicle that transports wafers, which is equipped with a dust measuring device that measures dust in the air, and a dust measuring device controller that controls the dust measuring device based on the traveling position. This is a wafer transport vehicle that is characterized by:

[Example] Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a longitudinal sectional view of one embodiment of the present invention.

11 is a wafer transport vehicle, and 12 is a wafer. A dust measuring device 13 is built inside the wafer transport vehicle 11, and a dust measuring point air suction pipe 14 is connected to this to suck the air above the wafer transport vehicle 11, and the dust measuring device 1
Measure the dust according to step 3. The wafer transport vehicle 11 travels with the wafers 12 on it, but when the wafer transport vehicle reaches a position preset in the dust measuring device controller 15, the dust measuring device controller 15 passes the dust measuring device control cable 16 through the dust measuring device control cable 16. Measurement by the dust measuring device 13 is started. When the dust measurement is completed, the dust measurement value is stored in the storage device of the dust measuring device 13. Alternatively, it is output to the output device 17 through the output cable 18. The output device 17 outputs measured values by printing on printing paper using a printer, or by communicating with a host computer using a communication device.

[Effects of the Invention] As explained above, the present invention has a dust measuring device and a dust measuring device controller mounted on a wafer transport vehicle, thereby automatically measuring the dust at any number of points on the trajectory of the wafer transport vehicle. This makes it possible to easily measure the number of dust in a clean room using a wafer transport vehicle system.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal sectional view of a wafer transport vehicle of the present invention. 11... Wafer transport vehicle 12... Wafer 13
... Dust measuring device 14 ... Dust measuring point air intake pipe 15 ... Dust measuring device controller 16 ... Dust measuring device control cable

Claims (1)

[Claims] (1) A wafer transport vehicle for transporting wafers, which is equipped with a dust measuring device that measures dust in the air and a dust measuring device controller that controls the dust measuring device depending on the traveling position.