JP7767098B2 - Film forming device and scaffolding unit - Google Patents

Description

The present invention relates to a film forming apparatus and a scaffolding unit.

Conventionally, inline-type apparatuses that process substrates while transporting them are known. Patent Document 1 discloses an inline-type substrate processing apparatus in which multiple processing units are arranged vertically side by side.

Japanese Patent Application Laid-Open No. 2018-93087

With the above-mentioned conventional technology, maintenance of processing units other than the lowest processing unit requires the use of a step stool or similar. This requires time to prepare and remove the step stool, which can reduce work efficiency during maintenance.

The present invention provides technology that improves work efficiency during maintenance.

According to one aspect of the present invention,
a transport unit for transporting the substrate;
a film formation source unit including a film formation source and movable between a first position below the transport unit and a second position displaced laterally from the first position;
An in-line type film forming apparatus that forms a film on a substrate while transporting the substrate,
a scaffold unit that deploys a scaffold below the transport unit in association with the film formation source unit moving from the first position to the second position;
A film forming apparatus characterized by the above features is provided.

This invention can improve work efficiency during maintenance.

FIG. 1 is a front view schematically showing a film forming apparatus according to an embodiment. FIG. 2 is a side view of the film forming apparatus of FIG. 1 . FIG. 2 is a diagram schematically illustrating the internal structure of the film forming apparatus of FIG. 1 . FIG. 2 is a perspective view showing the configuration of the scaffolding unit. FIG. 1 is a front view of the scaffolding unit of the deposition apparatus. 10A to 10C are diagrams illustrating the movement of the deposition source unit and the deployment operation of the scaffold unit. 1A is a view of the scaffolding unit before deployment as viewed from the front of the film-forming device, and FIG. 1B is a view of the scaffolding unit during deployment as viewed from the front of the film-forming device. FIG. 4 is a plan view schematically showing the positional relationship between the transport unit and the scaffolding unit. FIG. 1 is a front view of the scaffolding unit of the deposition apparatus. FIG. 2 is a side view of a film forming apparatus according to an embodiment. FIG. 1 is a front view schematically showing a film forming apparatus according to an embodiment. FIG. 12 is a plan view of the film forming apparatus of FIG. 11 . FIG. 1 is a front view schematically showing a film forming apparatus according to an embodiment. FIG. 1 is a perspective view showing an outline of a scaffolding unit. A diagram showing the configuration of the scaffolding unit, showing multiple placement sections, lifting sections, and their surrounding configuration. FIG. 10 is a perspective view of the floorboard member 81 as seen from the back side, showing the configuration of the floorboard member. FIG. 4 is a perspective view showing the configuration of a rail member. 10A and 10B are explanatory diagrams illustrating the operation of transferring the floor plate member from the placement portion to the rail member.

The following embodiments are described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the claimed invention, and not all combinations of features described in the embodiments are necessarily essential to the invention. Two or more of the features described in the embodiments may be combined in any desired manner. Furthermore, the same reference numbers are used for identical or similar components, and duplicate descriptions will be omitted.

In each figure, the X direction indicates the substrate transport direction, the Y direction indicates the width direction intersecting the substrate transport direction, and the Z direction indicates the up-down direction.

First Embodiment
<Overview of the film formation equipment>
Fig. 1 is a front view schematically showing a film forming apparatus 1 according to an embodiment. Fig. 2 is a side view of the film forming apparatus 1 of Fig. 1. Fig. 3 is a diagram schematically showing the internal structure of the film forming apparatus 1 of Fig. 1.

The film formation apparatus 1 is an in-line type film formation apparatus that forms a film on a substrate while the substrate is being transported. The film formation apparatus 1 is used, for example, in the manufacture of display panels for organic EL display devices used in smartphones, and multiple units can be arranged side by side to form a production line.

In this embodiment, substrates held on a substrate holding tray 100 are sequentially transported to the film-forming apparatus 1, which then vaporizes organic electroluminescent (EL) layers onto the transported substrates. The substrates are held on the substrate holding tray 100 and transported to the film-forming apparatus 1, for example, while overlapped with a mask in an upstream process. Therefore, in the film-forming apparatus 1, a thin film of vapor deposition material having a predetermined pattern is formed on the substrate using the mask. The substrate material on which vapor deposition is performed in the film-forming apparatus 1 can be selected from glass, resin, metal, etc., as appropriate. Glass with a resin layer such as polyimide formed on it is preferably used. Vapor deposition materials include organic materials and inorganic materials (metals, metal oxides, etc.). The film-forming apparatus 1 can be used in manufacturing equipment for manufacturing electronic devices such as display devices (e.g., flat panel displays), thin-film solar cells, and organic photoelectric conversion elements (organic thin-film imaging elements), as well as optical components, and is particularly applicable to manufacturing equipment for manufacturing organic EL panels. In the following explanation, an example is described in which the film formation apparatus 1 forms a film on a substrate by vacuum deposition, but the film formation method is not limited to this, and various film formation methods such as sputtering and CVD can also be applied.

The film forming apparatus 1 includes a transport unit 2, a deposition source unit 3, an adhesion prevention plate 6, a moving unit 7, and a frame portion 101.

The frame portion 101 is configured to be able to support components of the film forming apparatus 1, such as the transfer unit 2. In the example shown in FIG. 1, the frame portion 101 includes pillars and beams, and supports the transfer unit 2 and vacuum pump 102. The frame portion 101 may also be provided with a work crane, an accessway for workers to perform maintenance, and the like.

The transport unit 2 transports substrates. In this embodiment, the transport unit 2 transports substrates by transporting the substrate holding tray 100 holding the substrate. The transport unit 2 includes a transport chamber 21 and transport rollers 22.

The transfer chamber 21 is a box-shaped chamber capable of maintaining a vacuum inside. The internal space 210 of the transfer chamber 21 is maintained in a vacuum atmosphere or an inert gas atmosphere such as nitrogen gas. In this embodiment, the transfer chamber 21 is connected to a vacuum pump 102. Note that in this specification, "vacuum" refers to a state filled with gas at a pressure lower than atmospheric pressure, in other words, a reduced pressure state.

The transfer chamber 21 is formed with a load opening 211 through which the substrate holding tray 100 is loaded and a load opening 212 through which the substrate holding tray 100 is unloaded. Furthermore, a communication opening 213 is formed at the bottom of the transfer chamber 21 to connect the internal space 210 to the internal space 310 of the deposition source chamber 31. The load opening 211 and the load opening 212 may be provided with a gate valve (not shown) or the like to maintain a vacuum in the internal space 210.

The transport rollers 22 transport the substrate holding trays 100 holding substrates. The transport rollers 22 are provided in the internal space 210 of the transport chamber 21. The transport rollers 22 are rotatably supported cylindrical members made of, for example, a metal material. The transport rollers 22 are driven, for example, by an electric motor (not shown) provided outside the transport chamber 21.

In addition, in this embodiment, a reinforcing rib 23 is provided at the bottom of the transport unit 2.

The deposition source unit 3 is a unit (film formation unit) having a deposition source 32 (film formation source) that emits a deposition material onto the substrate. In this embodiment, three deposition source units 3 are arranged side by side in the substrate transport direction (X direction) for one transport unit 2. However, the number of deposition source units 3 can be set appropriately, and may be two or less or four or more. Furthermore, the deposition source unit 3 is located below the transport unit 2 and connected to the lower part of the transport unit 2 during deposition processing. The deposition source unit 3 includes a deposition source chamber 31 and a deposition source 32.

The deposition source chamber 31 is a box-shaped chamber capable of maintaining a vacuum inside. The internal space 310 of the deposition source chamber 31 can communicate with the internal space 210 of the transfer chamber 21 via a communication opening 311 provided at the top of the transfer chamber 21. During operation, the internal space 310, like the internal space 210, is maintained in a vacuum atmosphere or an inert gas atmosphere such as nitrogen gas.

The evaporation source 32 emits evaporation material to form a film on the substrate transported by the transport unit 2. For example, the evaporation source 32 includes multiple nozzles (not shown) arranged in a line in the Y direction, and the evaporation material is emitted from each nozzle. For example, the evaporation source 32 also includes a storage section that stores the evaporation material and a heater (neither of which are shown) that heats the evaporation material stored in the storage section. The evaporation material stored in the storage section is heated by the heater and vaporized, causing the evaporation material to be emitted from the evaporation source 32.

The deposition source unit 3 may also include a shutter that shields the deposition source 32 when the deposition source 32 is not in use, or an evaporation rate monitor that monitors the amount of evaporation of the deposition material by the deposition source 32 (neither of which is shown).

The adhesion prevention plate 6 prevents the deposition material emitted from the deposition source 32 from adhering to the inner walls of the deposition source chamber 31 or the transfer chamber 21. For example, the adhesion prevention plate 6 is supported by the deposition source chamber 31. In this embodiment, the adhesion prevention plate 6 is positioned across the internal space 310 and internal space 210 so as to cover the deposition source 32, and has an opening formed at the top. With this configuration, some of the deposition material adheres to the substrate through the opening, while the remaining deposition material adheres to the adhesion prevention plate 6. In this way, the adhesion prevention plate 6 allows the deposition material to adhere to the substrate while preventing the deposition material from adhering to the inner walls of the deposition source chamber 31 or the transfer chamber 21.

In this embodiment, the adhesion prevention plate 6 is provided so as to be movable up and down relative to the deposition source chamber 31. More specifically, the adhesion prevention plate 6 includes an upper portion 61 and a lower portion 62, and the upper portion 61 is provided so as to be movable up and down relative to the deposition source chamber 31. This reduces the amount of descent of the deposition source unit 3 required to avoid interference between the transport unit 2 and the adhesion prevention plate 6 when the deposition source unit 3 is moved laterally by the moving unit 7.

Note that the transfer chamber 21 or the deposition source chamber 31 may be provided with an adhesion prevention plate other than the adhesion prevention plate 6. For example, an adhesion prevention plate may be provided on the ceiling or side surface of the interior of the transfer chamber 21.

The moving unit 7 is a unit that moves the deposition source unit 3. In this embodiment, the moving unit 7 is provided below the deposition source unit 3 and moves the deposition source unit 3 in the vertical direction (Z direction) or horizontal direction (Y direction) while supporting the deposition source unit 3. The moving unit 7 includes a horizontal moving section 71 and an elevating section 72.

The lateral movement unit 71 moves the deposition source unit 3 in the lateral direction (Y direction). In this embodiment, the lateral movement unit 71 moves the deposition source unit 3 in the width direction (Y direction) of the substrate, which intersects with the substrate transport direction (X direction). The lateral movement unit 71 includes a guide unit 711 provided on the floor surface and a drive unit 712 for moving the deposition source unit 3 along the guide unit 711. Well-known technology can be used as the drive unit 712, as appropriate. For example, a drive wheel capable of running on a rail as the guide unit 711 may be rotated by a motor or the like.

The lifting unit 72 raises and lowers the deposition source unit 3. In this embodiment, the lifting unit 72 raises and lowers the deposition source unit 3 in the vertical direction (Z direction). The lifting unit 72 includes a deposition source unit support 721 that supports the deposition source unit 3, and a drive unit 722 that raises and lowers the deposition source unit support 721. Well-known technology can be used for the drive unit 722, but the deposition source unit support 721 may also be raised and lowered by, for example, an electric cylinder or the like.

In this embodiment, when performing maintenance on the transfer unit 2, the moving unit 7 moves the deposition source unit 3 laterally from a position below the transfer unit 2, allowing an operator to access the interior of the transfer chamber 21 from below. At this time, the moving unit 7 moves the deposition source unit 3 downward using the lifting unit 72, and then moves the deposition source unit 3 laterally using the lateral movement unit 71. This operation will be described later together with the operation of the scaffolding unit 4 (Figure 6).

In this embodiment, a moving unit 7 is provided for each of the multiple deposition source units 3. Therefore, the film forming apparatus 1 of this embodiment can move each of the multiple deposition source units 3 independently. The multiple moving units 7 may be synchronized to move the multiple deposition source units 3 together. Alternatively, there may be provided fewer moving units 7 than the deposition source units 3, and one moving unit 7 may move the multiple deposition source units 3.

Although not described further, the film forming apparatus 1 may include a control device that controls the operation of the transport unit 2, deposition source unit 3, or moving unit 7, etc.

<Configuration of scaffolding unit>
Figure 4 is a perspective view showing the configuration of the scaffolding unit 4, showing the scaffolding 41 in an unfolded state. Figure 5 is a view of the scaffolding unit 4 as seen from the front of the film forming apparatus 1, showing the scaffolding 41 in an unfolded state. The scaffolding unit 4 includes the scaffolding 41, a lifting section 42, a handrail section 43, a connecting section 44, and a fixing section 45. Note that the lifting section 42 and the handrail section 43 are omitted from Figure 5.

The scaffolding 41 is used for maintenance of the transport unit 2, and is sometimes called a platform or step. The scaffolding 41 includes a column portion 411, a beam portion 412, and a floorboard portion 413.

The pillar portions 411 support the beam portions 412. One pillar portion 411 includes two pillar members 4111 and a connecting portion 4112 that rotatably connects the two pillar members 4111 and contacts the floor surface. In this embodiment, a total of four pillar portions 411 are provided. Furthermore, the pillar member 4111 is rotatably connected to the beam member 4121 or beam member 4122 of the beam portion 412 at the end opposite the end connected to the connecting portion 4112.

The beam portion 412 supports the floorboard portion 413. The beam portion 412 includes beam members 4121 and 4122 of different lengths, and a connecting member 4123 that connects the beam members. The beam portion 412 is composed of two sections spaced apart in the X direction, and each section is connected to each other by two beam members 4121, two beam members 4122, and three connecting members 4123 and extends in the Y direction. The connecting member 4123 also rotatably supports the beam members 4121 and 4122. In this way, the beam portion 412 is foldable because multiple beam members are rotatably arranged.

The floor plate portion 413 forms an area where an operator can move around, for example, during maintenance of the transport unit 2. The floor plate portion 413 is positioned at a predetermined height from the plane on which the film forming apparatus 1 is installed, to facilitate operator access to the transport unit 2. The floor plate portion 413 includes multiple plate-shaped members 4131 to 4135 arranged side by side in the Y direction. The plate-shaped members 4131 to 4135 are supported at both ends in the X direction by beam member 4121, beam member 4122, or connecting member 4123, respectively. Therefore, the floor plate portion 413 is folded when the beam portion 412 is folded.

The lifting section 42 allows a worker to ascend and descend to the floorboard section 413 of the deployed scaffolding 41. In this embodiment, the lifting section 42 is a ladder. However, the lifting section 42 may also be a staircase, steps, etc. Furthermore, the lifting section 42 is rotatably supported on the beam section 412, for example.

The handrail section 43 includes multiple handrails 431-433 that stand upright relative to the floorboard section 413 of the unfolded scaffolding 41. Handrail 431 is rotatably attached to plate-shaped member 4131, handrail 432 is rotatably attached to plate-shaped member 4133, and handrail 433 is rotatably attached to plate-shaped member 4135. When the scaffolding 41 is folded, the handrails 431-433 are folded down onto the floorboard section 413 and folded together with the floorboard section 413.

In this embodiment, the connection portion 44 connects the beam portion 412 to the moving unit 7, thereby connecting the scaffolding 41 to the deposition source unit 3 via the moving unit 7. Note that the connection portion 44 may also directly connect the scaffolding 41 to the deposition source unit 3.

The fixing portion 45 supports the scaffolding 41 in a fixed position. In this embodiment, the fixing portion 45 supports the end of the beam member 4121 located farthest from the deposition source unit 3 in the Y direction, on the side farthest from the deposition source unit 3. The fixing portion 45 may be supported by a component that does not follow the movement of the deposition source unit 3, such as the frame portion 101 or the transport unit 2. Note that although the fixing portion 45 itself is fixed here, the fixing portion 45 may also support the beam member 4121 so that it can rotate or slide.

In this embodiment, a scaffolding unit 4 is provided for each of the three deposition source units 3. In other words, the film forming apparatus 1 includes three scaffolding units 4.

In this embodiment, when performing maintenance inside the transfer chamber 21 of the transfer unit 2, the worker can move the deposition source unit 3 laterally and access the internal space 210 through the exposed communication opening 213. However, because the transfer unit 2 is located above the deposition source unit 3, the worker may not be able to perform maintenance on the transfer unit 2 while standing on the floor. In such cases, if the worker needs time to prepare and remove a step stool or the like, work efficiency during maintenance may decrease. Therefore, in this embodiment, as described below, a platform is deployed below the transfer unit 2 in conjunction with the lateral movement of the deposition source unit 3.

<Explanation of the operation of the scaffolding unit>
Fig. 6 is a diagram illustrating the operation of the deposition source unit 3 and the scaffolding unit 4. Fig. 7(A) is a diagram of the scaffolding unit 4 before the unfolding operation as viewed from the front of the film forming apparatus 1, showing the scaffolding unit 4 in states ST1 and ST2 of Fig. 6. Fig. 7(B) is a diagram of the scaffolding unit 4 during the unfolding operation as viewed from the front of the film forming apparatus 1, showing the scaffolding unit 4 in state ST3 of Fig. 6. Note that the lifting section 42 and the handrail section 43 are omitted in Figs. 7(A) and 7(B).

In state ST1, the deposition source unit 3 is located at the connection position POS1 where it connects with the transport unit 2. State ST1 is the state in which the film formation apparatus 1 performs deposition on a substrate. In state ST1, the deposition source unit 3 is located below the transport unit 2, and the lower part of the transport unit 2 is connected to the upper part of the deposition source unit 3.

State ST2 is a state in which the deposition source unit 3 has moved from the connected position POS1 to the disconnected position POS2 below it. The deposition source unit 3 is moved in the -Z direction from the connected position POS1 to the disconnected position POS2 by the lifting part 72 of the moving unit 7.

In addition, in state ST1 or state ST2, the scaffolding unit 4 is in a folded state. In these states, the column members 4111, beam members 4121, and beam members 4122 extend in the Z direction, and the connecting members 4123 are arranged to extend in the Y direction. In addition, the floor board portion 413 is folded along the beam portion 412. This allows the scaffolding unit 4 as a whole to be configured compactly in the Y direction.

State ST3 is the state in which the deposition source unit 3 is in the middle of moving to the maintenance position. One end of the scaffold 41 of the scaffold unit 4 is supported at a predetermined position by the fixing part 45, and the other end connected to the connecting part 44 moves laterally (to the right in the drawing, in the -Y direction) in conjunction with the movement of the deposition source unit 3, thereby unfolding from the folded state.

State ST4 is the state in which the lateral movement of the deposition source unit 3 is complete. In state ST4, the deposition source unit 3 is located at the maintenance position POS3, where maintenance of the transport unit 2 or the deposition source unit 3 is performed. When the deposition source unit 3 is located at the maintenance position POS3, the scaffolding 41 is deployed below the transport unit 2.

Figure 8 is a plan view schematically showing the positional relationship between the transport unit 2 and the scaffold unit 4. In this embodiment, when the deposition source unit 3 is located at the maintenance position POS3 (see the deposition source unit 3 in the center of Figure 8), the deployed scaffold 41 is deployed so as to be located below the communication opening 213 of the transport unit 2. In other words, the deployed scaffold 41 is positioned below the transport unit 2 so as to face the communication opening 213. Furthermore, when the deposition source unit 3 is located at the maintenance position POS3, the scaffold 41 is positioned so as to overlap the communication opening 213 of the transport unit 2 in the vertical direction (Z direction) in a planar view. By positioning the scaffold 41 below the communication opening 213, a worker can more easily access the internal space 210 while standing on the scaffold. Furthermore, when the deposition source unit 3 is located at the maintenance position POS3, the scaffold 41 may be positioned so as to overlap the communication opening 213 in a planar view over the entire Y-direction of the communication opening 213. This allows workers to more easily access almost the entire interior space 210.

As described above, according to this embodiment, the scaffolding unit 4 deploys the scaffolding 41 below the transport unit 2 in conjunction with the movement of the deposition source unit 3 from the disconnection position POS2 to the maintenance position POS3. This facilitates access to the transport unit 2 when performing maintenance on the transport unit 2, and eliminates the need to prepare and remove a step stool or the like, thereby improving work efficiency during maintenance.

Second Embodiment
9 is a view of the scaffolding unit 9 according to the second embodiment as seen from the front of the film forming apparatus 1, showing the state in which the scaffolding 91 is deployed. In the second embodiment, the configuration of the beams and floorboards differs from that of the first embodiment. Hereinafter, the same components as those in the first embodiment will be assigned the same reference numerals, and the description thereof may be omitted.

In this embodiment, the scaffolding 91 includes a column portion 411, a beam portion 912, and a floor plate portion 913. The beam portion 912, which supports the floor plate portion 913, includes a beam member 9121, a beam member 9122, and a connecting member 9123. Here, when the scaffolding 91 is deployed, the beam members 9121 and 9122 are arranged obliquely with respect to the Y direction, which is the movement direction of the deposition source unit 3. More specifically, when viewed from the X direction, the extension direction of the beam members 9121 and 9122 includes a Y direction component and a Z direction component.

With this configuration, the axial direction of the beam members 9121 and 9122 is inclined relative to the movement direction of the deposition source unit 3 at the maintenance position POS3, making it easier for the beam members 9121 and 9122 to rotate when the deposition source unit 3 moves laterally. Therefore, according to this embodiment, the deployed platform 91 can be easily folded.

In addition, in this embodiment, the plate-like members 9131 to 9135 are shaped so that the floor surface of the floorboard portion 913 is approximately horizontal. Furthermore, the plate-like members 9131, 9133, and 9135, which are supported by the beam members 9121 or 9122 extending diagonally with respect to the Y direction, are formed so that the surfaces that form the floor surface of the floorboard portion 913 are horizontal. At the same time, the plate-like members 9131, 9133, and 9135 are formed so that the surfaces supported by the beam members 9121 or 9122 are inclined in the direction in which the beam members 9121 or 9122 extend. This allows the scaffolding 91 to be easily folded while maintaining the floor surface of the scaffolding 91 horizontal.

<Other Embodiments>
In the first embodiment, the handrail portion 43 is provided on the scaffolding unit 4, but a handrail may also be provided on the lower part of the transport unit 2. Fig. 10 is a side view of the film forming apparatus 1 in one embodiment. In this example, a handrail 931 is provided so as to extend downward from the rib 23 of the transport unit 2. Such a handrail 931 may also be provided across the lower part of the transport unit 2 in the Y direction.

The locations and number of handrails can also be changed as appropriate. For example, in the example shown in Figure 4, the handrail section 43 is provided on only one side of the floorboard section 413 in the X direction, but it may also be provided on both sides of the floorboard section 413 in the X direction. Alternatively, if multiple scaffoldings 41 are provided side by side in the X direction, the handrail sections 43 may only be provided on the outer ends of the scaffoldings 41 on both outer sides in the X direction.

Furthermore, the connection portion 44 may be provided so that the connection between the scaffolding 41 and the deposition source unit 3 can be released. This allows the scaffolding 41 to be deployed only when it is needed.

The configuration of the scaffolding 41 can also be modified as appropriate. In the above embodiment, two pillar members 4111 were connected by a connecting portion 4112, but each pillar member 4111 may be independently grounded to the floor surface and support the beam portion 412.

The film formation apparatus 1 may also be equipped with a sensor that detects a value related to the tilt of the deposition source unit 3. If the value related to the tilt of the deposition source unit 3 detected by this sensor does not satisfy a predetermined condition, the film formation apparatus 1 may stop the lifting and lowering operation of the deposition source unit 3, i.e., the movement between the connection position POS1 and the disconnection position POS2.

For example, the sensor may be a pendulum-type or float-type tilt sensor that directly detects the tilt of the deposition source unit 3, or an acceleration sensor that indirectly detects the tilt. Furthermore, for example, the sensor may be a sensor that detects a value that can determine whether the deposition source unit 3 is tilted, such as a value related to the drive load of the drive units 722 on both sides (e.g., drive current value) or the load of the deposition source unit 3 acting on the deposition source unit support units 721 on both sides.

For example, the film forming apparatus 1 may stop raising and lowering the deposition source unit 3 when the tilt of the deposition source unit 3 detected by the sensor is equal to or greater than a threshold value. Alternatively, the film forming apparatus 1 may stop raising and lowering the deposition source unit 3 when the difference in the drive current values of the drive units 722 on both sides or the load of the deposition source unit 3 applied to the deposition source unit support unit 721 is equal to or greater than a threshold value.

Third Embodiment
Fig. 11 is a front view schematically illustrating a film formation apparatus 13 according to a third embodiment. Fig. 12 is a plan view of the film formation apparatus 13 of Fig. 11, illustrating a state in which the central evaporation source unit 3 is positioned at a maintenance position POS3. This embodiment differs from the first embodiment in that the film formation apparatus 13 includes a take-out unit 5. Hereinafter, the same components as those in the first embodiment will be denoted by the same reference numerals, and their description may be omitted.

The removal unit 5 removes a predetermined component from above the deposition source unit 3 located at the maintenance position POS3. Examples of the predetermined component include the deposition source chamber 31 and the adhesion prevention plate 6 housed in the deposition source chamber 31 of the deposition source unit 3. The removal unit 5 is supported by the frame 101 so that it can move above the deposition source unit 3. The removal unit 5 includes a holder 51, a vertical movement unit 52, and a horizontal movement unit 53.

The holding unit 51 holds a predetermined component. For example, the holding unit 51 may grasp a predetermined component by moving its tip in a predetermined direction, such as horizontally. Alternatively, the holding unit 51 may be provided with a hook for catching a sling wire, and the predetermined component may be held by hanging it from the wire. The holding unit 51 may also be configured to be foldable so that it can accommodate components of different sizes.

The vertical movement unit 52 moves the holding unit 51 in the vertical direction. Any known technology can be used as the vertical movement unit 52, but for example, an electric cylinder with a ball screw mechanism or a pneumatic balance cylinder may also be used.

The horizontal movement unit 53 moves the holding unit 51 in the horizontal direction. More specifically, the horizontal movement unit 53 moves the vertical movement unit 52 in the horizontal direction, thereby moving the holding unit 51 in the horizontal direction. For example, the horizontal movement unit 53 includes an X-direction movement unit 531 that moves the vertical movement unit 52 in the X direction, and a Y-direction movement unit 532 that moves the vertical movement unit 52 in the Y direction. In this embodiment, the Y-direction movement unit 532 moves the vertical movement unit 52 in the Y direction, and the X-direction movement unit 531 moves the Y-direction movement unit 532 in the X direction. The X-direction movement unit 531 and the Y-direction movement unit 532 can be formed using known technology as appropriate, but may also include, for example, a rack-and-pinion mechanism and an electric motor that rotates the pinion. Alternatively, a pulley-type mechanism may be used, and movement in at least one of the X and Y directions may be performed manually by an operator without a drive source.

For example, when the removal unit 5 removes a specified part from the deposition source unit 3 located at the maintenance position POS3, it places the removed part on a maintenance table or the like (not shown). This makes it easier for an operator to perform maintenance than if the part to be maintained is inside the deposition source chamber 31.

It is also possible to employ a configuration in which multiple removal units 5 are provided. In this case, when both outer deposition source units 3 are pulled out to the maintenance position POS3, parts can be removed from each deposition source unit 3 in parallel. Furthermore, when multiple removal units 5 are provided, the rail portion of the X-direction moving part 531, for example, may be shared.

Fourth Embodiment
13 is a front view schematically showing a film forming apparatus 14 according to a fourth embodiment. In this embodiment, the configuration of the scaffolding unit is different from that of the first embodiment. Hereinafter, the same components as those in the first embodiment will be assigned the same reference numerals, and the description thereof may be omitted. Furthermore, when multiple similar components are provided, the reference numerals of some of the components may be omitted in consideration of the ease of viewing the drawings.

Figure 14 is a perspective view showing an outline of the scaffolding unit 8. Figure 15 is a diagram showing the configuration of the scaffolding unit 8, including multiple placement sections 82, a lifting section 84, and their surrounding configuration. The scaffolding unit 8 includes multiple floorboard members 81 as scaffolding, multiple placement sections 82, a pair of rail members 83, a lifting section 84, and a connection section 85.

The multiple floor plate members 81a to 81h (hereinafter collectively referred to as floor plate members 81) are arranged vertically side by side when the deposition source unit 3 is in the connection position POS1 or the disconnection position POS2 (see Figures 13 and 15). Furthermore, the multiple floor plate members 81 are arranged horizontally side by side when the deposition source unit 3 is in the maintenance position POS3 (see Figure 14).

Figure 16 shows the configuration of the floorboard member 81 and is an oblique view of the floorboard member 81 viewed from the back. Each of the multiple floorboard members 81 includes a top wall 811, a side wall 812, a positioning portion 813, a positioning portion 814, and an extension portion 815. The top wall 811 forms a foothold for the worker. The side wall 812 forms the side surface of the floorboard member 81 in the X direction. The side wall 812 includes a wall portion 812a that is provided on the inside in the X direction relative to the other portions. The positioning portion 813 determines positioning relative to the multiple mounting portions 82. The positioning portion 814 determines positioning relative to the pair of rail members 83. In this embodiment, the positioning portion 813 is a protrusion that protrudes inward in the X direction from the wall portion 812a, and the positioning portion 814 is a protrusion that protrudes outward in the X direction from the wall portion 812a.

The multiple placement sections 82a-82h (hereinafter collectively referred to as placement sections 82) are configured to be able to place multiple floor plate members 81a-81h on them, respectively. Each placement section 82 includes a plate member 821 on which the floor plate member 81 is placed, and a positioning section 822 (see FIG. 18) provided at a position corresponding to the positioning section 813 of the floor plate member 81. In this embodiment, the positioning section 822 is configured by forming a recess in a block provided on the plate member 821 that receives the positioning section 813. In this embodiment, two positioning sections 822 are provided on each placement section 82, spaced apart in the X direction, so that they correspond to the positions of the positioning sections 813 when the floor plate member 81 is placed on it. Note that each placement section 82 may include multiple plate members 821 spaced apart in the X direction, or may consist of a single plate member.

The pair of rail members 83 supports a plurality of floor plate members 81 arranged side by side in the horizontal direction. In this embodiment, the pair of rail members 83 are supported via connection portions 831 on the ribs 23, frame portion 101, or the like of the film forming apparatus 14. In another embodiment, the pair of rail members 83 may be supported directly on the ribs 23 or frame portion 101, or on a support portion or the like arranged on the floor surface. Figure 17 is a perspective view showing the configuration of the rail members 83. The pair of rail members 83 are provided with positioning portions 833 that position the floor plate members 81. The positioning portions 833 are provided at a predetermined interval on each of the pair of rail members 83. The positioning portions 833 are configured by forming recesses in blocks provided on the rail members 83 that receive the positioning portions 814 of the floor plate members 81. In addition, a rail-side rack 845, described below, is provided below the pair of rail members 83.

Referring again to Figure 15, the lifting unit 84 raises and lowers the multiple placement units 82. The lifting unit 84 includes a support unit 841, a gear 842, a gear 843, a gear 844, a rail-side rack 845, and a support-side rack 846. The support unit 841 extends in the lifting direction (vertical direction in this embodiment) and supports the multiple placement units 82.

When the deposition source unit 3 moves between the disconnection position POS2 and the maintenance position POS3, the gear 842 rotates by meshing its teeth 842a with the teeth 845a (see Figure 18) of the rail-side rack 845. In other words, when the deposition source unit 3 moves laterally, the gear 842 moves laterally relative to the rail-side rack 845, causing the gear 842 to rotate.

Gear 843 transmits the rotation of gear 842 to gear 844. In this embodiment, gears 842 and 843 form a Geneva mechanism. That is, when convex portion 842b on gear 842 fits into groove portion 843a on gear 843, the rotation of gear 842 is transmitted to gear 843; otherwise, it is not transmitted. This allows the rotation of gear 842 to be intermittently transmitted to gear 843. Furthermore, the rotation of gear 843 is transmitted to gear 844 when its teeth 843b mesh with teeth 844a of gear 844. In other words, the rotation of gear 842 is transmitted to gear 844 via gear 843.

The gear 844 transmits a rotational driving force to the support unit side rack 846 by meshing its teeth 844a with the teeth 846a of the support unit side rack 846. The support unit side rack 846 converts the rotation of the gear 844 into linear motion. The support unit side rack 846 moves in the vertical direction due to the rotation of the gear 844, causing the support unit 841 on which the support unit side rack 846 is mounted to rise and fall. This in turn causes the multiple placement units 82 supported by the support unit 841 to rise and fall.

The connection portion 85 is the connection portion of the scaffolding unit 8 with the moving unit 7. By connecting the scaffolding unit 8 to the moving unit 7 via the connection portion 85, the multiple mounting portions 82 of the scaffolding unit 8 move laterally in conjunction with the lateral movement of the deposition source unit 3.

Figure 18 is an explanatory diagram illustrating the transfer of the floor plate member 81 from the placement section 82 to the rail member 83. For ease of viewing, the rail member 83 and rail-side rack 845, which are positioned on the front side of the drawing in the X direction, are shown with dashed lines.

In this embodiment, the multiple floor plate members 81 are arranged vertically with the deposition source unit 3 positioned at the connection position POS1 or the disconnection position POS2. The multiple floor plate members 81 are deployed so as to be aligned horizontally in conjunction with the movement of the deposition source unit 3 from the disconnection position POS2 to the maintenance position POS3. Specifically, the multiple floor plate members 81 are sequentially transferred from the multiple placement units 82 to the pair of rail members 83 in conjunction with the movement of the deposition source unit 3 from the disconnection position POS2 to the maintenance position POS3, thereby aligning the multiple floor plate members 81 horizontally. Figure 18 illustrates the operation when the floor plate member 81a placed on the top placement unit 82a of the multiple placement units 82 is transferred to the pair of rail members 83. However, the same operation is performed when the other placement units 82b to 82h transfer the floor plate members 81b to 81h to the pair of rail members 83.

In state ST101, the deposition source unit 3 moves laterally a predetermined distance after the floor plate member 81b has been transferred from the second-highest mounting portion 82b to the pair of rail members 83. In state ST101, the multiple mounting portions 82 move laterally in conjunction with the movement of the deposition source unit 3 due to the engagement of the teeth 842a of the gear 842 with the teeth 845a of the rail-side rack 845. On the other hand, in state ST101, the convex portions 842b are not inserted into the grooves 843a, so no lifting or lowering operation is performed by the lifting portion 84. In other words, the mounting portion 82 moves horizontally.

State ST102 is a state in which the deposition source unit 3 has moved laterally relative to the rail member 83 by a predetermined distance from state ST101. In state ST102, the multiple mounting sections 82 are moved downward by the lifting section 84 while moving laterally in conjunction with the movement of the deposition source unit 3. That is, as the convex portion 842b fits into the groove portion 843a, the rotation of the gear 842 is transmitted to the support section side rack 846 via gears 843 and 844, causing the mounting sections 82 to move downward. For example, the rotation of the gear 842 is transmitted intermittently so that the mounting sections 82 begin to move downward once the mounting sections 82 have moved horizontally enough to avoid contact between the floor plate members 81b and 81a.

State ST103 is the state after the floor plate member 81a has been handed over from the mounting portion 82a to the pair of rail members 83. In state ST103, the multiple mounting portions 82 move laterally in conjunction with the movement of the deposition source unit 3. During the transition from state ST102 to state ST103, the mounting portions 82a move laterally and downward. Then, when the mounting surface on which the floor plate member 81a of the mounting portion 82a is placed moves from above to below the support surface of the floor plate member 81a of the pair of rail members 83, the floor plate member 81a is handed over to the rail members 83. In other words, the mounting portion 82a hands over the floor plate member 81a it is placed on to the rail members 83 as it moves from above to below the pair of rail members 83.

As described above, in this embodiment, the scaffolding is deployed below the transport unit 2 in conjunction with the evaporation source unit 3 moving from the disconnection position POS2 to the maintenance position POS3.

The scaffolding unit 8 may also have a lifting section such as a ladder, staircase, or step that can ascend and descend to the floorboard member 81 serving as the scaffolding in the unfolded state.

The invention is not limited to the above-described embodiments, and various modifications and variations are possible within the scope of the invention.

1. Film deposition device, 2. Transfer unit, 3. Vapor deposition source unit, 4. Scaffolding unit, 41. Scaffolding

Claims (19)

a transport unit for transporting the substrate;
a film formation source unit including a film formation source and movable between a first position below the transport unit and a second position displaced laterally from the first position;
An in-line type film forming apparatus that forms a film on a substrate while transporting the substrate,
a scaffold unit that deploys a scaffold below the transport unit in association with the film formation source unit moving from the first position to the second position;
A film forming apparatus characterized by: The scaffolding unit includes a foldable floorboard portion as the scaffolding,
The folded floor plate portion is unfolded in conjunction with the film formation source unit moving from the first position to the second position.
2. The film forming apparatus according to claim 1. The scaffolding unit comprises:
A beam serving as the scaffolding for supporting the floorboard portion;
a connection portion that connects the beam and the film formation source unit,
3. The film forming apparatus according to claim 2. The film deposition apparatus of claim 3, wherein, when the scaffolding is deployed, the beam is arranged at an angle to the direction of movement of the film deposition source unit. The film deposition apparatus described in any one of claims 1 to 4, characterized in that the scaffolding unit includes a lifting section that allows a worker to ascend and descend to the deployed scaffolding. A film deposition apparatus according to any one of claims 1 to 5, characterized in that the scaffolding unit includes a handrail that stands upright relative to the deployed scaffolding. The film forming apparatus of any one of claims 1 to 5, further comprising a handrail extending downward from the bottom of the transport unit. a plurality of the film formation source units are arranged side by side in a substrate transport direction so as to be independently movable,
the scaffolding units are provided for the plurality of film formation source units, respectively;
8. The film forming apparatus according to claim 1, wherein the film forming apparatus is a film forming apparatus. the transport unit includes a communication opening for communicating an internal space of the transport unit with an internal space of the film formation source unit,
The deployed scaffold is disposed below the transport unit so as to face the communication opening.
9. The film forming apparatus according to claim 1, wherein the film forming apparatus is a film forming apparatus having a film forming surface. A scaffolding unit used in an in-line film forming apparatus that forms a film on a substrate while transporting the substrate,
The film forming apparatus includes:
a transport unit for transporting the substrate;
a film-forming source unit including a film-forming source that emits a film-forming substance and that is movable between a first position below the transport unit and a second position that is displaced laterally relative to the first position;
The scaffolding unit comprises:
deploying a scaffold below the transport unit in conjunction with the film formation source unit moving from the first position to the second position;
A scaffolding unit characterized by: a transport unit for transporting the substrate;
a film formation source unit including a film formation source and movable between a first position below the transport unit and a second position displaced laterally from the first position;
An in-line type film forming apparatus that forms a film on a substrate while transporting the substrate,
a scaffold unit that deploys a scaffold below the transport unit in conjunction with the film formation source unit moving from the first position to the second position;
The scaffolding unit includes a plurality of floorboard members,
In conjunction with the movement of the film formation source unit from the first position to the second position, the plurality of floor plate members that were aligned in the vertical direction at the first position are aligned in the horizontal direction,
a removal unit configured to remove a predetermined component from above the film formation source unit located at the second position;
A film forming apparatus characterized by: The take-out unit comprises:
a holding portion for holding the predetermined component;
a vertical movement unit that moves the holding unit in a vertical direction;
a horizontal movement unit that moves the holding unit in a horizontal direction;
Including,
12. The film forming apparatus according to claim 11. a transport unit for transporting the substrate;
a film formation source unit including a film formation source and movable between a first position below the transport unit and a second position displaced laterally from the first position;
An in-line type film forming apparatus that forms a film on a substrate while transporting the substrate,
a scaffold unit that deploys a scaffold below the transport unit in conjunction with the film formation source unit moving from the first position to the second position;
The scaffolding unit includes a plurality of floorboard members as the scaffolding,
The plurality of floorboard members are
the film formation source units are arranged vertically side by side in the first position,
The film formation source units are deployed so as to be aligned in a horizontal direction in conjunction with the movement of the film formation source units from the first position to the second position.
A film forming apparatus characterized by: The scaffolding unit comprises:
a plurality of placement sections arranged side by side in the vertical direction and capable of placing the plurality of floorboard members thereon;
a pair of rail members supporting the plurality of floorboard members arranged side by side in the horizontal direction,
In conjunction with the movement of the film formation source unit from the first position to the second position, the plurality of floor plate members are sequentially transferred from the plurality of mounting portions to the pair of rail members, thereby arranging the plurality of floor plate members in a horizontal direction.
14. The film forming apparatus according to claim 13. The scaffolding unit comprises:
a plurality of placement sections arranged side by side in the vertical direction and capable of placing the plurality of floorboard members thereon;
a pair of rail members supporting the plurality of floorboard members arranged side by side in the horizontal direction;
The scaffolding unit includes a lifting unit that lifts and lowers the plurality of mounting units,
when the film formation source unit moves from the first position to the second position, the plurality of mounting units move laterally together with the film formation source unit and also move downward by the lifting unit;
Each of the plurality of placement sections transfers each of the plurality of floor panel members placed thereon to the rail members when moving from the upper side to the lower side of the pair of rail members.
14. The film forming apparatus according to claim 13. the lifting unit intermittently lowers the plurality of floor plate members when the film formation source unit moves from the first position to the second position.
16. The film forming apparatus according to claim 15. The lifting unit is
a first rack provided on the pair of rail members;
a first gear that rotates in mesh with the first rack when the film formation source unit moves from the first position to the second position;
a second gear to which rotation of the first gear is transmitted;
a support portion extending in the lifting direction and supporting the plurality of placement portions;
a second rack provided on the support portion and meshing with the second gear to move the support portion in an up-and-down direction,
17. The film forming apparatus according to claim 15, wherein the film forming apparatus is a film forming apparatus. the lifting unit intermittently transmits rotation of the first gear to the second gear by a Geneva mechanism;
18. The film forming apparatus according to claim 17. Each of the plurality of floor plate members includes a first positioning portion for positioning with respect to the plurality of placement portions and a second positioning portion for positioning with respect to the pair of rail members.
The film forming apparatus according to any one of claims 14 to 18.