JP7650130B2 - DISPLAY SYSTEM, ANALYSIS APPARATUS, CONTROL METHOD, AND CONTROL PROGRAM - Google Patents

Description

The present invention relates to a display system, an analysis device, a control method, and a control program.

Analytical instruments such as electron probe micro analyzers (EPMA) and scanning electron microscopes (SEM) irradiate a sample with charged particle beams such as electron beams and ion beams. The analytical instruments are configured to observe and analyze the sample by detecting signals (secondary electron beams, reflected electron beams, characteristic X-rays, etc.) generated from the sample by this irradiation.

JP 2015-17971 A (Patent Document 1) discloses a spectroscopic measurement device that uses a spectroscopic microscope to observe a sample. The spectroscopic measurement device described in Patent Document 1 has an image processing device that displays spectroscopic data acquired by the spectroscopic microscope on a display device (hereinafter referred to as the "first display device").

JP 2015-17971 A

However, there are cases where a user wants to view the screen displayed on the first display device in a location other than where the first display device is installed. In such cases, a configuration is conceivable in which a second display device is installed in a location other than the first display device, and the screen displayed on the first display device is also displayed on the second display device. However, in this configuration, due to reasons such as differences in the sizes of the display areas of the first display device and the second display device, a screen of a different size than the screen displayed on the first display device is displayed on the second display device. In this case, a problem may arise in that the user cannot view a screen of the same size on the second display device as the screen displayed on the first display device.

The present invention has been made to solve the above problems, and its purpose is to provide a technology that allows a user to view a screen of the same size on a second display device as the screen related to sample analysis displayed on a first display device.

A display system according to an aspect of the present disclosure includes a first display device, a second display device, and a control device that controls the first display device and the second display device. The control device displays a first screen relating to a sample analysis on the first display device, generates a second screen by replicating the first screen, and displays the second screen on the second display device.

According to the technology disclosed herein, the second screen is displayed on the second display device so that it is the same size as the first screen displayed on the first display device, so that the user can view on the second display device a screen of the same size as the screen related to sample analysis displayed on the first display device.

FIG. 1 is a schematic diagram illustrating an example of a configuration of an analysis device and a display system according to an embodiment of the present invention. FIG. 2 is a diagram illustrating an example of the configuration of an analysis unit. FIG. 2 is a diagram illustrating a hardware configuration of a first computer, a second computer, and a third computer. 4A and 4B are diagrams illustrating examples of displays on a first display and a third display. 13 is an example of an observation image displayed on a remote display in the display system of the comparative example. 13 is an example of a capture screen displayed on a second display according to the present embodiment. 11 is a diagram for explaining how the display area of the capture screen is changed in response to a user operation. FIG. FIG. 13 is a diagram for explaining a remote operation by a second user. 13 is a diagram for explaining an example in which the second computer integrally displays a second analysis screen and a second observation screen. FIG. 13 is a diagram for explaining an example in which the second computer switchably displays a second analysis screen and a second observation screen. FIG. FIG. 4 is a functional block diagram of a third computer. FIG. 2 is a functional block diagram of a first computer and a second computer. 4 is a flowchart showing a process executed in a first computer and a second computer.

The following describes in detail the embodiments of the present disclosure with reference to the drawings. Note that the same or equivalent parts in the drawings are given the same reference numerals and their description will not be repeated. Also, the drawings are not illustrated according to the actual dimensional ratio, and in some places the ratio is changed to clarify the structure in order to make it easier to understand.

[Display system and analysis device]
1 is a schematic diagram illustrating an example of the configuration of an analysis device 1000 and a display system 100 according to an embodiment of the present invention. The analysis device according to the present embodiment is configured to irradiate a sample with a charged particle beam and detect a signal generated from the sample to observe and analyze the sample. Analysis device 1000 is, for example, an electron probe micro analyzer (EPMA).

1 shows an analysis unit 50, a first computer 10, a second computer 20, a third computer 30, a first input device 11, a second input device 21, a first display 12, a second display 22, a third display 32, and a network 700. The first display 12 corresponds to the "first display device" of this disclosure, the second display 22 corresponds to the "second display device" of this disclosure, and the third display 32 corresponds to the "third display device" of this disclosure. In addition, the first computer 10, the second computer 20, and the third computer 30 correspond to the "control device" of this disclosure.

Referring to FIG. 1, the analysis device 1000 according to this embodiment includes an analysis unit 50, a first computer 10, a third computer 30, a first display 12, a third display 32, and a first input device 11.

The analysis unit 50 is, for example, an electron beam irradiation device. However, the analysis unit 50 may be another device. The analysis unit 50 is configured to irradiate the surface of the sample with an electron beam and detect a signal emitted from the sample surface. The detection signal includes characteristic X-rays, secondary electrons, reflected electrons, and the like, which have energies specific to the elements contained in the sample surface. The analysis device 1000 can identify and quantify the elements present at the analysis position on the sample surface by analyzing the energy and intensity of the detected characteristic X-rays.

The first display 12 and the third display 32 display the shape, composition image, and uneven shape of the sample surface based on the detected secondary electrons and reflected electrons. The analyst (hereinafter also referred to as the "first user") can observe the shape, composition image, and uneven shape of the sample surface. The first user can search for the analysis position on the sample surface while observing the secondary electron image or reflected electron image. Specifically, the first user can set the irradiation position of the electron beam on the sample surface (i.e., the measurement position on the sample surface) while observing the electron image, and specify the area to be analyzed on the sample surface.

In the analysis device 1000, generally, the processes related to the control of the electron beam irradiation device and the processes related to the analysis of characteristic X-rays detected by the electron beam irradiation device each handle large amounts of information, and therefore the amount of calculation of that information tends to be large. Therefore, the analysis device 1000 according to the present embodiment is configured to distribute the load by executing the processes related to the control of the analysis unit 50 and the processes related to the analysis of characteristic X-rays in separate processing units.

Specifically, the first computer 10 is an analysis computer for analyzing the characteristic X-rays detected by the analysis unit 50. The third computer 30 is a control computer for controlling the analysis unit 50.

As shown in FIG. 1, the first computer 10 and the third computer 30 are communicatively connected. The third computer 30 is further communicatively connected to the analysis unit 50. The third computer 30 generates a control signal for controlling the operation of each part of the analysis unit 50, and outputs the generated control signal to the analysis unit 50. The third computer 30 also receives a signal (at least one of secondary electrons and reflected electrons, and characteristic X-rays) detected by the analysis unit 50. The third computer 30 receives a signal of at least one of secondary electrons and reflected electrons from the analysis unit 50, and generates an observation image (at least one of secondary electron image and reflected electron image) of the analysis position. The third computer 30 also generates an element distribution image (X-ray image) at the analysis position in response to the positional scanning of the electron beam at the analysis position on the sample surface.

The first computer 10 receives the characteristic X-ray signal from the third computer 30, and performs qualitative and quantitative analysis of the elements contained in the analysis position on the sample surface based on the received characteristic X-ray signal. Specifically, the first computer 10 creates an X-ray spectrum according to the wavelength scan of the characteristic X-rays, and performs qualitative and quantitative analysis based on this.

The analysis device 1000 has a display as an output device for providing various information such as the generated observation image and the analysis results to the first user. As described above, since the amount of information for each of the processes related to the control of the analysis unit 50 and the processes related to the analysis of characteristic X-rays is large, in this embodiment, the first display 12 and the third display 32 are used. The first display 12 is connected to the first computer 10 and has a first display area 120. The first computer 10 controls the first display 12. The first display 12 displays information for the processes related to the analysis of characteristic X-rays. The first display area 120 displays the X-ray spectrum and the results of qualitative and quantitative analysis based thereon.

The third display 32 is connected to the third computer 30 and has a third display area 320. The third computer 30 controls the third display 32. The third display 32 displays processing information related to the control of the analysis unit 50. The third display area 320 displays an image (at least one of a secondary electron image and a backscattered electron image, and an X-ray image) observed by the first user when setting the analysis position of the sample.

As shown in FIG. 1, the first display 12 and the third display 32 are positioned close to each other for ease of operation for the first user.

The first input device 11 is connected to the first computer 10. The first input device 11 is configured to be able to communicate with the first computer 10 and the third computer 30. The first input device 11 is a device for inputting commands from the first user to the first computer 10. The first input device 11 is a keyboard, a mouse, a touch panel, or the like.

The first user can use the first input device 11 to specify a position on the first display area 120 with the pointer P1, thereby reading out the coordinates of the specified position and performing an input operation to that position. Specifically, icons indicating analysis items such as qualitative analysis or quantitative analysis are displayed in the first display area 120. The first user uses the first input device 11 to specify an icon corresponding to a desired analysis item with the pointer P1. The first computer 10 converts the operation input to the first input device 11 into an operation of the pointer P1 displayed in the first display area 120. This allows the first user to specify analysis items and analysis conditions such as detailed settings of the analysis items using the first input device 11. The icons are displayed in the first display area 120 and the third display area 320. There is no particular limitation on the icons, as long as they are images used for operating the analysis device 1000 or for analysis by the analysis device 1000 (for example, identification or quantification of a substance).

The pointer P1 corresponding to the first input device 11 normally functions on the first display area 120, but when the pointer P1 moves beyond the end of the first display area 120 (the right end of the first display area 120 in FIG. 1) and to the end of the third display area 320 (the left end of the third display area 320 in FIG. 1) as shown by the arrow A1, it is configured to function in the third display area 320. In other words, the pointer P1 functions as if the right end of the first display area 120 and the left end of the third display area 320 were virtually connected.

According to this, the first user can use the first input device 11 to specify a position on the second display screen 200 with the pointer P1, thereby reading out the coordinates of the specified position and performing an input operation at that position. Specifically, icons indicating control items of the analysis unit 50 are displayed in the third display area 320. The first user uses the first input device 11 to specify an icon corresponding to a desired control item with the pointer P1. The first computer 10 converts the operation input to the first input device 11 into an operation of the pointer P1 displayed in the third display area 320. This allows the first user to specify the conditions, etc. of the desired control item using the first input device 11.

The display system 100 according to this embodiment includes a first computer 10, a second computer 20, a third computer 30, a first display 12, a second display 22, a third display 32, a first input device 11, a second input device 21, and a network 700.

The display system 100 displays at least a part of the "capture screen of the screen displayed on the first display 12" and at least a part of the "capture screen of the screen displayed on the third display 32" on the second display 22. The screen displayed on the first display 12 may be referred to as the "first screen", and the screen displayed on the third display 32 may be referred to as the "third screen". The "capture screen of the first screen" and the "capture screen of the third screen" may be collectively referred to as the "capture screen". Here, the "capture screen" is a screen generated by capturing the screen displayed on the display (the first display 12 and the third display 32) by the computer (the first computer 10 and the third computer 30) on the analysis device 1000 side. The capture screen may be referred to as the "second screen". The second display 22 displays at least a part of the entire area of the second screen (see FIG. 7, etc.).

Each of the first screen, the second screen, and the third screen includes one or more images. In this embodiment, the images are icons, observation images, and the like, which will be described later. If an image that the user can operate on the first screen or the third screen (for example, an icon described below) is included, the image of this icon is also included on the capture screen. When the user operates an icon displayed on the first screen or the third screen, the icon is displayed in an operated state (for example, an icon pressed state). On the other hand, even if the user operates an icon displayed on the capture screen, the display state of the icon is not changed. As will be described in FIG. 8, when the user operates an icon displayed on the capture screen, a process corresponding to the icon is executed by the first computer 10 or the third computer 30.

In addition, the first screen and the capture screen of the first screen are the same size. Here, "the same size as the capture screen of the first screen" typically means that the first screen and the capture screen of the first screen have the same dimensions and scale. In addition, "the same size as the capture screen of the first screen" means that the image included in the first screen and the image included in the capture screen of the first screen have the same dimensions and scale. In addition, the third screen and the capture screen of the third screen are the same size.

In this embodiment, an example will be described in which the second display area 220 of the second display 22 is smaller than the first display area 120 of the first display 12 and the third display area 320 of the third display 32. Therefore, the second display 22 displays a part of the entire area of the capture screen of the first screen or a part of the entire area of the capture screen of the third screen. The area of the second display area 220 of the second display 22 may be greater than or equal to the area of the first display area 120 of the first display 12 and greater than or equal to the area of the third display area 320 of the third display 32. In this case, the second display 22 displays the entire area of the capture screen of the first screen and the entire area of the capture screen of the third screen. As a result, the second display 22 displays a screen of at least a part of the entire area of the capture screen of the first screen and a screen of at least a part of the entire area of the capture screen of the third screen.

The second display 22 is a display located away from the analysis device 1000, and is a so-called remote display. With the configuration as shown in FIG. 1, a user (hereinafter also referred to as the "second user") can view the screen displayed on the first display 12 and the screen displayed on the third display 32 on the second display 22, even when the user is away from the analysis device 1000.

The first computer 10 and the second computer 20 are connected to a network 700 and are configured to be able to communicate with each other. The second computer 20 controls the second display 22. The second display 22 has a second display area 220. The second computer 20 displays a captured screen of the screen displayed on the first display 12 and the screen displayed on the third display 32 in the second display area 220.

The second input device 21 is connected to the second computer 20. The second input device 21 is configured to be able to communicate with the second computer 20. The second input device 21 is a device for inputting commands from the second user to the second computer 20. The second input device 21 is a keyboard, a mouse, a touch panel, or the like. The second user can use the second input device 21 to specify a position on the second display area 220 with a pointer P2. In addition, the second computer 20 can transmit information input from the second input device 21 to the first computer 10. The first computer 10 can further transmit this information to the third computer 30. This allows the second user to remotely operate the analysis device 1000 using the second input device 21.

In this embodiment, the second user may be a maintenance contractor for the analysis device 1000. The maintenance contractor checks, for example, whether appropriate screens are displayed on the first display 12 and the third display 32. In this case, even if the second user is located away from the analysis device 1000, the second user can view the screens displayed on the first display 12 and the third display 32 on the second display. In addition, the second user can use the second input device 21 to remotely operate the analysis device 1000. Therefore, the second user can appropriately perform remote maintenance of the analysis device 1000.

In addition, in this embodiment, the second user may be an analyst of the sample. In this case, the second user can properly analyze the sample even if he or she is located away from the analysis device 1000.

[Configuration of the analysis unit]
Fig. 2 is a diagram showing a schematic configuration example of the analysis unit 50 shown in Fig. 1. Referring to Fig. 2, the analysis unit 50 includes an electron gun 1, a deflection coil 2, an objective lens 3, a sample stage 4, a sample stage driving unit 5, a plurality of spectroscopes 6a and 6b, a deflection coil control unit 7, and an electron detector 8. The electron gun 1, the deflection coil 2, the objective lens 3, the sample stage 4, the spectroscopes 6a and 6b, and the electron detector 8 are provided in a measurement chamber (not shown). During X-ray measurement, the measurement chamber is evacuated to a near-vacuum state.

The electron gun 1 is an excitation source that generates an electron beam E that is irradiated onto a sample S on a sample stage 4, and the beam current of the electron beam E can be adjusted by controlling a converging lens (not shown). The deflection coil 2 forms a magnetic field using a driving current supplied from a deflection coil control unit 7. The magnetic field formed by the deflection coil 2 can deflect the electron beam E.

The objective lens 3 is provided between the deflection coil 2 and the sample S placed on the sample stage 4, and narrows the electron beam E that has passed through the deflection coil 2 to a very small diameter. The sample stage 4 is a stage on which the sample S is placed, and is configured to be movable in a horizontal plane by the sample stage drive unit 5.

In the analysis section 50, the irradiation position of the electron beam E on the sample S can be scanned two-dimensionally by driving the sample stage 4 by the sample stage driving section 5 and/or driving the deflection coil 2 by the deflection coil control section 7. The deflection coil 2 and/or the sample stage 4 constitute a "scanning section" that scans the electron beam E on the sample S. Normally, when the scanning range is relatively narrow, scanning is performed by the deflection coil 2, and when the scanning range is relatively wide, scanning is performed by moving the sample stage 4.

The spectroscopes 6a and 6b are devices for detecting characteristic X-rays emitted from the sample S irradiated with the electron beam E. Although only two spectroscopes 6a and 6b are shown in FIG. 2, in reality, the analysis unit 50 is provided with a total of four spectroscopes surrounding the sample S. The configuration of each spectroscope is the same except for the dispersing crystal, and below, each spectroscope may be simply referred to as "spectroscope 6."

The spectrometer 6a includes an analyzing crystal 61a, a detector 63a, and a slit 64a. The irradiation position of the electron beam E on the sample S, the analyzing crystal 61a, and the detector 63a are arranged on a Rowland circle (not shown). The analyzing crystal 61a is tilted while moving on a straight line 62a by a drive mechanism (not shown). The detector 63a is rotated as shown in the figure in response to the movement of the analyzing crystal 61a by a drive mechanism (not shown) so that the angle of incidence of the characteristic X-rays with respect to the analyzing crystal 61a and the angle of emergence of the diffracted X-rays satisfy the Bragg diffraction condition. This makes it possible to perform wavelength scanning of the characteristic X-rays emitted from the sample S.

Spectrometer 6b is configured to include a dispersing crystal 61b, a detector 63b, and a slit 64b. The configurations of spectrometer 6b and the spectrometers not shown are similar to those of spectrometer 6a except for the dispersing crystal, so the description will not be repeated. Note that the configuration of each spectrometer is not limited to the above configuration, and various configurations that are conventionally known can be adopted.

The electron detector 8 is an instrument for detecting the electron beam emitted from the sample S irradiated with the electron beam E. The electron detector 8 detects secondary electrons. The detection signal of the electron detector 8 is sent to the third computer 30.

In addition, reflected electrons are also detected by an electron detector (not shown). A detection signal of the reflected electrons is also sent to the third computer 30.

The deflection coil control unit 7 controls the drive current supplied to the deflection coil 2 according to instructions from the third computer 30. By controlling the drive current according to a predetermined drive current pattern (magnitude and change speed), the irradiation position of the electron beam E on the sample S can be scanned at a desired scanning speed.

The third computer 30 executes various processes related to the control of the analysis unit 50 according to the built-in programs and tables. The third computer 30 also generates an observation image of the analysis target area on the sample S in response to the positional scanning of the electron beam E in the analysis target area. Specifically, the third computer 30 generates a secondary electron image of the analysis target area of the sample S based on the secondary electrons detected by the electron detector 8. The third computer 30 also generates a distribution image (X-ray image) of the analysis target element in the analysis target area of the sample S based on the characteristic X-rays detected by the four spectroscopes 6.

When the first computer 10 receives the wavelength scan of the X-rays to be analyzed from the third computer 30, it creates an X-ray spectrum based on the received wavelength scan. The first computer 10 performs qualitative analysis and/or quantitative analysis based on the X-ray spectrum.

[Hardware configuration of each computer]
FIG. 3 is a diagram illustrating a schematic hardware configuration of the first computer 10, the second computer 20, and the third computer 30. As shown in FIG.

Referring to FIG. 3, the first computer 10 includes a CPU 13, a memory 14, an input interface (hereinafter also referred to as input I/F 15), a display controller 16, and a communication interface (hereinafter also referred to as communication I/F 17).

The first computer 10 is configured to operate according to a program stored in the memory 14. The memory 14 includes a ROM (Read Only Memory), a RAM (Random Access Memory), and a HDD (Hard Disk Drive), which are not shown.

The ROM can store programs executed by the CPU 13. The programs include a program related to the process of analyzing characteristic X-rays detected by the analysis unit 50 and received via the third computer 30. The RAM can temporarily store data used during execution of the programs in the CPU 13, and can function as a temporary data memory used as a working area. The HDD is a non-volatile storage device, and can store characteristic X-rays received from the third computer 30, analysis results of the characteristic X-rays, etc. In addition to or instead of the HDD, a semiconductor storage device such as a flash memory may be employed.

The CPU 13 controls the first computer 10. The CPU 13 deploys the programs stored in the ROM of the memory 14 to the RAM etc. and executes them.

The input I/F 15 is connected to the first input device 11. The input I/F 15 is an interface through which the first computer 10 communicates with the first input device 11, and receives various signals from the first input device 11.

The display controller 16 is connected to the first display 12. The display controller 16 outputs a signal to the first display 12 to instruct the content to be displayed in the first display area 120. If the first display 12 is a display equipped with a touch panel, the display controller 16 receives a signal indicating a touch operation by the first user from the first display 12.

The communication I/F 17 is connected to the communication I/F 27 of the second computer 20 and the communication I/F 37 of the third computer 30. The communication I/F 17 is an interface through which the first computer 10 communicates with the second computer 20 and the third computer 30, and inputs and outputs various signals between the second computer 20 and the third computer 30.

The first computer 10 is realized by installing software related to the analysis of characteristic X-rays on a computer with general functions and storing dedicated programs and data in the memory 14. Specifically, a basic software program called an operating system (OS) runs continuously on the first computer 10. This basic software program is responsible for displaying on the first display 12, processing operational inputs to the first input device 11, accessing the memory 14, etc., and is capable of parallel processing.

On the other hand, the software program for analyzing characteristic X-rays is executed on the basic software program. The software program for analyzing characteristic X-rays is supplied from the outside to the memory 14 of the first computer 10, and is realized by the CPU 13 reading and executing the supplied program code.

The second computer 20 includes a CPU 23, a memory 24, an input I/F 25, a display controller 26, and a communication I/F 27. The second computer 20 is configured to operate according to a program stored in the memory 24. The memory 24 includes a ROM, a RAM, and a HDD, which are not shown.

The ROM can store programs executed by the CPU 23. The programs include programs for processing related to control of the second display 22 and control based on information from the second input device 21. The RAM can temporarily store data used during execution of the programs in the CPU 23, and can function as a temporary data memory used as a working area. The HDD is a non-volatile storage device, and can store detection signals from the analysis unit 50 and information generated by the second computer 20. In addition to or instead of the HDD, a semiconductor storage device such as a flash memory may be used.

The CPU 23 controls the analysis unit 50 and the entire analysis device 1000. The CPU 23 loads the programs stored in the ROM of the memory 24 into the RAM etc. and executes them.

The input I/F 25 is connected to the second input device 21. The input I/F 25 is an interface through which the second computer 20 communicates with the second input device 21, and receives various signals from the second input device 21.

The display controller 26 is connected to the second display 22. The display controller 26 outputs a signal to the second display 22 to instruct the display content of the second display area 220. If the second display 22 is a display equipped with a touch panel, the display controller 26 receives a signal from the second display 22 indicating the analyst's touch operation on the second display area 220.

The communication I/F 27 is connected to the communication I/F 17 of the first computer 10. The communication I/F 27 is an interface for the second computer 20 to communicate with the first computer 10, and inputs and outputs various signals between the second computer 20 and the first computer 10.

The second computer 20 can be realized by installing software for controlling the second display 22 on a computer with general functions and storing dedicated programs and data in the memory 24. This program causes the captured screen sent from the first computer 10 to be displayed on the second display 22 at the same size as the captured screen. This program may also cause the captured screen sent from the first computer 10 to be displayed on the second display 22 at the same resolution as the captured screen. Specifically, a basic software program called an OS runs constantly on the second computer 20. This basic software program is responsible for display on the second display 22, processing operation input to the second input device 21, access to the memory 24, etc., and is capable of parallel processing.

The third computer 30 includes a CPU 33, a memory 34, an input I/F 25, a display controller 36, and a communication I/F 37. The third computer 30 is configured to operate according to a program stored in the memory 34. The memory 34 includes a ROM, a RAM, and a HDD, which are not shown.

The ROM can store programs executed by the CPU 33. The programs include programs for processing related to the control of the analysis unit 50. The RAM can temporarily store data used during execution of the programs in the CPU 33, and can function as a temporary data memory used as a working area. The HDD is a non-volatile storage device, and can store detection signals from the analysis unit 50 and information generated by the third computer 30. In addition to or instead of the HDD, a semiconductor storage device such as a flash memory may be used.

The CPU 33 controls the analysis unit 50 and the entire analysis device 1000. The CPU 33 loads the programs stored in the ROM of the memory 34 into the RAM etc. and executes them.

The display controller 36 is connected to the third display 32. The display controller 36 outputs a signal to the third display 32 to instruct the display content of the third display area 320. If the third display 32 is a display equipped with a touch panel, the display controller 36 receives a signal from the third display 32 indicating a touch operation by the first user on the third display area 320.

The communication I/F 37 is connected to the analysis unit 50 and the communication I/F 17 of the first computer 10. The communication I/F 37 is an interface for the third computer 30 to communicate with the analysis unit 50 and the first computer 10, and inputs and outputs various signals between the analysis unit 50 and the first computer 10.

The third computer 30 can be realized by installing software related to the control of the analysis unit 50 on a computer with general functions and storing dedicated programs and data in the memory 34. Specifically, a basic software program called an OS runs continuously on the third computer 30. This basic software program is responsible for displaying on the third display 32 and accessing the memory 34, and is capable of parallel processing.

On the other hand, the software program for controlling the analysis unit 50 is executed on the basic software program. The software program for controlling the analysis unit 50 is supplied from the outside to the memory 34 of the third computer 30, and is realized by the CPU 33 reading and executing the supplied program code.

At least one of the programs stored in memory 14, memory 24, and memory 34 may be stored in a storage medium and distributed as a program product. Alternatively, the program may be provided by an information provider as a so-called program product that can be downloaded via the Internet or the like. The controller reads the program provided on the storage medium or via the Internet or the like. The controller stores the read program in a specified storage area (e.g., ROM). The controller executes the stored program to perform the above-mentioned display process.

The storage medium is not limited to DVD-ROM (Digital Versatile Disk Read Only Memory), CD-ROM (compact disc read-only memory), FD (Flexible Disk), or hard disk, but may also be a medium that carries a program in a fixed manner, such as magnetic tape, cassette tape, optical disk (MO (Magnetic Optical Disc)/MD (Mini Disc)/DVD (Digital Versatile Disc)), optical card, mask ROM, EPROM (Electronically Programmable Read-Only Memory), EEPROM (Electronically Erasable Programmable Read-Only Memory), flash ROM, or other semiconductor memory. The recording medium is also a non-transitory medium that allows a computer to read a program, etc.

[Display examples of the first display and the second display]
4 is a diagram showing display examples of the first display 12 and the third display 32. Referring to FIG. 4, the third display 32 displays information related to the control of the analysis unit 50. The first user can use the first input device 11 to give various instructions to the third computer 30 for controlling the analysis unit 50 based on the display. The third display area 320 of the third display 32 can display icons indicating the observation conditions in the analysis unit 50, numerical values indicating the observation conditions, and the observed image I1 (either a secondary electron image or a backscattered electron image, and an X-ray image). The third computer 30 generates the observed image I1 based on the signal of the characteristic X-rays transmitted from the analysis unit 50 to the third computer 30.

The icons indicating the observation conditions include an icon 221, an icon 222, an icon 223, and an icon 224. The icon 221 is an icon for adjusting the position of the sample stage 4 (see FIG. 2). The numerical value M1 is a numerical value indicating the driving of the sample stage 4 (for example, the driving amount of the sample stage 4). The icon 222 is an icon for adjusting the focus of the electron beam. The numerical value M2 is a numerical value regarding the focus. The icon 223 is an icon for adjusting the astigmatism correction. The numerical value M3 is a numerical value regarding the astigmatism correction. The icon 224 is an icon for adjusting the magnification of the observation image I1. The numerical value M4 is a numerical value regarding the magnification. The first user can adjust each of the numerical values M1 to M4 using the first input device 11 while viewing the observation image I1. In this way, the screen displayed by the third display 32 is a screen including the observation conditions (icons indicating the observation conditions) and the observation image I1 of the sample. Hereinafter, the screen displayed by the third display 32 is also referred to as the "first observation screen". As a variant, the first observation screen may be a screen that does not include observation conditions (icons indicating observation conditions).

On the other hand, the first display area 120 of the first display 12 displays an icon for processing and analyzing the characteristic X-rays transmitted from the third computer 30 to the first computer 10, a window W1 showing the analysis results, and an image I2 obtained by image processing the observed image I1 displayed on the first display 12.

The icons include icon 121, icon 122, and icon 123. Icon 121, icon 122, and icon 123 are icons indicating the analysis content. Icon 121 is an icon indicating qualitative analysis. Icon 122 is an icon indicating quantitative analysis. Icon 123 is an icon indicating area analysis.

The first user can use the first input device 11 to select the observed image to be analyzed, select the analysis content using icons, etc., and check the results of the analysis and processing in window W1 and image I2, etc. Note that image I2 in Figure 4 shows an example in which processing has been performed to increase the contrast of observed image I1, thereby improving visibility for the first user.

In this way, the screen displayed by the first display 12 is a screen that includes the sample analysis contents and the sample analysis results. Hereinafter, the screen displayed by the first display 12 is also referred to as the "first analysis screen." As a variant, the first analysis screen may be a screen that includes the sample analysis contents or the sample analysis results.

As described above, in sample observation with the analysis device 1000, when the sample S to be observed is changed, the various parts of the analysis unit 50 are controlled, such as by aligning the sample S and changing the focus and magnification of the electron beam. Information from the analysis unit 50 is transmitted to the third computer 30 that controls the analysis unit 50, and is displayed on the third display 32 that displays information related to control. Based on the information displayed on the third display 32, the first user gives instructions to the third computer 30 regarding the control of the various parts of the analysis unit 50. The third computer 30 reflects the instructions of the first user in the control of the analysis unit 50.

Figure 5 is an example of an observation image I100 displayed by a remote display in a display system of a comparative example. Due to reasons such as different resolutions between the third display 32 on the analysis device side and the remote display, or different display areas between the third display 32 on the analysis device side and the remote display, the observation image displayed by the third display 32 on the analysis device side is displayed on the remote display in different sizes. In the example of Figure 5, a portrait-oriented observation image I100 is displayed. Furthermore, when the display on the analysis device side displays multiple observation images on one screen, the observation images are displayed at different sizes, and therefore the multiple observation images may be displayed on the remote display with different arrangements.

If the observation image displayed on the display of the analytical device is displayed on the remote display at a different size, the second user will not be able to see the actual observation image (an observation image of the same size as the observation image displayed on the display of the analytical device). As a result, for example, if the second user is a maintenance technician, remote maintenance work may be hindered, making it impossible to perform appropriate remote maintenance. Furthermore, if the second user is an analyst, it may make it impossible to perform appropriate analysis of the sample.

The first computer 10 then generates a capture screen of the first analysis screen to be displayed on the first display 12. The third computer 30 also generates a capture screen of the first observation screen to be displayed on the third display 32. Hereinafter, the capture screen of the first observation screen will also be referred to as the "second observation screen," and the capture screen of the first analysis screen will also be referred to as the "second analysis screen."

The second computer 20 displays the capture screen (second observation screen and second analysis screen) generated by the first computer on the second display 22.

FIG. 6 is an example of a capture screen displayed by the second display 22 in this embodiment. In the example of FIG. 6, an observation image I1 included in the second analysis screen is displayed. As shown in FIG. 6, in this embodiment, the second display 22 displays a capture screen of a screen displayed on the display of the analysis device 1000 side (i.e., the first display 12 and the third display 32). In addition, the second computer 20 stores a program for displaying the capture screen in the same size as the transmitted capture screen (see the description of FIG. 3). Therefore, the size of the screen displayed on the display of the analysis device 1000 side and the screen displayed on the second display 22 can be made the same. Therefore, the second user can view a screen of the same size as the screen displayed on the display of the analysis device 1000 side on the second display 22. In addition, when the resolution of the display of the analysis device 1000 side and the resolution of the second display 22 are approximately the same, the resolution of the screen displayed on the display of the analysis device 1000 side and the screen displayed on the second display 22 can be made the same.

The second display 22 displays at least a part of the entire area of the capture screen. The second computer 20 can change the area of the entire area of the capture screen that the second display 22 displays in response to a user operation. FIG. 7 is a diagram showing the change of the area of the entire area of the capture screen that the second display 22 displays. In FIG. 7 to FIG. 10, the solid lines indicate the area of the entire area of the capture screen that is displayed in the second display area 220 of the second display 22. Also, the dashed lines indicate the area of the entire area of the capture screen that is not displayed on the second display 22. In FIG. 7(A), icons 221 and 222 are displayed. When the user performs a scroll operation, for example, downward, while the screen of FIG. 7 (screen surrounded by a solid line) is displayed, the second display 22 displays the screen shown in FIG. 7(B) (screen surrounded by a solid line). In FIG. 7(B), icons 223 and 224 are displayed. With this configuration, the second user can display the area of the capture screen that the user wants to view on the second display 22.

The second user can also use the capture screen displayed on the second display 22 to perform remote operation of the analysis device 1000. Figure 8 is a diagram for explaining remote operation by the second user.

Figure 8 (A) shows the first observation screen displayed by the third display 32, and Figure 8 (B) shows the second observation screen displayed by the second display 22. As shown in Figure 8 (B), when an icon 224 on the second observation screen (capture screen) is designated by the second user, the third computer 30 determines that the icon 224 on the first observation screen has been virtually designated (see pointer P1 indicated by a dashed line in Figure 8 (A)). In this way, the third computer 30 determines that the location designated by the second user in the area of the second observation screen and the same location on the first observation screen have been virtually designated. The third computer 30 causes the analysis unit 50 to execute processing according to the designated icon 224. A specific example of the processing in Figure 8 is described below.

A first reference point is set on the first observation screen. In the example of FIG. 8(A), the top left point of the first observation screen is set as the first reference point. A second reference point is set on the second observation screen. In the example of FIG. 8(B), the top left point of the entire area of the second observation screen is set as the second reference point. In this way, the position indicated by the first reference point and the position indicated by the second reference point are the same. Both the first reference point and the second reference point are indicated by (X coordinate, Y coordinate). In the example of FIG. 8, both the first reference point and the second reference point are indicated by (0, 0).

As shown in FIG. 8(B), it is assumed that an icon 224 in the area of the second observation screen is specified by a pointer P2 based on an operation by the second user. The coordinates of the position specified by the pointer P2 are (X, Y). The second computer 20 acquires the relative position of the position specified by the second user on the second observation screen with respect to the second reference point (0, 0). The relative position is (X, Y).

Next, the second computer 20 transmits the relative position (X, Y) to the third computer 30 via the first computer 10. The third computer 30 identifies the relative position at the first reference point on the first observation screen based on the transmitted relative position (X, Y). In the example of FIG. 8(A), the third computer 30 identifies the position designated by the pointer P1 shown by the dashed line as the relative position. The third computer 30 executes processing according to the identified relative position (the position designated by the pointer P1 shown by the dashed line). In the example of FIG. 8(A), the third computer 30 executes processing to change the magnification of the observation image I1. In the example of FIG. 8, a case where the second display 22 displays the second observation screen has been described, but even if the second display 22 displays the second analysis screen, the second user can perform remote operations on the second analysis screen.

With this configuration, the second user can remotely operate the analysis device 1000 using the capture screen (second analysis screen and second observation screen) displayed by the second display 22.

Next, other display examples of the second analysis screen and the second observation screen by the second computer 20 will be described. The second computer 20 can display the second analysis screen and the second observation screen integrally on the second display 22. FIG. 9 is a diagram for explaining an example in which the second computer 20 displays the second analysis screen and the second observation screen integrally in the second display area 220. Below, a screen in which the second analysis screen and the second observation screen are integrated may be referred to as an "integrated screen."

The second computer 20 generates an integrated screen by combining an end A1 of the second analysis screen and an end A2 of the second observation screen. The second computer 20 displays at least a portion of the entire area of the integrated screen on the second display 22. The second user can also change the area of the entire area of the integrated screen that is displayed on the second display (see the description of FIG. 7).

In this way, by the second display 22 displaying an integrated screen, the user can view the second analysis screen and the second observation screen on the same screen.

Next, another example of displaying the second analysis screen and the second observation screen by the second computer 20 will be described. The second computer 20 can switchably display the second analysis screen and the second observation screen in the second display area 220.

FIG. 10 is a diagram for explaining an example in which the second computer 20 switchably displays the second analysis screen and the second observation screen in the second display area 220. When the second computer 20 displays either the second analysis screen or the second observation screen, and a predetermined operation is performed by the second user, the second computer 20 switches to the other screen. In the example of FIG. 10, the predetermined operation is an operation of moving the pointer P2 to the edge of the second analysis screen. Note that the predetermined operation may be another operation, for example, an operation on a switching button (not shown) displayed on the second display. In this way, since the second computer 20 switchably displays the second analysis screen and the second observation screen, the second user can view the screen that the second user desires between the second observation screen and the second screen.

The second user may also be able to select whether the second display 22 displays the second observation screen and the second screen integrally (see FIG. 9) or displays the second observation screen and the second screen switchably (see FIG. 10).

[Functional block diagram of the first computer and the second computer]
11 is a functional block diagram of the third computer 30. The third computer 30 includes a receiving unit 402, a generating unit 406, a display control unit 410, a capturing unit 404, and a transmitting unit 408.

The analysis unit 50 transmits data such as characteristic X-rays to the third computer 30. The receiving unit 402 of the third computer 30 receives the data such as characteristic X-rays. The generating unit 406 generates a first observation screen based on the data of characteristic X-rays. The display control unit 410 displays the generated first observation screen on the third display 32. The capturing unit 404 generates a second observation screen by capturing the first observation screen. The transmitting unit 408 of the third computer 30 transmits the data of the second observation screen and the data of characteristic X-rays to the first computer 10.

Figure 12 is a functional block diagram of the first computer 10 and the second computer 20. The first computer 10 has a receiving unit 502, a capturing unit 504, a generating unit 506, a transmitting unit 508, and a display control unit 510. The second computer 20 has a receiving unit 602, a display control unit 604, an input unit 606, an acquiring unit 608, and a transmitting unit 610.

The receiving unit 502 of the first computer 10 receives the second observation screen data and the characteristic X-ray data from the third computer 30. The generating unit 506 generates a first analysis screen based on the characteristic X-ray data from the third computer 30. The display control unit 510 displays the generated first analysis screen on the first display 12.

The capture unit 504 generates a second analysis screen by capturing the first analysis screen. The transmission unit 508 transmits the data of the second observation screen received by the reception unit 502 and the data of the second analysis screen generated by the capture unit 504 to the second computer 20.

The receiving unit 602 of the second computer 20 receives the data of the second analysis screen and the data of the second observation screen from the first computer 10. The second computer 20 stores the data of the second analysis screen and the data of the second observation screen in a specified memory area. The display control unit 604 displays the second analysis screen and the second observation screen on the second display 22.

The second user can also input commands to the second computer 20 using a second input device 21 such as a mouse. The input unit 606 receives commands from the second input device 21. If the command received by the input unit 606 is a command to move the pointer P2, the display control unit 604 moves the pointer P2 displayed on the second display 22 in accordance with the command. If the command received by the input unit 606 is a command to designate an icon, the acquisition unit 608 acquires the relative position of the designated position based on a second reference point (see FIG. 8).

The transmitting unit 610 transmits the relative position acquired by the acquiring unit 608 to the first computer 10. Upon receiving the relative position, the first computer 10 transmits the relative position to the third computer 30. Upon receiving the relative position, the third computer 30 identifies the relative position on the first observation screen from the first reference point based on the relative position (see FIG. 8). The third computer 30 executes processing according to the identified relative position.

[Flowchart of the first computer and the second computer]
13 is a flowchart showing the processing executed in the first computer 10 and the second computer 20. In step S2, the second computer 20 determines whether or not a remote start operation has been executed by the second user. The remote start operation is, for example, an operation on a remote start button (not shown) displayed on the second display 22.

If the remote start operation has not been performed (NO in step S2), the second computer 20 repeats the process of step S2 until the remote start operation is performed. If it is determined that the remote start operation has been performed (YES in step S2), the process proceeds to step S4. In step S4, the second computer 20 transmits a request signal to the first computer 10. The request signal is a signal for requesting the second observation screen and the second analysis screen.

In step S102, the first computer 10 receives the request signal. Next, in step S104, the capture unit 504 of the first computer 10 generates a second analysis screen and a second observation screen by capturing the first analysis screen and the first observation screen. Next, in step S106, the first computer 10 transmits the second analysis screen and the second observation screen to the second computer 20.

In step S6, the second computer 20 receives the second analysis screen and the second observation screen. Next, in step S8, the second analysis screen and the second observation screen are displayed on the second display 22.

[Modification]
(1) In the above embodiment, a configuration in which the first computer 10 generates a capture screen has been described as an example of a method for displaying the screens displayed on the first display 12 and the third display 32 on the second display 22 so that they are the same size. However, this method may be another method. For example, the first computer 10 may transmit to the second computer 20 data of the first analysis screen and the first observation screen, and a control signal for displaying the first analysis screen and the first observation screen at the same size. The second display 22 displays an analysis screen and an observation screen of the same size as the first analysis screen and the first observation screen based on the control signal. Even in the case of this configuration, the second display 22 can display an analysis screen and an observation screen of the same size as the first analysis screen and the first observation screen.

(2) In the above embodiment, the analysis device 1000 has been described as having two displays (first display 12 and third display 32). However, the analysis device 1000 may have one display, or may have three or more displays. In addition, there may be more than one second display 22. Even in such a configuration, the first computer 10 executes a process (e.g., a process for generating a capture screen) for displaying on the second display 22 a screen of the same size as the screen displayed on the display of the analysis device 1000.

(3) In the above embodiment, the analysis device 1000 is described as including a first computer 10 and a third computer 30. However, the analysis device 1000 may include one computer, or may include three or more computers.

(4) In the above embodiment, the second display area 220 of the second display 22 is smaller than the first display area 120 of the first display 12 and the third display area 320 of the third display 32. However, the second display area 220 of the second display 22 may be larger than or equal to the first display area 120 of the first display 12 and the third display area 320 of the third display 32.

(5) In the above embodiment, the first computer 10 is configured to be connected to the network 700. However, the first computer 10 may be connected to another computer via a wire. In this configuration, the other computer and the second computer 20 are connected to the network 700 and may be configured to be able to communicate with each other.

[Aspects]
It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

(Clause 1) A display system according to one embodiment includes a first display device, a second display device, and a control device that controls the first display device and the second display device. The control device displays a first screen relating to a sample analysis on the first display device, generates a second screen by replicating the first screen, and displays the second screen on the second display device.

According to the display system described in paragraph 1, the second screen is displayed on the second display device so that the second screen is the same size as the first screen displayed on the first display device. Therefore, the user can view on the second display device a screen of the same size as the screen related to the analysis of the sample displayed on the first display device.

(Clause 2) In the display system of clause 1, the control device generates the second screen by capturing the first screen.

The display system described in paragraph 2 can appropriately generate a screen of the same size as the screen displayed by the first display device.

(Clause 3) In the display system described in clause 1 or clause 2, the control unit can change the area of the second screen that is displayed by the second display device in response to a user operation.

According to the display device described in paragraph 3, the user can cause the second display device to display the area of the second image that the user wishes to view.

(4) In the display system described in any one of paragraphs 1 to 3, a first reference point is set on the first screen, and a second reference point is set on the second screen indicating the same position as the position indicated by the first reference point, and the control device accepts a user's designation for the second screen, and identifies a position on the first screen that corresponds to the relative position when the first reference point is used as a reference based on the relative position of the position designated by the user on the second screen relative to the second reference point, and executes processing related to the analysis of the sample according to the identified position.

According to the display device described in paragraph 4, the user can remotely control the analysis device to execute processing related to the analysis of the sample.

(5) In the display system described in any one of 1 to 4, the display system includes a third display device, the first screen includes at least one of the analysis contents and analysis results of the sample, and the control device displays a first observation screen including an observation image of the sample on the third display device, generates a second observation screen by duplicating the first observation screen, and displays the second screen and the second observation screen on the second display device.

According to the display device described in paragraph 5, the second display device can display at least one of the analysis conditions and analysis results of the analysis section in the same size as the first analysis screen, and can display the observation contents of the sample in the same size as the first observation screen.

(6) In the display system described in any one of paragraphs 5, the control device displays at least a portion of the screen in which the end of the second screen and the end of the second observation screen are combined on the second display device.

According to the display system described in paragraph 6, the second display device can display an integrated screen in which the edge of the second observation screen and the edge of the second screen are joined, so that the user can view both the second observation screen and the second screen on the same screen.

(7) In the display system described in any one of paragraphs 5, the control device switches between the second screen and the second observation screen and displays them on the second display device.

According to the display device described in paragraph 7, the second display device can switch between displaying the second observation screen and the second screen, so the user can view either the second observation screen or the second screen.

(8) An analytical device according to one embodiment includes a first display device and a control device described in any one of 1 to 7, and an analytical unit that analyzes a sample.

According to the analytical device described in paragraph 8, the second screen is displayed on the second display device so that the second screen is the same size as the first screen displayed on the first display device. Therefore, the user can view on the second display device a screen of the same size as the screen related to the analysis of the sample by the analytical unit displayed on the first display device.

(Clause 9) A control method for controlling a first display device according to one embodiment relates to sample analysis and includes the steps of generating a second screen by replicating a first screen to be displayed on the first display device, and transmitting the second screen to a control device that causes the second display device to display the second screen.

According to the control method described in paragraph 9, the second screen is displayed on the second display device so that the second screen is the same size as the first screen displayed on the first display device. Therefore, the user can view a screen on the second display device that is the same size as the screen related to the analysis of the sample displayed on the first display device.

(Clause 10) A control program according to one embodiment causes a control device that controls a first display device to execute a step of generating a second screen by duplicating a first screen that is a screen related to sample analysis and is displayed on the first display device, and a step of transmitting the second screen to a control device that controls the second display device.

According to the control program described in paragraph 10, the second screen is displayed on the second display device so that the second screen is the same size as the first screen displayed on the first display device. Therefore, the user can view a screen on the second display device that is the same size as the screen related to the sample analysis displayed on the first display device.

(Clause 11) A control method for controlling a second display device according to one embodiment includes a step of receiving a screen displayed on the first display device and replicated by the control device regarding a sample analysis, and a step of displaying the screen on the second display device.

According to the display device described in paragraph 11, the second screen is displayed on the second display device so that the second screen is the same size as the first screen displayed on the first display device. Therefore, the user can view a screen on the second display device that is the same size as the screen related to the analysis of the sample displayed on the first display device.

(Clause 12) A control program according to one embodiment causes a control device that controls a second display device to execute a step of receiving a screen relating to a sample analysis that is displayed on a first display device and that is replicated by the control device that controls the first display device, and a step of displaying the screen on the second display device.

According to the program described in paragraph 12, the second screen is displayed on the second display device so that the second screen is the same size as the first screen displayed on the first display device. Therefore, the user can view a screen on the second display device that is the same size as the screen related to the analysis of the sample displayed on the first display device.

The embodiments disclosed herein are intended to be combined as appropriate within the scope of technical compatibility. The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present embodiments is indicated by the claims rather than the above description of the embodiments, and is intended to include all modifications within the scope and meaning equivalent to the claims.

1 Electron gun, 2 Deflection coil, 3 Objective lens, 4 Sample stage, 5 Sample stage drive unit, 7 Deflection coil control unit, 8 Electron detector, 10 First computer, 11 First input device, 12 First display, 20 Second computer, 21 Second input device, 22 Second display, 30 Third computer, 32 Third display, 50 Analysis unit, 100 Display system, 120 First display area, 200 Second display screen, 220 Second display area, 320 Third display area, 502, 602 Receiving unit, 504 Capture unit, 506 Generating unit, 508, 610 Transmitting unit, 510, 604 Display control unit, 606 Input unit, 608 Acquisition unit, 1000 Analysis device.

Claims (5)

A control device including a first computer and a second computer;
a first display device provided in the electron probe microanalyzer and controlled by the first computer;
a second display device controlled by the second computer that is connected to the first computer through a network;
the first computer displays on the first display device a first screen relating to an analysis of a sample by an analysis unit provided in the electron probe microanalyzer, and generates a second screen having the same dimensions and scale as the first screen by capturing the first screen;
The second computer displays the second screen on the second display device without changing the size and scale of the second screen,
A first reference point is set on the first screen,
A second reference point indicating the same position as the position indicated by the first reference point is set on the second screen,
The control device includes:
Accepting a user's designation for the second screen;
A display system that identifies a position on the first screen corresponding to the relative position when the first reference point is used as a reference, based on a relative position of a position specified by a user on the second screen with the second reference point as a reference, and performs processing on the electron probe microanalyzer according to the identified position. The display system according to claim 1, wherein the control device is capable of changing the area of the second screen that is displayed by the second display device in response to a user operation. the display system includes a third display device;
the first screen includes at least one of an analysis content and an analysis result of the sample,
The control device includes:
displaying a first observation screen including an observation image of the sample on the third display device;
generating a second observational view by replicating the first observational view;
3. The display system according to claim 1, wherein the second screen and the second observational screen are displayed on the second display device. The display system according to claim 3, wherein the control device displays, on the second display device, at least a portion of a screen in which an end of the second screen and an end of the second observation screen are combined. The display system according to claim 4, wherein the control device switches between the second screen and the second observation screen and displays them on the second display device.

Images