JP7551269B1 - Coating Equipment - Google Patents

Abstract

[Problem] When a shutter member is rotated above a slit-shaped discharge port to open and close the slit-shaped discharge port, the coating liquid is prevented from leaking into the slit-shaped discharge port through a gap between the outer circumferential surface of the shutter member and the inner surface of a coating liquid storage section. [Solution] When a shutter member 13 is rotated above a slit-shaped discharge port 12 to open and close the slit-shaped discharge port, a resin seal member 30 having a coating liquid guide hole 31 corresponding to the slit-shaped discharge port is provided between the shutter member and the coating liquid storage section 11, and the coating liquid guide hole is blocked by the outer circumferential surface 13a of the shutter member to prevent the coating liquid P in the coating liquid storage section from being guided to the slit-shaped discharge port, while a coating liquid guide portion 13b provided on the outer circumferential surface of the shutter member is guided to the coating liquid guide hole, so that the coating liquid in the coating liquid storage section is guided to the slit-shaped discharge port through the coating liquid guide portion and the coating liquid guide hole. [Selected Figure] Figure 3

Description

The present invention relates to a coating device that ejects a coating liquid contained in a coating liquid storage section inside a coating nozzle from a slit-shaped outlet at the tip of the coating nozzle onto an object to be coated, and moves the coating nozzle and the object to be coated relative to each other to apply the coating liquid to the surface of the object to be coated. In particular, a rotating shutter member is provided above the slit-shaped discharge port, and the outer peripheral surface of the shutter member is used to close the slit-shaped discharge port so that the coating liquid in the coating liquid storage section is not guided to the slit-shaped discharge port, while a coating liquid guide section provided on the outer peripheral surface of the shutter member is used to guide the coating liquid in the coating liquid storage section from the coating liquid guide section to the slit-shaped discharge port, thereby coating the coating liquid on the surface of the object to be coated. The coating liquid in the coating liquid storage section is guided from the coating liquid guide section to the slit-shaped discharge port, and the coating liquid is applied to the surface of the object to be coated. The coating liquid is characterized in that it can be easily prevented from leaking from the coating liquid storage section into the slit-shaped discharge port through a gap between the outer peripheral surface of the shutter member that closes the slit-shaped discharge port and the inner surface of the coating liquid storage section, and from wearing or scratching the inner surface of the shutter member or the coating liquid storage section when the shutter member is rotated to open and close the slit-shaped discharge port.

Conventionally, coating devices that apply coating liquid to the surface of a coating target have been used in which the coating liquid stored in a coating liquid storage section inside a coating nozzle is discharged onto the target from a slit-shaped discharge port at the tip of the coating nozzle, and the coating nozzle and the target are moved relative to each other to apply the coating liquid to the surface of the target.

In recent years, coating devices have been used to apply a coating liquid in a specified shape onto the surface of a substrate such as a wafer.

For example, as shown in Patent Documents 1 and 2, a coating device that applies a coating liquid in a circular shape to the surface of a circular object to be coated such as a wafer has a coating liquid storage section in a coating nozzle, and a cylindrical shutter member having a coating liquid guide section with a predetermined pattern on its outer surface is rotated over the slit-shaped discharge port of the coating nozzle, and the outer surface of the shutter member blocks the slit-shaped discharge port so that the coating liquid in the coating liquid storage section is not guided to the slit-shaped discharge port, while the coating liquid guide section on the outer surface of the shutter member is guided to the slit-shaped discharge port, and the coating liquid in the coating liquid storage section is guided to the slit-shaped discharge port through the coating liquid guide section on the outer surface of the shutter member, thereby applying the coating liquid in a predetermined pattern to the surface of the object to be coated.

Here, in the coating devices shown in Patent Documents 1 and 2, even when the outer peripheral surface of the shutter member is used to block the slit-shaped discharge port as described above so that the coating liquid in the coating liquid storage unit is not guided to the slit-shaped discharge port, it is difficult to bring the coating liquid storage unit and the outer peripheral surface of the shutter member into close contact with each other, and a small gap is generated between the liquid storage unit and the outer peripheral surface of the shutter member, and the coating liquid in the coating liquid storage unit is guided through this gap to the slit-shaped discharge port and applied to the surface of the object to be coated, resulting in the problem that the coating liquid is applied to areas other than the coating unit where the coating liquid is applied.

In addition, if the outer periphery of the shutter member is brought into close contact with the coating liquid storage portion to prevent a gap from occurring between the coating liquid storage portion and the outer periphery of the shutter member, the shutter member and the coating liquid storage portion of the coating nozzle are generally made of a metal material, and so when the shutter member is rotated over the slit-shaped discharge port as described above and the coating liquid guide portion provided on the outer periphery of the shutter member opens and closes the slit-shaped discharge port, there is a problem that the inner surfaces of the shutter member and the coating liquid storage portion are worn or damaged.

JP 2021-98154 A Patent No. 6847566

The present invention aims to solve the above-mentioned problems in a coating device in which a rotating shutter member is provided above a slit-shaped discharge port, and the outer peripheral surface of the shutter member blocks the slit-shaped discharge port so that the coating liquid in the coating liquid storage section is not guided to the slit-shaped discharge port, while a coating liquid guide section provided on the outer peripheral surface of the shutter member guides the coating liquid in the coating liquid storage section from the coating liquid guide section to the slit-shaped discharge port, thereby coating the coating liquid on the surface of the object to be coated.

In other words, the objective of the present invention is to easily prevent the coating liquid in the coating liquid storage section from leaking into the slit-shaped discharge port from the gap between the outer peripheral surface of the shutter member that closes the slit-shaped discharge port and the inner surface of the coating liquid storage section, resulting in the coating liquid being applied to unwanted locations on the surface of the object to be coated, and to easily prevent the shutter member and the inner surface of the coating liquid storage section from being worn down or damaged when the slit-shaped discharge port is opened and closed.

In order to solve the above-mentioned problems, the coating device according to the present invention discharges a coating liquid contained in a coating liquid storage section inside a coating nozzle from a slit-shaped discharge port provided along the longitudinal direction of the protruding tip of the coating nozzle onto a surface of the coating object by moving the coating nozzle and the coating object relatively to each other, and when a shutter member is provided that rotates above the slit-shaped discharge port to open and close the slit-shaped discharge port, a coating liquid guide hole corresponding to the slit-shaped discharge port is provided between the shutter member and the coating liquid storage section. A resin sealing member having a sealing member formed on the outer periphery of the coating liquid storage section is provided along the periphery of the slit-shaped discharge outlet , and a concave recess is provided on the bottom surface of the coating liquid storage section so as to form a fitting structure with the resin sealing member. The coating liquid guide hole in the resin sealing member is blocked by the outer periphery of the shutter member so that the coating liquid in the coating liquid storage section is not guided to the slit-shaped discharge outlet, while the coating liquid guide portion provided on the outer periphery of the shutter member is guided to the coating liquid guide hole provided in the resin sealing member, and the coating liquid in the coating liquid storage section is guided to the slit-shaped discharge outlet through the coating liquid guide portion and the coating liquid guide hole.

When providing a shutter member that rotates above the slit-shaped discharge outlet to open and close the slit-shaped discharge outlet, as in the coating device of the present invention, if a resin sealing member having a coating liquid guide hole corresponding to the slit-shaped discharge outlet is provided between the shutter member and the coating liquid storage section, the outer peripheral surface of the shutter member can be brought into tight contact with the resin sealing member so that no gap is generated between the resin sealing member and the outer peripheral surface of the shutter member. This prevents the coating liquid in the coating liquid storage section from being guided to the slit-shaped discharge outlet from between the outer peripheral surface of the shutter member and the resin sealing member and leaking out of the slit-shaped discharge outlet, and also prevents the inner surfaces of the shutter member and the coating liquid storage section from being worn down or damaged as in the conventional case when the shutter member is rotated above the resin sealing member and the coating liquid guide section provided on the outer peripheral surface of the rotating shutter member opens and closes the coating liquid guide hole provided in the resin sealing member. Furthermore, as described above, a resin sealing member having a coating liquid guide hole corresponding to the slit-shaped discharge port is provided along the periphery of the slit-shaped discharge port, and a concave recess into which the resin sealing member is fitted is provided on the bottom surface of the coating liquid storage section, so that the resin sealing member is held within the concave recess, preventing the position of the resin sealing member from shifting due to rotation of the shutter member.

Here, in the coating device according to the present invention, the coating liquid guide holes in the resin seal member can be slit-shaped guide holes aligned with the slit-shaped discharge port, or multiple flow straightening guide holes can be provided along the slit-shaped discharge port.

In addition, in the coating device according to the present invention, it is preferable to use a flexible fluorine-based resin for the resin seal member. In this way, when a flexible fluorine-based resin is used for the resin seal member, frictional resistance is reduced when the shutter member is rotated on the resin seal member as described above, and the shutter member can be rotated smoothly to open and close the coating liquid guide hole provided in the resin seal member, and wear of the shutter member and the resin seal member can be further suppressed.

In addition, in a coating device according to the present invention, a coating liquid stored in a coating liquid storage section inside a coating nozzle is discharged onto a substrate from a slit-shaped discharge port provided along the longitudinal direction of the protruding tip of the coating nozzle, and the coating nozzle and the substrate are moved relatively to each other to coat the surface of the substrate with the coating liquid. In providing a shutter member that rotates above the slit-shaped discharge port to open and close the slit-shaped discharge port, a resin seal member having a coating liquid guide hole corresponding to the slit-shaped discharge port is provided along the periphery of the slit-shaped discharge port between the shutter member and the coating liquid storage section, The coating liquid guide hole in the resin seal member is blocked by the outer peripheral surface of the shutter member so that the coating liquid in the coating liquid storage section is not guided to the slit-shaped discharge port, while the coating liquid guide portion provided on the outer peripheral surface of the shutter member is guided to the coating liquid guide hole provided in the resin seal member to guide the coating liquid in the coating liquid storage section through the coating liquid guide portion and the coating liquid guide hole to the slit-shaped discharge port, and an insertion portion that is inserted into the slit-shaped discharge port can be provided in the resin seal member and the insertion portion can be inserted up to the tip of the slit-shaped discharge port to guide the coating liquid guide hole in the resin seal member to the tip of the slit-shaped discharge port. In this way, the coating liquid can be applied to the surface of the object through the coating liquid guide hole consisting of the slit-shaped guide hole and multiple flow straightening guide holes provided in the resin seal member.

In addition, in the coating device according to the present invention, when multiple straightening guide holes are provided along the slit-shaped discharge port as coating liquid guide holes in the resin seal member, the multiple straightening guide holes provided in the resin seal member and the multiple straightening holes provided in the straightening member can be connected, and the straightening member can be inserted up to the tip of the slit-shaped discharge port. In this way, the coating liquid guided to the multiple straightening guide holes provided in the resin seal member is applied to the surface of the object to be coated through the multiple straightening holes provided in the straightening member, and it is further possible to prevent the coating liquid from spreading in the width direction of the slit-shaped discharge port while passing through the slit-shaped discharge port and being applied to areas other than the coated portion of the object to be coated.

In addition, in the coating device according to the present invention, when multiple straightening guide holes are provided along the slit-shaped discharge port as coating liquid guide holes, the resin seal member is provided with an insertion portion that is inserted into the slit-shaped discharge port, and the insertion portion of the resin seal member is inserted halfway into the slit-shaped discharge port, and the multiple straightening guide holes provided in the resin seal member and the multiple straightening holes provided in the straightening member are connected, so that the straightening member can be inserted up to the tip of the slit-shaped discharge port. Even in this case, the coating liquid guided to the multiple straightening guide holes provided in the resin seal member is applied to the surface of the coated object through the multiple straightening holes provided in the straightening member, and it is further possible to prevent the coating liquid from spreading in the width direction of the slit while passing through the slit-shaped discharge port and being applied to areas other than the coated portion of the coated object.

In the coating device of the present invention, the coating liquid stored in the coating liquid storage section inside the coating nozzle as described above is discharged onto the substrate from a slit-shaped discharge port provided along the longitudinal direction of the protruding tip of the coating nozzle, and the coating nozzle and the substrate are moved relatively to each other to coat the surface of the substrate with the coating liquid. In providing a shutter member that rotates above the slit-shaped discharge port to open and close the slit-shaped discharge port, a resin seal member having a coating liquid guide hole corresponding to the slit-shaped discharge port is provided between the shutter member and the coating liquid storage section, so that the resin seal member The outer surface of the shutter member can be brought into tight contact with the resin sealing member so that no gap occurs between the outer surface of the shutter member and the resin sealing member, and the coating liquid in the coating liquid storage section is guided to the slit-shaped discharge outlet from between the outer surface of the shutter member and the resin sealing member, preventing it from leaking out from the slit-shaped discharge outlet.In addition, when the shutter member is rotated on the resin sealing member and the coating liquid guide hole provided in the resin sealing member is opened and closed by the coating liquid guide section provided on the outer surface of the rotating shutter member, the inner surfaces of the shutter member and the coating liquid storage section are no longer worn or damaged as in the conventional case.

1A and 1B are schematic perspective and side views showing a state in which a resin sealing member provided between a coating liquid storage section that stores a coating liquid and a shutter member has a slit-shaped guide hole that aligns with a slit-shaped discharge outlet as a coating liquid guide hole in a coating device according to a first embodiment of the present invention. FIG. 1 is a schematic cross-sectional explanatory diagram in a direction intersecting the longitudinal direction of the coating nozzle, showing a state in which, in the coating device according to the first embodiment, the resin sealing member is provided between a coating liquid storage section that stores a coating liquid and a shutter member, and the slit-shaped guide hole in the resin sealing member is blocked by the outer peripheral surface of the shutter member, thereby preventing the coating liquid in the coating liquid storage section from being guided to the slit-shaped discharge outlet. This is a schematic cross-sectional explanatory diagram in a direction intersecting the longitudinal direction of the coating nozzle, showing the state in which, in the coating device of the above-mentioned embodiment 1, the shutter member is rotated, the coating liquid guide portion provided on the outer peripheral surface of the shutter member is guided to the position of the slit-shaped guide hole provided in the resin sealing member, and the coating liquid in the coating liquid storage portion is guided through the coating liquid guide portion and the slit-shaped guide hole to the slit-shaped discharge outlet, thereby coating the coating liquid on the surface of the body to be coated. 5A and 5B are schematic perspective and side views showing a state in which a resin sealing member provided between a coating liquid storage section that stores a coating liquid and a shutter member has a number of flow straightening guide holes provided along a slit-shaped discharge outlet as coating liquid guide holes in a coating device according to a second embodiment of the present invention. 11A and 11B are a schematic perspective view and a schematic side view of a flow straightening member provided with a large number of flow straightening holes in the coating device according to the second embodiment. FIG. 11 is a schematic cross-sectional explanatory diagram in a direction intersecting the longitudinal direction of the coating nozzle, showing a state in which, in the coating apparatus according to the second embodiment, the resin sealing member is provided between a coating liquid storage section that stores the coating liquid and a shutter member, the straightening member is inserted into the slit-shaped discharge outlet such that a number of straightening guide holes in the resin sealing member communicate with a number of straightening holes in the straightening member, and the number of straightening guide holes in the resin sealing member are blocked by the outer peripheral surface of the shutter member, thereby preventing the coating liquid in the coating liquid storage section from being guided to the slit-shaped discharge outlet. FIG. 13 is a schematic cross-sectional explanatory diagram in a direction intersecting the longitudinal direction of the coating nozzle, illustrating the state in which, in the coating device of the above-described embodiment 2, the shutter member is rotated, the coating liquid guide portion provided on the outer peripheral surface of the shutter member is guided to the position of the multiple flow straightening guide holes provided in the resin sealing member, and the coating liquid in the coating liquid storage portion is guided to the tip of the slit-shaped discharge outlet through the multiple flow straightening guide holes in the resin sealing member and the multiple flow straightening holes in the flow straightening member, thereby coating the coating liquid on the surface of the body to be coated. FIG. 11 is a schematic oblique view and a schematic side view of a resin sealing member provided between a coating liquid storage section that stores a coating liquid and a shutter member in a coating device according to a third embodiment of the present invention, the resin sealing member having an insertion section that is inserted to a position midway within a slit-shaped discharge port, and a number of straightening guide holes provided along the slit-shaped discharge port as coating liquid guide holes. 11A and 11B are a schematic perspective view and a schematic side view of a straightening member that is inserted into a slit-shaped discharge port so that the straightening guide hole and the straightening hole in the insertion portion of the resin sealing member communicate with each other in the coating apparatus according to the third embodiment. FIG. 11 is a schematic cross-sectional explanatory diagram in a direction intersecting the longitudinal direction of the coating nozzle, showing a state in which, in the coating apparatus according to the third embodiment, the resin sealing member is provided between a coating liquid storage section that stores the coating liquid and a shutter member, the insertion section of the resin sealing member is inserted to a position midway within the slit-shaped discharge outlet, and a straightening member having a number of straightening holes is inserted into the slit-shaped discharge outlet so as to communicate with the number of straightening guide holes in the resin sealing member, and the number of straightening guide holes in the resin sealing member are blocked by the outer peripheral surface of the shutter member, thereby preventing the coating liquid in the coating liquid storage section from being guided to the slit-shaped discharge outlet. FIG. 13 is a schematic cross-sectional explanatory diagram in a direction intersecting the longitudinal direction of the coating nozzle, illustrating the state in which, in the coating device of the above-described embodiment 3, the shutter member is rotated, the coating liquid guide portion provided on the outer peripheral surface of the shutter member is guided to the position of the multiple flow straightening guide holes provided in the resin sealing member, and the coating liquid in the coating liquid storage portion is guided to the tip of the slit-shaped discharge outlet through the multiple flow straightening guide holes in the resin sealing member and the multiple flow straightening holes in the flow straightening member, thereby coating the coating liquid on the surface of the body to be coated. FIG. 11 is a schematic oblique view and a schematic side view of a resin sealing member provided between a coating liquid storage section that stores a coating liquid and a shutter member in a coating device according to a fourth embodiment of the present invention, the resin sealing member having an insertion section that is inserted into the slit-shaped discharge port and reaches the tip of the slit-shaped discharge port, and a number of straightening guide holes are provided along the slit-shaped discharge port as coating liquid guide holes. FIG. 11 is a schematic cross-sectional explanatory diagram in a direction intersecting the longitudinal direction of the coating nozzle, showing a state in which, in the coating apparatus according to the fourth embodiment, the resin sealing member is provided between a coating liquid storage section that stores a coating liquid and a shutter member, the insertion portion of the resin sealing member is inserted up to the tip of the slit-shaped discharge outlet, and the numerous flow straightening guide holes in the resin sealing member are blocked by the outer peripheral surface of the shutter member, thereby preventing the coating liquid in the coating liquid storage section from being guided to the slit-shaped discharge outlet. FIG. 13 is a schematic cross-sectional explanatory diagram in a direction intersecting the longitudinal direction of the coating nozzle, illustrating the state in which, in the coating device of the above-described embodiment 4, the shutter member is rotated, the coating liquid guide portion provided on the outer peripheral surface of the shutter member is guided to the position of the multiple flow straightening guide holes provided in the resin sealing member, and the coating liquid in the coating liquid storage portion is guided to the tip of the slit-shaped discharge outlet through the multiple flow straightening guide holes in the resin sealing member, thereby coating the coating liquid on the surface of the body to be coated. FIG. 11 is a schematic perspective view and a schematic side view showing a resin sealing member used as a modified example of the coating apparatus according to the above-mentioned embodiment 4, in which the resin sealing member is provided between a coating liquid storage section that stores a coating liquid and a shutter member, and has an insertion section that is inserted into a slit-shaped discharge port and reaches the tip of the slit-shaped discharge port, and a slit-shaped guide hole that aligns with the slit-shaped discharge port as a coating liquid guide hole.

The coating device according to the embodiment of the present invention will be specifically described below with reference to the attached drawings. Note that the coating device according to the present invention is not limited to the embodiment shown below, and can be modified as appropriate within the scope of the invention.

(Embodiment 1)
In the coating device of embodiment 1 shown in Figures 1 to 3, a coating nozzle 10 is provided with a coating liquid storage section 11 for storing a coating liquid P therein, a coating liquid supply valve 22 provided on a coating liquid supply pipe 21 is opened to supply the coating liquid P into the coating liquid storage section 11, and a slit-shaped discharge port 12 is provided at the protruding tip of the coating nozzle 10 for discharging the coating liquid P stored in the coating liquid storage section 11.

In the coating device of embodiment 1, a shutter member 13 is provided in the coating liquid storage section 11, which rotates above the slit-shaped discharge port 12 to open and close the slit-shaped discharge port 12. The shutter member 13 is a rod-shaped body having a coating liquid guide section 13b recessed into the outer circumferential surface 13a thereof, which guides the coating liquid P in the coating liquid storage section 11 to the slit-shaped discharge port 12.

In addition, in the coating device of embodiment 1, a resin seal member 30 is provided between the shutter member 13 and the coating liquid storage section 11 in contact with both of them, and in this resin seal member 30, as shown in FIG. 1, a slit-shaped guide hole 31a is provided along the slit-shaped discharge port 12 as a coating liquid guide hole 31 that guides the coating liquid P in the coating liquid storage section 11 to the slit-shaped discharge port 12.

In the coating device of embodiment 1, the resin seal member 30 is disposed between the shutter member 13 and the coating liquid storage section 11 so that the slit-shaped guide hole 31a in the resin seal member 30 is positioned above the slit-shaped discharge port 12, and the shutter member 13 is rotated on the resin seal member 30. In the following embodiment, the upper surface of the resin seal member 30 that comes into contact with the shutter member 13 is formed flat, but the upper surface of the resin seal member 30 can also be formed in an arc shape corresponding to the outer peripheral surface 13a of the shutter member 13.

As shown in FIG. 2, when the coating liquid guide portion 13b provided on the shutter member 13 is not guided to the position of the slit-shaped guide hole 31a in the resin seal member 30, the slit-shaped guide hole 31a in the resin seal member 30 is blocked by the outer circumferential surface 13a of the shutter member 13 with the outer circumferential surface 13a of the shutter member 13 in close contact with the resin seal member 30, so that the coating liquid P in the coating liquid storage portion 11 cannot be guided from the slit-shaped guide hole 31a to the slit-shaped discharge port 12, and the coating liquid P is reliably prevented from being guided to the slit-shaped discharge port 12 through the gap between the outer circumferential surface 13a of the shutter member 13 and the resin seal member 30.

From this state, when the shutter member 13 is rotated on the resin seal member 30, and the coating liquid guide portion 13b provided on the shutter member 13 is guided to the position of the slit-shaped guide hole 31a in the resin seal member 30 as shown in FIG. 3, the coating liquid P in the coating liquid storage portion 11 is guided from the coating liquid guide portion 13b of the shutter member 13 through the slit-shaped guide hole 31a in the resin seal member 30 to the slit-shaped discharge port 12, and the coating liquid P is applied to the surface of the coated object W that is moved relatively from this slit-shaped discharge port 12.

Then, as described above, the shutter member 13 is rotated on the resin seal member 30 to open and close the slit-shaped guide hole 31a provided in the resin seal member 30 by the outer peripheral surface 13a of the shutter member 13 and the coating liquid guide portion 13b. With the slit-shaped guide hole 31a in the resin seal member 30 blocked by the outer peripheral surface 13a of the shutter member 13, the coating liquid P in the coating liquid storage portion 11 is prevented from being guided to the slit-shaped discharge port 12 through the gap between the outer peripheral surface 13a of the shutter member 13 and the resin seal member 30, and leakage of the coating liquid P is reliably suppressed.

In addition, because the shutter member 13 rotates on the resin seal member 30, the inner surfaces of the shutter member 13 and the coating liquid storage section 11 are prevented from being worn or damaged as in the past. In particular, when a fluororesin is used for the resin seal member 30, frictional resistance is reduced when the shutter member 13 rotates on the resin seal member 30, allowing the shutter member 13 to rotate smoothly, allowing the slit-shaped guide hole 31a provided in the resin seal member 30 to be opened and closed smoothly, and also preventing wear of the shutter member 13 and the resin seal member 30. In this embodiment 1, a concave recess is provided on the bottom surface of the coating liquid storage section 11 so that the resin seal member 30 does not shift position due to the rotation of the shutter member 13, and is designed to have a fitting structure with the resin seal member 30.

(Embodiment 2)
In the coating device of embodiment 2 shown in Figures 4 to 7, similarly to the coating device of embodiment 1, a coating nozzle 10 is provided with a coating liquid storage section 11 for storing a coating liquid P therein, a coating liquid supply valve 22 provided on a coating liquid supply pipe 21 is opened to supply the coating liquid P into the coating liquid storage section 11, a slit-shaped discharge outlet 12 for discharging the coating liquid P stored in the coating liquid storage section 11 is provided at the protruding tip of the coating nozzle 10, and a shutter member 13 is provided within the coating liquid storage section 11, which rotates on the slit-shaped discharge outlet 12 to open and close the slit-shaped discharge outlet 12. The shutter member 13 is a rod-shaped body having an outer circumferential surface 13a on which a coating liquid guide section 13b for guiding the coating liquid P in the coating liquid storage section 11 to the slit-shaped discharge outlet 12 is recessed.

Here, in the coating device of embodiment 2, the resin seal member 30 provided between the shutter member 13 and the coating liquid storage section 11 is a coating liquid guide hole 31 that guides the coating liquid P in the coating liquid storage section 11 to the slit-shaped discharge port 12, and has a number of straightening guide holes 31b provided along the slit-shaped discharge port 12, as shown in FIG. 4.

In the coating device of embodiment 2, the resin seal member 30 is disposed between the shutter member 13 and the coating liquid storage section 11 so that the numerous flow straightening guide holes 31b in the resin seal member 30 are positioned above the slit-shaped discharge port 12, and the shutter member 13 is rotated on the resin seal member 30.

In the application device of the second embodiment, as shown in FIG. 5, a straightening member 40 having a number of straightening holes 41 corresponding to the number of straightening guide holes 31b in the resin seal member 30 is used, and the number of straightening holes 41 in the straightening member 40 are connected to the number of straightening guide holes 31b in the resin seal member 30, and the straightening member 40 is inserted into the slit-shaped discharge port 12 and guided to the tip of the slit-shaped discharge port 12. In the second embodiment, the straightening member 40 is made of two joined members each having a recess that forms the straightening hole 41, but the straightening member 40 is not limited to this, and may be a rectangular parallelepiped member having straightening holes 41 penetrating it.

In the coating device of the second embodiment, as shown in FIG. 6, when the coating liquid guide portion 13b provided on the shutter member 13 is not guided to the position of the numerous straightening guide holes 31b in the resin seal member 30, the numerous straightening guide holes 31b in the resin seal member 30 are blocked by the outer circumferential surface 13a of the shutter member 13 with the outer circumferential surface 13a of the shutter member 13 in close contact with the resin seal member 30, and the coating liquid P in the coating liquid storage portion 11 is not guided from the numerous straightening guide holes 31b to the numerous straightening holes 41 in the straightening member 40 provided in the slit-shaped discharge port 12, and the coating liquid P is reliably prevented from being guided to the slit-shaped discharge port 12 through the gap between the outer circumferential surface 13a of the shutter member 13 and the resin seal member 30.

From this state, the shutter member 13 is rotated on the resin seal member 30, and as shown in FIG. 7, the coating liquid guide portion 13b provided on the shutter member 13 is guided to the position of the numerous straightening guide holes 31b in the resin seal member 30. The coating liquid P in the coating liquid storage portion 11 is guided from the coating liquid guide portion 13b of the shutter member 13 through the numerous straightening guide holes 31b in the resin seal member 30 to the numerous straightening holes 41 in the straightening member 40 provided in the slit-shaped discharge port 12, and the coating liquid P is guided through the numerous straightening holes 41 to the tip of the slit-shaped discharge port 12 and discharged, so that the coating liquid P is applied to the surface of the coated object W that is being moved relatively.

Then, as described above, by rotating the shutter member 13 on the resin seal member 30 and opening and closing the numerous flow straightening guide holes 31b provided in the resin seal member 30 by the outer peripheral surface 13a of the shutter member 13 and the coating liquid guide portion 13b, the coating liquid P in the coating liquid storage portion 11 is prevented from being guided to the slit-shaped discharge port 12 through the gap between the outer peripheral surface 13a of the shutter member 13 and the resin seal member 30 when the numerous flow straightening guide holes 31b in the resin seal member 30 are closed by the outer peripheral surface 13a of the shutter member 13. This reliably suppresses leakage of the coating liquid P and also prevents the inner surfaces of the shutter member 13 and the coating liquid storage portion 11 from being worn or damaged as in the conventional case.

In addition, as in the coating device of embodiment 2, when the coating liquid P in the coating liquid storage section 11 is guided from the coating liquid guide section 13b of the shutter member 13 through the numerous straightening guide holes 31b in the resin seal member 30 to the numerous straightening holes 41 in the straightening member 40 provided in the slit-shaped discharge port 12, and the coating liquid P is discharged from the tip of the slit-shaped discharge port 12 through the numerous straightening holes 41 onto the surface of the workpiece W, as shown in the aforementioned Patent Publication No. 6847566, etc., a concave portion is formed on the outer peripheral surface 13a of the shutter member 13. Even if the shape of the coating liquid guide portion 13b to be provided is various shapes such as an ellipse, the coating liquid P passes through the straightening guide hole 31b in the resin seal member 30 located in a portion corresponding to the shape of the coating liquid guide portion 13b, and then through the straightening hole 41 in the straightening member 40, and is discharged onto the surface of the workpiece W. As the coating liquid P passes through the slit-shaped discharge port 12, it does not spread in the width direction of the slit-shaped discharge port 12, and the coating liquid P can be applied to the surface of the workpiece W in accordance with the shape of the coating liquid guide portion 13b.

(Embodiment 3)
In the coating device of embodiment 3 shown in Figures 8 to 11, similarly to the coating devices of embodiments 1 and 2, a coating nozzle 10 is provided with a coating liquid storage section 11 for storing a coating liquid P therein, a coating liquid supply valve 22 provided on a coating liquid supply pipe 21 is opened to supply the coating liquid P into the coating liquid storage section 11, a slit-shaped discharge outlet 12 for discharging the coating liquid P stored in the coating liquid storage section 11 is provided at the protruding tip of the coating nozzle 10, a shutter member 13 is provided within the coating liquid storage section 11 and rotates on the slit-shaped discharge outlet 12 to open and close the slit-shaped discharge outlet 12, and the shutter member 13 is a rod-shaped body having an outer circumferential surface 13a on which a coating liquid guide section 13b for guiding the coating liquid P in the coating liquid storage section 11 to the slit-shaped discharge outlet 12 is recessed.

Here, in the coating device of embodiment 3, the resin seal member 30 provided between the shutter member 13 and the coating liquid storage section 11 is provided with a number of straightening guide holes 31b provided along the slit-shaped discharge port 12 as coating liquid guide holes 31 that guide the coating liquid P in the coating liquid storage section 11 to the slit-shaped discharge port 12, as shown in FIG. 8, and is provided with an insertion section 32 that is inserted into the slit-shaped discharge port 12.

In the coating device of embodiment 3, the insertion portion 32 of the resin seal member 30, which is provided with a large number of flow straightening guide holes 31b, is inserted into the slit-shaped discharge port 12, the resin seal member 30 is positioned between the shutter member 13 and the coating liquid storage portion 11, and the shutter member 13 is rotated on the resin seal member 30.

In the application device of embodiment 3, as shown in FIG. 9, a straightening member 40 having a number of straightening holes 41 corresponding to the number of straightening guide holes 31b in the resin seal member 30 is used, and the number of straightening holes 41 in this straightening member 40 are connected to the number of straightening guide holes 31b in the insertion portion 32 of the resin seal member 30, and the straightening member 40 is inserted into the slit-shaped discharge port 12 and guided to the tip of the slit-shaped discharge port 12.

In the coating device of the third embodiment, as shown in FIG. 10, when the coating liquid guide portion 13b provided on the shutter member 13 is not guided to the position of the numerous straightening guide holes 31b in the resin seal member 30, the numerous straightening guide holes 31b in the resin seal member 30 are blocked by the outer circumferential surface 13a of the shutter member 13 with the outer circumferential surface 13a of the shutter member 13 in close contact with the resin seal member 30, so that the coating liquid P in the coating liquid storage portion 11 cannot be guided from the numerous straightening guide holes 31b to the numerous straightening holes 41 in the straightening member 40 provided in the slit-shaped discharge port 12, and the coating liquid P is reliably prevented from being guided to the slit-shaped discharge port 12 through the gap between the outer circumferential surface 13a of the shutter member 13 and the resin seal member 30.

From this state, the shutter member 13 is rotated on the resin seal member 30, and as shown in FIG. 11, the coating liquid guide portion 13b provided on the shutter member 13 is guided to the position of the numerous straightening guide holes 31b in the resin seal member 30. The coating liquid P in the coating liquid storage portion 11 is guided from the coating liquid guide portion 13b of the shutter member 13 to the numerous straightening guide holes 31b in the resin seal member 30, and is also guided from the numerous straightening guide holes 31b in the insertion portion 32 of the resin seal member 30 to the numerous straightening holes 41 in the straightening member 40 provided in the slit-shaped discharge port 12. The coating liquid P is guided through the numerous straightening holes 41 to the tip of the slit-shaped discharge port 12 and discharged, so that the coating liquid P is applied to the surface of the coated object W that is being moved relatively.

Then, as described above, by rotating the shutter member 13 on the resin seal member 30 and opening and closing the numerous flow straightening guide holes 31b provided in the resin seal member 30 by the outer peripheral surface 13a of the shutter member 13 and the coating liquid guide portion 13b, the coating liquid P in the coating liquid storage portion 11 is prevented from being guided to the slit-shaped discharge port 12 through the gap between the outer peripheral surface 13a of the shutter member 13 and the resin seal member 30 when the numerous flow straightening guide holes 31b in the resin seal member 30 are closed by the outer peripheral surface 13a of the shutter member 13. This reliably suppresses leakage of the coating liquid P and also prevents the inner surfaces of the shutter member 13 and the coating liquid storage portion 11 from being worn or damaged as in the conventional case.

In the coating device of the third embodiment, like the coating device of the second embodiment, the coating liquid P in the coating liquid storage section 11 is guided from the coating liquid guide section 13b of the shutter member 13 through the numerous straightening guide holes 31b in the resin seal member 30 to the numerous straightening holes 41 in the straightening member 40 provided in the slit-shaped discharge port 12, and the coating liquid P is discharged from the tip of the slit-shaped discharge port 12 through the numerous straightening holes 41 onto the surface of the workpiece W. Therefore, the coating liquid P passes through the straightening guide holes 31b in the resin seal member 30 located in a portion corresponding to the shape of the coating liquid guide section 13b, and is further discharged through the straightening holes 41 in the straightening member 40 onto the surface of the workpiece W. As the coating liquid P passes through the slit-shaped discharge port 12, it does not spread in the width direction of the slit-shaped discharge port 12, and the coating liquid P can be applied to the surface of the workpiece W according to the shape of the coating liquid guide section 13b.

(Embodiment 4)
In the coating device of embodiment 4 shown in Figures 12 to 14, similarly to the coating devices of embodiments 1 to 3, a coating nozzle 10 is provided with a coating liquid storage section 11 for storing a coating liquid P therein, a coating liquid supply valve 22 provided on a coating liquid supply pipe 21 is opened to supply the coating liquid P into the coating liquid storage section 11, a slit-shaped discharge outlet 12 for discharging the coating liquid P stored in the coating liquid storage section 11 is provided at the protruding tip of the coating nozzle 10, and a shutter member 13 is provided within the coating liquid storage section 11, which rotates on the slit-shaped discharge outlet 12 to open and close the slit-shaped discharge outlet 12. The shutter member 13 is a rod-shaped body having an outer circumferential surface 13a on which a coating liquid guide section 13b for guiding the coating liquid P in the coating liquid storage section 11 to the slit-shaped discharge outlet 12 is recessed.

Here, in the coating device of embodiment 4, the resin seal member 30 provided between the shutter member 13 and the coating liquid storage section 11 is provided with a number of straightening guide holes 31b provided along the slit-shaped discharge port 12 as coating liquid guide holes 31 that guide the coating liquid P in the coating liquid storage section 11 to the slit-shaped discharge port 12, as shown in FIG. 12, and an insertion section 32 that is inserted up to the tip of the slit-shaped discharge port 12.

In the coating device of embodiment 4, the insertion portion 32 of the resin seal member 30, which is provided with a large number of flow straightening guide holes 31b, is inserted up to the tip of the slit-shaped discharge port 12, the resin seal member 30 is positioned between the shutter member 13 and the coating liquid storage section 11, and the shutter member 13 is rotated on the resin seal member 30.

Here, in the coating device of embodiment 4, as shown in FIG. 13, when the coating liquid guide portion 13b provided on the shutter member 13 is not guided to the position of the numerous straightening guide holes 31b in the resin seal member 30, the numerous straightening guide holes 31b in the resin seal member 30 are blocked by the outer circumferential surface 13a of the shutter member 13 with the outer circumferential surface 13a of the shutter member 13 in close contact with the resin seal member 30, so that the coating liquid P in the coating liquid storage portion 11 is not guided to the numerous straightening guide holes 31b in the resin seal member 30, and the coating liquid P is reliably prevented from being guided to the slit-shaped discharge port 12 through the gap between the outer circumferential surface 13a of the shutter member 13 and the resin seal member 30.

From this state, the shutter member 13 is rotated on the resin seal member 30, and as shown in FIG. 14, the coating liquid guide portion 13b provided on the shutter member 13 is guided to the position of the numerous straightening guide holes 31b in the resin seal member 30. The coating liquid P in the coating liquid storage portion 11 is guided from the coating liquid guide portion 13b of the shutter member 13 to the numerous straightening guide holes 31b in the resin seal member 30, and is guided through the numerous straightening guide holes 31b in the insertion portion 32 of the resin seal member 30 to the tip of the slit-shaped discharge port 12 and discharged, so that the coating liquid P is applied to the surface of the workpiece W that is being moved relatively.

Then, as described above, by rotating the shutter member 13 on the resin seal member 30 and opening and closing the numerous flow straightening guide holes 31b provided in the resin seal member 30 by the outer peripheral surface 13a of the shutter member 13 and the coating liquid guide portion 13b, the coating liquid P in the coating liquid storage portion 11 is prevented from being guided to the slit-shaped discharge port 12 through the gap between the outer peripheral surface 13a of the shutter member 13 and the resin seal member 30 when the numerous flow straightening guide holes 31b in the resin seal member 30 are closed by the outer peripheral surface 13a of the shutter member 13. This reliably suppresses leakage of the coating liquid P and also prevents the inner surfaces of the shutter member 13 and the coating liquid storage portion 11 from being worn or damaged as in the conventional case.

In the coating device of embodiment 4, like the coating devices of embodiments 2 and 3, the coating liquid P in the coating liquid storage section 11 is guided from the coating liquid guide section 13b of the shutter member 13 through the numerous straightening guide holes 31b in the resin seal member 30 to the numerous straightening holes 41 in the straightening member 40 provided in the slit-shaped discharge port 12, and the coating liquid P is discharged from the tip of the slit-shaped discharge port 12 through the numerous straightening holes 41 onto the surface of the workpiece W. Therefore, the coating liquid P passes through the straightening guide holes 31b in the resin seal member 30 located in a portion corresponding to the shape of the coating liquid guide section 13b, and is further discharged through the straightening holes 41 in the straightening member 40 onto the surface of the workpiece W. As the coating liquid P passes through the slit-shaped discharge port 12, it does not spread in the width direction of the slit-shaped discharge port 12, and the coating liquid P can be applied to the surface of the workpiece W according to the shape of the coating liquid guide section 13b.

Here, in the coating device of embodiment 4, the resin seal member 30 provided between the shutter member 13 and the coating liquid storage section 11 is provided with a number of straightening guide holes 31b along the slit-shaped discharge port 12 as the coating liquid guide hole 31 that guides the coating liquid P in the coating liquid storage section 11 to the slit-shaped discharge port 12 as described above, and an insertion section 32 that is inserted to the tip of the slit-shaped discharge port 12 is provided. However, as shown in FIG. 15, as in the resin seal member 30 shown in embodiment 1, a slit-shaped guide hole 31a is provided along the slit-shaped discharge port 12 as the coating liquid guide hole 31 that guides the coating liquid P in the coating liquid storage section 11 to the slit-shaped discharge port 12, and the resin seal member 30 provided with the slit-shaped guide hole 31a is provided with an insertion section 32 that is inserted to the tip of the slit-shaped discharge port 12 as described above.

Reference Signs List 10: Coating nozzle 11: Coating fluid storage section 12: Slit-shaped discharge port 13: Shutter member 13a: Outer circumferential surface 13b: Coating fluid guide section 21: Coating fluid supply pipe 22: Coating fluid supply valve 30: Resin seal member 31: Coating fluid guide hole 31a: Slit-shaped guide hole 31b: Flow straightening guide hole 32: Insertion section 40: Flow straightening member 41: Flow straightening hole P: Coating fluid W: Coating target

Claims (7)

In a coating device in which a coating liquid stored in a coating liquid storage section inside a coating nozzle is discharged onto a surface of the substrate from a slit-shaped discharge port provided along the longitudinal direction of the protruding tip of the coating nozzle, and the coating nozzle and the substrate are moved relatively to each other to coat the surface of the substrate with the coating liquid, a shutter member is provided which rotates above the slit-shaped discharge port to open and close the slit-shaped discharge port, and a resin seal member having a coating liquid guide hole corresponding to the slit-shaped discharge port is provided between the shutter member and the coating liquid storage section. a coating liquid guide portion provided on the outer peripheral surface of the shutter member to the coating liquid guide hole provided in the resin sealing member, so that the coating liquid in the coating liquid storage portion is not guided to the slit-shaped discharge port , while a coating liquid guide portion provided on the outer peripheral surface of the shutter member is guided to the coating liquid guide hole provided in the resin sealing member, and the coating liquid in the coating liquid storage portion is guided to the slit-shaped discharge port through the coating liquid guide portion and the coating liquid guide hole. In a coating device in which a coating liquid stored in a coating liquid storage section inside a coating nozzle is discharged onto a surface of the substrate from a slit-shaped discharge port provided along the longitudinal direction of the protruding tip of the coating nozzle, and the coating nozzle and the substrate are moved relatively to each other to coat the surface of the substrate with the coating liquid, a shutter member is provided which rotates above the slit-shaped discharge port to open and close the slit-shaped discharge port, and a resin seal member having a coating liquid guide hole corresponding to the slit-shaped discharge port is provided along the periphery of the slit-shaped discharge port between the shutter member and the coating liquid storage section, and the shutter member is provided with a front surface that is closed by the outer circumferential surface of the shutter member. a coating device comprising: a coating liquid guide hole in the resin sealing member that is closed to prevent the coating liquid in the coating liquid storage portion from being guided to the slit-shaped discharge outlet; a coating liquid guide portion provided on the outer peripheral surface of the shutter member that guides the coating liquid in the coating liquid storage portion through the coating liquid guide portion and the coating liquid guide hole to the slit-shaped discharge outlet; an insertion portion that is inserted into the slit-shaped discharge outlet is provided in the resin sealing member; and the insertion portion is inserted up to a tip of the slit-shaped discharge outlet to guide the coating liquid guide hole in the resin sealing member to the tip of the slit-shaped discharge outlet. 3. The coating apparatus according to claim 1 , wherein the resin seal member has a coating liquid guide hole formed therein in a slit shape aligned with the slit shape discharge port. 3. The coating apparatus according to claim 1 , wherein the resin seal member has a number of flow straightening guide holes formed along the slit-shaped discharge port as coating liquid guide holes. 3. The coating apparatus according to claim 1, wherein the resin seal member is made of a fluorine-based resin. 2. The coating apparatus according to claim 1, wherein a number of flow straightening guide holes are provided along the slit-shaped discharge outlet as coating liquid guide holes in the resin sealing member, and the flow straightening member is inserted up to a tip of the slit-shaped discharge outlet so that the number of flow straightening guide holes provided in the resin sealing member and the number of flow straightening holes provided in the flow straightening member are connected to each other. In a coating device in which a coating liquid stored in a coating liquid storage section inside a coating nozzle is discharged onto a surface of the substrate from a slit-shaped discharge port provided along the longitudinal direction of the protruding tip of the coating nozzle, and the coating nozzle and the substrate are moved relatively to each other to coat the surface of the substrate with the coating liquid, a shutter member is provided which rotates above the slit-shaped discharge port to open and close the slit-shaped discharge port, and a resin seal member having a coating liquid guide hole corresponding to the slit-shaped discharge port is provided along the periphery of the slit-shaped discharge port between the shutter member and the coating liquid storage section, and the coating liquid guide hole in the resin seal member is blocked by the outer circumferential surface of the shutter member, thereby preventing the coating liquid in the coating liquid storage section from being guided to the slit-shaped discharge port. a coating device comprising: a coating liquid guide portion provided on an outer peripheral surface of the shutter member, and a coating liquid in a coating liquid storage portion being guided through the coating liquid guide portion and the coating liquid guide hole to the slit-shaped discharge outlet; an insertion portion to be inserted into the slit-shaped discharge outlet is provided in the resin sealing member, the insertion portion in the resin sealing member is inserted partway into the slit-shaped discharge outlet, a number of flow straightening guide holes are provided along the slit-shaped discharge outlet as coating liquid guide holes in the resin sealing member, and the number of flow straightening guide holes provided in the resin sealing member are connected to the number of flow straightening holes provided in the flow straightening member, and the flow straightening member is inserted up to the tip of the slit-shaped discharge outlet.

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