JP7548620B1 - Rotary Coating Equipment - Google Patents

Abstract

[Problem] To provide a rotary coating device capable of applying paint to the surface of an object to be coated in a uniform thickness by synchronously rotating a cover and a rotating table. [Solution] A rotating table 1 surrounds a chamber 12 for placing and positioning an object to be coated 7, a cover 2 is attached to the rotating table so as to cover the chamber, and a magnetic mechanism has a first magnetic member 31 and a second magnetic member 32, one of the first magnetic member and the second magnetic member is attached to the rotating table and the other is attached to the cover, and when the cover is attached to the rotating table, a magnetic force action is generated between the first magnetic member and the second magnetic member, fixing the cover to the rotating table to form the same rotational relationship. [Selected Figure] Figure 5

Description

The present invention relates to coating technology, and in particular to a spin coating device.

A spin coater is a dedicated machine for coating and film processing. Its applications are widely used in, but not limited to, electronic products, optical products, automotive products, medical equipment, glass products, etc. The principle of a spin coater is to spread the paint located on the surface of the object to be coated by the rotational force, so that the paint forms a uniform layer of coating on the surface of the object to be coated.

There are various factors that affect the quality of the paint layer, for example, common factors such as rotation speed, paint flow rate, and rotation time affect the thickness and uniformity of the coating. However, since there are other interfering factors other than the above three factors, it is necessary to provide a new and innovative spin coating device to solve the above problems.

The main objective of the present invention is to provide a rotary coating device in which a cover covers a chamber, covering the gas in the chamber and rotating synchronously with it, thereby eliminating the effects of gas turbulence, and converting kinetic energy using the principle of magnetic interaction, so that the cover rotates simultaneously with the rotating table, improving the quality of the finished product.

To achieve the above object, the present invention provides a spin coating device including a rotating table, a lid, and a magnetic mechanism. The rotating table surrounds a chamber for placing and positioning an object to be coated, and the lid is provided so as to be able to be placed on the rotating table so as to cover the chamber. The magnetic mechanism has a first magnetic member and a second magnetic member, one of the first magnetic member and the second magnetic member is provided on the rotating table and the other is provided on the lid, and when the lid is placed on the rotating table, a magnetic force is generated between the first magnetic member and the second magnetic member, allowing the lid to rotate together with the rotating table.

FIG. 1 is a perspective view of a first embodiment of the present invention. FIG. 2 is an exploded view of FIG. 1 . FIG. 2 is a perspective view of a collection bowl according to a first embodiment of the present invention; FIG. 1 is a cross-sectional view of a first embodiment of the present invention. FIG. 5 is a partially enlarged view of FIG. 4 . FIG. 5 is an exploded view of a second embodiment of the present invention. FIG. 5 is an enlarged partial cross-sectional view of a second embodiment of the present invention. FIG. 10 is an enlarged partial cross-sectional view of a third embodiment of the present invention.

The following examples are intended to illustrate possible embodiments of the present invention and are not intended to limit the scope of protection of the present invention. As explained at the beginning, "one" or "at least one" before a noun mentioned in the specification does not limit the number, and can be "plurality" if necessary, and this change in number falls within the scope of protection.

Figures 1 to 5 show a first embodiment of the present invention, in which the spin coating device of the present invention includes a spin table 1, a cover body 2, and a magnetic mechanism 3.

The turntable 1 surrounds a chamber 12 for placing and positioning a workpiece 7 (e.g., a wafer, a glass disk, etc.), and during use, paint (e.g., photoresist liquid) is placed on the surface of the workpiece 7. The lid 2 is placed on the turntable 1 so as to cover the chamber 12. The magnetic mechanism 3 has a first magnetic member 31 and a second magnetic member 32, one of which is provided on the turntable 1 and the other on the lid 2. When the lid 2 is placed on the turntable 1, a magnetic force is generated between the first magnetic member 31 and the second magnetic member 32, allowing the lid 2 to rotate together with the turntable 1.

The turntable 1, the lid 2, the first magnetic member 31 and the second magnetic member 32 are arranged coaxially to locate the center of gravity and make it easier to grasp the overall balance. For example, when a magnetic attraction force is generated between the first magnetic member 31 and the second magnetic member 32 and rotates, the lid 2 is smoothly attracted to the turntable 1 and resists the action of centrifugal force, achieving the purpose of rotating synchronously without any shaking, and allowing the paint to be applied uniformly (with a uniform thickness) to the surface of the workpiece 7.

In this embodiment, the first magnetic member 31 is a magnet, and the second magnetic member 32 is also a magnet. The selection of magnets has the advantages of easy availability of materials, easy assembly, and simple structural components. Of course, various magnetic materials such as electromagnets, magnetic adhesives, magnetic paints, etc. can be selected according to the application.
In detail, the first magnetic member 31 and the second magnetic member 32 are respectively provided on opposing sides of the turntable 1 and the cover body 2, a first groove 11 is recessed into the outer peripheral edge of the turntable 1 on the side facing the cover body 2, and a second groove 21 is recessed into the outer peripheral edge of the cover body 2 on the side facing the turntable 1, and one of the first magnetic member 31 and the second magnetic member 32 is fitted into the first groove 11 and the other is fitted into the second groove 21.

More specifically, the first groove 11 and the second groove 21 are each ring-shaped, and the first magnetic member 31 and the second magnetic member 32 are each ring-shaped strip-shaped. When the cover 2 is placed on the rotary table 1, the first magnetic member 31 and the second magnetic member 32 come into contact with each other, so that the first magnetic member 31 and the second magnetic member 32 can have excellent magnetic attraction strength with a small magnetic attraction area or a small total volume.

Of course, the present invention is not limited to the above configuration. Please refer to the second embodiment shown in Figs. 6 and 7. The first magnetic member 31A and the second magnetic member 32A are provided on the opposite sides of the turntable 1A and the cover 2A, respectively, and when the cover 2A is placed on the turntable 1A, the first magnetic member 31A and the second magnetic member 32A are arranged at a distance from each other. The first magnetic member 31A and the second magnetic member 32A are attached in plate form to the opposite sides of the turntable 1A and the cover 2A, respectively, thereby providing a large-area, uniform, and strong magnetic attraction effect, and the cover 2A can be stably connected to the turntable 1A.

Referring further to the first embodiment of FIG. 1 to FIG. 5, the spin coating device further includes a moving device 5, which is connected to the cover 2 and drives the cover 2 to be movable between a first position and a second position, and when the cover 2 is in the first position, the cover 2 does not cover the chamber 12, and when the cover 2 is in the second position, the cover 2 covers the chamber 12. The moving device 5 can effectively plan the moving stroke, reduce the error caused by manual placement, improve the accuracy of placement of alignment, and achieve a semi-automated or fully automated manufacturing process.

Preferably, the rotary coating device further includes a reduction gear 6 connected between the moving device 5 and the lid body 2, and when the moving device 5 drives the lid body 2 to move from the second position to the first position, the reduction gear 6 operates to stop the inertial rotation of the lid body 2 after it has been separated from the rotating table 1. In this embodiment, the reduction gear 6 is an electromagnetic brake to avoid shaking due to contact friction.

The rotary coating device further includes a collection bowl 4, which encloses an internal space 41, and the turntable 1 is accommodated in the internal space 41 so as to be rotatable relative to the collection bowl 4. The turntable 1 is provided with a plurality of discharge holes 13 that communicate with the chamber 12 and the internal space 41, and when the turntable 1 rotates, excess paint can flow into the internal space 41 through the plurality of discharge holes 13.

Furthermore, the internal space 41 has a placement area 412 and a liquid collection area 413 that communicate with each other, the turntable 1 is located in the placement area 412, the multiple drain holes 13 communicate with the liquid collection area 413, and the liquid collection area 413 is used to receive the coating liquid (paint) discharged from the chamber 12. The collection bowl 4 further has at least one drain passage 42 that communicates the liquid collection area 413 with the outside, facilitating collection, recovery, reuse, or unified storage by the outside.

Furthermore, the collection bowl 4 further has at least one intake passage 43, and the internal space 41 further has an intake area 414, which connects the liquid collection area 413 to the at least one intake passage 43, and the at least one intake passage 43 connects the intake area 414 to the outside.
Thus, the evaporated paint vapor can be collected and treated in a unified manner, and the direct diffusion to the outside can be avoided, so that personal safety and environmental protection can be ensured. In addition, the action force of the suction can guide the unified air flow, so that the plurality of exhaust holes 13 surround the workpiece 7, and the air flow can flow stably and uniformly to the outside, and the stability of the movement and diffusion of the paint can be ensured.

In this embodiment, the at least one drain passage 42 is one, the at least one intake passage 43 is four, and the four intake passages 43 can generate a uniform and stable intake force. The liquid collection area 413 is ring-shaped, the intake area 414 is ring-shaped, the liquid collection area 413 and the intake area 414 are arranged in a concentric ring shape, and the liquid collection area 413 is located on the outer ring side of the intake area 414.

Refer to the third embodiment in FIG. 8. The difference from the first embodiment is that a magnetic repulsive force is generated between the first magnetic member 31B and the second magnetic member 32B, and there is a gap 8 between the cover 2B and the turntable 1B. When the turntable 1B rotates, the cover 2B is driven to rotate by the magnetic repulsion method, and after the cover 2B rotates, it is driven to exhaust gas from the gap 8 to the outside, guiding the air flow in the chamber 12B to be stable and not cause turbulence, and making the paint flow uniform.

Another difference between the first and third embodiments is that a cover 9 is disposed on the outermost layer. The cover 9 covers the lid body 2B and the gap 8 to form a sealed space, and the cover 9 blocks interference from the outside, improving the stability and quality of the coating.

REFERENCE SIGNS LIST 1, 1A, 1B Rotary table 11 First groove 12, 12B Chamber 13 Discharge hole 2, 2A, 2B Lid 21 Second groove 3 Magnetic mechanism 31, 31A, 31B First magnetic member 32, 32A, 32B Second magnetic member 4 Collection bowl 41 Internal space 412 Arrangement area 413 Liquid collection area 414 Intake area 42 Liquid discharge passage 43 Intake passage 5 Moving device 6 Speed reduction device 7 Applied body 8 Gap 9 Cover

Claims (13)

A rotary coating device,
a rotary table surrounding a chamber for placing and positioning an object to be coated;
a cover provided on the rotary table so as to cover the chamber;
a magnetic mechanism having a first magnetic member and a second magnetic member, one of the first magnetic member and the second magnetic member being provided on the rotary table and the other being provided on the lid, and when the lid is placed on the rotary table, a magnetic force is generated between the first magnetic member and the second magnetic member, thereby enabling the lid to rotate together with the rotary table;
A mobile device;
a reduction gear connected between the moving device and the lid body ,
the moving device is connected to the lid and drives the lid to be movable between a first position and a second position, when the lid is in the first position, the lid does not cover the chamber, and when the lid is in the second position, the lid covers the chamber;
When the moving device drives the lid body to move from the second position to the first position, the reduction gear device is activated to stop the inertial rotation of the lid body after it has been separated from the rotary table.
Rotary coating device. The spin coating device according to claim 1, wherein the first magnetic member and the second magnetic member are provided on opposing sides of the rotating table and the lid, respectively. The spin coating device according to claim 2, wherein the first magnetic member and the second magnetic member come into contact with each other when the cover is placed over the rotating table. The rotary coating device according to claim 2, wherein a first groove is formed on the outer periphery of the rotary table on the side facing the lid, and a second groove is formed on the outer periphery of the lid on the side facing the rotary table, and one of the first magnetic member and the second magnetic member is fitted into the first groove and the other is fitted into the second groove. The spin coating device according to claim 4, wherein the first groove and the second groove are each ring-shaped, and the first magnetic member and the second magnetic member are each ring-shaped band-shaped. The spin coating device according to claim 1, wherein the first magnetic member and the second magnetic member are provided on opposite sides of the rotating table and the lid, respectively, and when the lid is placed over the rotating table, the first magnetic member and the second magnetic member are spaced apart. The spin coating device according to claim 6, wherein the first magnetic member and the second magnetic member are attached in plate form to opposite sides of the rotating table and the lid, respectively. The spin coating device according to claim 1, further comprising a collection bowl, the collection bowl enclosing an internal space, the rotating table being accommodated in the internal space so as to be rotatable relative to the collection bowl, and the rotating table being provided with a plurality of discharge holes penetrating therethrough that communicate the chamber with the internal space. The spin coating device according to claim 8, wherein the internal space has a placement area and a liquid collection area that are connected to each other, the rotary table is located in the placement area, the plurality of discharge holes are connected to the liquid collection area, and the liquid collection area is used to receive the coating liquid discharged from the chamber. The spin coating device of claim 9, wherein the collection bowl further has at least one drain passage, the at least one drain passage communicating the liquid collection area with the outside. The spin coating device of claim 9, wherein the collection bowl further has at least one intake passage, the interior space further has an intake area, the intake area communicates with the liquid collection area and the at least one intake passage, and the at least one intake passage communicates with the outside. 2. The spin coating apparatus according to claim 1 , wherein the deceleration device is an electromagnetic brake. The apparatus further includes a collection bowl, the collection bowl enclosing an internal space, the rotating table being accommodated in the internal space and rotatable relative to the collection bowl, and the rotating table having a plurality of drain holes extending therethrough that communicate the chamber with the internal space;
the internal space has a placement area and a liquid collecting area that are in communication with each other, the turntable is located in the placement area, the plurality of discharge holes are in communication with the liquid collecting area, and the liquid collecting area is used to receive the coating liquid discharged from the chamber;
the collection bowl further includes at least one drain passage, the at least one drain passage communicating the liquid collection area with the exterior;
the collection bowl further comprises at least one intake passage, the interior space further comprises an intake region, the intake region communicating the liquid collection region with the at least one intake passage, the at least one intake passage communicating the intake region with the outside;
the rotary coating apparatus further includes a moving device and a deceleration device, the moving device is connected to the lid body and drives the lid body so as to be movable between a first position and a second position, when the lid body is at the first position, the lid body does not cover the chamber, and when the lid body is at the second position, the lid body covers the chamber, the deceleration device is connected between the moving device and the lid body, and when the moving device drives the lid body to move from the second position to the first position, the deceleration device is activated to stop the inertial rotation of the lid body after it has been separated from the rotary table,
The reduction gear is an electromagnetic brake,
the first magnetic member is a magnet;
the second magnetic member is a magnet;
the rotary table, the cover, the first magnetic member, and the second magnetic member are coaxially arranged,
6. The spin coating device of claim 5, wherein the at least one drain passage is one, the at least one intake passage is four, the liquid collection area is ring-shaped, the intake area is ring-shaped, the liquid collection area and the intake area are arranged in a concentric ring shape, and the liquid collection area is located on the outer ring side of the intake area.

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