JP7412184B2 - Separator and processing equipment - Google Patents

Description

Embodiments of the present invention relate to a separator and a processing device.

The exhaust gas discharged from treatment equipment contains recyclable substances and harmful substances. Therefore, there are devices that separate gas and liquid by forming a swirling flow of exhaust gas inside the container and colliding the swirling flow with a plate material (gas-liquid separator), and devices that separate gas and solids (powder). body separation device) has been proposed. In these devices, it is desired to improve the collection efficiency (separation efficiency) of substances contained in the exhaust gas.

Japanese Patent Application Publication No. 2013-163143

The problem to be solved by the present invention is to provide a separator and a processing device that can improve the efficiency of collecting substances contained in exhaust gas.

A separator according to an embodiment includes a main body having a space therein and having a first surface and a second surface intersecting the first surface, and a main body having a first surface on the first surface of the main body. an introduction part for introducing a mixture containing gas and at least one of liquid particles and solid particles into the main body part, and an introduction part provided in the main body part and separated from the introduction part; The device includes a discharge section and a control section that has a plate shape and is provided inside the main body section. The distance between the first surface of the main body section where the introduction section is provided and the end of the control section on the introduction section side is equal to the distance between the first surface where the introduction section is provided. and the end of the control section on the discharge section side. The end of the control section on the introduction section side is provided on the opposite side to the discharge section side with respect to the central axis of the introduction section, and is spaced apart from the second surface of the main body section. There is. The mixture introduced into the main body from the introduction part collides with the control part, and a part of the mixture that collided with the control part flows in a direction away from the discharge part and leaves the discharge part. A part of the mixture that has flowed in this direction collides with the second surface and the first surface of the main body portion and flows toward the introduction section, and a portion of the mixture that has flowed toward the introduction section collides with the second surface and the first surface of the main body section and flows toward the introduction section. A part of the mixture collides with the control section together with the mixture introduced from the introduction section, thereby forming a swirling flow of the mixture.

FIG. 1 is a schematic diagram illustrating a processing device according to the present embodiment. FIG. 3 is a schematic cross-sectional view of a nozzle. FIG. 2 is a schematic cross-sectional view for illustrating a separator according to the present embodiment. It is a graph diagram for illustrating the relationship between the inclination angle of a control part and the flow direction of a mixture. It is a graph diagram for illustrating the relationship between distance and flow rate of a mixture.

Hereinafter, embodiments will be illustrated with reference to the drawings. Note that in each drawing, similar components are denoted by the same reference numerals, and detailed explanations are omitted as appropriate.
A separator according to an embodiment of the present invention is a separator that separates a liquid from a mixture of gas and liquid particles, a separator that separates solid particles from a mixture of gas and solid particles, or a separator that separates solid particles from a mixture of gas and liquid particles. It can be applied to separators to separate liquid and solid particles from a mixture of particles. The solid particles can be, for example, powder containing inorganic or organic substances. In this case, the particle diameters of the liquid particles and the solid particles can be, for example, 1 μm or more and 100 μm or less. In the case of liquid particles, the viscosity of the liquid can be, for example, 0.10 Pa·s or less.
In the following, as an example, a case will be described in which the separator according to the present embodiment is a separator that separates liquid from a mixture of gas and liquid particles.

Further, the processing apparatus provided with the separator according to the present embodiment may discharge exhaust gas containing at least one of liquid particles and solid particles. For example, the processing device can be a device used for manufacturing microstructures such as semiconductor devices and flat panel displays. However, the uses of the processing device are not limited to those illustrated.

FIG. 1 is a schematic diagram illustrating a processing apparatus 100 according to the present embodiment.
FIG. 2 is a schematic cross-sectional view of the nozzle 120.
As shown in FIG. 1, the processing device 100 can be provided with a processing section 110, a nozzle 120, a collection section 130, an exhaust section 140, and a separator 1.

The processing apparatus 100 illustrated in FIG. 1 is provided with two separators 1, and the number of separators 1 depends on the amount of exhaust gas discharged from the processing section 110 and the amount of liquid particles contained in the exhaust gas. It can be changed as appropriate depending on the amount, amount of solid particles, etc. That is, at least one separator 1 may be provided.

Moreover, although two separators 1 are connected in parallel in the processing apparatus 100 illustrated in FIG. 1, a plurality of separators 1 can also be connected in series. When a plurality of separators 1 are connected in series, the exhaust air from the separator 1 connected to the processing section 110 may be introduced into the other separators 1. In this case, by connecting a plurality of separators 1 in parallel, the amount of exhaust gas that can be treated can be increased. By connecting a plurality of separators 1 in series, it is possible to increase the amount of substances that can be separated.

The processing unit 110 may, for example, form a film on the surface of the workpiece, remove the surface of the workpiece, clean the surface of the workpiece, or modify the surface of the workpiece. The processing section 110 can have, for example, a chamber 110a having an airtight structure. A mounting table or the like for mounting a work can be provided inside the chamber 110a.

Moreover, various devices can be provided in the chamber 110a depending on the type of processing. The devices provided in the chamber 110a include, for example, a process gas supply device, a heating device such as a heater, a decompression device that reduces the pressure of the atmosphere inside the chamber 110a, a device that generates plasma inside the chamber 110a, and a device that generates plasma inside the chamber 110a. It can be a device that supplies mist-like processing liquid, cleaning liquid, powder, etc. However, the devices provided in the chamber 110a are not limited to those illustrated, and can be changed as appropriate depending on the type of processing.

The nozzle 120 has a cylindrical shape and can be provided between the processing section 110 (chamber 110a) and the separator 1. The mixture of gas and liquid particles inside the chamber 110a is supplied to the separator 1 via the nozzle 120. Further, the nozzle 120 increases the flow rate of the mixture when supplying the mixture to the separator 1 . For example, as shown in FIG. 2, an orifice plate 120a can be provided at the end of the nozzle 120 on the separator 1 side. If the orifice plate 120a is provided, the flow rate of the mixture can be increased as the mixture passes through the orifice.

If the flow velocity of the mixture can be increased, the velocity of the swirling flow formed inside the separator 1 can be increased, so that the swirling flow can be applied to the inner wall of the separator 1 and the control section 1e (see FIG. 3) to be described later. The number of collisions can be increased. Therefore, the efficiency of collecting substances contained in the gas can be improved.

Furthermore, if the plurality of particles included in the mixture are liquid particles, a cooling device 120b can be provided on the outer surface of the nozzle 120 or in the vicinity thereof. If the particle diameter (mass) of the liquid particles contained in the mixture is too small, it may be difficult for the liquid particles to be captured when they collide with the inner wall of the separator 1 or the control section 1e. If a cooling device 120b is provided, the mixture can be cooled through the nozzle 120, so that the liquid particles can be condensed. If the liquid particles can be condensed, the particle diameter (mass) can be increased, which can improve the capturing efficiency of the liquid particles in the separator 1 and, by extension, the capturing efficiency of the liquid contained in the gas. can.

The recovery unit 130 recovers the substance separated from the gas by the separator 1 . Since the separator 1 illustrated in FIG. 1 is a separator that separates liquid from a mixture of gas and liquid particles, the recovered substance is a liquid. Note that if the separator separates solid particles from a mixture of gas and solid particles, the recovered substance will be solid.
The recovery unit 130 can be connected to the separator 1 via, for example, piping. The recovery unit 130 can be, for example, a tank having an airtight structure.

The exhaust unit 140 can suck a certain mixture inside the chamber 110a through the separator 1 and the nozzle 120. The exhaust section 140 can be connected to the separator 1 via, for example, piping. The exhaust section 140 can be, for example, a vacuum pump or a blower. The exhaust from the exhaust section 140 can be discharged to, for example, a factory drain. Note that depending on the type of processing in the processing section 110, the atmosphere inside the chamber 110a may be higher than atmospheric pressure. In such a case, the internal pressure of the chamber 110a forces out a certain mixture inside the chamber 110a, so the exhaust part 140 can be omitted.

FIG. 3 is a schematic cross-sectional view for illustrating the separator 1 according to this embodiment.
In addition, in FIG. 3, the distribution of particle residence times is represented by monotone color shading. In this case, the darker the color tone, the shorter the stagnation time, that is, the faster the particle movement speed (the greater the kinetic energy).
As shown in FIG. 3, the separator 1 can have a main body portion 1a, an introduction portion 1b, a discharge portion 1c, and a drain portion 1d. The main body portion 1a, the introduction portion 1b, the discharge portion 1c, and the drain portion 1d can be provided integrally.
Furthermore, the separator 1 can further include a control section 1e.

As shown in FIG. 3, the main body portion 1a can have a space inside. The main body portion 1a may have a box shape. A space is provided inside the main body portion 1a, and a mixture of gas and liquid particles is introduced into the space.

The introduction part 1b and the discharge part 1c can be provided on the surface 1a2 (for example, the ceiling surface) of the main body part 1a. The discharge part 1c can be provided separated from the introduction part 1b. The drain portion 1d can be provided on the surface 1a1 (for example, the bottom surface) of the main body portion 1a.

The introduction part 1b has a cylindrical shape, and one end is provided on the surface 1a2 (for example, the ceiling surface) of the main body part 1a. The side of the nozzle 120 on which the orifice plate 120a is provided can be connected to the other end of the introduction part 1b. A mixture whose flow rate is increased by passing through the orifice plate 120a can be introduced into the space inside the main body portion 1a.

The discharge part 1c has a cylindrical shape, and one end is provided in the main body part 1a. The discharge part 1c can be provided separated from the introduction part 1b. In this case, as shown in FIG. 3, one end of the discharge portion 1c may be provided on the surface 1a2 of the main body portion 1a. As shown in FIG. 1, the other end of the exhaust section 1c can be connected to the exhaust section 140 via piping or the like.

The drain portion 1d has a cylindrical shape, and one end thereof is provided on the surface 1a1 (for example, the bottom surface) of the main body portion 1a. As shown in FIG. 1, the other end of the drain portion 1d can be connected to the recovery portion 130 via piping or the like.

The control section 1e can be provided inside the main body section 1a. The control unit 1e may have a plate shape. The control unit 1e can be tilted. In this case, the distance L1 between the surface 1a2 and the end 1e1 of the control section 1e on the introduction section 1b side is the distance L1 between the surface 1a2 and the end 1e2 of the control section 1e on the discharge section 1c side. It can be made larger than L2. That is, the control part 1e can be tilted away from the introduction part 1b as it approaches the introduction part 1b from the discharge part 1c side.

As shown in FIG. 3, the mixture introduced into the main body part 1a from the introduction part 1b collides with the control part 1e. Since the control part 1e is inclined, a part of the mixture that collides with the control part 1e flows in a direction away from the discharge part 1c.

The mixture flowing in the direction away from the discharge part 1c collides with the inner surface of the main body part 1a and flows toward the introduction part 1b. A part of the mixture that has flowed toward the introduction section 1b collides with the control section 1e together with the mixture introduced from the introduction section 1b. That is, a swirling flow of the mixture can be formed at a position away from the discharge part 1c. In this case, as shown in FIG. 3, the moving speed of liquid particles in the swirling flow can be increased.

If a swirling flow of the mixture can be formed, the chances of liquid particles contained in the mixture colliding with the inner wall of the main body portion 1a and the control portion 1e can be increased. For example, the chances of the liquid particles colliding with the inner wall of the main body portion 1a can be set to about two to three times. In this case, if the moving speed of the liquid particles increases, the chances of the liquid particles colliding with the inner wall of the main body portion 1a can further be increased. Moreover, since the swirling flow of the mixture is formed at a position away from the discharge part 1c, the time during which the liquid particles stay inside the main body part 1a can be extended. From the above, it is possible to improve the collection efficiency of the liquid contained in the mixture. That is, according to the present embodiment, it is possible to improve the efficiency of collecting substances contained in the exhaust gas from the processing section 110.

In this case, the end portion 1e1 of the control portion 1e on the introduction portion 1b side can be provided on the opposite side to the discharge portion 1c side with respect to the central axis 1b1 of the introduction portion 1b. In this way, it becomes easy to cause the mixture supplied from the introduction section 1b to collide with the control section 1e. Therefore, a swirling flow of the mixture is easily formed, so that the efficiency of collecting the liquid contained in the mixture can be about 50%.

FIG. 4 is a graph diagram illustrating the relationship between the inclination angle θ of the control unit 1e and the flow direction of the mixture.
The inclination angle θ of the control section 1e can be an angle between the central axis 1b1 of the introduction section 1b and the upper surface of the control section 1e. If the proportion of the mixture flowing to the side opposite to the discharge part 1c increases, it becomes easier to form a swirling flow of the mixture, and the amount of the mixture immediately discharged from the discharge part 1c can be reduced.

As can be seen from FIG. 4, if the inclination angle θ of the control section 1e is set to 70 degrees or less , almost all of the mixture can flow to the side opposite to the discharge section 1c. That is, by setting the inclination angle θ of the control section 1e to 70 degrees or less , it is possible to further improve the efficiency of collecting substances contained in the exhaust gas from the processing section 110.

If the flow of the mixture is controlled by the control section 1e provided inside the main body section 1a, the degree of freedom regarding the shape of the main body section 1a, the arrangement of the drain section 1d, etc. can be increased. For example, depending on the size and arrangement of the recovery section 130 and the exhaust section 140 provided in the processing apparatus 100, it is easy to change the shape of the main body section 1a, the arrangement of the drain section 1d, etc. as appropriate.

Further, the collected liquid travels along the inner wall of the main body portion 1a and gathers on the surface 1a1 side of the main body portion 1a. Therefore, if the surface 1a1 is inclined, it becomes easy to collect the liquid on the inner surface. If the liquid on the inner surface can be collected, the liquid can be easily drained through the liquid drain portion 1d. In this case, the drain portion 1d may be provided on the lower end side of the inclined surface.

In this case, if the distance L3 between the end 1e1 of the control section 1e on the introduction section 1b side and the inner surface on the surface 1a1 side of the main body section 1a is made too large, the control section 1e and the surface 1a1 of the main body section 1a The amount of the mixture flowing between the two toward the discharge part 1c side increases. If the amount of the mixture flowing to the discharge part 1c side becomes too large, there is a possibility that the collection efficiency will decrease.

FIG. 5 is a graph diagram illustrating the relationship between the distance L3 and the flow rate of the mixture.
As the distance L3 increases, the amount of the mixture flowing between the control section 1e and the surface 1a1 of the main body section 1a toward the discharge section 1c increases, so that the flow rate of the mixture decreases.
For example, as can be seen from FIG. The speed of the mixture decreases until the distance L3 reaches 9 mm. In this case, when the distance L3 becomes 9 mm or more, the speed of the mixture increases again, but this is the flow speed of the mixture flowing toward the discharge part 1c side.

Therefore, as can be seen from FIG. 5, by setting the distance L3 to 2 mm or more and 9 mm or less, it is possible to reduce the amount of the mixture flowing toward the discharge portion 1c side. As a result, it is possible to suppress the collection efficiency from decreasing. Moreover, if the distance L3 is set to 2 mm or more and 6 mm or less, the speed of the mixture can be made appropriate, and the mixture can be prevented from flowing toward the discharge portion 1c.

Here, the collected liquid travels along the inner wall of the main body portion 1a and gathers on the surface 1a1 side of the main body portion 1a. Therefore, if the surface 1a1 is inclined with respect to the horizontal plane, it becomes easy to collect the liquid on the inner surface. If the liquid on the inner surface can be collected, the liquid can be easily drained through the liquid drain portion 1d. According to the knowledge obtained by the present inventors, if the angle θa between the horizontal plane and the surface 1a1 is set to 5° or more, it becomes easy to collect the liquid. In this case, the drain portion 1d may be provided on the lower end side of the inclined surface.

Although several embodiments of the present invention have been illustrated above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, changes, etc. can be made without departing from the gist of the invention. These embodiments and their modifications are included within the scope and gist of the invention, as well as within the scope of the invention described in the claims and its equivalents. Further, each of the embodiments described above can be implemented in combination with each other.

1 separator, 1a main body, 1a1 surface, 1a2 surface, 1b introduction section, 1c discharge section, 1d drain section, 11 separator, 1a main body, 1e control section, 1a1 surface, 1a2 surface, 1e1 end, 1e2 end , 110 processing section, 120 nozzle, 130 collection section, 140 exhaust section, θ inclination angle, θa angle

Claims (5)

a main body having a space inside and having a first surface and a second surface intersecting the first surface;
an introduction part that is provided on the first surface of the main body and introduces a mixture containing gas and at least one of liquid particles and solid particles into the main body ;
a discharge section provided in the main body section and separated from the introduction section;
a control section having a plate shape and provided inside the main body section;
Equipped with
The distance between the first surface of the main body section where the introduction section is provided and the end of the control section on the introduction section side is equal to the distance between the first surface where the introduction section is provided. and the end of the control unit on the discharge unit side,
An end of the control section on the introduction section side is provided on the opposite side to the discharge section side with respect to the central axis of the introduction section, and is spaced apart from the second surface of the main body section ,
The mixture introduced into the main body from the introduction part collides with the control part, and a part of the mixture that collided with the control part flows in a direction away from the discharge part and leaves the discharge part. A part of the mixture that has flowed in this direction collides with the second surface and the first surface of the main body portion and flows toward the introduction section, and a portion of the mixture that has flowed toward the introduction section collides with the second surface and the first surface of the main body section and flows toward the introduction section. A separator in which a part of the mixture introduced from the introduction part collides with the control part to form a swirling flow of the mixture . The separator according to claim 1, wherein the angle between the central axis of the introduction part and the control part is 70 degrees or less . The separator according to claim 1 or 2, wherein an angle between a surface of the main body portion opposite to the side where the introduction portion is provided and a horizontal plane is 5° or more. Claims 1 to 3 , wherein the distance between the end of the control section on the introduction section side and the inner surface of the main body section on the opposite side to the side where the introduction section is provided is 2 mm or more and 9 mm or less. The separator according to any one of the above. A processing unit capable of processing a workpiece,
The separator according to any one of claims 1 to 4 , connected to the processing section;
Processing equipment equipped with

Images