JP7332891B2 - Liquid transfer system and liquid transfer method - Google Patents

Description

TECHNICAL FIELD The present invention relates to a liquid transfer system and a liquid transfer method for transferring a liquid through a pipe having a raised portion.

In a chemical liquid production line, after chemical liquid is prepared in a preparation tank, the prepared chemical liquid is supplied to a filling device through a pipe and a filtration filter (see Patent Document 1). When the preparation tank and the filling tank of the filling device are arranged on the same level, the piping connecting the preparation tank and the filling tank is provided with a rising portion upstream of the filtration filter for circulating the chemical solution from bottom to top. Therefore, at the end of the filling operation, the chemical solution remains before and after the rising portion. Since the chemical solution is generally expensive, in such a liquid delivery system, it is desirable to provide a configuration for forcibly delivering the chemical solution remaining before and after the rising portion to the filling tank when the filling operation is completed.

In Patent Document 1, a residual liquid delivery device having a stock tank for temporarily storing the residual liquid is provided immediately after the rising portion, and the chemical liquid is delivered through a bypass passage bypassing the stock tank during the filling operation. In addition, at the end of the filling operation, the residual liquid is fed to the filling tank by switching the liquid feeding path from the bypass passage to the residual liquid feeding device.

Japanese Patent No. 6279359

However, in the configuration of Patent Document 1, it is necessary to provide a mechanism for switching liquid feeding between the bypass passage and the residual liquid feeding device, and there is a possibility that the chemical liquid will remain in the bypass passage.

SUMMARY OF THE INVENTION An object of the present invention is to discharge all residual liquid before and after the rising portion with a simple configuration in a liquid transfer system having a rising portion.

A liquid feeding system, which is a first invention of the present invention, includes a first liquid feeding passage connected to a lower end of a first tank in which liquid is stored and extending laterally; a second liquid-feeding passage extending to the second liquid-feeding passage, a third liquid-feeding passage connected to the second liquid-feeding passage and extending laterally, a second tank connected downstream of the third liquid-feeding passage, the second a fourth liquid feeding passage connected downstream of the tank; pressurizing means for pressurizing the first and/or second tank; depressurizing means for depressurizing the inside of the second tank; and a control means for controlling the decompression means, wherein the control means pressurizes the first tank with the pressurizing means to cause the liquid in the first tank to flow through the second tank to the second tank. 4. A first liquid feeding mode in which the liquid is continuously fed to the liquid feeding passage, and a state in which the liquid feeding from the first tank to the second tank is stopped and the second tank is pressurized by the pressurizing means. a second liquid feeding mode in which the liquid in the second tank is fed to the fourth liquid feeding passage until the second tank reaches a predetermined value or less; and the first tank is pressurized by the pressurizing means. and a third liquid feeding mode in which the liquid remaining between the first liquid feeding passage and the third liquid feeding passage is fed to the second tank by decompressing the second tank by the pressure reducing means. is characterized by sequentially switching between

A second aspect of the present invention is a liquid-feeding system according to the first aspect, wherein the liquid-feeding system detects the amount of liquid in the first tank; and a second detection means for detecting the liquid volume, and in the first liquid feeding mode, when it is determined that the liquid volume in the first tank has become equal to or less than a predetermined value based on the output of the first detection means. , is switched to the second liquid feeding mode, and in the second liquid feeding mode, when it is determined that the liquid amount in the second tank has become equal to or less than a predetermined value based on the output of the second detecting means, the third It is characterized in that it can be switched to a liquid feeding mode.

A liquid feeding method according to a third aspect of the present invention includes a first liquid feeding passage connected to the lower end of a first tank in which liquid is stored and extending laterally; a second liquid-feeding passage extending to the second liquid-feeding passage, a third liquid-feeding passage connected to the second liquid-feeding passage and extending laterally, a second tank connected downstream of the third liquid-feeding passage, the second A liquid feed comprising a fourth liquid feed passage connected downstream of a tank, pressurizing means for pressurizing the first and/or second tanks, and decompressing means for decompressing the inside of the second tank. A liquid feeding method in a system, wherein the pressurizing means and the depressurizing means are controlled to pressurize the first tank, whereby the liquid in the first tank is transferred to the first tank via the second tank. After the first liquid feeding mode in which the liquid is continuously fed from the first liquid feeding passage to the fourth liquid feeding passage, pressurizing the second tank while the liquid feeding from the first tank to the second tank is stopped Switching to the second liquid feeding mode in which the liquid in the second tank is fed to the fourth liquid feeding passage until the second tank becomes equal to or less than a predetermined value, and then depressurizing the second tank, thereby It is characterized by switching to a third liquid feeding mode in which the liquid remaining between the first liquid feeding passage and the third liquid feeding passage is fed to the second tank.

A fourth aspect of the present invention is a liquid transfer method according to the third aspect, wherein the liquid transfer system comprises first detection means for detecting the amount of liquid in the first tank; and a second detecting means for detecting the amount of liquid in the first liquid feeding mode, based on the output of the first detecting means, it is determined that the amount of liquid in the first tank has become equal to or less than a predetermined value. Then, the mode is switched to the second liquid feeding mode, and in the second liquid feeding mode, when it is determined that the liquid amount in the second tank has become equal to or less than a predetermined value based on the output of the second detecting means, the second It is characterized by being able to switch to 3 liquid feeding modes.

Advantageous Effects of Invention According to the present invention, in a liquid feeding system having a raised portion, it is possible to discharge all residual liquid before and after the raised portion with a simple configuration.

FIG. 4 is a piping diagram showing a liquid feeding state in the first liquid feeding mode of the liquid feeding system of one embodiment of the present invention. FIG. 10 is a piping diagram showing a liquid feeding state when the first liquid feeding mode of the liquid feeding system ends. FIG. 10 is a piping diagram showing a liquid feeding state when the liquid feeding system ends the second liquid feeding mode. FIG. 10 is a piping diagram showing a liquid feeding state when the liquid feeding system ends the third liquid feeding mode. FIG. 10 is a piping diagram showing a liquid feeding state at the start of a fourth liquid feeding mode of the liquid feeding system; FIG. 11 is a piping diagram showing a liquid feeding state of the liquid feeding system at the end of the fourth liquid feeding mode. FIG. 10 is a piping diagram showing a liquid feeding state of the liquid feeding system at the end of the fifth liquid feeding mode. FIG. 11 is a piping diagram showing a liquid feeding state at the start of the sixth liquid feeding mode of the liquid feeding system.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 to 8 are block diagrams showing the configuration of a liquid transfer system that is an embodiment of the present invention, and each figure shows the distribution state of the liquid and pressurized gas in each step of the liquid transfer operation. .

The liquid transfer system 10 of the present embodiment is, for example, part of a line that manufactures and fills the chemical liquid L. As shown in FIG. A chemical solution L is prepared in a preparation tank (first tank) 12 and passed through a liquid feeding pipe 14 to a cushion tank (third tank) 16 of a filling device installed on the same floor (same level plane) as the preparation tank 12. sent to A small tank (second tank) 18 and a filter 20 are provided in the middle of the liquid feeding pipe 14 in this order from the upstream side. It is supplied to the tank 16 and filled into the container through, for example, a filling nozzle (not shown).

The liquid-feeding pipe 14 includes a first liquid-feeding passage 14A connected to the lower end of the preparation tank 12 and extending laterally, a second liquid-feeding passage (rising portion) 14B connected to the first liquid-feeding passage and extending upward, A third liquid-feeding passage 14C connected to the second liquid-feeding passage and extending laterally and connected to the small tank 18, and a fourth liquid-feeding passage connected to the lower end of the small tank 18 and connected to the filter 20. 14D and a fifth liquid feeding passage 14E connected from the filter 20 to the cushion tank 16. As shown in FIG.

A connecting portion between the preparation tank 12 and the first liquid feeding passage 14A is provided with a first liquid valve 22A, and a connecting portion between the third passage 14C and the small tank 18 is provided with a second liquid valve 22B. A third liquid valve 22C is provided at the connecting portion between the fourth liquid feeding passage 14D and the filter 20, and a fourth liquid valve 22D is provided at the connecting portion between the fifth liquid feeding passage 14E and the cushion tank 16. FIG. A first level sensor (first detection means) 23A is provided in the first liquid feed passage 14A, and a fourth liquid feed passage 14D is provided with a small tank 18 side (upstream side) of the third liquid valve 22C. is provided with a second level sensor 23B. In addition, in the present embodiment, the first liquid feeding passage 14A and the fourth liquid feeding passage 14D are arranged so as to gradually incline toward the downstream.

The liquid delivery system 10 further includes a first air delivery pipe 24 for supplying pressurized gas such as air to the preparation tank 12 and the small tank 18 . An air compressor (pressurizing means) 26 is connected to one end of the first air supply pipe 24 to pressurize and supply air. The other end of the first air supply pipe 24 branches into a first air supply passage 24A and a second air supply passage 24B. The first air supply passage 24A is connected to the upper end of the preparation tank 12 and the second air supply passage 24B is connected to the upper end of the small tank 18 . A first air release passage (depressurization means) 24C used for releasing air (gas) from the small tank 18 to the atmosphere is connected to the second air supply passage 24B.

A first gas valve 28A is provided in the first gas supply passage 24A, and second, third, and fourth gas valves 28B, 28C, and 28D are provided in the second gas supply passage 24B from the branch side. The second gas valve 28B is located near the bifurcation and the third and fourth gas valves 28C, 28D are located near the small tank 18. The air vent passage 24C is connected between the third gas valve 28C and the fourth gas valve 28D, and the connecting portion of the air vent passage 24C is provided with the fifth gas valve 28E.

A second air supply pipe 32 for supplying gas such as air pressurized by an air compressor (pressurizing means) 30 to the cushion tank 16 is connected to the upper end of the cushion tank 16 . Sixth and seventh gas valves 34A and 34B are provided in this order from the cushion tank 16 side near the connecting portion of the second air supply pipe 32 with the cushion tank 16 . In the first air supply pipe 32, between the sixth gas valve 34A and the seventh gas valve 34B, a second air release passage 32A used for releasing air (gas) from the cushion tank 16 to the atmosphere is connected, An eighth gas valve 34C is provided at the connecting portion.

Outputs from the first and second level sensors 23A and 23B are input to a control device (control means) (not shown), and the control device receives inputs including signals from the first and second level sensors 23A and 23B. Based on this, the opening and closing of the first to fourth liquid valves 22A to 22D, the first to eighth gas valves 28A to 28E and 34A to 34C, and the driving of the air compressors 26 and 30 are controlled.

Next, a liquid transfer method in the liquid transfer system 10 of the present embodiment will be described with reference to FIGS. 1 to 8. FIG. 1 to 8, the portion through which the chemical solution L flows is indicated by a thick solid line.

FIG. 1 shows a normal liquid feeding state during a chemical liquid filling operation, that is, a state in which the liquid feeding system 10 is operated in the first liquid feeding mode. In the first liquid feeding mode, the chemical liquid L stored in the preparation tank 12 is continuously supplied to the cushion tank 16 of the filling device through the liquid feeding pipe 14, the small tank 18, and the filter 20. From the cushion tank 16, The chemical solution L is filled into each container (not shown).

In the first liquid feeding mode, the liquid valves 22A, 22B, 22C, and 22D provided in the liquid feeding pipe 14 are all opened. Further, in the first air supply pipe 24, the first gas valve 28A of the first air supply passage 24A is opened, and the second, third, and fourth gas valves 28B, 28C provided in the second air supply passage 24B are opened. , 28D are all closed. That is, pressurized air is supplied only to the preparation tank 12 from the air compression device 26, and the chemical liquid L stored in the preparation tank 12 is pushed into the first liquid feeding passage connected to the lower end by the pressure in the tank. 14A, and sent to the cushion tank 16 via the second liquid-feeding passage 14B, the third liquid-feeding passage 14C, the small tank 18, the fourth liquid-feeding passage 14D, the filter 20, and the fifth liquid-feeding passage 14E. be.

In addition, in the filling device, the sixth and seventh gas valves 34A and 34B provided in the second air supply pipe 32 are opened, and the eighth gas valve 34C provided in the second air release passage 32A is closed. be. As a result, the cushion tank 16 is pressurized by the air compression device 30 and the liquid medicine stored in the cushion tank 16 is pressure-fed to a filling mechanism (not shown) by the pressure in the tank.

FIG. 2 shows the state at the end of the first liquid feeding mode, that is, the state in which all the chemical liquid L in the preparation tank 12 is pushed out to the liquid feeding pipe 14 in the normal liquid feeding state. The amount of the chemical liquid L in the preparation tank 12 is determined, for example, based on the signal of the first level sensor 23A provided in the first liquid feeding passage 14A. When it is determined that the amount of the chemical solution in the preparation tank 12 has become equal to or less than a predetermined value (in this embodiment, when it becomes equal to or less than 0), the control device causes the liquid transport system 10 to move to the second liquid transport mode shown in FIG. switch to mode. 2, the first liquid-feeding passage 14A, the second liquid-feeding passage 14B, the third liquid-feeding passage 14C, the small tank 18, the fourth liquid-feeding passage 14D, the filter 20, the fifth liquid-feeding passage 14E, The chemical liquid L remains in the cushion tank 16 .

The second liquid feeding mode is a process of sending out all the chemical liquid L in the small tank 18 to the fourth liquid feeding passage 14D. state is shown. In switching from the first liquid feeding mode to the second liquid feeding mode, the second liquid valve 22B is closed and the second gas valve 28B, the third gas valve 28C and the fourth gas valve 28D are opened. That is, the pressurized air from the air compressor 26 is supplied to the preparation tank 12 and the small tank 18, and in a state where the liquid supply from the third liquid supply passage 14C is stopped, all the chemical liquid L in the small tank 18 is It is pressure-fed to the fourth liquid-sending passage 14D.

The amount of the chemical liquid L in the small tank 18 is determined, for example, based on the signal of the second level sensor 23B provided in the fourth liquid feeding passage 14D. When it is determined that the amount of the chemical solution in the small tank 18 has become equal to or less than a predetermined value (in this embodiment, when it becomes equal to or less than 0), the control device causes the liquid transport system 10 to move to the third liquid transport mode shown in FIG. switch to mode. 3, the first liquid-feeding passage 14A, the second liquid-feeding passage 14B, the third liquid-feeding passage 14C, the fourth liquid-feeding passage 14D, the filter 20, the fifth liquid-feeding passage 14E, and the cushion tank 16 The chemical solution L remains in . Also in the second liquid feeding mode, the cushion tank 16 continues to be pressurized, and the container is filled with the liquid medicine L in the cushion tank 16 .

The third liquid-feeding mode is a step of feeding all of the chemical liquid L remaining in the first liquid-feeding passage 14A, the second liquid-feeding passage 14B, and the third liquid-feeding passage 14C to the small tank 18. FIG. The state at the end of the third liquid-feeding mode, in which all the chemical liquid L remaining in the first liquid-feeding passage 14A, the second liquid-feeding passage 14B, and the third liquid-feeding passage 14C is fed to the small tank 18, is shown.

In switching from the second liquid feeding mode to the third liquid feeding mode, the second liquid valve 22B is opened and the third liquid valve 22C and the fourth liquid valve 22D are closed. , the third gas valve 28C is closed and the fifth gas valve 28E is opened. That is, the pressurized air from the air compressor 26 is supplied only to the preparation tank 12, and the small tank 18 is released to atmospheric pressure through the first air release passage 24C. As a result, the chemical liquid L remaining in the first liquid-feeding passage 14A, the second liquid-feeding passage 14B, and the third liquid-feeding passage 14C is all fed to the small tank 18 by the pressurized gas from the preparation tank 12. . That is, the chemical liquid L remains in the small tank 18, the fourth liquid feeding passage 14D, the filter 20, the fifth liquid feeding passage 14E, and the cushion tank 16 when the third liquid feeding mode ends.

In addition, even in the third liquid feeding mode, the cushion tank 16 continues to be pressurized, and the container is filled with the liquid medicine L in the cushion tank 16 . Also, the capacity of the small tank 18 is set to a volume sufficient to accommodate all of the chemical liquid L remaining in the first liquid-feeding passage 14A, the second liquid-feeding passage 14B, and the third liquid-feeding passage 14C.

For example, based on the signal from the second level sensor 23B and the level sensor (not shown) provided in the small tank 18, the liquid remaining in the first liquid feeding passage 14A, the second liquid feeding passage 14B, and the third liquid feeding passage 14C. When the controller determines that all of the liquid medicine L that has been in the tank 18 has been transferred to the small tank 18, the third liquid transfer mode is switched to the fourth liquid transfer mode shown in FIGS.

In the fourth liquid feeding mode, the residual chemical L in the first liquid feeding passage 14A, the second liquid feeding passage 14B, and the third liquid feeding passage 14C discharged to the small tank 18 is passed through the filter 20 to the fifth liquid feeding passage 14E. This is the step of sending liquid. In switching from the third liquid feeding mode to the fourth liquid feeding mode, the second liquid valve 22B is closed and the third liquid valve 22C and the fourth liquid valve 22D are opened. 28B, the third gas valve 28C is opened and the first gas valve 28A and the fifth gas valve 28E are closed. That is, the pressurized air from the air compressor 26 is supplied only to the small tank 18, and since the second liquid valve 22B and the fifth gas valve 28E are closed, the inside of the small tank 18 is pressurized. As a result, the chemical liquid L in the small tank 18 is pumped to the fourth liquid feeding passage 14D.

FIG. 5 shows the state at the start of the fourth liquid feeding mode, and FIG. 6 shows the state at the end of the fourth liquid feeding mode. In the present embodiment, the filter 20 is a filter that allows only the chemical solution L to pass therethrough and does not allow air to pass therethrough. Therefore, in the fourth liquid transfer mode, as shown in FIG. . Therefore, the chemical liquid L remains in the fifth liquid feeding passage 14E on the downstream side of the filter 20 even when the fourth liquid feeding mode ends. Note that even in the fourth liquid feeding mode, the cushion tank 16 continues to be pressurized, and the liquid medicine L in the cushion tank 16 is filled in the container. can be.

When all of the liquid medicine L in the small tank 18 and the fourth liquid feeding passage 14D is fed to the downstream side of the filter 20, the control device is used or manually to switch from the fourth liquid feeding mode to the fourth liquid feeding mode shown in FIG. 5 Switch to liquid feeding mode. In switching from the fourth liquid feeding mode to the fifth liquid feeding mode, the second air valve 28B is closed and the supply of pressurized air from the air compressor 26 to the small tank 18 is also stopped. In parallel with this, the seventh gas valve 34B is closed and the eighth gas valve 34C is opened to release the air vent passage of the filter 20 (not shown).

As a result, the supply of pressurized air from the air compressor 30 to the cushion tank 16 is stopped, and the cushion tank 16 is released to atmospheric pressure through the second air release passage 32A. Further, the filter 20 is arranged above the cushion tank 16, and all the chemical liquid L remaining in the fifth liquid feeding passage 14E flows out to the cushion tank 16 due to its own weight, as shown in FIG. .

When all the residual liquid in the liquid-feeding pipe 14 is discharged to the cushion tank 16 in the fifth liquid-feeding mode, the mode is switched to the sixth liquid-feeding mode, which is the final step shown in FIG. In switching from the fifth liquid feeding mode to the sixth liquid feeding mode, the fourth liquid valve 22D is closed using the control device or manually, and in parallel with this, the seventh gas valve 34B is opened. The eighth gas valve 34C is closed. As a result, the inside of the cushion tank 16 is pressurized by the air compression device 30, and the chemical liquid L remaining in the tank is discharged.

In this embodiment, the first level sensor 23A and the second level sensor 23B are provided in the first liquid feeding passage 14A and the fourth liquid feeding passage 14D, respectively. A second level sensor 23B may be attached to the small tank 18 . However, when the second level sensor 23B is attached to the small tank 18, the capacities of the small tank 18 above the position where the second level sensor 23B is attached are the first liquid feeding passage 14A, the second liquid feeding passage 14B, the second liquid feeding passage 14B, and the second liquid feeding passage 14B. 3. It is necessary to have a volume capable of accommodating all of the liquid medicine L remaining in the liquid feed passage 14C.

As described above, according to the present embodiment, it is possible to discharge all the remaining liquid before and after the rising portion with a simple configuration.

10 liquid delivery system 12 preparation tank (first tank)
14 Liquid sending pipe 14A First liquid sending passage 14B Second liquid sending passage 14C Third liquid sending passage 14D Fourth liquid sending passage 18 Small tank (second tank)
20 filters 22A to 22D first to fourth liquid valves 23A first level sensor (first detection means)
23B second level sensor (second detection means)
24C first air vent passage (decompression means)
26 Air compressor (pressurizing means)
28A to 28E 1st to 5th gas valves 30 Air compressor 32A 2nd air release passage 34A to 34C 6th to 8th gas valves L Chemical solution

Claims (4)

a first liquid feeding passage connected to the lower end of a first tank in which liquid is stored and extending laterally;
a second liquid-feeding passage connected to the first liquid-feeding passage and extending upward;
a third liquid-feeding passage connected to the second liquid-feeding passage and extending laterally;
a second tank connected downstream of the third liquid feeding passage;
a fourth liquid feed passage connected downstream of the second tank;
pressurizing means for pressurizing said first and/or second tank;
decompression means for decompressing the inside of the second tank;
A control means for controlling the pressurizing means and the depressurizing means,
The control means pressurizes the first tank by the pressurizing means, thereby continuously feeding the liquid in the first tank to the fourth liquid feeding passage through the second tank. In the liquid feeding mode, the second tank is pressurized by the pressurizing means in a state where liquid feeding from the first tank to the second tank is stopped, until the second tank becomes equal to or less than a predetermined value. 4 a second liquid feeding mode in which the liquid in the second tank is fed to the liquid feeding passage; and a third liquid feeding mode in which liquid remaining between the first liquid feeding passage and the third liquid feeding passage is fed to the second tank. The liquid delivery system comprises first detection means for detecting the amount of liquid in the first tank and second detection means for detecting the amount of liquid in the second tank,
In the first liquid feeding mode, when it is determined that the amount of liquid in the first tank has become equal to or less than a predetermined value based on the output of the first detection means, the mode is switched to the second liquid feeding mode,
The second liquid feeding mode is switched to the third liquid feeding mode when it is determined based on the output of the second detection means that the amount of liquid in the second tank has become equal to or less than a predetermined value. The liquid delivery system according to claim 1. a first liquid feeding passage connected to the lower end of a first tank in which liquid is stored and extending laterally;
a second liquid-feeding passage connected to the first liquid-feeding passage and extending upward;
a third liquid-feeding passage connected to the second liquid-feeding passage and extending laterally;
a second tank connected downstream of the third liquid feeding passage;
a fourth liquid feed passage connected downstream of the second tank;
pressurizing means for pressurizing said first and/or second tank;
A liquid feeding method in a liquid feeding system comprising depressurizing means for decompressing the inside of the second tank,
By controlling the pressurizing means and the depressurizing means to pressurize the first tank, the liquid in the first tank is continuously transferred from the first tank to the fourth liquid feeding passage via the second tank. After the first liquid feeding mode in which the liquid is fed to the second tank by pressurizing the second tank while the liquid feeding from the first tank to the second tank is stopped, the second tank is lowered to a predetermined value or less. The mode is switched to the second liquid feeding mode in which the liquid in the second tank is fed to the fourth liquid feeding passage until the liquid in the second liquid feeding passage is decompressed, and then the pressure in the second tank is reduced to the third feeding mode from the first liquid feeding passage. A liquid feeding method characterized by switching to a third liquid feeding mode for feeding the liquid remaining between the liquid passages to the second tank. The liquid delivery system comprises a first detection means for detecting the amount of liquid in the first tank and a second detection means for detecting the amount of liquid in the second tank,
In the first liquid feeding mode, when it is determined that the amount of liquid in the first tank has become equal to or less than a predetermined value based on the output of the first detection means, the mode is switched to the second liquid feeding mode,
The second liquid feeding mode is switched to the third liquid feeding mode when it is determined based on the output of the second detection means that the amount of liquid in the second tank has become equal to or less than a predetermined value. The liquid feeding method according to claim 3.

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