KR102738361B1 - Chemical Transfer System and Central Chemical Supply System Including the Same - Google Patents

Abstract

The central chemical supply system according to the present invention includes a storage tank that receives and stores chemicals transported from the outside; and a supply tank that has a smaller capacity than the storage tank, receives chemicals from the storage tank, stores them, and can supply the chemicals to a process line requiring the chemicals. The storage tank is formed as a non-pressure vessel, and is configured so that the chemical is transported from the storage tank to the supply tank by the dead weight of the chemical stored in the storage tank without a separate power source, or by a chemical pressure conveying device installed between the storage tank and the supply tank. According to the present invention, contamination or bubble mixing of chemicals can be prevented, and the costs of constructing and maintaining the system can be significantly reduced.

Description

Chemical Transfer System and Central Chemical Supply System Including the Same

The present invention relates to a central chemical supply system constructed in a chemical plant or semiconductor plant that uses a large amount of chemicals, and more particularly, to a technology for transporting chemicals between large-capacity tanks storing chemicals or from a tank to a process line.

In general, in chemical usage sites such as semiconductor factories or chemical plants that use large quantities of chemicals, a central chemical supply system (CCSS) is constructed and utilized. The central chemical supply system includes a large-capacity storage tank, a relatively small-capacity supply tank, and a chemical transport/transfer/supply device. In addition, if necessary, a mixing device for diluting chemicals or mixing two or more types of chemicals and a mixed chemical storage tank may be further included at the rear end of the supply tank or between the storage tank and the supply tank.

A chemical transport/transfer/supply device transports chemicals transported from the outside in tank lorries or drums, etc., to a storage tank, or from a storage tank to a supply tank, from a storage tank to a mixed chemical storage tank via a mixing device, between a mixed chemical storage tank and a supply tank, or from a supply tank or a mixed chemical storage tank to a process line requiring the chemical, and includes an ACQC (Auto Clean Quick Coupler) device, a drum coupler, a pump, etc.

There are two main methods for transporting chemicals from a tank in the front to a tank in the back, or from a supply tank or a mixed chemical storage tank to a process line: a pressurized gas transport method and a pump-based method.

The pressurized transport method is a method of pushing out chemicals by using compressed dry air or an inert gas such as nitrogen into a tank in which chemicals are stored. However, in order to push out chemicals in a tank using the pressurized transport method, it takes time for the gas supplied inside the tank to be compressed and reach a certain gas pressure. In particular, there is a problem that it takes a considerable amount of time to pressurize the inside of a large-capacity storage tank to the gas pressure required for chemical transport, which inevitably leads to system down time (a time during which the chemical transport device is operated but the actual chemical is not transported).

In addition, in the pressure transport method, the tank itself must be manufactured as an expensive pressure vessel, and in particular, manufacturing a large-capacity storage tank (e.g., 30 m ³ ) as a pressure vessel requires considerable cost and is uneconomical. Furthermore, pressure vessels exceeding a certain volume require safety certification, periodic inspection, and safety devices, which means there is a problem in that maintenance costs are high.

Meanwhile, in the case of using a pump, a diaphragm pump was used when the transport flow rate was low, but recently, as the transport flow rate has increased, a magnetic pump using an impeller has been used. However, these pumps have a problem in that the lining is damaged when used for a long period of time, exposing the metal parts to chemicals, causing metal contamination of the chemicals, and also, due to the cavitation phenomenon caused by the high-speed rotation of the impeller, bubbles are generated, and the bubbles are mixed into the chemicals, causing defects in subsequent processes that use the chemicals.

The present invention has been made in consideration of such circumstances, and aims to provide a central chemical supply system and a chemical transport system used therein that can smoothly transport chemicals without using a pump as a chemical transport device that may cause contamination of chemicals or defects in subsequent processes, and without manufacturing a large-capacity storage tank or supply tank as a pressure vessel that incurs high costs and excessive maintenance burden.

In order to achieve the above object, according to one aspect of the present invention, a central chemical supply system comprises: a storage tank which receives and stores chemicals transported from the outside; a supply tank which has a smaller capacity than the storage tank, receives and stores the chemicals from the storage tank, and can supply the chemicals to a process line requiring the chemicals; a first channel connecting the storage tank and the supply tank; a first valve installed in the first channel to open and close the first channel; a second channel connecting the supply tank and the process line; and a second valve installed in the second channel to open and close the second channel, wherein the storage tank is formed as a non-pressure vessel, and the transfer of the chemicals from the storage tank to the supply tank is configured to be performed by the dead weight of the chemicals stored in the storage tank, together with the opening of the first valve and the air vent of the supply tank, without a separate power source.

Here, the supply tank is formed as a non-pressure vessel and further includes at least one chemical pressure sending device installed in the second passage, and the supply of chemicals from the supply tank to the process line can be configured to be performed by the at least one chemical pressure sending device.

In addition, a central chemical supply system according to another aspect of the present invention comprises: a storage tank which receives and stores chemicals transported from the outside; a supply tank which has a smaller capacity than the storage tank, receives the chemicals from the storage tank, stores them, and can supply the chemicals to a process line requiring the chemicals; a first passage connecting the storage tank and the supply tank; a first valve installed in the first passage to open and close the first passage; and at least one first chemical pressure-sending device installed in the first passage, wherein the storage tank is formed of a non-pressure vessel, and the transfer of the chemicals from the storage tank to the supply tank is configured to be performed by the at least one first chemical pressure-sending device.

Here, the supply tank is formed as a non-pressure vessel, and further comprises a second passage connecting the supply tank and the process line; a second valve installed in the second passage to open and close the second passage; and at least one second chemical pressure sending device installed in the second passage, and the supply of chemicals from the supply tank to the process line can be configured to be performed by the at least one second chemical pressure sending device.

In addition, according to an embodiment, the at least one chemical pressure conveying device may be configured to be comprised of a plurality of chemical pressure conveying devices, and the plurality of chemical pressure conveying devices may be configured to perform the pressure operation with a time difference from each other.

In addition, a chemical transport system according to another aspect of the present invention is a chemical transport system installed in a channel connecting tanks storing chemicals or a channel between the tanks and a process line requiring the chemical to transport chemicals, wherein the channel is branched into a plurality of branch channels, and a plurality of chemical pressure transport devices are arranged in parallel for each branch channel, and the plurality of chemical pressure transport devices are configured to perform pressure operations with a time difference from each other, and each of the plurality of chemical pressure transport devices includes a pressure vessel having a chemical inlet through which the chemical flows in, a gas inlet through which an inert gas flows in, a gas outlet through which the inert gas is discharged, and a chemical outlet through which the chemical flows out with the gas pressure of the inert gas, and the chemical inlet and the gas outlet are opened and the gas outlet is closed, thereby filling the chemical in the pressure vessel, and then the chemical inlet and the gas outlet are closed and the gas inlet and the chemical outlet are closed. By opening, the chemical is configured to be sent from the pressure vessel by the pressure of the inert gas.

According to an embodiment of the present invention, since a pump is not used as a chemical transport device, problems of chemical contamination or bubble mixing can be prevented.

In addition, by using a chemical transport device of the pressure type and not manufacturing the large-capacity tank itself as a pressure vessel, the production cost and maintenance cost can be significantly reduced.

In addition, according to the embodiment, a plurality of small-capacity chemical pressure conveying devices are arranged in parallel to pressure-send chemicals at different times, thereby enabling continuous and smooth transport of chemicals.

The following drawings attached to this specification illustrate preferred embodiments of the present invention and, together with the detailed description of the invention described below, serve to further understand the technical idea of the present invention; therefore, the present invention should not be interpreted as being limited to matters described in such drawings.
FIG. 1 is a drawing schematically showing the configuration of a central chemical supply system according to one embodiment of the present invention.
FIG. 2 is a drawing schematically showing the configuration of a central chemical supply system according to another embodiment of the present invention.
Figure 3 is a drawing schematically showing the configuration of a chemical pressure conveying device used in an embodiment of the present invention.
FIG. 4 is a drawing showing the configuration and operation of a chemical transport system according to another embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to the attached drawings according to preferred embodiments. The terms or words used in this specification and claims should not be interpreted as limited to their usual or dictionary meanings, and should be interpreted as meanings and concepts that conform to the technical idea of the present invention based on the principle that the inventor can appropriately define the concept of the term in order to explain his own invention in the best way. Therefore, the embodiments described in this specification and the configurations illustrated in the drawings are only the most preferred embodiments of the present invention and do not represent all of the technical idea of the present invention, and it should be understood that there may be various equivalents and modified examples that can replace them at the time of the present application.

In the drawings, the size of each component or a specific part of the component is exaggerated, omitted, or schematically illustrated for convenience and clarity of explanation. Therefore, the size of each component does not entirely reflect the actual size. If it is judged that a specific description of a related known function or configuration may unnecessarily obscure the gist of the present invention, such description will be omitted.

The term 'connection' as used herein includes not only cases where one component is directly connected to another component, but also cases where it is indirectly connected through an intermediate component.

In addition, the term "chemical" in this specification includes liquids such as pure water, acidic, alkaline or neutral solutions, and further includes those in an emulsion or paste state such as slurry in which powder is mixed with liquid, but excludes those in a gaseous state. In addition, the supply tank in the following includes a mixed chemical storage tank.

FIG. 1 is a drawing schematically showing the configuration of a central chemical supply system according to one embodiment of the present invention.

Referring to FIG. 1, the central chemical supply system according to the present embodiment includes a storage tank (10) and a supply tank (20).

The storage tank (10) is a tank that receives and stores chemicals transported from the outside using, for example, a tank lorry, through a transport device such as an ACQC device. The storage tank (10) may be a large-capacity tank of, for example, 30 m ³ and may be formed as a non-pressure vessel. Here, the non-pressure vessel means a vessel whose design pressure is about 2 kgf/cm ² or less as a gauge pressure.

The supply tank (20) is a tank that receives and stores chemicals from the storage tank (10) and supplies them to a process line or a chemical mixing device (not shown) that requires chemicals. The supply tank (20) may have a smaller capacity than the storage tank (10), for example, a small capacity of 2 m ³ . In addition, the supply tank (20) may be formed of a non-pressure vessel, similar to the storage tank (10). Meanwhile, although only one storage tank (10) and one supply tank (20) are shown in the drawing, a plurality of supply tanks (20) may be installed for one storage tank (10).

The storage tank (10) and the supply tank (20) are connected via a first flow path (L1), and a first valve (V1) for opening and closing the first flow path (L1) is installed in the first flow path. In addition, the supply tank (20) and the aforementioned process line or chemical mixing device are connected via a second flow path (L2), and a second valve (V2) for opening and closing the second flow path (L2) is installed in the second flow path. In addition, the storage tank (10) and the supply tank (20) may be formed with an air vent hole for discharging air, chemical fumes, or inert gases inside the tank when chemicals are filled in each tank. This air vent hole may be connected via a valve to an exhaust line connected to a waste gas treatment device inside the factory, particularly when the chemical fumes are flammable or toxic. In addition, a gas supply pipe that can supply air or inert gas to ensure smooth transport or supply when transporting or supplying chemicals to the rear end of each tank may be connected to the storage tank (10) and the supply tank (20) through a valve. In addition, a water level sensor that detects the water level of the chemical stored in each tank may be installed in the storage tank (10) and the supply tank (20).

Meanwhile, the first valve (V1) and the second valve (V2), and further the valves installed in the exhaust line or the gas supply pipe, may be electronic valves that can be opened and closed according to a control signal from a control unit (not shown). In addition, although not shown separately, a check valve may be installed in the first flow path (L1) and the second flow path (L2), and further the exhaust line or the gas supply pipe to prevent backflow of chemicals or gases, or a backflow prevention device may be included in each valve.

In the central chemical supply system according to the present embodiment configured as described above, the operation of transferring chemicals from the storage tank (10) to the supply tank (20) is described as follows.

First, it is assumed that the storage tank (10) is filled with chemicals transported from the outside using a chemical transport device such as an ACQC device, and the supply tank (20) is empty and not yet filled with chemicals. In this state, when the first valve (V1) is opened and the second valve (V2) is closed, the chemical stored in the storage tank (10) is transferred to the supply tank (20) by its own weight. At this time, in order to smoothly transport the chemical, the gas supply pipe of the storage tank (10) is opened so that air or inert gas is introduced into the storage tank (10), and the air vent hole of the supply tank (20) is opened so that the air or inert gas in the supply tank (20) is exhausted (vented). In addition, at this time, the air vent hole of the storage tank (10) and the gas supply pipe of the supply tank (20) are closed.

When a predetermined period of time has elapsed and the chemical is filled to the full level of the supply tank (20) (the level of the chemical can be detected by the water level sensor described above), the first valve (V1) that was opened, the gas supply pipe of the storage tank (10), and the air vent hole of the supply tank (20) are all closed.

Meanwhile, the chemical transfer speed (transfer flow rate per unit time) from the storage tank (10) to the supply tank (20) is proportional to the cross-sectional area of the first flow path (L1), but if the cross-sectional area of the first flow path (L1) is fixed, it gradually slows down as the level of the chemical in the storage tank (10) decreases. Therefore, in order to achieve smoother transfer, the flow rate of air or inert gas introduced through the gas supply pipe of the storage tank (10) may be increased so that the pressure in the storage tank (10), which is a non-pressure vessel, increases to a level lower than the design pressure, for example, 1.8 kgf/cm ² .

According to this embodiment, chemical transfer from the storage tank (10) to the supply tank (20) can be performed without a separate power source (pump). Meanwhile, the above transfer operation can be performed automatically by a control unit (not shown) controlling the opening and closing of various valves according to a water level detection signal of a water level sensor.

According to an embodiment, the central chemical supply system of the present embodiment may further include a device for transporting the chemical from the supply tank (20) to a process line or chemical mixing device that requires the chemical. That is, the central chemical supply system of the present embodiment may further include at least one chemical pressure sending device (30a) installed in the second flow path (L2), as illustrated in FIG. 1, and may be configured such that the supply of the chemical to the process line is performed by the chemical pressure sending device (30a).

The chemical pressure conveying device (30a) is a device that conveys chemicals using the aforementioned pressure conveying method, that is, by blowing an inert gas such as nitrogen into the interior of a pressure vessel filled with chemicals and pushing out the chemicals by the gas pressure. Specifically, the chemical pressure conveying device (30a) can be configured as shown in Fig. 3.

FIG. 3 is a drawing schematically showing the configuration of a chemical pressure sending device used in an embodiment of the present invention. The configuration of the chemical pressure sending device (30a) will be described with reference to FIG. 3 as follows. Meanwhile, in FIG. 3, unlike the chemical pressure sending devices (30a, 30b) of FIGS. 1 and 2 (a schematic diagram of a central chemical supply system according to another embodiment described later), reference symbols such as 'a' and 'b' are omitted to indicate that they are common components of the chemical pressure sending devices used in the embodiments of FIGS. 1 and 2.

The chemical pressure transport device (30) includes a pressure vessel (31) having a chemical inlet (32) through which chemicals are introduced, a gas inlet (34) through which inert gas is introduced, a gas outlet (35) through which inert gas is discharged, and a chemical outlet (33) through which chemicals are discharged with the gas pressure of the inert gas, as illustrated in (a) of FIG. 3. Here, the pressure vessel (31) is configured to have a smaller capacity (e.g., 0.1 m ³ or less) than the supply tank (20). By making the pressure vessel (31) smaller in capacity, not only can the manufacturing cost be significantly reduced compared to the case where a large-capacity storage tank (10) or supply tank (20) is manufactured as a pressure vessel, but also the maintenance costs for safety certification, periodic inspections, and safety devices can be significantly reduced.

The chemical inlet (32) is connected to the second path (L2) in the embodiment of Fig. 1 and to the first path (L1) in the embodiment of Fig. 2 via a valve (V32). The valve (V32) may also function as the second valve (V2) in the embodiment of Fig. 1 and as the first valve (V1) in the embodiment of Fig. 2. The chemical outlet (33) is connected to the process line in the embodiment of Fig. 1 and to the supply tank (20) in the embodiment of Fig. 2 via a valve (V32). The gas inlet (34) may be connected to an inert gas supply source (not shown), and the gas outlet (35) may be connected to an exhaust line connected to a waste gas treatment device within the plant.

Meanwhile, Fig. 3 (b) illustrates a chemical pressure sending device (30') according to a modified example, and the same reference numerals as Fig. 3 (a) indicate the same configuration. The difference between the chemical pressure sending device (30') of the modified example illustrated in Fig. 3 (b) and the chemical pressure sending device (30) illustrated in Fig. 3 (a) is the configuration of the chemical outlet (33'). That is, the chemical outlet (33') of the chemical pressure sending device (30') of the modified example penetrates from the upper portion of the pressure vessel (31) opposite to the chemical inlet (32) and extends to near the bottom of the pressure vessel (31), so that the chemical flows out to the upper portion of the pressure vessel (3).

The chemical pressure-supply device (30a) configured in this manner can pressure-supply chemicals by opening and closing each valve (V32a to V35a). Specifically, by first opening the chemical inlet (32a) and the gas outlet (35a), and then closing the gas inlet (34a) and the chemical outlet (33a), the chemicals are charged into the pressure vessel (31a) by their own weight in the supply tank (20). At this time, in order for the chemicals to be charged into the pressure vessel (31a) more smoothly, the flow rate of air or inert gas flowing in through the gas supply pipe of the supply tank (20) can be increased so that the pressure in the supply tank (20), which is a non-pressure vessel, increases to a pressure lower than the design pressure, for example, 1.8 kgf/cm ² .

Next, the chemical inlet (32a) and the gas outlet (35a) are closed, and the gas inlet (34a) and the chemical outlet (33a) are opened, thereby forcing the chemical from the pressure vessel (31a) to the process line by the pressure of the inert gas.

FIG. 2 is a drawing schematically showing the configuration of a central chemical supply system according to another embodiment of the present invention.

Referring to FIG. 2, the differences between the central chemical supply system according to the present embodiment and the central chemical supply system according to the aforementioned embodiment will be described. In FIG. 2, the same reference numerals as in FIG. 1 are the same components as those of the central chemical supply system according to the aforementioned embodiment, and therefore, a detailed description thereof will be omitted.

The central chemical supply system of the present embodiment, like the central chemical supply system of the aforementioned embodiment, includes a storage tank (10) and a supply tank (20). In addition, the present embodiment includes a first chemical pressure-supply device (30b) between the storage tank (10) and the supply tank (20), which is substantially the same as the chemical pressure-supply device (30a) adopted in the example of the aforementioned embodiment.

The first chemical pressure transfer device (30b) transfers chemicals from the storage tank (10) to the supply tank (20) in a pressure transfer manner. That is, while in the above-described embodiment, the transfer of chemicals from the storage tank (10) to the supply tank (20) is configured to be accomplished by the dead weight of the chemicals without separate power, in this embodiment, the first chemical pressure transfer device (30b) is used to transfer chemicals from the storage tank (10) to the supply tank (20). Here, power is required to supply compressed gas to the first chemical pressure transfer device (30b) to transfer chemicals, but unlike conventional pumps, there are no problems such as contamination of chemicals or inclusion of bubbles.

Meanwhile, in the present embodiment, it is preferable that the first flow path (L1) is connected to the upper part of the supply tank (20). This is to avoid a situation in which, when the first flow path (L1) is connected to the lower part of the supply tank (20) as shown in Fig. 1, the chemical load increases as the chemical level in the supply tank (20) rises, and the chemical pressure resistance by the first chemical pressure-supply device (30b) increases, requiring excessive increase in the supply pressure of the inert gas.

In addition, the configuration and operation of the first chemical pressure sending device (30b) are substantially the same as the configuration and operation of the chemical pressure sending device (30a) according to the embodiment of the above-described embodiment, so a detailed description is omitted.

Meanwhile, according to an embodiment, the central chemical supply system of the present embodiment may further include a device for transporting the chemical from the supply tank (20) to a process line or chemical mixing device that requires the chemical. That is, as illustrated in FIG. 2, the central chemical supply system of the present embodiment may further include a second chemical pressure sending device (30a) identical to the chemical pressure sending device (30a) according to the embodiment of the above-described embodiment in the second flow path (L2), so that the supply of the chemical to the process line may be performed by the second chemical pressure sending device (30a).

In the above-described embodiment, the present embodiment and its embodiment use a small-capacity chemical pressure-transfer device (30a, 30b), thereby avoiding problems of chemical contamination or bubble mixing by a conventional pump. However, there is a problem that the transfer flow rate is small, and there is a limitation of the pressure-transfer method, that is, the transfer of chemicals is not performed while the pressure vessel (31) is being filled with chemicals, so the transfer of chemicals cannot but be discontinuous.

Accordingly, in the present invention, a plurality of chemical pressure transfer devices (30a or 30b) installed in the first flow path (L1) or the second flow path (L2) are arranged in parallel so that the plurality of chemical pressure transfer devices perform pressure transfer operations with a time difference from each other, thereby increasing the transfer flow rate and achieving continuous transfer.

Hereinafter, a chemical transport system according to another embodiment of the present invention will be described with reference to FIG. 4, which is a drawing showing the configuration and operation of a chemical transport system using a plurality of chemical pressurizing devices according to another embodiment of the present invention.

Referring to FIG. 4, in another embodiment of the present invention and an example of the above-described embodiments, a flow path (L) (which may be a first flow path (L1) or a second flow path (L2)) is divided into two branch flow paths (L-1, L-2), and a chemical pressure sending device (30-1, 30-2) is placed in each branch flow path, and while one chemical pressure sending device (30-1) is being charged, the other chemical pressure sending device (30-2) performs a pressure sending operation, thereby enabling continuous transport.

Meanwhile, although Fig. 4 illustrates an example of using two chemical pressure conveying devices (30-1, 30-2), the number of chemical pressure conveying devices is not limited to two and can be increased to three or more.

In this way, by modularizing and using a plurality of chemical pressure conveying devices (30), the chemical pressure conveying device (30) can be configured with a small capacity with significantly reduced manufacturing and maintenance costs while satisfying the required transport speed (transfer flow rate).

Above, the preferred embodiments of the present invention have been described with reference to the attached drawings. However, the embodiments described in this specification and the configurations illustrated in the drawings are only the most preferred embodiments of the present invention and do not represent all of the technical ideas of the present invention, so it should be understood that there may be various equivalents and modified examples that can replace them at the time of filing this application.

10: Storage tank
20: Supply Tank
30, 30a, 30b, 30-1, 30-2: Chemical pressure conveying device
31, 31': Pressure vessel
32, 32a, 32b: Chemical inlet
33, 33a, 33b: Chemical outlet
34, 34a, 34b: Gas inlet
35, 35a, 35b: Gas exhaust port

Claims (11)

A storage tank that receives and stores chemicals transported from outside;
A supply tank having a smaller capacity than the storage tank, capable of transferring and storing the chemical from the storage tank and supplying the chemical to a process line requiring the chemical;
A first flow path connecting the above storage tank and the above supply tank;
A first valve installed in the first euro to open and close the first euro;
A second path connecting the above supply tank and the above process line; and
Including a second valve installed in the second euro to open and close the second euro,
The above storage tank is composed of a non-pressure vessel,
A central chemical supply system configured so that the transfer of chemicals from the storage tank to the supply tank is accomplished by the dead weight of the chemicals stored in the storage tank, together with the opening of the first valve and the air vent of the supply tank, without a separate power source. In the first paragraph,
The above supply tank is composed of a non-pressure vessel,
Further comprising at least one chemical pressurizing device installed in the second euro,
A central chemical supply system configured such that the supply of chemicals from the above supply tank to the above process line is accomplished by the at least one chemical pressurizing device. In the second paragraph,
The above at least one chemical pressure conveying device is composed of multiple units,
A central chemical supply system configured such that the above plurality of chemical pressurizing devices perform pressurizing operations with time differences from each other. In the second or third paragraph,
The chemical pressure conveying device comprises a chemical inlet connected to the second flow path, a gas inlet for introducing an inert gas, a gas outlet for discharging the inert gas, and a chemical outlet for discharging the chemical with the gas pressure of the inert gas, and includes a pressure vessel having a smaller capacity than the supply tank.
A central chemical supply system configured to charge the chemical into the pressure vessel by opening the chemical inlet and the gas outlet and closing the gas inlet and the chemical outlet, and then pressurize and transfer the chemical from the pressure vessel by the pressure of the inert gas by closing the chemical inlet and the gas outlet and opening the gas inlet and the chemical outlet. A storage tank that receives and stores chemicals transported from outside;
A supply tank having a smaller capacity than the storage tank, capable of transferring and storing the chemical from the storage tank and supplying the chemical to a process line requiring the chemical;
A first flow path connecting the above storage tank and the above supply tank;
A first valve installed in the first euro to open and close the first euro; and
comprising at least one first chemical pressure conveying device installed in the first euro,
The above storage tank is composed of a non-pressure vessel,
The transfer of chemicals from the storage tank to the supply tank is configured to be accomplished by at least one first chemical pressurizing device,
The above at least one first chemical pressure device is composed of a plurality of units,
A central chemical supply system wherein a plurality of the first chemical pressurizing devices are configured to perform pressurizing operations with time differences from each other. delete In paragraph 5,
The first chemical pressure device comprises a chemical inlet connected to the first flow path, a gas inlet for introducing an inert gas, a gas outlet for discharging the inert gas, and a chemical outlet for discharging the chemical with the gas pressure of the inert gas, and includes a pressure vessel having a smaller capacity than the supply tank.
A central chemical supply system configured to charge the chemical into the pressure vessel by opening the chemical inlet and the gas outlet and closing the gas inlet and the chemical outlet, and then pressurize and transfer the chemical from the pressure vessel by the pressure of the inert gas by closing the chemical inlet and the gas outlet and opening the gas inlet and the chemical outlet. In paragraph 5,
The above supply tank is composed of a non-pressure vessel,
A second path connecting the above supply tank and the above process line;
A second valve installed in the second euro to open and close the second euro; and
Further comprising at least one second chemical pressure device installed in the second euro,
A central chemical supply system configured such that the supply of chemicals from the above supply tank to the above process line is accomplished by the at least one second chemical pressurizing device. In Article 8,
The above at least one second chemical pressure device is composed of a plurality of units,
A central chemical supply system wherein the plurality of second chemical pressurizing devices are configured to perform pressurizing operations with a time difference from each other. In clause 8 or 9,
The second chemical pressure device comprises a chemical inlet connected to the second flow path, a gas inlet for introducing an inert gas, a gas outlet for discharging the inert gas, and a chemical outlet for discharging the chemical with the gas pressure of the inert gas, and includes a pressure vessel having a smaller capacity than the supply tank.
A central chemical supply system configured to charge the chemical into the pressure vessel by opening the chemical inlet and the gas outlet and closing the gas inlet and the chemical outlet, and then pressurize and transfer the chemical from the pressure vessel by the pressure of the inert gas by closing the chemical inlet and the gas outlet and opening the gas inlet and the chemical outlet. A chemical transport system that is installed in a path connecting tanks storing chemicals or a path between the tanks and a process line requiring the chemicals to transport chemicals.
The above-mentioned euro is divided into multiple branch euros, and multiple chemical pressure devices are arranged in parallel, one for each branch euro.
The above multiple chemical pressurizing devices are configured to perform pressurizing operations with a time difference from each other,
Each of the above multiple chemical pressurizing devices,
Including a pressure vessel having a chemical inlet through which the chemical is introduced, a gas inlet through which an inert gas is introduced, a gas outlet through which the inert gas is discharged, and a chemical outlet through which the chemical is discharged by the gas pressure of the inert gas.
A chemical transport system configured to charge the chemical into the pressure vessel by opening the chemical inlet and the gas outlet and closing the gas inlet and the chemical outlet, and then transport the chemical from the pressure vessel by the pressure of the inert gas by closing the chemical inlet and the gas outlet and opening the gas inlet and the chemical outlet.

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