JP7225112B2 - 表示装置、電子機器 - Google Patents
表示装置、電子機器 Download PDFInfo
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- JP7225112B2 JP7225112B2 JP2019551772A JP2019551772A JP7225112B2 JP 7225112 B2 JP7225112 B2 JP 7225112B2 JP 2019551772 A JP2019551772 A JP 2019551772A JP 2019551772 A JP2019551772 A JP 2019551772A JP 7225112 B2 JP7225112 B2 JP 7225112B2
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- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 235000013599 spices Nutrition 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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- G09G2300/0842—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
- G09G2300/0861—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor with additional control of the display period without amending the charge stored in a pixel memory, e.g. by means of additional select electrodes
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- G09G2320/029—Improving the quality of display appearance by monitoring one or more pixels in the display panel, e.g. by monitoring a fixed reference pixel
- G09G2320/0295—Improving the quality of display appearance by monitoring one or more pixels in the display panel, e.g. by monitoring a fixed reference pixel by monitoring each display pixel
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- G09G2340/04—Changes in size, position or resolution of an image
- G09G2340/0407—Resolution change, inclusive of the use of different resolutions for different screen areas
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- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
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Description
本実施の形態では、本発明の一態様である表示装置について、図面を参照して説明する。
本実施の形態では、上記実施の形態1で説明した構成とは異なる表示装置の構成例について図面を参照して説明する。本実施の形態では、上記実施の形態1と異なる点について詳細に説明し、重複する記載については説明を省略する場合がある。
本実施の形態では、実施の形態1および2で説明したOSトランジスタの詳細について説明する。
本実施の形態では、EL素子を用いた表示装置の構成例について説明する。
本実施の形態では、上記実施の形態に示した各トランジスタに置き換えて用いることのできるトランジスタの一例について、図面を用いて説明する。
図18(A1)は、ボトムゲート型のトランジスタの一種であるチャネル保護型のトランジスタ810の断面図である。図18(A1)において、トランジスタ810は基板771上に形成されている。また、トランジスタ810は、基板771上に絶縁層772を介して電極746を有する。また、電極746上に絶縁層726を介して半導体層742を有する。電極746はゲート電極として機能できる。絶縁層726はゲート絶縁層として機能できる。
図19(A1)に例示するトランジスタ842は、トップゲート型のトランジスタの1つである。電極744a及び電極744bは、絶縁層728及び絶縁層729に形成した開口部において半導体層742と電気的に接続する。
本実施の形態では、上記実施の形態で例示した表示装置に適用可能な半導体装置について説明する。以下で例示する半導体装置は、記憶装置として機能することができる。
本発明の一態様に係る表示装置を用いることができる電子機器として、表示機器、パーソナルコンピュータ、記録媒体を備えた画像記憶装置又は画像再生装置、携帯電話、携帯型を含むゲーム機、携帯データ端末、電子書籍端末、ビデオカメラ、デジタルスチルカメラ等のカメラ、ゴーグル型ディスプレイ(ヘッドマウントディスプレイ)、ナビゲーションシステム、音響再生装置(カーオーディオ、デジタルオーディオプレイヤー等)、複写機、ファクシミリ、プリンタ、プリンタ複合機、現金自動預け入れ払い機(ATM)、自動販売機等が挙げられる。これら電子機器の具体例を図21に示す。
Claims (7)
- 第1のメモリ回路と、第2のメモリ回路と、第1のトランジスタと、表示素子と、を有する画素を有し、
前記画素は、第1の配線、第2の配線、および第3の配線と電気的に接続され、
前記第1の配線は、第5の信号を前記画素に与える機能を有し、
前記第2の配線は、第1の信号および第2の信号を前記画素に与える機能を有し、
前記第3の配線は、第3の信号および第4の信号を前記画素に与える機能を有し、
前記第1のメモリ回路は、第1の信号を保持する機能を有し、
前記第2のメモリ回路は、第3の信号を保持する機能を有し、
前記第1のメモリ回路は、第2のトランジスタ、第3のトランジスタ、および第1の容量素子を有し、
前記第2のメモリ回路は、前記第2のトランジスタ、第4のトランジスタ、および第2の容量素子を有し、
前記第2のトランジスタ乃至前記第4のトランジスタは、チャネル形成領域に金属酸化物を有し、前記金属酸化物は、Inと、Znと、M(MはAl、Ti、Ga、Sn、Y、Zr、La、Ce、NdまたはHf)と、を有し、
前記第1の容量素子の一方の電極は、前記第1のトランジスタのゲートと電気的に接続され、
前記第1の容量素子の一方の電極は、前記第2のトランジスタを介して前記第1の配線と電気的に接続され、
前記第1の容量素子の他方の電極は、前記第3のトランジスタを介して前記第2の配線と電気的に接続され、
前記第2の容量素子の一方の電極は、前記第1のトランジスタのゲートと電気的に接続され、
前記第2の容量素子の一方の電極は、前記第2のトランジスタを介して前記第1の配線と電気的に接続され、
前記第2の容量素子の他方の電極は、前記第4のトランジスタを介して前記第3の配線と電気的に接続され、
第1の期間において、
前記第2のトランジスタをオンにし、前記第1の配線に前記第5の信号を与えることにより、前記第1の容量素子の一方の電極、前記第2の容量素子の一方の電極および前記第1のトランジスタのゲートに前記第5の信号を与え、
前記第3のトランジスタをオンにし、前記第2の配線に前記第1の信号を与えることにより、前記第1の容量素子の他方の電極に前記第1の信号を与え、
前記第4のトランジスタをオンにし、前記第3の配線に前記第3の信号を与えることにより、前記第2の容量素子の他方の電極に前記第3の信号を与え、
前記第2のトランジスタ、前記第3のトランジスタおよび前記第4のトランジスタをオフにすることにより、前記第1の信号を前記第1の容量素子に保持し、かつ前記第3の信号を前記第2の容量素子に保持し、
第2の期間において、
前記第2のトランジスタをオフにし、前記第3のトランジスタをオンにし、前記第4のトランジスタをオンにし、
前記第2の配線に前記第3の信号を与えて前記第1の容量素子の他方の電極に前記第3の信号を与え、かつ前記第3の配線に前記第4の信号を与えて前記第2の容量素子の他方の電極に前記第4の信号を与えることにより、前記第1の容量素子の一方の電極、前記第2の容量素子の一方の電極および前記第1のトランジスタのゲートに前記第1の信号乃至前記第5の信号を足し合わせた電圧を与え、前記表示素子に流れる電流を制御する機能を有する表示装置。 - 請求項1において、
前記画素は、第3の容量素子を有し、
前記第3の容量素子の一方の電極は、前記第1のトランジスタのゲートと電気的に接続され、
前記第3の容量素子の他方の電極は、前記第1のトランジスタのソース又はドレインの一方と電気的に接続される表示装置。 - 請求項2において、
前記画素は、前記表示素子に電流を流すための第4の配線と電気的に接続され、
前記第1のトランジスタのソース又はドレインの他方は、前記第4の配線と電気的に接続される表示装置。 - 請求項1または2において、
前記画素は、定電位を与える機能を有する第5の配線に電気的に接続され、
前記画素は、第5のトランジスタを有し、
前記第5のトランジスタのソースまたはドレインの一方は、前記第1のトランジスタのソース又はドレインの一方と電気的に接続され、
前記第5のトランジスタのソースまたはドレインの他方は、前記第5の配線と電気的に接続される表示装置。 - 請求項1乃至4のいずれか一項において、
前記画素は、第6のトランジスタを有し、
前記第6のトランジスタのソースまたはドレインの一方は、前記第1のトランジスタのソース又はドレインの一方と電気的に接続され、
前記第6のトランジスタのソースまたはドレインの他方は、前記表示素子の一方の電極と電気的に接続される表示装置。 - 請求項1乃至5のいずれか一項において、
前記表示素子は、EL素子である表示装置。 - 請求項1乃至6のいずれか一項に記載の表示装置と、カメラと、を有する電子機器。
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KR20240018693A (ko) | 2017-12-06 | 2024-02-13 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 표시 장치, 전자 기기, 및 동작 방법 |
US11048134B2 (en) | 2017-12-21 | 2021-06-29 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002123218A (ja) | 2000-08-08 | 2002-04-26 | Semiconductor Energy Lab Co Ltd | 発光装置およびその駆動方法 |
JP2002140034A (ja) | 2000-08-23 | 2002-05-17 | Semiconductor Energy Lab Co Ltd | 携帯情報装置及びその駆動方法 |
JP2003316318A (ja) | 2002-04-22 | 2003-11-07 | Sony Corp | 画像表示装置及びその方法 |
JP2006524835A (ja) | 2003-04-25 | 2006-11-02 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | アクティブマトリクスディスプレイパネルを駆動する方法および装置 |
WO2013171938A1 (ja) | 2012-05-16 | 2013-11-21 | パナソニック株式会社 | 表示装置 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW493153B (en) | 2000-05-22 | 2002-07-01 | Koninkl Philips Electronics Nv | Display device |
TW514854B (en) | 2000-08-23 | 2002-12-21 | Semiconductor Energy Lab | Portable information apparatus and method of driving the same |
SG120075A1 (en) | 2001-09-21 | 2006-03-28 | Semiconductor Energy Lab | Semiconductor device |
TWI273539B (en) | 2001-11-29 | 2007-02-11 | Semiconductor Energy Lab | Display device and display system using the same |
JP3798370B2 (ja) * | 2001-11-29 | 2006-07-19 | 株式会社半導体エネルギー研究所 | 表示装置及びこれを用いた表示システム |
US7274363B2 (en) | 2001-12-28 | 2007-09-25 | Pioneer Corporation | Panel display driving device and driving method |
US7928945B2 (en) | 2003-05-16 | 2011-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method thereof |
JP4583724B2 (ja) | 2003-05-16 | 2010-11-17 | 株式会社半導体エネルギー研究所 | 表示装置 |
EP1610292B1 (en) | 2004-06-25 | 2016-06-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device, driving method thereof and electronic device |
TWI485681B (zh) | 2005-08-12 | 2015-05-21 | Semiconductor Energy Lab | 顯示裝置 |
KR101259727B1 (ko) | 2008-10-24 | 2013-04-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US9047815B2 (en) | 2009-02-27 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
JP5310244B2 (ja) * | 2009-05-12 | 2013-10-09 | ソニー株式会社 | 表示装置、表示方法 |
JP2012145655A (ja) | 2011-01-07 | 2012-08-02 | Canon Inc | 画像表示装置及びその制御方法 |
JP5906631B2 (ja) | 2011-09-22 | 2016-04-20 | ソニー株式会社 | 表示装置、表示方法および電子機器 |
KR102012451B1 (ko) | 2013-04-01 | 2019-08-21 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 구동 방법 |
JP2014219440A (ja) * | 2013-05-01 | 2014-11-20 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | 映像表示装置及び画素回路の制御方法 |
JP6486660B2 (ja) | 2013-11-27 | 2019-03-20 | 株式会社半導体エネルギー研究所 | 表示装置 |
US10140940B2 (en) | 2015-07-24 | 2018-11-27 | Japan Display Inc. | Display device |
JP2017027012A (ja) | 2015-07-24 | 2017-02-02 | 株式会社ジャパンディスプレイ | 表示装置 |
-
2018
- 2018-10-30 JP JP2019551772A patent/JP7225112B2/ja active Active
- 2018-10-30 WO PCT/IB2018/058462 patent/WO2019092549A1/ja active Application Filing
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- 2024-11-20 JP JP2024202380A patent/JP2025019141A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002123218A (ja) | 2000-08-08 | 2002-04-26 | Semiconductor Energy Lab Co Ltd | 発光装置およびその駆動方法 |
JP2002140034A (ja) | 2000-08-23 | 2002-05-17 | Semiconductor Energy Lab Co Ltd | 携帯情報装置及びその駆動方法 |
JP2003316318A (ja) | 2002-04-22 | 2003-11-07 | Sony Corp | 画像表示装置及びその方法 |
JP2006524835A (ja) | 2003-04-25 | 2006-11-02 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | アクティブマトリクスディスプレイパネルを駆動する方法および装置 |
WO2013171938A1 (ja) | 2012-05-16 | 2013-11-21 | パナソニック株式会社 | 表示装置 |
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