JP7209054B2 - 真空ポンプを運転する方法 - Google Patents
真空ポンプを運転する方法 Download PDFInfo
- Publication number
- JP7209054B2 JP7209054B2 JP2021127232A JP2021127232A JP7209054B2 JP 7209054 B2 JP7209054 B2 JP 7209054B2 JP 2021127232 A JP2021127232 A JP 2021127232A JP 2021127232 A JP2021127232 A JP 2021127232A JP 7209054 B2 JP7209054 B2 JP 7209054B2
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- JP
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- Prior art keywords
- rotor
- wear
- bearing
- vacuum pump
- safety
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/058—Bearings magnetic; electromagnetic
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP20205911 | 2020-11-05 | ||
| EP20205911.9A EP3832141B1 (de) | 2020-11-05 | 2020-11-05 | Verfahren zum betreiben einer vakuumpumpe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022075494A JP2022075494A (ja) | 2022-05-18 |
| JP7209054B2 true JP7209054B2 (ja) | 2023-01-19 |
Family
ID=73138687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021127232A Active JP7209054B2 (ja) | 2020-11-05 | 2021-08-03 | 真空ポンプを運転する方法 |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP3832141B1 (de) |
| JP (1) | JP7209054B2 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4137699B1 (de) * | 2022-12-15 | 2025-01-29 | Pfeiffer Vacuum Technology AG | Vakuumgerät und verfahren zum betreiben eines solchen |
| EP4328468A3 (de) * | 2023-12-15 | 2024-06-26 | Pfeiffer Vacuum Technology AG | Flutventil sowie mit solch einem flutventil ausgerüstete vakuumpumpe |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002295398A (ja) | 2001-03-28 | 2002-10-09 | Boc Edwards Technologies Ltd | ターボ分子ポンプの保護装置、及びターボ分子ポンプの保護方法 |
| US20110210631A1 (en) | 2008-07-18 | 2011-09-01 | Siemens Aktiengesellschaft | Bearing arrangement and bearing block having a magnetic radial bearing and a safety bearing for a rotating machine |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4022523A1 (de) * | 1990-07-16 | 1992-01-23 | Pfeiffer Vakuumtechnik | Einrichtung zum fluten von schnell rotierenden vakuumpumpen |
| US5575630A (en) * | 1995-08-08 | 1996-11-19 | Kyocera Corporation | Blood pump having magnetic attraction |
| US20120063918A1 (en) * | 2009-07-22 | 2012-03-15 | Johnson Controls Technology Company | Apparatus and method for determining clearance of mechanical back-up bearings of turbomachinery utilizing electromagnetic bearings |
| EP3473858B1 (de) * | 2017-10-17 | 2020-07-01 | Pfeiffer Vacuum Gmbh | Verfahren zur lebensdaueroptimierung von wälzlagern einer vakuumpumpe |
| EP3653885B1 (de) * | 2019-11-06 | 2022-01-05 | Pfeiffer Vacuum Gmbh | Verfahren zum ermitteln einer zustandsinformation in einem vakuumgerät |
-
2020
- 2020-11-05 EP EP20205911.9A patent/EP3832141B1/de active Active
-
2021
- 2021-08-03 JP JP2021127232A patent/JP7209054B2/ja active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002295398A (ja) | 2001-03-28 | 2002-10-09 | Boc Edwards Technologies Ltd | ターボ分子ポンプの保護装置、及びターボ分子ポンプの保護方法 |
| US20110210631A1 (en) | 2008-07-18 | 2011-09-01 | Siemens Aktiengesellschaft | Bearing arrangement and bearing block having a magnetic radial bearing and a safety bearing for a rotating machine |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3832141B1 (de) | 2023-01-04 |
| EP3832141A1 (de) | 2021-06-09 |
| JP2022075494A (ja) | 2022-05-18 |
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