JP7165737B2 - Transfer mechanism of vacuum welding furnace - Google Patents

Description

It is a conveying mechanism for vacuum welding furnaces and belongs to the technical field of vacuum welding.

When manufacturing electronic components such as diodes, transistors, thyristors or bridges, it is necessary to solder the chips between the top and bottom sheets, a process called lamination. The specific working process of lamination is as follows. First, apply solder paste on the upper side of the bottom sheet, place the chip in a specific position on the bottom sheet, then stack the top sheet with solder paste on the lower side on the upper side of the bottom sheet, and then add the weld metal The top cover of the mold is covered with the bottom plate of the welding mold, and finally the welding mold is fed into the welding furnace for welding. Welding of the sheets should be done in a vacuum furnace.

A Chinese utility model patent with application number 201420820418.2 discloses a continuous vacuum welding furnace, which has the following technical problems in the process of use.

(1) In order for the transmission mechanism to easily convey the sheet, both ends of the sheet must extend from the supporting table, and the transmission mechanism lifts and conveys the sheet through the extensions of the sheet at both ends. Since the sheet is soft after heating, the extending portions at both ends of the sheet are bent downward. Therefore, the positions of the chips on both ends of the sheet cannot be aligned with the contacts of the sheet, resulting in a large number of defective products.

(2) The temperature of the sheet after welding is too high, the cooling rate is slow, and the sheet carried out from the vacuum processing apparatus is easily oxidized. Also, the temperature of the sheets leaving the machine table is still too high to be handled directly by the operator.

(3) The transmission mechanism supports the sheet at both ends of the sheet when it is conveyed. However, the heated sheet is soft, and when the sheet is supported at both ends, the sheet is easily deformed and detached from the transmission mechanism. and the operation was unstable.

The technical problem to be solved by the present invention is to solve the problems of the prior art, and by making it possible to place the entire sheet on the welding table, deformation of the sheet can be prevented, and the flexibility of operation is excellent. Another object of the present invention is to provide a conveying mechanism for a vacuum welding furnace.

A conveying mechanism for a vacuum welding furnace as a technical solution used by the present invention to solve the technical problem is a conveying mechanism for a vacuum welding furnace, which includes a conveying bar and a welding chamber. including a lifting mechanism, a translation mechanism and an opening and closing mechanism, two conveying bars are installed symmetrically, and the central part thereof is installed in the welding chamber, the opening and closing mechanism is connected to the two conveying bars at the same time, and the two The book carrier bar is driven to open and close, the translation mechanism is connected to the opening and closing mechanism and driven to move the opening and closing mechanism along a direction toward or away from the discharge end, and the lifting mechanism is connected to the translation mechanism. Each carrier bar is provided with a plurality of support parts, and the welding table in the welding chamber is provided with evacuation openings corresponding to the support parts on a one-to-one basis. characterized by

Preferably, both ends of the welding chamber are sealed by end covers, transfer ports are symmetrically installed on both sides of each end cover, transfer bars are connected to an opening and closing mechanism through the transfer ports, The bottom of the end cover and the welding table are spaced apart.

Preferably, the baffle plate mounting grooves are symmetrically installed on both sides of each of the end covers, the plane on which the baffle plate mounting grooves are located is perpendicular to the center line of the carrier bar, and the baffle plate slides in the baffle plate mounting grooves. A baffle plate is slidably and sealingly connected to the carrier bar, and the baffle plate is associated with a corresponding end cover to seal the end of the welding chamber.

Preferably, a conveying mounting arm corresponding to the conveying bar is provided on the lower side of the welding chamber, and both ends of the conveying mounting arm are connected to both ends of the corresponding conveying bar, and the opening and closing mechanism is composed of two conveying mounting arms. connected to

Preferably, the opening and closing mechanism includes a horizontally installed opening and closing guide plate and an opening and closing power module, wherein the opening and closing guide plate is installed between two conveying bars and discharged to either side of the opening and closing guide plate. An opening/closing guide portion gradually inclined inward is provided along a direction approaching the end, and an opening/closing guide wheel attached to the opening/closing guide portion is attached to each lower side of each carrier bar. A tensioned opening/closing spring is provided between the conveying bars, and an opening/closing power module is connected to the opening/closing guide plate to drive the opening/closing guide plate to move along a direction toward or away from the discharge end.

Preferably, the elevating mechanism includes an elevating guide block and a conveying elevating cylinder, and an elevating guide section is provided on the upper side of the elevating guide block so as to gradually slope downward in a direction of approaching the discharge end. An elevating guide wheel attached to the elevating guide part is attached to the lower side of the mechanism, and the piston rod of the transfer elevating cylinder is connected to the elevating guide block to move the elevating guide block along the direction of approaching or separating from the discharge end. drive to let

Preferably, the side adjacent to the feed end of the welding table is the heating zone, the side adjacent to the discharge end of the welding table is the cooling zone, and a shielding gas introduction pipe is installed in the welding chamber or furnace lid.

Preferably, the welding table includes a plurality of heating plates and a plurality of cooling plates, the heating region is formed by connecting the plurality of heating plates, and the cooling region is formed by connecting the plurality of cooling plates. be.

Preferably, an electric heating tube is installed symmetrically on both sides of each said heating plate, a sensor mounting hole is installed in the center of the heating plate, and a sensor mounting hole is installed between the two electric heating tubes. It is a blind hole and the temperature sensor is mounted in the sensor mounting hole.

Preferably, water supply passages are symmetrically installed on both sides of the cooling plate, and water discharge passages communicating with the two water supply passages are installed on at least one end of the cooling plate.

Preferably, a liquid storage cover is installed under the welding chamber, both sides of the bottom of the liquid storage cover are gradually inclined downward from the side to the center, and the bottom of the liquid storage cover An exhaust pipe is provided.

Preferably, a telescopic module is installed between each support and the conveying mechanism, the center line of the telescopic module is parallel to the moving direction of the sheet, and the telescopic module is positioned at the center of the sheet. A plurality of stations are installed on the welding table, and a plurality of evacuation openings are symmetrically installed on both sides of each station, both of which are linked with the support.

Compared with the prior art, the beneficial effects of the present invention are as follows.

1. The opening and closing mechanism of the conveying mechanism of the vacuum welding furnace can be driven to open and close the two conveying bars, the lifting mechanism drives the conveying bars to move up and down, and the translation mechanism moves the conveying bars. Driven in translation, allowing movement of the carrier bar in three-dimensional space, the movement is flexible, creating conditions for support at various positions of the sheet, and the welding table is equipped with a shelter By moving the supporting part on the conveying bar to the lower side of the sheet, the sheet completely positioned above the welding table can be lifted, and the both ends of the sheet are prevented from being extended from the welding table and deformed. be able to.

2. The transfer bar passes through the transfer port, extends from the welding chamber, and is connected to the opening/closing mechanism. Not only can the sheet be conveyed in the welding chamber, but also the sheet can be conveyed into the welding chamber, and the welded sheet in the welding chamber can be conveyed out of the welding chamber, without opening the furnace lid during the welding process. Sheet loading and unloading can be realized.

3. The baffle plate moves in the baffle plate mounting groove with the movement of the carrier bar, so that the welding chamber can be quickly sealed, the leakage of shielding gas is avoided, and the consumption of shielding gas is reduced. Furthermore, welding cost can be reduced.

4. The opening and closing mechanism is connected to the lower carrier mounting arm of the welding chamber to facilitate the coupling of the carrier bar.

5. The opening/closing power module drives the opening/closing guide plate to move, and the opening/closing guide part of the opening/closing guide plate drives the two carrier bars to move in opposite directions synchronously by means of the opening/closing guide wheel; The opening/closing guide part of the opening/closing guide plate can always be pressed against the opening/closing guide wheel by the opening/closing spring, and the opening and closing of the two conveying bars can be realized to facilitate the sheet conveying. It is possible to avoid obstructing the movement, stabilize the stroke of the carrier bar, and prevent damage to the end cover.

6. The transfer lift cylinder drives the lift guide block to translate, the lift guide part of the lift guide block drives the lift guide wheel to lift and lower the translation mechanism, and the two transport bars are synchronized. It is possible to realize simultaneous lifting and lowering, ensure that the lifting operation of the carrier bar is stable, and specify the lifting stroke without damaging the welding chamber.

7. The vacuum welding furnace control system and its control method set up a heating zone to heat the sheet, so that the sheet can be welded at high speed in the vacuum chamber. Since the welding chamber is filled with shielding gas, the sheet can be prevented from reacting with oxygen during the heating process. The cooling zone can cool the sheet, thus reducing the temperature of the sheet leaving the welding chamber and avoiding oxidation of the sheet, as well as being suitable for rapid processing of the welded sheet. In addition, there is no problem that the defect rate increases due to the deformation of the sheet during the treatment process because the temperature of the sheet is too high and the sheet tends to be denatured during the treatment process. The sheet is in direct contact with the heating area or the cooling area, heating and cooling is achieved by heat conduction, and compared with the heating method using radiation, the heating rate is greatly improved, and the temperature of the sheet is rapidly increased and decreased. reduce energy consumption.

8. The heating area is formed by connecting multiple hot plates, the cooling area is formed by connecting multiple cooling plates, and multiple sheets can be accommodated in the welding chamber at the same time, and the heating area is: Heat multiple sheets at the same time to allow the sheets to reach welding temperature quickly and improve welding speed.

9. Each heating plate is equipped with an electric heating tube and a temperature sensor, so that each heating plate achieves independent temperature control. Therefore, the sheet can be gradually heated during the sheet conveying process, so that the sheet is not deformed due to too fast heating, and the solder paste is melted and flowed out due to too fast heating, which can lead to defective products. to avoid occurring.

10. Each cooling plate is equipped with a water supply channel and a water discharge channel to gradually cool down the sheet, and the temperature drop is too fast to cause cracks in the solder paste after solidification, and the chip and the sheet are separated. It is possible to avoid the occurrence of defective products due to poor contact, and to avoid deformation of the sheet.

11. The liquid storage cover can discharge the liquid condensed and formed in the cooling area through the liquid storage cover discharge pipe.

12. Both sides of the station are equipped with evacuation openings, the support is mounted on the telescopic module, and the telescopic module can adjust the position of the support, so that the sheet can be supported from both sides; The sheet is softened by heating, and when the sheet is supported at both ends, it is prevented from being deformed and detached from the conveying mechanism. It is wide, stable in operation, and can avoid deformation of the welded workpiece, improve welding quality, and reduce the occurrence of defective products.

It is a perspective schematic diagram of a vacuum welding furnace after removing a furnace cover.

FIG. 2 is a partially enlarged view of part A in FIG. 1;

It is an attachment schematic diagram of an electric push rod.

It is a perspective schematic diagram which shows a conveyance mechanism.

It is a front schematic diagram of a conveying mechanism.

It is a perspective schematic diagram of a vacuum welding furnace.

It is a perspective schematic diagram of a furnace lid.

It is a front cross-sectional schematic diagram of a furnace lid.

FIG. 9 is a partially enlarged view of a B portion in FIG. 8;

It is a front cross-sectional schematic diagram of an intake plate.

It is a perspective schematic diagram of a welding stand.

It is a right-side schematic diagram of a welding stand.

It is a plane cross-sectional schematic diagram of a heating plate.

It is a plane cross-sectional schematic diagram of a cooling plate.

It is a front cross-sectional schematic diagram of a welding chamber fixture.

It is a front cross-sectional schematic diagram of a mounting pin.

It is a front schematic diagram of a negative pressure suction module.

It is a perspective schematic diagram of a flux purification module.

1: rack, 2: transfer mechanism, 3: furnace cover cylinder, 4: furnace cover, 5: main nitrogen gas introduction pipe, 6: guide cover, 7: purification introduction pipe, 8: purification exhaust pipe, 9: negative pressure suction Module, 10: Connection arm, 11: Swing arm, 12: Mounting arm, 13: Connecting rod, 14: Furnace lid mounting plate, 1401: Mounting port, 15: Gas cover, 16: Sub-nitrogen gas introduction pipe, 17: Intake Plate, 1701: Inlet, 1702: Fumarole, 18: Welding chamber, 19: Discharge table, 1901: Discharge table evacuation port, 20: Welding table, 21: Supply table, 2101: Supply table evacuation opening, 22: Mounting plate , 23: adjustment spring, 24: transfer bar, 25: sealing cover, 26: end cover, 2601: transfer port, 2602: baffle plate mounting groove, 27: baffle plate, 28: cooling plate, 2801: cooling plate evacuation port, 2802: water supply passage, 2803: drainage passage, 2804: cooling plate mounting hole, 29: water supply pipe, 30: heating plate, 3001: heating plate evacuation port, 3002: electric heating pipe mounting hole, 3003: sensor mounting hole, 3004: Heating plate mounting hole 31: Electric heating tube 32: Temperature sensor 33: Storage cover 3301: Storage cover discharge pipe 34: Negative pressure suction mounting frame 35: Negative pressure suction elevating cylinder 36: Sealing plate , 37: connecting pipe, 38: connecting plate, 39: mounting pin, 3901: screw hole, 40: welding chamber mounting member, 4001: fixed part, 4002: stepped hole, 41: translation plate, 42: opening and closing mounting rod, 43: Opening/closing guide plate, 44: Opening/closing guide wheel, 45: Transfer mounting arm, 46: Transfer lifting cylinder, 47: Lifting guide frame, 48: Lifting guide block, 49: Translation frame, 50: Translation frame guide rail, 51: translation plate guide rail, 52: transfer mounting plate, 53: translation motor, 54: translation motor mounting frame, 55: transfer movement frame, 56: opening/closing movement frame, 57: opening/closing motor mounting frame, 58: opening/closing motor, 59: purification module, 60: fuel box, 69: electric push rod

1 to 18 show preferred embodiments of the present invention, and the present invention will be further described below in conjunction with FIGS. 1 to 18. FIG.

The conveying mechanism of the vacuum welding furnace includes a conveying bar, and an elevating mechanism, a translational mechanism and an opening/closing mechanism installed below the welding chamber 18. Two conveying bars 24 are arranged symmetrically, The central part is placed in the welding chamber 18, the opening and closing mechanism is connected to the two conveying bars 24 at the same time, drives the two conveying bars 24 to open and close, the translation mechanism is connected to the lifting mechanism, and the discharge Each carrier bar 24 has a plurality of lift mechanisms driven to move the lift mechanism along a direction toward or away from the end, the lift mechanism being coupled to a translation mechanism and driving the translation mechanism to lift and lower. A support portion is provided, and evacuation ports are provided on the welding table 20 in the welding chamber 18 so as to correspond to the support portion in a one-to-one correspondence. The opening and closing mechanism of the conveying mechanism of this vacuum welding furnace can be driven to open and close the two conveying bars 24, the lifting mechanism can be driven to raise and lower the conveying bars 24, and the translation mechanism can The bar 24 is driven in translation, allowing movement of the carrier bar 24 in three-dimensional space, the motion is flexible and creates conditions for support at various positions of the sheet, and the welding table 20 A retraction port is installed in the carriage bar 24, and the support part on the conveying bar 24 moves to the lower side of the sheet, so that the sheet completely positioned above the welding table 20 can be lifted, and both ends of the sheet can be lifted from the welding table 20. Extension and deformation can be avoided.

The present invention will be further described below in conjunction with specific embodiments, but those skilled in the art will only be able to better interpret the detailed description here with the drawings, and the structure of the present invention must be It is understood that some equivalent alternatives or common means beyond the scope of these limited embodiments will be omitted from this description, but still fall within the protection scope of the present invention. Should.

[Example 1]

As shown in FIGS. 1 and 2, the welding chamber 18 is mounted on the upper side of the rack 1, both ends of the welding chamber 18 are sealed by end covers 26, and transfer ports are provided on either side of each end cover 26. 2601 is installed, the conveying bar 24 is installed horizontally along the longitudinal direction of the welding chamber 18, and two conveying bars 24 are installed symmetrically on both sides of the welding chamber 18, and both ends of each conveying bar 24 pass through the transfer port 2601 of the end cover 26 and extend. A transport mounting arm 45 is horizontally installed under the welding chamber 18, and the transport mounting arm 45 corresponds to the transport bar 24 one-to-one, and the transport mounting arm 45 is installed under the transport bar 24 on the corresponding side. Both ends of each carrier bar 24 are connected to the carrier mounting arm 45 on the corresponding side by the mounting plate 22, the upper end of the mounting plate 22 is connected to the carrier bar 24, and the lower end of the mounting plate 22 is connected to the carrier mounting arm. 45, the lifting mechanism is attached to the rack 1, the translation mechanism is attached to the lifting mechanism, the opening and closing mechanism is attached to the translation mechanism, and the opening and closing mechanism is connected to the two transport bars 24 at the same time. , thereby opening, closing, lifting and translating the two conveying bars 24, thereby facilitating the sheet conveying.

An adjustment spring 23 is installed between one end of each carrier bar 24 and the mounting plate 22, the adjustment spring 23 is fitted on the carrier bar 24, and one end of the carrier bar 24 adjacent to the adjustment spring 23 is attached to the mounting plate. 22, an adjusting spring 23 is installed outside the mounting plate 22, one end of the adjusting spring 23 is supported by the mounting plate 22, and the other end is attached to the end of the carrier bar 24. It is supported, thereby facilitating adjustment of the position of the carrier bar 24 in the axial direction. The adjusting spring 23 also acts as a buffer to prevent the sheet from dropping due to the shock load generated during the transport process.

The undersides of the end covers 26 at both ends of the welding chamber 18 and the top side of the welding table 20 are spaced apart, thereby forming a supply end and a discharge end at both ends of the welding chamber 18 and close to the heating area. One end is the supply end of the welding chamber 18 and the one end adjacent to the cooling area is the discharge end of the welding chamber 18 . A vertical baffle plate mounting groove 2602 is provided at both ends of each end cover 26 , and a baffle plate 27 is slidably mounted in the baffle plate mounting groove 2602 , and the baffle plate 27 slides on the carrier bar 24 . The baffle plate 27 is movably connected and hermetically installed between the transport bar 24 and the baffle plate 27 seals the transport port 2601 so that the transport bar 24 transports the sheet. , the baffle plate 27 moves along with the transfer bar 24 in the plane where the end cover 26 is positioned, and the baffle plate 27 can always seal the transfer port 2601 to avoid leakage of nitrogen gas, and furthermore, the transfer port 2601 is closed. It is possible to remove the restrictions on the size and to facilitate setting of the moving locus of the conveying bar 24 . The baffle plate 27 can also seal the gap between the end cover 26 and the welding table 20, i.e., the feed end or the discharge end, and open the feed end or the discharge end when the carrier bar 24 lifts the sheet, It is convenient to carry the sheet into or out of the welding chamber 18 and avoids leakage of nitrogen gas. A sealing cover 25 is attached to either end of each carrier bar 24 and each carrier bar 24 is slidably and sealingly connected to a baffle plate 27 by the sealing cover 25 .

As shown in FIG. 3, the carrier bar 24 on both sides of each station is provided with a plurality of holders installed inside the carrier bar 24, and between each holder and the carrier bar 24, a cylinder Or an electric push rod 69, in this embodiment a telescopic module, which is an electric push rod 69, is arranged. The piston rod of the electric push rod 69 is connected to the support through the support mounting rod, and extends the support to the vicinity of the center of the seat to stabilize the seat when it is lifted. The electric push rod 69 is installed horizontally, the support is attached to the lower side of the telescopic part of the electric push rod 69, and the supports on both sides of each station are installed toward the center of the station.

As shown in FIGS. 4 and 5, a translation plate 41 is spaced below the welding chamber 18, and a transfer mounting arm 45 is provided between the translation plate 41 and the welding chamber 18, and the transfer mounting arm 45 is slidably attached to the translation plate 41 by a mounting seat, and the translation mechanism is connected to the translation plate 41 and drives the translation plate 41 to translate along the sheet conveying direction. A horizontal conveying mounting plate 52 is installed under the translating plate 41 at intervals, and a translating plate guide rail 51 is symmetrically installed on both sides of the upper part of the conveying mounting plate 52. 24, the translation plate 41 is slidably attached to the translation plate guide rail 51 by the translation plate slider installed on the lower side, and the transfer mounting plate 52 is attached to the lifting mechanism. , moves up and down with the lifting mechanism.

The lifting mechanism includes a horizontally installed translation frame 49, a lifting guide block 48, a lifting guide frame 47, and a transport lifting cylinder 46. A horizontal translation frame guide rail 50 is attached to the rack 1, and a translation frame The guide rails 50 are installed parallel to the translation plate guide rails 51, and the translation frame 49 is slidably mounted on the translation frame guide rails 50 by the lower translation frame slider. The transfer lift cylinder 46 is horizontally attached to the rack 1 , the piston rod of the transfer lift cylinder 46 is installed facing the translation frame 49 , and the piston rod of the transfer lift cylinder 46 is connected to the translation frame 49 . , to move the translation frame 49 along the sheet conveying direction. Elevation guide blocks 48 are symmetrically installed on both sides of the translation frame 49 , and an elevation guide part is installed on the upper side of the elevation guide block 48 . The lift guide frame 47 has a one-to-one correspondence with the lift guide block 48. A lift guide wheel is rotatably attached to the lower side of the lift guide frame 47, and the lift guide wheel is on the corresponding side. is attached to the lift guide portion of the lift guide block 48, and the transport mounting plate 52 is moved up and down. A vertical lifting guide rail is installed on the rack 1 , and the lifting mounting plate 52 is mounted by a lifting slider so as to slide on the lifting guide rail to guide the transfer mounting plate 52 .

The translation mechanism includes a translation motor mounting frame 54, a transfer movement frame 55, and a translation motor 53, the translation motor mounting frame 54 being installed under the transfer mounting plate 52, and the translation motor 53 being a translation motor mounting frame. Attached to the frame 54, the output shaft of the translation motor 53 is installed horizontally and parallel to the sheet conveying direction. A translation screw is coaxially attached to the translation motor 53 , and the translation screw rotates in synchronization with the translation motor 53 . A translation nut is installed in the body to communicate with the translation screw. The upper side of the transfer movement frame 55 is connected to the translation plate 41 after passing through the transfer mounting plate 52 , and drives the translation plate 41 to move while being synchronized, so that the transfer movement frame 55 and the transfer mounting plate 52 slide. is installed to

The opening/closing mechanism includes an opening/closing mounting rod 42, an opening/closing guide plate 43, an opening/closing movement frame 56, an opening/closing motor mounting frame 57, an opening/closing motor movement frame 56, and an opening/closing power module. The module is the open/close motor 58 . The opening/closing motor mounting frame 57 is installed on the lower side of the transfer mounting plate 52, and the upper side of the opening/closing motor mounting frame 57 is connected to the translation plate 41 and moves in synchronism with the translation plate 41. , is slidably connected to the carrier mounting plate 52 . The opening/closing motor 58 is attached to the opening/closing motor mounting frame 57 . The opening/closing movement frame 56 is slidably attached to the opening/closing motor mounting frame 57, the opening/closing screw is coaxially attached to the output shaft of the opening/closing motor 58, and the opening/closing movement frame 56 is provided with an opening/closing nut linked to the opening/closing screw. , the opening/closing motor 58 is driven by a pair of screw nuts to translate the opening/closing movement frame 56 along the sheet conveying direction. A mounting bar slider is installed on the upper side of the translation plate 41 , and the opening/closing mounting bar 42 is slidably mounted on the mounting bar slider. are connected to the opening/closing mounting rod 42 to drive the opening/closing mounting rod 42 to move synchronously, and the opening/closing movement frame 56 is connected to the transfer mounting plate 52 so as to slide. An opening/closing guide plate 43 is installed on both ends of the opening/closing mounting rod 42, and an opening/closing guide portion is installed on both sides of the opening/closing guide plate 43. The opening/closing guide portion gradually moves inward along the sheet conveying direction. An opening/closing guide wheel 44 is attached to both ends of each transfer mounting arm 45, and the opening/closing guide wheel 44 and the opening/closing guide portion of the opening/closing guide plate 43 are further provided between the two transfer mounting arms 45. An opening/closing spring is installed to bond them together. A mounting arm guide rail is further mounted on the translation plate 41, the mounting arm guide rail is installed perpendicular to the opening/closing mounting bar 42, and the conveying mounting arm 45 is mounted by the opening/closing slider so as to slide on the mounting arm guide rail. .

As shown in FIG. 6, the present invention comprises a welding chamber 18, a furnace lid 4, the conveying mechanism 2, and a negative pressure suction module 9 installed in the furnace lid 4, the furnace lid 4 being the welding chamber. A welding chamber is formed between the cover welding chamber 18 and the furnace lid 4 on the upper side of 18, and a welding table 20 is provided in the lower part of the welding chamber 18, and the bottom of the negative pressure suction module 9 and the welding table 20 are enclosed. The vacuum chamber is sealed, a plurality of stations are installed on the welding table 20, a support is installed on any of the transport mechanisms 2 on both sides of each station, and a telescopic module is installed between the support and the transport mechanism 2. The center line of the telescopic module is parallel to the direction of movement of the sheet, the telescopic part of the telescopic module is installed toward the center of the sheet, and each station has a retraction opening linked to the support part on both sides. To provide a plurality of symmetrically installed vacuum welding furnaces. The vacuum welding furnace with a wide application range of the present invention is provided with a retraction port on both sides of each station, a support is attached to the telescopic module, and the telescopic module is capable of adjusting the position of the support. The sheet can be supported on both sides of the sheet by the heat, and the sheet will not be deformed and separated from the conveying mechanism when the sheet is supported on both ends. It can also handle workpiece welding, has a wide application range, stable operation, and can avoid deformation of the welded workpiece, improve welding quality, and reduce the occurrence of defective products. can.

The side close to the feed end of the welding table 20 is the heating area, the side close to the discharge end of the welding table 20 is the cooling area, and the negative pressure suction module 9 has one end of the heating area close to the cooling area. is installed on the upper side of the furnace lid 4, and the bottom of the negative pressure suction module 9 and the heating area form a sealed negative pressure chamber, and the shield gas introduction pipe is connected to the welding chamber 18 or the furnace lid 4. The heating zone of the present vacuum welding furnace heats the sheet so that it can be rapidly welded in the vacuum chamber. Since the welding chamber 18 is filled with a shielding gas, the sheet can be prevented from reacting with oxygen during the heating process. The cooling zone is capable of cooling the sheet, thus reducing the temperature of the sheet exiting the welding chamber 18 and avoiding oxidation of the sheet, as well as being suitable for rapid processing of the welded sheet. In addition, there is no problem that the defect rate increases due to the deformation of the sheet during the treatment process because the temperature of the sheet is too high and the sheet tends to be denatured. The sheet is in direct contact with the heating area or the cooling area, heating and cooling is achieved by heat conduction, and compared with the heating method using radiation, the heating rate is greatly improved, and the temperature of the sheet is rapidly increased and decreased. reduce energy consumption.

The welding chamber 18 is a rectangular parallelepiped housing that opens upward. Both ends of the welding chamber 18 are a supply end and a discharge end, respectively. It is attached to the rack 1 below the chamber 18 . The furnace lid 4 is attached to the upper side of the welding chamber 18 and seals the upper side of the welding chamber 18 . The negative pressure suction module 9 is installed on the furnace lid 4, and extends into the welding chamber 18 after the lower end of the negative pressure suction module 9 passes through the furnace lid 4, and the negative pressure suction module 9 is divided into a cooling area and a heating area. is placed between A plurality of negative pressure suction modules 9 may be installed to improve the welding speed, and one may be installed.

Connecting arms 10 are installed symmetrically on both ends of the rack 1 , the upper ends of the connecting arms 10 extend upward, and the upper ends of the connecting arms 10 are installed higher than the welding chamber 18 . Mounting arms 12 are symmetrically installed at both ends of the furnace lid 4, the mounting arms 12 are horizontally installed, one end of each mounting arm 12 is fixedly connected to the furnace lid 4, and the other end is the connecting arm 10. is rotatably connected to the upper end of the A furnace lid cylinder 3 for driving the furnace lid 4 to open and close is further connected to the furnace lid 4, and the piston rod of the furnace lid cylinder 3 is connected to a mounting arm 12 via a connecting rod 13 and a swing arm 11 to provide a mounting position. The upper end of the arm 12 is rotatably connected to the central portion of the mounting arm 12, the lower end of the mounting arm 12 is rotatably connected to the central portion of the connecting rod 13, and one end of the connecting rod 13 is connected to the rack 1 or the connecting rod. It is rotatably connected to the arm 10 and the other end is rotatably connected to the piston rod of the hood cylinder 3 , thereby realizing automatic opening and closing of the hood 4 .

As shown in FIG. 7, the furnace lid 4 includes an upper furnace lid cover and a lower furnace lid mounting plate 14. The furnace lid cover is a rectangular parallelepiped housing that opens downward and includes a furnace lid mounting plate. Reference numeral 14 denotes a rectangular parallelepiped plate, and the furnace lid attachment plate 14 is installed under the furnace lid cover and seals the opening on the lower side of the furnace lid cover. Both the mounting arm 12 and the negative pressure suction module 9 are mounted on the furnace lid mounting plate 14 .

In this embodiment, the shield gas is nitrogen gas, the shield gas introduction pipe includes the main nitrogen gas introduction pipe 5, and the main nitrogen gas introduction pipe 5 is installed at both ends of the furnace lid mounting plate 14, The upper end of the main nitrogen gas introduction pipe 5 extends from the furnace lid cover, and a guide cover 6 is installed above each main nitrogen gas introduction pipe 5, and the guide cover 6 is attached to the main nitrogen gas introduction pipe on the corresponding side. 5, and is installed at a distance from the upper end of the main nitrogen gas introduction pipe 5. The guide cover 6 is cylindrical, and either the guide cover 6 or the main nitrogen gas introduction pipe 5 is installed vertically, the guide cover 6 is installed on the upper side of the furnace lid cover, and the guide cover 6 and the main nitrogen gas introduction pipe 5 are coaxially installed, and the guide cover 6 is connected to the main nitrogen gas introduction pipe 5 Guidance can be provided for the conduits to be connected. A gas cover 15 is installed between each main nitrogen gas introduction pipe 5 and the furnace lid mounting plate 14, and both left and right sides of the upper part of the gas cover 15 are gradually inclined inward from bottom to top. The gas cover 15 is installed between the furnace lid mounting plate 14 and the furnace lid cover. 14 is fixedly connected, and a long hole is installed on the underside of the furnace lid 4 for communicating the gas cover 15 and the welding chamber 18, so that the shielding gas is uniformly injected into the welding chamber 18. can do.

A purification introduction pipe 7 and a purification exhaust pipe 8 are further installed on the upper side of the furnace lid mounting plate 14, and both of the purification introduction pipe 7 and the purification exhaust pipe 8 are communicated with the welding chamber 18 by a gas cover 15. 7 and the purification exhaust pipe 8 are installed on the same side of the negative pressure suction module 9, so that the temperature of the nitrogen gas is too low and the flux is liquefied in the welding chamber 18, which reduces the temperature of the sheet and further reduces the sheet temperature. Prolonging the welding time can be avoided. The purification exhaust pipe 8 communicates with the intake end of the purification module 59, so that the flux fumes generated by the heating of the flux in the solder paste can be removed, and the flux fumes affect the welding of the sheets. can be avoided.

As shown in FIGS. 8 to 10, secondary nitrogen gas introduction pipes 16 are installed symmetrically on both sides of the central portion of the furnace lid mounting plate 14 . The sub-nitrogen gas introduction pipe 16 is installed on the upper side of the furnace lid mounting plate 14, and the exhaust end of the sub-nitrogen gas introduction pipe 16 communicates with the welding chamber 18, thereby making the nitrogen gas more uniform in the welding chamber 18. It can be injected, ensuring that the nitrogen gas in the welding chamber 18 is completely exhausted, avoiding reacting with oxygen after the sheet is heated. An intake plate 17 is installed under the central portion of the furnace lid mounting plate 14 , the intake plate 17 is a rectangular plate, and an intake port 1701 whose opening is upward is installed on the upper side of the intake plate 17 . is a long hole installed along the longitudinal direction of the intake plate 17, two intake plates 17 are installed on each side of the furnace lid mounting plate 14, and the two intake plates 17 are installed on the furnace lid A plurality of jet holes 1702 are arranged in order along the longitudinal direction of the mounting plate 14 , and each of the intake plates 17 is provided with a plurality of jet holes 1702 spaced apart along the longitudinal direction so that the nitrogen gas is uniformly distributed in the welding chamber 18 . can be guaranteed to be injected into A mounting hole 1401 recessed inward is installed on the lower side of the furnace lid mounting plate 14 , and the mounting hole 1401 corresponds to the suction plate 17 one-to-one, and the upper part of the suction plate 17 is the mounting hole of the furnace lid mounting plate 14 . 1401, and the intake port 1701 of each intake plate 17 surrounds the installation port 1401 of the furnace lid mounting plate 14 to form an intake chamber, and the exhaust end of the auxiliary nitrogen gas introduction pipe 16 forms the intake chamber. Communicate, thereby facilitating the injection of nitrogen gas into the intake chamber.

As shown in FIG. 11, the welding table 20 includes a plurality of hot plates 30 and a plurality of cold plates 28, and the plurality of hot plates 30 are sequentially installed along the longitudinal direction of the welding chamber 18 to divide the heating area. Forming, a plurality of cold plates 28 are positioned in sequence along the length of the welding chamber 18 to form a cooling zone, and the cooling zone is positioned adjacent the discharge end. The negative pressure suction module 9 is installed above the heating plate 30 at one end adjacent to the cooling area.

Hot plate evacuation openings 3001 are symmetrically installed at both ends of each heating plate 30, and cooling plate evacuation openings 2801 are symmetrically installed at both ends of each cooling plate 28. 2801, the sheet placed horizontally on the heating plate 30 or the cooling plate 28 can be lifted, the whole sheet can be placed on the cooling plate 28 or the heating plate 30, the sheet will be heated and softened, and the sheet will be deformed. , and the negative pressure suction module 9 and the heating plate 30 are easily sealed.

An electric heating tube 31 is mounted symmetrically on either side of each heating plate 30, and a temperature sensor 32 is installed on the heating plate 30 between the two electric heating tubes 31, so that each heating plate 30 is controlled independently. , gradually increasing the temperature along the direction close to the discharge end of the heating plate 30 to gradually heat the sheet and avoid the solder paste dripping due to too fast heating. A water supply pipe 29 and a water discharge pipe are connected to each cooling plate 28, and the cooling plate 28 lowers the temperature of the sheet on the cooling plate 28 with the cooling water, and along the direction close to the discharge end, the cooling plate 28 The temperature of is gradually reduced, thereby gradually cooling the sheet, avoiding cracking of the solidified solder paste due to cooling too fast.

A supply table 21 is installed outside the supply end of the welding chamber 18 , and a supply table evacuation port 2101 linked to the support portion is installed at both ends of the supply table 21 . , the transport mechanism 2 can transport the sheet to the welding table 20 in the welding chamber 18 . A discharge table 19 is installed at the discharge end of the welding chamber 18 , and discharge table evacuation ports 1901 are provided at both ends of the discharge table 19 . , thereby realizing continuous welding of the vacuum welding furnace, and realizing discharging and feeding without opening the furnace lid 4 .

As shown in FIG. 12 , a liquid storage cover 33 is installed at the bottom of the welding chamber 18 , both sides of the liquid storage cover 33 are gradually inclined downward from the side to the center, and the liquid storage cover 33 Liquid storage cover discharge pipes 3301 are symmetrically installed at both ends of the central part of the liquid storage cover 33, and the liquid storage cover 33 can collect the water droplets formed by liquefying in the cooling area and discharge them out of the welding chamber 18, Avoid interfering with the welding of sheets in the welding chamber 18.

As shown in FIG. 13, the heating plate 30 is a rectangular plate, and the heating plate mounting holes 3004 are provided at the corners of the heating plate 30 . Electric heating pipe mounting holes 3002 are installed symmetrically on both sides of the heating plate 30, and the electric heating pipe mounting holes 3002 are horizontally installed through holes. A tube 31 is attached so that uniform heating can be ensured. A horizontal sensor mounting hole 3003 is further installed in the central part of the heating plate 30, the sensor mounting hole 3003 is a blind hole installed parallel to the electric heating tube mounting hole 3002, and the length of the sensor mounting hole 3003 is It is half the length of the heating plate 30, and the temperature sensor 32 is mounted in the sensor mounting hole 3003 so that the temperature of the heating plate 30 can be detected in real time.

As shown in FIG. 14, the cooling plate 28 is a rectangular plate whose length and width are equal to the length and width of the heating plate 30, respectively. A horizontal water supply passage 2802 is installed symmetrically on both sides of the water supply passage 2802, the water supply passage 2802 is installed along the longitudinal direction of the cooling plate 28, and a horizontal drainage passage 2803 is installed at one end of the cooling plate 28, and the drainage passage 2803 communicates the two water supply passages 2802, thereby making the temperature of the entire cooling plate 28 uniform and excellent in cooling effect. Both ends of the drain passage 2803 and the water supply passage 2802 are provided with connecting portions to facilitate connection between the water supply pipe 29 and the drain pipe.

As shown in FIGS. 15-16, the welding chamber 18 is installed above the rack 1 and the welding chamber 18 is fixedly connected to the rack 1 by a welding chamber mounting member 40 . A plurality of welding chamber mounting members 40 are symmetrically installed on both sides of the welding chamber 18, and fixed portions 4001 protruding downward are symmetrically installed at both ends of the lower side of the welding chamber mounting members 40, and penetrate through the fixed portions 4001. A hole is provided and the welding chamber mounting member 40 is fixedly connected to the rack 1 by a bolt placed in a through hole of the fixing part 4001 . Stepped holes 4002 are symmetrically installed at both ends of the welding chamber mounting member 40, the upper diameter of the stepped holes 4002 is larger than the lower diameter, each stepped hole 4002 is mounted with a mounting pin 39, The mounting pin 39 is cylindrical, and a threaded hole 3901 is coaxially installed in the lower end of the mounting pin 39, the threaded hole 3901 is a blind hole installed in the mounting pin 39, and the diameter of the mounting pin 39 is stepped. Equal to the diameter of the upper portion of the stepped hole 4002, the lower end of the mounting pin 39 extends into the upper portion of the stepped hole 4002 and is fixedly connected to the welding chamber mounting member 40 by a bolt. The hot plate mounting holes 3004 of the hot plate 30 are fitted over the mounting pins 39 to complete the mounting of the hot plate 30 , and the cooling plate mounting holes 2804 of the cooling plate 28 are fitted over the mounting pins 39 . , completes the installation of the cooling plate 28 and facilitates attachment and detachment.

As shown in FIG. 17, the negative pressure suction module 9 includes a negative pressure suction mounting frame 34, a sealing plate 36, a connecting pipe 37, and a negative pressure suction lifting cylinder 35. The negative pressure suction mounting frame 34 includes: Installed on the upper side of the furnace lid mounting plate 14, the negative pressure suction lifting cylinder 35 is mounted on the negative pressure suction mounting frame 34, the piston rod of the negative pressure suction lifting cylinder 35 is installed vertically downward, and the control module is , to control the downward movement of the negative pressure suction lifting cylinder 35, the sealing plate 36 is installed under the furnace lid mounting plate 14, the sealing plate 36 is installed horizontally, and the bottom of the sealing plate 36 is recessed inward, a sealing ring is installed on the outer edge surrounding the sealing plate 36 on the bottom surface of the sealing plate 36, the sealing plate 36 and the heating plate 30 surround and form a negative pressure chamber, and the sheets to be welded are subjected to a negative pressure A horizontal connecting plate 38 is attached to the piston rod of the negative pressure suction lifting cylinder 35, the connecting plate 38 is installed above the furnace lid mounting plate 14, and the connecting pipe 37 is connected to the connecting plate 38. The connecting pipe 37 is installed between the sealing plate 36 and is slidably and sealingly connected to the furnace lid mounting plate 14 , the lower end of the connecting pipe 37 communicates with the negative pressure chamber, and the upper end of the connecting pipe 37 A negative pressure suction pipe is connected to.

As shown in FIG. 18, the purification module 59 includes a purification box, a coil and a strainer installed in the purification box, the purification box is a cuboid housing, and one side of the purification box has a purification box inlet pipe. , and a purification box exhaust pipe is connected to the other side of the purification box, and a fan is installed between the purification box exhaust pipe and the welding chamber 18 . The coil is installed in the purification box, and the coil is further connected to the oil filling box 60 , the oil drain port of the oil filling box 60 communicates with one end of the coil through a circulation pump, and the other end of the coil is connected to the oil filling box 60 . to achieve circulation of cooling oil. Further fins connected to the coils are installed in the purifying box to allow faster heat exchange with the nitrogen gas and reduce the temperature of the nitrogen gas. A strainer mounting box is installed on the side of the purification box adjacent to the purification box exhaust pipe, the purification box exhaust pipe is communicated with the purification box by the strainer mounting box, the strainer is vertically installed in the strainer mounting box, and the cooling After passing through the strainer, the nitrogen gas is discharged through the cleaning box exhaust pipe and transported into the welding chamber 18 again, and the strainer filters the liquefied flux, thereby removing the flux fumes in the nitrogen gas. used to remove

A flux recovery barrel is further installed on the lower side of the purification box, and the lower side of the purification box is inclined such that one end close to the flux recovery barrel is lower than the other end, so that the liquid that has been cooled and liquefied is transferred to the flux recovery barrel. You can make it flow inside.

A welding method for the above vacuum welding furnace, comprising the following steps.

1) The furnace lid 4 seals the welding chamber 18, and the shield gas introduction pipe fills the welding chamber 18 with the shield gas.

The welding chamber 18 is filled with nitrogen gas through the main nitrogen gas introduction pipe 5 and the sub nitrogen gas introduction pipe 16, the entire welding chamber 18 is filled with nitrogen gas, and the air in the welding chamber 18 is completely exhausted. At the same time, the electric heating tube 31 heats the heating plate 30 and the water supply tube 29 passes cooling water through the cooling plate 28 .

2) The transport mechanism 2 transports the sheets one by one into the negative pressure chamber, and the heating area heats the sheets in stages during transport.

A sheet is placed on the supply table 21, the elevating mechanism drives the conveying bar 24 to move downward, and the opening/closing mechanism drives the two conveying bars 24 to move downward to a position close to the sheet. , aligns with the feed table retraction port 2101 on the feed table 21, the lifting mechanism drives the conveying bar 24 again to move downward, and drives the support portion to be positioned in the feed table retraction port 2101, and so on. The motorized push rod 69 is then driven to move the support and drives the support to move to the underside of the seat. The lifting mechanism drives the transport bar 24 to move upward to complete the lifting of the sheet, while the baffle plate 27 of the feeding end opens the feeding end, and the translation mechanism approaches the discharge end of the welding chamber 18. The sheet is conveyed to the heating plate 30 in the welding chamber 18 by driving the conveying bar 24 to move in the direction to move. The transport mechanism 2 sequentially transports the sheet so that the sheet is heated by each hot plate 30 before entering the hot plate 30 directly below the negative pressure suction module 9 .

The negative pressure suction lifting cylinder 35 is driven to move the sealing plate 36 downward, the sealing plate 36 and the heating plate 30 beneath it form a sealed negative pressure chamber, and at the same time the negative pressure suction pipe is connected to the negative pressure. The gas in the chamber is extracted, the negative pressure chamber is maintained in a negative pressure or a vacuum state, and the air bubbles in the solder paste are allowed to overflow to ensure the welding quality. After welding is completed, the negative pressure suction lifting cylinder 35 is driven to lift the sealing plate 36 .

3) The conveying mechanism 2 conveys the sheet welded in the negative pressure chamber to the discharge end, and the cooling area slowly cools the sheet.

The conveying mechanism 2 continues to convey the sheet toward the discharge end, sequentially cools the sheet by the respective cooling plates 28, and then moves it onto the discharge table 19 to complete the welding of the sheet.

[Example 2]

Embodiment 2 differs from Embodiment 1 in that the support portion is directly attached to the conveying bar 24, the heating plate evacuation openings 3001 are provided at both ends of the heating plate 30, and the cooling plate evacuation openings 2801 are provided at both ends of the cooling plate 28. However, the supporting portions support the sheet at both ends of the sheet.

The above description is only a preferred embodiment of the present invention, not a limitation of the present invention in any other form, and any person skilled in the art can make equivalent modifications according to the technical content disclosed above. Modifications or modifications may be made to the embodiments. However, without departing from the content of the technical solution of the present invention, any simple modifications, equivalent changes and variations made to the above embodiments within the scope equivalent to the present invention are still subject to the technical aspects of the present invention. belongs to the protection scope of the legal solution.

Claims (14)

A conveying mechanism of a vacuum welding furnace, comprising a conveying bar (24) and an opening/closing mechanism, a translation mechanism and a lifting mechanism installed under the welding chamber (18), the conveying bar (24) being used for welding Two are installed along the direction from the supply end to the discharge end of the welding table (20) in the chamber (18) , and the central part of the transfer bar (24) is installed in the welding chamber (18), and the opening and closing mechanism is connected to any of the two conveying bars (24) and drives the two conveying bars (24) to open and close so that the distance between the two conveying bars (24) changes. , the translation mechanism is connected to the opening and closing mechanism and drives the two transport bars (24) to move along the direction toward or away from the discharge end, and the lifting mechanism is connected to the translation mechanism and drives the Two carrier bars (24) are driven to move up and down, and each carrier bar (24) is provided with a plurality of supports. A conveying mechanism for a vacuum welding furnace, characterized in that evacuation ports corresponding to 1 to 1 are installed. Both ends of the welding chamber (18) are sealed by end covers (26), and transfer ports (2601) are installed on both sides of each end cover (26). 2601 ) to the opening and closing mechanism, and the bottom of the end cover (26) and the welding table (20) are connected to the welding table (20) between the bottom of the end cover (26) and the welding table (20). 2. The conveying mechanism of the vacuum welding furnace according to claim 1, characterized in that the conveying mechanism of the vacuum welding furnace is installed at intervals so that the feeding end or the discharging end is formed . A baffle plate mounting groove (2602) is installed on both sides of each end cover (26), and the plane on which the baffle plate mounting groove (2602) is located is perpendicular to the center line of the two transfer bars (24). , a baffle plate (27) is slidably mounted in the baffle plate mounting groove (2602), the baffle plate (27) is slidably and sealingly connected to the carrier bar (24), and the baffle plate ( 3. The conveying mechanism of a vacuum welding furnace according to claim 2, characterized in that 27) are associated with the end covers (26) on the corresponding side and seal the ends of the welding chamber (18). A transfer mounting arm (45) corresponding to the transfer bar (24) one-to-one is provided under the welding chamber (18). (24), said opening and closing mechanism being connected to two transfer mounting arms (45). A transfer mounting arm (45) corresponding to the transfer bar (24) one-to-one is provided under the welding chamber (18). (24), said opening and closing mechanism being connected to two transfer mounting arms (45). A transfer mounting arm (45) corresponding to the transfer bar (24) one-to-one is provided under the welding chamber (18). (24), said opening and closing mechanism being connected to two transfer mounting arms (45). The opening and closing mechanism includes a horizontally installed opening and closing guide plate (43) and an opening and closing power module. The opening and closing guide plate (43) is installed between two conveying bars (24) to 43) is provided with an opening/closing guide part gradually inclined inward along the direction of approaching the discharge end, and is attached to the opening/closing guide part on both sides of each conveying bar (24). The matching opening and closing guide wheel (44) is installed, the tensioned opening and closing spring is provided between the two conveying bars (24), the opening and closing power module is connected to the opening and closing guide plate (43), and the opening and closing guide plate is connected to the opening and closing guide plate . 2. The conveying mechanism of the vacuum welding furnace according to claim 1, characterized in that the conveying mechanism (43) is driven to move along the direction of approaching or separating from the discharge end. The elevating mechanism includes an elevating guide block (48) and a conveying elevating cylinder (46). A lift guide wheel attached to the lift guide part is attached to the lower side of the translation mechanism. 2. The conveying mechanism of the vacuum welding furnace according to claim 1, characterized in that it is driven to move the lifting guide block (48) along the separating direction. The side close to the feed end of the welding table (20) is the heating area, the side close to the discharge end of the welding table (20) is the cooling area, and the welding chamber or furnace lid (4) has a shield gas introduction pipe. The conveying mechanism of the vacuum welding furnace according to claim 1, characterized in that it is installed. The welding table (20) includes a plurality of hot plates (30) and a plurality of cold plates (28), wherein the heating zone is formed by connecting the plurality of hot plates (30) and the cooling zone is a plurality of 10. The conveying mechanism for a vacuum welding furnace according to claim 9, wherein the conveying mechanism is formed by connecting two cooling plates. Electric heating pipes (31) are installed on both sides of each heating plate (30), and a sensor mounting hole (3003) is installed in the center of the heating plate (30), and two sensor mounting holes (3003) are installed. Vacuum welding furnace according to claim 10, characterized in that it is a blind hole installed between two said electric heating pipes (31) and a temperature sensor (32) is mounted in said sensor mounting hole (3003). transport mechanism. A water supply passage (2802) is installed on each side of the cooling plate (28), and a water discharge passage (2803) communicating with the two water supply passages (2802) is installed on at least one end of the cooling plate (28). The conveying mechanism of the vacuum welding furnace according to claim 10, characterized by: A liquid storage cover (33) is installed under the welding chamber (18), and both sides of the bottom of the liquid storage cover (33) gradually slope downward from the side to the center, 2. The conveying mechanism of the vacuum welding furnace according to claim 1, characterized in that a liquid storage cover discharge pipe (3301) is provided at the bottom of (33). A telescopic module is installed between each support and the conveying bar (24) respectively , the center line of the telescopic module is parallel to the moving direction of the sheet conveyed by the conveying mechanism, and the telescopic part of the telescopic module is the sheet. A plurality of stations are installed on the welding table (20), and on both sides of each station, a plurality of evacuation openings linked with the support are respectively installed. 2. The conveying mechanism of the vacuum welding furnace according to 1.

Images