JP6956063B2 - 加工品の表面損傷検査システム - Google Patents
加工品の表面損傷検査システム Download PDFInfo
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- JP6956063B2 JP6956063B2 JP2018229708A JP2018229708A JP6956063B2 JP 6956063 B2 JP6956063 B2 JP 6956063B2 JP 2018229708 A JP2018229708 A JP 2018229708A JP 2018229708 A JP2018229708 A JP 2018229708A JP 6956063 B2 JP6956063 B2 JP 6956063B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
- G01N2021/9518—Objects of complex shape, e.g. examined with use of a surface follower device using a surface follower, e.g. robot
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
4 エアブロー装置
5 検査用テーブル(テーブル)
6 ハンドリングロボット
7 外観検査ロボット(ロボット)
8 ネジ検査ロボット
9 損傷検査装置
10 照明部
11 画像
12 撮像部
13 記憶部
14 欠陥(傷など)
15 損傷検出部
16 制御装置
17 汚れ
18 検査領域設定部
A 加工品の表面損傷検査システム
L 光
R 外観検査等領域
W 加工品
W1 被検査面(検査領域)
Claims (2)
- 検査対象である加工品の表面の被検査面の正面視で、互いに直交するX方向の前後方向とY方向の左右方向の4方向から前記被検査面に光を照射する照明部と、
前記被検査面に対向するZ方向から前記被検査面の画像を撮像する撮像部と、
前記撮像部で取得した前記被検査面の画像から前記被検査面の損傷を検出する損傷検出部と、
前記照明部及び前記損傷検出部を有する損傷検査装置を取り付けたロボットと、
前記検査対象の加工品が配置されるテーブルと、
前記ロボットの駆動を制御する制御装置とを備え、
前記制御装置は、
前記テーブル上の前記検査対象の加工品、又は前記テーブルから前記ロボットが取って保持した前記検査対象の加工品を、前記損傷検査装置で検査するように前記ロボット及び前記損傷検査装置の駆動を制御し、
前記損傷検出部は、前記X方向の前後方向、前記Y方向の左右方向のそれぞれの方向から光を照射したときの前記被検査面の画像を合成処理する、加工品の表面損傷検査システム。 - 前記加工品の表面のうち加工面を機械学習によって見分け、前記機械学習によって特定した前記加工面を検査領域として設定する検査領域設定部を備える、請求項1に記載の加工品の表面損傷検査システム。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018229708A JP6956063B2 (ja) | 2018-12-07 | 2018-12-07 | 加工品の表面損傷検査システム |
US16/702,464 US10712288B2 (en) | 2018-12-07 | 2019-12-03 | Surface damage inspection system for workpiece |
DE102019218772.2A DE102019218772A1 (de) | 2018-12-07 | 2019-12-03 | Oberflächenbeschädigungs-Inspektionssystem für Werkstück |
CN201911235085.0A CN111289521A (zh) | 2018-12-07 | 2019-12-05 | 加工品的表面损伤检查系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018229708A JP6956063B2 (ja) | 2018-12-07 | 2018-12-07 | 加工品の表面損傷検査システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020091238A JP2020091238A (ja) | 2020-06-11 |
JP6956063B2 true JP6956063B2 (ja) | 2021-10-27 |
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Application Number | Title | Priority Date | Filing Date |
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JP2018229708A Active JP6956063B2 (ja) | 2018-12-07 | 2018-12-07 | 加工品の表面損傷検査システム |
Country Status (4)
Country | Link |
---|---|
US (1) | US10712288B2 (ja) |
JP (1) | JP6956063B2 (ja) |
CN (1) | CN111289521A (ja) |
DE (1) | DE102019218772A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6333871B2 (ja) * | 2016-02-25 | 2018-05-30 | ファナック株式会社 | 入力画像から検出した対象物を表示する画像処理装置 |
JP7111633B2 (ja) * | 2019-01-18 | 2022-08-02 | ファナック株式会社 | 加工品の自動三次元測定検査システム |
US11686690B2 (en) * | 2020-11-12 | 2023-06-27 | Kla Corporation | System and method for inspection and metrology of four sides of semiconductor devices |
CN113029959A (zh) * | 2021-04-12 | 2021-06-25 | 浙江机电职业技术学院 | 一种面向智能工厂的液晶屏缺陷在线检测系统 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04106461A (ja) * | 1990-08-28 | 1992-04-08 | Mazda Motor Corp | 表面欠陥検査装置 |
JP2000249658A (ja) * | 1999-03-02 | 2000-09-14 | Olympus Optical Co Ltd | 検査装置 |
US6905573B2 (en) * | 2000-09-06 | 2005-06-14 | Metso Paper, Inc. | Method and equipment for cleaning and maintaining rolls |
KR100492158B1 (ko) * | 2002-11-19 | 2005-06-02 | 삼성전자주식회사 | 웨이퍼 검사 장치 |
JP5469839B2 (ja) * | 2008-09-30 | 2014-04-16 | 株式会社日立ハイテクノロジーズ | 物体表面の欠陥検査装置および方法 |
US8953870B2 (en) * | 2009-11-18 | 2015-02-10 | Honda Motor Co., Ltd. | Surface inspection device and surface inspection method |
JP2011149814A (ja) * | 2010-01-21 | 2011-08-04 | Central Motor Co Ltd | 塗装検査装置及び塗装検査方法 |
JP5638327B2 (ja) | 2010-09-21 | 2014-12-10 | Ntn株式会社 | 外観検査装置 |
JP5895305B2 (ja) * | 2011-12-06 | 2016-03-30 | シーシーエス株式会社 | 検査用照明装置及び検査用照明方法 |
JP6370177B2 (ja) * | 2014-09-05 | 2018-08-08 | 株式会社Screenホールディングス | 検査装置および検査方法 |
JP2017062154A (ja) * | 2015-09-24 | 2017-03-30 | アイシン精機株式会社 | 欠陥検出装置及び欠陥検出方法 |
JP2017067633A (ja) * | 2015-09-30 | 2017-04-06 | キヤノン株式会社 | 検査装置および物品製造方法 |
JP2017198612A (ja) * | 2016-04-28 | 2017-11-02 | キヤノン株式会社 | 検査装置、検査システム、および物品製造方法 |
JP6834174B2 (ja) * | 2016-05-13 | 2021-02-24 | 株式会社ジェイテクト | 外観検査方法および外観検査装置 |
ES2772928T3 (es) * | 2016-11-26 | 2020-07-08 | Agie Charmilles Sa | Método para mecanizado e inspección de piezas de trabajo |
JP6847709B2 (ja) * | 2017-02-24 | 2021-03-24 | 京セラ株式会社 | カメラ装置、検出装置、検出システムおよび移動体 |
CN108760765B (zh) * | 2018-05-24 | 2021-12-07 | 武汉精测电子集团股份有限公司 | 一种基于侧视相机拍摄的表面损伤缺陷检测装置及方法 |
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2018
- 2018-12-07 JP JP2018229708A patent/JP6956063B2/ja active Active
-
2019
- 2019-12-03 DE DE102019218772.2A patent/DE102019218772A1/de active Pending
- 2019-12-03 US US16/702,464 patent/US10712288B2/en active Active
- 2019-12-05 CN CN201911235085.0A patent/CN111289521A/zh active Pending
Also Published As
Publication number | Publication date |
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US10712288B2 (en) | 2020-07-14 |
DE102019218772A1 (de) | 2020-06-10 |
CN111289521A (zh) | 2020-06-16 |
JP2020091238A (ja) | 2020-06-11 |
US20200182802A1 (en) | 2020-06-11 |
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