JP6948111B2 - Resin compositions, conductive copper pastes, and semiconductor devices - Google Patents
Resin compositions, conductive copper pastes, and semiconductor devices Download PDFInfo
- Publication number
- JP6948111B2 JP6948111B2 JP2016022379A JP2016022379A JP6948111B2 JP 6948111 B2 JP6948111 B2 JP 6948111B2 JP 2016022379 A JP2016022379 A JP 2016022379A JP 2016022379 A JP2016022379 A JP 2016022379A JP 6948111 B2 JP6948111 B2 JP 6948111B2
- Authority
- JP
- Japan
- Prior art keywords
- component
- mass
- resin composition
- parts
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000011342 resin composition Substances 0.000 title claims description 72
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 44
- 229910052802 copper Inorganic materials 0.000 title claims description 30
- 239000010949 copper Substances 0.000 title claims description 30
- 239000004065 semiconductor Substances 0.000 title claims description 20
- 238000000354 decomposition reaction Methods 0.000 claims description 22
- 239000002270 dispersing agent Substances 0.000 claims description 11
- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 claims description 11
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 claims description 11
- 239000005011 phenolic resin Substances 0.000 claims description 10
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 claims description 9
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 claims description 8
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 8
- 235000021313 oleic acid Nutrition 0.000 claims description 8
- 239000011347 resin Substances 0.000 claims description 8
- 229920005989 resin Polymers 0.000 claims description 8
- 229920001187 thermosetting polymer Polymers 0.000 claims description 8
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 claims description 7
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 claims description 7
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 claims description 7
- 239000005642 Oleic acid Substances 0.000 claims description 7
- -1 amine compound Chemical class 0.000 claims description 7
- 235000014113 dietary fatty acids Nutrition 0.000 claims description 7
- 229930195729 fatty acid Natural products 0.000 claims description 7
- 239000000194 fatty acid Substances 0.000 claims description 7
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 claims description 7
- 150000004665 fatty acids Chemical class 0.000 claims description 6
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 claims description 6
- 235000021314 Palmitic acid Nutrition 0.000 claims description 5
- 235000021355 Stearic acid Nutrition 0.000 claims description 5
- 150000001412 amines Chemical class 0.000 claims description 5
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 claims description 5
- 229920003987 resole Polymers 0.000 claims description 5
- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 claims description 4
- 239000008117 stearic acid Substances 0.000 claims description 4
- 239000005639 Lauric acid Substances 0.000 claims description 3
- DTOSIQBPPRVQHS-PDBXOOCHSA-N alpha-linolenic acid Chemical compound CC\C=C/C\C=C/C\C=C/CCCCCCCC(O)=O DTOSIQBPPRVQHS-PDBXOOCHSA-N 0.000 claims description 3
- 235000020661 alpha-linolenic acid Nutrition 0.000 claims description 3
- 229960004488 linolenic acid Drugs 0.000 claims description 3
- KQQKGWQCNNTQJW-UHFFFAOYSA-N linolenic acid Natural products CC=CCCC=CCC=CCCCCCCCC(O)=O KQQKGWQCNNTQJW-UHFFFAOYSA-N 0.000 claims description 3
- OYHQOLUKZRVURQ-NTGFUMLPSA-N (9Z,12Z)-9,10,12,13-tetratritiooctadeca-9,12-dienoic acid Chemical compound C(CCCCCCC\C(=C(/C\C(=C(/CCCCC)\[3H])\[3H])\[3H])\[3H])(=O)O OYHQOLUKZRVURQ-NTGFUMLPSA-N 0.000 claims description 2
- 238000009736 wetting Methods 0.000 claims description 2
- 230000008859 change Effects 0.000 description 12
- 239000000758 substrate Substances 0.000 description 11
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 9
- 239000003085 diluting agent Substances 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 239000012298 atmosphere Substances 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- ZFDPAZDODACYOG-UHFFFAOYSA-M sodium;[(1,5-dimethyl-3-oxo-2-phenylpyrazol-4-yl)amino]methanesulfonate Chemical compound [Na+].CN1C(C)=C(NCS([O-])(=O)=O)C(=O)N1C1=CC=CC=C1 ZFDPAZDODACYOG-UHFFFAOYSA-M 0.000 description 4
- 229960004418 trolamine Drugs 0.000 description 4
- CDAWCLOXVUBKRW-UHFFFAOYSA-N 2-aminophenol Chemical compound NC1=CC=CC=C1O CDAWCLOXVUBKRW-UHFFFAOYSA-N 0.000 description 3
- OYHQOLUKZRVURQ-HZJYTTRNSA-N Linoleic acid Chemical compound CCCCC\C=C/C\C=C/CCCCCCCC(O)=O OYHQOLUKZRVURQ-HZJYTTRNSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 150000001450 anions Chemical class 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000011231 conductive filler Substances 0.000 description 3
- 150000001991 dicarboxylic acids Chemical class 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 238000004445 quantitative analysis Methods 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- GVNVAWHJIKLAGL-UHFFFAOYSA-N 2-(cyclohexen-1-yl)cyclohexan-1-one Chemical compound O=C1CCCCC1C1=CCCCC1 GVNVAWHJIKLAGL-UHFFFAOYSA-N 0.000 description 2
- QCDWFXQBSFUVSP-UHFFFAOYSA-N 2-phenoxyethanol Chemical compound OCCOC1=CC=CC=C1 QCDWFXQBSFUVSP-UHFFFAOYSA-N 0.000 description 2
- UNWFFCPRJXMCNV-UHFFFAOYSA-N 3-[dodecanoyl(methyl)amino]propanoic acid Chemical compound CCCCCCCCCCCC(=O)N(C)CCC(O)=O UNWFFCPRJXMCNV-UHFFFAOYSA-N 0.000 description 2
- 101150065749 Churc1 gene Proteins 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- 102100038239 Protein Churchill Human genes 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 125000000129 anionic group Chemical group 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 2
- 238000004455 differential thermal analysis Methods 0.000 description 2
- XXWXVINLCWROJQ-UHFFFAOYSA-N ethanol octadecanoic acid Chemical compound CCO.CCO.CCCCCCCCCCCCCCCCCC(O)=O XXWXVINLCWROJQ-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 235000020778 linoleic acid Nutrition 0.000 description 2
- OYHQOLUKZRVURQ-IXWMQOLASA-N linoleic acid Natural products CCCCC\C=C/C\C=C\CCCCCCCC(O)=O OYHQOLUKZRVURQ-IXWMQOLASA-N 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- UODXCYZDMHPIJE-UHFFFAOYSA-N menthanol Chemical compound CC1CCC(C(C)(C)O)CC1 UODXCYZDMHPIJE-UHFFFAOYSA-N 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229940049964 oleate Drugs 0.000 description 2
- 229960005323 phenoxyethanol Drugs 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000002411 thermogravimetry Methods 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- ZOMATQMEHRJKLO-UHFFFAOYSA-N 1h-imidazol-2-ylmethanol Chemical compound OCC1=NC=CN1 ZOMATQMEHRJKLO-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- JIJUXAOARIMNAO-UHFFFAOYSA-N 2-aminophenol Chemical compound NC1=CC=CC=C1O.NC1=CC=CC=C1O JIJUXAOARIMNAO-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- BACYUWVYYTXETD-UHFFFAOYSA-N N-Lauroylsarcosine Chemical compound CCCCCCCCCCCC(=O)N(C)CC(O)=O BACYUWVYYTXETD-UHFFFAOYSA-N 0.000 description 1
- DIOYAVUHUXAUPX-KHPPLWFESA-N Oleoyl sarcosine Chemical compound CCCCCCCC\C=C/CCCCCCCC(=O)N(C)CC(O)=O DIOYAVUHUXAUPX-KHPPLWFESA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 150000007933 aliphatic carboxylic acids Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 229920003180 amino resin Polymers 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- BUOSLGZEBFSUDD-BGPZCGNYSA-N bis[(1s,3s,4r,5r)-4-methoxycarbonyl-8-methyl-8-azabicyclo[3.2.1]octan-3-yl] 2,4-diphenylcyclobutane-1,3-dicarboxylate Chemical compound O([C@H]1C[C@@H]2CC[C@@H](N2C)[C@H]1C(=O)OC)C(=O)C1C(C=2C=CC=CC=2)C(C(=O)O[C@@H]2[C@@H]([C@H]3CC[C@H](N3C)C2)C(=O)OC)C1C1=CC=CC=C1 BUOSLGZEBFSUDD-BGPZCGNYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000002738 chelating agent Substances 0.000 description 1
- SECPZKHBENQXJG-UHFFFAOYSA-N cis-palmitoleic acid Natural products CCCCCCC=CCCCCCCCC(O)=O SECPZKHBENQXJG-UHFFFAOYSA-N 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- 229940117583 cocamine Drugs 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 239000013530 defoamer Substances 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000005040 ion trap Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 1
- 150000002763 monocarboxylic acids Chemical class 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 108700004121 sarkosyl Proteins 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- DTOSIQBPPRVQHS-UHFFFAOYSA-N α-Linolenic acid Chemical compound CCC=CCC=CCC=CCCCCCCCC(O)=O DTOSIQBPPRVQHS-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Non-Insulated Conductors (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Conductive Materials (AREA)
Description
本発明は、樹脂組成物、導電性銅ペースト、および半導体装置に関し、特に、大気中での焼成で比抵抗の低い樹脂組成物、導電性銅ペースト、および半導体装置に関する。 The present invention relates to resin compositions, conductive copper pastes, and semiconductor devices, and more particularly to resin compositions, conductive copper pastes, and semiconductor devices having low resistivity when fired in the atmosphere.
半導体素子の電極部と基板の導電部とが接着された半導体装置は、非常に広範に使用されており、半導体素子の電極部と基板の導電部との接着には、導電性接着剤やはんだ付けが使用されている。導電性接着剤は、はんだ付けより低温で接着させることができる、という利点があるが、はんだより比抵抗が高いため、導電性接着剤の低抵抗化が検討されている。 Semiconductor devices in which the electrode portion of a semiconductor element and the conductive portion of a substrate are bonded to each other are very widely used. For bonding the electrode portion of a semiconductor element and the conductive portion of a substrate, a conductive adhesive or solder is used. Electrodes are used. The conductive adhesive has an advantage that it can be bonded at a lower temperature than soldering, but since it has a higher specific resistance than solder, lowering the resistance of the conductive adhesive has been studied.
従来の導電性接着剤は、導電性フィラーとして、銀を使用している。しかしながら、銀のマイグレーション性や価格高騰のため、銅を導電性フィラーとして使用することが検討されている。また、この銅を使用する導電性接着剤には、酸化しやすい銅を大気雰囲気中で硬化させることも求められている。 Conventional conductive adhesives use silver as the conductive filler. However, due to the migration property of silver and the soaring price, the use of copper as a conductive filler is being considered. Further, the conductive adhesive using this copper is also required to cure easily oxidizable copper in the air atmosphere.
銅を導電性フィラーとして使用するペーストとして、所定の粒度分布とタップ密度の銅粉、熱硬化性樹脂、有機カルボン酸、及びキレート剤、更にポリブタジエンを必須成分とする導電性銅ペーストが開示されている(特許文献1の請求項1、第0013、0022段落)。 As a paste using copper as a conductive filler, a conductive copper paste containing copper powder having a predetermined particle size distribution and tap density, a thermosetting resin, an organic carboxylic acid, and a chelating agent, and polybutadiene as an essential component is disclosed. (Patent Document 1, claims 1, 0013, 0022).
この導電性銅ペーストは、スクリーン印刷が可能で、導電性銀ペーストに匹敵する良好な導電性を有し、かつ耐マイグレーション性を併せ持つファインピッチ対応のスルーホール用として好適な導電性銅ペーストを目的としており(特許文献1の第0008段落)、有機カルボン酸として、具体例としては、サリチル酸、安息香酸、酒石酸、クエン酸、マレイン酸、コハク酸、フマル酸、マロン酸等が挙げられている(特許文献1の第0018段落)。なお、これらの有機カルボン酸は、いずれも常温で固体である。 This conductive copper paste is capable of screen printing, has good conductivity comparable to that of conductive silver paste, and has migration resistance, and is suitable for fine pitch compatible through holes. Specific examples of the organic carboxylic acid include salicylic acid, benzoic acid, tartaric acid, citric acid, maleic acid, succinic acid, fumaric acid, and malonic acid (paragraph 0008 of Patent Document 1). 0018 paragraph 0018 of Patent Document 1). All of these organic carboxylic acids are solid at room temperature.
また、銅を含む金属粉と、少なくとも2個の(メタ)アクリル基を含有する化合物と、β−ジカルボニル化合物を含み、実質的にアゾ化合物および過酸化物を含まないことを特徴とする回路基板用導電性ペーストが開示されている(特許文献2の請求項1)。この回路基板用導電性ペーストでは、フラックス活性を有する化合物を含んでよいことが記載されており(特許文献2の第0014段落)、フラックス活性を有する化合物として、オレイン酸等の脂肪族カルボン酸が挙げられている(特許文献2の第0038、0046段落)。 A circuit characterized by containing a metal powder containing copper, a compound containing at least two (meth) acrylic groups, and a β-dicarbonyl compound, substantially free of azo compounds and peroxides. A conductive paste for a substrate is disclosed (Patent Document 2, claim 1). It is described that the conductive paste for a circuit board may contain a compound having flux activity (paragraph 0014 of Patent Document 2), and an aliphatic carboxylic acid such as oleic acid is used as the compound having flux activity. It is mentioned (Patent Document 2, paragraphs 0038 and 0046).
他にも、一分子中に少なくとも2個以上の水酸基を持ち、かつ1個以上の3級アミンを含むプレポリマー、銅粉、アミノ樹脂、及び還元剤を含有し、酸性エッチング液によりエッチング可能な導電性銅ペースト組成物が開示されており(特許文献3の請求項1)、還元剤として、オレイン酸、リノール酸等の炭素数12〜23の不飽和モノカルボン酸が挙げられている(特許文献3の第0016段落)。 In addition, it contains a prepolymer having at least two or more hydroxyl groups in one molecule and containing one or more tertiary amines, copper powder, an amino resin, and a reducing agent, and can be etched with an acidic etching solution. A conductive copper paste composition is disclosed (Patent Document 3 claim 1), and unsaturated monocarboxylic acids having 12 to 23 carbon atoms such as oleic acid and linoleic acid are mentioned as reducing agents (Patent). 0016 paragraph 0016 of Document 3).
しかしながら、これらの導電性銅ペーストには、硬化後に高温高湿下で保持(例えば、温度:85℃、湿度85%で、500時間)すると比抵抗が高くなってしまう、という問題があることがわかった。 However, these conductive copper pastes have a problem that their specific resistance becomes high when they are held under high temperature and high humidity after curing (for example, temperature: 85 ° C., humidity 85%, 500 hours). all right.
本発明者らは、鋭意研究の結果、銅粉と、熱硬化性樹脂と、脂肪酸と、アミンまたはアミン化合物と、特定の湿潤分散剤とを併用することにより、大気中での硬化後に比抵抗が低く、高温高湿下での保持後でも比抵抗の変化が少ない樹脂組成物、およびこの樹脂組成物を用いる導電性銅ペーストを見出した。すわなち、本発明は、大気中での硬化後に比抵抗が低く、高温高湿保持後でも比抵抗の変化が少ない樹脂組成物、およびこの樹脂組成物を用いる導電性銅ペーストを提供することを目的とする。 As a result of diligent research, the present inventors have obtained a specific resistance after curing in the air by using a copper powder, a thermosetting resin, a fatty acid, an amine or an amine compound, and a specific wet dispersant in combination. We have found a resin composition having a low resistivity and a small change in resistivity even after holding under high temperature and high humidity, and a conductive copper paste using this resin composition. That is, the present invention provides a resin composition having a low specific resistance after curing in the air and a small change in specific resistance even after holding at high temperature and high humidity, and a conductive copper paste using this resin composition. With the goal.
本発明は、以下の構成を有することによって上記問題を解決した樹脂組成物、導電性銅ペースト、導電性銅ペーストの硬化物および半導体装置に関する。
〔1〕(A)銅粉、(B)熱硬化性樹脂、(C)脂肪酸、(D)アミンまたはアミン化合物、および(E)分解温度が250℃以下である湿潤分散剤を含有することを特徴とする、樹脂組成物。
〔2〕(E)成分が、分子量490以下のジカルボン酸塩である、上記〔1〕記載の樹脂組成物。
〔3〕(E)成分が、一般式(1):
The present invention relates to a resin composition, a conductive copper paste, a cured product of the conductive copper paste, and a semiconductor device that solve the above problems by having the following configurations.
[1] Containing (A) copper powder, (B) thermosetting resin, (C) fatty acid, (D) amine or amine compound, and (E) wet dispersant having a decomposition temperature of 250 ° C. or lower. A characteristic resin composition.
[2] The resin composition according to the above [1], wherein the component (E) is a dicarboxylic acid salt having a molecular weight of 490 or less.
[3] The component (E) is the general formula (1):
(式中、R1およびR2は、それぞれ独立して、H、NaまたはCuである)
で表される、上記〔1〕または〔2〕記載の樹脂組成物。
〔4〕(B)成分が、レゾール型フェノール樹脂である、上記〔1〕〜〔3〕のいずれか記載の樹脂組成物。
〔5〕(C)成分が、オレイン酸、リノール酸、リノレン酸、ステアリン酸、パルミチン酸およびラウリン酸からなる群より選ばれる少なくとも1種である、上記〔1〕〜〔4〕のいずれか記載の樹脂組成物。
〔6〕(D)成分が、トリエタノールアミンである、上記〔1〕〜〔5〕のいずれか記載の樹脂組成物。
〔7〕上記〔1〕〜〔6〕のいずれか記載の樹脂組成物を用いる、導電性銅ペースト。
〔8〕上記〔7〕記載の導電性銅ペーストの硬化物。
〔9〕上記〔1〕〜〔6〕のいずれか記載の樹脂組成物の硬化物を含む、半導体装置。
(In the formula, R 1 and R 2 are H, Na or Cu, respectively).
The resin composition according to the above [1] or [2], which is represented by.
[4] The resin composition according to any one of the above [1] to [3], wherein the component (B) is a resol type phenol resin.
[5] The above-mentioned [1] to [4], wherein the component (C) is at least one selected from the group consisting of oleic acid, linoleic acid, linolenic acid, stearic acid, palmitic acid and lauric acid. Resin composition.
[6] The resin composition according to any one of the above [1] to [5], wherein the component (D) is triethanolamine.
[7] A conductive copper paste using the resin composition according to any one of the above [1] to [6].
[8] A cured product of the conductive copper paste according to the above [7].
[9] A semiconductor device comprising a cured product of the resin composition according to any one of the above [1] to [6].
本発明〔1〕によれば、大気中での硬化後に比抵抗が低く、高温高湿保持後でも比抵抗の変化が少ない樹脂組成物、およびこの樹脂組成物を用いる導電性銅ペーストを提供することができる。 According to the present invention [1], a resin composition having a low specific resistance after curing in the air and a small change in specific resistance even after holding at high temperature and high humidity, and a conductive copper paste using this resin composition are provided. be able to.
本発明〔7〕によれば、大気中での硬化後に比抵抗が低く、高温高湿保持後でも比抵抗の変化が少ない樹脂組成物を用いる導電性銅ペーストを提供することができる。本発明〔8〕によれば、高信頼性の半導体装置を得るための低抵抗の導電性銅ペーストの硬化物を提供することができる。本発明〔9〕によれば、例えば、半導体素子の電極部と基板の導電部との間の接続抵抗値が小さい高信頼性の半導体装置を得ることができる。 According to the present invention [7], it is possible to provide a conductive copper paste using a resin composition having a low specific resistance after curing in the atmosphere and a small change in specific resistance even after holding at high temperature and high humidity. According to the present invention [8], it is possible to provide a cured product of a low resistance conductive copper paste for obtaining a highly reliable semiconductor device. According to the present invention [9], for example, a highly reliable semiconductor device having a small connection resistance value between the electrode portion of the semiconductor element and the conductive portion of the substrate can be obtained.
〔樹脂組成物〕
本発明の樹脂組成物(以下、樹脂組成物という)は、(A)銅粉、(B)熱硬化性樹脂、(C)脂肪酸、(D)アミンまたはアミン化合物、および(E)分解温度が250℃以下である湿潤分散剤を含有することを特徴とする。
[Resin composition]
The resin composition of the present invention (hereinafter referred to as a resin composition) has (A) copper powder, (B) thermosetting resin, (C) fatty acid, (D) amine or amine compound, and (E) decomposition temperature. It is characterized by containing a wet dispersant having a temperature of 250 ° C. or lower.
(A)成分である銅粉は、硬化後の樹脂組成物に導電性を付与する。本樹脂組成物は、(A)成分の含有量により硬化後の比抵抗が大きく変化しない観点から優位である。また、(A)成分の平均粒子径は、酸素含有量および硬化後の樹脂組成物の比抵抗の観点から、1〜10μmの範囲であると、好ましい。(A)成分としては、棒状、フレーク状、球状の銅粉が挙げられ、(A)成分は、粒子形状の樹枝状銅粉(電解銅粉)を解砕してえられた棒状の銅粉が、より好ましい。また、(A)成分は、タップ密度が高いと、硬化後の樹脂組成物の比抵抗の観点から好ましい。(A)成分の市販品としては、三井金属鉱業(株)製電解銅粉(ECY−4B、比表面積:0.223m2/g、タップ密度:4.65g/cm3、平均粒径:6.7μm)が挙げられる。ここで、比表面積は、BET法で、タップ密度は、振盪比重測定機(タップマシン)で、平均粒径は、レーザー回折・散乱式粒子分布測定装置で、測定する。(A)成分は、単独でも2種以上を併用してもよい。 The copper powder as the component (A) imparts conductivity to the cured resin composition. This resin composition is superior from the viewpoint that the specific resistance after curing does not change significantly depending on the content of the component (A). The average particle size of the component (A) is preferably in the range of 1 to 10 μm from the viewpoint of the oxygen content and the specific resistance of the resin composition after curing. Examples of the component (A) include rod-shaped, flake-shaped, and spherical copper powder, and the component (A) is a rod-shaped copper powder obtained by crushing particle-shaped dendritic copper powder (electrolytic copper powder). However, it is more preferable. Further, when the tap density of the component (A) is high, it is preferable from the viewpoint of the specific resistance of the resin composition after curing. Commercially available products of the component (A) include electrolytic copper powder (ECY-4B, specific surface area: 0.223 m 2 / g, tap density: 4.65 g / cm 3 , average particle size: 6) manufactured by Mitsui Metal Mining Co., Ltd. .7 μm). Here, the specific surface area is measured by the BET method, the tap density is measured by a shaking specific gravity measuring machine (tap machine), and the average particle size is measured by a laser diffraction / scattering type particle distribution measuring device. The component (A) may be used alone or in combination of two or more.
(B)成分である熱硬化性樹脂は、導電性銅ペーストに接着性、硬化性を付与する。(B)成分としては、熱硬化収縮性、密着性の観点から、フェノール樹脂が好ましく、レゾール型フェノール樹脂が、より好ましい。(B)成分の市販品としては、昭和高分子(株)製レゾール型フェノール樹脂(品名:ショウノールCKM−918A)、昭和高分子(株)製レゾール型フェノール樹脂(品名:ショウノールCKM−908)、群栄化学(株)製レゾール型フェノール樹脂(品名:レジトップ PL−6317)、DIC(株)製レゾール型フェノール樹脂(品名:フェノライトJ−325)が挙げられる。(B)成分は、単独でも2種以上を併用してもよい。なお、レゾール型フェノール樹脂のような固形の樹脂は、ペーストを作製するにあたり、後述する(E)成分である希釈剤と加熱混合して液状にしたうえで用いてもよい。 The thermosetting resin as the component (B) imparts adhesiveness and curability to the conductive copper paste. As the component (B), a phenol resin is preferable, and a resol type phenol resin is more preferable, from the viewpoint of thermosetting shrinkage and adhesion. Commercially available products of the component (B) include a resol-type phenol resin manufactured by Showa Polymer Co., Ltd. (product name: Shonor CKM-918A) and a resol-type phenol resin manufactured by Showa Polymer Co., Ltd. (product name: Shonor CKM-908). ), Resol-type phenol resin manufactured by Gunei Chemical Co., Ltd. (product name: Registop PL-6317), and resol-type phenol resin manufactured by DIC Co., Ltd. (product name: Phenolite J-325). The component (B) may be used alone or in combination of two or more. In addition, a solid resin such as a resol type phenol resin may be used after being heated and mixed with a diluent which is a component (E) described later to make a liquid when preparing a paste.
(C)成分である脂肪酸は、銅粉表面の酸化層を溶出させるフラックス成分として機能する。(C)成分は、鎖状であると、好ましい。(C)成分としては、
オレイン酸(CH3(CH2)7CH=CH(CH2)7COOH、シス−9−オクタデセン酸、液体)、
リノール酸(CH3−(CH2)4−CH=CHCH2CH=CH(CH2)7COOH、シス−9,シス−12−オクタデカジエン酸、液体)、
リノレン酸(CH3CH2CH=CHCH2CH=CHCH2CH=CH(CH2)7COOH、シス−9,シス−12,シス−15−オクタデカトリエン酸、液体)、
ステアリン酸(CH3(CH2)16COOH、オクタデカン酸、白色固体)、
パルミチン酸(CH3(CH2)14COOH、ヘキサデカン酸、白色固体)、および
ラウリン酸(CH3(CH2)10COOH、ドデカン酸、白色固体)
からなる群より選ばれる少なくとも1種であると、銅粉との濡れ性が優れる観点からより好ましく、オレイン酸が、さらに好ましい。(C)成分は、単独でも2種以上を併用してもよい。
The fatty acid as the component (C) functions as a flux component that elutes the oxide layer on the surface of the copper powder. The component (C) is preferably in the form of a chain. As the component (C),
Oleic acid (CH 3 (CH 2 ) 7 CH = CH (CH 2 ) 7 COOH, cis-9-octadecenoic acid, liquid),
Linoleic acid (CH 3- (CH 2 ) 4 -CH = CHCH 2 CH = CH (CH 2 ) 7 COOH, cis-9, cis-12-octadecazienoic acid, liquid),
Linolenic acid (CH 3 CH 2 CH = CHCH 2 CH = CHCH 2 CH = CH (CH 2) 7 COOH, cis-9, cis-12, cis-15-octadecatrienoic acid, liquid),
Stearic acid (CH 3 (CH 2 ) 16 COOH, octadecanoic acid, white solid),
Palmitic acid (CH 3 (CH 2 ) 14 COOH, hexadecanoic acid, white solid), and lauric acid (CH 3 (CH 2 ) 10 COOH, dodecanoic acid, white solid)
At least one selected from the group consisting of is more preferable from the viewpoint of excellent wettability with copper powder, and oleic acid is further preferable. The component (C) may be used alone or in combination of two or more.
(D)成分であるアミンまたはアミン化合物は、(C)成分のフラックス効果で溶出した銅イオンを固定化し、かつ室温下(25℃)での脂肪酸のカルボキシル基の作用を抑制する。(D)成分は、トリエタノールアミン(TEA、N(CH2CH2OH)3)、2,2’−イミノジエタノール(ジエタノールアミン)、またはo−アミノフェノール(2−アミノフェノール)を含有すると、好ましく、ポットライフの観点から、トリエタノールアミンがより好ましい。(D)成分は、単独でも2種以上を併用してもよい。 The amine or amine compound as the component (D) immobilizes the copper ions eluted by the flux effect of the component (C) and suppresses the action of the carboxyl group of the fatty acid at room temperature (25 ° C.). The component (D) preferably contains triethanolamine (TEA, N (CH 2 CH 2 OH) 3 ), 2,2'-iminodiethanol (diethanolamine), or o-aminophenol (2-aminophenol). , Triethanolamine is more preferable from the viewpoint of pot life. The component (D) may be used alone or in combination of two or more.
(E)成分である湿潤分散剤は、分解温度が250℃以下である湿潤分散剤であり、銅粉と他成分との界面活性剤として働く湿潤部と、銅粉の沈降や凝集を防ぐ分散部とを有する。ここで、(E)成分の分解温度は、熱重量・示差熱同時測定(TG−DTA)装置を用い、試料質量:3g、大気雰囲気、昇温速度:10℃/分の条件で測定したときの熱重量曲線の変曲点から測定する。図1に、(E)成分の熱重量・示差熱同時測定の結果の一例を示す。図1からわかるように、この測定で使用した(E)成分の分解温度は、243℃である。243℃が分解温度であることは、DTA曲線が発熱を示していることから確認できる。なお、このとき使用した(E)成分は、(株)CRODA製ジカルボン酸弱アニオン系分散剤(品名:HypermerKD−57である。(E)成分は、硬化後の樹脂組成物の比抵抗を低下させ、耐湿性も向上させる。具体的には、(E)成分は、(A)成分である銅粉に他成分を湿潤させることにより、(A)成分への酸素を遮断し、(A)成分を防錆し、加えて、(A)成分の導電パスを強固にする、と考えられる。(E)成分は、分岐状であると好ましく、(E)成分が、分子量490以下のジカルボン酸塩であると、より好ましく、一般式(1): The wet dispersant as the component (E) is a wet dispersant having a decomposition temperature of 250 ° C. or lower, and is a wet portion that acts as a surfactant between the copper powder and other components, and a dispersion that prevents the copper powder from settling or agglomerating. Has a part. Here, the decomposition temperature of the component (E) is measured under the conditions of sample mass: 3 g, atmospheric atmosphere, and heating rate: 10 ° C./min using a thermogravimetric / differential thermal simultaneous measurement (TG-DTA) device. It is measured from the inflection point of the thermogravimetric curve of. FIG. 1 shows an example of the results of simultaneous measurement of thermogravimetric analysis and differential thermal analysis of component (E). As can be seen from FIG. 1, the decomposition temperature of the component (E) used in this measurement is 243 ° C. It can be confirmed that 243 ° C. is the decomposition temperature from the fact that the DTA curve shows heat generation. The component (E) used at this time is a dicarboxylic acid weak anion-based dispersant (product name: HypermerKD-57) manufactured by CRODA Co., Ltd. The component (E) reduces the specific resistance of the cured resin composition. Specifically, the component (E) blocks oxygen to the component (A) by wetting the copper powder which is the component (A) with other components, and (A). It is considered that the component is rust-proofed and, in addition, the conductive path of the component (A) is strengthened. The component (E) is preferably branched, and the component (E) is a dicarboxylic acid having a molecular weight of 490 or less. A salt is more preferable, and the general formula (1):
(式中、R1およびR2は、それぞれ独立して、H、NaまたはCuである)
で表されるジカルボン酸塩であると、さらに好ましく、R1およびR2が、Hであると、硬化後の樹脂組成物の絶縁耐圧の観点から、特に好ましい。ここで、一般式(1)で表されるジカルボン酸塩の左側のアルキル基は、疎水性で、分散部となり、右側の2つのカルボキシル基は、親水性で、分散部となる、と考えられる。一般式(1)で、R1およびR2がHである市販品としては、(株)CRODA製ジカルボン酸弱アニオン系分散剤(品名:HypermerKD−57、分解温度:243℃)が、挙げられる。
(In the formula, R 1 and R 2 are H, Na or Cu, respectively).
The dicarboxylic acid salt represented by is more preferable, and R 1 and R 2 are particularly preferable from the viewpoint of the dielectric strength of the cured resin composition. Here, it is considered that the alkyl group on the left side of the dicarboxylic acid salt represented by the general formula (1) is hydrophobic and serves as a dispersion part, and the two carboxyl groups on the right side are hydrophilic and serve as a dispersion part. .. Examples of commercially available products in which R 1 and R 2 are H in the general formula (1) include a dicarboxylic acid weak anion-based dispersant manufactured by CRODA Co., Ltd. (product name: Hypermer KD-57, decomposition temperature: 243 ° C.). ..
(A)成分は、樹脂組成物の接着性と、硬化後の樹脂組成物の比抵抗の観点から、(A)成分と(B)成分の合計100質量部に対して、80〜98質量部であると好ましく、85〜95質量部であると、より好ましい。 The component (A) is 80 to 98 parts by mass with respect to a total of 100 parts by mass of the components (A) and (B) from the viewpoint of the adhesiveness of the resin composition and the specific resistance of the resin composition after curing. It is preferably 85 to 95 parts by mass, and more preferably 85 to 95 parts by mass.
また、(A)成分は、樹脂組成物の硬化物の場合も、(A)成分と(B)成分の合計100質量部に対して、80〜98質量部であると好ましく、85〜95質量部であると、より好ましい。ここで、樹脂組成物は、硬化時の質量減少が1%未満と少ないため、硬化物中での好ましい(A)成分の含有量は、硬化前の(A)成分の含有量と同様である。ここで、(A)成分の定量分析は、熱重量分析装置で行う。 Further, in the case of the cured product of the resin composition, the component (A) is preferably 80 to 98 parts by mass, preferably 85 to 95 parts by mass, based on 100 parts by mass of the total of the components (A) and (B). It is more preferable that it is a part. Here, since the mass loss of the resin composition during curing is as small as less than 1%, the preferable content of the component (A) in the cured product is the same as the content of the component (A) before curing. .. Here, the quantitative analysis of the component (A) is performed by a thermogravimetric analyzer.
(B)成分は、樹脂組成物の硬化性と、硬化後の樹脂組成物の比抵抗の観点から、(A)成分と(B)成分の合計100質量部に対して、2〜20質量部であると好ましく、5〜15質量部であると、より好ましい。 From the viewpoint of the curability of the resin composition and the specific resistance of the resin composition after curing, the component (B) is 2 to 20 parts by mass with respect to 100 parts by mass in total of the components (A) and (B). Is preferable, and 5 to 15 parts by mass is more preferable.
また、(B)成分は、樹脂組成物の硬化物の場合も、(A)成分と(B)成分の合計100質量部に対して、2〜20質量部であると好ましく、5〜15質量部であると、より好ましい。ここで、(B)成分の定量分析は、イオンクロマトグラフ−質量分析装置で行う。 Further, in the case of the cured product of the resin composition, the component (B) is preferably 2 to 20 parts by mass, preferably 5 to 15 parts by mass, based on 100 parts by mass of the total of the components (A) and (B). It is more preferable that it is a part. Here, the quantitative analysis of the component (B) is performed by an ion chromatograph-mass spectrometer.
(C)成分は、(A)成分と(B)成分の合計100質量部に対して、0.5〜3質量部であると好ましく、1質量部であると、より好ましい。(C)成分が0.5質量部より少ないと、硬化後の樹脂組成物の比抵抗が高くなり易く、3質量部より多いと、樹脂組成物のポットライフが短くなり易くなる。 The amount of the component (C) is preferably 0.5 to 3 parts by mass, more preferably 1 part by mass, based on 100 parts by mass of the total of the components (A) and (B). If the amount of the component (C) is less than 0.5 parts by mass, the specific resistance of the cured resin composition tends to be high, and if it is more than 3 parts by mass, the pot life of the resin composition tends to be short.
また、(C)成分は、樹脂組成物の硬化物の場合も、(A)成分と(B)成分の合計100質量部に対して、1〜3質量部であると好ましい。ここで、(C)成分の定量分析は、イオンクロマトグラフィ−質量分析装置で行う。 Further, in the case of the cured product of the resin composition, the component (C) is preferably 1 to 3 parts by mass with respect to 100 parts by mass in total of the components (A) and (B). Here, the quantitative analysis of the component (C) is performed by an ion chromatography-mass spectrometer.
(D)成分は、(A)成分と(B)成分の合計100質量部に対して、1〜10質量部であると好ましく、3質量部であると、より好ましい。(D)成分が1質量部より少ないと、樹脂組成物のポットライフが短くなり易く、10質量部より多いと、硬化後の樹脂組成物の比抵抗値が高くなり易くなる。 The amount of the component (D) is preferably 1 to 10 parts by mass, more preferably 3 parts by mass, based on 100 parts by mass of the total of the components (A) and (B). If the amount of the component (D) is less than 1 part by mass, the pot life of the resin composition tends to be short, and if it is more than 10 parts by mass, the specific resistance value of the cured resin composition tends to be high.
(E)成分は、0.2〜5質量部であると好ましく、0.25〜3質量部であるとより好ましく、1質量部であると、さらに好ましい。0.2質量部より少ないと、硬化後の樹脂組成物の耐湿性が低下し易くなり、5質量部より多いと、硬化後の樹脂組成物の比抵抗が高くなり易くなる。 The component (E) is preferably 0.2 to 5 parts by mass, more preferably 0.25 to 3 parts by mass, and even more preferably 1 part by mass. If it is less than 0.2 parts by mass, the moisture resistance of the cured resin composition tends to decrease, and if it is more than 5 parts by mass, the specific resistance of the cured resin composition tends to increase.
樹脂組成物は、さらに、(B)成分が固形である場合の溶融・液状化および樹脂組成物の粘度調製の観点から、希釈剤を用いることができる。希釈剤は、熱硬化性樹脂の溶解性や硬化条件を考慮して適宜選択することができ、具体的には、エチルカルビトール、エチルカルビトールアセテート、ブチルカルビトール、ブチルカルビトールアセテート、テルピネオール、ジヒドロテルピネオール、エチルセロソルブ、ブチルセロソルブ、エチルセロソルブアセテート、ブチルセロソルブアセテート、フェノキシエタノール等を挙げることができ、樹脂組成物の乾燥性の観点から、東邦化学(株)製フェノキシエタノール(品名:ハイソルブ EPH)を用いることが好ましい。 Further, as the resin composition, a diluent can be used from the viewpoint of melting / liquefaction when the component (B) is solid and adjusting the viscosity of the resin composition. The diluent can be appropriately selected in consideration of the solubility of the thermosetting resin and the curing conditions. Specifically, ethyl carbitol, ethyl carbitol acetate, butyl carbitol, butyl carbitol acetate, terpineol, etc. Dihydroterpineol, ethyl cellosolve, butyl cellosolve, ethyl cellosolve acetate, butyl cellosolve acetate, phenoxyethanol and the like can be mentioned, and phenoxyethanol (product name: Highsolve EPH) manufactured by Toho Kagaku Co., Ltd. can be used from the viewpoint of drying property of the resin composition. preferable.
希釈剤は、樹脂組成物100質量部に対して、10〜20質量部であると好ましい。 The diluent is preferably 10 to 20 parts by mass with respect to 100 parts by mass of the resin composition.
本発明の樹脂組成物には、本発明の目的を損なわない範囲で、更に必要に応じ、イミダゾール等の硬化促進剤(例えば、四国化成工業(株)製2−フェニル−4−メチル−5−ヒドロキシメチルイミダゾール(品名:キュアゾール2P4MHZ−PW))、レベリング剤、着色剤、イオントラップ剤、消泡剤、難燃剤、その他の添加剤等を配合することができる。 The resin composition of the present invention contains a curing accelerator such as imidazole (for example, 2-phenyl-4-methyl-5, manufactured by Shikoku Kasei Kogyo Co., Ltd.) as necessary, as long as the object of the present invention is not impaired. Hydroxymethylimidazole (trade name: Curesol 2P4MHZ-PW), leveling agent, colorant, ion trap agent, defoamer, flame retardant, other additives and the like can be blended.
本発明の樹脂組成物は、例えば、(A)成分〜(E)成分およびその他添加剤等を同時にまたは別々に、必要により加熱処理を加えながら、撹拌、溶融、混合、分散させることにより得ることができる。これらの混合、撹拌、分散等の装置としては、特に限定されるものではないが、撹拌、加熱装置を備えたライカイ機、3本ロールミル、ボールミル、プラネタリーミキサー、ビーズミル等を使用することができる。また、これら装置を適宜組み合わせて使用してもよい。 The resin composition of the present invention can be obtained, for example, by stirring, melting, mixing, and dispersing components (A) to (E) and other additives at the same time or separately, with heat treatment if necessary. Can be done. The device for mixing, stirring, dispersing, etc. is not particularly limited, but a Raikai machine equipped with a stirring and heating device, a three-roll mill, a ball mill, a planetary mixer, a bead mill, and the like can be used. .. Moreover, you may use these devices in combination as appropriate.
樹脂組成物の初期粘度は、20〜25Pa・sの範囲であると、スクリーン印刷性の観点から好ましい。ここで、樹脂組成物の初期粘度は、樹脂組成物を作製した後、24時間以内に、ブルックフィールド型粘度計(型番:HBDV−1、14号ロータ)を用い、25℃、10回転で測定する。 The initial viscosity of the resin composition is preferably in the range of 20 to 25 Pa · s from the viewpoint of screen printability. Here, the initial viscosity of the resin composition is measured within 24 hours after the resin composition is prepared, using a Brookfield type viscometer (model number: HBDV-1, No. 14 rotor) at 25 ° C. and 10 rotations. do.
本発明の樹脂組成物は、スクリーン印刷、ディスペンサー等で、基板の導電部や、半導体素子の電極部等の電子部品の所望の位置に形成・塗布される。 The resin composition of the present invention is formed and applied to a desired position of an electronic component such as a conductive portion of a substrate or an electrode portion of a semiconductor element by screen printing, a dispenser or the like.
本発明の樹脂組成物の硬化条件は、150〜300℃、5〜60分間が好ましく、特に、200〜220℃で20〜40分間での高温短時間が適している。樹脂組成物の硬化物は、低比抵抗である。 The curing conditions of the resin composition of the present invention are preferably 150 to 300 ° C. for 5 to 60 minutes, and particularly suitable is a high temperature and short time of 200 to 220 ° C. for 20 to 40 minutes. The cured product of the resin composition has a low resistivity.
本発明の樹脂組成物は、導電性銅ペーストに用いられると好ましく、半導体素子の電極部と基板の導電部等の電子部品用接着剤として適している。 The resin composition of the present invention is preferably used for a conductive copper paste, and is suitable as an adhesive for electronic parts such as an electrode portion of a semiconductor element and a conductive portion of a substrate.
〔半導体装置〕
本発明の半導体装置は、上述の樹脂組成物の硬化物、すなわち導電性銅ペーストの硬化物を有する。半導体装置は、例えば、導電部を有する基板と、電極部を有する半導体素子とを含み、上記樹脂組成物の硬化物である樹脂組成物硬化膜で、基板の導電部と半導体素子の電極部とが接合される。
[Semiconductor device]
The semiconductor device of the present invention has a cured product of the above-mentioned resin composition, that is, a cured product of a conductive copper paste. The semiconductor device includes, for example, a substrate having a conductive portion and a semiconductor element having an electrode portion, and is a cured film of a resin composition which is a cured product of the above resin composition. Are joined.
本発明の半導体装置は、半導体素子の電極部と基板の導電部との間の接続抵抗値が小さく、高信頼性である。 The semiconductor device of the present invention has a small connection resistance value between the electrode portion of the semiconductor element and the conductive portion of the substrate, and is highly reliable.
本発明について、実施例により説明するが、本発明はこれらに限定されるものではない。なお、以下の実施例において、部、%はことわりのない限り、質量部、質量%を示す。 The present invention will be described with reference to Examples, but the present invention is not limited thereto. In the following examples, parts and% indicate parts by mass and% by mass unless otherwise specified.
実施例、比較例では、
(A)成分として、三井金属鉱業(株)製電解銅粉(品名:ECY−4B、酸素量:0.11%、比表面積:0.223m2/g、タップ密度:4.65g/cm3、平均粒径:6.7μm)を、
(B)成分として、昭和電工(株)製レゾール型フェノール樹脂(品名:ショウノールCKM−918A)を、
(C)成分として、和光純薬工業(株)製のオレイン酸、ステアリン酸、パルミチン酸を、
(D)成分として、和光純薬工業(株)製のトリエタノールアミン(TEA、2,2’,2”−ニトリロトリエタノール)、2,2’−イミノジエタノール(ジエタノールアミン)、o−アミノフェノール(2−アミノフェノール)を、
(E)成分として、(株)CRODA製ジカルボン酸弱アニオン系分散剤(品名:HypermerKD−57、分解温度:243℃)、
(E’)成分として、(株)CRODA製ジカルボン酸弱アニオン系分散剤(品名:HypermerKD−16、分解温度:350℃);川研ファインケミカル製のラウロイルサルコシン(品名:ソイポンSLA、分解温度:294℃)、オレオイルサルコシン(品名:ソイポンSOA、分解温度:320℃、ラウロイルメチル−β−アラニン(品名:アラノンALA、分解温度:338℃)、ステアリン酸ジエタノール(品名:アミゾールSDE、分解温度:333℃)、ステアリン酸ジエタノール(品名:アミゾールSDHE、分解温度:339℃)、オレイン酸ジエタノール(品名:アミゾールODE、分解温度:341℃)、オレイン酸ジエタノール(品名:アミゾールODHE、分解温度:345℃)、PEG−2コカミン(ビスコファインE2C、分解温度:295℃)、脂肪酸エステル(ヒノアクトKF−1000、分解温度:291℃)、アミノ基含有ポリエステル(品名:ヒノアクトKF−1300M、分解温度:358℃)を使用した。ここで、(E)成分、(E’)成分の分解温度は、島津製作所(株)製熱重量・示差熱同時測定装置(型番:TG8120)を用い、試料質量:3g、大気雰囲気、昇温速度:10℃/分の条件で測定した。なお、CRODA製ジカルボン酸弱アニオン系分散剤(品名:HypermerKD−16は、化学式(2):
In the examples and comparative examples,
As the component (A), electrolytic copper powder manufactured by Mitsui Metal Mining Co., Ltd. (product name: ECY-4B, oxygen content: 0.11%, specific surface area: 0.223 m 2 / g, tap density: 4.65 g / cm 3 , Average particle size: 6.7 μm),
As the component (B), a resol type phenol resin (product name: Shonor CKM-918A) manufactured by Showa Denko Corporation was used.
As the component (C), oleic acid, stearic acid, and palmitic acid manufactured by Wako Pure Chemical Industries, Ltd. are used.
As the component (D), triethanolamine (TEA, 2,2', 2 "-nitrilotriethanol), 2,2'-iminodiethanol (diethanolamine), o-aminophenol (2) manufactured by Wako Pure Chemical Industries, Ltd. -Aminophenol),
As a component (E), a dicarboxylic acid weak anion-based dispersant manufactured by CRODA Co., Ltd. (product name: HypermerKD-57, decomposition temperature: 243 ° C.),
As a component (E'), a dicarboxylic acid weak anionic dispersant manufactured by CRODA Co., Ltd. (product name: HypermerKD-16, decomposition temperature: 350 ° C.); lauroyl sarcosine manufactured by Kawaken Fine Chemical Co., Ltd. (product name: Soipon SLA, decomposition temperature: 294). ℃), oleoyl sarcosine (product name: Soipon SOA, decomposition temperature: 320 ° C, lauroylmethyl-β-alanine (product name: Alanon ALA, decomposition temperature: 338 ° C), diethanol stearate (product name: amizole SDE, decomposition temperature: 333) ℃), diethanol stearate (product name: amizole SDHE, decomposition temperature: 339 ° C), diethanol oleate (product name: amizole ODE, decomposition temperature: 341 ° C), diethanol oleate (product name: amizole ODHE, decomposition temperature: 345 ° C) , PEG-2 cocamine (Viscofine E2C, decomposition temperature: 295 ° C.), fatty acid ester (Hinoact KF-1000, decomposition temperature: 291 ° C.), amino group-containing polyester (product name: Hinoact KF-1300M, decomposition temperature: 358 ° C.) Here, the decomposition temperature of the component (E) and the component (E') was determined by using a thermal weight / differential heat simultaneous measuring device (model number: TG8120) manufactured by Shimadzu Corporation, sample mass: 3 g, and atmosphere. The temperature was measured under the conditions of atmosphere and temperature rise rate: 10 ° C./min. CRODA dicarboxylic acid weak anionic dispersant (product name: HypermerKD-16 is a chemical formula (2) :.
で表される。
希釈剤として、東邦化学(株)製希釈剤(品名:ハイソルブ EPH)を使用した。
It is represented by.
As a diluent, a diluent manufactured by Toho Chemical Industry Co., Ltd. (product name: High Solve EPH) was used.
〔実施例1〜11、比較例1〜15、参考例1〜2〕
表1〜4に示す割合で、原料を三本ロールミルで均一に混練し、樹脂組成物を調製した。(A)成分と、(B)成分、(C)成分、(D)成分、および(E)成分(または(E’)成分)を、三本ロールミルで均一に混練し、樹脂組成物を調製した。最後に、ブルックフィールド型粘度計(型番:HBDV−1、14号ローター、10rpm)で粘度を測定し、20〜25Pa・sの範囲になるように、希釈剤を加えた。なお、(B)成分が固体で混練しにくい場合には、(B)成分を予め希釈剤の一部で溶解した後、他の成分を混練した。
[Examples 1 to 11, Comparative Examples 1 to 15, Reference Examples 1 to 2]
The raw materials were uniformly kneaded with a three-roll mill at the ratios shown in Tables 1 to 4 to prepare a resin composition. A resin composition is prepared by uniformly kneading the component (A), the component (B), the component (C), the component ( D) , and the component (E) (or the component (E')) with a three-roll mill. bottom. Finally, the viscosity was measured with a Brookfield type viscometer (model number: HBDV-1, No. 14, rotor, 10 rpm), and a diluent was added so as to be in the range of 20 to 25 Pa · s. When the component (B) was solid and difficult to knead, the component (B) was dissolved in a part of the diluent in advance, and then the other components were kneaded.
〔評価方法〕
《初期粘度測定》
樹脂組成物を作製した後、24時間以内にブルックフィールド型粘度計(HBDV−1、14号ローター)を用い、25℃、10回転で、樹脂組成物を測定した。表1〜4に、結果を示す(粘度の行に記載)。
〔Evaluation method〕
<< Initial viscosity measurement >>
Within 24 hours after preparing the resin composition, the resin composition was measured at 25 ° C. and 10 rotations using a Brookfield type viscometer (HBDV-1, No. 14 rotor). The results are shown in Tables 1 to 4 (listed in the viscosity row).
《比抵抗測定》
アルミナ基板上に、樹脂組成物を、スクリーン印刷機で、幅:1mm、長さ:71mmのパターンを印刷し、ベルトコンベア式硬化炉で大気中、200℃×30分間加熱処理して、硬化させた。得られた樹脂組成物硬化膜の膜厚は、(株)東京精密製表面粗さ形状測定機(型番:サーフコム1500SD−2)を用いて、抵抗値は、(株)TFFケースレーインスツルメンツ製デジタルマルチメーター(型番:2001)を用いて、それぞれ測定し、体積抵抗率を算出し、比抵抗とした。比抵抗は、1.2×10−4Ω・cm以下が好ましく、1.0×10−4Ω・cm以下が、より好ましい。表1〜5に、結果を示す(表1〜4では、比抵抗の行に、表5では、初期の列に記載)。
<< Measurement of resistivity >>
A pattern of width: 1 mm and length: 71 mm is printed on an alumina substrate with a screen printing machine, and heat-treated in the air at 200 ° C. for 30 minutes in a belt conveyor type curing furnace to cure. rice field. The film thickness of the obtained resin composition cured film was measured by using a surface roughness shape measuring machine manufactured by Tokyo Precision Co., Ltd. (model number: Surfcom 1500SD-2), and the resistivity value was measured by Digital Multi manufactured by TFF Keithley Instruments Co., Ltd. Each measurement was performed using a meter (model number: 2001), and the volume resistivity was calculated and used as the specific resistance. The specific resistance is preferably 1.2 × 10 -4 Ω · cm or less, and more preferably 1.0 × 10 -4 Ω · cm or less. The results are shown in Tables 1-5 (listed in the resistivity row in Tables 1-4 and in the initial column in Table 5).
《高温高湿保持後の比抵抗変化の評価》
上述の比抵抗測定をした温度:85℃、湿度:85%の環境下で、100、200、250、300、500時間放置した後の樹脂組成物硬化膜の比抵抗を測定した。また、{〔(各時間保持後の比抵抗)−(初期の比抵抗)〕/(初期の比抵抗)×100}を、比抵抗変化率(単位:%)とした。比抵抗変化率は、20%以下が好ましい。表5に、結果を示す。
<< Evaluation of change in resistivity after holding at high temperature and high humidity >>
The specific resistance of the cured resin composition film after being left for 100, 200, 250, 300, 500 hours in an environment of temperature: 85 ° C. and humidity: 85% for which the above specific resistance was measured was measured. Further, {[(specific resistance after holding for each time) − (initial specific resistance)] / (initial specific resistance) × 100} was defined as the specific resistance change rate (unit:%). The specific resistance change rate is preferably 20% or less. Table 5 shows the results.
《強度の測定》
アルミナ基板上に、スクリーン印刷機で1.5mm□のブロックパターン印刷を行い、3216サイズのアルミナチップを乗せて、ベルトコンベア式硬化炉で、200℃×30分間加熱処理して、硬化させた。硬化後に、アイコーエンジニアリング製卓上型強度試験機(型番:1605HTP)を用いて、加重速度12mm/分におけるせん断強さを測定した。強度は、500N/cm2以上が好ましい。表1〜4に、結果を示す。
《Measurement of strength》
A 1.5 mm □ block pattern was printed on the alumina substrate with a screen printing machine, a 3216 size alumina chip was placed on the alumina substrate, and the mixture was heat-treated at 200 ° C. for 30 minutes in a belt conveyor type curing furnace to cure. After curing, the shear strength at a loading speed of 12 mm / min was measured using a tabletop strength tester (model number: 1605HTP) manufactured by Aiko Engineering. The strength is preferably 500 N / cm 2 or more. The results are shown in Tables 1 to 4.
表1〜5からわかるように、実施例1〜11の全てで、硬化後の樹脂組成物の比抵抗が低く、比抵抗変化率も低く、強度が高かった。これに対して、(E)成分を使用しなかった比較例1、(E)成分の代わりに(E’)成分を使用した比較例2〜12は、いずれも比抵抗変化率が高かった。ここで、比較例2で使用したHypermerKD−16は、化学式(2)に示すように、(E)成分として使用したHypermerKD−57に類似した構造を有するが、分解温度が350℃であるため、比抵抗変化率が高かった。比較例11、12は、初期の比抵抗も高かった。また、(C)成分および(D)成分を含まない比較例13、(D)成分を含まない比較例14は、初期の比抵抗値が非常に高かった。(C)成分を含まない比較例15は、表3には記載していないが、室温(25℃)で保持した時、6日以下で、初期粘度の1.2倍以上の粘度になり、ポットライフがよくなかった。 As can be seen from Tables 1 to 5 , in all of Examples 1 to 11 , the specific resistance of the cured resin composition was low, the rate of change in specific resistance was low, and the strength was high. On the other hand, Comparative Example 1 in which the component (E) was not used and Comparative Examples 2 to 12 in which the component (E') was used instead of the component (E) had a high resistivity change rate. Here, the Hypermer KD-16 used in Comparative Example 2 has a structure similar to that of the Hypermer KD-57 used as the component (E) as shown in the chemical formula (2), but has a decomposition temperature of 350 ° C. The rate of change in resistivity was high. In Comparative Examples 11 and 12, the initial resistivity was also high. Further, in Comparative Example 13 which did not contain the component (C) and the component (D) and Comparative Example 14 which did not contain the component (D), the initial specific resistance value was very high. Comparative Example 15 containing no component (C) is not shown in Table 3, but when kept at room temperature (25 ° C.), the viscosity becomes 1.2 times or more the initial viscosity in 6 days or less. The pot life was not good.
上記のように、本発明の樹脂組成物は、大気中での硬化後に比抵抗が低く、高温高湿保持後でも比抵抗の変化が少ないので、導電性銅ペーストとして、非常に有用である。 As described above, the resin composition of the present invention is very useful as a conductive copper paste because it has a low resistivity after curing in the atmosphere and a small change in resistivity even after holding at high temperature and high humidity.
Claims (7)
で表される分解温度が250℃以下である湿潤分散剤を含有し、
(A)成分が、(A)成分と(B)成分の合計100質量部に対して、80〜98質量部であり、(B)成分が、(A)成分と(B)成分の合計100質量部に対して、2〜20質量部であり、(C)成分が、(A)成分と(B)成分の合計100質量部に対して、0.5〜3質量部であり、(D)成分が、(A)成分と(B)成分の合計100質量部に対して、1〜10質量部であり、(E)成分が、(A)成分と(B)成分の合計100質量部に対して、0.2〜5質量部であることを特徴とする、樹脂組成物。 (A) copper powder, (B) thermosetting resin, (C) fatty acid, (D) amine or amine compound, and (E) general formula (1):
Contains a wetting dispersant having a decomposition temperature of 250 ° C. or lower, represented by
The component (A) is 80 to 98 parts by mass with respect to a total of 100 parts by mass of the component (A) and the component (B), and the component (B) is a total of 100 parts by mass of the component (A) and the component (B). It is 2 to 20 parts by mass with respect to the mass part, and the component (C) is 0.5 to 3 parts by mass with respect to a total of 100 parts by mass of the component (A) and the component (B), and (D). The component) is 1 to 10 parts by mass with respect to a total of 100 parts by mass of the component (A) and the component (B), and the component (E) is a total of 100 parts by mass of the component (A) and the component (B). The resin composition is characterized by having a mass of 0.2 to 5 parts by mass.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016022379A JP6948111B2 (en) | 2016-02-09 | 2016-02-09 | Resin compositions, conductive copper pastes, and semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016022379A JP6948111B2 (en) | 2016-02-09 | 2016-02-09 | Resin compositions, conductive copper pastes, and semiconductor devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017141332A JP2017141332A (en) | 2017-08-17 |
JP6948111B2 true JP6948111B2 (en) | 2021-10-13 |
Family
ID=59627196
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016022379A Active JP6948111B2 (en) | 2016-02-09 | 2016-02-09 | Resin compositions, conductive copper pastes, and semiconductor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6948111B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017141330A (en) * | 2016-02-08 | 2017-08-17 | ナミックス株式会社 | Resin composition, conductive copper paste, cured product of conductive copper paste, and semiconductor device |
JP7013731B2 (en) * | 2017-08-30 | 2022-02-01 | 住友金属鉱山株式会社 | Method for manufacturing conductive paste, electronic components and multilayer ceramic capacitors |
JP7267685B2 (en) * | 2018-05-18 | 2023-05-02 | 積水化学工業株式会社 | Conductive material, connection structure, and method for manufacturing connection structure |
JP7276058B2 (en) * | 2019-10-07 | 2023-05-18 | 日油株式会社 | conductive composition |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6434597A (en) * | 1987-07-31 | 1989-02-06 | Tatsuta Densen Kk | Cu conductive compound with satisfactory solderability |
JPH0753843B2 (en) * | 1988-07-05 | 1995-06-07 | タツタ電線株式会社 | Conductive paint that can be soldered |
JPH0377202A (en) * | 1989-08-18 | 1991-04-02 | Daido Steel Co Ltd | Conductive composite |
JP2514516B2 (en) * | 1992-02-05 | 1996-07-10 | タツタ電線株式会社 | Solderable conductive paste |
JP3309231B2 (en) * | 1993-08-25 | 2002-07-29 | タツタ電線株式会社 | Conductive paint with good adhesion to molded metal oxide |
JP4460731B2 (en) * | 2000-07-18 | 2010-05-12 | ハリマ化成株式会社 | Conductive paste and method for preparing the same |
JP2011046992A (en) * | 2009-08-26 | 2011-03-10 | Sanyo Chem Ind Ltd | Copper fine particle, and method for producing the same |
JP5416153B2 (en) * | 2010-03-18 | 2014-02-12 | 古河電気工業株式会社 | Conductive paste, manufacturing method thereof, and conductive connecting member |
WO2016140185A1 (en) * | 2015-03-05 | 2016-09-09 | ナミックス株式会社 | Electroconductive copper paste, electroconductive copper paste hardened film, and semiconductor device |
JP6647031B2 (en) * | 2015-12-09 | 2020-02-14 | ナミックス株式会社 | Resin composition, conductive copper paste, cured product, semiconductor device |
JP7081064B2 (en) * | 2016-01-19 | 2022-06-07 | ナミックス株式会社 | Resin compositions, conductive copper pastes, and semiconductor devices |
JP2017141330A (en) * | 2016-02-08 | 2017-08-17 | ナミックス株式会社 | Resin composition, conductive copper paste, cured product of conductive copper paste, and semiconductor device |
-
2016
- 2016-02-09 JP JP2016022379A patent/JP6948111B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2017141332A (en) | 2017-08-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102665528B1 (en) | Resin compositions, conductive copper pastes, and semiconductor devices | |
US10347388B2 (en) | Conductive copper paste, conductive copper paste cured film, and semiconductor device | |
JP6948111B2 (en) | Resin compositions, conductive copper pastes, and semiconductor devices | |
JP5558547B2 (en) | Paste metal fine particle composition, solid metal or solid metal alloy production method, metal member joining method, printed wiring board production method, and electric circuit connection bump production method | |
JP6647031B2 (en) | Resin composition, conductive copper paste, cured product, semiconductor device | |
TW201840693A (en) | Resin composition for forming electrodes, chip electronic component and method for producing same | |
JP2017089000A (en) | Copper particle and manufacturing method therefor, paste for forming conductive film and article | |
JP6714244B2 (en) | Resin composition, copper paste, and semiconductor device | |
JP4050301B2 (en) | Conductive composition, method for forming conductive film, and conductive film | |
JP7369031B2 (en) | Paste composition and method for manufacturing electronic component device | |
JP2017141330A (en) | Resin composition, conductive copper paste, cured product of conductive copper paste, and semiconductor device | |
WO2018101471A1 (en) | Electroconductive bonding material and method for manufacturing semiconductor device | |
JP2007277384A (en) | Electroconductive adhesive | |
JP2009205899A (en) | Conductive paste composition and printed-wiring board | |
JP6790976B2 (en) | Conductive copper paste | |
JP2006056951A (en) | Reaction type conductive resin composition and conductive adhesive using the same | |
JP7276052B2 (en) | conductive composition | |
JP5887541B2 (en) | Thermosetting resin composition | |
JP2016183302A (en) | Method for manufacturing conductive adhesive | |
JP2006143762A (en) | Conductive adhesive |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190123 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20191113 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20191224 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200206 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200818 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201016 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210406 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210524 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210907 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210917 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6948111 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |