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JP6891450B2 - Manufacturing method of light emitting device - Google Patents

Manufacturing method of light emitting device Download PDF

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JP6891450B2
JP6891450B2 JP2016211716A JP2016211716A JP6891450B2 JP 6891450 B2 JP6891450 B2 JP 6891450B2 JP 2016211716 A JP2016211716 A JP 2016211716A JP 2016211716 A JP2016211716 A JP 2016211716A JP 6891450 B2 JP6891450 B2 JP 6891450B2
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light emitting
emitting element
resin
light
translucent
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JP2018073975A (en
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高宏 谷
高宏 谷
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Nichia Corp
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Nichia Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93Batch processes
    • H01L2224/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting

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  • Led Device Packages (AREA)

Description

本開示は、発光装置の製造方法に関する。 The present disclosure relates to a method for manufacturing a light emitting device.

半導体発光素子(以下、発光素子)の上面に未硬化樹脂を供給し、その上に透光性板状部材を載置する工程を備えた発光装置の製造方法が知られている(例えば、特許文献1)。未硬化樹脂は、透光性板状部材の自重もしくは荷重をかけることで、発光素子の側面の一部を覆うように形成される。 A method for manufacturing a light emitting device including a step of supplying an uncured resin to the upper surface of a semiconductor light emitting element (hereinafter referred to as a light emitting element) and placing a translucent plate-like member on the uncured resin is known (for example, a patent). Document 1). The uncured resin is formed so as to cover a part of the side surface of the light emitting element by applying its own weight or a load of the translucent plate-shaped member.

特開2013−197450号公報Japanese Unexamined Patent Publication No. 2013-197450

発光素子の側面に、適切な量の未硬化樹脂を形成する方法が求められている。 There is a need for a method of forming an appropriate amount of uncured resin on the side surface of the light emitting element.

本開示は、以下の構成を含む。
発光素子を準備する工程と、発光素子の幅よりも広い幅の開口部と、底面と、壁部と、を備えた凹部を先端に有するスタンプピンを準備する工程と、壁部の内側面に透光性樹脂を付着させる工程と、発光素子の上面の上方にスタンプピンの凹部の開口部を配置し、かつ、発光素子の側面よりも外側に前記壁部の内側面を配置し、壁部の一部を発光素子の上面より下に位置するまで移動させて、壁部の内側面に付着した透光性樹脂を発光素子の側面に転写する工程と、備える発光装置の製造方法。
The disclosure includes the following configurations:
A step of preparing a light emitting element, a step of preparing a stamp pin having a recess at the tip having an opening having a width wider than the width of the light emitting element, a bottom surface, and a wall portion, and an inner surface surface of the wall portion. The step of adhering the translucent resin, the opening of the recess of the stamp pin is arranged above the upper surface of the light emitting element, and the inner side surface of the wall portion is arranged outside the side surface of the light emitting element. A method of manufacturing a light emitting device, which comprises a step of moving a part of the light emitting element to a position below the upper surface of the light emitting element and transferring the translucent resin adhering to the inner surface of the wall portion to the side surface of the light emitting element.

以上により、発光素子の側面に、適量の未硬化樹脂を形成することができる。 As described above, an appropriate amount of uncured resin can be formed on the side surface of the light emitting element.

図1Aは、実施形態に係る発光素子を示す概略上面図である。FIG. 1A is a schematic top view showing a light emitting element according to the embodiment. 図1Bは、実施形態に係る発光素子を示す概略断面図である。FIG. 1B is a schematic cross-sectional view showing a light emitting element according to the embodiment. 図1Cは、実施形態に係る発光素子を準備する工程を示す概略図である。FIG. 1C is a schematic view showing a step of preparing a light emitting element according to an embodiment. 図2Aは、実施形態に係るスタンプピンを示す概略側面図である。FIG. 2A is a schematic side view showing the stamp pin according to the embodiment. 図2Bは、図2Aに示すスタンプピンの先端部を示す概略斜視図である。FIG. 2B is a schematic perspective view showing a tip portion of the stamp pin shown in FIG. 2A. 図2Cは、図2Aに示すスタンプピンを先端部側から見た概略図である。FIG. 2C is a schematic view of the stamp pin shown in FIG. 2A as viewed from the tip end side. 図2Dは、図2Bの2D−2D線における概略断面図である。FIG. 2D is a schematic cross-sectional view taken along the line 2D-2D of FIG. 2B. 図3Aは、スタンプピンの変形例を示す概略斜視図である。FIG. 3A is a schematic perspective view showing a modified example of the stamp pin. 図3Bは、スタンプピンの変形例を示す概略斜視図である。FIG. 3B is a schematic perspective view showing a modified example of the stamp pin. 図4Aは、実施形態に係る発光装置の製造方法を示す概略図である。FIG. 4A is a schematic view showing a method of manufacturing a light emitting device according to an embodiment. 図4Bは、実施形態に係る発光装置の製造方法を示す概略図である。FIG. 4B is a schematic view showing a method of manufacturing the light emitting device according to the embodiment. 図5Aは、実施形態に係る発光装置の製造方法を示す概略図である。FIG. 5A is a schematic view showing a method of manufacturing a light emitting device according to an embodiment. 図5Bは、実施形態に係る発光装置の製造方法を示す概略図である。FIG. 5B is a schematic view showing a method of manufacturing the light emitting device according to the embodiment. 図6は、実施形態に係る発光装置の製造方法を示す概略図である。FIG. 6 is a schematic view showing a method of manufacturing a light emitting device according to an embodiment. 図7Aは、実施形態に係る発光装置の製造方法を示す概略図である。FIG. 7A is a schematic view showing a method of manufacturing the light emitting device according to the embodiment. 図7Bは、実施形態に係る発光装置の製造方法を示す概略図である。FIG. 7B is a schematic view showing a method of manufacturing the light emitting device according to the embodiment.

本発明を実施するための形態を、以下に図面を参照しながら説明する。ただし、以下に示す形態は、本発明の技術思想を具現化するための発光装置の製造方法を例示するものであって、以下に限定するものではない。また、実施の形態に記載されている構成部品の寸法、材質、形状、その相対的配置等は、特定的な記載がない限り、本発明の範囲をそれのみに限定する趣旨ではい。尚、各図面が示す部材の大きさや位置関係等は、説明を明確にするために誇張していることがある。また、必要に応じて特定の方向や位置を示す用語(例えば、「上」、「下」、「右」、「左」および、それらの用語を含む別の用語)を用いる。これらの用語の使用は図面を参照した発明の理解を容易にするためであって、これらの用語の意味によって本発明の技術的範囲が限定されるものではない。また、透光性樹脂は、硬化前及び硬化後のいずれについても同じ名称を用いる。 A mode for carrying out the present invention will be described below with reference to the drawings. However, the forms shown below exemplify a method for manufacturing a light emitting device for embodying the technical idea of the present invention, and are not limited to the following. Further, the dimensions, materials, shapes, relative arrangements, etc. of the components described in the embodiments are not intended to limit the scope of the present invention to that alone unless otherwise specified. The size and positional relationship of the members shown in each drawing may be exaggerated to clarify the explanation. In addition, terms indicating a specific direction or position (for example, "top", "bottom", "right", "left", and other terms including those terms) are used as necessary. The use of these terms is for facilitating the understanding of the invention with reference to the drawings, and the meaning of these terms does not limit the technical scope of the invention. Further, the translucent resin uses the same name both before and after curing.

実施形態に係る発光装置の製造方法は、以下の工程を備える。
1)発光素子を準備する工程
2)スタンプピンを準備する工程
3)スタンプピンに透光性樹脂を付着させる工程
4)スタンプピンから発光素子に透光性樹脂を転写する工程
以下、各工程について詳説する。尚、1)及び2)の準備する工程は、この順に限らず、2)の工程後に1)の工程を行ってもよく、1)の工程と2)の工程とを並行して行ってもよい。
The method for manufacturing the light emitting device according to the embodiment includes the following steps.
1) Step of preparing the light emitting element 2) Step of preparing the stamp pin 3) Step of adhering the translucent resin to the stamp pin 4) Step of transferring the translucent resin from the stamp pin to the light emitting element I will explain in detail. The steps 1) and 2) are not limited to this order, and the step 1) may be performed after the step 2), or the steps 1) and 2) may be performed in parallel. Good.

1)発光素子を準備する工程
発光素子10の一例を図1A、図1Bに示す。発光素子は、例えば発光ダイオード等の半導体発光素子を用いることができ、青色、緑色、赤色等の可視光、さらに紫外光を発光可能な発光素子を用いることができる。発光素子10は、幅Wcと長さLcとが同じである正方形である。発光素子10は正方形に限らず、長方形でもよい。長方形の場合、長辺又は短辺のいずれかを幅Wc、又は長さLcとする。発光素子10は、六角形、三角形等の多角形でもよい。六角形の場合の幅及び長さは、対向する2辺間の距離とすることができる。三角形の場合の幅及び長さは、いずれか1つの辺を幅、その1つの辺と対向する頂点までの距離を長さとすることができる。
1) Step of preparing a light emitting element An example of the light emitting element 10 is shown in FIGS. 1A and 1B. As the light emitting element, for example, a semiconductor light emitting element such as a light emitting diode can be used, and a light emitting element capable of emitting visible light such as blue, green, or red, and further ultraviolet light can be used. The light emitting element 10 is a square having the same width Wc and length Lc. The light emitting element 10 is not limited to a square shape, but may be a rectangular shape. In the case of a rectangle, either the long side or the short side is defined as the width Wc or the length Lc. The light emitting element 10 may be a polygon such as a hexagon or a triangle. The width and length in the case of a hexagon can be the distance between two opposing sides. As for the width and length in the case of a triangle, any one side can be the width, and the distance to the apex facing the one side can be the length.

発光素子10は、発光層を含む積層構造体11と、電極12と、を備える。積層構造体11は、電極12が形成された下面(電極形成面)10dと、それとは反対側の上面(光取り出し面)10aと、上面10aと下面10dとの間の側面10bと、を備える。積層構造体11の上面10aは発光素子10の上面でもある。積層構造体11の側面10bは発光素子10の側面でもある。また、電極12の下面は、発光素子10の下面10cである。発光素子10の高さHcは、積層構造体11の高さ及び電極12の高さを合計した高さである。 The light emitting element 10 includes a laminated structure 11 including a light emitting layer and an electrode 12. The laminated structure 11 includes a lower surface (electrode forming surface) 10d on which the electrode 12 is formed, an upper surface (light extraction surface) 10a on the opposite side thereof, and a side surface 10b between the upper surface 10a and the lower surface 10d. .. The upper surface 10a of the laminated structure 11 is also the upper surface of the light emitting element 10. The side surface 10b of the laminated structure 11 is also a side surface of the light emitting element 10. The lower surface of the electrode 12 is the lower surface 10c of the light emitting element 10. The height Hc of the light emitting element 10 is the total height of the height of the laminated structure 11 and the height of the electrodes 12.

積層構造体は、発光層を含む半導体層を含む。さらに、サファイア等の透光性基板を備えていてもよい。半導体積層体の一例としては、第1導電型半導体層(例えばn型半導体層)、発光層(活性層)および第2導電型半導体層(例えばp型半導体層)の半導体層を含むことができる。紫外光や、青色光から緑色光の可視光を発光可能な半導体層としては、例えば、III−V族化合物半導体等の半導体材料から形成することができる。具体的には、InAlGa1−X−YN(0≦X、0≦Y、X+Y≦1)等の窒化物系の半導体材料を用いることができる。赤色を発光可能な半導体積層体としては、GaAs、GaAlAs、GaP、InGaAs、InGaAsP等を用いることができる。 The laminated structure includes a semiconductor layer including a light emitting layer. Further, a translucent substrate such as sapphire may be provided. As an example of the semiconductor laminate, a semiconductor layer of a first conductive type semiconductor layer (for example, an n-type semiconductor layer), a light emitting layer (active layer), and a second conductive type semiconductor layer (for example, a p-type semiconductor layer) can be included. .. The semiconductor layer capable of emitting visible light from ultraviolet light or blue light to green light can be formed from a semiconductor material such as a group III-V compound semiconductor. Specifically, a nitride-based semiconductor material such as In X Al Y Ga 1-XY N (0 ≦ X, 0 ≦ Y, X + Y ≦ 1) can be used. As the semiconductor laminate capable of emitting red light, GaAs, GaAlAs, GaP, InGaAs, InGaAsP and the like can be used.

発光素子は一対の電極を備えており、積層構造体の下面であって、同一面側(電極形成面)に配置されている。これらの一対の電極は、積層構造体と、電流−電圧特性が直線又は略直線となるようなオーミック接続されるものであれば、単層構造でもよいし、積層構造でもよい。このような電極は、当該分野で公知の材料及び構成で、任意の厚みで形成することができる。例えば、電極の厚みは、十数μm〜300μmが好ましい。また、電極としては、電気良導体を用いることができ、例えばCu等の金属が好適である。電極形状は、目的や用途等に応じて、種々の形状を選択することができる。発光素子の一対の電極は、それぞれ同じ形状でもよく、あるいは異なる形状でもよい。 The light emitting element includes a pair of electrodes, and is arranged on the same surface side (electrode forming surface) on the lower surface of the laminated structure. These pair of electrodes may have a single-layer structure or a laminated structure as long as they are ohmic-connected to the laminated structure so that the current-voltage characteristics are straight or substantially straight. Such electrodes can be formed of any thickness using materials and configurations known in the art. For example, the thickness of the electrode is preferably a dozen μm to 300 μm. Further, as the electrode, a good electric conductor can be used, and for example, a metal such as Cu is suitable. As the electrode shape, various shapes can be selected according to the purpose, application, and the like. The pair of electrodes of the light emitting element may have the same shape or different shapes.

発光素子を準備する工程は、上述のような発光素子を購入する、又は、構成部材の一部又は全部を形成する工程、加工する工程、分割する工程等を経て準備することができる。 The step of preparing the light emitting element can be prepared through a step of purchasing the light emitting element as described above, a step of forming a part or all of the constituent members, a step of processing, a step of dividing, and the like.

また、準備された発光素子は、例えば、図1Cに示すように、粘着性を備えたシートS1上に載置しておくことが好ましい。その際、発光素子10の電極12をシートS1の上面に接するように載置することが好ましい。1枚のシートS1に複数の発光素子10を配置することができる。このようなシートS1は、発光装置の製造工程内のみで用いられる部材であってもよい。つまり、最終的に得られる発光装置の構成部材ではない部材として用いることができる。また、シートS1は、最終的に得られる発光装置の構成部材となる部材であってもよい。例えば、ポリイミドなどの樹脂シートに配線を備えたフレキシブル基板などを用いてもよい。あるいは、セラミック基板、ガラスエポキシ基板などのリジッド基板を用いてもよい。このような、最終的に得られる発光装置の構成部材となる基板を用いる場合は、それらの基板と発光素子の電極とは、半田などの導電性接合部材で接続させておくことが好ましい。 Further, it is preferable that the prepared light emitting element is placed on the adhesive sheet S1 as shown in FIG. 1C, for example. At that time, it is preferable to place the electrode 12 of the light emitting element 10 so as to be in contact with the upper surface of the sheet S1. A plurality of light emitting elements 10 can be arranged on one sheet S1. Such a sheet S1 may be a member used only in the manufacturing process of the light emitting device. That is, it can be used as a member that is not a constituent member of the finally obtained light emitting device. Further, the sheet S1 may be a member that is a constituent member of the finally obtained light emitting device. For example, a flexible substrate or the like in which wiring is provided on a resin sheet such as polyimide may be used. Alternatively, a rigid substrate such as a ceramic substrate or a glass epoxy substrate may be used. When such a substrate to be a constituent member of the finally obtained light emitting device is used, it is preferable that the substrate and the electrode of the light emitting element are connected by a conductive bonding member such as solder.

2)スタンプピンを準備する工程
スタンプピン20の一例を図2A〜図2Dに示す。スタンプピン20は、ダイボンダ(ダイボンド装置)において用いられる部品であり、上下方向、左右方向、前後方向などに可動するアームに取り付けられて用いられる。スタンプピン20は、図2Aに示すような外観を示す部材であり、本体部21と、その先端側に備えられ外径が先細り形状となる先端部22と、を有する長尺状の部材である。
2) Step of preparing the stamp pin An example of the stamp pin 20 is shown in FIGS. 2A to 2D. The stamp pin 20 is a component used in a die bonder (die bond device), and is used by being attached to an arm that can move in the vertical direction, the horizontal direction, the front-rear direction, and the like. The stamp pin 20 is a member having an appearance as shown in FIG. 2A, and is a long member having a main body portion 21 and a tip portion 22 provided on the tip end side thereof and having a tapered outer diameter. ..

スタンプピン20は、本体部21は円柱状であり、先端部22は円錐台状部と四角柱状部とから構成される。本体部21は角柱であってもよく、先端部22は角錐台部と四角柱状部であってもよい。尚、先端部は錐台部を有さなくてもよい。 The main body 21 of the stamp pin 20 is cylindrical, and the tip 22 is composed of a truncated cone-shaped portion and a square columnar portion. The main body portion 21 may be a prism, and the tip portion 22 may be a pyramid base portion and a square pillar portion. The tip portion does not have to have a frustum portion.

スタンプピン20の先端部22は、最先端となる端面に開口する開口部233と底面231と壁部232から構成される凹部23を有している。凹部23の底面231は正方形であり、壁部232は底面231を囲むように4つの辺に沿って枠状に形成されている。凹部の開口部233も正方形である。壁部232は、凹部23の内側面を構成する内側面232aと、内側面232aの反対側の外側面232cを有する。さらに、内側面232aと外側面232cとの間の下面232bと、を備える。また、図3Aに示すように、対向する2つの辺にそれぞれ1つの壁部を備えた先端部22Aとしてもよい。あるいは、図3Bに示すように、4つの辺に、それぞれ離間する4つの壁部を備えた先端部22Bとしてもよい。 The tip portion 22 of the stamp pin 20 has a recess 23 composed of an opening 233 that opens to the end face, a bottom surface 231 and a wall portion 232, which are the most advanced ends. The bottom surface 231 of the recess 23 is square, and the wall portion 232 is formed in a frame shape along four sides so as to surround the bottom surface 231. The opening 233 of the recess is also square. The wall portion 232 has an inner side surface 232a constituting the inner side surface of the recess 23 and an outer surface 232c on the opposite side of the inner side surface 232a. Further, a lower surface 232b between the inner surface 232a and the outer surface 232c is provided. Further, as shown in FIG. 3A, the tip portion 22A may be provided with one wall portion on each of the two opposing sides. Alternatively, as shown in FIG. 3B, the tip portion 22B may be provided with four wall portions separated from each other on the four sides.

スタンプピン20の壁部232の高さHrは、積層構造体11と同等以下の高さである。壁部232の内側面232aは、発光素子10の側面10bと略平行な面、又は、発光素子の側面10bに対して傾斜した面とすることができる。また、壁部232の外側面232cは内側面232aと平行な面、又は、内側面232aと傾斜した面とすることができる。壁部232の下面232bの幅(内側面の下端と外側面の下端との最短距離)は、例えば、発光素子の幅又は長さの10%〜50%程度の幅とすることができる。また、内側面232aと外側面232cが、それぞれの下端で接してもよい。つまり、内側面232aと外側面232cの間に下面を有していなくてもよい。 The height Hr of the wall portion 232 of the stamp pin 20 is equal to or less than the height of the laminated structure 11. The inner side surface 232a of the wall portion 232 may be a surface substantially parallel to the side surface 10b of the light emitting element 10 or a surface inclined with respect to the side surface 10b of the light emitting element 10. Further, the outer surface 232c of the wall portion 232 may be a surface parallel to the inner side surface 232a or a surface inclined with the inner side surface 232a. The width of the lower surface 232b of the wall portion 232 (the shortest distance between the lower end of the inner side surface and the lower end of the outer surface) can be, for example, a width of about 10% to 50% of the width or length of the light emitting element. Further, the inner side surface 232a and the outer side surface 232c may be in contact with each other at the lower ends thereof. That is, it is not necessary to have a lower surface between the inner surface 232a and the outer surface 232c.

凹部の開口部233の幅Wrは、発光素子の幅Wcよりも広い。例えば、開口部233の幅Wrは、発光素子の幅Wcよりも60〜120μm程度大きい幅とすることができる。例えば、発光素子の幅Wcが約200μmの場合、凹部の開口部233の幅Wrは約300μmとすることができる。また、開口部233の長さLrは、発光素子の長さLcよりも長い。例えば、開口部233の長さLrは、発光素子の長さLcよりも60〜120μm程度大きい幅とすることができる。例えば、発光素子の長さLcが約1100μmの場合、開口部233長さLrは約1200μmとすることができる。
凹部の内側面232aが、開口側に向けて広くなるように傾斜している場合は、その開口部の幅が発光素子の幅Wcよりも広くなっていればよい。
The width Wr of the opening 233 of the recess is wider than the width Wc of the light emitting element. For example, the width Wr of the opening 233 can be set to be about 60 to 120 μm larger than the width Wc of the light emitting element. For example, when the width Wc of the light emitting element is about 200 μm, the width Wr of the opening 233 of the recess can be about 300 μm. Further, the length Lr of the opening 233 is longer than the length Lc of the light emitting element. For example, the length Lr of the opening 233 can be a width that is about 60 to 120 μm larger than the length Lc of the light emitting element. For example, when the length Lc of the light emitting element is about 1100 μm, the opening 233 length Lr can be about 1200 μm.
When the inner side surface 232a of the recess is inclined so as to be wider toward the opening side, the width of the opening may be wider than the width Wc of the light emitting element.

発光素子が四角形以外の多角形の場合は、凹部の開口部の形状は、その発光素子の辺数に応じた形状とすることが好ましい。例えば、六角形の発光素子の場合は、凹部の開口部の形状も六角形とすることが好ましい。凹部の開口部が四角形以外の多角形の場合は、凹部の幅又は長さは、凹部の開口部の1つの辺の幅又は長さとして定義することもできる。 When the light emitting element is a polygon other than a quadrangle, the shape of the opening of the recess is preferably a shape corresponding to the number of sides of the light emitting element. For example, in the case of a hexagonal light emitting element, it is preferable that the shape of the opening of the recess is also hexagonal. When the opening of the recess is a polygon other than a quadrangle, the width or length of the recess can also be defined as the width or length of one side of the opening of the recess.

スタンプピン20は、硬質な材料で構成される。例えば、セラミックス、超硬、硬質樹脂等が挙げられる。スタンプピンのサイズは、発光素子の大きさ等に応じて適宜変更することができる。 The stamp pin 20 is made of a hard material. For example, ceramics, cemented carbide, hard resin and the like can be mentioned. The size of the stamp pin can be appropriately changed according to the size of the light emitting element and the like.

3)スタンプピンに透光性樹脂を付着させる工程
次に、図4Aに示すように、スタンプピン20に透光性樹脂を付着させる。ダイボンダに備えられた樹脂皿200には、流動性のある未硬化の透光性樹脂40aが保持されている。スタンプピン20を樹脂皿200上に配置し、下降させる。スタンプピン20の先端部22の一部が透光性樹脂40a内に浸かる位置まで下降させる。詳細には、先端部22の凹部23の底面231が浸かる位置まで下降させる。また、透光性樹脂40aを底面231が浸かる程度の厚みとし、樹脂皿200に接触するまでスタンプピンを下降させてもよい。
3) Step of attaching the translucent resin to the stamp pin Next, as shown in FIG. 4A, the translucent resin is attached to the stamp pin 20. A fluid, uncured translucent resin 40a is held in the resin dish 200 provided in the die bonder. The stamp pin 20 is placed on the resin plate 200 and lowered. A part of the tip portion 22 of the stamp pin 20 is lowered to a position where it is immersed in the translucent resin 40a. Specifically, it is lowered to a position where the bottom surface 231 of the recess 23 of the tip portion 22 is immersed. Further, the translucent resin 40a may be thick enough to immerse the bottom surface 231 and the stamp pin may be lowered until it comes into contact with the resin dish 200.

次に、スタンプピン20を上昇させる。スタンプピン20の先端部22には、図4Bに示すように、樹脂皿200内の透光性樹脂40aの一部が付着している。詳細には、凹部23の壁部232の内側面232aに透光性樹脂40aが付着している。透光性樹脂40aは、壁部232の下面232b及び外側面232cにも付着し、さらに、凹部23の底面231にも付着している。 Next, the stamp pin 20 is raised. As shown in FIG. 4B, a part of the translucent resin 40a in the resin dish 200 is attached to the tip portion 22 of the stamp pin 20. Specifically, the translucent resin 40a is attached to the inner side surface 232a of the wall portion 232 of the recess 23. The translucent resin 40a also adheres to the lower surface 232b and the outer surface 232c of the wall portion 232, and further adheres to the bottom surface 231 of the recess 23.

尚、透光性樹脂40aは、少なくとも壁部の内側面に付着していればよい。そのため、例えば、図7Aに示すように、先端部22cの凹部の底面が透光性樹脂40aと接しないように、スタンプピンを降下させてもよい。このような場合は、図7Bに示すように、スタンプピンの先端部22cに付着する透光性樹脂40aの量を、少なくすることができる。 The translucent resin 40a may be attached to at least the inner surface of the wall portion. Therefore, for example, as shown in FIG. 7A, the stamp pin may be lowered so that the bottom surface of the recess of the tip portion 22c does not come into contact with the translucent resin 40a. In such a case, as shown in FIG. 7B, the amount of the translucent resin 40a adhering to the tip portion 22c of the stamp pin can be reduced.

4)スタンプピンから発光素子に透光性樹脂を転写する工程
透光性樹脂40aを付着させたスタンプピン20を、発光素子10の上面の上方に配置させる。詳細には、凹部23の中央と、発光素子10の中央とが略一致するようにスタンプピン20を配置する。さらに、発光素子10の側面10bの外側に壁部232が位置するように配置する。そして、図5Aに示すように、壁部232の一部が発光素子10の上面10aよりも下に位置するまでスタンプピン20を移動させる。その後、スタンプピン20を上昇させることで、図5Bに示すように、壁部232の内側面232aに付着した透光性樹脂40aを発光素子10の側面10bに転写することができる。さらに、発光素子10の上面にも透光性樹脂40aは転写される。尚、図7Bに示すように、透光性樹脂40aが、スタンプピンの凹部の底面に付着していない場合は、発光素子10の側面のみに透光性樹脂40aが転写される。
4) Step of transferring the translucent resin from the stamp pin to the light emitting element The stamp pin 20 to which the translucent resin 40a is attached is arranged above the upper surface of the light emitting element 10. Specifically, the stamp pin 20 is arranged so that the center of the recess 23 and the center of the light emitting element 10 substantially coincide with each other. Further, the wall portion 232 is arranged so as to be located outside the side surface 10b of the light emitting element 10. Then, as shown in FIG. 5A, the stamp pin 20 is moved until a part of the wall portion 232 is located below the upper surface 10a of the light emitting element 10. After that, by raising the stamp pin 20, as shown in FIG. 5B, the translucent resin 40a adhering to the inner side surface 232a of the wall portion 232 can be transferred to the side surface 10b of the light emitting element 10. Further, the translucent resin 40a is also transferred to the upper surface of the light emitting element 10. As shown in FIG. 7B, when the translucent resin 40a is not attached to the bottom surface of the recess of the stamp pin, the translucent resin 40a is transferred only to the side surface of the light emitting element 10.

以上のようにして、発光素子の上面及び側面に透光性樹脂40を形成した後、以下の工程を経て発光装置100を得ることができる。図6に発光装置を得る工程の一例を示す。 After forming the translucent resin 40 on the upper surface and the side surface of the light emitting element as described above, the light emitting device 100 can be obtained through the following steps. FIG. 6 shows an example of a process of obtaining a light emitting device.

図6(a)は、上面及び側面に透光性樹脂40が形成された発光素子10が、シートS1に配置された状態を示す図である。ここでは、発光素子10を2つ並べて配置した状態を示す。発光素子10は、3以上の複数個を配置することができる。また、発光素子10は、等間隔で配置させることが好ましい。 FIG. 6A is a diagram showing a state in which the light emitting element 10 having the translucent resin 40 formed on the upper surface and the side surface is arranged on the sheet S1. Here, a state in which two light emitting elements 10 are arranged side by side is shown. A plurality of three or more light emitting elements 10 can be arranged. Further, it is preferable that the light emitting elements 10 are arranged at equal intervals.

図6(b)は、透光性樹脂40上に、透光性板状部材50を載置した状態を示す図である。透光性板状部材50は、発光素子10の上面10a上に載置される部材であり、発光素子10からの光は透光性板状部材を透過して外部に放出される。透光性樹脂40は、発光素子10と透光性板状部材との接着剤として機能することができる。透光性樹脂を発光素子の上面に形成することで透光性板状部材と発光素子との接着強度を向上させることができる。 FIG. 6B is a diagram showing a state in which the translucent plate-shaped member 50 is placed on the translucent resin 40. The translucent plate-shaped member 50 is a member placed on the upper surface 10a of the light emitting element 10, and the light from the light emitting element 10 is transmitted to the outside through the translucent plate-shaped member. The translucent resin 40 can function as an adhesive between the light emitting element 10 and the translucent plate-shaped member. By forming the translucent resin on the upper surface of the light emitting element, the adhesive strength between the translucent plate-shaped member and the light emitting element can be improved.

図7Bに示すように透光性樹脂をスタンプピンの先端部の凹部の底面に付着させない場合は、透光性樹脂は発光素子の上面には転写されない。そのため、透光性板状部材は発光素子の上面の上に、透光性樹脂を介することなく配置される。透光性樹脂の量は、目的や用途に応じて適宜選択することができる。 When the translucent resin is not attached to the bottom surface of the recess at the tip of the stamp pin as shown in FIG. 7B, the translucent resin is not transferred to the upper surface of the light emitting element. Therefore, the translucent plate-shaped member is arranged on the upper surface of the light emitting element without using a translucent resin. The amount of the translucent resin can be appropriately selected according to the purpose and application.

尚、透光性板状部材50は、便宜上「板状」としているが、シート状、フィルム状、ブロック状など、種々の形状を含む部材を指すものであり、透光性樹脂を接着剤として発光素子の上面に貼り付けられる部材を指す。換言すると、透光性板状部材50は、個体として搬送可能な状態で成形された部材である。 The translucent plate-shaped member 50 is referred to as a "plate-shaped" for convenience, but refers to a member including various shapes such as a sheet-shaped, a film-shaped, and a block-shaped member, and uses a translucent resin as an adhesive. Refers to a member attached to the upper surface of a light emitting element. In other words, the translucent plate-shaped member 50 is a member formed in a state where it can be conveyed as an individual.

透光性樹脂40は、透光性板状部材50を載置する前の段階では未硬化である。そのため、透光性板状部材50を載置する際に、透光性樹脂40を押圧して変形させることができる。これにより図6(b)に示すように、透光性樹脂40の外側面が傾斜した面となる。 The translucent resin 40 is uncured before the translucent plate-shaped member 50 is placed. Therefore, when the translucent plate-shaped member 50 is placed, the translucent resin 40 can be pressed and deformed. As a result, as shown in FIG. 6B, the outer surface of the translucent resin 40 becomes an inclined surface.

透光性板状部材としては、透光性樹脂、ガラス等が使用できる。特に、透光性樹脂が好ましく、シリコーン樹脂、シリコーン変性樹脂、エポキシ樹脂、フェノール樹脂などの熱硬化性樹脂、ポリカーボネート樹脂、アクリル樹脂、メチルペンテン樹脂、ポリノルボルネン樹脂などの熱可塑性樹脂を用いることができる。特に、耐光性、耐熱性に優れるシリコーン樹脂が好適である。 As the translucent plate-shaped member, a translucent resin, glass, or the like can be used. In particular, a translucent resin is preferable, and a thermosetting resin such as a silicone resin, a silicone-modified resin, an epoxy resin, and a phenol resin, and a thermoplastic resin such as a polycarbonate resin, an acrylic resin, a methylpentene resin, and a polynorbornene resin can be used. it can. In particular, a silicone resin having excellent light resistance and heat resistance is preferable.

透光性板状部材は、上記の透光性材料に加え、波長変換部材として蛍光体を含んでもよい。蛍光体は、発光素子からの発光で励起可能なものが使用される。例えば、青色発光素子又は紫外線発光素子で励起可能な蛍光体としては、セリウムで賦活されたイットリウム・アルミニウム・ガーネット系蛍光体(YAG:Ce);セリウムで賦活されたルテチウム・アルミニウム・ガーネット系蛍光体(LAG:Ce);ユウロピウムおよび/又はクロムで賦活された窒素含有アルミノ珪酸カルシウム系蛍光体(CaO−Al−SiO);ユウロピウムで賦活されたシリケート系蛍光体((Sr,Ba)SiO);βサイアロン蛍光体、CASN系蛍光体、SCASN系蛍光体等の窒化物系蛍光体;KSF系蛍光体(KSiF:Mn);硫化物系蛍光体、量子ドット蛍光体などが挙げられる。これらの蛍光体と、青色発光素子又は紫外線発光素子と組み合わせることにより、様々な色の発光装置(例えば白色系の発光装置)を製造することができる。
また、透光性板状部材には、粘度を調整する等の目的で、各種のフィラー等を含有させてもよい。
The translucent plate-shaped member may include a phosphor as a wavelength conversion member in addition to the translucent material described above. As the phosphor, a phosphor that can be excited by light emission from the light emitting element is used. For example, as a phosphor that can be excited by a blue light emitting element or an ultraviolet light emitting element, an yttrium aluminum garnet fluorescent substance (YAG: Ce) activated by cerium; a lutetium aluminum garnet fluorescent substance activated by cerium is used. (LAG: Ce); nitrogen-containing calcium aluminosilicate-based phosphor activated with europium and / or chromium (CaO-Al 2 O 3- SiO 2 ); silicate-based phosphor activated with europium ((Sr, Ba)) 2 SiO 4); β-sialon phosphor, CASN phosphor, nitride-based phosphor such as SCASN phosphor; KSF phosphor (K 2 SiF 6: Mn) ; sulphide phosphor, a quantum dot phosphor And so on. By combining these phosphors with a blue light emitting element or an ultraviolet light emitting element, a light emitting device of various colors (for example, a white light emitting device) can be manufactured.
Further, the translucent plate-shaped member may contain various fillers and the like for the purpose of adjusting the viscosity and the like.

透光性板状部材は、例えば、厚みが50μm〜500μmとすることができる。また、上面視における大きさは、発光素子の上面の面積と略等しい大きさ、又は、それに近似した大きさとすることができる。 The translucent plate-shaped member can have, for example, a thickness of 50 μm to 500 μm. Further, the size in the top view can be a size substantially equal to or an approximate size to the area of the upper surface of the light emitting element.

次に、遮光性部材60を形成する。図6(c)は、発光素子の周囲に遮光性部材60を形成した状態を示す図である。遮光性部材60は、隣接する発光素子の間を充填するように形成される。発光素子の下にも遮光性部材60を形成することが好ましい。また、透光性板状部材50の上面を覆わないように遮光性部材60を形成することが好ましい。さらに、遮光性部材60は、発光素子の側面に形成されている透光性樹脂40の全てを被覆するように形成することが好ましい。 Next, the light-shielding member 60 is formed. FIG. 6C is a diagram showing a state in which a light-shielding member 60 is formed around the light emitting element. The light-shielding member 60 is formed so as to fill the space between adjacent light emitting elements. It is preferable to form the light-shielding member 60 also under the light emitting element. Further, it is preferable to form the light-shielding member 60 so as not to cover the upper surface of the translucent plate-shaped member 50. Further, the light-shielding member 60 is preferably formed so as to cover all of the translucent resin 40 formed on the side surface of the light emitting element.

遮光性部材60は、光反射性の樹脂部材とすることが好ましい。光反射性とは、発光素子からの光に対する反射率が70%以上であること意味する。例えば、遮光性部材60として、白色樹脂などが好ましい。遮光性部材に達した光が反射されて、発光装置の発光面に向かうことにより、発光装置の光取出し効率を高めることができる。 The light-shielding member 60 is preferably a light-reflecting resin member. The light reflectance means that the reflectance with respect to the light from the light emitting element is 70% or more. For example, as the light-shielding member 60, a white resin or the like is preferable. The light that has reached the light-shielding member is reflected and directed toward the light-emitting surface of the light-emitting device, so that the light extraction efficiency of the light-emitting device can be improved.

遮光性部材60は、例えば、シリコーン樹脂、シリコーン変性樹脂、エポキシ樹脂、フェノール樹脂などの熱硬化性樹脂を主成分とする樹脂部材が好ましい。そして、これらの透光性樹脂に、光反射性物質を分散させたものが使用できる。光反射性物質としては、例えば、酸化チタン、酸化ケイ素、酸化ジルコニウム、チタン酸カリウム、酸化アルミニウム、窒化アルミニウム、窒化ホウ素、ムライトなどが好適である。光反射性物質は、粒状、繊維状、薄板片状などが利用できるが、特に、繊維状のものは遮光性部材の熱膨張率を低下させる効果も期待できるので好ましい。 The light-shielding member 60 is preferably a resin member whose main component is a thermosetting resin such as a silicone resin, a silicone-modified resin, an epoxy resin, or a phenol resin. Then, those in which a light-reflecting substance is dispersed in these translucent resins can be used. As the light-reflecting substance, for example, titanium oxide, silicon oxide, zirconium oxide, potassium titanate, aluminum oxide, aluminum nitride, boron nitride, mullite and the like are suitable. As the light-reflecting substance, granular, fibrous, thin plate pieces and the like can be used, but the fibrous material is particularly preferable because it can be expected to have an effect of reducing the coefficient of thermal expansion of the light-shielding member.

遮光性部材60を硬化後、発光素子間の遮光性部材60を切断することで、図6(d)に示すよな、個片化された発光装置100を得ることができる。尚、切断する際にシートS1の一部又は全部を切断してもよい。 By curing the light-shielding member 60 and then cutting the light-shielding member 60 between the light-emitting elements, it is possible to obtain an individualized light-emitting device 100 as shown in FIG. 6 (d). When cutting, a part or all of the sheet S1 may be cut.

本発明に係る発光装置の製造方法は、発光素子上に未硬化の樹脂を形成する工程を備える発光装置の製造方法において適用することができる。 The method for manufacturing a light emitting device according to the present invention can be applied to a method for manufacturing a light emitting device including a step of forming an uncured resin on a light emitting element.

10…発光素子
11…積層構造体
12…電極
10a…発光素子の上面(光取り出し面)
10b…発光素子の側面
10c…発光素子の下面(電極の下面)
10d…積層構造体の下面(電極形成面)
Wc…発光素子の幅
Lc…発光素子の長さ
Hc…発光素子の高さ
20…スタンプピン
21…本体部
22、22A、22B、22C…先端部
23…凹部
231…凹部の底面
232…凹部の壁部
233…凹部の開口部
232a…壁部の内側面
232b…壁部の下面
232c…壁部の外側面
Wp…端面の幅
Lp…端面の長さ
Wr…凹部の開口部の幅
Lr…凹部の開口部の長さ
Hr…凹部の壁部の高さ
100…発光装置
40、40a…透光性樹脂
50…透光性板状部材
60…遮光性部材
200…樹脂皿
S1…シート
10 ... Light emitting element 11 ... Laminated structure 12 ... Electrode 10a ... Upper surface of light emitting element (light extraction surface)
10b ... Side surface of light emitting element 10c ... Lower surface of light emitting element (lower surface of electrode)
10d ... Lower surface of the laminated structure (electrode forming surface)
Wc ... Width of light emitting element Lc ... Length of light emitting element Hc ... Height of light emitting element 20 ... Stamp pin 21 ... Main body 22, 22A, 22B, 22C ... Tip 23 ... Recess 231 ... Bottom of recess 232 ... Recess Wall part 233 ... Recessed opening 232a ... Inner surface of wall 232b ... Lower surface of wall 232c ... Outer surface of wall Wp ... End face width Lp ... End face length Wr ... Recessed opening width Lr ... Recessed Length of opening Hr ... Height of wall of recess 100 ... Light emitting device 40, 40a ... Translucent resin 50 ... Translucent plate-like member 60 ... Light-shielding member 200 ... Resin plate S1 ... Sheet

Claims (3)

発光素子を準備する工程と、
前記発光素子の幅よりも広い幅の開口部と、底面と、壁部と、を備えた凹部を先端に有するスタンプピンを準備する工程と、
前記壁部の内側面に流動性のある未硬化の透光性樹脂を付着させる工程と、
前記発光素子の上面の上方に前記スタンプピンの前記凹部の開口部を配置し、かつ、前記発光素子の側面よりも外側に前記壁部の内側面を配置し、前記壁部の一部を前記発光素子の上面より下に位置するまで移動させて、前記壁部の内側面に付着した流動性のある未硬化の透光性樹脂を前記発光素子の側面に転写する工程と、
を備える発光装置の製造方法。
The process of preparing the light emitting element and
A step of preparing a stamp pin having a recess at the tip having an opening having a width wider than the width of the light emitting element, a bottom surface, and a wall portion.
A step of adhering a fluid uncured translucent resin to the inner surface of the wall portion, and
The opening of the recess of the stamp pin is arranged above the upper surface of the light emitting element, and the inner surface of the wall portion is arranged outside the side surface of the light emitting element, and a part of the wall portion is described. A step of moving the light emitting element to a position below the upper surface of the light emitting element and transferring the fluid uncured translucent resin adhering to the inner surface of the wall portion to the side surface of the light emitting element.
A method of manufacturing a light emitting device comprising.
前記透光性樹脂は、前記凹部の前記底面に付着される請求項1記載の発光装置の製造方法。 The method for manufacturing a light emitting device according to claim 1, wherein the translucent resin is attached to the bottom surface of the recess. 前記発光素子の上面の上に、透光性板状部材を配置させた後、前記透光性樹脂を被覆する遮光性部材を形成する工程を備える請求項1又は請求項2記載の発光装置の製造方法。 The light emitting device according to claim 1 or 2, further comprising a step of arranging a translucent plate-shaped member on the upper surface of the light emitting element and then forming a light-shielding member covering the translucent resin. Production method.
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