JP6820540B2 - Displacement visualization sensor, displacement visualization method, and displacement visualization system - Google Patents

Description

The present invention provides a displacement visualization sensor, a displacement visualization method, and a displacement visualization system that visualizes displacements that occur in a measurement object including a natural structure provided with infrastructure equipment or an artificial structure such as an infrastructure equipment or a high-rise building. Regarding.

In recent years, there have been many accidents in infrastructure equipment that are thought to have been caused by aging and insufficient inspections. For this reason, it is required to build a safe and secure management system for infrastructure equipment, and in particular, it is required to establish inspection technology and repair technology for aging infrastructure equipment. As a technology for inspecting aging infrastructure equipment, a technology is known in which information on displacement occurring in the infrastructure equipment is sent by communication from a sensor installed in the infrastructure equipment and constantly analyzed, but such a technology is expensive. Therefore, it is expected to develop a technology that enables low-cost and highly accurate displacement measurement and makes it easy to visually understand the occurrence of displacement. In addition, recently, there has been a problem that high-rise buildings are tilted due to imperfections in construction. It is also expected to develop a technology that can measure the displacement caused by the inclination of a high-rise building at a lower cost and with high accuracy, and can judge the occurrence of the displacement visually and easily.

As technologies that are expected to be developed, for example, Patent Document 1 states that when a natural structure in which infrastructure equipment is provided or an artificial structure such as an infrastructure equipment or a high-rise building is deformed, the amount of displacement is increased. A structure deformation detection device that displays a displacement amount by changing the intensity and color of light visually recognized from a display window in conjunction with this is disclosed. Further, in Patent Document 2, a pair of substrates each having a pattern region on which a stripe pattern (line and space pattern) is formed are arranged in parallel with a predetermined interval so that the pattern regions overlap. Displacement amount display device fixed to the object to be measured is disclosed. In this displacement amount display device, the pair of substrates move in the parallel direction according to the displacement amount when the object to be measured is deformed, so that the moire fringes generated by the interference of the patterns of both substrates move, and the moire fringes move. It is possible to measure the amount of displacement from the amount.

However, since the device disclosed in Patent Document 1 merely displays the relative displacement between two points in the structure as the displacement amount, the displacement generated in the structure is the displacement in the linear direction or the axial rotation. It is difficult to determine whether it is a displacement of. Further, since the device disclosed in Patent Document 2 only measures the displacement amount at the interval between two points in the measurement object as the displacement amount, is the measurement object displaced in the linear direction? It is difficult to determine if axial displacement has occurred.

Japanese Patent No. 5607185 Japanese Unexamined Patent Publication No. 2012-247229

The present invention has been made in view of the above problems, and only the displacement in the linear direction of a measurement object including a natural structure in which an infrastructure facility is provided or an artificial structure such as an infrastructure facility or a high-rise building is provided. Rather, the main purpose is to provide a displacement visualization sensor, a displacement visualization method, and a displacement visualization system capable of visualizing the displacement around the axis including its direction and magnitude.

In order to solve the above problems, the present invention has a colored pattern board having a colored pattern that repeats according to a certain rule, and a light-shielding pattern board having a light-shielding pattern and a light-transmitting pattern that repeats according to the fixed rule. The plate and the light-shielding pattern plate are arranged so as to be stacked so that the light-shielding pattern plate is on the observer side, and the colored pattern plate and the light-shielding pattern plate are the surface of the colored pattern plate on the colored pattern side or the light-shielding pattern. It is relatively movable in the first direction or the second direction along the surface of the plate on the light-shielding pattern side, and is about a third direction intersecting the surface including the first direction and the second direction. It is relatively rotatable, and with the relative movement of the colored pattern plate and the light-shielding pattern plate, a change in the colored pattern that is visually recognized from the observer side via the light transmission pattern occurs, and the above Due to the change in the coloring pattern, the displacement of the relative position of the light-shielding pattern plate with respect to the coloring pattern plate in the first direction or the second direction is displayed, and the relative of the coloring pattern plate and the light-shielding pattern plate is displayed. Moire occurs when the shielding pattern visually recognized from the observer side and the coloring pattern visually recognized from the observer side via the light transmission pattern are combined with each other, and the moire causes the moire. Provided is a displacement visualization sensor characterized by displaying the axial displacement of the light-shielding pattern plate relative to the colored pattern plate in the third direction.

According to the present invention, it is possible to visualize not only the displacement in the linear direction but also the displacement around the axis of the object to be measured including the direction and the magnitude.

Further, in the above invention, it is preferable that the color of the coloring pattern and the color of the light-shielding pattern are different. This is because the displacement of the relative position can be clearly displayed.

Further, in the above invention, the colored pattern board has a colored layer on one surface of the substrate and the substrate, the colored layer has the colored pattern, and the light-shielding pattern board is a transparent substrate and the transparent. A light-shielding layer may be provided on one surface of the substrate, and the light-shielding layer may have the light-shielding pattern.

Further, in the above invention, the colored pattern board has a plurality of the colored patterns, the plurality of colored patterns have a first colored pattern and a second colored pattern, and the first colored pattern and the second colored pattern are used. Colors may be different. This is because the magnitude of the displacement in the linear direction can be measured by the color change that is easily visually discriminated.

Further, in the above invention, it is preferable that the colored pattern plate has flexibility. This is because the displacement visualization sensor can be used for measuring changes in the surface shape of the object to be measured over time.

Further, in the above invention, the colored pattern plate has a plurality of colored pattern regions, the plurality of colored pattern regions have the above colored patterns, and the light-shielding pattern plate has the plurality of colored pattern regions. The plurality of light-shielding pattern regions each have a plurality of overlapping light-shielding pattern regions, the plurality of light-shielding pattern regions each have the above-mentioned light-shielding pattern and the light transmission pattern, and the plurality of colored pattern regions have different resolutions and overlap with each other. It is preferable that the regions have the same resolution. This is because the magnitude of the displacement can be measured in detail.

Further, in the above invention, a symbol is provided on the colored pattern plate, and a light transmitting window capable of visually recognizing the symbol is provided on the light-shielding pattern plate, and the relative movement or movement of the colored pattern plate and the light-shielding pattern plate is performed. It is preferable that the display and non-display of the symbol visually recognized from the observer side through the light transmitting window are switched with the rotation. Even when the magnitude of the displacement in the first direction or the second direction is equal to or greater than the width or pitch p of the coloring pattern, the above-mentioned symbols are displayed and hidden, and the above-mentioned coloring pattern changes. This is because the displacement in the first direction or the second direction can be measured.

Further, in the above invention, it is preferable that the colored pattern plate is provided with a plurality of the symbols and the light transmitting windows are provided with the light-shielding pattern plate. This is because the center of rotation of the axial displacement in the third direction and the axial displacement in the third direction can be obtained from the display / non-display switching of the plurality of symbols that can be easily visually distinguished. is there.

Further, in the present invention, a colored pattern plate having a colored pattern that repeats according to a certain rule, a light-shielding pattern plate having a light-shielding pattern and a light-transmitting pattern that repeats according to the fixed rule, and the colored pattern plate and the light-shielding pattern plate are rotated with each other. The colored pattern plate and the light-shielding pattern plate are arranged so as to have a rotating shaft portion that can be connected so that the light-shielding pattern plate is on the observer side, and the colored pattern plate and the light-shielding pattern plate are arranged. With the relative rotation around the rotation axis portion, the shielding pattern visually recognized from the observer side and the coloring pattern visually recognized from the observer side via the light transmission pattern are combined. As a result, moire is generated, and the moire provides a displacement visualization sensor characterized by displaying the axial displacement of the rotation shaft portion at a position relative to the colored pattern plate.

According to the present invention, it is possible to visualize the displacement around the axis of the object to be measured including its direction and magnitude.

Further, in the above invention, it is preferable that the center of gravity of the light-shielding pattern plate is different from the position where the light-shielding pattern plate is connected to the colored pattern plate by the rotation shaft portion. This is because the inclination of the measurement region on the wall surface of the displacement visualization object with respect to the ground around the axis in the third direction can be visualized without fixing the light-shielding pattern plate to the ground.

Further, in the above invention, a symbol is provided on the colored pattern plate, and a light transmitting window capable of visually recognizing the symbol is provided on the light-shielding pattern plate, and the relative movement or movement of the colored pattern plate and the light-shielding pattern plate is performed. It is preferable that the display and non-display of the symbol visually recognized from the observer side through the light transmitting window are switched with the rotation. This is because the displacement around the axis in the Z direction can be measured by switching the display and non-display of the symbol, which is easy to visually distinguish.

Further, in the above invention, the colored pattern plate or the frame surrounding the outer periphery of the light-shielding pattern plate is further provided, and the difference in the coefficient of thermal expansion between the frame and the measurement object is different from that of the colored pattern plate or the light-shielding pattern plate. It is preferably smaller than the difference in coefficient of thermal expansion from the object to be measured. When visualizing or measuring the displacement of the second position relative to the first position of the measurement object, the influence of the difference in the coefficient of thermal expansion between the measurement object and the colored pattern plate or the light-shielding pattern plate is observed. This is because it can be suppressed.

Further, in the above invention, it is preferable that the colored pattern plate or the light-shielding pattern plate is provided with an adhesive layer on one side. This is because when the displacement in the measurement object is visualized or measured, the influence of the difference in the coefficient of thermal expansion between the measurement object and the colored pattern plate can be suppressed.

Further, in the present invention, the above-mentioned measurement is performed after the coloring pattern plate arranging step of fixing and arranging the coloring pattern plate having the coloring pattern repeated according to a certain rule at the first position of the measurement object and the coloring pattern plate arranging step. When visualizing the displacement of the relative position of the second position with respect to the first position of the object, the light-shielding pattern plate having the light-shielding pattern and the light transmission pattern repeated according to the above-mentioned constant rule is superposed on the colored pattern plate to be measured. The light-shielding pattern plate arranging step of fixing and arranging the second position, the change of the coloring pattern visually recognized through the light transmission pattern, or the coloring visually recognized through the light-shielding pattern and the light transmission pattern. Displacement visualization characterized by having a displacement visualization step of observing moire generated by matching with a pattern and visualizing the displacement of the position relative to the first position of the measurement object with respect to the first position. Provide a method.

According to the present invention, the displacement can be concealed by a person other than the observer at a time other than when the displacement of the position relative to the first position of the measurement object is visualized.

Further, in the present invention, the displacement visualization sensor, the imaging device that captures the shielding pattern and the coloring pattern that is visually recognized via the light transmission pattern, and the analysis that analyzes the image captured by the imaging device. Provided is a displacement visualization system characterized by having an apparatus.

According to the present invention, it is possible to visualize not only the displacement in the linear direction but also the displacement around the axis of the object to be measured including the direction and the magnitude.

According to the present invention, with respect to a measurement object including a natural structure in which an infrastructure facility is provided or an artificial structure such as an infrastructure facility or a high-rise building, not only a linear displacement but also an axial displacement is determined in that direction and. Displacement visualization sensors, displacement visualization methods, and displacement visualization systems that can be visualized including size can be provided.

It is the schematic which shows an example of the displacement visualization sensor of 1st Embodiment. It is a schematic top view which shows the 1st position and the 2nd position of the measurement object which fixed the colored pattern plate and the light-shielding pattern plate shown in FIG. 1, respectively. It is a schematic diagram which shows the colored pattern board shown in FIG. It is the schematic which shows the light-shielding pattern plate shown in FIG. It is a schematic diagram which shows the displacement visualization sensor shown in FIG. 1 in the initial state in which the displacement of the position relative to the 1st position of the measurement object does not occur. It is a schematic diagram which shows the displacement visualization sensor shown in FIG. 1 in the state where the displacement of 0.07% in the X direction of the position relative to the 1st position of the measurement object is generated. It shows how the display of the displacement visualization sensor shown in FIG. 1 changes as the displacement of the position relative to the first position of the measurement object in the Z direction occurs and becomes larger. It is a schematic top view. It shows how the display of the displacement visualization sensor shown in FIG. 1 changes as the displacement of the position relative to the first position of the measurement object in the Z direction occurs and becomes larger. It is a schematic top view. It is the schematic which shows the colored pattern board in another example of the displacement visualization sensor of 1st Embodiment. It is the schematic which shows the light-shielding pattern plate in another example of the displacement visualization sensor of 1st Embodiment. It is a schematic top view which shows another example of the displacement visualization sensor of 1st Embodiment. It is a schematic top view which shows another example of the displacement visualization sensor of 1st Embodiment. It is the schematic which shows another example of the displacement visualization sensor of 1st Embodiment. FIG. 3 is a schematic top view showing a displacement visualization sensor shown in FIG. 13 for each different displacement amount in the X direction of a position relative to a first position of a measurement object with respect to a first position. It is a photograph which shows the change of the moire which occurs in another example of the displacement visualization sensor of 1st Embodiment. It is the schematic which shows another example of the displacement visualization sensor of 1st Embodiment. It is the schematic which shows another example of the displacement visualization sensor of 1st Embodiment. It is the schematic which shows another example of the displacement visualization sensor of 1st Embodiment. It is the schematic which shows another example of the displacement visualization sensor of 1st Embodiment. It is a schematic top view which shows another example of the displacement visualization sensor of 1st Embodiment. It is a schematic top view showing the displacement visualization sensor shown in FIG. 20A in the state where the displacement of the position relative to the first position of the measurement object at the second position in the X direction occurs. It is a schematic top view showing the displacement visualization sensor shown in FIG. 20A in the state where the displacement of the position relative to the first position of the measurement object at the second position in the X direction occurs. It is the schematic which shows another example of the displacement visualization sensor of 1st Embodiment. In the displacement visualization sensor shown in FIG. 23, it is a schematic top view showing an observation region in which moire in which the intersection of the light-shielding line pattern and the colored line pattern is striped is observed when viewed in a plan view from the Z direction. It is the schematic which shows another example of the displacement visualization sensor of 1st Embodiment. It is a schematic top view which shows an example of the displacement visualization sensor of the 2nd Embodiment in the state which the measurement object is inclined relative to the axis in the Z direction with respect to a reference structure. A schematic showing how the display of the displacement visualization sensor shown in FIG. 26 changes as the light-shielding pattern plate rotates relative to the colored pattern plate around the axis in the Z direction with the rotation shaft member as the center of rotation. It is a top view. FIG. 5 is a schematic top view showing another example of the displacement visualization sensor of the second embodiment in a state where the measurement region on the wall surface of the measurement object is inclined relative to the ground in the Z direction. It is the schematic which shows an example of the displacement visualization system of this invention.

Hereinafter, the displacement visualization sensor, the displacement visualization method, and the displacement visualization system of the present invention will be described in detail.

A. Displacement visualization sensor The displacement visualization sensor of the present invention has a colored pattern plate and a light-shielding pattern plate, and both plates are arranged so as to be on the observer side so that the light-shielding pattern plate is on the observer side. The displacement visualization sensor of the present invention has the first embodiment of measuring the displacement of the relative position of the light-shielding pattern plate with respect to the colored pattern plate, and the colored pattern plate having a rotation shaft portion connecting both plates as a rotation center. It can be roughly classified into the second embodiment in which the displacement around the axis of the relative position of the light-shielding pattern plate is visualized.

Here, in the present invention, "displacement of the relative position of the light-shielding pattern plate with respect to the colored pattern plate" means a large direction and distance of the light-shielding pattern plate moving relative to the colored pattern plate. Means Further, in the following, "displacement of the relative position of the second position of the measurement object to which the light-shielding pattern plate is fixed" is defined as "displacement of the second position of the measurement object to which the light-shielding pattern plate is fixed". It means the same content as "displacement of the relative position of the light-shielding pattern plate with respect to the colored pattern plate". Then, "displacement of the position relative to the first position of the measurement object" means the direction and distance that the second position of the measurement object moves relative to the first position. means.

I. First Embodiment The displacement visualization sensor of the first embodiment includes a colored pattern plate having a colored pattern that repeats according to a certain rule, and a light-shielding pattern plate having a light-shielding pattern and a light transmission pattern that repeats according to the fixed rule. The colored pattern plate and the light-shielding pattern plate are arranged so as to be stacked so that the light-shielding pattern plate is on the observer side, and the colored pattern plate and the light-shielding pattern plate are the surface of the colored pattern plate on the colored pattern side or the above. A third direction that is relatively movable in the first direction or the second direction along the surface of the light-shielding pattern plate on the light-shielding pattern side and intersects the surface including the first direction and the second direction. It is relatively rotatable as an axis, and as the relative movement of the colored pattern plate and the light-shielding pattern plate causes a change in the colored pattern that is visually recognized from the observer side via the light transmission pattern. By the change of the colored pattern, the displacement of the relative position of the light-shielding pattern plate with respect to the colored pattern plate in the first direction or the second direction is displayed, and the colored pattern plate and the light-shielding pattern plate are displayed. Along with the relative rotation, the moire is generated by combining the shielding pattern visually recognized from the observer side and the coloring pattern visually recognized from the observer side via the light transmission pattern, and the moire is generated. Therefore, the axial displacement of the position of the light-shielding pattern plate relative to the colored pattern plate in the third direction is displayed.

Further, in the first embodiment, the "first direction" and the "second direction" are different from each other along the surface of the colored pattern plate on the colored pattern side or the surface of the light-shielding pattern plate on the light-shielding pattern side. The first direction and the second direction are not particularly limited, and examples thereof include the X and Y directions orthogonal to each other in the XY plane parallel to the surface of the colored pattern plate on the colored pattern side. Be done. The "third direction" is not particularly limited as long as it is a third direction intersecting the plane including the first direction and the second direction, but is, for example, perpendicular to the XY plane. The Z direction can be mentioned.

In the following, the X direction and the Y direction are used as specific examples of the first direction and the second direction, respectively, and the Z direction is used as a specific example of the third direction of the first embodiment. The displacement visualization sensor will be described. Further, as an embodiment in which the displacement visualization sensor is visually recognized from the observer side, the displacement visualization sensor of the first embodiment will be described by using an embodiment in which the displacement visualization sensor is viewed in a plan view from the observer side in the Z direction.
In the following description, the "XY plane" means the XY plane, the "X direction" and the "Y direction" mean the X direction and the Y direction, respectively, and the "Z direction" means. , Means the Z direction. Further, the "-X direction" means the direction opposite to the X direction, the "-Y direction" means the direction opposite to the Y direction, and the "-Z direction" means the opposite direction to the Z direction. Means the direction of. Further, "planar view from the Z direction" means that the displacement visualization sensor is viewed in a plan view from the observer side in the Z direction. In addition, the following are specific numerical values as dimensions such as distance between positions, pattern width and pitch p, dot diameter and pitch p, substrate thickness, layer width, thickness, and spacing, and displacement. Although there is a place where the displacement visualization sensor of the first embodiment is described using the above, the displacement visualization sensor of the first embodiment is limited to those in which these specific numerical values are used as the above dimensions. However, the above dimensions can be adjusted as appropriate.

An example of the displacement visualization sensor of the first embodiment will be described with reference to the drawings. FIG. 1A is a schematic top view showing an example of the displacement visualization sensor of the first embodiment. FIG. 1B is a cross-sectional view taken along the line AA of FIG. 1A. FIG. 2 is a schematic top view showing the first position and the second position of the measurement object to which the colored pattern plate and the light-shielding pattern plate shown in FIG. 1 are fixed, respectively. 3A is a schematic top view showing the colored pattern plate shown in FIG. 1, FIG. 3B is an enlarged view of a portion B of FIG. 3A, and FIG. 3C is FIG. It is sectional drawing of BB line of (b). 4 (a) is a schematic top view showing a light-shielding pattern plate shown in FIG. 1, FIG. 4 (b) is an enlarged view of a portion C of FIG. 4 (a), and FIG. 4 (c) is FIG. It is a cross-sectional view taken along the line CC of (b).

The displacement visualization sensor 10 shown in FIG. 1 has a colored pattern plate 20 and a light-shielding pattern plate 30. Further, the displacement visualization sensor 10 further includes a first metal frame 40a and a second metal frame 40b that reinforce the colored pattern plate 20 and the light-shielding pattern plate 30, respectively. As shown in FIGS. 1 and 2, the colored pattern plate 20 is fixed to the first position 2a of the iron measurement object 2 by the adhesive layer 60 via the first metal frame 40a. Further, the light-shielding pattern plate 30 is fixed to the second position 2b of the measurement object 2 by the adhesive layer 60 via the second metal frame 40b. As a result, the displacement visualization sensor 10 is installed on the measurement object 2. Further, the distance x in the X direction between the first position 2a and the second position 2b of the measurement object 2 is 100 mm.

In the displacement visualization sensor 10, the colored pattern plate 20 and the light-shielding pattern plate 30 are laminated in parallel so that the colored pattern plate 20 is on the measurement target side and the light-shielding pattern plate 30 is on the observer side. Further, the colored pattern plate 20 and the light-shielding pattern plate 30 are laminated so as to be relatively movable in the X direction and the Y direction and relatively rotatable about the Z direction.

As shown in FIGS. 3 (a) to 3 (c), in the colored pattern plate 20, a plurality of linear red colored layers 24 having a width of L1 in the X direction are spaced by S1 in the X direction. It is provided on the substrate 22 so as to extend in the Y direction. As a result, when viewed in a plan view from the Z direction, the width in the X direction consisting of the colored line pattern 20L having the width of the red colored layer 24 in the X direction as L1 and the unformed region of the red colored layer 24 on the substrate 22 is S1. A line-and-space pattern is provided in which the gap space pattern 20S is alternately repeated. The widths L1 and S1 in the X direction are 70 μm and 80 μm, respectively.

Further, as shown in FIGS. 4A to 4C, in the light-shielding pattern plate 30, a plurality of linear light-shielding layers 34 having a width in the X direction of L2 are spaced apart from each other in the width S2 in the X direction. It is provided on the transparent substrate 32 so as to extend in the Y direction with a gap. As a result, when viewed in a plan view from the Z direction, the width in the X direction of the light-shielding layer 34 is defined as L2, and the width of the light-shielding layer 34 on the transparent substrate 32 is defined as S2. A line-and-space pattern is provided in which the light transmitting space pattern 30S is alternately repeated. The widths L2 and S2 in the X direction are 70 μm and 80 μm, respectively, which are the same as the widths L1 and S1 in the X direction.

Here, FIG. 5A is a schematic top view showing the displacement visualization sensor shown in FIG. 1 in the initial state in which the displacement of the position relative to the first position of the measurement object does not occur. 5 (b) is an enlarged view of the D portion of FIG. 5 (a), and FIG. 5 (c) is a sectional view taken along line DD of FIG. 5 (b). Further, FIG. 6A is a schematic top view showing the displacement visualization sensor shown in FIG. 1 in a state where the displacement of 70 μm in the X direction of the position relative to the first position of the measurement object is generated. Is. 6 (b) is an enlarged view of the E portion of FIG. 6 (a), and FIG. 6 (c) is a sectional view taken along line EE of FIG. 6 (b).

In the initial state in which the relative position of the second position 2b with respect to the first position 2a of the measurement object 2 is not displaced, as shown in FIGS. 5A to 5C, the shading line pattern 30L As a result of the light transmission space pattern 30S being arranged in the same region as the colored line pattern 20L and the gap space pattern 20S on the XY plane, the entire width L1 of the colored line pattern 20L in the X direction when viewed in a plan view from the Z direction. Is shielded by the light-shielding line pattern 30L, so that the colored line pattern 20L is not visible through the light transmission space pattern 30S.

On the other hand, as shown by the solid arrow in FIG. 2, when the displacement of the magnitude dx in the X direction occurs at the position relative to the first position 2a of the measurement object 2 with respect to the second position 2b, The relative position of the second position 2b with respect to the first position 2a of the measurement object 2 moves by dx in the X direction from the position in the initial state. As a result, as shown in FIGS. 6A to 6C, the light-shielding pattern plate 30 fixed to the second position 2b of the measurement object 2 is fixed to the first position 2a of the measurement object 2. It will move by dx in the X direction with respect to the colored pattern plate 20. That is, as shown by the solid arrow in FIG. 6C, the shading line pattern 30L moves in the X direction by dx relative to the same region as the colored line pattern 20L on the XY plane.

On the other hand, the width L2 in the X direction of the shading line pattern 30L and the width L1 in the X direction of the colored line pattern 20L are both 70 μm. Therefore, as described above, when the distance dx that the light-shielding line pattern 30L moves in the X direction relative to the same region as the colored line pattern 20L on the XY plane is 70 μm, the initial displacement does not occur. In the state, the entire width L1 of the colored line pattern 20L in the X direction, which is shielded by the light-shielding line pattern 30L when viewed in a plan view from the Z direction, is visually recognized via the light transmission space pattern 30S.

Therefore, by using the displacement visualization sensor 10 shown in FIG. 1, in the initial state in which the displacement does not occur, the colored line pattern 20L is entirely shielded by the light-shielding line pattern 30L in a plan view from the Z direction in the X direction. Of the width L1, the length that is visually recognized through the light transmission space pattern 30S is the magnitude of the displacement of the position of the second position 2b relative to the first position 2a of the measurement object 2 in the X direction. It can be measured as dx.

From the magnitude dx of the displacement in the X direction thus obtained and the distance x (100 mm) in the X direction between the first position 2a and the second position 2b of the measurement object 2, the first measurement object 2 is the first. The strain εx in the X direction between the position 2a and the second position 2b can be obtained by the following equation (1). In particular, when the entire width L1 of the colored line pattern 20L in the X direction is visually recognized via the light transmission space pattern 30S, the width L1 (70 μm) is measured as the displacement magnitude dx. As a result, the strain εx is determined to be 0.07% so that the iron measurement object 2 can yield.

Subsequently, FIGS. 7 (a) to 8 (b) show FIGS. 7 (a) to 8 (b) as the relative position of the second position with respect to the first position of the measurement object is displaced around the axis in the Z direction and becomes larger. It is a schematic top view which shows how the display of the displacement visualization sensor shown in 1 changes.

In the initial state in which the relative position of the second position 2b with respect to the first position 2a of the measurement object 2 is not displaced, as shown in FIG. 7A, the light-shielding line pattern 30L and the light transmission space pattern 30S However, as a result of being arranged in the same region as the colored line pattern 20L and the gap space pattern 20S on the XY plane, the entire colored line pattern 20L is shielded by the shading line pattern 30L when viewed from the Z direction. Moire does not occur when the line pattern 30L and the colored line pattern 20L visually recognized via the light transmission space pattern 30S are combined.

On the other hand, as shown by the arrow of the broken line in FIG. 2, the rotation angle α ° in the θ direction around the axis of the Z direction of the relative position of the second position 2b with respect to the first position 2a of the measurement object 2. When the displacement of the above occurs, as shown in FIG. 7B, the light-shielding pattern plate 30 fixed to the second position 2b of the measurement object 2 is colored fixed to the first position 2a of the measurement object 2. The pattern plate 20 is rotated by α ° in the θ direction about the axis in the Z direction indicated by the arrow of the broken line. As a result, the colored line pattern 20L is tilted by α ° with respect to the shading line pattern 30L parallel to the Y direction in the XY plane. Therefore, when viewed in a plan view from the Z direction, each of the plurality of light transmission space patterns 30S parallel to the Y direction is formed. Through this, a plurality of colored line patterns 20L can be visually recognized. As a result, moire in which the intersections of the plurality of light-shielding line patterns 30L and the plurality of colored line patterns 20L are striped is observed.

Further, as the rotation angle α ° of the displacement in the θ direction around the axis in the Z direction increases, as shown in FIGS. 8A to 8B, the colored line pattern 20L is Y in the XY plane. As a result of the increase in the tilt angle α ° with respect to the light-shielding line pattern 30L parallel to the direction, the coloring line visually recognized through each of the plurality of light transmission space patterns 30S parallel to the Y direction when viewed in a plan view from the Z direction. The number of patterns 20L increases. As a result, the number of intersections between the plurality of light-shielding line patterns 30L and the plurality of colored line patterns 20L increases, so that the number of moire stripes increases and the pitch P of the moire stripes decreases.

Therefore, by using the displacement visualization sensor 10 shown in FIG. 1, moire in which the intersection of the plurality of light-shielding line patterns 30L and the plurality of colored line patterns 20L is striped is observed in a plan view from the Z direction. Therefore, it is possible to visualize that the displacement of the relative position of the second position 2b with respect to the first position 2a of the measurement object 2 in the Z direction has occurred.

Further, the direction of the axial displacement in the Z direction can be obtained from the direction in which the light-shielding line pattern 30L is tilted with respect to the colored line pattern 20L. Further, the relationship of the following equation (2) is established for the pitch p (150 μm) of the line and space pattern, the pitch P of the moiré stripes, and the rotation angle α ° of the displacement around the axis in the Z direction. Therefore, if the pitch P of the moiré fringes is measured, the rotation angle α ° of the displacement around the axis in the Z direction can be obtained by the following equation (2).

As described above, according to the displacement visualization sensor of the first embodiment, the change of the coloring pattern visually recognized through the light transmission pattern causes the relative position of the second position to be relative to the first position of the measurement object. The displacement of the position in the X direction or the Y direction is displayed, and the moire generated by combining the shielding pattern and the coloring pattern visually recognized through the light transmission pattern causes the first position of the measurement object to be measured. The displacement of the relative positions of the two positions around the axis in the Z direction can be displayed. In particular, depending on the mode of the colored pattern plate and the light-shielding pattern plate, the direction and magnitude of the axial displacement in the Z direction can be displayed. Therefore, it is possible to visualize not only the displacement in the linear direction but also the displacement around the axis of the measurement object including its direction and magnitude.
In the displacement visualization sensor of the first embodiment, as specific examples of the first direction and the second direction, a direction other than the X direction and a direction other than the Y direction are used, respectively, and the specific direction of the third direction is specified. Even if a direction other than the Z direction is used as an example, the same effect can be obtained. Further, even if the displacement visualization sensor is visually viewed from the observer side in a direction other than the Z direction instead of being viewed in a plan view from the observer side in the Z direction, the same effect can be obtained.

Hereinafter, each configuration of the displacement visualization sensor of the first embodiment will be described.

1. 1. Colored pattern board The colored pattern board has a colored pattern and a gap pattern that repeats according to a certain rule, or has a colored pattern that repeats according to a fixed rule. Here, in the first embodiment, the "colored pattern" means a colored pattern, the "gap pattern" means a pattern of a portion where a colored pattern is not provided, and even an uncolored pattern is used. It may be a pattern colored with a color different from the colored pattern.

(1) Colored pattern and gap pattern The colored pattern and the gap pattern are repeated according to the constant rule. The colored pattern plate is viewed in a plan view and repeated according to the constant rule, and the relative of the colored pattern plate and the light-shielding pattern plate. Along with the movement, a change in the coloring pattern that is visually recognized through the light transmission pattern occurs in a plan view from the Z direction, and the change in the coloring pattern causes a second position with respect to the first position of the measurement object. It is a pattern that can display the displacement of the relative position of the above in the X direction or the Y direction, and with the relative rotation of the colored pattern plate and the light shielding pattern plate, the shielding is viewed in a plan view from the Z direction. Moire occurs when the pattern and the coloring pattern visually recognized via the light transmission pattern are combined, and the moire causes the axis of the position relative to the first position of the measurement object in the Z direction. The pattern is not particularly limited as long as it can display the rotational displacement, and examples thereof include a line-and-space pattern and a dot pattern. Hereinafter, the line-and-space pattern and the dot pattern will be described in detail.

a. Line-and-space pattern In the line-and-space pattern, a linear colored line pattern having a constant width and a linear gap space pattern having a constant width are alternately repeated in a plan view of the colored pattern plate. In the line-and-space pattern, the pattern in which the colored line pattern is repeated is the colored pattern, and the pattern in which the gap space pattern is repeated is the gap pattern.

In the line-and-space pattern, in order to generate moire by combining the shielding pattern and the coloring pattern visually recognized via the light transmission pattern, the light transmission pattern is viewed in a plan view from the Z direction. It is preferable that the width of the gap space pattern is 10% or more of the pitch p so that the coloring pattern can be visually recognized. The width and pitch p of the colored line pattern vary depending on the size of the colored pattern plate. For example, when the width in the X direction × the width in the Y direction of the colored pattern plate is 100 mm × 100 mm. The width of the colored line pattern is preferably 45,000 μm or less, and the pitch p is preferably 50,000 μm or less. Above all, the width of the colored line pattern is preferably 9000 μm or less and the pitch p is 10000 μm or less, and in particular, the width of the colored line pattern is 90 μm or less and the pitch p is 100 μm or less. As the pitch p is narrowed, the direction and magnitude of the displacement of the position relative to the first position of the measurement object in the Z direction with respect to the first position of the measurement object are measured from the change of the moire fringes. This is because the measurement accuracy of the displacement around the axis in the Z direction is improved.

b. Dot pattern FIG. 9A is a schematic top view showing a colored pattern plate in another example of the displacement visualization sensor of the first embodiment. 9 (b) is an enlarged view of the F portion of FIG. 9 (a), and FIG. 9 (c) is a sectional view taken along line FF of FIG. 9 (b).

In the colored pattern plate 20 shown in FIG. 9 (a), as shown in FIGS. 9 (b) and 9 (c), a plurality of red colored layers 24 are provided on the substrate 22 at the same intervals. It is provided in a region excluding a plurality of dot regions having a diameter d at which the centers are arranged at the intersections of the virtual line in the X direction and the virtual lines in the Y direction. As a result, when viewed in a plan view from the Z direction, the gap dot pattern 20c having the diameter d of the unformed region of the red colored layer 24 on the substrate 22 and the colored pattern 20d composed of the red colored layer 24 are alternately repeated. Is provided. The pitch p, which is the distance between the diameter d of the gap dot 20c and the center of the gap dot 20c in the X and Y directions, is 70 μm and 80 μm, respectively.

Examples of the dot pattern include gap dots having a constant diameter in a portion where the colored pattern plate is not provided and having a constant diameter, as in the example shown in FIG. 9, and the gap. A gap dot pattern in which the patterns of the unformed regions of the dots are alternately repeated may be used, or the colored dots having a constant diameter and the pattern of the unformed regions of the colored dots may be seen in a plan view of the colored pattern plate. It may be a colored dot pattern that repeats alternately.
In the gap dot pattern, for example, as in the example shown in FIG. 9, when the colored pattern plate is viewed in a plane, the gap dots are a plurality of virtual lines in the X direction and a plurality of virtual lines provided at the same intervals. The center is arranged at the intersection of the virtual lines in the Y direction. Further, in the colored dot pattern, for example, when the colored pattern plate is viewed in a plan view, the colored dots are centered at the intersection of a plurality of virtual lines in the X direction and a plurality of virtual lines in the Y direction provided at the same interval. Is provided so as to arrange.

In the gap dot pattern, the pattern in which the pattern of the unformed region of the gap dots is repeated is the coloring pattern, and the pattern in which the pattern of the gap dots is repeated is the gap pattern. In the colored dot pattern, the pattern in which the pattern of the colored dots is repeated is the colored pattern, and the pattern in which the pattern in the unformed region of the colored dots is repeated is the gap pattern.

In the dot pattern, in order to generate moire by combining the shielding pattern and the coloring pattern visually recognized through the light transmission pattern, a plan view is made from the Z direction and the light transmission pattern is used. The diameter of the dots is preferably 90% or less of the pitch p, which is the distance between the centers of the adjacent dots in the X and Y directions so that the coloring pattern can be visually recognized. .. Further, the diameter of the dots and the pitch p, which is the distance between the centers of the adjacent dots in the X and Y directions, differ depending on the size of the colored pattern plate. For example, X of the colored pattern plate. When the width in the direction × the width in the Y direction is 100 mm × 100 mm, it is preferable that the diameter of the dots is 45,000 μm or less and the pitch p is 50,000 μm or less. Above all, the diameter of the dots is preferably 9000 μm or less and the pitch p is preferably 10,000 μm or less, and particularly preferably the diameter of the dots is 90 μm or less and the pitch p is 100 μm or less. As the pitch p is narrowed, the direction and magnitude of the displacement of the position relative to the first position of the measurement object in the Z direction with respect to the first position of the measurement object are measured from the change of the moire fringes. This is because the measurement accuracy of the displacement around the axis in the Z direction is improved.

c. Others The coloring pattern is not particularly limited as long as it is repeated according to the above-mentioned constant rule in a plan view, but the above-mentioned coloring pattern plate is particularly limited as long as it has the above-mentioned coloring pattern that is repeated according to the constant rule. Although not limited to, for example, in the colored pattern plate 20 shown in FIGS. 11 and 12 described later, a plurality of patterns having different colors including a yellow colored layer 24y, a red colored layer 24 m, and a blue colored layer 24c. The colored line pattern 20L having the above has a plurality of the above-mentioned coloring patterns, and the plurality of the above-mentioned coloring patterns have the first coloring pattern and the second coloring pattern, and the above-mentioned one coloring pattern and the above-mentioned second coloring pattern. Those with different pattern colors are preferable. Item of "4. Displacement visualization sensor display and displacement measurement method and visualization method (1) Displacement measurement method in X or Y direction b. Others (a) Method using multiple patterns of different colors" This is because, as will be described in detail in the above, the displacement in the X direction or the Y direction can be measured by the color change which is easy to visually distinguish.

(2) Colored pattern board The colored pattern board having the colored pattern and the gap pattern that repeats according to the fixed rule is particularly limited as long as the colored pattern and the gap pattern repeat according to the fixed rule in a plan view. However, for example, the substrate and one surface of the substrate have a colored layer, the colored layer has the colored pattern, and the pattern of the unformed region of the colored layer on one surface of the substrate. Is the above-mentioned gap pattern, and the like. Hereinafter, the colored pattern board will be described with a focus on each configuration of the substrate and the colored pattern board having a colored layer on one surface of the substrate.

a. Substrate The substrate may be transparent, opaque, or opaque, and when it is opaque, a color that is easily distinguishable from the colored layer described later so as to have a high contrast with the colored layer described later. It may be colored with. Examples of the substrate include a resin substrate and a glass substrate.

(A) Resin substrate In the first embodiment, a resin substrate can be used as the substrate. When a resin substrate is used as the substrate, it has excellent impact resistance, etc., so even if the object to be measured is a slope or a high-rise building, cracks, cracks, etc. will occur. It is possible to measure the displacement without causing any problems.

The resin used for such a resin substrate is preferably a resin having strength that can withstand the measurement of displacement. For example, acrylic resin, vinyl chloride resin / polypropylene resin, acrylonitrile-butadiene-styrene copolymer resin. (ABS resin), polyester resin, polycarbonate resin (PC resin) and the like can be mentioned.
In the first embodiment, the polycarbonate resin is particularly preferable. This is because it has advantages such as high impact resistance, heat resistance, and high Young's modulus, which makes it difficult for stress deformation.

The thickness of the resin substrate is preferably in the range of 100 μm to 20000 μm. The thinner the resin substrate, the lighter the weight can be. However, expansion and contraction due to thermal expansion and bending of the substrate become problems. If the thickness of the resin substrate is thick, expansion and contraction due to thermal expansion and bending of the substrate become problems. This is because the influence of bending can be reduced, but the weight becomes heavy and installation becomes difficult. When the resin substrate is rectangular in length and width of 500 mm or less, the thickness of the resin substrate is preferably in the range of 300 μm to 6000 μm, and particularly preferably in the range of 500 μm to 3000 μm. It is preferably inside. When the resin substrate is rectangular in length and width of 500 mm or more, the thickness of the resin substrate is preferably in the range of 600 μm to 8000 μm, and particularly preferably in the range of 800 μm to 5000 μm. It is preferably inside.

As the colored pattern board, as described in detail in the item of "6. Usage" described later, a flexible one is preferable, and the colored pattern board having such flexibility is used. As the substrate, it is preferable to use a resin substrate having a low tensile elastic modulus (Young's modulus) and a large tensile strength. This is because the colored pattern plate can be preferably made to have the flexibility because it is easily deformed by a small stress and is not easily broken even when a large tensile stress is applied. Among them, ABS resin, polyethylene, polypropylene, polystyrene, polyurethane and the like are preferably used, and polyurethane and the like are particularly preferable. This is because the desired flexibility can be imparted to the colored pattern plate.

(B) Glass substrate In the first embodiment, it is also possible to use a glass substrate as the substrate. When a glass substrate is used as the substrate, it is difficult to be thermally deformed because the coefficient of thermal expansion is low, and it is difficult to be stress-deformed because the Young's modulus (tensile elastic modulus) is high. Therefore, the sensitivity of the displacement visualization sensor can be increased. it can. This makes it possible to reliably visualize even small displacements that occur in measurement objects such as iron artificial structures such as bridges, tunnels, trains, ships, and airplanes.

Examples of the glass substrate include non-alkali glass, soda-lime glass, thin tempered glass, low-reflection glass, low thermal expansion glass and the like.

The thickness of the glass substrate is preferably in the range of 100 μm to 20000 μm. The thinner the glass substrate, the lighter the weight can be. However, the problem is that the bending and physical strength of the substrate are weak. If the thickness of the glass substrate is thick, the bending and physical strength of the substrate have an effect. This is because the weight can be reduced and the installation becomes difficult. Further, in the displacement visualization sensor in which the colored pattern plate and the light-shielding pattern plate are arranged so that the surface on the colored layer side and the surface on the side opposite to the light-shielding layer side face each other, the colored layer and the light-shielding layer This is because if the thick glass substrate is provided between the two, if the pitch p in the line and space pattern or the dot pattern is narrow, color blurring occurs when viewed from an angle. When the glass substrate is rectangular in length and width of 500 mm or less, the thickness of the glass substrate is preferably in the range of 300 μm to 6000 μm, particularly in the range of 500 μm to 3000 μm. It is preferably inside. When the glass substrate is rectangular in length and width of 500 mm or more, the thickness of the glass substrate is preferably in the range of 600 μm to 8000 μm, particularly in the range of 800 μm to 5000 μm. It is preferably inside.

b. Colored layer The colored layer is not particularly limited as long as it is provided on one surface of the substrate, but it is preferably a layer having a color that is easily distinguishable from the substrate. This is because the coloring pattern is conspicuously represented.

Examples of the colored layer include those in which a coloring agent such as a pigment or a dye is dispersed or dissolved in a binder resin, and are formed by a photolithography method, a printing method, or the like.

As the colorant used for the colored layer, a colorant generally used for inks and the like used outdoors can be used. For example, as a colorant used for the red colored layer, for example, a perylene pigment or a rake. Examples thereof include pigments, azo pigments, quinacridone pigments, anthraquinone pigments, anthracene pigments, and isoindolin pigments. Further, for example, as a colorant used for the green coloring layer, for example, a phthalocyanine pigment such as a halogen polysubstituted phthalocyanine pigment or a halogen polysubstituted copper phthalocyanine pigment, a triphenylmethane basic dye, an isoindoline pigment, and an isoindoline are used. Examples include linone pigments. Further, for example, examples of the colorant used for the blue coloring layer include copper phthalocyanine pigments, anthraquinone pigments, indanthrone pigments, indanthrone pigments, cyanine pigments, dioxazine pigments and the like. Further, these colorants may be mixed and used in the colored layer.

Further, examples of the binder resin used for the colored layer include a transparent resin. When the printing method is used as the method for forming the colored layer, the binder resin includes, for example, polymethylmethacrylate resin, polyacrylate resin, polycarbonate resin, polyvinyl alcohol resin, polyvinylpyrrolidone resin, hydroxyethyl cellulose resin, carboxymethyl cellulose resin, and polyvinyl chloride. Examples thereof include resins, melamine resins, phenol resins, alkyd resins, epoxy resins, polyurethane resins, polyester resins, maleic acid resins, polyamide resins and the like. When the photolithography method is used as the method for forming the colored layer, the binder resin is usually ionizing radiation having a reactive vinyl group such as an acrylate-based resin, a methacrylate-based resin, a polyvinyl chloride-based resin, or a cyclized rubber-based resin. A curable resin is used. Usually, an electron beam curable resin or an ultraviolet curable resin is used. When an ultraviolet curable resin is used, a photopolymerization initiator is used alone or in combination with the binder resin. When an ultraviolet curable resin is used, a sensitizer, a coatability improver, a development improver, a cross-linking agent, a polymerization inhibitor, a plasticizer, a flame retardant and the like may be used, if necessary.

The thickness of the colored layer is preferably in the range of 1 μm to 100 μm, particularly preferably in the range of 5 μm to 70 μm, and particularly preferably in the range of 10 μm to 50 μm. If the thickness is thin, the colored pattern plate is suitable for increasing the resolution, which is the density of the colored pattern and the gap pattern, but if it is thinner than this range, the contrast of color viewing is low. If the thickness is thick, the contrast of color viewing becomes high, but if it is thicker than this range, color blurring tends to occur when viewed from an angle, so that the colored pattern plate is not suitable for increasing the resolution. Because it becomes. When the thickness is thin, the colored layer is preferably formed by a photolithography method, a gravure printing method, an offset printing method, a gravure offset method, a flexographic printing method, or the like, and when the thickness is thick, the colored layer is formed. Is preferably formed by a screen printing method or the like.

c. Others As the colored pattern board, for example, a colored pattern board 20 provided with a symbol such as the colored pattern board 20 shown in FIG. 13 (a) described later is preferable, and among them, the colored pattern board shown in FIG. 13 (a) described later is used. Like the pattern plate 20, the first symbol string indicating the displacement of the relative position of the light-shielding pattern plate with respect to the colored pattern plate in the X direction or the Y direction, or the axial displacement in the Z direction is used as the symbol. Those provided are preferable. "4. Displacement visualization sensor display and displacement measurement method and visualization method (1) Displacement measurement method in the X or Y direction b. Others (b) Position of the light-shielding pattern plate relative to the colored pattern plate As will be described in detail in the section "Method using symbols indicating displacement", even when the magnitude of the displacement in the X direction or the Y direction is equal to or larger than the width or pitch p of the coloring pattern, the light transmission described later will be performed. This is because the displacement in the X direction or the Y direction can be measured from the switching between the display and non-display of the symbol visually recognized through the window and the change in the coloring pattern. Further, as will be described in detail in the item of "4. Displacement visualization sensor display and displacement measurement method and visualization method (2) Z-direction axial displacement visualization method c. Others", the light will be described later. This is because the displacement around the axis in the Z direction can be measured by switching between the display and non-display of the symbol which is visually discernible through the transmission window.

Further, as the colored pattern board, for example, a colored pattern board 20 provided with the above symbols such as the colored pattern board 20 shown in FIG. 16 described later is preferable, and among them, the colored pattern board 20 shown in FIG. 16 described later. As described above, it is preferable that the symbol is provided with a second symbol string used for obtaining the rotation center of the displacement around the axis in the Z direction. As will be described in detail in the item "4. Displacement visualization sensor display and displacement measurement method and visualization method (2) Z-direction axial displacement visualization method c. Others", which will be described later, the light transmission window will be described later. This is because the center of rotation can be obtained from the switching between the display and non-display of the symbol, which is visually discernible via the above.

Further, as the colored pattern board, for example, a colored pattern board 20 having a plurality of the above symbols is preferably provided, such as the colored pattern board 20 shown in FIG. 19 described later, and among them, the colored pattern board 20 shown in FIG. 19 described later. As described above, it is preferable that the plurality of symbols are provided with a symbol string used for obtaining the displacement around the center of rotation and the axis in the Z direction. As will be described in detail in the item "4. Displacement visualization sensor display and displacement measurement method and visualization method (2) Z-direction axial displacement visualization method c. Others", a plurality of lights described later will be described later. This is because the displacement around the center of rotation and the axis in the Z direction can be obtained from the display / non-display switching of the plurality of symbols that are visually discernible and visually discriminated through the transparent window.

2. 2. Light-shielding pattern plate The light-shielding pattern plate has a light-shielding pattern and a light transmission pattern that repeats according to the same fixed rules as the coloring pattern and the gap pattern, or a light-shielding pattern and a light transmission pattern that repeats according to a fixed rule corresponding to the coloring pattern. It has. Here, in the first embodiment, the "light-shielding pattern" is a pattern in which the back surface side is not visible when the light-shielding pattern plate is viewed in a plane, and the "light transmission pattern" is a pattern in which the light-shielding pattern plate is viewed in a plane. In this case, it means a pattern in which the back side is visually recognized.

(1) Light-shielding pattern and light-transmitting pattern The light-shielding pattern and the light-transmitting pattern, which are repeated according to the same constant rules as the coloring pattern and the gap pattern, are the same as the coloring pattern and the gap pattern when the light-shielding pattern plate is viewed in a plan view. It is repeated according to the same fixed rule. In such a light-transmitting pattern and the light-transmitting pattern, the light-transmitting pattern is visually recognized from the Z direction as the colored pattern plate and the light-transmitting pattern plate move relative to each other. A change in the coloring pattern occurs, and the change in the coloring pattern makes it possible to display the displacement of the position relative to the first position of the measurement object in the X direction or the Y direction. Then, with the relative rotation of the colored pattern plate and the light-shielding pattern plate, the shielding pattern and the colored pattern visually recognized through the light transmission pattern are combined in a plan view from the Z direction. Moire occurs, and the moire makes it possible to display the axial displacement of the position relative to the first position of the measurement object in the Z direction. Examples of such a light-shielding pattern and the light-transmitting pattern include a line-and-space pattern and a dot pattern. Hereinafter, the line-and-space pattern and the dot pattern will be described in detail.

a. Line-and-space pattern In the line-and-space pattern, a linear light-shielding line pattern having a constant width and a linear light-transmitting space pattern having a constant width are alternately repeated in a plan view of the light-shielding pattern plate. In the line-and-space pattern, the pattern in which the light-shielding line pattern is repeated is the light-shielding pattern, and the pattern in which the light-transmitting space pattern is repeated is the light-transmitting pattern.

In the line and space pattern, the width and pitch p of the light-shielding line pattern are the same as those of the colored line pattern described in the item "1. Colored pattern board (1) Colored pattern and gap pattern a. Line and space pattern". It is preferable that the width and the pitch p are within the same range. From the change in the moiré fringes, it becomes easier to measure the direction and magnitude of the displacement of the position relative to the first position of the measurement object in the Z direction around the axis in the Z direction. This is because the measurement accuracy of the displacement of is improved.

The width of the linear light-shielding line pattern may be larger than the width of the linear colored line pattern, may be the same as the width of the linear colored line pattern, or may be the same as the width of the linear colored line pattern. It may be smaller than the width of the above-mentioned colored line pattern.

b. Dot pattern FIG. 10A is a schematic top view showing a light-shielding pattern plate in another example of the displacement visualization sensor of the first embodiment. 10 (b) is an enlarged view of the G portion of FIG. 10 (a), and FIG. 10 (c) is a sectional view taken along line GG of FIG. 10 (b).

In the light-shielding pattern plate 30 shown in FIG. 10 (a), as shown in FIGS. 10 (b) and 10 (c), a plurality of light-shielding layers 34 are provided on the transparent substrate 32 at the same intervals. It is provided in a region excluding a plurality of dot regions having a diameter d at which the centers are arranged at the intersections of the virtual line in the X direction and the virtual lines in the Y direction. As a result, when viewed in a plan view from the Z direction, the light transmitting dots 30c having a diameter of the unformed region of the light shielding layer 34 on the transparent substrate 32 and the light transmitting pattern 30d composed of the light shielding layer 34 are alternately repeated. A sex dot pattern is provided. The pitch p, which is the distance between the diameter d of the light transmitting dot 30c and the center of the light transmitting dot 30c in the X and Y directions, is 70 μm and 80 μm, respectively.

As the dot pattern, for example, as in the example shown in FIG. 10, the light-transmitting light-transmitting dot having a certain diameter and the light-transmitting dot not yet obtained when the light-shielding pattern plate is viewed in a plan view. A light-transmitting dot pattern in which the patterns of the formed regions are alternately repeated may be used, or the light-shielding pattern plate may be viewed in a plan view, and the light-shielding light-shielding dots having a certain diameter and the pattern of the unformed region of the light-shielding dots may be used. May be a light-shielding dot pattern in which
In the light transmitting dot pattern, for example, as in the example shown in FIG. 10, the light transmitting pattern plate is viewed in a plan view, and the light transmitting dots are provided at the same intervals in a plurality of X directions. The center is provided at the intersection of the virtual line and a plurality of virtual lines in the Y direction. Further, in the light-shielding dot pattern, for example, when the light-shielding pattern plate is viewed in a plane, the light-shielding dots are intersections of a plurality of virtual lines in the X direction and a plurality of virtual lines in the Y direction provided at the same intervals. It is provided so as to place the center in.

In the light-transmitting dot pattern, the pattern in which the pattern of the unformed region of the light-transmitting dot is repeated is the light-shielding pattern, and the pattern in which the pattern of the light-transmitting dot is repeated is the light-transmitting pattern. .. In the light-shielding dot pattern, the pattern in which the pattern of the light-shielding dots is repeated is the light-shielding pattern, and the pattern in which the pattern of the unformed region of the light-shielding dots is repeated is the light transmission pattern.

In the dot pattern, the diameter of the dot and the pitch p, which is the distance between the centers of the dots in the X and Y directions, are the same as those in "1. Colored pattern plate (1) Colored pattern and gap pattern b. Dot pattern". It is preferable that the diameter and pitch p of the dots described in the item are within the same range. From the change in the moiré fringes, it becomes easier to measure the direction and magnitude of the displacement of the position relative to the first position of the measurement object in the Z direction around the axis in the Z direction. This is because the measurement accuracy of the displacement of is improved.

(2) Light-shielding pattern plate As the light-shielding pattern plate having the light-shielding pattern and the light-transmitting pattern that repeats in the same fixed rule as the coloring pattern and the gap pattern, the light-shielding pattern and the light-transmitting pattern are seen in plan view. It is not particularly limited as long as it is repeated according to the above-mentioned constant rule, but for example, the transparent substrate and the transparent substrate have a light-shielding layer on one surface, the light-shielding layer has the light-shielding pattern, and the transparent substrate is used. Examples thereof include those in which the pattern of the unformed region of the light-shielding layer on one surface of the substrate is the light transmission pattern. Hereinafter, the light-shielding pattern plate will be described with a focus on each configuration of the transparent substrate and the light-shielding pattern plate having a light-shielding layer on one surface of the transparent substrate.

a. Transparent substrate The transparent substrate has transparency to the extent that the colored layer can be visually recognized through the transparent substrate, and has rigidity to the extent that displacement occurring in the measurement object can be measured. If there is, the present invention is not particularly limited, and examples thereof include a transparent resin substrate and a transparent glass substrate. The transparency of the transparent substrate is not particularly limited as long as it is transparent enough to allow the colored layer to be visually recognized through the transparent substrate, but the total light transmittance is preferably 80% or more. More preferably, it is 90% or more. Here, the total light transmittance of the transparent substrate can be measured by JIS K7361-1 (a test method for the total light transmittance of a plastic-transparent material).

Such a transparent resin substrate and a transparent glass substrate are the same as the materials and thicknesses described in the above-mentioned "1. Colored pattern board (2) Colored pattern board a. Substrate" except that they are transparent. Since the material and thickness can be used, the description thereof is omitted here.
Here, in the first embodiment, it is preferable that the transparent substrate and the substrate used for the colored pattern plate are made of the same material. This is because the linear thermal expansion coefficient and the like are the same, which enables accurate measurement of displacement.

b. Light-shielding layer The light-shielding layer is not particularly limited as long as it is provided on one surface of the transparent substrate, but the coloring pattern and the gap pattern visually recognized through the transparent substrate are It is preferable that the layer has a color that is easy to distinguish. This is because the light-shielding pattern is remarkably represented.

Examples of the light-shielding layer include those in which a black colorant is dispersed or dissolved in a binder resin and formed by a photolithography method or a printing method. In addition, as the light-shielding layer, for example, a metal thin film such as chromium is formed by a sputtering method, a vacuum vapor deposition method, or the like, and the thin film is patterned.

Examples of the black colorant used for the light-shielding layer include titanium-based pigments such as titanium nitride, titanium oxide, and titanium oxynitride, and carbon black and the like. The binder resin used for the light-shielding layer is the same as the binder resin used for the colored layer described in the item "1. Colored pattern plate (2) Colored pattern plate b. Colored layer". The description here will be omitted.

When the light-shielding layer is obtained by dispersing or dissolving a colorant in a binder resin, the thickness of the light-shielding layer is described in the above "1. Colored pattern plate (2) Colored pattern plate b. Colored layer". Since it is the same as the thickness of the colored layer described in the item, the description here is omitted. When the light-shielding layer is a metal thin film such as chromium, for example, the light-shielding layer is composed of chromium having an atomic percentage of chromium of 60% or more, oxygen, oxygen and nitrogen, oxygen and carbon, oxygen and nitrogen and carbon. When the light-shielding layer is composed of the selected set, the thickness of the light-shielding layer is preferably in the range of 100 nm to 5000 nm, particularly in the range of 300 nm to 2000 nm, particularly in the range of 500 nm to 1000 nm. Is preferable. This is because if it is thinner than this range, sufficient light-shielding property cannot be ensured. Further, the thicker the film thickness, the better the shading rate, but if it is thicker than this range, it takes time to form a film.

c. Others As the light-shielding pattern plate, for example, a light-shielding pattern plate 30 shown in FIG. 13B described later, which is provided with a light transmitting window capable of visually recognizing the above symbols, is preferable, and among them, FIG. 13 described later. Like the light-shielding pattern plate 30 shown in (b), it is preferable that the light-transmitting window is provided with a first light-transmitting window used for visually recognizing the first symbol string. "4. Displacement visualization sensor display and displacement measurement method and visualization method (1) Displacement measurement method in the X or Y direction b. Others (b) Position of the light-shielding pattern plate relative to the colored pattern plate As will be described in detail in the section "Method using symbols indicating displacement", even when the magnitude of the displacement in the X direction or the Y direction is equal to or larger than the width or pitch p of the coloring pattern, the light transmitting window This is because the displacement in the X direction or the Y direction can be measured from the display / non-display switching of the symbol visually recognized through the above and the change of the coloring pattern. Further, as will be described in detail in the item "4. Displacement visualization sensor display and displacement measurement method and visualization method (2) Z-direction axial displacement visualization method c. Others", the above light transmission This is because the displacement around the axis in the Z direction can be measured by switching between the display and non-display of the symbol, which is visually discernible through the window.

Further, as the light-shielding pattern plate, for example, a light-shielding pattern plate 30 shown in FIG. 17 described later, which is provided with a light transmitting window capable of visually recognizing the above symbols, is preferable, and among them, it is shown in FIG. 17 described later. It is preferable that the light transmitting pattern plate 30 is provided with a second light transmitting window used for visually recognizing the second symbol string as the light transmitting window. As will be described in detail in the item "4. Displacement visualization sensor display and displacement measurement method and visualization method (2) Z-direction axial displacement visualization method c. Others", the above light transmitting window is used. This is because the center of rotation can be obtained from the switching between the display and non-display of the symbol, which is visually discernible through the display.

Further, as the light-shielding pattern plate, for example, it is preferable that a plurality of the light-transmitting windows are provided, such as the colored pattern plate 20 shown in FIG. As will be described in detail in the item "4. Displacement visualization sensor display and displacement measurement method and visualization method (2) Z-direction axial displacement visualization method c. Others", the above-mentioned plurality of light transmissions will be described in detail. This is because the displacement around the center of rotation and the axis in the Z direction can be obtained from the switching between the display and non-display of the plurality of symbols that are visually discernible and visually discernible through the window.

3. Combination of colored pattern plate and light-shielding pattern plate In the first embodiment, the colored pattern plate and the light-shielding pattern plate have, for example, the same light-shielding pattern and the light transmission pattern as the colored pattern and the gap pattern. Combine so that it repeats according to the fixed rules of. As a result, as the relative movement of the colored pattern plate and the light-shielding pattern plate causes a change in the colored pattern that is visible through the light transmission pattern in a plan view from the Z direction, the colored pattern is changed. By the change of, the displacement of the position relative to the first position of the measurement object in the X direction or the Y direction can be displayed, and the relative rotation of the colored pattern plate and the light-shielding pattern plate. Along with this, moire occurs when the shielding pattern and the coloring pattern visually recognized through the light transmission pattern are combined in a plan view from the Z direction, and the moire causes the first position of the measurement object to be measured. The displacement of the relative position of the second position around the axis in the Z direction can be displayed.

Here, when the coloring pattern and the gap pattern are the line and space patterns, the "same constant rule" means that the light shielding pattern and the light transmission pattern are also the line and space patterns. The pitch p of the light-shielding line pattern and the light transmission space pattern is the same as the pitch p of the colored line pattern and the gap space pattern, and the width of the colored line pattern is 0.8 times to 1 the width of the light-shielding line pattern. . Means that it is within the double range.

Further, when the coloring pattern and the gap pattern are the gap dot patterns, the "same constant rule" means that the light shielding pattern and the light transmission pattern are the light transmission dot patterns and the light. The pitch p of the transmissive dots is the same as the pitch p of the gap dots, the shape of the light transmissive dots is similar to the shape of the gap dots, and the diameter of the gap dots is the diameter of the light transmissive dots. It means that it is in the range of 0.8 times to 1.2 times.

Further, when the colored pattern and the gap pattern are the colored dot patterns, the "same constant rule" means that the light-shielding pattern and the light transmission pattern are the light-shielding dot patterns and the light-shielding property. The pitch p of the dots is the same as the pitch p of the colored dots, the shape of the light-shielding dots is similar to the shape of the colored dots, and the diameter of the colored dots is 0.8 times the diameter of the light-shielding dots. It means that it is within the range of ~ 1.2 times.

Further, as the combination of the colored pattern plate and the light-shielding pattern plate, those in which the color of the colored pattern and the color of the light-shielding pattern are different are preferable. This is because the displacement of the relative position can be clearly displayed.

4. Displacement visualization sensor display and displacement measurement method and visualization method In the displacement visualization sensor of the first embodiment, the displacement visualization sensor according to the first embodiment is viewed in a plan view from the Z direction as the colored pattern plate and the light-shielding pattern plate move relative to each other. The change of the coloring pattern visually recognized through the light transmission pattern occurs. Then, the displacement of the position relative to the first position of the measurement object in the X direction or the Y direction is displayed due to the change in the coloring pattern. Further, with the relative rotation of the colored pattern plate and the light-shielding pattern plate, the shielding pattern and the coloring pattern visually recognized through the light transmission pattern are combined in a plan view from the Z direction. Moire occurs. Then, the moiré pattern displays the axial displacement of the second position relative to the first position of the measurement object in the Z direction.
Hereinafter, a method of measuring the displacement in the X direction or the Y direction using the displacement visualization sensor and a method of visualizing the axial displacement in the Z direction using the displacement visualization sensor will be described in detail.

(1) Method for measuring displacement in the X or Y direction a. Method of measuring displacement in the X direction or Y direction Using the displacement visualization sensor of the first embodiment, the light-shielding pattern plate with respect to the first position of the measurement object to which the colored pattern plate is fixed is based on the change of the colored pattern. The method of measuring the displacement of the relative position of the second position of the measurement object to which is fixed in the X direction or the Y direction is that the coloring pattern and the gap pattern are line-and-space patterns and the coloring. The pattern and the gap pattern are different from the case where the gap pattern is a gap dot pattern. As a method when the coloring pattern and the gap pattern are line-and-space patterns, for example, by using the displacement visualization sensor 10 shown in FIG. 1, in the initial state where the displacement does not occur, a plan view is performed from the Z direction. Of the width L1 in the X direction of the colored line pattern 20L whose entire surface is shielded by the light-shielding line pattern 30L, the length that is visually recognized through the light transmission space pattern 30S is the length of the measurement object 2. A method of measuring as the magnitude dx of the displacement of the position relative to the second position 2b with respect to the first position 2a in the X direction can be mentioned.

Further, as a method when the coloring pattern and the gap pattern are gap dot patterns, for example, by using the displacement visualization sensor 10 in which both plates are shown in FIGS. 9 and 10, the above displacement does not occur. Then, the distance that the center of the gap dot 20c, which is viewed in plan from the Z direction and is entirely visible by the light transmitting dot 30c, moves in the X direction and the distance that moves in the Y direction with respect to the center of the light transmitting dot 30c. A method of measuring as the magnitude dx of the displacement of the position relative to the first position 2a of the object 2 to be measured 2 in the X direction and the magnitude dy of the displacement in the Y direction can be mentioned.

Then, assuming the first position and the second position arranged on the virtual line in the X direction in the measurement object, the distance in the X direction between the first position and the second position is x, and the above. When a displacement of the position relative to the first position of the measurement object in the X direction occurs, the second position relative to the first position of the measurement object is measured using the displacement visualization sensor. Assuming that the magnitude of the displacement of the target position in the X direction is dx, the strain εx in the X direction between the first position and the second position of the measurement object can be obtained by the following equation (1). Further, the strain εy in the Y direction can also be obtained from the same equation.

b. The method for measuring the displacement in the X direction or the Y direction is not limited to the above, and may be another aspect.

(A) Method Using a plurality of Patterns of Different Colors Here, FIG. 11 is a schematic top view showing another example of the displacement visualization sensor of the first embodiment. FIG. 11A is a schematic top view showing a colored pattern plate in the displacement visualization sensor shown in FIG. FIG. 11B is a schematic top view showing a light-shielding pattern plate in the displacement visualization sensor shown in FIG. FIG. 11 (c) is a schematic top view showing the displacement visualization sensor shown in FIG. 11 in the initial state in which the displacement of the position relative to the first position of the object to be measured does not occur. FIG. 11 (d) is a schematic top view showing the displacement visualization sensor shown in FIG. 11 in a state where the displacement of the position relative to the first position of the measurement object in the second position in the X direction occurs.

In the displacement visualization sensor 10 shown in FIG. 11, as shown in FIG. 11A, the colored pattern plate 20 has a yellow colored layer 24y extending in the Y direction, a red colored layer 24 m, and a blue colored layer 24c, respectively. A plurality of colored layers 24 are provided on the substrate 22 so as to extend in the Y direction with an interval of 150 μm in the X direction. The yellow colored layer 24y, the red colored layer 24 m, and the blue colored layer 24c each have a width of 150 μm in the X direction, and are arranged in the colored layer 24 so as to be continuous in this order from the X direction. As a result, when viewed in a plan view from the Z direction, it is composed of a colored line pattern 20L composed of colored layers 24 having a plurality of colored patterns of different colors and having a width of 450 μm in the X direction, and an unformed region of the colored layer 24 on the substrate 22. A line-and-space pattern is provided in which the gap space pattern 20S having a width of 150 μm in the X direction is alternately repeated.

Further, as shown in FIG. 11B, in the light-shielding pattern plate 30, the light-shielding layer 34 having a width of 450 μm in the X direction is transparent so as to extend parallel to the Y direction with an interval of 150 μm in the X direction. It is provided on the substrate 32. As a result, when viewed in a plan view from the Z direction, the width of the light-shielding layer 34 in the X direction is 450 μm, and the width of the light-shielding line pattern 30L and the unformed region of the light-shielding layer 34 on the transparent substrate 32 is 150 μm. A line-and-space pattern in which the light transmission space pattern 30S is alternately repeated is provided.

In the initial state in which the displacement of the second position relative to the first position of the measurement object does not occur, as shown in FIG. 11C, the light transmission space pattern 30S is a colored line pattern on the XY plane. As a result of being arranged in the same region as the pattern of the blue colored layer 24c in 20L, the colored line pattern 20L that is visually recognized through the light transmission space pattern 30S when viewed in a plan view from the Z direction is blue composed of only the blue colored layer 24c. The pattern of is visually recognized.

On the other hand, when a displacement of 150 μm in the X direction occurs in the position relative to the first position of the measurement object, the position of the second position relative to the first position of the measurement object becomes the above. It moves 150 μm in the −X direction from the position in the initial state. As a result, as shown in FIG. 11 (d), the light-shielding pattern plate 30 fixed at the second position of the measurement target is-with respect to the colored pattern plate 20 fixed at the first position of the measurement target. Since it moves 150 μm in the X direction, when viewed in a plan view from the Z direction, a red pattern consisting of only the red colored layer 24 m is visually recognized as the colored line pattern 20L visually recognized via the light transmission space pattern 30S. Similarly, although not shown, when a displacement of 300 μm in the X direction of the relative position of the second position with respect to the first position of the measurement object occurs, the relative position of the second position with respect to the first position of the measurement object occurs. The position moves 300 μm in the −X direction from the position in the initial state. As a result, the light-shielding pattern plate 30 moves 300 μm in the −X direction with respect to the colored pattern plate 20, so that when viewed in a plan view from the Z direction, the colored line pattern 20L visible through the light transmitting space pattern 30S is colored yellow. A yellow pattern consisting of only the layer 24y is visible.

Therefore, in the displacement visualization sensor 10 shown in FIG. 11, by observing the color change of the colored line pattern 20L visually recognized through the light transmission space pattern 30S, the position of the second position with respect to the first position of the measurement object is located. The displacement of the relative position in the X direction can be measured. Similarly, it is also possible to measure the displacement of the position relative to the first position of the object to be measured in the second position in the Y direction.

Subsequently, FIG. 12 is a schematic top view showing another example of the displacement visualization sensor of the first embodiment. FIG. 12A is a schematic top view showing a colored pattern plate in the displacement visualization sensor shown in FIG. FIG. 12B is a schematic top view showing a light-shielding pattern plate in the displacement visualization sensor shown in FIG. FIG. 12 (c) is a schematic top view showing the displacement visualization sensor shown in FIG. 12 in the initial state in which the displacement of the position relative to the first position of the object to be measured does not occur. FIG. 12D is a schematic top view showing the displacement visualization sensor shown in FIG. 12 in a state where the displacement of the position relative to the first position of the measurement object in the second position in the X direction occurs.

In the displacement visualization sensor 10 shown in FIG. 12, as shown in FIG. 12A, the colored pattern plate 20 includes a yellow colored layer 24y extending in the Y direction, a red colored layer 24 m, and a blue colored layer 24c, respectively. A plurality of colored layers 24 are provided on the substrate 22 so as to extend in the Y direction with an interval of 150 μm in the X direction. The yellow colored layer 24y, the red colored layer 24 m, and the blue colored layer 24c each have a width of 50 μm in the X direction, and are arranged in the colored layer 24 so as to be continuous in this order from the X direction. As a result, when viewed in a plan view from the Z direction, it is composed of a colored line pattern 20L composed of colored layers 24 having a plurality of colored patterns of different colors and having a width of 150 μm in the X direction, and an unformed region of the colored layer 24 on the substrate 22. A line-and-space pattern is provided in which the gap space pattern 20S having a width of 150 μm in the X direction is alternately repeated.

Further, as shown in FIG. 12B, in the light-shielding pattern plate 30, the light-shielding layer 34 having a width of 150 μm in the X direction is transparent so as to extend parallel to the Y direction with an interval of 150 μm in the X direction. It is provided on the substrate 32. As a result, when viewed in a plan view from the Z direction, the width of the light-shielding layer 34 in the X direction is 150 μm, and the width of the light-shielding line pattern 30L and the unformed region of the light-shielding layer 34 on the transparent substrate 32 is 150 μm. A line-and-space pattern in which the light transmission space pattern 30S is alternately repeated is provided.

In the initial state in which the position relative to the first position of the measurement object is not displaced, the light transmission space pattern 30S is a colored line pattern on the XY plane, as shown in FIG. 12 (c). As a result of being arranged in the same region as 20L, the yellow coloring layer 24y, the red coloring layer 24m, and the blue coloring layer 24c are as the coloring line pattern 20L that is visually recognized through the light transmission space pattern 30S when viewed in a plan view from the Z direction. A black pattern consisting of is visible.

On the other hand, when a displacement of 50 μm in the X direction of the relative position of the second position with respect to the first position of the measurement object occurs, the position of the second position relative to the first position of the measurement object becomes the above. It moves 50 μm in the X direction from the position in the initial state. As a result, as shown in FIG. 12D, the light-shielding pattern plate 30 fixed at the second position of the measurement object is X with respect to the colored pattern plate 20 fixed at the first position of the measurement object. Since it moves 50 μm in the direction, when viewed in a plan view from the Z direction, a blue pattern consisting of only the red colored layer 24 m and the blue colored layer 24c is visually recognized as the colored line pattern 20L visually recognized via the light transmission space pattern 30S. .. Similarly, although not shown, when a displacement of 100 μm in the X direction of the relative position of the second position with respect to the first position of the measurement object occurs, the relative position of the second position with respect to the first position of the measurement object occurs. The position moves 100 μm in the X direction from the position in the initial state. As a result, the light-shielding pattern plate 30 moves 100 μm in the X direction with respect to the colored pattern plate 20, so that when viewed in a plan view from the Z direction, the blue colored layer is used as the colored line pattern 20L that is visible through the light transmission space pattern 30S. A blue pattern consisting of only 24c is visible.

Therefore, even with the displacement visualization sensor 10 shown in FIG. 12, by observing the color change of the colored line pattern 20L visually recognized through the light transmission space pattern 30S, the position of the second position with respect to the first position of the measurement object is determined. The displacement of the relative position in the X direction can be measured. Similarly, the size of the relative position of the second position with respect to the first position of the object to be measured can be measured in the Y direction.

In the first embodiment, as a method of measuring the displacement in the X direction or the Y direction, as shown in FIGS. 11 and 12, the color of the colored line pattern visually recognized through the light transmission space pattern is used. It is preferable to measure the displacement of the position relative to the first position of the measurement object in the X direction or the Y direction by observing the change. This is because the displacement in the X direction or the Y direction can be measured by the color change that is easily visually discriminated.

(B) Method using symbols indicating displacement of the position of the light-shielding pattern plate relative to the colored pattern plate Here, FIG. 13 is a schematic view showing another example of the displacement visualization sensor of the first embodiment. FIG. 13A is a schematic top view showing a colored pattern plate in the displacement visualization sensor shown in FIG. FIG. 13B is a schematic top view showing a light-shielding pattern plate in the displacement visualization sensor shown in FIG. FIG. 13 (c) is a schematic top view showing the displacement visualization sensor shown in FIG. 13 in the initial state in which the displacement of the position relative to the first position of the object to be measured does not occur. FIG. 14 is a schematic top view showing the displacement visualization sensor shown in FIG. 13 for each different displacement amount in the X direction of the position relative to the first position of the measurement object.

In the colored pattern plate 20 of the displacement visualization sensor 10, as shown in FIG. 13A, the yellow colored layer 24y, the red colored layer 24 m, and the blue colored layer extending in the Y direction in the pattern region 20b on the −Y direction side. A plurality of colored layers 24 including 24c are formed on the substrate 22 so as to extend in the Y direction without a gap in the X direction. The yellow colored layer 24y, the red colored layer 24 m, and the blue colored layer 24c each have a width of 50 μm in the X direction, and are arranged in the colored layer 24 so as to be continuous in this order from the X direction. As a result, a pattern is provided in which the coloring pattern including the coloring layer 24 having a width of 150 μm in the X direction repeats in the X direction.

Then, in the colored pattern plate 20, in the symbol string region 20t on the Y direction side, the second position of the measurement object to which the light-shielding pattern plate 30 is fixed is located with respect to the first position of the measurement object to which the colored pattern plate 20 is fixed. A first symbol string 26 indicating the displacement of the relative position in the X direction is provided on the substrate 22.
The first symbol string 26 is a symbol string of “-2 -1 0 +1 +2”, and “+1” is a light-shielding pattern plate 30 fixed to the first position of the measurement object to which the colored pattern plate 20 is fixed. The amount of displacement of the relative position of the second position of the measurement object in the X direction is equal to or greater than the width of one of the above coloring patterns, and "+2" is the amount of displacement of the relative position in the X direction. Indicates that is equal to or greater than the width of the two coloring patterns, and "-1" indicates that the displacement amount of the relative position in the X direction is equal to or greater than the width of the one coloring pattern. "" Indicates that the displacement amount of the relative position in the X direction is equal to or greater than the width of the two coloring patterns, and "0" indicates that the displacement amount of the relative position in the ± X direction is one. Indicates that it is equal to or less than the width of the coloring pattern.

Further, in the light-shielding pattern plate 30 of the displacement visualization sensor 10, as shown in FIG. 13B, in the pattern region 30b on the −Y direction side, the light-shielding layer 34 excludes a plurality of gaps 30g extending in the Y direction. Is formed on the transparent substrate 32. The gaps 30g in the pattern region 30b are arranged side by side in the X direction with a width of 50 μm in the X direction and an interval of 100 μm in the X direction. As a result, a light-shielding pattern having a width of 100 μm in the X direction composed of the light-shielding layer 34 and a light transmission pattern having a width of 50 μm in the X direction consisting of the gap portion 30 g are provided alternately in the X-direction.

In the light-shielding pattern plate 30, the light-shielding layer 34 is formed on the transparent substrate 32 in the light-transmitting window region 30t on the Y-direction side, except for the rectangular gap portion 30g in the central portion. As a result, as a first light transmitting window used for visually recognizing the first symbol string 26, a rectangular gap portion 30 g in the central portion is provided.

The colored pattern plate 20 and the light-shielding pattern plate 30 are arranged so that the light-shielding pattern plate 30 is on the observer side. In the initial state in which the relative position of the second position of the measurement object to which the light-shielding pattern plate 30 is fixed is not displaced with respect to the first position of the measurement object to which the colored pattern plate 20 is fixed, FIG. 13 (c) ), As a result of the light transmission patterns being arranged in the same regions as the pattern of the blue colored layer 24c in the coloring pattern on the XY plane, when viewed in a plan view from the Z direction, the light transmission pattern is passed through. As the coloring pattern to be visually recognized, the pattern of the blue coloring layer 24c is visually recognized. Further, when viewed in a plan view from the Z direction, as a result of the first light transmitting window being arranged in the same region as “0” in the first symbol string 26, the first symbol visually recognized through the first light transmitting window. "0" is visually recognized as a symbol in column 26.

On the other hand, when the relative position of the second position with respect to the first position of the measurement object moves by 50 μm in the −X direction from the position in the initial state, the shading pattern is shown in FIG. 14 (a). Since the plate 30 moves 50 μm in the −X direction with respect to the colored pattern plate 20, when viewed in a plan view from the Z direction, the pattern of the red colored layer 24 m is visually recognized as the colored pattern that is visually recognized through the light transmission pattern. To. Further, when viewed in a plan view from the Z direction, "0", which is the same as the initial state, is visually recognized as a symbol in the first symbol string 26 which is visually recognized through the first light transmitting window.

On the other hand, when the relative position moves 150 μm in the −X direction from the position in the initial state, the light-shielding pattern plate 30 is 150 μm in the −X direction with respect to the colored pattern plate 20 as shown in FIG. 14 (c). Moving. As a result, when viewed in a plan view from the Z direction, the same pattern of the blue colored layer 24c as in the initial state is visually recognized as the coloring pattern visually recognized through the light transmission pattern, but through the first light transmission window. As a symbol in the first symbol string 26 to be visually recognized, "-1" different from the above initial state is visually recognized.

Further, when the relative position moves 300 μm in the X direction from the position in the initial state, the light-shielding pattern plate 30 moves 300 μm in the X direction with respect to the colored pattern plate 20 as shown in FIG. 14 (d). .. As a result, when viewed in a plan view from the Z direction, the same pattern of the blue colored layer 24c as in the initial state is visually recognized as the coloring pattern visually recognized through the light transmission pattern, but through the first light transmission window. As a symbol in the first symbol string 26 to be visually recognized, "+2" different from the above initial state is visually recognized.

Therefore, in the displacement visualization sensor 10 shown in FIG. 13, the position of the second position of the measurement object to which the light-shielding pattern plate 30 is fixed is relative to the first position of the measurement object to which the colored pattern plate 20 is fixed. When the magnitude of the displacement in the X direction is equal to or larger than the width of the coloring pattern, even if the coloring pattern that is visually recognized through the light transmission pattern does not change in a plan view from the Z direction. When viewed in a plan view from the Z direction, a change in the first symbol string 26 that is visually recognized through the first light transmitting window occurs. Therefore, even when the magnitude of the displacement in the X direction is equal to or larger than the width of the coloring pattern, the displacement in the X direction is measured from the change in the first symbol string 26 and the change in the coloring pattern. Can be done.

In the first embodiment, as the method for measuring the displacement in the X direction or the Y direction, the coloring is described as in the method for measuring the displacement in the X direction or the Y direction using the displacement visualization sensor 10 shown in FIG. With the relative movement of the pattern plate and the light-shielding pattern plate, the display and non-display of the symbol visually recognized through the light transmitting window are switched in a plan view from the Z direction, and the display and non-display of the symbol are switched. The method of measuring the displacement in the X direction or the Y direction is preferable from the change of the display and the change of the coloring pattern, and among them, as shown in FIG. 13, the relative movement between the coloring pattern plate and the shading pattern plate. Along with this, a change in the first symbol string that is visually recognized through the first light transmitting window occurs when viewed in a plan view from the Z direction, and from the change in the first symbol string and the change in the coloring pattern, the X is A method of measuring the displacement in the direction or the Y direction is preferable. The magnitude of the displacement in the X direction or the Y direction of the relative position of the second position of the measurement object to which the light-shielding pattern plate is fixed with respect to the first position of the measurement object to which the colored pattern plate is fixed is the above. This is because the displacement in the X direction or the Y direction can be measured from the switching between the display and non-display of the symbol and the change of the coloring pattern even when the width or pitch p or more of the coloring pattern is reached.
In the displacement visualization sensor 10 shown in FIGS. 13 and 14, although there is only one symbol in the first symbol string 26 that is visually recognized through the first light transmitting window, it is visually recognized through the first light transmitting window. The symbols of the first symbol string 26 to be formed may be configured to be plural.

(2) Visualization method of displacement around the axis in the Z direction a. In the displacement visualization sensor of the first embodiment of the moire, the relative rotation of the colored pattern plate and the light-shielding pattern plate is viewed in a plan view from the Z direction, and is visually recognized through the shielding pattern and the light transmission pattern. The moire generated by the combination with the above-mentioned coloring pattern is capable of displaying the axial displacement of the position relative to the first position of the measurement object in the Z direction.

Here, FIGS. 15 (a) to 15 (c) are photographs showing changes in moire that occur in another example of the displacement visualization sensor of the first embodiment. The displacement visualization sensor 10 shown in FIG. 15 has a colored pattern plate 20 shown in FIG. 9 and a light-shielding pattern plate 30 shown in FIG.

In the initial state in which the relative position of the second position with respect to the first position of the measurement object is not displaced, as shown in FIG. 15A, the light transmitting dots and the shading pattern have gaps in the XY plane. As a result of being arranged in the same area as the dots and the coloring pattern, when viewed in a plane from the Z direction, all the gap dots are visually recognized through the light transmitting dots, and thus all the gap dots are visible through the light transmitting dots. Moire that the aggregated portion of a plurality of visible gap dots becomes a stripe does not occur.

On the other hand, when a displacement of the rotation angle α ° in the θ direction around the axis in the Z direction indicated by the broken line arrow in FIG. 2 occurs at the position relative to the first position of the measurement object at the second position. , As shown in FIG. 15B, the light-shielding pattern plate fixed at the second position of the measurement object is axially rotated in the Z direction with respect to the colored pattern plate fixed at the first position of the measurement object. Rotate α ° in the θ direction of. As a result, when viewed in a plane from the Z direction, only some of the gap dots are visible through the light transmitting dots, so that the plurality of gap dots that are visually recognized through each of the plurality of light transmitting dots are visible. Moire with striped gathering parts will be observed.

Further, as the rotation angle α ° of the displacement in the θ direction about the axis in the Z direction increases, as shown in FIGS. 15 (b) to 15 (c), each of the plurality of light transmitting dots is formed. Since the number of aggregated portions of the plurality of gap dots visually recognized through the moiré pattern increases, the number of moiré stripes increases and the pitch P of the moiré fringes decreases.

Therefore, by using the displacement visualization sensor 10 shown in FIG. 15, the aggregated portion of the plurality of gap dots visually recognized via each of the plurality of light transmitting dots in a plan view from the Z direction becomes a stripe. By observing the moire, it is possible to visualize that the displacement of the position relative to the first position of the measurement object in the second position in the Z direction has occurred. Further, the direction of displacement around the axis in the Z direction can be obtained from the direction in which the arrangement direction of the plurality of light transmitting dots is inclined with respect to the arrangement direction of the plurality of gap dots. Further, by measuring the pitch P of the moiré fringes, the rotation angle α ° of the displacement around the axis in the Z direction can be measured in the same manner as the displacement visualization sensor 10 shown in FIG.

The moire is, for example, the axial displacement of the position relative to the first position of the measurement object in the Z direction, such as the moire generated by the visualization sensor 10 shown in FIGS. 1 and 15. It is preferable that the direction and size of the moiré pattern can be measured.

In order to cause moire that can measure the direction and magnitude of such displacement around the axis in the Z direction, the colored pattern and the gap pattern in the colored pattern plate and the light-shielding pattern and light transmission in the light-shielding pattern plate The pattern may be a pattern that makes it easy to measure the direction and magnitude of the displacement of the position relative to the first position of the measurement object in the Z direction with respect to the first position of the measurement object from the change of the moiré fringes. preferable. Specifically, the colored pattern and the gap pattern in the colored pattern board are preferably the preferred patterns described in the item of "1. Colored pattern board (1) Colored pattern and gap pattern", and the light-shielding pattern board. It is preferable that the light-shielding pattern and the light-transmitting pattern in the above are preferable patterns described in the above-mentioned "2. Light-shielding pattern plate (1) Light-shielding pattern and light-transmitting pattern", respectively.

b. Displacement visualization method around the axis in the Z direction Using the displacement visualization sensor of the first embodiment, the second position is relative to the first position of the measurement object from the moire when viewed in a plan view from the Z direction. As a method of visualizing the displacement of the position around the axis in the Z direction, when the coloring pattern and the gap pattern are line-and-space patterns, for example, the displacement visualization sensor 10 shown in FIGS. 1 and 5 is used. As a result, when viewed in a plan view from the Z direction, moire with stripes at the intersections of the plurality of light-shielding line patterns 30L and the plurality of colored line patterns 20L is observed, so that the first position 2a of the measurement object 2 is observed. A method of detecting that an axial displacement of the position relative to the second position 2b in the Z direction has occurred can be mentioned. Further, from the direction in which the shading line pattern 30L is tilted with respect to the colored line pattern 20L, the pitch p of the line and space pattern, and the pitch P of the moire fringes, the direction of displacement around the axis in the Z direction and the rotation angle α. A method of measuring ° can be mentioned.

When the coloring pattern and the gap pattern are gap dot patterns, for example, by using the displacement visualization sensor 10 shown in FIG. 15, a plurality of light transmitting dots 30c are viewed in a plan view from the Z direction. A method of detecting that the displacement around the axis in the Z direction has occurred by observing the moire in which the aggregated portion of the plurality of gap dots 20c visually recognized through each of the above is striped. Further, from the direction in which the arrangement direction of the plurality of light transmitting dots 30c is inclined with respect to the arrangement direction of the plurality of gap dots 20c, the pitch p of the gap dot pattern, and the pitch P of the moire stripes, the axial rotation in the Z direction. A method of measuring the direction of displacement and the rotation angle α ° of is mentioned.

Then, in the line-and-space pattern and the dot pattern, the following equation (2) is used between the pitch p of these patterns, the pitch P of the moire fringes, and the rotation angle α ° of the displacement around the axis in the Z direction. Relationship is established. Therefore, if the pitch P of the moiré fringes is measured, the rotation angle α ° of the displacement around the axis in the Z direction is measured by the following equation (2).

c. Other methods for visualizing the displacement around the axis in the Z direction are not limited to the above, and other modes may be used.

Here, FIGS. 16 to 18 are schematic views showing another example of the displacement visualization sensor of the first embodiment. 16 (a) is a schematic top view showing a colored pattern plate in the displacement visualization sensor shown in FIGS. 16 to 18, and FIG. 16 (b) is an enlarged view of a B1 portion of FIG. 16 (a). 17 (a) is a schematic top view showing a light-shielding pattern plate in the displacement visualization sensor shown in FIGS. 16 to 18, and FIG. 17 (b) is an enlarged view of a B2 portion of FIG. 17 (a). FIG. 18A is a schematic top view showing the displacement visualization sensor shown in FIGS. 16 to 18 in the initial state in which the displacement of the position relative to the first position of the measurement object does not occur. 18 (b) is an enlarged view of the B3 portion of FIG. 18 (a).

In the colored pattern plate 20 of the displacement visualization sensor 10, as shown in FIGS. 16A and 16B, a plurality of linear shapes having a width in the X direction as L1 in the pattern region 20b on the −Y direction side. The red colored layer 24 is provided on the substrate 22 so as to extend in the Y direction with an interval of S1 in the X direction. As a result, the colored line pattern 20L having the width of the red colored layer 24 in the X direction as L1 and the gap space pattern 20S having the width of the unformed region of the red colored layer 24 on the substrate 22 in the X direction as S1 are X. A line-and-space pattern that alternates in the direction is provided. The widths L1 and S1 in the X direction are 70 μm and 80 μm, respectively.

Then, in the colored pattern plate 20, in the symbol string region 20t on the Y direction side, the second position of the measurement object to which the light-shielding pattern plate 30 is fixed is located with respect to the first position of the measurement object to which the colored pattern plate 20 is fixed. A second symbol string 28 used to obtain the rotation center of the axial displacement of the relative position in the Z direction is provided on the substrate 22.
The second symbol string 28 has 9 columns, respectively, "-A4 to + A4", "-B4 to + B4", "-C4 to + C4", "-D4 to + D4", "-E4 to + E4", and "-". Nine symbol strings of "F4 to + F4", "-G4 to + G4", and "-H4 to + H4", and "-I4 to + I4" are arranged in the Y direction in a 9-by-9 matrix.

Further, in the light-shielding pattern plate 30 of the displacement visualization sensor 10, as shown in FIGS. 17A and 17B, a plurality of pattern regions 30b on the −Y direction side have a width in the X direction of L2. A linear light-shielding layer 34 is provided on the transparent substrate 32 so as to extend in the Y direction with an interval of a width S2 in the X direction. As a result, when viewed in a plan view from the Z direction, the width in the X direction of the light-shielding layer 34 is defined as L2, and the width of the light-shielding layer 34 on the transparent substrate 32 is defined as S2. A line-and-space pattern is provided in which the light transmitting space pattern 30S is alternately repeated. The widths L2 and S2 in the X direction are 70 μm and 80 μm, respectively, which are the same as the widths L1 and S1 in the X direction.

In the light-shielding pattern plate 30, the light-shielding layer 34 is provided on the transparent substrate 32 in the light-transmitting window region 30t on the Y-direction side, except for the circular gap portion 30g in the central portion. As a result, a circular gap portion 30 g in the central portion is provided as a second light transmitting window used for visually recognizing the second symbol string 28.

In the initial state in which the relative position of the second position of the measurement object to which the light-shielding pattern plate 30 is fixed is not displaced with respect to the first position of the measurement object to which the colored pattern plate 20 is fixed, FIG. ) And FIG. 18B, the light-shielding line pattern 30L and the light-transmitting space pattern 30S are arranged in the same region as the colored line pattern 20L and the gap space pattern 20S on the XY plane, respectively, and as a result, the Z direction. When viewed in a plan view, the entire width L1 of the colored line pattern 20L in the X direction is shielded by the light-shielding line pattern 30L, so that the colored line pattern 20L is not visible through the light transmission space pattern 30S. Further, when viewed in a plan view from the Z direction, the second symbol is visually recognized through the second light transmitting window as a result of the second light transmitting window being arranged in the same region as "E0" in the second symbol string 28. "E0" is visible as a symbol in column 28.

On the other hand, as the displacement of the position relative to the first position of the measurement object, the displacement of the rotation angle α ° in the θ direction around the axis in the Z direction indicated by the broken line arrow in FIG. When the above occurs, the colored pattern plate rotates relative to the light-shielding pattern plate about the axis in the Z direction. Along with this, although not shown, when viewed in a plan view from the Z direction, the colored line pattern 20L is tilted by α ° with respect to the shading line pattern 30L, so that the plurality of colored line patterns 20L pass through each of the plurality of light transmission space patterns 30S. Will be visible. As a result, moire in which the intersections of the plurality of light-shielding line patterns 30L and the plurality of colored line patterns 20L are striped is observed. Further, when viewed in a plan view from the Z direction, a symbol different from the initial state is visually recognized as a symbol in the second symbol string 28 visually recognized through the second light transmitting window.

Therefore, from the direction in which the light-shielding line pattern 30L is tilted with respect to the colored line pattern 20L, the pitch p of the line-and-space pattern, and the pitch P of the moire fringes, by using the above equation (2), the above Z direction The direction of displacement around the axis and the rotation angle α ° can be obtained. Then, as the direction of displacement around the axis in the Z direction and the rotation angle α ° and the state in which the displacement occurs from the initial state, the displacement occurs from the Z direction in a plan view through the second light transmitting window. The center of rotation of the axial displacement in the Z direction can be obtained from the content of the change in the second symbol string 28 visually recognized.

Further, here, FIG. 19 is a schematic top view showing another example of the displacement visualization sensor of the first embodiment. FIG. 19 shows a portion corresponding to the B3 portion shown in FIG. 18 (b).

The colored pattern plate 20 in the displacement visualization sensor 10 shown in FIG. 19 has the same configuration as the colored pattern plate 20 shown in FIG. On the other hand, in the light-shielding pattern plate 30 in the displacement visualization sensor 10 shown in FIG. 19, the light-shielding layer 34 is provided on the transparent substrate in the light transmitting window region on the Y-direction side except for the two circular gaps 30g. As a result, the second light transmitting window has the same configuration as the light-shielding pattern plate 30 shown in FIG. 17, except that two circular gaps 30g are provided.

In the displacement visualization sensor 10 shown in FIG. 19, the displacement of the second position of the measurement object to which the light-shielding pattern plate 30 is fixed is relative to the first position of the measurement object to which the colored pattern plate 20 is fixed. As the displacement of the position relative to the first position of the measurement object from the initial state where it does not occur, the rotation angle α ° in the θ direction around the axis in the Z direction indicated by the broken line arrow in FIG. As the displacement of the above occurs, the second symbol string visually recognized through the two circular gaps 30 g changes in a plan view from the Z direction. Then, the center of rotation and the amount of displacement of the axial displacement in the Z direction can be obtained from the content of the change of the second symbol string visually recognized through the two circular gaps 30g.

In the first embodiment, the method of visualizing the axial displacement in the Z direction is the same as the method of visualizing the axial displacement in the Z direction using the displacement visualization sensor 10 shown in FIGS. 16 to 18. As the relative rotation of the colored pattern plate and the light-shielding pattern plate causes the display and non-display of the symbol to be visually recognized through the light transmitting window in a plan view from the Z direction, the display and non-display of the symbol are switched. From the switching of display and non-display of the symbol, the Z of the position relative to the first position of the measurement object to which the colored pattern plate is fixed and the second position of the measurement object to which the light-shielding pattern plate is fixed. A method of finding the center of rotation of the displacement around the axis in the direction is preferable. Above all, as in the method of visualizing the displacement around the axis in the Z direction using the displacement visualization sensor 10 shown in FIGS. 16 to 18, Z is accompanied by the relative rotation of the colored pattern plate and the light-shielding pattern plate. When viewed in a plan view from the direction, a change in the second symbol string that is visually recognized through the second light transmission window occurs, and from the change in the displacement and the second symbol string, the first position of the measurement object is relative to the first position. A method of obtaining the rotation center of the displacement of the relative position of the second position around the axis in the Z direction is preferable. This is because the center of rotation can be obtained from the display / non-display switching of the symbol, which is easy to visually distinguish.

Further, as a method of visualizing the axial displacement in the Z direction, as in the method of visualizing the axial displacement in the Z direction using the displacement visualization sensor 10 shown in FIG. 19, the colored pattern plate and the light shielding. Along with the relative rotation with the pattern plate, the display and non-display of the plurality of symbols visually recognized through the plurality of light transmitting windows are switched in a plan view from the Z direction, and the display of the plurality of symbols is displayed. The method of obtaining the displacement around the rotation center and the axis in the Z direction is preferable from the switching of the display and the non-display, and among them, the method of visualizing the displacement around the axis in the Z direction using the displacement visualization sensor 10 shown in FIG. As described above, as the relative rotation of the colored pattern plate and the light-shielding pattern plate causes a change in the symbol string that is visually recognized through the plurality of light transmitting windows in a plan view from the Z direction. From the change in the symbol string, the method of obtaining the displacement around the center of rotation and the axis in the Z direction is preferable. This is because the displacement around the center of rotation and the axis in the Z direction can be obtained from the display / non-display switching of the plurality of symbols that can be easily visually distinguished.

Further, in the first embodiment, as a method of visualizing the displacement around the axis in the Z direction, the above-mentioned is viewed in a plan view from the Z direction with the relative rotation of the colored pattern plate and the light-shielding pattern plate. The display and non-display of the above symbol visually recognized through the light transmitting window are switched, and the method of measuring the displacement around the axis in the Z direction is preferable from the switching of the display and non-display of the above symbol, and above all, the colored pattern plate. Along with the relative rotation of the light-shielding pattern plate and the light-shielding pattern plate, a change in the first symbol string that is visually recognized through the first light transmitting window occurs when viewed in a plan view from the Z direction, and the first symbol string From the change, the method of measuring the displacement around the axis in the Z direction is preferable. This is because the displacement around the axis in the Z direction can be measured by switching the display and non-display of the symbol, which is easy to visually distinguish.

5. Displacement Visualization Sensor The displacement visualization sensor of the first embodiment may be an embodiment other than the embodiments described so far, and may have a configuration other than the configurations described so far.

(1) Multiple Pattern Regions with Different Resolutions FIG. 20 (a) is a schematic top view showing another example of the displacement visualization sensor of the first embodiment. 20 (b) is a schematic top view showing the colored pattern plate shown in FIG. 20 (a), and FIG. 20 (c) is a schematic top view showing the light-shielding pattern plate shown in FIG. 20 (a).

The displacement visualization sensor 10 shown in FIG. 20 (a) has a colored pattern plate 20 shown in FIG. 20 (b) and a light-shielding pattern plate 30 shown in FIG. 20 (c). In the displacement visualization sensor 10, the colored pattern plate 20 and the light-shielding pattern plate 30 are laminated in parallel so that the colored pattern plate 20 is on the measurement target side and the light-shielding pattern plate 30 is on the observer side. Further, the colored pattern plate 20 and the light-shielding pattern plate 30 are laminated so as to be relatively movable in the X direction and the Y direction and relatively rotatable about the Z direction.

As shown in FIG. 20 (b), the colored pattern plate 20 has first to fifth colored pattern regions 201 to 205. In each of the first to fifth colored pattern regions 2001 to 205, when viewed in a plan view from the Z direction, the colored line pattern 20L and the gap space pattern 20S extend parallel to the Y direction and alternately repeat in the X direction. A pattern is provided. The width L1 of the colored line pattern 20L in the X direction and the width S1 of the gap space pattern 20S in the X direction are S1 / L1 = 50 μm / 50 μm in the first colored pattern region 201 and S1 / L1 = 100 μm in the second colored pattern region 201. / 100 μm, S1 / L1 = 150 μm / 150 μm in the third colored pattern region 201, S1 / L1 = 200 μm / 200 μm in the fourth colored pattern region 201, and S1 / L1 = 250 μm / 250 μm in the fifth colored pattern region 201. There is.

Further, as shown in FIG. 20 (c), the light-shielding pattern plate 30 has first to fifth light-shielding pattern regions 301 to 305. In each of the first to fifth light-shielding pattern regions 301 to 305, when viewed in a plan view from the Z direction, the light-shielding line pattern 30L and the light transmission space pattern 30S extend parallel to the Y direction and alternately repeat in the X direction. A space pattern is provided. The width L2 in the X direction of the light-shielding line pattern 30L and the width S2 in the X direction of the light transmission space pattern 30S in the first to fifth light-shielding pattern regions 301 to 305 are the above-mentioned widths S2 in the first to fifth coloring pattern regions 201 to 205, respectively. It is the same as the widths L1 and S1.

FIG. 20A shows a displacement visualization sensor in an initial state in which the displacement of the position relative to the first position of the object to be measured does not occur. As shown in FIG. 20A, the displacement visualization sensor 10 is viewed in a plan view from the Z direction in the initial state in which the displacement of the second position relative to the first position of the measurement object does not occur. Then, the first to fifth shading pattern regions 301 to 305 are arranged in the same region as the first to fifth colored pattern regions 201 to 205 on the XY plane. Further, in a plan view from the Z direction, in each of the plurality of observation regions 101 to 105 in which the first to fifth shading pattern regions 301 to 305 overlap with the first to fifth colored pattern regions 201 to 205, the shading line pattern The 30L and the light transmitting space pattern 30S are arranged in the same region as the colored line pattern 20L and the gap space pattern 20S on the XY plane, respectively. As a result, in each of the plurality of observation regions 101 to 105, when viewed in a plan view from the Z direction, the entire width L1 in the X direction of the colored line pattern 20L is formed by the light-shielding line pattern 30L having the same width L2 in the X direction as L1. Since it is shielded, the colored line pattern 20L is not visible through the light transmitting space pattern 30S. The distance x in the X direction between the first position and the second position of the measurement target is 100 mm.

On the other hand, FIGS. 21 (a) to 22 (b) show FIG. 20 (a) in a state where the relative position of the second position with respect to the first position of the measurement object is displaced in the X direction. It is a schematic top view which shows the displacement visualization sensor shown.

When a displacement of 50 μm in the X direction occurs in the position relative to the first position of the measurement object, the position of the second position relative to the first position of the measurement object is changed from the position in the initial state. It moves 50 μm in the X direction. As a result, the light-shielding pattern plate 30 fixed at the second position of the measurement object moves 50 μm in the X direction with respect to the colored pattern plate 20 fixed at the first position of the measurement object. As a result, the light-shielding line pattern 30L moves 50 μm in the X direction relative to the same region as the colored line pattern 20L on the XY plane. As a result, as shown in FIG. 21A, only in the first observation region 101 of the plurality of observation regions 101 to 105, the entire width of the colored line pattern 20L in the X direction forms the light transmission space pattern 30S. Only the first observation region 101 out of the plurality of observation regions 101 to 105 is deeply colored.

Then, when a displacement of 100 μm in the X direction of the position relative to the first position of the measurement object with respect to the first position occurs, the position relative to the first position of the measurement object becomes the relative position in the initial state. It moves 100 μm in the X direction from the position. As a result, the light-shielding line pattern 30L moves 100 μm in the X direction relative to the same region as the colored line pattern 20L on the XY plane. As a result, as shown in FIG. 21B, in the first observation region 101 and the second observation region 102 of the plurality of observation regions 101 to 105, the entire width of the colored line pattern 20L in the X direction is light. It will be visually recognized through the transmission space pattern 30S, and the first observation region 101 and the second observation region 102 of the plurality of observation regions 101 to 105 will be deeply colored. Similarly, when a displacement of 150 μm in the X direction occurs, as shown in FIG. 21C, the first observation region 101 and the third observation region 103 of the plurality of observation regions 101 to 105 are deeply colored, and X When a displacement of 200 μm in the direction occurs, as shown in FIG. 22A, the first observation region 101, the second observation region 102, and the fourth observation region 104 among the plurality of observation regions 101 to 105 are deeply colored. Then, when a displacement of 250 μm in the X direction occurs, as shown in FIG. 22 (b), the first observation region 101 and the fifth observation region 105 of the plurality of observation regions 101 to 105 are deeply colored. Become.

Therefore, in the displacement visualization sensor 10 shown in FIG. 20 (a), in a plurality of observation regions 101 to 105 having different resolutions due to different widths of the line pattern and the space pattern in the X direction when viewed in a plan view from the Z direction. Changes in the colored line pattern 20L visually recognized through the light transmission space pattern 30S can be observed. Therefore, the change in the magnitude of the displacement of the position relative to the first position of the measurement object in the X direction can be displayed in an easy-to-understand manner. That is, since the displacement can be measured in a plurality of display areas in which the magnitude of the displacement that can be measured is set to be different, the magnitude of the displacement can be measured in detail.

As the displacement visualization sensor of the first embodiment, as in the displacement visualization sensor 10 shown in FIG. 20A, the colored pattern plate has a plurality of colored pattern regions, and the plurality of colored pattern regions are described above. Each having a colored pattern, the light-shielding pattern plate has a plurality of light-shielding pattern regions that overlap each other with the plurality of colored pattern regions, and the plurality of light-shielding pattern regions each have the light-shielding pattern and the light transmission pattern. It is preferable that the plurality of colored pattern regions have different resolutions from each other and have the same resolution as the plurality of light-shielding pattern regions that overlap each other. Along with the relative movement of the first pattern display board and the second pattern display board, the plurality of light-shielding pattern regions are arranged so as to overlap each of the plurality of colored pattern regions in a plan view from the Z direction. In a plurality of display areas having different resolutions, the coloring pattern visually recognized through the light transmission pattern changes. Therefore, the change in the magnitude of the displacement of the relative position of the light-shielding pattern plate with respect to the colored pattern plate in the X direction or the Y direction can be understood from the change in the coloring pattern that occurs in each of the plurality of display areas. This is because it can be easily displayed. That is, since the displacement can be displayed in the plurality of display areas in which the magnitude of the displacement that can be displayed is set to be different, the magnitude of the displacement can be measured in detail. is there.

In the first embodiment, the resolution of the colored pattern region means the density of the colored pattern and the gap pattern provided in the colored pattern region so as to repeat according to the above constant rule, and the resolution of the light-shielding pattern region. Means the density of the shielding pattern and the light transmission pattern provided in the shading pattern region so as to repeat according to the constant rule. The resolution of the plurality of colored pattern regions is the same as that of the plurality of light-shielded pattern regions, and the resolution of the colored pattern region is small in the display region in which the light-shielding pattern region is arranged so as to overlap the pre-colored pattern region. The smaller the change in the coloring pattern that is visually recognized through the light transmission pattern can be observed, so that the resolution of the display area becomes smaller.

(2) Arrangement of Colored Pattern Plate and Light-shielding Pattern Plate The displacement visualization sensor of the first embodiment has the colored pattern plate provided in a pattern on one surface of the substrate and the substrate. When the light-shielding pattern plate has the transparent substrate and the light-shielding layer provided in a pattern on one surface of the transparent substrate, the arrangement of the colored pattern plate and the light-shielding pattern plate is not particularly limited. However, for example, the colored pattern plate and the light-shielding pattern plate may be arranged so that the surface on the colored layer side and the surface on the light-shielding layer side face each other, or the surface on the colored layer side and the light-shielding layer may be opposed to each other. It may be arranged so as to face the surface on the side opposite to the layer side.

(3) Frame As the displacement visualization sensor of the first embodiment, a frame surrounding the outer periphery of the colored pattern plate or the light-shielding pattern plate, as in the displacement visualization sensor 10 shown in FIG. 1 and FIGS. 23 and 25 described later. It is preferable that the difference in the coefficient of thermal expansion between the frame and the object to be measured is smaller than the difference in the coefficient of thermal expansion between the colored pattern plate or the light-shielding pattern plate and the object to be measured. When the measurement object to be visualized by the displacement visualization sensor thermally expands, the colored pattern plate or the light-shielding pattern plate in the displacement visualization sensor has a frame whose thermal expansion coefficient is close to that of the measurement object. Since the outer circumference is surrounded by the above-mentioned object, it expands following the measurement object. Therefore, when the displacement of the position relative to the first position of the measurement object is visualized or measured by using the displacement visualization sensor, the measurement object and the colored pattern plate or the light shielding are used. This is because the influence of the difference in thermal expansion coefficient with the pattern plate can be suppressed.

The frame is not particularly limited as long as the difference in the coefficient of thermal expansion from the object to be measured is smaller than the difference in the coefficient of thermal expansion between the colored pattern plate or the light-shielding pattern plate and the object to be measured. However, for example, when the measurement object is made of concrete, a metal frame or the like can be mentioned, and when the measurement object is made of wood, a wooden frame or the like can be mentioned.

(4) Adhesive Layer As the displacement visualization sensor of the first embodiment, as in the displacement visualization sensor 10 shown in FIGS. 23 and 25 described later, an adhesive layer is provided on one side of the colored pattern plate or the light-shielding pattern plate. It is preferable that it is. One side of the colored pattern plate or the light-shielding pattern plate can be fixed by adhering to the measurement object using the adhesive layer. Therefore, when the measurement object to be visualized by the displacement visualization sensor thermally expands, the colored pattern plate or the light-shielding pattern plate in the displacement visualization sensor has the adhesive layer on one side. Since it is adhered to the measurement object, it expands following the measurement object. Therefore, when the displacement visualization sensor is used to visualize or measure the displacement of the measurement object and the change over time in the surface shape of the measurement object, the measurement object and the colored pattern plate or the light shielding object are used. This is because the influence of the difference in the coefficient of thermal expansion from the pattern plate can be suppressed.

(5) Others As the displacement visualization sensor of the first embodiment, like the displacement visualization sensor 10 shown in FIG. 25, which will be described later, the displacement visualization sensor further includes the colored pattern plate or the frame surrounding the outer periphery of the light-shielding pattern plate. Moreover, an adhesive layer may be provided on one side of the colored pattern plate or the light-shielding pattern plate. This is because both the effect described in the item of "(3) frame" and the effect described in the item of "(4) adhesive layer" can be obtained.

6. Usage The displacement visualization sensor of the first embodiment is used for measuring the displacement of the position relative to the first position of the measurement object in the X direction or the Y direction, and the first measurement object. It can also be used for applications other than the application of visualizing the axial displacement of the position relative to the position in the Z direction.

FIG. 23A is a schematic top view showing another example of the displacement visualization sensor of the first embodiment. FIG. 23 (b) is a sectional view taken along line GG of FIG. 23 (a). The displacement visualization sensor 10 shown in FIG. 23A has a colored pattern plate 20 and a light-shielding pattern plate 30. Further, the displacement visualization sensor 10 further includes a second metal frame 40b that reinforces the light-shielding pattern plate 30 and surrounds the outer periphery of the light-shielding pattern plate 30. An adhesive layer 60 used for fixing to the measurement object 2 is provided on the entire surface of the colored pattern plate 20. The entire one side of the colored pattern plate 20 is attached to the entire surface of the measurement target region 2c having a width in the X direction as W and a width in the Y direction in the measurement object 2 via the adhesive layer 60. Further, the light-shielding pattern plate 30 is fixed to the second position 2b of the measurement object 2 by the adhesive layer 60 via the second metal frame 40b. As a result, the displacement visualization sensor 10 is installed on the measurement object 2.

In the displacement visualization sensor 10, as shown in FIG. 23B, in the colored pattern plate 20 and the light-shielding pattern plate 30, the colored pattern plate 20 is on the measurement object side and the light-shielding pattern plate 30 is on the observer side. It is laminated in parallel with. Further, the colored pattern plate 20 and the light-shielding pattern plate 30 are laminated so as to be relatively movable in the X direction and the Y direction and relatively rotatable about the Z direction. Further, although not shown, the colored pattern plate 20 has the same configuration as the colored pattern plate 20 shown in FIGS. 3 (a) to 3 (c) except that the substrate 22 has flexibility. Further, the light-shielding pattern plate 30 has the same configuration as the light-shielding pattern plate 30 shown in FIGS. 4 (a) to 4 (c).

In the displacement visualization sensor 10 shown in FIG. 23, the entire surface of the colored pattern plate 20 is attached to the entire surface of the measurement target region 2c via the adhesive layer 60, and the substrate 22 of the colored pattern plate 20 is flexible. Have. Therefore, if unevenness is generated on the surface of the measurement target region 2c, the colored pattern plate 20 will be curved at the uneven portion. As a result, when viewed in a plan view from the Z direction in the uneven portion, the colored line pattern 20L shielded by the light-shielding line pattern 30L in the non-uneven state is visually recognized via the light transmission space pattern 30S. Or, since the colored line pattern 20L is tilted with respect to the light-shielding line pattern 30L parallel to the Y direction in the XY plane, the intersection of the light-shielding line pattern 30L and the colored line pattern 20L is seen in a plan view from the Z direction. Striped moire will be observed. Therefore, it is possible to visualize the occurrence of unevenness and the position where unevenness is generated.

Further, in FIG. 24A, in the displacement visualization sensor 10 shown in FIG. 23, the colored line pattern is tilted with respect to the light-shielding line pattern parallel to the Y direction in the XY plane, so that the colored line pattern is viewed in a plan view from the Z direction. It is a schematic top view which shows the region where the moire in which the intersection of the shading line pattern and the colored line pattern is striped is observed.

When a protrusion occurs on the surface of the measurement target area 2c of the measurement object 2 in the central portion of the observation region shown in FIG. 24 (a), the moire 10M shown in FIG. 24 (a) is shown in FIG. As shown in 24 (b), it is deformed into a circle in the region where the protrusion is generated, which is indicated by the alternate long and short dash line. Further, when a crack extending in the X direction occurs on the surface of the measurement target region 2c of the measurement target 2 in the region on the Y direction side in the observation region shown in FIG. 24 (a), FIG. 24 (a) shows. As shown in FIG. 24 (c), the moire 10M shown in is expanded in the Y direction in the crack region indicated by the alternate long and short dash line. In the displacement visualization sensor shown in FIG. 23 (a), for example, even from the change of the moire 10M as shown in FIG. 24, the occurrence and unevenness of unevenness including linear or point-shaped unevenness on the surface of the measurement target region 2c. It is possible to visualize the position of occurrence of.

Further, when the displacement in the X direction or the Y direction or the displacement around the axis in the Z direction occurs in the measurement target region 2c of the measurement object 2, the colored pattern plate 20 is compressed or expanded at the displaced portion. become. As a result, in the portion where the displacement occurs, when viewed in a plan view from the Z direction, the colored line pattern 20L shielded by the light-shielding line pattern 30L in the state where the displacement does not occur can be visually recognized via the light transmission space pattern 30S. Or the colored line pattern 20L is tilted with respect to the light-shielding line pattern 30L parallel to the Y direction in the XY plane. Therefore, when viewed in a plan view from the Z direction, the light-shielding line pattern 30L and the colored line pattern 20L intersect. Moire with striped parts will be observed. Therefore, it is possible to visualize the occurrence of the displacement and the position where the displacement occurs.

Further, FIG. 25A is a schematic top view showing another example of the displacement visualization sensor of the first embodiment. 25 (b) is a sectional view taken along line GG of FIG. 25 (a). The displacement visualization sensor 10 shown in FIG. 25 reinforces the colored pattern plate 20 and further has a first metal frame 40a surrounding the outer periphery of the colored pattern plate 20, as shown in FIG. 25 (b). , Has the same configuration as the displacement visualization sensor 10 shown in FIG. The displacement visualization sensor 10 shown in FIG. 25 can also visualize the occurrence and the position where the displacement occurs, similar to the displacement visualization sensor 10 shown in FIG. 23.

The displacement visualization sensor of the first embodiment, like the displacement visualization sensor 10 shown in FIGS. 23 and 25, has an application of measuring a change in the surface shape of the measurement object with time, and each of the measurement objects. It can be used to measure displacement at position.

Further, as the displacement visualization sensor, it is preferable that the colored pattern plate has flexibility. For example, the displacement visualization sensor is used for measuring a change over time in the surface shape of the object to be measured. When used, the displacement visualization sensor is preferably one in which the colored pattern plate has flexibility that enables measurement of changes in the surface shape of the object to be measured over time. As the substrate used for the colored pattern plate having such flexibility, it is preferable to use a resin substrate having a low tensile elastic modulus (Young's modulus) and a large tensile strength. This is because the colored pattern plate can be preferably made to have the flexibility because it is easily deformed by a small stress and is not easily broken even when a large tensile stress is applied. Among them, ABS resin, polyethylene, polypropylene, polystyrene, polyurethane and the like are preferably used, and polyurethane and the like are particularly preferable. This is because the colored pattern plate can be made more preferably having the flexibility.

Further, for example, when the displacement visualization sensor is used for measuring the displacement at each position of the measurement object, the colored pattern plate is used as the displacement visualization sensor at each position of the measurement object. It is preferable that it has flexibility so that the displacement in the above can be measured. As the substrate used for the colored pattern board having such flexibility, it is preferable to use a resin substrate having a low tensile elastic modulus (Young's modulus) and a large tensile strength. This is because the colored pattern plate can be preferably made to have the flexibility because it is easily deformed by a small stress and is not easily broken even when a large tensile stress is applied. Among them, ABS resin, polyethylene, polypropylene, polystyrene, polyurethane and the like are preferably used, and polyurethane and the like are particularly preferable. This is because the colored pattern plate can be made more preferably having the flexibility.

7. Object to be measured The object to be measured to measure or visualize the displacement using the displacement visualization sensor of the first embodiment is, for example, an artificial structure made of concrete such as a slope, a high-rise building, or the like. Examples include measurement areas in iron man-made structures such as bridges, tunnels, trains, ships, and airplanes. Above all, the measurement area in an artificial structure made of concrete such as a slope or a high-rise building is preferable. This is because any displacement of a magnitude that needs to be visualized in the measurement area of a concrete artificial structure such as a slope or a high-rise building can be reliably visualized by the displacement visualization sensor.

Here, the slope is an artificial slope created by cutting or embankment. For the measurement area on the slope, it is necessary to visualize the displacement in the linear direction parallel to the slope by 0.1% or more with respect to the length of the measurement area. With the displacement visualization sensor, it is possible to visualize the displacement of the measurement area on the slope in the linear direction parallel to the slope by 0.1% or more with respect to the length of the measurement area. Further, for the measurement area on the wall surface of a high-rise building, it is necessary to visualize the displacement in the linear direction parallel to the wall surface of 0.1% or more with respect to the length of the measurement area. With the displacement visualization sensor, it is possible to visualize the displacement of the measurement area on the wall surface of a high-rise building in a linear direction parallel to the wall surface by 0.1% or more with respect to the length of the measurement area.

8. Manufacturing Method The manufacturing method of the displacement visualization sensor of the first embodiment is not particularly limited as long as it is a manufacturing method including the step of manufacturing the colored pattern plate and the step of manufacturing the light-shielding pattern board. Examples of the step of manufacturing the colored pattern board and the step of manufacturing the light-shielding pattern board include a step of manufacturing the colored pattern board and the light-shielding pattern board by a general method for manufacturing a color filter. ..

II. Second Embodiment The displacement visualization sensor of the second embodiment includes a colored pattern plate having a colored pattern that repeats according to a certain rule, a light-shielded pattern plate having a light-shielding pattern and a light transmission pattern that repeats according to the fixed rule, and the colored pattern plate and the above-mentioned colored pattern plate. It has a rotating shaft portion that rotatably connects the light-shielding pattern plates to each other, and the colored pattern plate and the light-shielding pattern plate are arranged so as to be on the observer side so that the light-shielding pattern plate is on the observer side. Along with the relative rotation of the light-shielding pattern plate around the rotation axis portion, the light-shielding pattern is visually recognized from the observer side and the light-transmitting pattern is visually recognized by the observer side. Moire is generated by combining with the colored pattern, and the moire displays the axial displacement of the rotating shaft portion at a position relative to the colored pattern plate.

In the following, the colored pattern plate and the light-shielding pattern plate are on the surface of the colored pattern plate on the colored pattern side or on the light-shielding pattern side of the light-shielding pattern plate, with the rotation shaft portion in which both plates are connected to each other as the rotation center. The displacement visualization sensor of the second embodiment will be described by taking as an example a sensor that is relatively rotatable about an axis of a third direction intersecting a surface including a first direction and a second direction along a surface.

Regarding the "first direction", "second direction", and "third direction" in the second embodiment, the "first direction" and "first direction" described in the item of "I. First embodiment" described above. Since it is the same as the "second direction" and the "third direction", the description thereof is omitted here.

Further, in the following, as specific examples of the first direction, the second direction, and the third direction, the same specific examples as those described in the item of "I. First Embodiment" will be used. The displacement visualization sensor of the second embodiment will be described. Further, as a mode for visually recognizing the displacement visualization sensor from the observer side, the displacement visualization sensor of the second embodiment will be described by using the same mode as the mode described in the item of the above "I. 1st embodiment". To do.
In the following description, from the "XY plane", "X direction", "Y direction", "Z direction", "-X direction", "-Y direction", "-Z direction", and "Z direction". The “plan view” means the same contents as those described in the above item “I. First Embodiment”. Further, in the following, the displacement visualization sensor of the second embodiment will be described using specific numerical values as dimensions, similarly to the displacement visualization sensor described in the item of "I. First embodiment". However, the above dimensions can be adjusted as appropriate.

An example of the displacement visualization sensor of the second embodiment will be described with reference to the drawings. FIG. 26A is a schematic top view showing an example of the displacement visualization sensor of the second embodiment in a state where the displacement visualization object is inclined relative to the reference structure in the Z direction. .. FIG. 26B is a schematic top view showing a colored pattern plate in the displacement visualization sensor shown in FIG. 26A.

Here, in the second embodiment, the "displacement visualization object" means an object for visualizing the inclination with respect to the reference structure or the ground, and the "reference structure" is a reference for the inclination of the displacement visualization object. Means the structure that becomes.

The displacement visualization sensor 10 shown in FIG. 26A has a colored pattern plate 20 and a light-shielding pattern plate 30. The displacement visualization sensor 10 further surrounds the outer periphery of the colored pattern plate 20 and the light-shielding pattern plate 30, respectively, and further has a first metal frame 40a and a second metal frame 40b fixed to both plates, respectively. In the displacement visualization sensor 10, the colored pattern plate 20 and the light-shielding pattern plate 30 are laminated in parallel so that the colored pattern plate 20 is on the reference structure side and the light-shielding pattern plate 30 is on the observer side.

As shown in FIG. 26B, the first metal frame 40a fixed to the colored pattern plate 20 is fixed to the iron reference structure 4 (first position of the measurement object) by the adhesive layer 60. .. On the other hand, as shown in FIG. 26A, the end portion of the second metal frame 40b fixed to the light-shielding pattern plate 30 on the −X direction side is the reference structure 4 and the displacement visualization object 3 (measurement object). It is not fixed at the second position), and the end portion of the second metal frame 40b on the X direction side is fixed to the displacement visualization object 3 by the adhesive layer 60.

The first metal frame 40a fixed to the colored pattern plate 20 and the second metal frame 40b fixed to the light-shielding pattern plate 30 are attached to the first metal frame 40a at the mounting position on the −Y direction side on the −X direction side. And they are attached to each other via a rotating shaft member 70 (rotating shaft portion) penetrating the second metal frame 40b. As a result, the light-shielding pattern plate 30 and the colored pattern plate 20 are rotatably connected to each other by the rotating shaft member 70. Assuming that the end of the second metal frame 40b on the X direction side is not fixed to the displacement visualization object 3, the second metal frame 40b is attached to the first metal frame 40a with the rotation shaft member 70 as the center of rotation. On the other hand, since the light-shielding pattern plate 30 is relatively rotatable around the axis in the Z direction, the light-shielding pattern plate 30 is relative to the colored pattern plate 20 in the Z direction with the rotation shaft member 70 as the center of rotation. It is rotatable.
The movement of the position of the light-shielding pattern plate 30 relative to the colored pattern plate 20 in the X direction or the Y direction is restricted by the rotating shaft member 70. Further, the rotation of the light-shielding pattern plate 30 relative to the colored pattern plate 20 around the axis in the Z direction is restricted by the rotating shaft member 70 except when the rotating shaft member 70 is the center of rotation.

The colored pattern plate 20 shown in FIG. 26 (a) is the same colored pattern plate 20 as the colored pattern plate 20 shown in FIG. 3, and the light-shielding pattern plate 30 shown in FIG. 26 (b) is shown in FIG. It is the same light-shielding pattern plate as the light-shielding pattern plate 30.

In the displacement visualization sensor 10 shown in FIG. 26 (a), in the initial state in which the displacement visualization object 3 is not tilted relative to the reference structure 4 about the axis in the Z direction, the displacement visualization object 3 and The light-shielding pattern plate 30 is arranged at the initial arrangement position indicated by the alternate long and short dash line in FIG. 26A. The initial arrangement position of the light-shielding pattern plate 30 is the same as the arrangement position of the colored pattern plate 20 when viewed in a plan view from the Z direction.

On the other hand, when the displacement visualization object 3 is tilted by α ° with respect to the reference structure 4 about the axis in the Z direction, as shown in FIG. 26A, from the Z direction. In a plan view, the placement position of the displacement visualization object 3 is a position where the initial placement position is rotated relative to the axis in the Z direction. As a result, as shown in FIG. 26A, the light-shielding pattern plate 30 fixed to the displacement visualization object 3 via the second metal frame 40b has the colored pattern plate 20 centered on the rotation shaft member 70. It will rotate by α ° relative to the axis in the Z direction.

Here, FIGS. 27 (a) to 27 (c) show, as the light-shielding pattern plate rotates relative to the colored pattern plate about the axis in the Z direction with the rotation shaft member as the center of rotation. It is a schematic top view which shows how the display of the displacement visualization sensor shown in 26 changes.

In the above initial state, as shown in FIG. 27A, when viewed in a plan view from the Z direction, the light-shielding line pattern and the light transmission space pattern are arranged in the same region as the colored line pattern and the gap space pattern 20S, respectively. , The entire colored line pattern is shielded by the light-shielding line pattern.

On the other hand, as shown in FIG. 26A, the light-shielding pattern plate 30 rotates α ° relative to the colored pattern plate 20 about the axis in the Z direction with the rotation shaft member 70 as the center of rotation. Along with this, the colored line pattern is tilted by α ° with respect to the light-shielding line pattern when viewed in a plan view from the Z direction.

As long as the rotation angle α ° at which the light-shielding pattern plate 30 rotates relative to the colored pattern plate 20 about the axis in the Z direction with the rotation shaft member 70 as the center of rotation is small, it is shown in FIG. 27 (b). As described above, the angle α ° at which the shading line pattern is tilted with respect to the colored line pattern is also minute. Therefore, when viewed in a plane from the Z direction, one colored line pattern is visually recognized via each of the plurality of light transmission space patterns parallel to the Y direction. As a result, the display of the displacement visualization sensor 10 viewed from the Z direction in a plan view is a combination of the plurality of light-shielding line patterns and the plurality of colored line patterns, but moire, which will be described later, is not observed.

On the other hand, when the rotation angle α ° at which the light-shielding pattern plate 30 rotates relative to the colored pattern plate 20 about the axis in the Z direction with the rotation shaft member 70 as the rotation center becomes large, as shown in FIG. 27 (c). In addition, the angle α ° at which the shading line pattern is tilted with respect to the colored line pattern becomes large. As a result, when viewed in a plan view from the Z direction, a plurality of colored line patterns are visually recognized via each of the plurality of light transmission space patterns parallel to the Y direction. As a result, moire is observed in which the intersections of the plurality of light-shielding line patterns and the plurality of colored line patterns are striped. As with the displacement visualization sensor 10 shown in FIG. 1, as the rotation angle α ° increases, the number of moire fringes increases and the pitch P of the moiré fringes decreases.

From the direction in which the light-shielding line pattern is inclined with respect to the colored line pattern, the direction in which the light-shielding pattern plate 30 rotates relative to the colored pattern plate 20 about the axis in the Z direction can be known. Further, the relationship of the following equation (2) is established for the pitch p of the line and space pattern, the pitch P of the moiré stripes, and the rotation angle α °. Therefore, if the pitch P of the moiré stripes is measured, the rotation angle α ° can be obtained by the following equation (2).

As described above, according to the displacement visualization sensor of the second embodiment, the moire generated by combining the shielding pattern and the coloring pattern visually recognized through the light transmission pattern in a plan view from the Z direction. Therefore, it is possible to display the displacement around the axis in the Z direction with the rotation axis portion as the rotation center at the position relative to the colored pattern plate. As a result, the inclination of the displacement visualization target (second position of the measurement target) with respect to the reference structure (first position of the measurement target) about the axis in the Z direction about the rotation axis portion is displayed. Can be done. In particular, depending on the mode of the colored pattern plate and the light-shielding pattern plate, the direction and magnitude of the displacement around the axis in the Z direction can be measured, so that the direction and angle of the inclination around the axis in the Z direction can be measured. Can be measured. Therefore, it is possible to visualize the displacement around the axis of the object to be measured including its direction and magnitude.
In the displacement visualization sensor of the second embodiment, as specific examples of the first direction and the second direction, a direction other than the X direction and a direction other than the Y direction are used, respectively, and the specific direction of the third direction is specified. Even if a direction other than the Z direction is used as an example, the same effect can be obtained. Further, even if the displacement visualization sensor is visually viewed from the observer side in a direction other than the Z direction instead of being viewed in a plan view from the observer side in the Z direction, the same effect can be obtained.

Hereinafter, each configuration of the displacement visualization sensor of the second embodiment will be described.

1. 1. Colored pattern plate As the colored pattern plate in the second embodiment, those provided with symbols are preferable, and those provided with a third symbol string indicating the displacement around the axis in the Z direction are particularly preferable. As will be described in detail in the item "4. Visualization method of displacement around the axis in the Z direction and moire (2) Visualization method of displacement around the axis in the Z direction" described later, visual recognition is performed through a light transmitting window described later. This is because the displacement around the axis in the Z direction can be measured by switching the display and non-display of the symbol which is easy to visually distinguish.

Excluding the above configuration, regarding the colored pattern plate in the second embodiment, the items of "I. First embodiment 1. Colored pattern plate (1) Colored pattern and gap pattern c. Others" and the above "I. 1 Embodiment 1. Colored pattern board (2) Colored pattern board c. Others Except for the configuration described in the item of "I. 1st embodiment 1. Colored pattern board", the colored pattern board described in the above item. Since it is the same as the above, the description here is omitted.

2. 2. Light-shielding pattern plate The light-shielding pattern plate in the second embodiment is preferably provided with a light-transmitting window capable of visually recognizing the above symbols, and among them, the light-transmitting window used for visually recognizing the third symbol string. 3 It is preferable that a light transmitting window is provided. As will be described in detail in the item "4. Visualization method of displacement around the axis in the Z direction and moire (2) Visualization method of displacement around the axis in the Z direction", which will be described later, the image is visually recognized through the light transmission window. This is because the displacement around the axis in the Z direction can be measured by switching between the display and non-display of the symbol, which is easy to visually distinguish.

Excluding the above configuration, the light-shielding pattern plate in the second embodiment is excluding the configuration described in the above item "I. First embodiment 2. Light-shielding pattern plate (2) Light-shielding pattern plate c. Others". Since it is the same as the light-shielding pattern plate described in the above item "I. First Embodiment 2. Light-shielding pattern plate", the description thereof is omitted here.

3. Combination of colored pattern plate and light-shielding pattern plate For the combination of the colored pattern plate and the light-shielding pattern plate in the second embodiment, the item of "I. First embodiment 3. Combination of the colored pattern plate and the light-shielding pattern plate". Since it is the same as the light-shielding pattern plate described in the above, the description thereof is omitted here.

4. Moire and Displacement Visualization Method in the Z Direction In the displacement visualization sensor of the second embodiment, the Z direction is accompanied by the relative rotation of the colored pattern plate and the light-shielding pattern plate around the rotation axis portion. Moire is generated by combining the shielding pattern and the coloring pattern visually recognized through the light transmission pattern in a plan view. Then, the moiré pattern displays the axial displacement of the light-shielding pattern plate relative to the colored pattern plate in the Z direction with the rotation axis portion as the rotation center. Hereinafter, a method for visualizing the moiré and the displacement around the axis in the Z direction will be described in detail.

(1) Moire The moire is described in the above "I. First Embodiment 4." Except that the moire is caused by the relative rotation of the colored pattern plate and the light-shielding pattern plate around the rotation axis portion. Displacement visualization Sensor display and displacement measurement method and visualization method (2) Z-direction axial displacement visualization method a. Moire ”is the same as the moire described, so the description here is omitted.

(2) Method for Visualizing Axial Displacement in the Z Direction Using the displacement visualization sensor of the second embodiment, the light-shielding pattern plate is relative to the colored pattern plate from the moire in a plan view from the Z direction. As a method of visualizing the displacement of the position around the axis in the Z direction about the rotation axis portion as the rotation center, for example, when the coloring pattern and the gap pattern are line-and-space patterns, for example, FIG. By using the displacement visualization sensor 10 shown, one colored line pattern can be visually recognized through each of the plurality of light transmission space patterns in a plan view from the Z direction, whereby the rotation of the relative position is performed. Examples thereof include a method of detecting the occurrence of a minute displacement around the axis in the Z direction centered on the shaft portion. Further, when viewed in a plan view from the Z direction, moire in which the intersections of the plurality of light-shielding line patterns and the plurality of colored line patterns are striped is observed, so that the rotation shaft portion at the relative position is rotated. A method of detecting that a larger displacement around the axis in the Z direction around the center has occurred can be mentioned. Further, from the direction in which the shading line pattern is tilted with respect to the colored line pattern, the pitch p of the line and space pattern, and the pitch P of the moiré fringes, the direction of displacement around the axis in the Z direction and the rotation angle α ° are obtained. There is a method to find it.

Further, for example, when the coloring pattern and the gap pattern are gap dot patterns, for example, they are visually recognized through each of the plurality of light transmitting dots 30c shown in FIG. 9 in a plan view from the Z direction. A method of detecting that the axial displacement in the Z direction has occurred can be mentioned by observing moire in which the aggregated portion of the plurality of gap dots 20c shown in FIG. 10 is striped. Further, from the direction in which the arrangement direction of the plurality of light transmitting dots 30c is inclined with respect to the arrangement direction of the plurality of gap dots 20c, the pitch p of the gap dot pattern, and the pitch P of the moire stripes, the axial rotation in the Z direction. There is a method of obtaining the direction of displacement and the rotation angle α ° of.

Then, in the line-and-space pattern and the dot pattern, the following equation (2) is used between the pitch p of these patterns, the pitch P of the moire fringes, and the rotation angle α ° of the displacement around the axis in the Z direction. Relationship is established. Therefore, if the pitch P of the moiré fringes is measured, the rotation angle α ° of the displacement around the axis in the Z direction can be obtained by the following equation (2).

Further, in the second embodiment, as a method of visualizing the displacement around the axis in the Z direction about the rotation shaft portion at the relative position as the rotation center, the rotation shaft of the colored pattern plate and the light-shielding pattern plate is used. Along with the relative rotation centered on the portion, the display and non-display of the above symbol visually recognized through the light transmission window are switched in a plan view from the Z direction, and the display and non-display of the above symbol are switched. Therefore, the method of measuring the axial displacement in the Z direction is preferable, and among them, the colored pattern plate and the light-shielding pattern plate are viewed in a plan view from the Z direction as the relative rotation of the light-shielding pattern plate about the rotation axis portion is performed. Therefore, a change in the third symbol string visually recognized through the third light transmission window occurs, and a method of measuring the axial displacement in the Z direction is preferable from the change in the third symbol string. This is because the displacement around the axis in the Z direction can be measured by switching the display and non-display of the symbol, which is easy to visually distinguish.

5. Displacement Visualization Sensor The displacement visualization sensor of the second embodiment may be an embodiment other than the embodiments described so far, and may have a configuration other than the configurations described so far.

(1) Displacement visualization sensor in which one end of the light-shielding pattern plate faces in the vertical direction In FIG. 28 (a), the measurement area on the wall surface of the displacement visualization object is inclined relative to the ground in the Z direction. It is a schematic top view which shows another example of the displacement visualization sensor of 2nd Embodiment in a state. FIG. 28 (b) is a schematic top view showing a measurement area and a colored pattern plate on the wall surface of the displacement visualization object shown in FIG. 28 (a).
In addition, in FIG. 28A and FIG. 28B, the −Y direction is the vertical direction, and the XY plane is a plane along the vertical direction.

The displacement visualization sensor 10 shown in FIG. 28A has a colored pattern plate 20 and a light-shielding pattern plate 30. The displacement visualization sensor 10 further surrounds the outer periphery of the colored pattern plate 20 and the light-shielding pattern plate 30, respectively, and further has a first metal frame 40a and a second metal frame 40b fixed to both plates, respectively. In the displacement visualization sensor 10, the colored pattern plate 20 and the light-shielding pattern plate 30 are laminated in parallel so that the colored pattern plate 20 is on the reference structure side and the light-shielding pattern plate 30 is on the observer side. In the displacement visualization sensor 10, the light-shielding pattern plate 30 is arranged along the vertical direction.

As shown in FIG. 28 (b), the first metal frame 40a fixed to the colored pattern plate 20 has a measurement region 3w (second position of the measurement object) on the wall surface of the displacement visualization object along the vertical direction. Is fixed by an adhesive layer 60. Then, as shown in FIG. 28A, the first metal frame 40a fixed to the colored pattern plate 20 and the second metal frame 40b fixed to the light-shielding pattern plate 30 are mounted at the Y-direction side mounting positions. They are attached to each other via a rotating shaft member 70 (rotating shaft portion) that penetrates the first metal frame 40a and the second metal frame 40b. As a result, the light-shielding pattern plate 30 and the colored pattern plate 20 are rotatably connected to each other by the rotating shaft member 70.

Since the second metal frame 40b is not fixed, the second metal frame 40b can rotate relative to the first metal frame 40a about the axis in the Z direction with the rotation shaft member 70 as the center of rotation. Therefore, the light-shielding pattern plate 30 can rotate relative to the colored pattern plate 20 about the axis in the Z direction with the rotation shaft member 70 as the center of rotation.
The movement of the position of the light-shielding pattern plate 30 relative to the colored pattern plate 20 in the X direction or the Y direction is restricted by the rotating shaft member 70. Further, the rotation of the light-shielding pattern plate 30 relative to the colored pattern plate 20 around the axis in the Z direction is restricted by the rotating shaft member 70 except when the rotating shaft member 70 is the center of rotation.

The colored pattern plate 20 shown in FIG. 28 (a) is the same colored pattern plate 20 as the colored pattern plate 20 shown in FIG. 3, and the light-shielding pattern plate 30 shown in FIG. 28 (b) is shown in FIG. It is the same light-shielding pattern plate as the light-shielding pattern plate 30. A weight 80 is fixed to the ground-side end of the second metal frame 40b fixed to the light-shielding pattern plate 30. As a result, the center of gravity of the light-shielding pattern plate 30 becomes a position different from the position where it is connected to the colored pattern plate 20 by the rotating shaft member 70.

In the displacement visualization sensor 10 shown in FIG. 28A, the measurement area 3w on the wall surface of the displacement visualization object is not tilted relative to the ground (first position of the measurement object) (not shown). In the initial state, the measurement region 3w on the wall surface of the displacement visualization object is arranged at the initial arrangement position indicated by the alternate long and short dash line in FIGS. 28A and 28B when viewed in a plan view from the Z direction. Further, the colored pattern plate 20 is arranged at the initial arrangement position shown by the alternate long and short dash line in FIG. 28 (b), and the ground-side end 20e of the colored pattern plate faces in the vertical direction. On the other hand, in the above initial state, the ground-side end 20e of the light-shielding pattern plate is also oriented in the vertical direction by the weight 80. It is the same as the initial arrangement position of the pattern plate 20.

On the other hand, in the state where the measurement area 3w on the wall surface of the displacement visualization object is inclined by α ° relative to the ground (not shown) about the axis in the Z direction, FIGS. 28A and 28A and FIGS. As shown in 28 (b), when viewed in a plan view from the Z direction, the arrangement position of the colored pattern plate 20 is a position where the initial arrangement position is inclined by α ° relative to the axis in the Z direction. On the other hand, as shown in FIG. 28B, the ground-side end 20e of the light-shielding pattern plate remains oriented in the vertical direction by the weight 80 without changing from the initial state. Therefore, when viewed in a plan view from the Z direction, the arrangement position of the light-shielding pattern plate 30 remains the same as the initial arrangement position of the colored pattern plate 20 without changing from the initial state. As a result, as shown in FIG. 26A, the light-shielding pattern plate 30 rotates α ° relative to the colored pattern plate 20 about the axis in the Z direction with the rotation shaft member 70 as the center of rotation. become.

Therefore, in the displacement visualization sensor 10 shown in FIG. 28 (a), similarly to the displacement visualization sensor 10 shown in FIG. 26 (a), the displacement visualization sensor 10 is viewed in a plan view from the Z direction through the light-shielding line pattern and the light transmission space pattern. The displacement around the axis in the Z direction with the rotation shaft member 70 at the position relative to the light-shielding pattern plate 30 as the rotation center is displayed by the moire generated by combining with the colored line pattern visually recognized. can do. Therefore, it is possible to display the inclination of the measurement area 3w on the wall surface of the displacement visualization object with respect to the ground around the axis in the Z direction.

As the displacement visualization sensor of the second embodiment, as in the displacement visualization sensor 10 shown in FIG. 28A, the center of gravity of the light-shielding pattern plate is located at a position where the light-shielding pattern plate is connected to the colored pattern plate by the rotation shaft portion. Different ones are preferred. When the displacement visualization sensor is arranged so that the light-shielding pattern plate is oriented in the vertical direction, the light-shielding pattern plate has a center of gravity so that one end of the light-shielding pattern plate faces the vertical direction. Without fixing the pattern plate to the ground (first position of the object to be measured), the inclination of the measurement area (second position of the object to be measured) on the wall surface of the displacement visualization object with respect to the ground around the axis in the Z direction. This is because it can be visualized.

(2) Arrangement of Colored Pattern Plate and Light-shielding Pattern Plate Regarding the arrangement of the colored pattern plate and light-shielding pattern plate in the second embodiment, the above-mentioned "I. First Embodiment 5. Displacement visualization sensor (2) Colored pattern plate and light-shielding pattern plate" Since it is the same as the arrangement of the colored pattern plate and the light-shielding pattern plate described in the item of "Arrangement of pattern plates", the description thereof is omitted here.

(3) Frame The displacement visualization sensor of the second embodiment further includes a frame surrounding the outer periphery of the colored pattern plate or the light-shielding pattern plate, as in the displacement visualization sensor 10 shown in FIG. It is preferable that the difference in the coefficient of thermal expansion from the object to be measured is smaller than the difference in the coefficient of thermal expansion between the colored pattern plate or the light-shielding pattern plate and the object to be measured. The reason is the same as the reason described in the item of "I. 1st Embodiment 5. Displacement visualization sensor (3) frame" above. Further, since the above-mentioned frame is the same as the frame described in the item of "I. 1st Embodiment 5. Displacement visualization sensor (3) frame", the description here is omitted.

(4) Adhesive Layer As the displacement visualization sensor of the second embodiment, it is preferable that the adhesive layer is provided on one side of the colored pattern plate or the light-shielding pattern plate. This is for the same reason as described in the above item "I. First Embodiment 5. Displacement visualization sensor (4) Adhesive layer".

(5) Others The displacement visualization sensor of the second embodiment further has the frame surrounding the colored pattern plate or the outer periphery of the light-shielding pattern plate, and has an adhesive layer on one side of the colored pattern plate or the light-shielding pattern plate. May be provided. The reason is the same as the reason described in the above item "I. 1st Embodiment 5. Displacement visualization sensor (5) Others".

6. How to Use The displacement visualization sensor of the second embodiment is, for example, a displacement visualization such as the displacement visualization object 3 shown in FIG. 26 or 27 with respect to the reference structure 4 shown in FIG. 26 or a reference structure such as the ground. It can be used for visualizing the inclination of an object around the axis in the Z direction.

7. Object to be measured The object to be measured for visualizing the displacement using the displacement visualization sensor of the second embodiment is the same as the object to be measured described in the above item "I. First embodiment 7. Object to be measured". Therefore, the description here is omitted.

8. Manufacturing Method As a manufacturing method of the displacement visualization sensor of the second embodiment, the step of manufacturing the colored pattern plate, the step of manufacturing the light-shielding pattern plate, and the colored pattern plate and the light-shielding pattern plate are combined with the light-shielding pattern. A step of connecting the plates by the rotating shafts so that the plates are overlapped so as to be on the observer side and can be relatively rotated around the axis in the Z direction with the rotating shaft as the center of rotation. The production method is not particularly limited as long as it has. The step of manufacturing the colored pattern board and the step of manufacturing the light-shielding pattern board are the same as the manufacturing method described in the item of "I. 1st Embodiment 8. Manufacturing method", and thus the description thereof will be described here. Is omitted.

B. Displacement visualization method The displacement visualization method of the present invention includes a colored pattern plate arranging step of fixing and arranging a colored pattern plate having a colored pattern that repeats according to a fixed rule at a first position of a measurement object, and after the colored pattern plate arranging step. In, when visualizing the displacement of the position relative to the first position of the measurement object, a light-shielding pattern plate having a light-shielding pattern and a light transmission pattern that repeats according to the above-mentioned constant rule is superimposed on the colored pattern plate. A light-shielding pattern plate arranging step of fixing and arranging the object to be measured at a second position, a change in the coloring pattern visually recognized through the light transmission pattern, or a visual recognition through the light-shielding pattern and the light transmission pattern. It is characterized by having a displacement visualization step of observing moire generated by combining with the coloring pattern to be performed and visualizing the displacement of the position relative to the first position of the measurement object. And.

According to the present invention, the displacement can be concealed by a person other than the observer at a time other than when the displacement of the position relative to the first position of the measurement object is visualized.

The colored pattern plate used in the present invention is not particularly limited as long as it has a colored pattern that repeats according to a certain rule. For example, the above-mentioned "A. Displacement visualization sensor I. First embodiment 1. Coloring". Examples thereof include the colored pattern board described in the item of "pattern board". The light-shielding pattern plate used in the present invention is not particularly limited as long as it has a light-shielding pattern and a light transmission pattern that repeat according to the above-mentioned constant rules. For example, the above-mentioned "A. Displacement visualization sensor I. The light-shielding pattern board and the like described in the item of "1st Embodiment 2. light-shielding pattern board" can be mentioned. Further, the combination of the colored pattern plate and the light-shielding pattern plate used in the present invention is described in the item of "A. Displacement visualization sensor I. First embodiment 3. Combination of colored pattern plate and light-shielding pattern plate". Since it is the same as the combination of the colored pattern plate and the light-shielding pattern plate, the description here is omitted.

The colored pattern plate arranging step is not particularly limited as long as it is a step of fixing and arranging the colored pattern plate at the first position of the measurement object, but is shown in FIG. 1, for example. The colored pattern plate 20 may be fixedly arranged at the first position 2a of the measurement object 2 as described above, or the colored pattern plate 20 may be a reference which is the first position of the measurement object as shown in FIG. It may be a step of fixing and arranging the structure 4.

Further, in the light-shielding pattern plate arranging step, after the colored pattern plate arranging step, when the displacement of the position relative to the first position of the measurement object is visualized, the light-shielding pattern plate is used. The process is not particularly limited as long as it is a step of superimposing the colored pattern plate and fixing it at the second position of the measurement object, but for example, as shown in FIG. It may be a step of superimposing on 20 and fixing and arranging it at the second position 2b of the measurement object 2, or as shown in FIG. It may be a step of fixing and arranging the displacement visualization object 3 which is the position.

Further, the displacement visualization step is generated by changing the coloring pattern visually recognized through the light transmission pattern, or by combining the light shielding pattern and the coloring pattern visually recognized through the light transmission pattern. The process is not particularly limited as long as it is a step of observing the moire and visualizing the displacement of the position relative to the first position of the measurement object, and the change of the coloring pattern or the moire is observed. As a method of observing and visualizing the displacement, the above-mentioned X direction or the above-mentioned X direction described in the item of "A. Displacement visualization sensor I. First embodiment 4. Display of displacement visualization sensor and measurement method and visualization method of displacement". The method of measuring the displacement in the Y direction and the method of visualizing the displacement around the axis in the Z direction can be used.

C. Displacement visualization system The displacement visualization system of the present invention is imaged by the above-mentioned displacement visualization sensor, an image pickup device that images the above-mentioned shielding pattern and the above-mentioned coloring pattern that is visually recognized through the above-mentioned light transmission pattern, and the above-mentioned image pickup device. It is characterized by having an analysis device for analyzing an image.

FIG. 29 is a schematic view showing an example of the displacement visualization system of the present invention. The displacement visualization system 90 shown in FIG. 29 views the displacement visualization sensor 10 installed on the measurement object 2 and the displacement visualization sensor 10 in a plan view, and visually recognizes the displacement visualization sensor 10 through the shielding pattern and the light transmission pattern of the displacement visualization sensor 10. It has an image pickup device 92 that captures the coloring pattern to be imaged, and an analysis device 94 that analyzes an image captured by the image pickup device 92.

According to the present invention, it is possible to visualize not only the displacement in the linear direction but also the displacement around the axis of the object to be measured including the direction and the magnitude.

The image pickup device is not particularly limited as long as it is a device that views the displacement visualization sensor in a plan view and images the shielding pattern and the coloring pattern visually recognized through the light transmission pattern. For example, a CCD image sensor and the like can be mentioned.

The analysis device is not particularly limited as long as it is an device that analyzes an image captured by the image pickup device, but is described in, for example, the item of "A. Displacement visualization sensor I. First embodiment". In the displacement visualization sensor of the above, the first position of the light-shielding pattern plate relative to the colored pattern plate is based on the change of the colored pattern caused by the relative movement of the colored pattern plate and the light-shielding pattern plate. From the moire generated by measuring the displacement in the direction or the second direction, or due to the relative rotation of the colored pattern plate and the light-shielding pattern plate, the axial rotation of the relative position in the third direction. In order to visualize the displacement of the above image, the device may be used. For example, in the displacement visualization sensor described in the item of "A. Displacement visualization sensor II. Second embodiment", the colored pattern plate and the above. A device that analyzes the image in order to visualize the axial displacement of the rotation shaft portion at the relative position from the moire generated due to the relative rotation of the light-shielding pattern plate around the rotation shaft portion. It may be.

The analysis device is not particularly limited as long as it is a device that analyzes an image captured by the image pickup device, and examples thereof include a personal computer in which a dedicated program is installed.

The present invention is not limited to the above embodiment. The above embodiment is an example, and any one having substantially the same configuration as the technical idea described in the claims of the present invention and exhibiting the same effect and effect is the present invention. It is included in the technical scope of the invention.

10 ... Displacement visualization sensor, 20 ... Colored pattern board, 30 ... Shading pattern board, 22 ... Substrate, 24 ... Colored layer, 32 ... Transparent substrate, 34 ... Shading layer

Claims (14)

It has a colored pattern board having a colored pattern that repeats according to a fixed rule, and a light-shielded pattern board having a light-shielding pattern and a light-transmitting pattern that repeats according to the fixed rule.
The colored pattern plate and the light-shielding pattern plate are arranged so as to be stacked so that the light-shielding pattern plate is on the observer side.
The colored pattern plate and the light-shielding pattern plate are relatively movable in a first direction or a second direction along a surface of the colored pattern plate on the colored pattern side or a surface of the light-shielding pattern plate on the light-shielding pattern side. It is relatively rotatable about a third direction that intersects the surface including the first direction and the second direction.
Along with the relative movement of the colored pattern plate and the light-shielding pattern plate, a change in the colored pattern that is visually recognized from the observer side via the light transmission pattern occurs.
Due to the change in the coloring pattern, the displacement of the position of the light-shielding pattern plate relative to the coloring pattern plate in the first direction or the second direction is displayed.
With the relative rotation of the colored pattern plate and the light-shielding pattern plate, the shielding pattern visually recognized from the observer side and the coloring pattern visually recognized from the observer side via the light transmission pattern. Moire is generated by combining
The moire indicates the axial displacement of the light-shielding pattern plate relative to the colored pattern plate in the third direction.
The color of the coloring pattern and the color of the shading pattern are different .
Further having a frame surrounding the outer periphery of the colored pattern plate or the light-shielding pattern plate,
A displacement visualization sensor characterized in that the difference in the coefficient of thermal expansion between the frame and the object to be measured is smaller than the difference in the coefficient of thermal expansion between the colored pattern plate or the light-shielding pattern plate and the object to be measured . The colored pattern board has a colored layer on one surface of the substrate and the substrate, and the colored layer has the colored pattern.
The displacement visualization sensor according to claim 1, wherein the light-shielding pattern plate has a light-shielding layer on one surface of a transparent substrate and the transparent substrate, and the light-shielding layer has the light-shielding pattern. It has a colored pattern board having a colored pattern that repeats according to a fixed rule, and a light-shielded pattern board having a light-shielding pattern and a light-transmitting pattern that repeats according to the fixed rule.
The colored pattern plate and the light-shielding pattern plate are arranged so as to be stacked so that the light-shielding pattern plate is on the observer side.
The colored pattern plate and the light-shielding pattern plate are relatively movable in a first direction or a second direction along a surface of the colored pattern plate on the colored pattern side or a surface of the light-shielding pattern plate on the light-shielding pattern side. It is relatively rotatable about a third direction that intersects the surface including the first direction and the second direction.
Along with the relative movement of the colored pattern plate and the light-shielding pattern plate, a change in the colored pattern that is visually recognized from the observer side via the light transmission pattern occurs.
Due to the change in the coloring pattern, the displacement of the position of the light-shielding pattern plate relative to the coloring pattern plate in the first direction or the second direction is displayed.
With the relative rotation of the colored pattern plate and the light-shielding pattern plate, the shielding pattern visually recognized from the observer side and the coloring pattern visually recognized from the observer side via the light transmission pattern. Moire is generated by combining
The moire indicates the axial displacement of the light-shielding pattern plate relative to the colored pattern plate in the third direction.
The colored pattern plate has a plurality of the colored pattern, a plurality of said colored pattern and a first color pattern and the second color pattern, Ri Do different colors of the first colored pattern and the second color pattern,
Further having a frame surrounding the outer periphery of the colored pattern plate or the light-shielding pattern plate,
A displacement visualization sensor characterized in that the difference in the coefficient of thermal expansion between the frame and the object to be measured is smaller than the difference in the coefficient of thermal expansion between the colored pattern plate or the light-shielding pattern plate and the object to be measured . The displacement visualization sensor according to any one of claims 1 to 3, wherein the colored pattern plate has flexibility. The colored pattern plate has a plurality of colored pattern regions, and the plurality of colored pattern regions each have the colored pattern.
The light-shielding pattern plate has a plurality of light-shielding pattern regions that overlap each other with the plurality of colored pattern regions, and the plurality of light-shielding pattern regions have the light-shielding pattern and the light transmission pattern, respectively.
The displacement visualization according to any one of claims 1 to 4, wherein the plurality of colored pattern regions have different resolutions from each other and have the same resolution as the plurality of light-shielding pattern regions that overlap each other. sensor. It has a colored pattern board having a colored pattern that repeats according to a fixed rule, and a light-shielded pattern board having a light-shielding pattern and a light-transmitting pattern that repeats according to the fixed rule.
The colored pattern plate and the light-shielding pattern plate are arranged so as to be stacked so that the light-shielding pattern plate is on the observer side.
The colored pattern plate and the light-shielding pattern plate are relatively movable in a first direction or a second direction along a surface of the colored pattern plate on the colored pattern side or a surface of the light-shielding pattern plate on the light-shielding pattern side. It is relatively rotatable about a third direction that intersects the surface including the first direction and the second direction.
Along with the relative movement of the colored pattern plate and the light-shielding pattern plate, a change in the colored pattern that is visually recognized from the observer side via the light transmission pattern occurs.
Due to the change in the coloring pattern, the displacement of the position of the light-shielding pattern plate relative to the coloring pattern plate in the first direction or the second direction is displayed.
With the relative rotation of the colored pattern plate and the light-shielding pattern plate, the shielding pattern visually recognized from the observer side and the coloring pattern visually recognized from the observer side via the light transmission pattern. Moire is generated by combining
The moire indicates the axial displacement of the light-shielding pattern plate relative to the colored pattern plate in the third direction.
A symbol is provided on the colored pattern plate,
A light transmitting window that allows the symbol to be visually recognized is provided on the light-shielding pattern plate.
Displacement characterized in that the display and non-display of the symbol visually recognized from the observer side through the light transmitting window is switched with the relative movement or rotation of the colored pattern plate and the light-shielding pattern plate. Visualization sensor. The displacement visualization sensor according to claim 6, wherein a plurality of the symbols are provided on the colored pattern plate, and a plurality of the light transmitting windows are provided on the light-shielding pattern plate. A rotating shaft portion that rotatably connects the colored pattern plate having a colored pattern that repeats according to a fixed rule, the light-shielding pattern plate having the light-shielding pattern and the light-transmitting pattern that repeats according to the fixed rule, and the colored pattern plate and the light-shielding pattern plate. Have,
The colored pattern plate and the light-shielding pattern plate are arranged so as to be stacked so that the light-shielding pattern plate is on the observer side.
Along with the relative rotation of the colored pattern plate and the light-shielding pattern plate around the rotation axis portion, the shielding pattern visually recognized from the observer side and the light transmission pattern from the observer side are used. Moire occurs when it is combined with the coloring pattern that is visually recognized.
A displacement visualization sensor characterized by displaying the axial displacement of the rotating shaft portion at a position relative to the light-shielding pattern plate by the moire. The displacement visualization sensor according to claim 8, wherein the center of gravity of the light-shielding pattern plate is different from the position where the light-shielding pattern plate is connected to the colored pattern plate by the rotating shaft portion. A symbol is provided on the colored pattern plate,
A light transmitting window that allows the symbol to be visually recognized is provided on the light-shielding pattern plate.
The claim is characterized in that the display and non-display of the symbol visually recognized from the observer side through the light transmitting window is switched with the relative movement or rotation of the colored pattern plate and the light-shielding pattern plate. 8. The displacement visualization sensor according to claim 9. Further having a frame surrounding the outer periphery of the colored pattern plate or the light-shielding pattern plate,
A sixth to tenth aspect of the present invention, wherein the difference in the coefficient of thermal expansion between the frame and the object to be measured is smaller than the difference in the coefficient of thermal expansion between the colored pattern plate or the light-shielding pattern plate and the object to be measured. Displacement visualization sensor described in any of. The displacement visualization sensor according to any one of claims 1 to 11, wherein an adhesive layer is provided on one surface of the colored pattern plate or the light-shielding pattern plate. It is characterized by having a displacement visualization step of observing the moire using the displacement visualization sensor according to any one of claims 1 to 12 and visualizing the displacement of the relative position of the measurement object. Displacement visualization method. The displacement visualization sensor according to any one of claims 1 to 12,
An imaging device that captures the shielding pattern and the coloring pattern that is visually recognized through the light transmission pattern.
An analysis device that analyzes the image captured by the image pickup device, and
Displacement visualization system characterized by having.