JP6786089B2 - 対象物捕捉装置、および対象物捕捉装置ユニット - Google Patents
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Description
図1は、本発明の実施の形態1に係る対象物捕捉装置1の構成を示す、平面図およびX−Y線断面図である。対象物捕捉装置1は、半導体基板2、電極対群3、ウェル形成層11、制御回路12、および保護膜17を備えている。電極対群3は、第1電極対13、第2電極対14、および第3電極対15を有している。また、対象物捕捉装置1には、ウェル16が形成されている。
図5は、本発明の実施の形態2に係る対象物捕捉装置1bの構成を示す、平面図およびX−Y線断面図である。対象物捕捉装置1bは、対象物捕捉装置1の構成に加え、サブウェル形成層19を備えている。サブウェル形成層19は、ウェル16内において保護膜17に対して積層されており、換言すれば、ウェル16の底面に対して積層されており、例えば樹脂によって構成されている。サブウェル形成層19には、保護膜17を露出させるための3つの開口が形成されており、これらの3つの開口がそれぞれ第1サブウェル23、第2サブウェル24、および第3サブウェル25に相当する。第1サブウェル23、第2サブウェル24、および第3サブウェル25は、それぞれ、第1電極対13の直上、第2電極対14の直上、および第3電極対15の直上に形成されている。つまり、第1電極対13、第2電極対14、および第3電極対15毎に、その上方にサブウェルが配置されている。
図7は、本発明の実施の形態3に係る対象物捕捉装置1dの構成を示す、平面図およびX−Y線断面図である。対象物捕捉装置1dは、電極対群3ではなく、電極対群3aを備えている点が、対象物捕捉装置1と異なっている。
本発明の態様1に係る対象物捕捉装置は、ウェルと、上記ウェルの底部に配置された、複数組の電極対(第1電極対13〜第3電極対15)である電極対群とを備えており、上記電極対群は、上記複数組の電極対毎に個別の交流電圧が印加され、印加された交流電圧に応じて発生した誘電泳動により対象物を捕捉する。
1U 対象物捕捉装置ユニット
1_1 第1対象物捕捉装置
1_2 第2対象物捕捉装置
2 半導体基板
3、3´、3a 電極対群
11 ウェル形成層
12、12´、12a 制御回路
13、13´、13_1、13_2、37 第1電極対
14、14´、14_1、14_2、38 第2電極対
15、15´、15_1、15_2、39 第3電極対
16、16´ ウェル
17 保護膜
18 フォトダイオード
19 サブウェル形成層
23 第1サブウェル(サブウェル)
24 第2サブウェル(サブウェル)
25 第3サブウェル(サブウェル)
26 サブウェル集合体
27〜29 狭窄部
33 第1電極
34 第2電極
35 第3電極
36 共通電極
131、141、151 スイッチ
132、142、152 スイッチ設定部
133、143、153 メモリ
134、144、154 制御部
161、162、171、172、181、182 電圧源
C、D、E、F_1、F_2、G_1、G_2、H_1、H_2 細胞(対象物)
Claims (8)
- ウェルと、
上記ウェルの底部に配置された、複数組の電極対である電極対群とを備えており、
上記電極対群は、上記複数組の電極対毎に個別の交流電圧が印加され、印加された交流電圧に応じて発生した誘電泳動により対象物を捕捉し、
上記複数組の電極対毎に、その上方にサブウェルが配置されていることを特徴とする対象物捕捉装置。 - 上記サブウェルのうち少なくとも2つが互いに結合されて、サブウェル集合体が形成されていることを特徴とする請求項1に記載の対象物捕捉装置。
- 上記サブウェル集合体に、上記サブウェル集合体の幅を狭める狭窄部が形成されていることを特徴とする請求項2に記載の対象物捕捉装置。
- 上記複数組の電極対のいずれかである第1電極対の電極と、上記複数組の電極対のいずれかであり上記第1電極対と異なる第2電極対の電極とが共用されていることを特徴とする請求項1から3のいずれか1項に記載の対象物捕捉装置。
- 上記電極対群の下方に配置されたフォトダイオードを備えていることを特徴とする請求項1から4のいずれか1項に記載の対象物捕捉装置。
- 上記複数組の電極対のうち少なくとも1組は、細胞膜を破壊するための電界を発生することが可能であることを特徴とする請求項1から5のいずれか1項に記載の対象物捕捉装置。
- 細胞膜を破壊するための電界を発生する細胞破壊用電極を備えていることを特徴とする請求項1から5のいずれか1項に記載の対象物捕捉装置。
- 請求項1から7のいずれか1項に記載の対象物捕捉装置である第1対象物捕捉装置と、
請求項1から7のいずれか1項に記載の対象物捕捉装置であり、上記第1対象物捕捉装置と異なる第2対象物捕捉装置とを備えており、
上記第2対象物捕捉装置は、上記第1対象物捕捉装置が捕捉しない物体を、上記対象物として捕捉することを特徴とする対象物捕捉装置ユニット。
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JP7401871B2 (ja) * | 2019-10-23 | 2023-12-20 | シャープセミコンダクターイノベーション株式会社 | 生体粒子捕集装置 |
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