JP6625838B2 - Pressurizing apparatus, individualizing apparatus having the same, resin molding apparatus, device manufacturing apparatus, and pressurizing method, resin molding method including the same, and device manufacturing method - Google Patents

Description

  The present invention relates to a pressurizing device, a singulating device including the same, a resin molding device, a device manufacturing device, and a pressurizing method and a singulating method including the same, a resin molding method, and a device manufacturing method.

  2. Description of the Related Art Conventionally, there is an apparatus that corrects warpage of a pressurized object by holding the object under pressure for a certain period of time in a heating furnace.

  Conventionally, there has been an apparatus that corrects warpage of an object to be pressed by sandwiching both sides of the object to be pressed by a heated pressure plate and holding the object under pressure for a certain period of time.

JP 08-112827 A

  As shown in FIG. 11, a conventional device for correcting warpage of a pressurized object includes an upper / lower pressing plate (11A / 12A, 11B / 12B, 11C / 12C) for each pressurized object 20A, 20B, 20C. ), And pressurize in the directions of arrows A, B, and C, respectively. Therefore, in order to increase the processing capacity, it is necessary to increase the number of pressurizing mechanisms including upper and lower pressurizing plates so as to be arranged in a horizontal or vertical direction, and a pressurizing mechanism corresponding to the number of objects to be pressurized is required. (Efficiency reduction), and the area and height for installing them are also necessary (space efficiency reduction).

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a pressurizing apparatus and a pressurizing method capable of saving energy and space.

  The pressurizing device according to the present invention is a pressurizing device including a pressurizing mechanism that applies a pressing force to a plurality of pressurizing plates and a plurality of pressurized objects that are alternately stacked and arranged. The pressure plate includes a first pressure plate, a second pressure plate, and a third pressure plate, and the pressure device includes the first pressure plate, the second pressure plate, and the second pressure plate. It is possible to expand the space between the second pressure plate and the third pressure plate while maintaining the pressing force between the second pressure plate and the second pressure plate. An opening / closing mechanism that can expand the space between the first pressure plate and the second pressure plate while maintaining the pressing force between the first pressure plate and the third pressure plate is further provided.

  In one embodiment, in the pressure device, the opening / closing mechanism includes an arm capable of holding an arbitrary pressure plate among the plurality of pressure plates, and an arm capable of holding the arbitrary pressure plate. A moving mechanism capable of moving an arm in a direction away from another pressure plate facing the arbitrary pressure plate with the object to be pressed interposed therebetween, and an arm with respect to the other pressure plate And a driving mechanism capable of applying a force equal in magnitude to the pressing force in a direction opposite to the moving direction of the driving force.

  In one embodiment, in the pressing device, the driving mechanism is fixed to the arm.

  In one embodiment, in the pressure device, the driving mechanism is fixed to the moving mechanism.

  In one embodiment, in the pressurizing device, the plurality of pressurizing plates and the plurality of pressurized objects are arranged so as to be arranged in a vertical direction, and the pressurizing device is configured to control the plurality of pressurized objects by gravity. The apparatus further includes a mechanism for suppressing variations in the pressing force applied to the pressurized object.

  In one embodiment, in the pressurizing device, the plurality of pressurizing plates and the plurality of pressurized objects are arranged so as to be arranged in a horizontal direction.

  A singulation apparatus according to the present invention includes the above-described pressurizing device and a singulation unit that singulates a work pressurized by the above-described pressurizing device.

  A resin molding device according to the present invention includes a resin molding unit, and the above-described pressurizing device that presses a work resin molded by the resin molding unit.

  The device manufacturing apparatus according to the present invention presses a resin molded unit, a work molded by the resin molding unit, and separates the work pressurized by the pressurized device. A singulation unit.

  The pressurizing method according to the present invention includes a step of alternately stacking a plurality of pressurized plates and a plurality of pressurized objects, and the step of alternately stacking the plurality of pressurized plates and the plurality of pressurized objects. A step of applying a pressing force to the pressing object and a step of removing the pressing force to at least one of the plurality of pressing objects and removing the at least one pressing object.

  In one embodiment, in the pressurizing method, the step of taking out the at least one pressurized object includes holding an arbitrary pressurized plate among the plurality of pressurized plates, and Applying a force in a direction away from the arbitrary pressure plate to another pressure plate opposite to the arbitrary pressure plate sandwiching the same, and moving the arbitrary pressure plate in a direction away from the other pressure plate Moving.

  In one embodiment, in the step of removing the at least one object to be pressed, the optional pressure plate is held by an arm, and the optional pressure plate is attached to the other pressure plate by a driving mechanism fixed to the arm. A force is applied in a direction away from the pressure plate and equal to the above-mentioned pressing force.

  In one embodiment, in the step of taking out the at least one object to be pressurized, the drive mechanism fixed to a moving mechanism that moves the arbitrary pressurizing plate in a direction away from the other pressurizing plate includes the other pressurizing plate. A force is applied to the pressure plate in a direction away from the arbitrary pressure plate and equal in magnitude to the pressing force.

  In one embodiment, in the above-described pressing method, the plurality of pressing plates and the plurality of objects to be pressed are alternately stacked so as to be arranged in a vertical direction, and a pressure applied to the plurality of objects to be pressed by gravity. A force for suppressing pressure variation is applied to at least a part of the plurality of pressure plates.

  In one embodiment, in the above-described pressing method, the plurality of pressing plates and the plurality of objects to be pressed are alternately stacked so as to be arranged in a horizontal direction.

  The singulation method according to the present invention includes a step of pressing the plurality of pressurized objects by the above-described pressurizing method, and singulating the plurality of pressurized objects pressed by the pressurizing method. And a process.

  A resin molding method according to the present invention includes a step of resin-molding a plurality of works, and a step of pressing the plurality of works as the plurality of objects to be pressed by the above-described pressing method.

  The device manufacturing method according to the present invention includes a step of resin-molding a plurality of works, a step of pressing the plurality of works as the plurality of objects to be pressed by the above-described pressing method, and Separating the plurality of pressurized works into individual pieces.

  ADVANTAGE OF THE INVENTION According to this invention, the pressurization apparatus and pressurization which can supply and take out arbitrary pressurized objects while holding the pressurizing force with respect to other pressurized objects, and can save energy and space. A method can be provided.

FIG. 2 is a schematic diagram showing a first state of the pressurizing device according to Embodiment 1 of the present invention. FIG. 4 is a schematic diagram showing a second state of the pressurizing device according to Embodiment 1 of the present invention. FIG. 4 is a schematic diagram illustrating a third state of the pressurizing device according to Embodiment 1 of the present invention. FIG. 4 is a diagram illustrating a structure around a pressing plate and a pressurized object in the pressing device illustrated in FIGS. 1 to 3. FIG. 8 is a schematic diagram illustrating a first state of the pressurizing device according to Embodiment 2 of the present invention. FIG. 8 is a schematic diagram showing a second state of the pressurizing device according to Embodiment 2 of the present invention. It is a schematic diagram which shows the 3rd state of the pressurizing device which concerns on Embodiment 2 of this invention. FIG. 10 is a schematic diagram illustrating a first state of the pressurizing device according to Embodiment 3 of the present invention. FIG. 13 is a schematic diagram showing a second state of the pressurizing device according to Embodiment 3 of the present invention. It is a schematic diagram which shows the 3rd state of the pressurizing device which concerns on Embodiment 3 of this invention. It is a figure which shows the structure of the conventional pressurization apparatus typically.

  Hereinafter, embodiments of the present invention will be described. The same or corresponding portions are denoted by the same reference characters, and description thereof may not be repeated.

  In the embodiments described below, when referring to the number, the amount, and the like, the scope of the present invention is not necessarily limited to the number, the amount, and the like, unless otherwise specified. In the following embodiments, each component is not necessarily essential to the present invention, unless otherwise specified.

  The pressurizing devices according to Embodiments 1 to 3 described below apply a pressing force to the plurality of pressurizing plates 10 (11 to 14) and the plurality of pressurized objects 20 (21 to 23) arranged alternately. It has a pressing mechanism 30. Examples of the object to be pressed 20 include a printed board (sealed board) in which a semiconductor chip is sealed with a resin, a resin substrate such as a glass epoxy board, a ceramic substrate, a silicon wafer, and SiC. Examples include a semiconductor wafer such as a wafer and a glass material. Further, as an example of the object to be pressurized 20, there is a printed wiring board having a resin substrate as a base material.

  In the pressurizing device according to the first to third embodiments, a pressing force is applied to the plurality of pressurizing plates 10 (11 to 14) and the plurality of pressurized objects 20 (21 to 23) arranged alternately. A plurality of objects to be pressed can be pressed by one pressing mechanism 30. As a result, energy and space can be saved.

  There is a case where it is desired to take out only a part of the pressurized objects from the plurality of pressurized objects 20 and continue to apply the pressing force to the other pressurized objects. When one pressurizing mechanism 30 is shared by a plurality of pressurized objects 20 (21 to 23), it is necessary to provide a special configuration in order to respond to such a request.

  In the pressurizing device according to the first to third embodiments, the opening / closing mechanism 40 can remove, for example, only the pressing force on the pressurized object 22 among the plurality of pressurized objects 21 to 23. Thus, the object 22 to be pressed can be taken out while maintaining the pressure applied to the objects 21 and 23 to be pressed.

(Embodiment 1)
FIGS. 1 to 3 are schematic diagrams respectively showing a first state to a third state of the pressurizing device according to the first embodiment of the present invention.

  As shown in FIGS. 1 to 3, the pressurizing device according to the present embodiment presses a plurality of pressurized objects 20 (21 to 23). Each pressurized object 20 is disposed substantially along the horizontal direction, in other words, the main surface (the upper surface and the lower surface on the paper surface of FIG. 1) of each pressurized object 20 is arranged substantially along the horizontal plane. In addition, the pressurized objects 20 are arranged so as to be arranged in a vertical direction. The pressurizing device according to the present embodiment includes a plurality of pressurizing plates 10 (11 to 14) and a plurality of pressurized objects 20 (21 to 23) that are alternately stacked along the vertical direction. A pressurizing mechanism 30 for applying a pressurizing force, an opening / closing mechanism 40 capable of eliminating the pressurizing force on the pressurized object 22 among the plurality of pressurized objects 20, and a pressurizing mechanism for the pressurized objects 20 by gravity. A self-weight canceling mechanism 50 for suppressing pressure variations. Hereinafter, this will be described in more detail.

  The pressurizing device according to the present embodiment presses a plurality of pressurized objects 20 simultaneously in the vertical direction. In order to sandwich the object to be pressed 21 disposed at the top, pressure plates 11 and 12 are provided so as to be arranged vertically.

  The second pressurized object 22 from the top is sandwiched between the lower pressurizing plate 12 for sandwiching the uppermost pressurized object 21 and the pressurizing plate 13 further disposed therebelow. The third (lowest) pressurized object 23 from the top is a lower pressurizing plate 13 for sandwiching the second pressurized object 22 from the top, and a pressurizing plate 13 further disposed therebelow. It is clamped by the plate 14.

  The pressure mechanism 30 includes a pressure source 31 provided above the pressure plate 11 and a pressure receiving plate 32 that supports the pressure plate 14 from below. The pressing source 31 applies a constant pressing force to the uppermost pressing plate 11. This pressing force is evenly transmitted to the lowermost pressing plate 14 via the pressing plates 12 and 13 and the pressurized objects 21 to 23.

  The opening / closing mechanism 40 includes an opening / closing arm 41 capable of holding an arbitrary pressing plate among the plurality of pressing plates 10, a cylinder mechanism 42 fixed to the opening / closing arm 41, and an opening / closing arm 41 and a cylinder mechanism 42. It includes a base 43 for supporting, and a ball screw 43A (moving mechanism) capable of moving the base 43 in the vertical direction.

  The opening / closing arm 41 and the cylinder mechanism 42 are slidable vertically and horizontally with respect to the base 43. The cylinder mechanism 42 includes a cylinder body 42A, a plunger 42B, and an opening / closing arm 42C. The opening / closing arm 42C is fixed to the plunger 42B. The plunger 42B and the opening / closing arm 42C are urged downward by the fluid pressure (air pressure) in the cylinder 42A. The opening / closing arms 41 and 42C can be engaged with an arbitrary pressure plate 10.

  The self-weight canceling mechanism 50 is provided for each of the pressure plates 11 to 13. The self-weight canceling mechanism 51 for the pressure plate 11 is fixed to the cylinder 51A, a pressure control valve 51B for controlling the fluid pressure (air pressure) of the cylinder 51A, and the pressure plate 11, and is urged upward by the cylinder 51A. And self-weight canceling claw 51C.

  Similarly, the dead weight canceling mechanism 52 for the pressure plate 12 includes a cylinder 52A, a pressure control valve 52B, and a dead weight canceling claw 52C. The self-weight canceling mechanism 53 for the pressure plate 13 includes a cylinder 53A, a pressure control valve 53B, and a self-weight canceling claw 53C. With respect to the lowermost pressure plate 14, since there is no object to be pressed 20 below the pressure plate 14, the self-weight canceling mechanism is not required.

  The cylinder 51A applies an urging force enough to cancel the own weight of the pressure plate 11 to the own weight canceling claw 51C. The cylinder 52A applies an urging force enough to cancel the own weight of the pressing plate 12 and the object to be pressed 21 to the own weight canceling claw 52C. The cylinder 53A applies an urging force enough to cancel the own weight of the pressing plate 13 and the object to be pressed 22 to the own weight canceling claw 53C.

  As an example, the weight of the pressure plate 10 is 30 kg per piece, the weight of the pressurized object 20 is 1 kg or less per piece, and the pressing force by the pressure source 31 is 1000 N (101.97 kgf). In this case, the weight of the pressurized object 20 can be ignored, and the pressure control valves 51B, 52B, and 53B may be integrated.

  From the state shown in FIG. 1, the opening / closing arm 41 and the cylinder mechanism 42 are slid vertically and horizontally, and as shown in FIG. 2, the opening / closing arm 41 is engaged with the pressure plate 12, and the opening / closing arm 42C is operated. Engage with the pressure plate 13. In this state, the same urging force as the pressing force A by the pressurizing source 31 is applied to the plunger 42B and the opening / closing arm 42C by the cylinder body 42A.

  Thus, the opening / closing arm 42C urges the pressing plate 13 downward with the same force as the pressing force A by the pressing source 31. Further, due to the reaction of this urging force, the opening / closing arm 41 urges the pressing plate 12 upward with a force equivalent to the pressing force A from the pressing source 31. As a result, the pressure applied to the pressurized object 22 sandwiched between the pressurizing plates 12 and 13 becomes substantially zero. On the other hand, the original pressure A is continuously applied to the workpieces 21 and 23. The resultant force acting on the base 43 in the vertical direction is almost zero.

  From the state shown in FIG. 2, the base 43 is moved upward by the ball screw 43A. As a result, as shown in FIG. 3, a gap is formed between the upper surface of the workpiece 22 and the pressure plate 12, and the workpiece 22 can be taken out and supplied again.

  FIG. 4 is a diagram showing a structure around the pressing plate 10 and the object to be pressed 20 in the pressing device according to the present embodiment. As shown in FIG. 4, the open / close arms 41 and 42C are provided with two pressure plates 10 on each of the left and right sides (left and right on the paper surface of FIG. 4). Also, two self-weight canceling pawls 53C are provided on each of the left and right sides of the pressure plate 13.

  Although FIG. 4 shows only the self-weight canceling claw 53C of the pressing plate 13 for convenience of illustration, the self-weight canceling claw is also provided on the pressing plates 11 and 12.

(Embodiment 2)
FIGS. 5 to 7 are schematic diagrams respectively showing a first state to a third state of the pressurizing device according to the second embodiment of the present invention. FIGS. 5, 6, and 7 correspond to the states of FIGS. 1, 2, and 3 in the first embodiment.

  As shown in FIGS. 5 to 7, the pressing device according to the present embodiment is a modification of the processing device according to the first embodiment, and includes, for example, a cylinder mechanism 42 that urges the pressing plate 13 downward. Is fixed to the base 43 instead of the opening / closing arm 41.

  Since the pressurizing device according to the present embodiment basically operates in the same manner as the pressurizing device according to the first embodiment, detailed description will not be repeated.

  However, according to the pressing device according to the present embodiment, since the opening / closing arm 41 and the cylinder mechanism 42 slide separately with respect to the base 43, the opening / closing arm 42C of the cylinder mechanism 42 points the pressure plate 13 downward. There is a case where a slight time difference occurs between when the pressure plate 12 is urged and when the opening / closing arm 41 urges the pressure plate 12 upward. Due to this time difference, a pressing force twice as large as the pressing force A (the sum of the pressing force A shown and the pressing force by the opening / closing arm 42C) acts on the pressurized object 23 temporarily. For example, as in the case where the object to be pressurized 20 is a brittle material such as a glass plate or a glass material, it may not be acceptable that the object to be pressurized 23 receives twice the pressing force. In this case, after the opening / closing arm 41 is securely engaged with the pressure plate 12, the pressure applied by the pressure source 31 is once loosened, and the opening / closing arm 41 starts to slide downward. It is also conceivable to restore the pressure. The opening / closing mechanism 40 may be controlled such that the sliding movement (down) of the opening / closing arm 42C and the sliding movement (up) of the opening / closing arm 41 are performed substantially simultaneously.

(Embodiment 3)
8 to 10 are schematic diagrams respectively showing the first to third states of the pressurizing device according to Embodiment 3 of the present invention. FIGS. 8, 9 and 10 correspond to the states of FIGS. 1, 2 and 3 in the first embodiment.

  As shown in FIGS. 8 to 10, the pressurizing device according to the present embodiment is a modification of the processing device according to the first embodiment, and includes a plurality of pressurized objects 20 (21 to 23). Press. Each of the pressurized objects 20 is disposed substantially along the vertical direction, in other words, the main surfaces thereof (the left and right surfaces on the paper surface of FIG. 8) are substantially along the vertical surface. In addition, the pressurized objects 20 are arranged so as to be arranged in a horizontal direction. The pressing device according to the present embodiment is characterized in that the plurality of pressing plates 10 and the object to be pressed 20 are alternately stacked and arranged in the horizontal direction.

  Since the pressurizing device according to the present embodiment basically operates in the same manner as the pressurizing device according to the first embodiment, detailed description will not be repeated.

  However, in the present embodiment, it is not necessary to consider the variation in the pressing force due to the weight of the pressing plate 10 and the object to be pressed 20, and thus the self-weight canceling mechanism 50 provided in the first embodiment is not necessary. .

(Supplementary explanation)
In the above-described first to third embodiments, typically, the pressing plate 10 has either a heating mechanism or a cooling mechanism. Examples of the heating mechanism include resistance heating, electromagnetic induction heating, and a method using a heat medium. Examples of the cooling mechanism include air cooling and liquid cooling. However, depending on the characteristics of the object to be pressurized 20, the heating mechanism and the air cooling mechanism may not be used.

  In the above-described first to third embodiments, typically, the pressure plate 10 has a heat insulating material except for a contact portion of the object 20 to be pressed.

  In the above first to third embodiments, the pressurized object 20 may be an interposer having a resin-sealed lead frame or a resin material.

  In the above-described first to third embodiments, the fluid pressure of the cylinder mechanism 42 as the drive mechanism may be air pressure or hydraulic pressure. Further, as the driving mechanism, a combination of a motor and a rack and pinion, a combination of a motor, a ball screw and a ball nut, an electric linear actuator, or the like may be used instead of the cylinder mechanism 42.

  In the case where the pressurizing device according to the first to third embodiments is used for manufacturing a device, for example, a plurality of works are resin-molded, and the work as the plurality of pressurized objects 20 is formed using the above-described pressurizing device. Pressing corrects the warp, and separates the plurality of pressurized works. For example, a plurality of sealed substrates (corresponding to a resin-molded work) in which a semiconductor chip, an LED chip, and the like are sealed with a resin are pressed using the above-described pressing device to correct the warpage. The plurality of sealed substrates whose warpage has been corrected are sequentially singulated. As a result, products such as semiconductor devices and LED packages are manufactured. The above-described pressurizing device (pressurizing unit) may be connected to the singulation unit, and the pressurizing device may be incorporated in the singulation unit. The above-described pressurizing device (pressurizing unit) and the singulation unit may be connected, and the pressing unit and the singulation unit may be incorporated in the device manufacturing apparatus.

  The pressing device according to the first to third embodiments is employed in a hot press device, a warp correction device, and the like used when manufacturing a resin substrate and a printed circuit board. The above-described pressurizing device is employed in a hot press device, a warp correcting device, and the like used when manufacturing plywood and decorative boards. In addition, the above-described pressurizing device is a resin forming device used when a molded product is manufactured by pressurizing and heating a fibrous member impregnated with a flowable resin to cure the flowable resin, and warping. It is used for straightening devices. The above-described pressing device (pressing unit) may be connected to the resin molding unit, and the pressing unit may be incorporated in the resin molding device.

(Effect)
In the pressurizing devices according to the first to third embodiments, since the pressure is supplied to the uppermost pressurizing plate 11 collectively, energy efficiency is high.

  Further, in the pressurizing devices according to the first and second embodiments, the occupied area does not increase even if the number of pressurized objects 20 increases. On the other hand, in the pressurizing device according to the third embodiment, it is not necessary to provide the self-weight canceling mechanism 50 for canceling the weight.

  In addition, since the number of the pressurizing plates 10 may be set to be equal to the number of the pressurized objects 20 by one, two pressurized plates are installed for each pressurized object. The amount of capital investment can be reduced as compared with.

  Further, in the pressurizing devices according to Embodiments 1 to 3, heat loss can be reduced by minimizing the operation range of the opening / closing mechanism 40.

  As described above, the embodiments of the present invention have been described. However, the embodiments disclosed this time are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  10 to 14 pressure plate, 20 to 23 object to be pressed, 30 pressure mechanism, 31 pressure source, 32 pressure receiver, 40 opening / closing mechanism, 41 opening / closing arm, 42 cylinder mechanism, 42A cylinder body, 42B plunger, 42C Opening / closing arm, 43 base, 50-53 self-weight canceling mechanism, 51A, 52A, 53A cylinder, 51B, 52B, 53B pressure control valve, 51C, 52C, 53C self-weight canceling claw.

Claims (15)

A pressurizing device having a pressurizing mechanism for applying a pressing force to a plurality of pressurized plates and a plurality of pressurized objects arranged alternately and stacked,
The plurality of pressure plates include a first pressure plate, a second pressure plate, and a third pressure plate,
The pressurizing device is configured to maintain a pressurizing force between the first pressurizing plate and the second pressurizing plate while maintaining a pressurizing force between the second pressurizing plate and the third pressing plate. The first pressure plate and the second pressure can be expanded, and the pressure between the second pressure plate and the third pressure plate is maintained. Further provided with an opening and closing mechanism that can expand between the plate,
The opening / closing mechanism is configured to interpose an arbitrary pressing plate and another pressing plate facing the arbitrary pressing plate out of the plurality of pressing plates, and move the arbitrary pressing plate and the other pressing plate. wherein the pressure plate and the arm and driving mechanism for urging in opposite directions, from a state where the by the arm and the drive mechanism and the optional pressure plate and the other of the pressure plates were urged in opposite directions A moving mechanism for moving an arbitrary pressing plate in a direction away from the other pressing plate. The arm can hold an arbitrary pressure plate among the plurality of pressure plates ,
The moving mechanism, the arm which holds the arbitrary pressure plate, the can be moved in a direction away from the other pressure plate opposed to the arbitrary pressure plate across the pressurized圧物there, pressure device according to claim 1.   3. The opening and closing mechanism according to claim 2, further comprising a driving mechanism capable of applying a force equal to the pressing force to the other pressing plate in a direction opposite to a moving direction of the arm. 4. Pressurizing device.   The pressure device according to claim 3, wherein the drive mechanism is fixed to the arm.   The pressurizing device according to claim 3, wherein the driving mechanism is fixed to the moving mechanism.   The pressure device according to any one of claims 2 to 5, wherein the moving mechanism includes a ball screw.   The pressure device according to any one of claims 2 to 6, wherein the plurality of pressure plates each include a concave portion with which the arm can engage. The plurality of pressure plates and the plurality of objects to be pressed are arranged so as to be arranged in a vertical direction,
The pressurizing device according to any one of claims 1 to 7, wherein the pressurizing device further includes a mechanism for suppressing a variation in pressurizing force applied to the plurality of pressurized objects due to gravity.   The pressure device according to any one of claims 1 to 7, wherein the plurality of pressure plates and the plurality of objects to be pressed are arranged so as to be arranged in a horizontal direction. A pressurizing device according to any one of claims 1 to 9,
A singulation unit for singulating the work pressurized by the pressurizing device. A resin molding unit,
A resin molding apparatus, comprising: the pressurizing device according to claim 1, which presses a work molded by the resin molding unit. A resin molding unit,
The pressurizing device according to any one of claims 1 to 9, which pressurizes a resin-molded work by the resin molding unit.
A device manufacturing apparatus comprising: a singulation unit for singulating the work pressurized by the pressurizing device. A pressurizing method using the pressurizing device according to any one of claims 1 to 9,
A step of alternately stacking the plurality of pressure plates and the plurality of objects to be pressed,
A step of applying a pressing force to the plurality of pressure plates and the plurality of objects to be pressed, which are alternately stacked and arranged,
Removing the pressurizing force on at least one of the plurality of pressurized objects among the plurality of pressurized objects, and taking out the at least one pressurized object. Resin molding a plurality of workpieces;
A step of pressing the plurality of workpieces as the plurality of objects to be pressed by the pressing method according to claim 13. Resin molding a plurality of workpieces;
A step of pressing the plurality of workpieces as the plurality of objects to be pressed by the pressing method according to claim 13;
Separating the plurality of workpieces pressurized by the pressurizing method into individual pieces.

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