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JP6554840B2 - Solid-state imaging device and solid-state imaging device heat dissipation method - Google Patents

Solid-state imaging device and solid-state imaging device heat dissipation method Download PDF

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JP6554840B2
JP6554840B2 JP2015051861A JP2015051861A JP6554840B2 JP 6554840 B2 JP6554840 B2 JP 6554840B2 JP 2015051861 A JP2015051861 A JP 2015051861A JP 2015051861 A JP2015051861 A JP 2015051861A JP 6554840 B2 JP6554840 B2 JP 6554840B2
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佐藤 淳哉
淳哉 佐藤
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Description

本発明は、固体撮像装置および固体撮像装置放熱方法に関し、特に、固体撮像素子およびLSI、チップ部品双方の放熱構造を備えた固体撮像装置および固体撮像装置放熱方法に関する。   The present invention relates to a solid-state imaging device and a solid-state imaging device heat dissipation method, and more particularly, to a solid-state imaging device and a solid-state imaging device heat dissipation method including a solid-state imaging element and a heat dissipation structure for both LSI and chip parts.

従来の固体撮像装置においては、動作時の発熱を効率良く放熱することができず、固体撮像装置の連続撮像時間の経過に伴い、撮像動作時の発熱によって温度が上昇してしまい、固体撮像装置の撮像性能が低下することから、所望の連続撮像時間を達成することができないという課題があった。このような課題を解決するために、特許文献1の特開2013-98853号公報「固体撮像装置」や特許文献2の特許第3511463号公報「固体撮像装置および大面積固体撮像装置」等に開示されているような固体撮像装置が提案されている。   In a conventional solid-state imaging device, heat generated during operation cannot be efficiently dissipated, and as the continuous imaging time of the solid-state imaging device elapses, the temperature rises due to heat generation during the imaging operation. As a result, the desired continuous imaging time cannot be achieved. In order to solve such a problem, it is disclosed in Japanese Patent Laid-Open No. 2013-98853 “Solid-State Imaging Device” of Patent Document 1 and Japanese Patent No. 3511463 “Solid-State Imaging Device and Large Area Solid-State Imaging Device” of Patent Document 2. Such a solid-state imaging device has been proposed.

前記特許文献1においては、CCD(Charge Coupled Devices)型の固体撮像装置は、動作時の発熱を高効率に放熱することを目的としている。図5は、従来技術として当該特許文献1に記載された固体撮像装置の断面構造を示す断面図である。   In Patent Document 1, a CCD (Charge Coupled Devices) type solid-state imaging device is intended to dissipate heat generated during operation with high efficiency. FIG. 5 is a cross-sectional view showing a cross-sectional structure of a solid-state imaging device described in Patent Document 1 as a conventional technique.

図5に示すように、当該特許文献1に記載の固体撮像装置2Aは、固体撮像素子10と、二つの半導体素子50および半導体素子60と、伝熱部材80と、冷却ブロック84と、回路基板110と、を備えており、固体撮像素子10からの発熱を、二つのバンプ59およびバンプ69それぞれを介して二つの半導体素子50および半導体素子60に伝え、二つの半導体素子50および半導体素子60に伝えられた熱は、アンダーフィル74を介して伝熱部材80に伝えられ、しかる後、伝熱部材80と接合されている冷却ブロック84から空間に放熱するという構造にしている。   As shown in FIG. 5, the solid-state imaging device 2A described in Patent Document 1 includes a solid-state imaging device 10, two semiconductor elements 50 and 60, a heat transfer member 80, a cooling block 84, and a circuit board. 110, and the heat generated from the solid-state imaging device 10 is transmitted to the two semiconductor elements 50 and 60 through the two bumps 59 and 69, respectively, to the two semiconductor elements 50 and 60. The transferred heat is transferred to the heat transfer member 80 through the underfill 74, and thereafter, the heat is radiated to the space from the cooling block 84 joined to the heat transfer member 80.

また、前記特許文献2についても、CCD型の固体撮像装置において、動作時の発熱を高効率に放熱することを目的としている。図6は、従来技術として当該特許文献2に記載された固体撮像装置の断面構造を示す断面図である。   Further, Patent Document 2 also aims to dissipate heat generated during operation with high efficiency in a CCD solid-state imaging device. FIG. 6 is a cross-sectional view showing a cross-sectional structure of a solid-state imaging device described in Patent Document 2 as a conventional technique.

前述した前記特許文献1に記載の固体撮像装置2Aの場合には、図5に示したように、動作時の発熱を伝送する経路として固体撮像素子10の主面の一部分(両端部)のみしか使用しておらず、固体撮像素子10の動作時の発熱を十分に放熱することができないという課題がある。これに対して、当該特許文献2に記載のCCD型の固体撮像装置31においては、図6に示すように、パッケージ72のダイパッド面73が撮像素子3の光入射面よりも小さいものの、撮像素子3の光入射面の反対側の接着面62がパッケージ72と面接着された構造になっていて、撮像素子3の発熱を、広い面積で接着された接着面62からパッケージ72に伝達し、しかる後、絶縁基板42および取り付けネジ8を介してコールドフィンガ15から冷却機に伝達するようにしている。   In the case of the solid-state imaging device 2A described in Patent Document 1 described above, as shown in FIG. 5, only a part (both ends) of the main surface of the solid-state imaging device 10 is used as a path for transmitting heat generated during operation. There is a problem that the heat generated during the operation of the solid-state imaging device 10 cannot be sufficiently dissipated. On the other hand, in the CCD type solid-state imaging device 31 described in Patent Document 2, the die pad surface 73 of the package 72 is smaller than the light incident surface of the image sensor 3 as shown in FIG. 3 has a structure in which the bonding surface 62 opposite to the light incident surface is bonded to the package 72, and heat generated by the image sensor 3 is transmitted from the bonding surface 62 bonded to a large area to the package 72. Thereafter, the cold finger 15 is transmitted to the cooler via the insulating substrate 42 and the mounting screw 8.

特開2013-98853号公報(第4−5頁、図1)JP 2013-98853 A (page 4-5, FIG. 1) 特許第3511463号公報(第3−4頁、図2)Japanese Patent No. 3511463 (page 3-4, FIG. 2)

しかしながら、前記特許文献1や前記特許文献2に記載されたような従来の技術においては、以下のような問題がある。   However, the conventional techniques described in Patent Document 1 and Patent Document 2 have the following problems.

前記特許文献1に記載のような構造においては、図5を用いて前述したように、固体撮像素子10の主面の一部分(両端部)のみしか動作時の発熱を伝送する経路として使用しておらず、固体撮像素子10の動作時の発熱を十分に放熱することはできない。さらに、固体撮像素子10の中心部と外周部とには温度差(温度勾配)が発生し、撮像データの信頼性が低下するという問題もある。   In the structure described in Patent Document 1, only a part (both ends) of the main surface of the solid-state imaging device 10 is used as a path for transmitting heat generated during operation, as described above with reference to FIG. In other words, the heat generated during the operation of the solid-state imaging device 10 cannot be sufficiently dissipated. Further, there is a problem that a temperature difference (temperature gradient) is generated between the central portion and the outer peripheral portion of the solid-state imaging device 10 and reliability of imaging data is lowered.

また、前記特許文献2に記載されたような技術においても、図6を用いて前述したように、前記特許文献1の場合に比して若干の改善を図ることはできるものの、撮像素子3(固体撮像素子)の放熱経路として、撮像素子3の光入射面の反対側の接着面62と面接触するパッケージ72が撮像素子3の光入射面よりも小さい面積であり、該パッケージ72のダイパッド面73も撮像素子3の光入射面よりも小さくなる構造であるため、撮像素子3の動作時の発熱を十分に放熱することはできない。さらに、前記特許文献1の場合と同様に、撮像素子3の中心部と外周部とには温度差(温度勾配)が発生し、撮像データの信頼性が低下するという問題もある。   In the technique described in Patent Document 2, as described above with reference to FIG. 6, the image pickup device 3 ( As a heat radiation path of the solid-state image pickup device), the package 72 that is in surface contact with the adhesive surface 62 opposite to the light incident surface of the image pickup device 3 has a smaller area than the light incident surface of the image pickup device 3, and the die pad surface of the package 72 73 also has a structure that is smaller than the light incident surface of the image sensor 3, and therefore cannot sufficiently dissipate heat generated during operation of the image sensor 3. Further, similarly to the case of Patent Document 1, there is a problem that a temperature difference (temperature gradient) occurs between the central portion and the outer peripheral portion of the image pickup device 3 and the reliability of the image pickup data is lowered.

さらに加えて、前記特許文献1の場合も同様であるが、前記特許文献2に記載の技術においては、固体撮像装置31の電気信号を伝送する電気配線14と、冷凍機に熱を伝えるコールドフィンガ15と、の間の接続を明示的に形成する構造にはなっていないので、電気配線14の発熱を放熱することができないという問題、つまり、回路基板と伝熱部材との間の熱的な連結が十分ではないので、回路基板の発熱を放熱することができないという問題もある。   In addition, the same applies to the case of Patent Document 1, however, in the technique described in Patent Document 2, the electrical wiring 14 that transmits the electrical signal of the solid-state imaging device 31 and the cold finger that transmits heat to the refrigerator. 15 is not structured so as to explicitly form a connection between the circuit board 15 and the circuit board and the heat transfer member. Since the connection is not sufficient, there is a problem that heat generated by the circuit board cannot be radiated.

すなわち、前記特許文献1や前記特許文献2に記載されたような従来の技術においては、固体撮像装置の放熱技術として、固体撮像素子そのものの放熱も不十分であるのみならず、固体撮像素子の放熱と回路基板の放熱とを同時に両立させることもできない。   That is, in the conventional techniques described in Patent Document 1 and Patent Document 2, as a heat dissipation technique of the solid-state imaging device, not only the heat radiation of the solid-state image sensor itself is insufficient, It is impossible to achieve both heat dissipation and circuit board heat dissipation at the same time.

(本発明の目的)
本発明は、かかる事情に鑑みてなされたものであり、固体撮像素子の十分な放熱と回路基板の放熱とを両立させることが可能な固体撮像装置および固体撮像装置放熱方法を提供することを、その目的としている。
(Object of the present invention)
The present invention has been made in view of such circumstances, and provides a solid-state imaging device and a solid-state imaging device heat dissipation method capable of achieving both sufficient heat dissipation of the solid-state imaging element and heat dissipation of the circuit board. That is the purpose.

前述の課題を解決するため、本発明による固体撮像装置および固体撮像装置放熱方法は、主に、次のような特徴的な構成を採用している。   In order to solve the above-described problems, the solid-state imaging device and the solid-state imaging device heat dissipation method according to the present invention mainly adopt the following characteristic configuration.

(1)本発明による固体撮像装置は、
固体撮像素子と、前記固体撮像素子からの電気信号を伝送する回路基板と、前記固体撮像素子の駆動および読出し信号処理部が集積されたLSI(大規模集積回路)と、チップ部品と、前記固体撮像素子の発熱を放熱する固体撮像素子用放熱フィンと、前記回路基板に実装される前記LSIおよび前記チップ部品の発熱を放熱する実装部品用放熱フィンと、を少なくとも含んで構成される固体撮像装置であって、
前記固体撮像素子の主面全体を、前記回路基板の第一主面上の固体撮像素子接合領域に隙間なく接合するとともに前記固体撮像素子と前記回路基板とを電気的に接続し、
前記LSIおよび前記チップ部品を、前記固体撮像素子が接合された前記回路基板の第一主面上のLSI・チップ部品実装領域に実装して、前記回路基板と電気的に接続し、
前記固体撮像素子用放熱フィンを、前記固体撮像素子が接合された前記回路基板上の前記固体撮像素子接合領域と対向する反対側の前記回路基板の第二主面上の位置に、前記固体撮像素子の有効画素領域よりも広い領域で接合し、
前記実装部品用放熱フィンを、前記LSIおよび前記チップ部品が実装された前記回路基板上の前記LSI・チップ部品実装領域と対向する反対側の前記回路基板の第二主面上の位置に前記LSI・チップ部品実装領域と同一の広さの領域または前記LSI・チップ部品実装領域よりも広い領域で接合する
ことを特徴とする。
(1) A solid-state imaging device according to the present invention includes:
A solid-state imaging device, a circuit board that transmits an electrical signal from the solid-state imaging device, an LSI (Large Scale Integrated Circuit) integrated with driving and reading signal processing units of the solid-state imaging device, a chip component, and the solid state A solid-state imaging device comprising at least a solid-state imaging element radiating fin that radiates heat generated by the imaging element and a mounting component radiating fin that radiates heat generated by the LSI and the chip component mounted on the circuit board Because
Bonding the entire main surface of the solid-state image sensor to the solid-state image sensor bonding region on the first main surface of the circuit board without gaps, and electrically connecting the solid-state image sensor and the circuit board;
The LSI and the chip component are mounted on the LSI / chip component mounting region on the first main surface of the circuit board to which the solid-state imaging device is bonded, and electrically connected to the circuit board,
The solid-state imaging element is disposed at a position on the second main surface of the circuit board opposite to the solid-state imaging element bonding region on the circuit board to which the solid-state imaging element is bonded. Join in a wider area than the effective pixel area of the element,
The LSI for mounting components is disposed at a position on the second main surface of the circuit board opposite to the LSI / chip component mounting area on the circuit board on which the LSI and the chip parts are mounted. -It is characterized in that bonding is performed in a region having the same area as the chip component mounting region or a region wider than the LSI / chip component mounting region.

(2)本発明による固体撮像装置放熱方法は、
固体撮像素子と、前記固体撮像素子からの電気信号を伝送する回路基板と、前記固体撮像素子の駆動および読出し信号処理部が集積されたLSI(大規模集積回路)と、チップ部品と、前記固体撮像素子の発熱を放熱する固体撮像素子用放熱フィンと、前記回路基板に実装される前記LSIおよび前記チップ部品の発熱を放熱する実装部品用放熱フィンと、を少なくとも含んで構成される固体撮像装置からの発熱を放熱する固体撮像装置放熱方法であって、
前記固体撮像素子の主面全体を、前記回路基板の第一主面上の固体撮像素子接合領域に隙間なく接合するとともに前記固体撮像素子と前記回路基板とを電気的に接続し、
前記LSIおよび前記チップ部品を、前記固体撮像素子が接合された前記回路基板の第一主面上のLSI・チップ部品実装領域に実装して、前記回路基板と電気的に接続し、
前記固体撮像素子用放熱フィンを、前記固体撮像素子が接合された前記回路基板上の前記固体撮像素子接合領域と対向する反対側の前記回路基板の第二主面上の位置に、前記固体撮像素子の有効画素領域よりも広い領域で接合し、
前記実装部品用放熱フィンを、前記LSIおよび前記チップ部品が実装された前記回路基板上の前記LSI・チップ部品実装領域と対向する反対側の前記回路基板の第二主面上の位置に前記LSI・チップ部品実装領域と同一の広さの領域または前記LSI・チップ部品実装領域よりも広い領域で接合する
ことを特徴とする。
(2) A solid-state imaging device heat dissipation method according to the present invention includes:
A solid-state imaging device, a circuit board that transmits an electrical signal from the solid-state imaging device, an LSI (Large Scale Integrated Circuit) integrated with driving and reading signal processing units of the solid-state imaging device, a chip component, and the solid state A solid-state imaging device comprising at least a solid-state imaging element radiating fin that radiates heat generated by the imaging element and a mounting component radiating fin that radiates heat generated by the LSI and the chip component mounted on the circuit board A solid-state imaging device heat dissipation method for dissipating heat generated from
Bonding the entire main surface of the solid-state image sensor to the solid-state image sensor bonding region on the first main surface of the circuit board without gaps, and electrically connecting the solid-state image sensor and the circuit board;
The LSI and the chip component are mounted on the LSI / chip component mounting region on the first main surface of the circuit board to which the solid-state imaging device is bonded, and electrically connected to the circuit board,
The solid-state imaging element is disposed at a position on the second main surface of the circuit board opposite to the solid-state imaging element bonding region on the circuit board to which the solid-state imaging element is bonded. Join in a wider area than the effective pixel area of the element,
The LSI for mounting components is disposed at a position on the second main surface of the circuit board opposite to the LSI / chip component mounting area on the circuit board on which the LSI and the chip parts are mounted. -It is characterized in that bonding is performed in a region having the same area as the chip component mounting region or a region wider than the LSI / chip component mounting region.

本発明に係る固体撮像装置および固体撮像装置放熱方法によれば、以下のような効果を奏することができる。   According to the solid-state imaging device and the solid-state imaging device heat dissipation method according to the present invention, the following effects can be obtained.

本発明に係る固体撮像装置および固体撮像装置放熱方法においては、固体撮像素子の主面全体を、LSIおよびチップ部品を実装する回路基板の第一主面上に隙間なく接合し、且つ、固体撮像素子全面を接合した領域に対向する回路基板の裏側(反対側)の第二主面上の位置に固体撮像素子の有効画素領域よりも広い接合面を有する固体撮像素子用放熱フィンを接合し、且つ、LSIおよびチップ部品を実装した領域に対向する回路基板の裏側(反対側)の第二主面上の位置にLSIおよびチップ部品の実装領域よりも同等以上に広い接合面を有する実装部品用放熱フィンを接合した構造としている。   In the solid-state imaging device and the solid-state imaging device heat dissipation method according to the present invention, the entire main surface of the solid-state imaging element is joined to the first main surface of the circuit board on which the LSI and chip components are mounted without gaps, and the solid-state imaging A solid-state imaging element radiating fin having a bonding surface wider than the effective pixel area of the solid-state imaging element is bonded to a position on the second main surface on the back side (opposite side) of the circuit board facing the area where the entire element surface is bonded, In addition, for a mounting component having a bonding surface that is equal to or larger than the mounting region of the LSI and the chip component at a position on the second main surface on the back side (opposite side) of the circuit board facing the region where the LSI and the chip component are mounted. It has a structure in which radiating fins are joined.

而して、固体撮像素子にて発生した熱を回路基板、固体撮像素子用放熱フィンの順番の伝熱経路により効率的に放熱することができ、且つ、固体撮像素子内における温度差(温度勾配)も抑制することができる。さらに、LSIやチップ部品から発生した熱についても、回路基板、実装部品用放熱フィンの順番の伝熱経路により効率的に放熱することができる。   Thus, the heat generated in the solid-state imaging device can be efficiently radiated through the heat transfer path in the order of the circuit board and the solid-state imaging device, and the temperature difference (temperature gradient) in the solid-state imaging device. ) Can also be suppressed. Furthermore, the heat generated from the LSI or the chip component can be efficiently radiated through the heat transfer path in the order of the circuit board and the mounting component radiating fin.

つまり、固体撮像素子の主面全体から放熱することができるので、固体撮像素子内で温度勾配を抑制することが可能であり、且つ、固体撮像素子の主面全体からの放熱と回路基板上に実装されているLSIやチップ部品の放熱とを両立させる構造であるので、従来技術の課題を解決して、固体撮像装置の動作時の発熱を効率良く放熱することができ、且つ、固体撮像装置の連続撮像時間の経過に伴い、撮像動作時の発熱により固体撮像装置の温度が上昇して、固体撮像装置の撮像性能が低下するという事態の発生を抑制し、所望の連続撮像時間を達成することができるようになる。   That is, since heat can be radiated from the entire main surface of the solid-state image sensor, it is possible to suppress the temperature gradient in the solid-state image sensor, and heat radiation from the entire main surface of the solid-state image sensor and on the circuit board. Since it has a structure that achieves both heat dissipation of the mounted LSI and chip parts, it can solve the problems of the prior art, and can efficiently dissipate heat generated during the operation of the solid-state imaging device, and the solid-state imaging device As the continuous imaging time elapses, the occurrence of a situation in which the temperature of the solid-state imaging device rises due to heat generation during the imaging operation and the imaging performance of the solid-state imaging device deteriorates is suppressed, and a desired continuous imaging time is achieved. Will be able to.

本発明による第一の実施形態に係る固体撮像装置の一構成例を示す構成図である。It is a block diagram which shows one structural example of the solid-state imaging device which concerns on 1st embodiment by this invention. 本発明による第二の実施形態に係る固体撮像装置の一構成例を示す構成図である。It is a block diagram which shows the example of 1 structure of the solid-state imaging device which concerns on 2nd embodiment by this invention. 本発明による第三の実施形態に係る固体撮像装置の一構成例を示す構成図である。It is a block diagram which shows the example of 1 structure of the solid-state imaging device concerning 3rd embodiment by this invention. 本発明による第四の実施形態に係る固体撮像装置の一構成例を示す構成図である。It is a block diagram which shows the example of 1 structure of the solid-state imaging device which concerns on 4th embodiment by this invention. 従来技術として前記特許文献1に記載された固体撮像装置の断面構造を示す断面図である。It is sectional drawing which shows the cross-section of the solid-state imaging device described in the said patent document 1 as a prior art. 従来技術として前記特許文献2に記載された固体撮像装置の断面構造を示す断面図である。It is sectional drawing which shows the cross-section of the solid-state imaging device described in the said patent document 2 as a prior art.

以下、本発明による固体撮像装置および固体撮像装置放熱方法の好適な実施形態について添付図を参照して説明する。なお、以下の各図面に付した図面参照符号は、理解を助けるための一例として各要素に便宜上付記したものであり、本発明を図示の態様に限定することを意図するものではないことも言うまでもない。   Preferred embodiments of a solid-state imaging device and a solid-state imaging device heat dissipation method according to the present invention will be described below with reference to the accompanying drawings. In addition, it is needless to say that the drawing reference numerals attached to the following drawings are added for convenience to each element as an example for facilitating understanding, and are not intended to limit the present invention to the illustrated embodiment. Yes.

(本発明の特徴)
本発明の実施形態の説明に先立って、本発明の特徴についてその概要をまず説明する。本発明に係る固体撮像装置および固体撮像装置放熱方法においては、固体撮像素子と、前記固体撮像素子からの電気信号を伝送する回路基板と、前記固体撮像素子の駆動および読出し信号処理部が集積されたLSI(大規模集積回路)と、チップ部品と、前記固体撮像素子の発熱を放熱する固体撮像素子用放熱フィンと、前記回路基板に実装される前記LSIおよび前記チップ部品の発熱を放熱する実装部品用放熱フィンと、を少なくとも含んで構成されていて、前記固体撮像素子の主面全体を、前記LSIおよび前記チップ部品を実装する前記回路基板の第一主面上に隙間なく接合し、且つ、固体撮像素子全面を接合した領域に対向する回路基板の裏側の第二主面上の位置に固体撮像素子の有効画素領域よりも広い接合面を有する固体撮像素子用放熱フィンを接合し、且つ、LSIおよびチップ部品を実装した領域に対向する回路基板の裏側の第二主面上の位置にLSIおよびチップ部品の実装領域よりも同等以上に広い接合面を有する実装部品用放熱フィンを接合することを、主要な特徴としている。
(Features of the present invention)
Prior to the description of the embodiments of the present invention, an outline of the features of the present invention will be described first. In the solid-state imaging device and the solid-state imaging device heat dissipation method according to the present invention, a solid-state imaging device, a circuit board that transmits an electrical signal from the solid-state imaging device, and a drive and readout signal processing unit for the solid-state imaging device are integrated. LSI (Large Scale Integrated Circuit), chip component, heat radiation fin for solid-state image sensor that dissipates heat generated by the solid-state image sensor, and mounting that dissipates heat generated by the LSI and chip component mounted on the circuit board A heat-radiating fin for components, and the entire main surface of the solid-state imaging element is joined to the first main surface of the circuit board on which the LSI and the chip component are mounted without gaps, and Solid-state imaging having a bonding surface wider than the effective pixel region of the solid-state imaging device at a position on the second main surface on the back side of the circuit board facing the region where the entire surface of the solid-state imaging device is bonded A joining surface that is equal to or larger than the LSI and chip component mounting area is formed on the second main surface on the back side of the circuit board opposite to the area where the LSI heat dissipation fins are bonded and the LSI and chip component mounting areas. The main feature is to join the radiating fins for mounting components.

つまり、前記固体撮像素子の主面全体を、前記回路基板の第一主面上の固体撮像素子接合領域に隙間なく接合するとともに前記固体撮像素子と前記回路基板とを電気的に接続し、
且つ、前記LSIおよび前記チップ部品を、前記固体撮像素子が接合された前記回路基板の第一主面上のLSI・チップ部品実装領域に実装して、前記回路基板と電気的に接続し、
且つ、前記固体撮像素子用放熱フィンを、前記固体撮像素子が接合された前記回路基板上の前記固体撮像素子接合領域と対向する反対側の前記回路基板の第二主面上の位置に、前記固体撮像素子の有効画素領域よりも広い領域で接合し、
且つ、前記実装部品用放熱フィンを、前記LSIおよび前記チップ部品が実装された前記回路基板上の前記LSI・チップ部品実装領域と対向する反対側の前記回路基板の第二主面上の位置に前記LSI・チップ部品実装領域と同一の広さの領域または前記LSI・チップ部品実装領域よりも広い領域で接合する
ことを主要な特徴としている。
That is, the entire main surface of the solid-state image sensor is bonded to the solid-state image sensor bonding region on the first main surface of the circuit board without gaps, and the solid-state image sensor and the circuit board are electrically connected,
And, the LSI and the chip component are mounted on the LSI / chip component mounting region on the first main surface of the circuit board to which the solid-state imaging device is bonded, and electrically connected to the circuit board,
And, the heat radiation fin for the solid-state image sensor is located at a position on the second main surface of the circuit board opposite to the solid-state image sensor joint area on the circuit board to which the solid-state image sensor is joined. Join in a wider area than the effective pixel area of the solid-state image sensor,
The mounting component heat dissipating fin is positioned on the second main surface of the circuit board opposite to the LSI / chip component mounting area on the circuit board on which the LSI and the chip component are mounted. The main feature is that bonding is performed in a region having the same area as the LSI / chip component mounting region or a region wider than the LSI / chip component mounting region.

また、本発明に係る固体撮像装置および固体撮像装置放熱方法においては、前記固体撮像素子と前記回路基板との接続を中継する中継基板をさらに備え、該中継基板の主面は前記固体撮像素子の主面と同等以上に広い形状であり、且つ、前記固体撮像素子の主面全体を前記中継基板の主面に隙間なく接合し、且つ、前記固体撮像素子が接合された主面の裏側(反対側)の前記中継基板の主面全体を、前記回路基板の第一主面に隙間なく接合することも主要な特徴としている。ここで、かくのごとき中継基板をさらに備えている場合には、前記中継基板全面を接合した領域に対向する前記回路基板の裏側の第二主面上の位置に前記中継基板の前記回路基板への接合領域と同様以上に広い接合面を有する固体撮像素子用放熱フィンを接合する。   Moreover, in the solid-state imaging device and the solid-state imaging device heat dissipation method according to the present invention, the solid-state imaging device further includes a relay board that relays connection between the solid-state imaging element and the circuit board. The main surface of the solid-state image sensor has a shape equal to or larger than that of the main surface, and the entire main surface of the solid-state image sensor is joined to the main surface of the relay board without any gap, and the back side of the main surface to which the solid-state image sensor is joined The main feature is that the entire main surface of the relay board on the side) is joined to the first main surface of the circuit board without any gap. Here, in the case where a relay board is further provided, the circuit board of the relay board is placed at a position on the second main surface on the back side of the circuit board facing the region where the entire surface of the relay board is bonded. The solid-state imaging element radiating fin having a joint surface wider than that of the joint region is joined.

つまり、前記固体撮像素子と前記回路基板との接続を中継する中継基板をさらに備え、
前記中継基板の主面を、前記固体撮像素子の主面と同一の広さの領域または前記固体撮像素子の主面よりも広い領域を形成する形状とし、
且つ、前記固体撮像素子の主面全体を前記中継基板の主面に隙間なく接合するとともに前記固体撮像素子と前記中継基板とを電気的に接続し、
且つ、前記固体撮像素子が接合された前記中継基板の主面と対向する反対側の前記中継基板の主面全体を、前記回路基板の第一主面上の中継基板接合領域に隙間なく接合するとともに前記中継基板と前記回路基板とを電気的に接続し、
さらに、前記固体撮像素子用放熱フィンが前記回路基板と接合される領域を、前記中継基板接合領域と同一の広さの領域または前記中継基板接合領域よりも広い領域を形成する形状とし、
且つ、前記固体撮像素子用放熱フィンを、前記中継基板が接合された前記回路基板上の前記中継基板接合領域と対向する反対側の前記回路基板の第二主面上の位置に接合することも主要な特徴としている。
In other words, further comprising a relay board for relaying the connection between the solid-state imaging device and the circuit board,
The main surface of the relay substrate is shaped to form a region having the same area as the main surface of the solid-state image sensor or a region wider than the main surface of the solid-state image sensor,
And while joining the whole main surface of the solid-state image sensor to the main surface of the relay board without a gap, and electrically connecting the solid-state image sensor and the relay board,
In addition, the entire main surface of the relay substrate opposite to the main surface of the relay substrate to which the solid-state imaging element is bonded is bonded to the relay substrate bonding region on the first main surface of the circuit board without any gap. And electrically connecting the relay board and the circuit board,
Further, the area where the solid-state imaging element radiating fin is bonded to the circuit board is shaped to form an area having the same width as the relay board bonding area or an area wider than the relay board bonding area,
In addition, the solid-state imaging element radiating fin may be bonded to a position on the second main surface of the circuit board opposite to the relay board bonding area on the circuit board to which the relay board is bonded. Main features.

而して、本発明に係る固体撮像装置および固体撮像装置放熱方法においては、前記固体撮像素子にて発生した熱を、前記回路基板、前記固体撮像素子用放熱フィンの順番の伝熱経路、または、前記中継基板をさらに備えている場合には、前記中継基板、前記回路基板、前記固体撮像素子用放熱フィンの順番の伝熱経路により効率的に放熱することができ、且つ、前記固体撮像素子内での温度差(温度勾配)も抑制することができる。さらに、前記LSIや前記チップ部品から発生した熱についても、前記回路基板、前記実装部品用放熱フィンの順番の伝熱経路により効率的に放熱することができる。   Thus, in the solid-state imaging device and the solid-state imaging device heat dissipation method according to the present invention, the heat generated in the solid-state imaging device is converted into heat transfer paths in the order of the circuit board, the radiation fins for the solid-state imaging device, or When the relay board is further provided, heat can be efficiently radiated by the heat transfer path in the order of the relay board, the circuit board, and the radiation fin for the solid-state image sensor, and the solid-state image sensor The temperature difference (temperature gradient) can also be suppressed. Furthermore, the heat generated from the LSI and the chip component can be efficiently radiated through the heat transfer path in the order of the circuit board and the mounting component radiating fin.

つまり、本発明に係る固体撮像装置および固体撮像装置放熱方法においては、前記特許文献1や前記特許文献2のような従来の固体撮像装置において発生していた、固体撮像素子そのものの放熱が不十分で、且つ、回路基板の放熱との両立も不可能であるという問題、すなわち、次のような問題を確実に解決することができる。
(1)固体撮像素子の動作時の発熱を、該固体撮像素子の主面の一部分しか伝送する経路として使用しておらず、固体撮像素子の動作時発熱を十分に放熱することができないという問題。
(2)固体撮像素子の中心部と外周部とに温度差(温度勾配)が発生し、撮像データの信頼性が低下するという問題。
(3)回路基板と伝熱部材の熱的な連結が十分ではなかったため、回路基板の発熱を放熱することができないという問題。
That is, in the solid-state imaging device and the solid-state imaging device heat radiation method according to the present invention, the heat radiation of the solid-state imaging device itself, which is generated in the conventional solid-state imaging device such as Patent Document 1 and Patent Document 2, is insufficient. In addition, it is possible to reliably solve the problem that it is impossible to achieve both heat dissipation of the circuit board, that is, the following problem.
(1) The problem that heat generated during operation of the solid-state image sensor is used as a path for transmitting only a part of the main surface of the solid-state image sensor, and the heat generated during operation of the solid-state image sensor cannot be sufficiently dissipated. .
(2) A problem that a temperature difference (temperature gradient) occurs between the central portion and the outer peripheral portion of the solid-state imaging device, and the reliability of the imaging data decreases.
(3) The problem that the heat generated by the circuit board cannot be radiated because the thermal connection between the circuit board and the heat transfer member was not sufficient.

(第一の実施形態の構成例)
次に、本発明による固体撮像装置の構成例について、図1を参照しながら説明する。図1は、本発明による第一の実施形態に係る固体撮像装置の一構成例を示す構成図であり、図1(A)は、上方向から眺めた平面図であり、図1(B)は、正面方向の正断面図であり、図1(C)は、右側面方向の側断面図である。
(Configuration example of the first embodiment)
Next, a configuration example of the solid-state imaging device according to the present invention will be described with reference to FIG. FIG. 1 is a configuration diagram illustrating a configuration example of a solid-state imaging device according to the first embodiment of the present invention, and FIG. 1 (A) is a plan view viewed from above, and FIG. FIG. 1 is a front sectional view in the front direction, and FIG. 1C is a side sectional view in the right side direction.

図1に示す固体撮像装置100は、固体撮像素子101と、該固体撮像素子101と図示しない電気的接続手段を用いて電気的に接続されている中継基板102と、該固体撮像素子101の駆動および読出し信号を処理部等が集積しているLSI(大規模集積回路)104およびチップ部品105が実装されている回路基板103と、固体撮像素子101の発熱を放熱する固体撮像素子用放熱フィン106と、回路基板103に実装したLSI104およびチップ部品105の発熱を放熱する実装部品用放熱フィン107と、を少なくとも含んで形成されている。   A solid-state imaging device 100 illustrated in FIG. 1 includes a solid-state imaging device 101, a relay substrate 102 that is electrically connected to the solid-state imaging device 101 using an electrical connection unit (not illustrated), and driving of the solid-state imaging device 101. And a circuit board 103 on which an LSI (Large Scale Integrated Circuit) 104 and a chip component 105 on which read signals are integrated, and a solid-state image sensor radiation fin 106 that dissipates heat generated by the solid-state image sensor 101. And mounting component heat radiation fins 107 that dissipate heat generated by the LSI 104 and the chip component 105 mounted on the circuit board 103.

図1の固体撮像装置100において、中継基板102の主面は、図1(B)および図1(C)に示すように、固体撮像素子101の主面と同一または大きくなるように形成している(図1(B)および図1(C)に示す例においては、中継基板102の主面が固体撮像素子101よりも大きくなるように形成している)。固体撮像素子101の主面全体は、中継基板102の主面に隙間なく接合され、固体撮像素子101と中継基板102との間は図示していない電気的接続手段を用いて電気的に接続されている。   In the solid-state imaging device 100 of FIG. 1, the main surface of the relay substrate 102 is formed to be the same as or larger than the main surface of the solid-state imaging device 101 as shown in FIGS. 1B and 1C. (In the example shown in FIGS. 1B and 1C, the main surface of the relay substrate 102 is formed to be larger than the solid-state imaging device 101). The entire main surface of the solid-state image sensor 101 is joined to the main surface of the relay substrate 102 without a gap, and the solid-state image sensor 101 and the relay substrate 102 are electrically connected using an electrical connection means (not shown). ing.

また、固体撮像素子101の主面全体が接合されている中継基板102は、図1(A)に示すように、主面の大きさが回路基板103の第一主面103aおよび第二主面103bよりも小さく、図1(B)および図1(C)に示すように、固体撮像素子101との接合面の反対側の中継基板102の主面全体が回路基板103の第一主面103aに隙間なく接合され、中継基板102と回路基板103との間は図示していない電気的接続手段を用いて電気的に接続されている。   In addition, as shown in FIG. 1A, the relay substrate 102 to which the entire main surface of the solid-state imaging device 101 is bonded has a main surface size of the first main surface 103a and the second main surface of the circuit board 103. 1B and FIG. 1C, the entire main surface of the relay substrate 102 on the opposite side of the joint surface with the solid-state image sensor 101 is the first main surface 103a of the circuit board 103. The relay board 102 and the circuit board 103 are electrically connected using an electrical connection means (not shown).

また、固体撮像素子用放熱フィン106が回路基板103と接合される領域(接合面)は、図1(C)に示すように、回路基板103上に中継基板102を介して配置されている固体撮像素子101の有効画素領域よりも広く、好ましくは、中継基板102の主面が回路基板103の第一主面103aに接合される領域の中継基板接合領域102aと同一の広さの領域または中継基板接合領域102aよりも広い領域を形成する形状とし、且つ、中継基板102が接合される回路基板103上の中継基板接合領域102aと対向する回路基板103の反対側の第二主面103b上の位置に接合されている。   Further, the region (joint surface) where the solid-state imaging element radiating fin 106 is joined to the circuit board 103 is a solid disposed on the circuit board 103 via the relay board 102 as shown in FIG. An area that is wider than the effective pixel area of the image sensor 101, and preferably has the same width as the relay board bonding area 102a in the area where the main surface of the relay board 102 is bonded to the first main surface 103a of the circuit board 103 or a relay. On the second main surface 103b on the opposite side of the circuit board 103 facing the relay board bonding area 102a on the circuit board 103 to which the relay board 102 is bonded, and having a shape that forms a wider area than the board bonding area 102a Is joined to the position.

同様に、実装部品用放熱フィン107が回路基板103と接合される領域(接合面)は、図1(C)に示すように、LSI104およびチップ部品105が回路基板103の第一主面103aに実装される領域のLSI・チップ部品実装領域104aと同一の広さの領域またはLSI・チップ部品実装領域104aよりも広い領域を形成する形状とし、且つ、LSI104およびチップ部品105が実装される回路基板103上のLSI・チップ部品実装領域104aと対向する回路基板103の反対側の第二主面103b上の位置に接合されている。   Similarly, the region (bonding surface) where the mounting component heat radiation fin 107 is bonded to the circuit board 103 is such that the LSI 104 and the chip component 105 are placed on the first main surface 103a of the circuit board 103 as shown in FIG. A circuit board on which the LSI 104 and the chip component 105 are mounted, and has a shape that forms an area of the same area as the LSI / chip component mounting area 104a or a larger area than the LSI / chip component mounting area 104a. Bonded at a position on the second main surface 103 b opposite to the circuit board 103 facing the LSI / chip component mounting region 104 a on 103.

(第一の実施形態の製法の説明)
次に、図1に示した固体撮像装置100の製造方法について、その一例を説明する。
(Description of the manufacturing method of the first embodiment)
Next, an example of the manufacturing method of the solid-state imaging device 100 shown in FIG. 1 will be described.

まず、中継基板102の主面に対して固体撮像素子101の主面全体をダイボンディングして隙間なく接合した後、固体撮像素子101と中継基板102との間を図示しない電気的接続手段を用いて電気的に接続する。次に、回路基板103の第一主面103a上の中継基板接合領域102aに、固体撮像素子101が電気的および機械的に接続(接合)されている中継基板102の反対側の主面全体を接合し、さらに、回路基板103の第一主面103a上のLSI・チップ部品実装領域104aに、LSI104およびチップ部品105を実装して、中継基板102、LSI104およびチップ部品105のそれぞれを図示しない電気的接続手段を用いて回路基板103と電気的に接続する。この結果、中継基板102とLSI104およびチップ部品105との間も電気的に接続された状態になる。   First, the entire main surface of the solid-state imaging device 101 is die-bonded to the main surface of the relay substrate 102 without gaps, and then electrical connection means (not shown) is used between the solid-state imaging device 101 and the relay substrate 102. Connect them electrically. Next, the entire main surface on the opposite side of the relay substrate 102 to which the solid-state imaging device 101 is electrically and mechanically connected (bonded) to the relay substrate bonding region 102a on the first main surface 103a of the circuit board 103 is formed. Further, the LSI 104 and the chip component 105 are mounted on the LSI / chip component mounting region 104a on the first main surface 103a of the circuit board 103, and the relay substrate 102, the LSI 104, and the chip component 105 are not shown. Electrical connection is made to the circuit board 103 using a general connection means. As a result, the relay substrate 102 and the LSI 104 and the chip component 105 are also electrically connected.

なお、中継基板102の主面は、前述したように、固体撮像素子101の主面と同一の広さの領域または固体撮像素子101の主面よりも広い領域を形成する形状である。   As described above, the main surface of the relay substrate 102 has a shape that forms a region having the same area as the main surface of the solid-state image sensor 101 or a region wider than the main surface of the solid-state image sensor 101.

ここで、固体撮像素子101が電気的および機械的に接続されている中継基板102と回路基板103との間の電気的接続手段としては、例えば、ワイヤーボンディング、ハンダ接続、異方性導電ペースト接続等が好ましい。また、LSI104およびチップ部品105と回路基板103との間の電気的接続手段についても、ワイヤーボンディング、ハンダ接続、異方性導電ペースト接続等が好ましい。   Here, as an electrical connection means between the circuit board 103 and the relay substrate 102 to which the solid-state image sensor 101 is electrically and mechanically connected, for example, wire bonding, solder connection, anisotropic conductive paste connection Etc. are preferred. In addition, wire bonding, solder connection, anisotropic conductive paste connection, and the like are preferable for the electrical connection means between the LSI 104 and the chip component 105 and the circuit board 103.

しかる後、固体撮像素子101が電気的および機械的に接続されている中継基板102が接合された回路基板103の第一主面103a上の中継基板接合領域102aの位置と対向する回路基板103の反対側の第二主面103bの位置には、固体撮像素子用放熱フィン106が接合される。なお、固体撮像素子用放熱フィン106は、好ましくは、蝋付けや高熱伝導性を備えた接着剤等を用いて、回路基板103の第二主面103bに接合されることが望ましい。   Thereafter, the circuit board 103 facing the position of the relay board bonding region 102a on the first main surface 103a of the circuit board 103 to which the relay board 102 to which the solid-state imaging device 101 is electrically and mechanically connected is bonded. A solid-state imaging element radiating fin 106 is joined to the position of the second main surface 103b on the opposite side. Note that the solid-state imaging element radiating fin 106 is preferably bonded to the second main surface 103b of the circuit board 103 by using an adhesive or the like having brazing or high thermal conductivity.

同様に、LSI104およびチップ部品105が実装されている回路基板103の第一主面103a上のLSI・チップ部品実装領域104aの位置と対向する回路基板103の反対側の第二主面103bの位置には、実装部品用放熱フィン107が接合される。なお、実装部品用放熱フィン107についても、好ましくは、蝋付けや高熱伝導性を備えた接着剤等を用いて、回路基板103の第二主面103bに接合されることが望ましい。   Similarly, the position of the second main surface 103b opposite to the circuit board 103 opposite to the position of the LSI / chip component mounting region 104a on the first main surface 103a of the circuit board 103 on which the LSI 104 and the chip component 105 are mounted. The mounting component radiating fins 107 are joined to each other. The mounting component radiating fins 107 are also preferably joined to the second main surface 103b of the circuit board 103 by using an adhesive or the like having brazing or high thermal conductivity.

また、固体撮像素子用放熱フィン106が回路基板103と接合される領域(接合面)は、前述したように、固体撮像素子101の有効画素領域よりも広く、好ましくは、中継基板102の主面が回路基板103の第一主面103aに対して接合される領域の中継基板接合領域102aと同一の広さまたは中継基板接合領域102aよりも広い領域を形成する形状としている。同様に、実装部品用放熱フィン107の回路基板103と接合される領域(接合面)についても、前述したように、LSI104およびチップ部品105が回路基板103の第一主面103aに対して実装される領域のLSI・チップ部品実装領域104aと同一の広さの領域またはLSI・チップ部品実装領域104aよりも広い領域を形成する形状としている。   In addition, as described above, the region (joint surface) where the solid-state image sensor radiating fin 106 is joined to the circuit board 103 is wider than the effective pixel region of the solid-state image sensor 101, preferably the main surface of the relay substrate 102. Is formed to have the same area as the relay board bonding area 102a in the area bonded to the first main surface 103a of the circuit board 103 or a wider area than the relay board bonding area 102a. Similarly, as described above, the LSI 104 and the chip component 105 are mounted on the first main surface 103 a of the circuit board 103 in the region (joint surface) to be joined to the circuit board 103 of the mounting component radiating fin 107. The area is the same as the area of the LSI / chip component mounting area 104a or the area wider than the LSI / chip component mounting area 104a.

また、中継基板102および回路基板103の材料としては、熱伝導率の高い材料が好ましい。代表的には、AlN(窒化アルミニウム)を基材とした材料が好適である。   Moreover, as a material of the relay substrate 102 and the circuit board 103, a material having high thermal conductivity is preferable. Typically, a material based on AlN (aluminum nitride) is preferable.

固体撮像素子用放熱フィン106および実装部品用放熱フィン107の材料についても、同様に、熱伝導率の高い材料が好ましい。代表的には、CuW(銅タングステン)を基材とした材料が好適である。あるいは、固体撮像素子用放熱フィン106および実装部品用放熱フィン107の材料に、中継基板102および回路基板103の材料と同一のもの、または、物性値(特に、熱伝導率/熱膨張係数等)が近いもの例えばAlN(窒化アルミニウム)を選択するようにしても良く、かくのごとき材料を用いることによって、相対的な熱抵抗を最小限に抑制することができ、且つ、温度変化に伴う熱膨張係数差に起因する形状変形も最小限に抑制することができる。   Similarly, the material of the solid-state imaging element radiating fin 106 and the mounting component radiating fin 107 is preferably a material having high thermal conductivity. Typically, a material based on CuW (copper tungsten) is preferable. Alternatively, the material of the solid-state imaging element radiating fin 106 and the mounting component radiating fin 107 is the same as the material of the relay substrate 102 and the circuit board 103, or the physical properties (particularly, thermal conductivity / thermal expansion coefficient, etc.) For example, AlN (aluminum nitride) may be selected, and by using such a material, the relative thermal resistance can be minimized, and the thermal expansion accompanying the temperature change Shape deformation due to the coefficient difference can also be suppressed to a minimum.

(第二の実施形態の構成例)
次に、本発明による固体撮像装置の図1とは異なる他の構成例について、図2を参照しながら説明する。図2は、本発明による第二の実施形態に係る固体撮像装置の一構成例を示す構成図であり、図2(A)は、上方向から眺めた平面図であり、図2(B)は、正面方向の正断面図であり、図2(C)は、右側面方向の側断面図である。
(Configuration example of the second embodiment)
Next, another configuration example different from FIG. 1 of the solid-state imaging device according to the present invention will be described with reference to FIG. FIG. 2 is a configuration diagram showing a configuration example of a solid-state imaging device according to the second embodiment of the present invention, and FIG. 2 (A) is a plan view viewed from above, and FIG. FIG. 2 is a front sectional view in the front direction, and FIG. 2C is a side sectional view in the right side direction.

図2に示す固体撮像装置100Aは、図1に示した第一の実施形態に係る固体撮像装置100と異なり、中継基板102はなく、図2(C)に示すように、固体撮像素子101の主面全体を、直接、回路基板103の第一主面103a上の固体撮像素子接合領域101aに接合している。その他の部位に関しては、図1に示した固体撮像装置100と同じ構成としている。   Unlike the solid-state imaging device 100 according to the first embodiment shown in FIG. 1, the solid-state imaging device 100 </ b> A shown in FIG. 2 has no relay substrate 102, and as shown in FIG. The entire main surface is directly bonded to the solid-state imaging element bonding region 101 a on the first main surface 103 a of the circuit board 103. Other parts are the same as those of the solid-state imaging device 100 shown in FIG.

(第二の実施形態の製法の説明)
図2に示した固体撮像装置100Aの製造方法に関し、第一の実施形態と異なる工程についてその一例を説明する。
(Description of manufacturing method of the second embodiment)
With respect to the method for manufacturing the solid-state imaging device 100A shown in FIG. 2, an example of steps different from those in the first embodiment will be described.

まず、回路基板103の第一主面103aに対して固体撮像素子接合領域101aの領域において固体撮像素子101の主面全体を隙間なくダイボンディングして接合した後、固体撮像素子101と回路基板103との間を図示しない電気的接続手段を用いて電気的に接続する。その他の部位の製法については、第一の実施形態の場合と同様である。   First, the solid image pickup device 101 and the circuit board 103 are bonded to the first main surface 103a of the circuit board 103 by die-bonding the entire main surface of the solid image pickup device 101 without gaps in the region of the solid image pickup device bonding region 101a. Are electrically connected using electrical connection means (not shown). About the manufacturing method of another site | part, it is the same as that of the case of 1st embodiment.

ただし、第二の実施形態においては、前述のように、中継基板102が存在していないので、固体撮像素子用放熱フィン106が回路基板103と接合される領域(接合面)は、図2(C)に示すように、固体撮像素子101の有効画素領域よりも広く、好ましくは、固体撮像素子101の主面全体が回路基板103の第一主面103aに対して接合される領域の固体撮像素子接合領域101aと同一の広さまたは固体撮像素子接合領域101aよりも広い領域を形成する形状としている。   However, in the second embodiment, as described above, since the relay substrate 102 does not exist, the region (joint surface) where the solid-state imaging element radiating fin 106 is joined to the circuit board 103 is shown in FIG. As shown in C), the solid-state imaging of the area wider than the effective pixel area of the solid-state imaging device 101, preferably the whole main surface of the solid-state imaging device 101 is joined to the first main surface 103a of the circuit board 103. A shape that forms the same area as the element bonding area 101a or a larger area than the solid-state imaging element bonding area 101a is formed.

図2に示す第二の実施形態の固体撮像装置100Aは、第一の実施形態として図1に示した固体撮像装置100に比して、固体撮像素子101と固体撮像素子用放熱フィン106との間に中継基板102が介在していないので、より熱輸送を効率的に行うことができ、固体撮像素子用放熱フィン106を小型化することができるという利点が得られる。   A solid-state imaging device 100A according to the second embodiment shown in FIG. 2 includes a solid-state imaging device 101 and a solid-state imaging device radiating fin 106 as compared with the solid-state imaging device 100 shown in FIG. 1 as the first embodiment. Since the relay substrate 102 is not interposed therebetween, heat transport can be performed more efficiently, and the solid-state imaging element radiating fin 106 can be reduced in size.

(第三の実施形態の構成例)
次に、本発明による固体撮像装置の図1、図2とは異なる他の構成例について、図3を参照しながら説明する。図3は、本発明による第三の実施形態に係る固体撮像装置の一構成例を示す構成図であり、図3(A)は、上方向から眺めた平面図であり、図3(B)は、正面方向の正断面図であり、図3(C)は、右側面方向の側断面図である。
(Configuration example of the third embodiment)
Next, another configuration example different from FIGS. 1 and 2 of the solid-state imaging device according to the present invention will be described with reference to FIG. FIG. 3 is a block diagram showing an example of the configuration of the solid-state imaging device according to the third embodiment of the present invention. FIG. 3 (A) is a plan view seen from above, and FIG. FIG. 3 is a front sectional view in the front direction, and FIG. 3C is a side sectional view in the right side direction.

図3に示す固体撮像装置100Bは、図1に示した第一の実施形態に係る固体撮像装置100および図2に示した第二の実施形態に係る固体撮像装置100Aと異なり、複数個の固体撮像素子101を、それぞれの中継基板102を介してまたは直接、回路基板103に電気的・機械的に接続(接合)している(図3には、図3(A)、図3(C)に示すように、2個の固体撮像素子101をそれぞれの中継基板102を介して電気的・機械的に接続(接合)している場合を例示している)。その他の部位に関しては、図1に示した第一の実施形態に係る固体撮像装置100、図2に示した第二の実施形態に係る固体撮像装置100Aと同じ構成としている。   3 is different from the solid-state imaging device 100 according to the first embodiment shown in FIG. 1 and the solid-state imaging device 100A according to the second embodiment shown in FIG. The image pickup device 101 is electrically and mechanically connected (joined) to the circuit board 103 via each relay substrate 102 (FIGS. 3A and 3C). As shown in FIG. 2, the case where two solid-state imaging devices 101 are electrically (mechanically) connected (joined) via respective relay substrates 102 is illustrated. Other parts are the same as those of the solid-state imaging device 100 according to the first embodiment shown in FIG. 1 and the solid-state imaging device 100A according to the second embodiment shown in FIG.

したがって、図3に示す固体撮像装置100Bは、図1に示した第一の実施形態に係る固体撮像装置100および図2に示した第二の実施形態に係る固体撮像装置100Aに比して、固体撮像素子101を複数個集積しているので、実装面積の増加を抑制しながら、固体撮像素子101の総合画素数を増加させることができるという利点が得られる。   Therefore, the solid-state imaging device 100B shown in FIG. 3 is compared with the solid-state imaging device 100 according to the first embodiment shown in FIG. 1 and the solid-state imaging device 100A according to the second embodiment shown in FIG. Since a plurality of solid-state image sensors 101 are integrated, there is an advantage that the total number of pixels of the solid-state image sensor 101 can be increased while suppressing an increase in mounting area.

(第四の実施形態の構成例)
次に、本発明による固体撮像装置の図1ないし図3とは異なる他の構成例について、図4を参照しながら説明する。図4は、本発明による第四の実施形態に係る固体撮像装置の一構成例を示す構成図であり、図4(A)は、上方向から眺めた平面図であり、図4(B)は、正面方向の正断面図であり、図4(C)は、右側面方向の側断面図である。
(Configuration example of the fourth embodiment)
Next, another example of the configuration of the solid-state imaging device according to the present invention, which is different from FIGS. 1 to 3, will be described with reference to FIG. FIG. 4 is a configuration diagram showing a configuration example of a solid-state imaging device according to the fourth embodiment of the present invention, and FIG. 4 (A) is a plan view seen from above, and FIG. Fig. 4 is a front sectional view in the front direction, and Fig. 4C is a side sectional view in the right side direction.

図4に示す固体撮像装置100Cは、図1に示した第一の実施形態に係る固体撮像装置100、図2に示した第二の実施形態に係る固体撮像装置100Aおよび図3に示した第三の実施形態に係る固体撮像装置100Bと異なり、回路基板103の第一主面103a上において、中継基板102が接合された中継基板接合領域102aの周囲または中継基板102が存在しない場合には固体撮像素子101が接合された固体撮像素子接合領域101aの周囲(図4の場合は、中継基板102が存在している場合を例示している)にも、チップ部品105を配置して実装している。その他の部位に関しては、図1に示した第一の実施形態に係る固体撮像装置100、図2に示した第二の実施形態に係る固体撮像装置100Aおよび図3に示した第三の実施形態に係る固体撮像装置100Bと同じ構成としている。   A solid-state imaging device 100C shown in FIG. 4 includes the solid-state imaging device 100 according to the first embodiment shown in FIG. 1, the solid-state imaging device 100A according to the second embodiment shown in FIG. 2, and the first shown in FIG. Unlike the solid-state imaging device 100B according to the third embodiment, on the first main surface 103a of the circuit board 103, the area around the relay board bonding region 102a to which the relay board 102 is bonded or when the relay board 102 does not exist is solid. The chip component 105 is also arranged and mounted around the solid-state image sensor joining region 101a to which the image sensor 101 is joined (in the case of FIG. 4, the case where the relay substrate 102 is present is illustrated). Yes. Regarding other parts, the solid-state imaging device 100 according to the first embodiment shown in FIG. 1, the solid-state imaging device 100A according to the second embodiment shown in FIG. 2, and the third embodiment shown in FIG. The same configuration as that of the solid-state imaging device 100B according to FIG.

ただし、第四の実施形態においては、前述のように、中継基板接合領域102aの周囲または固体撮像素子接合領域101aの周囲にも動作時に発熱するチップ部品105が配置されているので、固体撮像素子用放熱フィン106が回路基板103と接合される領域(接合面)は、図4(C)に示すように、固体撮像素子101の有効画素領域よりも広く、好ましくは、中継基板102の主面全体が回路基板103の第一主面103aに対して接合される領域の中継基板接合領域102aまたは中継基板102が存在しない場合には固体撮像素子101の主面全体が回路基板103の第一主面103aに対して接合される領域の固体撮像素子接合領域101aに、さらに、中継基板接合領域102aもしくは固体撮像素子接合領域101aの周囲に配置されたチップ部品105の実装領域を加えた領域である拡張接合領域102bと同一の広さまたは拡張接合領域102bよりも広い領域を形成する形状としている。   However, in the fourth embodiment, as described above, the chip component 105 that generates heat during operation is also disposed around the relay substrate bonding region 102a or around the solid-state imaging device bonding region 101a. As shown in FIG. 4C, the region where the heat radiating fin 106 is bonded to the circuit board 103 is wider than the effective pixel area of the solid-state imaging device 101, preferably the main surface of the relay substrate 102. When there is no relay substrate bonding region 102a or relay substrate 102 in the region where the entirety is bonded to the first main surface 103a of the circuit board 103, the entire main surface of the solid-state imaging device 101 is the first main surface of the circuit board 103. In addition to the solid-state imaging element bonding area 101a in the area bonded to the surface 103a, the relay substrate bonding area 102a or the solid-state imaging element bonding area 101a It is shaped to form a larger area than the extension junction region 102b of the same size or extension junction area 102b is an area obtained by adding the mounting area of the chip component 105 arranged in circumference.

したがって、図4に示す固体撮像装置100Cは、固体撮像素子用放熱フィン106によって、固体撮像素子101のみならず、中継基板接合領域102aの周囲または固体撮像素子接合領域101aの周囲に配置されたチップ部品105についても、発熱を効果的に放熱することができるので、図1に示した第一の実施形態に係る固体撮像装置100、図2に示した第二の実施形態に係る固体撮像装置100Aおよび図3に示した第三の実施形態に係る固体撮像装置100Bに比して、例えば、電気特性上、固体撮像素子101の近傍に発熱を伴うチップ部品105を配置する必要がある場合に効果的である。   Therefore, the solid-state imaging device 100C shown in FIG. 4 has chips disposed not only on the solid-state imaging element 101 but also around the relay board bonding area 102a or around the solid-state imaging element bonding area 101a by the solid-state imaging element radiating fins 106. Since the component 105 can also effectively dissipate heat, the solid-state imaging device 100 according to the first embodiment shown in FIG. 1 and the solid-state imaging device 100A according to the second embodiment shown in FIG. Compared to the solid-state imaging device 100B according to the third embodiment shown in FIG. 3 and FIG. 3, for example, it is effective when it is necessary to dispose a chip component 105 that generates heat in the vicinity of the solid-state imaging device 101 in terms of electrical characteristics. Is.

(各実施形態の固体撮像装置の効果の説明)
以上に詳細に説明したように、前述した各実施形態においては、主に、次のような効果を得ることができる。
(Description of effects of the solid-state imaging device of each embodiment)
As described in detail above, the following effects can be obtained mainly in the above-described embodiments.

第二の実施形態においては、固体撮像素子101の主面全体を回路基板103の第一主面103aと隙間なく接続し、且つ、LSI104およびチップ部品105を固体撮像素子101と同一方向の回路基板103の第一主面103a上に実装し、且つ、回路基板103上の固体撮像素子101の有効画素領域よりも広く、好ましくは、固体撮像素子101の領域(固体撮像素子接合領域101a)に対して同等以上に大きくなるような形状(領域)に接合面を形成した固体撮像素子用放熱フィン106を固体撮像素子101が接合される第一主面103a上の領域(固体撮像素子接合領域101a)と対向する回路基板103の反対側の第二主面103b上の位置に接合し、且つ、LSI104およびチップ部品105の実装領域(LSI・チップ部品実装領域104a)に対して同等以上に大きくなるような形状(領域)に接合面を形成した実装部品用放熱フィン107をLSI104およびチップ部品105が実装される第一主面103a上の領域(LSI・チップ部品実装領域104a)と対向する回路基板103の反対側の第二主面103b上の位置に接合している。   In the second embodiment, the entire main surface of the solid-state image sensor 101 is connected to the first main surface 103a of the circuit board 103 without a gap, and the LSI 104 and the chip component 105 are in the same direction as the solid-state image sensor 101. 103, which is mounted on the first main surface 103a and wider than the effective pixel area of the solid-state image sensor 101 on the circuit board 103, preferably with respect to the area of the solid-state image sensor 101 (solid-state image sensor junction area 101a). Area on the first main surface 103a to which the solid-state imaging element 101 is joined (solid-state imaging element joining area 101a). And a mounting region (LSI for the LSI 104 and the chip component 105). A region on the first main surface 103a on which the LSI 104 and the chip component 105 are mounted with the mounting component radiating fin 107 having a bonding surface formed in a shape (region) that is equal to or larger than the chip component mounting region 104a). It is joined at a position on the second main surface 103b opposite to the circuit board 103 facing the (LSI / chip component mounting region 104a).

而して、固体撮像素子101にて発生した熱を回路基板103、固体撮像素子用放熱フィン106の順番の伝熱経路により効率的に放熱することができ、且つ、固体撮像素子101内における温度差(温度勾配)も抑制することができる。さらに、LSI104やチップ部品105から発生した熱についても、回路基板103、実装部品用放熱フィン107の順番の伝熱経路により効率的に放熱することができる。   Thus, the heat generated in the solid-state image sensor 101 can be efficiently radiated through the heat transfer path in the order of the circuit board 103 and the solid-state image sensor radiating fin 106, and the temperature in the solid-state image sensor 101 can be radiated. The difference (temperature gradient) can also be suppressed. Further, the heat generated from the LSI 104 and the chip component 105 can be efficiently radiated through the heat transfer path in the order of the circuit board 103 and the mounting component radiating fins 107.

また、第一、第三の実施形態のように、中継基板102を備えている場合には、固体撮像素子101の主面全体が隙間なく接合される中継基板102の主面を、固体撮像素子101の主面と同等以上に大きくなるように形成し、且つ、固体撮像素子101が接合された中継基板102の反対側の主面全体を回路基板103の第一主面103aに隙間なく接合し、且つ、LSI104およびチップ部品105を固体撮像素子101が接続(接合)された中継基板102と同一方向の回路基板103の第一主面103a上に実装し、且つ、回路基板103上の固体撮像素子101の有効画素領域よりも広く、好ましくは、中継基板102の領域(中継基板接合領域102a)に対して同等以上に大きくなるような形状(領域)に接合面を形成した固体撮像素子用放熱フィン106を中継基板102が接合される第一主面103a上の領域(中継基板接合領域102a)と対向する回路基板103の反対側の第二主面103b上の位置に接合し、且つ、LSI104およびチップ部品105の実装領域(LSI・チップ部品実装領域104a)に対して同等以上に大きくなるような形状(領域)に接合面を形成した実装部品用放熱フィン107をLSI104およびチップ部品105が実装される第一主面103a上の領域(LSI・チップ部品実装領域104a)と対向する回路基板103の反対側の第二主面103b上の位置に接合している。   Further, when the relay substrate 102 is provided as in the first and third embodiments, the main surface of the relay substrate 102 to which the entire main surface of the solid-state image sensor 101 is joined without a gap is used as the solid-state image sensor. The entire main surface on the opposite side of the relay substrate 102 to which the solid-state imaging device 101 is bonded is bonded to the first main surface 103a of the circuit board 103 without a gap. In addition, the LSI 104 and the chip component 105 are mounted on the first main surface 103a of the circuit board 103 in the same direction as the relay board 102 to which the solid-state imaging device 101 is connected (joined), and the solid-state imaging on the circuit board 103 is performed. The bonding surface is formed in a shape (region) that is larger than the effective pixel region of the element 101, and preferably larger than or equal to the region of the relay substrate 102 (the relay substrate bonding region 102a). The body imaging element radiating fin 106 is bonded to a position on the second main surface 103b opposite to the circuit board 103 facing the region on the first main surface 103a to which the relay substrate 102 is bonded (relay substrate bonding region 102a). In addition, the mounting component radiating fins 107 each having a bonding surface formed in a shape (region) that is equal to or larger than the mounting region of the LSI 104 and the chip component 105 (LSI / chip component mounting region 104a) The chip component 105 is bonded to a position on the second main surface 103b opposite to the circuit board 103 facing the region (LSI / chip component mounting region 104a) on the first main surface 103a on which the chip component 105 is mounted.

而して、固体撮像素子101にて発生した熱を中継基板102、回路基板103、固体撮像素子用放熱フィン106の順番の伝熱経路により効率的に放熱することができ、且つ、固体撮像素子101内における温度差(温度勾配)も抑制することができる。さらに、中継基板102が存在しない場合と同様に、LSI104やチップ部品105から発生した熱についても、回路基板103、実装部品用放熱フィン107の順番の伝熱経路により効率的に放熱することができる。   Thus, the heat generated in the solid-state imaging device 101 can be efficiently radiated through the heat transfer path in the order of the relay substrate 102, the circuit board 103, and the solid-state imaging device radiating fin 106, and the solid-state imaging device. The temperature difference (temperature gradient) in 101 can also be suppressed. Further, as in the case where the relay substrate 102 does not exist, the heat generated from the LSI 104 and the chip component 105 can be efficiently radiated through the heat transfer path in the order of the circuit substrate 103 and the mounting component heat radiation fins 107. .

つまり、中継基板102の存在の如何によらず、固体撮像素子101の主面全体から放熱することができるので、固体撮像素子101内で温度勾配を抑制することが可能であり、且つ、固体撮像素子101の主面全体からの放熱と回路基板103上に実装されているLSI104やチップ部品105の放熱とを両立させることができる構造になっている。したがって、従来技術の課題を解決して、固体撮像装置100の動作時の発熱を効率良く放熱することができ、且つ、固体撮像装置100の連続撮像時間の経過に伴い、撮像動作時の発熱により固体撮像装置100の温度が上昇して、固体撮像装置100の撮像性能が低下するというような事態の発生も抑制し、所望の連続撮像時間を達成することができるようになる。   That is, since heat can be radiated from the entire main surface of the solid-state image sensor 101 regardless of the presence of the relay substrate 102, a temperature gradient can be suppressed in the solid-state image sensor 101 and the solid-state image sensor can be used. The heat radiation from the entire main surface of the element 101 and the heat radiation of the LSI 104 and the chip component 105 mounted on the circuit board 103 can be made compatible. Therefore, the problem of the conventional technique can be solved, and the heat generated during the operation of the solid-state imaging device 100 can be efficiently radiated, and as the continuous imaging time of the solid-state imaging device 100 elapses, the heat generated during the imaging operation Occurrence of a situation in which the temperature of the solid-state imaging device 100 rises and the imaging performance of the solid-state imaging device 100 decreases is suppressed, and a desired continuous imaging time can be achieved.

本発明に係る固体撮像装置は、連続撮像動作時間の経過に伴う撮像動作時の発熱による温度上昇が引き起こす撮像性能低下という事態を抑制し、所望の撮像時間を得ることのできるので、連続撮像時間が長い場面においても好適に利用することが可能である。   The solid-state imaging device according to the present invention suppresses the situation of imaging performance degradation caused by temperature rise due to heat generation during imaging operation with the lapse of continuous imaging operation time, and can obtain a desired imaging time. Can be suitably used even in a long scene.

以上、本発明の好適な実施形態の構成を説明した。しかし、かかる実施形態は、本発明の単なる例示に過ぎず、何ら本発明を限定するものではないことに留意されたい。本発明の要旨を逸脱することなく、特定用途に応じて種々の変形変更が可能であることが、当業者には容易に理解できよう。   The configuration of the preferred embodiment of the present invention has been described above. However, it should be noted that such embodiments are merely examples of the present invention and do not limit the present invention in any way. Those skilled in the art will readily understand that various modifications and changes can be made according to a specific application without departing from the gist of the present invention.

2A 固体撮像装置
3 撮像素子
8 取り付けネジ
10 固体撮像素子
14 電気配線
15 コールドフィンガ
31 固体撮像装置
42 絶縁基板
50 半導体素子
59 バンプ
60 半導体素子
62 接着面
69 バンプ
72 パッケージ
73 ダイパッド面
74 アンダーフィル
80 伝熱部材
84 冷却ブロック
100 固体撮像装置
100A 固体撮像装置
100B 固体撮像装置
100C 固体撮像装置
101 固体撮像素子
101a 固体撮像素子接合領域
102 中継基板
102a 中継基板接合領域
102b 拡張接合領域
103 回路基板
103a 第一主面
103b 第二主面
104 LSI(大規模集積回路)
104a LSI・チップ部品実装領域
105 チップ部品
106 固体撮像素子用放熱フィン
107 実装部品用放熱フィン
110 回路基板
2A Solid-state image pickup device 3 Image pickup device 8 Mounting screw 10 Solid-state image pickup device 14 Electrical wiring 15 Cold finger 31 Solid-state image pickup device 42 Insulating substrate 50 Semiconductor element 59 Bump 60 Semiconductor element 62 Adhesive surface 69 Bump 72 Package 73 Die pad surface 74 Underfill 80 Transmission Thermal member 84 Cooling block 100 Solid-state imaging device 100A Solid-state imaging device 100B Solid-state imaging device 100C Solid-state imaging device 101 Solid-state imaging device 101a Solid-state imaging device bonding region 102 Relay substrate 102a Relay substrate bonding region 102b Extended bonding region 103 Circuit substrate 103a First main Surface 103b Second main surface 104 LSI (Large Scale Integrated Circuit)
104a LSI / Chip Component Mounting Area 105 Chip Component 106 Radiation Fin 107 for Solid-State Image Sensor 107

Claims (10)

固体撮像素子と、前記固体撮像素子からの電気信号を伝送する回路基板と、前記固体撮像素子の駆動および読出し信号処理部が集積されたLSI(大規模集積回路)と、チップ部品と、前記固体撮像素子の発熱を放熱する固体撮像素子用放熱フィンと、前記回路基板に実装される前記LSIおよび前記チップ部品の発熱を放熱する実装部品用放熱フィンと、を少なくとも含んで構成される固体撮像装置であって、
前記固体撮像素子の主面全体を、前記回路基板の第一主面上の固体撮像素子接合領域に隙間なく接合するとともに前記固体撮像素子と前記回路基板とを電気的に接続し、
前記LSIおよび前記チップ部品を、前記固体撮像素子が接合された前記回路基板の第一主面上のLSI・チップ部品実装領域に実装して、前記回路基板と電気的に接続し、
前記固体撮像素子用放熱フィンを、前記固体撮像素子が接合された前記回路基板上の前記固体撮像素子接合領域と対向する反対側の前記回路基板の第二主面上の位置に、前記固体撮像素子の有効画素領域よりも広い領域で接合し、
前記実装部品用放熱フィンを、前記LSIおよび前記チップ部品が実装された前記回路基板上の前記LSI・チップ部品実装領域と対向する反対側の前記回路基板の第二主面上の位置に前記LSI・チップ部品実装領域と同一の広さの領域または前記LSI・チップ部品実装領域よりも広い領域で接合する
ことを特徴とする固体撮像装置。
A solid-state imaging device, a circuit board that transmits an electrical signal from the solid-state imaging device, an LSI (Large Scale Integrated Circuit) integrated with driving and reading signal processing units of the solid-state imaging device, a chip component, and the solid state A solid-state imaging device comprising at least a solid-state imaging element radiating fin that radiates heat generated by the imaging element and a mounting component radiating fin that radiates heat generated by the LSI and the chip component mounted on the circuit board Because
Bonding the entire main surface of the solid-state image sensor to the solid-state image sensor bonding region on the first main surface of the circuit board without gaps, and electrically connecting the solid-state image sensor and the circuit board;
The LSI and the chip component are mounted on the LSI / chip component mounting region on the first main surface of the circuit board to which the solid-state imaging device is bonded, and electrically connected to the circuit board,
The solid-state imaging element is disposed at a position on the second main surface of the circuit board opposite to the solid-state imaging element bonding region on the circuit board to which the solid-state imaging element is bonded. Join in a wider area than the effective pixel area of the element,
The LSI for mounting components is disposed at a position on the second main surface of the circuit board opposite to the LSI / chip component mounting area on the circuit board on which the LSI and the chip parts are mounted. A solid-state imaging device characterized in that bonding is performed in a region having the same area as the chip component mounting region or a region wider than the LSI / chip component mounting region.
複数個の前記固体撮像素子を、前記回路基板の第一主面上のそれぞれの前記固体撮像素子接合領域に隙間なく接合するとともに、前記固体撮像素子それぞれと前記回路基板とを電気的に接続することを特徴とする請求項1に記載の固体撮像装置。   A plurality of the solid-state imaging devices are joined to the solid-state imaging device joining regions on the first main surface of the circuit board without gaps, and the solid-state imaging devices are electrically connected to the circuit board. The solid-state imaging device according to claim 1. 前記回路基板の基材として、窒化アルミ材を用いることを特徴とする請求項1または2に記載の固体撮像装置。   The solid-state imaging device according to claim 1, wherein an aluminum nitride material is used as a base material of the circuit board. 前記固体撮像素子と前記回路基板との接続を中継する中継基板をさらに備え、
前記中継基板の主面を、前記固体撮像素子の主面と同一の広さの領域または前記固体撮像素子の主面よりも広い領域を形成する形状とし、
前記固体撮像素子の主面全体を前記中継基板の主面に隙間なく接合するとともに前記固体撮像素子と前記中継基板とを電気的に接続し、
前記固体撮像素子が接合された前記中継基板の主面と対向する反対側の前記中継基板の主面全体を、前記回路基板の第一主面上の中継基板接合領域に隙間なく接合するとともに前記中継基板と前記回路基板とを電気的に接続する
ことを特徴とする請求項1ないし3のいずれかに記載の固体撮像装置。
A relay board that relays connection between the solid-state imaging device and the circuit board;
The main surface of the relay substrate is shaped to form a region having the same area as the main surface of the solid-state image sensor or a region wider than the main surface of the solid-state image sensor,
Joining the entire main surface of the solid-state image sensor to the main surface of the relay board without any gap and electrically connecting the solid-state image sensor and the relay board,
The entire main surface of the relay substrate opposite to the main surface of the relay substrate to which the solid-state imaging element is bonded is bonded to the relay substrate bonding region on the first main surface of the circuit board without any gap and the The solid-state imaging device according to claim 1, wherein the relay substrate and the circuit substrate are electrically connected.
前記固体撮像素子用放熱フィンが前記回路基板と接合される領域を、前記中継基板接合領域と同一の広さの領域または前記中継基板接合領域よりも広い領域を形成する形状とし、
前記固体撮像素子用放熱フィンを、前記中継基板が接合された前記回路基板上の前記中継基板接合領域と対向する反対側の前記回路基板の第二主面上の位置に接合する
ことを特徴とする請求項4に記載の固体撮像装置。
The area where the solid-state imaging element radiating fin is bonded to the circuit board is shaped to form an area having the same width as the relay board bonding area or an area wider than the relay board bonding area,
The solid-state imaging element radiating fin is bonded to a position on the second main surface of the circuit board opposite to the relay board bonding area on the circuit board to which the relay board is bonded. The solid-state imaging device according to claim 4.
前記中継基板の基材として、窒化アルミ材を用いることを特徴とする請求項4または5に記載の固体撮像装置。   The solid-state imaging device according to claim 4, wherein an aluminum nitride material is used as a base material of the relay substrate. 前記固体撮像素子または前記中継基板が接合された前記回路基板の第一主面上において前記固体撮像素子または前記中継基板の周囲に前記チップ部品を配置して実装し、
前記固体撮像素子用放熱フィンが前記回路基板と接合される領域を、前記固体撮像素子接合領域もしくは前記中継基板接合領域にさらに周囲に配置した前記チップ部品の領域を加えた広さの拡張接合領域と同じ広さの領域または該拡張接合領域よりも広い領域を形成する形状とし、
前記固体撮像素子用放熱フィンを、前記回路基板上の前記拡張接合領域と対向する反対側の前記回路基板の第二主面上の位置に接合する
ことを特徴とする請求項ないし6のいずれかに記載の固体撮像装置。
On the first main surface of the circuit board to which the solid-state image sensor or the relay board is bonded, the chip components are arranged and mounted around the solid-state image sensor or the relay board,
Wherein a region in which the solid-state imaging device for radiation fins are bonded to the circuit board, the solid-junction region or extension junction area measuring plus the chip component regions disposed further around the relay substrate bonding region A shape that forms a region that is the same area as or a region that is wider than the extended joining region,
Any said solid-state imaging device for radiation fins of the circuit to 4 claims, characterized in that joined to the extension junction region and position on the second major surface opposing the opposite side of the circuit board on the substrate 6 A solid-state imaging device according to claim 1.
前記固体撮像素子用放熱フィンおよび前記実装部品用放熱フィンの基材として、銅タングステン材を用いることを特徴とする請求項1ないし7のいずれか記載の固体撮像装置。   The solid-state imaging device according to any one of claims 1 to 7, wherein a copper tungsten material is used as a base material of the radiation fin for the solid-state imaging element and the radiation fin for the mounting component. 前記固体撮像素子用放熱フィンおよび前記実装部品用放熱フィンの基材として、前記固体撮像素子の基材もしくは前記中継基板の基材と同一の材料、または、前記固体撮像素子の基材もしくは前記中継基板の基材に物性値が近い材料を用いることを特徴とする請求項ないし7のいずれか記載の固体撮像装置。 The base material of the solid-state image sensor radiating fin and the mounting component radiating fin is the same material as the base material of the solid-state image sensor or the relay substrate, or the base material of the solid-state image sensor or the relay The solid-state imaging device according to claim 4, wherein a material having a physical property value close to that of the substrate is used. 固体撮像素子と、前記固体撮像素子からの電気信号を伝送する回路基板と、前記固体撮像素子の駆動および読出し信号処理部が集積されたLSI(大規模集積回路)と、チップ部品と、前記固体撮像素子の発熱を放熱する固体撮像素子用放熱フィンと、前記回路基板に実装される前記LSIおよび前記チップ部品の発熱を放熱する実装部品用放熱フィンと、を少なくとも含んで構成される固体撮像装置からの発熱を放熱する固体撮像装置放熱方法であって、
前記固体撮像素子の主面全体を、前記回路基板の第一主面上の固体撮像素子接合領域に隙間なく接合するとともに前記固体撮像素子と前記回路基板とを電気的に接続し、
前記LSIおよび前記チップ部品を、前記固体撮像素子が接合された前記回路基板の第一主面上のLSI・チップ部品実装領域に実装して、前記回路基板と電気的に接続し、
前記固体撮像素子用放熱フィンを、前記固体撮像素子が接合された前記回路基板上の前記固体撮像素子接合領域と対向する反対側の前記回路基板の第二主面上の位置に、前記固体撮像素子の有効画素領域よりも広い領域で接合し、
前記実装部品用放熱フィンを、前記LSIおよび前記チップ部品が実装された前記回路基板上の前記LSI・チップ部品実装領域と対向する反対側の前記回路基板の第二主面上の位置に前記LSI・チップ部品実装領域と同一の広さの領域または前記LSI・チップ部品実装領域よりも広い領域で接合する
ことを特徴とする固体撮像装置放熱方法。
A solid-state imaging device, a circuit board that transmits an electrical signal from the solid-state imaging device, an LSI (Large Scale Integrated Circuit) integrated with driving and reading signal processing units of the solid-state imaging device, a chip component, and the solid state A solid-state imaging device comprising at least a solid-state imaging element radiating fin that radiates heat generated by the imaging element and a mounting component radiating fin that radiates heat generated by the LSI and the chip component mounted on the circuit board A solid-state imaging device heat dissipation method for dissipating heat generated from
Bonding the entire main surface of the solid-state image sensor to the solid-state image sensor bonding region on the first main surface of the circuit board without gaps, and electrically connecting the solid-state image sensor and the circuit board;
The LSI and the chip component are mounted on the LSI / chip component mounting region on the first main surface of the circuit board to which the solid-state imaging device is bonded, and electrically connected to the circuit board,
The solid-state imaging element is disposed at a position on the second main surface of the circuit board opposite to the solid-state imaging element bonding region on the circuit board to which the solid-state imaging element is bonded. Join in a wider area than the effective pixel area of the element,
The LSI for mounting components is disposed at a position on the second main surface of the circuit board opposite to the LSI / chip component mounting area on the circuit board on which the LSI and the chip parts are mounted. A solid-state imaging device heat dissipation method characterized in that bonding is performed in a region having the same area as the chip component mounting region or a region wider than the LSI / chip component mounting region.
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JP2006157254A (en) * 2004-11-26 2006-06-15 Konica Minolta Photo Imaging Inc Imaging unit and imaging apparatus
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