JP6426042B2 - Air pressure adjustment unit for air spring - Google Patents

Description

  The present invention relates to an air pressure adjusting unit for an air spring.

  Conventionally, in order to adjust the air pressure in an air spring used for a vibration suppression device or the like, a flow control unit that controls the amount of air supplied to the air spring is used (see, for example, Patent Document 1).

JP, 2005-147318, A

  In the technique described in Patent Document 1 described above, the flow rate control unit may have a problem due to the influence of foreign matter mixed in the flowing air. If a problem occurs in the flow rate control unit, for example, the amount of air supplied to the air spring becomes excessive, and the internal pressure of the air spring becomes excessively high.

  Then, an object of this invention is to provide the air pressure adjustment unit for air springs which can suppress that the internal pressure of an air spring becomes high too much, even when a malfunction arises in a flow control part.

  In order to solve the above problems, the air pressure adjustment unit for air spring according to the present invention includes a flow control unit that controls an amount of air supplied to the air spring, and an air flow path between the air spring and the flow control unit. And a switching unit that switches the flow of air supplied and discharged to the air spring.

  Conventionally, the flow control unit controls the amount of air supplied to the air spring to control the internal pressure of the air spring to be appropriate. However, if a problem occurs in the flow control unit, the internal pressure of the air spring is It can be too high. In the air pressure adjustment unit for air spring according to the present invention, the switching unit can switch the flow of air supplied to and discharged from the air spring. As a result, it is possible to suppress the internal pressure of the air spring from becoming excessively high. As mentioned above, even if it is a case where a fault arises in a flow control part, it can control that the internal pressure of an air spring becomes high too much.

  In the air spring air pressure adjusting unit according to the present invention, a filter may be provided in the air flow path between the flow rate control unit and the switching unit. In this case, even if foreign matter or the like is mixed into the air flowing from the air spring toward the flow control unit, for example, the air passes through the filter and is removed by the filter before flowing into the flow control unit. Therefore, it can suppress that a malfunction arises in a flow control part by the said foreign material etc.

  In the air pressure adjustment unit for air spring according to the present invention, the switching unit may be a three-way valve. In this case, since switching of the flow of air by the switching unit is performed by the three-way valve, the air spring air pressure adjusting unit can be realized with a compact configuration as compared to the case where the switching unit is configured by combining a plurality of valves.

  Further, in the air pressure adjusting unit for air spring according to the present invention, the flow control unit and the switching unit are installed in the flow path forming block, and the flow forming block is configured to flow supplied or discharged with air. A pipeline may be formed. In this case, by installing the flow control unit and the switching unit in the same flow path forming block, the air spring air pressure adjustment unit can be integrally configured. Furthermore, since the flow path forming block is formed with a pipeline forming a flow to be supplied or discharged with air, a plurality of flows to be supplied or discharged from the air are collectively formed by one flow path forming block can do. As described above, the air pressure adjusting unit for air spring can be realized with a compact configuration.

  The air spring air pressure adjusting unit according to the present invention may further include a switching control unit that controls switching of the switching unit according to the pressure state of the compressed air in the air spring. In this case, switching of the switching unit is automatically performed by the switching control unit, so that the internal pressure of the air spring can be easily suppressed from becoming excessively high.

  According to the present invention, it is possible to provide an air spring air pressure adjusting unit capable of suppressing the internal pressure of the air spring from becoming excessively high even when a problem occurs in the flow rate control unit.

It is a schematic top view and a schematic side view showing a stage device to which an air pressure adjusting unit for an air spring according to an embodiment of the present invention is applied. It is an exploded perspective view showing the outline of the air pressure adjustment unit for air springs concerning one embodiment of the present invention. It is a schematic block diagram of the air pressure adjustment unit for air springs shown in FIG. It is a flowchart which shows an example of operation | movement of a control part. It is a schematic diagram which shows the flow of the compressed air in an air pressure adjustment unit.

  Hereinafter, an embodiment of an air pressure adjusting unit for an air spring according to the present invention will be described with reference to the attached drawings. In the following description, the same or corresponding elements are denoted by the same reference numerals and redundant description will be omitted.

  The air pressure adjustment unit for air spring (hereinafter also referred to as “air pressure adjustment unit”) according to the present embodiment is applied to, for example, a stage apparatus used for a semiconductor exposure apparatus for exposing a semiconductor. FIG. 1 is a schematic top view and a schematic side view showing a stage apparatus to which an air pressure adjusting unit for an air spring according to an embodiment of the present invention is applied. FIG. 1A shows a schematic top view of the stage apparatus, and FIG. 1B shows a schematic side view of the stage apparatus.

  As shown in (a) and (b) of FIG. 1, the stage device 20 includes a plate XY stage 21, a precision stage 22 supporting the plate XY stage 21, and a plurality of precision stages 22 supporting the precision stage 22 (in this embodiment) , 4) air springs 2. The plate XY stage 21 has a plate shape, and can horizontally move in the X direction and the Y direction on the precision stage 22.

  An air compressor 4 is connected to the air spring 2 via the air pressure adjustment unit 1 according to the present embodiment. Compressed air is supplied to the air spring 2 from the air compressor 4. The amount of compressed air supplied to the air spring 2 and the amount of compressed air discharged from the air spring 2 are adjusted by the air pressure adjustment unit 1. By adjusting the air pressure in the air spring 2 by the air pressure adjusting unit 1, it is possible to prevent the center of gravity from being shifted by the horizontal movement of the plate XY stage 21 and tilting the precision stage 22.

  Next, the air pressure adjusting unit 1 will be described in detail with reference to FIGS. 2 and 3. FIG. 2 is an exploded perspective view showing an outline of the air pressure adjusting unit 1 according to the embodiment of the present invention. FIG. 3 is a schematic block diagram of the air pressure adjusting unit 1 shown in FIG.

  As shown in FIGS. 2 and 3, the air pressure adjusting unit 1 includes a manifold 7, a flow rate control unit 3, a switching unit 5, a control unit 40, and filters 11 and 13. The air pressure adjusting unit 1 is configured by installing the flow control unit 3 and the switching unit 5 with respect to the manifold 7. The manifold 7 is, for example, a metal block integrally formed. The manifold 7 has an attaching portion 7 a to which the flow rate control unit 3 is attached, and an attaching portion 7 b to which the switching portion 5 is attached. That is, the flow rate control unit 3 and the switching unit 5 are installed in the manifold 7 at positions corresponding to the attachment portions 7 a and 7 b of the manifold 7. Hereinafter, the manifold 7, the flow control unit 3, the switching unit 5, the control unit 40, and the filters 11 and 13 will be described in detail.

  The manifold 7 is a flow path forming block in which a flow path to which compressed air from the air compressor 4 is supplied or a flow path to which compressed air from the air spring 2 is discharged is formed. That is, the manifold 7 is formed with an opening, a conduit, and the like that constitute the flow of compressed air. Specifically, the manifold 7 includes the supply port 12, the inlet 18, the first exhaust port 14, the second exhaust port 16, the communication holes 31, 32, 33, 34, 35, 36, and the pipes 10a and 10b. , 10c, 10d, 10e, etc. are formed.

  The supply port 12 is an opening opened in the manifold 7 to supply the compressed air from the air compressor 4 into the air pressure adjusting unit 1. An air compressor 4 is connected to the supply port 12. The inlet 18 is an opening that is opened to the manifold 7 to allow the compressed air that has flowed in the manifold 7 to flow from the manifold 7 into the air spring 2. An air spring 2 is connected to the inlet 18. The first exhaust port 14 and the second exhaust port 16 are openings opened to the manifold 7 in order to exhaust the compressed air in the air spring 2 out of the air pressure adjusting unit 1.

  The communication holes 31 to 33 are formed at the position of the mounting portion 7 a of the flow control unit 3 in the manifold 7. The communication holes 31 to 33 are openings opened in the manifold 7 in order to circulate the compressed air flowing in the manifold 7 into the flow rate control unit 3. The communication holes 34 to 36 are formed at the position of the mounting portion 7 b of the switching portion 5 in the manifold 7. The communication holes 34 to 36 are openings opened in the manifold 7 in order to cause the compressed air flowing in the manifold 7 to flow in the switching unit 5.

  The pipelines 10 a, 10 b, 10 c, 10 d and 10 e are pipelines that constitute the flow of compressed air flowing in the manifold 7. One end of the conduit 10 a is in communication with the supply port 12. The other end of the conduit 10 a is in communication with the conduit 3 a formed in the flow control unit 3 via the communication hole 31. That is, the pipe line 10 a communicates the supply port 12 with the pipe line 3 a in the flow rate control unit 3 via the communication hole 31. Thus, the pipe line 10 a forms a flow of compressed air between the supply port 12 and the pipe line 3 a in the flow rate control unit 3.

  One end of the conduit 10 b is in communication with each of the conduits 3 a and 3 b formed in the flow rate control unit 3 via the communication hole 32. The other end of the conduit 10 b is in communication with the conduit 5 a formed in the switching unit 5 via the communication hole 34. That is, the conduits 10 b communicate the conduits 3 a and 3 b in the flow rate control unit 3 with the conduits 5 a in the switching unit 5 via the communication holes 32 and 34. Thus, the pipeline 10 b forms a flow of compressed air between the pipelines 3 a and 3 b in the flow rate control unit 3 and the pipeline 5 a in the switching unit 5.

  One end of the conduit 10 c is in communication with each of the conduits 5 a and 5 b formed in the switching unit 5 via the communication hole 35. The other end of the conduit 10 c is in communication with the inlet 18. That is, the conduits 10 c communicate the conduits 5 a and 5 b in the switching unit 5 with the inflow port 18 through the communication holes 35. Thus, the pipelines 10 c form a flow of compressed air between the pipelines 5 a and 5 b in the switching unit 5 and the inflow port 18.

  One end of the conduit 10 d is in communication with the conduit 3 b formed in the flow control unit 3 via the communication hole 33. The other end of the conduit 10 d is in communication with the first exhaust port 14. That is, the conduit 10 c communicates the conduit 3 b in the flow rate control unit 3 with the first exhaust port 14 via the communication hole 33. Thus, the pipe line 10 d forms a flow of compressed air between the pipe line 3 b in the flow rate control unit 3 and the first exhaust port 14.

  One end of the conduit 10 e is in communication with the conduit 5 b formed in the switching unit 5 via the communication hole 36. The other end of the conduit 10 e is in communication with the second exhaust port 16. That is, the pipe line 10 e communicates the pipe line 5 b in the switching unit 5 with the second exhaust port 16 through the communication hole 36. Thus, the conduit 10 e forms a flow of compressed air between the conduit 5 b in the switching unit 5 and the second exhaust port 16.

  The flow rate control unit 3 controls the amount of compressed air supplied from the air compressor 4 to the air spring 2 with high accuracy and high response according to the input electric signal. For example, when a signal indicating the state of the air pressure in the air spring 2 detected by a pressure sensor (not shown) provided on the air spring 2 is input, the flow rate control unit 3 determines the state of the air pressure indicated by the signal The amount of compressed air supplied to the air spring 2 is controlled so as to be in an appropriate state to keep the stage 22 horizontal.

  Specifically, the flow control unit 3 supplies compressed air from the air compressor 4 to the air spring 2 when the air pressure in the air spring 2 is smaller than an appropriate value for keeping the precision stage 22 horizontal. If the air pressure in the air spring 2 is more than a value appropriate to keep the precision stage 22 horizontal, the compressed air is discharged from the air spring 2.

  In addition, when a signal indicating the vibration state of the precision stage 22 detected by a vibration sensor (not shown) provided on the precision stage 22 is input, for example, the flow control unit 3 vibrates the precision stage 22 indicated by the signal. The amount of compressed air supplied to the air spring 2 may be controlled such that a pressure fluctuation is generated in the air spring 2 that cancels out. The flow rate control unit 3 is, for example, a spool type or nozzle flapper type servo valve. When a spool type servo valve is used as the flow rate control unit 3, air can be flowed with a large volume. Further, when the nozzle flapper type servo valve is used as the flow rate control unit 3, the response can be made faster. The flow rate control unit 3 continuously monitors and controls the supply amount of compressed air from the air compressor 4 and the discharge amount of compressed air in the air spring 2 so that the levelness of the precision stage 22 is maintained. Inside the flow rate control unit 3, pipelines 3a and 3b are formed. The pipelines 3 a and 3 b form a flow of compressed air flowing in the flow rate control unit 3.

  The switching unit 5 is provided between the air spring 2 and the flow control unit 3 in the flow of air supplied from the air compressor 4 to the air spring 2 (that is, a flow path of air between the air spring 2 and the flow control unit 3) ) Is placed. That is, the switching unit 5 is disposed downstream of the flow control unit 3 in the direction in which the air flows from the air compressor 4 to the air spring 2. The pipelines 5 a and 5 b are formed inside the switching unit 5. The pipelines 5 a and 5 b form a flow of compressed air flowing in the switching unit 5.

  The switching unit 5 switches the flow of the compressed air supplied and discharged to the air spring 2. The switching unit 5 includes, for example, an electromagnetic valve such as a three-way valve and an actuator for opening and closing the valve. The actuator of the switching unit 5 is controlled by the control unit 40. The control unit 40 controls the actuator of the switching unit 5 so that the actuator changes the open / close state of the conduits 5 a and 5 b of the switching unit 5.

  When the pipe line 5a of the switching unit 5 is opened and the pipe line 5b of the switching unit 5 is closed, compressed air can flow in the pipe line 5a and compressed air does not flow in the pipe line 5b. It becomes possible. When the pipeline 5a of the switching unit 5 is closed and the pipeline 5b of the switching unit 5 is open, compressed air can not flow in the pipeline 5a and compressed air can flow in the pipeline 5b. It becomes possible. Thereby, the switching unit 5 passes the flow of the compressed air passing through the switching unit 5 through the pipe 5a and the pipe 5b, and does not flow through the pipe 5a but flows through the pipe 5b. Switch to and.

  The control unit 40 is a switching control unit that controls switching of the switching unit 5 in accordance with whether or not the flow rate control unit 3 is operating normally. The control unit 40 determines whether the flow rate control unit 3 is operating normally according to, for example, the pressure state of the compressed air in the air spring 2 and controls switching of the switching unit 5 according to the determination result. The control unit 40 properly operates the flow control unit 3 when the air flow control unit 3 properly adjusts the air pressure in the air spring 2 to an appropriate value to keep the precision stage 22 horizontal. It is determined that

  On the other hand, when the air pressure in the air spring 2 does not have an appropriate value to keep the precision stage 22 horizontal, for example, even after a predetermined time has passed, the control unit 40 measures, for example, the amount of compressed air supplied to the air spring 2 If the flow rate controller 3 is excessive, it is determined that the flow rate control unit 3 has a problem. The control unit 40 controls the actuator of the switching unit 5 based on the determination result. The details of the control method of the control unit 40 will be described later.

  The control unit 40 includes a central processing unit (CPU), a read only memory (ROM), a random access memory (RAM), and the like, loads a program or the like described in the ROM into the RAM, and executes the program by the CPU. Perform various controls.

  The filters 11 and 13 are filters for removing foreign matter which may be mixed in the flow rate control unit 3. The filter 11 is provided at least on the upstream side of the flow control unit 3 in the direction in which the compressed air is supplied from the air compressor 4 to the air spring 2. The filter 11 is provided, for example, at the position of the communication hole 31 between the conduit 10 a and the conduit 3 a. The filter 11 removes foreign matter in the compressed air flowing into the flow rate control unit 3 from the air compressor 4 side.

  The filter 13 is provided at least on the upstream side of the flow control unit 3 in the direction in which the compressed air is discharged from the air spring 2 to the first exhaust port 14. The filter 13 is provided, for example, at the position of the communication hole 34 between the conduit 10 b and the conduit 5 a. The filter 13 removes foreign matter in the compressed air flowing into the flow rate control unit 3 from the switching unit 5 side.

  Next, with reference to FIG. 3, the flow of the compressed air formed in the air pressure adjusting unit 1 by the above configuration will be described in detail.

  By configuring the manifold 7, the flow rate control unit 3, and the switching unit 5 as described above, the air pressure adjustment unit 1 includes the supply port 12, the conduit 10 a, the communication hole 31, the conduit 3 a, the communication hole 32, A compressed air supply flow path L3 constituted by the pipe line 10b, the communication hole 34, the pipe line 5a, the communication hole 35, the pipe line 10c, and the inflow port 18 is formed. In the supply flow path L3, compressed air is supplied from the supply port 12, the pipe 10a, the communication hole 31, the pipe 3a, the communication hole 32, the pipe 10b, the communication hole 34, the pipe 5a, the communication hole 35, the pipe 10c, And the inflow port 18 by flowing in this order. The conduit 5a formed inside the switching unit 5 constitutes a part of the supply flow passage L3. The switching unit 5 is provided on the supply flow passage L3. Specifically, the switching unit 5 is provided on the supply flow passage L3 between the air spring 2 and the flow rate control unit 3.

  The supply flow path L3 is a flow path which forms a flow in which the compressed air from the air compressor 4 is supplied to the air spring 2 through the flow rate control unit 3 and the switching unit 5. In the supply flow path L3, the compressed air flows between the air compressor 4 and the air spring 2 and passes through the flow rate control unit 3 and the switching unit 5 along the way. The above-described filter 11 is located in the supply flow path L3 between the air compressor 4 and the flow rate control unit 3. That is, the above-described filter 11 is located upstream of the flow control unit 3 in the supply flow path L3.

  In the air pressure adjusting unit 1, the inlet 18, the conduit 10c, the communication hole 35, the conduit 5a, the communication hole 34, the conduit 10b, the communication hole 32, the conduit 3b, the communication hole 33, the conduit 10d, and A first exhaust flow path L1 configured by the first exhaust port 14 is formed. In the first exhaust flow path L1, compressed air is introduced into the inlet 18, the conduit 10c, the communication hole 35, the conduit 5a, the communication hole 34, the conduit 10b, the communication hole 32, the conduit 3b, the communication hole 33, the conduit 10 d and the first exhaust port 14 are formed by flowing in this order. The pipe line 5a formed inside the switching unit 5 constitutes a part of the first exhaust flow path L1. The switching unit 5 is provided on the first exhaust flow path L1, and specifically, is provided in the first exhaust flow path L1 between the air spring 2 and the flow rate control unit 3.

  The first exhaust flow path L1 is a flow path that forms a flow in which the compressed air from the air spring 2 is discharged to the outside of the air pressure adjustment unit 1 through the switching unit 5 and the flow rate control unit 3. In the first exhaust flow path L1, compressed air flows between the air spring 2 and the first exhaust port 14 and passes through the switching unit 5 and the flow rate control unit 3 in the middle thereof. The above-described filter 13 is provided in the first exhaust flow path L1 between the switching unit 5 and the flow rate control unit 3. That is, the above-described filter 13 is located upstream of the flow control unit 3 in the first exhaust flow passage L1.

  Further, in the air pressure adjusting unit 1, there is a second exhaust flow path L 2 constituted by the inlet 18, the pipe 10 c, the communication hole 35, the pipe 5 b, the communication hole 36, the pipe 10 e and the second exhaust port 16. It is formed. In the second exhaust flow path L2, compressed air flows through the inlet 18, the pipe 10c, the communication hole 35, the pipe 5b, the communication hole 36, the pipe 10e, and the second exhaust port 16 in this order. It is formed by The conduit 5b formed inside the switching unit 5 constitutes a part of the second exhaust flow passage L2. The switching unit 5 is provided on the second exhaust flow path L2.

  The second exhaust flow path L2 is a flow path that forms a flow in which the compressed air from the air spring 2 is discharged to the outside of the air pressure adjustment unit 1 through the switching unit 5 and not through the flow rate control unit 3. In the second exhaust flow path L2, the compressed air flows between the air spring 2 and the second exhaust port 16, and in the middle thereof passes through the switching unit 5 and not through the flow control unit 3. That is, the second exhaust flow path L2 is a flow path forming a flow of discharging the compressed air in the air spring 2 to the outside of the air pressure adjustment unit 1 from the position downstream of at least the flow control unit 3 in the supply flow path L3. .

  Next, an example of a control method of the control unit 40 in the air pressure adjusting unit 1 configured as described above and the flow of compressed air switched by the control of the control unit 40 will be described with reference to FIGS. 4 and 5. . FIG. 4 is a flowchart showing an example of the operation of the control unit 40. FIG. 5 is a schematic view showing the flow of compressed air in the air pressure adjustment unit 1. (A) of FIG. 5 shows the case where the flow control part 3 is working normally, and shows the case where the malfunction of the flow control part 3 of FIG. 5 has arisen.

  As shown in FIG. 4, in the air pressure adjusting unit 1, when the control unit 40 determines that the flow rate control unit 3 is operating normally, the control unit 40 performs control as a normal mode (S1). ). Specifically, the actuator of the switching unit 5 is controlled by the control unit 40, and the conduit 5a (see FIG. 3) of the switching unit 5 is opened, and the conduit 5b of the switching unit 5 (see FIG. 3) Is closed. By opening the pipe line 5a of the switching unit 5, compressed air can flow in the pipe line 5a, and as shown in (a) of FIG. 5, the supply flow path L3 and the first exhaust flow path L1. Is formed. Then, the flow rate control unit 3 controls the supply amount of the compressed air in the supply flow passage L3 and the discharge amount of the compressed air in the first exhaust flow passage L1. Thus, in the normal mode, the flow control unit 3 appropriately supplies and discharges the compressed air in the air spring 2. At this time, the pipe line 5b of the switching unit 5 is closed, thereby shutting off the second exhaust passage L2.

  Subsequently, the control unit 40 determines whether or not there is a problem in the flow rate control unit 3 (S2). For example, when the air pressure in the air spring 2 is excessive even after the predetermined time has elapsed, the control unit 40 determines that the flow control unit 3 has a problem. If the controller 40 determines that the flow rate controller 3 does not have a problem (S2; NO), it returns to S1 and continues the control as the normal mode.

  When the control unit 40 determines that the flow control unit 3 has a problem (S2; Yes), the control unit 40 performs control as an abnormal mode (S3). Specifically, the actuator of the switching unit 5 is controlled by the control unit 40, and the conduit 5b (see FIG. 3) of the switching unit 5 is opened, and the conduit 5a of the switching unit 5 (see FIG. 3) Is closed. By opening the pipe line 5b of the switching unit 5, compressed air can flow in the pipe line 5b, and as shown in (b) of FIG. 5, the second exhaust flow path L2 is formed. The compressed air in the air spring 2 is discharged from the second exhaust port 16 without flowing through the flow rate control unit 3 by flowing through the second exhaust flow path L2. Thereby, even when the flow control unit 3 has a problem, the compressed air in the air spring 2 is appropriately discharged by the second exhaust flow path L2. At this time, the supply passage L3 and the first exhaust passage L1 are shut off by closing the conduit 5a of the switching unit 5. In this case, air is not supplied from the flow control unit 3 into the air spring 2.

  Subsequently, in order to notify the operator that the flow control unit 3 has a problem, the control unit 40 notifies an abnormality occurrence (S4). The notification method of abnormality generation may be any method as long as the operator can be notified of the abnormality generation of the flow rate control unit 3. As a method of informing the occurrence of an abnormality, for example, a method of informing through eyes such as lamp lighting, LED lighting, liquid crystal display or the like, or a method of informing through hearing of buzzer and voice etc. can be mentioned. As described above, the operation of the control unit 40 ends.

  Next, the operation and effects of the air pressure adjustment unit 1 according to the present embodiment will be described.

  Conventionally, a flow control unit is used to adjust the air pressure in an air spring used for a vibration suppression device or the like. However, if a problem occurs in the flow rate control unit, for example, the amount of air supplied to the air spring becomes excessive, and the internal pressure of the air spring becomes excessively high.

  With respect to this problem, according to the air pressure adjustment unit 1 according to the present embodiment, as the air flow is switched by the switching unit 5, it is possible to suppress the internal pressure of the air spring from becoming excessively high. That is, the flow of air discharged from the air spring 2 is transmitted from the flow control unit 3 to the first exhaust flow passage L1 through which the air is discharged, and from the downstream side of at least the flow control unit 3 in the supply flow passage L3. Can be switched to the second exhaust flow path L2 to be discharged. As a result, if a problem occurs in the flow control unit 3 and, for example, air is excessively supplied to the air spring 2, the second exhaust flow path L2 appropriately passes the air spring 2 without passing through the flow control unit 3. As a result, the internal pressure of the air spring 2 can be suppressed from becoming excessively high. As described above, even when a problem occurs in the flow rate control unit 3, it is possible to suppress the internal pressure of the air spring 2 from becoming excessively high.

  Further, in the air pressure adjusting unit 1, the filter 13 is provided in the first exhaust flow path L <b> 1 between the flow rate control unit 3 and the switching unit 5. Thereby, for example, even when foreign matter or the like is mixed in the air flowing from the air spring 2 toward the flow rate control unit 3, the air passes through the filter 13 and the foreign matter or the like is removed by the filter 13 before the flow rate control Flow into section 3. Therefore, it can suppress that a malfunction arises in the flow control part 3 by the said foreign material etc.

  Further, in the air pressure adjusting unit 1, the switching unit 5 is a three-way valve. That is, since switching between the first exhaust flow path L1 and the second exhaust flow path L2 is performed by the three-way valve, the air pressure adjusting unit 1 is configured more than in the case where the switching unit is configured by combining a plurality of valves. It can be realized with a compact configuration.

  Further, in the air pressure adjusting unit 1, the air flow adjusting unit 1 can be integrally configured by installing the flow control unit 3 and the switching unit 5 in the same manifold 7. Further, since the conduits 10a, 10b, 10c, 10d, and 10e that constitute flows to which compressed air is supplied or discharged are formed in the manifold 7, a plurality of flows to which the compressed air is supplied or discharged is The two manifolds 7 can be configured together. As described above, the air pressure adjusting unit 1 can be realized in a compact configuration.

  Further, in the air pressure adjusting unit 1, since the switching of the switching unit 5 is automatically performed by the control unit 40, the internal pressure of the air spring 2 can be easily suppressed from becoming excessively high.

  As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said embodiment, You may deform | transform in the range which does not change the summary described to each claim, or may apply to others.

  For example, in the above embodiment, although the air spring air pressure adjusting unit used in the stage apparatus used in the conductor exposure apparatus has been described, the invention is not limited thereto. The air pressure adjusting unit for air spring according to the present invention may be used, for example, for adjusting the air pressure of an air spring used for an active suspension of a vehicle or a scanning electron microscope.

  Although switching of the switching unit 5 is controlled by the control unit 40 in the above embodiment, the present invention is not limited thereto. For example, the switching unit 5 may be switched manually by an operator.

  The switching unit 5 is not limited to a three-way valve, and may be configured by combining a plurality of two-way valves, for example.

  The supply flow path L3, the first exhaust flow path L1, and the second exhaust flow path L2 may not be configured by the opening portion and the pipe path of the manifold 7, and may be configured by a member or the like different from the manifold 7. May be For example, the supply flow path L3, the first exhaust flow path L1, and the second exhaust flow path L2 may be configured by a pipe or the like.

  DESCRIPTION OF SYMBOLS 1 ... Air pressure adjustment unit, 3 ... Flow control part, 5 ... Switching part, 7 ... Manifold, 13 ... Filter, 40 ... Control part, L1 ... 1st exhaust flow path, L2 ... 2nd exhaust flow path, L3 ... Supply flow Road.

Claims (5)

A flow control unit that controls the amount of air supplied to the air spring;
Wherein provided on the air flow path between the air spring and the flow control unit, and a switching unit for switching the flow of air to be supplied and discharged to the air spring,
The switching unit has a first flow path for discharging air from an air spring by a flow flowing through the flow rate control unit, and a second flow path for discharging air from an air spring by a flow not flowing through the flow rate control unit. switching the flow of air in a closed state and the other to an open state one Ru air spring air pressure adjustment unit out. Air filter in the flow path of are provided, the air spring pressure adjustment unit according to claim 1 between the flow rate control unit and the switching unit.   The air pressure adjusting unit for an air spring according to claim 1, wherein the switching unit is a three-way valve. The flow rate control unit and the switching unit are installed in a flow path forming block,
The flow path forming block is formed conduit constituting the flow air is supplied or discharged, the air spring pressure adjustment unit according to any one of claims 1 to 3. The air pressure adjustment unit for air spring according to any one of claims 1 to 4, further comprising a switching control unit that controls switching of the switching unit according to a pressure state of compressed air in the air spring.

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