JP5958081B2 - How to remove the lid of the container - Google Patents

Description

  The present invention relates to a storage container for storing an object to be stored, exemplified by a SMIF pod used when storing and transporting a so-called photomask used in a manufacturing process of a semiconductor or the like, and more specifically, the storage. More particularly, the present invention relates to a method of removing the lid.

  For example, in a semiconductor manufacturing process, a lithographic photomask is used when forming a circuit pattern on a wafer, and a step of transferring the circuit pattern formed on the photomask onto the wafer is performed. Such a photomask is usually stored alone in a dedicated container and stored until use. The container is referred to as an SMIF pod corresponding to SMIF (Standard Mechanical Interface) because of its open / closed form. For example, in Patent Document 1, there is a housing portion that can accommodate a photomask, and the housing space opens downward, and the opening is closed from below the body portion and substantially supports and fixes the photomask. A SMIF pod comprising a bottom lid is disclosed. The SMIF pod cleans the photomask stored in its interior by stably fixing the bottom lid (hereinafter referred to as lid) to the main body even when pressure changes occur inside. It can be maintained in a stable state.

  When the photomask is used, the pod lid is opened and closed and the photomask is taken out by a dedicated opener. The opener has an internal space, a port door, a door drive mechanism, a latch drive mechanism, and a transfer robot. The internal space can be evacuated by an accompanying exhaust mechanism. The port door can close a first opening provided in the upper part of the internal space, and forms a part of the ceiling of the internal space in a state where the internal space is closed, and a container is mounted on the upper surface thereof. It is configured so that it can be placed and fixed. The door drive mechanism performs an operation of moving the port door up and down to draw the lid of the pod and the photomask supported on the lid into the internal space. The latch driving mechanism operates a latch mechanism disposed on the lid to fix the lid to the main body of the pod, thereby fixing and opening the lid with respect to the main body. The transfer robot is arranged in a transfer space different from the internal space, and actually takes out the photomask supported by the lid accommodated in the internal space by operating the door drive mechanism, and actually mounts the photomask. It is conveyed toward the apparatus through a second opening different from the first opening.

Japanese Patent No. 4094987

  Here, when fine dust or the like adheres to the photomask, this dust is transferred onto the wafer together with the circuit pattern in the lithographic process, causing wiring defects. For this reason, strict management is performed on such dust, and in the configuration disclosed in Patent Document 1 described above, even when the lid is opened and closed, the current design rules are managed within an allowable range. ing. However, as the performance of semiconductors increases, the wiring width and wiring pitch are expected to become narrower in the future, and it is beginning to be required to realize a cleaner environment by removing dust more than ever. Yes.

  The present invention has been made in view of the above situation, and is a so-called SMIF pod that is a container for a photomask and the like that can suppress adhesion of fine dust or the like that has not been a problem with respect to a photomask. The object is to provide a lid opening / closing method, particularly a lid removing method.

In order to solve the above-mentioned problems, the lid removing method according to the present invention is such that the opening provided at the bottom is closed by the bottom lid that supports the object to be stored , and the bottom lid is removed from the storage container having the decompressed storage space. An opener to be removed, a port door on which an accommodation container can be placed on the upper surface, a chamber capable of accommodating a bottom lid through an opening closed by the port door, and constituting a decompressed internal space, and an opening An exhaust system capable of exhausting the gap space between the port door and the lid with the closed portion, a door drive mechanism for lowering the port door into the internal space, and a relative for raising and lowering the bottom lid relative to the port door A step of removing the bottom lid using an opener having an elevating means, a step of arranging a receiving container on the upper surface of the port door, and a gap space formed between the bottom lid and the port door by an exhaust system Excretion Equal to the step of depressurizing the internal pressure of the housing space and the interstitial space communicates with the accommodation space and the interstitial space of the container by relatively lowering the bottom lid to the port door by the relative lifting means by And a step of lowering the port door into the internal space together with the bottom cover by the door drive mechanism.

  In the above-described method, the opener further includes a lowering timing determination mechanism that defines the operation timing of the relative lifting means and the door driving mechanism, and the lowering timing is determined in the step of equalizing the internal pressures of the housing space and the gap space. It is preferable that the determination mechanism provides a time delay between the operation start time of the relative lifting and lowering means and the operation start time of the door drive mechanism. Furthermore, it is more preferable that the exhaust system described above continues exhausting the gap space in the step of exhausting the gap space and the step of equalizing the internal pressures of the accommodating space and the gap space. Further, in the step of equalizing the internal pressures of the accommodation space and the gap space, the relative lowering of the bottom lid with respect to the port door by the relative lifting means may be temporarily stopped. Further, in the step of equalizing the internal pressures of the accommodating space and the gap space, the door drive mechanism may be stopped from raising and lowering the port door.

  According to the present invention, it becomes possible to manufacture a semiconductor device satisfying a finer design rule by suppressing adhesion to a photomask when taking out the photomask, even with respect to finer dust, which will be a problem in the future. .

It is a cross section of the SMIF pod which concerns on one Embodiment of this invention, Comprising: It is a figure which shows schematic structure of the said pod. It is a figure which shows the process of opening the SMIF pod shown in FIG. 1 and taking out the photomask 1. It is a figure which shows the process of opening the SMIF pod shown in FIG. 1 and taking out the photomask 1. It is a figure which shows the process of opening the SMIF pod shown in FIG. 1 and taking out the photomask 1. It is a figure which shows the process of opening the SMIF pod shown in FIG. 1 and taking out the photomask 1.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows a schematic configuration of a SMIF pod used in a lid opening / closing method according to an embodiment of the present invention by a section in a thickness direction. The SMIF pod 100 includes a main body 10 and a lid (bottom lid) 20. The main body 10 includes a receiving space 10a having a size that can accommodate the photomask 1 supported by the lid 20, an opening 10b that opens downward from the receiving space 10a, and a latch hole 10c into which a latch pin 29 described later is fitted. And having. The lid 20 is formed of a flat plate-like member having a size for closing the opening 10b from below. A pin 23 and a seal member 27 are provided. The lid 20 also has a latch mechanism (not shown) that can be operated to project or retract the latch pin 29 from the flat peripheral surface by an operation from the lower surface 20b.

  The support pins 23 are fixed so as to protrude perpendicularly from the surface 20a of the lid 20, and support the photomask 1 at the upper end. The positioning pin 21 is fixed to the surface 20a so as to limit the movement of the outer peripheral portion of the photomask 1 at the time of placement so that the photomask 1 is placed at an appropriate position on the support pin 23. The annular seal member 27 is disposed on the inner side along the outer periphery of the surface of the lid 20, and abuts against the seal surface provided on the main body portion 10 to secure the sealed state of the accommodation space 10 a. The latch pin 29 is disposed at a position corresponding to the latch hole 10c provided in the main body 10 when the lid 20 closes the opening 10b, and is inserted into the latch hole 10c by protruding from the peripheral surface of the lid 20, for example, The lid 20 is prevented from dropping from the main body 10 during transportation or the like. In the present embodiment, the photomask 1 is placed on the tray 3 and supported on the support pins 23 via the tray 3. However, it is possible to eliminate the tray 3 and to support the photomask 1 directly with the support pins 23 or the like.

  Next, an opener 200 that actually performs the lid opening / closing method according to an embodiment of the present invention will be described. 2 (a) to 2 (d) schematically show the cross-sectional structure of the SMIF pod 100 placed on the opener 200, and these are shown in FIG. 2 (a) according to the progress of the opening operation of the lid 20. 2 (b), 2 (c) and 2 (d) are shown in this order. Here, the opener 200 includes an internal space 201, a port door 203, a door drive mechanism 205, a latch drive mechanism 207, an exhaust system 209, and a chamber 213. The chamber 213 is a case-like member that constitutes the internal space 201, and has a first opening 201 a that communicates with the internal space 201 and opens to the external space and is closed by the port door 203. The internal space 201 is connected to an unillustrated chamber exhaust system (exhaust mechanism described above) and can perform so-called vacuum exhaust. The internal space 201 is provided at the first opening 201a provided above and on the side. A second opening 201b is provided. The internal space 201 has a size that can accommodate the lid 20.

  The port door 203 closes the first opening 201a and allows the SMIF pod 100 to be placed on the upper surface thereof. The door drive mechanism 205 supports the port door 203 from below, and lowers the port door 203 so as to be pulled into the internal space 201 or raises the first opening 201a so as to close it. When the SMIF pod 100 is placed on the port door 203, the latch drive mechanism 207 cooperates with the latch mechanism of the lid 20 of the SMIF pod 100, and performs the operation of inserting and withdrawing the latch pin 29 with respect to the latch hole 10c. Further, the latch drive mechanism 207 can be engaged with an engaged portion of the lid 20 different from the latch mechanism, and the latch drive mechanism 207 uses this engagement state to make a relative lid with respect to the port door 203. It is also possible to move up and down 20 times. That is, the latch driving mechanism 207 also has a function as a relative lifting / lowering means for lifting / lowering the lid 20 relative to the port door 203 in the present invention. The SMIF pod exhaust system 209 can exhaust a gap space 215 that is a space between the bottom surface 20b of the lid 20 of the SMIF pod 100 and the upper surface of the port door 203 on which the lid is placed. Further, if necessary, the cover 20 of the SMIF pod 100 is lowered to allow the gap space 215 and the accommodation space 10a to communicate with each other so that the inside of the accommodation space 10a can be exhausted.

  More specifically, the door drive mechanism 205 is connected to a first lifting / lowering actuator (not shown) further downward in FIG. Since the actual mechanism composed of the first lifting / lowering actuator and the like is constructed from a known mechanism disclosed in Patent Document 1 and the like, it will not be described in detail below. Further, the latch driving mechanism 207 is connected to a rotating motor and a second lifting / lowering actuator (not shown) further downward in the figure. The rotation motor rotates the upper end portion around the extending axis of the latch drive mechanism 207. A member that engages with the latch mechanism of the lid 20 of the SMIF pod 100 is disposed at the upper end, and this rotation operation engages the latch mechanism and drives the latch mechanism. Furthermore, the second lifting / lowering actuator can be lifted / lowered independently of the first lifting / lowering actuator of the door drive mechanism 205. With this configuration, the latch driving mechanism 207 is given a function as a relative lifting / lowering means. In addition, since such a structure is constructed | assembled from the well-known mechanism disclosed by patent document 1 etc. similarly to the door drive mechanism 205, it does not elaborate later.

  Next, the process of the method for opening the lid of the SMIF pod 100 using the opener 200 will be described in detail. First, the SMIF pod 100 is placed on the port door 203 as shown in FIG. At that time, the latch drive mechanism 207 engages with a latch mechanism (not shown) provided on the lid 20 of the SMIF pod 100, and the latch pin 29 can be operated by the latch drive mechanism 207. In this state, the gap space 215 between the back surface 20b that is the air side surface of the lid 20 and the port door 203 is in an atmospheric pressure state. Subsequently, as shown in FIG. 2B, the pressure in the gap space 215 between the lid 20 and the port door 203 is reduced via the SMIF pod exhaust system 209 and the like. After the pressure in the gap space 215 falls below a certain level, the latch driving mechanism 207 retracts the latch pin 29 from the latch hole 10c. By this operation, the lid 20 can be separated from the main body 10. Note that the pressure in the gap space 215 may be grasped by a pressure measuring device arranged in the SMIF pod exhaust system 209, or may be estimated based on the exhaust time.

  Subsequently, the latch drive mechanism 207 slightly lowers the lid 20 and slightly opens the opening 10b to allow the gap space 215 and the accommodation space 10a of the SMIF pod 100 to communicate with each other (see FIG. 2C). At this stage, the descent by the latch drive mechanism 207 is temporarily stopped, and the internal pressure in the gap space 215 and the accommodation space 10b is made uniform. By this operation, the pressure inside the accommodation space 10a and the inside of the gap space 215 becomes uniform, more specifically, substantially uniform. Thereafter, the door drive mechanism 205 is operated to lower the port door 203 together with the lid 20 to a predetermined position in the internal space 201 until the state shown in FIG. The predetermined position is a position where the photomask 1 can be transferred by a transfer arm (not shown) through the second opening 201b. At this time, the latch drive mechanism 207 is also lowered together with the door drive mechanism 205.

  In this embodiment, the control device that instructs the operation of the door drive mechanism 205 and the latch drive mechanism 207 executes a function as a lowering timing determination mechanism that controls the timing of lowering them in the order described above. Yes. However, the descent timing determination mechanism may change the time delay between the operation start time of the latch drive mechanism 207 and the operation start time of the door drive mechanism 205 in accordance with the pressure in the gap space 215 described above. Furthermore, the pressure is not uniformed by temporarily stopping the relative lowering of the lid 20 with respect to the port door 203 by the latch drive mechanism 207, but when the operating speed is simply changed or the pressure is uniformed quickly. The uniforming operation may be performed without temporarily stopping the lowering operation of the lid 20 or the port door 203. Further, instead of creating a time delay between two operation start times by electrical operation control, a mechanism for mechanically providing a time delay by, for example, a cam mechanism or the like may be used. In this case, the mechanical operation mechanism is a lowering timing determination mechanism.

  By opening and closing the lid 20 of the SMIF pod 100 by the above-described process, the diffusion of dust or the like that may be taken into the gap space 215 to the internal space 201 is suppressed, and the environment is more clean. It becomes possible to carry out an operation for taking out the photomask 1 and the like. Therefore, it is possible to suitably suppress dust and the like brought in from the external space on the photomask 1, and it is possible to suitably execute a lithographic process using the photomask 1.

  In the above-described embodiment, the SMIF pod used by reducing the inside as the container is illustrated, and the photomask is illustrated as the object to be stored in the container. However, the present invention is not limited to this example, and can also be applied to a container that contains a wafer, a glass substrate, or the like used for manufacturing a semiconductor or a display panel. Therefore, it is preferable that the present invention be understood as relating to an operation of an opener that removes the bottom cover from the storage container having a storage space that closes the opening provided at the bottom by the bottom cover that supports the object.

DESCRIPTION OF SYMBOLS 1: Photomask, 3: Tray, 10: Main part, 10a: Storage space, 10b: Opening, 10c: Latch hole, 20: Lid, 20a: Lid surface, 20b: Lid bottom, 21: Positioning pin, 23: Support Pin: 27: Seal member, 29: Latch pin, 100: SMIF pod, 200: Opener, 201: Interior space, 201a: First opening, 201b: Second opening, 203: Port door, 205: Door drive 207: Latch drive mechanism 209: SMIF pod exhaust system 213: Chamber 215: Gap space

Claims (5)

An opener in which an opening provided in a bottom portion is closed by a bottom cover that supports an object to be stored , and the bottom cover is removed from a storage container having a decompressed storage space, and the storage container can be placed on an upper surface The bottom lid can be accommodated through a port door, an opening closed by the port door, and a chamber constituting a decompressed internal space, and between the port door and the lid closed with the opening. An opener having an exhaust system capable of exhausting the gap space, a door drive mechanism for lowering the port door into the internal space, and a relative lifting means for lifting the lid relative to the port door. Using to remove the bottom lid,
Placing the container on the top surface of the port door;
A step of vacuum by evacuating said gap space formed between the port door and the bottom cover by the exhaust system,
The relative elevating means lowers the bottom lid relative to the port door so that the accommodation space and the gap space of the accommodation container communicate with each other so that the internal pressures of the accommodation space and the gap space are equal. And a process of
And a step of lowering the port door into the internal space together with the bottom lid by the door driving mechanism. A lowering timing determination mechanism for defining the operation timing of the relative lifting means and the door driving mechanism;
In the step of equalizing the internal pressures of the housing space and the gap space, the descent timing determination mechanism provides a time delay between the operation start time of the relative lifting means and the operation start time of the door drive mechanism. The method of removing the lid of the storage container according to claim 1.   3. The lid according to claim 1, wherein the exhaust system continues to exhaust the gap space in the step of exhausting the gap space and the step of equalizing the internal pressures of the accommodation space and the gap space. How to remove.   4. The method according to claim 1, wherein, in the step of equalizing the internal pressures of the housing space and the gap space, the relative lowering of the bottom lid with respect to the port door by the relative lifting and lowering means is temporarily stopped. The method for removing the lid according to claim 1.   5. The raising / lowering of the port door is stopped by the door drive mechanism in the step of equalizing the internal pressures of the accommodation space and the gap space. How to remove the lid.

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