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JP5743744B2 - Diaphragm type fluid control valve - Google Patents

Diaphragm type fluid control valve Download PDF

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JP5743744B2
JP5743744B2 JP2011140808A JP2011140808A JP5743744B2 JP 5743744 B2 JP5743744 B2 JP 5743744B2 JP 2011140808 A JP2011140808 A JP 2011140808A JP 2011140808 A JP2011140808 A JP 2011140808A JP 5743744 B2 JP5743744 B2 JP 5743744B2
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diaphragm
control valve
fluid control
pressure chamber
surface side
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JP2013007531A (en
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隆 茂木
隆 茂木
小林 和人
和人 小林
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Fujikoki Corp
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Description

本発明は、流体の流量又は圧力を調節するための弁体駆動用ダイアフラムを備えたダイアフラム式流体制御弁に係り、特に、カーエアコン等のヒートポンプ式冷暖房システムに用いられる膨張弁として好適なダイアフラム式流体制御弁に関する。   The present invention relates to a diaphragm type fluid control valve having a valve element driving diaphragm for adjusting the flow rate or pressure of a fluid, and more particularly, a diaphragm type suitable as an expansion valve used in a heat pump type air conditioning system such as a car air conditioner. The present invention relates to a fluid control valve.

ヒートポンプ式冷暖房システムに用いられる膨張弁として、下記特許文献1にも見られるように、流体(冷媒)の流量又は圧力を調節するための弁体と、流入口及び流出口が設けられるとともに、それらの間に前記弁体により開閉される弁口(オリフィス)が形成された弁本体と、前記弁体を前記弁口開閉方向に駆動するダイアフラム装置とを備えたダイアフラム式流体制御弁が知られている。   As an expansion valve used in a heat pump type air conditioning system, a valve body for adjusting the flow rate or pressure of a fluid (refrigerant), an inlet and an outlet are provided, as can be seen in Patent Document 1 below. There is known a diaphragm type fluid control valve comprising a valve body formed with a valve opening (orifice) that is opened and closed by the valve body and a diaphragm device that drives the valve body in the valve opening / closing direction. Yes.

このダイアフラム式流体制御弁において、前記ダイアフラム装置は、通常、ダイアフラムと、該ダイアフラムの外周部を挟持するように封止固定するとともに、その上面側に密閉空間であるダイアフラム上面側圧力室(感温室、ダイアフラム室等とも称される)を画成するダイアフラム保持部材とを有し、前記ダイアフラムの下面には、前記ダイアフラムの変位(撓み)を前記弁体に伝達すべく、ストッパを介して作動棒が連結されている。   In this diaphragm type fluid control valve, the diaphragm device is usually sealed and fixed so as to sandwich the diaphragm and the outer peripheral portion of the diaphragm, and the upper surface side pressure chamber of the diaphragm which is a sealed space (the temperature sensitive chamber). A diaphragm holding member that defines a diaphragm chamber), and a lower surface of the diaphragm has an operating rod through a stopper to transmit displacement (deflection) of the diaphragm to the valve body. Are connected.

前記圧力室(感温室)には、通常、所定のガス(例えば R134a)が所定の圧力で封入されている。   A predetermined gas (for example, R134a) is usually sealed in the pressure chamber (sensing greenhouse) at a predetermined pressure.

また、前記ダイアフラムは、前記ダイアフラム保持部材により封止固定された外周部と大径円板状部が当接する内周部との間に、断面で見て上に凸又は下に凸の山をN個[Nは正の整数(1、2、3、・・・)]持つ平面視同心円環状を呈する山波状部が形成されている。   In addition, the diaphragm has an upward convex or downward convex peak when viewed in cross section between an outer peripheral portion sealed and fixed by the diaphragm holding member and an inner peripheral portion where the large-diameter disk-shaped portion abuts. A mountain-shaped portion having a concentric annular shape in plan view having N pieces [N is a positive integer (1, 2, 3,...)] Is formed.

かかる構成のダイアフラム式流体制御弁において、ダイアフラム(の内周部はその外周部に対して)は、通常、前記圧力室(感温室)の圧力(以下、ダイアフラム上面側圧力と称す)とダイアフラムの下面に作用する圧力(以下、ダイアフラム下面側圧力と称す)との差圧に応じて上下に変位し(撓み)、この変位がストッパ及び作動棒を介して弁体に伝達され、弁体が弁口開閉方向(上下方向)に動いて弁開度(=リフト量=弁口の実効開口面積)が調節され、これによって、流入口から流出口に向かう流体(冷媒)の圧力(流量)が制御されるようになっている。   In the diaphragm type fluid control valve having such a configuration, the diaphragm (the inner peripheral portion of which is relative to the outer peripheral portion) usually has a pressure in the pressure chamber (sensitive room) (hereinafter referred to as a diaphragm upper surface side pressure) and a diaphragm. It is displaced up and down (deflection) according to the pressure difference with the pressure acting on the lower surface (hereinafter referred to as the diaphragm lower surface pressure), and this displacement is transmitted to the valve body via the stopper and the operating rod. The valve opening (= lift amount = effective opening area of the valve port) is adjusted by moving in the opening and closing direction (vertical direction), and this controls the pressure (flow rate) of the fluid (refrigerant) from the inlet to the outlet. It has come to be.

前記した如くの従来のダイアフラム式流体制御弁では、次のような解消すべき課題がある。   The conventional diaphragm type fluid control valve as described above has the following problems to be solved.

すなわち、ダイアフラムの内周部と外周部との間に断面で見て上に凸又は下に凸の山が形成されていることにより、山が形成されていないフラットなダイアフラムよりも上下方向に変位しやすくなるものの、ダイアフラムの上面側圧力と下面側圧力との差圧が小なる領域(極低温域)では、差圧の変化に対してリフト量の変化が不十分であり、したがって、冷媒の流量もさほど変化せず、所要の流量を確保すること、並びに、安定した流量制御を行なうことが難しいという問題があった。   In other words, when the cross section is formed between the inner periphery and the outer periphery of the diaphragm, a convex peak is formed upward or downward, so that it is displaced in a vertical direction from a flat diaphragm without a peak. However, in the region where the differential pressure between the upper surface side pressure and the lower surface side pressure of the diaphragm is small (very low temperature region), the change in the lift amount is insufficient with respect to the change in the differential pressure. The flow rate did not change so much, and there was a problem that it was difficult to ensure the required flow rate and to perform stable flow rate control.

また、部品材料費の削減等のためにダイヤフラム径を小さくすると、同様にリフト量の変化が小さくなり、安定した流量制御が難しくなるという問題があった。   Further, when the diaphragm diameter is reduced for the purpose of reducing the material cost of parts, the change in the lift amount is similarly reduced, and there is a problem that stable flow rate control becomes difficult.

なお、差圧の変化に対してリフト量を大きく変化させるには、ダイアフラムの板厚を薄くする方策、ダイヤフラム径を大きくする方策等が考えられるが、ダイアフラムの板厚を薄くすると、強度が不足して破損しやすくなり、耐久性が低下するという問題があり、さらに、ダイアフラムが撓みやすくなり過ぎて流量制御の安定性が低下する嫌いもある。また、ダイヤフラム径を大きくすると、制御弁全体も大きくなり、配設すべき場所への配設が難しくなる場合がある。   In order to change the lift amount greatly in response to changes in the differential pressure, measures such as reducing the diaphragm thickness and increasing the diaphragm diameter can be considered. However, if the diaphragm thickness is reduced, the strength is insufficient. In addition, there is a problem in that it is easily broken and the durability is lowered, and there is also a dislike that the diaphragm is easily bent and the stability of the flow rate control is lowered. In addition, when the diaphragm diameter is increased, the entire control valve is also increased, and it may be difficult to dispose it at a place where it should be disposed.

そこで、本発明の出願人は、先に、特許文献2に所載のように、弁体を駆動するダイアフラムの外周部と内周部との間に、断面で見て上に凸又は下に凸の山を、Nを正の整数(1、2、3、・・・)として、[N個+(0.25〜0.75)個]持つ平面視同心円環状を呈する山波状部が形成されていることを特徴とするダイアフラム式流体制御弁を提案している。   Therefore, as described in Patent Document 2, the applicant of the present invention first protrudes upward or downward as viewed in cross section between the outer peripheral portion and the inner peripheral portion of the diaphragm that drives the valve body. A wave-like portion having a concentric ring shape in a plan view having convex peaks and [N + (0.25 to 0.75)], where N is a positive integer (1, 2, 3,...) Is formed. A diaphragm type fluid control valve is proposed.

以下、かかる提案のダイアフラム式流体制御弁の一例を図3を参照しながら説明する。図3は上記構成のダイアフラムを持つダイアフラム式流体制御弁5を示しており、このダイアフラム式流体制御弁5は、図3には省略されているが(特許文献2の図6を参照されたい)、流体の流量又は圧力を調節するための弁体と、流入口及び流出口が設けられるとともに、それらの間に前記弁体により開閉される弁口が設けられた弁本体とに加えて、前記弁体を前記弁口開閉方向に駆動するためのダイアフラム装置30Gを備えている。   Hereinafter, an example of the proposed diaphragm type fluid control valve will be described with reference to FIG. FIG. 3 shows a diaphragm type fluid control valve 5 having a diaphragm having the above-described configuration. This diaphragm type fluid control valve 5 is omitted in FIG. 3 (see FIG. 6 of Patent Document 2). In addition to the valve body for adjusting the flow rate or pressure of the fluid, and the valve body provided with an inlet and an outlet and a valve opening opened and closed by the valve body between them, A diaphragm device 30G for driving the valve body in the valve opening / closing direction is provided.

ダイアフラム装置30Gは、ダイアフラム35(後で詳述)と、該ダイアフラム35の外周部を挟持するように封止固定するとともに、その上面側に密閉空間である上面側圧力室33を画成するダイアフラム保持部材32とを有している。なお、図3はダイアフラム35が上下どちらにも変位していない中立状態(自然状態)を示している。   The diaphragm device 30G seals and fixes a diaphragm 35 (described in detail later) and an outer peripheral portion of the diaphragm 35, and defines an upper surface side pressure chamber 33 that is a sealed space on the upper surface side thereof. Holding member 32. FIG. 3 shows a neutral state (natural state) in which the diaphragm 35 is not displaced vertically.

前記上面側圧力室33は、その中に所定のガス(例えば R134a)が所定の圧力で封入されてプラグ39で封止されている。ダイアフラム35の下面側には下面側圧力室12が形成されている。   The upper surface side pressure chamber 33 is sealed with a plug 39 with a predetermined gas (for example, R134a) sealed therein with a predetermined pressure. A lower surface side pressure chamber 12 is formed on the lower surface side of the diaphragm 35.

ダイアフラム保持部材32は、上面側圧力室33を画成するための、中央円錐台状部32c、該中央円錐台状部32cの下部に連なり中立状態のダイアフラム35に平行な環状平板部32d、及びダイアフラム35の外周部を封止固定するための上側挟持部32eからなる概略蓋状の上面側圧力室画成部32Aと、下面側圧力室12の一部を画成するための、弁本体に取り付けるための雄ねじ部32iが形成された円筒状部32f、該円筒状部32fに連なり中立状態のダイアフラム35に平行な鍔状平板部32g、及びダイアフラム35の外周部を挟持するための下側挟持部32hからなる段付き円筒状の下面側圧力室画成部32Bと、を備えている。   The diaphragm holding member 32 includes a central frustoconical portion 32c for defining the upper surface side pressure chamber 33, an annular flat plate portion 32d connected to the lower portion of the central frustoconical portion 32c and parallel to the neutral diaphragm 35, and A valve body for defining a substantially lid-like upper surface side pressure chamber defining portion 32A composed of an upper clamping portion 32e for sealing and fixing the outer peripheral portion of the diaphragm 35 and a part of the lower surface side pressure chamber 12 is provided. A cylindrical portion 32f in which a male screw portion 32i for attachment is formed, a bowl-shaped flat plate portion 32g connected to the cylindrical portion 32f and parallel to the neutral diaphragm 35, and a lower holding portion for holding the outer peripheral portion of the diaphragm 35 And a stepped cylindrical lower surface side pressure chamber defining part 32B comprising a part 32h.

一方、前記ダイアフラム35の変位(撓み)を弁体に伝達すべく、ダイアフラム35の下面側には、作動棒37がストッパ38を介して連接されている。ストッパ38は、前記作動棒37の上端部が圧入等により内嵌固定される嵌合穴38bがその中央部に設けられた短円柱状部38aと、この短円柱状部38aの上端より若干下側に設けられた大径鍔状円板部38cとを有し、その上端面38dがダイアフラム35の下面内周部(中央部)に当接せしめられている。   On the other hand, an operating rod 37 is connected to the lower surface side of the diaphragm 35 via a stopper 38 in order to transmit the displacement (deflection) of the diaphragm 35 to the valve body. The stopper 38 includes a short columnar portion 38a in which a fitting hole 38b in which the upper end portion of the operating rod 37 is fitted and fixed by press-fitting or the like is provided at the center thereof, and slightly below the upper end of the short columnar portion 38a. A large-diameter bowl-shaped disc portion 38c provided on the side, and an upper end surface 38d thereof is brought into contact with the inner peripheral portion (center portion) of the lower surface of the diaphragm 35.

また、下面側圧力室12には、弁本体に形成された流通路(蒸発器からの冷媒の流入口及び圧縮機吸入側への流出口を有する)を流れる冷媒(圧力)が導入されるようになっており、ダイアフラム35は、上面側圧力室33の圧力と下面側圧力室12の圧力との差圧に応じて上下に変位し(撓み)、この変位が作動棒37を介して弁体に伝達され、弁体が弁口開閉方向(上下方向)に動いて弁開度(=リフト量=弁口の実効開口面積)が調節され、これによって、流入口から流出口に向かう流体(冷媒)の圧力(流量)が制御されるようになっている。   In addition, refrigerant (pressure) flowing through a flow passage (having a refrigerant inlet from the evaporator and a refrigerant outlet from the evaporator) formed in the valve body is introduced into the lower pressure chamber 12. The diaphragm 35 is displaced up and down (deflection) according to the pressure difference between the pressure in the upper surface side pressure chamber 33 and the pressure in the lower surface side pressure chamber 12, and this displacement is applied to the valve element via the operating rod 37. The valve body moves in the valve opening / closing direction (vertical direction) and the valve opening degree (= lift amount = effective opening area of the valve opening) is adjusted, whereby fluid (refrigerant) from the inlet to the outlet is adjusted. ) Pressure (flow rate) is controlled.

そして、図示例のダイアフラム35は、ダイアフラム保持部材32により封止固定された外周部35aとストッパ38の上端面38dが当接する内周部35cとの間に、断面で見て上に凸の山を、2山半(2.5個)持つ平面視同心円環状を呈する山波状部35bが形成されている。   In the illustrated example, the diaphragm 35 has a peak that is convex upward when viewed in cross section between the outer peripheral portion 35a sealed and fixed by the diaphragm holding member 32 and the inner peripheral portion 35c with which the upper end surface 38d of the stopper 38 abuts. Are formed in a mountain-shaped portion 35b having a concentric annular shape in a plan view having two halves (2.5).

より詳細には、前記ダイアフラム35は、板厚が例えば0.10mm程度のステンレス薄鋼板(ASL350等)が用いられて円板状に作製されており、最も内周側の第1の山M1とその外周側の第2の山M2は1山分であるが、最外周の第3の山M3は0.5山分となっており、自然状態(中立状態)においては、該ダイアフラム35における内周部35cの上面を基準面として、該基準面から山頂までの高低差(山の高さ)はH(例えば、0.30mm)であり、さらに前記基準面から外周部35aの上面までの高低差も同じH(例えば、0.30mm)となっている。   More specifically, the diaphragm 35 is made of a stainless steel plate (ASL350 or the like) having a thickness of about 0.10 mm, for example, and is formed into a disk shape. The second mountain M2 on the outer peripheral side is one mountain, but the third mountain M3 on the outermost outer periphery is 0.5 mountain, and in the natural state (neutral state) Using the upper surface of the peripheral portion 35c as a reference surface, the height difference (height of the mountain) from the reference surface to the peak is H (for example, 0.30 mm), and the height from the reference surface to the upper surface of the outer peripheral portion 35a. The difference is also the same H (for example, 0.30 mm).

ところで、一般に、この種のダイアフラム装置においては、ダイアフラムが過度に上方及び下方に変位せしめられると、元に戻らないほど変形したり破損したりするおそれがあるため、通常、ダイアフラムの上方及び下方への変位を制限するストッパが設けられる。上記した図示例のダイアフラム装置30Gでは、ダイアフラム35の内周部35cが接当係止されるようにダイアフラム保持部材32の上面側圧力室画成部32Aに環状平板部32dが設けられ、この環状平板部32dの内周部下面がダイアフラム35の上方への過度の変位を制限するための上ストッパ51とされ、一方、ダイアフラム35の下方への過度の変位を制限するための下ストッパとして、前記ストッパ38に大径鍔状円板部38cが設けられるとともに、前記ダイアフラム保持部材32の下面側圧力室画成部32Bに前記大径鍔状円板部38cが接当係止されるように鍔状平板部32gが設けられている。   By the way, in general, in this type of diaphragm device, if the diaphragm is excessively displaced upward and downward, there is a possibility that the diaphragm may be deformed or damaged so as not to return to the original state. A stopper is provided for limiting the displacement. In the diaphragm device 30G of the illustrated example described above, the annular flat plate portion 32d is provided on the upper surface side pressure chamber defining portion 32A of the diaphragm holding member 32 so that the inner peripheral portion 35c of the diaphragm 35 is contacted and locked. The lower surface of the inner peripheral portion of the flat plate portion 32d serves as an upper stopper 51 for restricting excessive displacement of the diaphragm 35 upward, and as the lower stopper for restricting excessive displacement of the diaphragm 35 downward, The stopper 38 is provided with a large-diameter bowl-shaped disk part 38c, and the large-diameter bowl-shaped disk part 38c is contacted and locked to the lower surface side pressure chamber defining part 32B of the diaphragm holding member 32. A flat plate portion 32g is provided.

特開2007−240041号公報JP 2007-240041 A 特開2011−007355号公報JP2011-007355A

しかしながら、前記第1、第2、第3の山M1、M2、M3からなる2山半の山波状部35bが設けられているダイアフラム35においては、次のような問題が生じる。   However, in the diaphragm 35 provided with the two and half mountain wave-shaped portions 35b formed of the first, second, and third peaks M1, M2, and M3, the following problem occurs.

すなわち、図4(A)に示される如くに、ダイアフラム35が上方に大きく変位せしめられるときには、ダイアフラム35の内周部35cが上ストッパ51である環状平板部32dの内周側下面に接当係止される前に、第1の山M1の頂部が環状平板部32dの下面に接当してしまい、その後、ダイアフラム35は、図4(B)に示される如くに、その内周部35cが環状平板部32dの内周側下面に接当係止されるまで、すなわち、第1の山M1の高さHに相当する距離分さらに上方に変位せしめられる。そのため、第1の山M1の頂部が環状平板部32dの内周側下面に接当してから内周部35cが環状平板部32dの内周側下面に接当係止されるまでは、第1の山M1部分がフラットになるように大きく変形せしめられるので、第1の山M1部分に大きな応力が発生する。かかる事象は、当該制御弁が例えば膨張弁として使用されているシステムの稼働中は頻繁に起きるため、第1の山M1部分に繰り返し応力が発生し、該部分が不所望に変形したまま元に戻らなくなったり、金属疲労により破損しやすくなり、ダイアフラム装置、ひいては流体制御弁の耐久性、信頼性が低下してしまう。   That is, as shown in FIG. 4A, when the diaphragm 35 is greatly displaced upward, the inner peripheral portion 35c of the diaphragm 35 contacts the lower surface on the inner peripheral side of the annular flat plate portion 32d which is the upper stopper 51. Before being stopped, the top of the first mountain M1 comes into contact with the lower surface of the annular flat plate portion 32d, and then the diaphragm 35 has an inner peripheral portion 35c as shown in FIG. It is displaced further upward by a distance corresponding to the height H of the first peak M1 until it is contacted and locked to the inner peripheral lower surface of the annular flat plate portion 32d. Therefore, after the top of the first peak M1 contacts the inner peripheral lower surface of the annular flat plate portion 32d, the inner peripheral portion 35c is contacted and locked to the inner peripheral lower surface of the annular flat plate portion 32d. Since the first peak M1 is greatly deformed so as to be flat, a large stress is generated in the first peak M1. Such an event occurs frequently during operation of a system in which the control valve is used as, for example, an expansion valve. Therefore, stress is repeatedly generated in the first peak M1, and the original part remains undesirably deformed. It becomes difficult to return or breakage due to metal fatigue, and the durability and reliability of the diaphragm device and consequently the fluid control valve are lowered.

本発明は、かかる課題に鑑みてなされたもので、その目的とするところは、ダイアフラムを薄くしたりその径を大きくすること等を要せずに、ダイアフラムの上面側圧力と下面側圧力との差圧の変化に対してリフト量を大きく変化させることができ、かつ、ダイアフラムに不所望な変形や破損等を生じ難くできて、耐久性、信頼性等を向上させることのできるダイアフラム式流体制御弁を提供することにある。   The present invention has been made in view of such a problem, and the object of the present invention is to reduce the pressure between the upper surface side pressure and the lower surface side pressure of the diaphragm without requiring a thin diaphragm or an increase in the diameter thereof. Diaphragm type fluid control that can greatly change the lift amount with respect to the change in differential pressure, and can hardly cause undesired deformation or breakage in the diaphragm, and can improve durability, reliability, etc. To provide a valve.

前記目的を達成すべく、本発明に係るダイアフラム式流体制御弁は、基本的には、弁体を弁口開閉方向に駆動するためのダイアフラム装置を備えたダイアフラム式流体制御弁であって、前記ダイアフラム装置は、ダイアフラムと、該ダイアフラムの上面側に圧力室を画成する概略蓋状の上面側圧力室画成部を有するダイアフラム保持部材と、を有し、前記ダイアフラムは、その内周部と外周部との間に、断面で見て上に凸の山を少なくとも1個持つ平面視同心円環状を呈する山波状部が形成され、前記上面側圧力室画成部は、中央円錐台状部、該中央円錐台状部の下部に連なる環状平板部、及び前記ダイアフラムの外周部を封止固定するための上側挟持部を有する概略蓋状とされており、前記上面側圧力室画成部における半径方向中間部分に、前記ダイアフラムの上方への変位を制限すべく、前記ダイアフラムの内周部が接当係止される上ストッパが前記環状平板部の内周部下面に設けられるとともに、前記環状平板部における前記上ストッパより外周側に、前記ダイアフラムの内周部が前記上ストッパに接当係止されている状態において前記山波状部における最も内周側に位置する前記山部分を、該ダイアフラムの上方変位を妨げることなく受け入れるための上側に凹む円環状溝ないし空所が設けられていることを特徴としている。 In order to achieve the above object, a diaphragm type fluid control valve according to the present invention is basically a diaphragm type fluid control valve provided with a diaphragm device for driving a valve body in a valve opening / closing direction. The diaphragm device includes a diaphragm, and a diaphragm holding member having a substantially lid-like upper surface side pressure chamber defining portion defining a pressure chamber on the upper surface side of the diaphragm, and the diaphragm includes an inner peripheral portion thereof, A crest-like portion having a concentric annular shape in plan view having at least one convex crest as viewed in cross section is formed between the outer peripheral portion, and the upper surface side pressure chamber defining portion includes a central truncated cone portion, A radius of the upper surface pressure chamber defining portion is formed into a substantially lid shape having an annular flat plate portion connected to the lower portion of the central truncated cone portion and an upper clamping portion for sealing and fixing the outer peripheral portion of the diaphragm. In the middle direction To limit the displacement of the upward of the diaphragm, together with a stopper on the inner peripheral portion of the diaphragm is locked abutment engagement is provided on the inner peripheral lower surface of the annular flat plate portion, on the in the annular flat plate portion on the outer peripheral side of the stopper, the mountain portion inner peripheral portion of the diaphragm is located on the most inner circumferential side of the mountainous-wave portion in the state of being locked abutment engaged on said stopper prevents upward displacement of the diaphragm It is characterized in that an annular groove or void is provided on the upper side for receiving without any problems.

他の好ましい態様では、前記上面側圧力室画成部における半径方向中間部分に、前記上ストッパとしての下方突出部が設けられるとともに、該下方突出部より外周側が、前記最も内周側に位置する前記山部分を、該ダイアフラムの上方変位を妨げることなく受け入れるための前記空所とされる。 In another preferred aspect, a lower protrusion as the upper stopper is provided at a radial intermediate portion in the upper surface side pressure chamber defining part, and an outer peripheral side of the lower protrusion is located on the innermost peripheral side. The peak portion is defined as the space for receiving the diaphragm without disturbing the upward displacement of the diaphragm .

より好ましい態様では、前記山波状部に、断面で見て上に凸の山が、Nを正の整数(1、2、3、・・・)として、[N個+(0.25〜0.75)個]形成される。   In a more preferred embodiment, the above-mentioned peak-like portion has a peak that is convex upward when viewed in cross section, where N is a positive integer (1, 2, 3,...), [N + (0.25 to 0). .75) pieces] are formed.

本発明に係るダイアフラム式流体制御弁では、上面側圧力室画成部における上ストッパより外周側に、ダイアフラムの内周部が上ストッパに接当係止されている状態において山波状部における最も内周側に位置する山部分を、該ダイアフラムの上方変位を妨げることなく受け入れるための円環状溝ないし空所が設けられていることにより、ダイアフラムが上方に大きく変位せしめられて、ダイアフラムの内周部が上ストッパに接当係止された状態においても、最も内周側に位置する山部分が、該ダイアフラムの上方変位を妨げることなく円環状溝ないし空所に受容されるため、最も内周側に位置する山部分に大きな応力が発生せず、そのため、該山部分が不所望に変形したまま元に戻らなくなったり破損したりすることが確実に回避され、その結果、ダイアフラム装置、ひいては流体制御弁の耐久性、信頼性が向上する。 In the diaphragm type fluid control valve according to the present invention, the innermost part of the mountain wave-shaped part in the state where the inner peripheral part of the diaphragm is in contact with and locked to the upper stopper on the outer peripheral side from the upper stopper in the upper pressure chamber defining part. By providing an annular groove or space for receiving the crest portion located on the circumferential side without disturbing the upward displacement of the diaphragm, the diaphragm is greatly displaced upward, and the inner peripheral portion of the diaphragm Even when the upper stopper is in contact with and locked to the upper stopper, the peak portion located on the innermost circumferential side is received in the annular groove or void without disturbing the upward displacement of the diaphragm. No large stress is generated in the mountain portion located at the position of the ridge, so that it is reliably avoided that the mountain portion cannot be restored to its original state or damaged while being undesirably deformed. Result, the diaphragm device, the durability of the thus fluid control valve, the reliability is improved.

(A)は本発明に係るダイアフラム式流体制御弁の一実施例のダイアフラム装置部分を示す縦断面図、(B)は(A)のB部の拡大図。(A) is a longitudinal cross-sectional view which shows the diaphragm apparatus part of one Example of the diaphragm type fluid control valve based on this invention, (B) is an enlarged view of the B section of (A). 本発明に係るダイアフラム式流体制御弁の他の実施例のダイアフラム装置部分を示す縦断面図。The longitudinal cross-sectional view which shows the diaphragm apparatus part of the other Example of the diaphragm type fluid control valve based on this invention. 従来のダイアフラム式流体制御弁の一例のダイアフラム装置部分を示す縦断面図。The longitudinal cross-sectional view which shows the diaphragm apparatus part of an example of the conventional diaphragm type fluid control valve. 図3に示される従来のダイアフラム装置の課題説明に供される図。FIG. 4 is a diagram used for explaining the problem of the conventional diaphragm device shown in FIG. 3.

以下、本発明のダイアフラム式流体制御弁の実施形態を図面を参照しながら説明する。   Hereinafter, embodiments of the diaphragm type fluid control valve of the present invention will be described with reference to the drawings.

図1は、本発明に係るダイアフラム式流体制御弁の一実施例におけるダイアフラム装置を示す縦断面図である。図1において、図3及び図4に示される従来例のダイアフラム装置30Gの各部に対応する部分には同一の符号を付して重複説明を省略し、以下においては相違点を重点的に説明する。   FIG. 1 is a longitudinal sectional view showing a diaphragm device in an embodiment of a diaphragm type fluid control valve according to the present invention. In FIG. 1, portions corresponding to the respective portions of the diaphragm device 30G of the conventional example shown in FIGS. 3 and 4 are denoted by the same reference numerals, and redundant description will be omitted, and the differences will be mainly described below. .

本実施例のダイアフラム装置30Aは、基本的には前述した図3及び図4に示される従来例のダイアフラム装置30Gと同じ構成であるが、上面側圧力室画成部32Aの環状平板部32dの内周部下面が上ストッパ51とされるとともに、環状平板部32dにおける前記上ストッパ51部分より外周側に、ダイアフラム35の内周部35cが上ストッパ51に接当係止されている状態において山波状部35bにおける最も内周側に位置する第1の山M1部分を、ダイアフラム35の上方変位を妨げることなく受け入れるための、上側に凹む断面内形が第1の山M1と概略相似形状の円環状溝52が設けられている。円環状溝52の深さJは第1の山M1の高さHと同程度かそれより若干深く設定されている。 The diaphragm device 30A of the present embodiment has basically the same configuration as the diaphragm device 30G of the conventional example shown in FIGS. 3 and 4 described above, but of the annular flat plate portion 32d of the upper surface side pressure chamber defining portion 32A. In the state where the lower surface of the inner peripheral portion is the upper stopper 51 and the inner peripheral portion 35c of the diaphragm 35 is abutted and locked to the upper stopper 51 on the outer peripheral side of the upper stopper 51 portion in the annular flat plate portion 32d. In order to receive the first peak M1 portion located on the innermost peripheral side of the wave-like portion 35b without obstructing the upward displacement of the diaphragm 35, the inner shape of the cross-section recessed upward is substantially similar to the first peak M1. An annular groove 52 is provided. The depth J of the annular groove 52 is set to be approximately the same as or slightly deeper than the height H of the first peak M1.

このように環状平板部32dに、上側に凹む円環状溝52が設けられることにより、ダイアフラム35が上方に大きく変位せしめられて、ダイアフラム35の内周部35cが上ストッパ51である環状平板部32dの内周部下面に接当係止された状態においても、第1の山M1部分が、ダイアフラム35の上方変位を妨げることなく上記円環状溝52に受容されるため、従来例のように第1の山M1部分に大きな応力が発生せず、そのため、第1の山M1部分が不所望に変形したまま元に戻らなくなったり破損したりすることが確実に回避され、その結果、ダイアフラム装置30A、ひいては流体制御弁1の耐久性、信頼性が向上する。 Thus, the annular flat plate portion 32d is provided with the annular groove 52 recessed upward, so that the diaphragm 35 is greatly displaced upward, and the inner peripheral portion 35c of the diaphragm 35 is the upper flat plate portion 32d. Even in the state of being contacted and locked to the lower surface of the inner peripheral portion of the first portion, the first peak M1 portion is received in the annular groove 52 without interfering with the upward displacement of the diaphragm 35 . No large stress is generated in the first mountain M1 portion, so that it is reliably avoided that the first mountain M1 portion is undesirably deformed and cannot be restored or damaged, and as a result, the diaphragm device 30A. As a result, the durability and reliability of the fluid control valve 1 are improved.

なお、上に凸の山を2.5個[N個+(0.25〜0.75)個]持つことによる作用効果は図3、図4に示される従来例と同じであるので説明は省略する。   In addition, since the effect by having 2.5 [N pieces + (0.25 to 0.75)] the convex peak is the same as the conventional example shown in FIG. 3 and FIG. Omitted.

図2は、本発明に係るダイアフラム式流体制御弁の他の実施例におけるダイアフラム装置30Bを示す縦断面図である。図2において、図3及び図4に示される従来例のダイアフラム装置30Gの各部に対応する部分には同一の符号を付して重複説明を省略し、以下においては相違点を重点的に説明する。   FIG. 2 is a longitudinal sectional view showing a diaphragm device 30B in another embodiment of the diaphragm type fluid control valve according to the present invention. In FIG. 2, portions corresponding to the respective portions of the conventional diaphragm device 30 </ b> G shown in FIGS. 3 and 4 are denoted by the same reference numerals and redundant description is omitted, and the differences will be mainly described below. .

この実施例のダイアフラム装置30Bでは、上面側圧力室画成部32Aにおける半径方向中間部分(環状平板部32dの内周部下面)が上記した図1に示される実施例よりも若干上方に位置せしめられ、その環状平板部32dの内周部下面に上ストッパとしての環状下方突出部53が設けられており、ダイアフラム35の上方変位制限位置は図1に示されるものと同じ位置とされ、前記環状下方突出部53より外周側が、ダイアフラム35の内周部35cが上ストッパ53に接当係止されている状態において山波状部35bにおける最も内周側に位置する第1の山M1部分を、ダイアフラム35の上方変位を妨げることなく受け入れるための空所54となっている。環状下方突出部53の環状平板部32dの下面からの下方への突出高さKは、第1の山M1の高さHと同程度かそれより若干高く設定されている。 In the diaphragm device 30B of this embodiment, the radial intermediate portion (the lower surface of the inner peripheral portion of the annular flat plate portion 32d) of the upper surface side pressure chamber defining portion 32A is positioned slightly above the embodiment shown in FIG. An annular lower protrusion 53 as an upper stopper is provided on the lower surface of the inner peripheral portion of the annular flat plate portion 32d, and the upper displacement limiting position of the diaphragm 35 is the same as that shown in FIG. the outer peripheral side of the downward projecting portion 53, the first mountain M1 portion located innermost in the mountainous-wave portion 35b in a state where the inner peripheral portion 35c of the diaphragm 35 are sealed abutment engagement with the upper stopper 53, the diaphragm It is a space 54 for receiving the upper 35 without being obstructed . The downward protrusion height K of the annular downward protrusion 53 from the lower surface of the annular flat plate portion 32d is set to be approximately the same as or slightly higher than the height H of the first peak M1.

かかる構成のダイアフラム装置30B及びそれを備えた流体制御弁2においても上記実施例と略同様な作用効果が得られる。   The diaphragm device 30 </ b> B having such a configuration and the fluid control valve 2 including the diaphragm device 30 </ b> B can provide substantially the same operational effects as the above-described embodiment.

1、2 ダイアフラム式流体制御弁(膨張弁)
12 下面側圧力室
30A、30B ダイアフラム装置
32 ダイアフラム保持部材
32A 上面側圧力室画成部
32B 下面側圧力室画成部
32d 環状平板部
33 上面側圧力室
35 ダイアフラム
35a 外周部
35b 山波状部
35c 内周部
37 作動棒
51 上ストッパ(環状平板部の内周部下面)
52 円環状溝
53 上ストッパ(環状下方突出部)
54 空所
M1 第1の山
1, 2 Diaphragm type fluid control valve (expansion valve)
12 Lower surface side pressure chambers 30A, 30B Diaphragm device 32 Diaphragm holding member 32A Upper surface side pressure chamber defining portion 32B Lower surface side pressure chamber defining portion 32d Annular flat plate portion 33 Upper surface side pressure chamber 35 Diaphragm 35a Outer peripheral portion 35b Mountain wave portion 35c Inside Peripheral part 37 Actuating rod 51 Upper stopper (Inner peripheral part lower surface of annular flat plate part)
52 annular groove 53 upper stopper (annular downward projection)
54 void M1 first mountain

Claims (3)

弁体を弁口開閉方向に駆動するためのダイアフラム装置を備えたダイアフラム式流体制御弁であって、
前記ダイアフラム装置は、ダイアフラムと、該ダイアフラムの上面側に圧力室を画成する概略蓋状の上面側圧力室画成部を有するダイアフラム保持部材と、を有し、
前記ダイアフラムは、その内周部と外周部との間に、断面で見て上に凸の山を少なくとも1個持つ平面視同心円環状を呈する山波状部が形成され、
前記上面側圧力室画成部は、中央円錐台状部、該中央円錐台状部の下部に連なる環状平板部、及び前記ダイアフラムの外周部を封止固定するための上側挟持部を有する概略蓋状とされており、
前記上面側圧力室画成部における半径方向中間部分に、前記ダイアフラムの上方への変位を制限すべく、前記ダイアフラムの内周部が接当係止される上ストッパが前記環状平板部の内周部下面に設けられるとともに、前記環状平板部における前記上ストッパより外周側に、前記ダイアフラムの内周部が前記上ストッパに接当係止されている状態において前記山波状部における最も内周側に位置する前記山部分を、該ダイアフラムの上方変位を妨げることなく受け入れるための上側に凹む円環状溝ないし空所が設けられていることを特徴とするダイアフラム式流体制御弁。
A diaphragm type fluid control valve provided with a diaphragm device for driving the valve body in the valve opening and closing direction,
The diaphragm device includes a diaphragm, and a diaphragm holding member having a substantially lid-shaped upper surface side pressure chamber defining portion that defines a pressure chamber on the upper surface side of the diaphragm,
The diaphragm is formed between the inner peripheral portion and the outer peripheral portion, a mountain wave-like portion having a concentric annular shape in a plan view having at least one convex peak when viewed in cross section,
The upper surface side pressure chamber defining part has a central frustoconical part, an annular flat plate part connected to the lower part of the central frustoconical part, and an upper lid part for sealing and fixing the outer peripheral part of the diaphragm It is said that
A radially intermediate portion of the upper surface side pressure chamber defining portion, to limit the displacement of the upward of the diaphragm, the stopper on the inner peripheral portion of the diaphragm is locked abutment engagement is of the annular flat portion Provided on the lower surface of the peripheral portion, and on the outer peripheral side of the upper stopper in the annular flat plate portion , the innermost peripheral side of the mountain wave-shaped portion in a state where the inner peripheral portion of the diaphragm is abutted and locked to the upper stopper the mountain portion, a diaphragm-actuated fluid control valve, characterized in that the annular groove or cavity recessed in an upper for receiving without interfering with the upper displacement of the diaphragm is provided located.
前記上面側圧力室画成部における半径方向中間部分に、前記上ストッパとしての下方突出部が設けられるとともに、該下方突出部より外周側が、前記最も内周側に位置する前記山部分を、該ダイアフラムの上方変位を妨げることなく受け入れるための前記空所となっていることを特徴とする請求項1に記載のダイアフラム式流体制御弁。 A radially intermediate portion of the upper surface side pressure chamber defining section, together with the downward projecting portion as the upper stopper is provided, the outer peripheral side of said lower protrusions, the peak portions located at the innermost, the 2. A diaphragm type fluid control valve according to claim 1, wherein said diaphragm type fluid control valve is provided for receiving the diaphragm without disturbing the upward displacement of the diaphragm. 前記山波状部に、断面で見て上に凸の山が、Nを正の整数(1、2、3、・・・)として、[N個+(0.25〜0.75)個]形成されていることを特徴とする請求項1または2に記載のダイアフラム式流体制御弁。 In the above-mentioned peak-like portion, a peak that is convex upward when viewed in cross section is defined as [N + (0.25-0.75)] where N is a positive integer (1, 2, 3,...). 3. The diaphragm type fluid control valve according to claim 1, wherein the diaphragm type fluid control valve is formed.
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