JP5573422B2 - Manufacturing method of semiconductor device - Google Patents

Description

  The present invention relates to a method for manufacturing a semiconductor device.

  LSI gate length miniaturization has progressed year by year in accordance with Moore's law, but the limits of miniaturization have become apparent from 45 nm and beyond due to economic issues and from 22 nm onwards due to physical fluctuation issues and the like. ing. From the standpoint of further pursuing the Moore rule for miniaturization, the movement to pursue More than Moore beyond the Moore rule is accelerating. As such a movement, devices are three-dimensionally stacked to reduce the wiring length and achieve a small LSI with low power consumption, to form a system in package (SiP) in which different types of devices are mixed, and to silicon There is a direction to develop a device using a new alternative material. In particular, the direction of trying to construct a low-power consumption, high-performance device by shortening the wiring length by three-dimensionally stacking LSIs has attracted the most attention and has been developed in competition. However, it has been found that there are many problems to be solved in this three-dimensional stack, such as design, formation of through-silicon vias, yield, manufacturing cost, and the like.

  As a method for forming a three-dimensional stack at low cost, a plurality of non-defective LSIs are arranged in a wafer shape and fixed with resin, then a pseudo wafer on which wiring and electrodes are formed is manufactured, and a package cut out from the pseudo wafer is stacked. Thus, a method of forming a three-dimensional stacked device has been proposed (see, for example, Non-Patent Documents 1 and 2).

  Prepare a substrate with vias with through-vias formed in advance, align the substrate with vias and the semiconductor chip on the support and harden them with resin, and form wiring etc. on the peeled surface from the support, then the resin layer on the opposite side There has also been proposed a method of exposing through vias formed on a substrate with vias by grinding from the surface (see, for example, Patent Document 1).

  The method of forming a through via in a pseudo wafer has an advantage that a three-dimensional stacked device can be manufactured at a low cost and with a high yield, but it is difficult to form a deep via of several hundred μm that penetrates the resin. The resin of the pseudo wafer contains 90% by weight or more of a silica filler having a diameter of micron level in order to make the thermal expansion coefficient close to that of silicon and increase the rigidity. In order to make a hole with a conventional laser drill technique in a resin having a thickness of several hundreds of micrometers containing a lot of silica, a high output is required, and the diameter of the hole inevitably exceeds 100 μm. When the diameter of the hole increases, there is a problem that the area occupied by the penetrating via increases and the size of the individual piece cut out from the pseudo wafer increases. Also, in the method in which a substrate with vias in which through vias have been formed in advance is placed around the semiconductor chip and then hardened with resin, after forming a via hole with a laser drill on a substrate of resin or the like, silver paste is put into the hole with a squeegee etc. Therefore, it is difficult to form fine through vias.

JP-A-2005-33141

Implementation ofa Mobile Phone Module with Redistributed Chip Packaging, Lakshmi N. Ramanathanet al, Electronic Components & Technology Conference 2008.pp.1117-1120 Applicationof Through Mold Via (TMV) as PoP Base Package, Jinseong Kimet al, Electronic Components & Technology Conference 2008.pp.1089-1092

  Therefore, the present invention provides a method for manufacturing a semiconductor device in which a thin through-via can be disposed in a resin of a pseudo wafer in a simple process without forming a deep hole with a laser or the like in a resin containing a large amount of silica. This is the issue.

In order to solve the above problems, a method for manufacturing a semiconductor device according to an embodiment includes:
A plurality of semiconductor chips and a metal structure having a plurality of protrusions are arranged at predetermined locations on the support substrate,
Covering and solidifying the plurality of semiconductor chips and the metal structure with resin,
Removing a part of the solidified resin and a part of the metal structure, flattening, exposing the protrusion of the metal structure as a through via;
The resin layer in which the semiconductor chip and the through via are embedded is peeled from the support substrate,
Forming a predetermined wiring pattern on the release surface to complete a pseudo wafer;

  By using a metal structure in which predetermined protrusions are formed in advance, it is not necessary to form holes in the resin layer with a laser. Therefore, a fine via that penetrates the resin layer can be formed with high reliability regardless of the thickness of the resin layer of the pseudo wafer.

It is a manufacturing process figure of the pseudo wafer by a 1st embodiment of the present invention. It is a manufacturing process figure of the pseudo wafer by 1st Embodiment of this invention, and is a figure which shows the process following the process of FIG. FIG. 5 is a manufacturing process diagram of a pseudo wafer according to the first embodiment of the present invention, and is a diagram illustrating a process that follows the process of FIG. 2. FIG. 4 is a manufacturing process diagram of a pseudo wafer according to the first embodiment of the present invention, showing a process subsequent to the process of FIG. 3. FIG. 5 is a manufacturing process diagram of a pseudo wafer according to the first embodiment of the present invention, and is a diagram illustrating a process that follows the process of FIG. 4. FIG. 6 is a process diagram of manufacturing a pseudo wafer according to the first embodiment of the present invention, and showing a process subsequent to the process of FIG. 5. It is a figure which shows the wiring diagram of the whole surface of the pseudo wafer produced at the process of FIGS. 1-6, and the surface of the pseudo wafer module cut out from there, and a back surface. It is a schematic block diagram of the semiconductor device which laminated | stacked the several pseudo wafer module in three dimensions. It is a figure which shows the preparation methods of the metal structure used by embodiment. It is a figure which shows the example using an inexpensive lead frame as a metal structure arrange | positioned between a semiconductor chip and a chip | tip in a pseudo wafer. It is a schematic block diagram of the lead frame (metal structure) in which each terminal was correctly positioned by the method of FIG. It is a figure which shows the example of arrangement | positioning of the metal structure of FIG. It is a figure which shows another example of the metal structure arrange | positioned between a semiconductor chip and a chip | tip in a pseudo wafer. It is a manufacturing process figure of the pseudo wafer by a 2nd embodiment. It is a manufacturing process figure of the pseudo wafer by 2nd Embodiment, and is a figure which shows the process following the process of FIG. 14A. It is a manufacturing process figure of the pseudo wafer by 2nd Embodiment, and is a figure which shows the process following the process of FIG. 14B. It is a manufacturing process figure of the pseudo wafer by 2nd Embodiment, and is a figure which shows the process following the process of FIG. 14C. It is a manufacturing process figure of the pseudo wafer by 2nd Embodiment, and is a figure which shows the process following the process of FIG. 14D. It is a manufacturing process figure of the pseudo wafer by 2nd Embodiment, and is a figure which shows the process following the process of FIG. 14E. It is a manufacturing process figure of the pseudo wafer by 2nd Embodiment, and is a figure which shows the process following the process of FIG. 14F. It is a manufacturing process figure of the pseudo wafer by 2nd Embodiment, and is a figure which shows the process following the process of FIG. 14G. It is a manufacturing process figure of the pseudo wafer by 2nd Embodiment, and is a figure which shows the process following the process of FIG. 14H. It is a manufacturing process figure of the pseudo wafer by 2nd Embodiment, and is a figure which shows the process following the process of FIG. 14I. It is a manufacturing process figure of the pseudo wafer by 2nd Embodiment, and is a figure which shows the process following the process of FIG. 14J.

  1 to 6 are manufacturing process diagrams of a pseudo wafer according to the first embodiment of the present invention. The pseudo wafer is manufactured as a part of the semiconductor device manufacturing process. In order to fabricate a pseudo wafer with through vias through the first embodiment and the second embodiment to be described later, a metal structure in which metal protrusions corresponding to through vias and wirings are formed in advance is used. A metal structure having via projections and wiring projections is placed on the same plane as the semiconductor chip, and the whole is hardened with resin. Unnecessary portions of the resin and metal structure are removed by grinding, polishing, etc. to expose the protruding portion of the metal structure, and vias that penetrate the resin and wiring located on the surface of the resin are formed simultaneously To do. Hereinafter, specific steps will be described with reference to FIGS.

  As shown in FIGS. 1A and 1B, a temporary adhesive layer 12 is formed by applying a temporary adhesive resin to a flat support substrate 11 such as glass or attaching a temporary adhesive film. . In the case of using a temporary adhesive resin film, for example, a UV tape whose adhesive strength is reduced by irradiation with ultraviolet rays or a thermally foamed adhesive film whose adhesive strength is reduced by heating is used. The plurality of semiconductor chips 20 are fixed to predetermined positions on the support substrate 11 by the temporary adhesive layer 12 with the electrode surface (surface on which the electrode 21 is formed) facing down. For the sake of illustration, only two semiconductor chips 20 are shown, but in practice, one unit pattern in which a plurality of semiconductor chips 20 of different sizes and different configurations are arranged in a predetermined arrangement and interval is formed in the shape of the wafer. It is arranged repeatedly so as to be.

  Next, as shown in FIGS. 2A and 2B, a metal structure 25 having protrusions 25a and 25c having a predetermined shape is replaced with a semiconductor chip (hereinafter simply referred to as “chip”) 20. The temporary adhesive layer 12 is fixed to a predetermined position on the support substrate 11 so as to straddle or be positioned between the chips 20 as described later. The metal structure 25 includes via projections (first projections) 25a serving as through vias penetrating the pseudo wafer, wiring projections (second projections) 25c serving as pseudo wafer wirings, and these. Holding part 25b for holding. The via projection 25a and the wiring projection 25c extend in a direction perpendicular to the holding portion 25b. The diameter of the via projection 25a is several tens of μm to several 100 μm. The width of the wiring projection 25c is several tens of μm to several hundreds of μm. The metal structure 25 having such fine protrusions 25a and 25c can be produced in large quantities at low cost using a molding die or the like. The production of the metal structure 25 will be described later with reference to FIG.

  Next, as shown in FIG. 3, the entire chip 20 and the metal structure 25 are covered with resin and solidified to form the embedded resin layer 15 in which the chip 20 and the metal structure 25 are embedded. The embedded resin layer 15 contains a large amount of silica filler and generally has a thermal expansion coefficient of 10 to 20 ppm. The embedded resin layer 15 is removed by a predetermined thickness by grinding, polishing, or the like. Thereby, a part of the embedding resin 15 and a part of the metal structure 25 are removed. In the example of FIG. 3, as shown by the AA line in FIG. 3, the holding portion 25b of the metal structure 25 is removed, and the embedded resin layer 15 is ground to a height at which the surfaces of the protrusions 25a and 25c are exposed. Grind. As a result, as shown in FIG. 4A, the protrusions 25a and 25c of the metal structure 25 remain in the embedded resin layer 15 as through vias 25a and wirings 25c.

  Next, as shown in FIGS. 4A and 4B, the temporary adhesive layer 12 is altered by heat or ultraviolet rays, and the embedded resin layer 15 is peeled from the support substrate. At this time, the chip 20, the through via 25 a, and the wiring 25 c are arranged at predetermined positions in the embedded resin layer 15.

  Next, as shown in FIG. 5A, the peeled embedded resin layer 14 is turned upside down so that the electrode 21 (or peeled surface) of the chip 20 faces upward. Since the peeled embedded resin layer 15 has a film thickness of about 100 to 500 μm and is easy to bend, as shown in FIG. 5B, the electrode surface of the chip 20 is placed with the temporary adhesive layer 42 interposed therebetween. It may be fixed to another support substrate 41.

  Next, as shown in FIG. 6A, wirings 45 are formed on the electrodes 21 and the metal vias 25a of the plurality of chips 20 that appear on the peeling surface of the embedded resin layer 15, and between any electrodes 21 and between the electrodes 21. And the via 25a are electrically connected to complete the pseudo wafer 30. The method of forming the wiring 45 is arbitrary. For example, after forming a plating resist on the entire surface and patterning it to have openings of a predetermined wiring shape, an adhesion layer, a seed layer, etc. are formed, and electroplating or electroless It is formed by plating. Similarly, when the embedded resin layer 15 is fixed on the support substrate 41 as shown in FIG. 5B, the wiring 45 that electrically connects the via 25a and the electrode 21 of the chip 20 is formed (FIG. 6B). Thereafter, the wafer is peeled off from the support substrate 41 by irradiation of ultraviolet rays or heating to form a pseudo wafer 30.

  FIG. 7 is a diagram showing a relationship between the entire pseudo wafer 30 on which the wiring 45 is formed and the pseudo wafer module 30 </ b> P that is one wafer piece cut out from the pseudo wafer 30. On the surface 31 of the pseudo wafer module 30P, a plurality of semiconductor chips 20 are arranged at a predetermined arrangement and interval, and wiring 45 is formed between the chips 20 and 20 and between the chips 20 and the through vias 25a. ing. The wiring 45 is formed in the process of FIG. On the other hand, the protrusions 25a and 25c of the metal structure 25 are exposed as vias 25a and wirings 25c on the back surface 32 of the pseudo wafer module 30P, respectively.

  FIG. 8 is a schematic configuration diagram of a semiconductor device 50 that constitutes a more complex system by three-dimensionally stacking a plurality of different types of pseudo wafer modules 30A and 30B. In FIG. 8, two modules 30A and 30B are stacked, but they can be stacked in three stages, or two or more modules 30B can be arranged side by side on the lower module 30A. The lower module 30A and the upper module 30B are electrically connected by a protruding electrode 47. External connection electrodes 48 such as solder bumps are formed on the lower surface of the lower module 30A and connected to a package substrate (not shown).

  FIG. 9 is a diagram illustrating a method for manufacturing the metal structure 55. First, as shown in FIG. 9A, a mold 51 made of resin or the like is prepared. For example, polydimethylsiloxane (PDMS) is used as the resin. The mold 51 has a mold surface 51a in which holes and grooves corresponding to via protrusions and wiring protrusions of the metal structure are formed. After forming a release agent layer (not shown) with a thickness of several nanometers on the 51a surface of the mold 51, a plating seed layer 53 is formed on the release agent layer (not shown) of the mold surface 51a by sputtering or the like. . The plating seed layer 52 is, for example, a stack of Cu films having a thickness of about 500 nm.

  Next, as shown in FIG. 9B, a Cu plating layer 54 is grown on the seed layer 53 to a thickness of about 300 μm from the shallow surface by electrolytic plating.

Next, as shown in FIG. 9C, the Cu plating layer 54 is peeled from the mold 51 and taken out. Thereby, a metal structure 55 in which the seed layer 53 and the Cu plating layer 54 are integrated is obtained. The metal structure 55 includes a projection (first projection) 55a to be used as a through via and a projection (second projection) 55c to be used as a wiring. In addition, after application of a release agent (not shown) in the step of FIG. 9A, if necessary, before formation of the plating seed layer 53, a Cu diffusion prevention film of Ti, TiN, Ta, TaN or the like of about several tens of nm. May be formed.
By such a method, the metal structure 55 having a desired shape can be manufactured at a low cost and in a large amount. Further, the metal constituting the metal structure is not limited to Cu, and any metal material suitable for wiring, such as Ni, Ni—Co, Ni—Sn, Ag, Ag—Cu, or Au, can be used.

  The mold 51 itself is manufactured by an arbitrary method. As an example, although not shown, a mold for a metal structure having unevenness of different horizontal levels, such as a protrusion 25a serving as a through via and a protrusion 25c serving as a wiring, as in the metal structure 25 in FIG. In this case, a first photoresist pattern having an opening corresponding to the wiring 25c is formed on the silicon substrate, and the first photoresist pattern is used as a mask to correspond to the wiring 25c on the silicon substrate by RIE or the like. A deep groove is formed. Thereafter, the first photoresist pattern is removed, a second photoresist pattern having an opening corresponding to the through via 25a is formed, and a hole having a depth corresponding to the through via is formed by dry etching such as RIE. Form to get the master mold. Using this matrix, an uneven first child mold corresponding to the metal structure 25 is formed by Ni electrolytic plating or the like. Using the first small size, the second small size with the concavities and convexities reversed is formed of resin or the like. This second child mold becomes a mold 51 for molding the metal structure.

  10 to 13 are diagrams illustrating an example in which a through via is formed using an inexpensive lead frame as a metal structure. When a lead frame is used, it is suitable for use as a through via. The lead frame (metal structure) 65A has a large number of thin terminals (leads) 65a extending vertically from a flat holding plate or island 65b. In order to use such a terminal 65a as a through via, each of the terminals 65a must be accurately positioned. Therefore, in the examples of FIGS. 10A and 10B, a positioning substrate 61 in which the recess 62 is formed in advance at a predetermined position is prepared, and the tip of each terminal 65a of the lead frame 65A is recessed in the substrate 61. It is inserted into 62 and fixed with a resin 63 such as polyimide. After fixing the terminal 65a, the lead frame 65A is peeled from the positioning substrate 61 together with the resin 63.

  FIG. 11 shows the lead frame 65A in a peeled state. Each terminal 65a of the lead frame 65A is fixed perpendicular to the resin 63 at a predetermined interval. The resin is not limited to polyimide, and any resin having high rigidity can be used. Even an epoxy resin can be used as long as it can be thickened.

  FIG. 12 is a diagram illustrating an arrangement example of the metal structure (lead frame) 65A of FIG. A temporary adhesion layer 12 is formed on the support substrate 11, and a plurality of semiconductor chips 20 are temporarily adhered on the support substrate 11. At a predetermined position between the semiconductor chip 20 and the chip 20, a metal structure 65A in which the terminal 65a is fixed is disposed. In this case, the fixing resin 63 is temporarily bonded onto the support substrate 11 via the temporary bonding layer 12. After that, the whole is solidified with a resin and peeled, and after wiring is formed on the peeled surface, the excess resin and the plate (island) 65b of the lead frame 65 are polished from the opposite side of the peeled surface. Since each is fixed at a correct position, it can be exposed as a through via at an accurate position even after polishing.

  FIG. 13 is a diagram illustrating another example of the metal structure for through vias. In the example of FIG. 13, a metal foil having an insulating film on the outside is used. For example, a film with a pattern is formed by forming a pattern in which a plurality of terminals extend from an island region (holding region) on a metal foil 65B having an insulator 66 attached to one surface, and the plurality of terminals are insulated. A metal structure 65B is formed by bending vertically with respect to the island so that the surface provided with (layer) 66 is on the outside. The metal structure 65B is fixed between the semiconductor chips 20 using the elasticity or spring property of the film. That is, since the terminal 65a tries to open outward as indicated by an arrow in the figure, the terminal 65a is pressed against the side surface of the semiconductor chip 20 via the insulator 66. Thereby, the terminal 65a of metal foil can be hold | maintained in the correct position. Moreover, since the terminal 65a of the metal structure 65B is pressed against the semiconductor chip 20 through the insulating layer 66, a short circuit with the chip 20 can be prevented.

  14A to 14K are diagrams illustrating manufacturing steps of the semiconductor device according to the second embodiment. In the second embodiment, a mounting density is further increased by mounting a face-up semiconductor chip and a face-down semiconductor chip together. Also in the second embodiment, similarly to the first embodiment, fine through vias and wirings are simultaneously formed using a metal structure having via protrusions and wiring protrusions.

  First, as shown in FIG. 14A, face-down chips 20 a and 20 b with the electrodes 21 facing downward are temporarily fixed on the support substrate 11 by the temporary adhesive layer 12. As in the first embodiment, the temporary adhesive layer 12 is desirably one whose adhesive strength is reduced by heating or irradiation with ultraviolet rays. For example, a UV tape is used.

  Next, as shown in FIG. 14B, the face-up chip 20 c is temporarily fixed to the support substrate 11 via the temporary adhesive layer 12. The thickness of the face-up chip 20c is thinner than the thickness of the face-down chips 20a and 20b.

  Next, as shown in FIG. 14C, the face-up chip 20d is fixed on the face-down chip 20a with an adhesive or the like. Also in this case, the face-up chip 20d is thinner than the face-down chip 20a. In this state, a pattern in which face-down chips 20 a and 20 b and face-up chips 20 c and 20 d are mixedly arranged is formed on the support substrate 11. On the actual support substrate 11, a pattern as shown in FIG. 14C is repeatedly arranged in the shape of a wafer.

  Next, as shown in FIG. 14D, the metal structure 25 having the via protrusion 25 a and the wiring protrusion 25 c is temporarily fixed to a predetermined location on the support substrate 11 via the temporary adhesive layer 12.

  Next, as shown in FIG. 14E, ball bonding is performed on the electrodes 21 of the face-up chips 20c and 20d with a conductive wire such as a gold wire or a copper wire. A conducting wire is cut into a predetermined length to form a fine metal column 71.

  Next, as shown in FIG. 14F, after covering and fixing the whole with resin, it is ground and polished until the resin layer reaches a predetermined height, and the excess portion of the resin and the holding portion of the metal structure 25 25b and excess portions of the metal pillar 71 are removed. As a result, the protrusions 25 a and 25 c of the metal structure 25 remain in the resin layer 15 as the through via 25 a and the wiring 25 c, and the conductive wire 71 that has been ball bonded remains as the via 72. In the second embodiment, since the semiconductor chips 20 are three-dimensionally stacked in one pseudo wafer, the thickness of the resin layer 15 is increased. In this case, when a via hole is formed by a conventional laser drill, the via diameter increases and the via occupation area increases, but in the second embodiment, a metal structure molded in advance to a predetermined diameter and a predetermined height. Since the body 25 is used, even when the resin layer 15 becomes thick, fine vias can be formed without disconnection.

  Next, as shown in FIG. 14G, wirings 75 are formed on the vias 25a and vias 72 that appear on the polished surface, and any vias are electrically connected.

  Next, as shown in FIG. 14H, the temporary adhesive layer 12 is denatured by heat or ultraviolet rays, and the resin layer 15 in which the semiconductor chip 20, the wiring 75, and the vias 25 a and 72 are embedded is peeled from the support substrate 11. . Thereby, a pseudo wafer 79 in which a plurality of semiconductor chips 20a to 20d are arranged at a predetermined arrangement and interval is obtained.

  Next, as shown in FIG. 14I, the peeled pseudo wafer 79 is turned upside down, and the surface on which the wiring 75 is formed is faced down, and temporarily fixed onto the new support substrate 81 by the temporary adhesive layer 82. As a result, the electrodes 21 of the semiconductor chips 20 a and 20 b initially arranged face down are positioned on the surface of the resin layer 15.

  Next, as shown in FIG. 14J, a wiring 78 that connects the arbitrary electrodes 21 of the chips 20a and 20b, and a wiring 78 that connects the through via 25a and the electrode 21 are formed.

  Finally, as shown in FIG. 14K, the temporary adhesive layer 82 is denatured by heat or ultraviolet rays, and the entire resin layer 15 is peeled off from the support substrate 81, whereby a pseudo wafer 80 having wiring patterns formed on both sides is obtained. . In the pseudo wafer 80, as shown in FIG. 7, a region where a plurality of semiconductor chips, vias, and wirings are arranged in a predetermined pattern is repeatedly arranged on the wafer counter. A difference from FIG. 7 is that a wiring pattern (a wiring pattern other than the wiring 25 c derived from the metal structure 25) is also formed on the back surface of the pseudo wafer module cut out from the pseudo wafer 80. By cutting out the pseudo wafer module from the pseudo wafer 80, it is possible to efficiently manufacture a module with high mounting density in which non-defective LSIs are connected by fine through vias and wiring.

  According to the semiconductor device manufacturing method of the first embodiment and the second embodiment described above, a fine through via can be formed on a resin-based pseudo wafer regardless of the thickness of the wafer. Unlike the conventional method, it is not necessary to form a via hole in the resin layer with a laser or the like, and it is not necessary to fill the hole with a conductor. Since fine vias can be formed as designed, LSIs can be arranged at high density. By stacking pseudo wafer modules in which LSIs are arranged at a high density in a three-dimensional manner, a semiconductor device with an even higher mounting density is realized.

  By using a metal structure that includes not only a portion that becomes a through via but also a protrusion that becomes a wiring in advance, it becomes possible to simultaneously form a through via and a wiring on the polished surface by grinding and polishing the resin layer. . The height of the metal structure is appropriately designed according to the amount to be polished. By grinding and polishing the metal structure straddling the chip, it is possible to form a wiring over the back surface of the chip.

  Since the metal structure is prepared in advance, the metal structure can be inspected in advance, and the occurrence of defects due to via formation can be prevented. When the metal structure is disposed so as to straddle the chip and then polished, a wiring over the back surface of the chip can be provided.

The following notes are presented for the above explanation.
(Appendix 1)
A plurality of semiconductor chips and a metal structure having a plurality of protrusions are arranged at predetermined locations on the support substrate,
Covering and solidifying the plurality of semiconductor chips and the metal structure with resin,
Removing a part of the solidified resin and a part of the metal structure, flattening, exposing the protrusion of the metal structure as a through via;
The resin layer in which the semiconductor chip and the through via are embedded is peeled from the support substrate,
A method for manufacturing a semiconductor device, comprising: forming a predetermined wiring pattern on the peeling surface to complete a pseudo wafer.
(Appendix 2)
The metal structure has a flat holding portion and the plurality of protrusions extending in a vertical direction from the holding portion, and the holding portion is removed and the protrusion is exposed by the planarization. A manufacturing method of a semiconductor device according to attachment 1.
(Appendix 3)
The metal structure has a first protrusion for a via that extends in a vertical direction from the holding part and a second protrusion for a wiring that protrudes in a vertical direction from the holding part. 3. The method of manufacturing a semiconductor device according to appendix 2, wherein the first protrusion and the second protrusion are exposed as the through via and the wiring, respectively, by removing a portion.
(Appendix 4)
3. The semiconductor device manufacturing method according to claim 2, wherein the metal structure is a lead frame, and the flat holding portion of the lead frame is removed by the planarization, and the terminal is exposed as the through via. Method.
(Appendix 5)
The tip of the plurality of terminals of the lead frame is fixed in advance at a predetermined position by a resin layer, and the fixed lead frame is disposed at a predetermined position on the support substrate. 5. A method for manufacturing a semiconductor device according to 4.
(Appendix 6)
In the metal structure, a film in which an insulating layer is formed on one surface of a metal foil is processed into a pattern in which the plurality of terminals extend from the holding portion, and the surface on which the insulating layer is formed is on the outside. The manufacturing method of a semiconductor device according to appendix 2, wherein the plurality of terminals are manufactured by being bent perpendicularly to the holding portion.
(Appendix 7)
The method of manufacturing a semiconductor device according to appendix 6, wherein the metal structure is held between the plurality of semiconductor chips by utilizing elasticity of the bent terminals.
(Appendix 8)
The semiconductor chip includes a first semiconductor chip disposed on the support substrate with an electrode surface facing downward, and a wiring pattern is formed on the peeling surface between the electrodes of the semiconductor chip and / or the electrodes. The method for manufacturing a semiconductor device according to any one of appendices 1 to 7, wherein the semiconductor device is formed so as to be electrically connected to the through via.
(Appendix 9)
The semiconductor device according to claim 1, further comprising a step of disposing a second semiconductor chip with an electrode surface facing upward on the support substrate and / or the semiconductor chip with the electrode surface facing downward. Manufacturing method.
(Appendix 10)
Conductive ball bonding on the electrode of the second semiconductor chip, cutting the conductive wire to a predetermined length to form a metal pillar,
Covering and solidifying the first and second semiconductor chips, the metal structure, and the metal pillar with the resin,
By the planarization, the protrusions and the metal columns of the metal structure are exposed as the through vias,
The method of manufacturing a semiconductor device according to appendix 9, further comprising forming a wiring pattern for electrically connecting the through via on the exposed surface.
(Appendix 11)
The semiconductor device manufacturing method according to claim 1, further comprising a step of cutting the pseudo wafer into individual pieces having a predetermined shape to manufacture a pseudo wafer module.
(Appendix 12)
A method of manufacturing a semiconductor device, further comprising a step of three-dimensionally stacking a plurality of types of the pseudo wafer modules.
(Appendix 13)
The plurality of semiconductor chips are disposed on the support substrate via a temporary adhesive layer, and the peeling step peels the resin layer from the support substrate by applying heat or ultraviolet irradiation to the temporary adhesive layer. The method for manufacturing a semiconductor device according to any one of Appendices 1 to 12, wherein:

  The present invention can be applied to the field of manufacturing semiconductor devices on which a plurality of LSI chips are mounted. The present invention can be applied to a printed circuit board having via connection portions and wiring.

DESCRIPTION OF SYMBOLS 11 Support substrate 12 Temporary adhesion layer 15 Embedded resin layer 20, 20a-20d Semiconductor chip 21 Electrode 25, 65A, 65B Metal structure 25a, 55a, 65a 1st protrusion (protrusion for through-via)
25b, holding portion 25c, 55c second protrusion (wiring protrusion)
30, 79, 80 Pseudo wafer 45, 75, 78 Wiring 50 Semiconductor device

Claims (5)

A plurality of semiconductor chips and a metal structure having a plurality of protrusions are arranged at predetermined locations on the support substrate,
Covering and solidifying the plurality of semiconductor chips and the metal structure with resin,
Removing a part of the solidified resin and a part of the metal structure, flattening, exposing the protrusion of the metal structure as a through via;
The resin layer in which the semiconductor chip and the through via are embedded is peeled from the support substrate,
Look including the step of completing the pseudo wafer by forming a predetermined wiring pattern on the release surface,
The metal structure has a flat holding portion and the plurality of protrusions extending in a vertical direction from the holding portion, and by the planarization, the holding portion is removed and the protrusion is exposed,
In the metal structure, a film in which an insulating layer is formed on one surface of a metal foil is processed into a pattern in which the plurality of terminals extend from the holding portion, and the surface on which the insulating layer is formed is on the outside. The method for manufacturing a semiconductor device, wherein the plurality of terminals are manufactured by being bent perpendicularly to the holding portion . A plurality of semiconductor chips and a metal structure having a plurality of protrusions are arranged at predetermined locations on the support substrate,
Covering and solidifying the plurality of semiconductor chips and the metal structure with resin,
Removing a part of the solidified resin and a part of the metal structure, flattening, exposing the protrusion of the metal structure as a through via;
The resin layer in which the semiconductor chip and the through via are embedded is peeled from the support substrate,
A predetermined wiring pattern is formed on the peeling surface to complete a pseudo wafer.
Including steps,
The metal structure has a flat holding portion and the plurality of protrusions extending in a vertical direction from the holding portion, and by the planarization, the holding portion is removed and the protrusion is exposed ,
The metal structure has a first protrusion for a via that extends in a vertical direction from the holding part and a second protrusion for a wiring that protrudes in a vertical direction from the holding part. 1 of the protrusion and the second protrusion, the production method of the semi-conductor device you wherein the through vias and wiring are formed simultaneously. The metal structure is a lead frame, said flat holding portion of the lead frame by planarization is removed, a semiconductor according to claim 1 or 2, wherein the terminal is characterized by exposing the said through via Device manufacturing method. The semiconductor chip includes a first semiconductor chip disposed on the support substrate with an electrode surface facing downward, and a wiring pattern is formed on the peeling surface between the electrodes of the semiconductor chip and / or the electrodes. a method of manufacturing a semiconductor device according to any one of claims 1 to 3, characterized in that formed so as to electrically connect between the through via. 5. The semiconductor according to claim 4 , further comprising a step of disposing a second semiconductor chip with an electrode surface facing upward on the support substrate and / or the semiconductor chip with the electrode surface facing downward. Device manufacturing method.

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