JP5359750B2 - Optical waveguide device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical waveguide element which has an optical waveguide capable of efficiently attenuating a high order mode while suppressing the loss of a basic mode, so called an optical waveguide having low loss and a single mode. <P>SOLUTION: The optical waveguide element includes an optical waveguide which is composed of a high refractive index core and a clad having a refractive index smaller than that of the core and has at least a plurality of waveguide modes. A waveguide means which is set at an effective refractive index between the basic mode and a second mode in the optical waveguide is disposed at a part or all over the full length in the longitudinal direction of the optical waveguide on one side or both sides of the outside of the optical waveguide, high order mode light is eliminated with the waveguide means and single mode light is left in the waveguide. Preferably, the optical waveguide has a rib wave guide structure 23 and the waveguide means has a slab waveguide structure 24 which has a height lower than that of the core part of the rib waveguide structure. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to an optical waveguide device, and more particularly to an optical waveguide device having a low-loss and single-mode optical waveguide.

An optical modulator using an optical waveguide formed in lithium niobate (LiNbO _3, hereinafter referred to as “LN”) has advantages such as high speed, low loss, and less distortion of the control light waveform. Compared with a device, there are disadvantages such as a large driving voltage and a large size.

  In order to overcome this disadvantage, it is necessary to increase the confinement of the optical waveguide, reduce the cross-sectional area, and increase the interaction between light and electricity. However, in a conventional ferroelectric optical device, an optical waveguide obtained by thermally diffusing impurities such as Ti on a lithium niobate substrate is used. For this reason, since such an optical waveguide has a graded refractive index profile, it is difficult to further reduce light confinement.

  On the other hand, a rib (ridge) type waveguide (see FIG. 1) in which convex ridges are formed on a high refractive index thin film epitaxially grown on a substrate used in a semiconductor or the like using dry etching or the like. Since light is confined using the difference in refractive index between the waveguide material 2 (refractive index nf), the clad 3 (refractive index nc), and the substrate 1 (refractive index ns), a waveguide with stronger confinement than a diffusion waveguide is used. Can be produced. The rib waveguide is denoted by reference numeral 20.

  In a ferroelectric such as LN, it is difficult to epitaxially grow a thin film, so that the rib structure cannot be applied. However, in recent years, it has become possible to produce a thin plate of 10 μm or less by improving the thin plate polishing technique. In addition, a rib waveguide can be manufactured by using thin plate polishing, patterning technology, and dry etching technology.

  Actually, the wavelength conversion device shown in the non-patent literature and the optical modulator shown in Patent Literature 1 are realized using the rib structure, and it is shown that the device can be more efficient and downsized than the device of the conventional structure. Yes.

  However, in the case of the rib waveguide structure, since the confinement is strong, the mode is likely to be a multimode. Therefore, a structural device is required to operate the single mode. The characteristics of the rib waveguide are basically determined by three parameters: the substrate thickness H including the height of the rib portion, the width W of the rib portion, and the height D (etching depth) of the rib portion.

There are roughly three methods for making a single mode waveguide with a rib structure as follows.
(1) The waveguide structure is made extremely small.
(2) The height D of the rib portion is made low and the width W of the rib portion is made narrow so as to satisfy the single mode condition. (See Non-Patent Document 2)
(3) The second and subsequent modes are set as leaky modes so that the effective length is not propagated, thereby effectively setting the single mode.

  The method (1) is applied to a Si fine wire optical waveguide, but it is necessary to improve the processing accuracy, and at least a ferroelectric such as LN has not reached a practical level. In the method (2), the condition for single mode is the direction of weakening the light confinement as shown in FIG. 2. For example, when considering application to an optical modulator, the half-wave voltage Vπ The direction in which good characteristics such as reduction and loss reduction at the bend in the waveguide (the loss is small even with a smaller radius of curvature) is a multimode condition, which is the opposite of the single mode condition. Become. For this reason, the merit which makes it a rib structure cannot be acquired so much.

  As a method of the above (3), in Patent Document 2, as shown in FIG. 3, a slab waveguide 22 having the same height as the rib waveguide is disposed outside the two groove portions on both sides of the rib waveguide 21. A method has been proposed in which the above-described structure is provided on the entire length or a part of the rib waveguide, and the higher-order mode is coupled to the slab waveguide mode to be attenuated (see Patent Document 2). This method takes advantage of the fact that the higher-order mode has a larger spread of the electromagnetic field profile than the fundamental mode, and has a waveguide mode refractive index higher than the fundamental mode and higher-order mode refractive index of the rib waveguide. By placing the slab waveguide close to the region where the fundamental mode is sufficiently attenuated and the higher-order mode is not attenuated, the coupling between the slab waveguide and the higher-order mode is large. Can be reduced, and as a result, only higher-order modes can be attenuated.

That is, in the method shown in Patent Document 2, the higher-order mode is attenuated by coupling the higher-order mode of the rib waveguide to the modes (radiation modes) of the slab waveguides on both sides. Is based.
(A) Since the mode (effective) refractive index of the slab waveguide is higher than the fundamental mode and higher-order mode refractive index of the rib waveguide, the light easily leaks from the rib waveguide to the slab waveguide. .
(B) In the fundamental mode and higher-order mode of the rib waveguide, the spread of the electromagnetic field profile is larger in the higher-order mode.
(C) Therefore, in the fundamental mode / radiation mode coupling and the higher order mode / radiation mode coupling, the latter is larger, and the difference can be utilized to attenuate the higher order mode.

  However, in the method shown in Patent Document 2, the higher-order mode suppression ratio with respect to the fundamental mode is determined in principle by the structure, and a value higher than that cannot be obtained. Therefore, there is a problem that the loss of the fundamental mode is increased, and conversely, the higher-order mode is not sufficiently suppressed.

JP 2008-89936 A Japanese Patent Application Laid-Open No. 2004-219751

R. Kou, S. Kurimura, K. Kikuchi, A. Terasaki, H. Nakajima, K. Kondou, and J. Ichikawa, "Uniformity of 50 mm-Long Quasi-Phase-Matched Adhered Ridge Waveguide, CLEO 2009 CThD1 R. A. Soref, J. Schmidtchen, and K. Petermann, “Large Single-ModeRib Waveguides in GeSi-Si and Si-on-SiO2”, IEEE Journal of Quantum Electronics, Vol. 27, No. 8, 1991

  The problem to be solved by the present invention is an optical waveguide capable of solving the above-described problems and efficiently attenuating higher-order modes while suppressing loss of the fundamental mode, so-called low-loss and simpler. To provide an optical waveguide device having an optical waveguide of one mode.

In order to solve the above problems, an invention according to claim 1 is an optical waveguide device including an optical waveguide having a high refractive index core and a cladding having a lower refractive index than the core and having at least a plurality of waveguide modes. The optical waveguide has a rib waveguide structure, and extends between a fundamental mode and a second mode of the optical waveguide on one side or both sides outside the optical waveguide over a part or the entire length of the optical waveguide. A waveguide means set to an effective refractive index is arranged, and the waveguide means has a slab waveguide structure lower than the height of the core portion of the rib waveguide, and removes higher-order mode light by the waveguide means . , Wherein single mode light is left in the optical waveguide.

The invention according to claim 2 is the optical waveguide element according to claim 1 , wherein a trench having a width of 1 to 10 μm is formed between the rib waveguide structure and the slab waveguide structure. Features.

The invention according to claim 3 is the optical waveguide element according to claim 1 , wherein the refractive index of the medium constituting the rib waveguide structure is 2 or more.

The invention according to claim 4 is the optical waveguide element according to claim 3 , wherein the medium constituting the rib waveguide structure is lithium niobate.

According to a fifth aspect of the present invention, in the optical waveguide device according to any one of the first to fourth aspects, the plurality of waveguide means are discretely arranged in the longitudinal direction of the optical waveguide. And

  According to the first aspect of the present invention, in an optical waveguide element comprising an optical waveguide having a high refractive index core and a clad having a lower refractive index than the core and having at least a plurality of waveguide modes, the longitudinal direction of the optical waveguide A waveguide means set to an effective refractive index between the fundamental mode and the second mode in the optical waveguide is arranged on one side or both sides outside the optical waveguide over a part or the entire length of the optical waveguide. Since the high-order mode light is removed by the wave means and the single-mode light is left in the optical waveguide, it is possible to provide an optical waveguide device having a low-loss and single-mode optical waveguide.

Further, according to the invention of claim 1 , the optical waveguide has a rib waveguide structure, and the waveguide means has a slab waveguide structure lower than the height of the core portion of the rib waveguide structure. A single mode optical waveguide device can be provided.

According to the invention of claim 2 , since a trench having a width of 1 to 10 μm is formed between the rib waveguide structure and the slab waveguide structure, the rib waveguide structure and the slab waveguide structure are clearly defined. It is possible to distinguish, and by adjusting the width of the trench, high-order mode light can be efficiently removed. In addition, by setting the width of the trench to 1 to 10 μm, it is possible to process and form a stable trench while maintaining high-order mode light removal efficiency.

According to the third aspect of the present invention, since the refractive index of the medium constituting the rib waveguide structure is 2 or more, it is possible to improve the optical waveguide element in which light confinement is strong and becomes multimode to single mode. Become.

According to the fourth aspect of the present invention, since the medium constituting the rib waveguide structure is lithium niobate, the optical waveguide element of the present invention can be applied to an optical modulator or the like.

According to the fifth aspect of the present invention, since the plurality of waveguide means are discretely arranged in the longitudinal direction of the optical waveguide, this discontinuity causes connection loss, and more high-order mode light is generated. It becomes possible to remove efficiently.

It is a figure which shows the basic structure of a rib type | mold waveguide. It is a figure explaining the single mode conditions regarding TM mode in the basic structure (substrate thickness of 4 micrometers) of the rib of a thin plate shown in FIG. As shown in Patent Document 2, it is a diagram illustrating a slab waveguide structure for removing higher-order mode light. It is a figure explaining the rib structure which concerns on the optical waveguide element of this invention. It is a figure explaining the boundary conditions of the simulation using the basic structure of a rib. It is a graph which shows the calculation result which concerns on the lowest order (basic mode) effective refractive index of a slab waveguide. It is a figure explaining the boundary conditions of the simulation using the rib structure which concerns on the optical waveguide element of this invention. It is a simulation result and is a figure which shows the distribution state of each mode light, (a) Fundamental mode light in a rib basic structure, (b) Fundamental mode light in the structure of this invention, (c) Higher-order mode in a rib basic structure Light (d) shows higher order mode light in the structure of the present invention. It is sectional drawing which shows an example of the optical waveguide element of this invention.

Hereinafter, the control method of the optical receiver of the present invention will be described in detail with reference to preferred examples.
The present invention provides an optical waveguide element comprising an optical waveguide having a high refractive index core and a clad having a lower refractive index than the core, and having at least a plurality of waveguide modes. Over the entire length, waveguide means set to an effective refractive index between the fundamental mode and the second mode in the optical waveguide is disposed on one side or both sides outside the optical waveguide. Next mode light is removed, and single mode light is left in the optical waveguide.

  In the present invention, the “waveguide means set to the effective refractive index between the fundamental mode and the second mode in the optical waveguide” means the waveguide means arranged on one side or both sides outside the optical waveguide of interest. This means that the effective refractive index is set to a value between the effective refractive index of the fundamental mode and the effective refractive index of the second higher-order mode in the optical waveguide. As an effective refractive index adjustment method, not only a method of adjusting the height of a waveguide such as a slab waveguide, which will be described later, but also the optical waveguide is doped with a high refractive material, or a slab waveguide. A method of reducing the refractive index by doping MgO or the like into a member, or forming a member made of a low refractive index material lower than the substrate constituting the optical waveguide by forming the optical waveguide with a ridge-type waveguide, Various methods such as a method of arranging them so as to be sandwiched can be adopted.

  The problem with the conventional rib structure as in Patent Document 2 is that the lowest order effective refractive index of the slab waveguide is higher than the effective refractive index of the fundamental mode of the rib waveguide. Therefore, in the present invention, if the effective refractive index of the lowest order mode of the slab waveguide structure is adjusted to be smaller than the effective refractive index of the fundamental mode of the rib waveguide structure and larger than the refractive index of the higher order mode, Only higher-order modes can be moved and coupled from the rib waveguide structure to the slab waveguide structure.

  The effective refractive index of the slab waveguide structure can be lowered by reducing the thickness and weakening the confinement of the slab waveguide. That is, as shown in FIG. 4, the rib waveguide structure 23 has a slab waveguide portion 24 that is lower than the rib waveguide outside the concave portions on both sides of the rib waveguide structure 23. Basically, the thickness h including the slab waveguide structure is smaller than the substrate thickness H including the rib waveguide structure.

  With this structure, the rib waveguide 23 maintains a waveguide structure with respect to the slab waveguide 24, so that the fundamental mode light of the rib waveguide is not attenuated, while the higher-order mode light is not guided by the rib waveguide. It becomes easy to leak into the slab waveguide 24 having an effective refractive index higher than that of the waveguide 23. As a result, the fundamental mode light is not attenuated in the rib waveguide, but only the higher-order mode light can be attenuated, and a low-loss single-mode optical waveguide can be formed.

Next, in order to confirm the effect of the optical waveguide device of the present invention, a simulation was performed under the following conditions. As a comparison object with the present invention, a rib waveguide (rib basic structure) having a single-peak rib portion as shown in FIG. 1 was used.
(Simulation conditions (1))
Working wavelength: 1.55 μm
Refractive index of waveguide portion (nf): 2.13 (refractive index for extraordinary rays of LiNbO _{3. In} this model, a Z plate was used, and the direction of light deflection was perpendicular to the substrate (TM mode).)
Upper clad (nc) and lower clad refractive index (ns): 1.45 (assuming SiO ₂ as upper clad and adhesive as lower clad)
Rib top width (W): 4 μm
Rib height (D): 2 μm
Substrate thickness including rib waveguide (H): 4 μm
Rib side angle of inclination: 70 °

Under the above simulation conditions, the rib basic structure of FIG. 1 is multimode, and the effective refractive index of each mode is as follows by mode analysis.
-Basic mode effective refractive index: 2.11775674
-Second mode effective refractive index: 2.10682458
FIG. 5 illustrates a simulation model corresponding to FIG.

  On the other hand, the result of obtaining the effective refractive index of the slab waveguide by mode analysis is shown in FIG. From the result of FIG. 6, when the substrate thickness (corresponding to the thickness h of the substrate including the slab waveguide of FIG. 4) is in the range of 2.1 to 3.0 μm, the lowest effective refractive index of the slab waveguide is It can be seen that the rib waveguide (thickness 4 μm) is set between the fundamental mode (2.11775674) and the higher order mode (2.10682458).

  Next, the width of a trench that is a groove between the rib waveguide 23 and the slab waveguide 24 of FIG. 4 will be examined. Basically, the coupling coefficient increases when the rib waveguide 23 and the slab waveguide 24 are close to each other, so that the higher-order mode light in the rib waveguide is attenuated earlier. However, if the two are too close, it becomes difficult to process and form the trench. For example, the trench depth becomes shallow and the confinement efficiency of the fundamental mode light deteriorates. Therefore, it is preferable to set the trench width in the range of 1 μm or more and 10 μm or less in order to obtain high-order mode light attenuation that can be actually manufactured and is sufficient for practical use.

FIG. 7 shows a boundary condition (simulation model) for performing simulation on the optical waveguide device of the present invention shown in FIG. Various conditions such as the refractive index are the same as described in the above “Simulation Conditions (Part 1)” except that the following conditions are added.
(Simulation conditions (2))
Substrate thickness including slab waveguide (h): 2.5 μm
Trench width: 2 μm

  FIG. 8 shows the result of the simulation, and shows the distribution of the fundamental mode light and the higher order mode light in the rib basic structure of FIG. 5 and the structure of the present invention of FIG. In particular, (a) is a distribution state of fundamental mode light in the rib basic structure, (b) is a distribution state of fundamental mode light in the structure of the present invention, (c) is a distribution state of higher-order mode light in the rib basic structure, ( d) shows the distribution state of higher-order mode light in the structure of the present invention.

  As the simulation results show, the fundamental mode light of the rib waveguide structure is not affected by the slab waveguide structure according to the present invention, but the mode distribution shape of the high-order mode light is deformed and the slab waveguide is deformed. It can be seen that mobile coupling to the structure has occurred.

  Furthermore, by disposing a plurality of slab waveguide structures discretely along the rib waveguide structure, the higher-order mode light causes connection loss due to its discontinuity. Accordingly, by providing a plurality of locations with and without a slab waveguide structure, higher-order mode light can be attenuated more quickly.

  FIG. 9 is a sectional view showing an embodiment of the optical waveguide device of the present invention. In order to form the optical waveguide device of FIG. 9, a conventional process technique can be used, and an example of a manufacturing procedure is shown below.

(Procedure for creating an optical waveguide device)
(1) Thinning of substrate A Z-cut type LiNbO ₃ substrate (LN substrate) is thinned by polishing. The substrate thickness H is about 4 μm.
(2) Joining of Reinforcing Substrate etc. The LN substrate (thin plate) 40 is bonded to the reinforcing substrate 60 with the adhesive 50. An LN substrate can be used as the reinforcing substrate.
(3) Fabrication of rib waveguide The trench 80 is formed by etching (etching depth is D) or machining. The width W of the rib waveguide can be set to 4 μm, and the inclination angle of the rib side surface can be set to 70 °. The height D of the ridge portion is about 2 μm.

(4) Etching the slab waveguide In order to adjust the effective refractive index of the slab waveguide 42, the height of the slab waveguide is reduced by etching by a difference f compared to the rib waveguide. In the etching method, a portion not desired to be etched, such as a rib waveguide and a trench portion, is covered with a resist by a conventional photolithographic technique, and the entire substrate is etched until a desired thickness is obtained. Etching can be dry etching or wet etching. The thickness f to be etched is about 1.5 μm or less.

(5) SiO ₂ Film Formation An SiO ₂ film is formed so as to cover the rib waveguide 41, the slab waveguide 42, and the trench part 80. This SiO ₂ film functions as a clad.

In the above description, a LiNbO ₃ substrate is exemplified as a medium constituting the rib waveguide. However, the optical waveguide element of the present invention is not limited to this, and a dielectric such as PLZT and LiTa ₃ , It can also be applied to semiconductors such as InP and Si. When these various materials are used as an optical waveguide such as a rib waveguide or a substrate for forming the optical waveguide, the height of the slab waveguide and the refractive index of the optical waveguide or the slab waveguide are adjusted as in the case of LN. The effective refractive index of the waveguide means arranged on one or both sides of the outside of the optical waveguide of interest due to doping of the material, etc., is determined between the fundamental mode and the second higher-order mode in the optical waveguide. It can be set to a value. In addition, as described above, high-order mode light can be more efficiently removed by considering the width of the trench portion.

  In the optical waveguide device of the present invention, it is preferable to use a waveguide material having a refractive index of 2.0 or more for the medium constituting the core of the rib waveguide. In the rib-type waveguide having such a refractive index, a waveguide condition having a low loss and a high-order mode suppression ratio, that is, a single-mode operation is difficult. A rib-type optical waveguide capable of single mode operation can be obtained with sufficient confinement.

  As described above, according to the present invention, an optical waveguide capable of efficiently attenuating higher-order modes while suppressing fundamental mode loss, that is, a so-called low-loss single-mode optical waveguide is provided. An optical waveguide element can be provided.

1, 3 Medium serving as cladding 2 Medium serving as core 40 LN substrate 50 Adhesive 60 Reinforcement substrate 20, 21, 23, 41 Rib waveguide 22, 24, 42 Slab waveguide 70 SiO ₂ film 80 Trench portion

Claims (5)

In an optical waveguide device comprising an optical waveguide having a high refractive index core and a cladding having a lower refractive index than the core and having at least a plurality of waveguide modes,
The optical waveguide has a rib waveguide structure,
Waveguide means set to an effective refractive index between the fundamental mode and the second mode in the optical waveguide on one side or both sides outside the optical waveguide over a part or the entire length of the optical waveguide. Is placed ,
The waveguide means is a slab waveguide structure lower than the height of the core of the rib waveguide;
Removing the high-order mode light by conductor splitting means, the optical waveguide device characterized by leaving the single mode light to the optical waveguide. 2. The optical waveguide element according to claim 1 , wherein a trench having a width of 1 to 10 [mu] m is formed between the rib waveguide structure and the slab waveguide structure. 2. The optical waveguide element according to claim 1 , wherein a refractive index of a medium constituting the rib waveguide structure is 2 or more. 4. The optical waveguide device according to claim 3 , wherein the medium constituting the rib waveguide structure is lithium niobate. In the optical waveguide device according to any one of claims 1 to 4, over the longitudinal direction of the optical waveguide, the optical waveguide device in which a plurality of conductor-wave means, characterized in that it is arranged discretely.

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