JP5352246B2 - Persulfuric acid production apparatus and persulfuric acid production method - Google Patents

Description

  The present invention relates to an apparatus and a method for producing persulfuric acid dissolved water useful as an oxidizing agent or the like by an electrochemical technique.

  Wafer cleaning in the VLSI manufacturing process is a process for stripping and cleaning resist residues, fine particles, metals, natural oxide films, etc. For example, ozone gas is blown into concentrated sulfuric acid / hydrogen peroxide mixed solution (SPM) or concentrated sulfuric acid. A method of cleaning a wafer using a solution (SOM) or the like is often used. Thus, when hydrogen peroxide or ozone is added to (high concentration) sulfuric acid, the sulfuric acid is oxidized to produce persulfuric acid. And it is known that persulfuric acid is useful for cleaning the wafer and the like because it generates a strong oxidizing power when self-decomposing.

  In the cleaning method using SPM, the generated persulfuric acid is reduced in oxidizing power with use due to autolysis or the like. For this reason, it is necessary to repeatedly supply hydrogen peroxide water during cleaning. Further, when hydrogen peroxide solution is replenished, the sulfuric acid concentration in the SPM is reduced. Therefore, when the sulfuric acid concentration falls below a predetermined concentration, it is necessary to replace it with new high-concentration sulfuric acid.

  In the cleaning method using SPM, the amount of persulfuric acid generated by adding high-concentration sulfuric acid that has filled the cleaning tank once and hydrogen peroxide water several times is small. Further, in the cleaning method using SOM, the generation efficiency of persulfuric acid with respect to the ozone blowing amount is very low. Therefore, in these methods, since the concentration of persulfuric acid produced is limited, the cleaning effect is also limited.

  As a method for producing persulfuric acid, in addition to the above method, a method for producing persulfuric acid by electrolyzing a sulfuric acid solution is known (for example, see Patent Documents 1 to 4). Such an electrochemical method can increase the concentration of persulfuric acid as compared with the above method, and can also reduce the amount of chemicals used.

  In addition, in a method for producing persulfuric acid by electrolyzing a sulfuric acid solution, a method for increasing the production efficiency of persulfuric acid by coexisting alkali metal ions and ammonium ions in the sulfuric acid solution is known (for example, patents). Reference 5 and Non-Patent Document 1).

JP 2001-192874 A Special table 2003-511555 gazette JP 2006-111943 A JP 2008-19507 A JP-A-55-34700

Balej J, et al., Collect. Czech. Chem. Commun. 1980, vol. 45, 8, p2272-2282

  Incidentally, in order to enhance the peeling effect of the resist film formed on the wafer, it is desired that not only the persulfuric acid concentration but also the sulfuric acid concentration is high. However, the conventional electrochemical method as described above has a problem that current efficiency for producing persulfuric acid decreases when the sulfuric acid concentration is high.

  Accordingly, an object of the present invention is to provide a persulfuric acid production apparatus and a persulfuric acid production method capable of producing persulfuric acid-dissolved water in which sulfuric acid and persulfuric acid coexist at a high concentration.

The present invention comprises an anode, a cathode, a sulfuric acid solution supply means for supplying a sulfuric acid solution to the anode side, and an ammonia supply means for supplying a gas containing ammonia to the sulfuric acid solution to generate ammonium sulfate, A persulfuric acid production apparatus for producing a persulfuric acid-dissolved water by passing an electric current between the anode and the cathode and electrolyzing the sulfuric acid solution, wherein all of the sulfuric acid solution supplied by the sulfuric acid solution supply means The sulfuric acid concentration is in the range of 6.5 to 12 mol / L, and the range of 0.01 to 3 mol / L is derived from ammonium sulfate produced by the supply of ammonia-containing gas in the ammonia supply means. .

Further, the present invention generates an ammonium sulfate by supplying a gas containing ammonia sulfate solution, supplying a sulfuric acid solution containing the ammonium sulfate on at least the anode side, a current is supplied between the anode and the cathode, wherein the sulfate A persulfuric acid production method for producing persulfuric acid-dissolved water by electrolyzing a solution, wherein the sulfuric acid solution has a total sulfuric acid concentration in the range of 6.5 to 12 mol / L, of which 0.01 to 3 mol / L The range of L is derived from ammonium sulfate.

  According to the present invention, it is possible to produce persulfuric acid-dissolved water in which sulfuric acid and persulfuric acid coexist at a high concentration.

It is a schematic diagram which shows an example of a structure of the persulfuric acid manufacturing apparatus which concerns on embodiment of this invention. It is a schematic diagram which shows an example of a structure of the persulfuric acid manufacturing apparatus which concerns on other embodiment of this invention. It is a schematic diagram which shows an example of a structure of the persulfuric acid manufacturing apparatus which concerns on other embodiment of this invention. It is a diagram showing the relationship between the current amount and the persulfate (H 2 _S 2 _{O 8)} concentration in Example 1 and Comparative Example 1. It is a diagram showing the relationship between the current amount and the persulfate (H 2 _S 2 _{O 8)} concentration in Example 2 and Comparative Example 2. It is a diagram showing the relationship between the current amount and the persulfate (H 2 _S 2 _{O 8)} concentration in Example 3 and Comparative Example 3. Is a diagram showing the relationship between the current amount and the persulfate _{(H 2} S _{2 O 8)} concentration in Examples 4 to 8.

  Embodiments of the present invention will be described below. This embodiment is an example for carrying out the present invention, and the present invention is not limited to this embodiment.

  FIG. 1 is a schematic diagram showing an example of the configuration of a persulfuric acid production apparatus according to an embodiment of the present invention. As shown in FIG. 1, the persulfuric acid production apparatus 1 includes an electrolytic cell 10, an anolyte tank 12, an anolyte pump 14, and an anolyte supply line 16, a sulfuric acid solution supply means, a persulfuric acid discharge line 18, and a catholyte tank. 20, a catholyte pump 22, a catholyte supply line 24, and a catholyte discharge line 26.

  The electrolytic cell 10 includes a diaphragm 28 such as an ion exchange membrane, an anode 30, and a cathode 32. The electrolytic cell 10 is partitioned into an anode chamber 34 and a cathode chamber 36 by a diaphragm 28. The anode 30 is disposed in the anode chamber 34, and the cathode 32 is disposed in the cathode chamber 36. The anode 30 and the cathode 32 are connected to a power source 40 outside the electrolytic cell 10 by conducting wires.

  In the present embodiment, the sulfuric acid solution supply means is constituted by the anolyte tank 12, the anolyte pump 14, and the anolyte supply line 16. On the anode side, a sulfuric acid solution (anolyte) containing ammonium sulfate described below is provided. If it is the structure which can supply this, it will not necessarily restrict | limit to the said structure.

  An anolyte inlet and an anolyte outlet are provided on the anode chamber 34 side of the electrolytic cell 10. The anolyte inlet of the electrolytic cell 10 and the anolyte tank 12 are connected by an anolyte supply line 16. The anolyte supply line 16 is provided with an anolyte pump 14. A persulfuric acid discharge line 18 is connected to the anolyte outlet of the electrolytic cell 10. On the other hand, the cathode chamber 36 side of the electrolytic cell 10 is provided with a catholyte inlet and a catholyte outlet. The catholyte inlet of the electrolytic cell 10 and the catholyte tank 20 are connected by a catholyte supply line 24. The catholyte supply line 24 is provided with a catholyte pump 22. A catholyte discharge line 26 is connected to the catholyte outlet of the electrolytic cell 10. In this embodiment, the persulfuric acid discharge line 18 is branched so that a part of the anolyte circulates, the branch line 18a is connected to the anolyte tank 12, and the catholyte circulates. A catholyte discharge line 26 is connected to the catholyte tank 20.

  Below, operation | movement of the persulfuric acid manufacturing apparatus 1 which concerns on this embodiment is demonstrated.

  First, the anolyte pump 14 is operated, and the anolyte is supplied from the anolyte tank 12 through the anolyte supply line 16 to the anode chamber 34 of the electrolytic cell 10. Further, the catholyte pump 22 is operated, and the catholyte is supplied from the catholyte tank 20 through the catholyte supply line 24 to the cathode chamber 36 of the electrolytic cell 10. Here, a sulfuric acid solution containing ammonium sulfate is used as the anolyte. Thereafter, when a positive voltage is applied from the power source 40 to the anode 30 and a negative voltage is applied to the cathode 32, and a current is passed between the anode 30 and the cathode 32, the following reaction mainly occurs in the anode chamber 34.

2SO ₄ ²⁻ → S ₂ O ₈ ²⁻ + 2e ⁻ (1)
2HSO ₄ ⁻ → S ₂ O ₈ ²⁻ + 2H ⁺ + 2e ⁻ (2)
HSO ₄ ⁻ + H ₂ O → HSO ₅ ⁻ + 2H ⁺ + 2e ⁻ (3)

Further, in the cathode chamber 36, the following reaction mainly occurs.
2H ⁺ + 2e ⁻ → H ₂ ↑

Then, by electrolyzing the sulfuric acid solution in this manner, persulfuric acid-dissolved water containing persulfuric acid such as peroxomonosulfuric acid (H ₂ SO ₅ ), peroxodisulfuric acid (H ₂ S ₂ O ₈ ) is obtained. The persulfuric acid-dissolved water passes through the persulfuric acid discharge line 18 and is used for cleaning wafers and the like. A part of the persulfuric acid-dissolved water is returned to the anolyte tank 12 through the branch line 18a. On the other hand, the catholyte that has passed through the cathode chamber 36 passes through the catholyte discharge line 26 and is returned to the catholyte tank 20.

  In the case of electrolyzing high-concentration sulfuric acid, normally, when a positive voltage is applied to the anode 30 and a negative voltage is applied to the cathode 32 and a current is continuously applied between the anode 30 and the cathode 32, the electrolysis voltage rises and persulfuric acid is generated. Therefore, the current efficiency is reduced, and the amount of persulfuric acid produced is reduced.

  Here, in this embodiment, the total sulfuric acid concentration in the sulfuric acid solution is in the range of 6.5 to 12 mol / L, and the range of 0.01 to 3 mol / L uses a sulfuric acid solution derived from ammonium sulfate. As a result, a decrease in current efficiency is suppressed. Moreover, ozone generation by electrolysis of water is also suppressed. As a result, persulfuric acid-dissolved water in which sulfuric acid and persulfuric acid coexist at a high concentration can be obtained. In particular, the total sulfuric acid concentration in the sulfuric acid solution is preferably in the range of 9 to 12 mol / L. When the total sulfuric acid concentration in the sulfuric acid solution is less than 6.5 mol / L, the sulfuric acid concentration in the persulfuric acid-dissolved water obtained by this embodiment is low, and the peeling effect of the resist film formed on the wafer is reduced. There is. Further, if the total sulfuric acid concentration in the sulfuric acid solution is more than 12 mol / L, the electrolytic voltage is likely to increase during sulfuric acid electrolysis, and the amount of persulfuric acid produced may decrease. In addition, when the concentration of sulfuric acid derived from ammonium sulfate is less than 0.01 mol / L, the effect of adding ammonium sulfate is weak, the electrolytic voltage increases during sulfuric acid electrolysis, and the amount of persulfuric acid produced may decrease. Moreover, even if the concentration of sulfuric acid derived from ammonium sulfate exceeds 3 mol / L, the production cost increases because the amount of persulfuric acid produced is small with respect to the amount of ammonium sulfate added.

  The sulfuric acid solution containing ammonium sulfate used as the anolyte has a total sulfuric acid concentration in the range of 6.5 to 12 mol / L, and the sulfuric acid solution contains ammonium sulfate so that the range of 0.01 to 3 mol / L is derived from ammonium sulfate. Prepared by dissolving salt. The upper limit of the ammonium sulfate concentration is in the range of 3 to 5.5 mol / L, and the lower limit is preferably 0.01 mol / L. Furthermore, the concentration of ammonium sulfate is more preferably in the range of 0.01 to 3 mol / L. Moreover, the temperature of the sulfuric acid solution containing ammonium sulfate used as the anolyte is preferably 80 ° C. or lower, more preferably 60 ° C. or lower, from the viewpoint that self-decomposition of persulfuric acid obtained by the electrolysis method of the present embodiment can be suppressed. 40 ° C. or lower is even more preferable. The temperature control method of the sulfuric acid solution is not particularly limited. For example, the sulfuric acid solution is controlled by installing a heater in the anolyte tank 12 or installing a cooler in the anolyte supply line 16.

  The catholyte used in the present embodiment may be the same sulfuric acid solution as the anolyte or a solution in which a conductive substance different from the anolyte is dissolved. In addition, when a sulfuric acid solution is used as the catholyte, it is preferable to use a sulfuric acid solution having a concentration similar to that of the sulfuric acid solution as the anolyte because it can produce more persulfuric acid. It may be a sulfuric acid solution having a concentration lower than the sulfuric acid concentration, for example, 10 wt% or less.

The electrolytic cell 10 used in this embodiment may be a two-chamber electrolytic cell partitioned into an anode chamber 34 and a cathode chamber 36 by a diaphragm 28 as shown in FIG. Good. However, in the diaphragm-type electrolytic cell, persulfate ions such as peroxomonosulfate ions (HSO ₅ ⁻ ) and peroxodisulfate ions (S ₂ O ₈ ²⁻ ) once generated at the anode 30 come into contact with the cathode 32 and sulfuric acid. Since there is a possibility of being reduced to ions, it is preferable to use a two-chamber electrolytic cell. Further, the electrolytic cell 10 is not particularly limited to a single electrode type or a bipolar type.

  As the diaphragm 28 used in the present embodiment, for example, a neutral membrane such as a trade name Poreflon or a cation exchange membrane such as a trade name Nafion, Aciplex, Flemion, or the like can be used. It is preferable to use it.

  As the anode 30 and the cathode 32 used in the present embodiment, for example, platinum, a diamond-coated electrode or the like is used, but the cathode 32 can also be a carbon, titanium, niobium, tantalum, zirconium electrode or the like. Use of carbon, titanium, niobium, tantalum, zirconium electrodes, etc. rather than platinum, diamond-coated electrodes, etc., when the concentration of sulfuric acid solution supplied to the cathode 32 can be reduced by having the diaphragm 28 However, it is preferable in terms of corrosion resistance and cost.

The distance between the anode 30 and the cathode 32 is not particularly limited, but is preferably shorter. This is because by shortening the distance between the anode 30 and the cathode 32, generation of Joule heat due to solution resistance can be suppressed, and self-decomposition of the generated persulfuric acid can be suppressed. The distance between the anode 30 and the cathode 32 is preferably in the range of 1 to 100 mm, for example. The current density between the anode 30 and the cathode 32 is not particularly limited, but is preferably in the range of 10 to 2000 mA / cm ² , for example.

  FIG. 2 is a schematic diagram showing an example of the configuration of a persulfuric acid production apparatus according to another embodiment of the present invention. In the persulfuric acid production apparatus 2 shown in FIG. 2, the same reference numerals are given to the same configurations as those of the persulfuric acid production apparatus 1 shown in FIG.

  In the apparatus shown in FIG. 1, the sulfuric acid solution containing ammonium sulfate is prepared by dissolving ammonium sulfate in sulfuric acid. However, in this method, a part of ammonium sulfate may exist as a dissolved residue in a solid form in the sulfuric acid solution. Therefore, in the following embodiment, a gas containing ammonia is supplied to the sulfuric acid solution to prepare a sulfuric acid solution containing ammonium sulfate, and then the persulfuric acid production apparatus for producing persulfuric acid-dissolved water by electrolyzing the solution. An example will be described. The following embodiments are preferable in terms of yield in wafer cleaning because ammonium sulfate can be prevented from being present in a solid state in the sulfuric acid solution.

  The persulfuric acid production apparatus 2 shown in FIG. 2 includes an electrolytic cell 10, an anolyte tank 12, an anolyte pump 14, and an anolyte supply line 16, a sulfuric acid solution supply means, a persulfuric acid discharge line 18, a catholyte tank 20, a cathode. The liquid supply device includes a liquid pump 22, a catholyte supply line 24, a catholyte discharge line 26, an air diffuser plate 42, an ammonia gas tank 44, and an ammonia gas supply line 46. The diffuser plate 42 is installed in the anolyte tank 12, and the ammonia gas tank 44 and the diffuser plate 42 are connected by an ammonia gas supply line 46.

  In the present embodiment, the ammonia-containing gas passes through the ammonia gas supply line 46 from the ammonia gas tank 44 and is released from the diffuser plate 42 to the anolyte tank 12. The ammonia-containing gas released from the diffuser plate 42 into the anolyte tank 12 becomes bubbles and comes into contact with the sulfuric acid solution, and dissolves in the sulfuric acid solution to become ammonium sulfate. In addition, the said method is an example of the ammonia gas melt | dissolution method by a bubble column type, Comprising: The structure of a bubble column type is not restrict | limited to this.

  In this embodiment, ammonia-containing gas is released into the anolyte tank 12 filled with 6.5 to 12 mol / L sulfuric acid, and 0.01 to 3 mol / L of 6.5 to 12 mol / L sulfuric acid. The sulfuric acid is derived from ammonium sulfate produced by supplying the ammonia-containing gas. By electrolyzing the sulfuric acid solution prepared by such a method, persulfuric acid-dissolved water in which sulfuric acid and persulfuric acid coexist at a high concentration can be obtained.

  FIG. 3 is a schematic diagram showing an example of the configuration of a persulfuric acid production apparatus according to another embodiment of the present invention. In the persulfuric acid production apparatus 3 shown in FIG. 3, the same components as those in the persulfuric acid production apparatus 1 shown in FIG. As shown in FIG. 3, the persulfuric acid production apparatus 3 includes an electrolytic cell 10, an anolyte tank 12, an anolyte pump 14, and an anolyte supply line 16, a sulfuric acid solution supply means, a persulfuric acid discharge line 18, and a catholyte tank. 20, an ammonia supply means having a catholyte pump 22, a catholyte supply line 24, a catholyte discharge line 26, a packed tower 48, an ammonia gas supply line 50, and an ammonia gas discharge line 52. The branch line 18 a branched from the persulfuric acid discharge line 18 is provided with a packed tower 48, an ammonia gas supply line 50 is connected to the gas supply port of the packed tower 48, and ammonia gas is connected to the gas discharge port of the packed tower 48. A discharge line 52 is connected.

  In the present embodiment, the sulfuric acid solution supplied from the branch line 18a to the packed tower 48 comes into contact with the ammonia-containing gas supplied from the ammonia gas supply line 50, and the ammonia-containing gas is dissolved in the sulfuric acid solution to become ammonium sulfate. . In addition, the said method is an example of the ammonia gas melt | dissolution method by a packed tower type, Comprising: The structure of a packed tower type is not restrict | limited to this.

  In this embodiment, ammonium sulfate produced in the packed tower 48 is supplied into the anolyte tank 12 filled with 6.5 to 12 mol / L sulfuric acid. In the present embodiment, similarly to the above, 0.01 to 3 mol / L sulfuric acid out of 6.5 to 12 mol / L sulfuric acid is derived from ammonium sulfate generated by supplying the ammonia-containing gas. By electrolyzing the sulfuric acid solution prepared by such a method, persulfuric acid-dissolved water in which sulfuric acid and persulfuric acid coexist at a high concentration can be obtained.

  In FIGS. 2 and 3, the method of dissolving ammonia gas in sulfuric acid has been described by taking the bubble column type and packed column type as examples. However, the ammonia gas dissolving method in sulfuric acid is not limited to this, for example, a spray tower It may be a formula or the like.

  Hereinafter, although an example and a comparative example are given and the present invention is explained more concretely in detail, the present invention is not limited to the following examples.

Example 1
Using the persulfuric acid production apparatus shown in FIG. 1, the sulfuric acid solution was electrolyzed to produce persulfuric acid-dissolved water. The anolyte used was a sulfuric acid solution having a total sulfuric acid concentration of 6.5 mol / L, of which 1 mol / L was derived from ammonium sulfate. As the catholyte, a 1 mol / L sulfuric acid solution was used. The anode used in the persulfuric acid production apparatus was a diamond-coated electrode, and the cathode was a zirconium electrode.

(Comparative Example 1)
In Comparative Example 1, the total sulfuric acid concentration was 6.5 mol / L, but persulfuric acid-dissolved water was produced under the same conditions as in Example 1 except that a sulfuric acid solution containing no ammonium sulfate was used.

(Example 2)
In Example 2, the total sulfuric acid concentration was 9 mol / L, and a sulfuric acid solution was electrolyzed under the same conditions as in Example 1 except that a sulfuric acid solution in which 1 mol / L was derived from ammonium sulfate was used. Sulfuric acid-dissolved water was produced.

(Comparative Example 2)
In Comparative Example 2, the total sulfuric acid concentration was 9 mol / L, but the sulfuric acid solution was electrolyzed under the same conditions as in Example 1 except that a sulfuric acid solution containing no ammonium sulfate was used. Manufactured.

(Example 3)
In Example 3, the total sulfuric acid concentration was 12 mol / L, and a sulfuric acid solution was electrolyzed under the same conditions as in Example 1 except that a sulfuric acid solution in which 1 mol / L was derived from ammonium sulfate was used. Sulfuric acid-dissolved water was produced.

(Comparative Examples 3 to 7)
In Comparative Examples 3 to 5, the total sulfuric acid concentration was 12, 13, 14 mol / L, but the sulfuric acid solution was electrolyzed under the same conditions as in Example 1 except that a sulfuric acid solution not containing ammonium sulfate was used. Thus, persulfuric acid-dissolved water was produced. In Comparative Examples 6 and 7, the total sulfuric acid concentration was 13,14 mol / L, and a sulfuric acid solution was used under the same conditions as in Example 1 except that a sulfuric acid solution in which 1 mol / L was derived from ammonium sulfate was used. Electrolysis was performed to produce persulfuric acid-dissolved water.

Table 1 summarizes the current efficiencies of Example 1 and Comparative Example 1 at an energization amount of 10 Ah / L. FIG. 4 summarizes the relationship between the amount of energization and the concentration of persulfuric acid (H ₂ S ₂ O ₈ ) in Example 1 and Comparative Example 1. Table 2 summarizes the current efficiencies of Example 2 and Comparative Example 2 at an energization amount of 10 Ah / L. FIG. 5 summarizes the relationship between the amount of energization and the concentration of persulfuric acid (H ₂ S ₂ O ₈ ) in Example 2 and Comparative Example 2. Table 3 summarizes the current efficiencies of Example 3 and Comparative Examples 3 to 7 at an energization amount of 10 Ah / L. FIG. 6 summarizes the relationship between the energization amount and the persulfuric acid (H ₂ S ₂ O ₈ ) concentration in Example 3 and Comparative Example 3.

  As can be seen from Table 1, Example 1 using a sulfuric acid solution in which 1 mol / L sulfuric acid out of the total sulfuric acid concentration of 6.5 mol / L is derived from ammonium sulfate does not contain ammonium sulfate, and the sulfuric acid concentration is 6.5 mol. The current efficiency was higher than that of Comparative Example 1 using a / L sulfuric acid solution. Further, as can be seen from FIG. 4, in Comparative Example 1, the concentration of persulfuric acid increases as the amount of energization increases, but the rate of increase decreases, whereas in Example 1, the amount of energization increases even when the amount of energization increases. The increase rate hardly decreased. Similarly, as can be seen from Tables 2 and 3 and FIGS. 5 and 6, Example 2 using a sulfuric acid solution in which 1 mol / L of sulfuric acid having a total sulfuric acid concentration of 9 mol / L was derived from ammonium sulfate did not contain ammonium sulfate. Comparison with Comparative Example 2 using a sulfuric acid solution having a sulfuric acid concentration of 9 mol / L, and Example 3 using a sulfuric acid solution in which 1 mol / L sulfuric acid out of the total sulfuric acid concentration of 12 mol / L is derived from ammonium sulfate and no ammonium sulfate In comparison with Comparative Example 3 using a sulfuric acid solution having a sulfuric acid concentration of 12 mol / L, similar results were shown. Further, as can be seen from Table 3, in Comparative Examples 6 and 7 using a sulfuric acid solution having a total sulfuric acid concentration of more than 12 mol / L, it was found that an increase in electrolytic voltage occurred during the production of persulfuric acid even when ammonium sulfate was added. It was.

(Examples 4 to 8)
In Examples 4 to 8, the total sulfuric acid concentration is 12 mol / L, and 0.01, 0.05, 0.2, 2, 3 mol / L of which uses a sulfuric acid solution derived from ammonium sulfate, Under the same conditions as in Example 1, the sulfuric acid solution was electrolyzed to produce persulfuric acid-dissolved water.

Table 4 summarizes the current efficiencies of Examples 4 to 8 at an energization amount of 10 Ah / L. FIG. 7 summarizes the relationship between the amount of energization and the concentration of persulfuric acid (H ₂ S ₂ O ₈ ) in Examples 4 to 8.

  As can be seen from Tables 3 and 4, Examples 4 to 8 using a sulfuric acid solution in which 0.01 to 3 mol / L of sulfuric acid was derived from ammonium sulfate out of a total sulfuric acid concentration of 12 mol / L were free of ammonium sulfate. The current efficiency was higher than that of Comparative Example 3 using a sulfuric acid solution having a sulfuric acid concentration of 12 mol / L. Moreover, when Examples 4-8 were compared, the high current efficiency was shown by increasing the addition amount of ammonium sulfate. Furthermore, as can be seen from FIG. 7, the amount of persulfuric acid produced was increased by increasing the amount of ammonium sulfate added. However, Example 7 using a sulfuric acid solution in which 2 mol / L of sulfuric acid in a total sulfuric acid concentration of 12 mol / L is derived from ammonium sulfate and sulfuric acid in which 3 mol / L of sulfuric acid in a total sulfuric acid concentration of 12 mol / L is derived from ammonium sulfate The current efficiency and the amount of persulfuric acid produced were almost the same as in Example 8 using the solution. That is, it was found that even when ammonium sulfate was further added, current efficiency and persulfuric acid production were not improved.

  From the above, to obtain persulfuric acid-dissolved water in which sulfuric acid and persulfuric acid coexist at a high concentration during the production of persulfuric acid, the total sulfuric acid concentration of the sulfuric acid solution should be in the range of 6.5 to 12 mol / L. It is appropriate that sulfuric acid in the range of 0.01 to 3 mol / L is derived from ammonium sulfate.

  1 to 3 Persulfuric acid production apparatus, 10 electrolytic cell, 12 anolyte tank, 14 anolyte pump, 16 anolyte supply line, 18 persulfate discharge line, 18a branch line, 20 catholyte tank, 22 catholyte pump, 24 cathode Liquid supply line, 26 catholyte discharge line, 28 diaphragm, 30 anode, 32 cathode, 34 anode chamber, 36 cathode chamber, 40 power supply, 42 diffuser plate, 44 ammonia gas tank, 46 ammonia gas supply line, 48 packed tower, 50 Ammonia gas supply line, 52 Ammonia gas discharge line.

Claims (2)

An anode, a cathode, a sulfuric acid solution supplying means for supplying a sulfuric acid solution to the anode side, and an ammonia supplying means for supplying ammonium-containing gas to the sulfuric acid solution to generate ammonium sulfate. A persulfuric acid production apparatus for producing persulfuric acid-dissolved water by passing an electric current between the cathode and electrolyzing the sulfuric acid solution,
The total sulfuric acid concentration of the sulfuric acid solution supplied by the sulfuric acid solution supply means is in the range of 6.5 to 12 mol / L, and the range of 0.01 to 3 mol / L is ammonia in the ammonia supply means. An apparatus for producing persulfuric acid, which is derived from ammonium sulfate produced by gas supply containing Generate ammonium sulfate by supplying a gas containing ammonia sulfate solution, supplying a sulfuric acid solution containing the ammonium sulfate on at least the anode side, a current is supplied between the anode and the cathode, and electrolysis of the sulfuric acid solution, A persulfuric acid production method for producing persulfuric acid-dissolved water,
The total sulfuric acid concentration of the sulfuric acid solution is in the range of 6.5 to 12 mol / L, and the range of 0.01 to 3 mol / L is derived from ammonium sulfate.

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