JP5138443B2 - XY stage device - Google Patents

Description

  The present invention particularly relates to an XY stage apparatus used for manufacturing a large liquid crystal display or the like.

As a conventional technology in such a field, there is JP-A-2007-216349. The XY stage apparatus described in this publication includes a pair of stone surface plates extending in the Y-axis (first axis) direction, a pair of guides extending in the Y-axis direction on the upper surface of each stone surface plate, and the respective guides A pair of sliders (first sliders) having a U-shaped cross section that move along the upper surface of the slider, and an air pad (first slider) that is provided on the upper wall portion of each slider and supports the slider by ejecting air toward the upper surface of the guide Gas bearing), a Y stage (guide member) extending in the X-axis (second axis) direction and having both ends connected to the respective sliders, and an X stage (second slider) moving along the Y stage An air pad that is provided at the four corners of the lower surface of the X stage and blows air toward the upper surface of each stone surface plate to support the X stage; Suction pad that vacuum-sucks the object (object), and an air pad (second gas bearing) that is provided at the four corners of the lower surface of the suction disk and blows air to the upper surface of each stone surface plate to support the suction disk And. With such a configuration, the suction disk and the workpiece move in a horizontal plane as the X stage and the Y stage move.
JP 2007-216349 A

  Here, in the above XY stage apparatus, a space for providing a guide dedicated to the slider must be secured on the upper surface of the stone surface plate, and the work becomes larger due to the enlargement of the liquid crystal display or the like in recent years. Because of this tendency, the stone surface plate must be enlarged along with them, causing problems in terms of securing stone, processing stones, transporting stones, etc., and increasing the size of the equipment. Arise.

  It is an object of the present invention to provide an XY stage apparatus that can reduce the surface plate and reduce the size of the apparatus.

  An XY stage apparatus according to the present invention is connected to a surface plate whose upper surface is a sliding surface, a first slider that moves in the extending direction of the first axis along the sliding surface, and the first slider. A guide member extending in a direction of a second axis perpendicular to the first axis in a horizontal plane, a second slider moving in the extending direction of the second axis along the guide member, and the second slider The first slider is supported by a first gas bearing that ejects gas to the sliding surface, and the suction plate is disposed on the sliding surface. On the other hand, the first slider is supported by a second gas bearing that ejects gas, and the first slider is guided by a surface plate.

  In this XY stage apparatus, the second gas bearing can support the suction plate with the upper surface of the surface plate as the sliding surface, and the first gas bearing can also support the first slider with the upper surface of the surface plate as the sliding surface. it can. In this way, by using the surface plate as a guide for the first slider and sharing the sliding surface between the first gas bearing and the second gas bearing, a guide dedicated to the first slider is provided on the upper surface of the surface plate. This eliminates the need to reduce the size of the apparatus while reducing the size of the surface plate.

  The first slider is preferably provided with a third gas bearing arranged so as to sandwich the surface plate from both side surfaces of the surface plate, and the first slider is preferably guided by the surface plate. By supporting the third gas bearing in the horizontal direction, the first slider can be moved smoothly, and both side surfaces of the surface plate can be effectively used as the sliding surface.

  Moreover, it is preferable that a 1st slider has an upper wall part which opposes a sliding surface, and an upper wall part is supported by the three 1st gas bearings. By supporting the first slider with the three first gas bearings, the stability of the first slider can be enhanced.

  Preferably, the surface plate and the first slider are provided in pairs, and the first slider is connected to both ends of the guide member. In any of the pair of surface plates, it is not necessary to provide a guide dedicated to the first slider on the upper surface, thereby reducing the size of each surface plate and further reducing the size of the apparatus.

  According to the XY stage apparatus of the present invention, the surface plate can be made small and the apparatus can be miniaturized.

  Hereinafter, preferred embodiments of an XY stage apparatus according to the present invention will be described with reference to the accompanying drawings.

  As shown in FIGS. 1 to 5, the XY stage apparatus 1 includes a pair of stone surface plates (surface plates) 3 and 4 that are arranged side by side on the base 2 and extend in the Y-axis direction, and stone surface plates 3 and 4. A Y-axis stage 6 that moves in the Y-axis direction along the Y-axis, a pair of Y-axis linear motors 7 and 8 that function as a drive unit for the Y-axis stage 6, and an X-axis that moves in the X-axis direction on the Y-axis stage 6 A stage 9, an X-axis linear motor 10 that functions as a drive unit for the X-axis stage 9, and a suction plate 11 disposed on the X-axis stage 9 are provided. As shown in FIGS. 1 and 2, the X-axis (second axis) and the Y-axis (first axis) form 90 degrees with each other on the horizontal plane, and the vertical direction is defined as the Z-axis direction. In this case, the X axis, Y axis, and Z axis are used.

  One stone surface plate 3 is made of a prismatic stone material, and an upper surface side sliding surface 3a for the air bearing to slide is formed on the upper surface thereof by plane processing. In addition, side surface sliding surfaces 3b and 3c for sliding the air bearing are formed on both side surfaces extending along the Y-axis direction by performing planar processing in the same manner as the upper surface. Similarly, the upper surface side sliding surface 4a and the side surface sliding surfaces 4b and 4c are formed by performing planar processing on the upper surface and both side surfaces of the other stone surface plate 4 as well.

  As shown in FIGS. 3 and 4, the Y-axis stage 6 includes a pair of Y-axis sliders (first sliders) 12 and 13 that are guided by stone surface plates 3 and 4 and move in the Y-axis direction. Y-axis lift air bearings (first gas bearings) 14 and 16 for supporting the axis sliders 12 and 13 in the Z-axis direction by the upper surface side sliding surfaces 3a and 4a of the stone surface plates 3 and 4, respectively, Y-axis yaw air bearing (third gas bearing) 17 for supporting 12 and 13 in the horizontal direction (X-axis direction) on the side surface sliding surfaces 3b, 3c, 4b and 4c of the stone surface plates 3 and 4, respectively. 18 and a guide member 19 extending in the X-axis direction so as to bridge the Y-axis sliders 12 and 13.

  The Y-axis slider 12 guided by one stone surface plate 3 faces the upper wall portion 12a facing the upper surface side sliding surface 3a of the stone surface plate 3, and the side surface sliding surfaces 3b and 3c of the stone surface plate 3, respectively. And a pair of side wall portions 12b, 12c. The upper surface of the upper wall portion 12a is connected to one end portion of the guide member 19 at a central position in the Y-axis direction. The upper wall portion 12 a of the Y-axis slider 12 is formed with oval through holes 21 and 22 extending in the X-axis direction with the guide member 19 interposed therebetween.

  The Y-axis lift air bearing 14 that supports the Y-axis slider 12 in the Z-axis direction has one on each of both ends in the Y-axis direction on the lower surface of the upper wall portion 12a of the Y-axis slider 12, and the center position in the Y-axis direction. It is made up of a total of three and one, and is arranged to be a triangular point. Furthermore, the Y-axis lift air bearing 14 balances the upward force generated by jetting a gas such as air onto the upper surface side sliding surface 3a and the downward force due to the weight of the Y-axis slider 12 or the like. The Y-axis slider 12 is supported in a non-contact state while maintaining a gap of about several μm with the upper surface side sliding surface 3a. The Y-axis lift air bearing 14 may have a suction function as well as ejecting gas.

  Two Y-axis yaw air bearings 17 for supporting the Y-axis slider 12 in the horizontal direction are provided on each of the side wall portions 12b and 12c of the Y-axis slider 12 (see FIG. 5), and the side-side sliding surface 3b. Y-axis slider while maintaining a gap of about several μm between the side-side sliding surfaces 3b and 3c by balancing the repulsive forces generated by jetting gas such as air to each other. 12 is supported in a non-contact state.

  The Y-axis slider 13, the Y-axis lift air bearing 16 and the Y-axis yaw air bearing 18 guided by the other stone surface plate 4 are the same as the Y-axis slider 12, the Y-axis lift air bearing 14 and the Y-axis yaw air bearing 17. It has a structure that is subject to right and left when viewed from the axial direction. That is, the Y-axis slider 13 has an upper wall portion 13a, side wall portions 13b and 13c, and through holes 23 and 24 and is connected to the other end portion of the guide member 19, and the Y-axis lift air bearing 16 is connected to the upper surface side sliding surface 4a. On the other hand, gas is ejected, and the Y-axis yaw air bearing 18 ejects gas to the side surface sliding surfaces 4b and 4c.

  The guide member 19 that guides the X-axis stage 9 has a U-shaped cross section that opens upward, and both side surfaces on the outer side of the guide member 19 that extends along the X-axis direction are subjected to planar processing. The air bearing is used as sliding surfaces 19a and 19b for sliding (see FIG. 5).

  Y-axis linear motors 7 and 8 functioning as drive units for the Y-axis stage 6 are respectively Y-axis magnet yokes 26 and 27 extending in the Y-axis direction on both outer sides in the X-axis direction of the Y-axis sliders 12 and 13; Y-axis coil units 28 and 29 are provided on the Y-axis sliders 12 and 13, respectively.

  The Y-axis magnet yokes 26 and 27 functioning as stators of the Y-axis linear motors 7 and 8 are respectively fixed to the upper ends of the frame portions 31 and 32 arranged on both sides in the X-axis direction of the base 2 and have a U-shaped cross section. Eggplant. A plurality of permanent magnets connected to the inner wall surfaces of the Y-axis magnet yokes 26 and 27 so as to repeat the S-pole and N-pole patterns along the Y-axis direction are fixed.

  The Y-axis coil units 28 and 29 functioning as the movers of the Y-axis linear motors 7 and 8 include the upper end portion of the support wall portion 12d protruding upward from the upper wall portion 12a of the Y-axis slider 12 and the Y-axis slider 13. Are fixed to the upper end of the support wall 13d and inserted into the Y-axis magnet yokes 26 and 27, respectively. The Y-axis coil units 28 and 29 have a plurality of coils, and the plurality of coils are connected in the Y-axis direction and covered with a case. The coils of the Y-axis coil units 28 and 29 are energized so that the magnetic poles change in accordance with the patterns of the S and N poles of the permanent magnets of the Y-axis magnet yokes 26 and 27, The Y-axis stage 6 can be moved in the Y-axis direction by generating a repulsive force with each other and obtaining a thrust.

  As shown in FIGS. 3 and 5, the X-axis stage 9 has a U-shaped cross-section that opens downward so as to surround the guide member 19 and moves in the X-axis direction along the guide member 19 (first axis). 2 slider) 33, an X-axis leg 33 for supporting the X-axis slider 33 in the Z-axis direction on the upper surface side sliding surfaces 3a and 4a of the stone surface plates 3 and 4, and the X-axis slider 33 as the guide member 19 X-axis yaw air bearing 36 for supporting the sliding surfaces 19a and 19b in the horizontal direction (Y-axis direction), and a θ table 37 provided on the X-axis slider 33 to rotate the suction plate 11 around the Z-axis. And. Note that the X-axis slider 33 is not limited to a U-shaped cross section, and may have a rectangular cross section surrounding the guide member 19.

  The X-axis legs 34 that support the X-axis slider 33 in the Z-axis direction are fixed to the four corners of the X-axis slider 33, and the X-axis lift air bearing 39 is attached to the end of the column 38 that extends downward. The support column 38 is passed through the through-holes 21 and 22 of the Y-axis slider 12 and the through-holes 23 and 24 of the Y-axis slider 13, respectively. The X-axis lift air bearing 39 balances the upward force generated by jetting a gas such as air onto the upper-side sliding surfaces 3a and 4a and the downward force due to the weight of the X-axis slider 33 and the like. The X-axis slider 33 is supported in a non-contact state while maintaining a gap of about several μm between the upper surface side sliding surfaces 3a and 4a. When the X-axis stage 9 moves in the X-axis direction, the X-axis lift air bearing 39 moves within the elliptical through holes 21 to 24 without interfering with the upper wall portions 12a and 13a of the Y-axis sliders 12 and 13. can do. Note that the X-axis lift air bearing 39 may not only eject gas but also have a suction function.

  Two X-axis yaw air bearings 36 that support the X-axis slider 33 in the horizontal direction are provided on each of the side walls of the X-axis slider 33 (see FIG. 4). By balancing the repulsive forces generated by jetting gases such as air with respect to 19b, the X-axis slider 33 is kept in contact with the sliding surfaces 19a and 19b while maintaining a gap of about several μm. Support in contact.

  The X-axis linear motor 10 that functions as a drive unit for the X-axis stage 9 is provided below the upper wall portion of the X-axis slider 33 and the X-axis magnet yoke 41 that extends in the X-axis direction on the guide member 19. The X-axis coil unit 42 is configured.

  The X-axis magnet yoke 41 that functions as a stator of the X-axis linear motor 10 has a U-shaped cross section that opens laterally. A plurality of permanent magnets are fixed to the inner wall surface of the X-axis magnet yoke 41 so as to repeat the S-pole and N-pole patterns along the X-axis direction.

  The X-axis coil unit 42 that functions as a mover of the X-axis linear motor 10 is fixed to a support wall portion that protrudes downward from the upper wall portion of the X-axis slider 33 and is inserted into the X-axis magnet yoke 41. The The X-axis coil unit 42 has a plurality of coils, and the plurality of coils are connected in the X-axis direction and covered with a case. Further, the coil of the X-axis coil unit 42 is energized so that the magnetic poles change in accordance with the patterns of the S pole and the N pole of the permanent magnet of the X axis magnet yoke 41, and repels between the X axis magnet yoke 41. The X-axis stage 9 can be moved in the X-axis direction by generating force and obtaining thrust.

  The suction disk 11 on which the object is placed is a rectangular plate-like member having a width in the Y-axis direction larger than that of the Y-axis sliders 12 and 13 and a width in the X-axis direction larger than that of the X-axis slider 33. The board 11 is supported by suction board legs 43. In addition, a large number of suction holes for vacuum-sucking an object such as a liquid crystal display glass substrate are formed on the upper surface of the suction disk 11.

  The suction plate legs 43 that support the suction plate 11 are fixed to the four corners of the suction plate 11, and a suction plate lift air bearing (second gas bearing) 44 is provided at the lower end of the support column 40 that extends downward. Is provided. Four suction disk lift air bearings 44 are arranged on the upper surface side sliding surface 4a and two on the upper surface side sliding surface 4a, and air or the like is provided on the upper surface side sliding surfaces 3a, 4a. By balancing the upward force generated by jetting the gas and the downward force due to the weight of the suction plate 11 or the like, the adsorption is performed while maintaining a gap of about several μm between the upper surface side sliding surfaces 3a and 4a. Each of the boards 11 is supported in a non-contact state. When the suction disk 11 moves with the Y-axis stage 6 and the X-axis stage 9, the suction disk lift air bearing 44 moves in the upper surface side sliding surfaces 3a and 4a. The suction disk lift air bearing 44 may have a suction function as well as ejecting gas.

  As described above, in the XY stage apparatus 1, the suction plate lift air bearing 44 can support the suction plate 11 with the upper surfaces of the stone surface plates 3 and 4 as sliding surfaces, and the Y-axis lift air bearings 14 and 16 also support the stone surface plate. The Y-axis sliders 12 and 13 can be supported by using the upper surfaces of 3 and 4 as sliding surfaces, respectively. In this way, by using the stone surface plates 3 and 4 as guides for the Y-axis sliders 12 and 13, the Y-axis lift air bearings 14 and 16 and the suction plate lift air bearing 44 share the sliding surface, whereby the Y-axis slider It is not necessary to provide guides for exclusive use of 12 and 13 on the top surfaces of the stone surface plates 3 and 4, thereby making the stone surface plates 3 and 4 small and miniaturizing the apparatus.

  Further, the Y-axis sliders 12 and 13 have Y-axis yaw air bearings arranged so as to sandwich the stone surface plates 3 and 4 from the side of the side surface sliding surfaces 3b, 3c, 4b and 4c of the stone surface plates 3 and 4. 17 and 18, the Y-axis sliders 12 and 13 can be smoothly moved by being supported in the horizontal direction by the Y-axis yaw air bearings 17 and 18, and the both sides of the stone surface plates 3 and 4. The surface can be effectively used as a sliding surface.

  Further, the upper wall portion 12 a of the Y-axis slider 12 is supported by the three Y-axis lift air bearings 14, and the upper wall portion 13 a of the Y-axis slider 13 is supported by the three Y-axis lift air bearings 16. The stability of the Y-axis sliders 12 and 13 can be improved.

  Further, since the pair of stone surface plates 3 and 4 and the Y-axis sliders 12 and 13 are provided, and the Y-axis sliders 12 and 13 are respectively connected to both ends of the guide member 19, the pair of stone surface plates 3 and 4 are connected. In either case, it is not necessary to provide a dedicated guide for the Y-axis sliders 12 and 13 on the upper surface, whereby the respective stone surface plates 3 and 4 can be made smaller and the apparatus can be further miniaturized.

  The present invention is not limited to the embodiment described above.

  For example, the X-axis lift air bearing 39 is disposed in the through holes 21 to 24. Instead, the support 38 is passed through the through holes 21 to 24, and the X axis is placed below the through holes 21 to 24. The lift air bearing 39 may be arranged.

  Further, the X-axis slider 33 is formed on the upper surface side sliding surfaces 3 a and 4 a of the stone surface plates 3 and 4 and the sliding surfaces 19 a and 19 b of the guide member 19 by using the X-axis lift air bearing 39 and the X-axis yaw air bearing 36. Although it is guided and moved in the X-axis direction, it may be configured to be guided by a rolling guide instead.

It is a perspective view which shows the XY stage apparatus which concerns on embodiment of this invention. It is the perspective view which removed the suction disk from the XY stage apparatus shown in FIG. It is a top view of the XY stage apparatus shown in FIG. It is sectional drawing which follows the IV-IV line of FIG. It is sectional drawing which follows the VV line of FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... XY stage apparatus, 3, 4 ... Stone surface plate (surface plate), 3a, 4a ... Upper surface side sliding surface, 11 ... Adsorption plate, 12, 13 ... Y-axis slider (1st slider), 12a, 13a ... Upper wall, 14, 16 ... Y-axis lift air bearing (first gas bearing), 17,18 ... Y-axis yaw air bearing (third gas bearing), 19 ... guide member, 33 ... X-axis slider (first) 2 slider), 44... Suction plate lift air bearing (second gas bearing).

Claims (4)

A surface plate whose upper surface is a sliding surface;
A first slider that moves in the extending direction of the first axis along the sliding surface;
A guide member connected to the first slider and extending in a direction of a second axis perpendicular to the first axis in a horizontal plane;
A second slider that moves in the extending direction of the second axis along the guide member;
An adsorbing plate arranged on the second slider and adsorbing an object placed on the upper surface;
The first slider is supported by a first gas bearing that ejects gas to the sliding surface, and the suction plate is supported by a second gas bearing that ejects gas to the sliding surface, and the first slider is supported by the first gas bearing. An XY stage apparatus, wherein the slider is guided by the surface plate.   The first slider is provided with a third gas bearing arranged so as to sandwich the surface plate from both side surfaces of the surface plate, and the first slider is guided by the surface plate. The XY stage apparatus according to claim 1.   3. The XY stage according to claim 1, wherein the first slider has an upper wall portion facing the sliding surface, and the upper wall portion is supported by the three first gas bearings. apparatus.   The said surface plate and the said 1st slider are each provided with a pair, The said 1st slider is each connected with the both ends of the said guide member, The Claim 1 characterized by the above-mentioned. XY stage device.

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