JP5365775B2 - Manufacturing method of linear motor system and linear motor system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To assemble a linear motor system using a magnet-embedded magnetic circuit with high workability and accuracy. <P>SOLUTION: On a base 1, a lower stator core 2, a movable element core 4 and an upper stator core 3 are independently supported. Thus, assembling is facilitated and accumulation of intersections is suppressed, thereby stabilizing accuracy in assembly. The upper stator core 3 is supported on a pair of upper stator support stands 5 and 5 on the base 1. Thus, the upper stator core 3 is easily positioned and attached. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a method for manufacturing a linear motor system using a magnet embedded magnetic circuit and a linear motor system.

  A conveying device using a linear motor is used for conveying an article such as a semiconductor component that needs to be conveyed in a clean environment. A conveyance device using a linear motor has high positioning accuracy and is suitable for table feed of a machine tool that requires precise conveyance. Furthermore, the conveyance apparatus using a linear motor has an advantage that it has few wear parts and is excellent in durability.

  A linear motor system using a magnet-embedded magnetic circuit can extract a larger thrust even if it is the same size as that using a typical magnetic circuit.

  FIG. 13 and FIG. 14 are diagrams for explaining the principle of the magnet-embedded magnetic circuit and showing one phase of the stator of the linear motor system. FIG. 13 shows a non-excited state, and FIG. 14 shows an excited state. Stator teeth 203 are provided on the side of the stator core 201 facing the mover core 202, and mover teeth 204 are arranged at a constant pitch P on the side of the mover core 202 facing the stator core 201. Is provided. The region of the stator core 201 for one phase has two adjacent stator teeth 203, 203, and these two stator teeth 203, 203 are the pole A and pole A ′ of the stator core 201 for one phase. It corresponds to. The stator teeth 203 are arranged with a phase difference of P / 2 with respect to the pitch P of the mover teeth 204. A plurality of permanent magnets 205 are embedded in each stator tooth 203. Adjacent permanent magnets 205 have magnetization directions opposite to each other.

  In the non-excited state shown in FIG. 13, most of the magnetic flux of the permanent magnet 205 embedded in the stator teeth 203 is short-circuited in the stator core 201, so that the gap between the stator teeth 203 and the mover teeth 204 is formed. The magnetic flux that comes out is small. As shown in FIG. 14, when a coil 206 wound around the stator teeth 203 is energized and a magnetomotive force Uc in the counterclockwise direction in the figure is applied to the stator core 201, the coil circulates in the stator core 201 until then. The permanent magnet magnetic flux which has been controlled is regulated as follows.

  On one pole A, the upward magnetic flux component is canceled in the direction opposite to the coil magnetomotive force, and the downward component is energized. On the other hand, in the other pole A ′, the upward magnetic flux component is energized in the same direction as the coil magnetomotive force, and the downward component is canceled out. As a result, the main magnetic flux flows as shown by a solid line in FIG. 15, and thrust is generated in the left direction in the figure. If the polarity of energization to the coil 206 is reversed, thrust in the opposite direction is generated.

  According to the linear motor system using the magnet-embedded magnetic circuit, the magnetic flux is effectively generated for the thrust generation by the excitation of one phase, and the leakage magnetic flux from the tooth groove is also eliminated. Thus, a larger thrust can be generated. Patent Document 1 discloses a linear motor system using such a magnet-embedded magnetic circuit.

  Next, a conventional linear motor system using the magnet embedded magnetic circuit will be described. FIG. 15 is a diagram for explaining the configuration of a conventional linear motor system 300 using this magnet embedded magnetic circuit. As shown in the figure, in this linear motor system 300, stator cores 302 and 303 are arranged above and below the mover core 304, and magnetism between the stator cores 302 and 303 on both sides of the mover core 304 is performed. A larger thrust is obtained by forming a path (see, for example, Non-Patent Document 1).

In this linear motor system 300, a lower stator core 302 is fixed on a base 301, and upper and lower stator cores 302, 303 are connected to each other via left and right connecting plates 305, 305.
Japanese Patent Laid-Open No. 03-139159 Hiroshi Nakagawa, Yutaka Maeda, Mitsuji Hamada “Dynamic Characteristics of Linear Motors Employing High-Density Magnetic Path Structure” IEEJ Linear Drive Study Group Data LD-94-8 (February 24, 1994)

  However, in the structure in which the upper and lower stator cores are connected by the connecting plate, it is necessary to perform the positioning and screwing of the components at the same time during the connecting operation. For example, in the linear motor system 300 of FIG. 15, after the connecting plates 305 and 305 are fixed to the lower stator core 302, the upper stator core 303 is screwed to the connecting plates 305 and 305 when the upper fixing is performed. Screwing is performed while aligning the position of the screw hole 312 provided on the side surface of the child core 303 with the position of the through screw hole 315 provided in the connecting plates 305 and 305. At this time, the upper stator core 303 is fixed. There is a problem that the assembling work becomes complicated, for example, the operator needs to hold the upper stator core 303 by hand, for example, by holding the positional relationship between the connection plate 305 and the connection plates 305 and 305. Further, due to the accumulation of tolerances such as the positions and sizes of the screw holes 312 provided in the upper and lower stator cores 302 and 303 and the through screw holes 305 provided in the connecting plates 305 and 305, the upper stator core 303 is particularly improved. There was a problem that the mounting accuracy of was not stable.

  In view of the circumstances as described above, an object of the present invention is to provide a linear motor system manufacturing method and a linear motor system capable of assembling a linear motor system using a magnet embedded magnetic circuit with high workability and accuracy. There is.

  In order to solve the above-described problems, a method of manufacturing a linear motor system according to the present invention supports a mover member having a plurality of first teeth on two surfaces facing each other in a movable manner. Two steps having a plurality of second teeth respectively disposed on the base via the first support member and a plurality of second teeth respectively disposed opposite to the plurality of first teeth of the two surfaces of the mover member; Placing the stator members on the base independently of each other.

  According to the present invention, since the movable member and the two stator members are each independently supported by the base, the assembly is easier than the method of connecting the upper and lower stator cores using the connecting plate. , Improve productivity. Also, the accumulation of tolerances can be kept small, and the accuracy of assembly is greatly improved.

  In the method for manufacturing a linear motor system according to the present invention, after the stator member and the mover member are arranged on the base from below, the other stator member is fixed on the base. The two support members may be connected so as to be positioned and supported. Accordingly, the connecting operation can be performed in a state where the other stator member is placed on the second support member, so that the other stator member can be easily connected.

  Further, a linear motor system according to another aspect of the present invention includes a base, a mover member having a plurality of first teeth on two surfaces facing each other, and the mover member provided on the base. And a plurality of second teeth respectively disposed opposite to the plurality of first teeth on the two surfaces of the mover member, and each of the bases And two stator members supported independently of each other. As a result, it is possible to provide a linear motor system that is easy to assemble, is excellent in productivity, and has a stable assembling accuracy by minimizing the accumulation of tolerances.

  In the linear motor system of the present invention, the mover member and the two stator members are oriented such that the ridgelines of the grooves between the first teeth and the second teeth are in a horizontal direction. May be arranged. In this case, one of the stator members, the movable member, and the other stator member are sequentially arranged on the base from the bottom, and the other stator member is positioned and supported on the base. The linear motor of the present invention may be configured to further include a support member. With this configuration, since the connecting operation can be performed in a state where the other stator member is placed on the second support member, it is possible to provide a linear motor system that can easily connect the other stator member.

  Furthermore, in the linear motor system of the present invention, each of the first support member and the second support member is composed of a pair of parts, and one of the stator members is movable with respect to the movable direction of the mover member. The second support member and the first support member are arranged in this order from the stator member side on both sides in a first direction orthogonal to each other, and the mover member is the pair of first support members. A third support member projecting in the first direction for supporting each is integrally formed, and the pair of second support members are in contact with the third support member during the movement of the mover member. It may have a shape that avoids interference. According to this structure, the restriction | limiting of the movement range of the needle | mover member by the 2nd supporting member becoming an obstruction can be eased.

  In the linear motor system of the present invention, one of the stator member, the mover member, and the other stator member is provided on the base with grooves between the first teeth and between the second teeth. The ridgelines may be supported independently in an orientation that takes a posture along the vertical direction.

  As described above, according to the method for manufacturing a linear motor system of the present invention, a linear motor system using a magnet-embedded magnetic circuit can be assembled with high workability and accuracy. Further, according to the present invention, it is possible to provide a linear motor system that is easy to assemble, is excellent in productivity, and has a stable assembling accuracy by suppressing the accumulation of tolerances to a small extent.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
First, a linear motor system using a magnet-embedded magnetic circuit and a manufacturing method thereof according to a first embodiment of the present invention will be described with reference to FIGS.

  1 is an overall perspective view of a linear motor system using a magnet embedded magnetic circuit according to a first embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, and FIG. 3 is a plan view of FIG. 4 is a side view of FIG. 1 viewed from the Y-axis direction, FIG. 5 is a perspective view of the state in which the mover core and the upper stator core are removed from FIG. 1, and FIG. 7 is a side view of FIG. 5 viewed from the Y-axis direction, FIG. 8 is a perspective view of FIG. 1 with the upper stator core removed, and FIG. 9 is a perspective view of FIG. 8 viewed from the X-axis direction. FIG. 10 is a side view of FIG. 8 viewed from the Y-axis direction.

  The linear motor system 100 includes a base 1, stator cores 2 and 3, mover core 4, upper stator support bases 5 and 5, linear bearings 6 and 6, linear guide rails 7 and 7, a control sensor 8, and the like. Composed.

  The base 1 is a plate-like component with a flat surface that supports the entire structure of the linear motor system 100. The stator cores 2 and 3 are disposed on both upper and lower sides of the mover core 4. Hereinafter, the stator core 2 disposed on the lower side of the mover core 4 is referred to as “lower stator core 2”, and the stator core 3 disposed on the upper side of the mover core 4 is referred to as “upper stator core 3”. Call it.

  The lower stator core 2 is supported on the base 1. On the other hand, the upper stator core 3 is supported on the base 1 via a pair of upper stator support frames 5, 5 provided on the base 1. The configuration of the upper stator support bases 5 and 5 will be described later.

  Stator teeth (see reference numeral 21 in FIG. 5) are provided at a constant pitch in the X-axis direction on the opposing surfaces of the lower stator core 2 and the upper stator core 3 to the mover core 4. . Here, the X-axis direction is the movable direction of the mover core 4. A plurality of permanent magnets are embedded in each stator tooth. Adjacent permanent magnets have magnetization directions opposite to each other. Further, a coil 22 is wound around a pole made of a plurality of teeth of the lower stator core 2 and a permanent magnet, and a coil 32 is wound around the stator teeth of the upper stator core 3 (see FIG. 3). In FIG. 5, six stator poles 21 are provided side by side to form a three-phase motor. Further, at least the surfaces of the lower stator core 2 and the upper stator core 3 that face the mover core 4 are covered with a cover 24 (see FIGS. 3 and 5) made of a thin material having high magnetic permeability. The stator teeth are protected. The lower stator core 2 is supported on the base 1. Each coil 22 is molded with resin for insulation protection. The tooth surface may be covered with a thin material. The groove portion of the mover core 4 may be covered with a cover or filled with a mold resin.

  The pair of upper stator support frames 5 and 5 are provided on both sides of the lower stator core 2 in the Y-axis direction. The upper stator support bases 5 and 5 are members having a constant width (thickness) in the Y-axis direction, and have sufficient load bearing strength to support the upper stator core 3. The upper stator support bases 5 and 5 receive base fixing portions 51 and 51 that are portions fixed on the base 1 and lower surfaces of support receiving portions 9 and 9 (described later) attached to the upper stator core 3. Stator receiving portions 52 and 52 that are supported by the body, and body portions 53 and 53 that are portions between the base fixing portions 51 and 51 and the stator receiving portions 52 and 52 (FIGS. 5 to 5). (See FIG. 7). The upper stator support pedestals 5 and 5 have upper ends of the stator receiving portions 52 and 52 which are flat surfaces, and support receiving portions 9 and 9 which will be described later fixed to the upper stator core 3 with the flat surfaces. Receive and support the underside. The length in the X-axis direction of the flat surfaces of the stator receiving portions 52 and 52 is equal to the length in the X-axis direction of the upper stator core 3 so as to support the substantially entire length portion of the upper stator core 3 in the X-axis direction. Has been

  Since the distance between the stator receiving portions 52 and 52 of the pair of upper stator support bases 5 and 5 is larger than the width of the upper stator core 3 in the Y-axis direction, the upper stator core 3 alone is fixed upward. It does not rest on the stator receiving portions 52, 52 of the child support frames 5, 5. Therefore, support receiving portions 9 and 9 for size expansion are attached to both sides of the upper stator core 3 in the Y-axis direction, and upper ends of the stator receiving portions 52 and 52 of the pair of upper stator support bases 5 and 5 are mounted. The upper stator core 3 can be supported by receiving the lower surfaces of the support receiving portions 9 and 9 on the flat surface.

  A plurality of screw holes (not shown) for fixing the support receiving portions 9 and 9 are provided on the side surface of the portion to which the support receiving portions 9 and 9 of the upper stator core 3 are attached. On the other hand, the support receiving portions 9, 9 are provided with a plurality of through screw holes 91 that respectively communicate with the screw holes of the upper stator core 3. The support receiving portions 9 and 9 are attached to the upper stator core 3 by aligning the screw holes of the upper stator core 3 with the through screw holes 91 of the support receiving portions 9 and 9. It is possible to perform simply by inserting a set screw from the through screw hole 91 side and screwing.

  Further, a plurality of screws (not shown) for connecting to the support receiving portions 9 and 9 mounted on the upper stator core 3 are formed on the flat surfaces of the stator receiving portions 52 and 52 of the upper stator support bases 5 and 5. A hole 54 (see FIG. 8) is provided. On the other hand, the support receiving portions 9 and 9 have a plurality of through screw holes 92 (in communication with the respective screw holes 54 provided in the flat surfaces of the stator receiving portions 52 and 52 of the upper stator support bases 5 and 5. 1) is provided. The direction of the axial center of these screw holes 54 and through screw holes 92 is the Z-axis direction. The upper stator core 3 is connected to the pair of upper stator support frames 5 and 5 by mounting the upper stator core 3 on the flat surfaces of the stator receiving portions 52 and 52 of the pair of upper stator support frames 5 and 5. After the support receiving portions 9 and 9 are mounted, the screw holes 54 provided in the flat surfaces of the stator receiving portions 52 and 52 of the upper stator support bases 5 and 5 and the support receiving portions 9 and 9 are penetrated. This can be easily performed by aligning the position of the screw hole 92, inserting a set screw from the through screw hole 92 side of the support receiving portions 9 and 9, and screwing.

  Next, the mover core 4 will be described. Mover teeth 42 (see FIGS. 1 and 8) are provided at a constant pitch on the surfaces of the mover core 4 facing the upper stator core 3 and the lower stator core 2, respectively. The mover core 4 is provided with a plurality of support members 41 for supporting the linear bearing 6. The support member 41 is provided in a symmetrical layout so that the load of the mover core 4 can be evenly distributed and received by the linear bearings 6. The linear bearing 6 is a component supported on the linear guide rails 7 and 7 disposed on the base 1 so as to be movable in the X-axis direction.

  Since the linear guide rails 7 and 7 are arranged on the outer sides of the upper stator support bases 5 and 5 on both outer sides in the Y-axis direction when viewed from the lower stator core 2, inevitably, the mover core Each support member 41 has a shape protruding outward in the Y-axis direction from the upper stator support bases 5 and 5. For this reason, there is a possibility that the moving range of the mover core 4 may be limited by the interference between the support members 41 and the upper stator support bases 5 and 5 in the moving process of the mover core 4. Therefore, in the present embodiment, the length and position in the X-axis direction of the body portions 53, 53 between the base fixing portions 51, 51 and the stator receiving portions 52, 52 in the pair of upper stator support frames 5, 5 are determined. The selection is made in consideration of avoidance of interference with the support member 41. More specifically, with respect to the length in the X-axis direction, the body portions 53 and 53 are made shorter than the base fixing portions 51 and 51 and the stator receiving portions 52 and 52, so that the base fixing portions 51 and 51 and the stator are made. A space in which the support member 41 enters and exits between the receiving portions 52 and 52 is provided symmetrically in the front and rear directions in the X-axis direction. Thereby, the restriction | limiting of the movement range of the needle | mover core 4 by the upper stator support stand 5 and 5 can be eased.

  Thus, since the mover core 4 is comprised only with an iron core (core) and the structural member which supports this, the robust and reliable linear motor system 100 can be provided. Further, since the mover core 4 can be reduced in weight, high response and high frequency driving with a large thrust / mass ratio can be achieved.

Next, the assembly procedure of the linear motor system 100 of this embodiment will be described.
First, as shown in FIGS. 5 to 7, a lower stator core 2, a pair of upper stator support bases 5, 5, and a pair of linear guide rails 7 and 7 (including linear bearings 6) are provided on the base 1. ). The pair of upper stator support bases 5, 5 are arranged on both sides of the lower stator core 2 in the Y-axis direction, and a pair of linear guide rails 7, 7 are arranged on the outside thereof.

  Next, as shown in FIGS. 8 to 10, in order to dispose the mover core 4 above the lower stator core 2, each support member 41 of the mover core 4 is placed on the linear bearing 6 and positioned. Then, it connects with a screw etc.

  Next, as shown in FIG. 1, in order to dispose the upper stator core 3 above the mover core 4, the flat surfaces of the stator receiving portions 52 and 52 of the pair of upper stator support bases 5 and 5 are arranged. After the support receiving portions 9 and 9 mounted on the upper stator core 3 are mounted, the screw holes 54 provided on the flat surfaces of the stator receiving portions 52 and 52 of the upper stator support bases 5 and 5 and the support receiving portions are provided. The positions of the through screw holes 92 of the portions 9 and 9 are aligned, and a set screw is inserted from the through screw hole 92 side of the support receiving portions 9 and 9 to be screwed together. Thereafter, sensors such as the control sensor 8 are attached to the side surface of one upper stator support frame 5 or the like. Thus, the linear motor system 100 using the magnet embedded magnetic circuit is completed.

  As described above, the positioning and attachment work of the upper stator core 3 is performed by fixing the upper stator core 3 after the attachment of the support receiving portions 9 and 9 to the stator receiving portion 52 of the pair of upper stator support bases 5 and 5. , 52, so that the upper and lower stator cores are connected using a conventional connecting plate so that the operator can position the upper stator core by hand. The upper stator core 3 can be easily incorporated without having to hold it. In the present embodiment, the lower stator core 2, the mover core 4, and the upper stator core 3 are supported independently of each other by the base 1, and therefore the upper and lower stator cores are connected using a connecting plate. Compared to the method, the accumulation of tolerances can be kept small, the upper stator core 3 can be attached with high accuracy, and the accuracy of assembly is greatly improved.

<Modification>
Next, a modification of the first embodiment will be described.

  In the linear motor system 100 according to the first embodiment, the base portions 51 and 51 and the stator receiving portion 52 of the body portions 53 and 53 of the pair of upper stator support bases 5 and 5 are arranged in the length in the X-axis direction. , 52 so as to avoid interference between the support member 41 and the upper stator support pedestals 5, 5. FIG. 11 is a diagram illustrating a modification of the upper stator support bases 5 and 5 that avoid interference with the mover core 4. The pair of upper stator support bases 5 a and 5 a of this modification has a sufficiently long total length in the X-axis direction with respect to the length of the lower stator core 2 and the upper stator core 3. Leg portions 55 and 55 whose lower portions are fixed on the base 1 are provided at both ends in the X-axis direction of the pair of upper stator support bases 5a and 5a, respectively. An opening 56 for avoiding interference with each support member 41 of the mover core 4 is provided between the leg portions 55 in the X-axis direction. The length of the opening 56 in the X-axis direction is selected according to the moving range of the mover core 4. Further, the upper ends of the pair of upper stator support bases 5a, 5a in this modification are flat surfaces over the entire length, and are shown for connection to the support receiving portions 9, 9 attached to the upper stator core 3. A plurality of screw holes are not provided. Even with the linear motor system 100a employing the upper stator support frames 5 and 5, the connecting operation of the upper stator core 3 is facilitated as in the first embodiment, and the overall assembly accuracy is improved. improves.

<Second Embodiment>
Next, a second embodiment of the present invention will be described.
FIG. 12 is a longitudinal sectional view of a linear motor system using a magnet-embedded magnetic circuit according to a second embodiment of the present invention.

  In the linear motor system 100b of this embodiment, each of the two stator cores 2b, 3b and the mover core 4b is oriented so that the ridgeline 101 of the groove between the teeth is in a posture along the vertical direction (Z-axis direction). , And are supported independently on the base 1b. Hereinafter, the stator core 2b disposed on the left side of the mover core 4b in the drawing is referred to as “first stator core 2b”, and the stator core 3 disposed on the right side of the mover core 4 in the drawing is referred to as “first stator core 4b”. 2 stator core 3b ". Reference numeral 22b is a coil wound around a pole made of a plurality of teeth and permanent magnets of the first lower stator core 2b, and reference numeral 32b is made of a plurality of teeth of the second lower stator core 3b and permanent magnets. A coil wound around a pole.

  On the base 1b, the first stator core 2b and the second stator core 3b are independently supported on the base 1b, and a pair of linear guide rails 7b and 7b are supported. On the pair of linear guide rails 7b and 7b, a mover support base 15b for supporting the mover core 4b is supported via linear bearings 6b and 6b so as to be movable in the depth direction of the drawing. Since the pair of linear guide rails 7b and 7b are arranged on both sides in the Y-axis direction from the first stator core 2b and the second stator core 3b when viewed from the mover core 4b, the mover support In order to increase the degree of freedom in selecting the moving range of the mover core 4b while avoiding interference between the gantry 15b, the first stator core 2b, and the second stator core 3b, the first stator core 2b and The second stator core 3b is provided with interference avoiding portions 16b such as notches at both ends in the depth direction of the paper surface.

  Also in this embodiment, since the first stator core 2b, the second stator core 3b, and the mover core 4b are independently supported on the base 1b on the base 1b, respectively, The linear motor system 100b can be assembled. Compared to the method of connecting the upper and lower stator cores using a connecting plate, the accumulation of tolerances can be kept small, and the accuracy of assembly is greatly improved.

  The present invention is not limited to the embodiment described above, and various modifications can be made within the scope of the technical idea of the present invention.

1 is an overall perspective view of a linear motor system using a magnet-embedded magnetic circuit according to a first embodiment of the present invention. It is a top view of FIG. It is the side view which looked at FIG. 1 from the X-axis direction. It is the side view which looked at FIG. 1 from the Y-axis direction. FIG. 2 is a perspective view of a state where a mover core and an upper stator core are removed from FIG. 1. It is the side view which looked at FIG. 5 from the X-axis direction. It is the side view which looked at FIG. 5 from the Y-axis direction. It is a perspective view of the state which removed the upper stator core from FIG. It is the side view which looked at FIG. 8 from the X-axis direction. It is the side view which looked at FIG. 8 from the Y-axis direction. It is a perspective view of the whole linear motor system of the modification of 1st Embodiment. It is a longitudinal cross-sectional view of the linear motor system using the magnet embedded magnetic circuit which concerns on the 2nd Embodiment of this invention. It is a figure which shows the non-excitation state for demonstrating the principle of a magnet embedded type magnetic circuit. It is a figure which shows the excitation state for demonstrating the principle of a magnet embedded type magnetic circuit. It is a figure explaining the structure of the conventional linear motor system using a magnet embedded type magnetic circuit.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Base 2 ... Lower stator core 3 ... Upper stator core 4 ... Movable core 5.5 ... Upper stator support stand 6.6 ... Linear bearing 7.7 ... Linear guide rail 9.9 ... Support receiving part 21 ... stator poles 22, 32 ... coil 41 ... support member 42 ... mover teeth 51 ... base fixing part 52 ... stator receiving part 53 ... trunk part 100 ... linear motor system

Claims (4)

Arranging a mover member having a plurality of first teeth on two surfaces facing each other on a base via a first support member that movably supports the mover member;
Disposing, on the base, two stator members each having a plurality of second teeth respectively opposed to the plurality of first teeth on the two surfaces of the mover member; A method for manufacturing a linear motor system. It is a manufacturing method of the linear motor system according to claim 1,
After disposing one of the stator member and the mover member from below on the base,
A method of manufacturing a linear motor system, wherein the other stator member is positioned and supported on a second support member fixed on the base. Base and
A mover member having a plurality of first teeth on two opposite surfaces, respectively,
A pair of first support members provided on the base and movably supporting the mover member;
A stator member on having a plurality of second teeth the being one pair toward disposed in said plurality of first tooth surface of the two surfaces of the mover member,
A support receiving portion mounted on the upper stator member;
A pair of second support members for supporting the support receiving portion independently with respect to the base;
A lower stator having a plurality of second teeth disposed opposite to the plurality of first teeth on the other surface of the two surfaces of the mover member and independently supported with respect to the base And a member ,
The pair of first support members and the pair of second support members are:
A linear motor system in which the second support member and the first support member are arranged in this order from the upper stator member and the lower stator member toward both sides in the first direction, respectively . The linear motor system according to claim 3,
Before SL armature member has integrally a third supporting member protruding in the first direction for support to the respective pair of first support member,
The pair of second support member, a linear motor system having an interference avoiding portion for avoiding interference with the third support member in moving process of the movable element member.

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