JP4953892B2 - Ultrasonic cleaning apparatus and method - Google Patents

Description

  The present invention relates to an ultrasonic cleaning apparatus, and more particularly to an ultrasonic cleaning apparatus that removes dirt adhered to a cleaning object with ultrasonic vibration energy radiated into a cleaning liquid.

  Electronic parts composed of semiconductor chips, small precision parts, and the like are required to have high cleanliness depending on their applications, and are washed after being manufactured and shipped as a product or incorporated into an apparatus. For example, a magnetic head slider that is required to have a low flying height with respect to a magnetic disk is required to have high cleanliness because it is incorporated in a magnetic disk device, and is also a component that requires a high degree of positioning accuracy. Therefore, more reliable cleaning is required.

  Conventionally, an ultrasonic cleaning apparatus has been used as an apparatus for cleaning the electronic components and the like as described above. In this ultrasonic cleaning, the vibration of the ultrasonic vibrator is transmitted to the vibration plate, the vibration is radiated into the cleaning liquid, and the dirt attached to the object to be cleaned is removed by the energy generated by the vibration, that is, the shock wave generated by cavitation. Is done in the way. Here, cavitation generated in the cleaning liquid by ultrasonic vibration will be described with reference to FIG. In the ultrasonic cleaning apparatus, as shown in FIG. 21A, the ultrasonic vibrator 202 is disposed on the bottom surface of the cleaning tank 201 in which the cleaning liquid 210 is accommodated, and the cleaning object 131 is disposed above the ultrasonic vibrator. The cleaning object holder 103 is held.

  FIG. 22A shows a theoretical waveform of the standing wave U generated in the cleaning liquid by ultrasonic vibration. In this way, the standing wave U is theoretically transmitted in the liquid depth direction (upward) without being attenuated from the bottom surface of the cleaning tank toward the water surface. However, in reality, as shown in FIG. 22 (b), the standing wave U absorbs ultrasonic energy as the residual oxygen and other gases in the solution absorb the ultrasonic energy. Energy is lowered. That is, the cleaning effect near the bottom surface of the cleaning tank is high, but the cleaning effect decreases as the distance from the bottom surface increases. In particular, in the case where a plurality of stages for placing the cleaning object in the cleaning tank are provided, the ultrasonic energy becomes weaker as the vicinity of the upper stage is lowered by the solution as described above, and the ultrasonic wave is also lowered by the lower stage. Since energy is attenuated, there arises a problem that the cleaning effect is further reduced as it goes upward. Furthermore, the cleaning power differs between the belly portion and the node portion of the standing wave U. From the above, there has been a problem that uniform cleaning cannot be performed on the cleaning object.

  On the other hand, in Patent Document 1, an ultrasonic vibrator is disposed on the bottom surface of the cleaning tank, and the cleaning object holder 103 that supports the cleaning object 131 in the cleaning liquid as indicated by an arrow 101 in FIG. An ultrasonic cleaning device is disclosed that is configured to move up and down with respect to the ultrasonic transducer 202. As a result, the object to be cleaned is alternately positioned at the antinode and the node part of the standing wave U due to the ultrasonic vibration described above, and the object is to supply uniform energy and achieve uniform cleaning. .

  However, the occurrence of uneven cleaning energy, that is, non-uniform cavitation, occurs not only in the propagation direction of ultrasonic vibration, that is, in the above example, but also in the same liquid depth surface. Yes. For example, as shown in FIGS. 11 and 12, which will be described later, the energy decreases as the distance from the center of the ultrasonic transducer increases. Therefore, in order to obtain uniform ultrasonic energy on the same plane at a predetermined liquid depth in the cleaning liquid, it can be considered that the ultrasonic vibrators are bonded together without any gap, but adjacent vibrators suppress vibrations. Therefore, appropriate vibration cannot be obtained. Furthermore, since adjacent vibrators are easily subjected to stress, there arises a problem that the life and corrosion of the vibrators are advanced.

  Patent Documents 2 and 3 disclose a cleaning apparatus having a configuration in which an ultrasonic vibrator is swayed in a cleaning liquid, or a mounting table on which a cleaning object is mounted is rotated in parallel to a horizontal plane. ing. According to this configuration, since the positional relationship between the ultrasonic vibrator and the cleaning object in the vertical direction or the horizontal direction is changed, ultrasonic waves having various intensities are irradiated on the cleaning object, and the uniform We are trying to clean.

JP-A-8-267029 Japanese Patent No. 3641383 JP-A-5-50047

  However, in the above conventional example, since the intensity of the ultrasonic wave generated by the ultrasonic vibrator varies depending on the shape and arrangement of the ultrasonic vibrator, it is still impossible to perform uniform and efficient cleaning. For example, in Patent Document 2, since the ultrasonic vibrator is swung, the distance between the ultrasonic vibrator and the cleaning object may be increased depending on the location, and the cleaning effect may be reduced. Further, in Patent Document 3, since the ultrasonic transducer extending in the radial direction is arranged on the rotating mounting table, the cleaning effect is different between the inner peripheral side and the outer peripheral side, and the arrangement of the transducer is small. There has been a problem that cleaning cannot be performed evenly and efficiently.

  For this reason, in the present invention, the disadvantages of the above-described conventional example can be improved, and in particular, the cleaning object can be cleaned evenly and efficiently, thereby improving the quality of the cleaning object and reducing the cost. It is an object of the present invention to provide an ultrasonic cleaning apparatus capable of

Therefore, one aspect of the present invention is
Ultrasonic cleaning comprising: a cleaning tank that contains a cleaning liquid; a cleaning object holding unit that holds the cleaning object and is immersed in the cleaning liquid; and a vibration application unit that applies ultrasonic vibration to the cleaning liquid in the cleaning tank. A device,
The vibration applying means includes a planar diaphragm and a plurality of ultrasonic vibrators regularly arranged on the diaphragm,
The cleaning object holding means has a holding surface that holds a plurality of cleaning objects arranged in parallel to the diaphragm,
Movable means for moving the vibration applying means and / or the washing object holding means so that the diaphragm and the holding surface move relatively in parallel;
It is characterized by that.

  According to the above invention, first, ultrasonic vibration is applied to the cleaning liquid by the vibration of the ultrasonic vibrator regularly arranged on the vibration plate of the vibration applying means. Then, this ultrasonic vibration is supplied to the cleaning object via the cleaning liquid, so that the dirt of the cleaning object is vibrated and removed, and thereby ultrasonic cleaning is performed. At this time, at least one is moved so that the diaphragm and the holding surface move relatively in parallel. Then, the energy of the ultrasonic vibration generated with the intensity varying in the plane of the same liquid depth of the cleaning liquid is uniformly supplied by the relative parallel movement of the cleaning object with respect to the vibration applying means, and is constant. More energy than the value is supplied. Therefore, unevenness in cleaning the cleaning object can be suppressed, the cleaning object can be efficiently cleaned, and the quality of the cleaning object can be improved and the cost can be reduced.

  In addition, the vibration plate of the vibration applying means is arranged so that the plane of the vibration plate is parallel to the surface of the cleaning liquid stored in the cleaning tank. As a result, since the ultrasonic vibration generated from the diaphragm is reflected at the interface between the liquid surface and air, high-energy ultrasonic vibration can be generated in the cleaning liquid, and the efficiency of ultrasonic cleaning can be improved. Can do.

  The movable means has at least one of three directions, ie, two axial directions parallel to a plane formed by the diaphragm and orthogonal to each other, and a rotational direction around an axis perpendicular to the plane. The vibration applying means and / or the cleaning object holding means are movable. At this time, it is desirable that the movable means be controlled so that the vibration applying means and the cleaning object holding means do not move simultaneously in the same direction. In particular, the relative movable distance between the vibration applying means and the cleaning object holding means by the movable means is the same distance as the distance between the ultrasonic transducers arranged adjacent to each other in the movable direction by the movable means. It is more preferable that the distance is equal to or less than half the distance.

  With the above configuration, while maintaining the vibration applying means and / or the cleaning object holding means in a parallel state, by moving in the X, Y direction and rotation direction in the parallel direction, on the plane at the same liquid depth of the cleaning liquid, Variations in the intensity of ultrasonic vibration can be made more uniform and supplied to the cleaning object, and uneven cleaning can be suppressed. In particular, by setting the movable distance in accordance with the distance between adjacent ultrasonic transducers, it is possible to compensate for variations in intensity between the ultrasonic transducers and to equalize them.

  Further, the vibration applying means arranges the ultrasonic transducers in a plurality of rows, does not contact the ultrasonic transducers arranged in adjacent rows, and does not leave the gaps between the rows. It is characterized by being arranged. The vibration applying means includes the first row and the second row in which the ultrasonic transducers are arranged at the same interval, and the ultrasonic transducers are arranged between the ultrasonic transducers in the first row. In addition, the ultrasonic transducers are respectively arranged in the first and second rows so that the ultrasonic transducers in the second row are positioned. Further, the vibration applying means is characterized in that the outer edges of the ultrasonic transducers are spaced apart by 4 mm or more. As a result, the ultrasonic transducers vibrate appropriately, and the intervals between the transducers are narrowly arranged and the cleaning object is moved in parallel as described above. The vibration can be supplied to the washing item more evenly.

  The ultrasonic transducer is preferably a Langevin type transducer, and more preferably a stat bolt type Langevin type transducer that can be attached to the diaphragm with a stat bolt. In this way, by using a Langevin type transducer that is configured by tightening the central portion with a bolt as an ultrasonic transducer, there is little vibration element in the central portion, and vibration generated from the central portion The amplitude of becomes lower. In particular, by using a stat bolt type, there is no vibration element in the central portion where the stat bolt is inserted, and the amplitude can be reduced. Therefore, the low frequency component of the vibration applied to the cleaning liquid can be reduced, and many high frequency components that vibrate only the dirt without vibrating the cleaning object can be generated and supplied to the cleaning object. As a result, while maintaining the cleaning effect, damage to the cleaning object can be reduced, and the quality of the cleaning object can be improved.

In addition, the ultrasonic cleaning method according to another embodiment of the present invention,
A cleaning tank containing a cleaning solution;
A vibration applying means comprising: a planar vibration plate; and a plurality of ultrasonic vibrators that are regularly arranged on the vibration plate and apply ultrasonic vibrations to the cleaning liquid in the cleaning tank;
A cleaning object holding means having a holding surface for holding a plurality of cleaning objects arranged parallel to the diaphragm, and holding the cleaning object and being immersed in a cleaning liquid;
An ultrasonic cleaning method using an ultrasonic cleaning apparatus comprising:
A cleaning step of cleaning the cleaning object by applying ultrasonic vibration to the cleaning liquid by the vibration applying means;
A movable step of moving the vibration applying means and / or the washing object holding means so that the vibration plate and the holding surface move relatively in parallel during the cleaning step;
It is characterized by having.

  The movable process includes at least one of three directions, ie, two axial directions parallel to the plane formed by the diaphragm and orthogonal to each other, and a rotational direction around an axis perpendicular to the plane. The vibration applying means and / or the cleaning object holding means are movable. At this time, it is desirable that the movable step is controlled so that the vibration applying unit and the washing object holding unit are not simultaneously moved in the same direction, and the movable step is arranged adjacent to the movable direction by the movable step. It is further preferable that the vibration applying means and / or the cleaning object holding means are relatively movable within a distance equal to or less than the same distance as the distance between the ultrasonic transducers that are present.

  Since the present invention is configured and functions as described above, according to this, the ultrasonic vibration that is generated with varying strength at the same liquid depth of the cleaning liquid is at least in a predetermined range near the holding surface of the cleaning object. It has an energy of a certain value or more, becomes equal, and is supplied to the cleaning object. Therefore, it has an unprecedented excellent effect that the unevenness of cleaning of the cleaning object can be suppressed, the cleaning object can be efficiently cleaned, and the quality of the cleaning object can be improved and the cost can be reduced. .

  The ultrasonic cleaning apparatus according to the present invention is characterized in that it is configured so that the intensity of ultrasonic vibration supplied to a cleaning object arranged in parallel with the vibration apparatus is uniform. Hereinafter, a specific configuration and operation will be described in Examples.

  A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a schematic diagram illustrating the configuration of an ultrasonic vibration device, and FIG. 2 is an explanatory diagram illustrating the operation thereof. FIG. 3 to FIG. 9 are explanatory diagrams regarding the arrangement of the ultrasonic transducers and the intensity of the ultrasonic vibration caused thereby.

[Constitution]
As shown in FIG. 1, the ultrasonic cleaning apparatus in this embodiment includes a cleaning tank 1 that stores a cleaning liquid 10, and a cleaning object holder 3 (cleaning object holding means) that holds the cleaning object 31 and is immersed in the cleaning liquid 10. And a vibration device 2 (vibration applying means) for applying ultrasonic vibration to the cleaning liquid 10 in the cleaning tank 1. The cleaning liquid 10 is, for example, pure water, isopropyl alcohol, gray coal phthalate, or a neutral detergent. The cleaning object 31 held by the cleaning object holder 3 is an electronic component such as a magnetic head slider or other components. Although the configuration of the vibration device 2 will be described later, it is placed on the bottom surface of the cleaning tank 1 in which the cleaning liquid 10 is accommodated, and above that, that is, the cleaning object holder in which the cleaning object 31 is held in the cleaning liquid 10. 3 is supported and arranged at a predetermined liquid depth position by a support device (not shown).

  Further, in the present embodiment, a drive device 4 in which the cleaning object holder 3 is movable in the cleaning tank 1 and a controller 5 for controlling the movable state by the drive device 4 are provided (movable means). Although the drive device 4 is shown in FIG. 1 as being installed outside the cleaning tank 1, the driving device 4 is installed in the cleaning tank 1, and the cleaning object holder 3 is moved to the cleaning liquid at a predetermined liquid depth position. A support device (not shown) that supports the motor 10 may also serve as the drive device 4.

  Here, the vibration device 2 will be further described in detail. As shown in FIG. 3A, the vibration device 2 in the present embodiment includes a planar vibration plate 21 and a plurality of ultrasonic transducers 22 regularly arranged on the vibration plate 21. ing. And since the diaphragm 21 is mounted and deployed on the bottom surface of the cleaning tank 1 in which the cleaning liquid 10 is accommodated, the diaphragm 21 is placed in parallel with the bottom surface and the liquid surface. Thereby, since the ultrasonic vibration generated from the ultrasonic vibrator 22 and the diaphragm 21 is reflected at the interface between the liquid surface and the air, ultrasonic vibration with high energy can be generated in the cleaning liquid 10. The ultrasonic transducer 22 may be provided directly on the bottom surface of the cleaning tank 1. That is, the bottom surface of the cleaning tank 1 may function as the diaphragm 21 that is a part of the vibration device 2.

  In the vibration device 2 according to the present embodiment, the ultrasonic transducer 22 is disposed on the vibration plate 21 as illustrated in FIG. However, the ultrasonic transducer 22 may be provided on the upper surface side of the diaphragm 21 or may be provided on the rear surface side. Here, the arrangement of the ultrasonic transducers 22 will be described with reference to FIG. FIG. 4A is a simplified diagram showing a part of the ultrasonic transducer 22 arranged on the vibration plate 21 of the vibration device 2, and as shown in the drawing, the ultrasonic transducer 22 includes a plurality of rows L1, L1. It is arranged at L2. Specifically, the first row L1 in which the ultrasonic transducers 22 are arranged in one row at equal intervals and the second row L2 in the same manner arranged in one row are adjacent to each other. They are arranged alternately without leaving a gap between them. That is, in the adjacent first row L1 and second row L2, the straight line (dotted line) connecting the outer edges of the ultrasonic transducers 22 arranged in the first row L1 and the second row L2 are arranged. They are arranged adjacent to each other so that a straight line (dotted line) connecting the outer edges of the ultrasonic transducer 22 overlaps. The intervals between the ultrasonic transducers 22 in the columns L1 and L2 are the same, but the columns L1 are arranged so that the ultrasonic transducers 22 arranged in the adjacent columns L1 and L2 do not contact each other. , L2, the position of the ultrasonic transducer 22 is shifted. Specifically, the ultrasonic transducers 22 arranged in a row in the second row L2 are arranged between the ultrasonic transducers 22 arranged in a row in the first row L1. Yes. Here, the diameter φ of the ultrasonic transducer 22 is 45 mm as an example, but the outer edges of the ultrasonic transducers 22 are arranged so as to be spaced apart by D = 4 mm or more. As described above, the reason why the distance D between the ultrasonic transducers 22 is set to 4 mm or more is to prevent the ultrasonic transducers 22 from coming into contact with the adjacent ultrasonic transducers even when the ultrasonic transducers 22 vibrate.

  And the intensity distribution of the ultrasonic vibration in the same liquid depth in case the ultrasonic transducer | vibrator 22 is arrange | positioned as mentioned above is shown in FIG.3 (b). As described above, the intensity of the ultrasonic vibration varies on the plane at the same liquid depth. In particular, although the intensity near the center of the ultrasonic transducer 22 is strong and the periphery thereof is weak, and the gap between the ultrasonic transducers 22 is set small and regularly arranged as described above, Variations in strength can occur. However, in the present embodiment, the above-described problem is solved by further configuring the cleaning object holder 3 to be movable as described below.

  Next, the cleaning object holder 3 and its driving device 4 will be described. As shown in FIG. 2, the cleaning object holder 3 has a holding surface on which a plurality of cleaning objects 31 are placed, and the holding surface is substantially flat. And this holding surface is arrange | positioned in parallel with the bottom face of the washing tank 1 mentioned above and the liquid level of the washing | cleaning liquid 10, ie, is arrange | positioned in parallel with the diaphragm 21 of the vibration apparatus 2. FIG. Note that the cleaning object holder 3 has a structure in which a large amount of the cleaning liquid 10 is pressed and held by the mesh member so as to come into contact with the cleaning object 31, and further, the cleaning object 31 is held on the lower surface side facing the vibration device 2. Yes.

  Further, as shown in FIG. 2, the cleaning object holder 3 is driven by the drive device 4 in two biaxial directions parallel to the bottom surface (the diaphragm 21) of the cleaning tank 1, that is, the holding surface of the cleaning object holder 3. Along the horizontal direction (X-axis direction (Y11 direction in FIG. 2)), vertical direction along the holding surface perpendicular to the horizontal direction (Y-axis direction (Y12 direction in FIG. 2)), and perpendicular to the holding surface The movable device 4 is configured to be movable in at least one of the rotation directions around the axis (the rotation direction around the Z axis (Y13 direction in FIG. 2)). At this time, the movable state of the cleaning object holder 3 is controlled by the controller 5. For example, as indicated by an arrow Y11 in FIG. 2A, it may be reciprocated only in the X-axis direction, and as shown in FIG. 2B, it is reciprocally movable in the X-axis direction and the Y-axis direction alternately. May be. Furthermore, as shown in FIG. 2 (c), the object may be reciprocally rotated about the Z axis around the intersection of diagonal lines of the substantially rectangular washing object holder 3.

  At this time, the movable distance of the cleaning object holder 3 relative to the vibration device 2 in the X-axis direction (Y11 direction) corresponds to the arrangement of the ultrasonic vibrator 22 described above, as shown in FIG. Thus, the distance A2 between the ultrasonic transducers 22 arranged adjacent to each other in the X-axis direction (from the first row L1 to the adjacent first row across the adjacent second row L2) Distance) is set to the same distance or a half distance A1 (distance from the first row L1 to the adjacent second row L2). That is, as described above, when the rows L1 and L2 of the ultrasonic transducers 22 are alternately arranged without gaps, two ultrasonic transducers (distance A2) or ultrasonic transducers are used. Is reciprocated by a distance of one (distance A1). It may be reciprocated at a distance A2 or less and a distance A1 or more. Further, the movable distance of the cleaning object holder 3 in the Y-axis direction (Y12 direction) is the same distance B2 as the distance between the ultrasonic transducers 22 arranged adjacent to each other in the Y-axis direction, as described above. Alternatively, the distance B1 is set to half that distance. That is, the ultrasonic transducers 22 arranged in each row direction are reciprocated by one pitch (distance B2) or half pitch (distance B1). The distance may be reciprocated at a distance B2 or less and at a distance B1 or more.

  As described above, when the cleaning object holder 3 is reciprocally moved relative to the vibration device 2, the intensity of the ultrasonic vibration supplied to the cleaning object holder 3 is shown in FIGS. 6 (a) and 6 (b). The description will be given with reference. As shown in this figure, when the strength in the vicinity of the center of the ultrasonic transducer 22 is set to 100%, first, if the cleaning object holder 3 is fixed without being moved, the space between the ultrasonic transducers 22 The intensity at the location located at the upper portion, that is, the upper location between the ultrasonic transducers, is a minimum value of 70%. On the other hand, as described above, when the reciprocating movement is performed by the distance A1 or the distance A2 in the X direction, the vibrations of the adjacent ultrasonic transducers 22 are supplied to the predetermined cleaning object 31 in an overlapping manner. Therefore, the minimum is 85%. Similarly, in the Y direction, the strength is 83% at the minimum when the cleaning object holder 3 is fixed without being moved, but when the cleaning object holder 3 is reciprocally moved by the distance B1 or the distance B2, The minimum is 92%.

  Here, another arrangement of the ultrasonic transducer 22 will be described with reference to FIG. In this example, similarly to the arrangement described with reference to FIG. 4, the ultrasonic transducers 22 are arranged in a plurality of rows L1 and L2, respectively. And the 1st row | line | column L11 by which the ultrasonic transducer | vibrator 22 is arrange | positioned at 1 row at equal intervals, and the 2nd row | line | column L12 similarly arrange | positioned at 1 row at equal intervals, without leaving the clearance gap between rows, They are arranged alternately. However, in each of the rows L11 and L12, the ultrasonic transducers 22 are arranged with a gap corresponding to one in the row direction. The ultrasonic transducers 22 arranged in a row in the second row L12 are arranged between the ultrasonic transducers 22 arranged in a row in the first row L11.

  In the above arrangement, when the cleaning object holder 3 is moved reciprocally relative to the vibration device 2 as shown by a distance A11 in FIG. The strength is as shown in FIG. As shown in this figure, when the strength near the center of the ultrasonic transducer 22 is 100%, the upper part of the ultrasonic transducer 22 is not present when the cleaning object holder 3 is fixed without being moved. The intensity at is a minimum value of 50%. On the other hand, as described above, when the reciprocating movement is performed in the X direction by the distance A11, the vibrations of the adjacent ultrasonic transducers 22 are overlapped, and the minimum is 75%. In this way, even if the ultrasonic transducers 22 are arranged with a wide gap as compared with the case of FIG. 4, each row of the ultrasonic transducers 22 is arranged without a gap so that it can be cleaned. Ultrasonic vibration of energy having a suitable intensity can be supplied to the cleaning object 31 more evenly.

  On the other hand, FIGS. 7A and 7B are examples in which the rows of the ultrasonic transducers 22 are arranged with a gap, unlike the above. Specifically, in the example of FIG. 7A, the rows L21 and L22 of the ultrasonic transducers 22 are arranged with a gap corresponding to one ultrasonic transducer (see the dotted circular shape). ing. In the example of FIG. 7B, the rows L31 and L32 of the ultrasonic transducers 22 are not spaced as much as FIG. 7A, but are arranged with a slight gap. And the intensity | strength of the ultrasonic vibration supplied to the to-be-cleaned object holder 3 in each case is shown to Fig.8 (a), (b). Then, as shown in FIG. 8 (a), in the case of FIG. 7 (a), even if the cleaning object holder 3 is moved, the ultrasonic transducers are not arranged in the adjacent rows, so that the minimum is 30. % Strength. In addition, as shown in FIG. 8B, in the case of FIG. 7B, there is a slight gap, so that the minimum strength becomes 70% when the cleaning object holder 3 is moved, It can be seen that the effect is slightly lower than in the case of FIGS. However, as described above, the ultrasonic transducer 22 is regularly arranged, and the cleaning object 31 is moved relative to the transducer 22, so that the effects of the present invention can be exhibited as described above. . In addition, FIG. 9 shows a list of the minimum value, maximum value, and average value of the ultrasonic energy in each arrangement state described above.

[Operation]
Next, the operation of the ultrasonic cleaning apparatus will be described. First, the ultrasonic cleaning apparatus as described above is configured. In particular, the ultrasonic vibrator 22 is arranged as shown in FIGS. The cleaning liquid 10 is accommodated in the cleaning tank 1, the vibration device 2 is disposed on the bottom surface of the cleaning tank 1, and the cleaning object holder 3 in which the cleaning object 31 is set is disposed above the vibration device 2. It is immersed and arranged in the cleaning liquid 10 so as to be parallel to the apparatus 2.

  Thereafter, the ultrasonic vibrator 22 is operated to apply ultrasonic vibration to the cleaning liquid 10. Then, as shown by an arrow Y1 in FIG. 1, ultrasonic vibration is supplied to the cleaning object 31 held by the cleaning object holder 3, thereby removing the dirt of the cleaning object 31 by vibration. Ultrasonic cleaning is performed (cleaning process).

  During the cleaning, the driving device 4 is driven by a command from the controller 5 to move the cleaning object holder 3 in parallel with the vibration plate 21 of the vibration device 2 (moving step). For example, as described above, the object is reciprocated in the X and Y directions or rotated along the holding surface of the cleaning object holder 3 (see arrows Y11, Y12, and Y13 in FIG. 2).

  Then, as shown in FIG. 3 (b), the ultrasonic vibration is generated with the intensity varying at the same liquid depth of the cleaning liquid 10, but the cleaning object holder 3 is moved in parallel to the vibration device. Thus, in the vicinity of the holding surface where the cleaning object 31 is held, as shown in the tables of FIG. 6 and FIG. Therefore, unevenness in cleaning the cleaning object can be suppressed, the cleaning object can be efficiently cleaned, and the quality of the cleaning object can be improved and the cost can be reduced.

  Next, a second embodiment of the present invention will be described with reference to FIGS. The ultrasonic cleaning apparatus in the present embodiment has a configuration substantially similar to that in the first embodiment described above, but the configuration of the ultrasonic transducer 22 is different.

  First, FIG. 10A shows how to set the distance D from the center C of the ultrasonic transducer 22, and FIGS. 10B, 10C, and 10D show the distances D corresponding to the distance D, respectively. The change of the energy of the ultrasonic transducer | vibrator which has a frequency characteristic is shown. Each diagram shows each distance from the ultrasonic transducer in the vertical direction. Further, FIG. 11 illustrates the vibration intensity S with respect to the distance Dmm from the center C of the ultrasonic transducer 22 having a diameter of 45 mm, and FIG. 12A shows a place away from the center C by D = 0 mm. The relationship between the vibration energy and the frequency radiated in the cleaning liquid at the vibration center is shown. FIG. 12B shows a graph of vibration energy for each frequency at locations separated by D = 0, 15, 30, 45 mm. First, referring to FIG. 12A, it can be seen that there are energy peaks in the vicinity of frequencies of 100 kHz and 200 kHz, and there are also small peaks in the vicinity of 50 kHz and 150 kHz. Also, referring to FIG. 12B, it can be seen that the energy is high when the distance D from the center C of the ultrasonic transducer is 0 to 15 mm, and the energy is small at the outer periphery. On the other hand, in ultrasonic cleaning, if energy is high and a low-frequency component is present in vibration, the cleaning object may be vibrated, and the cleaning object may be damaged. That is, it is desirable for ultrasonic cleaning to generate a large amount of high-frequency energy that vibrates only the dirt without vibrating the cleaning object, and such high-frequency energy can reduce damage to the cleaning object.

  From the above, in this embodiment, a Langevin type vibrator 22 ′ in which a laminated vibration element or the like is tightened with a bolt at the central portion is used as the ultrasonic vibrator. An example is shown in FIG. 13A is a cross-sectional view, and FIG. 13B shows an attachment surface to the diaphragm 21. FIG. In this case, the vibration device 2 can be configured by attaching the Langevin type vibrator 22 ′ to the diaphragm 21 with an adhesive or the like.

  By using the Langevin vibrator 22 ′ in this way, the bolt 22 ′ a is arranged at the central portion, and no vibration element is present, so that the amplitude of vibration generated from the central portion is reduced. Therefore, the low frequency component of the vibration applied to the cleaning liquid can be reduced, and many high frequency components that vibrate only the dirt without vibrating the cleaning object can be generated and supplied to the cleaning object.

  In order to further reduce the damage to the cleaning object while maintaining the cleaning effect, it is more desirable to use a stat bolt type Langevin type vibrator that can be attached to the diaphragm 21 with a stat bolt. An example of the configuration is shown in FIG. 14A is a cross-sectional view, and FIG. 14B shows a mounting surface to the diaphragm 21. FIG. As shown in this figure, a laminated vibration element or the like is configured by tightening a central portion with a bolt 22 "a, and further, attached to the diaphragm 21 at the distal end side of the tightening bolt 22" a. Stat bolt hole 22 "b is formed, and no vibration element is present in the central portion. Therefore, the amplitude of vibration generated from the central portion is lower than that disclosed in FIG. The low-frequency component of vibration applied to the cleaning liquid can be reduced, and a large amount of high-frequency components that vibrate only dirt without vibrating the cleaning object can be generated and supplied to the cleaning object. Damage can be reduced, and the quality of the washed product can be improved.

  Further, FIG. 15A shows a vibration waveform W1 generated when the Langevin type vibrator 22 ″ is attached to the diaphragm 21 having no stat bolt with an adhesive or the like, and FIG. 15B shows a stat bolt. A vibration waveform W2 generated when the Langevin type vibrator 22 ″ is attached to the stat bolt 21a of the diaphragm 21 on which 21a is formed is shown. Then, it can be seen that vibration is evenly distributed when the vibrator is attached via the stat bolt 21a. Thereby, more uniform cleaning can be realized.

  Next, a third embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 16, the ultrasonic cleaning apparatus in the present embodiment has almost the same configuration as that in the first embodiment described above, but in the first embodiment, the cleaning object holder 3 is movable. On the other hand, the present embodiment adopts a configuration in which the vibration device 2 is movable.

  Specifically, as shown in FIG. 16, a driving device 6 for driving the vibration device 2 in which the ultrasonic transducer 22 is arranged is provided as described above, and the driving state of the vibration device 2 by this driving device 6 is provided. A controller 5 is provided for controlling the above. Then, as shown in FIG. 17, the drive device 6 moves the vibration device 2 in the biaxial directions parallel to the bottom surface of the cleaning tank 1 and perpendicular to each other, that is, in the lateral direction along the plane of the vibration plate 21 ( X-axis direction (Y21 direction in FIG. 16)), vertical direction along the diaphragm perpendicular to the horizontal direction (Y-axis direction (Y22 direction in FIG. 16)), and rotation around an axis perpendicular to the diaphragm 21. It is movable in at least one direction among the directions (the rotation direction around the Z axis (Y23 direction in FIG. 16)). For example, as indicated by an arrow Y21 in FIG. 17A, it may be reciprocally movable only in the X-axis direction, and as shown in FIG. May be. Further, as shown in FIG. 17C, the reciprocating movement may be performed around the Z axis around the intersection of diagonal lines of the substantially rectangular vibration device 2.

  At this time, the movable distance of the vibration device 2 in the X-axis direction (Y21 direction) and the Y-axis direction (Y22 direction), that is, the relative movable distance of the cleaning object 31 with respect to the ultrasonic transducer 22 is the above-described embodiment. 1, corresponding to the arrangement of the ultrasonic transducers 22, the distance between the ultrasonic transducers 22 arranged adjacent to each other in the movable direction is equal to or less than A2, and is equal to or greater than the half distance A1. And desirable.

  Thereby, the vibration device 2 is moved in parallel with the cleaning object holder 3, in other words, the cleaning object 31 reciprocates relative to the ultrasonic transducer 22 during the cleaning. Therefore, as described above, the ultrasonic vibration generated with the intensity varying on the plane at the same liquid depth of the cleaning liquid 10 is the vibration of energy of a certain value or more near the holding surface where the cleaning object 31 is held. Is efficiently and evenly supplied. Therefore, unevenness in cleaning the cleaning object can be suppressed, the cleaning object can be efficiently cleaned, and the quality of the cleaning object can be improved and the cost can be reduced.

  Next, a fourth embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 18, the ultrasonic cleaning apparatus in the present embodiment has almost the same configuration as that in the above-described first embodiment. However, in this embodiment, both the cleaning object holder 3 and the vibration device 2 are used. It is configured to move.

  Specifically, as shown in FIG. 18, the driving device 4 that drives the cleaning object holder 31 and the driving device 6 that drives the vibration device 2 in which the ultrasonic transducer 22 is arranged as described above are provided. The controller 5 for controlling the driving state of the cleaning object holder 3 and the vibration device 2 by the driving devices 4 and 6 is provided. Then, the controller 5 controls the movable object holder 3 and the vibration device 2 so as not to move simultaneously in the same direction via the driving devices 4 and 6. For example, as shown in FIG. 19A, when the cleaning object holder 3 is moved in the Y direction (arrow Y12), the vibration device 2 is simultaneously moved in the X direction (arrow Y21). Further, as shown in FIG. 19B, when the cleaning object holder 3 is moved in the clockwise direction (arrow Y13), the vibration device 2 is simultaneously moved in the counterclockwise direction (arrow Y23). Further, as shown in FIG. 19C, when the cleaning object holder 3 is moved in the clockwise direction (arrow Y13), the vibration device 2 is simultaneously moved in the X direction (arrow Y21) and the Y direction (arrow Y22). It moves alternately. Conversely, as shown in FIG. 19D, when the cleaning object holder 3 is alternately moved in the X direction (arrow Y11) and the Y direction (arrow Y12), the vibration device 2 is simultaneously rotated in the clockwise direction. It moves to (arrow Y23).

  At this time, the relative movable distance of the ultrasonic holder 3 and the vibration device 2 in the X-axis direction (Y21 direction) and the Y-axis direction (Y22 direction) is the same as in the first embodiment described above. Is equal to or less than the distance A2 between the ultrasonic transducers 22 arranged adjacent to each other in the movable direction, and is preferably equal to or more than half the distance A1.

  In this way, by moving the vibration device 2 and the cleaning object holder 3 relatively in parallel, as described above, the ultrasonic vibration that is generated with the intensity varying on the plane at the same liquid depth of the cleaning liquid 10 is generated. In the vicinity of the holding surface where the cleaning object 31 is held, the vibration of energy of a certain value or more is efficiently and evenly supplied. Therefore, unevenness in cleaning the cleaning object can be suppressed, the cleaning object can be efficiently cleaned, and the quality of the cleaning object can be improved and the cost can be reduced. In the above description, the case where the cleaning object holder 3 and the vibration device 2 are moved in different directions has been exemplified. However, even in the same direction, the movable speeds are different from each other and seem to move relatively. If present, it belongs to the scope of the present invention.

  Here, as described above, the ultrasonic transducers 22 disposed on the diaphragm 21 constituting the vibration device 2 may have any shape as long as they are regularly disposed. For example, as shown in FIG. 20A, a plurality of strip-like ultrasonic transducers 121 may be arranged on the diaphragm 21 in parallel. Then, the vibration device 2 having such a configuration, that is, the ultrasonic vibrator 121 generates the ultrasonic vibrations that vary as shown in FIG. 20B. As described above, the vibration device 2 and / or the cleaning object holder By relatively moving 3, vibrations of energy of a certain value or more are efficiently and evenly supplied in the vicinity of the holding surface where the cleaning object 31 is held. Therefore, as described above, unevenness in cleaning the cleaning object can be suppressed, the cleaning object can be efficiently cleaned, and the quality of the cleaning object can be improved and the cost can be reduced.

  The present invention can be used for cleaning a manufactured product such as an electronic component such as a magnetic head slider, and has industrial applicability.

1 is a schematic diagram illustrating a configuration of an ultrasonic cleaning device in Embodiment 1. FIG. It is explanatory drawing which shows the movable state of the washing | cleaning material holder disclosed in FIG. It is a figure which shows the structure and ultrasonic vibration of a vibration apparatus which were disclosed in FIG. It is explanatory drawing which shows arrangement | positioning of an ultrasonic transducer | vibrator. It is explanatory drawing which shows arrangement | positioning of an ultrasonic transducer | vibrator. It is explanatory drawing which shows the intensity | strength of the ultrasonic vibration by the ultrasonic vibrator of the arrangement | positioning disclosed in FIG.4 and FIG.5. It is explanatory drawing which shows arrangement | positioning of an ultrasonic transducer | vibrator. It is explanatory drawing which shows the intensity | strength of the ultrasonic vibration by the ultrasonic vibrator of the arrangement | positioning disclosed in FIG. It is the table | surface which put together the intensity | strength of the ultrasonic vibration disclosed in FIG.6 and FIG.8. It is a figure explaining the intensity | strength of the ultrasonic vibration by an ultrasonic transducer | vibrator in Example 2. FIG. It is a figure explaining the intensity | strength of the ultrasonic vibration by an ultrasonic transducer | vibrator in Example 2. FIG. It is a figure explaining the intensity | strength of the ultrasonic vibration by an ultrasonic transducer | vibrator in Example 2. FIG. 6 is a diagram illustrating a configuration of an ultrasonic transducer in Example 2. FIG. 6 is a diagram illustrating a configuration of an ultrasonic transducer in Example 2. FIG. 6 is a diagram illustrating a vibration waveform by an ultrasonic transducer in Example 2. FIG. FIG. 6 is a schematic diagram illustrating a configuration of an ultrasonic cleaning device in Example 3. It is explanatory drawing which shows the movable state of the vibration apparatus disclosed in FIG. FIG. 6 is a schematic diagram illustrating a configuration of an ultrasonic cleaning apparatus in Example 4. It is explanatory drawing which shows the movable state of the to-be-cleaned object holder and the vibration apparatus which were disclosed in FIG. It is a figure which shows the structure of an ultrasonic transducer | vibrator in Example 5, and an ultrasonic vibration. It is the schematic which shows the structure and operation | movement of the ultrasonic cleaning apparatus in a prior art example. It is a figure which shows an ultrasonic vibration waveform.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Washing tank 2 Vibrating device 3 Washed object holders 4 and 6 Driving device 5 Controller 10 Washing liquid 21 Vibration plate 22 Ultrasonic vibrator 31

Claims (10)

A supervising device comprising a cleaning tank for storing a cleaning liquid, a cleaning object holding means for holding a cleaning object and being immersed in the cleaning liquid, and a vibration applying means for applying ultrasonic vibration to the cleaning liquid in the cleaning tank. A sonic cleaning device,
The vibration applying means includes a planar diaphragm and a plurality of ultrasonic vibrators regularly arranged on the diaphragm,
The cleaning object holding means has a holding surface that holds a plurality of the cleaning objects arranged parallel to the diaphragm,
So that said diaphragm and said holding surface moves relatively in parallel, Bei example a movable means for moving said vibration applying means and / or the cleaning holding means,
The vibration applying means arranges the ultrasonic transducers in a plurality of rows, does not contact the ultrasonic transducers arranged in adjacent rows, and does not leave the gaps between the rows. Arranged, the ultrasonic transducers are alternately arranged with first rows and second rows arranged at the same interval, and between the ultrasonic transducers in the first row, Placing the ultrasonic transducers in the first and second rows, respectively, so that the ultrasonic transducers in the second row are located;
The relative movable distance between the vibration applying means and the cleaning object holding means by the movable means is the same as the distance between the ultrasonic transducers arranged adjacent to each other in the movable direction by the movable means. Less than or equal to half the distance,
An ultrasonic cleaning apparatus characterized by that. The vibration plate of the vibration applying means is arranged so that the plane of the vibration plate is parallel to the surface of the cleaning liquid stored in the cleaning tank,
The ultrasonic cleaning apparatus according to claim 1. The movable means is at least one of three directions, ie, two axial directions parallel to a plane formed by the diaphragm and a rotational direction around an axis perpendicular to the plane. Moving the vibration applying means and / or the washing object holding means,
The ultrasonic cleaning apparatus according to claim 1 or 2. The movable means controls the vibration applying means and the washing object holding means so as not to move simultaneously in the same direction;
The ultrasonic cleaning apparatus according to claim 3. In the vibration applying means, the outer edges of the ultrasonic transducers are arranged apart from each other by 4 mm or more.
The ultrasonic cleaning apparatus according to claim 1, 2, 3, or 4 . The ultrasonic transducer is a Langevin type transducer,
The ultrasonic cleaning apparatus according to claim 1, 2, 3, 4 or 5 . The ultrasonic vibrator is a stat bolt type Langevin type vibrator that can be attached to the diaphragm with a stat bolt.
The ultrasonic cleaning apparatus according to claim 6 . A cleaning tank containing a cleaning solution;
A vibration applying means comprising: a planar vibration plate; and a plurality of ultrasonic vibrators regularly arranged on the vibration plate and applying ultrasonic vibrations to the cleaning liquid in the cleaning tank;
A cleaning object holding means having a holding surface for holding a plurality of cleaning objects arranged parallel to the diaphragm, and holding the cleaning object and being immersed in the cleaning liquid;
An ultrasonic cleaning method using an ultrasonic cleaning apparatus comprising:
A cleaning step of cleaning the cleaning object by applying ultrasonic vibration to the cleaning liquid by the vibration applying unit;
A movable step of moving the vibration applying means and / or the cleaning object holding means so that the vibration plate and the holding surface move relatively in parallel during the cleaning step;
I have a,
The vibration applying means arranges the ultrasonic transducers in a plurality of rows, does not contact the ultrasonic transducers arranged in adjacent rows, and does not leave the gaps between the rows. Arranged, the ultrasonic transducers are alternately arranged with first rows and second rows arranged at the same interval, and between the ultrasonic transducers in the first row, Placing the ultrasonic transducers in the first and second rows, respectively, so that the ultrasonic transducers in the second row are located;
In the movable step, the vibration applying means and / or the distance between the ultrasonic transducers arranged adjacent to each other in the movable direction in the movable step is equal to or less than the distance between the ultrasonic transducers and half the distance. Or relatively moving the washing object holding means,
An ultrasonic cleaning method characterized by the above. The movable step includes at least one of three directions, ie, two axial directions parallel to a plane formed by the diaphragm and orthogonal to each other, and a rotational direction around an axis perpendicular to the plane. Moving the vibration applying means and / or the washing object holding means,
The ultrasonic cleaning method according to claim 8 . In the movable step, the vibration applying unit and the cleaning object holding unit are controlled not to move in the same direction at the same time.
The ultrasonic cleaning method according to claim 9 .