JP4866196B2 - Optical film forming method and forming apparatus - Google Patents

Description

The present invention relates to a method and apparatus for forming a uniform optical film with high reproducibility on an optical member having a large tilt angle such as a pickup lens.

  Conventionally, physical film formation methods such as vacuum deposition, sputtering, and ion plating have been used to form optical films such as antireflection films. However, the physical film-forming method has a drawback of high cost because it requires vacuum equipment. For this reason, wet coating methods such as a dipping method using a sol-gel reaction, a spin coating method, and a spray coating method are used for lenses, flat panel displays, and the like. However, when the dipping method is used, film thickness unevenness generally tends to occur, and it is difficult to form a thin film having a thickness of 1 μm or less. In order to form an optical film having a relatively uniform thickness, spin coating or spray coating is advantageous.

  For example, Japanese Patent No. 2794636 (Patent Document 1) discloses a method for producing an ultra-thin polymer film (film thickness: 10 to 1,000 mm) useful for optical elements such as optical waveguides. A method is described in which a solution containing a polymer is dropped onto a glass substrate or the like and thinned by a spin coating method at a rotational speed of 1,000 to 15,000.

  Japanese Patent Application Laid-Open No. 6-242202 (Patent Document 2) has no appearance defect due to scattering and foaming of the hard coat liquid on the lens surface, adhesion of the hard coat liquid to the lens fixing member, nozzle discharge port, etc., and is continuous. As a lens surface treatment method with less contamination of the device due to processing, a hard coat solution is applied while rotating the lens about an axis inclined with respect to the vertical direction (for example, an axis inclined at 90 degrees or more with respect to the vertical direction). Is described.

  Utility Model Registration No. 3052152 (Patent Document 3) rotates a cover glass as an apparatus for uniformly spray-coating an organic resin liquid containing a colorant on the inner surface of a bowl-shaped cover glass for an automobile side marker lamp. A tray, a spray gun disposed below the tray, a means for adjusting the mounting position and elevation angle of the spray gun, a liquid pressure tank for adjusting the spray spray pressure, a means for controlling the spray time, and a coating liquid The organic resin liquid is sprayed from below with a spray gun while rotating the bowl-shaped cover glass placed on the saucer so as to open downward. Describes a spray coating apparatus that sprays toward the surface.

  JP-A-2000-140745 (Patent Document 4) sprays a coating liquid (for example, hard coat liquid) on the surface of a base (for example, a base material such as a plastic molded article), adheres it, and then rotates the base ( Rotational speed: 500 to 3,000 revolutions / minute), and a method for forming a coating film is described.

  However, since the wet coating methods described in Patent Documents 1 to 4 are inferior in film thickness controllability compared to the physical film formation method, a high numerical aperture (NA: Numerical Aperture) like a pickup lens for an optical information recording / reproducing apparatus is required. It is difficult to uniformly form an optical film on a substrate having a large tilt angle with good reproducibility.

JP 2000-33301 (Patent Document 5) discloses a method of forming an optical film having a uniform thickness on the surface of a rotating substrate (for example, a lens) by spray coating on at least one substrate sample. The film thickness distribution of the obtained coating sample is measured, and the obtained film thickness distribution is expressed by the following formula: Thickness ∝ (cos ^L Q × cos ^M R / D _k ^N ) (where Q is the coating solution sprayed from the nozzle) Spray parameter, R is the angle of incidence of the spray on the sample surface, and D _k is the distance from the nozzle to the K point on the sample surface.) , M and N, and then (a) the number of spray nozzles, (b) the distance D ₀ from the nozzle front surface to the substrate surface, (c) the angle P between the base axis of the nozzle and the central axis of the substrate surface, (d) Spray angle of coating solution sprayed from each nozzle, and (e) each It discloses a method of modulating at least one parameter selected from the group consisting of nozzle coating time.

  However, the pickup lens for optical information recording / reproducing devices has a very small diameter of about 5mm, so the spray angle of the coating solution sprayed from the nozzle and the spray sample surface when spray coating on the rotating pickup lens. The influence of the incident angle with respect to and the distance from the nozzle to the sample is small. Nevertheless, it is difficult to form a film with a uniform thickness on the pickup lens with good reproducibility by spray coating.

Japanese Patent No. 2794636 Japanese Unexamined Patent Publication No. 6-24220 Utility Model Registration No.3052152 Japanese Unexamined Patent Publication No. 2000-140745 JP 2000-33301 A

Accordingly, an object of the present invention is to provide a method and apparatus for forming a uniform optical film with good reproducibility on an optical member having a large tilt angle.

  As a result of diligent research in view of the above object, the present inventors attached the substrate to a rotatable jig, sprayed the coating liquid containing the optical film component on the rotating substrate, and then caused the jig to run out of 50 μm or less. The present inventors have found that a uniform optical film can be formed with good reproducibility when the substrate is rotated at a substantially constant speed of 8,000 rpm or more while being held at the same temperature.

  That is, in the method for forming an optical film of the present invention, the substrate is attached to a rotatable jig, and while rotating the substrate, a coating liquid containing an optical film component is sprayed from a nozzle onto the substrate, and the obtained coating film is obtained. An optical film is formed on the substrate by drying the film, and the coating liquid is sprayed onto the substrate while rotating the substrate at a substantially constant speed of 8,000 rpm or more, and then the treatment is performed. The coating film is formed by rotating the substrate at the substantially constant speed while holding the shaft runout of the tool at 50 μm or less.

  In such a method, it is preferable to rotate the substrate sprayed with the coating liquid for 1 to 300 seconds in order to form a more uniform optical film. After spraying the coating liquid onto the substrate, it is preferable to form the coating film by rotating the substrate at the substantially constant speed while maintaining the rotational speed accuracy of the jig at ± 0.05% or less.

  It is preferable that the rotation axis of the jig is substantially vertical. The spray width of the coating liquid from the nozzle is larger than the effective diameter of the substrate, the distance between the nozzle and the substrate is larger than the height of the substrate, and the spraying direction of the coating liquid from the nozzle is It is preferable to arrange the nozzle above the substrate so as to substantially coincide with the optical axis direction.

  The viscosity of the coating solution is preferably 20 cP or less. The ratio of the optical film component in the coating solution is preferably 20% by mass or less based on the solid content.

  A high-pressure carrier gas is supplied to the nozzle and the coating liquid is sucked from the tank to the nozzle under a negative pressure. The resulting coating liquid fine particles and the carrier gas are discharged in an amount of 1 to 10 mL / min. The carrier gas is preferably discharged from the nozzle onto the substrate so that the discharge amount of the carrier gas is 1 to 10 L / min and the discharge error of the coating liquid is 0.1 mL / min or less.

  It is preferable to repeat the spraying of the coating liquid onto the substrate and the formation of the coating film by rotating the substrate sprayed with the coating liquid a plurality of times.

  In a preferred example of the present invention, a plurality of the jigs are provided on the same surface, the substrate is attached to each jig, and the nozzles are two-dimensionally arranged in the horizontal direction so that the nozzles pass over all the substrates. The coating solution is sprayed continuously while scanning. The scanning speed of the nozzle is preferably 1 to 2,000 mm / sec.

  An optical film forming apparatus according to the present invention includes at least a rotating jig that holds a substrate, a motor that rotationally drives the jig, and a nozzle that sprays a coating solution containing an optical film component onto the substrate. The motor is a spindle motor for driving or inspecting a disk, and when the jig is rotated at 8,000 rpm or more, the shaft runout of the jig is 50 μm or less.

  In a preferred example of such an apparatus, the substrate is a pickup objective lens of an optical information recording / reproducing apparatus having an optically effective portion having a curved surface and a flange portion provided on the outer periphery thereof, and the rotation axis of the jig Is substantially vertical, and the jig includes a cylindrical pedestal that supports the lens and a cylindrical cover that is attached to the lens to hold the lens, and the cylindrical cover includes a cylindrical portion, A plurality of plate-like tab-like pressing portions protruding inward from the upper end portion, and attaching the lens to the cylindrical pedestal by gripping the collar portion of the lens by the tab-like pressing portion. The coating liquid is sprayed onto the optically effective portion of the lens that is exposed.

  The tab-like pressing portion of the cylindrical cover may be inclined inward and downward. A claw may protrude from the lower part of the inner edge of the tab-shaped pressing portion of the cylindrical cover. The position where the tip of the tab-like pressing portion of the cylindrical cover enters the collar portion of the lens is preferably within a range of 20 to 80% of the width of the collar portion from the outer periphery of the collar portion. The jig may be composed of the columnar pedestal, the cylindrical cover, and a flat ring provided between them, whereby the tab-shaped pressing portion causes the flat ring to pass through the flat ring. Thus, the collar portion of the lens can be pressed in a planar shape over the entire circumference.

  In another preferred example of the above apparatus, the rotation axis of the jig is substantially vertical, and the jig is provided with a flange portion protruding upward at a peripheral end portion, and a plurality of screw types penetrating the flange portion. It consists of a columnar pedestal with a fastener. In this jig, the lens can be mounted by placing the lens on the bottom and pressing the side surface of the collar portion of the lens with the screw-type fastener.

  In still another preferred example of the above apparatus, the rotation axis of the jig is substantially vertical, the jig is provided with a flange portion protruding upward at a peripheral end portion, and a screw portion on an inner surface of the flange portion. It consists of a column-shaped base which has. With this jig, the lens can be attached by screwing a lens provided with a threaded portion on the side surface of the collar portion.

  In still another preferred example of the apparatus, a plurality of the jigs are provided on the same surface, and the plurality of jigs are driven by the motor via a gear transmission mechanism or a belt.

  The method and apparatus for forming an optical film are suitable for forming a uniform optical film with good reproducibility on a pickup objective lens of an optical information recording / reproducing apparatus.

  According to the present invention, it is possible to form a uniform optical film with good reproducibility and low cost on an optical member having a large tilt angle such as a pickup objective lens.

[1] Substrate The substrate on which the optical film is formed is not particularly limited. Examples thereof include a lens having a curved surface. The method and apparatus for forming an optical film of the present invention is particularly suitable for forming a uniform optical film on a lens having a relatively large tilt angle and a relatively small size. Examples of such a lens include a pickup objective lens of an optical information recording / reproducing apparatus. FIG. 1 shows an example of a pickup objective lens. Here, as shown in FIG. 1, the “tilt angle” represents the tilt angle of the substrate surface with respect to the tangent to the lens center, which is 0 ° at the lens center and increases as the distance from the center increases.

  The material of the pickup objective lens 1 is preferably glass or plastic. Specific examples of glass include BK7, F2, and SF1. Specific examples of the plastic include acrylic resin, polycarbonate, polyolefin and the like.

[2] Optical film forming apparatus Hereinafter, the optical film forming apparatus of the present invention will be described in detail, taking as an example the case where the substrate 1 is a pickup objective lens (hereinafter simply referred to as “lens” unless otherwise specified). To do. FIG. 2 shows an example of the optical film forming apparatus of the present invention. This apparatus includes (a) a rotating jig 20 having a rotating jig 20 for holding a substrate 1 and a case 22 having a built-in motor 21, and (b) an elevating device 3 for supporting the rotating jig unit 2. And (c) a coating device 4 having a nozzle 40 disposed above the substrate 1 and a tank 41 for feeding a coating liquid to the nozzle 40, and (d) a position control device 5 for moving the nozzle 40 two-dimensionally. (E) A rotating jig unit 2, an elevating device 3, a nozzle 40, and a housing 6 that houses a position control device 5 are provided.

(1) Rotating jig unit As shown in FIGS. 3 (a) and 3 (b), the rotating jig unit 2 incorporates a motor 21, and a gear 23 is provided at the tip of the spindle 210 of the motor 21. A gear 24 that engages with the gear 23 is provided at the lower end of the support shaft 25 of the rotating jig 20. The support shaft 25 of the rotating jig 20 is rotatably supported by the bearing portion 220 of the case 22. The bearing 220 is preferably a bearing. The jig 20 is rotationally driven by a motor 21 through a transmission mechanism including gears 23 and 24. However, the mechanism for transmitting the rotation of the motor 21 to the jig 20 is not limited to the transmission mechanism via a gear, and may be a transmission mechanism via a belt. In the illustrated example, the four jigs 20 are rotated by the motor 21, but the number of the jigs 20 rotated by the motor 21 can be appropriately set as necessary.

  In the apparatus of the present invention, when the rotating jig 20 is rotated at 8,000 rpm or more by the motor 21, the shaft runout of the rotating jig 20 needs to be 50 μm or less. When this axial blur is more than 50 μm, the thickness of the obtained optical film is not uniform. This axial runout is preferably 40 μm or less, and more preferably 30 μm or less. Here, as shown in FIG. 4, the “shaking” of the rotating jig 20 is a non-contact type laser displacement measuring device that rotates the jig 20 holding the substrate 1 and rotates on the side surface of the jig 20 that rotates in a steady state. 7 was arranged, displacement measurement was performed three times, and the maximum value of the obtained measurement values was obtained (the same applies hereinafter).

  In the apparatus of the present invention, when the rotary jig 20 is rotated at 8,000 rpm or more by the motor 21, the rotational speed accuracy of the rotary jig 20 is preferably ± 0.05% or less. If the rotational speed accuracy exceeds ± 0.05%, the thickness of the obtained optical film may be non-uniform. The rotational speed accuracy is more preferably ± 0.02% or less. Here, the rotational speed accuracy of the rotating jig 20 was obtained by monitoring the output signal of the encoder directly connected to the motor 21 (the same applies hereinafter).

  Shape accuracy of parts constituting the rotating jig unit 2 [rotating jig (columnar base 200 and cylindrical cover 201) 20, gears 23 and 24, support shaft 25, bearing portion of case 22 (eg bearing) 220], As for the assembly accuracy of the rotary jig unit 2, when the rotary jig 20 is rotated at 8,000 rpm or more by the motor 21, the shaft runout of the rotary jig 20 is 50 μm or less and the rotational speed accuracy is ± 0.05% or less. Like that.

  The motor 21 can hold the shaft shake of the rotating jig 20 to 50 μm or less when the rotating jig 20 is rotated at 8,000 rpm or more, and can maintain the rotational speed accuracy of the rotating jig 20 to ± 0.05% or less. Must. Specific examples of the motor 21 include a spindle motor for driving or inspecting a disk (for example, a hard disk, a CD, a DVD, etc.).

  In order to form a uniform optical film, the rotation jig 20 is preferably supported by the bearing portion 220 of the case 22 so that the rotation axis is substantially vertical. The term “substantially vertical” means not only the case where it is completely vertical, but also includes the case where it is slightly deviated from vertical within a range not impairing the effects of the present invention. Specifically, as shown in FIG. 5, the rotation axis of the rotating jig 20 is preferably supported within an angle range in which the angle θ with respect to the vertical direction V is within 3 degrees.

  The rotating jig 20 must be able to hold the substrate 1 firmly so that the substrate 1 does not shake during high-speed rotation of 8,000 rpm or more. As shown in FIGS. 6A to 6C, the rotating jig 20 includes a columnar pedestal 200 and a cylindrical cover 201 that is attached to the cylindrical jig 201 and holds the lens 1. The columnar pedestal 200 has a circular recess 200a that supports the bottom of the lens 1 on the top surface and a threaded portion 200b on the side surface. The recess 200a is provided so that the center point O of the jig coincides with the center point of the lens when the lens 1 is accommodated therein. The pedestal 200 may be integrally formed with the support shaft 25, or may be detachable from the support shaft 25. The cylindrical cover 201 includes a cylindrical portion 201a, three plate-like tab-like pressing portions (see FIG. 6A) 201b protruding inward from the upper end portion of the cylindrical portion 201a, and a lens insertion hole 201c. In addition, a screw part 201e that has a relief hole 201d formed between each of the tab-like pressing parts 201b and can be screwed to the screw part 200b of the base 200 is provided on the inner surface of the cylindrical part 201a.

  Usually, the pickup objective lens 1 has a collar portion 10 on the outer periphery of the optically effective portion. Since the tab-like pressing portion 201b is substantially parallel to the upper surface of the collar portion 10 of the lens 1, the upper surface of the collar portion 10 of the lens 1 can be pressed into a planar shape by the tab-like pressing portion 201b. The number of tab-shaped pressing portions 201b is preferably at least 3, but may be 2 or 4 or more as necessary. Since the cylindrical cover 201 has the escape hole 201d, the coating solution 13 unevenly distributed in the vicinity of the upper surface of the collar portion 10 of the lens 1 can be scattered by centrifugal force when rotating at a high speed of 8,000 rpm or more. Therefore, a uniform optical film can be formed.

The tip of the tab-like pressing portion 201b of the cylindrical cover 201, a position that has entered into the flange portion 10 of the lens 1 is preferably in a range from the flange portion 10 the outer periphery 20 to 80% of the width D ₁ of the flange portion 10, A range of 30 to 60% is more preferable (the same applies hereinafter). When this position from the flange portion 10 the outer periphery less than 20% of the width D ₁ of the flange portion 10, can not be firmly grip the lens 1. On the other hand, if it is 80% or more, it becomes difficult to form an optical film uniformly in the vicinity of the upper surface of the collar portion 10. Since the width D ₁ of the flange portion 10 is the normal 0.3 to 0.8 mm, the diameter D of the imaginary circle formed by connecting the respective edges of the tab-like pressing portion 201b of the cylindrical cover 201 shown in FIG. 6 (c) The dimensional tolerance of ₄ is within the range of ± 10μm to ± 50μm (the same applies hereinafter). The outer diameter D ₃ of the cylindrical cover 201 is not particularly limited, but is preferably 1.5 to 4 times the outer diameter D ₂ of the lens 1 (the same applies hereinafter). The thickness t ₁ of the tab-shaped pressing portion 201b is preferably 5 to 30% (the same applies hereinafter), where the height h of the lens 1 is 100%.

  Examples of the material of the columnar pedestal 200 and the cylindrical cover 201 include various metals (steel, cast iron, aluminum, etc.), various plastics, rubber, and the like.

7A and 7B show another example of the rotating jig. This example is the same as the rotating jig shown in FIG. 6 except that a flat ring 202 is provided between the columnar pedestal 200 and the cylindrical cover 201. The rotating jig 20 presses the collar portion 10 of the lens 1 in a planar shape over the entire circumference by gripping the collar portion 10 of the lens 1 through the flat ring 202 by the tab-like pressing portion 201b. be able to. The inner diameter D ₅ of a flat ring 202 is preferably about the same as the diameter D ₄ of the virtual circle formed by connecting the respective edges of the tab-like pressing portion 201b. The outer diameter D ₆ of the flat ring 202 is preferably larger than the outer diameter D ₂ of the lens 1. The thickness t ₂ of a flat ring 202, 5-30% of the lens 1 the height h of 100% is preferred. If the thickness t ₂ is 30 percent, it is impossible to scatter the coating liquid 13 unevenly distributed in the flange portion 10 near the top surface of the lens 1 by the centrifugal force during high-speed rotation.

  FIG. 8 shows still another example of the rotating jig. This example is the same as the rotating jig shown in FIG. 6 except that the tab-like pressing portion 201b of the cylindrical cover 201 is inclined inward and downward from the upper end portion of the cylindrical portion 201a. The rotating jig 20 can linearly press the upper surface of the collar portion 10 of the lens 1 by the corner portion of the inner edge portion of the tab-like pressing portion 201b.

  FIG. 9 shows still another example of the rotating jig. This example is the same as the rotating jig shown in FIG. 6 except that only the vicinity of the tip of the tab-shaped pressing portion 201b of the cylindrical cover 201 is inclined downward. Even in the rotating jig 20, the upper surface of the collar portion 10 of the lens 1 can be linearly pressed by the corner portion of the inner edge portion of the tab-shaped pressing portion 201b. As shown in FIG. 9, the upper surface of the collar portion 10 of the lens 1 may be a surface inclined inward and downward from the outer periphery. If the inclination angle of the upper surface of the collar portion 10 is appropriately selected, the collar portion 10 of the lens 1 can be pressed linearly or in a planar shape by the corner portion of the inner edge portion of the tab-shaped pressing portion 201b.

  FIGS. 10A to 10C show still another example of the rotating jig. This example is the same as the rotating jig shown in FIG. 6 except that a claw 201b ′ protrudes from the lower part of the inner edge of the tab-shaped pressing portion 201b of the cylindrical cover 201. The rotating jig 20 can linearly press the upper surface of the collar portion 10 of the lens 1 by the claw 201b ′ of the tab-like pressing portion 201b. If necessary, as shown in FIG. 11, a concave portion 11 that engages with the claw 201b ′ may be provided on the upper surface of the collar portion 10 of the lens 1.

  12A and 12B show still another example of the rotating jig. This example is the same as the rotating jig shown in FIG. 6 except that a claw 201b ″ having a sharp corner at the tip protrudes from the lower portion of the inner edge of the tab-shaped pressing portion 201b of the cylindrical cover 201. The rotating jig 20 can press the collar portion 10 of the lens 1 in a dot shape by the claw 201b '' of the tab-like pressing portion 201b. If necessary, a concave portion that engages with the claw 201b ″ may be provided on the upper surface of the collar portion 10 of the lens 1. This recess preferably has a shape that fits the shape of the claw 201b ''.

  FIGS. 13A and 13B show still another example of the rotating jig. The rotating jig 20 ′ includes a pedestal having a flange portion 200c protruding upward at a peripheral end portion and a screw type fastener 200d penetrating the flange portion 200c. The rotating jig 20 ′ can press the side surface of the collar portion 10 of the lens 1 with a screw-type fastener 200d. Although not limited thereto, as shown in FIG. 13 (b), a claw 200d ′ is projected from the tip of the screw-type fastener 200d, and is engaged with the claw 200d ′ on the side surface of the collar portion 10 of the lens 1. A recess 11 'is preferably provided. It is preferable to provide at least three screw type fasteners 200d.

  FIG. 14 shows still another example of the rotating jig. The rotating jig 20 '' includes a pedestal having a flange portion 200c ′ protruding upward at the peripheral end portion and a screw portion 200e on the inner surface of the flange portion 200c ′. The lens 1 having the threaded portion 12 provided on the side surface of the collar portion 10 is screwed into the rotating jig 20 '' to fix the lens 1.

(2) Coating device FIG. 15 shows the coating device 4. The coating device 4 generates a positive pressure by supplying a positive pressure gas to the coating liquid tank 41 and an air suction means 42 for sucking the air in the coating liquid tank 41 to generate a negative pressure. A positive pressure supply means 43 to be connected, a compressor 45 for sending a carrier gas 44 is connected to the nozzle 40, and a mixture of the coating liquid 13 and the carrier gas 44 can be sprayed from the nozzle 40. it can. The coating liquid tank 41 is connected to the side surface portion of the nozzle 40, and the compressor 45 is connected to the axial center portion of the nozzle 40. As the coating device 4, a coating liquid supply system disclosed in Japanese Patent Laid-Open No. 2003-135999 may be used.

(3) Position Control Device The position control device 5 (see FIG. 2) allows the nozzle 40 to be scanned two-dimensionally in the horizontal direction while maintaining a certain distance from the lens 1. The position control device 5 is not particularly limited as long as the nozzle 40 can be two-dimensionally scanned. Examples of the linear motion mechanism of the position control device 5 include a mechanism using a linear motion actuator and a linear motor, and a mechanism composed of a rack and gears. The position control device 5 is controlled by, for example, an electronic control device that performs signal processing according to a program stored in advance. A position control device (for example, an XYZ stage) or a robot arm that can move the nozzle 40 three-dimensionally without using the lifting device 3 may be used.

(4) Housing Since the air supply port 60 is provided on the top surface of the housing 6 and the exhaust pipe 61 is provided on the back surface, the mist of the coating liquid 13 sprayed from the nozzle 40 is inside the housing 6. It is possible to prevent the coating liquid 13 from adhering to portions other than the lens 1.

[3] Optical Film Formation Method A method for forming an optical film on the pickup objective lens using the above apparatus will be described in detail below.

(1) Preparation of coating solution An optical film component and a solvent are mixed to prepare a coating solution 13. The optical film component is preferably a metal alkoxide, an ultraviolet curable resin, a thermosetting resin, or an inorganic fine particle-binder composite. As the binder, an ultraviolet curable resin or a thermosetting resin is preferable.

  The solvent is preferably a volatile solvent in which the optical film component is soluble. Specific examples include alcohols, glycols, ketones, esters, and fluorine-based solvents (for example, perfluoroether). These solvents can be used in combination. When the optical film component is a metal alkoxide, a catalyst is added to the coating solution.

  The viscosity of the coating solution 13 is preferably 20 cP or less. When the viscosity of the coating solution 13 exceeds 20 cP, the resulting optical film is not only non-uniform, but also easily peeled off from the lens 1. This viscosity is more preferably 5 cP or less. The compounding amount of the optical film component is preferably 20% by mass or less, based on 100% by mass of the entire coating solution. When the blending amount exceeds 20% by mass, the viscosity of the coating liquid 13 is too high.

(2) Supply of coating liquid to nozzle After the inside of the coating liquid tank 41 is made negative by the air suction means 42, the flow rate of the positive pressure gas is adjusted by the positive pressure supply means 43 to adjust the pressure in the coating liquid tank 41. The flow rate of the coating liquid 13 that is adjusted and sucked into the nozzle 40 by negative pressure is controlled. As the positive pressure gas, air that does not react with the coating liquid 13 or an inert gas is preferable. The flow rate of the positive pressure gas supplied to the coating solution tank 41 can be adjusted by a mass flow controller (not shown) without being affected by pressure and temperature changes. Therefore, the supply amount of the coating liquid 13 to the nozzle 40 can be accurately controlled.

(3) Mixing and discharging of coating liquid and carrier gas In order to form an optical film with a uniform thickness, the rotational speed of lens 1 is set to a steady state at 8,000 rpm or more, and then coating liquid 13 is sprayed onto lens 1. . A high-pressure carrier gas 44 is supplied from the compressor 45 to the nozzle 40, and the coating liquid 13 in the coating liquid tank 41 is sucked into the nozzle 40 by negative pressure. The coating liquid 13 is atomized in the nozzle 40 by the high-speed air current of the carrier gas 44, mixed uniformly with the carrier gas 44, and discharged from the nozzle 40 in a spray form. The carrier gas 44 is preferably an inert gas that does not react with the coating liquid 13.

  The discharge rate of the coating solution 13 is preferably 1.0 to 10.0 mL / min, the discharge rate of the carrier gas 44 is preferably 1.0 to 10.0 L / min, and the discharge rate error of the coating solution 13 is preferably 0.1 mL / min or less. If the discharge amount of the coating liquid 13 and its error are within the above ranges, a uniform optical film can be formed efficiently.

  The discharge amount of the coating liquid 13 and the carrier gas 44 is within the above range. More specifically, the volume ratio of the coating liquid 13 and the carrier gas 44 is preferably 1: 100 to 1: 10,000, and 1: 500. ˜1: 2,000 is more preferred. Thus, since the coating liquid 13 being sprayed is extremely small compared to the carrier gas 44, the distribution of the coating liquid microparticles being sprayed is very uniform, and the coating liquid 13 adheres uniformly onto the lens 1. If the volume ratio of the carrier gas 44 to the coating liquid 13 is less than 100, the concentration of the coating liquid during spraying is too high, and it is difficult to form a uniform optical film. On the other hand, when the volume ratio is more than 10,000, the concentration of the coating solution during spraying is too thin, and the optical film formation efficiency is poor.

The nozzle 40 is preferably arranged so that the spray is injected perpendicular to the lens 1. Thereby, it can spray on the lens 1 more uniformly. As shown in FIG. 16, the entire lens surface is sprayed so that the relationship between the spray spray width (SW) and the effective diameter (EW) of the lens is SW> EW. Here, the effective diameter (EW) of the lens 1 refers to a diameter of the objective lens that is not obstructed by a fixing ring or the like. The nozzle 40 is preferably arranged so that the relationship between the distance (D ₇ ) between the nozzle 40 and the lens 1 and the height (h) of the lens 1 is D ₇ > h. The relationship between SW and EW is SW> EW, the relationship between D ₇ and h is D ₇ > h, and the injection direction of the coating liquid 13 from the nozzle 40 is substantially coincident with the optical axis direction of the lens 1. By scanning the center, the spray conditions can be made substantially the same at the central portion and the peripheral portion of each lens 1, so that the coating liquid 13 can be uniformly applied to the lens 1 having a large inclination angle. it can.

(4) Scanning In order to spray the coating liquid 13 uniformly on all the lenses 1 on the rotating jig unit 2, the nozzle 40 is moved two-dimensionally with respect to the rotating jig unit 2 to rotate the rotating jig. The coating liquid 13 is sprayed on the plurality of lenses 1 placed on the unit 2. The scanning area of the nozzle 40 preferably covers the entire area of the lens 1 and is wider than the area of the lens 1. When the coating liquid 13 is sprayed while moving the nozzle 40 relatively two-dimensionally in the horizontal direction while keeping a certain distance from the rotating jig unit 2 within the mounting region of the lens 1 on the rotating jig unit 2, Waste of the coating liquid 13 can be suppressed. On the other hand, when the nozzle 40 is installed at one point on the rotary jig unit 2, the spray amount of the coating liquid 13 is different between the lens 1 close to the nozzle 40 and the lens 1 far from the nozzle 40. The film thickness of the optical film becomes non-uniform.

  FIG. 17 schematically shows an example of a scanning method of the nozzle 40. The nozzle 40 preferably scans the mounting region of the lens 1 on the stage 1 as shown by the scanning line 400 and makes a round in a square shape. The scanning line 400 of the nozzle 40 preferably passes through the center of each lens 1.

  If the step of scanning the mounting area of the lens 1 on the rotating jig unit 2 and making one round in a square shape is one set, it is preferable to scan 1 to 3 sets to form one layer. The number of sets is appropriately set according to the desired thickness of the optical film.

The scanning speed of the nozzle 40 is preferably 100 to 2,000 mm / sec. The faster the scanning speed, the higher the production efficiency. However, if the scanning speed exceeds 2,000 mm / second, the coating liquid 13 is not sufficiently adhered to the lens 1. On the other hand, even if the speed is less than 100 mm / sec, the efficiency is reduced and the effect of homogenization is not changed. In the case of a pickup lens, the distance D ₇ between the nozzle 40 and the upper surface of the lens 1 is preferably 10 to 100 mm. If the distance D ₇ is more than 100 mm, most of the coating solution 13 diffuses outside the lens 1 mounting area, so that the coating efficiency is low. When the distance D ₇ is less than 10 mm, the coating liquid 13 is not evenly adhered.

(5) Lens rotation speed and rotation holding time After the coating liquid 13 is sprayed on the lens 1 for one layer, the lens is rotated for a predetermined time while maintaining the rotation speed at a steady state of 8,000 rpm or more. As described above, the apparatus of the present invention is capable of rotating the axis of the jig 20 (20 ′, 20 ″) even when the rotation speed of the jig 20 (20 ′, 20 ″) to which the lens 1 is attached is 8,000 rpm or more. Since the blur is maintained at 50 μm or less, the thickness of the obtained optical film becomes uniform. When this rotation speed is less than 8,000 rpm, the thickness of the obtained optical film becomes non-uniform. This rotational speed is preferably 9,000 rpm or more, and more preferably 9,500 rpm or more. The upper limit of the rotational speed is not particularly limited as long as it is technically possible, but is preferably 15,000 rpm.

  If the rotation speed of the jig 20 (20 ′, 20 ″) holding the lens 1 is kept at 8,000 rpm or more while keeping the shaft runout at 50 μm or less, the reason why the film thickness becomes uniform is not clear. When the rotation speed of the tool 20 (20 ′, 20 ″) is less than 8,000 rpm or the shaft runout is more than 50 μm, as shown in FIGS. 18 (a) and 18 (b), the upper surface of the collar portion 10 of the lens 1 The coating liquid 13 is unevenly distributed in the vicinity, and the coating liquid 13 varies in the circumferential direction. However, when the rotational speed is set to 8,000 rpm or more and a large centrifugal acceleration is applied to the outer periphery of the lens 1, as shown in FIG. As shown in FIG. 18 (d), the coating liquid 13 that is unevenly distributed in the vicinity of the upper surface of the collar portion 10 of the lens 1 can be scattered, and the shaft shake is kept at 50 μm or less at a rotational speed of 8,000 rpm or more. It is estimated that the variation in the circumferential direction of the coating liquid 13 is suppressed.

  After spraying the coating liquid 13 on the lens 1 for one layer, it is preferably rotated for 1 to 300 seconds while maintaining the rotation speed at a steady state of 8,000 rpm or more. If the rotation holding time is less than 1 second, the thickness of the obtained optical film is not uniform. On the other hand, even if it exceeds 300 seconds, the effect of uniform film thickness is saturated. The rotation holding time is more preferably 1 to 100 seconds.

(6) Drying and curing treatment The coating film having a uniform film thickness by drying is dried. Since the solvent in the coating solution 13 is volatile, it can be naturally dried, but drying may be accelerated by heating. The heating temperature is set to a range below the glass transition temperature of the lens 1. When the coating solution contains a resin, the dried film is cured. The curing method is appropriately selected according to the resin component. For example, when the resin component is UV curable, UV irradiation is performed using a UV irradiation device. When the resin component is thermosetting, heat treatment is performed. The heating temperature is in the range below the glass transition temperature of the lens. You may perform a drying and hardening process continuously.

(7) Formation of Multilayer Film By repeating the above steps (1) to (6), a multilayer optical film can be formed on the surface of the lens 1. In this case, the optical film component may be changed for each layer.

[4] Optical article By the above forming method, an optical film having a thickness of 1 μm or less can be formed on the pickup objective lens 1 with a uniform thickness. For example, when an optical film having a thickness of 100 nm or less is formed on the pickup lens, the thickness at the portion where the tilt angle is 65 ° is 2.5 times or less than the thickness of the optical film at the portion where the tilt angle is 0 °.

  An optical article in which a single-layer or multilayer optical film is formed on a substrate has various characteristics depending on the type of the substrate and the optical film. A typical example of the optical film is an antireflection film. Since the antireflection film needs to be formed with a uniform thickness on the substrate due to its nature, the method and apparatus of the present invention are very suitable for forming the antireflection film. When the method of the present invention is used for a lens having a curved surface, particularly a pickup lens, an optical article having an optical film having excellent uniformity can be obtained.

  Although the present invention has been described with reference to the drawings as described above, the present invention is not limited thereto, and various modifications can be made without changing the gist of the present invention.

  The present invention will be described in more detail with reference to the following examples, but the present invention is not limited to these examples.

Example 1
(1) Preparation of organic-modified silica-containing sol Tetramethoxysilane trimer 3.54 g, methanol 30.33 g, and 0.05 N ammonia 1.92 g were mixed and stirred at room temperature for 72 hours to produce wet silica gel. Methanol was removed by decantation, ethanol was added to wet silica gel and shaken, the dispersion medium was replaced with ethanol, and ethanol was removed by decantation. Subsequently, methyl isobutyl ketone (MIBK) was added and shaken, the dispersion medium was replaced with MIBK, and MIBK was removed by decantation.

  A MIBK solution of triethylchlorosilane (concentration: 5% by volume) was added to gelled silica and stirred for 30 hours to organically modify the silicon oxide terminal. The organically modified silica gel obtained is washed with MIBK, then MIBK is added to 1 mass%, and sonication (20 kHz, 500 W, 120 minutes) is performed to obtain an organically modified silica-containing sol having a viscosity of 0.65 cP. Obtained.

(2) Coat The organic-modified silica-containing sol obtained in (1) above is applied to the pickup lens (maximum incident angle 65 °, diameter D ₂ 4 mm, effective diameter (EW) 3 mm, height h 3 mm) as shown in FIG. Coating was performed under the conditions shown in Table 1 using the apparatus shown in No. 3 [motor: spindle motor for disc inspection (rotational speed accuracy: ± 0.005% or less) manufactured by Chiba Precision Co., Ltd., jig: type shown in FIG. 6]. When the rotation speed reached a steady state at 10,200 rpm, the nozzle was scanned so as to follow the square scanning line shown in FIG. 17 while spraying the coating liquid from the nozzle, and then kept rotating for 30 seconds. The shaft runout at the same rotational speed was determined to be 18 μm by a non-contact type laser displacement measuring instrument (manufactured by Keyence Corporation, measuring unit LC-2430, controller LC-2400). The speed accuracy at the same rotational speed was obtained by monitoring the output signal of the encoder directly connected to the motor and found to be ± 0.01% or less. This series of operations (spraying and rotation treatment) was repeated three times and dried at room temperature to form an optical film made of organically modified silica airgel.

  Measure the thickness (physical film thickness) of the optical film at the inclination angle α in the range of 0 to 65 degrees on the surface (see Fig. 19) for the 10 lenses with optical film (using an optical film thickness meter) In the range of 0 degrees to 60 degrees, measured in increments of 10 degrees), the average value was obtained at each inclination angle α. Table 2 shows the average film thickness and standard deviation.

  From Table 2, the average film thickness in the portion where the inclination angle α is 65 ° was 1.8 times the average film thickness in the portion where the inclination angle α was 0 °. It can also be seen that the change in average film thickness is generally gentle when the inclination angle α is in the range of 0 ° to 65 °.

Example 2
A lens with an optical film was produced in the same manner as in Example 1 except that the rotation speed was 13,000 rpm. About the obtained 10 lenses with optical films, the average film thickness at each inclination angle α in the range of 0 to 65 degrees was obtained in the same manner as described above. The results are shown in Table 3.

  From Table 3, the average film thickness in the portion where the inclination angle α was 65 ° was 2.4 times the average film thickness in the portion where the inclination angle α was 0 °. In addition, the change in average film thickness in the range where the inclination angle α was 0 ° to 65 ° was gentle overall.

Comparative Example 1
A lens with an optical film was manufactured in the same manner as in Example 1 except that a device having a motor with a large shaft shake and a shaft shake of 120 μm at a rotational speed of 10,200 rpm was used. About the obtained 10 lenses with optical films, the average film thickness at each inclination angle α in the range of 0 to 65 degrees was obtained in the same manner as described above. The results are shown in Table 4.

  From Table 4, the average film thickness in the portion where the inclination angle α is 65 degrees is 2.8 times the average film thickness in the portion where the inclination angle α is 0 degrees, and the film thickness is not uniform as compared with Examples 1 and 2. there were.

Comparative Example 2
A lens with an optical film was produced in the same manner as in Example 1 except that the rotation speed was 2,000 rpm. About the obtained ten lenses with optical films, the average film thickness at each inclination angle α in the range of 0 to 65 degrees was determined in the same manner as described above. The results are shown in Table 5.

  From Table 5, the average film thickness is maximum at the portion where the inclination angle α is 50 °, and the average film thickness at the portion where the inclination angle α is 50 ° is 4.2 times the average film thickness at the portion where the inclination angle α is 0 °. Met. Further, the average film thickness rapidly decreased from the portion where the inclination angle α was 50 ° to the portion where 65 °, and clearly the film thickness was not uniform as compared with Examples 1 and 2.

It is sectional drawing which shows an example of the lens used for the optical film formation method of this invention. It is a partially cutaway perspective view showing an example of an optical film forming apparatus of the present invention. It is a longitudinal cross-sectional view which shows the rotating jig unit of the optical film forming apparatus of FIG. It is a cross-sectional view which shows the rotation jig unit of the optical film forming apparatus of FIG. It is sectional drawing which shows the measuring method of axial blurring. It is sectional drawing which shows the angle with respect to the perpendicular direction of the rotating shaft of a jig | tool. It is a top view which shows the rotation jig of the optical film forming apparatus of FIG. It is AA sectional drawing of the rotating jig of Fig.6 (a). It is a top view which shows the cylindrical cover of the rotating jig of Fig.6 (a). It is a top view which shows another example of the rotation jig of the optical film forming apparatus of FIG. It is BB sectional drawing of the rotation jig of Fig.7 (a). It is sectional drawing which shows another example of the rotation jig of the optical film forming apparatus of FIG. It is sectional drawing which shows another example of the rotation jig of the optical film forming apparatus of FIG. It is sectional drawing which shows another example of the rotation jig of the optical film forming apparatus of FIG. FIG. 11 is a bottom view showing a cylindrical cover of the rotating jig of FIG. 10 (a). FIG. 11 is a partial perspective view of the cylindrical cover of FIG. 10 (b). It is sectional drawing which shows another example of the rotation jig of the optical film forming apparatus of FIG. It is a bottom view which shows another example of the cylindrical cover of the rotation jig of the optical film forming apparatus of FIG. FIG. 13 is a partial perspective view of the cylindrical cover of FIG. 12 (a). It is a top view which shows another example of the rotation jig of the optical film forming apparatus of FIG. FIG. 14 is a cross-sectional view of the rotating jig of FIG. 13 (a). It is sectional drawing which shows another example of the rotation jig of the optical film forming apparatus of FIG. It is the schematic which shows the coating device of the optical film forming apparatus of FIG. FIG. 16 is a partially enlarged view of FIG. It is the schematic which shows an example of the scanning method of a nozzle. (a) is a longitudinal sectional view showing a rotating state of a lens sprayed with a coating liquid (rotational speed less than 8,000 rpm or shaft shake more than 50 μm), (b) is a DD sectional view of (a), ( c) is a longitudinal cross-sectional view showing a rotating state of the lens sprayed with the coating liquid (rotational speed of 8,000 rpm and shaft runout of 50 μm or less), and (d) is an EE cross-sectional view of (c). 3 is a cross-sectional view showing a pickup lens used in Example 1. FIG.

Explanation of symbols

1 ... Substrate (Pickup objective lens)
10 ... collar
11, 11 '... recess
12 ... Screw part 2 ... Rotating jig unit
20,20 ', 20''・ ・ ・ Rotating jig
200 ... Cylindrical base
200a ・ ・ ・ Recess
200b, 200e ・ ・ ・ Threaded part
200c, 200c '・ ・ ・ Flange part
200d ・ ・ ・ Screw clamp
200d '・ ・ ・ nail
201 ・ ・ ・ Cylindrical cover
201a ・ ・ ・ Cylinder part
201b ・ ・ ・ Tab-shaped pressing part
201b ', 201b''... nail
201c ・ ・ ・ Lens insertion hole
201d ...
201e ・ ・ ・ Screw part
202 ... flat ring
21 ... Motor
210 ... Spindle
22 ・ ・ ・ Case
220 ・ ・ ・ Bearing part
23, 24 ... Gear
25 ... support shaft 3 ... lifting device 4 ... coating device
40 ... Nozzle
400 ... Scanning line
41 ... Tank
42 ... Air suction means
43 ... Positive pressure supply means
44 ・ ・ ・ Carrier gas
45 ... Compressor 5 ... Position control device 6 ... Case
60 ... Air supply port
61 ... Exhaust pipe 7 ... Non-contact laser displacement measuring instrument
13 ... Coating solution

Claims (24)

  A substrate is attached to a rotatable jig, and while the substrate is rotated, a coating liquid containing an optical film component is sprayed from a nozzle onto the substrate, and the obtained coating film is dried, whereby the substrate is optically coated. In this method of forming a film, while spraying the coating liquid on the substrate while rotating the substrate at a substantially constant speed of 8,000 rpm or more, while maintaining the shaft runout of the jig at 50 μm or less, A method of forming an optical film, wherein the coating film is formed by rotating the substrate at the substantially constant speed.   2. The method for forming an optical film according to claim 1, wherein the substrate sprayed with the coating liquid is rotated for 1 to 300 seconds.   3. The optical film forming method according to claim 1, wherein after spraying the coating liquid onto the substrate, the substrate is held at the substantially constant position while maintaining a rotational speed accuracy of the jig within ± 0.05% or less. A method of forming an optical film, wherein the coating film is formed by rotating at a speed.   4. The method of forming an optical film according to claim 1, wherein the rotation axis of the jig is substantially vertical, and the spray width of the coating liquid from the nozzle is larger than the effective diameter of the substrate. The nozzle is disposed above the substrate so that the distance between the substrate and the substrate is greater than the height of the substrate, and the spray direction of the coating liquid from the nozzle substantially matches the optical axis direction of the substrate. An optical film forming method characterized by the above.   In the formation method of the optical film in any one of Claims 1-4, the ratio of the optical film component in the said coating liquid shall be 20 mass% or less on a solid content basis, and the viscosity of the said coating liquid is 20 cP or less. A method for forming an optical film.   The optical film forming method according to any one of claims 1 to 5, wherein a high-pressure carrier gas is supplied to the nozzle and the coating liquid is sucked from the tank to the nozzle under a negative pressure, and the obtained coating liquid fine particles and The carrier gas discharge rate of the coating liquid is 1 to 10 mL / min, the carrier gas discharge rate is 1 to 10 L / min, and the coating liquid discharge rate error is 0.1 mL / min or less. As described above, the method for forming an optical film is characterized in that the nozzle is discharged onto the substrate.   7. The method of forming an optical film according to claim 1, wherein a plurality of the jigs are provided on the same surface, the substrate is attached to each jig, and the nozzle passes over all the substrates. And a method of forming an optical film, wherein the coating solution is sprayed continuously while the nozzle is scanned two-dimensionally in the horizontal direction.   8. The method of forming an optical film according to claim 7, wherein a scanning speed of the nozzle is set to 1 to 2,000 mm / second.   9. The method for forming an optical film according to claim 1, wherein the coating liquid is sprayed onto the substrate and the coating film is formed by rotating the substrate sprayed with the coating liquid a plurality of times. A method for forming an optical film.   10. The method of forming an optical film according to claim 1, wherein a pickup objective lens of an optical information recording / reproducing apparatus is used as the substrate.   An apparatus for forming an optical film, comprising: a rotating jig for holding a substrate; a motor for rotating the jig; and a nozzle for spraying a coating liquid containing an optical film component onto the substrate. Is a spindle motor for driving or inspecting a disk, and when the jig is rotated at a speed of 8,000 rpm or more, the jig has a shaft runout of 50 μm or less.   12. The optical film forming apparatus according to claim 11, wherein when the jig is rotated at 8,000 rpm or more, the rotational speed accuracy of the jig is ± 0.05% or less.   13. The optical film forming apparatus according to claim 11, wherein the substrate is a pickup objective lens of an optical information recording / reproducing apparatus having an optically effective portion having a curved surface and a collar portion provided on an outer periphery thereof. A device characterized by being.   14. The optical film forming apparatus according to claim 13, wherein the rotation axis of the jig is substantially vertical, and the jig holds a cylindrical base that supports the lens, and is attached to the lens to hold the lens. A cylindrical cover, and the cylindrical cover includes a cylindrical portion and a plurality of plate-like tab-like pressing portions protruding inward from an upper end portion thereof, and the lens is formed by the tab-like pressing portion. The lens can be attached to the cylindrical pedestal by gripping the collar portion of the lens, and the coating liquid is sprayed onto the optically effective portion of the lens exposed.   15. The optical film forming apparatus according to claim 14, wherein the jig includes the columnar pedestal, the cylindrical cover, and a plate-shaped ring provided therebetween, and the tab-shaped pressing portion. By gripping the collar portion of the lens via the flat ring, the device can press the collar portion of the lens in a planar shape over the entire circumference.   16. The optical film forming apparatus according to claim 14, wherein the tab-like pressing portion of the cylindrical cover is inclined inward and downward.   17. The optical film forming apparatus according to any one of claims 14 to 16, wherein a claw projects from a lower portion of an inner edge portion of the tab-shaped pressing portion of the cylindrical cover.   18. The optical film forming apparatus according to claim 14, wherein a position where a tip of the tab-shaped pressing portion of the cylindrical cover enters the collar portion of the lens is from the outer periphery of the collar portion to the collar portion. A device characterized in that it is in the range of 20-80% of the width.   14. The optical film forming apparatus according to claim 13, wherein a rotation axis of the jig is substantially vertical, and the jig is provided with a flange portion protruding upward at a peripheral end portion, and penetrates the flange portion. Composed of a cylindrical pedestal having a plurality of screw-type fasteners, placing the lens on the bottom of the jig, and pressing the side surface of the collar portion of the lens with the screw-type fasteners, An apparatus for attaching the lens.   14. The optical film forming apparatus according to claim 13, wherein a rotation axis of the jig is substantially vertical, and the jig includes a flange portion protruding upward at a peripheral end portion, and an inner surface of the flange portion. An apparatus comprising: a cylindrical pedestal having a threaded portion; a lens having a threaded portion provided on a side surface of the collar portion;   The optical film forming apparatus according to any one of claims 11 to 20, wherein a rotation axis of the jig is substantially vertical, a spray width of the coating liquid from the nozzle is larger than an effective diameter of the substrate, The nozzle is disposed above the substrate such that the distance between the nozzle and the substrate is greater than the height of the substrate, and the direction in which the coating liquid is ejected from the nozzle substantially coincides with the optical axis direction of the substrate. A device characterized by that.   The optical film forming apparatus according to any one of claims 11 to 21, further comprising a tank for feeding the coating liquid to the nozzle, and feeding the coating liquid by feeding a high-pressure carrier gas to the nozzle. The nozzle is sucked into the nozzle from the tank under a negative pressure, and the coating liquid fine particles and the carrier gas obtained have a coating liquid discharge rate of 1 to 10 mL / min, and the carrier gas discharge rate of 1 to 10 L / min. And an apparatus for discharging the coating liquid from the nozzle onto the substrate so that an error in discharging amount of the coating liquid is 0.1 mL / min or less.   23. The optical film forming apparatus according to claim 11, further comprising a position control device capable of two-dimensionally scanning the nozzle in a horizontal direction while maintaining a certain distance from the lens. A plurality of the jigs are provided on the same surface, and the nozzles are continuously scanned while two-dimensionally scanning in the horizontal direction so that the nozzles pass over all the substrates attached to the jigs. A device characterized by spraying a coating liquid. 24. The optical film forming apparatus according to claim 23, wherein the plurality of jigs are driven by the motor via a gear transmission mechanism or a belt.

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