JP4829535B2 - X-ray generator and irradiation unit - Google Patents

Description

  The present invention relates to an X-ray generator and an irradiation unit that emit X-rays.

Conventionally, X-ray generators having X-ray tubes that emit X-rays are widely used in a wide range of fields including IC (integrated circuit), LCD (liquid crystal display device), PDP (plasma display panel) manufacturing fields, etc. It is known as a static elimination (static elimination) device that eliminates static electricity, and generates an ion gas by irradiating a gas such as air with X-rays to neutralize an object (for example, Patent Document 1). reference).
JP 7-6859 A

  However, in the prior art described in Patent Document 1, maintenance work such as an X-ray tube and a voltage generation unit for driving the X-ray tube may be required due to long-term use and the like, and the maintenance work is simplified. Is required.

  The present invention has been made to solve such problems, and an object of the present invention is to provide an X-ray generator and an irradiation unit that simplify maintenance work.

  An X-ray generator according to the present invention electrically connects an X-ray tube that emits X-rays and a plurality of irradiation units having a voltage generator that drives the X-ray tube, a power supply that supplies power to the irradiation unit, and the irradiation unit. A connector that is connected to the housing, and a housing that has a hollow bar shape extending in one direction, and that accommodates the X-ray tube, the voltage generator, and the connector, and includes a plurality of irradiation units along the longitudinal direction of the housing. The irradiation unit has a plurality of unit mounting portions arranged side by side, and is detachably mounted on the unit mounting portion.

  An irradiation unit according to the present invention includes an X-ray tube that emits X-rays, and a voltage generation unit that drives the X-ray tube, and is detachably mounted on the unit mounting unit. .

  According to such an X-ray generator and irradiation unit, since the irradiation unit having the X-ray tube and the voltage generation unit is detachably mounted on the unit mounting portion of the housing, the irradiation unit can be easily attached and detached. When troubles such as the life of the tube and the failure of the voltage generator occur, the irradiation unit can be replaced and attached in a short time. Thereby, the maintenance work can be simplified.

  Here, the case has a case main body in which a unit mounting portion is formed, and the irradiation unit includes a unit cover that forms an outer wall of the case together with the case main body.

  The unit cover is provided with an emission opening for emitting X-rays emitted from the X-ray tube to the outside of the housing, and a flange portion fixed to the unit mounting portion. The irradiation unit includes the flange portion and the unit. When the mounting part is fixed in surface contact, the heat generated in the X-ray tube is transmitted to the unit cover, and the heat transmitted to the unit cover is effectively transmitted to the case body through surface contact through the flange part. Therefore, heat dissipation is performed efficiently. Thereby, it becomes possible to maintain the temperature of an X-ray tube appropriately, and it becomes possible to improve the reliability of an X-ray generator.

  In addition, the housing body is provided with a concave portion that conforms to the shape of the flange portion as a unit mounting portion, and the outer surface of the unit cover is substantially flush with the outer surface of the housing main body. By bringing the flange portion into contact with each other, the contact area between the unit cover and the housing body can be increased, and the heat dissipation efficiency can be improved. Moreover, since the recessed part which follows the shape of a flange part is formed, this recessed part fulfill | performs a guide function and positioning of an irradiation unit is made easy. Further, since the outer surface of the housing is flush, handling is facilitated.

  The casing has a rectangular tube shape, and the unit cover includes a front wall portion in which an emission opening is formed, and a pair of side wall portions that are substantially orthogonal to the front wall portion and face each other. The housing body has a notch-shaped recess that follows the shape of the side wall of the unit cover as a unit mounting portion. By gripping the side wall of the unit cover, the housing body of the irradiation unit The attachment / detachment with respect to is easy, and the maintenance work is further simplified.

  The irradiation unit includes a protection case that includes a unit cover and protects the X-ray tube and the voltage generator, and a socket that is electrically connected to the connector. The protection case has an outer wall in the longitudinal direction of the housing. The irradiation unit is mounted on the casing when the socket fixing wall configured to fix the socket to the outer surface and the guide wall protruding outward from the socket fixing wall in the longitudinal direction of the casing is provided. At this time, the wiring is guided to the opposite side of the unit cover by the guide wall, and the wiring is prevented from being sandwiched between the housing and the irradiation unit. Thereby, damage to the wiring can be prevented and the wiring can be smoothly accommodated in the housing.

  Further, the X-ray generator of the present invention comprises a plurality of irradiation units having an X-ray tube that emits X-rays and a voltage generation unit that drives the X-ray tube, and a hollow bar shape extending in one direction, A housing for accommodating the X-ray tube and the voltage generator, and having a plurality of unit mounting portions for juxtaposing a plurality of irradiation units along the longitudinal direction of the housing. It is characterized by being attached.

  According to such an X-ray generator, since the irradiation unit having the X-ray tube and the voltage generator is arranged in parallel in the bar-shaped housing, the X-ray generator is arranged in the longitudinal direction by the plurality of X-ray tubes arranged in parallel. While the X-ray irradiation range is expanded, the intervals between the irradiation units can be easily made constant, and the X-ray generator can be handled easily.

  According to the X-ray generator and the irradiation unit of the present invention, since the irradiation unit can be replaced and detached in a short time, an X-ray generator and an irradiation unit that can simplify maintenance work in the X-ray generator are provided. can do.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of an X-ray generator according to the invention will be described with reference to the drawings. In the description of the drawings, the same or corresponding elements are denoted by the same reference numerals, and redundant description is omitted. 1 is a perspective view showing the X-ray generator according to the first embodiment of the present invention from below, FIG. 2 is an exploded side view of the X-ray generator shown in FIG. 1, and FIG. 3 is an X in FIG. 4 is a perspective view showing the irradiation unit in FIG. 1 from below, FIG. 5 is a plan view showing the inside of the irradiation unit shown in FIG. 4, and FIG. 6 is a view of the irradiation unit shown in FIG. FIG. 7 is a perspective view showing the unit mounting portion shown in FIG. 1 from below. In the following description, terms indicating directions such as “up” and “down” are referred to in the states of the respective drawings.

  An X-ray generator 1 shown in FIG. 1 is installed in a clean room or the like, for example, in a production line that handles large glass and the like. ). And X-ray generator 1 is installed above the large glass which is a subject, and irradiates X-rays from the upper part to the lower part. The X-ray generator 1 has a plurality (three in this embodiment) of irradiation units 3 each including an X-ray tube 2 (see FIGS. 2 and 3) that emits X-rays. A bar-shaped housing 4 is provided side by side. The X-ray generator 1 is arranged so that the longitudinal direction L of the housing 4 is orthogonal to the conveyance direction of the object (the vertical direction in FIG. 2).

  First, the X-ray tube 2 shown in FIG. 3 will be described in detail. The X-ray tube 2 has a cylindrical valve 11 made of Kovar glass, and a stem 13 having an exhaust pipe 12 is formed at the end (upper end in the drawing) of the valve 11. The exhaust pipe 12 is used for exhausting the inside of the X-ray tube 2 after the assembly is completed to form a vacuum state. A cylindrical Kovar metal output window holding portion 14 is fused and connected to the open end of the valve 11. A disk-like output window 15 is fixed to the output window holding portion 14 by Ag brazing or the like so as to close the central opening 14a, and X-rays are generated on the inner surface of the output window 15 by the collision of an electron beam. A target 16 is deposited. Further, an annular flange 20 protruding outward is provided at the lower end of the output window holding portion 14.

  Further, two stem pins 17 and 17 are inserted into the stem 13, and a filament 18 as a cathode that emits an electron beam at a predetermined voltage is provided in the bulb 11, and this filament 18 is connected to the stem pin 17. It is fixed to the tip (lower end in the figure). A cylindrical stainless steel focus 19 is fixed to one of the stem pins 17 so as to surround the filament 18. Since the exit window holding part 14 of the X-ray tube 2 having such a configuration is made of Kovar metal, it has good thermal conductivity and electrical conductivity and is electrically connected to the grounded casing 4. Therefore, it is maintained at the ground potential.

  Then, a high potential of −9.5 kV is supplied to the stem pin 17 of the X-ray tube 2 from a voltage generator described later, and an electron beam is emitted from the target 16 having the ground potential. At this time, X-rays are emitted from the target 16 by the collision of the electron beam. In use, the X-ray tube 2 is at a high temperature, and it is necessary to appropriately release the heat of the target 16 to the outside in order to maintain the X-ray generation efficiency and prevent the target 16 from being damaged.

  Next, the irradiation unit 3 including the X-ray tube 2 configured as described above will be described in detail. As shown in FIG. 4, the irradiation unit 3 has a protective case 21 having a box shape. In the protective case 21, the X-ray tube 2 and the X-ray tube as shown in FIGS. 2 includes a voltage generator 22 and a circuit board 23 for driving the motor 2.

  As shown in FIG. 4, the protective case 21 constitutes a lower wall in the figure and a unit cover 24 that constitutes a part of the wall of the housing 4 (see FIG. 1), and is orthogonal to the unit cover 24. And a base plate 25 having a pair of wall bodies 25c and 25d opposed to the longitudinal direction L, a wall body 32a opposed to the unit cover 24, and a pair of walls extending in the longitudinal direction L and orthogonal to the wall body 32a. And a protective cover 32 having bodies 32b and 32b.

  The unit cover 24 includes a unit cover body (front wall portion) 24a that is made of a metal having good thermal conductivity and has a rectangular flat plate shape. At both ends in the longitudinal direction L of the unit cover main body 24a, flange portions 24b for detachably fixing the irradiation unit 3 to the housing 4 extend so as to be flush with the unit cover main body 24a. The flange 24b is provided with an opening 24c through which a screw 44 (see FIG. 1) for fixing the irradiation unit 3 is inserted. In addition, a circular opening is formed at a position facing the X-ray tube 2 in the vicinity of one end of the unit cover main body 24a, and this opening emits X-rays from the X-ray tube 2 to the outside of the housing 4. The opening 24d is used. Further, at the end of the unit cover main body 24a in the width direction (the direction orthogonal to the longitudinal direction L; the vertical direction in FIG. 5), a pair of grip portions (side wall portions) 24e orthogonal to the unit cover main body 24a and facing each other. Is erected. When attaching / detaching the irradiation unit 3 to / from the housing 4, the holding unit 24e is held and the irradiation unit 3 is inserted and removed. Further, as shown in FIG. 5, a plurality of convex portions 24f for engaging the protective cover 32 are formed on the inner surface of the grip portion 24e.

  As shown in FIGS. 5 and 6, the base plate 25 is fixed to the inner surface of the unit cover 24 and mounts the circuit board 23. The base plate 25 includes a base plate body 25a extending in the longitudinal direction L and in surface contact with the inner surface of the unit cover body 24a. The base plate body 25a has an emission opening 24d of the unit cover 24 as shown in FIG. An opening 25b is formed at a position corresponding to. The diameter of the opening 25b is larger than the diameter of the emission opening 24d.

  Further, as shown in FIGS. 5 and 6, both end portions in the longitudinal direction L of the base plate body 25a are bent upward in FIG. 6 to form wall bodies 25c and 25d orthogonal to the base plate body 25a. Furthermore, on the outer surface of the wall (fixed wall) 25d far from the opening 25b, as shown in FIGS. 4 to 6, a socket for electrically connecting to an external power source (not shown) outside the housing 4 26 is attached. Here, the wall body 32b and the unit cover main body 24a constituting the protective cover 32 protrude from the outer surface of the wall body 25d in the longitudinal direction L. The wall 32b protruding from the wall 25d and the portion of the unit cover main body 24a constitute the guide wall of the present invention. The socket 26 fixed to the wall body 25d is located in the guide space S formed by the unit cover main body 24a, the opposing wall bodies 32b and 32b, and the wall body 25d. In order to attach the irradiation unit 3 to the housing 4, the socket 26 and a wiring 40 (described later) provided inside the housing 4 are electrically connected, and then the irradiation unit 3 is mounted on the housing 4. Insert into and fix. At this time, the wiring 40 is guided by the unit cover main body 24a and the wall bodies 32b and 32b protruding from the wall body 25d, so that the wiring 40 is prevented from wrapping outside the protective cover 32. For this reason, the wiring 40 is prevented from being sandwiched between the inner surface of the housing 4 and the protective cover 32, damage to the wiring 40 is prevented, and the mounting operation of the irradiation unit 3 to the housing 4 is facilitated. Become. Further, since the socket 26 is fixed so that the connection port faces the direction opposite to the unit cover main body 24a (the direction not facing the unit cover main body 24a and the wall bodies 32b and 32b), the wiring 40 is further prevented from being damaged and attached. Work becomes easy.

  As shown in FIG. 6, the base plate 25 is provided with a plurality of (four in this embodiment) support pieces 25e for supporting the circuit board 23 apart from the base plate body 25a. An insulating space 27 is formed between the fixed circuit board 23 and the unit cover 24. The circuit board 23 is electrically connected to the socket 26. Further, the circuit board 23 is adjusted to make the X-ray doses of the plurality of X-ray tubes 2 substantially constant.

  The voltage generator 22 is mounted on the circuit board 23 and supplies a high potential of −9.5 kV to the stem pin 17 to drive the X-ray tube 2. First, the potential is raised to −1 kV at the low voltage generating portion in the voltage generating unit 22, and then the potential is raised to −9.5 kV at the high voltage generating portion. The wiring 28 from the high voltage generating portion of the voltage generating unit 22 is connected to the stem pin 17 of the X-ray tube 2, and in this state, the valve 11 of the X-ray tube 2 has a cylindrical cap that covers the stem pin 17. 29 is attached. The cap 29 is filled with the silicon resin P after the wiring 28 and the stem pin 17 are connected.

  As shown in FIGS. 5 and 6, the irradiation unit 3 includes an X-ray tube holder 30 for fixing the X-ray tube 2 to the unit cover 24. The X-ray tube holder 30 is formed of a rectangular plate, and is provided with an opening 30a through which the X-ray tube 2 is inserted, and an opening 30b for fixing the X-ray tube holder 30 with screws. In the X-ray tube 2, the flange portion 20 of the output window holding portion 14 is disposed in the opening 25 b of the base plate 25, and the flange portion 20 is pressed from above by the X-ray tube holder 30. The lower end surface comes into surface contact with the inner surface (the upper surface in the drawing) of the peripheral edge forming the emission opening 24d of the unit cover 24 and is fixed with screws.

  The protective cover 32 is made of aluminum or the like, and protects the X-ray tube 2, the voltage generator 22, and the circuit board 23 disposed on the unit cover 24 as shown in FIGS. 4 to 6. As shown in FIG. 5, the lower end portion of the wall body 32 b constituting the protective cover 32 has a plurality of openings 32 c that engage with the convex portions 24 f of the grip portion 24 e of the unit cover 24. The protective cover 32 is attached to the unit cover 24 so that its opening 32c engages with each of the convex portions 24f and is detachable.

  Next, the case 4 in which the irradiation unit 3 configured in this way is detachably mounted will be described in detail. As shown in FIG. 2, the housing 4 has a hollow box shape extending in one direction (the left-right direction in the figure; the longitudinal direction L), and a plurality of irradiation units 3 arranged in parallel along the longitudinal direction L. Of the irradiation unit 3, the X-ray tube 2 and the voltage generation unit 22, the wiring 40 for electrically connecting the irradiation unit 3 and an external power source, and one end of the wiring 40 A connector 41 that is provided in the section and is electrically connected to the socket 26 is accommodated. Here, “hollow” means that the housing 4 has a space for accommodating at least a part of the irradiation unit 3, and is the space for accommodating each irradiation unit 3 formed continuously? It doesn't matter whether or not. The casing 4 has an outer wall constituted by a casing main body 35 in which a unit mounting portion 34 is formed and a unit cover 24 of the irradiation unit 3 mounted on the unit mounting portion 34 of the casing main body 35. ing.

  The housing body 35 includes a head cover 36 that forms the lower side, and a housing base 37 that forms the upper side. Specifically, as shown in FIGS. 1 and 2, the housing base 37 includes an upper wall body 37a of the housing body 35 and a pair of wall bodies that are orthogonal to the wall body 37a and face the longitudinal direction L. The head cover 36 includes a lower wall body 36a of the housing body 35 and a pair of wall bodies 36b and 36b that are orthogonal to the wall body 36a and extend in the longitudinal direction L and face each other. It is set as the structure which has.

  As shown in FIG. 1, an L-shaped attachment member 38 is fixed to the wall body 37 b of the housing base 37. The attachment member 38 has an opening 38a for inserting a screw, and fixes the X-ray generator 1 to a predetermined installation surface with a screw. As shown in FIG. 2, the left wall body 37 b has a terminal 39 that is electrically connected to an external power source. The terminal 39 is electrically connected to the socket 26 via a wiring 40 and a connector 41. It is connected to the. The housing base 35 and the head cover 36 are connected and fixed to form the housing body 35.

  Next, the unit mounting portion 34 formed on the head cover 36 will be described. As shown in FIG. 7, the unit mounting portion 34 has a shape corresponding to the unit cover 24, and a rectangular opening 43a having a size corresponding to the unit cover main body 24a is formed in the wall 36a. On both sides in the longitudinal direction L, recesses 43b and 43b in which the flange 24b is accommodated are formed, and a notch (notch-shaped recess) 43c having a shape corresponding to the grip portion 24e is formed on the wall 36b. Yes. The unit mounting portion 34 can be mounted even if the direction of the irradiation unit 3 is reversed in the longitudinal direction L.

  As shown in FIG. 8, the recess 43b has a depth corresponding to the thickness of the flange 24b, and has an installation surface 43d in surface contact with the upper surface of the flange 24b. The irradiation unit 3 is placed on the installation surface 43d. A female screw portion 43e for fixing is formed. As shown in FIG. 1, the irradiation unit 3 is detachably mounted on the unit mounting portion 43 by inserting a screw 44 through the opening of the flange 24 b and screwing into the female screw portion 43 e. As shown in FIG. 1, here, with respect to the left and center unit mounting parts 43, the irradiation unit 3 is mounted with the exit opening 24d of the irradiation unit 3 arranged on the left side, and the right unit mounting part 43 is attached to the right side unit mounting part 43. On the other hand, the irradiation unit 3 is mounted with the exit opening 24d of the irradiation unit 3 arranged on the right side. In the mounted state of the irradiation unit 3, the flange portion 24 b is in surface contact with the installation surface 43 d and the outer surface of the unit cover 24 including the flange portion 24 b is substantially flush with the outer surface of the housing body 35. Yes. Further, the intervals between the plurality of exit openings 24d are substantially the same. Thereby, it becomes the structure which can irradiate a X-ray uniformly over the longitudinal direction L. FIG.

  Thus, since the irradiation unit 3 having the X-ray tube 2 and the voltage generation unit 22 is arranged side by side in the bar-shaped housing 4, the X in the longitudinal direction L is formed by the plurality of X-ray tubes 2 arranged in parallel. While the irradiation range of the line is expanded, the intervals between the irradiation units 3 can be easily made constant, and the X-ray generator 1 can be handled easily.

  In such an X-ray generator 1, electric power is supplied to the irradiation unit 3 from an external power source via the terminal 39, the wiring 40, the connector 41, and the socket 26, and X-rays are emitted from the X-ray tube 2 and emitted. The light is emitted out of the housing 4 from the opening 24d. Thereby, ambient air is ionized and the object can be neutralized. In addition, since the X-ray tube 2 includes the circuit board 23 adjusted so as to have a predetermined X-ray dose, the X-rays irradiated from the respective irradiation units 3 even when the performance of the X-ray tube 2 varies. The dose can be made substantially the same.

  Here, when maintenance work such as replacement of the irradiation unit 3 becomes necessary due to the life of the X-ray tube 2 or the like, the screw 44 fixing the irradiation unit 3 is loosened, and the grip portion 24e of the unit cover 24 is gripped. After the irradiation unit 3 is pulled down, the connector 41 is removed from the socket 26, the irradiation unit 3 and the housing 4 are separated, and the irradiation unit 3 is replaced.

  Thus, in the X-ray generator 1 and the irradiation unit 3 of this embodiment, since the irradiation unit 3 is detachably mounted on the unit mounting portion 34, the irradiation unit 3 can be easily attached and detached, and the X-ray tube 2 When troubles such as a lifetime or a failure of the voltage generator 22 occur, the irradiation unit 3 can be replaced and attached in a short time. This simplifies the maintenance work. Moreover, since the recessed part 43b following the shape of the flange part 24b is formed, this recessed part 43b fulfill | performs the guide function and positioning of the irradiation unit 3 is made easy.

  Further, in the X-ray generator 1, the housing 4 has a housing body 35 in which a unit mounting portion 34 is formed, and the irradiation unit 3 constitutes an outer wall of the housing 4 together with the housing body 35. A unit cover 24 that emits X-rays emitted from the X-ray tube 2 to the outside of the housing 4, a flange portion 24b that is fixed to the unit mounting portion 24d, In the irradiation unit 3, the flange portion 24b and the unit mounting portion 34 are fixed in surface contact with each other, so that the heat generated in the X-ray tube 2 is transmitted to the unit cover 24 and transmitted to the unit cover 24. The generated heat is effectively transmitted to the housing body 35 through surface contact through the flange portion 24b, and heat dissipation is performed efficiently. Thereby, the temperature of the X-ray tube 2 is maintained appropriately, and the reliability of the X-ray generator 1 is improved.

  In addition, the housing main body 35 is formed with a concave portion 43b that follows the shape of the flange portion 24b as the unit mounting portion 34, and the outer surface of the unit cover 24 is substantially flush with the outer surface of the housing main body 35. By bringing the installation surface 43d that forms 43b into contact with the flange portion 24b, the contact area between the unit cover 24 and the housing body 35 is increased, and the heat dissipation efficiency is improved. Moreover, since the outer surface of the housing | casing 4 becomes the same surface, handling is easy.

  Next, an X-ray generator 51 according to a second embodiment of the present invention will be described with reference to FIG. The X-ray generator 51 of the second embodiment is different from the X-ray generator 1 of the first embodiment in that the positions of the flange portion 54b and the concave portion 53b in which the flange portion 54b is disposed are changed.

  The irradiation unit 55 includes flange portions 54 b and 54 b at both ends in the longitudinal direction L of the grip portion 54 e of the unit cover 54. Further, the housing 56 includes a recess 53b in a wall 56b extending in the longitudinal direction L. The irradiation unit 55 has a flange portion 54 b disposed in the concave portion 53 b of the housing 56 and is detachably fixed to the unit mounting portion 53 with screws 57. Even if comprised in this way, while exhibiting the effect | action and effect similar to the X-ray generator 1 and irradiation unit 3 of 1st Embodiment, the screw 57 is installed in the wall 56b side which comprises the side surface of the housing | casing 56. Therefore, the screws 57 can be easily attached and detached, and the workability is improved.

  Next, an X-ray generator according to a third embodiment of the present invention will be described with reference to FIG. The X-ray generator of the third embodiment is different from the X-ray generator 1 of the first embodiment in that the housing mounting structure for the flange portion 24b of the unit cover 24 is changed. Specifically, the concave portion 61 is bonded to the first wall portion 62 in which the female screw portion 62a is formed and the second wall portion 63 in which the notch portion 63a having a shape following the flange portion 24b is formed. This is a point constituted by the double plate 64. And the flange part 24b of the unit cover 24 is arrange | positioned in the recessed part 61, and the irradiation unit is attached to the unit mounting part so that attachment or detachment is possible by screwing the screw 44 in the female screw part 62a. Even if comprised in this way, there exists the same effect | action and effect as the X-ray generator 1 and the irradiation unit 3 of 1st Embodiment. As shown in FIG. 11, the second wall portion may be eliminated and the structure may be simplified. In addition, as shown in FIG. 12, instead of the first wall portion 62 in which the female screw portion 62a is formed, a first wall portion 65 in which an opening portion 65a is formed is provided, and the nut 66 is attached to the first wall portion. The flange portion 24b of the unit cover 24 is disposed in the concave portion 61 formed by the first wall portion 65 and the second wall portion 63, and the screw 44 is attached to the nut 66. You may make it screw.

  Further, the irradiation unit may be fixed to the unit mounting portion by welding or the like. In such an X-ray generator, since an irradiation unit having an X-ray tube and a voltage generator is arranged side by side in a bar-shaped housing, the X-rays in the longitudinal direction are formed by a plurality of X-ray tubes arranged in parallel. As the irradiation range is expanded, the intervals between the irradiation units can be easily made constant, and the X-ray generator can be handled easily.

  As mentioned above, although this invention was concretely demonstrated based on the embodiment, this invention is not limited to the said embodiment. In the said embodiment, although the irradiation unit 3 is set as the structure provided with the flange part 24b, it is good also as a structure which is not provided with the flange part 24b and is attached to a housing | casing so that attachment or detachment is possible.

  The installation direction of the X-ray generator is not limited, and the X-ray generator may be installed so as to irradiate X-rays in other directions.

It is a perspective view which shows the X-ray generator which concerns on 1st Embodiment of this invention from the downward direction. It is a decomposition | disassembly side view of the X-ray generator shown in FIG. It is sectional drawing of the X-ray tube in FIG. It is a perspective view which shows the irradiation unit in FIG. 1 from the downward direction. It is a top view which shows the inside of the irradiation unit shown in FIG. It is VI-VI arrow line view of the irradiation unit shown in FIG. It is a perspective view which shows the unit mounting part shown in FIG. 1 from the downward direction. It is sectional drawing which shows the principal part of a unit mounting part with a flange part. It is a perspective view which shows the X-ray generator which concerns on 2nd Embodiment of this invention from the downward direction. It is sectional drawing which shows the principal part of the unit mounting part of the X-ray generator which concerns on 3rd Embodiment of this invention with a flange part. It is sectional drawing which shows the principal part of another unit mounting part with a flange part. Furthermore, it is sectional drawing which shows the principal part of another unit mounting part with a flange part.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,51 ... X-ray generator, 2 ... X-ray tube, 3,55 ... Irradiation unit, 4,56 ... Housing, 22 ... Voltage generating part, 24, 54 ... Unit cover, 24a ... Unit cover main body (front wall Part), 24b, 54b ... flange part, 24d ... emission opening part, 24e, 54e ... grip part (side wall part), 35 ... housing body, 42 ... connector, 43, 53 ... unit mounting part, 43b, 53b, 61 ... recess, 43c ... notch (notch-shaped recess).

Claims (7)

A plurality of irradiation units having an X-ray tube that emits X-rays and a voltage generation unit that drives the X-ray tube;
A power supply for supplying power to the irradiation unit and a connector for electrically connecting the irradiation unit;
Forming a hollow bar extending in one direction, and housing the X-ray tube, the voltage generator, and the connector;
Wherein the housing includes a plurality of unit mounting portions that are juxtaposed along a plurality of irradiation units in the longitudinal direction of the housing,
A housing body in which the unit mounting portion is formed ,
The irradiation unit includes a unit cover that forms an outer wall of the housing together with the housing body, and is detachably mounted on the unit mounting portion. The unit cover has an emission opening that emits X-rays emitted from the X-ray tube to the outside of the housing;
A flange portion fixed to the unit mounting portion,
The irradiation unit, X-rays generating apparatus according to claim 1, characterized in that said flange portion is fixed in surface contact with the unit mounting portion. In the case body, as the unit mounting portion, a recess that follows the shape of the flange portion is formed,
X-ray generator according to claim 1 or 2, wherein the outer surface of the unit cover is an outer surface substantially flush with the housing body. The housing has a rectangular tube shape,
The unit cover includes a front wall portion in which the emission opening is formed, and a pair of side wall portions that are substantially orthogonal to the front wall portion and face each other.
Wherein the housing main body, as the unit mounting portion, to any one of claims 1 to 3, characterized in that the recess of the notch shape to follow the shape of the side wall portion of the unit cover is formed The X-ray generator described. The irradiation unit includes a protective case that includes the unit cover and protects the X-ray tube and the voltage generator;
A socket electrically connected to the connector,
The protective case comprises a socket fixing wall that constitutes an outer wall in the longitudinal direction of the housing and fixes the socket to the outer surface;
Wherein in the longitudinal direction of the housing, X-rays generator according to any one of claims 1 to 4, characterized in that it has a guide wall projecting from outside said socket retaining wall. An irradiation unit that is detachably mounted on a unit mounting portion formed on a housing body of the housing of the X-ray generation device according to any one of claims 1 to 5,
An X-ray tube emitting X-rays;
A voltage generator for driving the X-ray tube;
Irradiation unit, wherein Rukoto and a unit cover that constitutes the outer wall of the housing together with the housing body. A plurality of irradiation units having an X-ray tube that emits X-rays and a voltage generation unit that drives the X-ray tube;
Forming a hollow bar extending in one direction, and housing the X-ray tube and the voltage generator,
Wherein the housing includes a plurality of unit mounting portions that are juxtaposed along a plurality of irradiation units in the longitudinal direction of the housing,
A housing body in which the unit mounting portion is formed,
The X-ray generator according to claim 1, wherein the irradiation unit includes a unit cover that constitutes an outer wall of the casing together with the casing main body, and is mounted on the unit mounting portion.

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