JP4759909B2 - Method for manufacturing color filter side panel substrate for color liquid crystal display device - Google Patents

Description

  The present invention relates to an alignment division vertical alignment color liquid crystal display panel having a post spacer for adjusting the thickness of liquid crystal in an alignment division vertical alignment color liquid crystal display, and a method for manufacturing an IPS type color liquid crystal display panel. .

    In the present application, the alignment-divided vertical alignment is a kind of liquid crystal alignment method in a liquid crystal display, and means a method called an MVA method, for example. (For example, refer to Patent Document 1 and Non-Patent Document 1.) Hereinafter, the alignment division vertical alignment is abbreviated as MVA.

    In the current MVA LCD panel, MVA protrusions and columnar protrusions (post spacers) for defining the thickness of the liquid crystal layer are formed on the ITO film on the CF. Both are formed by a photolithographic method using a photosensitive resin, but they are formed in separate steps because they are difficult to form simultaneously for the reason described later. In principle, it is possible to select a material that is not a problem even if it is the same material.

  The technique that is currently in practical use is a method of forming the post spacer and the MVA protrusion in separate steps as described above. That is, one of the post spacer and the MVA protrusion is formed by applying photosensitive material → pattern exposure → development, and then the other is formed by applying photosensitive material → pattern exposure → development. This is because the shapes (height and cross-sectional shape) of the two are different, so that it is difficult to form them in a single step. In particular, as shown below, the MVA protrusions are heated by post-processing to obtain bowl-shaped and kamaboko-shaped shapes as shown below, but if they are the same material as the post spacer material MVA protrusions Then, the post spacer also heats and flows, so that it can no longer be used as a spacer.

  First, the MVA method and the size and structure of the protrusion will be described slightly below.

  In the MVA type color liquid crystal display panel substrate, the technique of providing the MVA protrusions to control the alignment of the liquid crystal has a plurality of liquid crystal tilt directions in the pixel as introduced in Patent Document 1. Thus, a liquid crystal display panel having excellent contrast, viewing angle characteristics, and response speed can be obtained.

  Here, the planar shape of the projection for MVA is the shape described in FIG. 11, FIG. 42, FIG. 71, FIG. 73, etc. of Patent Document 1, and the sectional shape is the same as that of FIG. The shape disclosed in FIGS. 108, 146, 147, 148 and the like.

  Moreover, although the method of actually obtaining this cross-sectional projection is shown in FIGS. 146 and 148 of Patent Document 1, a cross-sectional shape close to a trapezoid is created at a desired position using a photosensitive material, Next, it is a method of causing fluid deformation (sag) by heating. Although there is no problem with this method, it is preferable if there is a method for obtaining an appropriate cross-sectional shape.

  The MVA method will be described below with reference to FIG.

FIGS. 7A and 7B are explanatory views schematically showing the operation of the MVA type color liquid crystal display device in its cross section. As shown in FIGS. 7A and 7B, the MVA color liquid crystal display device 10 includes an array side panel substrate 11 provided with MVA protrusions 13a and 13b via a liquid crystal 15, and an MVA protrusion 14. The MVA projections 13a and 13b and the MVA projections 14 are provided at alternate positions. A vertical alignment film is formed on the MVA protrusion.

  FIG. 7A shows a state when no voltage is applied. When no voltage is applied, the liquid crystal 15 is vertically aligned between the two substrates, but the liquid crystals of the MVA protrusions 13a and 13b and the MVA protrusion 14 are Slightly inclined due to the slope of the protrusion.

  FIG. 7B shows a state when a voltage is applied. When a voltage is applied, the liquid crystal on the slope of the protrusion starts to tilt, and the liquid crystals other than the slope portion are sequentially aligned in the same direction according to a predetermined slope direction. It has become. That is, instead of rubbing treatment, the alignment of the liquid crystal is controlled by providing protrusions.

  As shown by a thick arrow in FIG. 7B, in the state of applying a voltage, the liquid crystal between the MVA protrusion 13a to the MVA protrusion 14 in the pixel is inclined obliquely to the left in the figure, and the MVA protrusion The liquid crystal between the 14-MVA protrusions 13b is inclined obliquely to the right. That is, the alignment of the liquid crystal is divided in one pixel, and the liquid crystal display device having excellent viewing angle characteristics is obtained.

  Next, the spacer will be described. In most liquid crystal display devices, in order to control the thickness of the liquid crystal layer, a conventionally used method is a method in which small beads are used as spacers and dispersed in the liquid crystal. The same applies to the MVA type. In that method, glass or plastic spherical bodies (beads) having a diameter of 3 to 10 μm are sprayed on one panel substrate before assembling the panel, and one peripheral portion is left after combining with the other panel substrate. Alternatively, a method is used in which a hole is formed at one location and liquid crystal is injected from that portion.

  However, in the method using bead balls for the bead spacer 13, the liquid crystal injection time increases as the liquid crystal display device becomes larger. In addition, there is a drawback that it is difficult to make the distribution of the bead spacers uniform or to distribute the bead spacers to a predetermined portion without excess or deficiency.

  For this reason, a method in which a photosensitive resin pattern having a predetermined shape is formed using a photosensitive resin and this is used as a spacer has been put into practical use. (For example, refer to Patent Documents 2 and 3.) In that case, a photo spacer is used after the material using the name, or a post spacer because the shape is columnar. In either case, PS may be abbreviated. Hereinafter, when it is desired to clearly distinguish from a normal bead spacer, a post spacer whose name is derived from the shape is used.

  Patent Document 2 relates to formation of a spacer for a ferroelectric panel, and is slightly different from the case of a normal liquid crystal display which is an object of the present invention, but the idea is the same. On the other hand, since Patent Document 3 is intended for a normal liquid crystal display, it is the same object as the present invention. In this case, the photosensitive resin spacer 12 has a planar shape with a diameter of about 12 ± 2.0 μm and a height of 2.5 to 4.0 ± 0.2 μm. The advantage of using the photosensitive resin spacer formed in this way is that the thickness of the liquid crystal layer = the thickness of the photosensitive resin spacer formed of the photosensitive resin can be controlled fairly strictly. The point is that the arrangement can be specified strictly, and the second point is that the step of sealing the liquid crystal can be performed in a short time.

In other words, instead of the conventional method of injecting liquid crystal from the hole, it is possible to apply a method in which the liquid crystal is applied to one counter substrate before assembly and then the other counter substrate is superposed, thereby greatly improving productivity. Can be made.
Because of such advantages, the proportion of adopting a method using a photosensitive material for spacer formation is increasing.

  The protrusions for MVA and the post spacers may be made of the same material and are formed on the same surface by using a photosensitive resin. Therefore, as described above, it is preferable that they are formed at the same time. However, since the thickness and shape of the two are quite different, it has been unavoidable to form them by two photolithographic processes. Also, the material is different, for example, it is necessary to use a material that droops when heated for the projection for MVA, but the material for the post spacer is a material that does not flow even when heated to the same temperature There was a need to do.

  Patent Document 4 discloses a method of forming the MVA projection and the photosensitive resin post spacer in the same process. The purpose was achieved in this way. However, as shown below, since it is a very special method and uses a photosensitive resin, the problem is that the process takes a long time and it is difficult to obtain a desired protrusion cross section as described below. Further, there is a need for a better method due to the low reproducibility of the cross-sectional shape.

  That is, the method disclosed in Patent Document 4 is a method in which the amount of exposure is small for the projection portion having a small thickness and is increased for the post spacer portion having a large thickness. As a method for giving different exposure amounts, a method combining a multiple exposure method and a constant pitch movement is disclosed. This method improved the productivity over the conventional two photolithography processes.

  However, the method of using the photosensitive material is only the method of creating the alignment dividing projections by heating and flowing, so that the cross-sectional shape is close to a bowl shape or a squirrel shape as described above. It was difficult to obtain other cross-sectional shapes, such as triangles, only the shape. In addition, the process is complicated and time consuming, the material that can be used is limited to photosensitive resin, and the solvent used during the process has an adverse effect on other members already formed on the substrate. There was a problem that it was necessary to select something that was not available. Moreover, since it is necessary that the material has photosensitivity, the range in which the material can be selected has been greatly limited.

  On the other hand, Patent Document 5 discloses a method of forming post spacers by another method.

  The outline of the method is that, when a color filter is prepared by a transfer method, a recess for forming a post spacer is formed in advance on a transfer substrate, a post spacer material is filled therein, and then a color filter is formed. The whole is transferred to a glass substrate for a color filter. This method is superior in terms of stability of the height of the post spacer and productivity in comparison with the method of forming the post spacer using the photosensitive resin disclosed in Patent Document 3 and the like.

  However, as described below, even if this method is employed as it is, the MVA protrusion and the post spacer cannot be formed simultaneously. Further, even if some modification, improvement, or device is applied to this method, it cannot be formed at the same time.

  That is, the method of Patent Document 5 is patterning of a negative photosensitive release layer on a transfer substrate. Since it is negative photosensitive, unexposed areas are removed in the development process. Therefore, a through hole is made in the light-shielded portion. The concave portion corresponding to the projection for MVA needs to be exposed at the lower portion and unexposed at the upper portion, but this is difficult in principle by a normal exposure method.

An example of a device is
a) Apply one layer of negative photosensitive layer and expose it using a photomask that shields only the PS part, b) Next, apply another layer of negative photosensitive layer, corresponding to PS and MVA Exposure using a photomask that shields light,
c) Develop
There are two-layer double exposure methods.

However, in the negative resist, even if the hole can be formed, it becomes a substantially vertical hole, and cannot be shaped like a bowl or bowl. Even if the resist sagging by heating shown in FIG. 147 of Patent Document 1 is used in combination, the cross-sectional shape of the concave portion does not easily become an irregular shape or a bowl shape. Further, it is not possible to obtain a triangular bar shape or a shape close to a pyramid shown in FIG. In addition, since the PS portion is also heated, there arises a problem that the top portion of the PS portion is sunk.

  On the other hand, if a positive type resist is used and light is absorbed in the resist, a hole having a cross-sectional shape close to a paddle shape or bowl shape can be formed. However, it is impossible in principle to form the post spacer portion with a nearly vertical hole and the MVA portion with a bowl-shaped hole with the same material and the same exposure method.

Japanese Patent No. 2947350.

Japanese Patent Application Laid-Open No. 11-337984.

Japanese Patent Laid-Open No. 2001-125113.

Japanese Patent Application Laid-Open No. 2002-236371.

It is Unexamined-Japanese-Patent No. 2000-056122.

Japanese Patent Laid-Open No. 05-241175.

“FALT-PANEL DISPLAY”, Nikkei Business Publications, December 22, 1997, P.I. 146-149

  The method disclosed in Patent Document 5 is improved so that the MVA protrusion and the post spacer can be formed simultaneously. Further, it is an object of the present invention to provide a method better than the method disclosed in Patent Document 5 even if the MVA protrusions are formed independently or the post spacers are formed independently.

According to a first aspect of the present invention, there is provided a method for manufacturing an alignment-divided vertical alignment type color liquid crystal display panel substrate provided with at least a color filter, an MVA protrusion, and a post spacer. The transfer process in which the manufacturing process of the post spacer is provided with a recess for MVA and a recess for post spacer by a method selected from at least one of mechanical cutting, cutting by etching, etching, pattern plating, and electroforming A transfer mold creating step for creating a mold, a step of filling the transfer mold with a dual-purpose material for MVA projections and a post-spacer material, solidifying the dual-purpose material and transferring it to a color filter substrate; Including a step of simultaneously forming a protrusion for MVA and a post spacer on the color filter substrate, and a step of curing the dual-purpose material. The transfer mold preparation step includes a step of preparing at least a glass mask having a post spacer pattern as a light transmission pattern and a glass mask having a projection pattern for MVA as a light transmission pattern, and a negative photosensitive property on the mask surface of the MVA glass mask. A step of forming a film by spin coating a resin, a step of exposing and developing from a negative resist surface using a glass mask having a post spacer pattern, a step of providing a protrusion of the post spacer, and a negative photosensitive film on the mask surface having the protrusion A step of forming a film by spin-coating a photosensitive resin added with an ultraviolet absorber, exposing the entire surface from the glass surface, developing, and forming a matrix having a substantially triangular cross-section MVA projection and a post spacer projection A step of applying, a step of applying silicone rubber with a curing agent to the matrix, and a primer thereon A panel for an alignment-divided vertical alignment color liquid crystal display device, comprising: a step of placing the metal plate subjected to the treatment in such a manner that air bubbles do not enter between the steps; and a step of peeling from the glass substrate after the silicone rubber is cured A method for manufacturing a substrate.
According to a second aspect of the present invention, there is provided a method for manufacturing an alignment-divided vertical alignment color liquid crystal display device panel substrate provided with at least a color filter, an MVA protrusion, and a post spacer. A transfer mold having a MVA recess and a post spacer recess formed by at least one selected from mechanical cutting, etching, etching, pattern plating, and electroforming Creating step, filling the transfer mold with a dual-purpose material for MVA protrusion and post-spacer material, solidifying the dual-purpose material, transferring it to the color filter substrate, and transferring it to the color filter substrate for MVA Including a step of simultaneously forming a protrusion and a post spacer, and a step of curing the dual-purpose material. At least using a plane precision cutting machine, the step of precision cutting so that the shape of the post spacer and MVA projection member is a recess, a composite plating film of nickel-phosphorus containing PTFE (polytetrafluoroethylene) Forming a fluororesin film by electroless plating, and a method for manufacturing a panel substrate for an alignment-divided vertical alignment type color liquid crystal display device.
According to a third aspect of the present invention, there is provided a method of manufacturing an alignment-divided vertical alignment color liquid crystal display device panel substrate provided with at least a color filter, an MVA protrusion, and a post spacer. A transfer mold having a MVA recess and a post spacer recess formed by at least one selected from mechanical cutting, etching, etching, pattern plating, and electroforming Creating step, filling the transfer mold with a dual-purpose material for MVA protrusion and post-spacer material, solidifying the dual-purpose material, transferring it to the color filter substrate, and transferring it to the color filter substrate for MVA Including a step of simultaneously forming a protrusion and a post spacer, and a step of curing the dual-purpose material. At least a step of forming a composite plating film of nickel-phosphorus containing PTFE (polytetrafluoroethylene) on the matrix, a step of depositing copper on the composite plating layer by an electroplating method, A method for producing a panel substrate for an alignment-divided vertical alignment type color liquid crystal display device, comprising a step of bonding a 42 iron-nickel alloy plate with a rubber-based adhesive.
According to a fourth aspect of the present invention, there is provided a method for manufacturing an alignment-divided vertical alignment type color liquid crystal display panel substrate provided with at least a color filter, an MVA protrusion, and a post spacer. , A press mold creating step for creating a press mold provided with a recess for MVA and a recess for post spacer, and using the press mold, a material for both MVA material and post spacer material is pressed and colored. A method of manufacturing a panel substrate for an alignment-divided vertical alignment color liquid crystal display device, comprising a step of simultaneously forming a MVA protrusion and a post spacer on a filter substrate.
According to a fifth aspect of the present invention, in the transfer mold creating step, a transfer mold provided with an MVA recess, a post spacer recess, and a liquid crystal sealing recess serving as a bank for liquid crystal sealing is formed. It is a manufacturing method of the panel substrate for alignment division | segmentation vertical alignment type color liquid crystal display devices in any one of Claims 1-3.
Further, the sixth invention is characterized in that, in the press mold creating step, a press mold provided with a concave portion for MVA, a concave portion for post spacer, and a concave portion for liquid crystal sealing as a bank for liquid crystal sealing is prepared. It is a manufacturing method of the panel substrate for alignment division | segmentation vertical alignment type color liquid crystal display devices of Claim 4.
The seventh invention includes a step of applying and spraying a fluorine-based demolding material to the surface of the transfer mold every time or a step of forming a release layer on the surface of the transfer mold in the transfer mold creating step. A method for producing a panel substrate for an alignment-divided vertical alignment type color liquid crystal display device according to any one of claims 1, 2, 3, and 5.
The eighth invention is the method for producing a panel substrate for an alignment-divided vertical alignment type color liquid crystal display device according to any one of claims 1 to 7, wherein the dual-purpose material is an acrylic resin.
According to a ninth aspect of the invention, after the transfer mold is filled with the MVA protrusion and the post spacer portion is filled with the material for both the MVA protrusion and the post spacer material, at least a transparent conductive film and a color filter are provided thereon. A panel for an alignment-divided vertical alignment color liquid crystal display device according to any one of claims 1, 2, 3, 5, 7, and 8, further comprising a step of placing and bonding a color filter substrate including A method for manufacturing a substrate.
According to a tenth aspect of the present invention, after the transfer mold is filled with the MVA projection and the post spacer portion is combined with the MVA projection material and the post spacer material, and cured, at least an ITO film is formed thereon. The method according to any one of claims 1, 2, 3, 5, 7, and 8, further comprising an ITO bonding step of forming a color filter and further bonding a glass substrate on the color filter via an adhesive. This is a method of manufacturing a panel substrate for an alignment-divided vertical alignment color liquid crystal display device.
An eleventh aspect of the invention is the method for manufacturing a panel substrate for an alignment-divided vertical alignment type color liquid crystal display device according to any one of claims 1 to 10, and further, MVA protrusions and posts existing in unnecessary portions in the subsequent steps. It is a method for manufacturing a panel substrate for an alignment-divided vertical alignment type color liquid crystal display device, comprising an unnecessary portion removing step of removing a material of the spacer.
The twelfth aspect of the invention is the alignment division vertical alignment type color liquid crystal display according to claim 11, wherein the unnecessary portion removing step is any one of a plasma ashing method, a pattern exposure method, and a lift-off method. It is a manufacturing method of an apparatus panel substrate.
According to a thirteenth aspect of the present invention, the transfer mold or press mold has flexibility, and the dual-purpose material is different from the filling material, the pressing material, and the first placement material on the mold surface. The method for producing a panel substrate for an alignment-divided vertical alignment color liquid crystal display device according to any one of claims 1 to 8, characterized in that it has releasability at the time of removing the cured curing material. .
According to a fourteenth aspect of the present invention, the pressurizing method when the transfer mold and the color filter substrate are bonded together, and the method of pressing the press mold onto the color filter substrate is a roll pressurizing method. Or a panel substrate for a vertical alignment type color liquid crystal display device according to any one of the above.

  Thus, a novel method for simultaneously performing the manufacturing process of the post spacer and the formation of the protrusion for MVA is provided.

  According to the present invention, first, it is possible to reduce the number of steps by simultaneously performing the post spacer manufacturing step and the MVA protrusion manufacturing step. Second, the cross-sectional shape of the MVA protrusion can be formed more stably than the conventional photosensitive material. Moreover, although the cross-sectional shape was a shape close to a semicircle rather than a triangle, it could be a shape close to a triangle if necessary. This advantage is particularly noticeable when a cutting method is used as a method for forming a press-type or injection-type MVA projection. In this respect, the present invention is effective as a method for forming the protrusion for MVA even when the post spacer is provided by another means.

  In addition, the height of the post spacer is proportional to the depth of the concave mold, and it is relatively easy to suppress the variation to ± 0.05 μm or less. Can be manufactured.

  There are various types of structures of the counter substrate of the color liquid crystal display panel depending on the structure of the liquid crystal display device. The object of the present invention is a transparent conductive film called a color filter and a counter electrode on at least a transparent substrate. And post spacers and projections for MVA. Actually, it further includes a black matrix, a black stripe, an alignment film, an overcoat layer, and the like.

The color filter in the present invention may be provided by a photolithographic method using a photosensitive resin, but may be provided by other means such as a printing method.

  In claim 1, the transfer mold has, for example, the cross-sectional structure shown in FIG. That is, the mold release material portion having a recess corresponding to the MVA projection and a recess corresponding to the post spacer is in close contact with the mold support substrate. As another recessed part, you may have a recessed part for forming the convex part for which it is more convenient to form simultaneously, such as the convex part for peripheral sealing, for example as described in patent document 5, for example.

  The support substrate not only supports but also has an action of maintaining the dimensional accuracy of the transfer mold. The releasable member has releasability at the point of time when it is peeled or removed from the material filled in the concave portion or placed on the concave portion. The releasable material will be described later.

  As another actual structure, there is a structure in which a concave portion is formed in a support substrate. In this case, it is necessary to make the entire surface on which the concave portion is formed a surface covered with a releasable material. Further, as another structure, there is a structure in which when the material forming the concave portion does not have releasability, the surface thereof is covered with a material having releasability.

  The dimensions of the transfer mold may change depending on the pressure applied during transfer and the change in working temperature. In general, such a pattern such as a color filter on a color liquid crystal panel substrate is required to have an error of several μm or less per 1 m as a dimensional accuracy. For this reason, as a support substrate, the thing with the same thermal expansion coefficient as the glass substrate used for a liquid crystal panel is preferable, and what can endure the pressure of a press is preferable.

  As an actual material, when the glass substrate used for the liquid crystal panel is a normal low expansion glass, 42 iron / nickel alloy is preferable because the thermal expansion coefficients are the same. In the case of soda lime glass, 426 iron / nickel alloy is preferable. These alloys are pressure resistant, chemically stable and do not rust.

  The thickness of the support substrate is easily about 0.2 to 0.5 mm, and when the roll press method according to claim 12 is used, the color filter filter substrate (glass substrate) having uneven thickness is flexible. ) Can be easily obtained. Invar materials can be used as well.

  Even if the transfer mold is sturdy, if the glass substrate has a thickness of about 1 mm or less, even if the thickness of the glass substrate is uneven or the transfer mold is not completely flat, it is under the glass substrate. When an elastic plate such as a rubber plate is laid or pressed with a rubber roll, the glass substrate can be bent so that even if the transfer mold or press mold is a rigid body, it can be brought into close contact, and transfer can be performed completely. it can.

  As a releasable material, it is first necessary to be able to form a precise shape.

  Further, it is necessary that the material is stable with respect to the MVA material and the post spacer material to be filled, and that the MVA protrusion and the post spacer can be easily released from the mold. Materials having good releasability / removability and capable of forming a recess by a press method or a casting method include fluororesin, high-density polyethylene, polyamide resin, polyimide resin, silicone resin, and the like. A second method for forming a precise shape is a cutting method.

  For example, there are mechanical cutting, cutting by etching, and cutting by laser processing. Third is an etching method, and fourth is a pattern plating method and an electroforming method.

  When the concave portion is formed of a support substrate or a material that can be precision processed, if the material does not have releasability, it is necessary to impart releasability / removability to the surface. As the method, there are a method of applying and spraying a fluorine-based demolding material to the surface every time, and a method of forming a so-called release layer on the surface. For example, there is a coating of fluororesin or silicone resin, and releasable plating (for example, eutectoid plating of fluororesin and nickel). In this case, as a method for forming the concave portion, there are a hot press process, an ejection process, and an electroforming method as well as cutting and laser processing.

  Materials that can be used for the MVA protrusions are selected as a result of various tests. For example, there are materials described in Patent Document 1. For example, there is an acrylic resin. In the present invention, a material that has undergone such selection and that can be used as a post spacer material is used. Acrylic resin can also be used as a post spacer material.

  Filling the transfer mold with the MVA projection material or the like includes filling only the recess of the transfer mold and placing the material on the portion other than the recess. If it is placed on a portion other than the recess, it may be placed on an unnecessary portion, but the unnecessary portion is scraped off by a doctor or removed by a method described in claim 9 or the like.

  As a method for filling the transfer mold with the fluid material, there are usual coating methods such as a roll coating method, a curtain coating method, and an ink jet method. When the viscosity is high, there are a reverse coating method and a laminate coating method. The laminate coating method is a method disclosed in Patent Document 6, for example.

  Solidification does not mean complete solidification, but solidification to the extent that it can be transferred to a color filter substrate or the like without remaining in the transfer mold during transfer. If it is completely solidified and becomes a rigid body, it may be difficult to release from the concave portion, or the adhesiveness to the color filter substrate may be lost. In practice, the degree of solidification is determined by testing.

  The solidification method and the degree thereof will be described in detail later, but a method such as volatilization of the solvent, photocuring or thermosetting to the material, and photocuring or thermosetting is used. Acrylic materials are easy to impart such curability. Solidification is not necessarily performed immediately after the step of filling the mold in which the recesses for the MVA protrusions and the post spacer recesses are provided, and a color filter substrate is provided between them, bonded, pixel electrodes, etc. Various electrodes may be provided, and may be performed between mold release and mold release.

  In order to perform the functions as MVA protrusions and post spacers, in most cases, it is necessary to completely solidify. In that case, heating or exposure is performed in a post-process after transfer. Then, the solvent is completely volatilized or the polymerization reaction is completed.

  As a solidification method, in the case of a material containing a solvent, there is first a method of evaporating the solvent. The volume decreases as it evaporates. In general, since the material is attached to the glass substrate, the width does not change and the thickness decreases.

  When using a thermosetting type, a curing agent-added curing type MVA material, or a post spacer material, curing takes time, and the press die may not be removed during that time. In that case, it is left until it hardens | cures in the state which accumulated using the flat press die. In this case, it is preferable to use the flat plate-shaped press die shown above.

In claim 2, a press molding method can be adopted if the material for the MVA material and the post spacer material can be press molded. The basic structure of the press mold is the same as that of the transfer mold. For example, a press mold has a releasability, and further, a material with less deformation for securing accuracy and a less affected by deformation are selected. For example, releasability of silicone rubber, polyethylene, polypropylene, fluororesin, etc. There are those with good resin lined on a metal plate. In addition, there are various types such as those made of metal and subjected to release treatment on the surface. Moreover, the manufacturing method may be almost the same.

  The shape of the press die may be a flat plate shape, but a roll shape may be preferable in view of defoaming. In the case where the press die is flat, it is preferable to press from the end sequentially so that bubbles do not remain inside, and since the mold release is performed from the end, flexibility is preferable.

  The press must be performed at least under pressure and temperature conditions such that a post spacer is provided by the press and the surface becomes smooth, but this varies depending on conditions such as color filter material and overcoat material, What is necessary is just to adjust according to the material suitably.

In general, a normal press die is a sturdy die, but the press die of the present invention is formed by pressing an alignment protrusion material and a post spacer material having a viscosity that does not sag. In the case of pressure, 1 kg / cm ² or less, and in the case of a roll press, a linear pressure of 1 kg / cm or less is sufficient. In the case of a sturdy press die, if the thickness of the glass substrate is about 1 mm or less, a uniform pressure can be applied by performing a roll press from the glass substrate side. The surface releasability / removability requires the same characteristics as the transfer mold.

  The cross-sectional shape of the post spacer recess in the pressing method is preferably an inverted trapezoid whose opening is wider than the bottom from the viewpoint of ease of the pressing process. However, if a press mold having rubber elasticity is used, it may be slightly trapezoidal. The depth is determined by adding the thickness of the liquid crystal layer to the thickness that ultimately contributes to the thickness by post-processing of both panel plates, and taking into account the thickness reduction already described above. Generally preferred.

  In order to improve the molding effect of the press, it is effective to cure the resin material in the pressed state, but it is possible to obtain a sufficient molding effect without such a contrivance and to be removed from the press mold as it is. If so, there is no need for such a device.

  As a curing method, various curing methods such as ultraviolet curing, thermal curing, and electron beam curing can be selected depending on conditions.

  Various methods can be selected as the method of removing from the press die. However, in order to maintain the molded shape, it is preferable to sequentially perform from the end when the press die is a flat plate shape.

  Claims 3 and 4 are for forming MVA protrusions, and the materials for the transfer mold, press mold, and MVA protrusion may be the same as those of Claims 1 and 2. Further, at the same time as forming the protrusions, for example, a bank for sealing the liquid crystal may be formed at the periphery at the same time.

  Claims 5 and 6 relate to the case where the post spacer is formed, and the transfer mold, press mold, and post spacer material may be the same as those of the first and second aspects. At the same time, a bank for sealing may be formed. This case is also effective for a liquid crystal panel having an MVA structure. This is particularly effective for the IPS structure. This is because, in the case of the IPS structure, there is no transparent electrode facing each other, and therefore a step of exposing it is unnecessary.

  The seventh aspect relates to the case where a separately prepared color filter substrate is placed. However, since the protrusions and the like are formed at predetermined positions on the color filter substrate, alignment is necessary when placing them. Positioning can be performed using a normal XY-θ table and a method using a control system that detects an alignment mark and feeds back to the XY-θ table. Although it is necessary to avoid mixing of bubbles when mounting, a method of mounting under reduced pressure is preferable. However, if the transfer mold is flexible, air bubbles can be avoided even if the transfer mold is placed at atmospheric pressure by sequentially applying pressure from the end by roll pressurization.

  The eighth aspect is a method in which a color filter is formed on a transfer mold, a glass substrate is placed and bonded, and the whole is transferred. The advantage of this method is that most steps are performed on the transfer mold. As the size of the glass substrate is increased, various precautions are required, and since the thickness is uneven, the method for uniformly applying the material is also limited. The transfer type using a flexible metal plate is easy to handle and has little thickness unevenness, so that the method of applying a uniform thickness of the material is also less restricted. Moreover, since it is thin, it can be easily mounted on, for example, an ITO film forming apparatus.

  As a method for forming a black matrix, a chromium film cannot be used, but it can be formed by a method using a black photosensitive resin. As a method of forming the color filter layer of each color inside the black matrix, a method using a normal photosensitive color material may be used, but a color material ink having a small solid content can also be used. For example, inking can be performed by an inkjet method. Although the thickness of the black stripe is considerably thicker than that of the color filter layer, no problem arises because it is transferred with an adhesive.

As an adhesive used for adhesion to the glass substrate used in this method, any adhesive that satisfies the conditions such as being transparent, having no polarization, and having required durability, etc. It can be selected from acrylic resins, epoxy resins, melamine resins and the like, and is particularly preferable in that acrylic resins are also used in color filters. Furthermore, it is preferable to focus on the composition obtained by removing the pigment from the material components of the color filter.

The ninth aspect relates to the process of removing the MVA projection material and the post spacer material present in the unnecessary portion. If the MVA projection material and the post spacer material on the counter electrode are present, a high driving voltage is required. Therefore, it is desirable to remove as much as possible. Means for removing include plasma ashing, pattern exposure, and lift-off.

  Plasma ashing is a method that uses the reaction between ionized gas and substance, and is intended to be removed when the substance becomes gaseous by the reaction. For example, organic substances in oxygen plasma react with oxygen ions. It becomes carbon dioxide, nitric oxide and water. This is a method to uniformly reduce the thickness of all parts, and if the target thickness method is thinner than the thickness to be plasma ashed, the layer of that part is completely eliminated, and the thickness of the target is the thickness at which plasma ashing is performed. Only thicker parts can be left. Therefore, when this method is used, it is necessary to form a film thicker than the desired thickness by the thickness for plasma ashing.

  The pattern exposure method is a method of obtaining a desired pattern by exposing a photosensitive resin with a photomask or the like in a pattern portion or its reverse pattern and developing it. A method using electron beam exposure instead of light is also possible.

  In the lift-off method, a layer to be patterned is formed over the entire surface, but a lift-off material is patterned and formed in the lower layer in advance, and the lift-off material is removed to ride on the lift-off material. This is a patterning method by removing only a part. In this case, the lift-off material may be simply used for patterning, but may also be a layer that performs other functions.

  More specifically, according to the method described in Japanese Patent Application No. 2003-148679.

  In claim 11, it is described that a flexible transfer mold and press mold are preferable. However, the structure, the manufacturing method, and the advantages when used are described above. Furthermore, an invar material having almost zero thermal expansion coefficient may be preferable as the support substrate. Further, as a method for increasing the surface releasability, there is a method for increasing the smoothness by polishing. Even on the metal surface, in the case of a hydrophilic metal such as chromium, nickel, and zinc, the releasability appears in a state where the material of the MVA method protrusion and the material of the post spacer are solidified.

  When the transfer mold and the press mold are rigid bodies, the glass substrate is lifted from the end and peeled off. This is a particularly useful method when the thickness of the glass substrate is 1 mm or less.

  In Claim 12, it is effective to use the roll used for the roll press when uniform pressurization is difficult due to thickness unevenness of the glass substrate, and in this case, the material of the roll is elastic. Rubber is preferred over metal. A roll having a rubber lining at least on the surface is preferable.

  First, a concave mold used for creating a color filter side substrate of a 3: 4 type TV having a diagonal size of 40 inches was produced as follows.

  First, a concave mold was prepared as follows. A glass mask having a 40-inch diagonal liquid crystal television post spacer pattern as a light transmission pattern and a glass mask having an MVA projection pattern as a light transmission pattern were prepared. A negative photosensitive resin (PMER N-D40P manufactured by Tokyo Ohka Kogyo Co., Ltd.) was spin coated on the mask surface of the MVA glass mask to form a film having a dry thickness of 4 μm. Using a glass mask having a post spacer pattern, the resist is exposed from the negative resist surface, developed, and a post spacer having a forward tapered trapezoidal cross section with a height of 3.0 ± 0.2 μm, a lower side line width of 15 μm, and an upper side line width of 12 μm. Protrusions were provided.

  Further, a negative photosensitive resin (PMER N-D40P manufactured by Tokyo Ohka Kogyo Co., Ltd.) added with an ultraviolet absorber was spin-coated on the mask surface having the protrusions to form a film having a dry thickness of 2.0 μm. The entire surface is back-exposed from a glass surface under predetermined exposure conditions, and developed to have a MVA protrusion and a post spacer protrusion having a forward tapered substantially triangular cross section with a height of 1.4 ± 0.3 μm and a bottom line width of 11 μm. I got a mother mold. Here, as the conditions for the back exposure from the glass surface, the conditions for finding the condition that the cross-sectional shape of the protrusion for MVA is triangular in the preliminary test are used. Since the ultraviolet light absorber is contained in the photosensitive resin, the exposed light is absorbed while being scattered, so the photosensitive resin after development can be selected by selecting the type, addition amount and exposure conditions of the ultraviolet light absorber. It is possible to obtain a cross-sectional shape close to a triangle.

  A large amount of silicone rubber (TES3508 manufactured by Toshiba Silicone Co., Ltd.) with a predetermined amount of a predetermined curing agent added thereto is applied to this matrix, and a metal plate (42 alloy: iron-nickel alloy) is 1200 mm long and 1000 mm wide. The one with a thickness of 0.3 mm, which had been treated with the specified primer, was placed so that no air bubbles would enter. Post spacers were placed around to maintain the gap spacing and the metal plate was strained. The thickness of the post spacer was 2 mm.

  When the metal plate was lifted from the end after the silicone rubber was cured, the layer of the silicone rubber 21 adhered to the metal plate 22 and peeled off from the glass substrate. Concave portions corresponding to the protrusions of the resist were formed on the surface of the silicone rubber, and the concave mold 20 was completed.

  In addition, as long as the releasability between the post spacer and the resin for forming the MVA protrusion is sufficient, polyethylene, polypropylene, a material used for a CD manufacturing mold, or the like may be used instead of silicone rubber. In the case of polyethylene or polypropylene, for example, a mold is prepared by a heat molding method. In the case of a metal mold, a stamper manufacturing method used for CD manufacturing can be used. Even a material having insufficient releasability can be used if a release agent can be used.

  A manufacturing method of the panel substrate on the color filter side (counter electrode side) of the MVA type color liquid crystal display device using the concave mold 20 created in Example 1 will be described with reference to FIGS. First, the mold 20 is provided with a silicone rubber 21 on a metal plate 22, and an MVA projection recess 2 and a post spacer recess 1 corresponding to the resist projection are formed on the surface of the silicone rubber 21. (See FIG. 1 (a)).

  A curable resin material liquid suitable for the MVA protrusion and further suitable for the post spacer was applied to this mold by spin coating, and the solvent was evaporated as necessary to form the resin layer 3 ( (Refer FIG.1 (b)). If the resin material liquid can be filled in the recesses and the resin material liquid can be placed on the other portions with the required thickness, other methods such as curtain coating, roll coating, etc. Further, a laminator method described in Patent Document 6 may be used.

  Further, a separately prepared color filter substrate 25 was placed on the substrate by gently aligning it (see FIG. 1C). At this time, alignment was performed by moving and aligning the position of the XY-θ surface plate so that the position of the post spacer portion was a predetermined position in the black matrix. A method of shifting the position in the X and Y directions with high accuracy by referring to the alignment mark with a CCD or the like after roughly aligning may be used.

  In this state, the resin 3 was sufficiently cured and then removed from the mold while removing the color filter substrate 25 from the end (see FIG. 1D). Although an ultraviolet curable material is used, a two-component curable material or a thermosetting material can be used.

  Next, a lift-off method was used to form an ITO film at a predetermined portion. That is, first, the photosensitive resin film 23 is formed on the entire surface having the upper post spacer protrusion (the same material and thickness as described above) (see FIG. 2E), and the post spacer and MVA protrusion portion. The photosensitive resin film 23 is left only in the post spacer 38 and the MVA protrusion 13 by developing with a UV mask 27 (see FIG. 2 (f)) using a photomask 29 having the following pattern (see FIG. 2F). (See (g)). Next, an ITO film 24 having a thickness of 1500 mm was formed on the entire surface by sputtering (see FIG. 2H). Next, the remaining photosensitive resin film 23 was removed. As a result, the transparent conductive film 24 on the removed photosensitive resin film 23 was also removed at the same time. In this manner, the pixel electrode 16 made of the transparent conductive film 24 is formed except for the post spacer 38 and the MVA protrusion 13 (see FIG. 2I), and the panel substrate 11 for the MVA type color liquid crystal display device is obtained. It was.

  Another example of forming the concave mold is shown below.

Instead of the mold of Example 1, the invar material with a thickness of 3 mm is added to the surface plate for machining of a plane precision cutting machine (5-axis machine) (the size is the size that includes all the required post spacers and a margin of 200 mm around the circumference) )) And precision cutting so that the shape of the post spacer and the protruding member for MVA is a recess, and then a composite plating film of 5 μm thick nickel-phosphorus containing PTFE (polytetrafluoroethylene) Using a Nimflon FRS manufactured by Uemura Kogyo Co., Ltd. by an electroless plating method, a fluororesin film was formed to make a mold and used. Others are the same as in the first embodiment.

  Another method for forming the concave mold will be described below.

  Instead of the mold of Example 1, a 5 μm-thick nickel-phosphorus composite plating film containing PTFE (polytetrafluoroethylene) was added to the mother mold produced by the method of Example 1 and Nimflon FRS manufactured by Uemura Kogyo Co., Ltd. Was formed by electroless plating, and copper was further deposited by 100 μm thereon by electroplating. A metal mold was prepared by bonding a plate of 42 iron-nickel alloy having a thickness of 300 μm thereon with a rubber adhesive, and this was used.

  A method for forming the resin by injecting a resin suitable for the post-post spacer portion and the alignment dividing projection portion into the intaglio will be described below with reference to FIGS. 3, 4, and 5.

  Resin until the thickness at the time of solidification of the resin material liquid for the alignment dividing projection and the post spacer for the mold 20 obtained in Example 1 (see FIG. 3A) is about 2000 mm at the flat portion. The material was filled (see FIG. 3B), and the solidified resin layer 3 was formed. An ITO film having a thickness of 1500 mm was formed thereon by sputtering (see FIG. 3C). Next, a black matrix (BM) 9 was formed thereon by a photosensitive resin method (see FIG. 3D). Further, the color filter material 8 of the color corresponding to the desired pixel is provided in the pixel portion in a generally aligned manner using a printing method (see FIG. 3E) and then pressed 28 (FIG. 4 ( f)). In this way, a resin layer having a post spacer portion and an alignment dividing projection on the intaglio transfer mold, ITO thereon, and a BM and a color filter formed thereon were obtained (see FIG. 4 (g)).

  Furthermore, the glass substrate 4 was pressed by a roll press 28 from the top and bottom in order from the end portion through the acrylic photocurable adhesive 26 so as to have a thickness of 2000 mm (see FIG. 4 (h)). At this time, a vacuum press is a particularly effective method as a countermeasure against air bubbles. In addition, the cylinder press may be effective from the viewpoint of downsizing the apparatus, and the roll may be two or more stages instead of one stage. Further, as the acrylic resin, it is desirable to use a material obtained by removing the color pigment from the color filter material, and the thickness may be sufficient to obtain a sufficient adhesive force even if the thickness is not 2000 mm. In particular, a thinner one is generally desirable.

  Then, the photo-curable adhesive 26 was exposed on the entire surface with an ultraviolet lamp 27, photo-cured (see FIG. 4 (i)), and then demolded (see FIG. 5 (j)).

  Finally, ashing was performed in oxygen plasma (see FIG. 5 (k)), the resin content in the flat portion other than the convex portion was removed, and the ITO surface was exposed to obtain the desired one (FIG. 5 (l)). reference).

  In plasma ashing, since the entire surface is removed to a uniform thickness, the recess for the MVA protrusion and the recess for the post spacer need to be prepared by adjusting the shape of the recess in accordance with this decrease ( (See FIGS. 5 (k) and (l)).

The post spacer part and the concave mold for forming the MVA protrusion were placed on the XY-θ table, and the resin layer having the post spacer part and the MVA protrusion was formed by the method of Example 5. On top of that, the color filter substrate already provided with the color filter and the black stripe is opposed to it with a gap of 100 μm while adsorbed to the surface plate, and is provided around the alignment mark and the color filter substrate provided around the concave shape. The alignment marks were aligned by aligning the alignment marks with an alignment system in which the CCD observation apparatus and the XY-θ table were linked. Next, the color filter substrate was placed on the resin layer and pressurized, and then the resin layer was solidified and demolded.

  Further, the present invention can be applied to a color filter substrate having a step on the color filter surface. That is, as shown in FIG. 6, a resin layer having a material portion of a post spacer portion and a MVA protrusion was formed on a color filter substrate having a step of about 2 μm by a die press method. The subsequent process was the same as the process after (e) of Example 2, and the post spacer part and the MVA protrusion part were formed.

  The present invention relates to an alignment division vertical alignment color liquid crystal display panel having a post spacer for adjusting the thickness of liquid crystal in an alignment division vertical alignment color liquid crystal display, and a method for manufacturing an IPS type color liquid crystal display panel. .

It is a conceptual sectional view showing the manufacturing method of the panel substrate for MVA type color liquid crystal display device obtained by the present invention. FIG. 2 is a conceptual cross-sectional view showing a method for manufacturing a panel substrate for an MVA type color liquid crystal display device obtained by the present invention subsequent to FIG. 1. It is a conceptual sectional view showing a manufacturing method of a panel substrate for an MVA type color liquid crystal display device obtained by the present invention different from the example of FIGS. FIG. 4 is a conceptual cross-sectional view showing a method for manufacturing a panel substrate for an MVA type color liquid crystal display device obtained by the present invention subsequent to FIG. 3. FIG. 5 is a conceptual cross-sectional view showing a method for manufacturing a panel substrate for an MVA type color liquid crystal display device obtained by the present invention subsequent to FIG. 4. It is a conceptual sectional view showing a method for manufacturing a panel substrate for an MVA type color liquid crystal display device obtained by the present invention different from the examples of FIGS. It is a cross-sectional schematic diagram for demonstrating operation | movement of a MVA type | mold color liquid crystal display device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Recessed part for post spacers 2 ... Recessed part for protrusions for MVA 3 ... Material resin 4, 41, 51, 61 ... Glass substrate 5, 15 ... Liquid crystal 7, 43, 53, 63 ··· Color filter 7R ... R color part of color filter 7G ... G color part of color filter 7B ... B color part of color filter 8 ... Color filter material 8R ... R of color filter material Color part 8G ... G color part of color filter material 8B ... B color part of color filter material 9 ... Black matrix 10 ... Color liquid crystal display device 11, 40 ... Panel substrate 12 ... Opposite substrate 13, 14, 49, 59, 69 ... MVA protrusion 16 ... Counter electrode 17, 45, 55, 65 ... Pixel electrode 18 ... Thin film transistor 1 ... Scanning electrode 20 ... Mold 21 ... Silicone rubber 22 ... Metal plate 23 ... Photosensitive resin film 24 ... Transparent conductive film 25 ... Color filter substrate 26 ... Adhesive 27 ... UV lamp 28 ... Press 29 ... Photomask 30 ... Overcoat layer 31 ... Overcoat material 32 ... Photosensitive resin post spacer 33 ... Bead spacer 34 ... Alignment film 35 ... Polarizing plate 36 ... Insulating layer 37 ... Protective film 38, 44, 54, 64 ... Spacer

Claims (9)

In a method for manufacturing a panel substrate for an alignment-divided vertical alignment color liquid crystal display device provided with at least a color filter, a MVA protrusion, and a post spacer,
The manufacturing process of the projection for MVA and the post spacer is as follows:
Creating a transfer mold having a MVA recess and a post spacer recess by a method selected from at least one of mechanical cutting, etching, etching, pattern plating, and electroforming Process,
Filling the transfer mold with an MVA projection material and a post spacer material,
Solidifying the dual-purpose material, transferring it to the color filter substrate, and simultaneously forming the MVA protrusion and the post spacer on the color filter substrate;
Curing the dual-purpose material,
The transfer mold creating step is at least
A step of preparing a glass mask having a post spacer pattern as a light transmission pattern and a glass mask having a projection pattern for MVA as a light transmission pattern;
Forming a film by spin-coating a negative photosensitive resin on the mask surface of the MVA glass mask;
Using a glass mac having a post spacer pattern, exposing from the negative resist surface, developing, providing a post spacer protrusion,
A step of forming a film by spin-coating a negative photosensitive resin added with an ultraviolet absorber on a mask surface having protrusions;
A process of obtaining a mother mold having MVA protrusions and post spacer protrusions having a substantially triangular cross-section by exposing the whole surface from the glass surface and developing it;
Applying a silicone rubber with a curing agent added to the matrix,
A step of placing a metal plate that has been treated with a primer thereon so that no air bubbles enter between them,
A method for producing a panel substrate for an alignment-divided vertical alignment type color liquid crystal display device, comprising: a step of peeling from a glass substrate after the silicone rubber is cured. In the transfer mold making process,
A step of applying and spraying a fluorine-based demolding material to the surface of the transfer mold each time, or
The method for producing a panel substrate for an alignment-divided vertical alignment color liquid crystal display device according to claim 1 , further comprising a step of forming a release layer on the surface of the transfer mold. Alignment-divided vertical alignment type color liquid crystal display device panel substrate manufacturing method according to claim 1 or 2, characterized in that the combined material is an acrylic resin. After filling the transfer mold with the MVA protrusion and the post spacer portion with the MVA protrusion material and the post spacer material,
Placing the color filter substrate comprising at least a transparent conductive film and the color filter thereon, alignment-divided vertical alignment type color liquid crystal display device according to any one of claims 1 to 3, characterized in that it comprises a step of bonding Method for manufacturing a panel board for an automobile. After filling the transfer mold with the MVA projection and the post spacer portion with the MVA projection material and the post spacer material, and curing,
Form at least ITO film and color filter on it,
Furthermore the glass substrate thereon, the alignment-divided vertical alignment type color liquid crystal display device panel substrate according to any one of claims 1 to 4, characterized in that it comprises an ITO bonding step bonding via an adhesive Production method. In the manufacturing method of the panel substrate for alignment division | segmentation vertical alignment type color liquid crystal display devices in any one of Claims 1-5 ,
A method for manufacturing a panel substrate for an alignment-divided vertical alignment color liquid crystal display device, further comprising an unnecessary portion removing step of removing material of the MVA protrusions and post spacers existing in the unnecessary portion in a subsequent step. The method for manufacturing a panel substrate for an alignment-divided vertical alignment color liquid crystal display device according to claim 6 , wherein the unnecessary portion removing step is any one of a plasma ashing method, a pattern exposure method, and a lift-off method. The transfer mold or press mold has flexibility,
The mold surface has releasability at the time of peeling the cured combined material, which is cured from the combined material, with respect to the material to be filled, the material to be pressed, and the material to be initially placed, respectively. alignment-divided vertical alignment type color liquid crystal display device manufacturing method for a panel substrate according to any one of claims 1-7. The orientation division according to any one of claims 1 to 8 , wherein the pressurizing method when the transfer mold and the color filter substrate are bonded together and the method of pressing the press mold onto the color filter substrate is a roll pressurizing method. Manufacturing method of panel substrate for vertical alignment type color liquid crystal display device.