JP4665620B2 - Inkjet printer head and manufacturing method thereof - Google Patents

Description

   The present invention relates to an inkjet printer head and a method for manufacturing the same.

   2. Description of the Related Art Conventionally, as described in Patent Document 1 in an inkjet printer head, a cavity plate having a plurality of nozzles, a pressure chamber for each nozzle, and an ink manifold that communicates with the pressure chamber and supplies ink is provided. An ink jet printer having a piezoelectric element plate having an energy generating portion such as a piezoelectric element for selectively driving corresponding to the pressure chamber portion via a diaphragm (flexible film) serving as a diaphragm on the back surface The head is known.

When the energy generating unit such as the piezoelectric element is driven to vibrate, the pressure chamber is selectively pressurized through the diaphragm, the pressure is transmitted to the corresponding nozzle, and printing is performed by ejecting ink. Executed.
At this time, the pressure wave acting on the pressure chamber has not only a forward component toward the nozzle hole but also a backward component toward the ink manifold.
Since so-called crosstalk occurs due to the backward component, a damper device is provided to absorb and relax the backward component.
That is, a damper chamber is recessed in the piezoelectric element plate at a position facing the ink manifold, the vibration plate (flexible film) is extended between the ink manifold and the damper chamber, and the damper chamber is moved to the vibration plate ( The ink manifold is partitioned by a flexible film.
And the vent hole (air escape hole) which connects a damper chamber to air | atmosphere is formed in the middle side surface of the plate | board thickness of a piezoelectric element board.

  On the other hand, in the ink jet printer head disclosed in Patent Document 2, as shown in FIG. 8, the cavity unit 100 includes a plurality of plate members, that is, a base plate 101 provided with pressure chambers 101a, and an ink manifold (manifold chamber). Two manifold plates 102 provided with 102a, a spacer plate 103 interposed between the two manifold plates 102 and the base plate 101, a nozzle plate 104 provided with a nozzle 104a, and the lower plate The damper plate 105 includes a damper plate 105 that is in contact with the lower side of the manifold plate 102 and has a damper wall 105a, and a cover plate 106 that is interposed between the damper plate 105 and the nozzle plate 104 to form a damper chamber 105b. The above An actuator 108 having a piezoelectric element is joined to the upper surface of the base plate 101.

The two manifold plates 102 form a manifold chamber 102a that penetrates equally to the plate thickness, and the damper plate 105 is formed with a recess from the opposite side to the manifold chamber 102a. On the side, a damper wall 105 a is formed leaving a part of the plate thickness of the damper plate 105.
A damper chamber 105 b is formed by bonding the cover plate 106 and the damper plate 105.

  With this configuration, the pressure chamber 101a and the manifold chamber 102a can be arranged so as to overlap vertically, so that the width of the head in the direction perpendicular to the nozzle row can be reduced, and the pressure chamber 101a and the manifold chamber can be provided on each plate. 102a can be processed easily.

Japanese Patent Laid-Open No. 09-141856 Japanese Patent Laid-Open No. 2004-25636

In the configuration of Patent Document 1, it is necessary to insert a thin diaphragm (flexible film) between the pressure chamber and the energy generation unit and between the damper chamber and the ink manifold.
In these manufacturing processes, thin diaphragms (flexible membranes) have low rigidity, so they are warped or distorted, and the bonding position is easily displaced, making them difficult to handle.
Further, since the pressure chambers, the ink manifolds, the energy generating portions such as the piezoelectric elements, and the damper chambers are arranged in a plane, the width of the head in the direction orthogonal to the nozzle rows is increased.
In addition, it is very difficult to three-dimensionally process a pressure chamber, an ink manifold, a communicating hole to a nozzle, and the like on one cavity plate, which requires a lot of man-hours.

With the configuration of Patent Document 2, crosstalk can be prevented while reducing the size of the inkjet printer head and maintaining the rigidity of the entire inkjet printer head.
Effective measures against crosstalk are to secure a sufficient volume of the manifold chamber and improve the damper function of the manifold chamber portion to absorb and mitigate the backward component of the pressure wave acting on the pressure chamber during ink ejection. However, as the number of nozzles in an inkjet printer head increases, the number of nozzles used with one color of ink increases. On the other hand, due to the downsizing of the head, it is difficult to secure a sufficient volume of the manifold chamber. It is coming.
For this reason, further improvement of the damper function is required as a countermeasure against crosstalk.

However, in order to improve the damper effect, simply reducing the rigidity of the plate material forming the damper wall has a limit in obtaining the necessary damper effect.
In other words, even if a plate material that forms the damper wall is made of a single thin film or metal film, the rigidity of the plate material is low, so there is no stiffness, and in the manufacturing process, handling is poor and distortion from the bonding position may occur. As a result, it is difficult to assemble, and as a result, the volume of the damper chamber changes, causing a problem that ink ejection characteristics change or deteriorate.
On the other hand, if a plate material with good assemblability is selected, the rigidity becomes high and the necessary damper effect cannot be obtained.

  SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems and to provide an ink jet printer head having good assemblability when the ink jet printer heads are laminated and bonded without impairing the damper effect and a method for manufacturing the same. Is.

In order to achieve this object, according to the first aspect of the present invention, a plurality of nozzles, a cavity unit having a pressure chamber for each of the nozzles, and pressure applied to ink in each of the pressure chambers, the nozzles are provided. In the ink jet printer head comprising an actuator for ejecting ink from the cavity unit, the cavity unit is provided with a base plate in which the pressure chamber is formed, and a manifold chamber for introducing ink supplied from an ink supply source into the pressure chamber. And a damper plate having a damper wall at a portion facing the manifold chamber. The damper plate is inserted in contact with the upper or lower side of the manifold plate and is inserted into the manifold chamber. A plurality of concavities adjacent to each other with a partition wall formed at the facing part And plate members, Ri Do a thin film material constituting the flexible damper wall for partitioning said manifold chamber and the recess, wherein the manifold chamber has a shape extending along the arrangement direction of the plurality of nozzles A plurality of the recesses are arranged in the longitudinal direction of the manifold chamber by extending the partition wall in a direction intersecting the longitudinal direction of the manifold chamber, and are further covered and laminated by the thin film material and the nozzle plate. by being characterized that you form a plurality of damper chambers in the longitudinal direction of the manifold chamber.

  According to the invention described in claim 2, the recess is formed such that the sum of all the recess flat areas occupies a range of 70% to 95% with respect to the plane area of the manifold chamber. It is characterized by.

  Moreover, according to invention of Claims 3-4, the said planar view shape of the said recessed part is a substantially circular shape or a substantially polygonal shape, At least 1 is 500 micrometers or more among the two internal methods orthogonal to it. It is characterized by.

According to the inventions described in claims 5 to 6 , the thin film material is made of a resin material or a metal material, and in the case of a resin material, the thickness is 30 μm or less, and in the case of a metal material, the thickness is 15 μm or less. To do.

  According to invention of Claim 7-8, the thickness of the said damper plate is 25-100 micrometers or less, and the said thin film material is formed over the whole surface by the side of the said manifold plate of the said board | plate material. It is characterized by.

According to the ninth aspect of the present invention, a plurality of nozzles, a cavity unit having a pressure chamber for each nozzle, and an actuator that applies pressure to the ink in each of the pressure chambers and ejects the ink from the nozzles. In the method of manufacturing an inkjet printer head, the damper plate is composed of a plate material and a thin film material formed on one surface thereof, and the thin film material is applied to the plate material at a position facing the manifold chamber. The manufacturing method is characterized in that a recess is formed, and the manifold plate and the damper plate are laminated so that the recess faces the manifold chamber via the thin film material.

According to the invention of claim 1 0, wherein the recess is characterized by with no etching solution of processing the said thin film material is a manufacturing method of etching in the plate.

According to the first aspect of the present invention, the damper plate inserted in contact with the upper or lower portion of the manifold chamber has a plate material in which a plurality of concave portions adjacent to each other with a partition wall formed at a portion facing the manifold chamber; Even if the rigidity of the thin film material is lowered, the shape of the thin film material is maintained by the partition walls by joining the thin film material that constitutes the flexible damper wall that partitions the manifold chamber and the recess. The effect can be achieved.
In addition, since the partition wall is a framework of the damper plate and the rigidity of the damper plate can be secured, it is possible to prevent the damper plate from warping, bending, or shifting the bonding position when laminating and bonding the inkjet printer head, Assembly efficiency during the manufacturing process can also be improved.
In addition, a plurality of the recesses are arranged in the longitudinal direction of the manifold chamber, and the partition wall extends in a direction intersecting the longitudinal direction of the manifold chamber, so that the damper plate plate material has a lattice shape, and the plate material and the thin film material are joined. Sometimes, the damper effect is not impaired, and the plate material can obtain rigidity with good handleability in the manufacturing process as a framework of the damper plate.

  According to the second aspect of the present invention, since the total sum of the flat areas of all the recesses occupies a range of 70% or more and 95% or less with respect to the flat area of the manifold chamber, it acts in the manifold chamber. When the ink discharge pressure acts on the damper wall, the damper wall occupies most of the shape of the manifold chamber in plan view and can be elastically bent as a whole so that the damper effect can be exhibited.

  According to the third aspect of the present invention, when the shape of the recess in plan view is substantially circular or substantially polygonal, the recesses are continuously arranged in combination so that there is no bias over the entire manifold chamber. Can form a uniform lattice structure, and a partition wall sufficient to ensure the rigidity of the damper plate while maintaining the damper effect.

  According to the invention described in claim 4, in the shape of the recess in plan view, at least one of the two orthogonal inner methods is 500 μm or more, so that the length of the movable part of the thin film material is reduced with the damper effect. The rigidity of the entire damper plate, which is easy to handle in the manufacturing process, can be ensured while ensuring enough to be exhibited.

According to the inventions of claims 5 and 6 , the thin film material is made of a resin material or a metal material. In the case of a resin material, the thickness is 30 μm or less, and in the case of a metal material, the thickness is 15 μm or less. The thin film material can exhibit a damper effect as a damper wall.

According to the seventh aspect of the present invention, the thickness of the damper plate formed by adhering the thin film material and the plate material is 25 to 100 μm or less, so that the damper effect is sufficiently combined and the necessary minimum Since a damper plate that can ensure rigidity can be obtained, it is possible to prevent the damper plate from being warped, bent, or displaced from being bonded when the inkjet printer head is stacked and bonded, and the assembly efficiency during the manufacturing process can be improved.

According to the eighth aspect of the present invention, the damper plate has the thin film material formed over the entire surface of the plate material constituting the damper plate on the manifold plate side. Since it is possible to use a clad material that is preliminarily attached and integrated, the rigidity of the material can be secured, the handling property during the manufacturing process is good, and the assembly efficiency is increased.

In the manufacturing method of the ink jet printer head of the invention described in claim 9 and 1 0, a thin film material is formed on one surface of the plate material, so to form a recess to leave the thin film material, good handling properties in the production process .
In addition, since the recess is formed by etching the plate material with an etching treatment solution that does not process the thin film material, the recess can be formed with high accuracy in the depth direction, and the damper chamber volume can be stably formed. The damper effect can be secured stably, and the discharge characteristics can be prevented from changing or decreasing.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 4 show a piezoelectric ink jet printer head of the present invention.
As shown in FIG. 1, a flexible flat cable 40 is overlapped and bonded to the upper surface of a plate-type piezoelectric actuator 30 bonded to the cavity unit 20 for connection to an external device. It is assumed that ink is ejected downward from the nozzle 15 opened on the lower surface side of the unit 20.

The piezoelectric actuator 30 has a structure in which a plurality of piezoelectric sheets 31 are stacked in the same manner as the known one disclosed in Japanese Patent Application Laid-Open No. 4-341835, etc., and each piezoelectric sheet has a thickness of about 30 μm. On the upper surface (wide surface) of the even-numbered piezoelectric sheet 31b from the bottom, narrow individual electrodes 33 are formed in a row along the long side direction at locations corresponding to the pressure chambers 16 in the cavity unit 20. Has been.
A common electrode 32 common to the plurality of pressure chambers 16 is formed on the upper surface (wide surface) of the odd-numbered piezoelectric sheet 31a from the bottom.
(See FIG. 4) An adhesive sheet made of a non-ink-permeable synthetic resin material as an adhesive on the entire lower surface (the wide surface facing the pressure chamber 16) of the plate-type piezoelectric actuator 30 having such a configuration. (Not shown) is pasted in advance, and then the piezoelectric actuator 30 is bonded and fixed to the cavity unit 20 so that each individual electrode thereof corresponds to each pressure chamber 16 in the cavity unit 20. The
The flexible flat cable 40 having a wiring pattern connected to each electrode is fixed to the upper surface of the piezoelectric actuator 30.

The cavity unit 20 is configured as shown in FIGS.
As shown in FIG. 2, the cavity unit 20 has a total of six thin plate members of a nozzle plate 10, a damper plate 11, two manifold plates 12, a spacer plate 13, and a base plate 14. It has a structure.
In the embodiment, each of the plates 10 to 14 has a thickness of about 25 to 150 μm, and each of the plates 12 to 14 excluding the nozzle plate 10 and the damper plate 11 is made of 42% nickel alloy steel plate.
The damper plate 11 will be described later.
The nozzle plate 10 is made of a resin such as polyimide, and a plurality of nozzles 15 for ink ejection having a minute diameter (in the embodiment, about 25 μm) are formed at minute intervals.
The nozzles 15 are arranged in two rows in a staggered arrangement along the long side direction of the nozzle plate 10.

The base plate 14 has a plurality of pressure chambers 16 arranged in two rows in a staggered manner along the long side direction of the base plate 14 as shown in FIGS.
In the embodiment, each of the pressure chambers 16 is formed in an elongated shape in plan view, and is drilled so that the longitudinal direction thereof is along the short side direction of the base plate 14.

  One end portion 16 a in each pressure chamber 16 communicates with each nozzle 15 in the nozzle plate 10 through a spacer plate 13, two manifold plates 12, and a small-diameter communication hole 17 formed in the damper plate 11. is doing.

  The spacer plate 13 adjacent to the lower surface of the base plate 14 is provided with a communication hole 18 for communicating the other end 16b of each pressure chamber 16 with a manifold chamber 12a described later.

  The other end 16b of the pressure chamber 16 is formed with a small cross-sectional area so as to provide a flow path resistance with respect to a return component of a pressure wave that acts on the manifold chamber 12a described later from the pressure chamber 16 during ink ejection. .

The two manifold plates 12 are formed with two manifold chambers 12a extending through the plate thickness so as to extend along each row of the nozzles 15 along the long side direction.
That is, as shown in FIG. 4, two manifold plates 12 are stacked, and the upper surface is covered with the spacer plate 13 and the lower surface is covered with the damper plate 11, so that a total of two manifold chambers 12a are sealed. It is formed.
Each manifold chamber 12a overlaps with a part of the pressure chamber 16 as shown in FIG. 4 and is elongated along the row direction of the pressure chambers 16 (row direction of the nozzles 15) when viewed in plan from the stacking direction of the plates. It extends.

  One end of each manifold chamber 12 a communicates with an ink supply source through an ink supply port 19 formed in the base plate 14 and the spacer plate 13.

In the ink flow path from the ink supply port 19 to the nozzle 15, the ink is supplied from the ink supply port 19 to the manifold chamber 12 a serving as an ink supply channel, and then each pressure chamber passes through the communication hole 18 of the spacer plate 13. 16 is distributed and supplied.
The piezoelectric actuator 30 is driven so that the ink passes from the inside of each pressure chamber 16 through the communication hole 17 to the nozzle 15 corresponding to the pressure chamber 16.

The damper plate 11 is adjacent to the lower surface of the lower plate of the two manifold plates 12, and is configured by bonding a plate material 11a and a thin film material 11b.
In order to ensure the rigidity necessary for the damper plate 11 to be easy to handle during lamination and bonding without impairing the damper effect, the plate material 11a has a plurality of adjacent portions separated by a partition wall 21 at a portion facing the manifold chamber 12a. The recess 21a is formed so as to penetrate in the thickness direction by etching or the like.
The thin film material 11b is formed over the entire surface of the plate material 11a on the manifold plate 12 side, and constitutes a flexible damper wall 21b that partitions the manifold chamber 12a and the recess 21a at a position corresponding to the recess 21a. Can do.
That is, the recess 21a formed in the plate 11a has a structure in which the upper side is covered with the thin film material 11b and the lower side is covered with the nozzle plate 10 so as to be sealed to form a damper chamber.

Since the concave portion 21a exhibits a necessary damper effect when the pressure at the time of ink discharge acts on the damper wall, the sum total of all the concave flat areas is 70% or more, 95 with respect to the flat area of the manifold chamber 12a. % Or less.
The shape of the recess 21a is square in FIG. 2, but the shape is not limited to this, and the recesses 21a are arranged in a combination of substantially circles and polygons such as circles, ellipses, rectangles, hexagons, and octagons.
Details will be described later.
(See FIGS. 5 and 6) In the present embodiment, the plate material 11b is made of 42% nickel alloy steel, but stainless steel or the like can be used.
The thin film material 11b is made of polyimide and has a thickness of 30 μm or less. However, the thin film material 11b is not limited to a resin material as long as it is thin and low in rigidity. For example, 42% nickel A thin metal plate such as alloy steel may be used.
When a metal material is used, a thickness of 15 μm or less is used.
Furthermore, the thickness of the damper plate 11 is 25 to 100 μm.
In this embodiment, the thin film material 11b is bonded to the plate material 11a. However, the resin thin film material 11b and the plate material 11a are bonded in advance, and a two-layer clad material formed integrally is used. It is also possible to do.

The recess 21a has at least the shorter one of the two inner methods 23a and 23b orthogonal to each other in plan view as shown in FIGS. 5 and 6 in order to secure the length of the movable part of the thin film material 11b. 23a is 500 μm or more.
If the inner method 23a or 23b is 500 μm or less, the length of the movable part of the thin film material 11b becomes small, so that the retreat component of the pressure wave cannot be sufficiently absorbed and the damper effect cannot be sufficiently obtained.

In addition, as shown in FIGS. 5 and 6, the recess 21a is formed so that the partition wall 21 separating the recess 21a is long in a direction intersecting the longitudinal direction (A direction) of the manifold chamber 12a. A plurality of them are arranged.
That is, a plurality of the recesses 21a are arranged in the longitudinal direction of the manifold chamber 12a.
If necessary, the recesses 21a are formed in two rows across the partition wall 22 in a direction intersecting the longitudinal direction of the manifold chamber 12a.
That is, the partition wall 22 extends in the longitudinal direction of the manifold chamber 12a.
This is because the length of the movable portion of the thin film material 11b can be secured when the concave portion 21a is formed large. However, if the rigidity of the thin film material 11b is lowered in order to obtain a damper effect, the stiffness of the thin film material can be reduced. The volume of the manifold chamber 12a and the damper chamber changes, affecting the ink ejection characteristics.
Moreover, the rigidity of the damper plate 11 as a whole is lowered, and the handleability is deteriorated.
For this reason, by forming the partition walls 21 and 22, the partition walls 21 and 22 work in a direction to increase the rigidity of the damper plate 11 as a whole, and even if the rigidity of the thin film material 11b is low, the length of the movable part is sufficient. The shape of the thin film material can be maintained while ensuring the thickness.
As a result, the thin film material 11b exhibits a good damper effect.
5 and 6, depending on the shape of the recess 21a, the partition walls 21 and 22 bend between the recesses 21a and extend in the longitudinal direction and the width direction of the manifold chamber 12a. The effect is equivalent.

The recess 21a will be described in detail with reference to FIGS.
5a to 5f show that the concave portion 21a has a square shape, a regular hexagonal shape, a regular circle shape, a rectangular shape, a laterally long hexagonal shape, and an elliptical shape in the plan view, and the concave portion 21a having the above dimensions within the width of 1 to 2 mm of the manifold chamber 12a. Two rows are arranged in a direction intersecting the longitudinal direction (A direction) of the manifold chamber 12a.
In the case of a square and a rectangle, all the concave portions 21a corresponding to the intermediate straight portions excluding almost both ends of the manifold chamber 12a can be continuously aligned in the same plan view shape, and an even lattice structure can be formed.
However, when the shape of the concave portion 21a in plan view is hexagonal, circular, or elliptical, if the same number of the concave portions 21a are arranged in the width direction (direction perpendicular to the longitudinal direction) of the manifold chamber 12a, the area of the partition wall 21 portion is increased. Therefore, the recess forming portion of the damper plate 11 does not have uniform rigidity over the longitudinal direction of the manifold chamber 12a.
The uneven rigidity of the damper plate 11 becomes uneven rigidity over the entire length of the cavity plate, and affects the discharge characteristics of each pressure chamber 16 when ink is discharged.

For this reason, in the case of the hexagonal, circular, or elliptical concave portion 21a, the concave portions adjacent to each other in the longitudinal direction of the manifold chamber 12a are shifted in the width direction of the manifold chamber 12a. A substantially circular or substantially polygonal recessed portion 24 smaller than the recessed portion 21a is disposed in a portion where the area is increased.
As a result, the widths of the respective portions of the partition wall 21 are made as uniform as possible, and the recess forming portion of the damper plate 11 is made substantially uniform in the longitudinal direction of the manifold chamber 12a.
In addition, at both end portions constituted by the curve of the manifold chamber 12a, a concave portion deformed more than that is formed regardless of the original shape of the concave portion 21a, so that the damper plate 11 is connected to the manifold chamber 12a in the same manner as described above. The rigidity can be made substantially uniform over the entire length.
In addition, since the planar view shape of the recessed part 24 is smaller than the recessed part 21a, the damper effect by the thin film material 11b stuck on the upper surface becomes somewhat small.

6a to 6d show a rectangular shape, a hexagonal shape, and an elliptical shape of the concave portion 21a in plan view, with one of the lengths substantially matching the width of the manifold chamber 12a, and the longitudinal direction of the manifold chamber 12a (in the direction of arrow A in FIG. 6). ).
In this case, the width of the manifold chamber 12a is 1 to 2 mm, and the two inner methods 23a and 23b orthogonal to each other in the plan view of the recess 21a are at least 500 μm.
Similarly to the case of FIG. 5, in order to make the width of the partition wall 21 substantially uniform, a small recess 24 is formed between the recesses 21a and 21a.

The damper plate 11 is adjacent to the lower surface of the lower manifold plate 12 in this embodiment, but may be adjacent to the upper surface of the upper manifold plate 12.
In that case, the damper plate 11 is formed by adhering the thin film material 11b to the lower side of the plate 11a having a plurality of recesses 21a (that is, the side of the manifold chamber 12a), and the upper side of the recesses 21a is covered with the spacer plate 14. Thus, the damper chamber is configured.

Then, the manufacturing method of an inkjet printer head is demonstrated.
First, the manufacturing method of the damper plate 11 is demonstrated using FIG.
A thin film material 11b is formed on the plate material 11a.
This may be a known method such as applying a resin thin film on a metal plate material, but a commercially available product in which the plate material 11a and the thin film material 11b are bonded in advance and integrated may be used. .
Then, as shown in FIG. 7, first, resist processing is performed on the lower surface 11a1 of FIG. 7 of the plate material 11a by a method such as spinner coating to form a resist 50 so as to cover only the portion where the recess 21a is not formed.
Thereafter, from the lower side of FIG. 7, an etching solution (not shown) that can etch only the plate material 11a but cannot substantially etch the thin film material 11b is sprayed or dropped onto the surface to be etched in the direction of the arrow in the figure. Thus, only the plate material 11a is etched to form the recess 21a.
Simultaneously with the formation of the recess, the communication hole 17 that allows the one end 16a of the pressure chamber and the nozzle 15 to communicate can be formed in the plate 11a.
In the thin film material 11b, a communication hole is formed by penetrating at a position corresponding to the communication hole 17 by ablation processing using a laser beam.

Therefore, since the thin film material 11b is not affected when the recess 21a is formed, the recess 21a can be formed with high accuracy.
In addition, since the flexible thin film material 11b is bonded to the plate material 11a in advance, the rigidity of the damper plate can be secured without impairing the damper effect, so that the damper plate can be handled in the manufacturing process of the inkjet printer head. Therefore, it is possible to prevent warping at the time of joining, bending, and displacement of the bonding position, and the yield in the manufacturing process can be improved.

The base plate 14, the spacer plate 13, and the manifold plates 12, 12 of the cavity unit 20 are each formed with the openings described above by etching or pressing, as is well known, and the nozzle plate 10 has the nozzle 15 by laser processing. Is formed.
The base plate 14, the spacer plate 13, the manifold plates 12 and 12, the damper plate 11, and the nozzle plate 10 are stacked in this order via an adhesive, and an actuator 30 is stacked on the cavity unit 20, so that the inkjet printer head is Complete.

1 is an exploded perspective view of a piezoelectric inkjet printer head according to an embodiment of the present invention. It is a disassembled perspective view of a cavity unit. It is a partial expansion perspective view of a cavity unit. It is an expanded sectional side view of a piezoelectric inkjet printer head. It is an enlarged view of the recessed part formation part of the board | plate material 11a of a damper plate, af shows each modification of the shape of a recessed part. g is a sectional view taken along line gg of a. a to d show still another modification of the shape of the recess. It is sectional drawing which shows the process of forming a recessed part in the board | plate material of a damper plate. 1 is a cross-sectional view showing a conventional inkjet printer head 100. FIG.

DESCRIPTION OF SYMBOLS 10 Nozzle plate 11 Damper plate 11a Plate material 11b Thin film material 12 Manifold plate 12a Manifold chamber 13 Spacer plate 14 Base plate 15 Nozzle 16 Pressure chamber 17 Ink outflow hole 18 Flow hole 20 Cavity unit 21 Partition 21a Recess 22 Partition 23a, 23b Inner method 24 Recess 30 Piezoelectric actuator 40 Flexible flat cable 50 Resist

Claims (10)

In an inkjet printer head comprising a plurality of nozzles, a cavity unit having a pressure chamber for each of the nozzles, and an actuator for applying pressure to the ink in each pressure chamber and ejecting ink from the nozzles,
The cavity unit includes a base plate in which the pressure chamber is formed, a manifold plate in which a manifold chamber for introducing ink supplied from an ink supply source into the pressure chamber, and a portion facing the manifold chamber. A damper plate having a damper wall is laminated, and the damper plate is inserted in contact with the upper or lower portion of the manifold plate, and a plurality of concave portions adjacent to each other facing the manifold chamber with a partition wall therebetween. and formed sheet material, Ri Do a thin film material constituting the flexible damper wall separating the said and the manifold chamber recess,
The manifold chamber has a shape extending along an arrangement direction of the plurality of nozzles,
A plurality of the recesses are arranged in the longitudinal direction of the manifold chamber by extending the partition wall in a direction intersecting the longitudinal direction of the manifold chamber, and are further covered and laminated by the thin film material and the nozzle plate. Thus, a plurality of damper chambers are formed in the longitudinal direction of the manifold chamber .   The said recessed part is formed so that the sum total of all the recessed flat areas may occupy the range of 70% or more and 95% or less with respect to the planar area of the said manifold chamber. Inkjet printer head.   The ink jet printer head according to claim 1, wherein the recess has a substantially circular shape or a substantially polygonal shape in plan view.   4. The ink jet printer head according to claim 1, wherein, in the shape of the concave portion, at least one of two orthogonal inner methods is 500 μm or more in a plan view shape. The thin film material, a resin material, the ink jet printer head according to claim 1-4, wherein the thickness is 30μm or less. The thin film member is made of a metallic material, the ink jet printer head according to claim 1-4, wherein the thickness is 15μm or less. The damper plate, the ink jet printer head according to claim 1-6, wherein the thickness is less than 25 to 100 m. The damper plate, the ink jet printer head according to claim 1-7 which over the entire surface of the manifold plate side of the plate, wherein the thin film material is formed. In a method of manufacturing an ink jet printer head comprising a plurality of nozzles, a cavity unit having a pressure chamber for each nozzle, and an actuator that applies pressure to the ink in each pressure chamber and ejects ink from the nozzle.
The cavity unit includes a base plate in which the pressure chamber is formed, a manifold plate in which a manifold chamber for introducing ink supplied from an ink supply source into the pressure chamber, and a portion facing the manifold chamber. It is constructed by laminating a damper plate having a damper wall,
The damper plate is composed of a plate material and a thin film material formed on one surface thereof,
The manifold chamber is formed so as to extend along the arrangement direction of the plurality of nozzles,
In a position facing the manifold chamber of the plate, the manifold chamber longitudinally along the direction intersecting with the recess plurality form, leaving the thin film material, a plurality of said recesses in said manifold chamber A manufacturing method of an ink jet printer head, wherein a plurality of damper chambers are formed by laminating the manifold plate and the damper plate so as to face each other through the thin film material. 10. The method of manufacturing an ink jet printer head according to claim 9 , wherein the concave portion is etched into the plate material with an etching treatment liquid that does not process the thin film material.

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