JP4620955B2 - Liquid channel member and liquid ejection device - Google Patents

Description

  The present invention is a liquid that can be suitably used for a print head that performs recording by ejecting fine droplets onto the surface of a recording medium such as a semiconductor substrate such as cloth, paper, plastic, metal, glass, ceramics, silicon or GaAs. The present invention relates to a flow path member and a liquid ejection device.

  The ink jet print head, for example, pressurizes a liquid in a liquid pressure chamber provided in a flow path member and ejects liquid droplets from the liquid pressurization chamber to record on a recording medium. In such a channel member, a plurality of plates each having a through hole or a groove are laminated, and a liquid channel is formed inside.

  For example, in an ink jet print head mounted on an ink jet printer, a plurality of plates are generally laminated to form an ink flow path (liquid flow path) such as an ink chamber, a pressure chamber, and an ejection hole. They are bonded together with an adhesive (for example, Patent Document 1). FIG. 8A is a schematic cross-sectional view schematically showing a configuration of a conventional ink jet print head, and FIG. 8B is a partially enlarged cross-sectional view thereof. As shown in FIGS. 8A and 8B, the ink jet print head includes an ejection hole plate 121, a pool plate 122, a supply hole plate 123, a sealing plate 124, a pressure chamber plate 125, and vibration. An actuator (liquid pressurizing means) 127 is attached to a liquid flow path member in which the plate 126 is laminated.

  The ejection hole plate 121 is formed with a liquid ejection hole 128 for ejecting ink. The liquid ejection hole 128 is connected to the pressure chamber 130 provided in the pressure chamber plate 125 via a communication hole 129 formed by through holes provided in the pool plate 122, the supply hole plate 123, and the sealing plate 124, respectively. Communicate. The pressure chamber 130 is connected to an ink pool 133 formed in the pool plate 122 via a supply communication path 131 formed in the sealing plate 124 and a supply hole 132 formed in the supply hole plate 123. Each plate is laminated and bonded using an adhesive.

  However, since each plate is provided with very small diameter holes and grooves such as the liquid ejection holes 128 and the communication holes 129, these holes are filled with excess adhesive or excess adhesive is not allowed. There is a problem that the flow is hindered by the protruding build-ups 135a and 135b, and the liquid droplets cannot be normally ejected from the liquid ejection holes 128.

  In view of this, Patent Documents 1 and 2 propose a print head in which a groove portion (escape groove) for allowing excess adhesive to escape is provided on the joint surface of the plate. However, since the thickness of the plate in the print head is as thin as about 50 to 150 μm, it is difficult for the means disclosed in Patent Documents 1 and 2 to secure a sufficiently large escape groove on the thin plate, and surplus The adhesive was not sufficient to prevent the holes from being plugged.

  Therefore, Patent Document 3 proposes a print head in which the thickness of the adhesive layer is adjusted based on the thinner one of the two plates to be bonded together. According to this print head, it is supposed that it is possible to prevent the adhesive from protruding into the holes and grooves provided in each plate and the resulting blockage of the holes.

However, in the print head described in Patent Document 3, as described above, it is still difficult to secure a sufficiently large escape groove on a thin plate. There is a problem in that the liquid flows out to block the liquid flow path to prevent the liquid from being ejected. Further, even when the liquid flow path is not completely blocked, excess adhesive protrudes from the inner wall into the liquid flow path (see, for example, FIG. 2 of Patent Document 3), and this protruding adhesive causes the liquid to progress. There is a problem in that the printing quality deteriorates and defective products increase.
JP-A-5-330067 JP 2002-240272 A JP 2000-168078 A

  An object of the present invention is to provide a liquid flow path member and a liquid droplet ejecting apparatus that can prevent the excess adhesive from protruding into the liquid flow path and allow the liquid to flow smoothly.

The liquid flow path member and the liquid ejection device of the present invention for solving the above problems are configured as follows.
(1) A liquid flow path member in which a plurality of plates are laminated and bonded via an adhesive layer, and a liquid flow path is formed inside, and is attached to the opposite plate of one or both of the opposed plates Grooves are provided on the opposing surfaces, and in the grooves, a cross-sectional shape cut by a plane including the edges on both sides of the grooves is convex to the opposite plate side. The adhesive shielding projection is in contact with a projection receiving portion made of a material having a lower hardness than the adhesive shielding projection provided on the opposite plate. And the adhesive shielding projection is formed in a partition shape around a through-hole or groove of a plate for forming the liquid channel.
(2) The liquid flow path member according to claim 1, wherein, in the cross-sectional shape of the adhesive shielding projection, the width of the front end contacting the projection receiving portion is smaller than the width of the rear end positioned at the base end. .
(3) The liquid flow path member according to (2), wherein a tip of the adhesive shielding projection has a pointed shape.
(4) The liquid flow path member according to (1) or (2), wherein the tip of the adhesive shielding projection has a curved shape.
(5) The liquid channel member according to any one of (1) to (4), wherein the material constituting the protrusion receiving portion is a resin.
(6) The liquid channel member according to any one of (1) to (5), and a liquid pressurizing unit, wherein the liquid channel member is provided with a liquid ejection hole communicating with the liquid channel. A liquid ejecting apparatus characterized by that.
(7) The liquid ejection device according to (6), wherein a plurality of the liquid ejection holes are provided, and droplets are ejected independently from each liquid ejection hole by the liquid pressurizing unit.
(8) The liquid ejection device according to (7), which is an ink jet print head.

Wherein (1) the liquid flow passage member description, relative to one or both plates, a groove which have a glue shielding protrusion for increasing a sealability between these plates is provided, Since this protrusion is in contact with a protrusion receiving portion made of a material having a hardness lower than that of the adhesive shielding protrusion provided on the opposite plate , the inside of the through-hole or groove is caused by the pressure during plate lamination. The protrusions block the path of excess adhesive that has been pushed to the wall surface (inner wall surface side of the liquid channel), and a large amount of excess adhesive protrudes from the inner wall of the liquid channel into the liquid channel. It can suppress that a flow is inhibited. Thereby, the smooth flow of the liquid can be achieved in the liquid flow path. Moreover, since the protrusion receiving portion made of a material having a lower hardness than the protruding portion is provided at the portion where the protruding portion abuts, the tip of the protruding portion bites into the protrusion receiving portion, so that a more stable sealing property is obtained. be able to. The “adhesive shielding protrusion” in the present invention does not necessarily have a function of sealing (sealing) between plates in a liquid-tight manner, and at least a large amount of adhesive from the inner wall of the liquid flow path. It is only necessary to have a function of ensuring a smooth flow of the liquid in the liquid flow path by suppressing the liquid from protruding into the liquid flow path.

In the present invention, the protrusions may be appropriately formed on the site where it is necessary to increase the sealability between the plates, as before Symbol (1), wherein the plate provided to form the liquid flow path It is good to form in the shape of a partition around the through hole or groove. Thereby, it can prevent more reliably that the excess adhesive agent protrudes in a liquid flow path.

Wherein (2), as described (3), the liquid flow passage member of the present invention, the width of the previous end of the protrusion rear end by remote small, in particular the tip of the projection portion is previously pointed shape Good. Further, as described in (4) above, the tip of the protrusion may be curved. By either the width of the previous end of the thus protruding portion is small, or a curved surface, the sealability projection contacts made of a material of lower hardness than the adhesive shielding protrusion provided on the other plate It becomes easy to contact in a high state.

According to the liquid flow path member described in (5), since the protrusion receiving portion made of a material having a lower hardness than the protruding portion is provided at the portion where the protruding portion contacts, the tip of the protruding portion is the protrusion receiving portion. Since it bites in, a more stable sealing property can be obtained.

According to the liquid ejection device according to (6), since the liquid flow path member as described above is provided, a smooth flow of the liquid is achieved in the liquid flow path, and the liquid flowing in the liquid flow path is Leakage can be suppressed. As a result, stable droplets with little variation can be ejected from the liquid ejection holes.

According to the (7) liquid discharge device according to a liquid ejection hole provided with a plurality, since the droplets separate from the ejection hole is configured to be ejected by the liquid pressurizing means, such as the ( When applied to an inkjet printer as in 8) , a fine and beautiful image can be obtained.

The liquid channel member and the liquid ejection device of the present invention will be described in detail with reference to the drawings, taking as an example the case of applying them to an ink jet print head. FIG. 1 (a) is a schematic cross-sectional view schematically showing the structure of a liquid flow path member according to a reference example of the present invention, and FIG. 1 (b) is one of the liquid flow path members of FIG. 1 (a). It is the partial expanded sectional view which expanded the part.

As shown in FIG. 1A, the liquid flow path member 14 according to this reference example includes an ejection hole plate 1, a pool plate 2, a supply hole plate 3, a sealing plate 4, and a pressure chamber plate 5. The vibration plate 6 is laminated.

  The ejection hole plate 1 is formed with a liquid ejection hole 1a for ejecting liquid. This liquid ejection hole 1a is provided in the pressure chamber plate 5 through a communication hole 9 formed by through holes 2a, 3a, 4a provided in the pool plate 2, the supply hole plate 3 and the sealing plate 4, respectively. It communicates with the pressure chamber 10 formed by the through hole 5a. The pressure chamber 10 penetrates through the pool plate 2 via the supply communication path 11 formed by the through hole 4 b provided in the sealing plate 4 and the supply hole 3 b formed in the supply hole plate 3. It is connected to the pool 13 formed by the hole 2b. The pool 13 contains ink for inkjet printing. This ink is supplied into the liquid pool 13 from an ink tank (not shown) provided outside.

  As described above, through holes such as the liquid ejection holes 1a, the through holes 2a to 5a, and the through holes 2b to 4b are formed in each plate, the liquid flow path member 14 has a liquid pool 13 therein. A liquid flow path is formed from the supply hole 3b, the supply communication path 11, the pressure chamber 10, the communication hole 9, and the liquid ejection hole 1a. In the liquid flow path member 14 shown in FIG. 1A, the pressure chamber 10 includes three plates (that is, the sealing plate 4, the pressure chamber plate 5 provided with the through hole 5a, and the vibration plate 6). However, for example, a pressure chamber can be formed by providing a through hole in one plate, or by stacking another plate on a plate having a groove.

  The liquid flow path member 14 is obtained by laminating and bonding the vibration plate 6 and the plates 1 to 5 provided with through holes via an adhesive layer. In the liquid flow path member 14, an adhesive shielding projection for improving the sealing property between the plates is formed on the surface of one of the opposing plates in the shape of a partition around the through hole, and the projections are opposed to each other. It is in contact with the surface of the other plate.

For example, as shown in FIG. 1 (b), the supply hole plate 3 has an adhesive for improving the sealing property between the pool plate 2 and the supply hole plate 3 on the surface 3c. It has a shielding projection 3d, and this projection 3d is in contact with the opposite surface 2c of the pool plate 2. As a result, the protrusion 3d blocks the path of the excess adhesive pushed out to the through holes 2a and 3a by the pressure when the pool plate 2 and the supply hole plate 3 are stacked. It is possible to prevent the build-up of the adhesive from being formed, and to prevent the flow of the liquid from being inhibited in the communication hole 9. In the liquid flow path member of the present invention, the shape of the protrusion is not particularly limited as long as it can improve the sealing performance between the plates, but preferably the shape having a width on the front end side smaller than that on the plate surface side. More preferably, the tip has a pointed shape like the protrusion 3d. In addition, the protrusion part should just be able to improve the sealing performance between plates at least, and does not necessarily need to be able to completely seal between plates liquid-tightly. That is, for example, a part of the adhesive may flow out from the protrusion toward the communication hole 9 to form the protrusion 27a, and a large amount of adhesive protrudes into the communication hole 9 to inhibit the liquid flow. If there is nothing, it is good.

  Hereinafter, the method of laminating and bonding the plates will be described in detail by taking the laminating adhesion of the pool plate 2 and the supply hole plate 3 as an example. 2A is a schematic cross-sectional view showing a state immediately before the pool plate 2 and the supply hole plate 3 are joined, and FIG. 2B shows a state after the pool plate 2 and the supply hole plate 3 are joined. It is a schematic sectional drawing.

  First, as shown in FIG. 2 (a), a pool plate 2 having a through hole 2a and a projection 3d formed so as to surround the through hole 3a and the vicinity of the through hole 3a and the periphery of the through hole 3a are provided. The supply hole plate 3 is prepared by a known molding method. Next, a predetermined amount of adhesive 27 is applied to the surface 3c of the supply hole plate 3 by a known means such as screen printing. At this time, the adhesive 27 is preferably applied only on the surface 3c opposite to the through hole 3a with respect to the protrusion 3d. Thereby, even if the excess adhesive 27 has diffused to the through holes 2a and 3a beyond the protruding portion 3d, the amount can be significantly reduced.

  Next, the pool plate 2 and the supply hole plate 3 are bonded together by applying a predetermined pressure. At this time, as shown in FIG. 2 (b), the adhesive 27 is pushed and moved toward the through holes 2a and 3a by the pressure at the time of bonding, but the path of the adhesive 27 is blocked by the protrusion 3d. Therefore, it is possible to prevent excessive adhesive 27 from protruding into the through holes 2a and 3a.

  When the liquid channel member of the present invention is applied to an ink jet print head, the material of the plate constituting the liquid channel member is, for example, Fe—Cr-based or Fe—Cr—Ni-based stainless steel, Fe—Ni-based, Examples thereof include metals such as WC-TiC, cemented carbide, ceramics such as silicon, alumina, and zirconia. Examples of the adhesive that bonds these plates include an epoxy resin adhesive and a UV resin adhesive.

  In order to further improve the sealing performance between the plates, it is preferable that the surface 2c of the pool plate 2 with which the protrusion 3d abuts has a lower hardness than the protrusion 3d. Thereby, the protrusion 3d can easily bite into the surface 2c of the pool plate 2 and the sealing performance is improved. Specifically, for example, the material of the pool plate 2 and the supply hole plate 3 may be a combination of Ni alloy and stainless steel, stainless steel and cemented carbide steel, or the like.

  Further, even if the pool plate 2 and the supply hole plate 3 are made of the same material, for example, Ni alloys or stainless steels, at least the surface of the protrusion 3d of the surface 3c of the supply hole plate 3 is diamond, diamond By covering a thin film such as like carbon (DLC) or ceramics to increase the hardness, the protrusions 3d can easily bite into the surface 2c of the pool plate 2.

  Further, as shown in FIGS. 3 (a) and 3 (b), at least a portion of the surface 2c of the pool plate 2 with which the protrusion 3d abuts is a protrusion receiving portion 15 made of a material having a hardness lower than that of the protrusion 3d. Alternatively, the protrusion receiving portion 16 may be provided. The protrusion receiving part 15 is made of a soft thin film having a lower hardness than the protrusion 3d. Further, the protrusion receiving portion 16 is a molded body made of a soft material such as a resin disposed in the receiving groove 2h provided on the surface 2c. Providing these projection receiving portions 15 and 16 makes it easier for the projection 3d to bite into the pool plate 2 and improves the sealing performance. When the adhesive is heat-cured, by using a soft material having a melting point higher than the heat treatment temperature, the protrusion receiving portion maintains its shape and remains in the receiving groove 2h even when heat treatment is performed. Retained.

Here , as shown in FIG. 3C, the liquid flow path member according to the embodiment of the present invention has a convex cross section (pool plate, for example, by etching the surface of the supply hole plate 3). only set the lower protrusion 3h tip from the surface of the supply hole plate 3 by forming a groove convex) 2 side, convex projection receiving portion 17 on the surface of the pool plate 2 which is opposed to the protrusion 3h ( from the surface of the pool plate 2 is provided in a convex) the supply hole plate 3 side, a protrusion 3h and the receiving portion 17 projections so as to abut. Such a protrusion 3h can be formed by slightly processing a part of the supply hole plate 3, so that the processing is easy, the material is not wasted, and the cost can be reduced. Further, the protrusion receiving portion 17 can be formed by attaching a molded body of a soft material such as resin with an adhesive or the like, or by metal plating, metal vapor deposition, or the like.

  As shown in FIG. 4, not only the protrusion 3d is provided on the surface 3c of the supply hole plate 3, but also a relief groove 3e for holding the adhesive 27 may be provided on the surface 3c of the plate. Thereby, when the pool plate 2 and the supply hole plate 3 are laminated and bonded, a part of the adhesive 27 is filled (held) in the escape groove 3e, so that the excess adhesive 27 protrudes into the liquid flow path. It can prevent more effectively.

Like the protrusion 3f shown in FIG. 5A, the tip thereof may be curved. The protrusions may be formed by processing the surface of the supply hole plate 3 and forming a part of the supply hole plate 3 as a protrusion. For example, as shown in FIG. The protrusion 3i may be formed by attaching a member by bonding or the like. The protrusion 3i is made of ceramics such as silicon, Si ₃ N ₄ , SiC, alumina, zirconia, diamond, diamond-like carbon, metals such as Ni, Au, Ag, Pt, Cu, and Ag, resins having a high melting point, and the like. Can be used. This resin may be subjected to metal plating or metal vapor deposition.

  Furthermore, as shown in FIG. 6, the protrusions 2g and 3g may be formed on the surface 2c and the surface 3c of the pool plate 2 and the supply hole plate 3, respectively. Thereby, the sealing performance between the pool plate 2 and the supply hole plate 3 can be further improved.

  In the above description, the case where the pool plate 2 and the supply hole plate 3 are bonded to each other has been described as an example. However, the lamination bonding of other plates may be performed in the same manner as described above. That is, by providing an adhesive shielding protrusion around the through holes such as the liquid ejection hole 1a, the through holes 2a to 5a, and the through holes 2b to 4b, the adhesive into the through holes can be obtained. The protrusion can be suppressed.

  Next, a liquid ejection device according to an embodiment of the present invention will be described. FIG. 7A is a schematic cross-sectional view schematically showing the structure of the liquid ejection device according to the present embodiment, and FIG. 7B is a plan view of the liquid ejection device (viewed from the liquid ejection hole side). FIG. 7 (c) is a bottom view of the liquid ejection device (viewed from the liquid pressurizing means side).

  As shown in FIG. 7A, the liquid ejection device of this embodiment includes the liquid flow path member 14 and the actuator (liquid pressurizing means) 7 described above. The liquid flow path member 14 includes a plurality of liquid flow paths and a plurality of liquid ejection holes 1a corresponding to the liquid flow paths. Further, as shown in FIGS. 7B and 7C, the liquid ejection device includes a plurality of liquid ejection holes 1a provided in the liquid flow path member 14, and a plurality of liquid ejection holes 1a corresponding to the liquid ejection holes 1a. And an actuator 7. Accordingly, when any one of the actuators 7 is displaced, the pressure chamber 10 located immediately below the actuator 7 is pressed, and the liquid existing in the pressure chamber 10 and the communication hole 9 communicating with the pressure chamber 10 is pressurized to form a liquid ejection hole. Droplets can be ejected from 1a.

  As shown in FIGS. 7B and 7C, for example, when the actuator 7 is displaced, a droplet is ejected from the liquid ejection hole 1a provided corresponding to the actuator 7 and another actuator 7 ′ is displaced. Then, a droplet is ejected from a liquid ejection hole 1a ′ provided corresponding to the actuator 7 ′. In this way, each liquid ejection hole is individually controlled, and droplets can be ejected to a desired site and at a desired time.

  As described above, since the liquid ejection device of the present invention includes the above-described liquid flow path member, it is possible to prevent a large build-up from being formed in the liquid flow path, and the liquid droplet traveling direction and the liquid droplet Uniform liquid ejection can be realized without variation in volume. In addition, since the sealing performance between the opposing plates is enhanced by the adhesive shielding projection, it is possible to prevent the liquid flowing in the liquid channel from leaking between the plates when the liquid channel member is used. .

  In particular, the present invention includes an ink jet including a print head, a mechanism for supplying ink to the print head, and a mechanism for feeding a medium such as paper or cloth to which ink ejected from a liquid ejection hole of the print head is fixed at a specific speed. When applied to a printing machine of the type, it is possible to obtain a beautiful and beautiful printing state. Further, the present invention can be applied to all ink jet print heads regardless of the bubble jet (registered trademark) system or the piezoelectric actuator system. Application to industrial printing machines can also be expected.

(a) is a schematic cross-sectional view schematically showing the structure of a liquid flow path member according to a reference example of the present invention, and (b) is an enlarged cross-sectional view in which the vicinity of the through hole of the liquid flow path member is enlarged. . (a) is a schematic sectional view showing a state immediately before joining the plates, and (b) is a schematic sectional view showing a state after joining these plates. (a), (b), the Ri enlarged sectional view der an enlarged through hole near the other references according to Example liquid flow passage member of the present invention, (c) a liquid according to an embodiment of the present invention Ru enlarged sectional view der of the enlarged vicinity of the through-hole of the flow path member. It is the expanded sectional view which expanded the neighborhood of the penetration hole of the liquid channel member concerning other reference examples of the present invention. (a), (b) is the expanded sectional view which expanded the through-hole vicinity of the liquid flow path member concerning the further reference example of this invention. It is the expanded sectional view which expanded the neighborhood of the penetration hole of the liquid channel member concerning other reference examples of the present invention. (a) is a schematic sectional drawing which shows typically the structure of the liquid ejection apparatus concerning one Embodiment of this invention, (b) is a top view (figure seen from the liquid ejection hole side) of this liquid ejection apparatus (C) is a bottom view of the liquid ejecting apparatus (viewed from the liquid pressurizing means side). (a) is a schematic sectional drawing which shows typically the structure of the conventional liquid ejection apparatus (inkjet printing head), (b) is the elements on larger scale which expanded the part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Jet hole plate 1a Liquid jet hole 2 Pool plate 2a, 3a, 4a, 5a Through-hole 2b, 3b, 4b Through-hole 2c, 3c Surface of plate 2g, 3d, 3f, 3g, 3h, 3i Adhesive shielding protrusion 3 Supply hole plate 4 Sealing plate 5 Pressure chamber plate 6 Vibration plate 7 Actuator (liquid pressurizing means)
9 Communication hole 10 Pressure chamber 11 Supply communication path 15, 16 Protrusion receiving part 27 Adhesive 27a Adhesive protrusion

Claims (8)

A liquid flow path member in which a plurality of plates are laminated and bonded via an adhesive layer, and a liquid flow path is formed therein , the surface of one or both of the opposed plates facing the other opposed plate Is provided with a groove, and the groove is perpendicular to the surface and has a cross-sectional shape cut on the surface including the edges on both sides of the groove, which is convex on the opposite plate side. There is an adhesive shielding projection, and the adhesive shielding projection is in contact with a projection receiving portion made of a material having a lower hardness than the adhesive shielding projection provided on the other opposing plate. The liquid flow path member, wherein the adhesive shielding projection is formed in a partition shape around a through hole or a groove of a plate for forming the liquid flow path. 2. The liquid flow path member according to claim 1, wherein, in the cross-sectional shape of the adhesive shielding projection, a width of a front end contacting the projection receiving portion is smaller than a width of a rear end positioned at a base end .   The liquid flow path member according to claim 2, wherein the tip of the adhesive shielding projection has a tip shape.   The liquid flow path member according to claim 1 or 2, wherein the tip of the adhesive shielding projection has a curved shape.   The liquid channel member according to claim 1, wherein a material constituting the protrusion receiving portion is a resin.   A liquid channel member according to any one of claims 1 to 5 and a liquid pressurizing means are provided, and the liquid channel member is provided with a liquid ejection hole communicating with the liquid channel. Liquid ejecting device.   The liquid ejecting apparatus according to claim 6, wherein a plurality of the liquid ejecting holes are provided, and droplets are ejected independently from each liquid ejecting hole by the liquid pressurizing unit.   The liquid ejecting apparatus according to claim 7, which is an ink jet print head.

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