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JP4541383B2 - Transport device - Google Patents

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Publication number
JP4541383B2
JP4541383B2 JP2007130332A JP2007130332A JP4541383B2 JP 4541383 B2 JP4541383 B2 JP 4541383B2 JP 2007130332 A JP2007130332 A JP 2007130332A JP 2007130332 A JP2007130332 A JP 2007130332A JP 4541383 B2 JP4541383 B2 JP 4541383B2
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Prior art keywords
magnetic
rollers
pair
disk
gear
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Expired - Fee Related
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JP2007130332A
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JP2008285255A (en
Inventor
大祐 早坂
欽吾 操谷
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Shoei Engineering Co Ltd
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Shoei Engineering Co Ltd
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Priority to JP2007130332A priority Critical patent/JP4541383B2/en
Priority to TW096118922A priority patent/TW200846573A/en
Priority to KR1020070053147A priority patent/KR20080101606A/en
Priority to CN2007101269354A priority patent/CN101309042B/en
Publication of JP2008285255A publication Critical patent/JP2008285255A/en
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Publication of JP4541383B2 publication Critical patent/JP4541383B2/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Gear Transmission (AREA)

Description

本発明は、一対のローラ間に被搬送物を挟持させつつ一対のローラを回転させることによって被搬送物を搬送する装置に関する。   The present invention relates to an apparatus that conveys an object to be conveyed by rotating the pair of rollers while sandwiching the object to be conveyed between the pair of rollers.

従来、一対のローラ間に被搬送物を挟持させつつ一対のローラを回転させることによって被搬送物を搬送する装置が知られている。このような搬送装置は、例えば、プリント基板等の製造工程において、基板表面に付着した塵埃を除去するための洗浄装置に設けられている（例えば特許文献１を参照）。このプリント基板等の洗浄装置（以下、省略して「基板洗浄装置」という）は、上下に対向して配置された一対の粘着性を有するクリーニングローラと、このクリーニングローラに動力を伝達する動力伝達手段とを備えており、一対のクリーニングローラの間に基板を挟持させつつ一対のクリーニングローラを回転させることによって、基板を搬送させながら基板に付着した塵埃をクリーニングローラ表面に吸着させるようにしたものである。   2. Description of the Related Art Conventionally, there is known an apparatus that conveys an object to be conveyed by rotating the pair of rollers while sandwiching the object to be conveyed between the pair of rollers. Such a conveying device is provided in a cleaning device for removing dust adhering to the substrate surface in a manufacturing process of a printed circuit board or the like (see, for example, Patent Document 1). This printed circuit board cleaning device (hereinafter abbreviated as “substrate cleaning device”) includes a pair of adhesive cleaning rollers disposed in opposition to each other, and power transmission for transmitting power to the cleaning rollers. Means for adsorbing dust adhering to the substrate to the surface of the cleaning roller while rotating the pair of cleaning rollers while sandwiching the substrate between the pair of cleaning rollers. It is.

特開２０００−８４５１４号公報JP 2000-84514 A

ところで、上記のような基板洗浄装置においては、駆動源の回転力をクリーニングローラへ伝達するための機構として、駆動源によって軸心回りに回転駆動する駆動側歯車と、クリーニングローラに連結された被駆動側歯車とからなる歯車機構等が用いられる。しかしながら、従来の機械的接触を伴う歯車機構における伝達方式では、歯車の磨耗、摩擦により塵埃が発生し、この塵埃が基板に付着したり、歯車の潤滑油が気化することにより基板が汚染される等の事態が生じる虞があり、基板を洗浄するための装置であるにも拘らず基板を清浄な状態で搬送することができないといったことが起こり得る。   By the way, in the substrate cleaning apparatus as described above, as a mechanism for transmitting the rotational force of the drive source to the cleaning roller, a drive-side gear that is driven to rotate about the axis by the drive source, and a target gear connected to the cleaning roller. A gear mechanism or the like composed of a drive side gear is used. However, in the transmission system in the conventional gear mechanism with mechanical contact, dust is generated due to wear and friction of the gear, and the dust adheres to the substrate or the lubricating oil of the gear evaporates to contaminate the substrate. Such a situation may occur, and it may happen that the substrate cannot be transported in a clean state despite being a device for cleaning the substrate.

また、上記の基板洗浄装置では、上下に対向配置されたクリーニングローラのうち上側のクリーニングローラが、基板表面に実装された電気部品等の凹凸に追従して上下動できる構成となっている。すなわち、予め設定された両ローラ間の間隔よりも厚みの大きい基板の凸部を両ローラ間に挟持させる際に、この凸部により上側クリーニングローラが上方に押し上げられるようになっている。従来の機械的接触を伴う歯車機構の場合、上側クリーニングローラが上動する際に、上側クリーニングローラに連結された被駆動側歯車の噛み合い具合が変化しないように別の手段で対応しており、機構が複雑になるという問題がある。   Further, in the above-described substrate cleaning apparatus, the upper cleaning roller among the cleaning rollers arranged vertically opposite to each other is configured to be able to move up and down following the unevenness of an electrical component or the like mounted on the surface of the substrate. That is, when a convex portion of a substrate having a thickness larger than a predetermined interval between both rollers is sandwiched between both rollers, the upper cleaning roller is pushed upward by the convex portion. In the case of a conventional gear mechanism with mechanical contact, when the upper cleaning roller moves upward, another means is used so that the meshing state of the driven gear connected to the upper cleaning roller does not change, There is a problem that the mechanism becomes complicated.

本発明は、上記の点に鑑み、ローラへの動力伝達手段である歯車の磨耗、摩擦等による塵埃が発生しない搬送装置を提供することを目的とする。   The present invention has been made in view of the above points, and an object of the present invention is to provide a transport device that does not generate dust due to wear, friction, or the like of a gear serving as power transmission means to a roller.

上記の目的を達成するために、本発明の請求項１に係る搬送装置は、一対のローラに回転を伝達する動力伝達手段を備え、前記一対のローラ間に被搬送物を挟持させつつ前記一対のローラを回転させることにより被搬送物を搬送する搬送装置において、前記動力伝達手段は、駆動源によって軸心回りに回転駆動され、その端面に永久磁石をＮ極、Ｓ極と交互に曲線の放射状となるように異極配列して着設することにより形成した第１磁気面を有する円盤と、前記一対のローラにそれぞれ連結され、その外周に永久磁石をＮ極、Ｓ極と交互に螺旋状に異極配列して着設することにより形成した第２磁気面を有する一対の円筒とを備え、前記一対の円筒を、前記円盤との間に所定の空隙を保ち、且つ、前記第２磁気面を前記第１磁気面に対向させるように配置し、前記永久磁石の磁気の引力及び反発力を利用して、前記円盤から前記一対の円筒へ動力を伝達させることを特徴とする。 In order to achieve the above object, a transport apparatus according to a first aspect of the present invention includes power transmission means for transmitting rotation to a pair of rollers, and the pair of rollers holds the object to be transported between the pair of rollers. In the conveying apparatus that conveys the object to be conveyed by rotating the rollers, the power transmission means is rotationally driven around the axis by the drive source, and a permanent magnet is curved on the end face of the N pole and S pole alternately . A disk having a first magnetic surface, which is formed by arranging different poles so as to be radially arranged, and a pair of rollers, and a permanent magnet spiraling alternately between the N pole and the S pole on the outer periphery thereof And a pair of cylinders having a second magnetic surface formed by arranging them in a different pole arrangement, and maintaining a predetermined gap between the pair of cylinders and the disk, and the second The magnetic surface is opposed to the first magnetic surface. Place manner, by utilizing the attraction and repulsion of magnetic of the permanent magnet, characterized in that to transfer power to the pair of cylinder from the disc.

本発明の請求項２に係る搬送装置は、上記請求項１において、複数対の前記ローラを並設した場合に、前記円盤を同一軸心上に配置したことを特徴とする。   The conveying device according to claim 2 of the present invention is characterized in that, in the above-mentioned claim 1, when a plurality of pairs of the rollers are arranged in parallel, the disks are arranged on the same axis.

本発明に係る搬送装置によれば、駆動源によって回転駆動される円盤、及び、一対のローラにそれぞれ連結された円筒にそれぞれ着設された磁石の磁気の引力及び反発力を利用して、駆動側の円盤から被駆動側の円筒へ動力を伝達させる構成としたことで、駆動側から被駆動側へ非接触で動力を伝達させることが可能となり、従来の歯車機構における伝達方式のように、歯車の機械的噛み合いにより塵埃等が発生するといったことがなく、被搬送物を清浄な状態に保持した状態で搬送することができる。   According to the transport device of the present invention, the drive is performed using the magnetic attractive force and the repulsive force of the magnet respectively attached to the disk that is rotationally driven by the drive source and the cylinder connected to the pair of rollers. Because it is configured to transmit power from the disk on the side to the cylinder on the driven side, it becomes possible to transmit power from the driving side to the driven side in a non-contact manner, as in the transmission method in the conventional gear mechanism, There is no generation of dust or the like due to the mechanical meshing of the gears, and the object to be conveyed can be conveyed in a clean state.

また、本発明に係る搬送装置によれば、前記円盤の端面に永久磁石をＮ極、Ｓ極と交互に放射状に異極配列して着設することにより第１磁気面を形成するとともに、前記一対の円筒の外周に永久磁石をＮ極、Ｓ極と交互に螺旋状に異極配列して着設することにより第２磁気面を形成し、一対の円筒を、円盤との間に所定の空隙を保ち、且つ、第２磁気面を円盤の第１磁気面に対向させるように配置したことで、駆動側の円盤に対して被駆動側の円筒が上動あるいは下動しても、円盤との空隙は一定に保たれるため、円筒に伝達される回転トルクが極端に小さくなるようなことがない。その結果、一対のローラ間に挟持される被搬送物の凹凸に拘らず、所望の回転トルクを維持でき、安定した搬送機能を確保することが可能となる。   Further, according to the transport device according to the present invention, the first magnetic surface is formed by arranging the permanent magnets on the end face of the disk so as to be alternately arranged in the radially different polarity from the N pole and the S pole. A second magnetic surface is formed by arranging a permanent magnet on the outer periphery of a pair of cylinders in a different pole arrangement alternately with N poles and S poles in a spiral manner, and the pair of cylinders is provided with a predetermined gap between the disks. Even if the cylinder on the driven side moves up or down relative to the disk on the driving side, the disk is maintained by maintaining the air gap and making the second magnetic surface face the first magnetic surface of the disk. Therefore, the rotational torque transmitted to the cylinder does not become extremely small. As a result, a desired rotational torque can be maintained regardless of the unevenness of the object to be conveyed that is sandwiched between the pair of rollers, and a stable conveying function can be ensured.

以下に添付図面を参照して、本発明に係る搬送装置の好適な実施の形態を詳細に説明する。なお、この実施の形態によりこの発明が限定されるものではない。   Exemplary embodiments of a transport device according to the present invention will be described below in detail with reference to the accompanying drawings. Note that the present invention is not limited to the embodiments.

図１は本発明の実施の形態である搬送装置を適用した基板洗浄装置の一部を概略的に示した斜視図である。なお、本実施の形態において対象となる「基板」とは、表面上に電気部品等が実装されたプリント基板、電気部品実装前のプリント基板、液晶基板、プラズマディスプレイ基板等を示すものである。   FIG. 1 is a perspective view schematically showing a part of a substrate cleaning apparatus to which a transfer apparatus according to an embodiment of the present invention is applied. Note that the “substrate” in the present embodiment refers to a printed circuit board on which electrical components are mounted on the surface, a printed circuit board before mounting electrical components, a liquid crystal substrate, a plasma display substrate, and the like.

この基板洗浄装置３０は、シリコンゴム等の粘着性弾性ゴム材料から構成された一対のクリーニングローラ３１，３２と、このクリーニングローラ３１，３２よりも粘着性の強い材料から構成される粘着テープローラ３３，３４と、一対のクリーニングローラ３１，３２に動力を伝達する動力伝達手段１０とを備えている。なお、実際の基板洗浄装置３０は、上記各ローラを複数組並設した構成となっているが、図１では説明の便宜上、一対のみを示し、他のローラの図示を省略している。   The substrate cleaning apparatus 30 includes a pair of cleaning rollers 31 and 32 made of an adhesive elastic rubber material such as silicon rubber, and an adhesive tape roller 33 made of a material having a higher adhesiveness than the cleaning rollers 31 and 32. , 34 and power transmission means 10 for transmitting power to the pair of cleaning rollers 31, 32. The actual substrate cleaning apparatus 30 has a configuration in which a plurality of the above rollers are arranged side by side. In FIG. 1, for convenience of explanation, only a pair is shown and the other rollers are not shown.

一対のクリーニングローラ３１，３２は、所定の間隔をあけて上下に対向して配置され、回転軸２５，２６を介して側壁板（図１では図示を省略）に回転可能に支持されている。図１に示すように、各回転軸２５，２６の一方の端部は、後述する動力伝達手段１０の被駆動側円盤２１，２２にそれぞれ連結してある。以下、クリーニングローラ３１を「上側クリーニングローラ３１」、クリーニングローラ３２を「下側クリーニングローラ３２」という。また、粘着テープローラ３３，３４は、上側・下側クリーニングローラ３１，３２に接触した状態でクリーニングローラ３１，３２の外側にそれぞれ配置され、回転軸を介して側壁板に回転可能に支持されている。   The pair of cleaning rollers 31 and 32 are arranged to face each other with a predetermined gap therebetween, and are rotatably supported on a side wall plate (not shown in FIG. 1) via rotating shafts 25 and 26. As shown in FIG. 1, one end of each of the rotary shafts 25 and 26 is connected to the driven side disks 21 and 22 of the power transmission means 10 described later. Hereinafter, the cleaning roller 31 is referred to as “upper cleaning roller 31”, and the cleaning roller 32 is referred to as “lower cleaning roller 32”. The adhesive tape rollers 33 and 34 are arranged outside the cleaning rollers 31 and 32 in contact with the upper and lower cleaning rollers 31 and 32, respectively, and are rotatably supported on the side wall plate via a rotation shaft. Yes.

上記構成を有する基板洗浄装置３０では、図１に示すように、クリーニングローラ３１，３２の間に基板５０を挟持させつつ、後述する動力伝達手段１０によってクリーニングローラ３１，３２を回転させることによって基板５０を水平方向に搬送し、それと同時に基板５０に付着した塵埃をクリーニングローラ３１，３２の表面に吸着させて、基板５０の表面から塵埃を除去する。なお、クリーニングローラ３１，３２に付着した塵埃は、クリーニングローラ３１，３２と接触しながら回転する粘着テープローラ３３，３４に転写される。 In the substrate cleaning apparatus 30 having the above-described configuration, as shown in FIG. 1, the substrate 50 is sandwiched between the cleaning rollers 31 and 32 and the cleaning rollers 31 and 32 are rotated by the power transmission means 10 to be described later. 50 is conveyed in the horizontal direction, and at the same time, the dust adhering to the substrate 50 is adsorbed on the surfaces of the cleaning rollers 31 and 32 to remove the dust from the surface of the substrate 50. The dust adhering to the cleaning rollers 31 and 32 is transferred to the adhesive tape rollers 33 and 34 that rotate while contacting the cleaning rollers 31 and 32.

また、本実施の形態では、下側クリーニングローラ３２及び粘着テープローラ３４を側壁板に対して回転可能に固定する一方、上側クリーニングローラ３１及び粘着テープローラ３３を、図２に示すように側壁板に対して上下方向にスライド可能に支持させてある。より詳細に説明すると、図２に示すように、上側クリーニングローラ３１の回転軸２５及び粘着テープローラ３３の回転軸３５は、それぞれ軸受部４１を介して側壁板４０に支持されている。この軸受部４１は、ボス４３が側壁板４０に設けられた長孔４４に上下動可能に嵌め込まれるとともに、軸受部４１を側壁板４０に固定する複数のボルト４２がボルト用長孔４５に上下動可能に嵌め込まれ、これにより各ローラを支持した状態で上下方向にスライド可能となっている。また、粘着テープローラ３３の軸受部４１には、図示しないエアシリンダによって所定の空気圧が掛けられ、粘着テープローラ３３を常にクリーニングローラ３１に密着させた構成としてある。上記構成とすることで、例えば電気部品が実装された基板のように、表面に凹凸が形成された被搬送物を搬送する場合に、被搬送物の凹凸に追従して上側クリーニングローラ３１及び粘着テープローラ３３を上下動させることが可能である。   In the present embodiment, the lower cleaning roller 32 and the adhesive tape roller 34 are rotatably fixed to the side wall plate, while the upper cleaning roller 31 and the adhesive tape roller 33 are fixed to the side wall plate as shown in FIG. Slidably supported in the vertical direction. More specifically, as shown in FIG. 2, the rotation shaft 25 of the upper cleaning roller 31 and the rotation shaft 35 of the adhesive tape roller 33 are supported by the side wall plate 40 via bearings 41, respectively. In the bearing portion 41, the boss 43 is fitted into a long hole 44 provided in the side wall plate 40 so as to be vertically movable, and a plurality of bolts 42 that fix the bearing portion 41 to the side wall plate 40 are It is slidably fitted, so that it can slide up and down while supporting each roller. A predetermined air pressure is applied to the bearing portion 41 of the adhesive tape roller 33 by an air cylinder (not shown) so that the adhesive tape roller 33 is always in close contact with the cleaning roller 31. With the above configuration, for example, when transporting an object to be transported having unevenness on the surface, such as a substrate on which an electrical component is mounted, the upper cleaning roller 31 and the adhesive follow the unevenness of the object to be transported. The tape roller 33 can be moved up and down.

次に、上側・下側クリーニングローラ３１，３２に回転を伝達する動力伝達手段１０について説明する。図３は、図１において上側・下側クリーニングローラ３１，３２及び動力伝達手段１０を正面から見た図である。なお、図３では被搬送物である基板５０を省略して示している。図３に示すように、動力伝達手段１０は、駆動源であるモータ（図７を参照）によって軸心回りに回転駆動される円盤１１と、回転軸２５，２６を介して上側・下側クリーニングローラ３１，３２に連結された一対の円筒２１，２２とを備えている。なお、以下の説明では、説明の便宜上、駆動側の円盤１１を円盤型磁気歯車１１と呼び、被駆動側の円筒２１，２２を、それぞれ円筒型磁気歯車２１，２２と呼ぶことにする。   Next, the power transmission means 10 that transmits the rotation to the upper and lower cleaning rollers 31 and 32 will be described. FIG. 3 is a view of the upper and lower cleaning rollers 31 and 32 and the power transmission means 10 as viewed from the front in FIG. In FIG. 3, the substrate 50 that is a transported object is omitted. As shown in FIG. 3, the power transmission means 10 includes a disk 11 that is rotationally driven around a shaft center by a motor as a drive source (see FIG. 7), and upper and lower cleanings via rotational shafts 25 and 26. A pair of cylinders 21 and 22 connected to the rollers 31 and 32 is provided. In the following description, for convenience of explanation, the drive-side disk 11 is referred to as a disk-type magnetic gear 11, and the driven-side cylinders 21, 22 are referred to as cylindrical-type magnetic gears 21, 22, respectively.

図４は、動力伝達手段１０を概略的に示す図であり、上図は動力伝達手段１０の正面図、中図及び下図は円盤型磁気歯車１１と円筒型磁気歯車２１，２２の磁気的な噛み合いを示す概念図である。円盤型磁気歯車１１は、磁性体（例えば軟鉄材）からなる円盤形状の磁性盤１２と、この磁性盤１２とモータとを連結する回転軸１３、及び、磁性盤１２の端面１６に永久磁石を接着剤等の適宜手段にて等間隔に放射状に着設することにより形成された第１磁気面１７とから構成されるものである。なお、磁性盤１２の端面とは、磁性盤１２の片面部分（平面部分）１６を示すものとする。以下、第１磁気面１７を構成する個々の永久磁石を磁気歯１５と呼ぶ。図５に示すように、この磁気歯１５は、隣り合う磁気歯の極性がＮ極（１５Ｎ）、Ｓ極（１５Ｓ）と交互になるように配置してある。   FIG. 4 is a diagram schematically showing the power transmission means 10, where the upper figure is a front view of the power transmission means 10, and the middle and lower figures are magnetic views of the disk-type magnetic gear 11 and the cylindrical magnetic gears 21 and 22. It is a conceptual diagram which shows a mesh. The disk-type magnetic gear 11 has a disk-shaped magnetic disk 12 made of a magnetic material (for example, a soft iron material), a rotary shaft 13 that connects the magnetic disk 12 and the motor, and permanent magnets on the end face 16 of the magnetic disk 12. The first magnetic surface 17 is formed by being attached radially at equal intervals by appropriate means such as an adhesive. Note that the end surface of the magnetic plate 12 indicates a single-sided portion (planar portion) 16 of the magnetic plate 12. Hereinafter, the individual permanent magnets constituting the first magnetic surface 17 are referred to as magnetic teeth 15. As shown in FIG. 5, the magnetic teeth 15 are arranged so that the polarities of adjacent magnetic teeth alternate with the N pole (15N) and the S pole (15S).

一方、被駆動側である円筒型磁気歯車２１，２２は、磁性体からなる磁性円筒２３，２４と、この磁性円筒２３，２４と上側・下側クリーニングローラ３１，３２とを連結する回転軸２５，２６、及び、磁性円筒２３，２４の各外周面２８の一周に亘って永久磁石を等間隔に螺旋状に着設することにより形成された第２磁気面２９とから構成されている。以下、第２磁気面２９を構成する個々の永久磁石を磁気歯２７と呼ぶ。この磁気歯２７は、隣り合う磁気歯の極性がＮ極（２７ｎ）、Ｓ極（２７ｓ）と交互になるように配置してある。なお、上記磁気歯１５，２７を構成する永久磁石としては、例えば４０ＭＧＯｅの高エネルギー積を有する希土類材が用いられる。   On the other hand, the cylindrical magnetic gears 21 and 22 on the driven side include magnetic cylinders 23 and 24 made of a magnetic material, and a rotary shaft 25 that connects the magnetic cylinders 23 and 24 to the upper and lower cleaning rollers 31 and 32. , 26 and a second magnetic surface 29 formed by attaching permanent magnets spirally at equal intervals around one circumference of each outer peripheral surface 28 of the magnetic cylinders 23, 24. Hereinafter, the individual permanent magnets constituting the second magnetic surface 29 are referred to as magnetic teeth 27. The magnetic teeth 27 are arranged so that the polarities of adjacent magnetic teeth alternate with the N pole (27n) and the S pole (27s). In addition, as a permanent magnet which comprises the said magnetic teeth 15 and 27, the rare earth material which has a high energy product of 40MGOe, for example is used.

この円筒型磁気歯車２１，２２は、円盤型磁気歯車１１との間に所定の空隙ｇを保ち、且つ、第２磁気面２９を円盤型磁気歯車１１の第１磁気面１７に対向させるように配置してある。円筒型磁気歯車２１，２２の軸線方向長さは、第１磁気面１７の半径とほぼ同じ長さに形成され、その軸線は第１磁気面１７に対してほぼ平行である。円盤型磁気歯車１１の第１磁気面を、図４の中図に示すようなＸＹ座標平面とした場合、上側の円筒型磁気歯車２１は、円盤型磁気歯車１１の第１磁気面１７の第１象限に対向するように配置される。一方、下側の円筒型磁気歯車２１は、第１磁気面１７の第３象限に対向するように配置される。   The cylindrical magnetic gears 21 and 22 maintain a predetermined gap g between the cylindrical magnetic gears 11 and the second magnetic surface 29 so as to face the first magnetic surface 17 of the disk-type magnetic gear 11. It is arranged. The axial lengths of the cylindrical magnetic gears 21 and 22 are formed to be substantially the same as the radius of the first magnetic surface 17, and the axis is substantially parallel to the first magnetic surface 17. When the first magnetic surface of the disk-type magnetic gear 11 is an XY coordinate plane as shown in the middle diagram of FIG. 4, the upper cylindrical magnetic gear 21 is the first magnetic surface 17 of the disk-type magnetic gear 11. Arranged to face one quadrant. On the other hand, the lower cylindrical magnetic gear 21 is arranged to face the third quadrant of the first magnetic surface 17.

ここで、図５を用いて、円筒型磁気歯車の磁気歯の外形が螺旋曲線である場合における、円盤型磁気歯車の磁気歯の外形曲線の式について説明する。図５において、ｒ12は円盤型磁気歯車１１０の外周の半径であり、ｒ11は円盤の軸部分の外周の半径である。ここで、ｒ12−ｒ11＝ｈとする。また、円盤型磁気歯車１１０の中心Ｏと円盤外の定点Ｑとを結ぶ直線をＯ−Ｑとし、この直線上に曲線の始点Ａ点があるものとする。図ａに示すように、直線Ｏ−Ｑから時計回りにθ回転した点における中心Ｏから曲線までの距離をｒとすると、始点であるＡ点（θ＝０）から、終点であるＢ点（θ＝θ1）までの曲線は
（数１式）
ｒ＝ｈ・（θ／θ1）＋ｒ11
で表すことができる。 Here, with reference to FIG. 5, the formula of the external curve of the magnetic tooth of the disk-type magnetic gear when the external shape of the magnetic tooth of the cylindrical magnetic gear is a spiral curve will be described. In FIG. 5, r 12 is the radius of the outer periphery of the disk-type magnetic gear 110, and r 11 is the radius of the outer periphery of the shaft portion of the disk. Here, r 12 −r 11 = h. A straight line connecting the center O of the disk type magnetic gear 110 and a fixed point Q outside the disk is defined as OQ, and the starting point A of the curve is on this straight line. As shown in FIG. A, assuming that the distance from the center O to the curve at the point θ rotated clockwise from the straight line OQ is r, the starting point A (θ = 0) to the end point B ( The curve up to θ = θ 1 ) is
r = h · (θ / θ 1 ) + r 11
Can be expressed as

一方、円筒型磁気歯車（図示せず）は、θ2回転した場合に螺旋曲線は長さｈ進む。そうすると、円盤型磁気歯車１１０の角速度をω1、円筒型磁気歯車の角速度をω2とすると、円盤型磁気歯車１１０がθ1回転する間に、円筒型磁気歯車はθ2回転しなければならないから、
（数２式）
ω2／ω1＝θ2／θ1
が成り立つ。さらに、円盤型磁気歯車１１０の磁気歯の数をｐ1、円筒型磁気歯車の磁気歯の数をｐ2とする。このとき、円盤型磁気歯車１１０においては、磁気歯は、３６０°／ｐ1の間隔で配置され、円筒型磁気歯車においては、磁気歯は、３６０°／ｐ2の間隔で配置される。そうすると、円盤型磁気歯車１１０が３６０°／ｐ1回転する間に、円筒型磁気歯車は３６０°／ｐ2回転するから、
（数３式）
ω2／ω1＝（３６０°／ｐ2）／（３６０°／ｐ1）
が成り立つ。（数２式）と（数３式）とを（数１式）に代入すると、（数１式）は、
（数４式）
ｒ＝ｈ・（θ／θ2）・（ｐ1／ｐ2）＋ｒ11
と表すことができる。この（数４式）が、円盤型磁気歯車１１０の磁気歯の外形曲線の式である。 On the other hand, when the cylindrical magnetic gear (not shown) rotates by θ 2 , the spiral curve advances by length h. Then, when the angular velocity of the disk-type magnetic gear 110 is ω 1 and the angular velocity of the cylindrical magnetic gear is ω 2 , the cylindrical magnetic gear must rotate θ 2 while the disk-type magnetic gear 110 rotates θ 1. From
(Equation 2)
ω 2 / ω 1 = θ 2 / θ 1
Holds. Further, the number of magnetic teeth of the disk-type magnetic gear 110 is p 1 , and the number of magnetic teeth of the cylindrical magnetic gear 110 is p 2 . At this time, the disk-type magnetic gear 110, the magnetic teeth are arranged in a 360 ° / p 1 interval, in the cylindrical magnetic gear, magnetic teeth are arranged in a 360 ° / p 2 intervals. Then, while the disk-type magnetic gear 110 rotates 360 ° / p 1 , the cylindrical magnetic gear rotates 360 ° / p 2 .
(Formula 3)
ω 2 / ω 1 = (360 ° / p 2 ) / (360 ° / p 1 )
Holds. When (Equation 2) and (Equation 3) are substituted into (Equation 1), (Equation 1) becomes
(Formula 4)
r = h · (θ / θ 2 ) · (p 1 / p 2 ) + r 11
It can be expressed as. This (Equation 4) is an equation of the external curve of the magnetic teeth of the disk type magnetic gear 110.

上述した磁気歯車では、円盤型磁気歯車と円筒型磁気歯車の磁気歯の数（極数）を適宜に設定することで所望の回転比を得る。例えば、本実施の形態では、図４に示すように、円盤型磁気歯車１１の歯数は１６、円筒型磁気歯車２１，２２の歯数はそれぞれ８に設定してある。従って、円盤型磁気歯車１１から円筒型磁気歯車２１，２２に回転が伝わるときに、円盤型磁気歯車１１に比べて円筒側磁気歯車２１，２２の角速度が２倍に増える。   In the magnetic gear described above, a desired rotation ratio is obtained by appropriately setting the number of magnetic teeth (the number of poles) of the disk-type magnetic gear and the cylindrical magnetic gear. For example, in the present embodiment, as shown in FIG. 4, the number of teeth of the disk-type magnetic gear 11 is set to 16, and the number of teeth of the cylindrical magnetic gears 21 and 22 is set to 8, respectively. Therefore, when the rotation is transmitted from the disk type magnetic gear 11 to the cylindrical type magnetic gears 21, 22, the angular velocities of the cylindrical side magnetic gears 21, 22 are doubled as compared with the disk type magnetic gear 11.

上記構成を有する動力伝達手段１０では、円盤型磁気歯車１１の磁気歯１５と円筒型磁気歯車２１，２２の磁気歯２７との磁気的な噛み合い、すなわち、対向する磁石のＮ極とＳ極との間の引力と、Ｎ極とＮ極及びＳ極とＳ極との間の反発力とによって、円盤型磁気歯車１１から円筒型磁気歯車２１，２２に、非接触で回転トルクが伝達される。例えば、円盤型磁気歯車１１を図４の中図及び下図に示すように半時計方向に回転させると、円筒型磁気歯車２１，２２との間に働く磁石の引力及び反発力によって、円筒型磁気歯車２１，２２は、円盤型磁気歯車１１の回転方向に動く。すなわち、円筒型磁気歯車２１，２２は、それぞれ図４に示す矢印の方向に回転することになり、上側の円筒型磁気歯車２１と下側の円筒型磁気歯車２２の回転方向は逆になる。   In the power transmission means 10 having the above configuration, the magnetic engagement between the magnetic teeth 15 of the disk-type magnetic gear 11 and the magnetic teeth 27 of the cylindrical magnetic gears 21 and 22, that is, the N pole and S pole of the opposing magnets. Rotational torque is transmitted from the disk-type magnetic gear 11 to the cylindrical magnetic gears 21 and 22 in a non-contact manner by the attractive force between the magnetic poles 11 and 22 and the repulsive force between the north and south poles and between the south and south poles. . For example, when the disk-type magnetic gear 11 is rotated in the counterclockwise direction as shown in the middle and lower diagrams of FIG. 4, the magnetic force of the magnet acting between the cylindrical magnetic gears 21 and 22 and the repulsive force cause the cylindrical magnetic gear 11 to rotate. The gears 21 and 22 move in the rotation direction of the disk-type magnetic gear 11. That is, the cylindrical magnetic gears 21 and 22 rotate in the directions of the arrows shown in FIG. 4, and the rotation directions of the upper cylindrical magnetic gear 21 and the lower cylindrical magnetic gear 22 are reversed.

上述した上側の円筒型磁気歯車２１に連結された上側クリーニングローラ３１と、下側の円筒型磁気歯車２２に連結された下側クリーニングローラ３２は、図１に示すように回転方向が逆向きとなる。これによって、被搬送物である基板５０は、上側・下側クリーニングローラ３１，３２間に挟持されつつ、水平方向に搬送されることになる。   As shown in FIG. 1, the upper cleaning roller 31 connected to the upper cylindrical magnetic gear 21 and the lower cleaning roller 32 connected to the lower cylindrical magnetic gear 22 are rotated in opposite directions as shown in FIG. Become. As a result, the substrate 50, which is an object to be transported, is transported in the horizontal direction while being sandwiched between the upper and lower cleaning rollers 31 and 32.

図６は、上述した動力伝達手段１０を複数セット配置した状態を示す図である。上述したクリーニングローラ３１，３２を複数対並設する場合、図６に示すように、複数の円盤型磁気歯車１１がモータ１の同一軸心上に配置され、各円盤型磁気歯車１１と所定の空隙を保って複数の円筒型磁気歯車２１，２２が配置される。すなわち、モータ１の回転軸１３に複数セットの動力伝達手段１０が配置される。複数の円盤型磁気歯車１１の配置間隔は、上側・下側クリーニングローラ３１，３２の配置位置に対応して自由に設定することが可能である。   FIG. 6 is a view showing a state in which a plurality of sets of the power transmission means 10 described above are arranged. When a plurality of pairs of the above-described cleaning rollers 31 and 32 are arranged side by side, as shown in FIG. 6, a plurality of disk-type magnetic gears 11 are arranged on the same axis of the motor 1, and each disk-type magnetic gear 11 has a predetermined A plurality of cylindrical magnetic gears 21 and 22 are arranged while maintaining a gap. That is, a plurality of sets of power transmission means 10 are arranged on the rotating shaft 13 of the motor 1. The arrangement intervals of the plurality of disk-type magnetic gears 11 can be freely set corresponding to the arrangement positions of the upper and lower cleaning rollers 31 and 32.

また、図７は、基板５０の表面の凹凸に応じて上側クリーニングローラ３１が上下動する状態を模式的に示した図であり、図８は、上側の円筒型磁気歯車２１が上方に移動した場合の円盤型磁気歯車１１に対する位置を示したものである。図７に示すように、予め設定された上側・下側クリーニングローラ３１，３２の間隔よりも大きい厚みを有する凸部５１によって上側クリーニングローラ３１が上方に押し上げられると、これに伴って、上側クリーニングローラ３１に連結された円筒型磁気歯車２１も上方に押し上げられることになる。図８の上図に示すように、円筒型磁気歯車２１が通常位置から上方へ移動すると、円盤型磁気歯車１１との噛み合い面積は通常位置にある場合と比べて小さくなるものの、下図に示すように、円盤型磁気歯車１１との間の空隙（エアギャップ）は一定に保たれる。このため、円筒型磁気歯車２１が上方へ移動しても、上側クリーニングローラ３１へ伝えられる回転トルクが極端に小さくなることはない。   FIG. 7 is a diagram schematically showing a state in which the upper cleaning roller 31 moves up and down according to the unevenness of the surface of the substrate 50, and FIG. 8 shows that the upper cylindrical magnetic gear 21 has moved upward. The position with respect to the disk type magnetic gear 11 in the case is shown. As shown in FIG. 7, when the upper cleaning roller 31 is pushed upward by the convex portion 51 having a thickness larger than a predetermined interval between the upper and lower cleaning rollers 31 and 32, the upper cleaning is accordingly performed. The cylindrical magnetic gear 21 connected to the roller 31 is also pushed upward. As shown in the upper diagram of FIG. 8, when the cylindrical magnetic gear 21 moves upward from the normal position, the meshing area with the disk-type magnetic gear 11 becomes smaller than that in the normal position, but as shown in the lower diagram. In addition, a gap (air gap) between the disk type magnetic gear 11 is kept constant. For this reason, even if the cylindrical magnetic gear 21 moves upward, the rotational torque transmitted to the upper cleaning roller 31 does not become extremely small.

以上説明したように、本実施の形態の基板洗浄装置３０によれば、円盤型磁気歯車１１及び円筒型磁気歯車２１，２２に着設された磁石の磁気の引力及び反発力を利用して、円盤型磁気歯車１１から円筒型磁気歯車２１，２２へ動力を伝達させる構成としたことで、駆動側から被駆動側へ非接触で動力を伝達させることが可能となり、従来のように、歯車の機械的噛み合いによる塵埃等が発生するといったことがなく、被搬送物である基板５０を清浄な状態に保持した状態で搬送することができる。   As described above, according to the substrate cleaning apparatus 30 of the present embodiment, the magnetic attractive force and the repulsive force of the magnets attached to the disk-type magnetic gear 11 and the cylindrical magnetic gears 21 and 22 are used. With the configuration in which power is transmitted from the disk-type magnetic gear 11 to the cylindrical magnetic gears 21 and 22, power can be transmitted in a non-contact manner from the driving side to the driven side. Dust or the like due to mechanical engagement is not generated, and the substrate 50 that is the object to be transferred can be transferred in a clean state.

また、本実施の形態では、円盤型磁気歯車１１の端面１６に永久磁石をＮ極、Ｓ極と交互に放射状に異極配列して第１磁気面１７を形成するとともに、円筒型磁気歯車２１，２２の各外周面２８に永久磁石をＮ極、Ｓ極と交互に螺旋状に異極配列して第２磁気面２９を形成し、円筒型磁気歯車２１，２２を、円盤型磁気歯車１１との間に所定の空隙を保ち、且つ、第２磁気面を第１磁気面に対向させるように配置した。上記構成とすることで、円盤型磁気歯車１１に対して円筒型磁気歯車２１，２２が上動あるいは下動しても、円盤型磁気歯車１１との空隙は一定に保たれるため、円筒型磁気歯車２１，２２に伝達される回転トルクが極端に小さくなるようなことがない。その結果、一対のローラ間に挟持される被搬送物の凹凸に拘らず、所望の回転トルクを維持でき、安定した搬送機能を確保することが可能となる。   In the present embodiment, permanent magnets are arranged on the end face 16 of the disk-type magnetic gear 11 in a radially different polarity from the N pole and the S pole to form the first magnetic surface 17 and the cylindrical magnetic gear 21. , 22 to form a second magnetic surface 29 by arranging permanent magnets alternately in a spiral manner with N poles and S poles on each outer peripheral surface 28, and the cylindrical magnetic gears 21, 22 are replaced with the disk type magnetic gear 11. A predetermined gap is maintained between the second magnetic surface and the first magnetic surface. With the above configuration, even if the cylindrical magnetic gears 21 and 22 move up or down relative to the disk type magnetic gear 11, the gap with the disk type magnetic gear 11 is kept constant. The rotational torque transmitted to the magnetic gears 21 and 22 does not become extremely small. As a result, a desired rotational torque can be maintained regardless of the unevenness of the object to be conveyed that is sandwiched between the pair of rollers, and a stable conveying function can be ensured.

さらに、本実施の形態の基板洗浄装置３０によれば、複数対のクリーニングローラ３１，３２を並設した場合に、複数の円盤型磁気歯車１１を駆動用モータの同一軸心上に配置する構成としたので、複数セットの動力伝達装置１０に対して、駆動源であるモータ１が１個で済むという効果を奏する。また、複数の円盤型磁気歯車１１を同一軸心上に配置した場合、これらの配置間隔を自由に設定することが可能であり、その結果、複数対のクリーニングローラの設置間隔を自由に設定することができるという効果も奏する。   Furthermore, according to the substrate cleaning apparatus 30 of the present embodiment, when a plurality of pairs of cleaning rollers 31 and 32 are arranged side by side, a plurality of disk-type magnetic gears 11 are arranged on the same axis of the drive motor. Therefore, there is an effect that only one motor 1 as a drive source is required for a plurality of sets of power transmission devices 10. Further, when a plurality of disk-type magnetic gears 11 are arranged on the same axis, it is possible to freely set the arrangement interval between them, and as a result, the installation intervals of a plurality of pairs of cleaning rollers can be set freely. There is also an effect that it is possible.

なお、上記実施の形態では、上側クリーニングローラ３１のみを上下に移動可能に構成したが、上側・下側クリーニングローラの両方を上下に移動可能に構成しても上記実施の形態と同様の効果が得られる。   In the above-described embodiment, only the upper cleaning roller 31 is configured to be movable up and down. However, even if both the upper and lower cleaning rollers are configured to be movable up and down, the same effect as in the above-described embodiment can be obtained. can get.

以上のように、本発明に係る搬送装置は、上記実施の形態で示した基板洗浄装置をはじめ、一対のローラ間に挟持される被搬送物の凹凸に応じてローラを上下動させながらローラを回転させて被搬送物を搬送する搬送装置に有効に用いることができる。   As described above, the transport device according to the present invention includes the substrate cleaning device described in the above embodiment and the rollers while moving the rollers up and down according to the unevenness of the transported object sandwiched between the pair of rollers. The present invention can be effectively used for a conveying device that rotates and conveys an object to be conveyed.

本発明の実施の形態である搬送装置を備えた基板洗浄装置の一部を概略的に示した斜視図である。It is the perspective view which showed roughly a part of substrate cleaning apparatus provided with the conveying apparatus which is embodiment of this invention. 基板洗浄装置におけるクリーニングローラ及び粘着テープローラの支持構造を示す図である。It is a figure which shows the support structure of the cleaning roller and adhesive tape roller in a board | substrate washing | cleaning apparatus. 図１においてクリーニングローラ及び動力伝達手段を正面から見た図である。It is the figure which looked at the cleaning roller and the power transmission means in FIG. 1 from the front. 基板洗浄装置における動力伝達手段の正面図及び動力伝達手段の磁気的な噛み合いを示す概念図である。It is a conceptual diagram which shows the front view of the power transmission means in a board | substrate cleaning apparatus, and the magnetic meshing of a power transmission means. 円盤型磁気歯車における磁気歯の外形曲線を説明する図である。It is a figure explaining the external shape curve of the magnetic tooth in a disk type magnetic gear. 複数セットの動力伝達手段が配置された状態を示す図である。It is a figure which shows the state by which several sets of power transmission means are arrange | positioned. 被搬送物表面の凹凸に応じてクリーニングローラが上下動する状態を模式的に示した図である。It is the figure which showed typically the state to which a cleaning roller moves up and down according to the unevenness | corrugation of the to-be-conveyed object surface. 円盤型磁気歯車に対する円筒型磁気歯車の位置を示す図である。It is a figure which shows the position of the cylindrical magnetic gear with respect to a disk type magnetic gear.

符号の説明Explanation of symbols

１ モータ（駆動源）
１０ 動力伝達手段
１１ 円盤型磁気歯車
１２ 磁性盤
１３ 回転軸
１５ 磁気歯（永久磁石）
１６ （円盤型磁気歯車の）端面
１７ 第１磁気面
２１，２２ 円筒型磁気歯車
２３，２４ 磁性円筒
２５，２６ 回転軸
２７ 磁気歯（永久磁石）
２８ （円筒型磁気歯車の）外周面
２９ 第２磁気面
３０ 基板洗浄装置
３１ 上側クリーニングローラ（ローラ）
３２ 下側クリーニングローラ（ローラ）
５０ 基板（被搬送物） 1 Motor (drive source)
DESCRIPTION OF SYMBOLS 10 Power transmission means 11 Disk type magnetic gear 12 Magnetic board 13 Rotating shaft 15 Magnetic tooth (permanent magnet)
16 End face (of disk type magnetic gear) 17 First magnetic surface 21, 22 Cylindrical magnetic gear 23, 24 Magnetic cylinder 25, 26 Rotating shaft 27 Magnetic tooth (permanent magnet)
28 Outer peripheral surface (of cylindrical magnetic gear) 29 Second magnetic surface 30 Substrate cleaning device 31 Upper cleaning roller (roller)
32 Lower cleaning roller (roller)
50 Substrate (conveyed object)

Claims (2)

一対のローラに回転を伝達する動力伝達手段を備え、
前記一対のローラ間に被搬送物を挟持させつつ前記一対のローラを回転させることにより被搬送物を搬送する搬送装置において、
前記動力伝達手段は、
駆動源によって軸心回りに回転駆動され、その端面に永久磁石をＮ極、Ｓ極と交互に曲線の放射状となるように異極配列して着設することにより形成した第１磁気面を有する円盤と、
前記一対のローラにそれぞれ連結され、その外周に永久磁石をＮ極、Ｓ極と交互に螺旋状に異極配列して着設することにより形成した第２磁気面を有する一対の円筒とを備え、
前記一対の円筒を、前記円盤との間に所定の空隙を保ち、且つ、前記第２磁気面を前記第１磁気面に対向させるように配置し、
前記永久磁石の磁気の引力及び反発力を利用して、前記円盤から前記一対の円筒へ動力を伝達させることを特徴とする搬送装置。 Comprising power transmission means for transmitting rotation to the pair of rollers;
In the transport device that transports the transported object by rotating the pair of rollers while sandwiching the transported object between the pair of rollers,
The power transmission means is
The first magnetic surface is formed by being rotationally driven around the axis by a driving source and having permanent magnets arranged on the end face thereof in a different polar pattern so as to have a curved radial pattern alternately with N and S poles. With a disk,
A pair of cylinders connected to the pair of rollers, and having a second magnetic surface formed by arranging permanent magnets alternately arranged in the form of different polarities in the form of spirals of N and S poles on the outer periphery thereof; ,
The pair of cylinders is disposed so as to maintain a predetermined gap between the pair of cylinders and the second magnetic surface faces the first magnetic surface,
A conveying apparatus that transmits power from the disk to the pair of cylinders using the magnetic attractive force and repulsive force of the permanent magnet. 複数対の前記ローラを並設した場合に、前記円盤を同一軸心上に配置したことを特徴とする請求項１に記載の搬送装置。   The conveying device according to claim 1, wherein the disks are arranged on the same axis when a plurality of pairs of the rollers are arranged side by side.
JP2007130332A 2007-05-16 2007-05-16 Transport device Expired - Fee Related JP4541383B2 (en)

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KR1020070053147A KR20080101606A (en) 2007-05-16 2007-05-31 Conveying device
CN2007101269354A CN101309042B (en) 2007-05-16 2007-07-03 Conveying appliance

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