JP4324937B2 - Member separation device and member separation method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a member separation apparatus and separation method that can prevent damage to a member when separating the member. The present invention also relates to a heater leg separation device and a separation method that can reduce the amount of graphite material required for the manufacture of the heater.
[0002]
[Prior art]
In an apparatus for producing single crystal silicon by the CZ method (Czochralski method), polycrystalline silicon in a quartz crucible installed in a CZ furnace is heated and melted by a heater. The heater used in this apparatus is attached to the upper part of the electrode, and generates heat when a voltage is applied to the electrode. When the heater is replaced due to the life of the heater or when the heater is replaced with another device, it is necessary to separate the heater from the electrode. For this reason, the heater is attached so that it can be separated from the electrode.
[0003]
Conventionally, there are two types of heater mounting structures that can be separated: “taper fitting” and “joining by screw part and nut”.
[0004]
In the era of small silicon single crystal wafers (diameter: 100 to 150 mm), the heater was also small and light, and “taper fitting” was used relatively frequently.
[0005]
As described later with reference to FIG. 4, “taper fitting” is advantageous in that the heater weight is always applied to the tapered portion, so that the contact portion does not loosen, the contact resistance is stable, and damage due to discharge or the like hardly occurs. There is. There is also an advantage that the heater can be easily detached and assembled.
[0006]
However, in recent years, since silicon single crystal wafers have become larger (diameter 200 to 300 mm), the amount of silicon material that is melted at a time has also increased, and crucibles and heaters have become larger and heavier. The heater weight is increased to about 50 kg or more. For this reason, when “taper fitting” is applied, the biting action due to its own weight is strengthened, and it is difficult to remove the heater. For this reason, in recent years, “joint by a screw part and a nut” has increased.
[0007]
“Coupling with a screw part and a nut” is disclosed in, for example, Japanese Patent Application Laid-Open No. 2000-233898 (hereinafter referred to as Document 1). FIG. 5A is a diagram showing a conventional heater 50. FIG. 5B is a diagram illustrating a state where the heater 50 is attached to the electrode 52, and is a diagram seen from the heating surface side of the heater 50.
[0008]
As shown in FIGS. 5A and 5B, a leg portion 51 for attaching the heater 50 to the electrode 52 is formed in an L shape below the heater 50. As shown in FIG. 5B, the leg portion 51 of the heater 50 is provided with a through hole 51a penetrating in the vertical direction. On the other hand, a male screw portion 52 a is formed on the head of the electrode 52.
[0009]
The male screw part 52 a of the electrode 52 is inserted into the through hole 51 a of the leg part 51, and the nut 52, which is a female screw, is screwed into the male screw part 52 a of the electrode 52. It is fixed upward.
[0010]
When the leg portion 51 of the heater 50 is separated from the electrode 52, the nut 53 is removed from the male screw portion 52a, and the leg portion 51 of the heater 50 is lifted upward.
[0011]
FIG. 4 illustrates a heater mounting structure by “taper fitting”.
[0012]
FIG. 4 is a view showing a state where the heater 40 is attached to the intermediate electrode 2, and is a view seen from the heating surface side of the heater 40.
[0013]
In this apparatus, an intermediate electrode 2 is used, and an electrode insertion portion 2 a is provided on the upper portion of the intermediate electrode 2. The electrode insertion portion 2a is formed in a tapered shape that gradually becomes thinner as it goes to the upper tip.
[0014]
As shown in FIG. 4, leg portions 40 a for attaching the heater 40 to the intermediate electrode 2 are formed in an L shape at the lower portion of the heater 40. An electrode insertion hole 40 b that fits with the intermediate electrode 2 is formed in the lower portion of the leg portion 40 a of the heater 40. The electrode insertion hole 40b is formed in a tapered shape so that its inner peripheral surface follows the outer peripheral surface of the electrode insertion portion 2a. A bolt hole 40c communicating with the electrode insertion hole 40b is provided above the electrode insertion hole 40b.
[0015]
The electrode insertion portion 2a of the intermediate electrode 2 is fitted into the electrode insertion hole 40b of the leg portion 40a. At this time, the leg 40 a of the heater 40 is fixed to the intermediate electrode 2 by adding the own weight of the heater 40.
[0016]
When the leg portion 40a of the heater 40 is separated from the intermediate electrode 2, the bolt 41 is screwed into the bolt hole 40c from above. As a result, the top of the bolt 41 presses the top of the electrode insertion portion 2a of the intermediate electrode 2, and the intermediate electrode 2 is pushed downward.
[0017]
According to the structure shown in FIG. 4, the bolt 41 is screwed to press the top of the electrode insertion portion 2 a of the intermediate electrode 2 with the tip of the bolt 41 and push the intermediate electrode 2 downward. Even if the “bite-in” is increased due to the enlargement of the single crystal wafer, there is an advantage that it can be surely separated.
[0018]
[Problems to be solved by the invention]
Graphite is used for the material of the heater and the electrode. Graphite has lower strength than metals. For this reason, the screw threads in the bolt 41 and the bolt hole 40c in FIG. 4 and the screw thread in the male screw portion 52a in FIG. 5B are very fragile in strength, and the heater legs are separated by repeatedly turning the screws. Repeated steps can damage the threads.
[0019]
This invention is made | formed in view of such a situation, and makes it the 1st solution subject to prevent the damage which arises in a member by isolate | separating a member.
[0020]
By the way, the heater is made by cutting out from a graphite material. FIG. 5A shows a state in which the heater 50 is cut out from the graphite material 100 indicated by a broken line. The same applies to the heater 40 shown in FIG.
[0021]
As shown in FIG. 5A, the heater 50 includes a heat generating portion 50d used for heating the crucible and an L-shaped leg portion 51 not used for heating the crucible. After the heater 50 is cut out from the graphite material 100, a portion 101 indicated by a one-dot chain line inside the heater 50 is cut out and used for another member. In this case, the cut-out portion 101 is cut out while avoiding the L-shaped leg portion 51.
[0022]
On the other hand, FIG. 2 shows a case where the leg 5b of the heater 5 is formed in a straight line. When the inside of the heater 5 is cut out after the heater 5 is cut out from the graphite material 200, it is not necessary to avoid the “L-shaped” portion as shown in FIG. 5A, and the leg portion 5b includes the heat generating portion 5d. Therefore, the cut-out portion 201 having a larger area than the cut-out portion 101 in FIG. 5A is used while using the graphite material 200 smaller than the graphite material 100 in FIG. 5A. Can be cut out. The cut material 201 can be used as a material for other smaller parts. For this reason, the yield of a graphite material can be enlarged and cost can be reduced.
[0023]
The graphite used for the heater is high-purity, high-density isotropic graphite, and is very expensive. Therefore, increasing the yield greatly affects the cost reduction.
[0024]
The present invention has been made in view of such circumstances, and in addition to achieving the first solution, it is possible to provide an inexpensive heater on the market by reducing the amount of graphite material necessary for manufacturing the heater. Is a second problem to be solved.
[0025]
[Means, functions and effects for solving the problems]
Therefore, in the apparatus of the first invention of the present invention, in order to achieve the first solution,
It is attached to a graphite heater used in an apparatus for producing single crystal silicon by the Czochralski method, and is formed on a graphite female member in which a hole having an upper wall surface and a tapered side wall surface extending downward is formed. Jig insertion port,
When the front end of the male member as an intermediate electrode is inserted into the hole and the male member and the male member are in a fitted state, the upper wall surface of the hole of the female member and the upper end surface of the front end portion of the male member A gap formed between
And a jig for separating the female member and the male member by being rotated about its axis and formed so as to be insertable into the gap portion from the jig insertion port.
In the device of the second invention,
A graphite female member attached to a graphite heater used in an apparatus for producing single crystal silicon by the Czochralski method and having a hole having an upper wall surface and a side wall surface formed in a tapered shape extending downward ,
An intermediate electrode for applying a voltage to the graphite heater through the female member, and a graphite male member having a tip fitted into the hole of the female member,
In a separation device for a member that separates the female member and the male member,
When the tip of the male member is inserted into the hole of the female member and the female member and the male member are in a fitted state, the upper wall surface of the hole of the female member and the upper end surface of the tip portion of the male member are A gap formed between
A jig insertion opening formed in the female member and penetrating in the horizontal direction ;
An insertion part that can be inserted into the gap part from the jig insertion port and has a cross section of a major axis and a minor axis is formed, and the insertion part is inserted into the gap part so that the minor axis is in the vertical direction, And a jig for separating the female member and the male member by rotating about the longitudinal axis of the insertion portion and making the major axis vertical .
[0026]
According to the first and second inventions , as shown in FIG. 3 (a), the jig 3 has a diameter 3c of a gap 4a or less formed between the male member 2 and the female member 1 in the fitted state. When the jig 3 is inserted into the gap 4a and has a diameter 3d larger than the gap 4a by d as shown in FIG. 3B, the male member 2 and the female member 1 can be separated. it can.
[0027]
According to the first and second inventions , when the male member 2 and the female member 1 are separated, unlike the case of FIGS. 4 and 5, it is not necessary to turn a screw. For this reason, even if the material of the male member 2 and the female member 1 is graphite which is brittle in strength, damage to these members can be prevented.
[0028]
In the apparatus of the third invention, in order to achieve the second problem, in the first and second inventions,
The female member is fixed to a leg portion of the graphite heater, and the leg portion is linearly formed.
[0029]
According to the third invention , the same effects as those of the first and second inventions can be obtained as described in FIG. Further, as shown in FIG. 2, since the leg portion 5 b of the heater 5 is formed in a straight line, when the heater 5 is cut out from the graphite material 200, when the inside of the heater 5 is cut out, FIG. Thus, it is not necessary to avoid the “L-shaped” portion, and the leg portion 5b forms a part of the heat generating portion 5d. Therefore, the graphite material 200 is smaller than the graphite material 100 of FIG. However, the cutout portion 201 having a larger area than the cutout portion 101 in FIG. 5A can be cut out. For this reason, the yield of a graphite raw material can be enlarged and the cost of material can be reduced. Therefore, it is possible to reduce the amount of graphite material necessary for manufacturing the heater and to provide an inexpensive heater on the market.
[0031]
In the method of the fourth invention , in order to achieve the first solution,
A graphite female member attached to a graphite heater used in an apparatus for producing single crystal silicon by the Czochralski method and having a hole having an upper wall surface and a side wall surface formed in a tapered shape extending downward ,
An intermediate electrode for applying a voltage to the graphite heater through the female member, and a graphite male member having a tip fitted into the hole of the female member,
When the tip of the male member is inserted into the hole of the female member and the female member and the male member are in a fitted state, the upper wall surface of the hole of the female member and the upper end surface of the tip portion of the male member are A gap formed between
A jig insertion opening formed in the female member and penetrating in the horizontal direction ;
A jig that can be inserted into the gap portion from the jig insertion port and has an insertion portion having a cross section of a major axis and a minor axis;
A method for separating members of an apparatus comprising:
The insertion portion of the jig is inserted into the gap portion so that the minor axis is in the vertical direction, and is rotated about the longitudinal axis of the insertion portion so that the major axis is in the vertical direction. The male member is separated .
[0032]
In the fourth invention , the apparatus invention of the second invention is replaced with the method invention.
[0037]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of a member separation apparatus and separation method according to the present invention will be described below with reference to the drawings. In the present embodiment, each member to be separated is assumed to be a “leg portion of a heater used in a single crystal silicon manufacturing apparatus” and an “electrode for supplying power to this heater”.
[0038]
The configuration of the present embodiment will be described with reference to FIGS.
[0039]
FIG. 1 is a diagram showing a heater leg separation device according to an embodiment, and is a diagram seen from the heating surface side of the heater. FIG. 2 is a view of only the heater as viewed from the heating surface side. 3A and 3B are views of the separation device of FIG.
[0040]
As shown in FIG. 1, the separation device of the present embodiment includes an intermediate electrode 2 that is fixed to a chamber 8 and accommodates a metal electrode 11 therein, and a seating member 1 that is attached to a leg portion 5 b of the heater 5. Is done. In this separation device, the intermediate electrode 2 functions as a male member, and the seating member 1 functions as a female member. Here, high purity and high density isotropic graphite is used as the material of the heater 5, and the same graphite is also used as the material of the seating member 1 and the intermediate electrode 2.
[0041]
The leg 5b of the heater 5 is formed in a straight line as shown in FIG. The leg 5b is provided with a through hole 5a penetrating in the horizontal direction. As a material of the heater 5, isotropic graphite having high purity and high density is used.
[0042]
As shown in FIG. 1, the seating member 1 is fixed to the leg portion 5b of the heater 5 by fixing bolts 5c. That is, a bolt hole 1b penetrating in the horizontal direction is provided in the upper part of the seating member 1. The seating member 1 is fixed to the leg portion 5 b of the heater 5 by screwing the fixing bolt 5 c into the through hole 5 a of the leg portion 5 b and the bolt hole 1 b of the seating member 1.
[0043]
The intermediate electrode 2 is electrically connected to the seating member 1 by fitting the intermediate electrode 2 to the seating member 1. That is, an electrode insertion hole 1 a into which the intermediate electrode 2 is inserted and into which the intermediate electrode 2 is fitted is formed in the lower portion of the seating member 1. The electrode insertion hole 1a has an upper wall surface 1c and a side wall surface 1d formed in a tapered shape. The upper wall surface 1c is formed with a notch 1e having a cylindrical inner peripheral shape.
[0044]
The seating member 1 is provided with a jig insertion port 4 penetrating in the horizontal direction.
[0045]
An electrode insertion portion 2 a is formed on the intermediate electrode 2. The electrode insertion portion 2 a has an upper end surface 2 b and is formed in a tapered shape so that the side surface follows the side wall surface 1 d of the electrode insertion hole 1 a of the seating member 1.
[0046]
The electrode insertion portion 2 a of the intermediate electrode 2 is inserted into the electrode insertion hole 1 a of the seating member 1, and the intermediate electrode 2 is fitted into the seating member 1. At this time, the seat member 1 as a female member is fixed to the intermediate electrode 2 as a male member by adding the own weight of the heater 5.
[0047]
When the seating member 1 that is a female member and the intermediate electrode 2 that is a male member are in a fitted state, the gap between the upper wall surface 1c of the electrode insertion hole 1a and the upper end surface 2b of the electrode insertion portion 2a, that is, the cutout portion of the seating member 1 A gap 4 a having a distance D is formed between 1 e and the upper end surface 2 b of the intermediate electrode 2.
[0048]
The upper part of the metal electrode 11 is accommodated in the intermediate electrode 2. The metal electrode 11 is comprised with metals, such as copper, copper alloy, and stainless steel, whose electrical conductivity is comparatively high.
[0049]
The
[0050]
The lower part of the metal electrode 11 is fixed to the chamber 8 by a fixing nut 10. When fixing with the fixing nut 10, an insulating sleeve 7 and an insulating material 9 are interposed between the metal electrode 11 and the chamber 8 to electrically insulate the metal electrode 11 and the chamber 8.
[0051]
A cooling water supply port 12 and a cooling water discharge port 13 are provided at the lower end of the metal electrode 11. Cooling water is supplied to the cooling water supply port 12 to cool the metal electrode 11. The cooling water for electrode cooling supplied from the cooling water supply port 12 is discharged from the cooling water discharge port 13 through a cooling water passage (not shown) inside the metal electrode 11.
[0052]
3A and 3B show the jig 3 inserted into the jig insertion port 4. The jig 3 includes a handle 3a and an insertion portion 3b connected to the handle 3a and having a substantially half-moon shaped cross section.
[0053]
The cross section of the insertion portion 3b has a major axis 3d and a minor axis 3c. The major axis 3d is longer than the gap 4a by the distance D described above by the distance d, and the minor axis 3c is set to a length equal to or less than the gap 4a by the distance D. Note that SUS is used as the material of the jig 3.
[0054]
Next, with reference to FIG. 3A and FIG. 3B, an aspect at the time of separation of this embodiment will be described. FIG. 3A is a diagram showing a state in which the seating member 1 and the intermediate electrode 2 are fitted, and shows a state before the jig 3 is inserted. FIG. 3B is a diagram illustrating a state where the jig 3 is inserted and the seating member 1 and the intermediate electrode 2 are separated.
[0055]
As shown in FIG. 3A, when the seating member 1 as the female member and the intermediate electrode 2 as the male member are in the fitted state, the notch 1e of the seating member 1 and the upper end surface 2b of the intermediate electrode 2 A gap 4a having a distance D is formed between them.
[0056]
In this state, the insertion portion 3b of the jig 3 is inserted into the jig insertion port 4 so that the minor axis 3c is in the vertical direction (see the AA ′ cross section).
[0057]
Since the minor axis 3c is set to a length equal to or less than the gap 4a of the distance D, the insertion portion 3b of the jig 3 can be inserted into the gap 4a.
[0058]
When inserted into the gap 4a of the insertion portion 3b, the handle 3a is operated to rotate the insertion portion 3b by 90 ° about the axis in the longitudinal direction. Then, as shown in FIG.3 (b), the major axis 3d of the insertion part 3b of the jig | tool 3 is located in a perpendicular direction (refer cross section BB ').
[0059]
Since the major axis 3d is set longer than the gap 4a of the distance D by the distance d, when the insertion portion 3b rotates, the upper end surface 2b of the intermediate electrode 2 is pushed downward by the distance d. Thereby, the intermediate electrode 2 and the seating member 1 are separated.
[0060]
As described above, according to the present embodiment, the intermediate electrode 2 and the seating member 1 are separated using the jig 3 having a substantially half-moon shaped cross section, and when the intermediate electrode 2 and the seating member 1 are separated, Unlike the case of 4 and FIG. 5, it is not necessary to turn a screw. For this reason, even if the material of the intermediate electrode 2 and the seating member 1 is graphite that is brittle in strength, damage to these members can be prevented.
[0061]
Further, according to the present embodiment, as shown in FIG. 2, since the leg portion 5 b of the heater 5 is formed in a straight line shape, when the heater 5 is cut out from the graphite material 200, the inside of the heater 5 is cut out. 5 (a), it is not necessary to avoid the “L-shaped” portion, and the leg portion 5b forms a part of the heat generating portion 5d. Therefore, the graphite material 100 of FIG. While using less graphite material 200, it is possible to cut out the cutout portion 201 having a larger area than the cutout portion 101 in FIG. For this reason, the yield of a graphite raw material can be enlarged and the cost of material can be reduced. Therefore, it is possible to reduce the amount of graphite material necessary for manufacturing the heater and to provide an inexpensive heater on the market.
[0062]
According to this embodiment, since the intermediate electrode 2 and the seating member 1 can be separated while the jig 3 is inserted into the seating member 1, the intermediate electrode 2 and the seating member 1 are fitted again during the separation. The replacement work and replacement work of the heater 5 can be easily performed without being combined.
[0063]
In the present embodiment, the cross-sectional shape of the jig 3 is a substantially half-moon shape. However, the shape is not limited to such a shape, and any shape can be used as long as the diameter can be increased by rotation. May be formed in an oval shape such as an ellipse.
[0064]
In the present embodiment, the jig 3 having a substantially half-moon shaped cross section is rotated to change the diameter of the jig 3 from the diameter 3c of the gap 4a or less to the diameter 3d of the gap 4a. The tool is not necessarily limited to “having a substantially half-moon cross section and changing the diameter by rotation”. For example, the jig 3 has a circular cross section, and the jig 3 is configured such that the diameter of the circle expands. When the jig 3 is inserted, the diameter of the cross section of the jig 3 is set to a diameter equal to or less than the gap 4a. The diameter of the cross section may be expanded to a diameter larger than the gap 4a.
[Brief description of the drawings]
FIG. 1 is a diagram showing an embodiment of a heater leg separation device according to the present invention.
FIG. 2 is a view of the entire heater as viewed from the heating surface side.
FIG. 3 (a) is a diagram showing an aspect at the time of fitting in the present embodiment, and FIG. 3 (b) is a diagram showing an aspect at the time of separation in the present embodiment.
FIG. 4 is a diagram showing a state in which a heater is attached to the intermediate electrode.
FIG. 5 (a) is a view showing a conventional heater, and FIG. 5 (b) is a view showing a state where a heater is attached to an electrode.
[Explanation of symbols]
1 ... Seating member (female member)
2 ... Intermediate electrode (male member)
3 ... Jig 4a ... Gap

Claims (4)

It is attached to a graphite heater used in an apparatus for producing single crystal silicon by the Czochralski method, and is formed on a graphite female member in which a hole having an upper wall surface and a tapered side wall surface extending downward is formed. Jig insertion port,
When the front end of the male member as an intermediate electrode is inserted into the hole and the male member and the male member are in a fitted state, the upper wall surface of the hole of the female member and the upper end surface of the front end portion of the male member A gap formed between
A member formed so as to be insertable into the gap portion from the jig insertion port and separating itself from the female member and the male member by rotating about its own axis. Separation equipment. A graphite female member attached to a graphite heater used in an apparatus for producing single crystal silicon by the Czochralski method and having a hole having an upper wall surface and a side wall surface formed in a tapered shape extending downward ,
An intermediate electrode for applying a voltage to the graphite heater through the female member, and a graphite male member having a tip fitted into the hole of the female member;
In a separation device for a member that separates the female member and the male member,
When the distal end of the male member is inserted into the hole of the female member, and the female member and the male member are in a fitted state, the upper wall surface of the hole of the female member and the upper end surface of the distal end portion of the male member A gap formed between
A jig insertion opening formed in the female member and penetrating in the horizontal direction ;
An insertion part that can be inserted into the gap part from the jig insertion port and has a cross section of a major axis and a minor axis is formed, and the insertion part is inserted into the gap part so that the minor axis is in the vertical direction, And a jig for separating the female member and the male member by rotating about the longitudinal axis of the insertion portion and making the major axis vertical. apparatus. The member separation apparatus according to claim 1 , wherein the female member is fixed to a leg portion of the graphite heater, and the leg portion is formed in a straight line. A graphite female member attached to a graphite heater used in an apparatus for producing single crystal silicon by the Czochralski method and having a hole having an upper wall surface and a side wall surface formed in a tapered shape extending downward ,
An intermediate electrode for applying a voltage to the graphite heater through the female member, and a graphite male member having a tip fitted into the hole of the female member;
When the tip of the male member is inserted into the hole of the female member and the female member and the male member are in a fitted state, the upper wall surface of the hole of the female member and the upper end surface of the tip portion of the male member are A gap formed between
A jig insertion opening formed in the female member and penetrating in the horizontal direction ;
A jig that can be inserted into the gap portion from the jig insertion port and has an insertion portion having a cross section of a major axis and a minor axis;
A method for separating members of an apparatus comprising:
The insertion portion of the jig is inserted into the gap portion so that the minor axis is in the vertical direction, and is rotated about the longitudinal axis of the insertion portion so that the major axis is in the vertical direction. A member separation method, wherein the male member is separated.

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