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JP4195619B2 - Multilayer wiring board and manufacturing method thereof - Google Patents

Multilayer wiring board and manufacturing method thereof Download PDF

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Publication number
JP4195619B2
JP4195619B2 JP2003011635A JP2003011635A JP4195619B2 JP 4195619 B2 JP4195619 B2 JP 4195619B2 JP 2003011635 A JP2003011635 A JP 2003011635A JP 2003011635 A JP2003011635 A JP 2003011635A JP 4195619 B2 JP4195619 B2 JP 4195619B2
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JP
Japan
Prior art keywords
wiring board
substrate
wiring circuit
printed wiring
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2003011635A
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Japanese (ja)
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JP2004228165A (en
Inventor
彰二 伊藤
亮一 岸原
知 中尾
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Fujikura Ltd
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Fujikura Ltd
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Priority to JP2003011635A priority Critical patent/JP4195619B2/en
Priority to PCT/JP2003/016377 priority patent/WO2004066697A1/en
Priority to CN200380109013.2A priority patent/CN1739323B/en
Priority to US10/542,649 priority patent/US20060180344A1/en
Publication of JP2004228165A publication Critical patent/JP2004228165A/en
Priority to FI20050767A priority patent/FI122414B/en
Application granted granted Critical
Publication of JP4195619B2 publication Critical patent/JP4195619B2/en
Priority to US12/463,708 priority patent/US7886438B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Combinations Of Printed Boards (AREA)

Description

【0001】
【発明の属する技術分野】
この発明は、多層配線板およびその製造方法に関し、特に、多層フレキシブルプリント配線板に関するものである。
【0002】
【従来の技術】
近年の電子機器は、高周波信号、ディジタル化等に加え、小型、軽量化が進み、それに伴い、搭載されるプリント配線板においても、小型、高密度実装化等が要求される。これらの要求に応えるプリント配線板として、リジッド部とフレックス部とを含むリジッドフレックスプリント配線板がある(特許文献1)。
【0003】
リジッドフレックスプリント配線板の代表的な製造プロセスを、図13(a)〜(c)を参照して説明する。
【0004】
図13(a)に示されているように、ポリイミドフィルム等によるフレックス基板101の両面と、プリプレグ等による内層リジッド基板102の両面および外層リジット基板103の片面にそれぞれ配線回路104をサブトラクティブ法によって形成する。
【0005】
ついで、接着シート105および内層リジット基板102、外層リジット基板103にプレス打ち抜き等によってフレックス部露出穴109を設ける。ついで、フレックス基板用カバーレイヤ106、内層リジッド基板102、接着シート105、外層リジット基板103を、フレックス基板101の表裏に重ねて配置し、積層加工によって図13(b)に示されている積層体100を得る。
【0006】
ついで、積層体100に、ドリル孔あけ加工、めっき処理、エッチング等を施し、スルーホール107、外層配線回路108等を形成し、最後に、リジッド部分Bとフレックス部分Aの外形を同時に抜くことで、図13(c)に示されているようなリジッドフレックスプリント配線板110を得る。
【0007】
また、リジットフレックスプリント配線板の表層にビルドアップ層を設け、IVH(interstitial Via Hole)やSVH(Surface Via Hole)によって層間接続をするものも発表されている。
【0008】
【特許文献】
特開2002−158445号公報
【0009】
【発明が解決しようとする課題】
しかしながら、このようなリジッドフレックスプリント配線板の場合、リジッド部の積層後に、リジッド部とフレックス部の外形を同時に抜くことが行われるから、リジッド部の形状(領域)は、フレックス基板とその表裏に積層されている内層リジット基板、外層リジット基板を含む多層部と同じになる。
【0010】
このため、リジッド部に余分な多層化領域が存在することが生じ、材料コストに無駄が生じる。また、多層領域の位置に制限が設けられ、配線の自由度を損なうことになる。にもかかわらず、電子部品実装用の多層化部(リジッド部)とフレックス基板の接続技術としては、リジッドフレックスプリント配線板が、配線の自由度、基板面積という点で最良であるのが現状である。
【0011】
この発明は、上述の如き問題点を解消するためになされたもので、より高い配線自由度をえることができ、材料コストの削減、基板容量の縮小を達成する多層配線板およびその製造方法を提供することを目的としている。
【0012】
【課題を解決するための手段】
上述の目的を達成するために、この発明による多層配線板は、マザーボードプリント配線板に、予め外形加工がなされた少なくとも1枚の配線回路付き基材が貼り合わせされており、それらが少なくとも1箇所でインナビアホールによって電気的に接続されている。
【0013】
このことにより、配線回路付き基材の外形を前記マザーボードプリント配線板の外形に合わせる必要がなく、配線回路付き基材の外形を前記マザーボードプリント配線板の外形より小さく設定でき、配線回路付き基材がマザーボードプリント配線板上で必要部位を選んだ島状をなしている構造にすることができる。
【0014】
また、外形加工済みの配線回路付き基材を複数枚の積層することができ、マザーボードプリント配線板上で必要部位を選んで最小必要限度の領域を多層化することができる。この外形加工済みの配線回路付き基材は、絶縁層の片面に配線回路が形成された片面配線回路付き基材であってよい。
【0015】
また、前記マザーボードプリント配線板の絶縁層や前記配線回路付き基材の絶縁層はポリイミド等の可撓性樹脂により構成することができ、全体を、あるいは部分的にフレキシブルプリント配線板とすることができる。また、マザーボードプリント配線板の絶縁層と配線回路付き基材の絶縁層は、熱的、機械的影響の観点等から、同じ材料によって構成されていることが好ましい。
【0016】
また、この発明による多層配線板は、導電層の保護のために、前記マザーボードプリント配線板及び前記配線回路付き基材を被覆するカバー層が形成されているか、前記配線回路付き基材の配置部位を開口させたカバー層が形成されている。そして、前記カバー層の開口において前記カバー層と前記配線回路付き基材との隙間に露呈する前記マザーボードプリント配線板の配線回路が当該配線回路より貴なる金属によって被覆されている、あるいは前記カバー層の開口において前記カバー層と前記配線回路付き基材との隙間に露呈する前記マザーボードプリント配線板の表面を被覆する追加のカバー層が形成されている。
【0017】
また、この発明による多層配線板は、前記配線回路付き基材のうち、前記マザーボードプリント配線板と接触する配線回路付き基材の絶縁層が前記マザーボードプリント配線板を被覆するカバー層を兼ねている。
【0018】
また、この発明による多層配線板は、前記配線回路付き基材のインナビアホールには層間導通のための導電性ペーストが充填されており、更には、前記配線回路付き基材の導電層に導電性ペースト充填時の空気抜き孔として作用する小孔があけられている。
【0019】
また、上述の目的を達成するために、この発明による多層配線板の製造方法は、マザーボードプリント配線板の表面あるいは/および裏面に、外形加工済みの配線回路付き基材を貼り合わせる工程を含む。さらには、マザーボードプリント配線板の表面あるいは/および裏面に、配線回路形成、バイアホール形成および外形加工済みの配線回路付き基材を貼り合わせる工程を含む。
【0020】
この多層配線板の製造方法では、配線回路付き基材の外形を前記マザーボードプリント配線板の外形に合わせる必要がなく、配線回路付き基材の外形を前記マザーボードプリント配線板の外形より小さく設定でき、配線回路付き基材がマザーボードプリント配線板上で必要部位を選んだ島状をなしている構造にすることができる。
【0021】
また、この多層配線板の製造方法は、前記配線回路付き基材をマザーボードプリント配線板に貼り合わせる工程の前に、マザーボードプリント配線板に、前記配線回路付き基材の貼り合わせ部位を開口させたカバー層を形成する工程を含む。
【0022】
また、この多層配線板の製造方法は、前記配線回路付き基材をマザーボードプリント配線板に貼り合わせる工程の後に、前記マザーボードプリント配線板および前記配線回路付き基材を被覆するカバー層を形成する工程を含む。
【0023】
【発明の実施の形態】
以下に添付の図を参照してこの発明の実施形態を詳細に説明する。
図1、図2はこの発明による多層配線板の基本的な実施形態を示している。本実施形態の多層配線板は、マザーボードプリント配線板(ベース基板)10の表裏の複数箇所に、各々、予め外形加工をなされた部分的配線基板(多層化部分)20が島状に貼り合わせされている。部分的配線基板20は、予め、マザーボードプリント配線板10の外形よりも小さい所定形状に外形加工された複数枚の片面配線回路付き樹脂基材21をマザーボードプリント配線板10の表裏に一括積層したものである。なお、部分的配線基板20は、両面配線回路付き樹脂基材を含んで多層化することもできる。
【0024】
マザーボードプリント配線板10は、絶縁基材11の表裏両面に導体層(配線回路)12を有する。マザーボードプリント配線板10の絶縁基材11はポリイミド等の可撓性樹脂により構成することができる。片面配線回路付き樹脂基材21は、絶縁基材22の片面に導体層(配線回路)23を有する。片面配線回路付き樹脂基材21の絶縁基材22も、リジッドなプリプレグ以外に、ポリイミド等の可撓性樹脂により構成することができる。
【0025】
多層化された片面配線回路付き樹脂基材21の導体層23同士と、片面配線回路付き樹脂基材21の導体層23とマザーボードプリント配線板10の導体層12とが、各々片面配線回路付き樹脂基材21に形成されたインナビアホール(バイアホール)24の導電性ペースト等による導体25によって電気的に接続されている。
【0026】
具体的な製造方法としては、マザーボードプリント配線板10の表面あるいは/および裏面の一部に、外形加工済みである片面配線回路付き樹脂基材21を貼り合わせる工程を含むものである。これは、もちろん、片面配線回路付き樹脂基材21を一枚づつ貼り合わせていくビルドアップ法でも構わないが、より簡略な製造工程とし、製造コストの削減を図る場合には、マザーボードプリント配線板10の表面あるいは/および裏面の一部に、配線回路形成、バイアホール形成および外形加工済みである片面配線回路付き樹脂基材21を、複数枚重ね、一括で加熱加圧することで貼り合わせる一括積層法が適用される。
【0027】
片面配線回路付き樹脂基材21同士の接着と、片面配線回路付き樹脂基材21とマザーボードプリント配線板10との接着は、片面配線回路付き樹脂基材21の絶縁基材22の導体層23とは反対側の面に接着層(図示省略)を形成し、この接着層によって行うことができる。片面配線回路付き樹脂基材21の絶縁基材22が、熱可塑性ポリイミド、あるいは熱可塑性ポリイミドに熱硬化機能を付与したもの、あるいは液晶ポリマ等、それ自身、接着性を有するものであれば、上述の接着層を省略することができる。
【0028】
これらによれば、マザーボードプリント配線板10の表面の自由な位置に電子部品実装用の多層化部(部分的配線基板20)を自由に配置でき、しかも、余計な多層化部を削減でき、材料費を大きく削減できる。
【0029】
リジッドフレックスプリント配線板のように、ポリイミド等の可撓性樹脂基板によるフレックス部とリジットな多層部が混在するような場合でも、上述のマザーボードプリント配線板10をフレックス基板とすることで、上記課題が解決される。特に、誘電特性、軽薄、といった要求により、電子部品実装部分がポリイミドのような高価な材料で構成される場合には、この効果は極めて大きいといえる。
【0030】
また、このような基板構成の場合、電子部品実装部である部分的配線基板20の絶縁層(絶縁基材22)とフレックス部(マザーボードプリント配線板10)の絶縁層(絶縁基材11)を同じ材料とし、両者の熱的、機械的特性を合わせることで、高い熱的、機械的信頼性を得ることができる。
【0031】
マザーボードプリント配線板10には、導電層の保護を目的としてカバーレイヤやソルダーレジスト等のカバー層が設けられるのが一般的である。マザーボードプリント配線板10のカバー層は、片面配線回路付き樹脂基材21によって多層化される部分を予め開口しておき、開口部に片面配線回路付き樹脂基材21を貼り合わせてよい。この場合には、図3に示されているように、開口部13Aにおいて、多層化されている部分(部分的配線基板20の配置部)とカバー層13との間に隙間gができ、隙間g部分では導電層12がむき出し(外部露呈)になってしまう。
【0032】
従って、この場合には、むき出しになっている部分を、図4に示されているように、金など、導電層12よりも貴なる貴金属15によって被覆し、酸化を防止するか、あるいは図5に示されているように、ソルダーレジスト等によるカバー層16によって被覆することが好ましい。
【0033】
また、カバー層16は、図6に示されているように、多層化部分の貼り合わせ後に、マザーボードプリント配線板10と多層化された部分の一部を被覆するように形成することにより、たとえばマザーボード配線板10がフレックスである場合の屈曲時に、多層化部分と屈曲部の界面での剥がれといった問題を防ぐことができる。
【0034】
また、工程の簡略化を図りたい場合には、図7に示すごとく、マザーボードプリント配線板10のカバーレイヤと、マザーボードプリント配線板10に接触して直上に貼り合わせられた片面配線回路付き樹脂基材21の絶縁層とが一体成形されている構造とすることで解決される。より具体的には、片面配線回路付き樹脂基材21の絶縁層とマザーボードプリント配線板20のカバーレイヤとを同一の絶縁層17から形成し、これをマザーボードプリント配線板10に貼り合わせる工程を含むものである。
【0035】
また、図8に示されているように、これらの構造のインナビアホール24を、導電性ペーストインナーホールとし、片面配線回路付き樹脂基材21の導電層23部分に樹脂基板部分の口径よりも小さい空気抜き用の小孔27を貫通形成することで、導電性ペースト充填時のボイド残りを防止することができる。導電性ペーストは、小孔27が空洞とならないよう、小孔27にも充填されている。なお、図8において、符合26は層間接着層を示している。
【0036】
つぎに、この発明による一実施形態に係わる多層配線板で使用する片面配線回路付き樹脂基材の製造方法を図9(a)〜(f)を参照して説明する。
【0037】
図9(a)に示されているような、ポリイミド基材51の片面に銅箔52を有する片面銅箔付きポリイミド基材50を出発材料とし、サブトラクティブ法によって、銅箔52をエッチングすることで、図9(b)に示されているような回路形成済み基材53を得た。これは、もちろん、銅箔のないポリイミド基材を出発材料として、アディティブ法、セミアディティブ法によっても得ることができる。
【0038】
ついで、図9(c)に示されているように、回路形成済み基材53の銅箔52とは反対側の面に層間接着層54を形成する。層間接着層54としては、熱可塑性ポリイミドに熱硬化機能を付与したものを使用したが、これは、もちろん、エポキシ等に代表される熱硬化性の樹脂や、熱可塑性ポリイミド等の熱可塑性樹脂でも構わない。
【0039】
ただし、銅箔52とポリイミド基材51と層間接着層54の3層構成は、表裏非対称なものであり、接着層を形成した状態で後の工程で、不具合となるような反りが発生しないことが好ましい。層間接着層54は、ガラス転移温度が110℃以下、常温弾性率が1300MPa以下であることが好ましい。
【0040】
ついで、図9(d)に示されているように、層間接着層54およびポリイミド基材51を貫通するよう、UV−YAGレーザによって穴開け加工(バイアホール加工)を施した後、プラズマ照射によるソフトエッチを施すことでデスミアを行い、この穴55に穴埋用銀ペースト56を充填することでIVHを形成した。
【0041】
レーザは、もちろん、UV−YAGレーザのほかにも、炭酸ガスレーザやエキシマレーザー等によって、現状では、より高速で加工ができる。また、デスミアの方法として、過マンガン酸塩を使用した湿式デスミアも、ごく一般的である。IVH充填の導電性ペーストとしては、銀ペーストのほかにも、銅ペースト、カーボンペースト、ニッケルペースト等、種々の金属ペーストを使用することが可能である。
【0042】
ついで、図9(e)に示されているように、点線Lで示されている如く、外形加工することを目的とし、金型でプレスすることで、所望の大きさに外形加工を施し、図9(f)に示されている片面配線回路付き樹脂基材57を得た。この際、導電性ペースト56によるIVHが破壊されることを防ぐために、接触しても破壊が起きない程度に導電性ペースト56を仮硬化させておく必要がある。具体的には、鉛筆硬度で2B以上硬化していることが好ましい。
【0043】
つぎに、この発明による一実施形態に係わる多層配線板の製造方法を図10(a)〜(c)を参照して説明する。
【0044】
図10(a)に示されているように、配線回路61が形成済みで、かつ、積層予定部分を開口(開口部62A)させたカバーレイヤ62が表面に形成されているマザーボードFPC60の開口部62Aに、外形加工済みの片面配線回路付き樹脂基材57を、2層、位置合わせを施した後に重ね合わせ、真空熱プレス機により、真空度1kPa以下の下で加熱・加圧し、図10(b)に示されているような多層化部分64を含む基板63を得た。
【0045】
位置合わせには、ピンアライメント方式をとっても構わないが、ピン用の穴を開けるスペースが必要になるため、好ましいとは言えない。従って、画像認識による位置合わせを実施した。
【0046】
ついで、図10(c)に示されているように、基板63上、マザーボードFPC60のカバーレイヤ62と多層化部分64の隙間、および多層化部分64の表面の一部およびカバーレイヤ62の表面の一部を被覆するよう、印刷法によってソルダーレジスト65を塗布し、硬化させることで、多層配線板66を得た。
【0047】
つぎに、この発明による他の実施形態に係わる多層配線板の製造方法を図11(a)、(b)を参照して説明する。なお、図11において、図10に対応する部分は、図10に付した符号と同一の符号を付けて、その説明を省略する。
【0048】
図11(a)に示されているように、配線回路61が形成済みのマザーボードFPC60に、上述の実施形態(図9)と同様の方法で製造した片面配線回路付き樹脂基材57、70を、2層、位置合わせを施した後に重ね合わせる。マザーボードFPC60の回路面に接触する片面配線回路付き樹脂基材70は、その絶縁層(ポリイミド基材51)によってマザーボードFPC60の銅箔部分等、カバーレイヤによって被覆すべき部分を被覆する外径形状になっており、基板70の絶縁層がカバーレイヤを兼ねている。
【0049】
この位置合わせも、ピンアライメント方式をとっても構わないが、ピン用の穴を開けるスペースが必要になるため、好ましいとは言えない。従って、画像認識による位置合わせを実施した。
【0050】
位置合わせ後に、真空熱プレス機により、真空度1kPa以下の下で加熱・加圧し、図11(b)に示されている基板71を得た。この方法によると、熱プレス時に、片面配線回路付き樹脂基材57と70とで段差ができるから、この段差を埋め合わせるクッション構成とすることが好ましい。
【0051】
つぎに、この発明によるもう一つの実施形態に係わる多層配線板の製造方法を図12(a)〜(e)を参照して説明する。なお、図12においても、図10に対応する部分は、図10に付した符号と同一の符号を付けて、その説明を省略する。
【0052】
図12(a)に示されているように、配線回路61が形成済みで、かつ、積層予定部分を開口(開口部62Aと62B)させたカバーレイヤ62が表面に形成されているマザーボードFPC60の開口部62Aに、外形加工済みの片面配線回路付き樹脂基材57を、2層、位置合わせを施した後に重ね合わせ、真空熱プレス機により、真空度1kPa以下の下で加熱・加圧し、図12(b)に示されているような多層化部分64を得た。
【0053】
ついで、図12(c)に示されているように、マザーボードFPC60のもう一方の開口部62Bに、外形加工済みの片面配線回路付き樹脂基材57を、3層、位置合わせを施した後に重ね合わせ、真空熱プレス機により、真空度1kPa以下の下で加熱・加圧し、図12(d)に示されているような多層化部分67を得た。
【0054】
ついで、図12(e)に示されているように、マザーボードFPC60のカバーレイヤ62と多層化部分64、67の隙間、および多層化部分64、67の表面の一部およびカバーレイヤ62の表面の一部を被覆するよう、印刷法によってソルダーレジスト65を塗布し、硬化させることで、多層配線板68を得た。
【0055】
このようにして、多層部分間で層数が違う、即ち、厚さが違う場合でも、多層構造を得る事ができる。
【0056】
【発明の効果】
以上の説明から理解される如く、この発明による多層配線板およびその製造方法によれば、マザーボードプリント配線板に、予め外形加工がなされた少なくとも1枚の配線回路付き基材が貼り合わせされ、それらが少なくとも1箇所でインナビアホールによって電気的に接続されている。配線回路付き基材の外形はマザーボードプリント配線板の外形より小さく、配線回路付き基材がマザーボードプリント配線板上で島状をなしているから、より高い配線自由度をえることができ、材料コストの削減、基板容量の縮小を達成することができる。
【図面の簡単な説明】
【図1】この発明による多層配線板の一つの実施形態を示す断面図である。
【図2】この発明による多層配線板の一つの実施形態を示す平面図である。
【図3】この発明による多層配線板の他の実施形態を示す断面図である。
【図4】この発明による多層配線板の他の実施形態を示す断面図である。
【図5】この発明による多層配線板の他の実施形態を示す断面図である。
【図6】この発明による多層配線板の他の実施形態を示す断面図である。
【図7】この発明による多層配線板の他の実施形態を示す断面図である。
【図8】この発明による多層配線板の他の実施形態を示す断面図である。
【図9】(a)〜(f)はこの発明による一実施形態に係わる多層配線板で使用する片面配線回路付き樹脂基材の製造方法を示す工程図である。
【図10】(a)〜(c)はこの発明による一実施形態に係わる多層配線板の製造方法をを示す工程図である。
【図11】(a)、(b)はこの発明による他の実施形態に係わる多層配線板の製造方法を示す工程図である。
【図12】(a)〜(e)はこの発明による他の実施形態に係わる多層配線板の製造方法を示す工程図である。
【図13】a)〜(c)はリジッドフレックスプリント配線板の代表的な製造プロセスを示す工程図である。
【符号の説明】
10 マザーボードプリント配線板
11 絶縁基材
12 導体層
13 カバー層
15 貴金属
16 カバー層
17 絶縁層
20 部分的配線基板
21 片面配線回路付き樹脂基材
22 絶縁基材
23 導体層
24 インナビアホール
25 導体
27 小孔
26層間接着層
50 片面銅箔付きポリイミド基材
51 ポリイミド基材
52 銅箔
53 回路形成済み基材
54 層間接着層
55 穴
56 導電性ペースト
57 片面配線回路付き樹脂基材
60 マザーボードFPC
61 配線回路
62 カバーレイヤ
63 基板
64 多層化部分
65 ソルダーレジスト
66 多層配線板
67 多層化部分
68 多層配線板
70 片面配線回路付き樹脂基材
71 多層配線板
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a multilayer wiring board and a method for manufacturing the same, and more particularly to a multilayer flexible printed wiring board.
[0002]
[Prior art]
In recent years, electronic devices have become smaller and lighter in addition to high-frequency signals, digitization, and the like, and accordingly, printed wiring boards to be mounted are also required to be small and have high-density mounting. As a printed wiring board that meets these requirements, there is a rigid flex printed wiring board including a rigid portion and a flex portion (Patent Document 1).
[0003]
A typical manufacturing process of the rigid flex printed wiring board will be described with reference to FIGS.
[0004]
As shown in FIG. 13 (a), wiring circuits 104 are formed on the both surfaces of the flex substrate 101 made of polyimide film or the like, on both sides of the inner rigid substrate 102 made of prepreg, etc. Form.
[0005]
Next, a flex portion exposure hole 109 is provided in the adhesive sheet 105, the inner layer rigid substrate 102, and the outer layer rigid substrate 103 by press punching or the like. Then, the flex substrate cover layer 106, the inner layer rigid substrate 102, the adhesive sheet 105, and the outer layer rigid substrate 103 are arranged so as to overlap the front and back of the flex substrate 101, and the laminate shown in FIG. Get 100.
[0006]
Next, drilling, plating, etching, etc. are performed on the laminated body 100 to form the through hole 107, the outer layer wiring circuit 108, etc., and finally, the outer shape of the rigid part B and the flex part A are simultaneously removed. A rigid flex printed wiring board 110 as shown in FIG. 13C is obtained.
[0007]
In addition, a structure in which a buildup layer is provided on the surface layer of a rigid flex printed wiring board and interlayer connection is made by IVH (interstitial via hole) or SVH (surface via hole) has been announced.
[0008]
[Patent Literature]
Japanese Patent Laid-Open No. 2002-158445
[Problems to be solved by the invention]
However, in the case of such a rigid flex printed wiring board, after the rigid portions are stacked, the outer shape of the rigid portion and the flex portion is removed at the same time, so the shape (region) of the rigid portion is on the flex substrate and its front and back sides. This is the same as the multilayer part including the laminated inner layer rigid substrate and outer layer rigid substrate.
[0010]
For this reason, an extra multi-layered region may be present in the rigid portion, resulting in a waste of material cost. In addition, there is a restriction on the position of the multilayer region, and the degree of freedom of wiring is impaired. Nonetheless, the rigid flex printed wiring board is the best connection technology between the multilayered part (rigid part) for mounting electronic components and the flex board in terms of freedom of wiring and board area. is there.
[0011]
The present invention has been made to solve the above-described problems, and provides a multilayer wiring board capable of obtaining a higher degree of wiring freedom, achieving a reduction in material cost and a reduction in substrate capacity, and a method for manufacturing the same. It is intended to provide.
[0012]
[Means for Solving the Problems]
In order to achieve the above-described object, in the multilayer wiring board according to the present invention, at least one base material with a wiring circuit that has been subjected to outline processing is bonded to a mother board printed wiring board, and at least one substrate is provided. It is electrically connected by an inner via hole.
[0013]
Accordingly, it is not necessary to match the outer shape of the substrate with a wiring circuit with the outer shape of the motherboard printed wiring board, and the outer shape of the substrate with a wiring circuit can be set smaller than the outer shape of the motherboard printed wiring board. However, it is possible to make an island-like structure where the necessary parts are selected on the motherboard printed wiring board.
[0014]
In addition, a plurality of substrates with wiring circuits that have undergone outer shape processing can be stacked, and a necessary region can be selected on a mother board printed wiring board so that a minimum necessary region can be multilayered. The base material with a wiring circuit that has been subjected to external processing may be a base material with a single-sided wiring circuit in which a wiring circuit is formed on one side of an insulating layer.
[0015]
Moreover, the insulating layer of the motherboard printed wiring board and the insulating layer of the substrate with wiring circuit can be made of a flexible resin such as polyimide, and the whole or a part thereof may be a flexible printed wiring board. it can. Moreover, it is preferable that the insulating layer of the motherboard printed wiring board and the insulating layer of the substrate with wiring circuit are made of the same material from the viewpoint of thermal and mechanical influences.
[0016]
Further, in the multilayer wiring board according to the present invention, a cover layer for covering the motherboard printed wiring board and the substrate with wiring circuit is formed for protecting the conductive layer, or the arrangement part of the substrate with wiring circuit is provided. A cover layer having an opening is formed. And the wiring circuit of the motherboard printed wiring board exposed in the gap between the cover layer and the substrate with wiring circuit at the opening of the cover layer is covered with a noble metal from the wiring circuit, or the cover layer An additional cover layer is formed to cover the surface of the motherboard printed wiring board exposed in the gap between the cover layer and the substrate with wiring circuit in the opening.
[0017]
In the multilayer wiring board according to the present invention, the insulating layer of the substrate with a wiring circuit that comes into contact with the motherboard printed wiring board also serves as a cover layer that covers the motherboard printed wiring board among the substrates with the wiring circuit. .
[0018]
In the multilayer wiring board according to the present invention, the inner via hole of the substrate with wiring circuit is filled with a conductive paste for interlayer conduction, and further, the conductive layer of the substrate with wiring circuit is conductive. A small hole is formed which acts as an air vent hole when the paste is filled.
[0019]
In order to achieve the above-mentioned object, a method for manufacturing a multilayer wiring board according to the present invention includes a step of bonding a substrate with a wiring circuit that has been subjected to external processing to the front surface and / or the back surface of a mother board printed wiring board. Furthermore, it includes a step of bonding a wiring circuit formed substrate, a via hole formed, and a substrate with a printed wiring circuit to the front surface and / or back surface of the mother board printed wiring board.
[0020]
In this multilayer wiring board manufacturing method, it is not necessary to match the outer shape of the substrate with a wiring circuit to the outer shape of the motherboard printed wiring board, the outer shape of the substrate with a wiring circuit can be set smaller than the outer shape of the motherboard printed wiring board, The base material with the wiring circuit can be made into an island-like structure in which a necessary part is selected on the mother board printed wiring board.
[0021]
Further, in this method of manufacturing a multilayer wiring board, before the step of bonding the substrate with wiring circuit to the mother board printed wiring board, the bonding portion of the substrate with wiring circuit is opened in the mother board printed wiring board. Forming a cover layer.
[0022]
In addition, the method of manufacturing the multilayer wiring board includes a step of forming a cover layer that covers the motherboard printed wiring board and the substrate with wiring circuit after the step of bonding the substrate with wiring circuit to the motherboard printed wiring board. including.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
1 and 2 show a basic embodiment of a multilayer wiring board according to the present invention. In the multilayer wiring board of the present embodiment, partial wiring boards (multilayered portions) 20 that have been subjected to outline processing in advance are pasted together in islands at a plurality of locations on the front and back of the motherboard printed wiring board (base board) 10. ing. The partial wiring board 20 is obtained by collectively laminating a plurality of single-sided wiring circuit-equipped resin base materials 21 on the front and back of the mother board printed wiring board 10 that have been processed into a predetermined shape smaller than the outer shape of the mother board printed wiring board 10 in advance. It is. In addition, the partial wiring board 20 can also be multilayered including the resin base material with a double-sided wiring circuit.
[0024]
The motherboard printed wiring board 10 has conductor layers (wiring circuits) 12 on both the front and back surfaces of the insulating base material 11. The insulating base 11 of the motherboard printed wiring board 10 can be made of a flexible resin such as polyimide. The resin base material 21 with a single-sided wiring circuit has a conductor layer (wiring circuit) 23 on one side of an insulating base material 22. The insulating base material 22 of the resin base material with single-sided wiring circuit 21 can also be made of a flexible resin such as polyimide in addition to the rigid prepreg.
[0025]
The conductor layers 23 of the multi-layered resin base material 21 with a single-sided wiring circuit, the conductor layers 23 of the resin base material 21 with a single-sided wiring circuit, and the conductor layer 12 of the motherboard printed wiring board 10 are each a resin with a single-sided wiring circuit. The inner via hole (via hole) 24 formed in the substrate 21 is electrically connected by a conductor 25 made of conductive paste or the like.
[0026]
A specific manufacturing method includes a step of bonding a resin substrate 21 with a single-sided wiring circuit that has been subjected to external processing to a part of the front surface and / or the back surface of the motherboard printed wiring board 10. Of course, this may be a build-up method in which the resin base materials 21 with single-sided wiring circuits are bonded one by one. However, when a simpler manufacturing process and reduction in manufacturing cost are desired, the printed circuit board for the motherboard Collective lamination in which a plurality of single-sided wiring circuit-equipped resin base materials 21 that have undergone wiring circuit formation, via hole formation, and outer shape processing are stacked on one part of the front surface or / and the back surface of 10 The law applies.
[0027]
The adhesion between the resin base materials 21 with single-sided wiring circuits and the adhesion between the resin base material 21 with single-sided wiring circuits and the motherboard printed wiring board 10 are performed with the conductor layer 23 of the insulating base material 22 of the resin base material 21 with single-sided wiring circuits. Can be performed by forming an adhesive layer (not shown) on the opposite surface and using this adhesive layer. If the insulating base material 22 of the resin base material 21 with a single-sided wiring circuit is thermoplastic polyimide, a material obtained by imparting a thermosetting function to a thermoplastic polyimide, or a liquid crystal polymer, etc. The adhesive layer can be omitted.
[0028]
According to these, the multilayered part for mounting electronic components (partial wiring board 20) can be freely arranged at a free position on the surface of the mother board printed wiring board 10, and the extra multilayered part can be reduced, and the material can be reduced. Costs can be greatly reduced.
[0029]
Even when a flexible part made of a flexible resin substrate such as polyimide and a rigid multi-layer part are mixed like a rigid flex printed wiring board, the above-mentioned problem can be obtained by using the above-mentioned motherboard printed wiring board 10 as a flex board. Is resolved. In particular, when the electronic component mounting part is made of an expensive material such as polyimide due to requirements such as dielectric properties and lightness, this effect can be said to be extremely large.
[0030]
In the case of such a board configuration, the insulating layer (insulating base material 22) of the partial wiring board 20 which is an electronic component mounting part and the insulating layer (insulating base material 11) of the flex part (motherboard printed wiring board 10) are provided. By using the same material and combining the thermal and mechanical properties of both, high thermal and mechanical reliability can be obtained.
[0031]
The mother board printed wiring board 10 is generally provided with a cover layer such as a cover layer or a solder resist for the purpose of protecting the conductive layer. The cover layer of the motherboard printed wiring board 10 may be formed by previously opening a portion that is multilayered by the resin base material 21 with a single-sided wiring circuit, and the resin base material 21 with a single-sided wiring circuit may be bonded to the opening. In this case, as shown in FIG. 3, a gap g is formed between the multi-layered portion (arrangement part of the partial wiring board 20) and the cover layer 13 in the opening 13 </ b> A. In the portion g, the conductive layer 12 is exposed (exposed externally).
[0032]
Therefore, in this case, as shown in FIG. 4, the exposed portion is covered with a noble metal 15 such as gold, which is nobler than the conductive layer 12, to prevent oxidation, or FIG. It is preferable to cover with a cover layer 16 of a solder resist or the like.
[0033]
Further, as shown in FIG. 6, the cover layer 16 is formed so as to cover a part of the multilayered portion with the motherboard printed wiring board 10 after the multilayered portions are bonded, for example, At the time of bending when the motherboard wiring board 10 is flex, it is possible to prevent a problem such as peeling at the interface between the multilayered portion and the bent portion.
[0034]
Further, in order to simplify the process, as shown in FIG. 7, a cover layer of the motherboard printed wiring board 10 and a resin substrate with a single-sided wiring circuit bonded to and directly above the motherboard printed wiring board 10 are attached. This is solved by a structure in which the insulating layer of the material 21 is integrally formed. More specifically, it includes a step of forming the insulating layer of the resin base material 21 with a single-sided wiring circuit and the cover layer of the mother board printed wiring board 20 from the same insulating layer 17 and bonding them to the mother board printed wiring board 10. It is a waste.
[0035]
Further, as shown in FIG. 8, the inner via hole 24 having these structures is formed as a conductive paste inner hole, and is smaller than the diameter of the resin substrate portion in the conductive layer 23 portion of the resin base material 21 with a single-sided wiring circuit. By forming the small holes 27 for venting air, it is possible to prevent voids remaining when the conductive paste is filled. The conductive paste is filled in the small holes 27 so that the small holes 27 do not become hollow. In FIG. 8, reference numeral 26 denotes an interlayer adhesive layer.
[0036]
Next, a method for producing a resin base material with a single-sided wiring circuit used in a multilayer wiring board according to an embodiment of the present invention will be described with reference to FIGS.
[0037]
Etching the copper foil 52 by a subtractive method using a polyimide base material 50 with a single-sided copper foil having a copper foil 52 on one side of the polyimide base material 51 as shown in FIG. 9 (a). Thus, a circuit-formed substrate 53 as shown in FIG. 9B was obtained. Of course, this can also be obtained by an additive method or a semi-additive method using a polyimide base material without a copper foil as a starting material.
[0038]
Next, as shown in FIG. 9C, an interlayer adhesive layer 54 is formed on the surface of the substrate 53 on which the circuit has been formed on the side opposite to the copper foil 52. As the interlayer adhesive layer 54, a thermoplastic polyimide having a thermosetting function was used. Of course, this may be a thermosetting resin represented by epoxy or a thermoplastic resin such as thermoplastic polyimide. I do not care.
[0039]
However, the three-layer configuration of the copper foil 52, the polyimide base material 51, and the interlayer adhesive layer 54 is asymmetrical on the front and back sides, and no warping that causes a problem occurs in the subsequent process with the adhesive layer formed. Is preferred. The interlayer adhesive layer 54 preferably has a glass transition temperature of 110 ° C. or lower and a normal temperature elastic modulus of 1300 MPa or lower.
[0040]
Next, as shown in FIG. 9 (d), after drilling (via hole processing) with a UV-YAG laser so as to penetrate the interlayer adhesive layer 54 and the polyimide base material 51, plasma irradiation is performed. Desmearing was performed by applying soft etching, and IVH was formed by filling hole 55 with silver paste 56 for filling holes.
[0041]
Of course, in addition to the UV-YAG laser, the laser can be processed at a higher speed by a carbon dioxide gas laser, an excimer laser, or the like. As a desmear method, wet desmear using a permanganate is also very common. As the conductive paste filled with IVH, various metal pastes such as a copper paste, a carbon paste, and a nickel paste can be used in addition to the silver paste.
[0042]
Next, as shown in FIG. 9 (e), as shown by the dotted line L, the object is to process the outer shape, and by pressing with a mold, the outer shape is processed to a desired size, The resin base material 57 with the single-sided wiring circuit shown by FIG.9 (f) was obtained. At this time, in order to prevent the IVH caused by the conductive paste 56 from being destroyed, it is necessary to temporarily cure the conductive paste 56 to such an extent that destruction does not occur even when contacted. Specifically, it is preferable that 2B or more is cured by pencil hardness.
[0043]
Next, a method for manufacturing a multilayer wiring board according to an embodiment of the present invention will be described with reference to FIGS.
[0044]
As shown in FIG. 10A, the opening portion of the motherboard FPC 60 in which the wiring circuit 61 has been formed and the cover layer 62 having the opening (opening portion 62A) of the portion to be laminated is formed on the surface. 62A, the two-layered resin base material 57 with a single-sided wiring circuit that has been subjected to the outer shape processing is overlaid after being aligned, and heated and pressurized under a vacuum degree of 1 kPa or less by a vacuum hot press machine, and FIG. A substrate 63 including a multilayered portion 64 as shown in b) was obtained.
[0045]
For alignment, a pin alignment method may be used, but it is not preferable because a space for opening a pin hole is required. Therefore, alignment by image recognition was performed.
[0046]
Next, as shown in FIG. 10 (c), on the substrate 63, the gap between the cover layer 62 and the multilayered portion 64 of the motherboard FPC 60, a part of the surface of the multilayered portion 64 and the surface of the cover layer 62. A multilayer resist board 66 was obtained by applying and curing a solder resist 65 by a printing method so as to cover a part.
[0047]
Next, a method for manufacturing a multilayer wiring board according to another embodiment of the present invention will be described with reference to FIGS. 11, parts corresponding to those in FIG. 10 are denoted by the same reference numerals as those in FIG.
[0048]
As shown in FIG. 11A, resin base materials 57 and 70 with single-sided wiring circuits manufactured by the same method as in the above-described embodiment (FIG. 9) are applied to a motherboard FPC 60 in which the wiring circuit 61 has been formed. Two layers are overlaid after alignment. The resin base material 70 with a single-sided wiring circuit that contacts the circuit surface of the motherboard FPC 60 has an outer diameter shape that covers a portion to be covered with a cover layer, such as a copper foil portion of the motherboard FPC 60, by the insulating layer (polyimide base material 51). Thus, the insulating layer of the substrate 70 also serves as a cover layer.
[0049]
This alignment may be a pin alignment method, but it is not preferable because a space for making a pin hole is required. Therefore, alignment by image recognition was performed.
[0050]
After alignment, the substrate was heated and pressurized under a vacuum degree of 1 kPa or less with a vacuum hot press to obtain a substrate 71 shown in FIG. According to this method, a step is formed between the resin base materials 57 and 70 with a single-sided wiring circuit at the time of hot pressing. Therefore, it is preferable to have a cushion configuration that compensates for this step.
[0051]
Next, a method for manufacturing a multilayer wiring board according to another embodiment of the present invention will be described with reference to FIGS. Also in FIG. 12, parts corresponding to those in FIG. 10 are denoted by the same reference numerals as those in FIG. 10, and description thereof is omitted.
[0052]
As shown in FIG. 12A, the mother board FPC 60 in which the wiring circuit 61 has been formed and the cover layer 62 having openings (openings 62A and 62B) formed on the portions to be stacked is formed on the surface. Two-layered resin base material 57 with a single-sided wiring circuit that has been subjected to outer shape processing is placed in the opening 62A, after being aligned, and heated and pressurized under a vacuum degree of 1 kPa or less by a vacuum hot press machine. A multilayered portion 64 as shown in 12 (b) was obtained.
[0053]
Then, as shown in FIG. 12 (c), three-layered resin base material 57 with a single-sided wiring circuit that has undergone outline processing is overlaid on the other opening 62B of motherboard FPC 60 after alignment. In addition, a multilayered portion 67 as shown in FIG. 12D was obtained by heating and pressurizing under a vacuum degree of 1 kPa or less with a vacuum hot press.
[0054]
Next, as shown in FIG. 12 (e), the gap between the cover layer 62 and the multilayered portions 64 and 67 of the motherboard FPC 60, a part of the surface of the multilayered portions 64 and 67, and the surface of the cover layer 62 A multilayer resist board 68 was obtained by applying and curing a solder resist 65 by a printing method so as to cover a part.
[0055]
In this way, a multilayer structure can be obtained even when the number of layers is different between the multilayer portions, that is, when the thicknesses are different.
[0056]
【The invention's effect】
As can be understood from the above description, according to the multilayer wiring board and the method of manufacturing the same according to the present invention, at least one substrate with a wiring circuit that has been subjected to outline processing in advance is bonded to the mother board printed wiring board. Are electrically connected by an inner via hole in at least one place. The outer shape of the substrate with wiring circuit is smaller than the outer shape of the motherboard printed wiring board, and since the substrate with wiring circuit has an island shape on the motherboard printed wiring board, higher wiring flexibility can be obtained, and material cost Reduction of the substrate capacity can be achieved.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing one embodiment of a multilayer wiring board according to the present invention.
FIG. 2 is a plan view showing one embodiment of a multilayer wiring board according to the present invention.
FIG. 3 is a cross-sectional view showing another embodiment of the multilayer wiring board according to the present invention.
FIG. 4 is a cross-sectional view showing another embodiment of the multilayer wiring board according to the present invention.
FIG. 5 is a cross-sectional view showing another embodiment of the multilayer wiring board according to the present invention.
FIG. 6 is a cross-sectional view showing another embodiment of the multilayer wiring board according to the present invention.
FIG. 7 is a cross-sectional view showing another embodiment of the multilayer wiring board according to the present invention.
FIG. 8 is a cross-sectional view showing another embodiment of the multilayer wiring board according to the present invention.
FIGS. 9A to 9F are process diagrams showing a method for producing a resin substrate with a single-sided wiring circuit used in a multilayer wiring board according to an embodiment of the present invention.
FIGS. 10A to 10C are process diagrams showing a method for manufacturing a multilayer wiring board according to an embodiment of the present invention. FIGS.
11A and 11B are process diagrams showing a method for manufacturing a multilayer wiring board according to another embodiment of the present invention.
12A to 12E are process diagrams showing a method for manufacturing a multilayer wiring board according to another embodiment of the present invention.
FIGS. 13A to 13C are process diagrams showing a typical manufacturing process of a rigid flex printed wiring board. FIGS.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Mother board printed wiring board 11 Insulating base material 12 Conductive layer 13 Cover layer 15 Precious metal 16 Cover layer 17 Insulating layer 20 Partial wiring board 21 Resin base material with single-sided wiring circuit Insulating base material 23 Conductive layer 24 Inner via hole 25 Conductor 27 Small Hole 26 Interlayer adhesive layer 50 Polyimide substrate 51 with single-sided copper foil Polyimide substrate 52 Copper foil 53 Circuit-formed substrate 54 Interlayer adhesive layer 55 Hole 56 Conductive paste 57 Resin substrate 60 with single-sided wiring circuit Motherboard FPC
61 Wiring Circuit 62 Cover Layer 63 Substrate 64 Multilayered Portion 65 Solder Resist 66 Multilayer Wiring Board 67 Multilayered Portion 68 Multilayer Wiring Board 70 Resin Base 71 with Single-sided Wiring Circuit Multilayer Wiring Board

Claims (9)

マザーボードプリント配線板に、予め外形加工がなされた少なくとも1枚の配線回路付き基材が貼り合わせされており、それらが少なくとも1箇所でインナビアホールによって電気的に接続され、前記配線回路付き基材の外形が前記マザーボードプリント配線板の外形より小さく、前記配線回路付き基材が前記マザーボードプリント配線板上で島状をなし、前記マザーボードプリント配線板に、前記配線回路付き基材の配置部位を開口させたカバー層が形成され、前記カバー層の開口において前記カバー層と前記配線回路付き基材との隙間に露呈する前記マザーボードプリント配線板の配線回路が当該配線回路より貴なる金属によって被覆されている多層配線板。  At least one base material with a wiring circuit that has been subjected to outline processing is bonded to the mother board printed wiring board, and they are electrically connected to each other by an inner via hole at least at one place. The outer shape is smaller than the outer shape of the motherboard printed wiring board, the substrate with wiring circuit forms an island shape on the motherboard printed wiring board, and the placement portion of the substrate with wiring circuit is opened in the motherboard printed wiring board. A cover layer is formed, and a wiring circuit of the motherboard printed wiring board exposed in a gap between the cover layer and the base material with the wiring circuit is covered with a noble metal from the wiring circuit at an opening of the cover layer. Multilayer wiring board. マザーボードプリント配線板に、予め外形加工がなされた少なくとも1枚の配線回路付き基材が貼り合わせされており、それらが少なくとも1箇所でインナビアホールによって電気的に接続され、前記配線回路付き基材の外形が前記マザーボードプリント配線板の外形より小さく、前記配線回路付き基材が前記マザーボードプリント配線板上で島状をなし、前記マザーボードプリント配線板に、前記配線回路付き基材の配置部位を開口させたカバー層が形成され、前記カバー層の開口において前記カバー層と前記配線回路付き基材との隙間に露呈する前記マザーボードプリント配線板の表面を被覆する追加のカバー層が形成されている多層配線板。  At least one base material with a wiring circuit that has been subjected to outline processing is bonded to the mother board printed wiring board, and they are electrically connected to each other by an inner via hole at least at one place. The outer shape is smaller than the outer shape of the motherboard printed wiring board, the substrate with wiring circuit forms an island shape on the motherboard printed wiring board, and the placement portion of the substrate with wiring circuit is opened in the motherboard printed wiring board. A multi-layer wiring in which an additional cover layer is formed to cover the surface of the motherboard printed wiring board exposed in the gap between the cover layer and the substrate with wiring circuit at the opening of the cover layer Board. 外形加工済みの複数枚の配線回路付き基材が積層されている請求項1または2記載の多層配線板。  The multilayer wiring board according to claim 1 or 2, wherein a plurality of substrates with wiring circuits that have undergone external processing are laminated. 前記配線回路付き基材は、絶縁層の片面に配線回路が形成された片面配線回路付き基材である請求項1〜3の何れか1項記載の多層配線板。  The multilayer wiring board according to any one of claims 1 to 3, wherein the substrate with a wiring circuit is a substrate with a single-sided wiring circuit in which a wiring circuit is formed on one side of an insulating layer. 前記マザーボードプリント配線板の絶縁層がポリイミド等の可撓性樹脂により構成されている請求項1〜4の何れか1項記載の多層配線板。  The multilayer wiring board according to any one of claims 1 to 4, wherein an insulating layer of the mother board printed wiring board is made of a flexible resin such as polyimide. 前記配線回路付き基材の絶縁層がポリイミド等の可撓性樹脂により構成されている請求項1〜5の何れか1項記載の多層配線板。  The multilayer wiring board according to any one of claims 1 to 5, wherein the insulating layer of the substrate with a wiring circuit is made of a flexible resin such as polyimide. 前記マザーボードプリント配線板の絶縁層と前記配線回路付き基材の絶縁層とが同じ材料によって構成されている請求項1〜6の何れか1項記載の多層配線板。  The multilayer wiring board according to any one of claims 1 to 6, wherein an insulating layer of the mother board printed wiring board and an insulating layer of the substrate with wiring circuit are made of the same material. 前記配線回路付き基材のインナビアホールには層間導通のための導電性ペーストが充填されている請求項1〜7の何れかに記載の多層配線板。Multilayer wiring board according to any one of claims 1 to 7 to the inner via hole of the wiring circuit substrate with the conductive paste for interlayer conduction are filled. 前記配線回路付き基材の導電層に前記インナビアホールと連通する小孔があけられている請求項記載の多層配線板。The multilayer wiring board according to claim 8 , wherein a small hole communicating with the inner via hole is formed in the conductive layer of the substrate with a wiring circuit.
JP2003011635A 2003-01-20 2003-01-20 Multilayer wiring board and manufacturing method thereof Expired - Fee Related JP4195619B2 (en)

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JP2003011635A JP4195619B2 (en) 2003-01-20 2003-01-20 Multilayer wiring board and manufacturing method thereof
PCT/JP2003/016377 WO2004066697A1 (en) 2003-01-20 2003-12-19 Multilayer printed wiring board and process for producing the same
CN200380109013.2A CN1739323B (en) 2003-01-20 2003-12-19 Multilayer wiring board and its manufacturing method
US10/542,649 US20060180344A1 (en) 2003-01-20 2003-12-19 Multilayer printed wiring board and process for producing the same
FI20050767A FI122414B (en) 2003-01-20 2005-07-19 Multilayer pattern cards and process for making them
US12/463,708 US7886438B2 (en) 2003-01-20 2009-05-11 Process for producing multilayer printed wiring board

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