JP4029794B2 - Aerosol particle concentration measuring method, apparatus, and composite structure manufacturing apparatus including the same - Google Patents

Description

  The present invention relates to an aerosol high-speed free flow particle concentration in which fine particles are dispersed in a gas, a particle concentration distribution measuring method, a measuring apparatus, and a composite structure manufacturing apparatus using the measuring apparatus. The aerosol free-flow particle concentration, particle concentration distribution real-time continuous measuring method, measuring apparatus, and sprayed in a composite structure manufacturing apparatus that sprays aerosol dispersed in a substrate on a substrate and forms a structure composed of fine particles on a substrate The present invention relates to a composite structure manufacturing apparatus using this.

  As for a method for measuring the aerosol concentration in which fine particles are dispersed in a gas, conventionally, the concentration is measured using a measurement system of a particle size distribution measuring apparatus by a laser diffraction / scattering method as disclosed in JP-A-2000-46722. That is, a method has been proposed in which the aerosol is guided to a transparent cell, the cell is irradiated with laser light, and the concentration is measured from the scattered light intensity. (See Patent Document 1)

In addition, in a gas deposition device that heats and evaporates the metal, transports the aerosolized metal with gas, and injects it at high speed onto the substrate, the laser beam is projected to the aerosol present near the suction port of the evaporated metal and scattered An apparatus for detecting an aerosol distribution by measuring light intensity has been proposed. (See Patent Document 2)
JP 2000-46722 A JP 5-295550 A

  In the method described in Patent Document 1, in the measurement of free flow in which aerosol is ejected from the nozzle into the space, the flow is greatly affected by the cell, and measurement is impossible. In addition, when the concentration of aerosol is high, it is difficult to measure continuously for a long time because it is affected by cell contamination. Further, it is impossible to obtain the concentration distribution of the free flow by the method of guiding the flow to the cell.

In addition, the device of Patent Document 2 can measure only a very narrow range of aerosol. Therefore, in order to measure a wide range, it is necessary to install a plurality of measuring devices or move the laser beam, and the measurement becomes complicated, and it takes time to measure by moving the laser beam. There is.
The present invention has been made to solve the above problems, and the object of the present invention is to influence the flow of free flow in the concentration and measurement of free flow in which aerosol is ejected from a nozzle at high speed into space. It is an object of the present invention to provide a measurement method, a measurement apparatus, and a composite structure manufacturing apparatus using the measurement apparatus that can measure the flow concentration and concentration distribution with high sensitivity in real time.

In order to achieve the above object, the concentration measuring apparatus of the present invention is configured to inject an aerosol, in which fine particles of a brittle material are dispersed in a gas, from a nozzle toward a base material, and cause the aerosol to collide with the base material surface. , An apparatus for producing a composite structure by an aerosol deposition method for forming a structure made of a constituent material of the fine particles on the substrate, and means for projecting a laser onto the aerosol, and projecting the laser An aerosol particle concentration measuring device comprising: means for receiving light diffracted and scattered by the light; and means for analyzing the luminance or luminance distribution of the received light and calculating the aerosol particle concentration or aerosol particle concentration distribution. The means for projecting the laser was installed so that the laser beam irradiates the vicinity of the aerosol ejection portion of the nozzle.
Here, as the fine particles used when the aerosol is collided with the surface of the base material, and the fine particles are crushed and deformed and joined by the collision to form a structure on the substrate, the particle size is 10 nm to 5 μm. The aerosol velocity is generally known to be several tens m / s to several hundreds m / s.

Furthermore, as a preferred aspect of the present invention, a one-dimensional or two-dimensional image is obtained by the light receiving means.
By using the means for receiving light diffracted and scattered by laser projection as a one-dimensional or two-dimensional image, it is possible to receive the diffraction and scattered light of the aerosol in the measurement range at once. As a result, an aerosol particle concentration measuring device capable of measuring particle concentration or concentration distribution over a wide measuring range without installing a plurality of measuring devices or moving a laser beam has been realized.

In a preferred aspect of the present invention, the means for receiving light is a camera.
By using a camera as the means for receiving light diffracted and scattered by laser projection, it is possible to receive light diffracted and scattered by laser projection instantaneously. It was realized.

In a preferred aspect of the present invention, the means for analyzing the luminance or the luminance distribution is an image processing means.
By using the means for analyzing the luminance or luminance distribution of the received light as the image processing means, the processing for analyzing the luminance or luminance distribution of the received light can be executed at high speed with a flexible algorithm. Therefore, an aerosol particle concentration measuring device that can measure at high speed and high sensitivity was realized.

Furthermore, as a preferred aspect of the present invention, the image processing means is an image processing means including processing for integrating at least the luminance of the entire image or a part of the image.
An apparatus for measuring the particle concentration of the aerosol by performing image processing including processing for integrating the luminance of at least the whole image or a part of the image and measuring the particle concentration from the total luminance of the image was realized.

Also, as a preferred aspect of the present invention, the image processing means is an image processing means including a process for binarizing at least a luminance of the entire image or a part thereof and a process for calculating an area of the binarized image. It is characterized by.
By performing image processing including processing for binarizing the luminance of at least the entire image or part of the image and calculating the area of the binarized image, and measuring the particle concentration from the total area of the high luminance portion A device for measuring aerosol particle concentration has been realized. If an appropriate binarization threshold value is selected, the total sum of the areas of the high luminance portions and the concentration are in a proportional relationship, so that the aerosol particle concentration can be measured from the total sum of the areas of the high luminance portions.

Furthermore, as a preferred aspect of the present invention, the image processing means is an image processing means including processing for integrating luminances at least in a plurality of regions of the image.
Realized a device that measures the particle concentration distribution of aerosol by performing image processing including processing to integrate the luminance in at least multiple areas of the image and measuring the particle concentration in each area from the total luminance of each image area .

Also, as a preferred aspect of the present invention, the image processing means includes image processing including processing for binarizing at least the luminance of the entire image or part of the image and processing for calculating areas in a plurality of regions for the binarized image. It is a means.
Image processing including at least processing for binarizing the luminance of the entire image or a part of the image and processing for calculating areas in a plurality of regions for the binarized image is performed, and the sum of the areas for each image region is calculated in each region. By measuring the particle concentration, we realized a device that measures the particle concentration distribution of the aerosol.

According to the invention, an aerosol in which fine particles of a brittle material are dispersed in a gas is sprayed from a nozzle toward a base material, the aerosol is made to collide with the surface of the base material, and the fine particles are crushed by the collision. In the composite structure manufacturing apparatus for deforming and bonding and forming the structure made of the constituent material of the fine particles on the substrate, means for projecting a laser to the aerosol, and diffraction by the projecting of the laser, An aerosol particle concentration measuring device comprising: means for receiving scattered light; and means for analyzing the luminance or luminance distribution of the received light and calculating the particle concentration of the aerosol or the particle concentration distribution of the aerosol. And
We have realized a structure creation device that uses an aerosol particle concentration measurement device in which fine particles of brittle material are dispersed in a gas for monitoring or controlling the composite structure creation device.
Here, as the fine particles used when the aerosol is collided with the surface of the base material, and the fine particles are crushed and deformed and joined by the collision to form a structure on the substrate, the particle size is 10 nm to 5 μm. The aerosol velocity is generally known to be several tens m / s to several hundreds m / s.

Further, as a preferred aspect of the present invention, in the composite structure manufacturing apparatus including the aerosol particle concentration measuring apparatus, the means for analyzing the luminance is an image processing means.
By using the image processing means as the means for analyzing the brightness or brightness distribution of the received light, the complex structure is used to execute the process for analyzing the brightness or brightness distribution of the received light at high speed and with a flexible algorithm. It is easy to monitor or control the object creation device.

  According to the present invention, aerosol high-speed free-flow particle concentration in which fine particles are dispersed in a gas, in particular, an aerosol in which fine particles of a brittle material are dispersed in a gas is sprayed on a base material, and a structure composed of the constituent materials of the fine particles is obtained. There is an effect that it is possible to realize a method and an apparatus that can measure the particle concentration of the aerosol free stream sprayed in the composite structure manufacturing apparatus formed on the substrate in real time without affecting the flow of the free stream. Furthermore, by using this measurement method and apparatus for monitoring and controlling the structure manufacturing apparatus, there is an effect that a high-quality structure can be created at high speed.

  Hereinafter, embodiments of the present invention will be described with reference to examples.

  FIG. 1 and FIG. 2 are diagrams showing an arrangement example of an aerosol 5 to be measured, a laser projector 2, a lens 3 as a light receiver, and a camera 4 of an aerosol particle concentration measuring apparatus according to the present invention. 1 is a front view, and FIG. 2 is a side view. Laser light 6 is projected from the laser projector 2 to the aerosol 5 ejected from the nozzle 1 at right angles to the ejection direction of the aerosol 5. The laser beam 6 hitting the aerosol 5 is diffracted and scattered, and the diffracted and scattered light is collected by the lens 3 and imaged by the camera 4. The arrangement of the laser projector 2, the lens 3 as the light receiver, and the camera 4 may not be the arrangement shown in the figure. It is sufficient that at least the laser beam 6 can irradiate the concentration measurement area of the aerosol 5 and the lens 3 and the camera 4 can photograph the measurement area. For example, when measuring the density distribution of the entire nozzle width, the arrangement example shown in the figure is preferable. However, when measuring only a part of the region, the angles of the laser beam 6 and the lens 3 as the light receiving unit and the camera 4 are set. If the angle is larger, the amount of diffracted and scattered light becomes larger than when arranged at right angles, and the sensitivity is improved.

The laser projection unit 2 selects a semiconductor laser having a wavelength of 450 to 780 nm and an output of about 100 mW or less.
In addition, the shape of the laser beam output from the laser projector 2 is appropriately selected from a circle, an ellipse, a slit shape, or the like that can irradiate a necessary region. In the case of measuring the density distribution of the entire nozzle width as in the arrangement example shown in the figure, the laser projection unit 2 having a collimated beam optical system in which the beam shape of the laser beam 6 hardly changes depending on the distance from the laser projection unit 2. Is preferred.
For example, a one-dimensional or two-dimensional CCD camera is used as the camera 4 for receiving scattered and diffracted light. When the amount of diffracted and scattered light is low, the camera 4 can be a high sensitivity CCD camera equipped with an image intensifier.

  FIG. 3 is an example of aerosol diffraction and scattered light images taken by a two-dimensional CCD camera in the arrangement examples of FIGS. 1 and 2. Since the laser beam hits the aerosol and the brightness of the portion 7 where the diffraction and scattering light is generated increases, and the aerosol concentration is proportional to the diffraction and scattering light luminance, the brightness of the portion 7 where the diffraction and scattering light is generated is the aerosol concentration. Is proportional to This image is analyzed by image processing, and the aerosol concentration and the aerosol concentration distribution are measured. In this figure, a two-dimensional CCD camera is used for photographing, but it is possible to measure even an image obtained by using a one-dimensional CCD camera and photographing only a portion 7 where diffraction and scattered light are generated.

  An apparatus for measuring the aerosol concentration in an arbitrary region in a wide range in real time can also be realized by the following method. If the laser projector 2 and the lens 3 for receiving diffraction and scattered light and the camera 4 are mounted on an automatic stage that can be positioned by being driven by a motor, for example, and moved to a position where a desired measurement region can be measured, any arbitrary Measurement in the area is possible. Further, instead of moving the lens 3 and the camera 4, a method of installing a plurality of the lenses 3 and the camera 4 or a method of optically changing the optical path of the laser light 6 and the diffracted / scattered light using a galvano mirror or the like. The same function can also be realized. Needless to say, if the method described above is applied, even when a plurality of nozzles 1 are arranged, measurement can be performed by the method described below.

In the case of actual application, various methods are conceivable depending on the arrangement of the nozzle 1, the measurement range, the installation space, and the like. Here, a representative example will be described. First, when a plurality of nozzles 1 are arranged in a straight line, the laser projector 2 is shared by the plurality of nozzles 1 and the density of each nozzle 1 is measured using a single linear laser beam 6. Flood light into the area. The lens 3 and the camera 4 for receiving scattered and diffracted light can be used in common if the density measurement region of all the nozzles 1 can be photographed and density measurement with a required accuracy can be performed from the photographed image. If not, install a plurality of lenses 3 and cameras 4 as necessary, or attach the lenses 3 and cameras 4 to, for example, an automatic stage that can be driven and driven by a motor, and move all the nozzles while moving the stage. One density measurement region is sequentially photographed.
Next, when the plurality of nozzles 1 are vertically arranged, that is, arranged in a stack, the laser projection unit 2 is shared by the plurality of nozzles 1 and has a slit-like beam shape. The laser beam 6 is projected onto the density measurement areas of all the nozzles 1. The lens 3 and the camera 4 for receiving scattered and diffracted light can be used in common if the density measurement region of all the nozzles 1 can be photographed and density measurement with a required accuracy can be performed from the photographed image. If not, install a plurality of lenses 3 and cameras 4 as necessary, or attach the lenses 3 and cameras 4 to, for example, an automatic stage that can be driven and driven by a motor, and move all the nozzles while moving the stage. One density measurement region is sequentially photographed.

  FIG. 4 is an example of the result of measuring the temporal variation of the aerosol concentration according to the present invention. The CCD camera can continuously output aerosol diffraction and scattered light images shown in FIG. 3 in time series. If the images output in time series are sequentially analyzed by image processing, the temporal change in aerosol concentration can be measured as shown in FIG. Various methods are conceivable as the image processing method for measuring the aerosol concentration, and the following two methods are listed as typical methods.

  The first method is a method of integrating the luminance values of all the pixels of the image and obtaining the aerosol concentration from the integrated value. A two-dimensional CCD camera has, for example, about 640 × 480 pixels, and all 640 × 480 pixels have luminance values. Since the aerosol concentration is proportional to the diffraction and scattered light luminance, the value obtained by integrating these luminances is also proportional to the aerosol concentration. Therefore, the luminance values of all the pixels of the image are integrated, and the aerosol concentration can be obtained from this value. When measuring temporal fluctuations of concentration relatively, the value obtained by integrating the brightness can be used as the aerosol concentration as it is, but when measuring the absolute value of concentration, aerosol with a known aerosol concentration is ejected. Then, a luminance integrated value and an aerosol concentration conversion coefficient are obtained from the obtained luminance integrated value and a known aerosol concentration, and converted into an absolute concentration from the measured luminance integrated value and the conversion coefficient.

In the second method, the image is binarized with a certain threshold value, the portion where the luminance is higher than the threshold value is divided into white, and the other portion is divided into a black region. The total area of the white region is calculated, and the aerosol concentration is calculated from that value. This is a method for obtaining. Similar to the first example, the two-dimensional CCD camera has, for example, about 640 × 480 pixels, and all 640 × 480 pixels have luminance values. If this luminance value is divided into two areas of white and black with an appropriate threshold, the area of the white area with high luminance is almost proportional to the luminance of the diffraction and scattered light. Therefore, the aerosol concentration can be measured from this area. If you want to measure the absolute value of the concentration, in the same way as in the first example, the aerosol with a known aerosol concentration is ejected, and the integrated value of the luminance and the conversion coefficient of the aerosol concentration from the integrated value of the obtained luminance and the known aerosol concentration Ask for. By binarization, the amount of data to be calculated is smaller than in the first example, and the time required for calculation can be shortened. In addition, when the portion 7 where the diffracted and scattered light is generated is reflected only in a part of the image, only the portion 7 where the diffracted and scattered light is generated is subject to image processing, thereby causing an unnecessary portion of the image. Needless to say, noise can be reduced and the time required for calculation can be shortened.

  FIG. 5 shows an example in which a plurality of partial regions are set in an aerosol diffraction / scattered light image in order to measure the aerosol concentration distribution. For example, a partial region from region 1 (8) to region 5 (12) is set for the portion 7 where diffraction and scattered light are generated in the image. Next, each region is analyzed by image processing, and the aerosol concentration distribution is measured by calculating the aerosol concentration in each region. The image processing method for measuring the aerosol concentration in each region is the same as the method described in the previous section, in which the luminance values of all the pixels in each region are integrated and measured from the integrated value, or the image is measured with a certain threshold value 2 A method is used in which the portion where the luminance is higher than the threshold value is divided into white and the other portions are divided into black regions, the total area of the white regions in each region is calculated, and the aerosol concentration is obtained from the value.

  FIG. 6 is an example of a graph in which the aerosol concentration distribution was measured using the above method. The aerosol concentration distribution is measured by calculating the aerosol concentration from the diffraction and scattered light of the aerosol for each of the regions 1 (8) to 5 (12).

  FIG. 7 is a diagram showing a configuration of the entire aerosol particle concentration measuring apparatus according to the present invention. Laser light 6 is projected from the laser projector 2 at right angles to the spraying direction of the aerosol 5 with respect to the aerosol 5 sprayed from the nozzle 1. The laser beam 6 hitting the aerosol 5 is diffracted and scattered, and the diffracted and scattered light is collected by the lens 3 and imaged by the camera 4. The camera 4 is connected to an image analysis device 14 such as a personal computer incorporating an image input board and an image processing analysis program. The image of the camera 4 is analyzed by image processing simultaneously with the input to the image analysis device 14 by the image input board, and the aerosol concentration or the aerosol concentration distribution is measured. The measured aerosol concentration can be displayed as a number or a graph on the screen of the image analysis device 14, and an analog signal or a digital signal can be output from the image analysis device 8 for external device control. Further, when the aerosol concentration measurement range is wide, it is necessary to optimally adjust the output of the laser light in accordance with the aerosol concentration. In such a case, the image analysis device 14 and the laser controller 13 for controlling the laser output are connected so that the laser output can be controlled from the image analysis device 14. Therefore, if the laser output is automatically adjusted by the image analysis device 14 so that the image of the camera 4 input to the image analysis device 14 is optimal for measurement, it is possible to deal with a wide aerosol concentration measurement range.

  FIG. 8 is a diagram showing the overall configuration of a composite structure manufacturing apparatus using the aerosol particle concentration measuring apparatus according to the present invention. The composite structure manufacturing device here refers to an aerosol in which fine particles of a brittle material are dispersed in a gas, sprayed from a nozzle toward the base material, the aerosol collides with the surface of the base material 21, and the fine particles are caused by this collision. This is an apparatus for forming a structure made of a constituent material of fine particles on a substrate 21 by crushing, deforming and joining.

The composite structure manufacturing apparatus includes an aerosol generation unit 15, a nozzle 1, a pipe 16 that connects the aerosol generation unit 15 and the nozzle, a stage 17, a vacuum chamber 18, and an apparatus control unit 19. The aerosol generator 15 is connected to the nozzle 1 installed in the vacuum chamber 18 by a pipe 16. The aerosol generator 15 generates an aerosol in which fine particles of a brittle material are dispersed in a gas, and supplies the aerosol to the nozzle 1. In addition, the aerosol generation unit 15 is connected to the device control unit 19 by a signal cable A20. When necessary, the apparatus control unit 19 sets conditions such as aerosol concentration and flow rate in the aerosol generation unit 15 via the signal cable A20, and the aerosol generation unit 15 generates aerosol according to the set value and supplies it to the nozzle 1.
The aerosol is ejected at a high speed from the nozzle 1 and collides with the base material 21 attached to the stage 17 at a high speed, and a film of a brittle material is formed on the surface of the base material 21.

  On the other hand, the base material 21 is attached to the stage 17, and the stage 17 moves the base material relative to the nozzle 1 in order to form a necessary film thickness within a necessary range. The stage 17 and the device control unit 19 are connected to the device control unit 19 by a signal cable B22. Whenever necessary, the apparatus control unit 19 sets a stage movement direction, speed or position command to the stage 17 via the signal cable B22, and the stage 17 moves the substrate 21 to the nozzle 1 in accordance with the set command. Move. The stage 17 uses, for example, an XYZΘ stage driven by a motor, and has a function capable of three-dimensionally positioning and moving the base material 21 with respect to the nozzle 1. Further, the same effect can be obtained by fixing the substrate 21 and attaching the nozzle 1 to the stage 17 and moving it three-dimensionally. Further, depending on the film formation range and quality, the stage 17 may be supported by an X stage or an XY stage that can be moved and positioned one-dimensionally or two-dimensionally.

  The aerosol particle concentration measuring apparatus is attached to the composite structure manufacturing apparatus described above as follows. The laser projection unit 2 is installed so that the laser beam irradiates the vicinity of the aerosol ejection part of the nozzle 1. In addition, the camera 4 to which the lens 3 is attached is installed at a position where it can receive diffraction and scattered light of the aerosol. The laser projector 2, the lens 3 of the light receiver, and the camera 4 are not necessarily installed in the vacuum chamber 18 in which the nozzle 1 is installed. If a part of the wall surface of the vacuum chamber 18 is made of glass and the optical path of the laser beam and the optical path of the diffraction and scattered light are secured, the lens 3 and the camera 4 of the laser projector 2 and the light receiver can be installed outside the vacuum chamber. .

The aerosol diffraction / scattered light image received by the camera 4 is analyzed by the image analysis device 8, and the aerosol concentration or aerosol concentration distribution is measured in real time. The measured aerosol concentration or aerosol concentration distribution data is transmitted from the image analysis device 8 to the device control unit 19 via the signal cable C. By using the aerosol concentration or the aerosol concentration distribution data measured by the image analysis device 8, the device control unit can monitor and control to improve the reliability of the device, the quality of the composite structure, and the productivity. The quality of the composite structure referred to here is a total of performance such as film thickness uniformity formed on the substrate 21, film defects, film physical properties such as film hardness and dielectric strength, and the like. is there. The productivity of the composite structure refers to the time required to form the film formed on the substrate 21 while satisfying the required quality.
Hereinafter, examples of monitoring and control of the composite structure manufacturing apparatus will be described using the measured aerosol concentration or aerosol concentration distribution data.

  In the first example, the aerosol concentration or aerosol concentration distribution output from the image analysis device 14 is monitored in real time by the device control unit 19, and a state in which the concentration is out of the appropriate concentration range set in advance has elapsed for a certain period of time. Then, the alarm device 24 connected to the device control unit 19 issues an alarm, or the operation of the composite structure manufacturing device is stopped, thereby preventing quality defects in the composite structure. Furthermore, the aerosol concentration distribution can be monitored with higher accuracy if an alarm is issued even when the concentration distribution is non-uniform, that is, when the concentration difference in each measurement region exceeds a certain setting range.

In the second example, in order to cancel the time change of the aerosol concentration or the aerosol concentration distribution output from the image analysis device 14, the device control unit 19 sets the aerosol concentration setting of the aerosol generation unit 15 and the conditions such as the flow rate in real time. change. By so-called feedback control, the aerosol concentration is stabilized and the quality and productivity of the composite structure are improved.
The apparatus controller 19 changes the movement direction, speed, or position command of the stage 17 in real time so as to cancel the time change of the aerosol concentration or aerosol concentration distribution output from the image analysis device 14. By so-called feedback control, the aerosol concentration is stabilized and the quality and productivity of the composite structure are improved.

  In the third example, the apparatus control unit 19 changes the movement direction, speed, or position command of the stage 17 in real time so as to average the aerosol concentration distribution output from the image analysis apparatus 14. By so-called feedback control, the aerosol concentration is stabilized and the quality and productivity of the composite structure are improved. The aerosol emitted from the nozzle 1 may have a concentration distribution in the width direction. In such a case, the film thickness formed on the base material 21 is approximately the same as the concentration distribution. In order to cope with this phenomenon, if the stage 17 is controlled so that, for example, the entire film forming surface of the base material 21 passes through a location where the concentration of the nozzle 1 is high and a location where the concentration is low, a uniform film results. Thickness can be obtained, improving the quality and productivity of composite structures.

  In the fourth example, the number of aerosol outlets is one, the nozzle 1 is provided with a plurality of supply ports for supplying aerosol, and a plurality of aerosol generators 15 are connected to the supply ports of the nozzles 1 by pipes 16. In this example, the concentration at each position of the nozzle 1 outlet is controlled by each aerosol generating unit 15. In accordance with the aerosol concentration distribution output from the image analysis device 14, the device control unit 19 changes the aerosol concentration setting of the aerosol generating unit 15 and the condition settings such as the flow rate in real time so that the concentration distribution becomes uniform. By performing so-called feedback control, the aerosol concentration distribution of the nozzle 1 becomes uniform. As a result, a uniform film thickness can be obtained, improving the quality and productivity of the composite structure. Also. When connected to a plurality of supply ports of the nozzle 1 by a plurality of pipes 16 branched from a single aerosol generating unit 15, a device capable of setting conditions such as aerosol concentration and flow rate by the device control unit 19 in the middle of the piping. The same effect can be obtained by providing feedback control in a similar manner so that the concentration distribution becomes uniform according to the aerosol concentration distribution output from the image analyzer 14.

It is a front view which shows the example of arrangement | positioning of the to-be-measured aerosol of this invention, a laser projection part, and a light-receiving part. It is a side view which shows the example of arrangement | positioning of the to-be-measured aerosol of this invention, a laser projector, and a light-receiving part. It is a figure which shows the example of the diffraction of aerosol, and a scattered light image image | photographed with the two-dimensional CCD camera in this invention. It is a figure which shows the example of the result of having measured the time variation of aerosol concentration by this invention. It is a figure which shows the example which set the some partial area | region in the diffraction and scattered light image of aerosol, in order to measure the density | concentration distribution of aerosol by this invention. It is a figure which shows the example of the graph which measured the density | concentration distribution of the aerosol by this invention. It is a figure which shows the structure of the whole aerosol particle concentration measuring apparatus by this invention. It is a figure which shows the whole structure of the composite structure preparation apparatus using the aerosol particle concentration measuring apparatus by this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Nozzle 2 ... Laser projection part 3 ... Lens 4 ... Camera 5 ... Aerosol 6 ... Laser light 7 ... The part which the diffraction and the scattered light generate | occur | produced 8 ... Area | region 1
9 ... Area 2
10 ... area 3
11 ... Region 4
12 ... area 5
DESCRIPTION OF SYMBOLS 13 ... Laser controller 14 ... Image analyzer 15 ... Aerosol generator 16 ... Piping 17 ... Stage 18 ... Vacuum chamber 19 ... Apparatus control part 20 ... Signal cable A
21 ... Substrate 22 ... Signal cable B
23 ... Signal cable C
24. Alarm device

Claims (2)

An aerosol in which fine particles of a brittle material are dispersed in a gas is sprayed from a nozzle toward a base material, the aerosol collides with the base material surface, and a structure made of the constituent material of the fine particles is formed on the base material. An apparatus for producing a composite structure by an aerosol deposition method to be formed,
Means for projecting a laser on the aerosol, means for receiving light diffracted and scattered by the projection of the laser, analyzing the luminance or luminance distribution of the received light, and analyzing the particle concentration of the aerosol or aerosol And an aerosol particle concentration measuring device having means for calculating a particle concentration distribution, and the means for projecting the laser is installed so that the laser beam irradiates the vicinity of the aerosol ejection portion of the nozzle. Composite structure creation device. 2. The composite structure creating apparatus according to claim 1, wherein the laser is projected so as to measure a concentration distribution of the entire nozzle width at a right angle to the aerosol ejection direction .

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