JP4001796B2 - Optical element adjustment method and apparatus, and optical element manufacturing method using the method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical element adjustment method and apparatus for optically connecting two optical elements by adjusting the optical axes, and more specifically, an optical element manufacturing method using the method. The present invention relates to an optical element adjustment method for adjusting an optical axis using emitted light to be optically connected, an apparatus therefor, and an optical element manufacturing method using the method.
[0002]
[Prior art]
Conventionally, as a method of optical connection by adjusting the position of the optical axis between two optical elements represented by a semiconductor laser and an optical waveguide, the light is emitted from the semiconductor laser and propagates through the optical waveguide that is optically connected to the semiconductor laser. Active alignment is performed in which the emitted light quantity of the emitted light is adjusted with a power meter or the like so that the light quantity reaches the maximum position. Hereinafter, conventional active alignment will be described with reference to FIG. FIG. 15 is a schematic diagram for explaining the configuration of a conventional optical element adjustment apparatus that performs active alignment.
[0003]
In FIG. 15, the conventional optical element adjustment device includes a light receiving lens 101, a condenser lens 102, a light amount measurement device 103, a gripping jig 104, and a position adjustment mechanism 105. The optical element adjustment device adjusts the optical axis position between the first optical element 106 and the second optical element 107 and performs the active alignment for optically connecting each other. The first optical element 106 includes a light emitting element such as a semiconductor laser, or an optical waveguide or an optical fiber that is connected to the semiconductor laser or the like and can emit light L. The second optical element 107 is configured by an optical waveguide substrate on which a small-diameter optical waveguide 107 a whose optical axis position is adjusted with respect to the first optical element 106 is formed.
[0004]
The light receiving lens 101 is disposed on the optical axis of the optical waveguide 107a. The light L emitted from the first optical element 106 propagates through the optical waveguide 107a, and then the emitted light Lout emitted from the second optical element 107. , And the emitted light is converted into substantially parallel light and emitted. The condenser lens 102 condenses and emits substantially parallel light emitted from the light receiving lens 101. The light quantity measuring device 103 is configured by a power meter or the like that receives the condensed light emitted from the condenser lens 102 and measures the light quantity (intensity) of the light. Hereinafter, the light receiving lens 101, the condenser lens 102, and the light amount measuring device 103 are collectively referred to as a detection optical system 100. The gripping jig 104 grips the second optical element 107 and is moved in the X, Y, and Z directions in the figure by the position adjustment mechanism 105, whereby the second optical element is moved with respect to the first optical element 106. The optical axis positions 107 are adjusted and optically connected to each other. The X direction indicates a direction perpendicular to the paper surface of FIG. 15, the Y direction indicates the vertical direction of FIG. 15, and the X direction indicates the horizontal direction of FIG.
[0005]
Next, the operation of the optical element adjustment device will be described. The light L emitted from the first optical element 106 enters from one end of the optical waveguide 107a formed in the second optical element 107, propagates through the optical waveguide 107a, and is emitted from the other end as outgoing light Lout. The The outgoing light Lout enters the light receiving lens 101 and is converted into substantially parallel light, and then is focused on the light quantity measuring device 103 by the condenser lens 102. Then, the second optical element 107 is moved in the X, Y, and Z directions by the position adjusting mechanism 105 via the gripping jig 104 while detecting the light amount (intensity) of the imaged emitted light Lout. Adjust the optical axis position. At this time, in order to efficiently couple the exit port of the first optical element 106 and the optical waveguide 107a formed in the second optical element 107, the light quantity of the outgoing light Lout that has passed through the optical waveguide 107a is maximized. In this manner, the optical axis positions of the first and second optical elements 106 and 107 are adjusted.
[0006]
[Problems to be solved by the invention]
However, as shown in FIG. 15, since the light receiving lens 101 is disposed on the optical axis of the optical waveguide 107a formed in the second optical element 107, the detection optical system 100 includes other than the optical waveguide 107a (for example, The outgoing light Lex propagating through the clad) and emitted from the second optical element 107 is also incident. Therefore, the light quantity measuring device 103 measures the light quantity of the outgoing light Lex in addition to the outgoing light Lout propagated through the optical waveguide 107a which is originally necessary for active alignment. Hereinafter, the emitted light Lout and Lex measured by the conventional light quantity measuring apparatus 103 will be described with reference to FIG. Note that FIG. 16 illustrates the output measured by the light quantity measuring device 103 by combining the emitted light Lout and Lex and the respective emitted light with respect to the movement distance (horizontal axis) of the second optical element 107 in the X or Y direction. It is a graph which shows the relationship of the light quantity (vertical axis) with incident light Lout + Lex.
[0007]
In FIG. 16, the light amount transition of the emitted light Lout and Lex has a point at which the light amount becomes maximum with respect to the different moving distances of the second optical element 107. Then, the light quantity measuring device 103 measures the light quantity of the outgoing light Lout + Lex in which the above-mentioned light quantity transitions of the outgoing light Lout and Lex are combined. The maximum light amount point of the light amount of the emitted light Lout + Lex is generated at the same movement distance as the point where the light amount of the emitted light Lout becomes the maximum. However, the light quantity of the outgoing light Lout + Lex is a combination of the light quantities of two outgoing lights having points at which the light quantity is maximum for different moving distances. Peak points may occur. Therefore, the conventional optical element adjustment apparatus may erroneously detect the local light quantity peak point in the process of adjusting the optical axis position so that the light quantity measured by the light quantity measuring apparatus 103 is maximized. In this case, the optical axis is poorly adjusted, and the tact time is reduced due to the correction.
[0008]
The conventional optical element adjustment apparatus detects the maximum light amount point in the X or Y direction by moving the second optical element 107 in the direction in which the light amount increases, and then the light amount is maximized when the light amount starts to decrease. This is performed by a so-called hill climbing method in which the second optical element 107 is returned to the point. However, when the maximum light amount point in the XY plane is detected by this hill-climbing method, it is necessary to measure the light amount many times, and it takes a long time to adjust the second optical element 107 at the maximum light amount point. It was. In the positioning in the Z direction, the second optical element 107 is moved by a predetermined distance in the Z direction, and the operation for detecting the maximum light amount point in the XY plane at the Z coordinate is repeated. The number of times increases. Further, there is a possibility that the first and second optical elements 106 and 107 come into contact with each other and are damaged during detection of the maximum light amount point in the XY plane at the Z coordinate. Also, if the amount of movement of the second optical element 107 is increased in order to reduce the number of times of light measurement, the light amount may be measured beyond the maximum light amount point, and the position cannot be accurately adjusted to the maximum light amount point. was there.
[0009]
Further, in order for the light quantity measuring device 103 in the conventional optical element adjusting apparatus to accurately measure the emitted light Lout, the emitted light Lout must be imaged on a light receiving element (not shown) of the light quantity measuring device 103. Therefore, it is necessary to adjust the position before the optical axis adjustment work so that the outgoing light Lout accurately enters the detection optical system 100. However, the spot diameter of the outgoing light Lout emitted from the optical waveguide 107a of the second optical element 107 is very small as about 3 μm because the optical waveguide 107a has a very small diameter, and there is a method for specifying the position of the spot. Therefore, it is difficult to adjust the position of the detection optical system 100 to the spot position.
[0010]
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an optical element adjustment method and apparatus for adjusting the optical axis of each optical element with high accuracy in a short time when optical connection is made by adjusting the positional relationship between the optical elements. And an optical element manufacturing method using the method.
[0011]
[Means for Solving the Problems]
In order to achieve the above object, the present invention has the following features.
The optical element adjustment method of the present invention includes a first optical element serving as a light source, a second optical element that propagates light emitted from the first optical element inside an optical waveguide formed therein, and Adjust the positional relationship. The optical element adjustment method includes a step of causing light to enter the detection optical system, a step of measuring the amount of light, a step of detecting an optical axis shift and interval, and a step of adjusting the positional relationship. The step of causing the light to enter the detection optical system includes the step of emitting light from the first optical element through the inside of the optical waveguide of the second optical element and exiting the first optical output. Light that is emitted outside the emission range of the second emitted light that is propagated and emitted from the outside enters the detection optical system. The step of measuring the amount of light measures the amount of the first outgoing light incident on the detection optical system. In the step of detecting the optical axis deviation and the interval, the optical axis deviation and the interval between the first and second optical elements are detected based on the light amount of the first emitted light. The step of adjusting the positional relationship adjusts the positional relationship between the first and second optical elements based on the optical axis deviation and the interval.
[0012]
According to the configuration of the present invention described above, the amount of light is measured using only the first outgoing light that is propagated and emitted inside the optical waveguide that is originally required for active alignment. It is possible to remove a local light amount peak point due to the second emitted light that is propagated and emitted. This prevents erroneous adjustment to the maximum light amount point.
[0013]
The step of causing the light to enter the detection optical system includes at least part of the light receiving lens included in the detection optical system for receiving the light outside the spread angle of the second emitted light and the first You may arrange | position so that it may be contained in the area | region within the spreading angle of emitted light. Thereby, the light receiving lens is not disposed on the optical axis of the optical waveguide, and is disposed outside the spread angle of the second emitted light and in the light receiving region within the spread angle of the first emitted light. It is possible to easily receive only the first outgoing light and guide only the first outgoing light into the detection optical system.
[0014]
Furthermore, a step of observing the state of the emitted light and a step of adjusting the position of the detection optical system may be included. In the step of observing the state of the emitted light, the state of the first emitted light incident on the detection optical system is observed. The step of adjusting the position of the detection optical system adjusts the position of the detection optical system with respect to the second optical element based on the state of the first emitted light. As a result, in the position adjustment of the detection optical system for adjusting the optical axes of the first and second optical elements, the light is incident through the light receiving lens so that only the first emitted light is accurately incident on the detection optical system. By observing the emitted light (for example, the position and focus state where the emitted light is displayed), the position of the detection optical system can be adjusted so that the light quantity measurement is in the best state. Can be done.
[0015]
Further, in the step of detecting the optical axis deviation and the interval, the light quantity of the first outgoing light is approximated by a function of coordinates in a plane perpendicular to the optical axis of the first optical element, and a coefficient value of the function is calculated. Thus, the optical axis deviation between the first and second optical elements may be detected. In this case, in the step of adjusting the positional relationship, the positional relationship between the first and second optical elements is adjusted using the coefficient value as target coordinates for adjusting the positional relationship between the first and second optical elements on the plane. To do. As a result, the light quantity measurement points in the plane can be reduced, so that the movement of the optical element and the number of light quantity measurements can be greatly reduced, and the light quantity maximum point search and adjustment time can be shortened. In addition, since the maximum light intensity point on the plane can be specified including coordinates other than the light intensity measurement point, even if the amount of movement is increased and the light intensity is measured by skipping the maximum light intensity point, the maximum light intensity point is accurately searched. It is possible to improve the search and adjustment accuracy.
[0016]
Further, in the step of detecting the optical axis deviation and the interval, the interval in the optical axis direction of the first and second optical elements is emitted from the first optical element with the light quantity and coefficient value of the first outgoing light. You may calculate by approximating with the function with the spot size of emitted light. In this case, in the step of adjusting the positional relationship between the first and second optical elements, the position adjustment of the distance in the optical axis direction of the first and second optical elements is performed based on the distance approximated by the function. I do. As a result, the distance between the first and second optical elements at the location can be calculated using the coefficient value, the light amount, and the spot size calculated using the coordinate function in the plane. As a result, the movement for bringing the first and second optical elements closer can be positioned at a time, so that the optical axis adjustment time can be greatly shortened and the adjustment can be performed with high accuracy. In addition, since the distance between the first and second optical elements can be immediately specified, damage to the first or second optical element due to contact with the optical element can be prevented.
[0017]
In addition, this invention is realizable also as an optical element adjustment apparatus which has the function to perform each process in the optical element adjustment method mentioned above. The present invention can also be realized as an optical element manufacturing method using the above-described optical element adjustment method.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
(First embodiment)
With reference to FIG. 1 and FIG. 2, the optical element manufacturing method which concerns on the 1st Embodiment of this invention is demonstrated. In the production of the optical element of the present invention, a first optical element constituted by a light emitting element such as a semiconductor laser, or an optical waveguide, an optical fiber, or an optical fiber array that is connected to the semiconductor laser or the like and can emit light Then, the optical unit is manufactured by bonding the second optical element composed of an optical waveguide substrate or the like whose optical axis position is adjusted to the first optical element. FIG. 1 is a functional block diagram showing a configuration of an optical element adjustment apparatus used for optical axis adjustment of the first and second optical elements, and FIG. 2 is a flowchart showing an overall operation procedure of the optical element manufacturing method. It is.
[0019]
In FIG. 1, the optical element adjustment device includes a light receiving lens 2, condenser lenses 3 and 6, a light amount measuring device 4, a half mirror 5, an image sensor 7, a display device 8, a control device 9, a gripping jig 10, and a position. An adjustment mechanism 11 is provided. Then, the optical element adjusting device adjusts the optical axis position between the first and second optical elements 12 and 13 and performs active alignment to optically connect the first and second optical elements 12 and 13. 13 is joined and fixed. Here, the first optical element 12 includes a light emitting element such as a semiconductor laser, or an optical waveguide, an optical fiber, or an optical fiber array that is connected to the semiconductor laser or the like and can emit light. The second optical element 13 is a first optical element 12 The optical waveguide substrate is formed with a small-diameter optical waveguide 13a whose optical axis position is adjusted.
[0020]
As described in the prior art, the light L emitted from the first optical element 12 propagates through the optical waveguide 13a formed in the second optical element 13 and is emitted except for the output light Lout and the optical waveguide 13a. The light is emitted from the second optical element 13 as outgoing light Lex propagating through (for example, cladding). The light receiving lens 2 is arranged outside the emission region of the outgoing light Lex and inside the outgoing region of the outgoing light Lout. Details of the arrangement method of the light receiving lens 2 will be described later. The light receiving lens 2 is disposed in the above-described region, so that the second optical element 13 Only the emitted light Lout emitted from the light is received, and the emitted light is converted into substantially parallel light and emitted. The substantially parallel light is branched by the half mirror 5, enters the condenser lens 3 by passing through the half mirror 5, and enters the condenser lens 6 by reflecting the half mirror 5. The condensing lens 3 condenses and emits substantially parallel light transmitted through the half mirror 5. The light quantity measuring device 4 includes a power meter that receives the collected light emitted from the condenser lens 3 and measures the light quantity (intensity) of the light. On the other hand, the condensing lens 6 condenses and emits substantially parallel light reflected by the half mirror 5. The imaging device 7 is configured by a CCD (Charge Coupled Device) camera or the like, and receives the collected light emitted from the condenser lens 6 and images the state of the light. Hereinafter, the light receiving lens 2, the condenser lenses 3 and 6, the light amount measuring device 4, the half mirror 5, and the image sensor 7 are collectively referred to as a detection optical system 1.
[0021]
The display device 8 is configured by a monitor or the like connected to the image sensor 7 and displays the state of light captured by the image sensor 7. The gripping jig 10 grips the second optical element 13 and is moved in the X, Y, and Z directions in the figure by the position adjusting mechanism 11, whereby the second optical element 12 is moved with respect to the first optical element 12. 13 optical axis positions are adjusted and optically connected to each other. The control device 9 receives the light amount data from the light amount measuring device 4 and the position. Adjustment Using the coordinate data of the second optical element 13 from the mechanism 11, the optical axes of the first and second optical elements 12 and 13 are adjusted to control the operation of the position adjusting mechanism 11. The X direction indicates a direction perpendicular to the paper surface of FIG. 1, the Y direction indicates the up and down direction of FIG. 1, and the Z direction indicates the left and right direction of FIG. 1 (first and second optical elements). The direction in which the joint end faces of the elements 12 and 13 are brought closer is shown.
[0022]
Next, an overall operation procedure of the optical element manufacturing method will be described with reference to FIG. First, the second optical element 13 is gripped by the gripping jig 10 (step S1), and the gripping jig 10 is moved by using the position adjusting mechanism 11, whereby the second optical element 13 with respect to the optical axis of the first optical element 12 is moved. The coarse position of the optical element 13 is adjusted (step S2). In step S2, for example, the light formed on the second optical element 13 with respect to the optical axis of the first optical element 12 by using shape recognition by image processing or the like in an image processing apparatus (not shown). The light propagation direction of the waveguide 13a is parallel, and one end of the optical waveguide 13a formed on the first optical element 12 side is disposed within the spread angle of the outgoing light L of the first optical element 12. The coarse position is adjusted. Then, a light source such as a semiconductor laser included in the first optical element 12 is caused to emit light, and emitted light L is emitted from the first optical element 12 (step S3). By emitting the emitted light L from the first optical element 12 in step S3, the emitted light Lout is emitted from the other end of the optical waveguide 13a, and the emitted light Lex is emitted from other than the other end of the optical waveguide 13a.
[0023]
Next, the position of the light receiving lens 2 in the detection optical system 1 is adjusted (step S4). The detailed adjustment method in step S4 will be described later.
[0024]
Next, the optical element adjustment device whose position has been adjusted in step S4 adjusts the optical axes of the first and second optical elements 12 and 13 by active alignment (step S5). The detailed method of adjusting the optical axis in step S5 will be described later.
[0025]
Next, the end face coupling surfaces are fixed to the first and second optical elements 12 and 13 for which the optical adjustment in step S5 has been completed (step S6). In step S6, the first and second optical elements 12 and 13 are fixed in a state where the optical axis is adjusted in step S5 using a predetermined adhesive. For example, an optical adhesive is applied and cured so as to cover the end surface coupling portions with the first and second optical elements 12 and 13 from the respective side surfaces. Here, it is conceivable that the optical adhesive penetrates into the end face coupling portion with the first and second optical elements 12 and 13, and therefore the optical adhesive prevents the optical coupling 13a from decreasing in coupling efficiency. It is preferable to use one having the same refractive index as that of the core. Further, before adjusting the optical axes of the first and second optical elements 12 and 13, an optical adhesive having a refractive index matching in advance is finely applied to at least the end face coupling surface of the first or second optical element 12 or 13. A predetermined amount may be applied and the optical axis adjusted as described above may be cured as it is. In addition, when the first and second optical elements 12 and 13 cannot be fixed with an adhesive, the adhesive may be applied to other members and fixed to each other via the members. For example, when the second optical element 13 is fixed to the first optical element 12 previously mounted on the substrate, an adhesive is applied on the substrate before the optical axis adjustment, and the above optical After adjusting the axis, it may be cured as it is, and the substrate and the second optical element 13 may be fixed. As described above, by fixing the first and second optical elements 12 and 13 after the optical axis adjustment, the two optical elements whose optical axes are accurately adjusted function as one unit.
[0026]
Hereinafter, the position adjustment of the detection optical system 1 in step S4 will be described with reference to FIGS. FIG. 3 is a schematic diagram for explaining the arrangement position of the light receiving lens 2 with respect to the emitted light Lout and Lex, and FIG. 4 shows an example of the state of light displayed on the display device 8 used in step S4. FIG.
[0027]
In FIG. 3, the outgoing light Lout propagating through the optical waveguide 13a is emitted from the optical waveguide 13a formed with a small diameter, and thus exhibits a large spread angle due to diffraction. On the other hand, the outgoing light Lex that propagates and exits other than the optical waveguide 13a is shallow total reflection light or the like in the second optical element, and therefore has a small spread angle. Here, as shown in FIG. 3, the second optical element 13 is configured by sandwiching the optical waveguide 13a with other members having widths a and b (where a <b) in the Y direction. Suppose that the divergence angle of the emitted light Lout is θ1, the divergence angle of the emitted light Lex1 emitted from the member having the width a is θ2, and the emitted light emitted from the member having the width b on the basis of the optical axis of the optical waveguide 13a. Let the spread angle of Lex2 be θ3. Under the above assumption, the spread angles θ1 to θ3 have a relationship of θ1>θ2> θ3. Utilizing such a difference between the spread angles of the emitted light Lout and Lex, the light receiving lens 2 is outside the spread angles θ2 and θ3 regions of the emitted light Lex1 and Lex2, and within the spread angle region θ1 of the emitted light Lout. It arrange | positions so that it may be contained in the light-receiving area | region (alpha) used as. In addition, the light receiving lens 2 may be disposed outside the regions of the spread angles θ2 and θ3 of the emitted light Lex1 and Lex2 at least partially included in the light receiving region α. When the Y direction in FIG. 3 is considered, the light receiving region α is formed in the vertical direction of the drawing, but the light receiving region α is widely obtained in the direction in which the width b of the member is wide. That is, in order to efficiently receive only the emitted light Lout by the light receiving lens 2, it is preferable to dispose the light receiving lens 2 in the light receiving region α formed on the member side having the width b. Since the light receiving region α is also formed in a direction other than the Y direction in FIG. 3 (for example, the X direction), the light receiving lens 2 is disposed so as to be at least partially included in the light receiving region α in the other direction. Needless to say, you can.
[0028]
Further, the focal length f of the light receiving lens 2 must be able to be arranged in the light receiving region α described above. That is, it is necessary to satisfy the focal distance f that is farther from the point P (intersection of the emitted light Lout and the emitted light Lex2) that is closest to the second optical element 13 in the light receiving region α. Here, if the center of the emission end face of the optical waveguide 13a is O and the distance from the point P to the center O is s, then f> s. Where the distance s is
s = b / {cos θ1 (tan θ1-tan θ3)}
Indicated by
[0029]
In order to arrange the light-receiving lens 2 in such a light-receiving region α, in this embodiment, the state of the emitted light Lout captured by the image sensor 7 and displayed on the display device 8 is monitored to adjust the position of the detection optical system 1. I do. In the detection optical system 1 of the present invention, the internal components 2 to 7 are fixedly arranged in advance, and the light receiving lens 2 is moved by adjusting the position of the entire detection optical system 1. Can do.
[0030]
In FIG. 4, the angle θq between the optical axes of the optical waveguide 13a and the light-receiving lens 2 and the light-receiving lens from the center O are located at predetermined positions where only the best amount of emitted light Lout is obtained in the light-receiving region α. In the light receiving lens 2 arranged by adjusting the distance to the center of 2, the coordinates on the display device 8 on which the emitted light Lout imaged through the light receiving lens 2 is displayed are stored in advance as the predetermined position coordinates Q. Keep it. In the subsequent position adjustment of the detection optical system 1, after the angle of the optical axis of the light receiving lens 2 is adjusted to the angle θq, the image is picked up by the image sensor 7 through the light receiving lens 2 and displayed on the display device 8. The position of the detection optical system 1 is adjusted so that the position of the emission light Lout coincides with the predetermined position coordinate Q and the displayed emission light Lout is correctly focused. Note that such position adjustment of the detection optical system 1 may be performed at least once according to the type (model) of the optical element that performs optical axis adjustment. Thus, by adjusting the position of the detection optical system 1 so that the display position and focus of the emitted light Lout displayed on the display device 8 are optimal, the light quantity measurement can be performed in the best state. Further, the position adjustment of the detection optical system 1 can be performed easily and accurately. Furthermore, by arranging the light receiving lens 2 in the light receiving region α described above, outgoing light Lex that is not originally required for active alignment does not enter the light amount measuring device 4. As a result of actual measurement and comparison between the optical element adjustment device according to the present embodiment and the conventional optical element adjustment device, the present inventor found that the ratio (SN ratio) between the outgoing light Lout (signal) and the outgoing light Lex (noise). ) Has been confirmed to be improved by a factor of 2.5 by the arrangement of the detection optical system 1 described above.
[0031]
Hereinafter, with reference to FIG. 5 and FIG. 6, the details of the optical axis adjustment processing in step S5 will be described. FIG. 5 is a subroutine of step S5 showing the operation procedure of the optical axis adjustment processing, and FIG. 6 explains the Z-direction coordinates between the end faces that are optically connected in the first and second optical elements 12 and 13. It is the side surface schematic diagram which expanded the end surface vicinity for doing.
[0032]
5 and 6, the control device 9 sets the coordinate Zi in the Z direction (i is a natural number) of the end face optically connected to the second optical element 13 at the time when the step S4 is ended as an initial coordinate Z1 ( Step S11). Then, the process proceeds to the next step.
[0033]
Next, the control device 9 uses the light quantity measuring device 4 and the position adjusting mechanism 11 to detect a point where the light quantity of the emitted light Lout is maximum in the X and Y directions in the coordinate Zi, and the light quantity maximum. The second optical element 13 is moved to the point (step S12). Hereinafter, with reference to FIG. 7 and FIG. 8, the detailed processing operation of step S12 performed by the control device 9 will be described. 7 is a subroutine showing a processing procedure for moving the second optical element 13 to the maximum light amount point in the X and Y directions, and FIG. 8 is a second flowchart for explaining the processing of FIG. It is a graph which shows the relationship between the movement distance (horizontal axis) of the optical element 13, and the light quantity (vertical axis) of the emitted light Lout.
[0034]
In FIG. 7, the control device 9 instructs the position adjustment mechanism 11 to move the second optical element 13 by a predetermined distance in the X direction (bidirectional perpendicular to the paper surface in FIG. 6) at the coordinate Zi. The light quantity distribution in the X direction is created using the result of measuring the light quantity of the emitted light Lout at the point where the light quantity measuring device 4 has moved (step S101). In the light amount distribution in the X direction, the light amount change of the emitted light Lout has a relationship as shown in FIG. Then, the control device 9 detects the point where the emitted light Lout is maximum in the light amount distribution in the X direction created in step S101, and uses the position adjustment mechanism 11 to indicate the maximum light amount point in the X direction. The second optical element 13 is moved to (step S102).
[0035]
Next, the control device 9 moves the second optical element 13 in the Y direction (up and down bidirectional in FIG. 6) at the coordinate Zi and the X coordinate indicating the maximum light quantity point detected at step S102 with respect to the position adjustment mechanism 11. ) Is moved by a predetermined distance, and a light amount distribution in the Y direction is created using the result of measuring the light amount of the emitted light Lout at each point where the light amount measuring device 4 has moved (step S103). Even in the light amount distribution in the Y direction, the change in the light amount of the emitted light Lout has a relationship as shown in FIG. Then, the control device 9 detects the point at which the emitted light Lout is maximum in the light amount distribution in the Y direction created in step S103, and uses the position adjustment mechanism 11 to indicate the maximum light amount point in the Y direction. The second optical element 13 is moved to (Step S104), and the processing by the subroutine is finished. That is, the control device 9 moves the second optical element 13 to the maximum light amount point on the XY plane at the coordinate Zi by the processing of steps S101 to S104.
[0036]
Returning to FIG. 5 and FIG. 6, the control device 9 uses the light amount at the maximum light amount point on the XY plane in the coordinate Zi detected in step S12 to change the light amount with respect to the light amount detected in the immediately preceding step S12. Is calculated, and it is determined whether or not the amount of change in light quantity is equal to or less than a predetermined value (step S13). The amount of the emitted light Lout increases as the distance between the end surfaces of the first and second optical elements 12 and 13 decreases and the absolute amount of light at the incident end surface of the second optical element 13 increases. Further, the light amount of the emitted light Lout decreases as the distance between the end faces decreases. Therefore, in step S13, the control device 9 detects the amount of light quantity change when the end surfaces approach each other. If the amount of change is close to 0, the amount of light propagated through the optical waveguide 13a in the Z direction is maximized. Judged as a point (coordinate Z0). Then, the control device 9 sets the predetermined value close to 0, so that if the amount of change in light quantity is larger than the predetermined value in step S13, the first and second optical elements 12 and 13 are still end-coupled Z. It is determined that the maximum light quantity point Z0 in the direction has not been reached, and the process proceeds to the next step S15. On the other hand, if the amount of light change is not more than the predetermined value in step S13, the control device 9 determines that the light amount maximum point Z0 in the Z direction for connecting the first and second optical elements 12 and 13 to the end face has been reached. The first and second optical elements 12 and 13 are adjusted to the maximum light amount point Z0 in the Z direction (step S17), and the process proceeds to the next step S18.
[0037]
In step S <b> 15, the control device 9 moves the second optical element 13 in the Z direction by a predetermined movement distance ΔZ so as to approach the first optical element 12 using the position adjustment mechanism 11. The control device 9 sets a new coordinate Zi by incrementing the variable i of the current coordinate Zi by +1 (step S16), and returns to step S12 to repeat the process.
[0038]
In step S18, the control device 9 uses the light amount measuring device 4 and the position adjusting mechanism 11 to detect the point at which the light amount of the emitted light Lout becomes maximum with respect to the XY plane at the maximum light amount point Z0 in the Z direction. Then, the second optical element 13 is moved to the maximum light amount point, and the processing by the optical axis adjustment processing subroutine is completed. The detailed processing operation performed in step S18 is the same as that in steps S101 to S104 described above, and detailed description thereof is omitted.
[0039]
Thus, in the first embodiment, the light receiving lens 2 is not disposed on the optical axis of the optical waveguide 13a, but is disposed in the light receiving region α where only the emitted light Lout that is originally required for active alignment is emitted. It is possible to remove the emitted light Lex that has propagated through other than the optical waveguide 13a that causes a local light peak point (see FIG. 16). This prevents erroneous adjustment to the maximum light amount point. Further, in the position adjustment of the detection optical system 1 for adjusting the optical axes of the first and second optical elements 12 and 13, the light receiving lens is used so that only the emitted light Lout is accurately incident on the detection optical system 1. The position of the detection optical system 1 is adjusted so that the light quantity measurement is in the best state by monitoring the position and focus state for displaying the outgoing light Lout imaged through 2, so that the adjustment can be performed easily and in a short time. Can be done.
[0040]
In the description of the first embodiment, the optical axis position is adjusted with respect to the first optical element 12 by moving the second optical element 13, but the optical axis is adjusted by moving the first optical element 12. You can adjust the position. In the description of the first embodiment, the control device 9 is used to control the movement of the second optical element 13, but a manual moving mechanism based on the light amount value displayed on the light amount measuring device 4. It goes without saying that the second optical element 13 may be moved using Furthermore, the condenser lens 3 and the light quantity measurement Dress A pinhole 14 (see FIG. 9) is installed between the second optical element 13 and the light quantity measuring device 4 measures the quantity of light using only the emitted light Lout that has passed through the pinhole. Unnecessary outgoing light (for example, stray light or wide-angle outgoing light) that is emitted can be deleted, and the effect of the first embodiment can be further improved by improving the accuracy of the detection optical system 1. it can.
[0041]
(Second Embodiment)
Next, an optical element manufacturing method according to the second embodiment of the present invention will be described. The optical element manufacturing method is different from the optical element manufacturing method according to the first embodiment described above in the movement process to the maximum light amount point in the X and Y directions. The configuration of the optical element adjustment device used for optical axis adjustment of the first and second optical elements in the second embodiment is the same as the functional block diagram of the first embodiment described with reference to FIG. The overall operation procedure of the optical element manufacturing method and the position adjustment of the detection optical system 1 are the same as the flowchart of the first embodiment and the arrangement position of the detection optical system 1 described with reference to FIGS. is there. Therefore, in the second embodiment, the same reference numerals are assigned to the same functional blocks and processing steps in the overall operation procedure of the configuration of the optical element adjustment device and the optical element manufacturing method, and detailed description thereof is omitted. .
[0042]
Next, details of the optical axis adjustment processing in the optical element adjustment method according to the second embodiment will be described. The operation procedure of the optical axis adjustment process is the same as that in steps S12 and S18 in the X and Y directions with respect to the subroutine showing the operation procedure of the optical axis adjustment process described in the first embodiment with reference to FIG. Only the detailed processing operation of the movement processing to the maximum light amount point is different. Therefore, in the optical axis adjustment processing in the optical element adjustment method according to the second embodiment, the same processing steps are denoted by the same reference numerals, and detailed description thereof is omitted. Further, the Z-direction coordinates between the end faces that are optically connected in the first and second optical elements 12 and 13 in the second embodiment are also the same as those in the Z-direction described in the first embodiment with reference to FIG. Since it is the same as that of the side schematic diagram in which the vicinity of the end surface for explaining the coordinates is enlarged, detailed description is omitted.
[0043]
Next, with reference to FIGS. 10 to 12, a detailed processing operation of the movement process to the maximum light amount point in the X and Y directions in the above steps S12 and S18 performed by the control device 9 will be described. 10 is a subroutine showing a processing procedure for moving the second optical element 13 to the light quantity maximum point in the X and Y directions, and FIG. 11 is an XY for explaining the processing of FIG. FIG. 12 is a diagram showing light quantity measurement points on a plane, and FIG. 12 is a diagram illustrating position coordinates (first and second axes) of the second optical element 13 in the X and Y directions for explaining the processing of FIG. It is a graph which shows the relationship with light quantity (3rd axis | shaft).
[0044]
In FIG. 10, the control device 9 sets m and n (m and n are natural numbers), which are temporary variables used in the subroutine, to 1 respectively (step S201). Then, the process proceeds to the next step.
[0045]
Next, the control device 9 moves the second optical element 13 with respect to the position adjusting mechanism 11 at the coordinate Zi in the X direction (bidirectional perpendicular to the paper surface in FIG. 6) and the Y direction (upper and lower bidirectional in FIG. 6). Is instructed to move to a predetermined position coordinate (X, Y) = (Xm, Yn), and the position coordinate (Xm, Yn) moved by the light quantity measuring device 4 is used as a light quantity measurement point. The light quantity I (Xm, Yn) of the emitted light Lout is measured (step S202). Here, with reference to FIG. 11, the position coordinates (Xm, Yn) on the XY plane indicated by the control device 9 will be described.
[0046]
In FIG. 11, the control device 9 sets position coordinates (Xm, Yn) on a matrix obtained by dividing the XY plane into M pieces in the X direction and N pieces in the Y direction. That is, the control device 9 sets M × N XY coordinates (Xm, Yn) with respect to the XY plane, and uses each position coordinate (Xm, Yn) as a light quantity measurement point to output light. The light quantity I (Xm, Yn) of Lout is measured, and the position coordinates (Xm, Yn) and the light quantity I (Xm, Yn) are stored in association with each other. The position coordinates (Xm, Yn) are set differently each time the temporary variables m and n described above are changed.
[0047]
Returning to FIG. 10, the control device 9 determines whether or not the current temporary variable m is equal to the set number M in the X direction described above (step S203). If the temporary variable m is not equal to the set number M in step S203, the control device 9 sets a new temporary variable m by incrementing the current temporary variable m by 1 (step S204), and the step S202. Return to and repeat the process. On the other hand, if the temporary variable m is equal to the set number M in step S203, the control device 9 proceeds to the next step S205.
[0048]
In step S205, the control device 9 determines whether or not the current temporary variable n is equal to the set number N in the Y direction described above. In step S205, when the temporary variable n is not equal to the set number N, the control device 9 sets the current temporary variable m to 1 and increments the current temporary variable n by +1. To set a new temporary variable n (step S206), and return to step S202 to repeat the process. On the other hand, if the temporary variable n is equal to the set number N in step S205, the control device 9 proceeds to the next step S207.
[0049]
In step S207, the control device 9 solves the approximate expression of the light amount I (X, Y) with respect to the XY coordinates using the data measured in step S202 (step S207). Here, as shown in FIG. 12, the light quantity I on the XY plane can be approximated by a Gaussian distribution, and the light quantity maximum point is indicated by a certain XY coordinate (X, Y). When such approximation is expressed by an equation, the light amount I (X, Y) in the XY coordinates is
I (X, Y) = A · exp {B (X−C) ² + D (Y-E) ² } ... (1)
It can be expressed by the approximate expression of Here, A to E in the above formula (1) are constants. In step S202, the control device 9 stores the light quantity I (Xm, Yn) in association with a plurality of different position coordinates (Xm, Yn). The control device 9 calculates the constants A to E by substituting these position coordinates (Xm, Yn) and the light quantity I (Xm, Yn) into the above equation (1) using the least square method. . In order to calculate these constants A to E, the control device 9 sets the number of set M and N so that the number M × N of the light quantity measurement points with respect to the XY plane is 5 or more. Set. And the control apparatus 9 calculates the constants C and E of the said Formula (1), XY coordinate (X, Y) = (C, E) is a coordinate which shows a light quantity maximum point, The coordinate (C , E) is estimated to be the maximum value A.
[0050]
Returning to FIG. 10, the control device 9 positions the second optical element 13 at the coordinates (X, Y) = (C, E) indicating the maximum light amount point on the XY plane calculated in step S <b> 207. (Step S208), and the process according to the subroutine ends.
[0051]
As described above, the optical axis adjustment in the Z direction in the second embodiment is the same as that in the first embodiment. In the second embodiment, after moving by a predetermined distance ΔZ in the Z direction, the step S201 is performed. By repeating the movement process to the maximum light amount point on the XY plane described in S208, the Z coordinate is finally adjusted to the maximum light amount point on the XY plane with respect to Z0. The optical axis adjustment processing of the second optical elements 12 and 13 is completed.
[0052]
Thus, in the second embodiment, in addition to the effects of the first embodiment described above, the light intensity measurement point on the XY plane can be searched for the maximum light intensity point at M × N points. The movement of the second optical element 13 and the number of times of light quantity measurement can be greatly reduced, and the light quantity maximum point search and adjustment time can be shortened. In addition, since the maximum light intensity point on the XY plane can be specified including coordinates other than the light intensity measurement point, the maximum light intensity point can be accurately measured even if the amount of movement is increased and the light intensity is measured by jumping over the maximum light intensity point. Can be searched, and the search and adjustment accuracy can be improved.
[0053]
In the description of the second embodiment, the optical axis position adjustment with respect to the first optical element 12 is performed by moving the second optical element 13, but the optical axis is adjusted by moving the first optical element 12. You can adjust the position. In the description of the second embodiment, the control device 9 is used to control the movement of the second optical element 13, but a manual moving mechanism based on the light amount value displayed on the light amount measuring device 4. It goes without saying that the second optical element 13 may be moved using Furthermore, the condenser lens 3 and the light quantity measurement Dress A pinhole 14 (see FIG. 9) is installed between the second optical element 13 and the light quantity measuring device 4 measures the quantity of light using only the emitted light Lout that has passed through the pinhole. Unnecessary outgoing light (for example, stray light or wide-angle outgoing light) that is emitted can be deleted, and the effect of the second embodiment can be further improved by improving the accuracy of the detection optical system 1. it can.
[0054]
(Third embodiment)
Next, an optical element manufacturing method according to the third embodiment of the present invention will be described. The optical element manufacturing method is different from the optical element manufacturing method according to the first embodiment described above in the optical axis adjustment process. The configuration of the optical element adjustment device used for optical axis adjustment of the first and second optical elements in the third embodiment is the same as the functional block diagram of the first embodiment described with reference to FIG. The overall operation procedure of the optical element manufacturing method and the position adjustment of the detection optical system 1 are the same as the flowchart of the first embodiment and the arrangement position of the detection optical system 1 described with reference to FIGS. is there. Therefore, in the third embodiment, the same functional blocks and processing steps in the configuration of the optical element adjustment apparatus and the entire operation procedure of the optical element manufacturing method are denoted by the same reference numerals, and detailed description thereof is omitted. .
[0055]
Next, the details of the optical axis adjustment processing in the optical element adjustment method according to the third embodiment will be described with reference to FIGS. FIG. 13 is a subroutine of step S5 (see FIG. 2) showing the operation procedure of the optical axis adjustment processing according to the third embodiment. FIG. 14 shows the optical connection in the first and second optical elements 12 and 13. It is the side surface schematic diagram which expanded the end surface vicinity for demonstrating the coordinate of Z direction between the end surfaces to perform, and distance, and the schematic diagram for demonstrating the beam spot size in these end surfaces.
[0056]
In FIG. 13, the control device 9 uses the light amount measuring device 4 and the position adjusting mechanism 11 to detect the point at which the light amount of the emitted light Lout becomes maximum with respect to the X and Y directions in the current coordinate Z1 in the Z direction. Then, the second optical element 13 is moved to the maximum light amount point (step S21). The detailed processing operation performed in step S21 is the same as steps S201 to S208 described in the second embodiment with reference to FIG. By the process of step S21, the control device 9 can approximate the light quantity I (X, Y) in the XY coordinates described in the second embodiment as described above.
I (X, Y) = A · exp {B (X−C) ² + D (Y-E) ² } ... (1)
, The constants A to E are calculated, and the second optical element 13 is moved to the position coordinates (X, Y) = (C, E) in the Z coordinate Z1.
[0057]
Next, the control device 9 calculates a distance D from the Z coordinate Z1 to the end surface coupling coordinate Z0 in the Z direction that couples the first and second optical elements 12 and 13 to the end surface (step S22). Hereinafter, the calculation method of the distance D performed in step S22 will be described.
[0058]
In FIG. 14, the first optical element 12 of the second optical element 13 in which the emitted light L emitted from the first optical element 12 is formed perpendicular to the optical axis of the emitted light L at the Z coordinate Z1. It is assumed that the short radius or the long radius of the spot size of the beam irradiated on the side end face is W1 and H1 in the X and Y directions in the drawing, respectively. The spot sizes W1 and H1 are respectively
W1 = D · λ / (2 · π · n · W0) (2)
H1 = D · λ / (2 · π · n · H0) (3)
It can be expressed as Here, λ is the wavelength of the outgoing light L, π is the circularity, n is the refractive index of the space between the coordinates Z1 and Z0, and W0 and H0 are the beams of the outgoing light L at the end face coupling coordinates Z0. Is the spot size formed in the X and Y directions. When the above equations (2) and (3) are transformed, the distance D is
D = (2 · π · n · W0 · W1) / λ (4)
= (2 · π · n · H0 · H1) / λ (5)
On the other hand, the emitted light Lout emitted from the second optical element 13 at the coordinate Z1 is emitted at the light quantity maximum point (X, Y) = (C, E) at the XY coordinates. Z1) uses the spot sizes W1 and H1,
I (C, E, Z1) / e ² = A · exp {B (W1-C) ² } (6)
I (C, E, Z1) / e ² = A · exp {D (H1-E) ² } (7)
It is represented by Here, A to E are constants used in the above formula (1). When the above formulas (6) and (7) are transformed, the spot sizes W1 and H1 are respectively
W1 = C + {1 / B · ln (I / (A · e ² ))} ... (8)
H1 = E + {1 / D · ln (I / (A · e ² ))} ... (9)
It becomes. By substituting these equations (8) and (9) into the above equations (4) and (5), the distance D is a known value represented by π, n, and λ, and a constant of A to E. And can be calculated using the spot sizes W0 and H0. Here, since the spot sizes W0 and H0 are the end face coupling coordinates Z0, that is, the spot size of the emitted light L in a state where the first and second optical elements 12 and 13 are joined, the emission of the first optical element 12 is performed. This is a known value for the mouth design. As described above, since the constants A to E have already been calculated in step S21, the control device 9 uses the above equations (4), (5), (8), and (9). The distance D can be easily calculated.
[0059]
Returning to FIG. 13, the control device 9 moves the second optical element 13 in the Z direction by the distance D calculated in step S <b> 22 so as to bring the second optical element 13 closer to the first optical element 12 using the position adjustment mechanism 11. The second optical element 13 is adjusted to the end face coupling coordinate Z0 (step S23). And the control apparatus 9 detects the point where the light quantity of the emitted light Lout becomes the maximum with respect to the XY plane in the coordinate Z0 using the light quantity measuring device 4 and the position adjustment mechanism 11, and the light quantity maximum point is reached. The second optical element 13 is moved (step S24), and the processing by the optical axis adjustment processing subroutine is terminated. The detailed processing operation performed in step S24 is the same as that in steps S201 to S208 described above, and detailed description thereof is omitted.
[0060]
Thus, in the third embodiment, in addition to the effects of the first and second embodiments described above, in the XY plane at a certain Z coordinate using the Gaussian distribution described in the second embodiment. The distance between the first and second optical elements 12 and 13 in the Z coordinate can be calculated using the constant calculated in the detection of the maximum light amount point. Thereby, since the movement in the Z direction can be positioned at a time, the optical axis adjustment time can be greatly shortened and the adjustment can be performed with high accuracy. In addition, since the distance between the first and second optical elements 12 and 13 can be specified immediately, damage to the first or second optical element 12 or 13 due to contact with the optical element can be prevented. .
[0061]
In the description of the third embodiment, the optical axis position with respect to the first optical element 12 is adjusted by moving the second optical element 13, but the optical axis is adjusted by moving the first optical element 12. You can adjust the position. In the description of the third embodiment, the control device 9 is used to control the movement of the second optical element 13, but a manual moving mechanism based on the light amount value displayed on the light amount measuring device 4. It goes without saying that the second optical element 13 may be moved using Furthermore, the condenser lens 3 and the light quantity measurement Dress A pinhole 14 (see FIG. 9) is installed between the second optical element 13 and the light quantity measuring device 4 measures the quantity of light using only the emitted light Lout that has passed through the pinhole. Unnecessary outgoing light (for example, stray light or wide-angle outgoing light) that is emitted can be deleted, and the effect of the third embodiment can be further improved by improving the accuracy of the detection optical system 1. it can.
[0062]
【The invention's effect】
As described above, according to the present invention, the detection optical system can be easily positioned in the optical axis adjustment of the optical element, and the positioning based on the light amount can be performed with high accuracy. In addition, since the light quantity measurement point in the XY direction of the optical axis adjustment can be greatly reduced, the movement of the optical element and the number of times of light quantity measurement can be greatly reduced, and the maximum light quantity in the XY direction can be achieved. Point search and adjustment time can be shortened. Furthermore, since the distance between the optical elements in the Z direction of the optical axis adjustment can be calculated, the movement in the Z direction can be positioned at one time, the optical axis adjustment time is further shortened, and the adjustment is performed with high accuracy. Can do.
[Brief description of the drawings]
FIG. 1 is a functional block diagram showing a configuration of an optical element adjustment device used for optical axis adjustment of first and second optical elements according to a first embodiment of the present invention.
FIG. 2 is a flowchart showing an overall operation procedure of the optical element manufacturing method according to the first embodiment of the present invention.
3 is a schematic diagram for explaining an arrangement position of the light receiving lens 2 with respect to outgoing light Lout and Lex in FIG. 1; FIG.
4 is a diagram showing an example of a state of light displayed on the display device 8 of FIG. 1 used in step S4 of FIG.
FIG. 5 is a subroutine showing an operation procedure of optical axis adjustment processing in step S5 of FIG.
6 is an enlarged schematic side view of the vicinity of the end surface for explaining the coordinates in the Z direction between the end surfaces that are optically connected in the first and second optical elements 12 and 13 of FIG. 1. FIG.
7 is a subroutine showing a processing procedure for moving the second optical element 13 to the maximum light amount point in the X and Y directions of FIG.
FIG. 8 is a graph showing the relationship between the moving distance (horizontal axis) of the second optical element 13 and the amount of emitted light Lout (vertical axis) for explaining the processing of FIG. 7;
FIG. 9 is a graph showing the light quantity measurement with the condenser lens 3 in FIG. Dress 4 is a functional block diagram showing a configuration of a pinhole 14 installed between the device 4 and the device 4. FIG.
10 is a subroutine showing a processing procedure for moving the second optical element 13 to the maximum light amount point in the X and Y directions of FIG. 2 according to the second embodiment of the present invention.
11 is a diagram showing light quantity measurement points on the XY plane for explaining the processing of FIG. 10;
12 shows the relationship between the position coordinates (first and second axes) of the second optical element 13 in the X and Y directions and the amount of emitted light Lout (third axis) for explaining the processing of FIG. It is a graph to show.
13 is a subroutine of step S5 in FIG. 2 showing an operation procedure of optical axis adjustment processing according to the third embodiment of the present invention.
14 is an enlarged schematic side view of the vicinity of the end face for explaining the Z-direction coordinates and distance between the end faces that are optically connected in the first and second optical elements 12 and 13 for explaining the processing of FIG. 13; FIG. 3 is a schematic diagram for explaining beam spot sizes at the end faces.
FIG. 15 is a schematic diagram for explaining the configuration of a conventional optical element adjustment apparatus that performs active alignment.
16 is a graph showing the relationship between the light quantity (vertical axis) of the emitted light Lout + Lex with respect to the movement distance (horizontal axis) in the X or Y direction measured by the light quantity measuring apparatus 103 of FIG.
[Explanation of symbols]
1. Detection optical system
2. Light receiving lens
3, 6 ... Condensing lens
4. Light quantity measuring device
5 ... Half mirror
7 ... Image sensor
8 ... Display device
9 ... Control device
10: Holding jig
11 ... Position adjustment mechanism
12: First optical element
13: Second optical element
13a: Optical waveguide
14 ... pinhole

Claims (11)

An optical element adjustment method for adjusting a positional relationship between a first optical element serving as a light source and a second optical element that propagates light emitted from the first optical element through an optical waveguide formed therein. There,
The first optical element propagates through the inside of the optical waveguide of the second optical element and is emitted within the emission range of the first outgoing light that is emitted and propagates outside the optical waveguide. Making the light emitted outside the emission range of the second emitted light enter the detection optical system;
Measuring the amount of the first outgoing light incident on the detection optical system;
Detecting an optical axis shift and an interval between the first and second optical elements based on the amount of the first emitted light;
Adjusting the positional relationship between the first and second optical elements based on the optical axis deviation and the interval. The step of causing the light to enter the detection optical system includes at least part of a light receiving lens included in the detection optical system for receiving light outside the spread angle of the second emitted light, and The optical element adjustment method according to claim 1, wherein the optical element adjustment method is arranged so as to be included in a region within a spread angle of one outgoing light. And observing the state of the first outgoing light incident on the detection optical system;
The optical element adjustment method according to claim 1, further comprising a step of adjusting a position of the detection optical system with respect to the second optical element based on a state of the first emitted light. The step of detecting the optical axis deviation and the interval between the first and second optical elements is a function of coordinates in a plane perpendicular to the optical axis of the first optical element. Approximate and detect the optical axis deviation by calculating the coefficient value of the function,
In the step of adjusting the positional relationship between the first and second optical elements, the coefficient values are set as target coordinates for adjusting the positional relationship between the first and second optical elements in the plane. The optical element adjustment method according to claim 1, wherein the positional relationship of the second optical element is adjusted. The step of detecting the optical axis deviation and the interval between the first and second optical elements includes the step of detecting the interval between the first and second optical elements in the optical axis direction and the light quantity of the first emitted light. Calculating by approximating with a function of the coefficient value and the spot size of the emitted light emitted from the first optical element;
The step of adjusting the positional relationship between the first and second optical elements adjusts the position of the interval in the optical axis direction of the first and second optical elements based on the interval approximated by the function. The optical element adjustment method according to claim 4. An optical element adjustment device that adjusts the positional relationship between a first optical element serving as a light source and a second optical element that propagates light emitted from the first optical element through an optical waveguide formed therein. There,
The first optical element propagates through the inside of the optical waveguide of the second optical element and is emitted within the emission range of the first outgoing light that is emitted and propagates outside the optical waveguide. A detection optical system for detecting light emitted outside the emission range of the second emitted light;
A control unit that detects an optical axis shift and an interval between the first and second optical elements based on a light amount of the first emitted light detected by the detection optical system;
A position adjusting unit that adjusts a positional relationship between the first and second optical elements based on the optical axis deviation and the interval detected by the control unit;
The detection optical system includes:
A light amount measuring unit for measuring the amount of incident light;
A light receiving lens for receiving the light and propagating the received light to the light quantity measuring unit,
An optical element adjustment device, wherein at least a part of the light receiving lens is disposed outside the divergence angle of the second emission light and included in a region within the divergence angle of the first emission light. The control unit approximates the light quantity of the first emitted light by a function of coordinates in a plane perpendicular to the optical axis of the first optical element, and calculates the coefficient value of the first and first functions. Detecting an optical axis misalignment between the two optical elements,
The position adjustment unit adjusts the positional relationship between the first and second optical elements, using the coefficient value as target coordinates for adjusting the positional relationship between the first and second optical elements on the plane. Item 7. The optical element adjustment device according to Item 6. The control unit determines the distance between the first and second optical elements in the optical axis direction, the light amount of the first emitted light, the coefficient value, and the spot size of the emitted light emitted from the first optical element. By approximating with a function of
The optical element adjustment apparatus according to claim 7, wherein the position adjustment unit adjusts the position of the distance between the first and second optical elements in the optical axis direction based on the distance approximated by the function. Adjusting the positional relationship between a first optical element serving as a light source and a second optical element that propagates light emitted from the first optical element through an optical waveguide formed therein;
Fixing the first and second optical elements whose positional relationships are adjusted,
The step of adjusting the positional relationship includes:
The first optical element propagates through the inside of the optical waveguide of the second optical element and is emitted within the emission range of the first outgoing light that is emitted and propagates outside the optical waveguide. Making the light emitted outside the emission range of the second emitted light enter the detection optical system;
Measuring the amount of the first outgoing light incident on the detection optical system;
Detecting an optical axis shift and an interval between the first and second optical elements based on the amount of the first emitted light;
Adjusting the positional relationship between the first and second optical elements based on the optical axis deviation and the interval. The step of detecting the optical axis deviation and the interval between the first and second optical elements is a function of coordinates in a plane perpendicular to the optical axis of the first optical element. Approximate and detect the optical axis deviation by calculating the coefficient value of the function,
In the step of adjusting the positional relationship between the first and second optical elements, the coefficient values are set as target coordinates for adjusting the positional relationship between the first and second optical elements in the plane. The optical element manufacturing method according to claim 9, wherein the positional relationship of the second optical element is adjusted. The step of detecting the optical axis deviation and the interval between the first and second optical elements includes the step of detecting the interval between the first and second optical elements in the optical axis direction and the light quantity of the first emitted light. Calculating by approximating with a function of the coefficient value and the spot size of the emitted light emitted from the first optical element;
The step of adjusting the positional relationship between the first and second optical elements adjusts the position of the interval in the optical axis direction of the first and second optical elements based on the interval approximated by the function. The optical element manufacturing method according to claim 10.

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