JP2003177292A - Lens adjusting device and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To accurately adjust the inclination of a lens and adjust the positional deviation of the optical axis of the lens (perform the positional adjustment of the lens). <P>SOLUTION: In a lens adjusting device 1, a condensing optical system 5 is arranged so that an incident optical axis being the optical axis of incident light (collimated incident light 34) on an objective 2 and a condensing optical axis being the optical axis of the condensing optical system 5 may be aligned with a previously set reference optical axis. Furthermore, by setting a spot where the reference optical axis and the detecting surface 61 of an image pickup device 6 are intersected as a reference position, a lens adjusting part adjusts the objective 2 so that the condensing point of reflected light (reflected light 35 from the objective) from the objective 2 used for photographing by the image pickup device 6 may be aligned with the reference position. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lens adjusting device and an adjusting method for adjusting a tilt of a lens of an optical pickup device and a positional deviation (eccentricity) of a lens optical axis among a plurality of lenses.

[0002]

2. Description of the Related Art In an optical pickup device, in order to record a signal on an optical recording medium and reproduce a signal recorded on the optical recording medium, a light from a light source is condensed and applied to the optical recording medium. It has an objective lens.

When using this objective lens, the numerical aperture (N
When A) is increased, the diameter of the focused beam focused on the optical recording medium can be reduced, and the recording density of the optical recording medium can be improved.

However, in the case of a single (single lens) objective lens, the curvature of the lens surface becomes small and it becomes difficult to manufacture a mold. Therefore, the numerical aperture is limited to about 0.6 or 0.65. It is said that.

On the other hand, in the case of a combination objective lens in which a plurality of lenses are combined, for example, a two-element objective lens in which two lenses are combined, even if the refracting power of each lens is made small, it becomes high as an objective lens by combining them. The numerical aperture can be obtained. However, in order to obtain the desired lens performance, it is necessary to adjust the positional deviation (eccentricity) of the lens optical axis between the lenses and the tilt adjustment of the lenses with high accuracy.

As a method of highly accurately adjusting the positional deviation of the optical axis of the lens (positional adjustment), for example, in the case of a microscope using an objective lens composed of a plurality of lenses, the center of the lens outer shape (outer diameter of the lens) is set. As the lens optical axis exists, “lens outer shape reference adjustment” is performed to adjust the positional deviation of the lens optical axis between the lenses. In addition, the center of the optical axis of the lens surface is inspected by an optical method, and "lens centering processing" is performed to scrape the outer peripheral part of the lens so that the outer shape of the lens has a predetermined radius from the center of the optical axis. ,
Methods such as increasing the accuracy of the lens center position relative to the lens outer shape (increasing the lens outer shape accuracy) are also performed.

Further, as a method for adjusting the inclination of the lens with high accuracy, for example, a method disclosed in Japanese Patent Laid-Open No. 2000-293860 is disclosed. In this method, on the reference plane (edge surface) perpendicular to the lens optical axis provided on the objective lens,
The parallel light is emitted, the return position of the reflected light from the reference surface is detected, and the tilt of the objective lens is adjusted based on the return position.

[0008]

However, the "lens outer shape reference adjustment", "lens centering processing", and the method disclosed in the above publication have the following problems.

In the "lens outer shape reference adjustment", in the case of an objective lens used for an optical pickup, since the lens outer shape is small, the required accuracy becomes relatively strict. Therefore, the conventional lens outer shape reference adjustment causes a large residual aberration, and there is a problem that desired performance cannot be obtained. Further, in the "lens centering process", there is a problem that the cost increases if the outer peripheral portion of the lens is to be trimmed with high accuracy.

Further, in the method disclosed in the above publication, the objective lens must have an edge surface, and only the tilt adjustment of the lens can be performed. Therefore, with a lens without an edge surface, tilt adjustment cannot be performed, so another method (for example, the above method)
Then, in addition to the tilt adjustment, it is necessary to adjust the lens position separately from the lens tilt adjustment. Therefore, there is a problem that the work of attaching the lens to the optical pickup device becomes complicated, and the accuracy of the lens adjustment (lens tilt / position adjustment) may be deteriorated due to the complicated work. .

The present invention has been made in view of the above problems, and an object thereof is to adjust the inclination of the lens and the positional deviation of the optical axis of the lens even if the outer shape accuracy of the lens is low. An object of the present invention is to provide a lens adjusting device and a lens adjusting method that can achieve high accuracy.

[0012]

In order to solve the above problems, the lens adjusting device of the present invention (the present lens adjusting device)
Is an illumination optical system that generates substantially parallel light incident on the lens, a condensing optical system that condenses the reflected light from the lens, an imaging device that detects the condensing point of the reflected light, A lens adjusting unit that adjusts the tilt and position of the lens by moving the lens to change the position of the condensing point, and an incident optical axis that is an optical axis of incident light to the lens, and a condensing optical system. The optical axis of the condensing optical system, which is the optical axis of the system, is adjusted so as to coincide with a predetermined reference optical axis, and the lens adjusting unit adjusts the position of the condensing point to the reference optical axis. Is characterized in that the lens is moved so as to coincide with a reference position which is a portion where the detection surface of the image pickup device intersects.

In the present lens adjusting device, first, the illumination optical system irradiates the lens with light (parallel light). Then, the lens reflects the irradiation light. This reflected light is
The light is detected by the detection surface of the image pickup device while being condensed by the condensing optical system of the present lens adjustment device.

In the present lens adjusting device, the condensing optical system is arranged so that the incident optical axis and the condensing optical system optical axis coincide with the reference optical axis. Further, the position where the reference optical axis and the detection surface of the image pickup device intersect is set as a reference position.

Therefore, only when the optical axis of the lens (lens optical axis) coincides with the reference optical axis, the light from the illumination optical system is reflected by the lens, and the reflected light is condensed at the reference position of the image pickup device. Like

Therefore, when the lens is moved by the lens adjusting section so that the positions of the focal points of the reflected light of the lens coincide with each other at the reference position, the lens optical axis becomes parallel and coincides with the reference optical axis. become. That is, the tilt of the lens can be adjusted. In addition, the positional deviation (eccentricity) between the lens optical axis and the reference optical axis can be adjusted.

Further, in the present lens adjusting device, only the reflected light from the lens surface (for example, the reflected light from the objective lens) is used, that is, the light directly attributable to the lens surface is measured to adjust the tilt of the lens (tilt). (Adjustment) -Adjustment of the positional deviation of the lens (position adjustment) can be performed. Therefore, for example, even if the lens has no reference plane (edge surface) perpendicular to the optical axis of the lens, the tilt and position of the lens can be adjusted. Besides, in order to measure the reflected light directly caused by the surface of the lens,
The tilt and position of the lens can be adjusted with high accuracy.

Further, in the present lens adjusting apparatus, in addition to the above configuration, the lens adjusting section has an analyzing section for calculating the amount of positional deviation between the reference position and the focal point, and the calculation result is It is preferable to move the lens based on the above.

With the above arrangement, the amount of positional deviation between the reference position and the focal point is calculated by the analysis unit, and the lens adjustment unit moves the lens according to the calculation result.
Therefore, for example, the inclination of the lens can be detected with higher accuracy than the method of visually matching the condensing point with the reference position.
Position adjustment can be performed.

Further, in the present lens adjusting apparatus, in addition to the above-mentioned configuration, the illumination optical system irradiates the incident light so that the incident angle of the incident light on the lens surface of the lens becomes a critical angle or less. It is preferable to have an incident angle control unit that limits the area.

For example, in a lens having two surfaces, when one surface has a very large radius of curvature and the other surface has a small radius of curvature, light having a wide irradiation area (incident light) has a large radius of curvature. It is assumed that it is incident from. Then, the incident light incident on the surface having a small radius of curvature at a position (outer peripheral position) relatively far from the lens optical axis has an incident angle larger than the critical angle (the incident angle at which the refraction angle becomes 90 °). There are cases. Then, the incident light as described above is repeatedly totally reflected in the lens and is reflected toward the condensing optical system. Since the amount of light reflected by this total reflection is generally larger than the amount of light reflected by the surface of the lens, it may enter the imaging device via the condensing optical system but may become stray light.

However, according to the above configuration, the incident angle control unit of the illumination optical system blocks, for example, a part (outer edge portion) of the irradiation area of the incident light on the lens surface (irradiation area of the light flux). As a result, the irradiation area of the incident light is limited, and the light does not enter the outer peripheral position of the lens. Therefore, the incident angle of the incident light incident on the surface having a small radius of curvature is equal to or less than the critical angle, and stray light can be prevented.

Further, in the present lens adjusting apparatus, in addition to the above configuration, the illumination optical system has a light source that emits light having a wavelength different from the central wavelength of the antireflection film coated on the lens. Preferably.

While the lens has a function of reflecting incident light, it also has a function of transmitting the incident light. In particular, in order to secure transmitted light, the lens used in the optical pickup device is, for example, provided with an antireflection coating (antireflection film) having the wavelength (used wavelength) of the transmitted light as a central wavelength. Many.

However, according to the above construction, a light source having a wavelength different from the above-mentioned used wavelength is used. for that reason,
The proportion of the light from the light source that is reflected is increased and can be condensed on the imaging device. In other words, the tilt of the lens
It is possible to reliably secure the amount of reflected light required for position adjustment and improve the accuracy of the tilt / position adjustment.

Further, in the present lens adjusting device, in addition to the above configuration, a condensing lens provided in the above condensing optical system,
It is preferable to have a condenser lens position adjusting section that moves in the optical axis direction on the reference optical axis.

According to the above arrangement, in the present lens adjusting device, the condensing lens position adjusting section can minimize the condensing point of the reflected light from the lens on the image pickup device. Therefore, the detection accuracy of the focal point is improved, and the tilt / position adjustment accuracy of the lens can be improved.

In addition to the above-mentioned configuration, the present lens adjusting device is provided with a beam splitter for splitting the above-mentioned reflected light into a plurality of beams, and the above-mentioned condensing optical system is provided with each of the split reflected lights. The light is condensed, and the imaging device
It is preferable to detect each reflected light focused by the focusing optical system.

Usually, the light reflected from each surface of the lens (reflected light) has different divergence levels. In other words, the reflected light can be said to be a collection of a plurality of different divergent lights.

Therefore, in the present lens adjusting device, according to the above configuration, the reflected light is dispersed by the beam splitter according to the degree of divergence, and the spectrum is condensed by the condensing optical system provided for each spectrum, and The image pickup device detects a condensing point for each spectrum. Therefore, the light forming the condensing point is spectral. As a result, the size of the focal point is reduced, so that the detection accuracy of the focal point is improved and the accuracy of the tilt / position adjustment of the lens is increased.

Further, in order to solve the above-mentioned problems, the present lens adjusting device produces light beams that are substantially parallel to each other from one direction side and the opposite direction side along the optical axis of the combination lens composed of a plurality of lenses. The generated illumination optical system, the condensing optical system that condenses each reflected light from the combination lens thereof, the image pickup device that detects the condensing point of each of the above reflected light, and the above combination lens by moving the above combination lens. A lens adjusting unit that adjusts the tilt and position of the combination lens by changing the position of each condensing point, and an incident optical axis of each incident light to the combination lens from the one direction side and the opposite direction side. , Each condensing optical system optical axis that is the optical axis of the condensing optical system is adjusted to match a predetermined reference optical axis,
The lens adjustment unit moves the combination lens such that the positions of the respective focal points coincide with the respective reference positions which are the intersections of the reference optical axis and the detection surface of the imaging device. I am trying.

According to the above arrangement, in the present lens adjusting device, the light incident on the combination lens from one direction side and the opposite direction side, that is, the optical paths of two incident lights are used as the incident optical axes.

The incident optical axis and the optical axis of the condensing optical system (condensing optical system optical axis) are aligned with the predetermined reference optical axis. Further, the position where the reference optical axis and the detection surface of the image pickup device intersect is set as a reference position.

That is, in the present lens adjusting device, the condensing optical system is arranged so that, for example, the two incident optical axes / condensing optical system optical axes coincide with the reference optical axis.

Therefore, only when the optical axis of the combination lens coincides with the reference optical axis, the light from the illumination optical system is reflected by the combination lens, and the reflected light is condensed at the reference position of the image pickup device. .

Therefore, when the combined lens (each lens) is moved by the lens adjusting section so that the positions of the condensing points of the reflected light of the combined lens coincide with each other at the reference position, the optical axis of the combined lens becomes the reference optical axis. Be parallel and coincide with. That is, the tilt of the combined lens can be adjusted. In addition, the positional deviation (eccentricity) between the optical axis of the combination lens and the reference optical axis can be adjusted.

Further, in the present lens adjusting device, only the reflected light from the lens surface of the combined lens (for example, the reflected light from the objective lens) is used, that is, the light directly caused by the lens surface is measured, and the tilt of the combined lens is measured. Adjustment (tilt adjustment) / Adjustment of position shift of the combined lens (position adjustment)
Can be done. Therefore, for example, even if the lens does not have a reference plane (edge surface) perpendicular to the lens optical axis,
The tilt and position of the lens can be adjusted. In addition, since the reflected light directly caused by the lens surface is measured, the tilt and position of the lens can be adjusted with high accuracy.

In order to solve the above problems, the lens adjusting method (the present lens adjusting method) in the present invention is
An incident optical axis that is the optical axis of the incident light to the lens, and a converging axis that is the optical axis of the light that condenses the reflected light from the lens,
An optical axis position setting step of setting so as to match a predetermined reference optical axis, and making light substantially parallel to the lens to enter, condensing reflected light from the lens, and detecting this condensing point Converging point detection step, and the position of the converging point coincides with the reference position that is the intersection of the detecting surface including the converging point and perpendicular to the reference optical axis, and the reference optical axis. As described above, a lens moving step of moving the lens is included.

According to the above construction, the incident optical axis and the converging axis coincide with the reference optical axis. Therefore, light is reflected by the lens only when the optical axis of the lens (lens optical axis) coincides with the reference optical axis, and the reflected light is focused at the reference position.

Therefore, when the lens is moved so that the position of the focal point of the reflected light of the lens coincides with the reference position, the optical axis of the lens becomes parallel and coincides with the reference optical axis. That is, the tilt of the lens can be adjusted. In addition, the positional deviation (eccentricity) between the lens optical axis and the reference optical axis can be adjusted.

Further, in the present lens adjusting method, only the reflected light from the lens surface (for example, the reflected light from the objective lens) is used, that is, the reflected light directly caused by the lens surface is measured, and the tilt adjustment / position of the lens is adjusted. You can make adjustments. for that reason,
For example, even if the lens does not have a reference plane (edge surface) perpendicular to the lens optical axis, the tilt and position of the lens can be adjusted. In addition, since the reflected light directly caused by the surface of the lens is measured, the tilt and position of the lens can be adjusted with high accuracy.

In order to solve the above problems, the present lens adjusting method uses the optical axis of each incident light from one direction side and the opposite direction side along the optical axis of the combination lens composed of a plurality of lenses. An optical axis position setting step of setting a certain incident optical axis and a condensing axis which is an optical axis of light condensing each reflected light from the combination lens so as to coincide with a predetermined reference optical axis. In addition, a substantially parallel light is made incident on the combination lens, and the reflected light from the combination lens is condensed respectively, and a condensing point detecting step for detecting these condensing points, and at each condensing point described above. , The combination lens so that the positions of the respective condensing points coincide with the reference position, which is a point where the detection surface including the converging point and perpendicular to the reference optical axis and the reference optical axis intersect. And the lens moving process It is characterized in Mukoto.

According to the above arrangement, the incident optical axis and the converging axis coincide with the reference optical axis. Therefore, light is reflected by the combination lens only when the optical axis of the combination lens coincides with the reference optical axis, and the reflected light is condensed at the reference position.

Therefore, when the lens is moved so that the focal point positions of the reflected light of the combination lens coincide with each other at the reference position, the optical axis of the combination lens becomes parallel and coincides with the reference optical axis. That is, the tilt of the combined lens can be adjusted. In addition, the positional deviation (eccentricity) between the optical axis of the combined lens and the reference optical axis can be adjusted.

Further, in the present lens adjusting method, only the reflected light from the lens surface of the combined lens (for example, the reflected light from the objective lens) is used, that is, the light directly caused by the lens surface is measured, and the tilt of the combined lens is measured. Adjustment / positioning of the combined lens can be performed. Therefore, for example, even if the lens does not have a reference surface (edge surface) perpendicular to the optical axis of the combined lens, the tilt and position of the combined lens can be adjusted. In addition, since the reflected light directly caused by the surface of the lens is measured, the tilt and position of the combined lens can be adjusted with high accuracy.

[0046]

DESCRIPTION OF THE PREFERRED EMBODIMENTS [Embodiment 1] An embodiment of the present invention will be described with reference to FIGS. 1 to 12 and FIGS.

In these figures, parallel light 33, parallel incident light 34, and objective lens reflected light 35 (reflected light from the lens surface), which will be described later, are part of the light rays 33, 34, ... Only 35 is shown. Further, an incident optical axis 11, a condensing optical system optical axis (condensing axis) 12, a reference optical axis 13, and a lens optical axis 14 which will be described later are illustrated adjacent to each other on the same line for convenience. Further, the optical path of the reflected light (objective lens reflected light 35a) from the first surface 21 of the objective lens 2 which will be described later, the reflected light from the second surface 22 (the objective lens reflected light 35a).
The optical path of b) and the optical path of the parallel incident light 34 are shown by a triple arrow, a double arrow, and a single arrow, respectively.

As shown in FIG. 1, a lens tilt / position shift adjusting device (lens adjusting device) 1 according to the present embodiment has a mounting angle (tilt) of an objective lens (lens) 2 used in an optical pickup device. And the mounting position is adjusted.

The lens adjusting device (adjusting device) 1 comprises an illumination optical system 3, a beam splitter 4, a condensing optical system 5, an image pickup device 6, and an objective lens adjusting section (not shown).

The illumination optical system 3 is composed of a light source 31 and a collimator lens 32.

The light source 31 emits a light beam such as a semiconductor laser, and a collimator lens 32.
Is a collimated light beam emitted from the light source 31.
It is a lens that converts to 3.

The beam splitter 4 reflects the parallel light 33 emitted from the collimator lens 32 to the objective lens 2 (emits the parallel incident light 34).
Further, the beam splitter 4 includes the objective lens 2 described above.
It also transmits the reflected light from (the objective lens reflected light 35).

The condenser optical system 5 is composed of an aperture 51 and a condenser lens 52.

The aperture 51 reflects the reflected light (objective lens reflected light 35) that has passed through the beam splitter 4.
In (1), it is a plate-shaped member that transmits light with low divergence, that is, blocks a part of light with high divergence.

The condenser lens 52 is the aperture 51 described above.
It is a lens that focuses the reflected light 35 of the objective lens that has passed through.

The image pickup device 6 is, for example, a CCD (Charge C
The light from the condenser lens 52 (objective lens reflected light 3).
5) can be photographed and the luminance information for each pixel can be output.

The objective lens adjusting section (lens adjusting section) adjusts the tilt and position of the objective lens 2 by changing it. The details of this objective lens adjustment unit will be described later.

Further, in the adjusting device 1, as shown in FIG. 2, the predetermined optical axis (reference optical axis 13) and the optical axis of the condensing optical system 5 (condensing optical system optical axis 12) are arranged. Exists. Further, when the light reflected by the beam splitter 4 (parallel incident light 34; see FIG. 1) enters the objective lens 2,
The optical path of the parallel incident light 34 is the incident optical axis 11.

Then, in the adjusting device 1, the incident optical axis 1
The beam splitter 4 and the condensing optical system 5 are arranged so that 1 and the condensing optical system optical axis 12 coincide with the reference optical axis 13, and the reference light is provided at the center of the detection surface 61 of the imaging device 6. Axis 1
The image pickup device 6 is arranged so that 3 is located.

Further, the condensing optical system 5, the beam splitter 4, and the objective lens 2 are arranged above the detection surface 61 of the image pickup device 6 in this order at regular intervals. Further, the illumination optical system 3 includes a beam splitter 4
It is arranged at a position where the parallel light 33 can be emitted to the incident surface of. Further, regarding the distance between the condensing optical system 5 and the image pickup device 6, the condensing point of the objective lens reflected light 35 is the detection surface 61 of the image pickup device 6.
The distance is such that the upper portion is formed, that is, the distance at which the focal point of the reflected light 35 of the objective lens is the smallest on the detection surface 61 (adjustment of such distance is hereinafter referred to as distance adjustment).

As an example of the setting of the reference optical axis, an inclination is set so that the reflected light from the mirror installed at the position of the lens to be inspected (objective lens) returns to the light source, and then the center of the image pickup device is set. Adjust the position of the imaging device so that the reflected light enters, and further adjust the position of the condensing optical system,
The setting is such that a condensing point is formed at the center of the image pickup device.

A mechanism for adjusting the tilt and position of the objective lens 2 in the adjusting device 1 will be described with reference to FIGS. 3 and 4. In these figures, unlike the objective lens 2, the objective lens 120 suitable for explaining the mechanism is more suitable.
Will be explained. Further, in FIGS. 3A and 4A, the illumination optical system 3, the beam splitter 4, and the objective lens adjusting unit are omitted for convenience. Further, the image pickup device 6 (see FIG. 1) is illustrated with a monitor 62 that displays a condensing point 37 imaged on the detection surface 61 of the image pickup device 6.

FIG. 3A shows a case where the reference optical axis 13 and the lens optical axis 140 of the objective lens 120 are aligned with each other. FIG. 4A shows a case where the reference optical axis 13 and the lens optical axis 140 do not match, that is, with respect to the reference optical axis 13.
The case where the lens optical axis 140 is inclined is shown. The lens optical axis 140 is the normal direction axis at the apex of the surface of the objective lens 120.

Then, in the case of FIG.
As shown in (b), the incident light (parallel incident light 34) on the objective lens 120 is the first surface 121 and the second surface 12 of the lens.
2 is reflected respectively. In addition, these first surface 121
-Reflected light from the second surface 122 (objective lens reflected light 35a
-35b) is divergent light.

Here, the objective lens reflected lights 35a and 35b
Where the positions of the light sources that can be regarded as divergent light emitted from a certain virtual light source are virtual emission points a1.
a2. Then, the virtual light emitting points a1 and a2 come to be located on the reference optical axis 13.

As shown in FIG. 3A, the reference optical axis 13
And the lens optical axis 140 are coincident with each other, the objective lens reflected lights 35a and 35b (see FIG. 3B) are condensed by the condensing optical system 5 and condensed at the center of the detection surface 61, The converging point 37 (37a, 37b) is formed.

On the other hand, in the case of FIG. 4A, as shown in FIG. 4B, the virtual light emitting points a1 and a2 are not located on the reference optical axis 13 and are condensed by the condensing optical system 5. The objective lens reflected lights 35a and 35b have condensing points 37a and 37b located at different positions on the detection surface 61.

That is, as shown in FIG. 2, the reference optical axis 13
On the other hand, in the adjusting device 1 arranged such that the incident optical axis 11, the condensing optical system optical axis 12 and the center of the imaging device 6 are aligned, the lens optical axis 14 (optical axis of the objective lens 2) is the reference optical axis. Thirteen
Only when they match the reflected light from the first surface 21 and the second surface 22 of the objective lens 2 (objective lens reflected light 35a, 35).
b; see FIG. 1) is focused at the center of the imaging device 6.

Therefore, as shown in FIG. 3A, the objective lens reflected lights 35a, 35 detected by the monitor 62 are detected.
b (see FIG. 3B) so that the positions of the condensing points 37a and 37b coincide with each other at the center of the image pickup device 6.
When the tilt / position of 0 is changed (moved) and adjusted, the lens optical axis 140 becomes parallel to and coincides with the reference optical axis 13. That is, the inclination of the objective lens 120 can be adjusted. In addition, the positional deviation (eccentricity) between the lens optical axis 140 and the reference optical axis 13 can be adjusted.

In the above-mentioned image pickup device 6, the position where the reference optical axis 13 is matched does not necessarily have to be the center of the image pickup device 6, and the position where the reference optical axis 13 is matched (reference position) is specified in advance. It should be done. That is, if the converging points 37a and 37b of the objective lens reflected lights 35a and 35b are made to coincide with each other at the reference position, the inclination of the lens and the lens optical axis 14 (lens optical axis 140) and the reference optical axis 13 are made. You can adjust the misalignment of.

As described above, in the adjusting device 1, only the reflected light from the first surface 21 and the second surface 22 of the objective lens 2 (objective lens reflected light 35a and 35b) is used, that is, the first surface 21. It is possible to adjust the tilt of the objective lens 2 (tilt adjustment) and adjust the position shift of the objective lens 2 (position adjustment) by measuring the light directly attributable to the second surface 22.

Therefore, for example, even if the objective lens has no reference plane (edge surface) perpendicular to the optical axis of the lens, the tilt and position of the lens can be adjusted. Moreover, in order to directly measure the light (objective lens reflected light 35a, 35b) from the first surface 21 and the second surface 22 of the objective lens 2 (for measuring the light directly attributable to the lens surfaces 21 and 22), The tilt and position of the objective lens 2 can be adjusted with high accuracy.

In addition, the adjusting device 1 can simultaneously adjust the tilt and position of the objective lens 2.

The objective lens adjusting section 7 is composed of an analyzing section 71 and a moving section 72, as shown in FIG.

The analysis unit 71 obtains information such as the lens surface shape of the objective lens 2 and the condenser lens 52, the refractive index of the lens material of the objective lens 2 and the condenser lens 52, and the positions of the objective lens 2 and the condenser lens 52. A ray tracing simulation based on this is performed, and a position database (calculation result) that is the simulation result is obtained. In addition, the value necessary for adjusting the tilt / position of the objective lens 2 is derived from this position database and transmitted to the moving unit 72.

The analyzing unit 71 is also a moving unit 72 which will be described later.
Then, while actually changing the tilt and position of the objective lens 2, the tilt amount, tilt direction, and position are actually measured by the imaging device 6. Further, the condensing point 3 condensed on the imaging device 6
From the luminance information of 7a and 37b, the positional deviation amount and its direction are actually measured. As a result, the reflected light 35a
It is also possible to accurately obtain the tilt amount / tilt direction and position (position database) of the objective lens 2 from the vector information (light amount barycentric position information) at each condensing position of b. Note that the above-described light amount center of gravity position information is information indicating the light amount center of gravity of the objective lens reflected light 35 derived from the pixel position of the light amount when the light amount detected by the imaging device 6 is equal to or greater than a certain threshold value.

The moving section 72 is, for example, a four-axis adjusting jig such as an XY stage and a goniometer stage, and the analyzing section 71 is used.
The position is moved based on the position database and the tilt / position of the objective lens 2 is changed for adjustment. The moving part 72 is attached to the objective lens 2.

When the tilt and position of the objective lens 2 are adjusted based on the position database as described above, for example,
The tilt / position adjustment of the objective lens 2 can be performed with higher accuracy than by the method of visually observing the converging point 37 and the reference position.

Here, the condensing optical system 5 will be described in detail with reference to FIGS. 6 to 10 and FIG. In these figures, for convenience, the illumination optical system 3, the beam splitter 4, and the objective lens adjusting section 7 are omitted.

FIG. 19 shows the aperture (incident angle controller) 5
1 shows a condensing optical system 50 that does not include 1 (see FIG. 1). Since the condenser optical system 50 does not have the aperture 51, the objective lens reflected light 35 from the objective lens 2 enters the condenser lens 52 as light having a large divergence. In addition, the objective lens reflected light 35 (objective lens reflected light 35a, 35b) from each lens surface (first surface 21, second surface 22)
Have different degrees of divergence, so the reference optical axis 13 (see FIG. 2)
Focus on different positions on top. Therefore, when the image pickup device 6 measures the focal points 37a and 37b of the objective lens reflected lights 35a and 35b, the beam size of one of the focal points (37a or 37b) becomes large,
The detection accuracy of the condensing point 37 (37a, 37b) decreases,
The tilt / position adjustment accuracy may also decrease.

However, the adjusting device 1 is provided with the condensing optical system 5 having the aperture 51, as shown in FIG. In this condensing optical system 5, light having a small divergence out of the objective lens reflected light 35 reflected from the objective lens 2 is condensed near the imaging device 6. That is,
Since the aperture 51 blocks light with high divergence (controls the angle of incidence), only light with low divergence enters the imaging device 6.

Specifically, the optical path of the objective lens reflected light 35 (35a, 35b) in the adjusting device 1 will be described. The objective lens reflected light 35a follows the optical path shown in FIG. 35b follows the optical path as shown in FIG.

As shown in these figures, since the objective lens reflected lights 35a and 35b have different degrees of divergence, they are condensed at different positions on the optical axis 12 (see FIG. 2) of the condenser optical system. This is because the virtual light emitting point o1 of the objective lens reflected light 35a by the first surface 21 of the objective lens 2 and the virtual light emitting point o2 of the objective lens reflected light 35b reflected light by the second surface 22 are different in position. .

However, in the adjusting device 1 shown in FIG. 6, the aperture 51 controls the divergence of the objective lens reflected lights 35a and 35b (increases the parallelism), so that the virtual light emitting points o1 and o2 (FIG. 7). (See FIG. 8) Even when the positions are different, the converging point 37a detected by the imaging device 6
The beam size of 37b can be reduced. Therefore, the detection accuracy of the focal point 37 can be improved, and the inclination / position adjustment accuracy of the objective lens 2 can be improved.

Since the positions of the virtual light emitting points o1 and o2 change depending on the shape and refractive index of the surface of the objective lens 2,
Usually does not match.

Further, in the condensing optical system 5 of the adjusting device 1 in the present embodiment, as shown in FIG.
It is also possible to provide a condenser lens position adjusting unit 53 that is movable in the reference optical axis direction (vertical direction).

In the adjusting device 1 having the condensing optical system 5 shown in this figure, the objective lens reflected light 35a from the first surface 21 of the objective lens 2 and the objective lens reflected light 35b from the second surface 22 are respectively reflected. By adjusting the position of the condensing lens 52 in the direction of the reference optical axis 13 (see FIG. 2) according to the measurement, the condensing point 37 (37a, 37b) can be minimized on the imaging device 6. . Therefore, the focal point 37
It is possible to improve the accuracy of detection of and the accuracy of the tilt / position adjustment of the objective lens 2. Further, the positions of the condensing point 37a and the condensing point 37b can be adjusted so that the sizes thereof are substantially the same.

Further, the condenser optical system 55 of the adjusting apparatus 1 in the present embodiment may be provided with two condenser lenses 52 and 54 and an aperture 51 as shown in FIG.

In the configuration of the condensing optical system 55, the aperture 51 located between the condensing lens 52 and the condensing lens 54 causes only the reflected light 35 having high parallelism among the reflected light 35 of the objective lens. The light is incident on the condenser lens 52. Therefore, the beam size of the focal point 37 detected by the imaging device 6 can be reduced, and the detection accuracy of the focal point 37 can be improved. Therefore, the inclination / position adjustment accuracy of the objective lens 2 can be improved.

The beam size of the focal point 37 due to the objective lens reflected light 35 from the objective lens 2 is determined by the image pickup device 6
The condenser lens 52 and the condenser lens 5 are made smaller so as to be smaller above.
The position of 4 may be adjusted. In addition, this condensing optical system 55
Also in this case, the condenser lens position adjusting unit 53 as shown in FIG. 8 may be provided.

Further, for example, the distance between the objective lens 2 and the condenser lens 54 is L1, and the condenser lens 54 and the condenser lens 52.
Is L2 and the distance between the condenser lens 52 and the image pickup device 6 is L3, L1 is the focal length f of the condenser lens 54.
The focal length fb of the condenser lens 52 can be set to a and L3.

In the adjusting device 1 according to the present embodiment, as described above, the reflected light of the objective lens 2 (objective lens reflected light 35a.
35b) is provided with a condensing optical system 5/55 for extracting reflected light having a low divergence. However, various configurations other than the above-described focusing optical systems 5 and 55 are possible. For example, the effective diameter of the condenser lens 52 itself may have a function of a diaphragm.

An illumination optical system 36 different from the illumination optical system 3 will be described in detail with reference to FIGS. 11 and 20. Note that, in these drawings, for the sake of convenience, the condensing optical system 5, the imaging device 6, and the objective lens adjusting unit 7 are omitted. Also,
In these figures, the objective lens 2 is shown in the opposite vertical direction to that in FIG. 1, that is, the case where the surface where the parallel incident light 34 first reaches is the second surface 22 is shown.

In FIG. 20, in the objective lens 2, when the radius of curvature of the second surface 22 is very large and the radius of curvature of the first surface 21 is small, the parallel incident light 34 having a wide irradiation area is
It shows a state of incidence from the surface (second surface 22) having a large radius of curvature. In this case, the outer peripheral position P of the first surface 21
(Position relatively distant from the lens optical axis 14 (see FIG. 2))
The incident angle θ of the parallel incident light 34 incident on is increased.

In such a case, the parallel incident light 34 as described above is used.
Repeats total reflection within the objective lens 2 and causes the condensing optical system 5
(See FIG. 1).

Further, for example, the incident angle θ may have an angle larger than the critical angle (the incident angle at which the refraction angle becomes 90 °).

The amount of light reflected by total reflection as described above is generally larger than the amount of light reflected by the surface of the objective lens 2. Therefore, the reflected light that is totally reflected a plurality of times inside the objective lens 2 enters the image pickup device 6 (see FIG. 1) in a state where the parallelism is high, but may become stray light.

Therefore, in the illumination optical system 36 of the adjusting device 1, as shown in FIG. 11, the aperture (incident angle control section) is set.
39 blocks (narrows) a part of the irradiation area of the luminous flux of the parallel light 33 so that the parallel incident light 34 does not enter the outer peripheral position P of the objective lens 2 (only light having low divergence is used). Have passed). As a result, the incident angle θ of the parallel incident light 34 incident on the first surface 21 is a critical angle (refraction angle is 9
The incident angle becomes 0 °) or less.

In this way, the parallel incident light 34 will not be totally reflected a plurality of times inside the objective lens 2. Therefore, the objective lens reflected light 35 entering the image pickup device 6 does not become stray light. The diameter of the aperture 39 can be obtained by performing a simulation such as ray tracing.

The illumination optical system 38 shown in FIG. 20 includes a collimator lens 320 having a smaller outer shape than the collimator lens 32 (see FIG. 1) of the illumination optical system 3.

Further, in the above-mentioned adjusting device 1, the constitutions in which only one condensing optical system 5 and one image pickup device 6 are used are listed.
However, the objective lens reflected light 35a from the objective lens 2
35b has different divergence. Therefore, the aperture 51
Even if the light is condensed by the condensing optical system 5 having the above, the diameters of the condensing points 37a and 37b of the objective lens reflected lights 35a and 35b detected by the imaging device 6 may be large.

Therefore, in the adjusting device 1, as shown in FIG. 12, the two condensing optical systems 5a and 5b and the two image pickup devices 6a and 6b are provided so that the objective lens reflected lights 35a and 35b are detected independently. May be provided.
It should be noted that the objective lens adjusting unit 7 is omitted in the figure for convenience.

In the adjusting device 1 of FIG. 12, specifically, the objective lens reflected light 35 transmitted through the beam splitter 4a is used.
A beam splitter 4b for splitting a.35b is arranged on the reference optical axis 13 (see FIG. 2). The beam splitter 4b disperses the objective lens reflected light 35a in the same direction as the reference optical axis 13 and disperses the objective lens reflected light 35b in the normal direction (surface normal direction) to the reference optical axis 13. .

Then, the spectrally reflected objective lens reflected light 35
In order to condense a, the condensing optical system 5a / imaging device 6a
Are arranged on the reference optical axis 13. On the other hand, in order to collect the objective lens reflected light 35b, the condensing optical system 5b and the imaging device 6b are arranged on the normal line direction.

Then, the objective lens reflected lights 35a and 35b are condensed at the centers of the two image pickup devices 6a and 6b.
Two condensing optical systems 5a and 5b and two image pickup devices 6a and 6
Adjust the distance from b. It should be noted that the distance adjustment may be performed so that the focal point of the objective lens reflected lights 35a and 35b becomes small on the image pickup devices 6a and 6b (the focus may be adjusted).

Thus, with the beam splitter 4b,
When the objective lens reflected lights 35a and 35b having different divergence levels are separated, the objective lens reflected light 35a is displayed on the imaging device 6a.
The objective lens reflected light 35b is collected on the image pickup device 6b. That is, the objective lens reflected light 35a.3
5b comes to collect light separately. Therefore, the focal point 3
7a and 37b do not overlap each other, and the size is reduced. Therefore, the tilt and position of the objective lens 2 can be adjusted with higher accuracy.

Further, as described above, the two condensing optical systems 5
In the adjusting device 1 including the a.5b and the two imaging devices 6a and 6b, for example, the objective lens reflected light 35b is incident on the imaging device 6a, or the objective lens reflected light 35a is incident on the imaging device 6b. In this case, erroneous detection can be prevented by detecting only the light amount equal to or larger than a desired threshold value by image processing or the like. Further, the reflected light having a large divergence and the reflected light having a small divergence can be separated and detected by the above image processing and the like.

Further, in FIG. 12, one condenser lens 52
The adjusting device 1 including the two condensing optical systems 5 having the above has been described. However, there is also an adjusting device as shown in FIG. 12 that includes one condensing optical system 55 having two condensing lenses 52 and 54 as shown in FIG. Conceivable.

In the lens adjusting method of the present embodiment, the incident optical axis 11 and the reference optical axis 13 are made to coincide with each other, and the condensing optical system optical axis 12 and the reference optical axis 13 are made to coincide with each other. In addition, the converging point 37 (37a) of the reflected light (objective lens reflected light 35a, 35b) from the objective lens 2 is set with the intersection of the reference optical axis 13 and the imaging device 6 as a reference position.
-37b) is adjusted by changing the tilt and position of the objective lens 2 so as to match the reference position.

[Second Embodiment] The following will describe another embodiment of the present invention. Members having the same functions as those used in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted. In addition,
The present invention is not limited to this.

In the first embodiment, the adjusting device 1 for adjusting the tilt and position of one objective lens 2 and the adjusting method have been described.

However, the adjusting device 1 of the first embodiment has two
It can also be applied to the tilt of one objective lens (combined lens). Hereinafter, the adjusting device 1 will be described with reference to FIGS.
An adjustment method for adjusting the tilts / positions of the two objective lenses will be described. Note that, in FIG. 13, the objective lens adjusting unit 7 is omitted for convenience. In addition, for the parallel light 33, the parallel incident light 34, and the objective lens reflected light 35, only some of the light rays 33, 34, and 35 necessary for explanation are illustrated for convenience.

FIG. 13 shows an adjusting device 1 for adjusting a combination lens composed of the objective lens 2 (first objective lens 2) and the objective lens 24 (second objective lens 24). In this adjustment, the tilt and position of the objective lenses 2 and 24 are adjusted, and the objective lens 2 and the objective lens 24 are adjusted.
The tilt and position between the and lenses are adjusted.

In the adjusting device 1 of the present embodiment for performing the above adjustment, the incident optical axis 11 and the condensing optical system optical axis 12 coincide with the reference optical axis 13 as described in the first embodiment. As described above, the beam splitter 4 and the condensing optical system 5 are arranged, and the reference optical axis 1 is provided at the center of the detection surface 61 of the imaging device 6.
The image pickup device 6 is arranged so that 3 is located (see FIG. 2).
reference). Further, the objective lenses 2 and 24 are arranged above the beam splitter 4 in this order with a constant interval.

In this adjusting apparatus 1, first, the illumination optical system 3
The parallel light 33 from is reflected by the beam splitter 4 and enters the objective lenses 2 and 24 as parallel incident light 34. Then, a part of the parallel incident light 34 entering the objective lenses 2 and 24 is part of the first surface 21 and the second surface 22 of the first objective lens 2 and the first surface 25 and the second surface 25 of the second objective lens 24. It is reflected by the second surface 26.

Then, the above-mentioned two objective lenses 2 and 24
The reflected light (objective lens reflected light 35) from the lens surface (first surface 21, second surface 22, first surface 25, second surface 26) of
The light passes through the beam splitter 4 and enters the condensing optical system 5. Then, the objective lens reflected light 35 that has entered the condensing optical system 5 is detected by the condensing lens 52 on the detection surface 6 of the imaging device 6.
The image is collected on the image pickup device 1 and detected by the image pickup device 6. The condenser lens 52 does not collect all the objective lens reflected light 35 reflected by the lens surfaces of the two objective lenses 2 and 24, but mainly diverges the objective lens reflected light 35 by the aperture 51. It is set to pass light of low intensity.

In the objective lens reflected light 35, the reflected light from the first surface 21 and the second surface 22 of the objective lens 2 is converted into the objective lens reflected light 35a and 35b and the first surface 25 and the second surface of the objective lens 24, respectively. The light reflected from the surface 26 is the objective lens reflected light 35c and 35d.

Next, a method of adjusting the tilt and position of the two objective lenses 2 and 24 using the above-mentioned objective lens reflected light 35 will be described.

In the first embodiment, the mechanism for adjusting the tilt and position of one objective lens 2 has been described. The same mechanism is used for adjusting the tilt and position of the two objective lenses 2 and 24.
By aligning the lens optical axis 14 (optical axis of the combination lens) and the lens optical axis 15 of the second objective lens 24 (optical axis of the combination lens) with the reference optical axis 13 of the adjusting device 1, both objective lenses 2 ... Adjust the tilt and position of 24. Hereinafter, a specific adjusting method will be described with reference to FIGS. 14 and 15. It should be noted that the objective lens 2 and the objective lens reflected light 35, etc. mentioned in the description shall refer to FIG.

[Adjusting Method 1] A method of first adjusting the second objective lens 24 and then adjusting the first objective lens 2.

Of the two objective lenses 2 and 24, when the second objective lens 24 is first arranged at a position relatively far from the condensing optical system 5, the lens optical axis 1 of the second objective lens 24 is arranged.
5 does not coincide with the reference optical axis 13, FIG.
As shown in, the first surface 25 and the second surface of the second objective lens 24
Reflected light from the surface 26 (objective lens reflected light 35c, 35
d) is two condensing points 37 (condensing points 37c and 37d) located at different positions on the monitor 62.

Therefore, the converging points 37c and 37d are made to coincide at the center of the monitor 62. Specifically, FIG.
As shown in (b), the inclination of the second objective lens 24 (see FIG. 13) so that one of the converging points is overlapped with the other converging point (for example, the converging point 37d is the converging point 37c). -Adjust the position, and further adjust so that the coincident position coincides with the center (reference position) of the monitor 62 of the imaging device 6.

Next, the first objective lens 2 is arranged at a position relatively close to the condensing optical system 5. In this arrangement, on the monitor 62, as shown in FIG. 14C, the objective lens reflected light 35c, 35d and the objective lens reflected light 35a, 35d.
The four focal points 37 of 35b (37a, 37b, 37c,
37d) will be present. The four condensing points 37 are generated in this manner because the optical axis of the second objective lens 24 is a reference when the first objective lens 2 is inserted and arranged between the beam splitter 4 and the second objective lens 24. Optical axis 13
Therefore, two converging points 37a and 37b of the objective lens reflected lights 35a and 35b are generated. In addition, the optical path (outward path) of the parallel incident light 34 to the first objective lens 2 and the first
The optical path (return path) from the objective lens 2 to the imaging device 6 is
This is because the refracted light by the first objective lens 2 causes the objective lens reflected lights 35c and 35d to follow different optical paths.

Then, after the four focal points 37 are generated,
The tilt and position of the first objective lens 2 are adjusted while the second objective lens 24 is left as it is. However, during this adjustment,
When the tilt of the first objective lens 2 is changed, the positions of the four condensing points 37 move simultaneously. Therefore, each condensing point 37
It is necessary to specify which objective lens reflected light 35 (35a, 35b, 35c, 35d) is the condensing point 37 of (37a, 37b, 37c, 37d).

As the specifying method, for example, only the second objective lens 24 is moved, two converging points that do not move are searched for, and thereafter, the two converging points are focused and adjustment is performed. A method of inserting a light-shielding plate between the objective lens 2 and the second objective lens 24 to prevent reflected light from the second objective lens 24 (objective lens reflected light 35c, 35d) from entering the image pickup device 6 is possible. is there.

Then, after the focusing points 37a and 37b of the objective lens reflected lights 35a and 35b are specified by the above method, the tilt and position of the first objective lens 2 are adjusted as shown in FIG. 14 (d). Then, the four focal points 37 are monitored 62
Match at the top center. The tilt and position of the objective lenses 2 and 24 are adjusted as described above.

After that, the objective lens 2.2 after the tilt / position adjustment is maintained while maintaining the posture of the objective lens 2.2.
By adjusting the interval of 4, the tilt adjustment of the lens is completed.

[Adjusting Method 2] ... First Objective Lens 2 and Second
A method of adjusting the objective lens 24 at the same time.

When arranging the two objective lenses 2 and 24 at the same time, four focus points 37 (37a, 37b, 37c and 37d) are displayed on the monitor 62 as shown in FIG. 15 (a).
Will exist.

Therefore, first, which of the four converging points 37 is the converging point 37a or 37b is specified. Specifically, it is specified by the specifying method described above.

After the condensing points 37a and 37b of the objective lens reflected lights 35a and 35b are specified by the above-described specifying method, the tilt and position of the first objective lens 2 are changed as shown in FIG. 15 (b). Then, adjust and adjust both of these converging points 37a.
Align 37b with the center of the monitor 62 and set the number of condensing points to three. As a result, the lens optical axis 14 of the first objective lens 2 and the reference optical axis 13 coincide (see FIGS. 2 and 1).
3).

Next, the tilt and position of the second objective lens 24 are adjusted. In this adjustment, as shown in FIG.
The tilt and position of the second objective lens 24 are changed and adjusted so that the focal points 37c and 37d coincide with each other at the center of the monitor 62. As a result, the lens optical axis 15 of the second objective lens 24 and the reference optical axis 13 coincide with each other (see FIGS. 2 and 13).

By the adjustment methods 1 and 2 described above, the lens optical axes 14 and 15 of the objective lenses 2 and 24 coincide with the reference optical axis 13. Therefore, it is possible to adjust the inclination of the objective lenses 2 and 24 and the positional deviation between the lens optical axes 14 and 15 and the reference optical axis 13.

[Third Embodiment] The following will describe another embodiment of the present invention. Members having the same functions as those used in the first and second embodiments are designated by the same reference numerals, and the description thereof will be omitted. The present invention is not limited to this.

In the second embodiment, the adjusting device 1 and the adjusting method for adjusting the inclination of the combined lens composed of the two objective lenses 2 and 24 have been described.

In the third embodiment, as in the second embodiment,
Adjustment method for adjusting inclination and positional deviation (eccentricity) between lenses of two objective lenses 2 and 24, and adjusting device 10
(10a and 10b) will be described with reference to FIGS. 16 and 18, for the sake of convenience,
The objective lens adjusting section 7 is omitted. In addition, the parallel light 33
The parallel incident light 34 and the objective lens reflected light 35 are
Only some of the light rays 33, 34, and 35 necessary for the explanation are illustrated.

As shown in FIG. 16, the adjusting device 10a in the present embodiment comprises an adjusting device 1 and an autocollimator 8.

Specifically, the objective lenses 2 and 24 are arranged between the adjusting device 1 and the autocollimator 8.
Further, in the adjusting device 10a, the reference optical axis 13 of the adjusting device 1 and the optical axis 81 of the autocollimator 8 (AC optical axis 8
1) and are matched.

Next, the adjustment mechanism of the adjusting device 10a will be described.

First, the tilt adjustment of the objective lenses 2 and 24 (combined lens) is performed using the autocollimator 8. The auto collimator 8 irradiates parallel light (auto collimator parallel light) to the objective lens 2.24 to be measured. Then, the objective lens reflected light 35 reflected by the edge surface of the objective lens 2 24 is made to enter the same autocollimator 8 again, and the position where the light flux converges and the AC light of the autocollimator 8 are converged. Axis 81
The tilts of the objective lenses 2 and 24 are adjusted based on the deviation amounts from and.

In the case of this tilt adjustment, the two objective lenses 2
Since the reflected light from the edge surface of 24 is used, the inclination may be adjusted from either side. The edge surface is a reference surface that is present in each of the objective lenses 2 and 24 and is perpendicular to the lens optical axes 14 and 15.

Next, the position adjustment of the lens optical axes 14 and 15 (optical axes of the combined lens) is performed using the adjusting device 1.

At the time of this position adjustment, the tilt adjustment of the two objective lenses 2 and 24 has already been completed. However, since the position adjustment has not been performed, the two objective lenses 2 and 24 measured on the monitor 62 of the adjusting device 1 (see FIG. 16).
Objective lens reflected light 35 (35a, 35b, 35c, 3)
5d) Focus point 37 (37a, 37b, 37c, 37)
17D shows four points as shown in FIG.

Therefore, as shown in FIG. 17B, the first objective lens 2 which is a lens relatively close to the adjusting device 1.
Position adjustment (see FIG. 16) and focus points 37a, 37
At the center (reference position) on the monitor 62, the position of the first objective lens 2 is adjusted so as to be one. The position of the first objective lens 2 should be adjusted first in the second
Reflected light from the objective lens 24 (objective lens reflected light 35c
35d) indicates not only the second objective lens 24 but also the first objective lens 24.
Due to the position shift of the objective lens 2, the focal points 37c and 37c
This is because d is separated.

Next, the converging points 37a, 37b, 37c, 3
7d is specified by the specifying method described in the second embodiment, and the positions of the converging points 37c and 37d are determined as shown in FIG.
As shown in (c), one focus point is formed at the center of the monitor 62.

By the tilt adjustment by the autocollimator 8 and the position adjustment by the adjusting device 1 as described above, the lens optical axes 14 and 15 (see FIG. 13) of the objective lenses 2 and 24 are
Reference optical axis 13 and automatic collimator 8 of adjusting device 1
AC optical axis 81 of Therefore, the objective lens 2
.24 lens tilt, and lens optical axes 14 and 15
The positional deviation between (the optical axis of the combination lens) and the reference optical axis 13 (see FIG. 2) can be adjusted.

The light source of the auto-collimator 8 may be a laser or a white light source, but any one may be used. Further, in the position adjustment, the tilts of the two objective lenses 2 and 24 may also be photographed at the same time, and when the tilt occurs in the objective lenses 2 and 24, the tilt adjustment may be performed in a timely manner.

Further, in the adjusting device 10a, the tilt adjustment of the two objective lenses 2 and 24 is not performed only by the autocollimator 8, but, for example, the first objective lens 2 is tilt adjusted by the autocollimator 8, The tilt adjustment of the two objective lenses 24 and the position adjustment of the two objective lenses 2 and 24 may be performed by the adjusting device 1.

Further, in the present embodiment, as shown in FIG. 18, the adjusting device 1 is used in place of the above autocollimator 8.
(1b) may be used. That is, the adjusting device 10b including the two adjusting devices 1 (1a and 1b) can be used. In this figure, the reference optical axis 13 (13a-1
3b), the lens optical axes 14 and 15 are illustrated so as not to overlap the optical path for convenience.

In this adjusting device 10b, the first objective lens 2 is adjusted by the adjusting device 1a, and the second objective lens 24 is adjusted by the adjusting device 1b. And
The reference optical axis 13a of the adjusting device 1a and the reference optical axis 13b of the adjusting device 1b are aligned.

In the case of the adjusting device 10b, the adjusting device 1
When the tilt and position of the objective lens 2/24 are adjusted with a. 1b, the lens optical axes 14 and 15 coincide with the reference optical axes 13a and 13b. Therefore, unlike the adjustment device 10a, it is not necessary to perform the position adjustment separately.

Further, since separate adjusting devices 1a and 1b are used for the respective objective lenses 2 and 24, the focusing points 37a and 37b are located on the monitor 62 of the adjusting device 1a.
7d is displayed only on the monitor 62 of the adjusting device 1b. Therefore, the condensing point 37 (37a, 37b, 37c)
-It is not necessary to specify 37d).

In the tilt / position adjustment by the adjusting device 10b, the reflected light of the lens surface that actually refracts the light is directly used without using the edge surface of the objective lens 2/24. Since the tilt is detected, more accurate tilt /
The position can be adjusted.

In this tilt / position adjusting method, it does not matter which of the objective lenses 2 and 24 is adjusted first. That is, either order may be first.

In the description of the second and third embodiments, the adjustment of the combination lens composed of the two objective lenses 2 and 24 has been described. However, the adjusting devices 1 and 10 and the adjusting method of the present invention can be used for a combination lens including more lenses.

For example, in the case of three or more objective lenses, first, the inclination and positional deviation of the two objective lenses may be adjusted, and then the third objective lens may be arranged and adjusted. Further, as another adjustment, it is also possible to first adjust the inclinations of the three lenses by the autocollimator 8 and then adjust the three positional deviations. Further, by repeating these steps, adjustment is possible even in a combination lens including three or more objective lenses.

A general white light source can be used as the light source 31 used for the illumination optical systems 3 and 36. However, when a laser light source such as a semiconductor laser or a He-Ne laser is used, light with higher parallelism (parallel light 3
3) can be produced, so that the above laser light source is preferably used.

In addition, the objective lenses 2 and 24 generally used in the optical pickup device, when used as an optical pickup, prevent reflection with the wavelength (used wavelength) of the light actually transmitted through the objective lenses 2 and 24 as the central wavelength. A coat (antireflection film) is applied. Therefore, the light source 31 of the same wavelength
When using, the proportion of light reflected from the light source 31 decreases, that is, the amount of reflected light decreases, and
The position adjustment accuracy may decrease.

In such a case, the light source 31 having a wavelength different from the above used wavelength may be used. Specifically, as long as it is an objective lens 2/24 used for a semiconductor laser that emits 400 nm light, a He-Ne laser that emits 632.8 nm light or a semiconductor laser that emits 650 nm light can be used as the light source 31. .

If the light source 31 as described above is used, the inclination
The amount of reflected light necessary for position adjustment can be reliably ensured (the proportion of light reflected from the light source can be increased). Therefore, the accuracy of tilt / position adjustment can be improved.

If the light source 31 emits light in a wide wavelength band, the center wavelength (used wavelength) is within the wavelength band.
However, since light of other wavelengths is also generated at the same time, it can be used.

The adjusting devices 1 and 10 and the adjusting method described above are not limited to the condensing lens system such as the objective lenses 2 and 24.

For example, even in the case of a combined lens optical system such as a beam expander for converting the diameter of a light beam,
It can be adjusted similarly. It can also be said that adjustment is possible with a combination lens such as a microscope and a projection lens.

In the condenser optical systems 5 and 55, the focal lengths of the condenser lenses 52 and 54 and the condenser lenses 52 and 54
The positional relationship between the image pickup device 6 and the image pickup device 6 is appropriately set according to the degree of divergence of the reflected light from the objective lenses 2 and 24.

Further, in the present invention, a plurality of condensing optical systems 5 and the image pickup device 6 may be arranged so that the reflected light from each lens surface of the objective lenses 2 and 24 can be detected respectively. For example, four condensing optical systems 5 and four condensing optical systems 5 are provided so as to detect light from each lens surface (first surface 21, second surface 22, first surface 25, second surface 26) of two objective lenses. The image pickup device 6 may be used. In that case, it may be adjusted in advance so that the optical axis 12 of the condensing optical system of each condensing optical system 5 and the center of the imaging device 6 coincide with each other.

As described above, the four condensing optical systems 5
In the adjusting device using the image pickup device 6, reflected light from another lens surface may enter the image pickup device 6 of each other. However, it can be said that it is possible to separate the reflected light from each lens surface by detecting only the light amount above a certain threshold value by image processing or the like. It can be said that the above-described image processing and the like can detect the objective lens reflected light 35 having a large divergence.

As a lens for which the tilt and position are adjusted, a lens having an axially symmetric lens surface can be adjusted because the optical axes of the two lens surfaces coincide with each other. Therefore, the lens is not limited to the objective lens, but can be applied to various lenses such as a convex lens, a concave lens, a spherical lens, and an aspherical lens, and a combination of those lenses. It can be said that the objective lens 2 is arranged in the parallel incident light 34.

It can also be said that it is possible to directly observe (measure) the inclination or positional deviation (eccentricity) between the lenses by using an observation optical system for the condensed beam instead of the image pickup device 6.

The present invention can also be expressed as the following lens adjusting device and adjusting method.

Adjustment of the tilt of the lens with respect to the incident optical axis to the lens by using the irradiation optical system that generates a substantially parallel light beam, the lens to be steeped, and the reflected light from each lens surface of the lens to be steeped A method of collecting light reflected from each lens surface of the lens to be steepened, and a position near the position where the reflected light from each lens surface of the lens to be steered is condensed by the condensing optical system. An image pickup device arranged, the direction of the incident optical axis coincides with the reference optical axis direction, the optical axis of the condensing optical system coincides with the reference optical axis, and the reference optical axis When the position where the detection surface of the image pickup device intersects is the reference position, the reference light is adjusted by adjusting the tilt and position of the lens so that the position of the reflected light from each lens surface imaged by the image pickup device matches at the reference position. The tilt of the optical axis of the lens subject to the tilt of the axis It can be said that the inclination adjusting method of the lens it is preferable to adjust.

In the above method, the tilted light is directly measured from the lens surface to adjust the tilt, so that the tilt can be adjusted even in a lens having no edge surface. Also, since the lens surface is directly measured to adjust the tilt, it can be said that the tilt can be adjusted even when the edge surface is tilted with respect to the lens optical axis.

Further, in the irradiation area of the light irradiated onto the lens to be steeped by the illumination optical system, the incident angle of the light incident on each lens surface of the lens to be steeped is the critical angle (the incident angle at which the refraction angle becomes 90 °). It can be said that the lens tilt adjusting method is preferably set as follows.

It can be said that the above method prevents the generation of unnecessary stray light from the lens surface and enables more precise adjustment.

It can also be said that a method for adjusting the inclination of the lens is preferable in which the light source of the illumination optical system emits light having a wavelength different from the central wavelength of the antireflection coating on the lens surface.

By the method described above, it is possible to prevent the light amount of the reflected light from the lens surface from decreasing, so that the position detection accuracy of the reflected light can be improved.

Further, by using the illumination optical system for generating substantially parallel light fluxes, the plurality of lenses to be steeped, and the reflected light from each lens surface of the plurality of lenses to be steeped, a plurality of subjects to the incident optical axis to the lens are projected. A method of adjusting a lens for adjusting the tilt of the optical axis of the lens and the eccentricity between the lenses, which is a condensing optical system for condensing reflected light from each surface of a plurality of lenses to be inspected, and a condensing optical system. The image pickup device is arranged in the vicinity of the position where the reflected light from each lens surface of the plurality of steep lenses is condensed, and the direction of the incident optical axis coincides with the reference optical axis direction.
The optical axis of the condensing optical system coincides with the reference optical axis, and when the position where the reference optical axis and the detection surface of the imaging device intersect is the reference position, the reflected light from each lens surface imaged by the imaging device It is preferable to adjust the tilt and position of each lens so that the positions of the lenses coincide with each other to adjust the tilts of the optical axes of the plurality of lenses to be steep with respect to the tilt of the reference optical axis and the eccentricity between the lenses. It can also be said to be an adjustment method.

By the above method, it becomes possible to detect decentering between lenses, which has been difficult in the past. It can also be said that the positional accuracy of positioning the illumination optical system, the lens to be inspected, and the condensing optical system can be relaxed. Further, since the reflected light from the lens surface is measured, it can be said that the eccentricity between the lenses can be detected with higher accuracy.

It can also be said that it is preferable to provide a plurality of illumination / focus optical systems for adjusting the tilt and decentering of the plurality of lenses to be steepened.

Since the condensing point detected by the image pickup device can be made small by the above method, it can be said that the accuracy of detecting the position of the condensing point, that is, the accuracy of detecting the inclination / eccentricity of the lens can be improved.

Further, the irradiation optical system for generating a substantially parallel light beam, the lens to be steeped, the condensing optical system for condensing the reflected light from each lens surface of the steeped lens, and the condensing optical system The image pickup device is arranged in the vicinity of the position where the reflected light from each lens surface of the lens is condensed, and the direction of the incident optical axis of the light irradiated to the lens to be steep by the irradiation optical system is the reference optical axis direction. The optical axis of the condensing optical system coincides with the reference optical axis, and the position where the reference optical axis and the detection surface of the image pickup device intersect is set as the reference position. The tilt and position with respect to the optical axis based on the position information of the reflected light from each lens surface of the steep lens and the data on the amount of positional deviation of the focal point of the reflected light from each lens surface with respect to the tilt and position of the lens under test. It is preferable that the lens has an arithmetic processing unit for arithmetically processing It can be said that the inclination amount detecting apparatus.

It can be said that the above-mentioned device makes it possible to measure the amount and direction of the tilt and decentering of a combined lens in which tilting and decentering occur.

Further, the irradiation optical system for generating a substantially parallel light beam, the lens to be steeped, the condensing optical system to condense the reflected light from each lens surface of the lens to be steeped, and the condensing optical system It has an imaging device arranged near the position where the light reflected from each lens surface of the lens is condensed and an inclination adjustment jig that adjusts the inclination of the lens. The direction of the incident optical axis coincides with the reference optical axis direction, the optical axis of the condensing optical system coincides with the reference optical axis, and the position where the reference optical axis and the detection surface of the imaging device intersect is the reference position. Then, regarding the position information of the reflected light from each lens surface of the lens to be steep imaged by the imaging device, and the positional deviation amount of the condensing point of the reflected light from each lens surface with respect to the tilt and position of the lens under test, A calculation process that calculates the tilt and position with respect to the optical axis based on the data And means, based on the calculation result, it can be said that the inclination adjusting device is preferably a lens to move the lens by the slope adjusting jig.

It can be said that the above apparatus makes it possible to measure and adjust the amount and direction of the tilt and decentering in the combined lens in which the tilt and decentering occur.

[0184]

As described above, the lens adjusting device of the present invention (the present lens adjusting device), in order to solve the above-mentioned problems, includes an illumination optical system for generating substantially parallel light incident on the lens, A condensing optical system that condenses the reflected light from the lens, an imaging device that detects the condensing point of the reflected light, and the lens is moved to change the position of the condensing point. A lens adjusting unit for adjusting the tilt and the position is provided, and an incident optical axis which is an optical axis of incident light to the lens and a condensing optical system optical axis which is an optical axis of the condensing optical system are predetermined. In addition, the lens adjusting unit adjusts the position of the condensing point to the reference position which is the intersection of the reference optical axis and the detection surface of the imaging device. The lens is moved as described above.

According to this, the light from the illumination optical system is reflected by the lens only when the optical axis of the lens (lens optical axis) coincides with the reference optical axis, and the reflected light is collected at the reference position of the image pickup device. It is supposed to glow.

Therefore, when the lens is moved by the lens adjusting portion so that the position of the focal point of the reflected light of the lens coincides with the reference position, the lens optical axis becomes parallel and coincides with the reference optical axis. Become. That is, the tilt of the lens can be adjusted. In addition, the positional deviation (eccentricity) between the lens optical axis and the reference optical axis can be adjusted.

Further, in the present lens adjusting device, only the light reflected from the lens surface (for example, the objective lens reflected light) is used, that is, the light directly caused by the lens surface is measured, and the tilt of the lens is adjusted (tilt). (Adjustment) -Adjustment of the positional deviation of the lens (position adjustment) can be performed. Therefore, for example, even with a lens that does not have a reference plane (edge surface) perpendicular to the optical axis of the lens, it is possible to adjust the tilt and position of the lens. In addition, since the reflected light directly caused by the surface of the lens is measured, there is an effect that the tilt and position of the lens can be adjusted with high accuracy.

Further, in the present lens adjusting apparatus, in addition to the above configuration, the lens adjusting section has an analyzing section for calculating the amount of positional deviation between the reference position and the focal point, and the calculation result is It is preferable to move the lens based on the above.

According to this, the amount of positional deviation between the reference position and the focal point is calculated by the analysis unit, and the lens adjustment unit moves the lens according to the calculation result. Therefore, for example, there is an effect that the tilt and position of the lens can be adjusted with higher accuracy than by a method of visually observing the converging point and the reference position.

Further, in the present lens adjusting apparatus, in addition to the above-mentioned configuration, the illumination optical system irradiates the incident light so that the incident angle of the incident light on the lens surface of the lens becomes a critical angle or less. It is preferable to have an incident angle control unit that limits the area.

According to this, the incident angle control unit of the illumination optical system blocks, for example, a part (outer edge) of the irradiation area of the light incident on the lens (irradiation area of the light beam). As a result, the irradiation area of the incident light is limited, and the light does not enter the outer peripheral position of the lens. Therefore, the incident angle of the incident light incident on the surface having a small radius of curvature is equal to or less than the critical angle, and an effect of preventing stray light is obtained.

Further, in the present lens adjusting device, in addition to the above configuration, the illumination optical system has a light source that emits light having a wavelength different from the central wavelength of the antireflection film coated on the lens. Preferably.

The lens has a function of reflecting incident light and a function of transmitting incident light. In particular, in order to secure transmitted light, a lens used in an optical pickup device is often provided with, for example, an antireflection coating having a wavelength (used wavelength) of the transmitted light as a central wavelength.

However, according to the above configuration, a light source having a wavelength different from the above-mentioned used wavelength is used. for that reason,
The light of the light source is reflected without being transmitted and can be condensed on the image pickup device. In other words, the amount of reflected light necessary for adjusting the tilt / position of the lens can be reliably ensured, and the accuracy of the tilt / position adjustment can be improved.

Further, in the present lens adjusting device, in addition to the above configuration, a condensing lens provided in the above condensing optical system,
It is preferable to have a condenser lens position adjusting section that moves in the optical axis direction on the reference optical axis.

According to this, in the present lens adjusting device, the condensing lens position adjusting section can minimize the condensing point of the reflected light from the lens on the image pickup device. Therefore, there is an effect that the detection accuracy of the converging point is improved, and the inclination / position adjustment accuracy of the lens can be improved.

Further, in addition to the above configuration, the present lens adjusting device is provided with a beam splitter for splitting the above-mentioned reflected light into a plurality of beams, and the condensing optical system is provided with each of the split reflected lights. The light is condensed, and the imaging device
It is preferable to detect each reflected light focused by the focusing optical system.

Usually, the light reflected from each surface of the lens (reflected light) has different degrees of divergence. In other words, the reflected light can be said to be a collection of a plurality of different divergent lights.

According to this, according to the present lens adjusting device, the reflected light is dispersed by the beam splitter according to the degree of divergence, the condensing optical system provided for each of the spectra condenses the spectrum, and the imaging device The condensing point of each spectrum is detected. Therefore, the light forming the condensing point is spectral. As a result, the size of the focal point is reduced, so that the detection accuracy of the focal point is improved, and the inclination / position adjustment accuracy of the lens is improved.

Further, in order to solve the above-mentioned problems, the present lens adjusting device produces light beams that are substantially parallel to each other from one direction side and the opposite direction side along the optical axis of the combination lens composed of a plurality of lenses. The generated illumination optical system, the condensing optical system that condenses each reflected light from the combination lens thereof, the image pickup device that detects the condensing point of each of the above reflected light, and the above combination lens by moving the above combination lens. A lens adjusting unit that adjusts the tilt and position of the combination lens by changing the position of each condensing point, and an incident optical axis of each incident light to the combination lens from the one direction side and the opposite direction side. , Each condensing optical system optical axis that is the optical axis of the condensing optical system is adjusted to match a predetermined reference optical axis,
The lens adjustment unit is configured to move the combination lens so that the positions of the respective focal points coincide with the respective reference positions where the reference optical axis and the detection surface of the imaging device intersect. .

According to this, in the present lens adjusting device, the condensing optical system is arranged so that, for example, the two incident optical axes / condensing optical system optical axes coincide with the reference optical axis. Further, the position where the reference optical axis and the detection surface of the image pickup device intersect is set as a reference position.

Therefore, the light from the illumination optical system is reflected by the combination lens only when the optical axis of the combination lens coincides with the reference optical axis, and the reflected light is condensed at the reference position of the image pickup apparatus. Become.

Therefore, when the combined lens (each lens) is moved by the lens adjusting device so that the position of the focal point of the reflected light of the combined lens coincides with the reference position, the optical axis of the combined lens becomes the reference. It becomes parallel and coincides with the optical axis. That is, there is an effect that the tilt of the combined lens can be adjusted.
In addition, it is possible to adjust the positional deviation (eccentricity) between the optical axis of the combination lens and the reference optical axis.

Further, in the present lens adjusting device, only the reflected light from the lens surface of the combined lens (for example, the reflected light from the objective lens) is used, that is, the light directly caused by the lens surface is measured, and the tilt of the combined lens is measured. Adjustment (tilt adjustment) / Adjustment of position shift of the combined lens (position adjustment)
Can be done. Therefore, for example, even if the lens does not have a reference plane (edge surface) perpendicular to the lens optical axis,
The effect is that the tilt and position of the lens can be adjusted.
In addition, since the reflected light directly caused by the lens surface is measured, there is an effect that the tilt and position of the lens can be adjusted with high accuracy.

In order to solve the above problems, the lens adjusting method (present lens adjusting method) in the present invention is
An incident optical axis that is the optical axis of the incident light to the lens, and a converging axis that is the optical axis of the light that condenses the reflected light from the lens,
An optical axis position setting step of setting so as to match a predetermined reference optical axis, and making light substantially parallel to the lens to enter, condensing reflected light from the lens, and detecting this condensing point Converging point detection step, and the position of the converging point coincides with the reference position that is the intersection of the detecting surface including the converging point and perpendicular to the reference optical axis, and the reference optical axis. As described above, a lens moving step of moving the lens is included.

According to this, the incident optical axis and the light collecting axis coincide with the reference optical axis.

Therefore, light is reflected by the combination lens only when the optical axis of the lens (lens optical axis) coincides with the reference optical axis, and the reflected light is focused at the reference position.

Therefore, when the lens is moved so that the position of the focal point of the reflected light of the lens coincides with the reference position, the lens optical axis becomes parallel and coincides with the reference optical axis. That is, there is an effect that the tilt of the lens can be adjusted. In addition, the positional deviation (eccentricity) between the lens optical axis and the reference optical axis can be adjusted.

Further, in the present lens adjusting method, only the light reflected from the lens surface (for example, the light reflected by the objective lens) is used, that is, the light directly attributable to the lens surface is measured, and the tilt adjustment / position adjustment of the lens is performed. Can be done. Therefore, for example, even with a lens that does not have a reference plane (edge surface) perpendicular to the optical axis of the lens, it is possible to adjust the tilt and position of the lens. In addition, since the reflected light directly caused by the surface of the lens is measured, there is an effect that the tilt and position of the lens can be adjusted with high accuracy.

In order to solve the above-mentioned problems, the present lens adjusting method uses the optical axis of each incident light from one direction side and the opposite direction side along the optical axis of the combination lens composed of a plurality of lenses. An optical axis position setting step of setting a certain incident optical axis and a condensing axis which is an optical axis of light condensing each reflected light from the combination lens so as to coincide with a predetermined reference optical axis. In addition, a substantially parallel light is made incident on the combination lens, and the reflected light from the combination lens is condensed respectively, and a condensing point detecting step for detecting these condensing points, and at each condensing point described above. , The combination lens so that the positions of the respective condensing points coincide with the reference position, which is a point where the detection surface including the converging point and perpendicular to the reference optical axis and the reference optical axis intersect. And the lens moving process It is a non-configuration.

According to this, the incident optical axis and the converging axis coincide with the reference optical axis. Therefore, only when the optical axis of the combination lens coincides with the reference optical axis,
The light is reflected by the combination lens, and the reflected light is condensed at the reference position.

Therefore, when the combination lens (each lens) is moved so that the position of the focal point of the reflected light of the combination lens coincides with the reference position, the optical axis of the combination lens is parallel to the reference optical axis. Will come to match. That is, there is an effect that the tilt of the combined lens can be adjusted. In addition, the positional deviation (eccentricity) between the combined lens optical axis and the reference optical axis can be adjusted.

Further, in the present lens adjusting method, only the reflected light from the lens surface of the combined lens (eg, the reflected light from the objective lens) is used, that is, the light directly caused by the lens surface is measured, and the tilt of the combined lens is measured. Adjustment / positioning of the combined lens can be performed. Therefore, for example, even if the lens does not have a reference surface (edge surface) perpendicular to the optical axis of the combined lens, the effect of adjusting the tilt and position of the combined lens can be obtained. In addition, since the reflected light directly caused by the surface of the lens is measured, the tilt and position of the combined lens can be adjusted with high accuracy.

[Brief description of drawings]

FIG. 1 is a diagram illustrating an inclination of a lens according to an embodiment of the present invention.
It is a side view which shows a position adjusting device (lens adjusting device).

FIG. 2 is an explanatory diagram illustrating a reference optical axis in the lens adjustment device in FIG.

FIG. 3A is a schematic diagram when the optical axis (lens optical axis) of the objective lens adjusted by the lens adjusting device of FIG. 1 and the reference optical axis are the same, and FIG. It is explanatory drawing which showed the lens optical axis and reference optical axis in detail in a).

4 (a) is a schematic view when the optical axis (lens optical axis) of the objective lens adjusted by the lens adjusting device of FIG. 1 and the reference optical axis do not match, and FIG. 4 (b) is (a). FIG. 3 is an explanatory diagram showing the lens optical axis and the reference optical axis in detail.

5 is a side view showing an objective lens adjustment section provided in the lens adjustment device of FIG. 1 and the lens adjustment device.

6 is a side view showing a state in which reflected light from an objective lens (objective lens reflected light) is partly blocked by a condensing optical system in the lens adjustment device of FIG. 1. FIG.

7 is an explanatory diagram showing the objective lens reflected light from the first surface of the objective lens among the objective lens reflected light shown in FIG. 6. FIG.

FIG. 8 is an explanatory diagram showing, of the objective lens reflected light shown in FIG. 6, the objective lens reflected light from the second surface of the objective lens.

9 is a side view showing a condenser lens position adjusting section of the condenser optical system in the lens adjusting apparatus of FIG. 1 and the lens adjusting apparatus.

10 is a side view showing a lens adjusting device provided with a condensing optical system different from the condensing optical system in the lens adjusting device of FIG. 1. FIG.

11 is a side view showing a state in which the incident angle θ of light entering the objective lens becomes smaller than the critical angle when the orientation of the objective lens adjusted by the lens adjusting device in FIG. 1 is reversed. Is.

FIG. 12 is a side view illustrating a lens adjustment device including two beam splitters, a condensing optical system, and an imaging device.

FIG. 13 is a side view showing the lens adjustment device of FIG. 1 for adjusting two objective lenses.

14A to 14D are monitor diagrams of the image pickup apparatus showing a process of adjusting two objective lenses in the lens adjustment apparatus in FIG.

15A to 15C are monitor diagrams of the image pickup apparatus showing a process of adjusting two objective lenses in a process different from that of FIG. 14 in the lens adjustment device of FIG.

16 is a side view showing a lens adjusting device that adjusts two objective lenses with an autocollimator and the lens adjusting device of FIG. 1. FIG.

17A to 17C are monitor diagrams of the image pickup apparatus showing a process in which two objective lenses are adjusted by the lens adjustment apparatus in FIG.

18 is a side view showing a lens adjusting device using the lens adjusting device of FIG. 1 in place of the autocollimator in the lens adjusting device of FIG.

19 is a side view showing a lens adjusting device provided with a condensing optical system different from the condensing optical system in the lens adjusting device of FIGS. 1 and 10. FIG.

20 shows how the incident angle θ of light entering the objective lens becomes larger than the incident angle θ in FIG. 11 when the orientation of the objective lens adjusted by the lens adjusting device in FIG. 1 is reversed. It is the explanatory view shown.

[Explanation of symbols]

1a, 1b Lens tilt / position adjusting device (lens adjusting device) 2 Objective lens (lens, combination lens) 3 Illumination optical system 4a, 4b Beam splitter 5a, 5b Condensing optical system 6a, 6b Imaging device 7 Objective lens adjustment Part (lens adjusting part) 10a, 10b Lens tilt / position adjusting device (lens adjusting device) 11 Incident optical axis 12 Condensing optical system optical axis (condensing axis) 13a, 13b Reference optical axis 14 Lens optical axis (combination) Optical axis of lens) 15 Optical axis of lens (optical axis of combined lens) 21 First surface of objective lens 22 Second surface of objective lens 24 Objective lens (lens, combined lens) 25 First surface of objective lens 26 Objective lens Second surface 31 Light source 33 Parallel light (parallel light) 34 Parallel incident light (parallel light) 35a to 35d Objective lens reflected light (antireflection from lens surface Light) 36 Illumination optical systems 37a to 37d Condensing point 39 Aperture (incident angle control section) 51 Aperture (incident angle control section) 52 Condensing lens 53 Condensing lens position adjusting section (lens position adjusting section) 55 Condensing optical system 71 Analysis Part 72 Moving Part 120 Objective Lens (Lens) 121 First Surface of Objective Lens 122 Second Surface of Objective Lens 140 Lens Optical Axis a1, a2 Virtual Light Emitting Points o1, o2 Virtual Light Emitting Point P Outer Perimeter Position θ Incident Angle

Claims (9)

[Claims] 1. An illumination optical system for generating substantially parallel light incident on a lens, a condensing optical system for condensing reflected light from the lens, and an imaging device for detecting a condensing point of the reflected light. And a lens adjusting unit that adjusts the tilt and position of the lens by moving the lens to change the position of the condensing point, and an incident optical axis that is an optical axis of incident light to the lens, The optical axis of the condensing optical system, which is the optical axis of the condensing optical system, is adjusted so as to coincide with a predetermined reference optical axis, and the lens adjusting unit adjusts the position of the condensing point to A lens adjusting device characterized in that the lens is moved so as to coincide with a reference position where the reference optical axis and the detection surface of the imaging device intersect. 2. The lens adjusting section has an analyzing section for calculating a positional deviation amount between the reference position and the condensing point, and the lens is moved based on the calculation result. The lens adjusting device according to claim 1. 3. The illumination optical system has an incident angle control section for limiting an irradiation area of the incident light so that the incident angle of the incident light on the lens surface of the lens becomes a critical angle or less. The lens adjusting device according to claim 1, wherein the lens adjusting device is provided. 4. The illumination optical system according to claim 1, further comprising a light source that emits light having a wavelength different from the central wavelength of the antireflection film coated on the lens. The lens adjustment device according to any one of items. 5. A condenser lens position adjusting section for moving the condenser lens provided in the condenser optical system in the optical axis direction on the reference optical axis. 2. The lens adjusting device according to any one of 1. 6. A beam splitter for splitting the reflected light into a plurality of beams is provided, and the condensing optical system condenses the reflected light for each of the spectrally separated reflected lights. 6. The reflected light collected by the optical optical system is detected, and the reflected light is detected.
The lens adjusting device according to the item. 7. An illumination optical system for generating light substantially parallel to one side and the other side along an optical axis of a combination lens composed of a plurality of lenses, and reflected light from the combination lens. A condensing optical system for condensing light, an image pickup device for detecting a condensing point of each of the above-mentioned reflected lights, and a position of each condensing point is changed by moving the above-mentioned combination lens, A lens adjusting unit for adjusting the position, and an incident optical axis of each incident light to the combination lens from each of the one direction side and the opposite direction side, and each condensing optical system that is an optical axis of the condensing optical system. The optical axis is adjusted so as to match a predetermined reference optical axis, and the lens adjustment unit described above sets the position of each of the focal points to the reference optical axis and the detection surface of the imaging device. Matches each reference position where Lens adjustment device, characterized in that moving the urchin the lens. 8. A reference optical axis, which is a predetermined reference optical axis, having an incident optical axis which is an optical axis of incident light on a lens and a condensing axis which is an optical axis of light on which reflected light from the lens is condensed. And an optical axis position setting step of setting so as to match with the above, and a condensing point detecting step of detecting the condensing point by converging the light substantially parallel to the lens and condensing the reflected light from the lens. , The lens is adjusted so that the position of the condensing point coincides with the reference position which is a point where the detection surface including the condensing point and perpendicular to the reference optical axis intersects with the reference optical axis. And a lens moving step of moving the lens. 9. An incident optical axis which is an optical axis of each incident light from one direction side and an opposite direction side along an optical axis of a combination lens composed of a plurality of lenses, and each reflection light from the combination lens. An optical axis position setting step of setting a condensing axis which is an optical axis of the condensed light so as to match a predetermined reference optical axis, and causing substantially parallel light to enter the combination lens, Condensing point detection step of converging the reflected light from each of the combination lenses and detecting these condensing points, and for each condensing point, with respect to the reference optical axis including this condensing point A lens including a vertical detection surface and a lens moving step of moving the combined lens so that positions of respective light condensing points coincide with each other at a reference position where the reference optical axis intersects. Adjustment method.