JP3934938B2 - Flat panel display manufacturing equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an apparatus for manufacturing a flat display device such as a surface conduction electron-emitting device (hereinafter referred to as SED). In place In particular, an SED manufacturing apparatus for aligning and assembling either one of two plates (rear plate and face plate) constituting a vacuum envelope of an SED and a grid. In place Related.
[0002]
[Prior art]
Conventionally, as a flat display device, a field emission display (FED), a plasma display (PDP), and the like are known. In addition, SED is being developed as a kind of FED.
[0003]
The SED has a face plate and a rear plate that are arranged to face each other with a predetermined gap therebetween. These plates are joined to each other through a rectangular frame-like side wall and evacuated inside. Constructs a vacuum envelope. Three color phosphor layers are formed on the inner surface of the face plate, and a large number of emitters corresponding to each pixel are arranged on the inner surface of the rear plate as an electron emission source for exciting the phosphor. Each emitter is composed of an electron emission portion, a pair of electrodes for applying a voltage to the electron emission portion, and the like.
[0004]
A plate-like grid is disposed between the plates. The grid has a plurality of beam passage holes formed in a positional relationship aligned with the emitter, and a plurality of holes for maintaining a gap between the plates by contacting the inner surface of the face plate and the inner surface of the rear plate. Columnar spacers are provided.
[0005]
Thus, the electron beam emitted from each emitter passes through the corresponding beam passage hole of the spacer grid and is converged on a desired phosphor layer, and the phosphor is excited and emitted to display an image. .
[0006]
In the SED, a high degree of vacuum is required for the vacuum envelope formed by the face plate, the rear plate, and the frame-shaped side wall. For this reason, the plurality of columnar spacers provided on the grid function to prevent the face plate and the rear plate from being destroyed by atmospheric pressure.
[0007]
[Problems to be solved by the invention]
In order to display a high-quality image in the SED, a pixel includes an emitter provided on the inner surface of the rear plate, a beam passage hole formed in the spacer grid, and a phosphor layer formed on the inner surface of the face plate. It is important to align the face plate, spacer grid, and rear plate so that they match exactly each time.
[0008]
Insufficient alignment causes various problems. For example, if the alignment between the emitter and the beam passage hole is insufficient in an arbitrary pixel combination, a part or all of the beam emitted from the emitter is damaged. Further, if the alignment between the beam passage hole and the phosphor is insufficient, the beam does not converge at all on the phosphor, or an amount of beam sufficient to cause the phosphor to emit light with the necessary luminance may not converge. As a result, when an image is displayed, the brightness of the whole screen is insufficient, uneven brightness, or insufficient focus.
[0009]
Further, when combining the rear plate, the spacer grid, and the face plate, if at least one of the rear plate, the spacer grid, and the face plate is distorted, the tip (contact surface) of the spacer provided on the grid is moved to the rear. Contact with the inner surface of the plate or the inner surface of the face plate. When the spacer contacts the inner surface of the plate, an undesirable shearing force acts on the spacer and it breaks, or the emitter on the inner surface of the rear plate or the phosphor layer on the inner surface of the face plate is damaged.
[0010]
Therefore, it has been desired to develop a flat display device manufacturing apparatus that can be assembled by aligning the rear plate or the face plate and the spacer grid with high accuracy without damaging the spacer or damaging the inner surface of the plate.
[0011]
[Means for Solving the Problems]
An apparatus for manufacturing a flat display device according to an embodiment of the present invention covers substantially the entire surface of one plate of two plates arranged to face each other so as to constitute a vacuum envelope of the flat display device. First adsorption consisting of a flat rigid body Face By adsorbing, a first holding mechanism that holds one plate in a state in which the flatness of the inner surface of one plate facing the other plate is increased, and between the two plates when the vacuum envelope is configured By adsorbing a plate-like grid having a plurality of spacers for maintaining a gap from the side opposite to the inner surface of one plate, the plurality of contact surfaces where the plurality of spacers are in contact with the inner surface are the same. A second holding mechanism that holds the grid so as to be substantially aligned with a flat surface, and a holding that holds the second holding mechanism in a positional relationship in which the inner surface of one plate faces a plurality of contact surfaces of a plurality of spacers substantially parallel to each other. A member, a positioning mechanism that moves the first holding mechanism in a direction substantially parallel to the inner surface of one plate, and aligns the one plate and the grid in a predetermined positional relationship; As a plurality of abutment surfaces of the spacer facing substantially parallel via a micro gap, and a positioning mechanism for positioning the second holding mechanism is moved in a direction toward the retaining member to one of the plates The second holding mechanism has a second adsorption surface made of a flat rigid body that covers substantially the entire surface of the grid, and generates a magnetic force to adsorb the grid to the second adsorption surface. .
[0012]
Further, according to the embodiment of the present invention Flat display The manufacturing apparatus includes a first suction composed of a flat rigid body covering substantially the entire surface of one of two plates opposed to each other so as to constitute a vacuum envelope of a flat display device. Face By adsorbing, a first holding mechanism that holds one plate in a state in which the flatness of the inner surface of one plate facing the other plate is increased, and between the two plates when the vacuum envelope is configured By adsorbing a plate-like grid having a plurality of spacers for maintaining a gap from the side opposite to the inner surface of one plate, the plurality of contact surfaces where the plurality of spacers are in contact with the inner surface are the same. The second holding mechanism that holds the grid so as to be substantially aligned with the plane, and the second holding so that the inner surface of one of the plates and the plurality of contact surfaces of the plurality of spacers face each other through a minute gap. The positioning mechanism for positioning the mechanism, and the first holding mechanism moved in a direction substantially parallel to the inner surface of one plate in a state where the second holding mechanism has been positioned, thereby moving the one plate and the grid to the minute gap. Comprising an alignment mechanism for aligning in a predetermined positional relationship while maintaining the The second holding mechanism has a second adsorption surface made of a flat rigid body that covers substantially the entire surface of the grid, and generates a magnetic force to adsorb the grid to the second adsorption surface. .
[0015]
Manufacturing apparatus for the flat display device described above In place According to this, the outer surface of one plate is adsorbed on the first adsorption surface of the first holding mechanism to increase the flatness of the inner surface, and the grid is adsorbed on the second adsorption surface of the second holding mechanism so that the plurality of spacers are applied. Since the contact surfaces are substantially aligned on the same plane, when the inner surface of one plate and the contact surfaces of the plurality of spacers face each other through a minute gap, they can be prevented from contacting each other.
[0016]
As a result, even when at least one of the one plate and the grid is distorted, when aligning the one plate and the grid, the inner surface of the plate and the spacer are not in contact with each other. Damage to the inner surface of the plate can be prevented.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0018]
FIG. 1 shows a cross-sectional view of a surface conduction electron-emitting device (SED) 1 as an example of a flat display device manufactured by a manufacturing apparatus described later according to an embodiment of the present invention. FIG. 2 is an external perspective view of the spacer grid 10 incorporated in the SED 1. Before describing the manufacturing apparatus and manufacturing method of the SED 1, the SED 1 will be described first.
[0019]
The SED 1 includes a rear plate 2 and a face plate 4 each made of rectangular plate glass. These two plates 2 and 4 are opposed to each other with a predetermined gap in a state of being aligned with high accuracy. The rear plate 2 and the face plate 4 are joined to each other at peripheral edges via a rectangular frame-shaped side wall 6 made of glass to constitute a flat vacuum envelope.
A phosphor screen 11 is formed on the inner surface 4 a on the side where the face plate 4 faces the rear plate 2. The phosphor screen 11 is configured by arranging red, blue, and green phosphor layers and a black colored layer. These phosphor layers are configured in stripes or dots. A metal back made of aluminum or the like is formed on the phosphor screen 11.
[0020]
A large number of electron-emitting devices (emitters) 12 each emitting an electron beam are provided on the inner surface 2 a on the side where the rear plate 2 faces the face plate 4 as an electron emission source for exciting the phosphor layer. These electron-emitting devices 12 are arranged in a plurality of columns and a plurality of rows corresponding to each pixel.
[0021]
The side wall 6 functioning as a bonding member is sealed to the peripheral edge of the rear plate 2 and the peripheral edge of the face plate 4 by, for example, a frit glass 13 made of low-melting glass to bond the rear plate 2 and the face plate 4 together. Yes.
[0022]
A spacer grid 10 is disposed between the rear plate 2 and the face plate 4. The spacer grid 10 is formed by joining and arranging an upper spacer 14 and a lower spacer 15 at predetermined intervals on the front and back of a metal rectangular plate-like grid 8. The spacer grid 10 functions to prevent the rear plate 2 and the face plate 4 from being destroyed by atmospheric pressure.
[0023]
Further, the grid 8 is provided with an electron passage hole 16 for allowing electrons emitted from the electron-emitting device 12 to reach the phosphor screen 11. That is, the electron-emitting device 12, the electron passage hole 16, and the phosphor layer of the phosphor screen 11 are arranged in a line corresponding to each pixel.
[0024]
The SED 1 configured as described above displays an image as follows.
[0025]
First, an electron beam is emitted from a plurality of electron-emitting devices 12 provided on the inner surface 2a of the rear plate 2 based on an image signal input from a signal source (not shown). The electron beam emitted from each electron-emitting device 12 passes through the corresponding electron passage hole 16 of the grid 8 and is converged on the desired phosphor layer 11. Thereby, the phosphor is excited and emitted to display an image.
[0026]
Next, with reference to FIG. 3 to FIG. 5, an apparatus 100 for manufacturing the SED 1 according to the embodiment of the present invention will be described. Here, the manufacturing apparatus 100 for aligning and assembling the rear plate 2 of the SED 1 and the spacer grid 10 with high accuracy will be described. In the present embodiment, a frame-shaped side wall 6 is previously joined to the inner surface 2a of the rear plate 2 that is put into the manufacturing apparatus 100, and the spacer grid is aligned as described later. A plurality of metal projections 9 for temporarily fastening 10 are joined.
[0027]
The manufacturing apparatus 100 includes a vacuum suction plate 21 (first holding mechanism) that sucks and holds the outer surface 2 b of the rear plate 2. The vacuum suction plate 21 is formed in a substantially rectangular plate shape and has a suction surface 21 a (first suction surface) that is in contact with the outer surface 2 b of the rear plate 2, that is, a flat surface that covers the substantially entire surface of the rear plate 2. A plurality of negative pressure chambers 22 for generating a negative pressure are formed inside the vacuum suction plate 21. The adsorption surface 21a is formed of a flat rigid body that is not deformed by an external force. A plurality of holes 22 a communicating with the negative pressure chamber 22 are formed in the suction surface 21 a.
[0028]
In addition, a plurality of illumination through-holes 21 b for detecting a mark for alignment described later are formed in the periphery of the vacuum suction plate 21. Further, the vacuum suction plate 21 is formed with a plurality of through holes 21c through which a plurality of push-up rods 24a of a separation mechanism 24 described later are inserted.
[0029]
The vacuum suction plate 21 having the above structure is detachably set with respect to the manufacturing apparatus 100 via a plurality of sliding members 102 provided on a rectangular plate-like base 100 a installed on the work table 101. That is, the vacuum suction plate 21 can be moved in any direction along a substantially horizontal plane in a state set in the manufacturing apparatus 100.
[0030]
A plurality of through holes 100b are formed in the base 100a at positions corresponding to the through holes 21b of the vacuum suction plate 21. An illumination light source 103 is provided near the lower end of each through hole 100b. In addition, a plurality of through holes 100c for inserting the push-up rod 24a are formed in the base 100a corresponding to the through holes 21c of the vacuum suction plate 21, respectively. At least one of the plurality of through holes 21c and 100c for inserting the push-up rod 24a has a diameter larger than the diameter of the push-up rod 24a.
[0031]
Near the periphery of the base 100a, a plurality of alignment mechanisms 23 for projecting the vacuum suction plate 21 along the horizontal plane in the direction indicated by the arrow X and the direction indicated by the arrow Y are projected from the base 100a. The support members 23a are attached to each other. Each alignment mechanism 23 functions to move the vacuum suction plate 21 in a predetermined direction by abutting and pressing against the corresponding edge of the vacuum suction plate 21. At this time, the sliding member 102 provided between the base 100 a and the vacuum suction plate 21 smoothes the movement of the vacuum suction plate 21.
[0032]
Further, a separation mechanism 24 is provided below the vacuum suction plate 21 and below the base 100a. The separation mechanism 24 has a plurality of push-up rods 24 a that can penetrate the through holes 100 c of the base 100 a and the corresponding through holes 21 c of the vacuum suction plate 21. Each push-up rod 24a protrudes from the connecting plate 24b, and its tip 24c can contact the outer surface 2b of the rear plate 2 that is in contact with the suction surface 21a of the vacuum suction plate 21.
[0033]
That is, by raising the separation mechanism 24 from the state shown in FIG. 5, the tip 24c of each push-up rod 24a pushes up the rear plate 2. At this time, if the negative pressure by the vacuum suction plate 21 is released, the suction surface 21a of the vacuum suction plate 21 and the outer surface 2b of the rear plate 2 are separated from each other.
[0034]
Further, a positioning mechanism 30 is provided on the base 100 a of the manufacturing apparatus 100 for moving the magnet attracting plate 41 attracting the spacer grid 10 up and down to position the spacer grid 10 with respect to the rear plate 2. Yes.
[0035]
The positioning mechanism 30 has two rail support bases 31 in a positional relationship that sandwiches the vacuum suction plate 21 described above along the arrow X direction. Each rail support 31 is provided with two rails 32 that are integrally provided in the vertical direction from the base 100a and that extend in the vertical direction on surfaces facing each other. A holding member 34 having a substantially L-shaped cross section is attached to each rail 32 via a slider 33 so as to be movable up and down.
[0036]
The four holding members 34 move up and down along the rails 32 in a state where the end sides of the magnet attracting plate 41 described below are supported. Below each holding member 34, an abutting member 35 that restricts the downward movement of the holding member 34 by abutting the lower surface of the holding member 34 is provided. The contact member 35 is provided such that the height of the contact surface 35a at the upper end thereof can be adjusted in the moving direction of the holding member 34, that is, in the vertical direction. That is, by adjusting the height of the contact surface 35 a, the stop height of the holding member 34, that is, the stop height of the suction surface 41 a of the magnet suction plate 41 can be adjusted.
[0037]
The magnet attracting plate 41 is formed in a substantially rectangular plate shape, and has a flat surface made of a rigid body, that is, an attracting surface 41a (second attracting surface). The flat suction surface 41 a has a size that covers substantially the entire surface of the spacer grid 10.
[0038]
A plurality of receiving holes 41c for receiving a plurality of cylindrical magnets 42 for generating a magnetic field are formed on the back surface 41b side of the magnet attracting plate 41, that is, the side away from the attracting surface 41a. The magnet attracting plate 41 functions as a second holding mechanism in a state where the magnet 42 is received in each of the plurality of receiving holes 41c. The plurality of magnets 42 are each attached to a support plate 43 via a support rod 42a to constitute a magnet unit.
[0039]
Further, a plurality of through holes 41 d corresponding to the above-described through holes 21 b and 100 b are formed near the periphery of the magnet attracting plate 41. A camera 44 for picking up an alignment mark is disposed further above the upper end of each through hole 41d.
[0040]
In the periphery of the magnet attracting plate 41 having the above-described structure, four engagement pieces 45 each having a substantially rectangular plate shape are integrally provided to be engaged with the four holding members 34 described above. In other words, in a state where the spacer grid 10 is attracted to the attracting surface 41a of the magnet attracting plate 41 by the magnetic force, the four engaging pieces 45 on the periphery of the magnet attracting plate 41 are set in the posture in which the spacer grid 10 faces downward. By engaging with each holding member 34, the magnet attracting plate 41 can be set in the manufacturing apparatus 100.
[0041]
Next, the manufacturing method of SED1 using the manufacturing apparatus 100 comprised as mentioned above is demonstrated with reference to the flowchart of FIG.
[0042]
First, a negative pressure is generated on the suction surface 21a through the negative pressure chamber 22 of the vacuum suction plate 21, and the outer surface 2b of the rear plate 2 is sucked on the suction surface 21a (step 1). In this embodiment, the vacuum suction plate 21 is set in the manufacturing apparatus 100 in advance. However, after the rear plate 2 is sucked, the vacuum suction plate 21 may be set in the manufacturing apparatus 100.
[0043]
When the rear plate 2 is sucked, the rear plate 2 is set at a predetermined position on the suction surface 21 a of the vacuum suction plate 21 with the outer surface 2 b facing down, and then negative pressure is generated through the negative pressure chamber 22. As a result, even when the outer surface 2b of the rear plate 2 is pressed against the suction surface 21a made of a flat rigid body and is in contact with the rear plate 2, the flatness of the outer surface 2b is increased. As a result, the flatness of the inner surface 2a of the rear plate 2 is also increased.
[0044]
Next, a plurality of magnets 42 of the magnet unit are set in a plurality of receiving holes 41 formed on the back side of the magnet attracting plate 41 removed from the holding member 34, and the magnet attracting plate 41 has its attracting surface 41a facing upward. Install so that it faces. Then, the spacer grid 10 is placed at a predetermined position on the attracting surface 41a of the magnet attracting plate 41, and the spacer grid 10 is attracted to the attracting surface 41a by magnetic force (step 2). Although the magnet 42 may be formed of a permanent magnet, it may be constituted by an electromagnet and energized after placing the spacer grid 10 on the attracting surface 41a.
[0045]
At this time, the tips of the plurality of upper spacers 14 provided on the side opposite to the side facing the inner surface 2 a of the rear plate 2, that is, the contact surfaces 14 a (FIG. 2) are attracted by the magnet attracting plate 41. The spacer grid 10 is attracted to the attracting surface 41a of the magnet attracting plate 41 so as to be in contact with the surface 41a. Alternatively, a plurality of escape holes (not shown) for allowing the upper spacer 14 to escape may be formed in the attracting surface 41a of the magnet attracting plate 41 so that the upper surface 8a of the grid 8 is attracted to the attracting surface 41a. .
[0046]
In any case, even when the spacer grid 10 is distorted by adsorbing the spacer grid 10 to the adsorption surface 41a made of a flat rigid body, the flatness of the spacer grid 10 is increased, and as a result. The distortion of the spacer grid 10 is corrected so that the tips of the plurality of lower spacers 15 on the side away from the suction surface 41a, that is, the plurality of contact surfaces 15a are substantially aligned in the same plane.
[0047]
And the magnet adsorption | suction board 41 of the state which adsorb | sucked the spacer grid 10 as mentioned above is set to the manufacturing apparatus 100 (step 3). At this time, the magnet attracting plate 41 is inverted to the posture shown in FIG. 4 so that the spacer grid 10 is on the lower side, and in this state, the four engaging pieces 45 provided on the periphery of the magnet attracting plate 41 are positioned. Engaged on the four retaining members 34 of the mechanism 30. The four engagement pieces 45 may be fixed to the four holding members 34, respectively. Further, when the magnet attracting plate 41 is set in the manufacturing apparatus 100, each holding member 34 of the positioning mechanism 30 is waiting at the upper position shown in FIG. 4, and the gap between the spacer grid 10 and the rear plate 2 is sufficient. Is secured.
[0048]
In this state, the alignment mark (not shown) of the rear plate 2 and the alignment mark (not shown) of the grid 8 are illuminated by the light source 103 through the plurality of sets of through holes 100b, 21b, and 41d. Two superimposed marks are photographed via a camera 44 provided above the. At this time, for example, the mark formed on the rear plate 2 is formed by printing, for example, and the mark provided on the grid 8 is formed as a through hole. Then, an image photographed via the camera 44 is displayed via a display unit (not shown), and the deviation of the mark is monitored by the operator.
[0049]
Then, the vacuum suction plate 21 is translated by the plurality of alignment mechanisms 23, and the rear plate 2 and the spacer grid 10 are aligned in a predetermined positional relationship so that the mark shift is eliminated (step 4). At this time, since a sufficient gap is maintained between the spacer grid 10 and the rear plate 2, the lower spacer 15 and the inner surface 2a of the rear plate 2 do not come into contact with each other.
[0050]
Further, as shown in FIG. 5, the positioning mechanism 30 is operated, the four holding members 34 are lowered along the rails 32, and the magnet attracting plate 41 in a state where the spacer grid 10 is attracted and held is directed toward the rear plate 2. It is lowered (step 5). At this time, the spacer grid 10 is lowered while the spacer grid 10 is aligned with the rear plate 2.
[0051]
Then, the lower end surfaces 34a of the four holding members 34 are brought into contact with the contact surfaces 35a of the four contact members 35, the respective holding members 34 are stopped at the predetermined height positions, and the magnet attracting plate 41 is stopped. The spacer grid 10 is positioned with respect to the rear plate 2 (step 6). At this time, the spacer grid 10 is arranged in such a manner that a minute gap is formed between the contact surfaces 15a of the plurality of lower spacers 15 of the spacer grid 10 and the inner surface 2a of the rear plate 2 so that they do not come into contact with each other. The inner surface 2a of the plate 2 is approached. Alternatively, the height position of the spacer grid 10 is set such that the contact surface 15a of each lower spacer 15 contacts the inner surface 2a of the rear plate 2 with a slight load. In any case, the height is set so as to prevent the lower spacer 15 from being broken or the inner surface 2 of the rear plate 2 from being damaged.
[0052]
In this state, several locations near the periphery of the spacer grid 10 are temporarily fastened to the protrusions 9 that are joined in advance to the inner surface 2a of the rear plate 2 (step 7). That is, the spacer grid 10 is fixed to the rear plate 2 so that the rear plate 2 and the spacer grid 10 aligned through the minute gap do not shift. At this time, each protrusion 9 on the inner surface 2 of the rear plate 2 and the lower surface 8b of the spacer grid 10 are welded at a plurality of locations by a laser 90 (FIG. 5) or the like.
[0053]
However, if the spacer grid 10 does not move and does not cause a positional shift, the temporary fixing process in step 7 may be omitted and the spacer grid 10 may be placed on the rear plate 2 without being fixed.
[0054]
Thereafter, the plurality of magnets 42 of the magnet unit are extracted from the plurality of receiving holes 41c provided on the back side of the magnet attracting plate 41, and the magnetic force by the magnet attracting plate 41 is demagnetized. Then, the magnet attracting plate 41 that has lost the attracting force due to the magnetic force is separated from the spacer grid 10 temporarily attached to the rear plate 2, that is, removed from the four holding members 34, and the magnet attracting plate 41 is removed from the manufacturing apparatus 100. Leave (step 8).
[0055]
Furthermore, the negative pressure by the vacuum suction plate 21 is released (step 9), and the plurality of push-up rods 24a of the separation mechanism 24 are pushed up through the through hole 100c of the base 100a and the through hole 21c of the vacuum suction plate 21, respectively. The outer surface 2b of the rear plate 2 is pushed up by the tip 24c of the push-up rod 24a, and the suction surface 21a of the vacuum suction plate 21 and the outer surface 2b of the rear plate 2 are separated (step 10).
[0056]
Finally, an assembly (an assembly of the rear plate 2 and the spacer grid 10) in a state where the suction by the magnet suction plate 41 and the vacuum suction plate 21 is released is taken out from the manufacturing apparatus 100 (step 11).
[0057]
As described above, according to the present embodiment, the outer surface 2b of the rear plate 2 is attracted to the suction surface 21a made of a flat rigid body of the vacuum suction plate 21 to increase the flatness of the inner surface 2a. The spacer grid 10 is attracted to the flat rigid suction surface 41a so that the contact surfaces 15a of the plurality of lower spacers 15 are substantially aligned on the same plane. When facing the contact surface 15a through a minute gap, it is possible to prevent both from contacting.
[0058]
Thus, even when at least one of the rear plate 2 and the spacer grid 10 is distorted, when the rear plate 2 and the spacer grid 10 are aligned, the inner surface 2a of the rear plate 2 and the lower spacer 15 The contact surface 15a is not brought into contact with each other, and it is possible to prevent the lower spacer 15 from being broken and the electron-emitting device 12 provided on the inner surface 2a of the rear plate 2 from being damaged, and both can be aligned with high accuracy.
[0059]
In addition, this invention is not limited to embodiment mentioned above, A various deformation | transformation is possible within the scope of this invention.
[0060]
For example, in the above-described embodiment, the case where the rear plate 2 and the spacer grid 10 are assembled while being aligned has been described. However, the present invention is applied to the case where the face plate 4 and the spacer grid 10 are aligned and assembled. Also good.
[0061]
Further, in the above-described embodiment, the SED 1 manufacturing apparatus In place As described above, the present invention may be applied as a manufacturing apparatus for manufacturing another flat display device such as an FED or a PDP.
[0062]
In the above-described embodiment, the positioning mechanism 23 is operated to align the rear plate 2 with respect to the spacer grid 10, and then the two are brought close to each other to be positioned through the minute gap. The positioning mechanism 23 may be operated in a state in which the minute gap is formed by making the two close to each other to align the two.
[0063]
【The invention's effect】
As described above, since the flat panel display manufacturing apparatus according to the embodiment of the present invention has the above-described configuration and operation, the rear plate can be obtained without damaging the spacers or damaging the plate inner surface. Alternatively, the face plate and the spacer grid can be assembled with high precision alignment.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a schematic configuration of an SED manufactured by a manufacturing apparatus and a manufacturing method according to an embodiment of the present invention.
FIG. 2 is a schematic perspective view showing the appearance of a spacer grid incorporated in the SED of FIG.
3 is a schematic perspective view showing an appearance of a manufacturing apparatus according to an embodiment of the present invention for manufacturing the SED of FIG.
4 is a cross-sectional view showing the structure of the manufacturing apparatus of FIG. 3;
5 is a cross-sectional view showing the structure of the manufacturing apparatus of FIG. 3;
6 is a flowchart for explaining an SED manufacturing method by the manufacturing apparatus of FIG. 3;
[Explanation of symbols]
1 ... SED,
2 ... Rear plate,
2a ... inside,
2b ... the outer surface,
4 ... Face plate,
6 ... sidewall,
8 ... Grid,
9 ... protrusions,
10 ... spacer grid,
11 ... phosphor screen,
12 ... electron-emitting device,
14 ... Upper spacer,
15 ... Lower spacer,
16 ... electron passage hole,
21 ... Vacuum suction plate,
21a ... adsorption surface,
22 ... negative pressure chamber,
23 ... Positioning mechanism,
24. Separation mechanism,
30 ... positioning mechanism,
34 ... holding member,
35 ... abutting member,
41 ... Magnet suction plate,
41a ... adsorption surface,
41c ... receiving hole,
42 ... Magnet,
44 ... Camera,
100 ... Manufacturing apparatus.

Claims (6)

By adsorbing a first adsorption surface made of a flat rigid body covering substantially the entire surface to the outer surface of one of the two plates arranged to face each other to constitute a vacuum envelope of the flat display device, the other A first holding mechanism for holding one plate in a state in which the flatness of the inner surface of the one plate facing the plate is increased;
By adsorbing a plate-like grid provided with a plurality of spacers for maintaining a gap between two plates when a vacuum envelope is constructed, from the side opposite to the side facing the inner surface of one plate, A second holding mechanism that holds the grid so that a plurality of contact surfaces that are in contact with the inner surface of the spacer are substantially aligned on the same plane;
A holding member that holds the second holding mechanism in a positional relationship in which the inner surface of one plate and the plurality of contact surfaces of the plurality of spacers face each other substantially in parallel;
An alignment mechanism that moves the first holding mechanism in a direction substantially parallel to the inner surface of the one plate to align the one plate and the grid in a predetermined positional relationship;
The second holding mechanism is positioned by moving the holding member in a direction approaching one plate so that the inner surface of one plate and the plurality of contact surfaces of the plurality of spacers face each other substantially in parallel through a minute gap. A positioning mechanism ,
The second holding mechanism has a second suction surface made of a flat rigid body that covers substantially the entire surface of the grid, and generates a magnetic force to attract the grid to the second suction surface . The first holding mechanism manufacturing apparatus according to claim 1, Ru adsorbed in the first adsorption surface caused a negative pressure to the outer surface of one plate.   The manufacturing apparatus according to claim 1, wherein the second holding mechanism releases the holding of the grid by releasing the adsorption by the magnetic force after aligning the one plate and the grid in a predetermined positional relationship. By adsorbing a first adsorption surface made of a flat rigid body covering substantially the entire surface to the outer surface of one of the two plates arranged to face each other to constitute a vacuum envelope of the flat display device, the other A first holding mechanism for holding one plate in a state in which the flatness of the inner surface of the one plate facing the plate is increased;
By adsorbing a plate-like grid provided with a plurality of spacers for maintaining a gap between two plates when a vacuum envelope is constructed, from the side opposite to the side facing the inner surface of one plate, A second holding mechanism that holds the grid so that a plurality of contact surfaces that are in contact with the inner surface of the spacer are substantially aligned on the same plane;
A positioning mechanism for positioning the second holding mechanism such that the inner surface of one plate and the plurality of contact surfaces of the plurality of spacers face each other substantially in parallel via a minute gap;
With the second holding mechanism positioned, the first holding mechanism is moved in a direction substantially parallel to the inner surface of one of the plates, and the one plate and the grid are aligned in a predetermined positional relationship while maintaining the minute gap. An alignment mechanism ,
The second holding mechanism has a second suction surface made of a flat rigid body that covers substantially the entire surface of the grid, and generates a magnetic force to attract the grid to the second suction surface . The first holding mechanism, the manufacturing apparatus according to claim 4, Ru adsorbed in the first adsorption surface caused a negative pressure to the outer surface of one plate.   The manufacturing apparatus according to claim 4, wherein the second holding mechanism releases the holding of the grid by releasing the adsorption by the magnetic force after aligning the one plate and the grid in a predetermined positional relationship.

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