JP3902394B2 - Optical communication module and optical communication device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical communication module in optical communication, and more particularly, to an optical communication module including a mirror that reflects and returns signal light and a method for manufacturing the same.
[0002]
[Prior art]
For example, Japanese Patent Laid-Open No. 10-224310 shown in FIG. 10 discloses a conventional technology of an optical communication module in which a mirror that reflects propagating light is provided in the middle of an optical waveguide to couple the propagating light to a light receiving element. There is an optical communication module.
[0003]
The prior art disclosed in Japanese Patent Laid-Open No. 10-224310 aims to realize an optical communication module that performs bidirectional communication using signal light of the same wavelength with a small and simple configuration. A Y-branch type optical waveguide is formed on the optical waveguide substrate, and a mirror for reflecting the propagating light to the surface side of the optical waveguide substrate is provided in the middle of the branch-side waveguide, and at the intersection of this one branch-side waveguide and the mirror A light receiving element is provided so as to face, and a light emitting element is provided so as to face the intersection of the other branch side waveguide and the mirror.
[0004]
By using a Y-branch type optical waveguide that can be formed finely and with high precision on this optical waveguide substrate, and by making it possible to mount the light receiving element and the light emitting element on the optical waveguide substrate, the same An optical communication module that performs bidirectional communication using signal light of a wavelength is configured to be small and simple.
[0005]
In addition, for example, there is a conventional technology of an optical communication module that performs two-way communication using signal light having two different wavelengths disclosed in Japanese Patent Laid-Open No. 11-068705 shown in FIG.
[0006]
In the prior art disclosed in Japanese Patent Application Laid-Open No. 11-068705, crosstalk light leaked into PD (Photodiode) light, which is received light, from LD (Laser Diode) light, which is transmitted light, is practically used. The goal is to reduce to a problem-free level. An optical branching waveguide is formed on a flat substrate, a groove is provided at the branching portion of the optical branching waveguide, and a dielectric multilayer filter that branches input light in its transmission direction and reflection direction according to the wavelength is inserted into the groove. And a transmission LD and a reception PD which are optically coupled to the optical branching waveguide are provided on a planar substrate.
[0007]
The transmission wavelength of the dielectric multilayer filter is set as the reception wavelength of the reception PD, the blocking wavelength of the dielectric multilayer filter is set as the transmission wavelength of the transmission LD, and the transmission LD and the reception PD are Bi-directional WDM (Wavelength Division Multiplexing) optical communication is performed by disposing the multilayer filters at positions facing each other.
[0008]
In addition, for example, there is a conventional technology of an optical communication module disclosed in Japanese Patent Application Laid-Open No. 11-237529 shown in FIG.
[0009]
In the prior art disclosed in Japanese Patent Laid-Open No. 11-237529, an inclined surface is formed on the buffer and the cladding formed on the upper surface of the Si substrate, and reflection due to the difference in refractive index between the air and the cladding on the inclined surface is utilized. The signal light is folded upward and received by the PD.
[0010]
[Problems to be solved by the invention]
However, the conventional optical communication module described above has the following problems.
[0011]
First, the conventional optical communication module having a narrow groove has a structure in which a mirror and a filter are injected into the narrow groove, which requires a lot of labor to manufacture and makes it difficult to automate the manufacturing process. Therefore, an extremely large production cost is required.
[0012]
For example, the prior art disclosed in Japanese Patent Laid-Open No. 10-224310 has a structure in which a mirror is inserted into an obliquely formed groove, and the prior art disclosed in Japanese Patent Laid-Open No. 11-068705 includes Since the dielectric multilayer filter is inserted into the groove provided at the branching portion of the optical branching waveguide, all of them require a very laborious operation of inserting a filter or the like into the narrow groove.
[0013]
Second, in a conventional optical communication module in which signal light transmitted through the filter in the groove portion is received by the PD, a groove having a very narrow width is formed in order to suppress loss of the received signal light in the groove portion. There was a need. Therefore, for the dielectric multilayer filter to be inserted, a soft filter with a thin thickness, such as polyimide, must be used, and the handling property is worse than when a hard filter is inserted. It was difficult to automate the process.
[0014]
Thirdly, in the conventional optical communication module in which the signal light reflected from the filter in the groove portion is output from the optical waveguide to the external optical fiber, the inclination of the filter with respect to the waveguide end face is different from the reflected light from the filter and the optical fiber. Since the coupling characteristics with the waveguide are greatly affected, it is necessary to insert the filter carefully so that the filter does not tilt with respect to the end face of the waveguide, and it is difficult to reduce the assembly cost.
[0015]
Fourth, in a conventional optical communication module in which signal light is reflected from the inside of the substrate and received by a PD placed on the surface of the substrate, the signal light is reflected by a difference in refractive index between air and the clad. The air is required in the groove portion having the reflecting surface. For example, when the optical communication module is covered with a transparent resin or the like, since the refractive index of the transparent resin is closer to the refractive index of the clad than air, there is a risk that reflection on an inclined surface cannot be obtained. For this reason, there is a problem that simple sealing with a transparent resin and packaging in which the whole is molded after the optical system is protected with the transparent resin become impossible, and the packaging method is limited.
[0016]
The first object of the present invention is to provide an optical communication module that can solve the above-mentioned drawbacks of the prior art and can be produced at low cost by a simple process and a method for producing the same.
[0017]
The second object of the present invention is to solve the above-mentioned disadvantages of the prior art, and it is not necessary to provide a narrow groove, and a transparent resin is used by sufficiently reflecting signal light even when covered with a transparent resin. Another object is to provide an optical communication module that can be selected as a packaging method and a method of manufacturing the same.
[0018]
[Means for Solving the Problems]
In order to achieve the above object, the present invention Claim 1 An optical communication module is an optical communication module that communicates optical signals, and a groove portion having a V-shaped cross section and An optical waveguide substrate provided with a first optical waveguide that guides transmission signal light, and a second waveguide that guides transmission signal light and guides the transmission signal light reflected by the groove, A groove that is disposed on one of the two surfaces of the groove, transmits the signal light having the wavelength of the reception signal light, and reflects the signal light having the wavelength of the transmission signal light, and the groove includes A mirror that is disposed on the other of the two surfaces and reflects the received signal light input from the second waveguide, and the light reflected by the mirror is incident A light receiving element is provided.

[0021]
Claim 2 The optical communication module of the present invention is an optical communication module that communicates an optical signal, wherein a groove having a V-shaped cross section, a first optical waveguide that guides transmission signal light, and a reception signal light are guided. An optical waveguide substrate including a second waveguide for guiding the transmission signal light reflected by the groove, and a wavelength of the transmission signal light disposed on one of the two surfaces of the groove And a half mirror that is disposed on the other of the two surfaces of the groove and reflects part of the incident signal light and transmits part of the signal light. A transmission signal that is received from one optical waveguide and that can receive the received signal light that has passed through the half mirror and reflected by the mirror, and that has been incident from the second optical waveguide and that has passed through the half mirror and reflected from the mirror. Do not receive light Characterized in that it comprises a light receiving element arranged at a position.
[0023]
Claim 3 The optical communication module of the present invention is characterized in that a groove for arranging an optical fiber is further provided in the optical waveguide substrate.
[0024]
Claim 4 The optical communication apparatus according to the present invention is the first aspect. Or Claim 2 The optical communication module according to any one of the above is provided, and optical communication is performed.
[0025]
Claim 5 The optical communication device of the present invention is as follows. 4 An optical fiber is arranged in the optical communication module described in 1.
[0038]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0039]
FIG. 1 is a diagram showing the structure of an optical communication module according to the first embodiment of the present invention. The optical communication module of the present embodiment only receives signal light.
[0040]
Referring to FIG. 1, the optical communication module according to the first embodiment of the present invention includes an optical waveguide substrate 10 and a light receiving element 30. The optical waveguide substrate 10 is provided with an optical waveguide 11, a folding mirror 20, and a waveguide end face 14. The folding mirror 20 and the waveguide end surface 14 are respective surfaces of a groove portion having two surfaces formed on the optical waveguide substrate 10.
[0041]
The folding mirror 20 reflects the received signal light from the optical waveguide 11 to the surface side of the optical waveguide substrate 10 and enters the light receiving surface 31 of the light receiving element 30. The folding mirror 20 can be formed by being obliquely cut as shown in FIG. 1 and then metallized with a metal film such as Au. That is, the mirror 20 is formed by covering the slope with metal by a method such as vapor deposition or thermal spraying.
[0042]
The light receiving element 30 is mounted on the optical waveguide substrate 10 so as to be coupled to the signal light incident from the optical waveguide 11 and reflected by the folding mirror 20.
[0043]
In the operation of receiving the signal light of the optical communication module according to the present embodiment, first, the received signal light input from the optical waveguide 11 is reflected by the folding mirror 20 and sent to the surface side of the optical waveguide substrate 10. Light is received by the light receiving surface 31 of the light receiving element 30.
[0044]
As described above, the optical communication module according to the present embodiment employs a structure in which the optical path is folded back to the surface side of the optical waveguide substrate 10 by the folding mirror 20, so that the light receiving element 30 is surface-mounted on the optical waveguide substrate 10. can do.
[0045]
FIG. 2 is a diagram showing the structure of an optical communication module according to the second embodiment of the present invention. The optical communication module of the present embodiment transmits and receives signal light having different wavelengths.
[0046]
Referring to FIG. 2, the optical communication module according to the second embodiment of the present invention includes an optical waveguide substrate 10a, a light receiving element 30, a light emitting element 40, and a filter 50. Further, the optical waveguide substrate 10a is provided with a first optical waveguide 12, a second optical waveguide 13, a folding mirror 20, and a waveguide end face 14.
[0047]
The folding mirror 20 reflects the received signal light from the second optical waveguide 13 to the surface side of the optical waveguide substrate 10 a and enters the light receiving surface 31 of the light receiving element 30. The folding mirror 20 can be formed by metallizing with a metal film such as Au after being cut obliquely as shown in FIG.
[0048]
The light emitting element 40 that transmits the signal light is mounted on the optical waveguide substrate 10 a so as to be coupled to the first optical waveguide 12.
[0049]
A filter 50 is attached to the waveguide end face 14, and the signal light from the first optical waveguide 12 transmitted from the light emitting element 40 is reflected by the filter 50 and coupled to the second optical waveguide 13.
[0050]
A dielectric multilayer film that reflects and transmits the signal light according to the wavelength of the signal light is deposited on the filter 50. Then, the transmission signal light having the wavelength λ 1 transmitted from the light emitting element 40 is reflected, and the reception signal light having the wavelength λ 2 received from the second optical waveguide 13 is transmitted.
[0051]
For this reason, the transmission signal light having the wavelength λ1 transmitted from the first optical waveguide 12 is reflected by the filter 50, coupled to the second optical waveguide 13, and transmitted to the outside. On the other hand, the received signal light having the wavelength λ 2 received from the second optical waveguide 13 passes through the filter 50 and is sent to the light receiving element 30.
[0052]
The light receiving element 30 is mounted on the optical waveguide substrate 10a so that the received signal light having the wavelength λ2 incident from the second optical waveguide 13 and transmitted through the filter 50 is reflected by the folding mirror 20 and coupled.
[0053]
Next, the operation of transmitting and receiving signal light in the optical communication module according to the present embodiment will be described.
[0054]
In the operation of receiving the signal light, first, the received signal light of wavelength λ2 incident from the second optical waveguide 13 is transmitted through the filter 50, reflected by the folding mirror 20, and sent to the surface side of the optical waveguide substrate 10a. Thus, light is received by the light receiving surface 31 of the light receiving element 30.
[0055]
In the operation of transmitting the signal light, first, the transmission signal light having the wavelength λ 1 emitted from the light emitting element 40 is guided through the first optical waveguide 12, reflected by the filter 50, coupled to the second optical waveguide 13 and transmitted. It is led to the road.
[0056]
As described above, in the optical communication module according to the present embodiment, the received signal light is transmitted through the filter 50, reflected by the mirror 20, and received by the light receiving element 30, and further, the transmission signal light from the light emitting element 40 is received by the filter 50. In addition to the effect of the first embodiment, the transmission of the signal light that transmits the light with the wavelength λ1 and receives the light with the wavelength λ2 is performed by adopting the structure that reflects and guides to the external transmission path can do.
[0057]
Next, a method for manufacturing the optical communication module of the present invention shown in the first and second embodiments will be described. In the present invention, the mirror 20 that folds back signal light is particularly characterized, and a method of manufacturing the fold mirror 20 will be described.
[0058]
FIG. 3 is a diagram for explaining an embodiment of the method of manufacturing the optical communication module according to the present invention, and shows the process of forming the folding mirror 20.
[0059]
Referring to FIG. 3, first, the optical waveguide 11 is formed on the optical waveguide substrate 10 (FIG. 3A). Further, the number of waveguides is not limited to one, and the same applies to the case where two waveguides of the first optical waveguide 12 and the second optical waveguide 13 are provided as in the second embodiment.
[0060]
Then, a cutting blade 70 is vertically inserted into the optical waveguide substrate 10 to form the waveguide end face 14 (FIG. 3B).
[0061]
Subsequently, the blade 70 is obliquely inserted into the optical waveguide substrate 10 to form a slope for the folding mirror (FIG. 3C).
[0062]
Finally, the folding mirror 20 is completed by metallizing a metal film such as Au on the inclined surface (FIG. 3D).
[0063]
At the time of manufacturing the optical waveguide substrate 10, as shown in FIG. 4, the optical waveguide substrates 10 are aligned and aligned in the wafer 90. Therefore, by inserting the blades into the wafer 90 in a straight line, the folding mirror 20. Can be manufactured collectively from the state of the wafer 90.
[0064]
For the wafer 90 which is a material of the optical waveguide substrate 10, various semiconductor materials such as silicon, GaAs and InP can be used. In addition, as the material of the optical waveguide substrate 10, a ceramic plate, a polymer plate, a metal plate, or the like can be used. In any case, the optical waveguide substrate 10 and the optical communication module are manufactured by the above manufacturing method. can do.
[0065]
Next, another manufacturing method of the folding mirror 20 will be described.
[0066]
FIG. 5 is a diagram for explaining another embodiment of the method for manufacturing an optical communication module according to the present invention. In the present embodiment, by using the blade 71 having a width wider than that of the blade 70 in the manufacturing method of FIG. 3, the cutting is not performed in two steps as in the previous embodiment, but at one time. Delete at the same time.
[0067]
That is, first, the optical waveguide 11 is formed on the optical waveguide substrate 10 (FIG. 5A).
[0068]
Then, a cutting blade 71 is inserted into the optical waveguide substrate 10 to simultaneously form the waveguide end face 14 and the inclined surface of the folding mirror 20 (FIG. 5B). Here, the blade 71 is shaped to match the angle of the inclined surface so that the waveguide end surface 14 and the inclined surface of the folding mirror 20 can be formed simultaneously.
[0069]
Finally, the folding mirror 20 is completed by metallizing the slope of the folding mirror 20 with a metal film such as Au (FIG. 5C).
[0070]
Also in the case of this embodiment, as in the embodiment of FIG. 3, the optical waveguide substrate 10 is aligned and aligned in the wafer 90 when the optical waveguide substrate 10 is manufactured, as shown in FIG. Therefore, by inserting the blades into the wafer 90 in a straight line, the folding mirrors can be manufactured in a lump in the wafer state.
[0071]
In the manufacturing method of the optical communication module according to each of the above embodiments, since the folding mirror 20 is formed by metallizing the inclined surface, sufficient reflection of the signal light can be obtained even when covered with a transparent resin, for example. For this reason, various packaging methods using a transparent resin can be selected for the optical communication module.
[0072]
In addition, since the folding mirror 20 is directly formed on the optical waveguide substrate, the mirror 20 can be formed in the wafer 90 state, and the troublesome work of inserting the mirror in the conventional manufacturing method is eliminated. In this way, the assembly process can be easily automated, and the assembly cost can be greatly reduced.
[0073]
In addition, the received signal light transmitted through the filter 50 is not received through the optical waveguide as in the prior art, but is reflected by the mirror 20 and directly received by the light receiving element. For this reason, compared with the conventional structure, the width of the groove of the folding mirror portion can be increased.
[0074]
In each of the above embodiments, the shape of the groove of the folding mirror 20 is a triangle, and the width of the groove is wider on the upper side. Becomes easier.
[0075]
Further, by adopting a structure in which a filter is attached to the end face of the waveguide, there is an advantage that the filter can be mounted so as not to wobble with respect to the end face of the waveguide. Furthermore, since the thickness of the filter can be increased freely, it is possible to use a filter using a substrate made of a hard material such as glass, for example, improving the workability of the filter attaching process, and the filter Assembly costs can be reduced and mass production can be realized by automating the pasting process.
[0076]
Next, another embodiment of the present invention will be described in detail with reference to the drawings.
[0077]
FIG. 6 is a diagram showing the structure of an optical communication module according to the third embodiment of the present invention. The optical communication module of the present embodiment only receives signal light.
[0078]
In the present embodiment, the direct light receiving element 30 does not receive all of the received signal light input from the optical waveguide 11, but instead of unnecessary noise light by attaching the filter 50 to the waveguide end face 14. It is characterized by preventing reception.
[0079]
A dielectric multilayer film that reflects and transmits the signal light according to the wavelength of the signal light is deposited on the filter 50. As a result, the filter 50 transmits the received signal light (wavelength λ2) and reflects the input noise light (wavelength λ1) having a wavelength different from that of the received signal light.
[0080]
The received signal light having the wavelength λ <b> 2 input from the optical waveguide 11 is transmitted through the filter 50, reflected by the folding mirror 20 to the surface side of the optical waveguide substrate 10 b, and received by the light receiving surface 31 of the light receiving element 30. Further, the input noise light having the wavelength λ <b> 1 input from the optical waveguide 11 is reflected by the filter 50 and is not incident on the light receiving element 30.
[0081]
In the present embodiment, the waveguide end face 14 is formed obliquely with respect to the waveguide 11 to prevent the input noise light reflected by the filter 50 from returning to the optical waveguide 11.
[0082]
As described above, in the present embodiment, by arranging the filter 50 on the waveguide end face 14, it is possible to receive only the received signal light and block the input noise light.
[0083]
FIG. 7 is a diagram showing the structure of an optical communication module according to the fourth embodiment of the present invention. The optical communication module of the present embodiment only transmits signal light.
[0084]
In the present embodiment, the intensity of the signal light transmitted from the light emitting element 40 is adjusted to an appropriate intensity by providing the monitor light receiving element 32 behind the light emitting element 40. The monitor light receiving element 32 is mounted on the surface of the optical waveguide substrate 10 c and receives the rear output light of the light emitting element 40 reflected by the folding mirror 20.
[0085]
The light emitting element 40 is mounted on the optical waveguide substrate 10 c so as to be coupled to the optical waveguide 11. The rear output light from the light emitting element 40 is reflected by the folding mirror 20 to the surface side of the optical waveguide substrate 10c, received by the light receiving surface 33 of the monitor light receiving element 32, and used for controlling the light output of the light emitting element 40. The
[0086]
As described above, in the present embodiment, the light output of the light emitting element can be monitored and appropriately controlled by disposing the folding mirror 20 and the monitoring light receiving element 32 behind the light emitting element 40.
[0087]
FIG. 8 is a diagram showing the structure of an optical communication module according to the fifth embodiment of the present invention. The optical communication module of the present embodiment transmits and receives signal light having the same wavelength (λ1).
[0088]
The present embodiment is characterized in that the half mirror 22 is attached to the waveguide end face 14 instead of the filter 50 in the second embodiment.
[0089]
The half mirror 22 is deposited with a dielectric multilayer film that reflects and transmits half of the received signal light and the transmitted signal light having the same wavelength (λ1).
[0090]
The received signal light of wavelength λ1 input from the second optical waveguide 13 is transmitted through the half mirror 22 (half of which), reflected by the folding mirror 20 to the surface side of the optical waveguide substrate 10d, and received by the light receiving element 30. Light is received by the surface 31.
[0091]
The transmission signal light having the wavelength λ 1 emitted from the light emitting element 40 is guided through the first optical waveguide 12, reflected by the half mirror 22 (half thereof), coupled to the second optical waveguide 13, and transmitted to the transmission path. Led.
[0092]
The light receiving element 30 is on the extension line of the second optical waveguide 13 where it is coupled with the received signal light incident from the second optical waveguide 13, and is further shifted from the extension line of the first optical waveguide 12. To place. As a result, the transmission signal light transmitted through the half mirror 22 is prevented from being received by the light receiving element 30.
[0093]
As described above, in the present embodiment, signal light having the same wavelength can be transmitted and received by attaching the half mirror 22 to the waveguide end face 14.
[0094]
FIG. 9 is a diagram showing the structure of an optical communication module according to the sixth embodiment of the present invention. The optical communication module of the present embodiment transmits and receives signal light having different wavelengths.
[0095]
The difference between the present embodiment and the second embodiment is that the monitor light receiving element 32 is disposed behind the light emitting element 40 and the output of the light emitting element 40 is controlled in the same manner as in the fourth embodiment. The fiber guide V-groove 16 is formed in the exit portion of the second optical waveguide 13 on the transmission line side, and the fiber 60 is disposed.
[0096]
Further, in this embodiment, the two groove portions including the folding mirrors 20 and 21 are provided, and the first groove portion on the light emitting element 40 side is the same as that of the fourth embodiment in FIG. The second groove on the light receiving element 30 side is the same as that of the second embodiment in FIG.
[0097]
The folding mirror 21 provided on the light emitting element 40 side reflects the backward output light from the light emitting element 40 and makes it incident on the light receiving surface 33 of the monitor light receiving element 32 installed on the surface side of the optical waveguide substrate 10e. .
[0098]
The folding mirror 21 provided on the light emitting element 40 side can be manufactured in the same manner as the folding mirror 20 on the light receiving element 30 side, and after being obliquely cut as shown in FIG. It can be formed by metallization with a film.
[0099]
A fiber 60 is disposed at the exit of the optical waveguide 11 on the transmission line side so as to be coupled to the second optical waveguide 13. The fiber 60 can be positioned by abutting the tip of the fiber 60 against the waveguide end face 15 in the optical axis direction by the V-groove 16 formed in the optical waveguide substrate 10e in the direction perpendicular to the optical axis. It can be mounted on the optical waveguide substrate without adjusting the optical axis.
[0100]
The received signal light (wavelength λ2) incident from the fiber 60 is transmitted through the filter 50, reflected by the folding mirror 20 to the surface side of the optical waveguide substrate 10e, and received by the light receiving surface 31 of the light receiving element 30.
[0101]
The transmission signal light (wavelength λ1) emitted from the light emitting element 40 is guided through the first optical waveguide 12, reflected by the filter 50, and guided through the second optical waveguide 13 and the fiber 60 to the transmission path. It is burned.
[0102]
The rear output light from the light emitting element 40 is reflected on the surface side of the optical waveguide substrate 10e by the folding mirror 21, and then received by the light receiving surface 33 of the monitor light receiving element 32, and used for controlling the light output of the light emitting element 40. To do.
[0103]
As described above, in the present embodiment, in addition to the effects of the second embodiment, the light receiving element 32 for monitoring is disposed behind the light emitting element 40, so that the light output of the light emitting element can be monitored. it can. Further, by forming the fiber guide V-groove 16 at the exit portion of the second optical waveguide 13 on the transmission line side and arranging the fiber 60, the fiber 60 can be mounted on the optical waveguide substrate without adjusting the optical axis. it can.
[0104]
Each of the above embodiments can be realized by various combinations.
[0105]
Although the present invention has been described with reference to the preferred embodiments and examples, the present invention is not necessarily limited to the above-described embodiments and examples, and various modifications can be made within the scope of the technical idea. Can be implemented.
[0106]
【The invention's effect】
As described above, according to the optical communication module of the present invention, the following effects are achieved.
[0107]
First, the number of parts and the assembly process of the optical communication module are reduced, and the production cost of the optical communication module is reduced.
[0108]
In the optical communication module of the present invention, the mirror is not inserted into the groove formed in the optical waveguide substrate, but a folding mirror for coupling with the light receiving element is directly formed on the optical waveguide substrate. This is unnecessary and the number of parts and the assembly process can be reduced. In particular, since there is no troublesome mirror insertion work, assembly cost can be greatly reduced. In addition, an inexpensive front-illuminated light-receiving element can be used as the light-receiving element. Further, since the light-receiving element is mounted on the surface of the optical waveguide substrate, the mounting process can be easily automated, and a lot of cost reduction and mass production can be realized.
[0109]
Second, it is easy to mount a filter that transmits and reflects signal light according to its wavelength on an optical communication module.
[0110]
In the optical communication module of the present invention, the shape of the groove of the folding mirror portion is a triangle, and the width of the groove is wider on the upper side, so the work of mounting the filter is easy. Conventionally, a troublesome operation of inserting a filter into a narrow groove has been required.
[0111]
Third, since the filter is attached to the end face of the waveguide, there is an advantage that the filter can be mounted so as not to tilt with respect to the end face of the waveguide.
[0112]
Fourth, since the groove can be thickened because the groove is wide, it is possible to use a filter using a substrate made of a hard material such as glass, for example, and the workability of the filter attaching process is improved. And, the assembly cost can be reduced and mass production can be realized by automating the filter attaching process.
[0113]
Fifth, in the communication module of the present invention, the inclined surface that reflects the signal light is metallized, so that sufficient reflection of the signal light is realized even when the groove is covered with a transparent resin. Various packaging methods can be selected.
[Brief description of the drawings]
FIG. 1 is a diagram showing a structure of an optical communication module according to a first embodiment of the present invention.
FIG. 2 is a diagram showing a structure of an optical communication module according to a second embodiment of the present invention.
FIG. 3 is a diagram for explaining an embodiment of a method for manufacturing an optical communication module according to the present invention.
FIG. 4 is a view for explaining an embodiment of forming a folding mirror from a wafer state in the method for manufacturing an optical communication module according to the present invention.
FIG. 5 is a view for explaining another embodiment of the method for manufacturing an optical communication module according to the present invention.
FIG. 6 is a diagram showing a structure of an optical communication module according to a third embodiment of the present invention.
FIG. 7 is a diagram showing a structure of an optical communication module according to a fourth embodiment of the present invention.
FIG. 8 is a diagram showing a structure of an optical communication module according to a fifth embodiment of the present invention.
FIG. 9 is a diagram showing a structure of an optical communication module according to a sixth embodiment of the present invention.
FIG. 10 is a diagram illustrating an example of the structure of a conventional optical communication module.
FIG. 11 is a diagram illustrating an example of the structure of a conventional optical communication module.
FIG. 12 is a diagram illustrating an example of the structure of a conventional optical communication module.
[Explanation of symbols]
10 Optical waveguide substrate
11 Optical waveguide
12 First optical waveguide
13 Second optical waveguide
14, 15 Waveguide end face
16 V-groove
20, 21 Folding mirror
22 half mirror
30 Light receiving element
31 Photosensitive surface
32 Light receiving element for monitor
33 Photosensitive surface
40 Light emitting device
50 filters
60 fiber
70, 71 blades
90 wafers

Claims (5)

In an optical communication module that communicates optical signals,
A groove having a V-shaped cross section, a first optical waveguide for guiding transmission signal light ,
An optical waveguide substrate provided with a second waveguide for guiding received signal light and guiding the transmitted signal light reflected by the groove;
A filter that is disposed on one of the two surfaces of the groove, transmits the signal light having the wavelength of the reception signal light, and reflects the signal light having the wavelength of the transmission signal light;
A mirror that is disposed on the other surface of the two surfaces of the groove and reflects the received signal light input from the second waveguide;
Optical communication module comprising: a light receiving element which light reflected by the mirror is incident. In an optical communication module that communicates optical signals,
A groove portion having a V-shaped cross section; a first optical waveguide that guides transmission signal light; and a second waveguide that guides reception signal light and guides the transmission signal light reflected by the groove portion. An optical waveguide substrate comprising:
A mirror that is disposed on one of the two surfaces of the groove and reflects the signal light having the wavelength of the transmission signal light;
A half mirror that is disposed on the other surface of the two surfaces of the groove and reflects part of the incident signal light and transmits part of the signal light;
The position is such that the received signal light incident from the first optical waveguide and transmitted through the half mirror and reflected from the mirror can be received, and incident from the second optical waveguide and transmitted through the half mirror and reflected from the mirror. An optical communication module comprising: a light receiving element arranged at a position not receiving transmission signal light. Optical communication module according to claim 1 or 2, wherein the optical waveguide substrate, characterized by further providing a groove for arranging the optical fiber. An optical communication apparatus comprising the optical communication module according to any one of claims 1 to 3 and performing optical communication. An optical communication apparatus comprising: an optical fiber disposed in the optical communication module according to claim 4 .

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