JPS6298306A - Wavelength selective coupler - Google Patents
Wavelength selective couplerInfo
- Publication number
- JPS6298306A JPS6298306A JP23864885A JP23864885A JPS6298306A JP S6298306 A JPS6298306 A JP S6298306A JP 23864885 A JP23864885 A JP 23864885A JP 23864885 A JP23864885 A JP 23864885A JP S6298306 A JPS6298306 A JP S6298306A
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- optical
- film filter
- interference film
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、波長多重光通信の分野において不可欠である
小形にして低損失な導波形光合分波モジュールの実現を
可能ならしめる波長選択機能を有する光導波路と受発光
素子との結合器に関するものでおる。[Detailed Description of the Invention] [Field of Industrial Application] The present invention provides a wavelength selection function that enables the realization of a small, low-loss waveguide optical multiplexing/demultiplexing module, which is essential in the field of wavelength division multiplexing optical communications. This invention relates to a coupler between an optical waveguide and a light receiving/emitting element.
波長の異なる光信号を1本の光ファイバで伝送する波長
分割多重伝送方式においては、波長の異なる光信号を分
離1合流する光合分波モジュールが必要である。この要
求に対し開発された導波形光合分波モジュールの斜視図
を第7図に示す。該導波形光合分波モジュールは、81
基板1に予め形成された光導波路2.光フアイバガイド
3.干渉膜フィルタ挿入溝4により光導波路2と搭載素
子である光ファイバ5.干渉膜フィルタ付ガラスブロッ
ク6、微少反射鏡7等との相互の位置関係が確保されて
いる。この導波形光合分波モジュールは、従来の精度の
高い個別素子を基板上に集合したバルク形光合分波器に
比して高度な光軸調整を要しない利点を有するうじかし
、該導波形光合分波モジュールは受光素子又は発光素子
8から光ファイバ5に至る光損失がバルク形光合分波器
に比して犬きく、又、取り扱いに慎重を要する薄膜基板
上に形成された干渉膜フィルタを所定の位置に設置しな
ければならないという組立時の問題を有していた。In a wavelength division multiplexing transmission system in which optical signals with different wavelengths are transmitted through a single optical fiber, an optical multiplexing/demultiplexing module is required to separate and combine optical signals with different wavelengths. FIG. 7 shows a perspective view of a waveguide optical multiplexing/demultiplexing module developed to meet this requirement. The waveguide optical multiplexing/demultiplexing module is 81
Optical waveguide 2 pre-formed on substrate 1. Optical fiber guide 3. The interference film filter insertion groove 4 connects the optical waveguide 2 and the optical fiber 5, which is a mounting element. The mutual positional relationship with the glass block 6 with an interference film filter, the minute reflecting mirror 7, etc. is ensured. This waveguide type optical multiplexing/demultiplexing module has the advantage that it does not require sophisticated optical axis adjustment compared to conventional bulk type optical multiplexing/demultiplexing devices in which highly accurate individual elements are assembled on a substrate. The optical multiplexer/demultiplexer module is an interference film filter formed on a thin film substrate, which has a higher optical loss from the light receiving element or the light emitting element 8 to the optical fiber 5 than a bulk type optical multiplexer/demultiplexer, and requires careful handling. There was a problem when assembling that it had to be installed in a predetermined position.
第8図は、干渉膜フィルタ付ガラスブロック6の斜視図
であり、9は干渉膜フィルタ、10はガラスブロックで
ある。干渉膜フィルタ9は、光合分波器の基本構成要素
であり、該干渉膜フィルタ9により波長の異なる光波束
を個別の光線路に分岐または(園側の光線路の光波を1
つの光波束へ合流する機能を有す。現在、主として用い
られている干渉膜フィルタの厚みtは約30μm程度で
あり、該干渉膜フィルタな光導波路中に位置する幅が約
50μmの(みに設置固定して用いられている。FIG. 8 is a perspective view of the glass block 6 with an interference film filter, where 9 is an interference film filter and 10 is a glass block. The interference film filter 9 is a basic component of an optical multiplexer/demultiplexer, and the interference film filter 9 splits light wave bundles with different wavelengths into individual optical paths (or splits the light waves on the optical path on the side into one
It has the function of merging into two light wave packets. At present, the thickness t of the interference film filter mainly used is about 30 μm, and the interference film filter is installed and fixed in the optical waveguide with a width of about 50 μm.
第8図におけるガラスブロック10の役割は、微少な干
渉膜フィルタ9の取扱いを安易ならしめること及び基板
1上に安定に固定する為であるつ又、干渉膜フィルタの
厚み約30μmに対し溝幅的50μmを有するのは、干
渉膜フィルタな光導波路溝に挿入する際の困難さ及び干
渉膜フィルタの破損を考慮している為である。The role of the glass block 10 in FIG. 8 is to facilitate the handling of the minute interference film filter 9 and to stably fix it on the substrate 1. Also, the role of the glass block 10 in FIG. The reason for having a target of 50 μm is to take into account the difficulty in inserting an interference film filter into an optical waveguide groove and the possibility of damage to the interference film filter.
光導波路中を伝搬する光波は、フレネル反射の法則で定
まる広がり角を有している為、導波構造を有していない
干渉膜フィルタ挿入用溝部では光波は広がり、溝を介し
て対向する導波路間で損失を生じる。、第9図は、光導
波路溝幅を光導波路幅で規格化した規格化間隙と損失と
の関係を示したものである5図から明らかなように、規
格化間隙が大きくなるに従い、光導波路損失は大き?な
ろう例えば、通常用いられている光合分波モジュールで
は、光導波路幅50μmに対して、光導波路溝幅が50
μmであり、規格化間隙は1となり、その時の損失は約
0.6aBとなる5導波形光合分波モジュールは、導波
路溝部の設計において干渉膜フィルタの溝部への挿入の
安易さ及び該干渉膜フィルタの溝部挿入時の破損を考慮
すると、溝幅が干渉膜フィルタに比して十分大きいこと
が必要であり、一方、前記の光導波路損失を考1.憶す
ると溝幅が出来る限り小さいことが必要であるという相
矛盾した問題を有していた。Light waves propagating in an optical waveguide have a spread angle determined by Fresnel's law of reflection, so the light waves spread in the groove for inserting an interference film filter that does not have a waveguide structure, and the light waves propagate through the groove into the opposite guide. Loss occurs between wave paths. , Figure 9 shows the relationship between the normalized gap and the loss, in which the optical waveguide groove width is normalized by the optical waveguide width.As is clear from Figure 5, as the normalized gap increases, the optical waveguide Is the loss big? For example, in a commonly used optical multiplexing/demultiplexing module, the optical waveguide groove width is 50 μm while the optical waveguide width is 50 μm.
μm, the normalized gap is 1, and the loss at that time is about 0.6 aB.The 5-waveguide optical multiplexing/demultiplexing module is designed for the ease of insertion of the interference film filter into the groove in the design of the waveguide groove, and for the interference Considering the possibility of damage when inserting the membrane filter into the groove, it is necessary that the groove width be sufficiently larger than that of the interference membrane filter.On the other hand, considering the optical waveguide loss mentioned above, 1. As I recall, there was a contradictory problem in that the groove width needed to be as small as possible.
本発明は上記の問題を解決する結合器を如何に実現する
かを問題としているう
〔問題点を解決するための手段〕
本発明は、光導波路と受発光素子とを結合させる機能を
一体化したことに特徴を有するものである。すなわち1
本発明は、光導波路の端面に対向さげる面と受発光素子
に対向さ?る面とを有する支持体と、この支持体の前記
光導波路の端面に対向さぜる面に導波形光合分波モジュ
ールの基板面に対して略90°の角度をもって形成され
た干渉膜フィルタと、同支持体の内部に前記基板面に対
して略45°の角度をもって形成され、前記光導波路の
端面に対向させる面と受発光素子に対向させる面との間
に光路を形成する反射部とを具備してなるものであって
、支持体の少なくとも前記光路が形成され部分が透明に
形成されていることを特徴とするものである。従来、波
長選択機能を有する干渉膜フィルタは、光導波路の途中
に位置する干渉膜フィルタ神入用溝に設置固定され、光
導波路の一方の端に位置する微少反射鑓な介して光導波
路と受発光素子の結合を行っていた。本発明の波長選択
結合器によれば、従来の導波形光合分波モジュールにお
ける干渉膜フィルタ挿入用溝及び核干渉膜フィルタ挿入
用溝から受発光素子に至る光導波路が不要となり、溝部
における光損失の増大を防げるとともに小形な導波形合
分波回路の設計が可能となる。また、従来の1つの問題
であった干渉膜フィルタの取り扱いも容易となる。The present invention deals with the problem of how to realize a coupler that solves the above-mentioned problems. It is characterized by the fact that i.e. 1
In the present invention, a surface facing an end surface of an optical waveguide and a surface facing a light receiving/emitting element are provided. an interference film filter formed on a surface of the support that faces the end surface of the optical waveguide at an angle of approximately 90° with respect to the substrate surface of the waveguide optical multiplexing/demultiplexing module; , a reflecting portion formed inside the support at an angle of approximately 45° with respect to the substrate surface and forming an optical path between a surface facing the end surface of the optical waveguide and a surface facing the light receiving/emitting element; The support is characterized in that at least a portion of the support where the optical path is formed is transparent. Conventionally, an interference film filter with a wavelength selection function is installed and fixed in an interference film filter groove located in the middle of an optical waveguide, and is connected to the optical waveguide via a minute reflection pin located at one end of the optical waveguide. They were bonding light-emitting devices. According to the wavelength selective coupler of the present invention, there is no need for an optical waveguide from the interference film filter insertion groove and the nuclear interference film filter insertion groove to the light receiving and emitting elements in the conventional waveguide type optical multiplexing/demultiplexing module, and optical loss in the groove portion is eliminated. This makes it possible to prevent an increase in the amount of noise and to design a small waveguide multiplexing/demultiplexing circuit. Furthermore, handling of the interference film filter, which has been a problem in the prior art, becomes easier.
第1図は本発明の基本原理を説明する為の導波形光合分
波モジュールの断面図で、1は基板、2は光導波路、1
0は本発明による波長選択結合器、11は反射面(反射
部)、12は干渉膜フィルタ、13は受光素子、14は
支持体である。FIG. 1 is a cross-sectional view of a waveguide type optical multiplexing/demultiplexing module for explaining the basic principle of the present invention, in which 1 is a substrate, 2 is an optical waveguide,
0 is a wavelength selective coupler according to the present invention, 11 is a reflecting surface (reflection part), 12 is an interference film filter, 13 is a light receiving element, and 14 is a support body.
支持体14は透明の立方体であり、光導波路2の端面に
対向させる面14aと受光素子13に対向させる面14
bとを有する5反射面11は支持体の内部に形成された
ものであり、基板1の上面に対して略45°の角度をも
って形成され、面14aと面14bとの間に光路を形成
するものである。The support body 14 is a transparent cube, and has a surface 14a facing the end face of the optical waveguide 2 and a surface 14 facing the light receiving element 13.
The reflective surface 11 having a surface b is formed inside the support body, is formed at an angle of approximately 45° with respect to the upper surface of the substrate 1, and forms an optical path between the surface 14a and the surface 14b. It is something.
干渉膜フィルタ12は面145Lに形成されたものであ
り、基板1の上面に対して略90°の角度をもって位置
している。The interference film filter 12 is formed on the surface 145L, and is positioned at an angle of approximately 90° with respect to the upper surface of the substrate 1.
光導波路2を伝搬する図中の実線で示す光波束は、収光
導波路端面に肖接している波長選択結合器10の干渉膜
フィルタ12において波長の選別が行われ、図中の点線
で示す特定の波長を有する光波のみが反射面11へ出射
し効率よ〈受光素子13により受光される。反射面11
の材料としては、金、アルミニウム等の金属材料、又は
誘電体多層膜層が有効である。さらに反射面11に波長
湯沢機能を有する干渉膜フィルタを用いた場合、選択的
に特定の波長のみを受光器方向へ反射さ?ろことか可能
である為、漏話特性を一層改善することも可能である。The light wave bundle shown by the solid line in the figure propagating through the optical waveguide 2 is subjected to wavelength selection in the interference film filter 12 of the wavelength selective coupler 10 which is in contact with the end face of the converging waveguide, and the wavelength is selected by the interference film filter 12 shown by the dotted line in the figure. Only the light wave having the wavelength is emitted to the reflecting surface 11 and is received by the light receiving element 13 with efficiency. Reflective surface 11
Effective materials include metal materials such as gold and aluminum, or dielectric multilayer films. Furthermore, if an interference film filter having a wavelength Yuzawa function is used on the reflecting surface 11, only specific wavelengths will be selectively reflected toward the receiver. Since crosstalk is possible, it is also possible to further improve the crosstalk characteristics.
以上は、本発明による波長選択結合器の上へ受光素子を
搭載した実施例であるが、受光素子の代りに13として
発光素子を搭載することも可能であろう
第2図は本発明の詳細な説明する為の図である5 2は
光導波路、10は本発明による波長選択結合器、12は
干渉膜フィルタ、11は反射面でおる5本実施例におい
ては干渉膜フィルタな光導波路端面と同一の大きさにし
ている例であるが、干渉膜フィルタの大きさは光導波路
端面の大きさに限定されるものではない、第2図におい
て、波長選択結合器の側面を金蒸着層等の高反射率層で
覆うと効率よ〈受発光器との結合が可能であろう第5図
は、下面クラッド層15の上面と反射面端部が接してい
る場合の本発明の実施例である。The above is an embodiment in which a light-receiving element is mounted on the wavelength selective coupler according to the present invention, but it is also possible to mount a light-emitting element as 13 in place of the light-receiving element. Fig. 2 shows details of the present invention. 5 2 is an optical waveguide, 10 is a wavelength selective coupler according to the present invention, 12 is an interference film filter, and 11 is a reflective surface. In this embodiment, the end face of the optical waveguide is an interference film filter. In this example, the size of the interference film filter is not limited to the size of the end face of the optical waveguide. Covering with a high reflectance layer will improve efficiency (coupling with the receiver and emitter will be possible). Figure 5 shows an embodiment of the present invention in which the upper surface of the lower cladding layer 15 is in contact with the end of the reflective surface. .
この実施例によると、光導波路端部と反射面の距離が第
2図で示す実施例の場合に比して短(なる為、光導波路
と受発光素子との結合効率が上昇する。According to this embodiment, the distance between the end of the optical waveguide and the reflecting surface is shorter than that in the embodiment shown in FIG. 2, so that the coupling efficiency between the optical waveguide and the light receiving/emitting element increases.
第4図は、光導波路と受発光素子との結合効率を一層改
善する為の波長選択結合器の実施例である。干渉膜フィ
ルタで結合している2つの光導波路の分岐角度を2θと
した時、第4図に示す直方体を1つの立面に対して角度
θで切断し、角度θ部分を除去して得られた新たな立面
に干渉膜フィルタ12を形成することを本実施例の特徴
としている5本実施例によると、干渉膜フィルタ面で結
合している2つの光導波路の一方の光導波路の長手方向
に直角な面に対して45°の角度で反射面を対向さぜる
ことが可能な為、効率よ(光導波路と受発光素子を結合
さぜることか可能であろう第5図は、第4図に示す本発
明による波長選択結合器の効果を説明する為の図であり
1分岐角度と損失の関係を従来の分岐部構成及び本発明
による分岐部構成による場合を比較して示す5分岐角度
としてはフィルタの特性を考慮し【通常30度近傍に設
定されており、分岐角度30度の場合、従来の分岐部損
失(第7図におけるフィルタ挿入溝部での損失とフィル
タ挿入溝部から微少反射鏡に到る間の導波路千4失との
和)は約jclBであるのに対し、本発明による分岐部
損失は約0.3dBであり、約0.7aBの減少が可能
となるつ第6図は、本発明による波長選択結合器を2波
用合分波器に用いた場合の実施例である。10は本発明
による波長選択結合器である。本発明による波長選択結
合器によれば、従来の合分波回路における干渉膜フィル
タ部から微少反射鏡に至る導波路が不要な為、第7図に
示す従来の導波形合分波モジュールに比して大幅な小形
化が可能となる。FIG. 4 shows an embodiment of a wavelength selective coupler for further improving the coupling efficiency between the optical waveguide and the light receiving/emitting element. When the branching angle of two optical waveguides connected by an interference film filter is 2θ, the rectangular parallelepiped shown in Figure 4 is cut at an angle θ with respect to one vertical plane, and the angle θ portion is removed. According to the fifth embodiment, which is characterized in that the interference film filter 12 is formed on a new vertical surface, the longitudinal direction of one of the two optical waveguides coupled at the interference film filter surface is Since it is possible to oppose the reflective surface at an angle of 45° to the plane perpendicular to FIG. 4 is a diagram for explaining the effect of the wavelength selective coupler according to the present invention shown in FIG. 1, and shows the relationship between branching angle and loss by comparing the conventional branching section configuration and the branching section configuration according to the present invention. The branching angle is usually set around 30 degrees in consideration of the characteristics of the filter, and in the case of a branching angle of 30 degrees, the conventional branch loss (the loss at the filter insertion groove in Figure 7 and the slight loss from the filter insertion groove) The sum of the waveguide losses (1,400 and 4 losses) before reaching the reflecting mirror is about jclB, whereas the branch loss according to the present invention is about 0.3 dB, which makes it possible to reduce the loss by about 0.7 aB. FIG. 6 shows an embodiment in which the wavelength selective coupler according to the present invention is used as a two-wave multiplexer/demultiplexer. 10 is the wavelength selective coupler according to the present invention. According to the conventional multiplexing/demultiplexing circuit, there is no need for a waveguide from the interference film filter section to the minute reflector, so it can be significantly smaller than the conventional waveguide type multiplexing/demultiplexing module shown in Figure 7. becomes.
本発明による波長選択結合器と光導波路との相対的位置
関係は、光導波路端面と干渉膜フィルタ而を合わ忙るの
みで安易に行うことが可能でおる。The relative positional relationship between the wavelength selective coupler and the optical waveguide according to the present invention can be easily determined by simply aligning the end face of the optical waveguide and the interference film filter.
又、第7図における光フアイバガイド1と同様なガイド
部を予め基板上に形成しておくことも有効である。It is also effective to form a guide portion similar to the optical fiber guide 1 in FIG. 7 on the substrate in advance.
以上説明したように、従来基板上の個別の所に位置して
いた干渉膜フィルタ部と反射部とを一体化した本発明に
よれば、光導波路中にあった干渉膜フィルタ挿入用溝で
の損失を除去出来るとともに、干渉膜フィルタから受発
光素子に至る光導波路が不要な為、光導波回路の小形化
が可能であるうまた、従来のものに比して搭載素子の取
扱いが安易になり、光合分波モジュールの経済化に資す
ること犬である。As explained above, according to the present invention, which integrates the interference film filter section and the reflection section, which were conventionally located at separate locations on the substrate, the interference film filter insertion groove in the optical waveguide can be In addition to being able to eliminate loss, since there is no need for an optical waveguide from the interference film filter to the light receiving and emitting elements, it is possible to downsize the optical waveguide circuit, and the mounted elements are easier to handle than conventional ones. This will contribute to the economicalization of optical multiplexing/demultiplexing modules.
第1図は本発明の詳細な説明するための導波形光合分波
モジュールの断面図、第2図は本発明の一実施例を示す
斜視図、第3図は本発明の別の実施例を示す図であって
、下面クラッド層の上面と反射面端部が接している場合
の実施例を示す斜視図、第4図は本発明の別の実施例を
示す図であって、干渉膜フィルタ面で結合している2つ
の光導波路の一方の導波路と受発光素子との結合効率を
改善した場合の実施例を示す斜視図、第5図は本発明の
効果を示すための分岐部損失特性の計算例を示す図、第
6図は本発明による波長選択結合器の使用例を示す斜視
図、第7図は従来の導波形合分波モジュールの斜視図、
第8図は干渉膜フィルタ付ガラスブロックの斜視図、第
9図は光導波路溝幅と光導波路損失の関係を示した図で
ある。
1・・・基板、2・・・光導波路、10・・・波長選択
結合器、11・・・反射部(反射面)、12・・・干渉
膜フィルタ、13・・・受発光素子(受光素子)、14
・・・支持体。
出願人 日本電信を話株式会社
代理人 弁理士 志 賀 正 武−
m−′
第1図
第2図
第3図
第4図
第5因
苛政負度(11!L)
第6図
第9図
規繕化間隙q9FIG. 1 is a sectional view of a waveguide optical multiplexing/demultiplexing module for explaining the present invention in detail, FIG. 2 is a perspective view showing one embodiment of the present invention, and FIG. 3 is a diagram showing another embodiment of the present invention. FIG. 4 is a perspective view showing an embodiment in which the upper surface of the lower cladding layer and the end of the reflective surface are in contact with each other; FIG. 4 is a perspective view showing another embodiment of the present invention; A perspective view showing an example in which the coupling efficiency between one of two optical waveguides coupled in a plane and a light receiving/emitting element is improved, and FIG. 5 shows a branch loss diagram to show the effect of the present invention. A diagram showing an example of calculation of characteristics, FIG. 6 is a perspective view showing an example of use of the wavelength selective coupler according to the present invention, FIG. 7 is a perspective view of a conventional waveguide type multiplexing/demultiplexing module,
FIG. 8 is a perspective view of a glass block with an interference film filter, and FIG. 9 is a diagram showing the relationship between the optical waveguide groove width and the optical waveguide loss. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Optical waveguide, 10... Wavelength selective coupler, 11... Reflection part (reflection surface), 12... Interference film filter, 13... Receiving/emitting element (light receiving element), 14
...Support. Applicant Nippon Telegraph Co., Ltd. Agent Patent Attorney Masa Shiga Take- m-' Figure 1 Figure 2 Figure 3 Figure 4 Factor 5 Negativeness (11!L) Figure 6 Figure 9 Rules Mending gap q9
Claims (1)
素とする導波形光合分波モジュールの前記光導波路と受
発光素子とを結合するための波長選択結合器であつて、
前記光導波路の端面に対向させる面と前記受発光素子に
対向させる面とを有する支持体と、この支持体の前記光
導波路の端面に対向させる面に前記基板面に対して略9
0°の角度をもつて形成された干渉膜フィルタと、同支
持体の内部に前記基板面に対して略45°の角度をもつ
て形成され、前記光導波路の端面に対向させる面と前記
受発光素子に対向させる面との間に光路を形成する反射
部とを具備してなり、前記支持体の少なくとも前記光路
が形成され部分が透明に形成されていることを特徴とす
る波長選択結合器。A wavelength selective coupler for coupling an optical waveguide and a light receiving/emitting element of a waveguide type optical multiplexing/demultiplexing module whose basic components are an optical waveguide formed on a substrate and a light receiving/emitting element,
a support body having a surface facing the end surface of the optical waveguide and a surface facing the light emitting/receiving element;
an interference film filter formed at an angle of 0°; and an interference film filter formed inside the support at an angle of approximately 45° with respect to the substrate surface, and a surface facing the end surface of the optical waveguide and the receiver. A wavelength selective coupler comprising a reflective part that forms an optical path between a surface facing a light emitting element, and at least a portion of the support where the optical path is formed is transparent. .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23864885A JPS6298306A (en) | 1985-10-25 | 1985-10-25 | Wavelength selective coupler |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23864885A JPS6298306A (en) | 1985-10-25 | 1985-10-25 | Wavelength selective coupler |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6298306A true JPS6298306A (en) | 1987-05-07 |
Family
ID=17033255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23864885A Pending JPS6298306A (en) | 1985-10-25 | 1985-10-25 | Wavelength selective coupler |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6298306A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1202084A2 (en) * | 2000-10-23 | 2002-05-02 | Nec Corporation | Optical communication module and manufacturing method thereof |
US7218806B2 (en) | 2004-10-27 | 2007-05-15 | Electronics And Telecommunications Research Institute | Multi-wavelength optical transceiver module, and multiplexer/demultiplexer using thin film filter |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59121008A (en) * | 1982-12-27 | 1984-07-12 | Tokyo Inst Of Technol | Three-dimensional optical integrated circuit |
-
1985
- 1985-10-25 JP JP23864885A patent/JPS6298306A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59121008A (en) * | 1982-12-27 | 1984-07-12 | Tokyo Inst Of Technol | Three-dimensional optical integrated circuit |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1202084A2 (en) * | 2000-10-23 | 2002-05-02 | Nec Corporation | Optical communication module and manufacturing method thereof |
EP1202084A3 (en) * | 2000-10-23 | 2004-04-28 | Nec Corporation | Optical communication module and manufacturing method thereof |
US7140131B2 (en) | 2000-10-23 | 2006-11-28 | Nec Corporation | Optical communication module and manufacturing method thereof |
US7218806B2 (en) | 2004-10-27 | 2007-05-15 | Electronics And Telecommunications Research Institute | Multi-wavelength optical transceiver module, and multiplexer/demultiplexer using thin film filter |
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