JP3799888B2 - Superjunction semiconductor device and method for manufacturing the same - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a MOSFET (insulated gate field effect transistor), IGBT (insulated gate bipolar transistor), bipolar transistor, and diode having a special structure including a parallel pn layer that flows current in an on state and is depleted in an off state. The present invention relates to a semiconductor element such as
[0002]
[Prior art]
In a vertical semiconductor element in which a current flows between electrodes provided on two opposing main surfaces, in order to achieve a high breakdown voltage, the thickness of the high resistance layer between both electrodes must be increased, On the other hand, in such an element having a thick high resistance layer, it is inevitable that the on-resistance between both electrodes inevitably increases and the loss increases. That is, there is a trade-off relationship between on-resistance (current capacity) and breakdown voltage. It is known that this trade-off relationship is similarly established in semiconductor elements such as IGBTs, bipolar transistors, and diodes. This problem is also common to lateral semiconductor elements in which the direction in which the drift current flows when turned on and the direction in which the depletion layer extends due to the reverse bias when turned off.
[0003]
As a solution to this problem, the drift layer is composed of parallel pn layers in which n-type regions and p-type regions with an increased impurity concentration are alternately stacked, and in the off state, the drift layer is depleted and bears a withstand voltage. A semiconductor device having such a structure is disclosed in EP0053854, USP5216275, USP5438215, and Japanese Patent Laid-Open No. 9-266611 by the inventors of the present invention.
[0004]
The inventors of the present invention have decided to call a semiconductor element including a drift layer composed of a parallel pn layer that flows a current in the on state and is depleted in the off state as a super junction semiconductor element.
[0005]
[Problems to be solved by the invention]
However, none of the above-mentioned inventions have been studied for mass production at the prototype stage. For example, the parallel pn layers have the same impurity concentration and the same width. However, variations always occur in the actual device manufacturing process.
[0006]
In addition, specific numerical values relating to the L load avalanche breakdown current, which are important in mass production and commercialization, have not been defined so far. For commercialization, an L load avalanche breakdown current greater than the rated current is desired.
[0007]
In view of such circumstances, the object of the present invention is to realize a high withstand voltage while greatly improving the trade-off relationship between on-resistance and withstand voltage by clarifying the allowable range for impurity concentration, width, etc. In addition, it is an object to provide a superjunction semiconductor element suitable for mass production.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, the present invention provides a first and second main surface, first and second main electrodes provided on the main surface, and a current flowing between the main electrodes in the on state and off. In a superjunction semiconductor device including a parallel pn layer in which first conductivity type drift regions and second conductivity type partition regions that are depleted in a state are alternately arranged, the first conductivity type drift region and the second conductivity type partition region At least one of the impurities periodically embedded in the depth direction is connected, and the amount of impurities in the first conductivity type drift region is in the range of 100 to 150% of the amount of impurities in the second conductivity type partition region And
[0009]
Alternatively, the amount of impurities in the first conductivity type drift region is preferably in the range of 110 to 150% of the amount of impurities in the second conductivity type partition region.
[0010]
In addition, it is effective that the first conductivity type drift region and the second conductivity type partition region are stripes having substantially the same width.
[0011]
Separately from this, the first and second main surfaces, the first and second main electrodes provided on the main surface, and a current flow between the main electrodes in the on state and depletion in the off state. In a superjunction semiconductor device comprising parallel pn layers in which first conductivity type drift regions and second conductivity type partition regions are alternately arranged, at least one of the first conductivity type drift region and the second conductivity type partition region is Impurities periodically embedded in the depth direction are connected, and the impurity amount in one region of the first conductivity type drift region and the second conductivity type partition region is 92% of the impurity amount in the other region. It shall be in the range of ~ 108%.
[0012]
In particular, the first conductivity type drift region and the second conductivity type partition region have substantially the same width, and the average impurity concentration in one region is in the range of 92 to 108% of the average impurity concentration in the other region. In addition, the impurity concentration of one of the first conductivity type drift region and the second conductivity type partition region may be within a range of 92 to 108% of the impurity concentration of the other region. May be.
[0013]
Further, the first conductivity type drift region and the second conductivity type partition region have substantially the same concentration, and the width of one of the regions is in the range of 94 to 106% of the width of the other region. To do.
[0014]
In order to deplete the parallel pn layer in which the first conductivity type drift region and the second conductivity type partition region are alternately arranged in the off state, it is necessary that the amount of impurities in both regions is substantially equal. . If one impurity concentration is half of the other impurity concentration, the width must be doubled. Therefore, if both regions have the same impurity concentration, the same width is sufficient, which is the best from the viewpoint of utilization efficiency of the semiconductor surface.
[0015]
With the same impurity concentration and the same width, if both are formed as described above, both regions will be depleted almost uniformly, so the breakdown voltage drop due to the remaining non-depleted portion is the ideal case as described later. It is suppressed to about 10%.
[0016]
As a manufacturing method, the other region having an impurity amount in the range of 92 to 108% of the impurity amount of one region of the first conductivity type drift region and the second conductivity type partition region is formed by epitaxial growth. In addition, the process of epitaxial growth may be repeated several times after the impurity-embedded region is partially formed, and the other region may be formed by thermal diffusion after the several times.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
In the following, experiments conducted for the present invention and results thereof will be described.
[0018]
[Example 1]
First, FIG. 3 is a partial sectional view of a basic portion of a vertical n-channel superjunction MOSFET used in the experiment. In addition, a portion for maintaining a pressure resistance is mainly provided at the peripheral portion, and the portion is formed by a general method such as a guard ring structure. In the following, layers and regions with n or p are used to mean layers and regions having electrons and holes as majority carriers, respectively. The subscript ⁺ means a relatively high impurity concentration, and-means a relatively low impurity concentration region.
[0019]
In FIG. 3, 11 is a low resistance n ⁺ drain layer, and 12 is a drift layer of a parallel pn layer composed of an n drift region 12a and a p partition region 12b. In the drift layer 12, the drift current flows in the n drift region 12a. Here, the parallel pn layer including the p partition region 12b is referred to as the drift layer 12. In the surface layer, an n channel region 12d is formed connected to the n drift region 12a, and a p well region 13a is formed connected to the p partition region 12b. An n ⁺ source region 14 and a high concentration p ⁺ contact region 13b are formed inside the p well region 13a. On the surface of the p well region 13 a sandwiched between the n ⁺ source region 14 and the n drift region 12 a, a polycrystalline silicon gate electrode layer 16 is interposed via the gate insulating film 15, and the n ⁺ source region 14 and A source electrode 17 is provided in common contact with the surface of the high concentration p ⁺ contact region 13b. A drain electrode 18 is provided on the back surface of the n ⁺ drain layer 11. Reference numeral 19 denotes an insulating film for surface protection and stabilization, and is made of, for example, a thermal oxide film and phosphor silica glass (PSG). The source electrode 17 is often extended on the gate electrode layer 16 through an insulating film 19 as shown in the figure. The alternate arrangement of the n-type divided regions 1 and the p-type divided regions 2 may be in the form of stripes or another method in which one is a lattice shape. The n drift region 12a is formed by, for example, epitaxial growth. The p partition region 12b is formed by filling a dug portion provided in the n drift region 12a by epitaxial growth. This manufacturing method is described in detail in Japanese Patent Application No. 10-209267.
[0020]
For example, as a 400V class MOSFET, the standard dimensions and impurity concentration of each part have the following values. The specific resistance of the n ⁺ drain layer 11 is 0.01 Ω · cm, the thickness is 350 μm, the thickness of the drift layer 12 is 32 μm, and the width of the n drift region 12a and the p partition region 12b is 8 μm (that is, the distance between the centers of the same region is 16 μm). an impurity concentration 3.0 × 10 ¹⁵ cm ^{- 3,} diffusion depth 3μm of p-well region 13a, the surface impurity concentration of ^{2 × 10 17 cm - 3,} n + diffusion depth 0.3μm of the source region 14, the surface impurity concentration 3 × 10 ²⁰ cm ^{- 3.}
[0021]
For example, as an 800V class MOSFET, the standard dimensions and impurity concentrations of each part have the following values. The specific resistance of the n ⁺ drain layer 11 is 0.01 Ω · cm, the thickness is 350 μm, the thickness of the drift layer 12 is 48 μm, and the width of the n drift region 12a and the p partition region 12b is 5 μm (that is, the distance between the centers of the same region is 10 μm). an impurity concentration 3.5 × 10 ¹⁵ cm ^{- 3,} diffusion depth 1μm of p-well region 13a, the surface impurity concentration of ^{3 × 10 18 cm - 3,} n + diffusion depth 0.3μm of the source region 14, the surface impurity concentration 1 × 10 ²⁰ cm ^{- 3.}
[0022]
The operation of the superjunction MOSFET of FIG. 3 is performed as follows. When a predetermined positive voltage is applied to the gate electrode layer 16, an inversion layer is induced in the surface layer of the p-well region 13a immediately below the gate electrode layer 16, and the n ⁺ source region 14 passes through the inversion layer to the n-channel region 13d. Electrons are injected. The injected electrons reach the n ⁺ drain layer 11 through the n drift region 12a, and the drain electrode 18 and the source electrode 17 are conducted.
[0023]
When a positive voltage to the gate electrode layer 16 is removed, the inversion layer induced in the surface layer of the p-well region 13a is flashing consumption, the drain electrode 18 is cut off between the source electrode 17. Further, when the reverse bias voltage is increased, each p partition region 12b is connected to the source electrode 17 via the p well region 13a, so that the pn junctions Ja, n between the p well region 13a and the n channel region 12d are connected. The depletion layers spread from the pn junction Jb between the drift region 12a and the p partition region 12b into the n drift region 12a and the p partition region 12b, respectively, and are depleted.
[0024]
The depletion end from the pn junction Jb spreads in the width direction of the n drift region 12a, and the depletion layer spreads from the p partition regions 12b on both sides, so that depletion is extremely accelerated. Therefore, the impurity concentration of the n drift region 12a can be increased. The p partition region 12b is also depleted at the same time. Since the depletion layer also spreads from the pn junctions on both sides of the p partition region 12b, depletion becomes very fast. By alternately forming the p partition regions 12b and the n drift regions 12a, the depletion ends enter both the adjacent n drift regions 12a. Therefore, the p partition regions 12b for forming the depletion layer The total occupied width can be halved, and the cross-sectional area of the n drift region 12a can be increased accordingly. [Example 2]
The boron impurity amount (dose amount) in the p partition region 12b is fixed to 1 × 10 ¹³ cm ^−2, and the phosphorus impurity amount (dose amount) in the n drift region 12a is changed in the range of 80 to 150%. An n-channel type MOSFET was simulated and actually manufactured and confirmed.
[0025]
FIG. 5 is a characteristic diagram showing the dependency of on-resistance (Ron · A) and generated breakdown voltage (V _DSS ) on the amount of impurities. The horizontal axis represents the generated breakdown voltage (V _DSS ), and the vertical axis represents the on-resistance (Ron · A). The impurity amount (dose amount) of the p partition region 12b was fixed to 1 × 10 ¹³ cm ⁻² , the width was 8 μm, and the depth of the drift layer 12 was 32 μm.
[0026]
For example, when the impurity amount of the n drift region 12a is 1.0 × 10 ¹³ cm ⁻² (100%), the generated breakdown voltage is 445 V and the on-resistance is 38 mΩ · cm ² , but 1.3 × 10 ¹³ cm. ^-2 (130%), the generated withstand voltage is 365 V and the on-resistance is 24 mΩ · cm ² , and 1.5 × 10 ¹³ cm ^-2 (150%), the generated withstand voltage is 280 V and the on-resistance is 20 mΩ · cm ² . descend.
[0027]
From the figure, as the impurity amount in the n drift region 12a becomes 100 to 150% with respect to the impurity amount in the p partition region 12b, the generated breakdown voltage (V _DSS ) decreases, but the on-resistance (Ron · A) is reduced. I understand that. In addition, since the variation of the on-resistance (Ron · A) for each product in the range of 100 to 150% is small, it is sufficient to manufacture only in consideration of the variation in generated withstand voltage in mass production, so that manufacturing and process management are easy. It becomes. In this embodiment, the 400V class is used, but the same can be said for any withstand voltage class.
[0028]
[Example 3]
FIG. 6 is a characteristic diagram showing the dependency of the L load avalanche breakdown current (A) on the amount of impurities. The horizontal axis represents the impurity amount (dose amount) of phosphorus in the n drift region 12a, and the vertical axis represents the L load avalanche breakdown current (A). The boron impurity amount (dose amount) in the p partition region 12b is fixed to 1 × 10 ¹³ cm ^−2, and the phosphorus impurity amount (dose amount) in the n drift region 12a is changed in the range of 80 to 150%. It was. The setting conditions are the same as in the first embodiment.
[0029]
For example, when the impurity amount of the n drift region 12a is 1.0 × 10 ¹³ cm ⁻² (100%), the avalanche breakdown current (A) is about 7A, but 1.3 × 10 ¹³ cm ⁻² (130 %), The avalanche breakdown current (A) is about 63 A, and 1.5 × 10 ¹³ cm ⁻² (150%), the avalanche breakdown current (A) is about 72 A.
[0030]
From the figure, it is understood that when the L load avalanche breakdown current is required to be equal to or higher than the rated current, preferably twice or more, the impurity amount (dose amount) of the n drift region 12a may be set to 110% or more. Further, since the L load avalanche breakdown current at 140% or more tends to be saturated, it is desirable that it be 150% or less in consideration of the decrease in the generated breakdown voltage in FIG. The same can be said for any breakdown voltage class regarding the L load avalanche breakdown current.
[0031]
As a result of the above experiment, the allowable range of the impurity amount of the n drift region 12a and the p partition region 12b of the parallel pn layer has been clarified. In addition, the high-voltage super-junction semiconductor device can be easily mass-produced while further ensuring the L load avalanche breakdown while greatly improving the trade-off relationship. [Example 4]
simulating the n-channel type MOSFET by changing the impurity concentration C _P of the p partition regions 12b, also confirmed by actual trial.
[0032]
FIG. 1 is a characteristic diagram showing the dependency of the breakdown voltage (V _DSS ) on the impurity concentration C _P. The horizontal axis represents the impurity concentration C _P of the p partition region 12b, and the vertical axis represents the breakdown voltage (V _DSS ). The impurity concentration C _n of the n drift region 12a is fixed at 3.5 × 10 ¹⁵ cm ⁻³ , the width is 5 μm, and the depth of the drift layer 12 is 48 μm.
[0033]
For example, when C _n = C _P = 3.5 × 10 ¹⁵ cm ⁻³ , the maximum breakdown voltage is 960 V, but when C _P = 3 × 10 ¹⁵ cm ⁻³ , the breakdown voltage is about 750 V and 2 × 10 2 ^{When it is 15} cm ⁻³ , the voltage drops to about 380V.
[0034]
This is because a portion that cannot be sufficiently depleted in the n drift region 12a is generated. Conversely, when the impurity concentration of the p partition region 12b is set higher than that of the n drift region 12a, a portion that cannot be fully depleted is generated in the p partition region 12b, and the breakdown voltage is also lowered.
[0035]
From the figure, the impurity concentration C _P of the p partition regions 12b are, if with respect to the impurity concentration C _n of the n drift region 12a is within 8% above and below, a reduction in the breakdown voltage is found to live in about 10%.
[0036]
This embodiment is the case of changing the impurity concentration C _P of the p partition regions 12b, same is true of the case where naturally changed impurity concentration C _n of the n drift region 12a. The same can be said for the set withstand voltage in any withstand voltage class. [Example 5]
Next, the n-channel MOSFET was simulated by changing the width L _n of the n drift region 12a to 5 μm and changing the width L _P of the p partition region 12b, and was actually manufactured and confirmed.
[0037]
FIG. 1 is a characteristic diagram showing the dimensional dependence of the breakdown voltage (V _DSS ). The horizontal axis represents the width L _P of the p partition region 12b, and the vertical axis represents the breakdown voltage (V _DSS ). The impurity concentration was fixed at 3.5 × 10 ¹⁵ cm ^−3, and the depth of the drift layer 12 was 48 μm.
[0038]
For example, when L _n = L _P = 5 μm, the maximum breakdown voltage is 960 V, but when L _P = 4 μm, the breakdown voltage decreases to about 550 V.
[0039]
This is because a portion that cannot be sufficiently depleted in the n drift region 12a is generated. Conversely, when the p partition region 12b is thicker than the n drift region 12a, a portion that cannot be fully depleted is generated in the p partition region 12b, and the breakdown voltage is also lowered.
[0040]
From the figure, it can be seen that if the width L _P of the p partition region 12b is within 6% above and below the width L _n of the n drift region 12a, the breakdown voltage can be reduced by about 10%.
[0041]
In this embodiment, the width L _P of the p partition region 12b is changed, but the same can be said of course when the width L _n of the n drift region 12a is changed. The same can be said for the set withstand voltage in any withstand voltage class.
[0042]
As a result of the above experiment, the permissible ranges of the impurity concentration and dimensions of the n drift region 12a and the p partition region 12b of the parallel pn layer have been clarified. The mass production of a high-voltage superjunction semiconductor device can be facilitated while greatly improving the trade-off relationship between voltage and withstand voltage. [Example 6]
As another manufacturing method, an impurity buried region is partially formed before epitaxial growth, and then a process of epitaxially growing the high resistance layer is repeated several times, and then diffused by heat treatment to form a parallel pn layer. You can also.
[0043]
FIG. 4 is a partial cross-sectional view of a basic portion of a vertical n-channel superjunction MOSFET manufactured by such a method.
[0044]
Although it is hardly different from the cross-sectional view of the superjunction MOSFET of FIG. 3, the n drift region 22a and the p partition region 22b are not uniform in impurity concentration but have an impurity concentration distribution inside. For the sake of clarity, a dotted line with the same impurity concentration is shown. The line with the same impurity concentration is a curve (a curved surface in three dimensions). This is because the process of epitaxially growing the high resistance layer was repeated several times after the impurity buried region was formed and then buried by heat treatment and diffused from the impurity source. After a sufficient diffusion time, the boundary between the n drift region 22a and the p partition region 22b becomes a straight line (three-dimensional plane) as shown in the figure.
[0045]
In such a case, it is important for the n drift region 22a and the p partition region 22b not to be sufficiently depleted so that the amount of impurities embedded in both regions is substantially equal.
[0046]
In particular, as described above, when the widths of the n drift region 22a and the p partition region 22b are equal, the utilization factor of the semiconductor crystal plane is increased. Therefore, the average impurity concentration of the n drift region 22a and the p partition region 22b is It is important that they are approximately equal.
[0047]
Also in this example, exactly as in Example 3, the impurity amount in one of the first conductivity type drift region and the second conductivity type partition region is 92 to 108 of the impurity amount in the other region. If it is in the range of%, the decrease in breakdown voltage is suppressed to about 10%.
[0048]
If the widths are equal, the average impurity concentration of one of the first conductivity type drift region and the second conductivity type partition region is within the range of 92 to 108% of the average impurity concentration of the other region. It will be good.
[0049]
Further, the allowable range of the widths of the n drift region 22a and the p partition region 22b may be in the range of 94 to 106%.
[0050]
If the widths of the n drift region 12a and the p partition region 12b are reduced and the impurity concentration is increased, the ON resistance can be further reduced and the trade-off relationship between the ON resistance and the breakdown voltage can be improved.
[0051]
In the embodiment, an example of a vertical MOSFET has been described. However, this problem is also common to a horizontal semiconductor element in which a direction in which a drift current flows when turned on and a direction in which a depletion layer extends due to a reverse bias when turned off. is there. Further, similar effects can be obtained with IGBTs, pn diodes, Schottky barrier diodes, and bipolar transistors.
[0052]
【The invention's effect】
As described above, the present invention provides a superjunction semiconductor including parallel pn layers in which a first conductivity type drift region and a second conductivity type partition region that alternately flow current in the on state and are depleted in the off state. In the element, at least one of the first conductivity type drift region and the second conductivity type partition region is connected with an impurity periodically buried in the depth direction, and the first conductivity type drift region and the second property of the parallel pn layer are connected. By clarifying the allowable range such as impurity concentration and size with the conductive partition region, the trade-off relationship between on-resistance and withstand voltage is greatly improved, and further L load avalanche breakdown is guaranteed, This facilitated mass production of high-voltage superjunction semiconductor devices.
[Brief description of the drawings]
FIG. 1 is a characteristic diagram showing L _P width dependence of breakdown voltage (V _DSS ) in a _{superjunction} MOSFET of the present invention. FIG. 2 is a characteristic chart showing dependence of breakdown voltage (V _DSS ) on impurity concentration C _P. FIG. 4 is a partial cross-sectional view of the basic structure of the superjunction MOSFET of Example 1. FIG. 5 is a partial cross-sectional view of the basic structure of the superjunction MOSFET of Example 2. FIG. Characteristic diagram showing the dependency of resistance (Ron · A) and generated withstand voltage (V _DSS ) on the impurity amount [Fig. 6] Characteristic diagram showing the dependency of L load avalanche breakdown current (A) on the impurity amount [Explanation of symbols]
11, 21 n ⁺ drain layer 12, 22 drift layer 12a, 22a n drift region 12b, 22b p partition region 13a, 23a p well region 13b, 23b p ⁺ contact region 14, 24 n ⁺ source region 15 gate insulating film 16 gate Electrode layer 17 Source electrode 18 Drain electrode 19 Insulating film

Claims (15)

The first and second main surfaces, the first and second main electrodes provided on the main surface, and a first conductivity type drift between the main electrodes in which current flows in the on state and is depleted in the off state In a superjunction semiconductor device including parallel pn layers in which regions and second conductivity type partition regions are alternately arranged, at least one of the first conductivity type drift region and the second conductivity type partition region is periodically embedded in the depth direction. A superjunction semiconductor element, wherein the impurity content of the first conductivity type drift region is in the range of 100 to 150% of the impurity content of the second conductivity type partition region. The first and second main surfaces, the first and second main electrodes provided on the main surface, and a first conductivity type drift between the main electrodes in which current flows in the on state and is depleted in the off state In a superjunction semiconductor device including parallel pn layers in which regions and second conductivity type partition regions are alternately arranged, at least one of the first conductivity type drift region and the second conductivity type partition region is periodically embedded in the depth direction. A superjunction semiconductor device, wherein the impurity content in the first conductivity type drift region is within a range of 110 to 150% of the impurity content in the second conductivity type partition region. The first and second main surfaces, the first and second main electrodes provided on the main surface, and a first conductivity type drift between the main electrodes in which current flows in the on state and is depleted in the off state In a superjunction semiconductor device including parallel pn layers in which regions and second conductivity type partition regions are alternately arranged, at least one of the first conductivity type drift region and the second conductivity type partition region is periodically embedded in the depth direction. The impurity amount in one region of the first conductivity type drift region and the second conductivity type partition region is in the range of 92 to 108% of the impurity amount in the other region. A superjunction semiconductor element characterized by the above. The first and second main surfaces, the first and second main electrodes provided on the main surface, and a first conductivity type drift between the main electrodes in which current flows in the on state and is depleted in the off state In a superjunction semiconductor device including parallel pn layers in which regions and second conductivity type partition regions are alternately arranged, at least one of the first conductivity type drift region and the second conductivity type partition region is periodically embedded in the depth direction. The first conductivity type drift region and the second conductivity type partition region have substantially the same width, and one of the first conductivity type drift region and the second conductivity type partition region is formed. A superjunction semiconductor element, wherein an average impurity concentration of a region is in a range of 92 to 108% of an average impurity concentration of the other region. The first and second main surfaces, the first and second main electrodes provided on the main surface, and a first conductivity type drift between the main electrodes in which current flows in the on state and is depleted in the off state In a superjunction semiconductor device including parallel pn layers in which regions and second conductivity type partition regions are alternately arranged, at least one of the first conductivity type drift region and the second conductivity type partition region is periodically embedded in the depth direction. The first conductivity type drift region and the second conductivity type partition region have substantially the same width, and one of the first conductivity type drift region and the second conductivity type partition region is formed. A superjunction semiconductor element, wherein the impurity concentration of a region is in the range of 92 to 108% of the impurity concentration of the other region. The first and second main surfaces, the first and second main electrodes provided on the main surface, and a first conductivity type drift between the main electrodes in which current flows in the on state and is depleted in the off state In a superjunction semiconductor device including parallel pn layers in which regions and second conductivity type partition regions are alternately arranged, at least one of the first conductivity type drift region and the second conductivity type partition region is periodically embedded in the depth direction. The first conductivity type drift region and the second conductivity type partition region have substantially the same concentration, and one of the first conductivity type drift region and the second conductivity type partition region is formed. A superjunction semiconductor element characterized in that the width of the region is in the range of 94 to 106% of the width of the other region. The superjunction semiconductor device according to any one of claims 1 to 6 , wherein the first conductivity type drift region and the second conductivity type partition region are each in a stripe shape. The first main electrode is provided on the first main surface, and the second main electrode is provided on the second main surface, and the super main body according to any one of claims 1 to 7 , Junction semiconductor element. A second conductivity type well provided on the first main surface side, a source region selectively provided on the surface of the well, and a gate electrode provided on the surface of the well in contact with the source region via a gate insulating film super-junction semiconductor device according to any one of claims 1 to 8 characterized in that it is a MIS type semiconductor device having and. The superjunction semiconductor device according to claim 9 , wherein a width of the well is larger than a width of the second conductivity type partition region. Super junction semiconductor device according to claim 9 or claim 10, characterized in that said well and said source region is the first electrode and electrically connected provided in the first main surface. According to claim 11, wherein the well is provided with a high-concentration contact region of the second conductivity type to the first electrode and electrically connected to the portion provided on the first major surface Super junction semiconductor element. There are at least two electrical connections between the well and the first electrode provided on the first main surface, and the first electrode is disposed on the gate electrode between the two locations via an insulating film. The superjunction semiconductor device according to claim 11 or 12 , wherein the superjunction semiconductor device is disposed. First and second main surfaces, first and second main electrodes provided on the main surface, and between the main electrodes, a current flows in the on state and is depleted in the off state. In a method for manufacturing a superjunction semiconductor device comprising parallel pn layers in which drift regions and second conductivity type partition regions are alternately arranged, one region of the first conductivity type drift region and the second conductivity type partition region In order to form the other region of the impurity amount within the range of 92 to 108% of the impurity amount by epitaxial growth, the process of epitaxial growth is repeated several times after the impurity buried region is partially formed. A method of manufacturing a superjunction semiconductor device characterized by the above. 15. The method of manufacturing a superjunction semiconductor device according to claim 14 , wherein the other region is formed by thermal diffusion after repeating the epitaxial growth step several times.

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