JP3752414B2 - Substrate manufacturing apparatus and substrate manufacturing method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a manufacturing apparatus and a manufacturing method for a plate-like object such as a glass substrate for a display device, and more specifically, chamfering is performed on a ridge angle of a substrate used for a liquid crystal display device, for example. The present invention relates to an apparatus and a chamfering method thereof.
[0002]
[Prior art]
Glass substrates used in display devices such as liquid crystal display devices, EL (electroluminescence) display devices, and plasma display devices are appropriately divided (cut out) according to the application and use conditions, and then the ridge angle of the processed surface Be chamfered about.
[0003]
In particular, the liquid crystal display device has a configuration in which liquid crystal is injected between glass substrates arranged to face each other, and the glass substrate is cut into an appropriate size according to the application so as to be an individual cell unit. . Unevenness is formed at this cutting point, and it is extremely dangerous for handling as it is, so a chamfering process is required to wear the uneven surface at the cutting point with a grindstone.
[0004]
In conventional chamfering processing, first, glass substrates are taken out one by one by a working operator from a stack cassette holding a plurality of glass substrates divided into cell units, and supplied to a chamfering section. . In the chamfering portion, chamfering is performed by wearing two ridge angles at the same time or one ridge at a time with a grindstone on the entire surface of the outer peripheral cutting (cutting) processing surface of the glass substrate. The glass substrates that have been chamfered are stored one by one in the stack cassette by the operator who performs the work.
[0005]
[Problems to be solved by the invention]
In the prior art, glass substrates are supplied one by one by the operator who performs the work and chamfering is performed, so that the loss of the glass substrate supply time with respect to the processing time per sheet becomes large, and the entire processing is performed. There was a problem that the time was long.
[0006]
Moreover, in the prior art, there is a problem in that the cassette replacement frequency increases because a multistage cassette that holds glass substrates in a single row is used.
[0007]
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a substrate manufacturing apparatus and a substrate manufacturing method capable of reducing the cassette replacement frequency and shortening the processing time.
[0008]
[Means for Solving the Problems]
The substrate manufacturing apparatus of the present invention has a plurality of rows of conveying means arranged corresponding to a plurality of rows of substrates held in a plurality of rows and stages in a single cassette, and the substrate conveyed by the conveying means. Processing means for processing and lifting / lowering means for moving the cassette up and down relative to the conveying means are provided. The processing means has a processing section that is movably arranged so that each of the substrates transported by a plurality of rows of transport means can be chamfered.
[0009]
Since a single cassette can hold a plurality of rows of substrates, a single cassette can supply the substrates to a plurality of rows of conveying means. For this reason, even if the conveying means is arranged in a plurality of rows, only one cassette is sufficient, so the frequency of cassette replacement can be reduced as compared with the prior art, and the equipment operation efficiency can be improved.
[0010]
Further, since the substrate can be supplied to a plurality of rows of conveying means by one cassette, the raising and lowering means for raising and lowering the cassette can be shared by the plurality of rows of conveying means, and the apparatus configuration can be simplified.
[0011]
In addition, since it is possible to control a single cassette so that substrates can be supplied simultaneously and individually to a plurality of rows of transfer means, loss of supply time of the substrate to the transfer means can be reduced, and processing time can also be reduced. .
[0012]
Further, since a plurality of substrates can be chamfered in parallel in a plurality of rows, the substrate transport time for processing the same number of substrates as compared to the single wafer processing for processing the substrates one by one and Processing time can be greatly shortened.
[0014]
In addition , since the chamfered portion can be shared by a plurality of rows of conveying means, the apparatus configuration can be further simplified.
[0015]
The substrate manufacturing method of the present invention includes the following steps. First, among the plurality of substrates held in a plurality of rows and stages in one cassette, each of the plurality of rows of substrates held in the same step is taken out from the cassette. Then, each of the plurality of taken-out substrates is transported by each of a plurality of transport means arranged corresponding to the substrate rows. Each of the plurality of rows of substrates conveyed by the conveying means is chamfered by the processing means. Then, each of the plurality of rows of chamfered substrates is transported to the cassette side by the transport means and stored in the cassette.
[0016]
According to the substrate manufacturing method of the present invention, it is possible to hold a plurality of rows of substrates in one cassette, and therefore it is possible to supply substrates to a plurality of rows of conveying means with one cassette. For this reason, even if the conveying means is arranged in a plurality of rows, only one cassette is sufficient, so the frequency of cassette replacement can be reduced as compared with the prior art, and the equipment operation efficiency can be improved.
[0017]
Further, since the substrate can be supplied to a plurality of rows of conveying means by one cassette, the raising and lowering means for raising and lowering the cassette can be shared by the plurality of rows of conveying means, and the apparatus configuration can be simplified.
[0018]
In addition, since it is possible to control the substrate so that the substrates can be supplied simultaneously and individually to a plurality of rows of conveying means with one cassette, loss of the supply time of the substrate to the conveying means can be reduced and the processing time can be shortened.
[0019]
Further, since a plurality of substrates can be chamfered in parallel in a plurality of rows, the substrate transport time for processing the same number of substrates as compared to the single wafer processing for processing the substrates one by one and Processing time can be greatly shortened.
[0021]
Further , since control can be performed so that substrates can be stored simultaneously and individually from a plurality of rows of conveying means in one cassette, loss of substrate storage time can be reduced, and processing time can be shortened.
[0022]
Preferably, in the above-described substrate manufacturing method, a plurality of rows of substrates on the same stage are simultaneously taken out from the cassette and simultaneously stored in the cassette.
[0023]
Preferably, in the above-described substrate manufacturing method, a plurality of rows of substrates on the same stage are individually taken out from the cassette and individually stored in the cassette.
[0024]
Since the substrates can be simultaneously and individually controlled in this way, loss of the substrate supply time to the transport means can be reduced, and the processing time can be shortened.
[0025]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0026]
FIG. 1 is a plan view showing a configuration of a chamfering device for a glass substrate for a display device according to an embodiment of the present invention, and FIG. 2 is a schematic cross-sectional view taken along line AA of FIG.
[0027]
1 and 2, the chamfering apparatus of the present embodiment performs chamfering of glass substrate 10 using multiple cassettes 1 that can hold glass substrates in a plurality of rows and a plurality of stages. is there. The chamfering device mainly includes an elevating unit 2, a transport unit 3, a processing unit 4, a moving unit 5, a positioning unit 6, a storage unit 7, and a supply unit 8.
[0028]
Referring mainly to FIG. 2, the elevating unit 2 is a part for moving the multiple cassettes 1 up and down, and includes a stepping motor and a ball screw. The conveyance part 3 is a part which conveys the glass substrate 10 between the multiple cassette 1 and the process part 4, and is for moving the transfer part 3a which mounts the glass substrate 10, and its transfer part 3a A stepping motor 3b and a ball screw 3c are provided. The processing unit 4 includes first and second processing units 4a and 4b for chamfering the glass substrate 10. The first processing unit 4a includes a grindstone and a motor that drives the grindstone.
[0029]
As the grindstone, for example, a layer-type grindstone is used in which a plurality of grooves each having a substantially V-shaped cross section are formed on a cylindrical outer periphery. The grindstone is not limited to this, and for example, a one-stage groove or a cup-type grindstone can be used. Since the layer type grindstone can be exchanged by changing the step of the groove, the work is simplified.
[0030]
The grindstone of the substrate 10 is chamfered by rotating the grindstone with a motor and passing the substrate 10 through the grindstone groove while the outer edge of the substrate 10 is in contact with the grindstone groove surface.
[0031]
It is preferable that the cutting amount of the grindstone can be adjusted individually for each grindstone. Further, the first processing portion 4a has a fixed / movable function. Although it may be fixed, if it is made movable, the grindstone can be retracted to a position where there is no possibility of interference when the substrate 10 after chamfering is moved.
[0032]
The 2nd process part 4b has the grindstone which cuts the board | substrate 10, and the motor which drives a grindstone, and is supported by the stepping motor 5a and the ball screw 5b so that a movement is possible.
[0033]
The positioning unit 6 is a part for positioning the glass substrate 10 placed on the transfer unit 3a with respect to the processing unit 4, and includes a positioning cylinder 6a for operating the arm 6c and a vertical air cylinder 6b for vertical movement. And have. The storage unit 7 is a part for storing the chamfered glass substrate 10 in the multi-cassette cassette 1, and includes a storage cylinder 7a for operating the arm 7c and a vertical air cylinder 7b for vertical movement. Have. The supply unit 8 is a part for supplying the glass substrate 10 held in the multi-cassette 1 to the transport unit 3, and an arm 8a for extruding the glass substrate 10 and an air for operating the arm 8a. And a cylinder 8b.
[0034]
Referring mainly to FIG. 1, a plurality of rows of conveyance units 3 are arranged in parallel, and a first processing unit 4 a, a positioning unit 6, a storage unit 7, and a supply unit corresponding to the conveyance units 3 of each row. 8 is arranged. Moreover, the raising / lowering part 2, the 2nd process part 4b, and the moving part 5 are shared by the conveyance part 3 of multiple rows. That is, one second processing unit 4 b is moved by the moving unit 5, so that each of the glass substrates 10 conveyed by the plural rows of conveying units 3 can be chamfered. In addition, since the glass substrate 10 is supplied to each of the plurality of rows of transport units 3 by one multi-cassette cassette 1, only one elevating unit 2 for raising and lowering the multi-cassette 1 is sufficient, It can be shared by the transport unit 3.
[0035]
The multiple cassette 1 has a configuration shown in FIG. 3, for example. Referring to FIG. 3, the multiple cassette 1 has a configuration in which a plurality of partition plates 1c are sandwiched between a bottom plate 1a and an upper plate 1b, and a glass substrate 10 is supported by a support portion 1d of the partition plate 1c. Is supported. Thus, in the multiple cassette 1, the glass substrates 10 can be supported in a plurality of rows by the plurality of partition plates 1c, and the glass substrates 10 can be supported in a plurality of stages by the plurality of support portions 1d.
[0036]
Next, a method for chamfering the glass substrate for a display device of the present embodiment will be described.
With reference to FIGS. 1 and 2, first, a plurality of glass substrates 10 are held in a multiple cassette 1 in a plurality of rows and a plurality of stages. At this time, the plurality of glass substrates 10 are held in the multi-cassette 1 with the front and back sides unified and the left and right sides unified. This multiple cassette 1 is set in the elevating part 2. At this time, the elevating part 2 is stopped at the origin position or the manufacturing start position.
[0037]
The ball screw of the elevating unit 2 is operated by the operation start signal of the apparatus, and the multiple cassette 1 is moved to the height of the supply unit 8. Thereafter, the glass substrate 10 is pushed onto the transfer unit 3a of the transport unit 3 by the arm 8a by the operation of the air cylinder 8b. At this time, the plurality of rows of supply units 8 operate simultaneously, and the glass substrates 10 are simultaneously supplied to each of the plurality of rows of conveyance units 3.
[0038]
The glass substrates 10 supplied to the plurality of rows at the same time are vacuum-sucked to the transfer unit 3a, and then sent to the positioning unit 6 side by a ball screw 3c operated by a motor 3b. The positioning portion 6 is lowered by the upper and lower air cylinders 6b, and the alignment before processing the glass substrate 10 is mechanically performed by the arm 6c operated by the positioning cylinder 6a. In this alignment, the vacuum suction of the glass substrate 10 of the transfer unit 3a is temporarily released, and after the positioning is completed, the processing position of the glass substrate 10 is determined again by vacuum suction.
[0039]
Thereafter, the transfer unit 3a on which the glass substrate 10 is placed moves the first processing unit 4a while the substrate 10 is in contact with the groove surface of the rotating grindstone of the first processing unit 4a by the operation of the transport unit 3. pass. Thereby, the chamfering process of the side surface of each glass substrate 10 is simultaneously performed in the plurality of rows of the conveyance units 3. Thereafter, the glass substrate 10 is temporarily stopped after being transported to a predetermined position by the operation of the transport unit 3. In addition, the grindstone of the 1st process part 4a is evacuated after completion of chamfering. The side surface of the glass substrate 10 is chamfered by the second processing portion 4b having a processing grindstone. At this time, the second processing unit 4b is moved by the stepping motor 5a and the ball screw 5b, so that all of the glass substrates 10 that are stopped in each of the plurality of rows of the transport units 3 are chamfered.
[0040]
After the chamfering process, each glass substrate 10 in the plurality of rows of conveyance units 3 is conveyed to the multi-cassette 1 side by the operation of the conveyance unit 3, and is stopped immediately before the storage unit 7 in front of the multi-cassette 1. The The storage unit 7 is moved down by the upper and lower cylinders 7b, and the glass substrates 10 of the plurality of rows of the transfer units 3 are stored in the multi-cassette 1 at the same time by the storage arm 7c operated by the storage cylinder 7a.
[0041]
In response to the storage completion signal of the glass substrate 10, the stepping motor and the ball screw of the elevating unit 2 are operated, and the multiple cassette 1 is raised by a predetermined pitch. Thereby, the glass substrate 10 before chamfering is moved to the height of the supply unit 8.
[0042]
Thereafter, the same operation as described above is repeated on the glass substrate 10 before the chamfering process, so that all the glass substrates 10 in the multiple cassette 1 are continuously chamfered.
[0043]
In the above description, the process of taking out a plurality of rows of glass substrates 10 from the multi-cassette 1 at the same time, simultaneously chamfering them, and simultaneously storing them in the multi-cassette cassette 1 has been described. It may be taken out from the cassette 1, individually chamfered, and individually stored in the multiple cassette 1. That is, each of the glass substrates 10 arranged in the same stage and in a plurality of rows of the multi-cassette cassette 1 is supplied to the plurality of rows of conveying units 3 at different timings, and is chamfered at different timings. It may be stored in the continuous cassette 1.
[0044]
In the present embodiment, since the multiple cassette 1 that can hold the glass substrates 10 in a plurality of rows is used, the glass substrate 10 can be supplied to the conveyance sections 3 in the multiple rows with one multiple cassette 1. . For this reason, even if it arranges the conveyance part 3 in multiple rows, since the multiple cassette 1 is enough, the replacement frequency of the multiple cassette 1 can be reduced rather than a prior art, and equipment operation efficiency can be improved.
[0045]
In addition, since the glass substrate 10 can be supplied to the plurality of rows of conveyance units 3 with one multi-cassette cassette 1, the elevating unit 2 for raising and lowering the multi-cassette cassette 1 can be shared by the plurality of rows of conveyance units 3, and the apparatus configuration It can be simplified.
[0046]
Moreover, since it can be controlled so that the glass substrates 10 can be supplied simultaneously and individually to a plurality of rows of conveyance units 3 with one multi-cassette cassette 1, loss of the supply time of the glass substrate 10 to the conveyance unit 3 can be reduced. Processing time can be shortened.
[0047]
In addition, since the glass substrates 10 can be processed in parallel in a plurality of rows, compared with single wafer processing in which the glass substrates 10 are processed one by one, the transfer time for processing the same number of glass substrates 10 and Processing time can be greatly shortened.
[0048]
Moreover, since the 2nd process part 4b can be shared by the conveyance part 3 of multiple rows, an apparatus structure can be simplified further.
[0049]
In addition, since the size of the glass substrate 10 varies depending on its usage and the like, the partition plate 1c in the multiple cassette 1 shown in FIG. 3 is preferably configured so that its position can be changed in the horizontal direction in the figure. Specifically, a slide hole 1e is provided in each of the bottom plate 1a and the upper plate 1b, and a pin 1f provided in the partition plate 1c is slid in the hole 1e, whereby the partition plate 1c is moved in the horizontal direction in the figure. It is possible to move and hold the glass substrates 10 having different sizes.
[0050]
In addition, since the size of the glass substrate 10 varies depending on the application, etc., the mounting and fixing positions of the grinding wheels for the first and second processed portions 4a and 4b can be easily changed by removing bolts or the like. It is preferable.
[0051]
In the present embodiment, the case where the conveyance units 3 are five rows has been described. However, the number of the conveyance units 3 is not limited to this, and may be two or more rows.
[0052]
Further, the positioning unit 6 and the first processing unit 4a are arranged in a staggered manner in order to reduce the size of the apparatus, but the present invention is not limited to this, and may be arranged linearly. The arrangement of
[0053]
The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
[0054]
【The invention's effect】
As described above, according to the present invention, it is possible to hold a plurality of rows of substrates in one cassette, and therefore it is possible to supply substrates to a plurality of rows of conveying means with one cassette. For this reason, even if the conveying means is arranged in a plurality of rows, only one cassette is sufficient, so the frequency of cassette replacement can be reduced as compared with the prior art.
[0055]
Further, since the substrate can be supplied to a plurality of rows of conveying means by one cassette, the raising and lowering means for raising and lowering the cassette can be shared by the plurality of rows of conveying means, and the apparatus configuration can be simplified.
[0056]
In addition, since it is possible to control the substrate so that substrates can be supplied simultaneously and individually to a plurality of rows of conveying means with one cassette, loss of the supply time of the substrate to the conveying means can be reduced, and the processing time can also be shortened. .
[0057]
In addition, since the substrates can be processed in multiple rows in parallel, the transfer time and processing time for processing the same number of substrates are significantly reduced compared to single wafer processing in which substrates are processed one by one. can do.
[Brief description of the drawings]
FIG. 1 is a plan view showing a configuration of a chamfering device for a glass substrate for a display device according to an embodiment of the present invention.
FIG. 2 is a schematic cross-sectional view taken along line AA in FIG.
FIG. 3 is a perspective view schematically showing a configuration of a multiple cassette.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Multiple cassette, 2 Elevating part, 3 Conveying part, 4 Processing part, 5 Moving part, 6 Positioning part, 7 Storage part, 8 Supply part, 10 Glass substrate.

Claims (4)

A plurality of rows of conveying means arranged corresponding to a plurality of rows of substrates held in a plurality of rows and in a plurality of stages in one cassette;
Processing means for chamfering the substrate transported by the transport means;
Elevating means for moving the cassette up and down relative to the conveying means ;
The said manufacturing means is a board | substrate manufacturing apparatus which has the process part arrange | positioned so that movement of each of the said board | substrate conveyed by the said conveyance means of multiple rows is possible . Out of a plurality of substrates held in a plurality of rows and stages in one cassette, a step of taking out each of the plurality of rows of substrates held in the same step from the cassette;
A step of transporting each of the plurality of taken-out substrates by a plurality of transport means arranged corresponding to the rows of the substrates;
Chamfering each of the plurality of rows of the substrates transported by the transporting means by a processing means ;
And chamfering the plurality of rows of the substrates, respectively, to the cassette side by the conveying means and storing the substrates in the cassette . The substrate manufacturing method according to claim 2 , wherein the substrates arranged in a plurality of rows at the same stage in the cassette are simultaneously taken out from the cassette and simultaneously stored in the cassette. The method for manufacturing a substrate according to claim 2 , wherein the substrates arranged in a plurality of rows at the same stage in the cassette are individually taken out from the cassette and individually stored in the cassette.

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