JP3674889B2 - Resin composition, permanent resist resin composition, and cured products thereof - Google Patents
Resin composition, permanent resist resin composition, and cured products thereof Download PDFInfo
- Publication number
- JP3674889B2 JP3674889B2 JP30354396A JP30354396A JP3674889B2 JP 3674889 B2 JP3674889 B2 JP 3674889B2 JP 30354396 A JP30354396 A JP 30354396A JP 30354396 A JP30354396 A JP 30354396A JP 3674889 B2 JP3674889 B2 JP 3674889B2
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- Prior art keywords
- resin composition
- parts
- epoxy
- weight
- resin
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims description 17
- 239000000047 product Substances 0.000 claims description 17
- 150000001875 compounds Chemical class 0.000 claims description 15
- 239000002253 acid Substances 0.000 claims description 13
- 239000004593 Epoxy Substances 0.000 claims description 10
- 229920005989 resin Polymers 0.000 claims description 10
- 239000011347 resin Substances 0.000 claims description 10
- 125000003700 epoxy group Chemical group 0.000 claims description 9
- 239000003822 epoxy resin Substances 0.000 claims description 8
- 229920000647 polyepoxide Polymers 0.000 claims description 8
- 239000003505 polymerization initiator Substances 0.000 claims description 8
- 238000007334 copolymerization reaction Methods 0.000 claims description 7
- 239000003085 diluting agent Substances 0.000 claims description 7
- 239000007795 chemical reaction product Substances 0.000 claims description 6
- 150000007519 polyprotic acids Polymers 0.000 claims description 6
- 150000008065 acid anhydrides Chemical class 0.000 claims description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 5
- 238000012663 cationic photopolymerization Methods 0.000 claims description 2
- 239000003999 initiator Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 description 23
- 238000000034 method Methods 0.000 description 19
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 16
- 238000007747 plating Methods 0.000 description 13
- 239000000243 solution Substances 0.000 description 12
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 10
- 239000007787 solid Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- -1 2-hydroxypropyl Chemical group 0.000 description 8
- 239000000654 additive Substances 0.000 description 8
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 8
- 230000000996 additive effect Effects 0.000 description 7
- 238000011161 development Methods 0.000 description 7
- 239000003208 petroleum Substances 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 238000003756 stirring Methods 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 4
- 238000007772 electroless plating Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 4
- 238000005476 soldering Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 2
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- ZIKLJUUTSQYGQI-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxypropoxy)propane Chemical compound CCOCC(C)OCC(C)OCC ZIKLJUUTSQYGQI-UHFFFAOYSA-N 0.000 description 2
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 2
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- 0 CC(C)c(cc1)cc(C(c2c3)=O)c1Sc2ccc3S(c1ccc(*)cc1)c1ccc(/C=C/C)cc1 Chemical compound CC(C)c(cc1)cc(C(c2c3)=O)c1Sc2ccc3S(c1ccc(*)cc1)c1ccc(/C=C/C)cc1 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 2
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 2
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229940014800 succinic anhydride Drugs 0.000 description 2
- ARCGXLSVLAOJQL-UHFFFAOYSA-N trimellitic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 ARCGXLSVLAOJQL-UHFFFAOYSA-N 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 1
- FVQMJJQUGGVLEP-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy 2-ethylhexaneperoxoate Chemical compound CCCCC(CC)C(=O)OOOC(C)(C)C FVQMJJQUGGVLEP-UHFFFAOYSA-N 0.000 description 1
- ZXPCCXXSNUIVNK-UHFFFAOYSA-N 1,1,1,2,3-pentachloropropane Chemical compound ClCC(Cl)C(Cl)(Cl)Cl ZXPCCXXSNUIVNK-UHFFFAOYSA-N 0.000 description 1
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- QWOZZTWBWQMEPD-UHFFFAOYSA-N 1-(2-ethoxypropoxy)propan-2-ol Chemical compound CCOC(C)COCC(C)O QWOZZTWBWQMEPD-UHFFFAOYSA-N 0.000 description 1
- VYMRCJJQCHGDIW-UHFFFAOYSA-N 1-ethenoxybutan-2-ol Chemical compound CCC(O)COC=C VYMRCJJQCHGDIW-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- JJRUAPNVLBABCN-UHFFFAOYSA-N 2-(ethenoxymethyl)oxirane Chemical compound C=COCC1CO1 JJRUAPNVLBABCN-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- FRIBMENBGGCKPD-UHFFFAOYSA-N 3-(2,3-dimethoxyphenyl)prop-2-enal Chemical compound COC1=CC=CC(C=CC=O)=C1OC FRIBMENBGGCKPD-UHFFFAOYSA-N 0.000 description 1
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
- IYMZEPRSPLASMS-UHFFFAOYSA-N 3-phenylpyrrole-2,5-dione Chemical compound O=C1NC(=O)C(C=2C=CC=CC=2)=C1 IYMZEPRSPLASMS-UHFFFAOYSA-N 0.000 description 1
- VFXXTYGQYWRHJP-UHFFFAOYSA-N 4,4'-azobis(4-cyanopentanoic acid) Chemical compound OC(=O)CCC(C)(C#N)N=NC(C)(CCC(O)=O)C#N VFXXTYGQYWRHJP-UHFFFAOYSA-N 0.000 description 1
- SXIFAEWFOJETOA-UHFFFAOYSA-N 4-hydroxy-butyl Chemical group [CH2]CCCO SXIFAEWFOJETOA-UHFFFAOYSA-N 0.000 description 1
- YKXAYLPDMSGWEV-UHFFFAOYSA-N 4-hydroxybutyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCO YKXAYLPDMSGWEV-UHFFFAOYSA-N 0.000 description 1
- 229910002012 Aerosil® Inorganic materials 0.000 description 1
- 229910002019 Aerosil® 380 Inorganic materials 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical class C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- KVNRLNFWIYMESJ-UHFFFAOYSA-N butyronitrile Chemical compound CCCC#N KVNRLNFWIYMESJ-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- LSXWFXONGKSEMY-UHFFFAOYSA-N di-tert-butyl peroxide Chemical compound CC(C)(C)OOC(C)(C)C LSXWFXONGKSEMY-UHFFFAOYSA-N 0.000 description 1
- GUJOJGAPFQRJSV-UHFFFAOYSA-N dialuminum;dioxosilane;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3].O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O GUJOJGAPFQRJSV-UHFFFAOYSA-N 0.000 description 1
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 235000019000 fluorine Nutrition 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical class I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- FRCAGVUKJQCWBD-UHFFFAOYSA-L iodine green Chemical compound [Cl-].[Cl-].C1=CC(N(C)C)=CC=C1C(\C=1C=CC(=CC=1)[N+](C)(C)C)=C/1C=C(C)C(=[N+](C)C)C=C\1 FRCAGVUKJQCWBD-UHFFFAOYSA-L 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- VYKXQOYUCMREIS-UHFFFAOYSA-N methylhexahydrophthalic anhydride Chemical compound C1CCCC2C(=O)OC(=O)C21C VYKXQOYUCMREIS-UHFFFAOYSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052901 montmorillonite Inorganic materials 0.000 description 1
- QYZFTMMPKCOTAN-UHFFFAOYSA-N n-[2-(2-hydroxyethylamino)ethyl]-2-[[1-[2-(2-hydroxyethylamino)ethylamino]-2-methyl-1-oxopropan-2-yl]diazenyl]-2-methylpropanamide Chemical compound OCCNCCNC(=O)C(C)(C)N=NC(C)(C)C(=O)NCCNCCO QYZFTMMPKCOTAN-UHFFFAOYSA-N 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 230000001699 photocatalysis Effects 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 239000007870 radical polymerization initiator Substances 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 150000003557 thiazoles Chemical class 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
Landscapes
- Epoxy Resins (AREA)
Description
【0001】
【発明の属する技術分野】
本発明は、特にプリント配線板用永久レジストとして有用な樹脂組成物及びその硬化物に関する。
【0002】
【従来の技術】
従来、プリント配線板は銅張積層板を用い、銅箔の回路に不要な部分をエッチングにより除去するサブトラクティブ法によって製造されているが、このサブトラクティブ法は、ファインパターン、高密度配線板を形成するのが困難であること、また、小径スルーホール、バイアホールが電気メッキでは均一に行えないことなどの欠点を有し、電子機器の高密度化に対応しきれなくなっているのが現状である。
【0003】
これに対し最近は、絶縁基材よりなる積層板に接着剤層を形成し、そこへ無電解メッキにより回路及びスルホールを形成するフルアデイティブ法が注目されている。この方法では導体パターン精度はメッキレジストの転写精度のみで決定され、また導体部分が無電解メッキのみで形成されるため、高アスペクト比スルホールを有する基板においても、スローイングパワーの高い均一なスルホールメッキを行うことが可能である。これまでは一般民生用に適するとされてきたアデイティブ法であるが、産業用、高密度、高多層基板製造プロセスとして実用され始めている。
【0004】
【発明が解決しようとする課題】
一般に民生用途の基板製造のためのアデイディブ法では、メッキレジストパターンはスクリーン印刷法によって転写されているが、高密度配線を有するプリント配線板を製造するためには、メッキレジストパターンを写真製板によって形成すること、すなわちフォトレジストを用いたフォトアデイティブ法を採用することが必要となってくる。フォトアデイテイブ法に適したフォトレジストには、感度や解像度、現像性のようなフォトレジスト本来の特性のほかに、次のような特性が要求される。現像は、1,1,1−トリクロロエタン系有機溶剤又はアルカリ水溶液に限定されるため、いずれかで現像可能であること、高温、高アルカリ性条件下で長時間行われる無電解メッキに耐えること、メッキ処理後、永久レジストとして優れたソルダーレジスト特性を有すること、はんだ付け工程での260℃前後の温度にも耐える耐熱性、及びはんだ付け時に用いるフラックスを洗浄する有機溶剤に対する耐溶剤を有すること、更には、積層されても基板全体の熱的信頼性を低下させないことなどである。現在、このアデイティブ法に使用可能なフォトレジストも市販されているが未だ十分であるとはいえない。
【0005】
従って、本発明の目的とするところは、写真法によりパターン精度の良いレジスト形成がアルカリ水溶液を用いた現像で可能であり、フルアデイティブ法の無電解銅メッキ液に十分に耐え、また、はんだ付け工程の260℃前後の温度にも耐える耐熱性、及びはんだ付け時に用いるフラックスを洗浄する有機溶剤に対する耐溶剤性を備えていて、最終製品まで除去することなく使用される永久レジスト樹脂組成物及びその硬化物を提供するところにある。
【0006】
【課題を解決するための手段】
上記の目的を達成するために、本発明による樹脂組成物、プリント配線板用永久レジスト樹脂組成物及びその硬化物は、下記の組成を有し、永久レジストとしての優れた特性とこのレジスト樹脂組成物を用いたプリント配線板を製造し得ることを性能上の特長とするものである。
【0007】
即ち、本発明は、
モノエチレン性不飽和基含有エポキシ化合物(a)と水酸基含有モノエチレン性不飽和化合物(b)及び任意成分として(a)及び(b)成分以外のモノエチレン性不飽和化合物(c)の反応物である共重合型エポキシ樹脂(d)と多塩基酸無水物(e)の反応物であるエポキシ基含有ポリカルボン酸樹脂(A)、光カチオン重合開始剤(B)及び希釈剤(C)を含有することを特徴とする樹脂組成物、永久レジスト樹脂組成物及びそれらの硬化物に関する。
【0008】
本発明では、エポキシ基含有ポリカルボン酸樹脂(A)を使用する。(A)成分は、モノエチレン性不飽和基含有エポキシ化合物(a)と水酸基含有モノエチレン性不飽和化合物(b)及び任意成分として(a)及び(b)成分以外のモノエチレン性不飽和化合物(c)を共重合させることにより得られる反応物である共重合型エポキシ樹脂(d)と多塩基酸無水物(e)を反応させることにより得ることができる。
【0009】
モノエチレン性不飽和基含有エポキシ化合物(a)の具体例としては、例えば、グリシジル(メタ)アクリレート、グリシジルビニルエーテル、
【0010】
【化1】
【0011】
【化2】
【0012】
等を挙げることができる。
水酸基含有モノエチレン性不飽和化合物(b)の具体例としては、例えば、2−ヒドロキシエチル(メタ)アクリレート、2−ヒドロキシプロピル(メタ)アクリレート、4−ヒドロキシブチル(メタ)アクリレート、2−ヒドロキシエチルビニルエーテル、2−ヒドロキシブチルビニルエーテル、シクロヘキサン−1,4−ジメチロールモノ(メタ)アクリレート、シクロヘキサン−1,4−ジメチロールモノビニルエーテル等を挙げることができる。
【0013】
(a)及び(b)成分以外のモノエチレン性不飽和化合物(c)の具体例としては、例えば、スチレン、α−メチルスチレン、(メタ)アクリル酸、メチル(メタ)アクリレート、エチル(メタ)アクリレート、ブチル(メタ)アクリレート、2−エチルヘキシル(メタ)アクリレート、ベンジル(メタ)アクリレート、イソボルニル(メタ)アクリレート、フェニルマレイミド等を挙げることができる。
【0014】
(a)、(b)及び(c)成分の使用割合としては、例えば、(a)+(b)+(c)の総量を100重量部とした場合、(a)成分の使用量は5〜70重量部が好ましく、特に好ましくは10〜50重量部であり、(b)成分は、30〜95重量部が好ましく、特に好ましくは50〜90重量部であり、(c)成分は0〜50重量部が好ましく、特に好ましくは0〜30重量部である。
【0015】
(a)〜(c)成分の共重合の反応時、希釈剤としての有機溶剤類(例えば、エチルメチルケトン、シクロヘキサノンなどのケトン類、トルエン、キシレン、テトラメチルベンゼンなどの芳香族炭化水素類、ジプロピレングリコールジメチルエーテル、ジプロピレングリコールジエチルエーテルなどのグリコールエーテル類、酢酸エチル、酢酸ブチル、ブチルセロソルブアセテート、カルビトールアセテートなどのエステル類、オクタン、デカンなどの脂肪族炭化水素、石油エーテル、石油ナフサ、水添石油ナフサ、ソルベントナフサなどの石油系溶剤等の有機溶剤類を任意の量を使用するのが好ましい。更に、重合開始剤として、例えば、アゾ系化合物(例えば、2,2′−アゾビスイソブチロニトリル、2,2′−アゾビス(2,4−ジメチルバレロニトリル)、4,4′−アゾビス−4−シアノバレリン酸等)、パーオキサイド化合物(例えば、クメンハイドロパーオキサイド、t−ブチルパーオキシ−2−エチルヘキサノエート、1,1−ジ−t−ブチルパーオキシ−3,3,5−トリメチルシクロヘキサン、ジ−t−ブチルパーオキサイド等)等を挙げることができる。
【0016】
反応温度は、50〜100℃が好ましく、反応時間は、5〜30時間が好ましい。
このようにして共重合型エポキシ樹脂(d)を得ることができる。
【0017】
次に、共重合型エポキシ樹脂(d)と多塩基酸無水物(c)(例えば、無水コハク酸、無水マレイン酸、無水フタル酸、テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、メチルヘキサヒドロ無水フタル酸、メチルエンドメチレンテトラヒドロ無水フタル酸、トリメリット酸、ピロメリット酸等)の反応は、前記共重合型エポキシ樹脂(d)中の水酸基に対して、水酸基1当量あたり前記の多塩基酸無水物(c)を0.1〜1.0当量反応させるのが好ましい。反応温度は60〜150℃が好ましい。反応時間は、1〜10時間が好ましい。
【0018】
本発明の組成物に含まれるエポキシ基含有ポリカルボン酸樹脂(A)の量は、組成物中10〜80重量%が好ましく、特に15〜60重量%が好ましい。
【0019】
次に光カチオン重合開始剤(B)の具体例としては、例えば、
【0020】
【化3】
【0021】
【化4】
【0022】
【化5】
【0023】
【化6】
【0024】
【化7】
【0025】
【化8】
【0026】
【化9】
【0027】
【化10】
【0028】
【化11】
【0029】
【化12】
【0030】
等のスルホニウム塩、ヨードニウム塩、あるいはピリジニウム塩等を挙げることができる。これら光カチオン重合開始剤(B)は、単独あるいは2種以上を組合せて用いることができる。
【0031】
光カチオン重合開始剤(B)の使用割合は、本発明の組成物中、0.5〜20重量%が好ましく、特に好ましくは、1〜10重量%である。
【0032】
次に希釈剤(C)の具体例としては、例えば、エチルメチルケトン、シクロヘキサノン等のケトン類、トルエン、キシレン、テトラメチルベンゼン等の芳香族炭化水素類、メチルセロソルブ、ブチルセロソルブ、メチルカルビトール、ブチルカルビトール、プロピレングリコールモノメチルエーテル、ジプロピレングリコールモノエチルエーテル、ジプロピレングリコールジエチルエーテル等のグリコールエーテル類、酢酸エチル、酢酸ブチル、ブチルセロソルブアセテート、カルビトールアセテート等のエステル類、エタノール、プロパノール、エチレングリコール、プロピレングリコールなどのアルコール類、オクタン、デカンなどの脂肪族炭化水素、石油エーテル、石油ナフサ、水添石油ナフサ、ソルベントナフサ等の石油系溶剤等を挙げることができる。
【0033】
前記の希釈剤(C)は、単独または2種以上の混合物として用いられ、本発明の組成物に含まれる希釈剤(C)の量は、組成物中、5〜80重量%が好ましく10〜70重量%である。
【0034】
本発明の組成物は、更に、密着性、硬度などの特性を向上する目的で必要に応じて、硫酸バリウム、チタン酸バリウム、酸化ケイ素粉、微粉状酸化ケイ素、無定形シリカ、タルク、クレー、炭酸マグネシウム、炭酸カルシウム、酸化アルミニウム、水酸化アルミニウム、雲母粉等の公知慣用の無機充填剤が使用できる。その使用量は、本発明の組成物中の0〜60重量%が好ましく、特に好ましくは5〜40重量%である。
【0035】
更に、必要に応じて、フタロシアニン・ブルー、フタロシアニン・グリーン、アイオジン・グリーン、ジスアゾイエロー、クリスタルバイオレット、酸化チタン、カーボンブラック、ナフタレンブラックなどの公知慣用の着色剤、ハイドロキノン、ハイドロキノンモノメチルエーテル等の公知慣用の重合禁止剤、アスベスト、ベントン、モンモリロナイト等の公知慣用の増粘剤、シリコーン系、フッ素系、高分子系等の消泡剤および/または、レベリング剤、イミダゾール系、チアゾール系、トリアゾール系、シランカップリング剤等の密着性付与剤のような公知慣用の添加剤類を用いることができる。
【0036】
又、アクリル酸エステル類などのエチレン性不飽和化合物の共重合体類や、多価アルコール類と多塩基酸化合物から合成されるポリエステル樹脂類等の公知慣用のバインダー樹脂および、エポキシ(メタ)アクリレート、エポキシ(メタ)アクリレート、の多塩基酸無水物の反応物、ポリエステル(メタ)アクリレート、ポリウレタン(メタ)アクリレート等の光重合性オリゴマー類、トリメチロールプロパントリ(メタ)アクリレート、ジペンタエリスリトールペンタ及びヘキサ(メタ)アクリレート等の光重合性モノマー類、エポキシ樹脂類もレジストとしての諸特性に影響を及ぼさない範囲で用いることができる。
【0037】
本発明の組成物は、配合成分を好ましくは前記の割合で配合し、ロールミル等で均一に混合することにより得られる。
【0038】
本発明の永久レジスト樹脂組成物は、例えば次のようにして硬化し、硬化物を得る。即ち、積層板上に10〜160μmの膜厚で塗布し、塗膜を60〜110℃で乾燥させた後、ネガフィルムを塗膜に直接に接触させ、次いで紫外線を照射し、未露光部分を希アルカリ水溶液(例えば、0.5〜2%炭酸ソーダ水溶液等)で溶解除去(現像)した。水洗乾燥後、全面に紫外線を照射した後、150℃で30分間加熱硬化し硬化物を得る。
【0039】
【実施例】
以下、本発明の実施例により更に具体的に説明する。
【0040】
(エポキシ基含有ポリカルボン酸樹脂(A)の合成例)
合成例1
フラスコにプロピレングリコールモノメチルエーテルアセテート1144.2部を仕込み、攪拌しながら窒素ガスを吹き込み、90℃に加温した。温度が90℃で一定になったところで2−ヒドロキシエチルメタクリレート500部、メチルメタクリレート200部、グリシジルメタクリレート300部及びアゾビスイソブチロニトリル15部を混合した液を2.5時間かけてフラスコ内に滴下し、その後90℃で攪拌しながら3時間保温した。3時間後にアゾビスイソブチロニトリル3部をプロピレングリコールモノメチルエーテルアセテート100部に溶かした溶液を10分かけてフラスコ内に滴下し、その後90℃で攪拌しながら4時間保温した。次いで60℃まで冷却し、テトラヒドロ無水フタル酸376.4部及びプロピレングリコールモノメチルエーテルアセテート460部を仕込み、90℃に加温し、10時間反応させ、エポキシ基含有ポリカルボン酸樹脂(A−1)を得た。生成物の固形分酸価(mgKOH/g)は、100で固形分のエポキシ当量657.6で重量平均分子量は35000であった。生成物溶液の固形分は45重量%であった。
【0041】
合成例2
フラスコにプロピレングリコールモノメチルエーテルアセテート1144.2部を仕込み、攪拌しながら窒素ガスを吹き込み、90℃に加温した。温度が90℃で一定になったところで2−ヒドロキシエチルアクリレート500部、エチルメタクリレート100部、グリシジルメタクリレート400及びアゾビスイソブチロニトリル15部を混合した液を2.5時間保温した。3時間後アゾビスイソブチロニトリル3部をプロピレングリコールモノメチルエーテルアセテート100部に溶かした溶液を10分かけてフラスコ内に滴下し、その後90℃で攪拌しながら4時間保温した。次いで60℃まで冷却し、ヘキサヒドロ無水フタル酸359部、プロピレングリコールモノエチルエーテルアセテート438.8部を仕込み90℃に加温し、10時間反応させエポキシ基含有ポリカルボン酸樹脂(A−2)を得た。生成物の固形分酸価(mgKOH/g)は、95、固形分のエポキシ当量489、重量平均分子量は29000であった。生成物溶液の固形分は45重量%であった。
【0042】
合成例3
フラスコにプロピレングリコールモノメチルエーテルアセテート1144.2部を仕込み、攪拌しながら窒素ガスを吹き込み、90℃に加温した。温度が90℃で一定になったところで、4−ヒドロキシブチルメタクリレート500部、エチルメタクリレート100部、下記構造式の化合物400部
【0043】
【化13】
【0044】
及びアゾビスイソブチロールニトリル15部を混合した液を2.5時間保温した。3時間後アゾビスイソブチロニトリル3部をプロピレングリコールモノメチルエーテルアセテート100部に溶かした溶液を10分かけてフラスコ内に滴下し、その後90℃で攪拌しながら4時間保温した。次いで60℃まで冷却し、無水コハク酸221部、プロピレングリコールモノメチルエーテルアセテート270.1部を仕込み90℃に加温し、10時間反応させエポキシ基含有ポリカルボン酸樹脂(A−3)を得た。生成物の固形分酸価(mgKOH/g)は100、固形分のエポキシ当量563、重量平均分子量は25000であった。生成物溶液の固形分は45重量%であった。
【0045】
実施例1〜
表1に示す配合組成物(数値は重量部である。)に従って永久レジスト樹脂組成物を混合、分散、混練し調製した。得られた組成物を積層板上に30μmの厚みで塗布し、80℃で60分間乾燥し、次いでレジスト上にネガマクスを接触させ、超高圧水銀灯を用いて紫外線を照射した。未露光部分を1.5%NaCO3 水溶液で60秒間、2.0kg/cm2 のスプレー圧で現像した。(現像前に加熱処理することもできる。)水洗乾燥後、全面に紫外線を照射後、150℃で30分間加熱処理を行なった。これを70℃の無電解銅メッキ液に10時間浸漬し、約20μmの無電解銅メッキ皮膜を形成し、アディテイブ法多層プリント配線板を作製した。このようにしてアディテイブ法多層プリント配線板が得られる過程でのレジスト特性について評価した結果を表1に示す。
【0046】
評価方法
(現像性)
○・・・・現像時、完全にインキが除去され、現像できた。
×・・・・現像時、少しでも残渣が残っており、現像されない部分が
ある。
(耐溶剤性)
レジスト硬化膜をアセトンに20分間浸漬しその状態を目視した。
○・・・・全く変化がなかった。
×・・・・フクレやハクリが発生した。
(耐メッキ液)
○・・・・無電解銅メッキ工程で全く変化が見られない。
×・・・・無電解銅メッキ工程で変色、フクレやハクリが発生した。(半田耐熱性)
JIS C 6481の試験方法に従って、260℃の半田浴への試験片の10秒浸漬を3回又は2回行ない、外観の変化を評価した。
【0047】
(ポストフラック耐性)
10秒浸漬を3回行い、外観の変化を評価した。
○・・・・外観変化なし
△・・・・硬化膜の変色が認められるもの
×・・・・硬化膜の浮き、剥れ、半田潜りあり
注)使用したポストフラックス(ロジン系):JIS C 6481に従ったフラックスを使用。
【0048】
(レベラー用フラックス耐性)
10秒浸漬を2回行ない、煮沸水に10分浸漬後、外観の変化を評価した。
○・・・・外観変化なし
△・・・・硬化膜の変色が認められるもの
×・・・・硬化膜の浮き、剥れ、半田潜りあり
注)使用したレベラー用フラックス:(株)メック製、W−121
(レジスト組成物のシェルライフ)
レジスト組成物を40℃に1ケ月放置した後の状態を観察した。
○・・・・粘度、その他の外観に全く変化なし。
△・・・・粘度がやや増加している。
×・・・・ゲル化している。
【0049】
【表1】
【0050】
注) *1 SP−170:旭電化工業(株)製、光カチオン重合開始剤プロピレンカーボネート40%希釈品。
*2 UVI−6990:ユニオンカーバイト(株)製、光カチオン重合開始剤。プロピレンカーボネート50%希釈品。
*3 PCI−061:日本化薬(株)製、光カチオン重合開始剤黄色粉末、構造式は、
【0051】
【化13】
【0052】
である。
*4 EOCN−104S:日本化薬(株)製、クレゾール・ノボラック型、エポキシ樹脂、エポキシ当量220、軟化点92℃。
*5 KAYARAD DPHA:日本化薬(株)製、ジペンタエリスリトールペンタ及びヘキサアクリレート混合物。
*6 ルシリンTPO:BASF(株)製、光ラジカル重合開始剤
*7 アエロジル380:日本アエロジル(株)製、無水シリカ
【0053】
表1の評価結果から、本発明の樹脂組成物は、シエルフライフが長く、希アルカリ水溶液の現像性に優れ、その硬化物は、耐溶剤性、耐メッキ液、半田耐熱性に優れている。
【0054】
【発明の効果】
本発明の樹脂組成物、永久レジスト樹脂組成物及びその硬化物は、高解像度で、かつ、希アルカリ水溶液による現像が容易であるにもかかわらず、イソプロピルアルコール、トリクロロエチレン、塩化メチレン、アセトンなどに対する耐溶剤性、高温、高アルカリ性条件下で長時間行われる無電解メッキに対する耐メッキ液性に優れ、更には、はんだ付け工程の260℃前後の温度にも耐える耐熱性をもそなえたプリント配線板の製造に特に適している。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a resin composition particularly useful as a permanent resist for printed wiring boards and a cured product thereof.
[0002]
[Prior art]
Conventionally, printed wiring boards have been manufactured by a subtractive method that uses copper-clad laminates and removes unnecessary portions of the copper foil circuit by etching. This subtractive method uses fine patterns and high-density wiring boards. It is difficult to form, and has the disadvantages that small-diameter through-holes and via-holes cannot be uniformly formed by electroplating. is there.
[0003]
On the other hand, recently, a full additive method in which an adhesive layer is formed on a laminated board made of an insulating base material and a circuit and a through hole are formed thereon by electroless plating has attracted attention. In this method, the conductor pattern accuracy is determined only by the transfer accuracy of the plating resist, and the conductor portion is formed only by electroless plating. Therefore, even through a substrate having a high aspect ratio through hole, uniform through hole plating with high throwing power is performed. Is possible. Up to now, it is an additive method that has been considered suitable for general consumer use, but it has begun to be put into practical use as an industrial, high-density, high-multilayer substrate manufacturing process.
[0004]
[Problems to be solved by the invention]
In general, in the additive method for manufacturing a substrate for consumer use, the plating resist pattern is transferred by a screen printing method. However, in order to manufacture a printed wiring board having high-density wiring, the plating resist pattern is formed by photographic board. It is necessary to form the film, that is, to adopt a photoadditive method using a photoresist. A photoresist suitable for the photoadditive method is required to have the following characteristics in addition to the inherent characteristics of the photoresist such as sensitivity, resolution, and developability. Development is limited to 1,1,1-trichloroethane-based organic solvents or alkaline aqueous solutions, so that development is possible with any of them, resistance to electroless plating performed for a long time under high temperature and high alkaline conditions, plating After processing, it has excellent solder resist properties as a permanent resist, has heat resistance that can withstand temperatures around 260 ° C. in the soldering process, and has resistance to organic solvents that wash the flux used during soldering, That is, the thermal reliability of the entire substrate is not deteriorated even when stacked. At present, photoresists that can be used in this additive method are also commercially available, but it is still not sufficient.
[0005]
Accordingly, the object of the present invention is that a resist with high pattern accuracy can be formed by development using an alkaline aqueous solution by a photographic method, sufficiently resists an electroless copper plating solution of a full additive method, and a solder A permanent resist resin composition that has heat resistance that can withstand temperatures of about 260 ° C. in the attaching process, and solvent resistance to an organic solvent that cleans the flux used during soldering, and can be used without removing the final product, and The cured product is to be provided.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, the resin composition according to the present invention, the permanent resist resin composition for printed wiring boards and the cured product thereof have the following composition, and have excellent properties as a permanent resist and the resist resin composition. It is a performance feature that a printed wiring board using a product can be manufactured.
[0007]
That is, the present invention
Reaction product of monoethylenically unsaturated group-containing epoxy compound (a), hydroxyl group-containing monoethylenically unsaturated compound (b) and monoethylenically unsaturated compound (c) other than components (a) and (b) as optional components An epoxy group-containing polycarboxylic acid resin (A), a photocationic polymerization initiator (B), and a diluent (C), which are reaction products of a copolymerization type epoxy resin (d) and a polybasic acid anhydride (e). It is related with the resin composition characterized by containing, a permanent resist resin composition, and those hardened | cured materials.
[0008]
In the present invention, an epoxy group-containing polycarboxylic acid resin (A) is used. The component (A) comprises a monoethylenically unsaturated group-containing epoxy compound (a), a hydroxyl group-containing monoethylenically unsaturated compound (b), and monoethylenically unsaturated compounds other than the components (a) and (b) as optional components It can be obtained by reacting a copolymerization type epoxy resin (d), which is a reaction product obtained by copolymerizing (c), with a polybasic acid anhydride (e).
[0009]
Specific examples of the monoethylenically unsaturated group-containing epoxy compound (a) include, for example, glycidyl (meth) acrylate, glycidyl vinyl ether,
[0010]
[Chemical 1]
[0011]
[Chemical formula 2]
[0012]
Etc.
Specific examples of the hydroxyl group-containing monoethylenically unsaturated compound (b) include, for example, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, and 2-hydroxyethyl. Examples include vinyl ether, 2-hydroxybutyl vinyl ether, cyclohexane-1,4-dimethylol mono (meth) acrylate, cyclohexane-1,4-dimethylol monovinyl ether, and the like.
[0013]
Specific examples of the monoethylenically unsaturated compound (c) other than the components (a) and (b) include, for example, styrene, α-methylstyrene, (meth) acrylic acid, methyl (meth) acrylate, and ethyl (meth). Examples include acrylate, butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, benzyl (meth) acrylate, isobornyl (meth) acrylate, and phenylmaleimide.
[0014]
As the use ratio of the components (a), (b) and (c), for example, when the total amount of (a) + (b) + (c) is 100 parts by weight, the use amount of the component (a) is 5 Is preferably 70 parts by weight, particularly preferably 10 to 50 parts by weight, component (b) is preferably 30 to 95 parts by weight, particularly preferably 50 to 90 parts by weight, and component (c) is 0 to 90 parts by weight. 50 parts by weight is preferred, particularly preferably 0 to 30 parts by weight.
[0015]
During the copolymerization reaction of the components (a) to (c), organic solvents as diluents (for example, ketones such as ethyl methyl ketone and cyclohexanone, aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene, Glycol ethers such as dipropylene glycol dimethyl ether and dipropylene glycol diethyl ether, ethyl acetate, butyl acetate, butyl cellosolve acetate, esters such as carbitol acetate, aliphatic hydrocarbons such as octane and decane, petroleum ether, petroleum naphtha, water It is preferable to use an arbitrary amount of an organic solvent such as petroleum naphtha, solvent naphtha, etc. Further, as a polymerization initiator, for example, an azo compound (for example, 2,2′-azobisiso) is used. Butyronitrile, 2,2'-azobis (2,4-di Tilvaleronitrile), 4,4′-azobis-4-cyanovaleric acid, etc.), peroxide compounds (eg cumene hydroperoxide, t-butylperoxy-2-ethylhexanoate, 1,1-di-t -Butylperoxy-3,3,5-trimethylcyclohexane, di-t-butyl peroxide, etc.).
[0016]
The reaction temperature is preferably 50 to 100 ° C., and the reaction time is preferably 5 to 30 hours.
Thus, a copolymerization type epoxy resin (d) can be obtained.
[0017]
Next, a copolymerization type epoxy resin (d) and a polybasic acid anhydride (c) (for example, succinic anhydride, maleic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methylhexahydrophthalic anhydride) Reaction of acid, methyl endomethylenetetrahydrophthalic anhydride, trimellitic acid, pyromellitic acid, etc.) with respect to the hydroxyl groups in the copolymerization type epoxy resin (d). It is preferable to react 0.1 to 1.0 equivalent of (c). The reaction temperature is preferably 60 to 150 ° C. The reaction time is preferably 1 to 10 hours.
[0018]
The amount of the epoxy group-containing polycarboxylic acid resin (A) contained in the composition of the present invention is preferably 10 to 80% by weight, particularly preferably 15 to 60% by weight in the composition.
[0019]
Next, specific examples of the cationic photopolymerization initiator (B) include, for example,
[0020]
[Chemical 3]
[0021]
[Formula 4]
[0022]
[Chemical formula 5]
[0023]
[Chemical 6]
[0024]
[Chemical 7]
[0025]
[Chemical 8]
[0026]
[Chemical 9]
[0027]
[Chemical Formula 10]
[0028]
Embedded image
[0029]
Embedded image
[0030]
Examples thereof include sulfonium salts, iodonium salts, pyridinium salts, and the like. These photocationic polymerization initiators (B) can be used alone or in combination of two or more.
[0031]
The proportion of the photocationic polymerization initiator (B) used in the composition of the present invention is preferably 0.5 to 20% by weight, particularly preferably 1 to 10% by weight.
[0032]
Specific examples of the diluent (C) include, for example, ketones such as ethyl methyl ketone and cyclohexanone, aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene, methyl cellosolve, butyl cellosolve, methyl carbitol, and butyl. Carbitol, glycol ethers such as propylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol diethyl ether, esters such as ethyl acetate, butyl acetate, butyl cellosolve acetate, carbitol acetate, ethanol, propanol, ethylene glycol, Alcohols such as propylene glycol, aliphatic hydrocarbons such as octane and decane, petroleum solvents such as petroleum ether, petroleum naphtha, hydrogenated petroleum naphtha, and solvent naphtha It can gel.
[0033]
The diluent (C) is used alone or as a mixture of two or more. The amount of the diluent (C) contained in the composition of the present invention is preferably 5 to 80% by weight in the composition. 70% by weight.
[0034]
The composition of the present invention may further comprise barium sulfate, barium titanate, silicon oxide powder, finely divided silicon oxide, amorphous silica, talc, clay, as necessary for the purpose of improving properties such as adhesion and hardness. Known and commonly used inorganic fillers such as magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, and mica powder can be used. The amount to be used is preferably 0 to 60% by weight, particularly preferably 5 to 40% by weight in the composition of the present invention.
[0035]
Furthermore, if necessary, known and commonly used colorants such as phthalocyanine blue, phthalocyanine green, iodine green, disazo yellow, crystal violet, titanium oxide, carbon black, naphthalene black, hydroquinone, hydroquinone monomethyl ether, etc. Polymerization inhibitors, known thickeners such as asbestos, benton, montmorillonite, defoamers and / or leveling agents such as silicones, fluorines and polymers, imidazoles, thiazoles, triazoles, silanes Known and commonly used additives such as an adhesion-imparting agent such as a coupling agent can be used.
[0036]
Also known binder resins such as copolymers of ethylenically unsaturated compounds such as acrylic esters, polyester resins synthesized from polyhydric alcohols and polybasic acid compounds, and epoxy (meth) acrylates , Epoxy (meth) acrylate, polybasic acid anhydride reaction product, polyester (meth) acrylate, photopolymerizable oligomers such as polyurethane (meth) acrylate, trimethylolpropane tri (meth) acrylate, dipentaerythritol penta Photopolymerizable monomers such as hexa (meth) acrylate and epoxy resins can also be used as long as they do not affect the properties of the resist.
[0037]
The composition of the present invention is obtained by blending the blending components preferably in the above proportions and uniformly mixing with a roll mill or the like.
[0038]
The permanent resist resin composition of the present invention is cured, for example, as follows to obtain a cured product. That is, it was applied to a laminated plate with a film thickness of 10 to 160 μm, and after the coating film was dried at 60 to 110 ° C., the negative film was directly contacted with the coating film, and then irradiated with ultraviolet rays, and the unexposed part was removed. It was dissolved and removed (developed) with a dilute alkaline aqueous solution (for example, 0.5 to 2% sodium carbonate aqueous solution). After washing and drying, the whole surface is irradiated with ultraviolet rays, and then cured by heating at 150 ° C. for 30 minutes to obtain a cured product.
[0039]
【Example】
Hereinafter, the present invention will be described in more detail with reference to examples.
[0040]
(Synthesis example of epoxy group-containing polycarboxylic acid resin (A))
Synthesis example 1
Into the flask, 1144.2 parts of propylene glycol monomethyl ether acetate was charged, nitrogen gas was blown into the flask while stirring, and the mixture was heated to 90 ° C. When the temperature became constant at 90 ° C., a mixture of 500 parts of 2-hydroxyethyl methacrylate, 200 parts of methyl methacrylate, 300 parts of glycidyl methacrylate and 15 parts of azobisisobutyronitrile was placed in the flask over 2.5 hours. The solution was added dropwise, and then kept at 90 ° C. with stirring for 3 hours. After 3 hours, a solution prepared by dissolving 3 parts of azobisisobutyronitrile in 100 parts of propylene glycol monomethyl ether acetate was dropped into the flask over 10 minutes, and then kept at 90 ° C. for 4 hours while stirring. Next, the mixture was cooled to 60 ° C., charged with 376.4 parts of tetrahydrophthalic anhydride and 460 parts of propylene glycol monomethyl ether acetate, heated to 90 ° C., reacted for 10 hours, and epoxy group-containing polycarboxylic acid resin (A-1) Got. The product had a solid content acid value (mgKOH / g) of 100, an epoxy equivalent of solid content of 657.6, and a weight average molecular weight of 35,000. The solid content of the product solution was 45% by weight.
[0041]
Synthesis example 2
Into the flask, 1144.2 parts of propylene glycol monomethyl ether acetate was charged, nitrogen gas was blown into the flask while stirring, and the mixture was heated to 90 ° C. When the temperature became constant at 90 ° C., a mixture of 500 parts of 2-hydroxyethyl acrylate, 100 parts of ethyl methacrylate, 400 parts of glycidyl methacrylate and 15 parts of azobisisobutyronitrile was kept warm for 2.5 hours. After 3 hours, a solution prepared by dissolving 3 parts of azobisisobutyronitrile in 100 parts of propylene glycol monomethyl ether acetate was dropped into the flask over 10 minutes, and then kept at 90 ° C. for 4 hours while stirring. Next, the mixture was cooled to 60 ° C., 359 parts of hexahydrophthalic anhydride and 438.8 parts of propylene glycol monoethyl ether acetate were added, heated to 90 ° C., and reacted for 10 hours to obtain an epoxy group-containing polycarboxylic acid resin (A-2). Obtained. The product had a solid content acid value (mgKOH / g) of 95, a solid content epoxy equivalent of 489, and a weight average molecular weight of 29000. The solid content of the product solution was 45% by weight.
[0042]
Synthesis example 3
Into the flask, 1144.2 parts of propylene glycol monomethyl ether acetate was charged, nitrogen gas was blown into the flask while stirring, and the mixture was heated to 90 ° C. When the temperature became constant at 90 ° C., 500 parts of 4-hydroxybutyl methacrylate, 100 parts of ethyl methacrylate, 400 parts of the compound of the following structural formula
Embedded image
[0044]
And the liquid which mixed 15 parts of azobisisobutyrol nitrile was heat-retained for 2.5 hours. After 3 hours, a solution prepared by dissolving 3 parts of azobisisobutyronitrile in 100 parts of propylene glycol monomethyl ether acetate was dropped into the flask over 10 minutes, and then kept at 90 ° C. for 4 hours while stirring. Next, the mixture was cooled to 60 ° C., 221 parts of succinic anhydride and 270.1 parts of propylene glycol monomethyl ether acetate were added, heated to 90 ° C., and reacted for 10 hours to obtain an epoxy group-containing polycarboxylic acid resin (A-3). . The product had a solid content acid value (mgKOH / g) of 100, a solid content epoxy equivalent of 563, and a weight average molecular weight of 25,000. The solid content of the product solution was 45% by weight.
[0045]
Example 1
A permanent resist resin composition was mixed, dispersed, and kneaded in accordance with the composition shown in Table 1 (numerical values are parts by weight). The obtained composition was applied to a laminate with a thickness of 30 μm, dried at 80 ° C. for 60 minutes, then contacted with Negamax on the resist, and irradiated with ultraviolet rays using an ultrahigh pressure mercury lamp. The unexposed area was developed with a 1.5% aqueous NaCO 3 solution for 60 seconds at a spray pressure of 2.0 kg / cm 2 . (It can also be heat-treated before development.) After washing with water and drying, the whole surface was irradiated with ultraviolet rays and then heat-treated at 150 ° C. for 30 minutes. This was immersed in an electroless copper plating solution at 70 ° C. for 10 hours to form an electroless copper plating film of about 20 μm, and an additive method multilayer printed wiring board was produced. Table 1 shows the results of evaluating the resist characteristics in the process of obtaining the additive multilayer printed wiring board in this way.
[0046]
Evaluation method (developability)
○: The ink was completely removed during development and development was possible.
× ······················· Development has some residue and some parts are not developed.
(Solvent resistance)
The cured resist film was immersed in acetone for 20 minutes and the state was visually observed.
○ ... There was no change at all.
× ···· Bullet and tear occurred.
(Plating resistant)
○ ··· No change is seen in the electroless copper plating process.
× ··· Discoloration, blistering or peeling occurred in the electroless copper plating process. (Solder heat resistance)
According to the test method of JIS C 6481, the test piece was immersed in a 260 ° C. solder bath for 10 seconds three times or twice, and the change in appearance was evaluated.
[0047]
(Post-flac resistance)
The 10-second immersion was performed 3 times to evaluate the change in appearance.
○ ··· No change in appearance △ ····························································· Use flux according to 6481.
[0048]
(Flux resistance for levelers)
Immersion was performed twice for 10 seconds, and changes in appearance were evaluated after immersion in boiling water for 10 minutes.
○ ··· No change in appearance △ ································································ , W-121
(Resist composition shell life)
The state after the resist composition was left at 40 ° C. for one month was observed.
○ ・ ・ ・ ・ Viscosity and other appearances are completely unchanged.
Δ: The viscosity is slightly increased.
× ··· Gelled.
[0049]
[Table 1]
[0050]
Note) * 1 SP-170: Asahi Denka Kogyo Co., Ltd., photocationic polymerization initiator, 40% diluted product of propylene carbonate.
* 2 UVI-6990: Photocatalytic polymerization initiator manufactured by Union Carbide Corporation. Propylene carbonate 50% diluted product.
* 3 PCI-061: Nippon Kayaku Co., Ltd., photocationic polymerization initiator yellow powder, structural formula is
[0051]
Embedded image
[0052]
It is.
* 4 EOCN-104S: manufactured by Nippon Kayaku Co., Ltd., cresol / novolak type, epoxy resin, epoxy equivalent 220, softening point 92 ° C.
* 5 KAYARAD DPHA: Nippon Kayaku Co., Ltd., dipentaerythritol penta and hexaacrylate mixture.
* 6 Lucillin TPO: BASF Corporation photo radical polymerization initiator * 7 Aerosil 380: Nippon Aerosil Co., Ltd. anhydrous silica
From the evaluation results in Table 1, the resin composition of the present invention has a long shelf life and excellent developability of dilute alkaline aqueous solution, and the cured product is excellent in solvent resistance, plating solution and solder heat resistance. .
[0054]
【The invention's effect】
The resin composition, permanent resist resin composition and cured product thereof of the present invention have high resolution and are resistant to isopropyl alcohol, trichloroethylene, methylene chloride, acetone, etc., despite being easily developed with a dilute alkaline aqueous solution. Excellent resistance to plating solution for electroless plating performed for a long time under solvent, high temperature and high alkaline conditions. Furthermore, the printed wiring board has heat resistance that can withstand temperatures around 260 ° C in the soldering process. Especially suitable for manufacturing.
Claims (3)
Priority Applications (1)
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JP30354396A JP3674889B2 (en) | 1996-10-30 | 1996-10-30 | Resin composition, permanent resist resin composition, and cured products thereof |
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JP30354396A JP3674889B2 (en) | 1996-10-30 | 1996-10-30 | Resin composition, permanent resist resin composition, and cured products thereof |
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