JP3655841B2 - Surface matching device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a surface aligning device, and more particularly to a surface aligning device used for adjusting a surface between components and a central axis at the time of joining optical components.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, a copying / center axis adjustment mechanism as shown in FIG. 5 is used in order to adjust the surface and center axis between parts when optical parts are joined.
[0003]
This mechanism includes an upper and lower stage 122, a left and right stage 123, and a front and rear stage 124, in which adjustment stage units to which a clamp part 121 that clamps the workpiece 120 is fixed are layered. This mechanism also includes a clamp that clamps the workpiece 119 on a pedestal 126 having a vertical stage 114, a left and right stage 115, a front and rear stage 116, a front and rear tilt stage 117, a left and right tilt stage 125, and a convex spherical surface. Part 118.
[0004]
Then, with the above configuration, the object to be processed 119 is set on the clamp part 118, and the object to be processed 120 is set on the clamp part 121. Here, it is assumed that the central axes of the object to be processed 119 and the object to be processed 120 coincide with each other by adjusting each stage and confirming the external shape or confirming the characteristics.
[0005]
Next, the workpiece 120 is lowered by the upper and lower stages 122, and the contact between the workpiece 119 and the surface is confirmed. Next, surface adjustment is performed. Check the surface contact, once separate the contact surface of the workpiece 120 and the workpiece 119, adjust the left and right tilt stage 125 and the front and rear tilt stage 117, find the position where the plane is parallel, at this time again The central axes of the objects to be processed 119 and 120 are confirmed. In most cases, since these central axes are deviated, the above adjustment is repeated several times and the surface alignment with the central axes of both objects 119 and 120 is performed.
[0006]
[Problems to be solved by the invention]
However, in the conventional mechanism, as shown in FIG. 6, when the copying surface of the workpieces 119 and 120 is small, the vicinity of the center of the convex spherical surface of the pedestal 126 (see FIG. 5) is pressurized, and the pedestal 126 is Since it is difficult to move, there is a problem that it is difficult to completely match both surfaces of the objects to be processed 119 and 120 when pressing the object to be processed 120 from above.
[0007]
Further, the conventional mechanism has a problem that an error is likely to occur by a person because the determination as to whether or not the surfaces of the objects to be processed 119 and 120 are imitating often depends on visual observation.
[0008]
Therefore, the present invention has been made in view of the problems in the conventional mechanism described above, and even if the copying surface of the object to be processed is small, the both surfaces can be easily perfectly aligned, and whether or not both surfaces are copied. It is an object of the present invention to provide a surface aligning device that does not rely on visual inspection for such determination and does not cause human error.
[0012]
[Means for Solving the Problems]
In order to achieve the above-mentioned object, the invention according to claim 1 is a surface aligning apparatus, wherein a contact surface that contacts a clamp portion that fixes an object to be processed and a convex hemisphere on the opposite side of the corresponding contact surface are provided. A unit comprising a convex spherical block provided and a base block provided with a concave portion that receives the hemispherical surface of the convex spherical block and rotatably holds the convex spherical block. Two units are arranged, and biasing means for biasing either one or both of the convex spherical blocks in a direction in which both convex spherical blocks are close to each other is provided.
[0013]
According to the first aspect of the present invention, the urging means urges one or both of the convex sphere blocks in a direction in which both convex sphere blocks are close to each other, thereby bringing the joint surfaces of the objects to be processed into each other. Since it can be forcibly moved in the approaching direction, both surfaces can be perfectly aligned easily even if the bonding surface (copying surface) of the workpiece is small.
[0014]
According to a second aspect of the present invention, as a preferred form of the first aspect of the present invention, the urging means includes a movable plate interposed between the clamp portion and the convex spherical block, and the movable plate. It is characterized in that a part is constituted by a movable stage that is biased toward the convex spherical block facing each other. Thus, the urging means can be configured with a simple configuration.
[0015]
According to a third aspect of the present invention, in the surface aligning apparatus according to the second aspect, the movable plate is provided with a load measuring means for measuring a load applied to the movable plate.
[0016]
According to the invention described in claim 3, by measuring the load applied to the movable plate by the load measuring means, the movable plate can be biased based on the measured value, and it is determined whether or not both surfaces are imitating. Therefore, human error does not occur.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Next, a specific example of the embodiment of the surface alignment apparatus according to the present invention will be described with reference to the drawings. Hereinafter, the case where this surface aligning apparatus is used for adjusting the surface between the components and the central axis when joining the optical components will be described.
[0018]
1 and 2 show an embodiment of a surface aligning device according to the present invention. This surface aligning device includes a clamp portion 5 for fixing a first component 3 such as a light emitting element, and a clamp below the clamp portion 5. The movable plate 6 integrally provided with the part 5, the convex spherical block 2 integrally provided with the movable plate 6, the base block 1 that rotatably holds the convex spherical block 2 via an air film, a metal ferrule, and the like An arm 7 as a pressing means for pressing the second part 4 against the first part 3 and a movable stage 8 as a biasing means for biasing the convex spherical block 2 toward the second part 4 via the movable plate 6. And a load meter 9 as a load measuring means for measuring the load applied to the movable plate 6 and a control unit 10 for controlling the moving amount of the movable stage 8 based on the measured value of the load meter 9.
[0019]
The clamp portion 5 is provided for fixing the first component 3 and is fixed on the movable plate 6. Further, the convex spherical block 2 includes a convex hemispherical surface 2 b on the opposite side of the surface 2 a including the movable plate 6.
[0020]
The base block 1 includes a concave portion 1a that receives the hemispherical surface 2b of the convex spherical block 2 and rotatably holds the convex spherical block 2, and an air film is formed in the concave portion 1a. The hemispherical surface 2b of the block 2 is rotatably held.
[0021]
Further, a positioning means (not shown) is provided to align the center point of the joint surface of the first part 3 with the center point 2c of the hemispherical surface 2b of the convex spherical block 2. Although various positioning means are conceivable, the dimension of the first part 3 is set to a predetermined value in advance so that the center point of the joint surface of the first part 3 is located at the center point 2c of the hemispherical surface 2b of the convex spherical block 2. Alternatively, based on a mechanical or optical method, the clamp portion 5 may be adjusted so that the center point of the joint surface of the first component 3 is positioned at the center point 2c of the hemispherical surface 2b of the convex spherical block 2. .
[0022]
The movable plate 6 is interposed between the convex spherical block 2 and the clamp portion 5, and on the lower surface of the movable plate 6, as shown in FIG. Is provided. The load meter 9 can determine the contact condition of the joint surfaces of the first component 3 and the second component 4 by measuring the load applied to the movable plate 6.
[0023]
In addition, below the movable plate 6, movable stages 8 are provided at three locations equally divided by 120 degrees around the circumference and sandwiched between load meters 9. The movable stage 8 is moved up and down by the control unit 10 based on the measurement value of the load meter 9 to urge the movable plate 6 toward the second component 4.
[0024]
Next, the operation of the surface matching apparatus according to the present invention having the above configuration will be described.
[0025]
First, as shown in FIG. 1, the first component 3 is fixed by the clamp portion 5. At this time, the center point of the joint surface of the first component 3 is made to coincide with the center point 2c of the hemispherical surface 2b of the convex spherical block 2 by positioning means (not shown).
[0026]
Next, by supplying air between the base block 1 and the convex spherical block 2, the convex spherical block 2 floats about 10 μm, and there is a frictional force between the joint surfaces of the base block 1 and the convex spherical block 2. No longer. Therefore, the second component 4 is gripped by the arm 7, and the joint surface of the second component 4 is matched with the central point of the joint surface of the first component 3 by the arm 7. Is pressed against the joint surface of the first component 3. Here, since the convex spherical block 2 is in a free state with no frictional resistance, the joint surface of the first component 3 and the second component 4 follows. The first part 3 and the second part 4 are fixed in a state where the joint surface is copied by evacuating the air between the base block 1 and the convex block 2 while the both joint surfaces are copied. .
[0027]
Here, it is a case where the joint surface (copy surface) between the first component 3 and the second component 4 is small, and the center point of the joint surface of the second component 4 is completely set to the center point of the joint surface of the first component 3. When it is difficult to match, the convex spherical block 2 is difficult to move. Therefore, when the second component 4 is pressed by the arm 7 from above, the joint surface between the first component 3 and the second component 4 is completely formed. It becomes difficult to match. In this case, the values of the load meters 5 provided at three positions below the movable plate 6 shown in FIG. 2 are read, and as shown in FIG. The joint surface of the first part 3 and the second part 4 can be perfectly aligned by moving in the X direction.
[0028]
Then, the air between the base block 1 and the convex spherical block 2 is evacuated to fix the first part 3 and the second part 4 in a state of following the surfaces of the first part 3 and the second part 4. At that time, the convex spherical block 2 is about to be lowered by an amount corresponding to about 10 μm when the convex spherical block 2 is levitated initially, but is supported from below by the movable stage 8 and pressed from above by the arm 7. The positions of the first part 3 and the second part 4 do not change.
[0029]
Next, a second embodiment of the surface aligning apparatus according to the present invention will be described with reference to FIG.
[0030]
The surface matching device according to the present embodiment includes a convex spherical block 13 having a contact surface 13a that contacts the clamp portion 15 that fixes the first component 17, and a convex hemispherical surface 13b on the opposite side of the contact surface 13a. A unit constituted by a base block 11 (12) having a porous concave spherical surface (concave portion) 14 that receives the hemispherical surface 13b of the convex spherical block 13 and rotatably holds the convex spherical block 13 is contacted. Two units are arranged so that the surfaces 13a face each other, and either unit or both of the convex spherical blocks 13 are biased in the direction in which both convex spherical blocks 13 are close to each other. A movable plate 26 is interposed between the convex ball block 13 and a movable stage 28 that urges a part of the movable plate 26 toward the opposite convex ball block 13, and is added to the movable plate 26. Characterized by providing a load meter 29 as a load measuring means for measuring the weight. Note that three movable stages 28 and three load meters 29 are provided for each movable plate 26 as in the case of the first embodiment.
[0031]
The clamp portion 15 is formed so as to be clamped by the movable plate 26 of each unit in order to clamp and fix the first component 17. Further, in order to eliminate the sliding resistance between the hemispherical surface 13b of the convex spherical block 13 and the porous concave spherical surface 14, air is ejected from the porous concave spherical surface 14 to form an air film 21 of about 10 μm. Block 13 rises.
[0032]
Next, the operation of the surface matching apparatus having the above configuration will be described in detail.
[0033]
First, the first component 17 is fixed by the clamp portion 15. Next, by supplying air between the base block 11 (12) and the convex spherical block 13, the convex spherical block 13 rises by about 10 μm, and friction is generated between the joint surfaces of the base block 11 and the convex spherical block 13. There is no power.
[0034]
The second part 18 clamped by the clamp part 16 moves downward and contacts the first part 17. At this time, since the clamp part 15 is clamped at a position deviated from the central axis of the convex spherical block 13, the second part 18 clamped to the clamp part 16 is convex with a small load of, for example, several tens of grams. The spherical block 3 and the porous concave spherical surface 14 can be slid, and a moment in the rotational direction can be applied to the convex spherical block 13.
[0035]
After the surfaces of the first component 17 and the second component 18 are copied and bonded, the bonding surface is copied by evacuating the air between the base block 11 (12) and the convex spherical block 2. In this state, the first component 17 and the second component 18 are fixed.
[0036]
Here, it is a case where the joint surface (copy surface) of the first component 17 and the second component 18 is small, and the center point of the joint surface of the second component 18 is completely matched with the center point of the first component 17. In such a case, when the second component 18 is pressed from above, it is difficult to completely match the joint surfaces of the first component 17 and the second component 18.
[0037]
In this case, the values of the three load meters 29 provided on the movable plate 26 are read, and the movable stage 28 is moved, so that the movable plate 26 is moved and the joining surface of the first component 17 and the second component 18 is moved. Can be perfectly adapted.
[0038]
Then, the air between the base block 11 (12) and the convex spherical block 13 is evacuated to fix both the surfaces of the first component 17 and the second component 18 following each other. At that time, the convex spherical block 13 tries to move by an amount of about 10 μm when the convex spherical block 13 was levitated initially, but is supported from both sides by the movable stage 28 and between the two convex spherical blocks 13. Since the clamp part 15 exists, the position of the 1st component 17 and the 2nd component 18 does not fluctuate.
[0039]
【The invention's effect】
As described above, according to the present invention, even if the copying surface of the object to be processed is small, it is possible to easily match both surfaces easily. It is possible to provide a surface aligning device that does not cause a mechanical error.
[Brief description of the drawings]
FIG. 1 is a partially broken front view showing a first embodiment of a surface matching apparatus according to the present invention.
FIG. 2 is a cross-sectional view taken along line AA in FIG.
FIG. 3 is a partially broken front view for explaining the operation of the surface aligning apparatus of FIG. 1;
FIG. 4 is a partially broken front view showing a second embodiment of the surface matching apparatus according to the present invention.
FIG. 5 is a schematic front view showing an example of a conventional copying / centering axis adjustment mechanism.
6 is a partial cross-sectional view for explaining a problem when the copying / center axis adjustment mechanism of FIG. 5 is used. FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Base block 1a Concave part 2 Convex spherical block 2a Surface 2b Hemispherical surface 2c Center point 3 1st part 4 2nd part 5 Clamp part 6 Movable plate 7 Arm 8 Movable stage 9 Load meter 10 Control unit 11 Base block 12 Base block 13 Convex sphere block 13a Contact surface 13b Hemispherical surface 14 Porous concave spherical surface (concave part)
15 Clamping part 16 Clamping part 17 First part 18 Second part 21 Air film 26 Movable plate 28 Movable stage 29 Load meter

Claims (3)

  A convex spherical block having a contact hemisphere on the opposite side of the contact surface to be in contact with the clamp portion for fixing the workpiece, and the convex spherical block receiving the hemispherical surface of the convex spherical block 2 units are arranged so that the abutment surfaces face each other, and either one or both of the convex spherical blocks are arranged as biconvex spheres. A surface aligning apparatus comprising biasing means for biasing the blocks in directions close to each other.   The biasing means is a movable plate interposed between the clamp part and the convex spherical block, and a movable stage that biases a part of the movable plate toward the opposing convex spherical block. The surface matching apparatus according to claim 1, wherein the apparatus is a surface matching apparatus.   3. The surface matching apparatus according to claim 2, wherein a load measuring means for measuring a load applied to the movable plate is provided on the movable plate.

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