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JP3299160B2 - Electronic component mounting method and device - Google Patents

Electronic component mounting method and device

Info

Publication number
JP3299160B2
JP3299160B2 JP36295797A JP36295797A JP3299160B2 JP 3299160 B2 JP3299160 B2 JP 3299160B2 JP 36295797 A JP36295797 A JP 36295797A JP 36295797 A JP36295797 A JP 36295797A JP 3299160 B2 JP3299160 B2 JP 3299160B2
Authority
JP
Japan
Prior art keywords
observation
mounting
electronic component
devices
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP36295797A
Other languages
Japanese (ja)
Other versions
JPH11177300A (en
Inventor
亨 水野
芳文 大津
一明 高貫
均 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by TDK Corp filed Critical TDK Corp
Priority to JP36295797A priority Critical patent/JP3299160B2/en
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電子部品を基板上
の実装位置に装着するための電子部品実装方法及び装置
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for mounting an electronic component at a mounting position on a substrate.

【0002】[0002]

【従来の技術】従来より、電子部品を下方から観察する
第1の観察装置(例えばCCDカメラ等)と基板のマー
クを観察する第2の観察装置(例えばCCDカメラ等)
の2台を用い、電子部品の装着位置を補正して実装する
方法は知られている(例えば特開昭63−2633号公
報)。観察装置毎に任意の補正の為の基準(観察装置の
中央が多い)を設けて補正量を決め、更に任意の実装目
標位置に対して実装した後に本来の正しい実装目標位置
と現実に実装された位置とのズレ量をオフセット量とし
て設定する手法である。
2. Description of the Related Art Conventionally, a first observation device (for example, a CCD camera or the like) for observing an electronic component from below and a second observation device (for example, a CCD camera or the like) for observing a mark on a substrate.
A method of mounting electronic components by correcting the mounting position of the electronic components using the two devices is known (for example, JP-A-63-2633). A reference for arbitrary correction (the center of the observation device is large) is determined for each observation device, the amount of correction is determined, and after mounting to an arbitrary mounting target position, the device is actually mounted with the original correct mounting target position. This is a method of setting the amount of deviation from the shifted position as the amount of offset.

【0003】[0003]

【発明が解決しようとする課題】ところで、2台の観察
装置を用いた位置補正の方法では、2台の観察装置の位
置関係が変化すると補正量に誤差が生じる。電子部品実
装装置では、稼働することにより、例えばサーボモー
タ、ガイド、ボールネジ等から生じる熱等による位置変
化が生じる為、2台の観察装置の位置関係を常に同一に
保つことが困難である。このため、実装精度が上がらな
い、又は維持できないという問題があった。
In the position correction method using two observation devices, an error occurs in the correction amount when the positional relationship between the two observation devices changes. In the electronic component mounting apparatus, when the electronic component mounting apparatus is operated, a position change occurs due to, for example, heat generated from a servomotor, a guide, a ball screw, or the like. For this reason, there has been a problem that mounting accuracy cannot be improved or maintained.

【0004】本発明は、上記の点に鑑み、1つの観察基
準を上下2つの観察装置で同時、又は個々に測定して2
台の観察装置の位置関係を正確に計測可能として、電子
部品の基板への実装精度を向上させることのできる電子
部品実装方法及び装置を提供することを目的とする。
[0004] In view of the above, the present invention provides a method in which one observation criterion is measured simultaneously or individually by two upper and lower observation devices.
It is an object of the present invention to provide an electronic component mounting method and apparatus capable of accurately measuring the positional relationship of a stand observation device and improving the mounting accuracy of electronic components on a substrate.

【0005】本発明のその他の目的や新規な特徴は後述
の実施の形態において明らかにする。
[0005] Other objects and novel features of the present invention will be clarified in embodiments described later.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に、本発明の電子部品実装方法は、搭載ヘッドに保持さ
れた電子部品を下方から観察する第1の観察装置と、搭
載ステージに保持された基板を上方から観察する第2の
観察装置とを用い、前記搭載ステージに対して相対移動
する前記搭載ヘッドに保持された電子部品を、前記搭載
ステージに保持された基板上の実装目標位置に搭載する
電子品実装方法であって、前記第1及び第2の観察装置
の相対位置を認識するために前記第1及び第2の観察装
置に共通の観察基準を前記搭載ステージに設け、該観察
基準を前記第1及び第2の観察装置でそれぞれ観察する
ことを特徴としている。
In order to achieve the above object, an electronic component mounting method according to the present invention comprises a first observation device for observing an electronic component held by a mounting head from below, and a holding device mounted on a mounting stage. by using a second observation apparatus for observing from above the substrate, the electronic component held by the mounting head moves relative to the mounting stage, the mounting
An electronic component mounting method for mounting at a mounting target position on a substrate held by a stage , wherein the electronic component mounting method is common to the first and second observation devices in order to recognize a relative position of the first and second observation devices. Is provided on the mounting stage, and the observation reference is observed by the first and second observation devices, respectively.

【0007】また、上記電子部品実装方法において、前
記第1及び第2の観察装置で前記観察基準を観察するこ
とによる前記第1及び第2の観察装置の相対位置の認識
を、電子部品を前記基板上に1個又は複数個搭載する毎
に行う構成、あるいは、一定時間毎に行う構成としても
よい。
Further, in the electronic component mounting method, the recognition of the relative position of the first and second observation devices by observing the observation reference with the first and second observation devices includes the step of: A configuration in which one or a plurality of components are mounted on the substrate, or a configuration in which the configuration is performed at regular intervals may be employed.

【0008】本発明の電子部品実装装置は、搭載ステー
ジと、該搭載ステージに対して相対移動する搭載ヘッド
と、該搭載ヘッドに保持された電子部品を下方から観察
する第1の観察装置と、搭載ステージ上に保持された基
板上の実装目標位置を上方から観察する第2の観察装置
と、前記第1及び第2の観察装置の相対位置を認識する
ために前記第1及び第2の観察装置に共通の観察基準と
備え、 前記観察基準が前記搭載ステージに設けられて
いることを特徴としている。
An electronic component mounting apparatus according to the present invention includes a mounting stage, a mounting head that moves relative to the mounting stage, a first observation device that observes an electronic component held by the mounting head from below, A second observation device for observing a mounting target position on a substrate held on a mounting stage from above, and the first and second observations for recognizing a relative position of the first and second observation devices. device and a common observation reference, the observation criteria provided in the mounting stage
It is characterized by having.

【0009】[0009]

【発明の実施の形態】以下、本発明に係る電子部品実装
方法及び装置の実施の形態を図面に従って説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of an electronic component mounting method and apparatus according to the present invention will be described below with reference to the drawings.

【0010】図1は、搭載ヘッド1で保持された電子部
品2を、搭載ステージ3で位置決め保持された基板上に
実装する場合の実施の形態を示す。前記搭載ステージ3
は基板を位置決め載置したテーブルを移動させる構造で
あって、テーブル移動装置を構成するものである。搭載
ヘッド1と搭載ステージ3とは相対移動自在であり、こ
こでは、搭載ステージ3の駆動軸を紙面に垂直なX軸
(図示せず)(搭載ステージ3はX軸方向に移動自
在)、搭載ヘッド1の駆動軸をY軸(搭載ヘッド1は
軸方向に移動自在)としている。
FIG. 1 shows an embodiment in which an electronic component 2 held by a mounting head 1 is mounted on a substrate positioned and held by a mounting stage 3. The mounting stage 3
Is a structure for moving a table on which a substrate is positioned and mounted, and constitutes a table moving device. The mounting head 1 and the mounting stage 3 can move relative to each other. Here, the driving axis of the mounting stage 3 is set to the X-axis perpendicular to the paper surface.
(Not shown) (the mounting stage 3 is movable in the X-axis direction), and the driving axis of the mounting head 1 is the Y-axis (the mounting head 1 is the Y-axis).
(Movable in the axial direction).

【0011】電子部品2を計測する為の第1の観察装置
(例えばCCDカメラ等)4は固定とし、搭載ヘッド1
に吸着保持された電子部品2を下方から撮像できる位置
に設置する。
A first observation device (for example, a CCD camera or the like) 4 for measuring the electronic component 2 is fixed, and the mounting head 1
The electronic component 2 sucked and held at the position is set at a position where an image can be taken from below.

【0012】また、搭載ヘッド1には、基板上の電子部
品2を実装しようとする目標位置(以下、実装目標位置
という)を計測する為の第2の観察装置(例えばCCD
カメラ等)5を搭載ノズル1a(搭載ヘッド1が電子部
品を吸着するために有している)の移動線上に設置し、
観察装置5が搭載ヘッド1と一体となって移動する構成
とする。前記基板上の実装目標位置は、例えば基板上に
付されたIC等の位置決めマーク、電子部品端子が接続
される電極パターン等で規定されるものである。
The mounting head 1 has a second observation device (for example, a CCD) for measuring a target position where the electronic component 2 on the substrate is to be mounted (hereinafter referred to as a mounting target position).
Camera 5) on the movement line of the mounting nozzle 1a (the mounting head 1 has for picking up electronic components),
The observation device 5 is configured to move integrally with the mounting head 1. The mounting target position on the substrate is defined by, for example, a positioning mark of an IC or the like provided on the substrate, an electrode pattern to which an electronic component terminal is connected, and the like.

【0013】前記搭載ステージ3には2台の観察装置の
位置関係を調べる為の観察基準マーク6を設置してお
く。この時、観察基準マーク6は第1及び第2の観察装
置4,5の両方で全く同じ条件で観察できることが重要
である。本実施の形態では、観察基準マーク6をX軸方
向に移動自在な搭載ステージ3上に設置し、搭載ステー
ジ3の駆動軸を動作することで第2の観察装置5での撮
像を可能とし、また観察基準マーク6が、固定配置の第
1の観察装置4の観察位置を通過する設計にすることで
2台の観察装置4,5の相対位置を計測することを可能
にしている。
An observation reference mark 6 for examining the positional relationship between two observation devices is provided on the mounting stage 3. At this time, it is important that the observation reference mark 6 can be observed under exactly the same conditions in both the first and second observation devices 4 and 5. In the present embodiment, the observation reference mark 6 is oriented in the X-axis direction.
Installed on the stage 3 that can move
By operating the drive shaft of the jaws 3 , the imaging by the second observation device 5 is enabled, and the observation reference mark 6 is designed to pass through the observation position of the fixed observation first observation device 4. It is possible to measure the relative positions of the two observation devices 4 and 5.

【0014】なお、観察基準マーク6は、例えば、薄板
に微小貫通穴をあけたもの、透明ガラス板に所定パター
ンを設けたもの等である。
The observation reference mark 6 is, for example, a thin plate having a small through hole or a transparent glass plate having a predetermined pattern.

【0015】この実施の形態において、基板に装着すべ
き電子部品2を搭載ヘッド1で吸着、保持して搭載ステ
ージ3上に位置決め載置された基板の実装目標位置に装
着する場合、まず第1及び第2の観察装置4,5で共通
の観察基準マーク6を観測し(撮像し)、第1及び第2
の観察装置4,5の相互の位置関係を認識する。そし
て、搭載ヘッド1に保持された電子部品2の位置と、搭
載ステージ3に保持された基板上の実装目標位置とを前
記第1及び第2の観察装置4,5の観察結果に基づく位
置情報をもとに補正して位置決めし、前記基板上の実装
目標位置に搭載ヘッド1により電子部品2の装着を実行
する。
In this embodiment, when the electronic component 2 to be mounted on the substrate is sucked and held by the mounting head 1 and mounted on the mounting target position of the substrate positioned and mounted on the mounting stage 3, first, Then, the common observation reference mark 6 is observed (imaged) by the second observation devices 4 and 5, and the first and second observation
The mutual positional relationship between the observation devices 4 and 5 is recognized. Then, the position of the electronic component 2 held by the mounting head 1 and the mounting target position on the substrate held by the mounting stage 3 are represented by positional information based on the observation results of the first and second observation devices 4 and 5. The electronic component 2 is mounted by the mounting head 1 at the mounting target position on the substrate.

【0016】このように、一回の電子部品装着動作毎に
観察基準マーク6を第1及び第2の観察装置4,5で観
察し、観察装置間の相対位置をその都度更新して補正計
算を行う。これにより、熱、振動等、様々な外乱によっ
て発生する観察装置の位置ズレの影響をキャンセルし、
2台の観察装置に起因する実装システムの問題点を解消
している。
As described above, the observation reference mark 6 is observed by the first and second observation devices 4 and 5 each time one electronic component mounting operation is performed, and the relative position between the observation devices is updated each time to perform the correction calculation. I do. This cancels out the influence of the position shift of the observation device caused by various disturbances such as heat and vibration,
This solves the problem of the mounting system caused by two observation devices.

【0017】なお、前記第1及び第2の観察装置4,5
で観察基準マーク6を観察することによる前記第1及び
第2の観察装置4,5の相対位置の認識を、電子部品2
を前記基板上に1個装着する毎に行うことが最も望まし
いが、上記動作による第1及び第2の観察装置4,5の
相対位置の認識を複数個装着する毎に、あるいは一定時
間毎に行うようにしてもよい。
The first and second observation devices 4 and 5
The recognition of the relative position of the first and second observation devices 4 and 5 by observing the observation reference mark 6 by the electronic component 2
Is most preferably performed each time one of the first and second observation devices 4 and 5 is mounted on the substrate, or each time a plurality of the relative positions of the first and second observation devices 4 and 5 are mounted, or every fixed time. It may be performed.

【0018】この実施の形態によれば、次の通りの効果
を得ることができる。
According to this embodiment, the following effects can be obtained.

【0019】(1) 1つの観察基準マーク6を下側及び
上側の観察装置4,5で同時、又は個々に測定すること
で、2台の観察装置4,5の位置関係を正確に計測でき
る。観察基準マーク6は2台の観察装置4,5で全く同
じ条件で観察できることが重要である。
(1) By measuring one observation reference mark 6 simultaneously or individually with the lower and upper observation devices 4 and 5, the positional relationship between the two observation devices 4 and 5 can be accurately measured. . It is important that the observation reference mark 6 can be observed by the two observation devices 4 and 5 under exactly the same conditions.

【0020】(2) 上記の観察基準マーク6の測定は、
装着動作1回又は複数回毎、又は一定の時間間隔毎に自
動計測すればよく、以上の手段により、熱、振動等によ
り発生する観察装置4,5や搭載ヘッド1等の位置変化
をキャンセルし、位置合わせの調整を不要とすることが
できる。
(2) The measurement of the observation reference mark 6 is performed by
The measurement may be automatically performed once or plural times, or at fixed time intervals. The above means cancels the position change of the observation devices 4 and 5 and the mounting head 1 caused by heat, vibration, and the like. In addition, it is not necessary to adjust the alignment.

【0021】[0021]

【0022】以上本発明の実施の形態について説明して
きたが、本発明はこれに限定されることなく請求項の記
載の範囲内において各種の変形、変更が可能なことは当
業者には自明であろう。
Although the embodiments of the present invention have been described above, it is obvious to those skilled in the art that the present invention is not limited to the embodiments and that various modifications and changes can be made within the scope of the claims. There will be.

【0023】[0023]

【発明の効果】以上説明したように、本発明によれば、
搭載ステージに設けられた1つの観察基準を上下の観察
装置で同時、又は個々に測定することで、2台の観察装
置の位置関係を正確に計測できる。そして、前記観察基
準の測定は、装着動作1回毎又は複数回毎、あるいは一
定の時間間隔毎に自動計測すればよく、これにより熱、
振動等により発生する観察装置や搭載ヘッド等の位置変
化をキャンセルし、位置合わせの調整を不要とすること
ができ、さらに、装置構成上2台の観察装置が必要とな
る場合でも、1台の観察装置による構成と同様の位置決
めの精度が期待できる。
As described above, according to the present invention,
By simultaneously or individually measuring one observation reference provided on the mounting stage with the upper and lower observation devices, the positional relationship between the two observation devices can be accurately measured. Then, the measurement of the observation standard may be automatically measured every one or plural mounting operations, or at regular time intervals, whereby heat,
Changes in the position of the observation device and the mounting head caused by vibrations and the like can be canceled, and adjustment of alignment is not required. Further, even when two observation devices are required due to the device configuration, one observation device can be used. The same positioning accuracy as the configuration by the observation device can be expected.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る電子部品実装方法及び装置の実施
の形態を示す構成図である。
FIG. 1 is a configuration diagram showing an embodiment of an electronic component mounting method and apparatus according to the present invention.

【符号の説明】[Explanation of symbols]

1 搭載ヘッド 2 電子部品 3 搭載ステージ 4,5 観察装置 6 観察基準マーク DESCRIPTION OF SYMBOLS 1 Mounting head 2 Electronic component 3 Mounting stage 4,5 Observation device 6 Observation reference mark

───────────────────────────────────────────────────── フロントページの続き (72)発明者 中山 均 東京都中央区日本橋一丁目13番1号ティ ーディーケイ株式会社内 (56)参考文献 特開 平11−40996(JP,A) (58)調査した分野(Int.Cl.7,DB名) H05K 13/04 H05K 13/08 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Hitoshi Nakayama 1-13-1 Nihonbashi, Chuo-ku, Tokyo Inside TDK Corporation (56) References JP-A-11-40996 (JP, A) (58) Survey Field (Int.Cl. 7 , DB name) H05K 13/04 H05K 13/08

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 搭載ヘッドに保持された電子部品を下方
から観察する第1の観察装置と、搭載ステージに保持さ
れた基板を上方から観察する第2の観察装置とを用い、
前記搭載ステージに対して相対移動する前記搭載ヘッド
に保持された電子部品を、前記搭載ステージに保持され
た基板上の実装目標位置に搭載する電子品実装方法であ
って、 前記第1及び第2の観察装置の相対位置を認識するため
に前記第1及び第2の観察装置に共通の観察基準を前記
搭載ステージに設け、該観察基準を前記第1及び第2の
観察装置でそれぞれ観察することを特徴とする電子部品
実装方法。
A first observation device for observing the electronic component held by the mounting head from below, and a second observation device for observing the substrate held by the mounting stage from above,
An electronic component held by the mounting head that moves relative to the mounting stage is held by the mounting stage.
An electronic component mounting method for mounting at a mounting target position on a substrate , wherein an observation standard common to the first and second observation devices is used in order to recognize a relative position of the first and second observation devices. Said
An electronic component mounting method provided on a mounting stage, wherein the observation reference is observed by the first and second observation devices, respectively.
【請求項2】 前記第1及び第2の観察装置で前記観察
基準を観察することによる前記第1及び第2の観察装置
の相対位置の認識を、電子部品を前記基板上に1個又は
複数個搭載する毎に行う請求項1記載の電子部品実装方
法。
2. Recognition of the relative position of the first and second observation devices by observing the observation reference with the first and second observation devices, by using one or more electronic components on the substrate. The electronic component mounting method according to claim 1, wherein the method is performed each time a component is mounted.
【請求項3】 前記第1及び第2の観察装置で前記観察
基準を観察することによる前記第1及び第2の観察装置
の相対位置の認識を、一定時間毎に行う請求項1記載の
電子部品実装方法。
3. The electronic device according to claim 1, wherein the relative positions of the first and second observation devices are recognized at regular intervals by observing the observation reference with the first and second observation devices. Component mounting method.
【請求項4】 搭載ステージと、該搭載ステージに対し
て相対移動する搭載ヘッドと、該搭載ヘッドに保持され
た電子部品を下方から観察する第1の観察装置と、搭載
ステージ上に保持された基板上の実装目標位置を上方か
ら観察する第2の観察装置と、前記第1及び第2の観察
装置の相対位置を認識するために前記第1及び第2の観
察装置に共通の観察基準とを備え、 前記観察基準が前記搭載ステージに設けられている こと
を特徴とする電子部品実装装置。
4. A mounting stage, a mounting head relatively moving with respect to the mounting stage, a first observation device for observing an electronic component held by the mounting head from below, and held on the mounting stage. A second observation device for observing the mounting target position on the substrate from above, and an observation standard common to the first and second observation devices for recognizing a relative position between the first and second observation devices. the provided, the electronic component mounting apparatus characterized by the observation reference is provided on the mounting stage.
JP36295797A 1997-12-13 1997-12-13 Electronic component mounting method and device Expired - Lifetime JP3299160B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP36295797A JP3299160B2 (en) 1997-12-13 1997-12-13 Electronic component mounting method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP36295797A JP3299160B2 (en) 1997-12-13 1997-12-13 Electronic component mounting method and device

Publications (2)

Publication Number Publication Date
JPH11177300A JPH11177300A (en) 1999-07-02
JP3299160B2 true JP3299160B2 (en) 2002-07-08

Family

ID=18478163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP36295797A Expired - Lifetime JP3299160B2 (en) 1997-12-13 1997-12-13 Electronic component mounting method and device

Country Status (1)

Country Link
JP (1) JP3299160B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3569820B2 (en) * 2000-04-26 2004-09-29 澁谷工業株式会社 Alignment device and alignment method
JP4710432B2 (en) * 2005-06-22 2011-06-29 ソニー株式会社 Component mounting apparatus and component mounting method
JP5471131B2 (en) * 2009-07-31 2014-04-16 日本電気株式会社 Electronic component mounting apparatus and camera position correction method in electronic component mounting apparatus
JP5365618B2 (en) * 2010-12-24 2013-12-11 ソニー株式会社 Position adjustment apparatus and position adjustment method
CN113950394B (en) * 2019-09-10 2023-10-20 纳卢克斯株式会社 Assembling device and adjusting method thereof

Also Published As

Publication number Publication date
JPH11177300A (en) 1999-07-02

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